JP2018116026A - Illumination device and light-transmissive member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an illumination device and light-transmissive member, which allow for increasing brightness difference between bright and dark portions of a pattern of light, for example.SOLUTION: An illumination device comprises a projector configured to emit patterned light including bright and dark portions, and a light-transmissive member disposed between the projector and an inspection target surface and configured to allow the light from the projector to pass toward the inspection target surface, where the light-transmissive member includes a first deflector member capable of deflecting the light from the projector into parallel light, and a second deflector member capable of deflecting the parallel light from the first deflector member into convergent light.SELECTED DRAWING: Figure 14

Description

  The present disclosure relates to a lighting device and a transmissive member.

  Conventionally, there has been proposed a technique for irradiating light on an inspection target surface, capturing reflected light from the inspection target surface as image data, and detecting an abnormality of the inspection target surface based on a change in luminance of the image data. Yes. The inspection target surface is irradiated with, for example, a light pattern including a bright part and a dark part from an illumination device.

JP 2014-2125 A

  It is desirable that the inspection in which the light pattern including the bright part and the dark part is irradiated is performed in a state where the luminance difference between the bright part and the dark part of the light pattern is larger. Then, one of the subjects of this indication is obtaining the illuminating device and transmission member which can enlarge the difference in the brightness of the bright part and dark part of a light pattern more, for example.

  An illumination device of the present disclosure is interposed between a projector that emits pattern light including a bright part and a dark part, and the projector and an inspection target surface, and transmits light from the projector toward the inspection target surface. A first deflecting member capable of deflecting light from the projector into parallel light, and a first deflectable member capable of deflecting parallel light from the first deflecting member into convergent light. Two deflection members.

Drawing 1 is a figure showing the example of composition of the inspection system of an embodiment. FIG. 2 is a block diagram illustrating a configuration of the time correlation camera of the embodiment. FIG. 3 is a conceptual diagram showing frames accumulated in time series in the time correlation camera of the embodiment. FIG. 4 is a diagram illustrating an example of a fringe pattern irradiated by the illumination device of the embodiment. FIG. 5 is a diagram illustrating an example of a fringe pattern output from the illumination control unit of the embodiment to the illumination device. FIG. 6 is a diagram illustrating an example of a wave shape representing a stripe pattern after passing through the screen of the embodiment. FIG. 7 is a flowchart illustrating a procedure of abnormality detection processing based on amplitude in the abnormality detection processing unit of the embodiment. FIG. 8 is a flowchart illustrating the procedure of the abnormality detection process based on the phase in the abnormality detection processing unit of the embodiment. FIG. 9 is a flowchart illustrating a procedure of abnormality detection processing based on amplitude and intensity in the abnormality detection processing unit of the embodiment. FIG. 10 is a flowchart illustrating a procedure of an inspection process for an object to be inspected in the inspection system of the embodiment. FIG. 11 is a diagram illustrating a switching example of a fringe pattern output from the illumination control unit according to the second modification. FIG. 12 is a diagram illustrating an example in which the illumination control unit according to the second modification irradiates the surface including an abnormality (defect) with a fringe pattern. FIG. 13 is a schematic and exemplary explanatory view showing the optical system of the illumination device, the inspected object, and the time correlation camera in the embodiment and the first and second modifications. FIG. 14 is a cross-sectional view illustrating a configuration of a screen included in the illumination device of the embodiment and the first and second modifications.

(Embodiment)
The inspection system of this embodiment will be described. The inspection system of this embodiment has various configurations for inspecting an object to be inspected. FIG. 1 is a diagram illustrating a configuration example of an inspection system according to the present embodiment. As shown in FIG. 1, the inspection system of this embodiment includes a PC 100, a time correlation camera 110, a projector 121, a screen 122, and an arm 140.

  The arm 140 is used to fix the inspection object 150 and changes the position and orientation of the surface of the inspection object 150 that can be imaged by the time correlation camera 110 according to control from the PC 100.

  The projector 121 is a device that irradiates light to the object 150 to be inspected, and can control the intensity of the irradiated light in units of regions in accordance with a pattern from the PC 100. Furthermore, the projector 121 can control the intensity of light in the region unit according to a periodic time transition. In other words, the projector 121 can give a periodic temporal change and spatial change of the light intensity. A specific light intensity control method will be described later.

  The screen 122 diffuses the light output from the projector 121 and then irradiates the inspection object 150 with light on a surface. The screen 122 according to the present embodiment irradiates the object 150 in a surface with the light input from the projector 121 and subjected to periodic time change and space change. The projector 121 and the screen 122 constitute the lighting device 120.

  The time correlation camera 110 includes an optical system 210, an image sensor 220, a data buffer 230, a control unit 240, and a reference signal output unit 250. FIG. 2 is a block diagram showing the configuration of the time correlation camera 110 of the present embodiment.

  The optical system 210 includes a photographic lens and the like, transmits a light beam from a subject (including the inspection object 150) outside the time correlation camera 110, and forms an optical image of the subject formed by the light beam.

  The image sensor 220 is a sensor that can output the intensity of light incident through the optical system 210 as a light intensity signal at high speed for each pixel.

  In the light intensity signal of the present embodiment, the projector 121 (illumination device 120) of the inspection system irradiates the subject (including the inspected object 150) with light, and the image sensor 220 receives the reflected light from the subject. It is a thing.

