JP2018128300A - Gas sensor array and gas leak detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gas sensor array and a gas leak detector, capable of detecting gas leak accurately in a short time.SOLUTION: A gas sensor array 3 includes a plurality of gas sensors 32, a filter fitting part 33A in which a distance from a workpiece can be changed corresponding to a distance between the gas sensor 32 and the workpiece, a distance sensor for detecting a distance between the filter fitting part 33A and the workpiece, and a piezoelectric actuator 34 for changing a distance from the workpiece of the filter fitting part 33A on the basis of a detection result from the distance sensor.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a gas sensor array and a gas leak detection device.

  Conventionally, there is only one gas sensor that detects gas in a device that fills an object (detection target) with a gas such as hydrogen or helium and determines whether there is a leak based on detection of the leaked gas by a gas sensor. There is something to prepare. Patent Document 1 discloses an apparatus including a gas sensor array in which a plurality of gas sensors are arranged on a two-dimensional plane in order to measure a gas concentration. In this apparatus, concentration changes in odor and gas flow are measured at multiple points using a gas sensor array.

JP 2000-171424 A

  When the gas sensor array of Patent Document 1 is used for detection of gas leaks from contained items, gas leaks can be detected by a plurality of gas sensors. Is possible. However, if the relative relationship such as distance is different between the container and the plurality of gas sensors, the detection accuracy may be lowered.

  The problem to be solved by the present invention is to provide a gas sensor array and a gas leak detection device that can detect a gas leak with high accuracy in a short time.

  In order to solve the above problem, one aspect of the present invention is a gas sensor array that detects the outflow of gas in a detection target, and corresponds to each of the plurality of gas sensors, and the corresponding gas sensor. A gas introduction unit in which a physical state when the outflow of the gas is detected by the gas sensor is made variable according to a relative relationship with the detection object, and a physical state detection for detecting a physical state of the gas introduction unit A gas sensor array comprising: a sensor; and an actuator for displacing the position of the gas introduction unit with respect to the detection object based on a detection result of the physical state detection sensor.

  According to another aspect of the present invention, there is provided a gas leak comprising: the gas sensor array; and a detection unit that detects a gas leak in the detection target object based on a gas amount detected by the gas sensor array. It is a detection device.

  According to the gas sensor array and the gas leak detection device of the present invention, gas leak can be detected with high accuracy in a short time.

It is a perspective view of the gas leak detection apparatus concerning a 1st embodiment. It is a block diagram of the gas leak detection apparatus which concerns on 1st Embodiment. It is sectional drawing of the probe and gas sensor array which concern on 1st Embodiment. It is sectional drawing of the gas sensor module which concerns on 1st Embodiment. It is a figure which shows the state which detects gas with the gas sensor array which concerns on 1st Embodiment. It is a perspective view of the gas leak detection apparatus which concerns on 2nd Embodiment. It is a block diagram of the gas leak detection apparatus which concerns on 2nd Embodiment. It is sectional drawing of the probe and gas sensor array which concern on 2nd Embodiment. It is sectional drawing of the gas sensor module which concerns on 2nd Embodiment. It is a figure which shows the state which detects gas with the gas sensor array which concerns on 2nd Embodiment. It is sectional drawing of the gas leak detection apparatus which concerns on 3rd Embodiment. It is an enlarged view of the electromagnetic actuator part of the gas leak detection apparatus concerning 3rd Embodiment. It is a figure which shows the state which detects gas with the gas sensor array which concerns on 3rd Embodiment.

  Hereinafter, embodiments of a gas sensor array and a gas leak detection device to which the present invention is applied will be described. In the following first to third embodiments, an example in which the gas to be detected is a mixed gas containing hydrogen will be described. The gas to be detected may be a gas other than a mixed gas containing hydrogen. Moreover, in each embodiment, the same code | symbol is attached | subjected about a common element, a member, etc., and the description may be abbreviate | omitted or simplified.

[First Embodiment]
A first embodiment of the present invention will be described. As shown in FIG. 1, the gas leak detection apparatus 1 according to this embodiment includes a probe 2 and a gas sensor array 3. A controller 11 is connected to the probe 2 via a shaft portion 12. The controller 11 has a substantially rectangular parallelepiped shape and has a size that can be gripped by the user. The user can hold the controller 11 and perform gas leak detection.

  As shown in FIG. 2, the controller 11 includes a control circuit 13, a suction pump 14, a flow meter 15, and a power supply unit 16. The control circuit 13 includes, for example, an arithmetic device such as a CPU and a storage device such as a ROM and a RAM, and is mounted on a control circuit board. The control circuit 13 is connected to the gas sensor array 3, the suction pump 14, the flow meter 15, and the power supply unit 16 via a multicore cable 46 and the like. Further, the outside of the controller 11 and the flow meter 15, the suction pump 14, and the inside of the probe 2 are connected in a state where air can be circulated through the pipe 47.

  The control circuit 13 operates the suction pump 14 or detects a gas leak based on information transmitted from the gas sensor array 3. The suction pump 14 sucks air in the probe 2 based on the operation signal of the control circuit 13. The flow meter 15 measures the flow rate of air flowing in the pipe 47. The power supply unit 16 supplies power to the control circuit 13, the gas sensor array 3, the suction pump 14, and the flow meter 15.

  As shown in FIG. 1, the controller 11 is provided with an input / output interface 17. The input / output interface 17 is composed of, for example, a liquid crystal with a touch panel. When the input / output interface 17 is operated, operation information corresponding to the operation is transmitted to the control circuit 13. The control circuit 13 activates the suction pump 14 or heats a heater 37 (see FIG. 4), which will be described later, based on the transmitted operation information. Further, the control circuit 13 transmits the gas leak information when the gas leak is detected to the input / output interface 17. The input / output interface 17 displays an alarm or the like corresponding to the transmitted gas leak information.

  As shown in FIG. 3, the probe 2 includes a probe housing 21. The probe housing 21 is provided with an attachment portion 21A, and the shaft portion 12 shown in FIG. 2 is attached to the attachment portion 21A. The inner side of the probe housing 21 communicates with the suction pump 14 via a pipe 47, and the pipe 47 is disposed on the inner side of the shaft portion 12. A sealing material 41 is provided on the attachment portion 21A. With this sealing material 41, the inside of the probe housing 21 is sealed against the inside of the shaft portion 12.

  A gas sensor array 3 is provided inside the probe housing 21. The gas sensor array 3 includes a base substrate 5 as a base portion, and a plurality (five in the present embodiment) of gas sensor modules 4 mounted on the base substrate 5. The plurality of gas sensor modules 4 are arranged in a linear direction to constitute a gas sensor array 3. Although not shown in FIG. 3, at least one of the base substrate 5 and the support member that supports the base substrate 5 is provided with a vent hole.

  As shown in FIG. 4, a connecting portion 23 is provided at a position on the base substrate 5 where the gas sensor module 4 is mounted. The connection part 23 includes an electrode 23A and a conductive material 23B. Further, a surface wiring 24 is provided on the surface of the base substrate 5 and below the connection portion 23, and a back surface wiring 25 is provided on the back surface of the base substrate 5. The connecting portion 23 and the surface wiring 24 are directly electrically connected. The front surface wiring 24 and the back surface wiring 25 are electrically connected through a substrate through wiring (not shown). Further, although not shown, the back surface wiring 25 is electrically connected to the wiring of the multi-core cable 46.

