JP2017537427A - Static dissipative device - Google Patents

Abstract

An electrostatic dissipative device (12) comprising an X-ray tube (38) and a conductive shell (27) electrically coupled to the anode (22) of the X-ray tube, in particular, is a flat panel display (FPD) (13 ) Can be used for static dissipation on the lower side (13b).

Description

  The present application relates generally to the use of X-rays for electrostatic dissipation.

  Static charges in some materials, such as electronic components, can suddenly discharge, resulting in damage to the material. For example, electrostatic charges can accumulate on a flat panel display (FPD) during manufacturing. The static charge on the underside of the FPD can discharge to the support table when the FPD is lifted from the table, causing damage to the underside of the FPD. It may be beneficial to provide a conductive path with an appropriate resistance value to gradually dissipate such charge. By gradually dissipating these static charges, damage to sensitive components can be avoided.

  In various materials, including the underside of a flat panel display (FPD), it has been found beneficial to provide a conductive path with an appropriate resistance value to gradually dissipate electrostatic charges. The present invention relates to embodiments of electrostatic dissipative devices that meet these needs. Each embodiment may meet one, some, or all of these needs.

  An electrostatic dissipative device may comprise an x-ray tube and a shell. The x-ray tube may include a cathode and an anode that are electrically isolated from each other. The cathode can be configured to emit electrons toward the anode. The anode can be configured to emit X-rays outward from the X-ray tube in response to impacting electrons from the cathode. The shell can hold an x-ray tube. The shell can be conductive. The shell can be electrically coupled to the anode and can be electrically isolated from the cathode.

1 is a schematic side sectional view of a flat panel display (FPD) manufacturing machine 10 according to an embodiment of the present invention, and is a schematic perspective view of an electrostatic dissipating device 12. 2 is a schematic cross-sectional side view of an electrostatic dissipative device 12 comprising an X-ray tube 38 and a shell 27, according to an embodiment of the present invention. 2 is a schematic perspective view of a cap 19 according to an embodiment of the present invention. FIG. (1) X-ray tube 38; (2) Shell 27 with connector 17 including cap connector _17c and actuator connector _17a (both are recessed in the radial direction); and (3) according to an embodiment of the present invention. 1 is a schematic sectional side view of an electrostatic dissipative device 12 including a cap 19. (1) X-ray tube 38; (2) Shell 27 with connector 17 including cap connector _17c and actuator connector _17a (both are recessed in the radial direction); and (3) according to an embodiment of the present invention. 1 is a schematic sectional side view of an electrostatic dissipative device 12 including a cap 19. FIG. 2 is a schematic cross-sectional side view of an electrostatic dissipative device 12 including (1) a window 26 forming an annular portion of a shell 27 and (2) an anode 22 with a convex surface extending toward an electron emitter 21 _e . The anode 22 of the dome-shaped (its concave side is that facing the cathode 21 or the electron emitter 21 _e) and electrostatic dissipation comprising a transmission anode 22, which is also the window 26, and a connector 17 which is disposed on the sheath 24 3 is a schematic side sectional view of the device 12. FIG. The anode 22 of the dome-shaped (its concave side is that facing the cathode 21 or the electron emitter 21 _e) and electrostatic dissipation comprising a transmission anode 22, which is also the window 26, and a connector 17 which is disposed on the sheath 24 3 is a schematic side sectional view of the device 12. FIG. It is a schematic sectional side view of the electrostatic dissipation device 12 which does not include a shell. This includes the following: The anode 22 can be attached to the electrically resistive housing 23. The anode 22, the anode wire 9 _a or other conductive path, may be electrically coupled to ground or a power supply 16. The electron emitter 21 _e can extend into the hollow in the dome of the anode 22. The connector 17 is disposed in the electrical resistance housing 23. Definitions As used herein, the term “electrostatic discharge” means that static electricity rapidly flows from one object to another. Electronic components can be damaged as a result of electrostatic discharge. As used herein, the term “electrostatic dissipation” means that electricity flows relatively slowly from one object to another. Static dissipation usually does not lead to damage to electronic components. As used herein, the term “composite material” refers to a material that is at least two materials that have significantly different properties from each other, wherein the composite material obtained when combined has properties that are different from the individual materials. It means the material that is made. Composite materials typically include reinforcements embedded in a matrix. One type of composite material is a carbon fiber composite that includes carbon fibers embedded in a matrix. Typical matrix materials include polymers, bismaleimide, amorphous carbon, hydrogenated amorphous carbon, ceramic, silicon nitride, boron nitride, boron carbide, aluminum nitride.

