JP2018103396A - Paper sheet pressing mechanism, pattern inspection device, printer and pattern inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a paper sheet pressing mechanism 10 which can minimize the spray amount of the air necessary for suppressing floating of a paper sheet P from an impression cylinder 11.SOLUTION: A paper sheet pressing mechanism 10 includes: a gas supply device 12 which presses a paper sheet P to an impression cylinder 11 by spraying the gas to the paper sheet P conveyed on the impression cylinder 11 and supplies the gas; a nozzle 13 which is connected to the gas supply device 12 and orients the gas supplied from the gas supply device 12 to the paper sheet P; a sensor 14 which detects a floating amount of the paper sheet P from the impression cylinder 11; and an adjustment mechanism 15 which is connected to the sensor 14 and adjusts at least one of the position of direction of the nozzle 13 on the basis of the detection result of the sensor 14.SELECTED DRAWING: Figure 1

Description

  The present disclosure relates to a sheet pressing mechanism that presses a sheet by blowing gas. The present disclosure also relates to a pattern inspection apparatus that employs the sheet pressing mechanism and inspects a pattern that appears on a sheet, and a printing machine that employs the pattern inspection apparatus. Further, the present disclosure relates to a pattern inspection method for inspecting a pattern displayed on a sheet.

  Conventionally, for example, offset printing machines have been provided with a pattern inspection apparatus for inspecting a pattern printed on a sheet. The following cited reference 1 describes an example of such a pattern inspection apparatus. The pattern inspection apparatus of the cited document 1 has a sheet pressing mechanism that can inspect a pattern in a state in which the sheet is not lifted or fluttered at the pattern inspection position. In this sheet pressing mechanism, a sensor for detecting the floating of the sheet and an air blowing means for blowing air onto the sheet are provided in the vicinity of the impression cylinder. Then, when the sensor detects the lift of the sheet from the impression cylinder, the air blowing means increases the amount of air blow until the sensor does not detect the lift of the sheet. In the conventional sheet transport mechanism, the actual situation is that the amount of air blown frequently increased.

  When the amount of air sprayed is increased, the energy consumed by the sheet pressing mechanism is significantly increased. For this reason, in order to reduce the consumed energy, that is, to reduce the running cost, it is preferable that the air blowing amount is not increased as much as possible. However, in the conventional sheet pressing mechanism, as described above, the amount of air blowing is frequently increased, and thus it is difficult to reduce the cost.

JP2013-074424A

  As a result of intensive studies, the present inventor increases the air blowing amount by adjusting the air blowing direction (air blowing direction from the nozzle) prior to increasing the air blowing amount. It was found that there is a case where the floating of the sheet can be eliminated.

  The present disclosure is based on the above findings. That is, an object of the present disclosure is to provide a sheet pressing mechanism capable of minimizing the amount of air blown to suppress the sheet from lifting from the impression cylinder.

  Alternatively, an object of the present disclosure is to provide a pattern inspection method capable of minimizing the amount of air blown to suppress the sheet from being lifted from the impression cylinder.

The present disclosure is a sheet pressing mechanism that presses the sheet against the impression cylinder by blowing gas on the sheet conveyed on the impression cylinder,
A gas supply device for supplying gas;
A nozzle connected to the gas supply device and directing the gas supplied from the gas supply device toward the sheet;
A sensor for detecting the amount of floating of the sheet from the impression cylinder;
An adjustment mechanism that is connected to the sensor and adjusts at least one of a position and an orientation of the nozzle based on a detection result of the sensor.

  The adjusting mechanism may adjust the position of the nozzle in a direction non-parallel to the radial direction of the impression cylinder.

  The adjustment mechanism may adjust the position and orientation of the nozzle so that the position where the gas blows against the sheet is constant.

  The nozzle may have a cylindrical shape, and a gas outlet may be provided on a side surface.

  The adjusting mechanism may adjust the orientation of the nozzle by rotating the nozzle around an axis.

Alternatively, the present disclosure includes the above-described sheet pressing mechanism,
An imaging device for imaging a pattern shown on the sheet;
An image processing apparatus comprising: an image processing apparatus that inspects the pattern by processing an image captured by the imaging apparatus.

  Or this indication is a printing machine provided with the above pattern inspection device.

