JP2018012150A - Spindle unit and processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To recognize a direction of rotation of a spindle shaft with a simple and inexpensive structure.SOLUTION: A spindle unit (42) comprises: a spindle shaft (44) having a grinding wheel (46) attached thereon; a casing (43) rotatably supporting the spindle shaft; a motor (71) for rotating the spindle shaft; and rotation detection means (81) for detecting a direction of rotation of the spindle shaft. The rotation detection means comprises: a plurality of shading plates (82) having different widths and being arranged at an interval in a circumferential direction of the spindle shaft; and a sensor unit (84) for detecting the plurality of shading plates. A direction of rotation of the spindle shaft is detected as a difference of detection rhythms of the shading plates.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a spindle unit having a processing tool attached to the tip and a processing apparatus.

  As a spindle unit of a grinding apparatus, one in which a grinding wheel as a processing tool is mounted on a mount on the tip end side of a spindle shaft and a motor serving as a driving source is connected to a rear end side of the spindle shaft is known (for example, Patent Document 1). In this type of spindle unit, a slit or the like is usually formed in a rotating body that rotates integrally with the spindle shaft, and the presence or absence of rotation of the spindle shaft and the rotational speed (number of rotations (rpm)) are detected by detecting the slit or the like with a sensor unit. It has recognized. That is, the rotation speed is recognized from the time when the slit or the like makes one rotation, and the rotation number is recognized from the number of times the slit or the like is detected by the sensor unit during a certain time.

JP2013-158872A

  By the way, an induction motor or the like is used as a motor used in the spindle unit, and this type of motor can change the rotation direction of the spindle shaft by a wiring connection method. However, as described above, the device side can recognize the presence / absence of rotation and the rotation speed, but the device side can recognize the rotation direction even if the rotation direction of the spindle shaft is wrong due to a misconnection of the motor wiring or the like. I can't. Although it is conceivable that the rotation direction can be recognized by attaching an encoder to the spindle shaft, the encoder is expensive and has a problem that the cost increases.

  SUMMARY An advantage of some aspects of the invention is that it provides a spindle unit and a machining apparatus that can recognize the rotation direction of a spindle shaft with an inexpensive and simple configuration.

  A spindle unit according to an aspect of the present invention includes a spindle shaft that connects a mount on which a processing tool is mounted, a casing that rotatably supports the spindle shaft, a motor that is connected to the spindle shaft and is a rotational drive source, and the motor A rotation detecting means for detecting rotation of the spindle shaft by the rotation detecting means, the rotation detecting means being connected to the spindle shaft and having at least two different circumferential directions around the axis of the spindle shaft A width detection unit and a sensor unit for detecting the at least two detection units that rotate are rotated, and the at least two detection units that rotate by rotating the spindle shaft are rotated by a difference in detection rhythm detected by the sensor unit. The direction can be determined.

  According to this configuration, the detection unit having at least two different widths is detected by the sensor unit as the spindle shaft rotates, so that a detection rhythm corresponding to the rotation direction of the spindle shaft is output from the rotation detection unit. For this reason, the number of rotations of the spindle shaft is recognized from the number of repetitions of the rhythm pattern of the detected rhythm in a certain time. Further, since the detected rhythm varies depending on the rotation direction of the spindle shaft, the rotation direction of the spindle shaft can be determined from the difference in the detected rhythm. Thus, the rotation direction can be detected with an inexpensive and simple configuration using the configuration for detecting the rotation speed of the spindle shaft.

  A processing apparatus according to an aspect of the present invention is a processing apparatus including the spindle unit and a determination unit, and the determination unit stores a first rhythm in a first rotation direction stored in advance and the first rhythm. The rotation direction of the spindle shaft is determined by comparing the second rhythm in the second rotation direction opposite to the rotation direction of 1 and the detected rhythm detected by the sensor unit.

