JP2018001748A5 - Liquid ejection head device - Google Patents
Liquid ejection head device Download PDFInfo
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- JP2018001748A5 JP2018001748A5 JP2017102959A JP2017102959A JP2018001748A5 JP 2018001748 A5 JP2018001748 A5 JP 2018001748A5 JP 2017102959 A JP2017102959 A JP 2017102959A JP 2017102959 A JP2017102959 A JP 2017102959A JP 2018001748 A5 JP2018001748 A5 JP 2018001748A5
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- liquid ejection
- protective film
- ejection head
- switch
- voltage
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- 239000007788 liquid Substances 0.000 title claims description 75
- 230000001681 protective Effects 0.000 claims description 34
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000004913 activation Effects 0.000 claims 2
- 230000001276 controlling effect Effects 0.000 claims 2
- 230000000875 corresponding Effects 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 description 2
Description
本発明の一つの側面は液体吐出ヘッド用デバイスにかかり、前記液体吐出ヘッド用デバイスは、液体を吐出するための液体吐出素子と、前記液体吐出素子を駆動するための駆動部と、絶縁膜を介して前記液体吐出素子を覆う導電性の保護膜と、前記保護膜に接続され、前記保護膜からの電気信号をモニタするためのモニタ部と、を備え、前記モニタ部は、前記保護膜からの電気信号に基づいて前記駆動部を非活性化するための制御信号を出力することを特徴とする。
One aspect of the present invention relates to a device for a liquid discharge head, the device for the liquid discharge head, a liquid discharge device for discharging a liquid, a driver for driving the liquid discharging device, the insulating film A conductive protective film that covers the liquid ejection element via a protective film, and a monitor unit that is connected to the protective film and monitors an electric signal from the protective film. A control signal for deactivating the drive unit is output based on the electric signal of 1.
Claims (27)
前記液体吐出素子を駆動するための駆動部と、
絶縁膜を介して前記液体吐出素子を覆う導電性の保護膜と、
前記保護膜に接続され、前記保護膜の電圧の変化または前記保護膜に流れる電流の変化が検知されたとき、前記駆動部を非活性状態にする制御信号を出力する制御部と、
を有する
ことを特徴とする液体吐出ヘッド用デバイス。 A liquid ejection element for ejecting a liquid,
A drive unit for driving the liquid ejection element,
A conductive protective film covering the liquid ejection element via an insulating film,
A control unit connected to the protective film, which outputs a control signal for deactivating the drive unit when a change in the voltage of the protective film or a change in the current flowing in the protective film is detected;
A device for a liquid ejection head , comprising:
ことを特徴とする請求項１に記載の液体吐出ヘッド用デバイス。 The control unit detects a current flowing between the protective film and the liquid ejection element, which are separated from each other by the insulating film, and outputs the control signal when the value of the current becomes larger than a reference value. The device for a liquid ejection head according to claim 1, wherein:
ことを特徴とする請求項１に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 1, wherein the control unit detects the voltage of the protective film and outputs the control signal when the value of the voltage is out of an allowable range.
前記第１の容量素子と前記第２の容量素子との間のノードの電圧は前記電圧の変化または前記電流の変化に従い、前記制御部は該ノードの電圧に基づいて前記制御信号を出力する
ことを特徴とする請求項３に記載の液体吐出ヘッド用デバイス。 Further comprising a first capacitive element including the protective film as one terminal, and a second capacitive element connected between the other terminal of the first capacitive element and a reference voltage,
The voltage of the node between the first capacitive element and the second capacitive element is changed according to the change of the voltage or the current, and the control unit outputs the control signal based on the voltage of the node. The device for a liquid ejection head according to claim 3.
前記液体吐出素子と前記スイッチとは、互いに異なる電源電圧を伝搬する第１の電源配線と第２の電源配線との間に直列に接続されており、
前記制御信号に基づいて前記スイッチが非導通状態に固定されることで、前記駆動部が非活性状態になる
ことを特徴とする請求項１に記載の液体吐出ヘッド用デバイス。 The driving unit includes a switch,
The liquid ejection element and the switch are connected in series between a first power supply wiring and a second power supply wiring that propagate different power supply voltages,
The device for a liquid ejection head according to claim 1, wherein the drive unit is deactivated by fixing the switch to a non-conduction state based on the control signal.