Alternatively, the present disclosure relates to a pattern that appears on a sheet while pressing the sheet against the impression cylinder by blowing gas through a nozzle onto the sheet conveyed on the impression cylinder. A pattern inspection method to inspect,
A setting step for setting an allowable value of the amount of floating of the sheet from the impression cylinder;
An inspection step for inspecting whether or not the lifting amount exceeds the allowable value;
And a adjusting step of adjusting at least one of the position and orientation of the nozzle when the amount of lifting exceeds the allowable value.

  In this pattern inspection method, at least one of the nozzle and at least one of the directions is changed within a preset range, and when the lifting amount exceeds the allowable value over the entire range, the nozzle is passed through the nozzle. A second adjusting step of adjusting the position and orientation of the nozzle again by increasing the amount of the gas blown may be further provided.

  Alternatively, in the pattern inspection method, the adjusting step changes at least one of the position and orientation of the nozzle within a preset range, and the position and orientation of the nozzle when the lifting amount is minimized within the range. And setting the nozzle to the specified position and orientation.

The nozzle has a cylindrical shape and is provided with a gas outlet on the side surface.
The adjusting step may include a step of rotating the nozzle around an axis.

  According to the present disclosure, it is possible to provide a sheet pressing mechanism that can minimize the amount of air blown to suppress the sheet from being lifted from the impression cylinder.

  Alternatively, according to the present disclosure, it is possible to provide a pattern inspection method capable of minimizing the amount of air blowing required to prevent the sheet from being lifted from the impression cylinder.

It is the schematic which shows the structure of the pattern inspection apparatus by one embodiment of this indication. It is a block diagram which shows the structure of the control part of FIG. It is a figure for demonstrating an example of the aspect which changes the direction of the nozzle in the pattern inspection apparatus of FIG. 1, and has shown the state before changing the direction of a nozzle. It is a figure for demonstrating an example of the aspect which changes the direction of the nozzle in the pattern inspection apparatus of FIG. 1, and has shown the state after the direction of a nozzle was changed. It is a figure which shows the operation | movement flow of the sheet pressing mechanism in the pattern inspection apparatus of FIG. It is a figure which shows the modification of the operation | movement flow of the sheet pressing mechanism in the pattern inspection apparatus of FIG. It is a figure for demonstrating the modification of the aspect which changes the direction of the nozzle in the pattern inspection apparatus of FIG.

  Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a schematic diagram illustrating a configuration of a pattern inspection apparatus 100 according to an embodiment of the present disclosure, and FIG. 2 is a block diagram illustrating a configuration of the control unit 16 in FIG. The pattern inspection apparatus 100 is a sheet pressing mechanism 10 that presses the sheet P against the impression cylinder 11 by blowing gas onto the sheet P conveyed on the impression cylinder 11 of the sheet offset printing press. An image pickup device 22 for picking up an image shown on the sheet P, and an image that is connected to the image pickup device 22 and processes the image picked up to determine whether or not the image is appropriate A processing device 23 and an illumination device 21 for illuminating a region imaged by the imaging device 22, that is, an inspection position C where a pattern inspection is performed, are provided.

  The impression cylinder 11 sandwiches the sheet P between adjacent blanket cylinders 30 and stably transfers the ink transferred from the plate cylinder (not shown) to the blanket cylinder 30 onto the sheet P. Is for. The imaging device 22 is arranged so that the optical axis L thereof is perpendicular to the impression cylinder 11, and captures an image of a picture shown on the sheet P at the inspection position C, which will be described later. This is provided to the control unit 16. The inspection position C of the present embodiment is a linear region having a certain length in the depth direction with respect to the paper surface of FIG.

  Although not shown, the impression cylinder 11 has a gripper for gripping the sequentially conveyed sheets P with a claw base and a claw. For example, two grippers are arranged on the impression cylinder 11 at regular intervals in the circumferential direction.

  First, the sheet pressing mechanism 10 will be described with reference to FIG. The sheet pressing mechanism 10 includes a cylindrical impression cylinder 11 that conveys the sheet P, a gas supply device 12 that supplies a gas for spraying the sheet P conveyed on the impression cylinder 11, and a gas supply. A nozzle 13 that is connected to the apparatus 12 and directs the gas supplied from the gas supply apparatus 12 toward the sheet P, and a sensor that detects the amount of lift of the sheet P from the impression cylinder 11 at the inspection position C. 14 and an adjustment mechanism 15 that is connected to the sensor 14 via a control unit 16 described later and adjusts the direction of the nozzle 13 based on the detection result of the sensor 14.