  The image sensor 220 is, for example, a sensor that can be read out at a higher speed than a conventional sensor, and has a two-dimensional planar shape in which pixels are arranged in two kinds of directions: a row direction (x direction) and a column direction (y direction). It shall be configured. Each pixel of the image sensor 220 is defined as a pixel P (1,1),..., P (i, j),..., P (X, Y) (Note that the image size in this embodiment is X X Y). Note that the reading speed of the image sensor 220 is not limited and may be the same as the conventional one.

  The image sensor 220 receives a light beam from the subject (including the inspected object 150) transmitted by the optical system 210 and photoelectrically converts the light intensity signal (intensity of light reflected from the subject) ( A two-dimensional planar frame composed of (imaging signal) is generated and output to the control unit 240. The image sensor 220 according to the present embodiment outputs the frame for each readable unit time.

  The control unit 240 according to the present embodiment includes, for example, a CPU, a ROM, a RAM, and the like. By executing an inspection program stored in the ROM, the transfer unit 241, the reading unit 242, and the intensity image superimposing unit 243. And a first multiplier 244, a first correlation image superimposing unit 245, a second multiplier 246, a second correlation image superimposing unit 247, and an image output unit 248. Note that the present invention is not limited to implementation with a CPU or the like, and may be implemented with an FPGA or an ASIC.

  The transfer unit 241 stores the frames composed of the light intensity signals output from the image sensor 220 in the data buffer 230 in time series order.

  The data buffer 230 accumulates frames composed of light intensity signals output from the image sensor 220 in time series.

  FIG. 3 is a conceptual diagram showing frames accumulated in time series in the time correlation camera 110 of the present embodiment. As shown in FIG. 3, the data buffer 230 of the present embodiment stores a plurality of light intensity signals G (1, 1, t), every time t (t = t0, t1, t2,..., Tn). .., G (i, j, t),..., G (X, Y, t) are combined into a plurality of frames Fk (k = 1, 2,..., N) in chronological order. Accumulated. Note that one frame created at time t is a light intensity signal G (1, 1, t),..., G (i, j, t), ..., G (X, Y, t). Composed.

  A light intensity signal (imaging signal) G (1,1, t),..., G (i, j, t),. Each pixel P (1,1),..., P (i, j),..., P (X, Y) constituting k = 1, 2,.

  The frame output from the image sensor 220 includes only a light intensity signal, in other words, it can be considered as monochrome image data. In this embodiment, an example in which the image sensor 220 generates monochrome image data in consideration of resolution, sensitivity, cost, and the like will be described. However, the image sensor 220 is not limited to a monochrome image sensor. Alternatively, a color image sensor may be used.

  Returning to FIG. 2, the reading unit 242 of the present embodiment receives the light intensity signals G (1,1, t),..., G (i, j, t),. Y, t) are read out in frame-by-frame order and output to the first multiplier 244, the second multiplier 246, and the intensity image superimposing unit 243.

  The time correlation camera 110 of the present embodiment generates image data for each output destination of the reading unit 242. In other words, the time correlation camera 110 creates three types of image data.

  The time correlation camera 110 of this embodiment generates intensity image data and two types of time correlation image data as three types of image data. Note that the present embodiment is not limited to generating three types of image data, and it may be possible to generate no intensity image data or to generate one or more types of time-correlated image data. .

  As described above, the image sensor 220 of the present embodiment outputs a frame composed of a light intensity signal every unit time. However, in order to generate normal image data, a light intensity signal corresponding to the exposure time necessary for photographing is required. Therefore, in the present embodiment, the intensity image superimposing unit 243 generates intensity image data by superimposing a plurality of frames for an exposure time necessary for photographing. In addition, each pixel value (value representing the intensity of light) G (x, y) of the intensity image data can be derived from the following equation (1). The exposure time is the time difference between t0 and tn.

  Thereby, the intensity image data in which the subject (including the object 150 to be inspected) is photographed is generated in the same manner as the conventional camera photographing. Then, the intensity image superimposing unit 243 outputs the generated intensity image data to the image output unit 248.

  The time correlation image data is image data indicating changes in light intensity according to time transition. That is, in the present embodiment, for each frame in time series order, the light intensity signal included in the frame is multiplied by the reference signal indicating the time transition, and the reference signal, the light intensity signal, and the time that is the multiplication result Temporal correlation image data is generated by generating a temporal correlation value frame composed of correlation values and superimposing a plurality of temporal correlation value frames.

  By the way, in order to detect an abnormality of the inspection object 150 using the time correlation image data, it is necessary to change the light intensity signal input to the image sensor 220 in synchronization with the reference signal. For this purpose, as described above, the projector 121 irradiates the surface light through the screen 122 so as to periodically change the time and spatially move the stripes.

In this embodiment, two types of time correlation image data are generated. The reference signal may be a signal representing a time transition, but in the present embodiment, a complex sine wave e ^−jωt is used. It is assumed that the angular frequency is ω and the time is t. The angular frequency ω is such that the complex sine wave e ^−jωt representing the reference signal correlates with one period of the above-described exposure time (in other words, the time required to generate the intensity image data and the time correlation image). It shall be set. In other words, the planar and dynamic light formed by the illumination unit such as the projector 121 and the screen 122 is in a first period (time period) at each position on the surface (reflection surface) of the object 150 to be inspected. A change in temporal irradiation intensity is given, and an increase / decrease distribution of the spatial irradiation intensity in a second period (spatial period) along at least one direction along the surface is given. When this planar light is reflected by the surface, it is complex-modulated according to the specifications of the surface (normal vector distribution, etc.). The time correlation camera 110 receives the light complex-modulated on the surface and performs quadrature detection (orthogonal demodulation) using the reference signal of the first period, thereby obtaining time correlation image data as a complex signal. By modulation / demodulation based on such complex time correlation image data, it is possible to detect features corresponding to the surface normal vector distribution.

