JP2018027006A5 - - Google Patents
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- JP2018027006A5 JP2018027006A5 JP2017132935A JP2017132935A JP2018027006A5 JP 2018027006 A5 JP2018027006 A5 JP 2018027006A5 JP 2017132935 A JP2017132935 A JP 2017132935A JP 2017132935 A JP2017132935 A JP 2017132935A JP 2018027006 A5 JP2018027006 A5 JP 2018027006A5
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- vibration
- type actuator
- actuator according
- vibrating
- vibrating body
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- 230000003014 reinforcing Effects 0.000 claims description 2
- 238000005452 bending Methods 0.000 claims 10
- 238000006243 chemical reaction Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 239000011888 foil Substances 0.000 claims 1
Description
本発明に係る振動型アクチュエータは、振動体と接触体とを相対的に移動させる振動型アクチュエータであって、前記振動体を支持し、前記振動体へ給電する支持部材を有し、前記支持部材は、前記振動体に接合される振動部と、前記支持部材を所定の位置に固定するために前記振動体を挟んで対向して設けられる第1固定部および第2固定部と、前記振動部と前記第1固定部とを連結して前記振動体を支持する第1支持部と、前記振動部と前記第2固定部とを連結して前記振動体を支持する第2支持部と、前記振動体から前記第1固定部へ延出し、かつ、前記振動体から前記第2固定部へ延出し、前記振動体へ給電する導通部材と、を有し、前記導通部材の前記第1支持部と前記第2支持部における配線形状は、一平面上で互いに直交すると共に前記振動体の厚み方向と直交する第1対称軸と第2対称軸の各軸について対称の形状を有することを特徴とする。 Vibration actuator according to the present invention is a vibration type actuator for relatively moving the contact member and the vibration member, it supports the vibrating member has a support member for supplying power to the vibrator, the supporting member , it said a vibrating section is bonded to the vibrating body, said first fixing portion is provided on opposite sides of the vibrating body and a second fixing portion for fixing said support member to a predetermined position, the vibrating portion And a first support part for connecting the first fixed part to support the vibrating body, a second support part for connecting the vibrating part and the second fixed part to support the vibrating body, extending into the first fixing portion from the vibrating body, and extends from the vibrator to the second fixing portion, have a, a conductive member for supplying power to the vibrating member, the first support portion of said conductive member the wiring shape of the second support portion, characterized in that have a symmetrical shape about the respective axes of the first symmetry axis and the second axis of symmetry perpendicular to the thickness direction of the vibrating body with mutually orthogonal on one plane and And
以下、本発明の実施形態について、添付図面を参照して詳細に説明する。最初に本発明の第1実施形態について説明する。図1(a)は、本発明の第1実施形態に係る振動型アクチュエータ10の概略構成を示す斜視図である。図1(b)は、振動型アクチュエータ10を構成する振動体11の概略構成を示す斜視図である。振動型アクチュエータ10は、被駆動体2(接触体)、振動体11、FPC(フレキシブルプリント基板)12及び裏打ち材(補強部材)13を有する。振動体11は、弾性体11a、圧電素子11b及び一対の突起部11cを有する。説明の便宜上、図1に示す互いに直交するX軸、Y軸、Z軸を定める。Y軸方向は、2つの突起部11cを結ぶ方向である。Z軸方向は、突起部11cの突出方向、弾性体11a及び圧電素子11bの厚み方向である。X軸方向は、Y軸方向及びZ軸方向の両方向と直交する方向であり、被駆動体2が振動体11により摩擦駆動されることにより、被駆動体2と振動体11とが相対的に移動する方向である。 Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, a first embodiment of the present invention will be described. FIG. 1A is a perspective view showing a schematic configuration of a vibration type actuator 10 according to the first embodiment of the present invention. FIG. 1B is a perspective view showing a schematic configuration of a vibrating body 11 that constitutes the vibrating actuator 10. The vibration type actuator 10 includes a driven body 2 (contact body) , a vibration body 11, an FPC (flexible printed circuit board) 12, and a backing material (reinforcing member) 13. The vibrating body 11 has an elastic body 11a, a piezoelectric element 11b, and a pair of protrusions 11c. For convenience of description, the X axis, Y axis, and Z axis shown in FIG. The Y-axis direction is the direction connecting the two protrusions 11c. The Z-axis direction is the protruding direction of the protrusion 11c and the thickness direction of the elastic body 11a and the piezoelectric element 11b. The X-axis direction is a direction orthogonal to both the Y-axis direction and the Z-axis direction, and when the driven body 2 is frictionally driven by the vibrating body 11, the driven body 2 and the vibrating body 11 are relatively moved. It is the direction to move.