前記液体吐出素子と前記第１のスイッチと前記第２のスイッチとは、互いに異なる電源電圧を伝搬する第１の電源配線と第２の電源配線との間に直列に接続されており、
前記第１のスイッチは、前記液体を吐出するか否かを示す信号に基づいて駆動され、
前記制御信号に基づいて前記第２のスイッチが非導通状態に固定されることで、前記駆動部が非活性状態になる
ことを特徴とする請求項１に記載の液体吐出ヘッド用デバイス。 The driving unit includes a first switch and a second switch,
The liquid ejection element, the first switch, and the second switch are connected in series between a first power supply wiring and a second power supply wiring that propagate different power supply voltages,
The first switch is driven based on a signal indicating whether to eject the liquid,
The device for a liquid ejection head according to claim 1, wherein the drive section is deactivated by fixing the second switch to a non-conduction state based on the control signal.
前記液体吐出ヘッド用デバイスは、前記半導体基板の上方において前記液体吐出素子と共に前記絶縁膜に覆われ且つ前記制御部に接続された配線パターンを更に備え、
前記保護膜は、前記半導体基板の上面に対する平面視において、前記配線パターンの少なくとも一部および前記液体吐出素子に重なるように配されており、
前記保護膜は、前記配線パターンの前記少なくとも一部に、前記絶縁膜に設けられたコンタクトホールを介して接続されている
ことを特徴とする請求項１に記載の液体吐出ヘッド用デバイス。 The liquid ejection element is disposed above the semiconductor substrate on which the drive unit is provided,
The liquid ejection head device further includes a wiring pattern that is covered with the liquid ejection element above the semiconductor substrate, is covered with the insulating film, and is connected to the control unit.
The protective film is arranged so as to overlap at least a part of the wiring pattern and the liquid ejection element in a plan view with respect to an upper surface of the semiconductor substrate,
The device for a liquid ejection head according to claim 1, wherein the protective film is connected to the at least a part of the wiring pattern via a contact hole provided in the insulating film.
前記コンタクトホールは、前記平面視において、前記絶縁膜における前記流路と重ならない位置に設けられている
ことを特徴とする請求項７に記載の液体吐出ヘッド用デバイス。 Further comprising a liquid supply member provided with a flow path for guiding the liquid to the liquid ejection element,
The device for a liquid ejection head according to claim 7, wherein the contact hole is provided at a position that does not overlap the flow path in the insulating film in the plan view.
前記保護膜は、前記複数の液体吐出素子を保護するように一体に配されている
ことを特徴とする請求項１に記載の液体吐出ヘッド用デバイス。 The liquid ejection element is one of a plurality of liquid ejection elements,
The device for a liquid ejection head according to claim 1, wherein the protective film is integrally arranged so as to protect the plurality of liquid ejection elements.
前記保護膜は、前記複数の液体吐出素子に対応し且つ互いに分離された複数の保護膜の１つである
ことを特徴とする請求項１に記載の液体吐出ヘッド用デバイス。 The liquid ejection element is one of a plurality of liquid ejection elements,
The device for a liquid ejection head according to claim 1, wherein the protective film is one of a plurality of protective films corresponding to the plurality of liquid ejection elements and separated from each other.
前記制御部は、前記複数の保護膜の少なくとも１つについての前記電圧の変化または前記電流の変化に基づいて、前記複数の駆動部を非活性状態にする制御信号を出力する
ことを特徴とする請求項１０に記載の液体吐出ヘッド用デバイス。 The drive unit is one of a plurality of drive units for respectively driving the plurality of liquid ejection elements,
The control unit outputs a control signal for deactivating the plurality of drive units based on a change in the voltage or a change in the current for at least one of the plurality of protective films. The device for a liquid ejection head according to claim 10.