  In the present embodiment, air is used as the gas. The nozzle 13 has a cylindrical outer shape having an axis extending in a direction perpendicular to the paper surface of FIG. 1, and a gas outlet (not shown) is provided on a side surface facing the impression cylinder 11. ing.

  The adjusting mechanism 15 of the present embodiment is for rotating the nozzle 13 around its axis. As an example of the configuration of the adjustment mechanism 15, a configuration is assumed in which a drive mechanism (not shown) including a motor is connected to both ends of the nozzle 13, and the nozzle 13 is rotated around the axis by the drive mechanism. Is done. By such rotation of the nozzle 13, the blowing direction of the air blown from the nozzle 13 can be adjusted.

  Further, the gas supply device 12 can adjust the air supply amount, and increases or decreases the air supply amount in accordance with a control signal from the control unit 16.

  The sheet pressing mechanism 10 further includes a control unit 16 connected to the imaging device 22, the sensor 14, the adjustment mechanism 15, and the gas supply device 12. As shown in FIG. 2, the control unit 16 stores a storage unit 16 a that stores a predetermined sheet lift amount threshold value, and whether or not the lift amount acquired from the sensor 14 exceeds the threshold value. The lift amount evaluation unit 16b to be evaluated, the adjustment mechanism control unit 16c that controls the adjustment mechanism 15 based on the evaluation result of the lift amount evaluation unit 16b, and the control (rotation of the nozzle 13) by the adjustment mechanism control unit 16c are performed. And a gas supply device control unit 16d for controlling the gas supply device 12 based on the evaluation result of the floating amount evaluation unit 16b. In general, the sheet P has a different degree of floating (flapping) depending on characteristics such as material and thickness. For this reason, the threshold value is determined in advance according to the characteristics of the sheet P to be inspected and stored in the storage unit 16a.

  FIG. 3 is a diagram for explaining an example of a mode of changing the direction of the nozzle 13 in the pattern inspection apparatus 100 of FIG. 1, and FIG. 3A shows a state before the direction of the nozzle 13 is changed. FIG. 3B shows a state after the direction of the nozzle 13 is changed.

  The most effective air blowing direction for pressing the sheet P varies depending on the characteristics of the sheet P. In view of such a situation, in the sheet pressing mechanism 10 of the present embodiment, the angle θ formed by the air blowing direction da and the optical axis L of the imaging device 22 so as to be compatible with various sheets P. Is adjustable.

  Next, the operation of the sheet pressing mechanism 10 of the pattern inspection apparatus 100 according to the present embodiment will be described with reference to FIG. FIG. 4 is a diagram showing an operation flow of the sheet pressing mechanism 10 in the pattern inspection apparatus 100 of FIG.

  First, prior to the pattern inspection, the sheet P conveyed to the impression cylinder 11 is gripped by a gripper (not shown) on the impression cylinder 11 and curved in an arc along the side surface of the impression cylinder 11. It is conveyed by. By this conveyance, the pattern is moved onto the inspection position C, and inspection is started.

  Here, the gas supply device 12 continuously supplies air to the nozzle 13 in the minimum amount in the range of the air supply amount determined according to the characteristics of the sheet P to be inspected, and The state where air is blown toward the inspection position C will be described as an initial state.

  First, the lift amount of the sheet P is continuously measured by the sensor 14. Then, the lift amount evaluation unit 16b checks whether or not the lift amount of the sheet P exceeds the threshold stored in the storage unit 16a (S101). When it is evaluated that the amount of lift of the sheet P is equal to or less than the threshold (No in S101), the pattern inspection apparatus 100 maintains the initial state (S108).

  On the other hand, when the lift amount evaluation unit 16b evaluates that the lift amount of the sheet P exceeds the threshold (Yes in S101), the adjustment mechanism control unit 16c determines the air blowing direction da and the imaging device. The adjusting mechanism 15 is driven so that the angle θ formed by the optical axis L of 22 continuously changes in one direction (S102). While the adjusting mechanism 15 is being driven, that is, while the air blowing direction is being changed, the sensor 14 and the lift amount evaluation unit 16b inspect the lift amount of the sheet P in real time (S103).

