JP2018084481A - Destaticization effect checker - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a destaticization effect checker capable of evaluating static electricity elimination performance in a destaticization process, upon destaticization of electrification charges on an object surface using a static eliminator.SOLUTION: A destaticization effect checker 1000 is provided that uses an electrostatic potential measuring instrument M having a measuring electrode ER to evaluate a destaticization effect of a static eliminator. The destaticization effect checker 1000 has a container 1100 for separating the measuring electrode from ion generated by the static eliminator, and a charging film 1120 opposite to the measuring electrode is provided in the container. The charging film 1120 is charged by charging means 2000, then a line of electric force EL1 of the electrostatic charge of the charged charging film is penetrated through the charging film, and is caused to reach the measuring electrode inside the container. At this time, measurement of intensity of the line of electric force while the electrostatic charge of the charging film is eliminated by the static eliminator, enables the destaticization effect to be accurately evaluated in real time.SELECTED DRAWING: Figure 1

Description

The present invention relates to a static elimination effect checker for evaluating the performance of a static eliminator, particularly a static elimination effect.

As shown in FIG. 7, when measuring the electrostatic charge of the object OB to be measured, the charged electrode (surface) S is opposed to the measurement electrode ER of the electrostatic potential measuring device M with a certain distance D, and the charged charge The electric field line EL1 coming out of C is received by the measurement electrode ER, but if the electrostatic potential measurement is performed in the process of neutralizing the measurement target object OB by the static eliminator IN, it is radiated from the static eliminator IN to the measurement target object OB. The ions IO enter the periphery of the measurement electrode ER, and the measurement electrode ER also detects the electric lines of force EL2 generated by the ions IO.

That is, when only the electric force line EL1 is to be measured by the electrostatic potential measuring device M, the error EL2 is included. In general, the strength of the electric field lines is inversely proportional to the square of the distance from the charged object. In this case, since the ions IO can also exist in the vicinity of the measurement electrode ER, the electric flux line EL2 as an error reaches a level that cannot be ignored.
For this reason, the conventional electrostatic potential measuring device M cannot measure the electrostatic potential in the static elimination process, and thus cannot evaluate the static elimination performance in the static elimination process.

  The present invention was devised to solve such conventional problems, and an object thereof is to evaluate the static electricity removal performance in the charge removal process.

The static elimination effect checker according to claim 1 according to the present invention is a static elimination effect checker for evaluating the static elimination effect of the static elimination process by the static eliminator using an electrostatic potential measuring instrument having a measurement electrode,
A container for isolating the measurement electrode from ions generated by the static eliminator, the container being provided with a charged film that is spaced apart from the measurement electrode.
Thereby, the influence of the ion of the static eliminator on the measurement electrode is eliminated, and the static electricity removal performance in the static elimination process can be evaluated.

The static elimination effect checker according to claim 2 of the present invention is the static elimination effect checker according to claim 1, wherein a portion other than the charging film (hereinafter referred to as an isolation portion) in the container hermetically accommodates the measurement electrode. As described above, the housing is mounted on the electrostatic potential measuring device.
As a result, the measurement electrode can be isolated from the ions of the static eliminator.

The neutralization effect checker according to the third aspect of the present invention is the neutralization effect checker according to any one of the first to second aspects, wherein the charging film is electrically conductive in a thin or central portion of an insulator. It consists of an insulating plate.
As a result, when the outside of the charged film is charged, in the case of the insulator film, static electric lines of force pass through the charged film and reach the measurement electrode. Further, in the case of an insulating plate in which the central portion is electrically connected to the front and back, static electric lines of force on the front surface and the back surface of the central portion reach the measurement electrode.

In the static elimination effect checker according to claim 4 according to the present invention, in the static elimination effect checker according to claim 2 or 3, an uneven portion capable of ensuring a creeping distance is formed around the charged film in the isolation portion. The
As a result, static electricity leakage of the charged film is prevented.

The neutralization effect checker according to claim 5 according to the present invention is the neutralization effect checker according to any one of claims 2 to 4, wherein a ground electrode is provided in a portion separated from the charging film in the isolation portion. Is provided.
As a result, the influence of the leakage electric field lines from the outside through the isolation part can be reduced.

