JP2018006531A - Laser device and laser igniter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser device that restricts spread of a luminous flux from highly densely accumulated light emission points and that can be reduced in device side, in a configuration using high output laser array.SOLUTION: A laser device comprises: a light source 1 in which a plurality of light emission points are two-dimensionally aligned; a plurality of coupling lenses 7 corresponding to the plurality of light emission points 32 of the light source 1; and a condensing optical system 8 that condenses luminous fluxes emitted from the light source 1 and passed through the coupling lenses 7. The laser device has: an area where the intervals of the arrangement of the plurality of light emission points 32 and the intervals of the optical axes of the plurality of coupling lenses 7 coincide and the optical axis of each coupling lens 7 passes through the center of the corresponding light emission point 32; and an area where the intervals of the arrangement of the plurality of light emission points 32 and the intervals of the optical axes of the plurality of coupling lenses 7 do not coincide and the optical axis of each coupling lens 7 does not pass through the center of the corresponding light emission point 32.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a laser device and a laser ignition device.

  Devices that use high-power lasers (for example, laser processing machines) are widely known as laser devices. To obtain a high-power laser light source, multiple lasers are synthesized instead of a single laser. The technique to be used is already known (for example, refer to Patent Document 1).

  Also, as a laser light source, a surface emitting semiconductor laser light source that is easier to integrate than an edge emitting laser and easily configures a light source in which a plurality of light emitting points are arranged is known. A laser device has been proposed (see, for example, Patent Document 2).

  For the purpose of simplifying adjustment, Patent Document 2 discloses a configuration in which a surface emitting laser light source is used as a light source and a microlens array corresponding to the surface emitting laser light source is integrally formed. Specifically, a VCSEL array substrate on which a vertical cavity surface emitting laser (VCSEL) in which a resonator is formed perpendicularly to a semiconductor substrate as a surface-emitting light source is formed, and light emission of the VCSEL array substrate And a lens array substrate that is integrally formed on the surface side and on which convex microlenses for collimating laser light are formed.

  A configuration is known in which light emitted from a VCSEL is collimated using a microlens array and collected by a lens. In this configuration, the optical axis of the microlens array and a VCSEL light emitting region (light emitting point) are generally used. The centers of are arranged so as to coincide with each other.

However, in a laser module using a VCSEL, if the light emitting points are integrated at a high density, the focal length of the microlens array is shortened and the magnification of the optical system is increased. Further, since the VCSEL is incident on the microlens with a spread, a lens having a size corresponding to the light beam enlarged according to the distance from the microlens is required.
Further, the light beam from the VCSEL always becomes a divergent light beam even after collimating with the microlens array in accordance with the size of the enlarged light emitting region and the optical system magnification. Therefore, the distance between the microlens array and the condenser lens is increased. The required effective diameter of the lens becomes large, leading to an increase in the size of the apparatus.

  Accordingly, an object of the present invention is to provide a laser device capable of reducing the size of the device by suppressing the spread of the light flux from the light emitting points integrated at high density in a configuration using a high-power laser array. And

  In order to achieve such an object, a laser apparatus according to the present invention includes a light source in which a plurality of light emitting points are two-dimensionally arranged, a plurality of coupling lenses corresponding to the plurality of light emitting points of the light source, and the light source. A condensing optical system that collects the emitted light beam that has passed through the coupling lens, the arrangement intervals of the plurality of light emitting points and the optical axis intervals of the plurality of coupling lenses match, and the coupling The region where the optical axis of the lens passes through the center of the light emitting point, the arrangement interval of the plurality of light emitting points, and the interval of the optical axes of the plurality of coupling lenses do not match, and the optical axis of the coupling lens is the light emission And a region that does not pass through the center of the point.

  According to the present invention, in a configuration using a high-power laser array, it is possible to provide a laser device capable of reducing the size of the device by suppressing the spread of a light beam from light emitting points integrated at high density. it can.