  According to the present invention, it is possible to recognize the rotation direction of the spindle shaft with an inexpensive and simple configuration by detecting at least two detection portions having different widths rotating together with the spindle shaft by the sensor unit.

It is a perspective view of the grinding device of this embodiment. It is a cross-sectional schematic diagram of the spindle unit of the present embodiment. It is an upper surface schematic diagram of the rotation detection means of this Embodiment. It is explanatory drawing of the detection operation of the rotation direction by the rotation detection means of this Embodiment. It is explanatory drawing of the detection operation of the rotation direction by the rotation detection means of a modification. It is an upper surface schematic diagram of the rotation detection means of a modification.

  Hereinafter, the grinding apparatus according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of the grinding apparatus of the present embodiment. In addition, although a grinding apparatus is illustrated and demonstrated as a processing apparatus, what is necessary is just a processing apparatus provided with the spindle unit of this Embodiment. Further, the grinding apparatus is not limited to the apparatus configuration dedicated to the grinding process as shown in FIG. 1, for example, a fully automatic type process in which a series of processes such as a grinding process, a polishing process, and a cleaning process are performed automatically. It may be incorporated into the device.

  As shown in FIG. 1, the grinding apparatus 1 is configured to grind the wafer W held on the holding table 20 by using a grinding wheel (processing tool) 46 in which a large number of grinding wheels 47 are arranged in an annular shape. Yes. The wafer W is carried into the grinding apparatus 1 with the protective tape T adhered, and is held on the holding table 20 via the protective tape T. The wafer W may be a plate-like member to be ground, may be a semiconductor wafer such as silicon or gallium arsenide, an optical device wafer such as ceramic, glass or sapphire, or an as-before-device pattern formation. A slice wafer may be used.

  A rectangular opening extending in the X-axis direction is formed on the upper surface of the base 10 of the grinding apparatus 1, and this opening is covered with a movable plate 11 and a bellows-shaped waterproof cover 12 that can move together with the holding table 20. ing. Below the waterproof cover 12, ball screw type advance / retreat means (not shown) for moving the holding table 20 in the X-axis direction is provided. The holding table 20 is connected to a rotating means (not shown), and is configured to be rotatable by driving the rotating means. Further, a holding surface 21 for sucking and holding the wafer W by a porous porous material is formed on the upper surface of the holding table 20.

  The column 15 on the base 10 is provided with a grinding feed means 30 that feeds the grinding means 40 in a direction (Z-axis direction) to approach and separate the holding table 20. The grinding feed means 30 has a pair of guide rails 31 arranged in the column 15 and parallel to the Z-axis direction, and a motor-driven Z-axis table 32 slidably installed on the pair of guide rails 31. . Nut portions (not shown) are formed on the back side of the Z-axis table 32, and a ball screw 33 is screwed to these nut portions. The ball screw 33 is rotationally driven by a drive motor 34 connected to one end of the ball screw 33, so that the grinding means 40 is moved along the guide rail 31 in the Z-axis direction.

  The grinding means 40 is attached to the front surface of the Z-axis table 32 via a housing 41, and is configured to rotate the grinding wheel 46 about the central axis by the spindle unit 42. The spindle unit 42 is a so-called air spindle, and floats and supports the spindle shaft 44 through the air inside the casing 43. A mount 45 is connected to the tip of the spindle shaft 44, and a grinding wheel 46 in which a large number of grinding wheels 47 are arranged in an annular shape is attached to the mount 45. The grinding wheel 47 is formed by solidifying diamond abrasive grains with a binder such as metal bond or resin bond.

  Further, the height position of the grinding means 40 is measured by a linear scale 51. The linear scale 51 measures the height position of the grinding means 40 by reading the scale of the scale portion 53 provided on the surface of the guide rail 31 by the reading portion 52 provided on the Z-axis table 32. On the upper surface of the base 10, thickness measuring means 55 for measuring the thickness of the wafer W is provided. The thickness measuring means 55 brings a pair of contacts 56 and 57 into contact with the holding surface 21 of the holding table 20 and the upper surface of the wafer W, and from the difference between the holding surface height of the holding table 20 and the upper surface height of the wafer W, The thickness is measured.