A neutralization effect checker according to a sixth aspect of the present invention is the neutralization effect checker according to any one of the first to fifth aspects, further comprising a charging unit that is disposed outside the container and charges the charging film. Prepare.
This facilitates the charging operation.

  The static elimination effect checker according to claim 7 of the present invention is the static elimination effect checker according to claim 6, wherein the charging means is a friction means.

  The static elimination effect checker according to claim 8 of the present invention is the static elimination effect checker according to claim 6, wherein the charging means is an ion generator that irradiates ions.

A neutralization effect checker according to a ninth aspect of the present invention is the neutralization effect checker according to the eighth aspect, further comprising a counter electrode that can be disposed and removed at a position facing the charging film inside the container.
Thereby, the charge amount of the charging film can be increased.

The neutralization effect checker according to a tenth aspect of the present invention is the neutralization effect checker according to the ninth aspect, further comprising driving means for driving the counter electrode to be disposed and removed at a position facing the charging film. Prepare.
As a result, after the charging film is charged, the counter electrode can be removed smoothly and quickly and the measurement operation can be started.

According to the eleventh aspect of the present invention, there is provided a method for evaluating a measurement performance against a static elimination effect, wherein the measurement electrode is isolated from ions generated in an ambient atmosphere by the static eliminator, and the charging provided in the container is performed. The charged film is charged with the film facing the measurement electrode, and the charged film is discharged with a static eliminator while the electrostatic charge of the charged film is measured with an electrostatic potential measuring device.
Thereby, the influence of the ion of the static eliminator on the measurement electrode is eliminated, and the static elimination effect of the static elimination process can be measured and evaluated.

  According to the present invention, the performance of the static eliminator, particularly the static elimination effect, can be evaluated by eliminating errors due to ions.

It is a longitudinal cross-sectional view which shows 1st Example of the static elimination effect checker which concerns on this invention. FIG. 2 is a perspective view of FIG. 1. It is sectional drawing of a charging film in case the charging film of FIG. 1 is a thin charging film. It is sectional drawing of a charging film in case the charging film of FIG. 1 is a thick charging film. It is sectional drawing of a charging film in case the charging film of FIG. 1 is a thick charging film. It is a perspective view which shows 3rd Example of the static elimination effect checker which concerns on this invention. It is a longitudinal cross-sectional view which shows 4th Example of the static elimination effect checker based on this invention. It is a longitudinal cross-sectional view which shows the state which removed the counter electrode in 4th Example. It is a flowchart which shows the evaluation method of the measurement performance with respect to the static elimination effect based on this invention. It is a longitudinal cross-sectional view which shows the conventional static elimination effect measurement condition.

  Next, preferred embodiments of the static elimination effect checker according to the present invention will be described with reference to the drawings.

As shown in FIGS. 1 and 2, the static elimination effect checker 1000 includes a container 1100 that isolates the measurement electrode ER of the electrostatic potential measurement device M from the ions IO generated by the static eliminator IN.
The container 1100 is a rectangular tube-shaped casing that encloses the measurement electrode ER, and is separated from the isolation portion 1110 having the bottom surface, the side surface, and the peripheral edge of the upper surface, and in the center of the isolation portion 1110 while facing the measurement electrode ER. Charging film 1120.

  The charging film 1120 is separated from the measurement electrode ER while being charged, and is charged by a charging unit (not shown) that charges the container 1100 from the outside to + or −. As the charging means, friction means (not shown) for rubbing the outer surface of the charging film 1120, an ion generator 2000 (shown in FIG. 4 described in relation to the fourth embodiment), or the like can be applied.

  Most of the electrostatic force lines EL1 of the electrostatic charge in the charged charged film 1120 pass through the charged film 1120 and reach the measurement electrode ER inside the container 1100. Here, the static elimination effect can be measured by measuring the strength of the electric field lines EL1 while neutralizing the electrostatic charge of the charged film 1120 with the static eliminator IN.