  The gas sensor module 4 includes a package 31, a gas sensor 32, a suction pipe 33, a piezoelectric actuator 34, and an operating shaft 35. The package 31 includes a package body 31A and a package lid 31B. The package body 31A is open at the top, and a gas sensor 32 is mounted on the package body 31A. The gas sensor 32 is accommodated in the package 31 and is fixed to the bottom surface of the package main body 31 </ b> A by the die bond material 26. A plurality of gas sensors 32 are arranged on the base substrate 5. That is, the base substrate 5 supports a plurality of gas sensors 32 arranged.

  The gas sensor 32 is a catalytic combustion type gas sensor, and includes a substrate 36, a heater 37, a thermoelectric element 38, and a catalyst 40. The heater 37 and the thermoelectric element 38 are mounted on the substrate 36 and are electrically connected to the multi-core cable 46 through a substrate through wiring, a wire or the like (not shown). The hot junction of the thermoelectric element 38 in which the N-type semiconductor and the P-type semiconductor are connected in series is disposed in the vicinity of the catalyst 40, and the cold junction is disposed on the substrate 36.

  The heater 37 is heated by the drive current supplied from the control circuit 13 and heats the catalyst 40. If hydrogen and oxygen are present in the vicinity of the catalyst 40, hydrogen and oxygen react with each other on the surface of the catalyst 40 to generate water, and heat of reaction is generated. This reaction heat raises the temperature of the catalyst 40. A thermoelectric element 38 having a hot junction in the vicinity of the catalyst 40 and a cold junction on the substrate 36 converts the temperature difference between the temperature of the catalyst 40 and the temperature of the substrate 36 into a voltage and outputs it as a control circuit. 13 to send. The control circuit 13 is a detection unit that detects a gas leak. The control circuit 13 measures the temperature of the catalyst 40 based on the transmitted output voltage, and the gas concentration (gas amount) from the measured temperature of the catalyst 40. Is detected, and the presence or absence of gas leakage is determined.

  The package lid 31B closes the opening above the package body 31A. An exhaust port 31C is formed on the side of the package lid 31B, and air in the package 31 is discharged to the outside (inside the probe housing 21). A suction pipe connection portion 31D is formed on the upper portion of the package lid 31B, and a suction pipe 33 is connected to the suction pipe connection portion 31D.

  A filter mounting portion 33 </ b> A is provided at the tip of the suction pipe 33. The suction pipe 33 is disposed between the filter attachment portion 33 </ b> A and the gas sensor 32. The suction pipe 33 is a flexible pipe having flexibility and stretchability, and can be stretched in the length direction. The filter attachment part 33A of the suction pipe 33 is a gas introduction part, and the position of the filter attachment part 33A in the suction pipe 33 in the length direction can be displaced. Further, the direction of the filter mounting portion 33A of the suction pipe 33 can be changed. The suction pipe 33 and the filter attachment portion 33 </ b> A of the suction pipe 33 correspond to each of the plurality of gas sensors 32.

  One end of an operating shaft 35 is attached to the piezoelectric actuator 34. The piezoelectric actuator 34 includes piezoelectric ceramics, and is an actuator that operates the operating shaft 35 by minute mechanical vibration or expansion / contraction of the piezoelectric ceramics. The piezoelectric actuator 34 is attached to the probe housing 21, and the other end of the operating shaft 35 is fixed to the filter attachment portion 33A. By operating the operating shaft 35 by the piezoelectric actuator 34, the distance between the filter mounting portion 33A and the probe housing 21 can be adjusted. Further, when the relative position of the probe housing 21 with respect to the workpiece W1 is fixed, the piezoelectric actuator 34 operates the operating shaft 35 to displace the filter mounting portion 33A with respect to the workpiece W1. In the present embodiment, the distance of the filter mounting portion 33A from the workpiece W1 corresponds to the physical state of the gas introduction portion.

  The suction pipe 33 communicates with the inside of the package 31, and air sucked from the suction pipe 33 is introduced into the package 31. A gas permeable filter 42 is provided in the filter attachment portion 33 </ b> A of the suction pipe 33. The gas permeable filter 42 can pass a gas to be detected, for example, hydrogen, and can capture and remove dust or dust. Further, the gas permeable filter 42 is a sponge-like porous material and is a buffer member having buffer properties. 33 A of filter attachment parts contact | abut directly or through the gas-permeable filter 42 with respect to a detection target, when performing a gas leak detection.

  Further, a seal material 43 is interposed between the inner surface of the probe housing 21 and the package lid 31B. The probe housing 21 is kept airtight inside and sealed off from the outside air by the seal material 41 provided in the mounting portion 21A and the seal material 43 interposed between the inner surface of the probe housing 21 and the package lid 31B. ing.

  As shown in FIG. 1, a distance sensor 6 corresponding to a physical state detection sensor is provided around the gas sensor module 4 in the probe 2. The probe 2 is provided with the same number of distance sensors 6 as the gas sensor modules 4, and the gas sensor modules 4 and the distance sensors 6 are provided in pairs. The distance sensor 6 includes a light emitting element 61 and a light receiving element 62. The light emitting element 61 projects light onto the workpiece W1. The light receiving element 62 receives light emitted from the light emitting element 61 and reflected by the workpiece W1. In the distance sensor 6, the distance from the workpiece W <b> 1 of the distance sensor 6 in the corresponding gas sensor module 4 is detected by the light receiving element 62 based on the light amount of each pixel of the light receiving element 61. Further, since the distance between the distance sensor 6 and the filter attachment portion 33A is determined by the operation amount of the piezoelectric actuator 34, the distance sensor 6 substantially detects the distance of the filter attachment portion 33A from the workpiece W1.

  The piezoelectric actuators 34 of each distance sensor 6 and each gas sensor module 4 are connected to the control circuit 13 via a multicore cable 46. The control circuit 13 acquires distance information between the corresponding gas sensor module 4 and the workpiece W1 as a detection result when performing gas leak detection. Based on the acquired distance information, the control circuit 13 operates the operating shaft 35 by the piezoelectric actuator 34 to move the filter mounting portion 33A relative to the workpiece W1, and the position of the filter mounting portion 33A is displaced relative to the workpiece W1. Let The filter mounting portion 33A has a variable distance (physical state) from the workpiece W1 when the gas sensor 32 detects the outflow of gas according to the distance (relative relationship) between the corresponding gas sensor 32 and the workpiece W1. Yes. Since the gas detection accuracy by the gas sensor 32 is affected by the distance of the filter mounting portion 33A from the workpiece W1, in this embodiment, the distance of the filter mounting portion 33A from the workpiece W1 is “the relationship between the gas sensor and the detection object. It corresponds to “relative relationship”.

  Next, a gas leak detection procedure by the gas leak detection apparatus 1 according to this embodiment will be described. In the gas leak detection apparatus 1 according to this embodiment, for example, a procedure for detecting hydrogen leaking from the workpiece W1 shown in FIG. 2 will be described. The tracer gas G is supplied from the cylinder B1 to the workpiece W1 that is a detection target of gas leakage. The components of the tracer gas G are 3.9% hydrogen and 96.1% air. Moreover, the shape of the workpiece | work W1 is a substantially egg shape, and has comprised the curved surface shape from which the surface becomes convex entirely.

  The tracer gas G supplied from the cylinder B1 is filled in the workpiece W1. Here, when the work W1 is damaged or the like and a minute hole is opened, the tracer gas G flows out from the hole. The gas leak detection device 1 detects the outflow of the tracer gas G from the work W1 and makes it possible to determine the gas leak position of the tracer gas G in the work W1.