FIG. 1 shows a flat panel display (FPD) making machine 10 and a static dissipating device 12. Static charges can be accumulated in the flat panel display (FPD) 13 during the manufacture of the FPD 13. Such a rapid electrostatic discharge of static charge can damage the FPD 13. This damage can be avoided by dissipating such static charges relatively slowly. Various methods have been used to dissipate electrostatic charges on the upper 13 _{t of the} FPD 13. Opposite, namely static dissipation under side 13 _b of FPD13 may be more difficult. This is because the table 14 used to support the FPD 13 can block the electrostatic dissipating device. Electrostatic dissipation device 12 as described herein, includes a static dissipation under side 13 _b of FPD13, it may be used in electrostatic dissipation.

  The electrostatic dissipating device 12 may be movably disposed in a hole in the table 14. The lift actuator 11 can be coupled to a static dissipating device 12. The lift actuator 11 can at least assist the lifting of the FPD 13 from the table 14 by lifting the electrostatic dissipation device 12 and pressing the electrostatic dissipation device 12 against the FPD 13. Although only one static dissipating device 12 is shown in FIG. 1, the FPD manufacturing machine 11 typically includes a plurality of such static dissipating devices 12, which together dispose the FPD 13 as a table. Lift from 14.

As shown in FIG. 2, the static dissipative device 12 may include an x-ray tube 38 and a shell 27. The X-ray tube 38 can emit X-rays 15 between the table 14 and the lower side 13 _{b of the} FPD 13. These X-rays 15 can form ions in the air between the FPD 13 and the table 14. These ions are obtained dissipate electrostatic charge on the lower side 13 _b of FPD13, thereby may avoid electrostatic discharge and damage under side 13 _b.

  X-ray tube 38 may include a cathode 21 and an anode 22 that are electrically isolated from each other. The cathode 21 can be configured to emit electrons toward the anode 22. The anode 22 can be configured to emit X-rays 15 outward from the X-ray tube 38 in response to impacting electrons 28 from the cathode 21.

The shell 27 can hold an X-ray tube 38. The shell 27 may enclose at least a portion of the x-ray tube 38, or specifically the length L ₃₈ of the x-ray tube 38. The shell 27 may be made of a material with high structural strength to hold the table 14. Therefore, by combining the X-ray tube 38 and the shell 27, the electrostatic dissipation device 12 lifts the table 13, emits X-rays between the table 14 and the FPD 13, and forms ions therebetween, thereby , it is possible to realize the FPD13, access static dissipation difficult lower 13 _b.

The shell 27 may have a length L ₂₇ that is greater than the length L ₃₈ of the X-ray tube 38. The length increment (L ₂₇ -L ₃₈ ) extends beyond the distal end 21 _d (away from the anode 22) of the cathode 21 to provide a protective area for the connector cable 9 to the power supply 16. Can be included.

A length increment (L ₂₇ -L ₃₈ ) to provide a hollow region 27 _h for protection of the X-ray tube 38, a region for expanding the X-ray 15 outward, and a region for ion formation. May include an extension from the distal end 22 _d of the anode 22 (away from the cathode 21) to the distal end 27 _d of the shell 27. If the distal end 27 _{d of the} shell is used to press against the FPD 13 and a space is required between the X-ray tube 38 and the FPD 13 to radiate the X-ray 15 outward, the X-ray 15 The area for spreading outwards can be important. In order to allow the passage of ions and X-ray 15 from the hollow region 27 _h outward hollow region 27 _h may be provided by the vent 29, such as grooves or holes. Vent 29 may be a space between cages for providing shell 27 or a space between pillars. In order to maximize the volume of air, the hollow region 27 _h can be largely hollow. The distal end 27 _d of the shell 27 may have a support surface for supporting the surface of the FPD 13. The support surface of the shell 27 can be a scratch or scratch resistant surface, such as a Teflon coating.