Since the isolation part 1110 of the container 1100 prevents the ion IO itself generated by the static eliminator IN from entering the vicinity of the measurement electrode ER, the influence of the electric line of force EL2 of the ion IO can be completely eliminated. Therefore, the static elimination effect can be measured with high accuracy.

The isolation part 1110 is made of an insulator, and a curved surface part 1130 formed in a bellows shape is formed around the charging film 1120 in order to ensure a creepage distance. As a result, the electrostatic charge of the charged film 1120 is prevented from leaking to the isolation part 1110, and a stable charge removal effect by only the charge remover IN can be measured.
The ground electrode 1140 is connected to the inner surface of the side wall of the isolation part 1110, and it is possible to prevent the lines of electric force from entering the isolation part 1110 and the isolation part 1110 from the outside to the inside. The electric lines of force EL2 of the ions IO are slightly transmitted through the charged film 1120, but the electrostatic charge of the ions IO is extremely small compared to the electrostatic charge of the charged film 1120, and further away from the measurement electrode ER. The measurement value of the electrostatic potential measuring device M is hardly affected.

  Next, Example 2 of the static elimination effect checker according to the present invention will be described with reference to FIGS. 1-1, 1-2, and 1-3.

In the second embodiment, as shown in FIG. 1C, a conductive path CP (FIGS. 1-3) capable of current leakage is provided on the charging film 1120 on both sides. Since the conductive film 1120 of Example 1 does not have such a conductive path, it is necessary to form the charged film 1120 very thinly in order to accurately measure the charge removal effect from the electric force line EL1 that has passed through the charged film 1120. is there. When it is thick, the electric lines of force are attenuated and cannot be measured as shown in FIG. On the other hand, in Example 2 provided with the conductive path CP shown in FIG. 1-3, even if the thickness of the charging film 1120 is increased, it is possible to measure the static elimination effect with high accuracy, and the mechanical strength of the charging film 1120 is increased. Can be increased.
The conductive path CP is preferably provided at a position facing the measurement electrode ER.

As a method of forming a conductive path in the charging film 1120, for example, the following can be performed. (1) A high voltage is applied to both surfaces of the charging film 1120 made of an insulator to cause dielectric breakdown in the charging film 1120. A fine through hole is formed to form a conductive path.
(2) A fine through hole is formed in a film made of an insulator with a small diameter drill to provide conductivity to the inner wall of the hole to form a charged film 1120, and the fine through hole is used as a conductive path.
(3) A fine through hole is formed in a film made of an insulator by laser processing to make the inner wall of the hole conductive, thereby forming a charged film 1120, and the fine through hole is used as a conductive path.

  Next, a third embodiment of the static elimination effect checker according to the present invention will be described with reference to FIG. In addition, the same code | symbol is attached | subjected to the same or same part as Examples 1-2 in the figure, and description is abbreviate | omitted.

  As shown in FIG. 3, the container 1100 of the static elimination effect checker 1000 adopts a cylindrical shape instead of the rectangular tube shape of the first embodiment. As described above, the container 1100 can adopt various shapes as long as it is a casing that encloses the measurement electrode ER.

  In addition, the isolation part 1110 can also be made into an electroconductive material, By this, a ground electrode can be abbreviate | omitted.

  Next, a charging method of the charging film 1120 of the static elimination effect checker according to the present invention will be described as Example 4 with reference to FIGS. In addition, in the figure, the same code | symbol is attached | subjected to the same or same part as Examples 1-3, and description is abbreviate | omitted. The charging film 1120 may be charged by friction means or may be charged by an ion generator.

Here, a method for more effectively charging using an ion generator will be described.
In FIG. 4, an ion generator 2000 is employed as the charging means, and the charge is increased.
In the container 1100 of the static elimination effect checker 1000, a counter electrode 1200 facing the charging film 1120 is disposed in proximity to the back of the charging film 1120 (inside). When the charged film 1120 is irradiated with ions, the ion irradiation is converged by the effect of the counter electrode 1200, and as a result, the charged film 1120 is more strongly charged.