  When gas leak detection of the workpiece W1 is performed by the gas leak detection device 1, the plurality of gas sensor modules 4 are arranged around the workpiece W1 so that the filter mounting portion 33A faces the workpiece W1. At this time, the distance from the work W1 of the filter mounting portion 33A in the gas sensor module 4 is made constant in a state where the gas sensor module 4 is separated from the work W1. The procedure for making the distance of the filter mounting portion 33A from the work W1 constant will be described later. Subsequently, the input / output interface 17 shown in FIG. 1 is operated to operate the suction pump 14 and the heater 37. When the suction pump 14 is operated, the inside of the pipe 47 is decompressed by the suction force of the suction pump 14, and the air in the package 31 is sucked. The package 31 is hermetically sealed by the sealing materials 41 and 43, and the exhaust port 31C is formed in the package lid 31B. Therefore, the suction force of the suction pump 14 acts in the suction pipe 33. The air around the filter mounting portion 33 </ b> A of the suction pipe 33 flows into the suction pipe 33 by the suction force acting on the suction pipe 33. When the tracer gas G leaked from the workpiece W <b> 1 is included here, the tracer gas G is introduced into the suction pipe 33.

  Then, air in the vicinity of the filter attachment portion 33 </ b> A of the suction pipe 33 is sucked into the suction pipe 33 through the gas permeable filter 42. At this time, gas leakage has occurred from the work W1, and if the suction pipe 33 of the gas sensor array 3 is disposed in the vicinity of the location where the gas leakage has occurred, the work W1 has leaked as shown in FIG. The tracer gas G is sucked into the suction pipe 33.

As shown in FIG. 4, the tracer gas G sucked into the suction pipe 33 flows into the package 31. A catalyst 40 in the gas sensor 32 is provided in the package 31, and the catalyst 40 is activated by the heating of the heater 37, so that oxygen (O ₂ ) contained in the air in the package 31 and the tracer gas G Oxygen (O ₂ ) and hydrogen (H ₂ ) contained react on the surface of the catalyst 40 to generate water (H ₂ O), and heat of reaction is generated. In order to prevent a decrease in the reaction on the surface of the catalyst 40 due to condensation, it is preferable to heat the catalyst 40 with the heater 37 at a temperature higher than 100 ° C.

  When reaction heat is generated by the reaction between hydrogen and oxygen, thermoelectric conversion is performed by the thermoelectric element 38, and the output voltage of the thermoelectric element 38 increases. When the amount of leakage of the tracer gas G is large, the reaction between hydrogen and oxygen on the surface of the catalyst 40 becomes active, and the temperature rise of the catalyst 40 increases, so that the output voltage of the thermoelectric element 38 increases. For this reason, the control circuit 13 detects the concentration of the tracer gas G (hydrogen) based on the output voltage of the thermoelectric element 38 to detect gas leakage. Further, it can be seen that when the output voltage of the thermoelectric element 38 does not increase and is in a steady state, no gas leakage occurs. Then, for example, when the output voltage of the thermoelectric element 38 exceeds a predetermined specified value, it can be determined that the work W1 has a problem of gas leakage. Here, the specified value may be the temperature of the catalyst 40 calculated from the output voltage instead of the output voltage.

  When detecting gas leakage as described above, adjustment is made so that the distance from the workpiece W1 of the filter mounting portion 33A in each gas sensor module 4 is constant. Therefore, the distance sensor 6 provided around the gas sensor module 4 detects the distance from the workpiece W1 of the filter mounting portion 33A in each gas sensor module 4 to the workpiece W1. Here, when the distance from the workpiece W1 of the filter mounting portion 33A differs among the plurality of gas sensors 32, the operating shaft 35 is operated by the piezoelectric actuator 34 to move the filter mounting portion 33A, and the filter mounting portion 33A. The position is adjusted with respect to the workpiece W1.

  The procedure for making the distance of the filter mounting portion 33A from the workpiece W1 constant is as follows. For example, as shown in FIG. 5, among the plurality of gas sensor modules 4 </ b> A to 4 </ b> E, the distance from the workpiece W <b> 1 of the first gas sensor module 4 </ b> A and the fifth gas sensor module 4 </ b> E located at the end is a second position located on the inside thereof. It is assumed that the gas sensor module 4B and the fourth gas sensor module 4D are longer than the distance from the workpiece W1. Furthermore, it is assumed that the distance from the workpiece W1 of the second gas sensor module 4B and the fourth gas sensor module 4D is longer than the distance from the workpiece W1 of the third gas sensor module 4C located inside thereof.

  In this case, for example, the operating shaft 35 is operated by the piezoelectric actuator 34 in the second gas sensor module 4B to the fourth gas sensor module 4D, and the filter mounting portion 33A of the second gas sensor module 4B to the fourth gas sensor module 4D is moved away from the work W1. Thus, the distances from the filter mounting portions 33A of the first gas sensor module 4A to the fifth gas sensor module 4E and the workpiece W1 are made constant.

  When the gas leak is detected at one place on the workpiece W1, the gas leak detector 1 is moved to a different position on the workpiece W1 to detect the same gas leak. And the movement of the gas leak detection apparatus 1 is repeated a plurality of times, and the same gas leak detection is performed, thereby detecting the gas leak in the entire workpiece W1. The gas leak detection of the workpiece W1 by the gas leak detection device 1 is thus completed.

  The gas leak detection apparatus 1 according to this embodiment includes a plurality of gas sensor modules 4. For this reason, since gas leaks at a plurality of locations of the workpiece W1 can be detected at the same time, gas leaks can be detected in a short time. However, when detecting gas leaks at a plurality of locations of the workpiece W1 at the same time, if the conditions for detection differ among the plurality of gas sensor modules 4, it may not be possible to accurately detect gas leaks. For example, in the plurality of gas sensor modules 4, if the distance between the workpiece W1 and the filter mounting portion 33A of the suction pipe 33 is different, the amount of the tracer gas G introduced into the suction pipe 33 may change. is there. For example, when the distance between the workpiece W1 and the filter mounting portion 33A of the suction pipe 33 is long, the tracer gas G to the suction pipe 33 is shorter than when the distance between the work W1 and the filter mounting portion 33A of the suction pipe 33 is short. The introduction amount is small and the introduction amount of air may be large.

  In this regard, in the gas leak detection apparatus 1 according to the present embodiment, the distance between the workpiece W1 and the gas sensor 32 is detected by the distance sensor 6, and the distance from the workpiece W1 of the filter mounting portion 33A is determined based on the detected distance. The operating shaft 35 is operated by the piezoelectric actuator 34 of each of the gas sensor modules 4A to 4E so as to be constant among the plurality of gas sensor modules 4A to 4E. Since the suction pipe 33 has elasticity, the filter mounting portion 33 </ b> A can be moved by the piezoelectric actuator 34. For this reason, the distance from the workpiece | work W1 of 33 A of filter attachment parts can be made constant among several gas sensor module 4A-4E.

  Therefore, since the conditions for detecting gas leakage can be made constant among the plurality of gas sensor modules 4, the concentration of the leaked gas can be detected with high accuracy. Further, by comparing the output voltage among the plurality of gas sensor modules 4, the gas leak position can be specified with high accuracy. Therefore, in the gas leak detection apparatus according to the present embodiment, the detection of the gas leak position and the concentration of the leaked gas and the detection of the gas leak can be accurately performed in a short time.