Suitable length _{L e} of the hollow region 27 _h from the distal end 22 _d to a distal end 27 _d of the shell 27 of the anode 22, a space for extending the X-ray in the gap between the table 14 and FPD13 And ensuring space for the static dissipating device 12 inside the hole in the table 14 may be important. For example, the hollow region 27 _h is beyond the distal end 22 _d of the anode 22 3 to 10 mm in one embodiment, over a distance _{L e} 2-20 mm in other embodiments, may extend.

  The power supply 16 can supply power to the X-ray tube 38. Due to the limited space, it may be difficult to adapt the static dissipating device 12 and the power supply 16 within the holes in the table 14 or elsewhere where static dissipation is required. X-ray tube 38 may be movably coupled to power supply 16 by cable 9, thereby allowing electrostatic dissipative device 12 to fit within a hole in table 14, and x-ray tube 38 is remote. Allows receiving power from the power supply 16. In one aspect, the cable is at least 1 meter, in another aspect, at least 2 meters, and in another aspect, can be at least 4 meters.

The cable 9 may include a cathode line 9 _c and an anode line 9 _a as shown in FIG. The cathode line 9 _c can be used to heat the electron emitter 21 _e and / or to supply a high negative voltage to the electron emitter 21 _e . The anode line 9 _a can be electrically coupled to the shell 27 and the shell 27 can be electrically coupled to the anode 22. The anode line 9 _a can be directly electrically coupled to the power source 16. Alternatively, anode line _9a can be directly electrically coupled to ground and power supply 16 can be electrically coupled to ground.

Due to space limitations, it may be important for the static dissipative device 12 to have a small outer diameter D ₁₂ (see FIG. 2). For example, the maximum outer diameter D ₁₂ that the electrostatic dissipation device 12 may have is, in one aspect, less than 40 millimeters, in other aspects, less than 25 millimeters, in other aspects, less than 20 millimeters, in other aspects. Less than 15 mm. The maximum outer diameter _{D 12} of the electrostatic dissipation device 12, the shell 27, the sheath 24, a screw 17, or of the cap 19, means the maximum diameter of the largest to smallest.

  The shell 27 can be conductive, can have a conductive material, can have a conductive coating, and can be a path to ground or power supply 16. The shell 27 can be electrically coupled to the anode 22 and can be electrically isolated from the cathode 21. Therefore, the shell 27 can be used instead of wiring to the anode 22. It may be important to use shell 27 as a current path between ground or power supply 16 and anode 22. This is because the space in the hole in the table 14 in which the electrostatic dissipating device 12 can be arranged is limited, and it may be difficult to add wiring for connecting the power supply 16 to the anode 22.

  It may be important that the shell 27 has a reasonably low conductivity to avoid unnecessarily accumulating heat on the shell 27 due to current. For example, the electrical resistivity that the shell may have is, in one embodiment, less than 0.02 ohm meters, in other embodiments, less than 0.05 ohm meters, and in other embodiments, less than 0.15 ohm meters; In other embodiments, less than 0.25 ohm meters.

The shell may be made of a material with a thickness that allows the shell 27 to be a support for lifting the FPD. The whole or part of the shell 27 or the hollow area 27 _h of the shell 27 may be made of various composite materials such as, for example, a carbon fiber composite. These composite materials have high strength, are electrically conductive, and can substantially transmit X-rays 15.

The sheath 24 may surround part or all of the shell 27. To avoid creating an undesirable current path away from the shell 27, the sheath 24 may be electrically resistive. For example, if the static dissipative device 12 is used to lift the FPD from the table 14 during the manufacture of the FPD, it may be desirable to avoid the shell 27 discharging current through the table 14. The sheath 24 may be used to avoid such undesirable current paths. Examples of the electrical resistivity of the sheath 24 include values greater than 100 ohm meters in one aspect and greater than 500 ohm meters in another aspect. If the sheath 24 extends around the hollow region 27 _h of the shell 27, it can be vented.

It may be important to avoid current flowing from the anode 22 to the FPD 13 through the shell 27. An electrically resistive cap 19 may be disposed at the distal end 27 _d of the shell 27. The cap 19 may be made of a material that is sufficiently sturdy to support the face of the FPD. The support surface of the cap 19 can be a scratch or scratch resistant surface, such as a Teflon coating.