  When the lift amount evaluation unit 16b evaluates that the lift amount of the sheet P is equal to or less than the threshold value at any angle (No flow in S103), the adjustment mechanism control unit 16c performs the air blowing direction. Is set to the angle (S107), and the state is maintained (S108). As a result, the state in which the lift amount of the sheet P is equal to or less than the threshold value is maintained, and stable pattern inspection is realized.

  On the other hand, even if the angle θ formed by the air blowing direction da and the optical axis L of the imaging device 22 is continuously changed in one direction, the amount of lift of the sheet P exceeds the threshold over the entire range. (The flow of Yes in S103), the adjustment mechanism control unit 16c continuously changes the angle θ formed by the air blowing direction da and the optical axis L of the imaging device 22 in the direction opposite to S102 ( S104). Then, the gas supply device control unit 16d increases the air supplied from the gas supply device 12 to the nozzle 13 by a predetermined amount (S105). That is, the amount of air blown onto the sheet P is increased by a predetermined amount. At this time, if the floating amount of the sheet P is equal to or less than the threshold (No in S106), the state is maintained (S108). On the other hand, if the lift amount of the sheet P still exceeds the threshold value (Yes in S106), the process described above is performed until it is detected in S106 that the lift amount of the sheet P is equal to or less than the threshold value. The flow from S102 to S105 is repeated.

  According to the sheet pressing mechanism 10 and the pattern inspection apparatus 100 as described above, the air blowing direction can be adjusted, so that the air necessary for suppressing the sheet P from lifting from the impression cylinder 11 is prevented. It is possible to provide the sheet pressing mechanism 10 and the pattern inspection apparatus 100 in which the spray amount is minimized.

  Alternatively, according to the pattern inspection method as described above, the step of adjusting the air blowing direction is provided, thereby minimizing the amount of air blown to suppress the sheet P from being lifted from the impression cylinder 11. can do.

  Further, since the nozzle 13 has a cylindrical shape and is provided with a gas outlet on the side surface, air can be directed in a specific direction with a simple structure.

  The adjusting mechanism 15 adjusts the direction of the nozzle 13 by rotating the cylindrical nozzle 13 around the axis. For this reason, the space required for changing the air blowing direction can be minimized, and the air blowing direction can be easily changed.

  Furthermore, in the sheet-fed offset printing machine employing the sheet pressing mechanism 10 or the pattern inspection apparatus 100 according to the present embodiment, it is possible to realize a stable pattern inspection while reducing the running cost.

  Next, a modification of the pattern inspection method will be described with reference to FIG. FIG. 5 is a diagram showing a modification of the operation flow of the sheet pressing mechanism 10 in the pattern inspection apparatus 100 of FIG. In the example described below, the sheet pressing mechanism 10 and the pattern inspection apparatus 100 have the same configuration as that of the above-described embodiment, and thus detailed description thereof is omitted.

  As described above, the sheet holding mechanism 10 and the pattern inspection apparatus 100 continuously inspect the amount of lifting of the sheet P by the sensor 14. Therefore, in the step (S102) in which the adjustment mechanism control unit 16c changes the angle θ between the air blowing direction da and the optical axis L of the imaging device 22 by driving the adjustment mechanism 15 (S102). If the angle θ1 that can hold the sheet P can be specified, a series of inspection flows can be executed more efficiently and quickly. The operation flow shown in FIG. 5 focuses on this.

  First, prior to the pattern inspection, the sheet P conveyed to the impression cylinder 11 is gripped by a gripper (not shown) on the impression cylinder 11 and curved in an arc along the side surface of the impression cylinder 11. It is conveyed by. By this conveyance, the pattern to be inspected is moved to the inspection position C, and the inspection is started.

  Here again, the gas supply device 12 continuously supplies air to the nozzle 13 in the minimum amount in the range of the air supply amount determined according to the characteristics of the sheet P to be inspected, and The state where air is blown toward the inspection position C will be described as an initial state.

  First, the lift amount of the sheet P is continuously measured by the sensor 14. Then, the lift amount evaluation unit 16b evaluates whether the lift amount of the sheet P exceeds the threshold stored in the storage unit 16a (S201). When it is evaluated that the floating amount of the sheet P is equal to or less than the threshold (No in S202), the pattern inspection apparatus 100 maintains the initial state (S207).