The complex sine wave e ^−jωt can also be expressed as e ^−jωt = cos ωt−j · sin ωt. Accordingly, each pixel value C (x, y) of the time correlation image data can be derived from the following equation (2).

  In this embodiment, in the formula (2), two types of time correlation image data are divided into a pixel value C1 (x, y) representing the real part and a pixel value C2 (x, y) representing the imaginary part. Generate.

For this reason, the reference signal output unit 250 generates and outputs different reference signals for the first multiplier 244 and the second multiplier 246, respectively. Reference signal output section 250 of this embodiment outputs the first reference signal cosωt corresponding to the real part of the complex sine wave e ^-Jeiomegati the first multiplier 244, the imaginary part of the complex sine wave e ^-Jeiomegati The corresponding second reference signal sin ωt is output to the second multiplier 246. As described above, the reference signal output unit 250 according to the present embodiment describes an example in which two types of reference signals expressed as time functions of a sine wave and a cosine wave that form a Hilbert transform pair are described. Any reference signal that changes with time transition such as a function may be used.

Then, the first multiplier 244 ^calculates the real part cosωt of the complex sine wave e ^−jωt input from the reference signal output unit 250 for each light intensity signal of the frame in units of frames input from the reading unit 242. Multiply.

  The first correlation image superimposing unit 245 performs a process of superimposing the multiplication result of the first multiplier 244 on a pixel-by-pixel basis for a plurality of frames for an exposure time necessary for photographing. Thereby, each pixel value C1 (x, y) of the first time correlation image data is derived from the following equation (3).

The second multiplier 246 multiplies the light intensity signal of the frame input from the reading unit 242 by the imaginary part sin ^ωt of the complex sine wave e ^−jωt input from the reference signal output unit 250.

  The second correlation image superimposing unit 247 performs a process of superimposing the multiplication result of the second multiplier 246 on a pixel-by-pixel basis for a plurality of frames corresponding to the exposure time necessary for photographing. Thereby, each pixel value C2 (x, y) of the second time correlation image data is derived from the following equation (4).

  By performing the processing described above, two types of time correlation image data, in other words, time correlation image data having two degrees of freedom can be generated.

Further, the present embodiment does not limit the type of reference signal. For example, in this embodiment, two types of time-correlated image data of the real part and the imaginary part of the complex sine wave e ^−jωt are created, but two types of image data based on the light amplitude and the light phase are generated. May be.

  Note that the time correlation camera 110 of the present embodiment can create a plurality of systems as time correlation image data. Thereby, for example, when light in which stripes having a plurality of types of widths are combined is irradiated, two types of time correlation image data based on the real part and the imaginary part described above can be created for each stripe width. For this purpose, the time correlation camera 110 includes a combination of two multipliers and two correlation image superimposing units for a plurality of systems, and the reference signal output unit 250 has an angular frequency suitable for each system. The reference signal by ω can be output.

  Then, the image output unit 248 outputs two types of time correlation image data and intensity image data to the PC 100. As a result, the PC 100 detects an abnormality of the inspected object 150 using the two types of time correlation image data and the intensity image data. For that purpose, it is necessary to irradiate the subject with light.

  The projector 121 of this embodiment can irradiate a stripe pattern as a light pattern that moves at high speed. FIG. 4 is a diagram showing an example of a fringe pattern irradiated by the projector 121 of the present embodiment. In the example shown in FIG. 4, the stripe pattern is scrolled (moved) in the x direction. A white area is a bright area corresponding to the stripe, and a black area is an interval area (dark area) corresponding to the stripe.

  In the present embodiment, the fringe pattern irradiated by the projector 121 is moved by one period with the exposure time when the time correlation camera 110 captures the intensity image data and the time correlation image data. Thereby, the projector 121 gives a periodic temporal change in the light intensity by spatial movement of the stripe pattern of the light intensity. In the present embodiment, the time during which the fringe pattern in FIG. 4 moves by one period corresponds to the exposure time, so that each pixel of the time-correlated image data relates to at least the light intensity signal for one period of the fringe pattern. Information is embedded.

  As shown in FIG. 4, in the present embodiment, an example in which the projector 121 irradiates a stripe pattern based on a rectangular wave will be described, but other than a rectangular wave may be used. In the present embodiment, the projector 121 irradiates through the screen 122, so that the boundary area between the light and dark of the rectangular wave can be blurred.

  In the present embodiment, the stripe pattern irradiated by the projector 121 is represented as A (1 + cos (ωt + kx)). That is, the stripe pattern includes a plurality of stripes repeatedly (periodically). Note that the intensity of light applied to the inspection object 150 can be adjusted between 0 and 2A, and is a light phase kx. k is the wave number of the stripe. x is the direction in which the phase changes.

  The fundamental frequency component of the light intensity signal f (x, y, t) of each pixel in the frame can be expressed as the following equation (5). As shown in Expression (5), the brightness of the stripe changes in the x direction.

f (x, y, t) = A (1 + cos (ωt + kx))
= A + A / 2 {e ^{j (ωt + kx)} + e− ^{j (ωt + kx)} } (5)

  As shown in Expression (5), the intensity signal of the fringe pattern irradiated by the projector 121 can be considered as a complex number.

  Then, the light from the projector 121 is reflected and input to the image sensor 220 from the subject (including the inspected object 150).