After the charged film 1120 is sufficiently charged, the counter electrode 1200 is removed as shown in FIG. 5 (in FIG. 5, the counter electrode 1200 before removal is indicated by an imaginary line), and the electric lines of force EL1 from the charged film 1120 are displayed. It becomes possible to measure with the electrostatic potential measuring device M. The counter electrode 1200 is preferably grounded.
It is also possible to provide a drive unit that moves the counter electrode 1200 between a position facing the charging film 1120 and a removal position.

  The above description relates to the static elimination effect checker, but the configuration of the static elimination effect checker is not limited to the first to third embodiments, and any configuration that can be applied to the static elimination effect evaluation method according to the present invention described below. Can be adopted.

As shown in FIG. 6, the following steps are sequentially executed.
Step S1001: First, the measurement electrode is isolated from ions generated by the static eliminator in an ambient atmosphere by a container.
Step S1002: The charged film provided in the container is made to face the measurement electrode.
Step S1003: The charged film of the container is charged by the charging means.
Step S1004: The electrostatic charge of the charged film is measured by an electrostatic potential measuring device.
Step S1005: The charge film is neutralized by a static eliminator.
Step S1006: It is determined whether or not a predetermined measurement end condition, for example, a predetermined measurement time has elapsed and the electrostatic potential level has been reduced to a predetermined value, and if not satisfied, the process returns to step S1004 and satisfied. If so, the process ends.
Note that steps S1004 to S1005 are equivalent to measuring the electrostatic potential while performing static elimination with the static eliminator.

CP Conductive path ER Measuring electrode D Constant distance EL1, EL2 Line of electric force IN Static eliminator IO Ion M Electrostatic potential measuring device OB Measuring object S Charging surface (surface)
1000 Static elimination effect checker 1100 Container 1110 Separating part 1120 Charged film 1130 Curved part 1140 Ground electrode 1200 Counter electrode 2000 Ion generator

Claims (11)

A static elimination effect checker for evaluating the static elimination effect by a static eliminator using an electrostatic potential measuring instrument having a measurement electrode,
A container for isolating the measurement electrode is provided for ions generated by the static eliminator,
Providing a charged film facing the measurement electrode while being separated;
The charged film is charged,
The static electricity measuring apparatus, wherein the electrostatic potential measuring instrument reads electric lines of force coming out of the charged film from the back surface of the charged film. The static elimination effect checker according to claim 1,
A portion of the container other than the charged film (hereinafter referred to as an isolation portion) is a case attached to an electrostatic potential measuring device so as to enclose and store the measurement electrode. It is a static elimination effect checker of any one of Claim 1 or 2, Comprising:
The neutralization effect checker according to claim 1, wherein the charging film is made of an insulating plate that is electrically conductive only on a thin film or a central portion of the insulator. It is a static elimination effect checker of any one of Claim 2 or 3,
The neutralization effect checker according to claim 1, wherein the isolation portion includes an insulator having a concavo-convex portion that can ensure a creepage distance around the charging film. The static elimination effect checker according to any one of claims 2 to 4,
A neutralization effect checker, wherein a ground electrode is provided on a side wall of the isolation part. The static elimination effect checker according to any one of claims 1 to 5,
A static elimination effect checker, further comprising a charging unit that is disposed outside the container and charges the charging film to + or-.   The static elimination effect checker according to claim 6, wherein the charging means is a friction means.   7. The static elimination effect checker according to claim 6, wherein the charging means is an ion generator that irradiates ions. The static elimination effect checker according to claim 8,
A neutralization effect checker further comprising a counter electrode that can be disposed and removed behind (inside) the charging film inside the container. The static elimination effect checker according to claim 9,
The neutralization effect checker further comprising driving means for driving the counter electrode so as to be disposed and removed at a position facing the charging film. A method for measuring and evaluating the static elimination effect of a static elimination process by a static eliminator of an electrostatic potential measuring instrument having a measurement electrode,
The container isolates the measurement electrode from ions generated by the static eliminator,
The charged film provided on the container is opposed to the measurement electrode,
Charging the charging film;
While neutralizing the charged film with a static eliminator, while measuring the electrostatic charge of the charged film from the back side of the charged film with an electrostatic potential measuring device,
A method to measure and evaluate the static elimination effect of the static elimination process by the static eliminator.

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