It is a front view which shows an example of a VCSEL array light source. It is the figure which showed typically the arrangement | sequence of a luminescent point. It is the optical path figure which showed a mode that the light beam from a VCSEL array light source injects into a corresponding coupling lens. It is the figure which showed the light ray figure in the conventional VCSEL whole system. It is the figure which showed the light ray figure in the VCSEL whole system of this embodiment. It is YZ sectional drawing of the state which attached the VCSEL board | substrate and the coupling lens. It is XY sectional drawing of the state which attached the VCSEL board | substrate and the coupling lens. It is an optical arrangement | positioning figure which shows a mode that the light beam radiate | emitted from the VCSEL array light source injects into an optical fiber. It is a perspective view which shows the cross section of an optical fiber. It is the perspective view (A) and sectional drawing (B) which show an example of the laser apparatus based on this invention. It is a section lineblock diagram showing typically the composition of the laser ignition device concerning the present invention. It is a schematic diagram explaining the relationship between the arrangement | positioning space | interval of a light emission point, and the space | interval of the optical axis of a coupling lens.

  Hereinafter, a laser device and a laser ignition device according to the present invention will be described with reference to the drawings. The present invention is not limited to the embodiments described below, and other embodiments, additions, modifications, deletions, and the like can be changed within a range that can be conceived by those skilled in the art, and any aspect is possible. As long as the functions and effects of the present invention are exhibited, the scope of the present invention is included.

[Laser device]
A perspective view of the laser device according to the present invention is shown in FIG. 10A, and a cross-sectional view thereof is shown in FIG.
The laser device of the present invention includes a light source 1 in which a plurality of light emitting points are two-dimensionally arranged, a plurality of coupling lenses 7 corresponding to the plurality of light emitting points of the light source 1, and a coupling lens emitted from the light source 1. And a condensing lens 8 as a condensing optical system that condenses the light beam that has passed through 7.
Furthermore, the optical fiber 9 in which the light condensed by the condensing optical system injects is provided.

Hereinafter, in the laser apparatus of the present embodiment, a surface emitting semiconductor laser light source (hereinafter referred to as “VCSEL array light source”) configured by a substrate on which a large number of light emitting points by a surface emitting semiconductor laser (VCSEL) are integrated is applied. An example will be described.
The light source 1 is not limited to one in which a plurality of VCSELs are arranged. For example, a plurality of edge emitting lasers (EEL) may be arranged. However, the surface emitting semiconductor laser (VCSEL) is easier to integrate than the edge emitting laser (EEL), and it is easy to configure a light source in which a plurality of light emitting points are arranged.
Further, a lens array may be used as the coupling lens 7.

  As shown in FIG. 10B, the laser emitted from the light source (VCSEL array light source) 1 enters the condenser lens 8 through the coupling lens 7, and the condensed light flux enters the optical fiber 9. . Then, it is transported to an external laser-using device (for example, a laser processing machine, a spark plug for an engine using a laser, or the like) to which the optical fiber 9 is connected. By adopting a configuration in which the optical fiber 9 is provided on the condenser lens 8, handling becomes easy.

The VCSEL array light source 1 is mounted on one surface of a heat diffusion plate 5 formed of a material having high thermal conductivity such as copper as a pedestal via a mount 2, and the other surface of the heat diffusion plate 5. Is attached with a heat sink 11. The heat diffusing plate 5 and the heat sink 11 are provided to dissipate and cool the VCSEL array light source 1 that generates heat.
An insulating plate 4 is disposed between the VCSEL electrode 3 and the heat diffusion plate 5.

  Since the VCSEL array light source 1 generates high heat with high-density laser emission, an active cooling means is required. Therefore, the heat generated by the VCSEL array light source 1 is cooled by the heat absorbing surface of the Peltier element 10 through the heat diffusion plate 5. The heat generated by the VCSEL array light source 1 and the Peltier element 10 is radiated to the atmosphere by the heat sink 11 disposed on the heat dissipation surface of the Peltier element 10. At this time, heat radiation by the heat sink 11 may be performed by natural convection, or stronger cooling may be performed by using forced convection using a blower fan or the like. Further, when the Peltier element 10 is not necessary, such as when the outside air is sufficiently low, the heat diffusing plate 5 may be directly cooled by the heat sink 11.