  Further, if the position of the filter attachment portion 33A of the suction pipe 33 is displaced, the length of the suction pipe 33 changes, so that the distance between the plurality of gas sensors 32 and the workpiece W1 in the gas sensor array 3 is slightly non-uniform. However, the insides of the plurality of suction pipes 33 and the package 31 are in a vented state, and the internal pressure is uniform. For this reason, since the flow rate of air (and gas) in the vicinity of the gas sensor 32 is substantially constant, the amount of reaction between oxygen and hydrogen is substantially proportional to the amount of hydrogen. Therefore, since the concentration of the tracer gas G (hydrogen) contained in the air can be detected with high accuracy, the gas leakage of the workpiece W1 can be detected with high accuracy.

  Further, in the gas leak detection apparatus 1 according to the present embodiment, air around the filter attachment portion 33 </ b> A of the suction pipe 33 is sucked by the suction pump 14. For this reason, the air around the filter mounting portion 33A of the suction pipe 33 can be efficiently introduced into the suction pipe 33 and further into the gas leak detection device 1, so that the gas leak detection time can be shortened. it can.

  A gas permeable filter 42 is attached to the filter attachment portion 33 </ b> A of the suction pipe 33. For this reason, since dust and the like can be prevented from being mixed while introducing the gas in the suction pipe 33, gas leakage can be detected with high accuracy, and the occurrence of problems in the gas leakage detection device 1 can be suppressed.

  Further, the gas permeable filter 42 provided in the filter attachment portion 33A is a buffer member having a buffer property. For this reason, for example, in order to make the distance between the workpiece W1 and the filter mounting portion 33A constant among the plurality of gas sensor modules 4A to 4E, the filter mounting portion 33A of the suction pipe 33 via the gas permeable filter 42. Even if it is made to contact | abut to the workpiece | work W1, damage to the workpiece | work W1 or the gas leak detection apparatus 1 can be suppressed. Furthermore, since the gas permeable filter 42 has a buffering property, the followability to the shape of the workpiece W1 can be improved when the suction pipe 33 is moved along the surface of the workpiece W1. Therefore, the gas sensor array 3 can be easily moved in a state where the filter attachment portion 33A of the suction pipe 33 is in contact with the workpiece W1. If the structure of the gas permeable filter 42 is designed so that a certain amount of air can be introduced into the suction pipe 33 even if the filter mounting portion 33A is brought into contact with the workpiece W1, hydrogen 5%, nitrogen 95%, etc. It becomes possible to select the mixed gas not containing oxygen as the tracer gas G.

  In the first embodiment, when the gas leakage detection is performed, the gas sensor module 4 is separated from the work W1 in order to keep the distance of the filter mounting portion 33A from the work W1 constant. For this reason, the gas permeable filter 42 attached to the filter attachment portion 33A and the filter attachment portion 33A is separated from the workpiece W1, but the gas permeable filter 42 attached to the filter attachment portion 33A and the filter attachment portion 33A is provided. You may make it be in the state contact | abutted to the workpiece | work W1.

[Second Embodiment]
A second embodiment of the present invention will be described. As shown in FIG. 6, the gas leak detection apparatus 20 according to the present embodiment includes a probe 7 and a gas sensor array 8. A handle 64 is connected to the probe 7, and a controller 65 is electrically connected to the handle 64 via a multicore cable 46. The user can detect the gas leak by holding the handle 64.

  The controller 65 is provided with a first control circuit 66 as shown in FIG. The first control circuit 66 includes, for example, an arithmetic device such as a CPU and a storage device such as a ROM and a RAM, and is mounted on the first control circuit board. The first control circuit 66 is connected to the power supply unit 16, and the power supply unit 16 is provided with an outlet 67. The power supply unit 16 can be charged with electricity obtained from the outlet 67. The power supply unit 16 supplies power to the first control circuit 66. As shown in FIG. 6, the controller 65 is provided with an input / output interface 17.

  The handle 64 is provided with a second control circuit 68 mounted on the control circuit board. The handle 64 is rod-shaped and has a thickness that can be gripped by the user. The second control circuit 68 is connected to the first control circuit 66 and the gas sensor array 8 in the controller 65 via the multicore cable 46.

  As shown in FIG. 8, the probe 7 includes a probe housing 71. The probe housing 71 is formed integrally with the handle 64. The handle 64 has a hollow shape, and the inside of the probe housing 71 and the inside of the handle 64 are communicated so that air can flow (see FIG. 7).

  A gas sensor array 8 is provided inside the probe housing 71. As shown in FIGS. 8 and 9, the gas sensor array 8 is arranged on a base 80, an electromagnetic actuator 81, a pressure sensor 82 corresponding to a physical state detection sensor, a flexible substrate 83, and the base 80. A plurality of elastic bodies 84 and a plurality of gas sensor modules 90 respectively provided on the elastic bodies 84 are provided. The plurality of gas sensor modules 90 are arranged in a plane to form a gas sensor array 8. The electromagnetic actuator 81, the pressure sensor 82, and the elastic body 84 are all provided corresponding to the gas sensor module 90. The gas leak detection device 20 includes the gas sensor module 90, the electromagnetic actuator 81, the pressure sensor 82, and the like. A plurality of elastic bodies 84, 19 in this embodiment, are provided, and these are provided correspondingly.

  The electromagnetic actuator 81 is made of, for example, a voice coil motor, and includes a yoke 85 serving as a stator and a mover 86. The yoke 85 is provided with a magnet 87, and the mover 86 is provided with a coil 88. The yoke 85 is formed with a circular concave portion 85A in plan view and a convex portion 85B disposed at the center of the concave portion 85A, and a magnet 87 is attached along the inner peripheral surface of the concave portion 85A. . The mover 86 includes a plate-like pedestal 86A and leg portions 86B extending downward from the pedestal 86A. The leg portion 86B is disposed so as to surround the convex portion 85B of the yoke 85. The coil 88 is provided outside the leg portion 86 </ b> B of the mover 86. The coil 88 is disposed between the leg portion 86 </ b> B of the mover 86 and the magnet 87 in the recess 85 </ b> A of the yoke 85.

  A current is supplied from the second control circuit 68 to the coil 88 of the electromagnetic actuator 81. When the current supplied from the second control circuit 68 is passed through the coil 88, an electromagnetic force is generated between the coil 88 and the magnet 87. Due to this electromagnetic force, a force acts in the direction in which the mover 86 in the electromagnetic actuator 81 operates. By reversing the direction of the current supplied to the coil 88, the operating direction of the mover 86 is also reversed.

  The pressure sensor 82 is disposed between the electromagnetic actuator 81 and the flexible substrate 83. The pressure sensor 82 has a film shape in which a polymer ferroelectric material such as PVDF resin (polyvinylidene fluoride resin) is sandwiched between upper and lower electrodes, for example. The pressure sensor 82 detects the pressure between the electromagnetic actuator 81 and the flexible substrate 83 when the package 91 and the workpiece W2 are in the pressure transmission state. The pressure transmission state refers to a state in which the objects are in direct contact with each other or are connected via other objects and pressure such as a pressing force can be transmitted. In the present embodiment, the package 91 and the workpiece W2 are brought into contact with each other via a gas permeable filter 72 described later to be in a pressure transmission state.

  A second control circuit 68 is connected to the electromagnetic actuator 81 and the pressure sensor 82. The pressure sensor 82 outputs the detected pressure to the second control circuit 68. The second control circuit 68 obtains the current value of the current supplied to the coil 88 of the electromagnetic actuator 81 based on the pressure output from the pressure sensor 82 and supplies the obtained current value to the coil 88.