Cap 19 can be or include a polymer such as, for example, polyetheretherketone (PEEK). The electrical resistivity of the cap 19 may be at least 5 × 10 ¹³ ohm meters in one aspect, at least 1 × 10 ¹⁴ ohm meters in another aspect, and at least 2.5 × in other aspects. It may be 10 ¹⁴ ohm meters, or in other embodiments at least 4.0 × 10 ¹⁴ ohm meters.

  An example of the cap 19 is shown in FIG. The cap 19 may have two open ends 32 that form a hollow in the cap 19 to allow convective heat transfer away from the x-ray tube 38. The cap 19 may also have a vent 31 on the outer periphery to improve the transmission of the X-rays 15 and / or to move ions away from the electrostatic dissipative device 12.

Cap 19, by inserting a flange inside or outside of the shell 27, or may fit over the distal end 27 _d of the shell 27, or in be a planar, such as washers, the shell by an adhesive 27 can be attached.

The vent 29 and / or 31, but may promote ion movement and X-ray, so as to ionize the air in the outside of the hollow region 27 _h, the shell 27, the sheath 24, and / or the cap 19, the low energy It may be beneficial to be made of a material that is substantially transparent to x-rays. A material with a small atomic number can transmit X-rays more. The maximum atomic number that all or part of the shell 27, the hollow region 27 _h of the shell 27, the sheath 24, the cap 19, or combinations thereof may have is 8 in one aspect and 16 in another aspect. Yes and / or the X-ray transmission of X-rays 15 with an energy of 10 keV is higher than 40% in one aspect, higher than 45% in another aspect, higher than 50% in another aspect, In embodiments, it may be higher than 60%, or in other embodiments, higher than 70%. The energy of the X-ray 15 described above refers to the energy of the electron 28 that collides with the target material, the energy of the X-ray 15 emitted from the X-ray tube 38, and the bias voltage between the cathode 21 and the anode 22. For example, if the bias voltage between the cathode 21 and the anode 22 is 10 kV, the electrons 28 that strike the target may be 10 keV and the X-rays 15 emitted from the X-ray tube 38 may be 10 keV. Due to the low atomic number of carbon (6), materials with a relatively large carbon mass percentage may be useful. Due to its small atomic number (4), beryllium is also useful, but beryllium can be expensive and dangerous.

  It may also be important that the strength of the shell 27 is high in order to protect the X-ray tube 38 from damage and to provide sufficient mechanical strength to lift the FPD. Shell 27 and x-ray tube 38 may be tubular in shape for ease of manufacture and improved strength.

  Important material properties of the shell 27 can be strength, x-ray 15 transmission, and conductivity. The shell 27 can be composed of (or made of) a composite material that achieves these properties. The term “composite material” is usually made of at least two materials having properties that are very different from each other, and when combined, the resulting composite material may have different properties than the individual component materials Refers to material. Composite materials typically include reinforcements embedded in a matrix. Typical matrix materials include polymers, bismaleimide, amorphous carbon, hydrogenated amorphous carbon, ceramic, silicon nitride, boron nitride, boron carbide, aluminum nitride.

  Shell 27 may consist of or include a carbon fiber composite material. The conductivity of the shell 27 can be improved by making the proportion of carbon fibers relatively high. For example, the shell 27 can include at least 60% volume percent carbon fiber in one aspect, and can include at least 70% volume percent carbon fiber in another aspect, and at least 90% in another aspect. % Volume percent carbon fiber.

The static dissipating device 12 may have one or more connectors 17. One connector 17 may be an actuator connector 17 _a for coupling the electrostatic dissipation device 12 to the lift actuator 11 located at or near the proximal end 27 _p (close to the cathode 21) of the shell 27. Another connector 17 is at the distal end 27 _d (close to the anode 22) of the shell 27 and may be a cap connector 17 _c for coupling the electrostatic dissipative device 12 to the cap 19. Types of connectors 17 include screw type, sleeve connectors, press fit, and BNC. The connector 17 can be attached to the shell 27 by screws, adhesive, welding or the like.