  In addition, the grinding apparatus 1 is provided with a control means 60 that controls each part of the apparatus and a display means 65 that displays various information. The control means 60 and the display means 65 are comprised by the processor, memory, etc. which perform various processes. The memory is composed of one or a plurality of storage media such as a ROM (Read Only Memory) and a RAM (Random Access Memory) depending on the application. In this grinding apparatus 1, the grinding feed amount is controlled by the control means 60 based on the measurement results of the linear scale 51 and the thickness measuring means 55, and the wafer W is ground to a predetermined thickness by the grinding means 40.

  By the way, a general grinding apparatus is provided with a configuration for recognizing the rotational speed of the spindle shaft and the like. For example, a slit is formed in a rotating body that rotates integrally with the spindle shaft, and the number of times the slit is detected is counted by a photo sensor or fiber sensor to detect the number of rotations of the spindle shaft. However, in this configuration, the grinding device side can recognize the rotation speed of the spindle shaft, but cannot recognize the rotation direction of the spindle shaft. Further, when an induction motor is employed as the motor, the rotation direction is changed by the connection of the wiring, but the spindle shaft rotates in the reverse direction due to a connection error of the wiring.

  It is only necessary to be able to easily determine the rotation direction depending on whether it is operating normally, such as a pump, but in the case where the rotation direction cannot be determined at first glance like a spindle unit of a grinding machine, it is reverse rotation There is a risk that the wafer W may continue to be ground. In this case, it is also possible to detect the direction of rotation by installing an encoder on the spindle shaft. However, the encoder is used for a motor that rotates in the forward and reverse directions, and further outputs the amount of rotational displacement as an electrical signal. The encoder rotates only in one direction like the spindle unit of a grinding apparatus, and also detects the amount of rotational displacement. If used for unnecessary items, the cost increases.

  The present inventor examined a configuration for recognizing the rotation direction of the spindle shaft 44 inexpensively and easily without using an expensive encoder, and improved the configuration for recognizing the rotation speed of the spindle shaft 44 to recognize the rotation direction. A possible spindle unit 42 was completed. Thereby, in addition to the rotation speed etc. of the spindle shaft 44, the rotation direction can be recognized by the grinding apparatus 1. Further, by displaying the rotation direction of the spindle shaft 44 on the display means 65, it is possible to notify the operator of the reverse rotation of the spindle shaft 44 due to a wiring connection error of the motor 71 or the like.

  Hereinafter, the spindle unit of the present embodiment will be described with reference to FIGS. 2 and 3. FIG. 2 is a schematic cross-sectional view of the spindle unit of the present embodiment. FIG. 3 is a schematic top view of the rotation detecting means of the present embodiment.

  As shown in FIG. 2, the spindle unit 42 surrounds the spindle shaft 44 in an upright posture with a casing 43, and blows air from the casing 43 to the side surface of the spindle shaft 44 so that the spindle shaft 44 can rotate. A supporting air bearing is formed. A mount 45 equipped with a grinding wheel 46 is connected to the tip of the spindle shaft 44, and a motor 71 as a rotational drive source is connected to the rear end of the spindle shaft 44. The motor 71 includes a rotor 72 provided at the upper end portion of the spindle shaft 44 and a stator 73 provided on the inner peripheral surface of the casing 43 via a cooling jacket 74. A large number of cooling water passages 75 are formed in the cooling jacket 74, and the heat generation of the motor 71 is suppressed by the cooling water passages 75.