  Therefore, the light intensity signal G (x, y, t) input to the image sensor 220 can be used as the light intensity signal f (x, y, t) of each pixel of the frame when the projector 121 is irradiated. Therefore, when Expression (5) is substituted into Expression (1) for deriving intensity image data, Expression (6) can be derived. The phase is kx.

  From Expression (6), it can be confirmed that a value obtained by multiplying the exposure time T by the intermediate value A of the intensity of light output from the projector 121 is input to each pixel of the intensity image data. Further, when Expression (5) is substituted into Expression (2) for deriving time correlation image data, Expression (7) can be derived. Note that AT / 2 is the amplitude and kx is the phase.

  Thereby, the time correlation image data shown by the complex number shown by Formula (7) is replaceable with the two types of time correlation image data mentioned above. That is, the time correlation image data composed of the real part and the imaginary part described above includes a phase change and an amplitude change in the light intensity change irradiated on the object 150. In other words, the PC 100 according to the present embodiment can detect the phase change of the light emitted from the projector 121 and the light amplitude change based on the two types of time correlation image data. Therefore, the PC 100 according to the present embodiment, based on the time correlation image data and the intensity image data, amplitude image data representing the amplitude of light entering each pixel and phase image data representing the phase change of light entering each pixel. And generate.

  Furthermore, the PC 100 detects an abnormality of the inspected object 150 based on the generated amplitude image data and phase image data.

  By the way, when an abnormality based on the unevenness occurs in the surface shape of the inspection object 150, the distribution of normal vectors on the surface of the inspection object 150 changes corresponding to the abnormality. In addition, when an abnormality that absorbs light occurs on the surface of the inspection object 150, the intensity of the reflected light changes. A change in the normal vector distribution is detected as at least one of a phase change and an amplitude change of light. Thus, in the present embodiment, using the time correlation image data and the intensity image data, at least one of the light phase change and the amplitude change corresponding to the change in the normal vector distribution is detected. Thereby, the abnormality of the surface shape can be detected. According to the present embodiment, it is possible to estimate that the inspected object 150 is abnormal by detecting the change in the light amplitude and the change in the light phase based on the time correlation image data.

  Returning to FIG. 1, the PC 100 will be described. The PC 100 controls the entire detection system. The PC 100 includes an arm control unit 101, an illumination control unit 102, and a control unit 103.

  The arm control unit 101 controls the arm 140 in order to change the surface of the object 150 to be imaged by the time correlation camera 110. In the present embodiment, in the PC 100, a plurality of surfaces to be imaged of the inspection object 150 are set. Then, every time the time correlation camera 110 finishes photographing the object to be inspected 150, the arm control unit 101 can photograph the surface on which the time correlation camera 110 is set according to the setting. Move 150. Note that this embodiment is not limited to repeatedly moving the arm 140 each time shooting is completed and stopping the shooting before starting shooting, and the arm 140 may be continuously driven. The arm 140 may also be referred to as a transport unit, a moving unit, a position changing unit, a posture changing unit, or the like.

  The illumination control unit 102 outputs a fringe pattern irradiated by the projector 121 in order to inspect the inspected object 150. The illumination control unit 102 according to the present embodiment transfers at least three or more stripe patterns to the projector 121 and instructs the projector 121 to switch and display the stripe patterns during the exposure time.

  FIG. 5 is a diagram showing an example of a fringe pattern output from the illumination control unit 102 to the projector 121. In accordance with the rectangular wave shown in FIG. 5B, the illumination control unit 102 performs control so that the stripe pattern in which the black region and the white region shown in FIG. 5A are set is output.

  In this embodiment, the stripe interval for each stripe pattern to be irradiated is set according to the size of the abnormality (defect) to be detected, and detailed description thereof is omitted here.

  In addition, the angular frequency ω of the rectangular wave for outputting the fringe pattern is set to the same value as the angular frequency ω of the reference signal.

  As shown in FIG. 5, the fringe pattern output from the illumination control unit 102 can be shown as a rectangular wave, but the border area of the fringe pattern is blurred through the screen 122, that is, the bright area in the fringe pattern. By making the intensity change of light at the boundary between the (stripe region) and the dark region (interval region) gentle (dull), it can be approximated to a sine wave. FIG. 6 is a diagram illustrating an example of a wave shape representing a stripe pattern after passing through the screen 122. As shown in FIG. 6, the measurement accuracy can be improved when the wave shape approaches a sine wave. Further, a gray region in which the brightness changes in multiple steps may be added to the stripe, or a gradation may be given. Further, a stripe pattern including color stripes may be used.

  Returning to FIG. 1, the control unit 103 includes an amplitude-phase image generation unit 104 and an abnormality detection processing unit 105, and by intensity image data input from the time correlation camera 110 and time correlation image data, Processing is performed to calculate a feature corresponding to the distribution of the normal vector on the surface to be inspected of the inspected object 150 and detecting an abnormality based on the difference from the surroundings. In the present embodiment, in order to perform the inspection, two types of real number and imaginary part of complex number correlation image data are used instead of time correlation image data (referred to as complex time correlation image data) indicated by complex numbers. Are received from the time correlation camera 110.

  The amplitude-phase image generation unit 104 generates amplitude image data and phase image data based on the intensity image data input from the time correlation camera 110 and the time correlation image data. The amplitude-phase image generation unit 104 is an example of an image acquisition unit.

  The amplitude image data is image data representing the amplitude of light entering each pixel. The phase image data is image data representing the phase of light entering each pixel.

  Although the present embodiment does not limit the calculation method of the amplitude image data, for example, the amplitude-phase image generation unit 104 has pixel values C1 (x, y) and C2 (x, From y), each pixel value F (x, y) of the amplitude image data can be derived using Equation (8).