  The housing 12 is provided so as to cover an optical system from the VCSEL array light source 1 on the heat diffusion plate 5 to the optical fiber 9 through the coupling lens 7 and the condenser lens 8. The condenser lens 8 is attached to the housing 12 and is disposed in the optical path from the coupling lens 7 in the housing 12 to the end face of the optical fiber 9. A holding member 13 is provided at the connection portion of the optical fiber 9 to the housing 12 to seal the connection portion and hold the optical fiber 9. In addition, the lead wire 6 that is electrically connected to the outside of the VCSEL array light source 1 is disposed through the side wall of the housing 12, and this penetrating portion is also appropriately sealed. That is, the heat diffusing plate 5 and the housing 12 are tightly coupled together with the holding member 13 of the optical fiber 9 and the penetration portion of the lead wire 6 of the housing 12, the coupling lens 7 and the condenser lens 8 from the VCSEL array light source 1. The optical system part that reaches the optical fiber 9 via is sealed and protected.

  In the laser device of the present invention, the arrangement interval of the plurality of light emitting points of the VCSEL array light source 1 and the interval of the optical axes of the plurality of coupling lenses 7 coincide, and the optical axis of the coupling lens 7 passes through the center of the light emitting point. (Hereinafter also referred to as “interval matching region”), the arrangement interval of the plurality of light emitting points and the interval of the optical axes of the plurality of coupling lenses 7 do not match, and the optical axis of the coupling lens 7 is centered on the light emitting point. A region that does not pass (hereinafter, also referred to as “interval shift region”).

The interval shift area is an area generated by shifting the intervals of the optical axes of the plurality of coupling lenses 7 even if the arrangement interval of the plurality of light emitting points is shifted with respect to a predetermined interval. However, from the viewpoint of reducing manufacturing errors, it is preferable that the optical axes of the coupling lenses 7 are equally spaced and the light emitting point arrangement interval is shifted from a predetermined interval.
For example, by setting the optical axes of the coupling lenses 7 at equal intervals and partially expanding the arrangement interval of the light emitting points, a region where the center of the light emitting points does not coincide with the optical axis of the coupling lens 7 is generated. .

Hereinafter, the relationship between the arrangement interval of the light emitting points of the VCSEL array light source 1 and the optical axis interval of the coupling lens 7 will be described.
As shown in FIG. 1A, the VCSEL array light source 1 includes a light emitting region 31 and a non-light emitting region 34 formed on a rectangular VCSEL substrate 30.
The light emitting region 31 of the VCSEL array light source 1 of the present embodiment has a circular shape with a diameter of 8.9 mm indicated by “A3” in the drawing. About 33,600 light emitting points 32 are arranged in the light emitting region 31.

As shown in FIGS. 1A and 1B, the light emitting region 31 is provided with two pitch changing portions 33 concentrically.
The pitch changing unit 33 is a region for forming a region where the center of the light emitting point 32 and the optical axis of the coupling lens 7 do not coincide with each other.

  The arrangement interval of the light emitting points 32 is a distance between the centers of the light emitting points indicated by “A2” in FIG. In the present embodiment, the diameter of the light emitting point 32 indicated by “A1” is 10 μm.