As shown in FIGS. 4a and 4b, the connector 17 can be molded into the shell 27 or can be integral therewith. For example, threads are machined or molded into the shell 27. Since one or both of the connectors 17 are recessed in the radial direction, the actuator 11 and / or cap 19 can have substantially the same outer diameter as the shell 27 so that the radially outer surface of the cap 19 And / or the actuator 11 can be coplanar or substantially coplanar with the radially outer surface of the shell 27. This coplanar or nearly coplanar radial outer surface allows the device to fit into a small hole in the table 14. By "substantially coplanar", the maximum outer diameter D ₁₁ of the maximum outer diameter D ₁₉ and / or the lift actuator 11 of the cap 19 is not greater than the length obtained by adding two millimeters maximum outer diameter D ₂₇ of the shell 27 (D ₁₉ ≦ D ₂₇ +2 mm and / or D ₁₁ ≦ D ₂₇ +2 mm).

Maximum outer diameter _{D 17a} of the actuator connector 17 _a may be less than the maximum outer diameter _{D 27} of the shell 27. The actuator 11 can have an internal connector 11 _a (eg, a screw) that can be mated with the actuator connector 17 _a . The maximum outer diameter D _17c of the cap connector 17 _c may be smaller than the maximum outer diameter D ₂₇ of the shell 27. The cap 19 may have an internal connector 19 _c (eg, a screw) that can mate with the cap connector 17 _c .

As shown in FIGS. 2, 4 a and 4 b, the cathode 21 can be electrically isolated from the anode 22 by the electrically resistive housing 23 and by a vacuum within the electrically resistive housing 23. The electrically resistive housing 23 can be ceramic for convenience of strength and electrical resistivity. The electrical resistivity of the electrically resistive housing 23 may be at least 1 × 10 ¹² in one aspect, at least 7 × 10 ¹² in another aspect, and at least 1 × 10 ^{13 in} another aspect. It can be.

  As shown in FIG. 5, the x-ray tube 38 can be made without the electrically resistive housing 23, and the cathode 21 can be electrically isolated from the anode 22 by the vacuum in the shell 27. In addition, as shown in FIG. 5, the shell 27 may include a window 26 configured to transmit X-rays 15. Window 26 may be conductive. The window 26 may form an annular portion of the shell 27 and may have an annular shape to radiate the X-rays 15 outwardly in a 360 degree arc shape outward in the latitudinal direction. The 360 degree emission of X-rays 15 can be effective in forming large quantities of ions between the FPD and the table 14. The window 26 may form only a portion of a ring (eg, a 90 degree portion or a 180 degree portion) for X-ray 15 radiation less than 360 degrees. This can be beneficial if the static dissipating device 12 is located at a corner or end of the table 14. If the window 26 forms only part of the ring, the remaining part of the shell 27 substantially blocks the X-ray 15 to avoid emitting the X-ray 15 in an unintended or undesired direction. May be made of material.

Window 26 may surround all or at least a portion of anode 22. Window 26 may surround all or at least a portion of cathode 21. Window 26 may surround all or at least a portion of the electron emitter 21 _e. The transmission of window 26 for X-rays 15 having an energy of 1.74 keV may be greater than 60%. The window 26 may be a different part from the other parts of the shell 27 and a different material. Alternatively, the material of the window 26 is the same as the entire shell 27, and thus the entire shell can be the window 26. Window 26 may include beryllium, carbon fiber composite, graphite, plastic, glass, boron carbide, or combinations thereof. Whether the window 26 is part of the shell or the material of the window 26 is the same as the entire shell may be based on cost and manufacturability.

  The window 26 may have a material and thickness that provides sufficient strength to support the FPD 13. Window 26 is a characteristic of the X-ray window described in US patent application Ser. No. 14 / 597,955 filed Jan. 15, 2015, which is incorporated herein by reference in its entirety (eg, deflection May be part of or all of (small, high X-ray transmittance, low visible light and infrared transmittance).

As shown in Figure 5, the anode 22, extending toward the cathode 21 or the electron emitter 21 _e, having protrusions or convex, such as hemispherical. The protrusion may facilitate the emission of electrons 28 to the anode 22 by improving the voltage gradient and may allow 360 degree emission of X-rays 15. The convex surface can include a target material.

The electrically insulating material 25 can achieve electrical insulation between at least a portion of the X-ray tube 38, such as the cathode 21 and the shell 27. The electrically insulating material 25 may have an electrical resistivity in one aspect greater than 1 × 10 ¹² ohm meters, or in other aspects greater than 7 × 10 ¹² ohm meters.