前記モニタ部は、前記電圧印加部から電圧を前記保護膜へ印加しない場合、前記保護膜からの電気信号に基づいて前記駆動部の活性または非活性を制御する制御信号を出力する
ことを特徴とする請求項１に記載の液体吐出ヘッド用デバイス。 A voltage applying unit for applying a voltage to the protective film, and a monitor unit,
The monitor unit outputs a control signal for controlling activation or deactivation of the drive unit based on an electric signal from the protective film when a voltage is not applied to the protective film from the voltage application unit. The device for a liquid ejection head according to claim 1.
互いに異なる電源電圧を伝搬する第１の電源配線と第２の電源配線の間に、前記第１のスイッチと前記液体吐出素子と前記第２のスイッチとを直列に接続され、
前記電圧印加部から前記保護膜に電圧を印加する場合、前記第１のスイッチと前記第２のスイッチとは非導通状態に固定され、該電圧を印加しない場合、前記電圧印加部を前記保護膜から電気的に分離された状態にする
ことを特徴とする請求項１２に記載の液体吐出ヘッド用デバイス。 The driving unit includes a first switch and a second switch,
The first switch, the liquid discharge element, and the second switch are connected in series between a first power supply wiring and a second power supply wiring that propagate different power supply voltages,
When a voltage is applied to the protective film from the voltage applying unit, the first switch and the second switch are fixed in a non-conducting state, and when the voltage is not applied, the voltage applying unit is set to the protective film. The device for a liquid ejection head according to claim 12, wherein the device is electrically separated from the device .
ことを特徴とする請求項１２に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 12, wherein the voltage application unit is connected to the protective film via a resistor.
ことを特徴とする請求項１４に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 14, wherein the resistor is a portion in which a wiring connecting the protective film and the voltage applying unit is elongated.
ことを特徴とする請求項１４に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 14, wherein the resistor is a portion in which a wiring connecting the protective film and the voltage applying unit is narrowed.
ことを特徴とする請求項１４に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 14, wherein the resistor is a high-resistance wiring that connects the protective film and the voltage applying unit.
ことを特徴とする請求項１４に記載の液体吐出ヘッド用デバイス。 The liquid ejection head device according to claim 14, wherein the resistor is a diffusion resistor.
ことを特徴とする液体吐出ヘッド。 A liquid discharge head comprising the device for a liquid discharge head according to any one of claims 1 to 18.
ことを特徴とする液体吐出装置。 A liquid ejection apparatus comprising the liquid ejection head according to claim 19.
前記複数のユニットは、 The plurality of units are
液体を吐出するための液体吐出素子と、 A liquid ejection element for ejecting a liquid,
前記液体吐出素子を駆動するための駆動部と、 A drive unit for driving the liquid ejection element,
絶縁膜を介して前記液体吐出素子を覆う導電性の保護膜と、 A conductive protective film covering the liquid ejection element via an insulating film,
を含み、 Including,
前記複数のユニットに対応する複数の導電性の保護膜は、該複数のユニット間において相互に分離されており、 A plurality of conductive protective films corresponding to the plurality of units are separated from each other between the plurality of units,
前記論理回路は、前記導電性の保護膜に電気的に接続された入力端子と、前記駆動部に電気的に接続された出力端子とを含む The logic circuit includes an input terminal electrically connected to the conductive protective film and an output terminal electrically connected to the driving unit.
ことを特徴とする液体吐出ヘッド用デバイス。 A device for a liquid ejection head, characterized in that
ことを特徴とする請求項２１に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 21, wherein
ことを特徴とする請求項２１に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 21, wherein the device is a liquid ejection head device.
前記液体吐出素子と前記スイッチとは、互いに異なる電源電圧を伝搬する第１の電源配線と第２の電源配線との間に直列に接続されており、 The liquid ejection element and the switch are connected in series between a first power supply wiring and a second power supply wiring that propagate different power supply voltages,
前記論理回路からの制御信号に基づいて前記スイッチが非導通状態に固定されることで、前記駆動部が非活性状態になる The drive section is deactivated by fixing the switch to the non-conduction state based on the control signal from the logic circuit.