  Large diameter disc portions 76 and 77 are formed at the lower end portion and the middle portion of the spindle shaft 44, and an annular portion 78 is formed at the lower end portion of the casing 43 so as to enter between the disc portions 76 and 77. Yes. In this case, a slight gap serving as a passage for air is provided between the disk portions 76 and 77 of the spindle shaft 44 and the annular portion 78 of the casing 43. A large number of injection ports 79 are formed on the outer surface of the annular portion 78, and each injection port 79 is connected to an air supply source 80 through a flow path in the annular portion 78. By injecting air from the numerous injection ports 79 of the annular portion 78 onto the outer surface of the spindle shaft 44, the spindle shaft 44 is floatingly supported with respect to the casing 43 via the air.

  At this time, the disk portions 76 and 77 of the spindle shaft 44 are floatingly supported by the annular portion 78 of the casing 43 through air over a wide area, so that the machining load acting in the thrust direction on the spindle shaft 44 is dispersed. Has been. Further, the air in the spindle shaft 44 and the casing 43 is exhausted from above the spindle unit 42 while air-cooling the motor 71 and passes through the inside of the cover 67 provided at the lower end of the casing 43 and below the spindle unit 42. Exhausted from. A band-like sponge material 68 that prevents the grinding water from entering the cover 67 is attached to the lower inner surface of the cover 67.

  As shown in FIGS. 2 and 3, rotation detection means 81 for detecting the rotation of the spindle shaft 44 by the motor 71 is attached to the upper surface of the casing 43. The rotation detecting means 81 includes three fan-shaped light-shielding plates (detectors) 82a to 82c having different widths (different central angles) 82a-82c and three arranged alternately in the circumferential direction around the axis of the spindle shaft 44. The slits 83a to 83c are configured to be detected by the sensor unit 84. The three light shielding plates 82a to 82c are arranged on the spindle shaft 44 at intervals in the circumferential direction so as to form slits 83a to 83c having different widths in a horizontal plane orthogonal to the axis of the spindle shaft 44.

  The sensor unit 84 is a so-called transmission type fiber sensor, and the light projecting unit 85 and the light receiving unit 86 are vertically opposed to each other with the outer peripheral side of the light shielding plate 82 interposed therebetween. The light from the light projecting unit 85 is shielded by the light shielding plates 82a to 82c, so that the sensor unit 84 detects the light shielding plates 82a to 82c. Therefore, when the spindle shaft 44 rotates and the light shielding plates 82a-82c and the slits 83a-83c pass between the light projecting unit 85 and the light receiving unit 86, the detection rhythm in which light transmission and light shielding are repeated is detected by the sensor. Output from the unit 84. The rotation direction of the spindle shaft 44 can be determined by the difference in the detected rhythm output from the sensor unit 84.

  Further, the control means 60 is provided with a recognition means 61 for recognizing the number of rotations of the spindle shaft 44 and a judgment means 62 for judging the rotation direction of the spindle shaft 44. The recognition unit 61 is connected to the rotation detection unit 81 and recognizes the rotation speed (rpm) of the spindle shaft 44 based on the detected rhythm output from the rotation detection unit 81. For example, the recognition unit 61 recognizes the rotation speed of the spindle shaft 44 from the number of repetitions of the rhythm pattern that appears in the detected rhythm within a certain time. In this case, the number of rotations of the spindle shaft 44 may be recognized from the number of detection times of either the light shielding plates 82a to 82c or the slits 83a to 83c within a predetermined time.

  The determination unit 62 is connected to the rotation detection unit 81 and determines the rotation direction of the spindle shaft 44 from the detection rhythm output from the rotation detection unit 81. The determination unit 62 stores in advance a first rhythm indicating the first rotation direction and a second rhythm indicating the second rotation direction opposite to the first rotation direction. The rotation direction of the spindle shaft 44 is determined by comparison with the detected rhythm detected by the sensor unit 84. The determination means 62 is connected to a display means 65 for displaying the rotation direction together with the rotation speed and rotation speed of the spindle shaft 44. The display unit 65 may display only the reverse rotation of the spindle shaft 44.