  On the other hand, when it is evaluated that the amount of lifting of the sheet P exceeds the threshold (Yes in S202), the adjustment mechanism control unit 16c determines that the air blowing direction da and the optical axis L of the imaging device 22 are the same. The adjusting mechanism 15 is driven so that the formed angle θ continuously changes in one direction (S202). While the adjustment mechanism 15 is being driven, that is, while the air blowing direction is being changed, the sensor 14 and the lift amount evaluation unit 16b inspect the lift amount of the sheet P in real time. The operation up to this point is the same as in the above-described embodiment.

  In this modification, the sensor 14 and the lift amount evaluation unit 16b are configured such that, while the air blowing direction da is changed by the adjustment mechanism control unit 16c, the lift amount of the sheet P is minimized within the change range. The air blowing direction at the time is determined. The angle θ corresponding to the blowing direction at this time is θ1 described above. Then, the adjustment mechanism control unit 16c drives the adjustment mechanism 15 so that the angle θ becomes θ1, and sets the direction of the nozzle 13 (S203).

  Then, in the direction of the nozzle 13 corresponding to the angle θ1 set in S203, when the lift amount evaluation unit 16b evaluates that the lift amount of the sheet P is equal to or less than the threshold value (No flow in S204). That state is maintained (S207).

  Even in the direction of the nozzle 13 corresponding to the angle θ1 set in S203, when the lift amount evaluation unit 16b evaluates that the lift amount of the sheet P exceeds the threshold (Yes in S204) The gas supply device control unit 16d increases the amount of air blown by the gas supply device 12 supplied to the nozzle 13 by a predetermined amount (S205). Then, the lift amount evaluation unit 16b checks whether or not the lift amount of the sheet P exceeds the threshold stored in the storage unit 16a (S206).

  When the lift amount evaluation unit 16b evaluates that the lift amount of the sheet P is equal to or less than the threshold (No in S206), the state is maintained (S207).

  On the other hand, when the lift amount of the sheet P still exceeds the threshold (Yes in S206), the lift amount evaluation unit 16b evaluates that the lift amount of the sheet P is equal to or less than the threshold. Until this, the step of increasing the amount of blown air (S205) is repeated. During this time, the nozzle 13 is maintained in the direction corresponding to the angle θ1. If the amount of lifting of the sheet P becomes equal to or less than the threshold (Yes in S206), the air blowing amount at that time is maintained (S207). As a result, the state in which the lift amount of the sheet P is equal to or less than the threshold value is maintained, and stable pattern inspection is realized.

  Even in the pattern inspection method as described above, by having the step of adjusting the air blowing direction, it is possible to minimize the amount of air blowing required to suppress the sheet P from lifting from the impression cylinder 11. it can.

  In particular, in the pattern inspection method according to the present embodiment, the angle θ1 at which the sheet P can be pressed most effectively in the step (S202) in which the adjustment mechanism control unit 16c drives the adjustment mechanism 15 is specified. Thus, a series of inspection flows can be completed more efficiently and quickly.

  In the above-described sheet pressing mechanism 10 and the pattern inspection apparatus 100, the nozzle 13 has been described as rotating about the axis, but the present invention is not limited to such a mode. For example, as another aspect, the nozzle 13 may be moved so that the position of the axis changes, or such movement and rotation around the axis may be combined. Moreover, the specific aspect of a movement is not limited, For example, you may move to a linear form or to move along a circular arc.

  As an example, an aspect of adjusting the position and orientation of the nozzle 13 by combining movement along an arc and rotation around an axis will be described with reference to FIG.

  FIG. 6 shows a modification of the aspect of changing the orientation of the nozzle 13 in the pattern inspection apparatus 100 of FIG. 1. The position and orientation of the nozzle 13 are adjusted by combining movement along an arc and rotation around an axis. It is a figure for demonstrating a mode. In addition to the function of rotating the nozzle 13 about its axis, the adjusting mechanism 15 of the present modification includes a line segment connecting the inspection position C and the axis of the nozzle 13 with the axis of the nozzle 13 as the center. It also has a function of moving along an arc whose radius is.

  Then, in the inspection flow, when it is evaluated that the floating amount of the sheet P exceeds the threshold (S101 in FIG. 4 and S201 in FIG. 5), the adjustment mechanism control unit 16c drives the adjustment mechanism 15, The axis of the nozzle 13 is moved along the aforementioned arc. At this time, the adjustment mechanism control unit 16c makes the air blowing direction coincide with the line segment connecting the inspection position C and the axis of the nozzle 13, that is, so that the air is always blown out toward the inspection position C. The nozzle 13 is rotated around the axis. By such movement and rotation, the angle at which air blows against the sheet P is adjusted, and air always blows at the inspection position C. The above steps can be employed in each flow in place of step S102 in the inspection flow shown in FIG. 4 and in place of step S202 in the inspection flow in FIG. This makes it possible to realize a more stable pattern inspection while reducing running costs.