  In the present embodiment, it is possible to determine whether there is a region where an abnormality has occurred based on the pixel value (amplitude) of the amplitude image data and the pixel value of the intensity image data. For example, an abnormality occurs in a region where the value obtained by dividing the pixel value (AT) of the intensity image data by 2 and the amplitude of the amplitude image data (which is AT / 2 when cancellation does not occur) to some extent I can guess that it is not. On the other hand, it can be presumed that the amplitude cancellation occurs in the non-matching region. A specific method will be described later.

  Similarly, the amplitude-phase image generation unit 104 uses the pixel values C1 (x, y) and C2 (x, y) to calculate each pixel value P (x, y) of the phase image data using Equation (9). Can be derived.

  The abnormality detection processing unit 105 is a feature corresponding to the distribution of the normal vector on the inspection symmetry plane based on the amplitude image data and the phase image data generated by the amplitude-phase image generation unit 104, and is based on a difference from the surroundings. Then, a feature related to the abnormality of the inspection object 150 is detected. In the present embodiment, an example in which the amplitude distribution of the complex time correlation image is used as the feature corresponding to the distribution of the normal vector will be described. The amplitude distribution of the complex time correlation image is data indicating the amplitude distribution of each pixel of the complex time correlation image, and corresponds to amplitude image data. The abnormality detection processing unit is an example of an arithmetic processing unit.

  Next, the abnormality detection process based on the amplitude in the abnormality detection processing unit 105 of the present embodiment will be described. FIG. 7 is a flowchart showing a procedure of the processing in the abnormality detection processing unit 105 of the present embodiment.

  First, the abnormality detection processing unit 105 determines the average amplitude of the N × N region from the light amplitude value (representing pixel value) stored in each pixel of the amplitude image data, with the pixel as a reference (for example, the center). The value is subtracted (step S1101), and average difference image data of amplitude is generated. The average difference image data of the amplitude corresponds to the gradient of the amplitude. The integer N is set to an appropriate value depending on the embodiment.

  Next, the abnormality detection processing unit 105 performs a mask process using a predetermined amplitude threshold value on the average difference image data of the amplitude generated by the subtraction (step S1102).

  Further, the abnormality detection processing unit 105 calculates a standard deviation for each pixel within the mask area of the average difference image data (step S1103). In the present embodiment, a method based on the standard deviation will be described. However, the method is not limited to the case where the standard deviation is used. For example, an average value or the like may be used.

  Then, the abnormality detection processing unit 105 detects a pixel whose amplitude pixel value obtained by subtracting the average is smaller than −4.5σ (σ: standard deviation) as a region having an abnormality (defect) (step S1104).

  By the processing procedure described above, the abnormality of the inspected object 150 can be detected from the amplitude value of each pixel (in other words, the amplitude distribution). However, the present embodiment is not limited to detecting an abnormality from the amplitude distribution of the complex time correlation image. The gradient of the phase distribution may be used as a feature corresponding to the distribution of normal vectors on the inspection symmetry plane. An example using the gradient of the phase distribution will be described next.

  Next, the abnormality detection process based on the phase in the abnormality detection processing unit 105 of the present embodiment will be described. FIG. 8 is a flowchart showing a procedure of the processing in the abnormality detection processing unit 105 of the present embodiment.

  First, the abnormality detection processing unit 105 subtracts the average phase value of the N × N region from the phase value of the light of each pixel of the phase image data (a pixel value representing the pixel value) using the pixel as a reference (for example, the center). (Step S1201), phase average difference image data is generated. The phase average difference image data corresponds to the phase gradient.

  Next, the abnormality detection processing unit 105 compares the magnitude (absolute value) of the average difference image data of the phase generated by the subtraction with a threshold value, and determines pixels whose average difference image data size is equal to or greater than the threshold value. Then, it is detected as an abnormal (defect) pixel (step S1202).

  Based on the detection result of step S1202, the abnormality detection processing unit 105 can determine the unevenness based on the sign of the average difference image data, that is, the magnitude relationship between the phase value of the pixel and the average phase value (step S1203). Which of the pixel phase value and the average phase value is convex depends on the setting of each part, but the unevenness differs if the magnitude relationship is different.

  An abnormality can be detected from the gradient of the phase distribution obtained by another method. For example, as another method, the abnormality detection processing unit 105 determines whether the difference between the average vector of the N × N region of the normalized time correlation image data and the normalized vector of each pixel is a threshold value. If it is larger than that, it can be detected as a pixel having an abnormality (defect). Further, the abnormality of the inspected object 150 may be detected based on information corresponding to the phase distribution, not limited to the phase distribution gradient.

  Next, the abnormality detection process based on the amplitude and intensity in the abnormality detection processing unit 105 of the present embodiment will be described. FIG. 9 is a flowchart showing a procedure of the processing in the abnormality detection processing unit 105 of the present embodiment.

  First, the abnormality detection processing unit 105 uses the following equation (100) for each pixel from the time correlation image data and the intensity image data, and uses the following equation (100) to represent the amplitude (representing pixel value) C (x, y) (equation ( 7)) and intensity (a pixel value representing) G (x, y) (see equation (6)) R (x, y) is calculated (step S1301).