As shown in FIG. 1B, the light emitting region 31 is provided with a pitch changing portion 33a and a pitch changing portion 33b, thereby forming a region (I), a region (II), and a region (III). Yes.
Region (I) is an interval matching region, and region (II) and region (III) are interval shift regions.
In each of the region (I), the region (II), and the region (III), a large number of light emitting points 32 are arranged at intervals of 48 μm. In the region (II), the center of the light emitting point 32 and the optical axis of the coupling lens 7 do not coincide with each other, and a deviation of 2.5 μm occurs. In the region (III), the center of the light emitting point 32 and the optical axis of the coupling lens 7 do not coincide with each other, and a deviation of 5 μm occurs.
The outer periphery of the pitch changing unit 33a is 6 mm in diameter, and the outer periphery of the pitch changing unit 33b is 8 mm. Further, the width of the pitch changing unit 33a and the width of the pitch changing unit 33b are 50.5 μm, which is obtained by adding a gap of 2.5 μm between the center of the light emitting point 32 and the optical axis of the coupling lens 7 to the interval 48 μm of the light emitting point 32. is there.

FIG. 12 schematically shows a shift in the distance between the light emitting point 32 and the optical axis of the coupling lens 7.
As shown in FIG. 12, the arrangement interval of the light emitting points 32 and the interval of the optical axis of the corresponding coupling lens 7 do not coincide with each other at the concentric (concentric circular) position with respect to the center. An interval shift region is formed in which the optical axis does not pass through the center of the light emitting point.
In the gap region, the arrangement position of the light emitting points 32 is shifted outward from the center. Therefore, the light beam that has passed through the coupling lens 7 is directed toward the center corresponding to the amount of deviation of the optical axis, and the light beam spreads more than in the case where the optical axis of the coupling lens passes through the center of the light emitting point. It will be suppressed.
That is, by refracting the light beam inward, a surface-emitting light source that is originally a divergent light beam can be apparently a condensed light beam.

FIG. 3 is an optical path diagram showing a state in which the light flux from the VCSEL array light source 1 enters the corresponding coupling lens 7.
The light emitted from the light emitting point 32 (32a, 32b, 32c) is collimated by a plurality of coupling lenses 7 (microlens array in this embodiment) having corresponding lens surfaces. The coupling lens 7 is made of synthetic quartz (focal length f = 0.1 mm). Since each of the light emitting points 32 (32a, 32b, and 32c) has an oxidized constriction diameter of 10 μm (indicated by A1 in the figure), the collimated light beam is not completely a parallel light beam but necessarily a divergent light beam.
In the figure, R represents a radiation angle.

In FIG. 3, the light emitting point 32a and the light emitting point 32b are located in the region (I), the light emitting point 32b is the light emitting point located on the outermost periphery of the region (I), and the light emitting point 32c is the outermost point in the region (II). Located on the inner circumference. That is, the pitch changing unit 33a is provided between the light emitting point 32b and the light emitting point 32c. In this case, the interval A2 between the light emitting point 32a and the light emitting point 32b is a predetermined interval (48 μm), whereas the interval A3 between the light emitting point 32b and the light emitting point 32c is set to a predetermined interval (48 μm) by the pitch changing unit 33a. ) (50.5 μm).
Since the optical axis interval of the coupling lens 7 is a predetermined interval (48 μm) in all regions, the centers of the light emission point 32a and the light emission point 32b coincide with the optical axis of the coupling lens 7, but the light emission The centers of the points 32c do not match. Therefore, the light emitted from the light emitting point 32 c is refracted downward in the figure by the incident surface of the coupling lens 7.

FIG. 4 shows a ray diagram in the entire conventional VCSEL system.
In the example of FIG. 4, since the center of the emission point of the VCSEL array light source 1 (VCSEL substrate 30) and the optical axis of the corresponding coupling lens 7 coincide with each other, a loose divergent light beam is emitted from the coupling lens 7. Is done.

In contrast, FIG. 5 is a ray diagram of the present embodiment.
In the example of FIG. 5, the optical axis of the coupling lens 7 corresponding to the light emitting point coincides with the center of the light emitting region 31 of the VCSEL array light source 1 (VCSEL substrate 30). In the outer region, the optical axis of the coupling lens 7 corresponding to the light emitting point does not coincide, and the light beam is refracted inward as shown in FIG.
That is, the light beam can be refracted inward to be a condensed light beam apparently in a surface-emitting light source that originally becomes a divergent light beam.
In this way, by suppressing the spread of the light beam emitted from the coupling lens 7, the condenser lens 8 can be reduced in size, and the back focus can be shortened even when lenses having the same focal length are used. The apparatus can be reduced in size.

