JP2018015398A5

JP2018015398A5 -

Info

Publication number: JP2018015398A5
Application number: JP2016149772A
Authority: JP
Filing date: 2016-07-29
Publication date: 2019-08-15
Anticipated expiration: 2036-07-29

Description

上記目的を達成するため、本発明の一実施態様に係る撮像装置は、
光源より射出された光から分離された測定光を被検査物に照射して得た戻り光と、前記光から分離された参照光とを合波して得た干渉光に基づいて、前記被検査物の画像を取得する撮像装置であって、
前記光源を内蔵し、気体の流入口及び流出口を有する第一の筐体と、
前記参照光の光学系の少なくとも一部を内蔵する第二の筐体と、
前記第一の筐体及び前記第二の筐体を内蔵し、気体が流入する通気口と気体が流出する排気開口とを有する第三の筐体と、
前記流出口と前記排気開口とを連通させるダクトと、
気体が、前記通気口から前記第三の筐体の内部に流入し、前記第二の筐体の周囲を経て前記流入口から前記第一の筐体の内部に流入し、前記第一の筐体の内部から前記流出口及び前記ダクトを経て前記排気開口から排出されるように、前記気体の流れを形成するためのファンと、を備えることを特徴とする。

In order to achieve the above object, an imaging apparatus according to an embodiment of the present invention includes:
Based on the interference light obtained by combining the return light obtained by irradiating the inspection object with the measurement light separated from the light emitted from the light source and the reference light separated from the light, the object to be inspected. An imaging device that acquires an image of an inspection object,
A first housing containing the light source and having a gas inlet and outlet;
A second housing containing at least a part of the optical system of the reference light;
A third housing containing the first housing and the second housing, and having a vent hole through which gas flows and an exhaust opening through which gas flows out;
A duct for communicating the outlet and the exhaust opening;
Gas flows into the inside of the third casing from the vent, flows into the first casing from the inlet through the periphery of the second casing, and then enters the first casing. And a fan for forming the gas flow so as to be discharged from the inside of the body through the outlet and the duct and from the exhaust opening.

Claims

Based on the interference light obtained by combining the return light obtained by irradiating the inspection object with the measurement light separated from the light emitted from the light source and the reference light separated from the light, the object to be inspected. An imaging device that acquires an image of an inspection object,
A first housing containing the light source and having a gas inlet and outlet;
A second housing containing at least a part of the optical system of the reference light;
A third housing containing the first housing and the second housing, and having a vent hole through which gas flows and an exhaust opening through which gas flows out;
A duct for communicating the outlet and the exhaust opening;
Gas flows into the inside of the third casing from the vent, flows into the first casing from the inlet through the periphery of the second casing, and then enters the first casing. An imaging device comprising: a fan for forming a gas flow so as to be discharged from the inside of the body through the outlet and the duct and from the exhaust opening.

The vent, the imaging apparatus according to claim 1, characterized in that it is arranged annularly all around the lower surface of the third housing.

It said first housing imaging apparatus according to claim 1 or 2, characterized in that it is disposed above the third enclosure.

The second housing, the imaging apparatus according to any one of claims 1 to 3, characterized in that it is arranged a lower side of the third housing above the vent.

The exhaust opening, the second housing imaging apparatus according to any one of claims 1 to 4, characterized in that arranged above the.

The third casing has the vent on the lower side,
The first casing is disposed above the third casing,
The second casing is disposed below the third casing and above the vent;
The exhaust opening is imaging apparatus according to any one of claims 1 to 5, characterized in that provided above said second housing in the wall of the third housing.

The third housing, the imaging apparatus according to any one of claims 1 to 6, characterized in that said movable in the three axial directions with respect to the inspection object.

A moving table supported by a gantry so that the third casing can move in the three-axis direction;
The imaging apparatus according to claim 7, wherein the vent includes a gap between the movable table and the third casing.

A fourth housing containing an optical system for measuring light ; the fourth housing is disposed closer to the first housing than the second housing; The fan forms the gas flow so that the gas flowing into the interior of the third housing flows into the first housing from the inlet through the periphery of the fourth housing. The imaging device according to any one of claims 1 to 8 , wherein

The imaging apparatus according to claim 9 , wherein the fourth casing includes an optical member that is not embedded in the second casing.

The imaging apparatus according to claim 9 or 10 , wherein both side surfaces of the second housing and the fourth housing are located at an equal distance from an inner surface of a side wall of the third housing.

The third housing, the imaging apparatus according to any one of claims 1 to 11, wherein a first said gas is provided in the side wall or the front and rear walls capable influx second vent.

Based on the interference light obtained by combining the return light obtained by irradiating the inspection object with the measurement light separated from the light emitted from the light source and the reference light separated from the light, the object to be inspected. An imaging device that acquires an image of an inspection object,
A light source unit provided with the light source;
A reference optical unit provided with at least a part of the optical system of the reference light;
A moving table supported by a gantry so that the light source unit and the reference optical unit provided in an exterior cover having an exhaust opening through which gas flows out can be moved;
A duct communicating the interior of the light source unit and the exhaust opening;
Gas that has flowed into the exterior cover through a gap between the exterior cover and the moving table flows into the light source unit through the periphery of the reference optical unit, and the gas that has flowed in passes through the duct. An imaging device comprising: a fan for forming a gas flow so as to be discharged from the exhaust opening.

Wherein at least part of the optical system of the reference beam, an imaging apparatus according to any one of claims 1 to 13, characterized in that it comprises an optical member for adjusting the optical path length of the reference beam.

Wherein at least part of the optical system of the reference light, an imaging according to any one of claims 1 to 14, characterized in that it comprises an optical member for condensing the reference beam passing through the optical system of the reference beam apparatus.

At least a part of the optical system of the reference light includes an optical fiber that guides the reference light to a multiplexing unit that combines the reference light separated from the light emitted from the light source and the measurement light. The imaging device according to any one of claims 1 to 15 .

The inspection object imaging apparatus according to any one of claims 1 to 16 characterized in that it is a subject's eye.