  The detected rhythm detected by the sensor unit 84 of the rotation detecting means 81 is output as a pulse signal with the light shielding state turned on and the transmission state turned off, for example. The first and second rhythms stored in advance in the determination means 62 store the output of the rotation detection means 81 when the spindle shaft 44 is actually rotated forward and reverse. The first and second rhythms are not limited to values obtained experimentally, but may be values obtained empirically or theoretically. Further, instead of displaying the reverse rotation of the spindle shaft 44 on the display means 65, the reverse rotation of the spindle shaft 44 is notified by sound such as a warning sound and a beep sound, and light emission such as blinking and lighting of a lamp. May be.

  As described above, the rotation direction of the spindle shaft 44 is recognized on the grinding device 1 side in accordance with the detected rhythm detected by the sensor unit 84. For this reason, it is possible to notify the operator of the reverse rotation of the spindle shaft 44 and reconnect the wiring of the motor 71 so that the rotation direction is normal. Therefore, it is possible to prevent the wafer W from being continuously ground with the spindle shaft 44 rotating in the reverse direction. Further, by detecting the rotation direction with the rotation detection means 81 used for detecting the rotation speed and the like, the rotation direction of the spindle shaft 44 can be detected with an inexpensive and simple configuration as compared with the configuration using the encoder. It is possible.

  With reference to FIG. 4, the detection operation of the rotation direction by the rotation detection means will be described. FIG. 4 is an explanatory diagram of a rotation direction detection operation by the rotation detection unit of the present embodiment. 4A shows a state in which the spindle shaft is rotated forward, and FIG. 4B shows a state in which the spindle shaft rotates in the reverse direction. Further, it is assumed that the rotation detection means stores a counterclockwise detection rhythm shown in the figure as the first rhythm and a clockwise detection rhythm shown in the figure as the second rhythm.

  As shown in FIG. 4A, when the spindle shaft 44 rotates in the direction of the arrow A, a detection rhythm in which the voltage ON section T1a, OFF section T2b, ON section T1b, OFF section T2c, ON section T1c, and OFF section T2a are repeated. Output from the rotation detecting means 81. In the detection rhythm ON section T1a-T1c, the light of the sensor unit 84 is shielded by the light shielding plates 82a-82c, so that the voltage is turned on only for a period corresponding to the plate width of each light shielding plate 82a-82c. In the detection rhythm OFF section T2a-T2c, the light of the sensor unit 84 is transmitted through the slits 83a-83c, so that the voltage is turned off for a period corresponding to the slit width of each of the slits 83a-83c.

  That is, the detected rhythm ON sections T1a to T1c correspond to the light shielding plates 82a to 82c, respectively, and the detected rhythm OFF sections T2a to T2c correspond to the slits 83a to 83c, respectively. The detected rhythm detected by the rotation detecting means 81 is compared with the first and second rhythms, and it is determined that the spindle shaft 44 is rotating counterclockwise, assuming that the detected rhythm matches the first rhythm. Is done. Thus, it is recognized from the detection rhythm that the light shielding plate 82a, the slit 83b, the light shielding plate 82b, the slit 83c, the light shielding plate 82c, and the slit 83a pass through the sensor unit 84 in this order.

  On the other hand, as shown in FIG. 4B, when the spindle shaft 44 rotates in the direction of arrow B, the voltage ON section T1c, OFF section T2c, ON section T1b, OFF section T2b, ON section T1a, and OFF section T2a are repeatedly detected. A rhythm is output from the rotation detecting means 81. The detected rhythm detected by the rotation detecting means 81 is compared with the first and second rhythms, and it is determined that the spindle shaft 44 is rotating clockwise, assuming that the detected rhythm matches the second rhythm. The Thus, it is recognized from the detection rhythm that the light shielding plate 82c, the slit 83c, the light shielding plate 82b, the slit 83b, the light shielding plate 82a, and the slit 83a pass through the sensor unit 84 in this order.