The quantitative effects of the laser device of this embodiment are shown in Table 1 below.
Table 1 shows, as an example according to the present embodiment, by providing the pitch changing unit 33, a deviation amount between the center of the light emitting point 32 in the outer peripheral side region of the light emitting region 31 and the optical axis of the corresponding coupling lens 7 ( The mode in which the most peripheral axis deviation amount) is 5 μm is shown. On the other hand, as a comparative example (prior art), a mode is shown in which the optical axis of the coupling lens 7 corresponding to the center of the light emitting point 32 coincides in all regions.

As shown in Table 1, it can be seen that the light flux from the surface-emitting light source that is originally a divergent light beam can be apparently made into a substantially parallel light beam by setting the amount of axial deviation at the outermost periphery to 5 μm.
In the present embodiment, while using the same condenser lens 8 as in the comparative example, it is possible to shorten the back focus (condensing point position from the lens exit end face) and reduce the effective range of the condenser lens 8. Shortening the back focus directly leads to a reduction in the size of the main body of the device, and reducing the diameter of the condensing lens 8 not only reduces the size of the main body of the device but also increases the degree of freedom in designing the lens surface shape and lowers the cost. can do.

The most peripheral axis deviation amount shown in Table 1, that is, the maximum deviation amount of the interval between the light emission points 32 is set to half the diameter of the light emission point 32 (5 μm).
If the amount of deviation becomes too large, the spot diameter becomes large due to the effect of decentration aberration with the coupling lens 7 and it becomes difficult to reduce the size of the condensing system, or the coupling efficiency is lowered due to the component incident on the adjacent lens. May be invited. It is required to set the amount of deviation appropriately and to realize downsizing of the apparatus while minimizing the deterioration of optical characteristics.
Therefore, it is preferable that the magnitude of the deviation between the arrangement interval of the plurality of light emitting points 32 and the interval between the optical axes of the plurality of coupling lenses 7 is not more than half of the diameter of the light emitting points 32.

  As described above, the pitch changing unit 33 is preferably arranged in a concentric shape (for example, a concentric circle shape or a concentric rectangular shape). Thereby, the light in the outer peripheral side region via the pitch changing part 33 can be refracted to the center side.

Next, adhesion between the VCSEL substrate 30 and the coupling lens 7 will be described with reference to FIGS.
FIG. 6 is a YZ sectional view in a state where the VCSEL substrate 30 and the microlens array 7a as the plurality of coupling lenses 7 are attached. The VCSEL substrate 30 and the plurality of coupling lenses 7 are attached so as to correspond to the XY coordinates of each light emitting point 32, and are adhered by an adhesive 40 outside the effective range (indicated by S in the figure).

  The adhesive 40 may be a commonly used ultraviolet curable resin. By using a resin for the adhesive 40, it is possible to make it difficult to transfer the heat of the VCSEL substrate 30 to the coupling lens 7. The adhesive 40 may be solder. Since the solder has a smaller linear expansion coefficient than that of the resin, even if the light emitting point 32 generates heat due to light emission, the distance from the coupling lens 7 corresponding to the VCSEL substrate 30 is hardly changed.

FIG. 7 is an XY cross-sectional view in a state where the VCSEL substrate 30 and the microlens array 7a as the plurality of coupling lenses 7 are attached.
In the example of FIG. 7, four positions for bonding with the adhesive 40 are arranged at positions symmetrical to the center of the light emitting region 31 in the vertical direction and the horizontal direction. Thereby, the influence of the expansion | swelling or shrinkage | contraction of the adhesive agent 40 by the fluctuation | variation of temperature can be reduced. The bonding position by the adhesive 40 is not limited to this, and the VCSEL substrate 30 may be sealed by bonding over the entire circumference.
In this embodiment, the VCSEL substrate 30 and the coupling lens are directly mounted by the adhesive 40, but an intermediate member may be separately provided and bonded via this.