  The flexible substrate 83 is a flexible substrate having at least a part of flexibility, and is positioned between the plurality of elastic bodies 84 and the plurality of gas sensor modules 90. Specifically, a flexible substrate 83 is mounted on the plurality of elastic bodies 84, the electromagnetic actuator 81, and the pressure sensor 82, and a plurality of gas sensor modules 90 are mounted on the flexible substrate 83. The flexible substrate 83 only needs to be flexible at least at a portion located between the adjacent pressure sensors 82 (between the gas sensor modules 90). The plurality of elastic bodies 84 are all made of rubber, for example.

  As shown in FIG. 9, a connecting portion 23 is provided at a position where the gas sensor module 90 is mounted on the flexible substrate 83. The connection part 23 has the same configuration as that of the first embodiment. Further, a surface wiring 24 is provided on the surface of the flexible substrate 83 and below the connection portion 23. As shown in FIG. 8, the plurality of surface wirings 24 are electrically connected to a multicore cable 46.

  The gas sensor module 90 includes a package 91 and a gas sensor 94. The package 91 is formed in a box shape and includes a package body 92 and a package lid 93. The package body 92 is open at the top, and a gas sensor 94 is mounted on the package body 92. The gas sensor 94 is fixed to the bottom surface of the package main body 92 by a die bond material 26. The package main body 92 and the package lid 93 have rigidity (non-deformability) that does not deform when the user presses the gas leak detection device 20 against the workpiece W2 or the electromagnetic actuator 81 presses the package 91 against the workpiece W2. Yes. The electromagnetic actuator 81 displaces the package 91 by operating the mover 86.

  The gas sensors 94 are arranged on the flexible substrate 83. The gas sensor 94 is a heat conduction type gas sensor, and includes a substrate 95, a thermoelectric element 96, and a heater 98. The thermoelectric element 96 and the heater 98 are mounted on the substrate 95 and are electrically connected to the multi-core cable 46 through a substrate through wiring, a wire or the like (not shown).

The heater 98 is heated by the drive current supplied from the second control circuit 68. The heat of the heater 98 is taken away by the air introduced into the package 91. The temperature difference between the heater 98 and the substrate 95 is converted into a voltage by the thermoelectric element 96 and output to the first control circuit 66 as an output voltage. For example, the thermal conductivity of hydrogen (H ₂₎ is larger than the atmosphere, the greater the hydrogen (H ₂₎ concentrations in the atmosphere, the greater the amount of heat absorbed from the heater 98, the temperature of the heater 98 is reduced. As a result, when the output of the thermoelectric element 96 when the temperature is high is positive, the output voltage of the thermoelectric element 96 decreases. The first control circuit 66 is a detection unit that performs gas leak detection. The first control circuit 66 determines the presence or absence of gas leak based on the transmitted output voltage.

  The package lid 93 is attached to the opening above the package body 92. The package lid 93 is made of sintered metal, mesh metal, porous ceramic, or the like, and has air permeability. For this reason, the inside of the package 91 is at atmospheric pressure. The package lid 93 serves as a gas introduction part when introducing the gas around the package 91 into the package 91. The package lid 93 is provided in each of a plurality of packages 91 that respectively accommodate a plurality of gas sensors 94.

  The probe 7 includes a gas permeable filter 72 corresponding to a covering member, and the gas permeable filter 72 covers a plurality of gas sensor modules 90 (particularly, the package lid 93). The gas permeable filter 72 has flexibility. The package lid 93 of the package 91 abuts against the detection target directly or through the gas permeable filter 72 when performing gas leak detection.

  Next, a gas leak detection procedure by the gas leak detection device 20 according to the present embodiment will be described. In the present embodiment, gas leak detection of the tracer gas G leaking from the workpiece W2 shown in FIG. 7 will be described. The work W2 has a curved shape in which the entire surface is concave, that is, a drum shape. Tracer gas G having a composition of 5% hydrogen and 95% nitrogen is supplied to work W2 from cylinder B2.

  When gas leak detection of the workpiece W2 is performed by the gas leak detection device 20, a gas permeable filter 72 covering the gas sensor module 90 is brought into contact with the side surface of the workpiece W2 as shown in FIG. The package 91 and the workpiece W2 of the module 90 are set in a pressure transmission state. The distance between the gas sensors 94 of the plurality of gas sensor modules 90 and the workpiece W2 is made constant. A procedure for making the distance between the gas sensors 94 of the plurality of gas sensor modules 90 and the workpiece W2 constant will be described later. Air around the package 91 is introduced into the package 91 arranged along the surface of the workpiece W2 and through the gas permeable filter 72. At this time, if a gas leak has occurred from the workpiece W2 and the package 91 is disposed in the vicinity of the location where the gas leak has occurred, the tracer gas G leaking from the workpiece W2 is packaged as shown in FIG. 91. When the tracer gas G is introduced into the package 91, the gas sensor 94 (see FIG. 9) detects the tracer gas G and detects a gas leak.

  When detecting gas leakage as described above, the distance between the gas sensor 94 of each gas sensor module 90 and the workpiece W2 is adjusted to be constant. Therefore, the pressure sensor 82 provided in each gas sensor module 90 detects the pressure between the package 91 and the workpiece W2 in each gas sensor module 90. When the packages 91 of the plurality of gas sensor modules 90 and the workpiece W2 are in the pressure transmission state, if the distance between the gas sensor 94 of each gas sensor module 90 and the workpiece W2 is different, the pressure sensor 82 corresponding to each gas sensor module 90 detects it. Different pressures are applied. When the pressure detected by the pressure sensor 82 corresponding to each gas sensor module 90 is different, that is, when the distance between the gas sensor 94 of each gas sensor module 90 and the workpiece W2 is different, the electromagnetic actuator 81 applies the pressure to the workpiece W2 of the gas sensor module 90. The position is moved and adjusted by displacing the position of the gas sensor 94 with respect to the workpiece W2. In this way, the distance between the gas sensor 94 of each gas sensor module 90 and the workpiece W2 is made constant.

  The procedure for making the distance between the gas sensor 94 and the workpiece W2 of each gas sensor module 90 constant is as follows. For example, among the five gas sensor modules 90 shown in FIG. 10, the pressure detected by the pressure sensor 82 corresponding to one gas sensor module 90 is the pressure detected by the pressure sensor 82 corresponding to the other four gas sensor modules 90. Suppose it was smaller.

  In this case, the gas sensor 94 provided in the gas sensor module 90 corresponding to the pressure sensor 82 whose detected pressure is small has a longer distance from the workpiece W2 than the gas sensors 94 provided in the other gas sensor modules 90. . Therefore, the electromagnetic sensor 81 provided in the gas sensor module 90 corresponding to the pressure sensor 82 whose detected pressure is small is operated to bring the gas sensor module 90 closer to the workpiece W2. In this way, the distance between the gas sensor 94 of each gas sensor module 90 and the workpiece W2 is made constant.

  When the gas leak is detected at one place on the workpiece W2, the gas leak detector 20 is moved to a different position on the workpiece W2 to detect the same gas leak. And the movement of the gas leak detection apparatus 20 is repeated several times, the gas leak in the whole workpiece | work W2 is detected, and the gas leak detection of the workpiece | work W2 by the gas leak detection apparatus 20 is complete | finished.