  By the way, since the sizes of the light shielding plates 82a to 82c and the slits 83a to 83c of the rotation detecting means 81 are different, there is a possibility that the weight balance varies and the spindle shaft 44 is decentered to cause vibration. For this reason, the weight of the light shielding plates 82a to 82c is adjusted so that the weight balance with respect to the spindle shaft 44 is uniform. For example, the thickness change, material change, weight addition, drilling, and the like of the light shielding plates 82a to 82c are performed so as not to affect the detection by the sensor unit 84. Thereby, even if the size of the light shielding plate 82 is different, the spindle shaft 44 is not decentered, and the processing accuracy of the wafer W is not deteriorated.

  As described above, according to the spindle unit 42 of the present embodiment, the rotation direction of the spindle shaft 44 is detected by the sensor unit 84 detecting the three light shielding plates 82 having different widths as the spindle shaft 44 rotates. A detection rhythm corresponding to the rotation is output from the rotation detecting means 81. For this reason, the number of rotations of the spindle shaft 44 is recognized from the number of repetitions of the rhythm pattern of the detected rhythm in a certain time. Further, since the detected rhythm varies depending on the rotation direction of the spindle shaft 44, the rotation direction of the spindle shaft 44 can be determined from the difference in the detected rhythm. Thus, the rotation direction can be detected with an inexpensive and simple configuration using the configuration for detecting the rotation speed of the spindle shaft 44.

  In the present embodiment, the rotation detection means 81 is configured to include the three light shielding plates 82a to 82c as the detection unit, but is not limited to this configuration. The rotation detection unit only needs to include detection units having at least two different widths. For example, the rotation detection unit may detect the rotation direction of the spindle shaft using two light shielding plates. Hereinafter, with reference to FIG. 5, the detection operation of the rotation direction by the rotation detection means of the modification will be described. FIG. 5 is an explanatory diagram of a rotation direction detection operation by a rotation detection unit according to a modification.

  As shown in FIG. 5A, the rotation detection means 91 of the modified example includes two fan-shaped light shielding plates 92a and 92b having different widths (different central angles) in the circumferential direction around the axis of the spindle shaft 44. In addition, slits 93a and 93b having the same width are formed between the light shielding plates 92a and 92b. Since the rotation detecting means 91 detects the two light shielding plates 92a and 92b alternately by the sensor unit 94, the ON section T1a, the OFF section T2, the ON section T1b, the OFF section T2, and the ON section even if the rotation directions are different. The same detection rhythm is repeated as in T1a. In this case, it is possible to determine the rotation direction of the spindle shaft 44 by paying attention to the leading ON section of the detected rhythm.

  For example, when the initial position of the sensor unit 94 is aligned with the slit 93a, the rotation direction of the spindle shaft 44 is determined according to which of the ON sections T1a and T1b is detected as the leading ON section. When the ON section T1b is detected as the leading ON section, it is determined that the rotation direction of the spindle shaft 44 is counterclockwise. On the other hand, as shown in FIG. 5B, when the ON section T1a is detected as the leading ON section, it is determined that the rotation direction of the spindle shaft 44 is clockwise. However, when the initial position of the sensor unit 94 is aligned with the slit 93b, the determination result is reversed, so it is necessary to know the initial position of the sensor unit 94.

  Further, as shown in FIG. 5C, when the initial position of the sensor unit 94 is set in the middle of the light shielding plate 92a, the rotation direction of the spindle shaft 44 is determined according to the length of the leading ON section. When a section less than half of the ON section T1a is detected as the leading ON section, it is determined that the rotation direction of the spindle shaft 44 is counterclockwise. On the other hand, as shown in FIG. 5D, when a section that is more than half of the ON section T1a is detected as the leading ON section, it is determined that the rotation direction of the spindle shaft 44 is clockwise. Even when the initial position of the sensor unit 94 is set in the middle of the light shielding plate 92b, the rotation direction of the spindle shaft 44 can be determined in the same manner.