R (x, y) = C (x, y) / G (x, y) (100)

  Next, the abnormality detection processing unit 105 compares the ratio R (x, y) with a threshold value, and sets a pixel having a ratio R (x, y) value equal to or less than the corresponding threshold value to a pixel having an abnormality (defect). (Step S1302). In addition, the abnormality detection processing unit 105 compares the ratio R (x, y) with a threshold value, and determines that a pixel whose ratio R (x, y) is equal to or greater than another corresponding threshold value is uneven (dirt or the like). A pixel is detected (step S1303). When the cancellation of the amplitude (attenuation) becomes significant due to an abnormality in the distribution of the normal vector, the amplitude decreases more than the strength. On the other hand, although there is not so much abnormality in the normal vector distribution, when the light absorption becomes significant due to dirt on the surface of the object 150 to be inspected, the intensity is greatly reduced compared to the amplitude. Therefore, the abnormality detection processing unit 105 can detect the abnormality type in steps S1302 and S1303.

  Next, an inspection process for the inspected object 150 in the inspection system of the present embodiment will be described. FIG. 10 is a flowchart showing a procedure of the above-described processing in the inspection system of the present embodiment. It is assumed that the device under test 150 is already fixed to the arm 140 and arranged at the initial position of the inspection.

  The PC 100 according to the present embodiment outputs a fringe pattern for inspecting the inspection object 150 to the projector 121 (step S1401).

  The projector 121 stores the fringe pattern input from the PC 100 (step S1421). Then, the projector 121 displays the stored stripe pattern so as to change according to the time transition (step S1422). The condition for the projector 121 to start display is not limited when the stripe pattern is stored, and may be, for example, when the inspector performs a start operation on the projector 121.

  Then, the control unit 103 of the PC 100 transmits a shooting start instruction to the time correlation camera 110 (step S1402).

  Next, the time correlation camera 110 starts imaging for an area including the inspection object 150 in accordance with the transmitted imaging instruction (step S1411). Next, the control unit 240 of the time correlation camera 110 generates intensity image data and time correlation image data (step S1412). Then, the control unit 240 of the time correlation camera 110 outputs the intensity image data and the time correlation image data to the PC 100 (step S1413).

  The control unit 103 of the PC 100 receives the intensity image data and the time correlation image data (step S1403). Then, the amplitude-phase image generation unit 104 generates amplitude image data and phase image data from the received intensity image data and time correlation image data (step S1404).

  Then, the abnormality detection processing unit 105 performs abnormality detection control of the inspected object 150 based on the amplitude image data and the phase image data (step S1405). Then, the abnormality detection processing unit 105 outputs the abnormality detection result to a display device (not shown) included in the PC 100 (step S1406).

  As an output example of the abnormality detection result, the intensity image data is displayed, and an area of the intensity image data corresponding to the area where the abnormality is detected based on the amplitude image data and the phase image data is displayed. For example, a decorative display may be used so that it can be recognized. Further, the output is not limited to visual output, and it may be output that an abnormality has been detected by voice or the like.

  The control unit 103 determines whether or not the inspection of the inspected object 150 has been completed (step S1407). When it is determined that the inspection has not ended (step S1407: No), the arm control unit 101 captures the surface of the inspection object 150 to be inspected next with the time correlation camera 110 according to a predetermined setting. The movement control of the arm is performed so that it can be performed (step S1408). After the arm movement control is completed, the control unit 103 transmits an imaging start instruction to the time correlation camera 110 again (step S1402).

  On the other hand, if the control unit 103 determines that the inspection of the inspected object 150 has ended (step S1407: Yes), the control unit 103 outputs an end instruction to the time correlation camera 110 (step S1409), and ends the process.

  Then, the time correlation camera 110 determines whether an end instruction has been received (step S1414). If an end instruction has not been received (step S1414: NO), the processing is performed again from step S1411. On the other hand, if an end instruction has been received (step S1414: YES), the process ends.

  Note that the inspecting process of the projector 121 may be performed by an inspector or may be terminated in accordance with an instruction from another configuration.

  In the present embodiment, the example in which the intensity image data generated using the time correlation camera 110 and the time correlation image data are generated has been described. However, the present invention is not limited to the use of the time correlation camera 110 for generating the intensity image data and the time correlation image data, and a time correlation camera that can be realized by analog processing or an operation equivalent thereto. An imaging system may be used. For example, image data generated by a normal digital still camera is output, and the information processing apparatus superimposes a reference signal using the image data generated by the digital still camera as frame image data, thereby generating time-correlated image data. The time correlation image data may be generated by using a digital camera that superimposes a reference signal on a light intensity signal in the image sensor.

(Modification 1)
In the above embodiment, an example in which a feature related to an abnormality is detected based on a difference from the surroundings has been described, but the present invention is not limited to detecting the feature based on a difference from the surroundings. The feature may be detected based on a difference from data (reference data such as time correlation data, amplitude image data, phase image data, etc.). In this case, it is necessary to align and synchronize the spatial phase modulation illumination (stripe pattern) with the reference data.

  In this modification, the abnormality detection processing unit 105 stores the amplitude image data and phase image data obtained from the reference surface and the amplitude image data and phase image of the inspected object 150, which are stored in advance in a storage unit (not shown). The data is compared, and it is determined whether or not there is a difference greater than a predetermined standard for any one or more of the light amplitude and the light phase between the surface of the inspected object 150 and the reference surface. To do.

  This modification is an example in which the inspection system having the same configuration as that of the above embodiment is used and the surface of a normal inspection object 150 is used as a reference surface.

