JP2018030277A5 - - Google Patents

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Publication number
JP2018030277A5
JP2018030277A5 JP2016162999A JP2016162999A JP2018030277A5 JP 2018030277 A5 JP2018030277 A5 JP 2018030277A5 JP 2016162999 A JP2016162999 A JP 2016162999A JP 2016162999 A JP2016162999 A JP 2016162999A JP 2018030277 A5 JP2018030277 A5 JP 2018030277A5
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JP
Japan
Prior art keywords
ozone
electrode chamber
foreign matter
surface modification
matter generated
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Application number
JP2016162999A
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English (en)
Japanese (ja)
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JP6750870B2 (ja
JP2018030277A (ja
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Priority to JP2016162999A priority Critical patent/JP6750870B2/ja
Priority claimed from JP2016162999A external-priority patent/JP6750870B2/ja
Publication of JP2018030277A publication Critical patent/JP2018030277A/ja
Publication of JP2018030277A5 publication Critical patent/JP2018030277A5/ja
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Publication of JP6750870B2 publication Critical patent/JP6750870B2/ja
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JP2016162999A 2016-08-23 2016-08-23 表面改質装置 Active JP6750870B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016162999A JP6750870B2 (ja) 2016-08-23 2016-08-23 表面改質装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016162999A JP6750870B2 (ja) 2016-08-23 2016-08-23 表面改質装置

Publications (3)

Publication Number Publication Date
JP2018030277A JP2018030277A (ja) 2018-03-01
JP2018030277A5 true JP2018030277A5 (enExample) 2019-05-16
JP6750870B2 JP6750870B2 (ja) 2020-09-02

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ID=61302685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016162999A Active JP6750870B2 (ja) 2016-08-23 2016-08-23 表面改質装置

Country Status (1)

Country Link
JP (1) JP6750870B2 (enExample)

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