Claims (18)
前記振動体を支持し、前記振動体へ給電する支持部材を有し、
前記支持部材は、
前記振動体に接合される振動部と、
前記支持部材を所定の位置に固定するために前記振動体を挟んで対向して設けられる第1固定部および第2固定部と、
前記振動部と前記第1固定部とを連結して前記振動体を支持する第1支持部と、
前記振動部と前記第2固定部とを連結して前記振動体を支持する第2支持部と、
前記振動体から前記第1固定部へ延出し、かつ、前記振動体から前記第2固定部へ延出し、前記振動体へ給電する導通部材と、を有し、
前記導通部材の前記第1支持部と前記第2支持部における配線形状は、一平面上で互いに直交すると共に前記振動体の厚み方向と直交する第1対称軸と第2対称軸の各軸について対称の形状を有することを特徴とする振動型アクチュエータ。 A vibration-type actuator for relatively moving the contact member and the vibration member,
A support member that supports the vibrating body and supplies power to the vibrating body ,
The support member is
A vibrating portion joined to the vibrating body,
A first fixing portion and a second fixing portion that are provided to face each other with the vibrating body interposed therebetween to fix the support member at a predetermined position;
A first support part that connects the vibrating part and the first fixing part to support the vibrating body;
A second support part that connects the vibrating part and the second fixing part to support the vibrating body;
Extending into the first fixing portion from the vibrating member, and extends from the vibrator to the second fixing portion, have a, a conductive member for supplying power to the vibrator,
The wiring shapes in the first support portion and the second support portion of the conductive member are about a first symmetry axis and a second symmetry axis that are orthogonal to each other on one plane and orthogonal to the thickness direction of the vibrating body. vibration-type actuator, characterized in that have a symmetric shape.
前記第1の電極部に交流電圧を印加した場合と前記第2の電極部に交流電圧を印加した場合との両方における前記電気−機械エネルギ変換素子の周波数−アドミッタンス特性が、前記第1の曲げ振動モードの共振周波数におけるピークと第2の曲げ振動モードの共振周波数におけるピークとを有することを特徴とする請求項13に記載の振動型アクチュエータ。 The vibrator is electrically be closed and the first electrode portion and the second electrode portion - comprises a mechanical energy conversion element,
The frequency-admittance characteristics of the electro-mechanical energy conversion element in both the case where an AC voltage is applied to the first electrode section and the case where an AC voltage is applied to the second electrode section have the first bending. The vibration type actuator according to claim 13 , wherein the vibration type actuator has a peak at a resonance frequency of a vibration mode and a peak at a resonance frequency of a second bending vibration mode.
0<Δf<fa×0.15
ただし、Δfは、前記第1の曲げ振動モードの共振周波数と前記第2の曲げ振動モードの共振周波数との差を、faは、前記第1の曲げ振動モードの共振周波数及び前記第2の曲げ振動モードの共振周波数のうち高い方の共振周波数であることを特徴とする請求項13に記載の振動型アクチュエータ。 The resonance frequency of the first bending vibration mode and the resonance frequency of the second bending vibration mode satisfy the following formula,
0<Δf<fa×0.15
Where Δf is the difference between the resonance frequency of the first bending vibration mode and the resonance frequency of the second bending vibration mode, and fa is the resonance frequency of the first bending vibration mode and the second bending vibration mode. 14. The vibration type actuator according to claim 13 , wherein the vibration type actuator has a higher resonance frequency among the resonance frequencies of the vibration mode.
前記振動型アクチュエータの駆動によって位置決めされる部材と、を備えることを特徴とする電子機器。 A vibration-type actuator according to any one of claims 1 to 17 ,
A member positioned by driving the vibration type actuator.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/658,853 US10833608B2 (en) | 2016-08-03 | 2017-07-25 | Vibration actuator and electronic apparatus using vibration actuator |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2016152806 | 2016-08-03 | ||
JP2016152806 | 2016-08-03 |
Publications (3)
Publication Number | Publication Date |
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JP2018027006A JP2018027006A (en) | 2018-02-15 |
JP2018027006A5 true JP2018027006A5 (en) | 2020-08-06 |
JP7027052B2 JP7027052B2 (en) | 2022-03-01 |
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JP2017132935A Active JP7027052B2 (en) | 2016-08-03 | 2017-07-06 | Vibration type actuator and electronic equipment using it |
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Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09233868A (en) * | 1996-02-23 | 1997-09-05 | Canon Inc | Vibrating device |
JP5473279B2 (en) | 2008-09-09 | 2014-04-16 | キヤノン株式会社 | Vibration wave motor |
JP2013215085A (en) | 2012-03-08 | 2013-10-17 | Nikon Corp | Vibration actuator |
JP6465587B2 (en) | 2014-08-22 | 2019-02-06 | キヤノン株式会社 | Vibrator unit, vibration type actuator, and imaging device |
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