  Since the gas leak detection apparatus 20 according to the present embodiment includes a plurality of gas sensor modules 90, gas leaks at a plurality of locations of the workpiece W2 can be detected at the same time, so that gas leaks can be detected in a short time. it can. Further, the plurality of gas sensor modules 90 include an electromagnetic actuator 81 and a pressure sensor 82, and the second control circuit 68 operates the electromagnetic actuator 81 based on the detection result of the pressure sensor 82, and thereby the plurality of gas sensor modules 90. Is moving. Thus, the distance (relative relationship) of each gas sensor 94 with respect to the workpiece W2 can be made constant.

  Therefore, the gas introduction condition for the package 91 can be made constant among the plurality of gas sensor modules 90. Therefore, since the conditions for detecting the gas leak can be made constant, the position of the gas leak and the concentration of the leaked gas and the detection of the gas leak can be accurately performed in a short time. Further, by comparing the output voltage from the gas sensor 94 among the plurality of gas sensor modules 90, the position of the gas leak and the concentration of the leaked gas and the detection of the gas leak can be accurately performed in a short time.

  Further, the flexible substrate 83 on which the plurality of gas sensor modules 90 are provided has flexibility. Therefore, even when the plurality of elastic bodies 84 are individually deformed, the flexible substrate 83 is deformed in accordance with the deformation of the elastic body 84, so that the gas sensor module 90 is not damaged or detached from the flexible substrate 83. Can be.

  The plurality of gas sensor modules 90 are arranged in a planar shape. For this reason, even when there is a wide surface on the outer periphery of the workpiece W2, gas leaks at many locations can be detected simultaneously. Therefore, it is possible to contribute to shortening the detection time for detecting the gas leak by the gas leak detection device 20.

  Further, in the gas sensor module 90, the package 91 is movable. However, even if the package 91 is moved, the flexible substrate 83 (particularly, the portion between the adjacent elastic bodies 84) is deformed to change the plurality of packages 91. The electrical connection between the gas sensor module 90 and the multi-core cable 46 can be maintained.

[Third Embodiment]
A third embodiment of the present invention will be described. As shown in FIG. 11, the gas leak detection apparatus 100 according to the third embodiment includes a controller (not shown) similar to that of the first embodiment. An air cylinder 101 that is a pneumatic actuator is connected to the controller. The air cylinder 101 includes a cylinder 102 and a rod 103 that can move forward and backward with respect to the cylinder 102. A multicore cable 46 is provided inside the rod 103, and a control circuit similar to that of the first embodiment is connected to one end of the multicore cable 46. A sealing material 104 is provided at the insertion position of the rod 103 in the cylinder 102.

  A holding device 110 is provided at the tip of the rod 103. The holding device 110 includes six first support members 111 to sixth support members 116. The first support member 111 to the sixth support member 116 include a first arm member 111A to a sixth arm member 116A, which are rod-shaped base members, respectively. The first arm member 111A to the sixth arm member 116A include: A first pedestal 111B to a sixth pedestal 116B are provided. The first arm material 111A to the sixth arm material 116A may be plate-shaped. The end portions of the first arm material 111A and the second arm material 112A are connected to each other. Similarly, the second arm member 112A and the third arm member 113A, the third arm member 113A and the fourth arm member 114A, the fourth arm member 114A and the fifth arm member 115A, the fifth arm member 115A and the sixth arm member 116A. The ends are connected to each other. The first arm member 111A to the sixth arm member 116A are arranged along a shape in which one end of a substantially circular shape is cut out, and the work W3 is held by the first arm member 111A to the sixth arm member 116A. The first arm material 111A to the sixth arm material 116A can be arranged.

  A first electromagnetic actuator 121 is provided at a connecting portion between one end of the first arm member 111A and the second arm member 112A. Similarly, one end of the second arm member 112A and the other end of the third arm member 113A, one end of the third arm member 113A and the other end of the fourth arm member 114A, one end of the fourth arm member 114A and the fifth arm member 115A. The second electromagnetic actuator 122 to the fifth electromagnetic actuator 125 are respectively provided at the other end of the first arm member, one end of the fifth arm member 115A and the other end of the sixth arm member 116A. The other end of the first arm member 111A and one end of the sixth arm member 116A are not connected.

The first electromagnetic actuator 121 is a rotary actuator that varies the angle formed by the connected first arm member 111A and second arm member 112A. The first electromagnetic actuator 121 operates based on the control of the control circuit, and adjusts by varying the angle θ (θ ₁ , θ ₂ ) formed by the first arm material 111A and the second arm material 112A as shown in FIG. can do. Similarly, the second electromagnetic actuator 122 to the fifth electromagnetic actuator 125 can be adjusted by changing the angle formed by the adjacent second arm material 112A to sixth arm material 116A based on the control of the control circuit.

  Strain sensors 131A and 131B corresponding to physical state detection sensors are provided at the ends of the first arm material 111A and the second arm material 112A on both sides of the first electromagnetic actuator 121, respectively. Similarly, strain sensors 132A to 135A and 132B to 135B are provided between the second arm material 112A to the sixth arm material 116A on both sides of the second electromagnetic actuator 122 to the fifth electromagnetic actuator 125, respectively.

  The strain sensors 131A to 135A and 131B to 135B are connected to a control circuit (not shown) via the multicore cable 46. The strain sensors 131A to 135A and 131B to 135B correspond to the physical states of the first arm material 111A to the sixth arm material 116A when the first arm material 111A to the sixth arm material 116A and the workpiece W1 are in the pressure transmitting state. The distortions of the first arm material 111A to the sixth arm material 116A are detected. The strain sensors 131A to 135A and 131B to 135B output strain information based on the detected strain to the control circuit. A third electromagnetic actuator 123 is connected to the tip of the rod 103.

  The holding device 110 is provided with a gas sensor array 140. The gas sensor array 140 includes a first gas sensor module 141 to a sixth gas sensor module 146 and a flexible substrate 147. Similar to the second embodiment, the flexible substrate 147 is a flexible substrate having at least a part of flexibility, and includes the first base portion 111B to the sixth base portion 116B and the first gas sensor modules 141 to sixth. Arranged between the gas sensor modules 146. Specifically, the flexible substrate 147 is mounted on the first pedestal portion 111B to the sixth pedestal portion 116B, and the first gas sensor modules 141 to 141 are disposed on the first pedestal portion 111B to the sixth pedestal portion 116B via the flexible substrate 147. Each of the sixth gas sensor modules 146 is mounted. Thus, the packages 91 of the first gas sensor module 141 to the sixth gas sensor module 146 are mounted on the first support material 111 to the sixth support material 116, respectively. As for the flexible substrate 147, at least a portion located between adjacent pedestal portions among the first pedestal portion 111B to the sixth pedestal portion 116B only needs to have flexibility.

  A connecting portion 23 is provided at a position where the first gas sensor module 141 to the sixth gas sensor module 146 are mounted on the flexible substrate 147. The connection part 23 has the same configuration as that of the first embodiment. Further, a surface wiring 24 (see FIG. 9) is provided on the surface of the flexible substrate 147 and below the connection portion 23. The plurality of surface wirings 24 are electrically connected to the multicore cable 46.