ことを特徴とする請求項２１に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 21, wherein the device is a liquid ejection head device.
前記液体吐出素子と前記第１のスイッチと前記第２のスイッチとは、互いに異なる電源電圧を伝搬する第１の電源配線と第２の電源配線との間に直列に接続されており、 The liquid ejection element, the first switch, and the second switch are connected in series between a first power supply line and a second power supply line that propagate different power supply voltages,
前記第１のスイッチは、前記液体を吐出するか否かを示す信号に基づいて駆動され、 The first switch is driven based on a signal indicating whether to eject the liquid,
前記論理回路からの制御信号に基づいて前記第２のスイッチが非導通状態に固定されることで、前記駆動部が非活性状態になる Since the second switch is fixed in the non-conducting state based on the control signal from the logic circuit, the driving section becomes inactive state.
ことを特徴とする請求項２１に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 21, wherein
前記モニタ部は、前記電圧印加部から電圧を前記保護膜へ印加しない場合、前記保護膜からの電気信号に基づいて前記駆動部の活性または非活性を制御する制御信号を出力する The monitor unit outputs a control signal for controlling activation or deactivation of the drive unit based on an electric signal from the protective film when a voltage is not applied from the voltage application unit to the protective film.
ことを特徴とする請求項２１に記載の液体吐出ヘッド用デバイス。 The device for a liquid ejection head according to claim 21, wherein the device is a liquid ejection head device.
前記液体吐出ヘッドは、請求項２１から請求項２６のいずれか１項に記載の液体吐出ヘッド用デバイスを備える The liquid ejection head includes the device for a liquid ejection head according to any one of claims 21 to 26.
ことを特徴とする液体吐出装置。 A liquid ejection device characterized by the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/617,276 US10538086B2 (en) | 2016-06-23 | 2017-06-08 | Liquid discharge head substrate, liquid discharge head and liquid discharge apparatus |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016124799 | 2016-06-23 | ||
| JP2016124799 | 2016-06-23 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018001748A JP2018001748A (en) | 2018-01-11 |
| JP2018001748A5 true JP2018001748A5 (en) | 2020-05-07 |
| JP6976081B2 JP6976081B2 (en) | 2021-12-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2017102959A Active JP6976081B2 (en) | 2016-06-23 | 2017-05-24 | Device for liquid discharge head |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7216508B2 (en) * | 2018-09-18 | 2023-02-01 | キヤノン株式会社 | LIQUID EJECTOR AND CONTROL METHOD THEREOF |
| KR20220002603A (en) | 2019-06-17 | 2022-01-06 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | Cavitation plate for heating component protection and condition detection |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2000280477A (en) * | 1999-03-31 | 2000-10-10 | Canon Inc | Ink jet recording head, head cartridge with the ink jet recording head mounted thereon, and recording apparatus |
| ATE376935T1 (en) * | 2003-09-17 | 2007-11-15 | Hewlett Packard Development Co | A VARIETY OF BARRIER LAYERS |
| JP4926669B2 (en) * | 2005-12-09 | 2012-05-09 | キヤノン株式会社 | Inkjet head cleaning method, inkjet head, and inkjet recording apparatus |
| KR101507807B1 (en) * | 2008-08-14 | 2015-04-03 | 삼성전자주식회사 | Thermal inkjet printhead and method of driving the same |
| JP2013159063A (en) * | 2012-02-07 | 2013-08-19 | Canon Finetech Inc | Inkjet recording head |
| JP6270358B2 (en) * | 2013-07-09 | 2018-01-31 | キヤノン株式会社 | Liquid discharge head |
| JP6302231B2 (en) * | 2013-12-12 | 2018-03-28 | キヤノン株式会社 | Recording element substrate, recording head, and recording apparatus |
| JP6300639B2 (en) * | 2014-05-26 | 2018-03-28 | キヤノン株式会社 | Liquid discharge head |
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