Next, the optical configuration of the laser apparatus of this embodiment will be described with reference to FIG.
FIG. 8 is an optical layout diagram showing how the light beam emitted from the VCSEL array light source 1 enters the optical fiber 9. Actually, a large number of light beams are emitted from the VCSEL substrate 30. In FIG. 8, the light rays are emitted from the light emission point 32 arranged at the center of the light emission region 31 and the two light emission points 32 arranged on the outermost periphery side. Is shown.

The loose divergent light beam collimated and emitted by the coupling lens 7 is collected by the condensing lens 8 which is a glass mold aspherical lens and collected on the core of the optical fiber 9. The core diameter of the optical fiber 9 indicated by A4 in the figure is 1.5 mm.
In a laser apparatus, since it is required to collect a higher output light amount on an optical fiber having a smaller core diameter, an optical system is required to collect a light beam from a light source as small as possible.

FIG. 9 is a perspective view showing a cross section of the optical fiber 9.
The optical fiber 9 includes a core 91 and a clad 92, and transmits a light beam by total reflection due to a difference in refractive index between the core 91 and the clad 92. Therefore, it is necessary for the light beam to be incident on the optical fiber 9 at an incident angle at which total reflection occurs (hereinafter also referred to as “fiber NA”).

  Since the fiber NA is determined, it is necessary to make the largest angle among the incident angles of light entering the optical fiber 9 smaller than the angle determined by the fiber NA. The fiber NA of the optical fiber 9 in this embodiment is 0.39, and the angle that can be taken in is ± 22.9 degrees. Therefore, each optical element is arranged so that the incident angle to the optical fiber 9 is ± 22.9 degrees or less.

Table 2 shows the position of each optical element, that is, the optical system in the present embodiment. A1 is the diameter of each light emitting point 32, A2 is the arrangement interval of each light emitting point 32, A3 is the diameter of the light emitting region 31, and A4 is the diameter of the core 91 of the optical fiber 9.
d1 represents the distance from the VCSEL array light source 1 to the coupling lens 7, and d2 represents the thickness of the coupling lens 7. d3 is the distance from the coupling lens 7 to the entrance surface of the condenser lens 8, d4 is the thickness of the condenser lens 8, and d5 is the distance from the exit surface of the condenser lens 8 to the optical fiber 9.

Table 3 shows the aspherical shape of the condenser lens 8.
The aspheric shape shown in Table 3 is defined by the following formula 1. Z (h) is an aspheric amount in the optical axis direction, and a shape is specified by giving a paraxial radius of curvature R, a conic constant K, and an aspheric coefficient Bi.
The sum (Σ) of the right side is 1 to 10 for i.

[Laser ignition device]
The structure of the laser ignition device according to the present invention is shown in FIG. The laser ignition device of the present invention includes the above-described laser device of the present invention.
The laser device 20 includes a VCSEL array light source 1, a plurality of coupling lenses 7 (microlens array), a condensing lens 8, an optical fiber 9, which are substantially the same as the laser devices shown in FIGS. A heat diffusing plate 5, a heat sink 11, a housing 12, and a Peltier element 10 are provided.

The laser ignition device shown in FIG. 11 further includes a blower fan 14, a power supply device 24, a spark plug 21, and an engine 22.
In the laser ignition device configured as described above, the laser light emitted from the VCSEL array light source 1 in the laser device 20 covered with the housing 12 is condensed by the condenser lens 8 through the coupling lens 7, The light enters the input end face of the fiber 9. This laser light is guided to the outside of the laser device 20 by the optical fiber 9 and enters the spark plug 21.