  While the projector 121 irradiates the fringe pattern via the screen 122, the time correlation camera 110 captures the surface of the normal inspection object 150 and generates time correlation image data. Then, the PC 100 inputs the time correlation image data generated by the time correlation camera 110, generates amplitude image data and phase image data, and stores the amplitude image data and phase image data in a storage unit (not shown) of the PC 100. deep. Then, the time correlation camera 110 captures an image of the inspected object 150 to be determined as to whether or not an abnormality has occurred, and generates time correlation image data. Then, after the PC 100 generates the amplitude image data and the phase image data from the time correlation image data, the PC 100 compares the amplitude image data and the phase image data stored in the storage unit with the amplitude image data and the phase image data of the normal inspection object 150. At that time, the comparison result between the amplitude image data and the phase image data of the normal inspection object 150 and the amplitude image data and the phase image data of the inspection object 150 to be inspected showed the characteristic of detecting an abnormality. Output as data. Then, when the feature for detecting an abnormality is equal to or greater than the predetermined reference, it can be estimated that the inspection object 150 is abnormal.

  Thereby, in this modification, it can be determined whether or not there is a difference from the surface of the normal inspection object 150, in other words, whether or not an abnormality occurs on the surface of the inspection object 150. Note that any method may be used as a method for comparing the amplitude image data and the phase image data, and thus description thereof is omitted.

  Furthermore, in this modification, based on the difference in the reference surface, an example of outputting data indicating characteristics for detecting an abnormality has been described, but the difference between the reference surface and the surroundings described in the above embodiment, May be combined to calculate a feature for detecting an abnormality. Since any method may be used as the method of combination, description thereof is omitted.

(Modification 2)
In the above-described embodiment, the example in which the stripe pattern is moved in the x direction to detect an abnormality (defect) of the inspection target 150 has been described. However, when an abnormality (defect) in which the normal distribution changes steeply in the y direction perpendicular to the x direction has occurred in the inspected object 150, the stripe pattern is moved in the y direction rather than moved in the x direction. It may be easier to detect defects by moving it. Therefore, in the modification, an example will be described in which a fringe pattern moving in the x direction and a fringe pattern moving in the y direction are alternately switched.

  The illumination control unit 102 of this modification switches the stripe pattern output to the projector 121 at predetermined time intervals. Accordingly, the projector 121 outputs a plurality of stripe patterns extending in different directions with respect to one inspection target surface.

  FIG. 11 is a diagram illustrating a switching example of the fringe pattern output by the illumination control unit 102 of the present modification. In FIG. 11A, the illumination control unit 102 changes the stripe pattern displayed by the projector 121 in the x direction. Thereafter, as shown in (B), the illumination control unit 102 shifts the stripe pattern displayed by the projector 121 in the y direction.

  Then, the control unit 103 of the PC 100 performs abnormality detection based on the time correlation image data obtained from the stripe pattern irradiation of FIG. 11A, and is obtained from the stripe pattern irradiation of FIG. Abnormality detection is performed based on the time correlation image data.

  FIG. 12 is a diagram illustrating an example in which the illumination control unit 102 of the present modification irradiates the surface including the abnormality (defect) 1601 with a stripe pattern. In the example shown in FIG. 12, an abnormality (defect) 1601 extends in the x direction. In this case, the illumination control unit 102 sets the fringe pattern to move in the y direction that intersects the x direction, in other words, in the direction that intersects the longitudinal direction of the abnormality (defect) 1601. With this setting, detection accuracy can be improved.

  In the inspection system of this modification, when the longitudinal direction of the defect generated in the inspection object 150 is random, the fringe pattern is displayed in a plurality of directions (for example, the x direction and the y direction crossing the x direction). Thus, the defect can be detected regardless of the shape of the defect, and the abnormality (defect) detection accuracy can be improved. Further, by projecting a fringe pattern that matches the shape of the abnormality, the abnormality detection accuracy can be improved.

(Lighting device)
FIG. 13 is an explanatory diagram showing optical systems of the illumination device 120, the inspected object 150, and the time correlation camera 110 in the embodiment and the modification.

  As illustrated in FIG. 13, the illumination device 120 includes a projector 121 and a screen 122. The projector 121 emits pattern light such as a stripe pattern including a bright region (bright portion) and a dark region (dark portion) as shown in FIGS. The pattern light is not limited to the stripe pattern, and may be, for example, pattern light including a bright area and a dark area arranged in a lattice pattern.

  The pattern light is projected onto the inspection object 150 via the screen 122, and the pattern light projected onto the inspection object 150 is photographed by the time correlation camera 110. In other words, the pattern light is reflected on the inspection target surface of the inspection object 150, and the time correlation camera 110 captures the pattern light reflected on the inspection target surface. Then, as described above, the time correlation camera 110 demodulates (orthogonal demodulation, quadrature detection) the pattern light that is complex-modulated (orthogonal modulation) on the surface of the inspection object 150, that is, the inspection object surface. Inspect the surface.

  Here, referring to FIG. 13, the screen 122 has an incident surface 122 a and an exit surface 122 b opposite to the incident surface 122 a, and the time correlation camera 110 converts the pattern light emitted from the projector 121. It can be understood that it functions as a lens that converges toward the lens. The pattern light emitted from the projector 121 passes through the screen 122 while being refracted. The arrangement (distance) of the projector 121, the screen 122, the inspection target surface (inspected object 150), and the time correlation camera 110 is set so that the pattern light converges in the time correlation camera 110. The screen 122 is an example of a transmissive member.

  FIG. 14 is a cross-sectional view showing the configuration of the screen 122. The screen 122 includes four members stacked in the thickness direction. In the screen 122, a first Fresnel lens 123, a second Fresnel lens 124, a transparent plate 125, and a blur sheet 126 are stacked in this order as four members from the incident surface 122a side to the output surface 122b side. Yes. These four members may be integrated by bonding or the like, or may be integrated by a coupling member (not shown) different from the four members.