  Each of the first gas sensor module 141 to the sixth gas sensor module 146 includes a package 91 shown in FIG. 9 and a gas sensor 94 which is a heat conduction type gas sensor, like the gas sensor module 90 in the second embodiment. The gas sensor 94 includes a gas sensor 94, a substrate 95, a thermoelectric element 96, and a heater 98. The package 91 includes a package main body 92 and a package lid 93. The package body 92 is open at the top, and a gas sensor 94 is mounted on the package body 92. The gas sensor 94 is fixed to the bottom surface of the package main body 92. The package body 92 and the package lid 93 have such rigidity (non-deformability) as not to be deformed by the force with which the user presses the gas leak detection device 100 against the detection target.

  Further, the end of the gas permeable filter 150 is attached to the other end of the first arm member 111A in the first support member 111 and one end of the sixth arm member 116A in the sixth support member 116. The gas permeable filter 150 corresponding to the covering member is provided so as to cover the first gas sensor module 141 to the sixth gas sensor module 146. Further, the gas permeable filter 150 can contact the workpiece W3. In the following, in the first arm material 111A to the sixth arm material 116A, as shown in FIG. 11, the state in which the other end of the first arm material 111A and the sixth arm material 116A are separated is referred to as an open state. As shown, a state in which the other end of the first arm member 111A and the sixth arm member 116A are close to each other is referred to as a closed state.

  Next, a gas leak detection procedure by the gas leak detection apparatus 100 according to the present embodiment will be described. In the present embodiment, gas leak detection of the tracer gas G leaking from the workpiece W3 shown in FIG. 11 will be described. The workpiece W3 has a cylindrical shape with a circular cross section. Tracer gas G having a composition of 5% hydrogen and 95% nitrogen is supplied to work W3 from cylinder B2.

  When gas leak detection of the workpiece W3 is performed by the gas leak detection device 100, the first arm material 111A to the sixth arm material 116A are opened as shown in FIG. While the first arm material 111A to the sixth arm material 116A are in the open state, the rod 103 is advanced from the cylinder 102, and the work W3 is disposed inside the holding device 110. Subsequently, the first electromagnetic actuator 121 to the fifth electromagnetic actuator 125 are operated, and the first arm material 111A to the sixth arm material 116A are closed as shown in FIG. The package lids 93 of the first gas sensor module 141 to the sixth gas sensor module 146 are brought into contact with each other.

  When the first arm material 111A to the sixth arm material 116A are in the closed state, the strain sensors 131A to 135A and 131B to 135B are used when the first support material 111 to the sixth support material 116 and the work W3 are in the pressure transmission state. The distortion of the first arm material 111A to the sixth arm material 116A is detected. Since the workpiece W3 to be detected for gas leakage has a circular cross section, if the first gas sensor module 141 to the sixth gas sensor module 146 are in uniform contact with the workpiece W3, the first arm member 111A. ~ There is almost no difference in the magnitude of distortion generated in the sixth arm member 116A. In addition, when the first gas sensor module 141 to the sixth gas sensor module 146 are in non-uniform contact with the workpiece W3, there is a difference in the magnitude of distortion generated in the first arm material 111A to the sixth arm material 116A. May occur. For example, when the contact force of the first gas sensor module 141 with respect to the workpiece W3 is stronger than the contact force of the second gas sensor module 142, there is a difference in distortion generated in the first arm material 111A and the second arm material 112A, 1 The difference in strain detected by the strain sensors 131A and 131B located on both sides of the electromagnetic actuator 121 increases. In this case, by operating the first electromagnetic actuator 121 in the direction in which the first gas sensor module 141 moves away from the workpiece W3, the distortion of the first arm material 111A is reduced, and the distortion of the first arm material 111A and the second arm material 112A. Can eliminate the difference.

  Thus, when the first gas sensor module 141 to the sixth gas sensor module 146 come into contact with the workpiece W3 with a uniform contact force, the gas sensor 94 in the first gas sensor module 141 to the sixth gas sensor module 146 has a distance and orientation with respect to the workpiece W3. Are arranged along the surface of the workpiece W3 in a state where the relative relationship is uniform. Thus, even if the workpiece W3 has a circular cross section, the first gas sensor module 141 to the sixth gas sensor module 146 are evenly arranged along the surface of the workpiece W3.

  Air around the package 91 is introduced into the package 91 arranged along the surface of the workpiece W3 and through the gas permeable filter 150. At this time, if a gas leak has occurred from the workpiece W3 and the package 91 is disposed in the vicinity of the location where the gas leak has occurred, the tracer gas G leaking from the workpiece W2 is introduced into the package 91.

  When the tracer gas G is introduced into the package 91, the gas sensor 94 detects the tracer gas G and detects a gas leak. If the gas leak is detected at one place on the workpiece W3, the gas leak detector 100 is moved to a different position on the workpiece W3, and the same gas leak is detected. And the movement of the gas leak detection apparatus 100 is repeated several times, the gas leak in the whole workpiece | work W3 is detected, and the gas leak detection of the workpiece | work W3 by the gas leak detection apparatus 100 is complete | finished.

  Since the gas leak detection apparatus 100 according to the present embodiment includes a plurality of gas sensor modules of the first gas sensor module 141 to the sixth gas sensor module 146, gas leaks at a plurality of locations of the workpiece W3 can be detected at the same time. Gas leak can be detected in a short time. The first support member 111 to the sixth support member 116 that support the first gas sensor module 141 to the sixth gas sensor module 146 are connected by the first electromagnetic actuator 121 to the fifth electromagnetic actuator 125, and the first support member 111 to 11 are connected. The sixth support member 116 is provided with strain sensors 131A to 135A and 131B to 135B. The control circuit operates the first electromagnetic actuator 121 to the fifth electromagnetic actuator 125 based on the detection results of the strain sensors 131A to 135A and 131B to 135B, and the first gas sensor module 141 to the sixth gas sensor module 146 for the workpiece W3. Adjustment is made so that the contact force is uniform. For this reason, the position of the package 91 into which the tracer gas G is introduced can be displaced or the direction thereof can be changed so that the relative relationship such as the distance and direction of each gas sensor 94 with respect to the workpiece W3 can be made uniform.

  Therefore, the gas introduction condition for the package 91 can be made constant between the first gas sensor module 141 to the sixth gas sensor module 146. Therefore, since the conditions for detecting the gas leak can be made constant, the position of the gas leak and the concentration of the leaked gas and the detection of the gas leak can be accurately performed in a short time. Further, by comparing the output voltage from the gas sensor 94 between the first gas sensor module 141 to the sixth gas sensor module 146, the position of the gas leak and the concentration of the leaked gas and the detection of the gas leak are accurately detected in a short time. Can be done well.

  In addition, the flexible substrate 147 on which the first gas sensor module 141 to the sixth gas sensor module 146 are provided has flexibility. For this reason, even if the angle formed by the adjacent support members, for example, the arm members of the first support member 111 and the second support member 112, for example, the first arm member 111A and the second arm member 112A, is changed, Since the first arm material 111A and the second arm material 112A are deformed in accordance with the deformation, the first gas sensor module 141 to the sixth gas sensor module 146 can be prevented from being damaged or detached from the flexible substrate 147.

  Further, in the third embodiment, the first electromagnetic actuator 121 to the fifth electromagnetic actuator 125 are operated so as to detect the distortion of the first arm material 111A to the sixth arm material 116A and make them uniform. A torque sensor is provided together with the first electromagnetic actuator 121 to the fifth electromagnetic actuator 125 at a position where the first electromagnetic actuator 121 to the fifth electromagnetic actuator 125 are provided, and the torque between the first arm material 111A to the sixth arm material 116A is increased. The first electromagnetic actuator 121 to the fifth electromagnetic actuator 125 may be operated so as to be uniform.