  The spark plug 21 includes a laser resonator including a Q-switch type laser medium. The laser resonator is irradiated with laser light to generate laser oscillation to generate a giant pulse laser. Is condensed into the combustion chamber of the engine 22 using an optical element such as the condenser lens 8. The engine 22 is operated by causing an air breakdown to occur in the combustion chamber of the engine 22 by the pulse laser beam of the giant pulse collected by the spark plug 21 and igniting the air-fuel mixture.

In such an operation process, heat is generated by operating the VCSEL array light source 1. In addition, the ambient environment of the engine 22 becomes a high temperature of about 80 ° C., for example. The VCSEL array light source 1 has a short lifetime at high temperatures and also has a reduced output. Therefore, it is necessary to drive the VCSEL array light source 1 while maintaining it at a temperature lower than the ambient temperature by the cooling / heat exhausting means. Therefore, a sufficient heat-absorbing area is formed in the VCSEL array light source 1 portion by a heat diffusion plate 5 made of a member having good thermal conductivity such as copper, and the VCSEL array light source 1 is formed by the Peltier element 10 and the air-cooling heat sink 11. To cool below ambient temperature. Furthermore, forced convection heat transfer can be generated by blowing air from the blower fan 14 and applying an air flow to the heat sink 11, thereby improving the heat dissipation of the heat sink 11.
If the ambient temperature of the laser ignition device is not high, a laser device in which the heat sink 11 is directly connected to the heat diffusion plate 5 may be used without using the Peltier element 10.

  The laser ignition device of the present embodiment shown in FIG. 11 has been described with respect to the case where the engine 22 that moves the piston by the combustion gas, that is, the piston engine is used as the internal combustion engine. However, the invention is not limited to this. The present invention can also be applied when a gas turbine engine or a jet engine is used. In short, the laser apparatus of the present invention can be applied to any internal combustion engine as long as it burns fuel and generates combustion gas.

1 Light source (VCSEL array light source)
2 Mount 5 Thermal diffusion plate 6 Lead wire 7 Coupling lens 8 Condensing lens 9 Optical fiber 10 Peltier element 11 Heat sink 12 Housing 13 Holding member 20 Laser device 21 Spark plug 22 Engine 23 Lead wire 24 Power supply device 30 VCSEL substrate 31 Light emitting region 32 Light emitting point 33 Pitch changing part 34 Non-light emitting area 40 Adhesive

JP 2003-158332 A JP 2002-026452 A

Claims (8)

A light source in which a plurality of light emitting points are two-dimensionally arranged;
A plurality of coupling lenses corresponding to a plurality of light emitting points of the light source;
A condensing optical system that condenses the light beam emitted from the light source and passed through the coupling lens, and
An arrangement interval of a plurality of the light emitting points and a distance between optical axes of the plurality of coupling lenses match, and a region where the optical axis of the coupling lens passes through the center of the light emitting point;
A region in which an arrangement interval of the plurality of light emitting points and an optical axis interval of the plurality of coupling lenses do not coincide with each other, and an optical axis of the coupling lens does not pass through the center of the light emitting point. Laser device to do.   The laser apparatus according to claim 1, wherein an arrangement interval of the plurality of light emitting points has a region deviated from a predetermined interval.   The magnitude | size of the shift | offset | difference of the space | interval of the arrangement | positioning space | interval of the said several light emission point and the optical axis interval of the said some coupling lens is below half of the diameter of the said light emission point, The Claim 1 or 2 characterized by the above-mentioned. Laser device.   A region where the arrangement intervals of the plurality of light emitting points do not coincide with the intervals of the optical axes of the plurality of coupling lenses and the optical axis of the coupling lens does not pass through the center of the light emitting points is arranged concentrically. The laser device according to claim 1 or 3, wherein   The laser device according to claim 1, wherein the light source is a surface-emitting type semiconductor laser light source.   6. The laser device according to claim 1, wherein the plurality of coupling lenses are lens arrays.   The laser apparatus according to claim 1, further comprising an optical fiber on which light condensed by the condensing optical system is incident.   A laser ignition device comprising the laser device according to claim 1.