  Further, in the present embodiment, the rotation detection unit 81 is configured to include the fan-shaped light shielding plates 82a to 82c as the detection unit, but is not limited to this configuration. For example, as shown in FIG. 6, the rotation detection unit 96 may include rectangular light shielding plates 97 a to 97 c having different widths as the detection unit. Although there is no slit between the light shielding plates 97a-97c, the rotation direction of the spindle shaft 44 can be detected even with such a configuration.

  In the present embodiment, the light shielding plate is exemplified as the detection unit and the fibre sensor is exemplified as the sensor unit. However, the present invention is not limited to this configuration. The rotation detection unit may be configured to detect the detection unit. For example, the rotation detection unit may include a metal plate as the detection unit, a proximity sensor such as a magnetic sensor as the sensor unit, a reflection plate as the detection unit, and a sensor unit. A reflective photosensor may be provided.

  Further, in the present embodiment, the configuration in which the determination unit 62 determines the rotation direction of the spindle shaft 44 by comparing the detected rhythm with the first and second rhythms is not limited to this configuration. The determination means 62 may determine the rotation direction of the spindle shaft 44 only from the detected rhythm pattern.

  In the present embodiment, the spindle unit 42 of the grinding apparatus 1 has been described. However, the present invention is not limited to this configuration. The spindle unit only needs to be capable of determining the rotation direction of the spindle shaft, and may be a spindle unit of a polishing apparatus or a cutting apparatus, for example. In this case, a polishing pad is mounted as a processing tool on the spindle unit of the polishing apparatus, and a cutting blade is mounted as a processing tool on the spindle unit of the cutting apparatus.

  Moreover, although this Embodiment and the modified example were demonstrated, what combined the said embodiment and modified example entirely or partially as another embodiment of this invention may be sufficient.

  The embodiments of the present invention are not limited to the above-described embodiments, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in another way by technological advancement or another derived technique, the method may be used. Accordingly, the claims cover all embodiments that can be included within the scope of the technical idea of the present invention.

  In the present embodiment, the configuration in which the present invention is applied to the spindle unit of the grinding apparatus has been described. However, the present invention can also be applied to a spindle unit of a processing apparatus that can recognize the rotation direction of the spindle shaft with an inexpensive and simple configuration. It is.

  As described above, the present invention has an effect that the rotation direction of the spindle shaft can be recognized with an inexpensive and simple configuration, and is particularly useful for a spindle unit and a processing apparatus using an induction motor.

1 Grinding equipment (processing equipment)
42 Spindle unit 43 Casing 44 Spindle shaft 45 Mount 46 Grinding wheel (processing tool)
61 Recognizing means 62 Judging means 71 Motor 81, 91, 96 Rotation detecting means 82, 92, 97 Light-shielding plate (detecting section)
83, 93 Slit 84, 94, 98 Sensor part

Claims (2)

A spindle shaft that connects a mount for mounting a processing tool, a casing that rotatably supports the spindle shaft, a motor that is connected to the spindle shaft and that is a rotation drive source, and a rotation that detects rotation of the spindle shaft by the motor A spindle unit comprising detection means,
The rotation detection means includes a detection unit connected to the spindle shaft and having at least two different widths in the circumferential direction around the axis of the spindle shaft, and a sensor unit for detecting the at least two detection units rotating. Prepared,
A spindle unit that makes it possible to determine the rotation direction of the at least two detection units that rotate by rotating the spindle shaft based on a difference in detection rhythm detected by the sensor unit. A machining apparatus comprising the spindle unit according to claim 1 and a determination means,
The determination means detects the first rhythm in the first rotation direction stored in advance and the second rhythm in the second rotation direction that is opposite to the first rotation direction, and the sensor unit detects A processing apparatus for comparing the detected rhythm with the rotation direction of the spindle shaft.

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