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and includes design changes and the like without departing from the gist of the present invention. .

  For example, in each of the embodiments described above, the gas permeable filters 42, 72, 150 are provided in the gas sensor modules 4, 90 and the first gas sensor module 141 to the sixth gas sensor module 146, but these gas permeable filters 42 are provided. 72, 150 may not be provided. Moreover, although the gas permeable filter 42 in 1st Embodiment is a buffer member, the gas permeable filter which is not provided with buffer property may be sufficient. In addition, the gas permeable filters 72 and 150 in the second embodiment and the third embodiment may be gas permeable filters that are buffer members. Further, in place of these gas permeable filters 42, 72, and 150, a buffer member is maintained while maintaining a state of transmitting gas (air) to the suction pipe 33 in the first embodiment or the package 91 in the second embodiment. May be provided separately.

  In addition to the gas permeable filters 42, 72, 150, or instead of the gas permeable filters 42, 72, 150, a guide member for enabling smooth movement with respect to the workpieces W1 to W3 may be provided. . Moreover, in said gas leak detection apparatus 1,20,100, gas permeable filter 42,72,150 is made to contact | abut to workpiece | work W1-W3, but gas leak detection is carried out, but gas permeable filter 42,72. , 150 or other parts of the gas leak detection device 1, 20, 100 without contacting the workpieces W1 to W3, the filter mounting portion 33A or the package lid 93 of the suction pipe 33 is brought close to the workpieces W1 to W3 to gas. Leak detection may be performed.

  Further, as the gas sensor, the contact combustion type gas sensor 32 is used in the first embodiment, and the heat conduction type gas sensor 94 is used in the second and third embodiments, but the heat conduction type gas sensor is used in the first embodiment. It may be used, or a catalytic combustion type gas sensor may be used in the second embodiment or the third embodiment. In any of the first to third embodiments, a gas sensor of another aspect such as a semiconductor type or an electrochemical type may be used. In the second and third embodiments, the package lid 93 is in contact with the workpieces W2 and W3 via the gas permeable filters 72 and 150. However, the gas permeable filters 72 and 150 are provided. Instead, the package lid 93 may be in direct contact with the workpieces W2 and W3. Further, instead of the gas permeable filters 72 and 150, a spacer having a large opening that hardly has a foreign matter removing effect may be provided.

  Moreover, in the said embodiment, although the thermoelectric elements 38 and 96 are used in order to measure temperature, you may measure temperature by other temperature measuring elements, such as a resistor and an infrared rays detection element. In the first embodiment, the air in the suction pipe 33 is sucked by the suction pump 14, but the suction pump may not be provided. In the second and third embodiments, the suction pump is not provided, but the air in the package 91 may be sucked by the suction pump. Further, instead of the electrode 23A and the conductive material 23B of the connection portion 23, a connector that can be easily detached may be used. In the first embodiment, three or three or more distance sensors and three or three or more piezoelectric actuators 34 are arranged for each gas sensor module 4, and the filter mounting portion 33A and the workpiece W1 are arranged. In addition to the distance, the direction (tilt) may be adjusted to be uniform among the gas sensor modules 4. In the second embodiment, three or three or more pressure sensors 82 and three or three or more electromagnetic actuators 81 are provided for each gas sensor module 90, and the filter mounting portion 33A and the workpiece are arranged. In addition to the distance to W2, the direction (inclination) may be uniform among the gas sensor modules 90. In this case, the elastic body 84 may be omitted. Further, when performing gas leak detection, the robot may grip the controller 11 in the first embodiment, the handle 64 in the second embodiment, or the like, instead of a mode in which the user grips the controller 11 or the handle 64.

DESCRIPTION OF SYMBOLS 1,20,100 ... Gas leak detection apparatus, 2 ... Probe, 3 ... Gas sensor array, 4 (4A-4E), 90 ... Gas sensor module, 5 ... Base substrate, 6 ... Distance sensor, 7 ... Probe, 8 ... Gas sensor array , 11 ... Controller, 12 ... Shaft part, 13 ... Control circuit, 14 ... Suction pump, 15 ... Flow meter, 16 ... Power supply part, 17 ... Input / output interface, 21, 71 ... Probe housing, 31, 91 ... Package, 31A, 92 ... Package body, 31B, 93 ... Package lid, 31C ... Exhaust port, 31D ... Suction pipe connection part, 32, 94 ... Gas sensor, 33 ... Suction pipe, 33A ... Filter mounting part, 34 ... Piezoelectric actuator, 35 ... Operating shaft, 36, 95 ... Substrate, 37, 98 ... Heater, 38, 96 ... Thermoelectric element, 40 ... Catalyst, 41 ... Sealing material, 42, 72 ... Gas Permeable filter, 43 ... sealing material, 46 ... multi-core cable, 47 ... piping, 61 ... light emitting element, 62 ... light receiving element, 64 ... handle, 65 ... controller, 66 ... first control circuit, 67 ... outlet, 68 ... Second control circuit, 71 ... probe housing, 80 ... base, 81 ... electromagnetic actuator, 82 ... pressure sensor, 83 ... flexible substrate, 84 ... elastic body, 85 ... yoke, 85A ... concave, 85B ... convex, 86 ... Moving element, 86A ... Pedestal, 86B ... Leg, 87 ... Magnet, 88 ... Coil, 101 ... Air cylinder, 102 ... Cylinder, 103 ... Rod, 104 ... Seal material, 110 ... Holding device, 111-116 ... First Support material to sixth support material, 111A to 116A, first arm material to sixth arm material, 121 to 125, first electromagnetic actuator to fifth electromagnetic actuator, 13 A~135A, 131B~135B ... strain sensor, 140 ... gas sensor array, 141 to 146 ... the first gas sensor module to sixth gas sensor module, 150 ... gas-permeable filter

Claims (5)

A gas sensor array for detecting outflow of gas in a detection object,
Multiple gas sensors;
A gas introduction unit corresponding to each of the plurality of gas sensors, and having a variable physical state when the outflow of the gas is detected by the gas sensor according to a relative relationship between the corresponding gas sensor and the detection target; ,
A physical state detection sensor for detecting a physical state of the gas introduction unit;
Based on the detection result of the physical state detection sensor, an actuator for displacing the position of the gas introduction part with respect to the detection object;
A gas sensor array comprising: The physical state detection sensor includes a distance sensor that detects a distance from the detection target of the gas introduction unit as the physical state,
The gas sensor array according to claim 1, wherein the actuator moves the gas introduction unit relative to the detection target based on a distance detected by the distance sensor. The gas introduction part is provided in a plurality of packages each housing the plurality of gas sensors,
The physical state detection sensor includes, as the physical state, a pressure sensor that detects a pressure applied to the package when the package and the detection target are in a pressure transmission state,
The gas sensor array according to claim 1, wherein the actuator displaces the package based on a pressure detected by the pressure sensor. The gas introduction part is provided in a plurality of packages that respectively accommodate the plurality of gas sensors, and the packages are respectively mounted on a plurality of connected support members,
The physical state detection sensor includes, as the physical state, a strain sensor that detects strain of the support material when the package and the detection target are in a pressure transmission state,
2. The gas sensor array according to claim 1, wherein the actuator varies an angle formed by the connected support members based on a strain detected by the strain sensor. The gas sensor array according to any one of claims 1 to 4,
Based on the amount of gas detected by the gas sensor array, a detection unit that detects a gas leak in the detection target;
A gas leak detection device comprising:

Images