  The first Fresnel lens 123 refracts light, which is emitted from the projector 121 as shown in FIG. 13 and spreads radially, on the incident surface 122a, so that the inside of the first Fresnel lens 123 has a thickness direction (see FIG. 13 and 14 in the parallel direction. The first Fresnel lens 123 is an example of a first deflecting member.

  The second Fresnel lens 124 converges the parallel light from the first Fresnel lens 123 toward the focal point on the opposite side of the first Fresnel lens 123 by refracting the light on the opposite side of the first Fresnel lens 123. To converge light. The second Fresnel lens 124 is an example of a second deflecting member. Note that the screen 122 may include a spherical lens instead of the first Fresnel lens 123 or the second Fresnel lens 124.

  The transparent plate 125 is a transparent member, for example, an acrylic resin or glass. A blur sheet 126 is disposed on the opposite side of the second Fresnel lens 124 via the transparent plate 125. The blur sheet 126 has an exit surface 122b including fine irregularities on the side opposite to the transparent plate 125. The pattern light is diffused by the fine unevenness on the emission surface 122b, and the boundary between the bright area and the dark area of the pattern light is blurred.

  For example, the blur sheet 126 is attached to the transparent plate 125. In this case, the transparent plate 125 functions as a support member for the blur sheet 126. The blur sheet 126 is an example of a blur member, and the transparent plate 125 is an example of a support member. The blur sheet 126 is a relatively soft flexible sheet, but the screen 122 may include a relatively hard plate (blur plate) instead.

  As described above, in the embodiment and the first and second modifications, the illumination device 120 includes the projector 121 and the screen 122 (transmission member), and the screen 122 converts the light from the projector 121 into parallel light. A first Fresnel lens 123 (first deflecting member) that deflects and a second Fresnel lens 124 (second deflecting member) that deflects parallel light from the first Fresnel lens 123 into convergent light are included. With such a configuration, for example, the pattern light can be easily converged on the time correlation camera 110. That is, the time correlation camera 110 can receive the light from the illumination device 120 evenly, so that the variation in correlation amplitude can be further reduced. If the light is not converged, an image that is brighter at the center and darker as it approaches the edge is obtained.In this case, the difference between the amplitude value near the center of the image and the amplitude value near the edge of the image is obtained. As a result, image processing for inspection becomes more difficult. According to this embodiment, such inconvenience hardly occurs. In addition, the convergence of light produces an image with a larger difference in luminance value between the bright area (bright area) and the dark area (dark area), so that the noise can be made relatively smaller, and errors in correlation calculation can be reduced. There is also an advantage that it can be made smaller. Note that, even in an image inspection based on an image photographed by a camera other than the time correlation camera 110, pattern light having a larger luminance value difference between a bright portion and a dark portion can be used. The advantage of having a large difference in luminance value between the dark portion and the dark portion can be obtained.

  Moreover, in the said embodiment and the modification 1, 2, the screen 122 (transmission member) contains the blur sheet 126 (blur member). Therefore, according to the present embodiment, for example, high-frequency components from the projector 121, the first Fresnel lens 123, the second Fresnel lens 124, and the like can be removed, so that an image with less noise can be obtained.

  Moreover, in the said embodiment and the modifications 1 and 2, the screen 122 (transmission member) contains the transparent plate 125 (support member). Therefore, according to the present embodiment, for example, the rigidity and strength of the screen 122 can be further increased. Therefore, for example, as the other members (first deflection member, second deflection member, blur member) included in the screen 122, a member having relatively low rigidity and strength can be used.

  The inspection program executed by the PC 100 of the above-described embodiment is a file in an installable or executable format, such as a CD-ROM, a flexible disk (FD), a CD-R, a DVD (Digital Versatile Disk), or the like. The program is provided by being recorded on a computer-readable recording medium.

  Further, the inspection program executed by the PC 100 of the above-described embodiment may be provided by being stored on a computer connected to a network such as the Internet and downloaded via the network. Further, the inspection program executed on the PC 100 according to the above-described embodiment may be provided or distributed via a network such as the Internet.

  Although some embodiments and modifications of the present invention have been described, these embodiments and modifications are presented as examples and are not intended to limit the scope of the invention. These novel embodiments and modifications can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 120 ... Illuminating device, 121 ... Projector, 122 ... Screen (transmission member), 123 ... First Fresnel lens (first deflection member), 124 ... Second Fresnel lens (second deflection member), 125 ... Transparent plate ( Support member), 126... Blur sheet (blur member).

Claims (4)

A projector that emits pattern light including a bright part and a dark part;
A transmissive member that is interposed between the projector and the inspection target surface and transmits light from the projector toward the inspection target surface;
Have
The transmission member is
A first deflecting member capable of deflecting light from the projector into parallel light;
A second deflecting member capable of deflecting parallel light from the first deflecting member into convergent light;
Including lighting equipment.   The transmitting member is provided on the opposite side of the first deflecting member with respect to the second deflecting member, and blurs the boundary between the bright part and the dark part in the pattern light irradiated on the inspection target surface. The lighting device according to claim 1, comprising a member.   The lighting device according to claim 1, wherein the transmission member includes a colorless and transparent support member. A transmissive member that is interposed between the projector and the inspection target surface and transmits light from the projector toward the inspection target surface;
A first deflecting member capable of deflecting light from the projector into parallel light;
A second deflecting member capable of deflecting parallel light from the first deflecting member into convergent light;
Including a transmissive member.

Images