  The above-described series of inspection flows may be performed on all the sheets P that are sequentially conveyed on the impression cylinder 11.

  Alternatively, when printing is performed on a sheet P having the same material and characteristics such as thickness, the above-described series of inspection flows is performed only on the first sheet or several sheets P. May be. In this case, by executing the inspection flow on the first sheet or several sheets P, the optimum air blowing amount and blowing direction are specified, and the specified air blowing amount and blowing direction are specified. May be applied to the subsequent sheet P. In the case where the inspection flow is executed only for the first few sheets P, a series of flows may be executed for each sheet P, or the series of flows may be performed on the sheets. You may divide and execute according to the number of P.

DESCRIPTION OF SYMBOLS 10 Sheet | seat holding | suppressing mechanism 11 Pressure cylinder 12 Gas supply apparatus 13 Nozzle 14 Sensor 15 Adjustment mechanism 16 Control part 16a Storage part 16b Lifting amount evaluation part 16c Adjustment mechanism control part 16d Gas supply apparatus control part 21 Illumination apparatus 22 Imaging device 23 Image Processing device 30 Blanket cylinder 100 Picture inspection device P Sheet L L Optical axis of imaging device

Claims (11)

A sheet pressing mechanism that presses the sheet against the impression cylinder by blowing gas against the sheet conveyed on the impression cylinder,
A gas supply device for supplying gas;
A nozzle connected to the gas supply device and directing the gas supplied from the gas supply device toward the sheet;
A sensor for detecting the amount of floating of the sheet from the impression cylinder;
An adjustment mechanism that is connected to the sensor and adjusts at least one of the position and orientation of the nozzle based on the detection result of the sensor;
A sheet pressing mechanism characterized by comprising: The sheet pressing mechanism according to claim 1, wherein the adjustment mechanism adjusts the position of the nozzle in a direction non-parallel to the radial direction of the impression cylinder. 2. The sheet pressing mechanism according to claim 1, wherein the adjusting mechanism adjusts a position and an orientation of the nozzle so that a position where the gas blows against the sheet is constant. The sheet pressing mechanism according to any one of claims 1 to 3, wherein the nozzle has a cylindrical shape and is provided with a gas outlet on a side surface. The sheet pressing mechanism according to claim 4, wherein the adjustment mechanism adjusts the direction of the nozzle by rotating the nozzle around an axis. A sheet pressing mechanism according to any one of claims 1 to 5,
An imaging device for imaging a pattern shown on the sheet;
An image processing apparatus that inspects the pattern by processing an image captured by the imaging apparatus;
A pattern inspection apparatus characterized by comprising:   A printing machine comprising the pattern inspection apparatus according to claim 6. A pattern inspection method for inspecting a pattern displayed on a sheet while pressing the sheet against the impression cylinder by blowing a gas through a nozzle onto the sheet conveyed on the impression cylinder. There,
A setting step for setting an allowable value of the amount of floating of the sheet from the impression cylinder;
An inspection step for inspecting whether or not the lifting amount exceeds the allowable value;
An adjustment step of adjusting at least one of the position and orientation of the nozzle when the lifting amount exceeds the allowable value;
A pattern inspection method characterized by comprising: When at least one of the position and orientation of the nozzle is changed within a preset range, and the lift amount exceeds the allowable value over the entire range, the amount of the gas blown through the nozzle The pattern inspection method according to claim 8, further comprising a second adjustment step of adjusting the position and orientation of the nozzle again by increasing the value of the nozzle. In the adjustment step, at least one of the position and orientation of the nozzle is changed within a preset range, and the position and orientation of the nozzle when the lifting amount is minimum in the range is specified, and the nozzle is specified. The pattern inspection method according to claim 8, further comprising a step of setting to a set position and orientation. The nozzle has a cylindrical shape and is provided with a gas outlet on the side surface.
The pattern inspection method according to claim 8, wherein the adjusting step includes a step of rotating the nozzle around an axis.

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