The electrically insulating material 25 may have a thermal conductivity greater than 0.7 W / (m · K) to facilitate heat transfer from the X-ray tube 25 to the shell 27. Emerson and Cumming SYCASE 2850, which has a thermal conductivity of about 1.02 W / (m · K) and an electrical resistivity of about 1 × 10 ¹³ ohm meters, is an example of an electrically insulating material 25.

Shown in FIGS. 6-8 are additional embodiments of the electrostatic dissipative device 12 that may have the characteristics described above, with the following exceptions. Embodiment of the electrostatic dissipation device 12 shown in Figure 6-8, may have an anode 22 of the dome-shaped concave side facing the cathode 21 or the electron emitter 21 _e. The anode 22 can be the transmission anode 22 and thus the anode that is also the window 26. The embodiment of the electrostatic dissipation device 12 shown in FIGS. 6-8 may emit X-rays 15 in a hemispherical pattern. This can be beneficial in some applications, including static electricity dissipation under side 13 _b of the FPD.

As shown in FIGS. 6-7, the anode 22 can be electrically coupled to the shell 27. As shown in FIG. 7, the shell 27 can extend beyond the distal end 22 _d (away from the cathode 21) of the anode 22 to the distal end 27 _d of the shell 27, A hollow region 27 _h for protecting 38, a region for expanding X-rays 15 outward, and a region for ion formation may be provided. As shown in Figure 7, the cap 19 may be disposed on the distal end 27 _d of the shell.

As shown in FIG. 8, the static dissipative device 12 may include one or more of the following. a) There is no shell 27. b) The anode 22 can be attached to the electrically resistive housing 23. c) the anode 22, the anode wire 9 _a or other conductive path, it could be electrically coupled to ground or power source 16, an electron emitter 21 _e may extend hollow in the dome of the anode 22.

  As shown in the embodiment of the static dissipating device 12 in FIGS. 6 and 8, the connector 17 may be disposed in or on the electrically resistive housing 23, the sheath 24, or the shell 27. As shown in FIG. 8, the connector 17 is such that the radial outer surface of the cap 19 and / or the actuator 11 can be coplanar or substantially coplanar with the radial outer surface of the electrically resistive housing 23. May be recessed. This coplanar or nearly coplanar radial outer surface may allow the device to fit into a small hole in the table 14. “Substantially in the same plane” means that the maximum outer diameter of the cap 19 and / or the maximum outer diameter of the lift actuator 11 is not larger than the maximum outer diameter of the electrically resistive housing 23 plus 2 millimeters. obtain.

  The dome-shaped anode 22 shown in FIGS. 6-8 can be obtained by pressing or forming a material (eg, beryllium) into a dome shape, or by obtaining a sheet-like material and then into a dome shape. It can be made by processing. The sheet may have a thickness that is approximately the same as the final dome thickness. The sheet can be a single material (ie, material properties that are isotropic in all directions). By using a single material, separation of different layers of material may be avoided. The dome-shaped anode 22 may be made of a composite material such as, for example, a carbon fiber composite.

Claims (20)

An electrostatic dissipative device configured to dissipate static electricity between a flat panel display (FPD) and a table during manufacture of the FPD,
a. An x-ray tube,
i. The x-ray tube includes a cathode and an anode that are electrically insulated from each other;
ii. The cathode is configured to emit electrons toward the anode;
iii. The anode is configured to emit X-rays from the X-ray tube in response to impacting electrons from the cathode;
An X-ray tube;
b. A shell,
i. Holding the X-ray tube,
ii. Is conductive,
iii. Electrically coupled to the anode and electrically insulated from the cathode;
iv. Having a proximal end near the cathode and a distal end near the anode;
V. Having a connector at the proximal end configured to couple to an actuator for lifting the FPD;
vi. A hollow region between the distal end of the anode and the distal end of the shell, the hollow region being vented to pass ions and x-rays out of the hollow region;
Shell,
c. A device having a maximum outer diameter of less than 20 millimeters. Further comprising an electrically insulating material;
The electrically insulating material is
a. Having a thermal conductivity greater than 0.7 W / (m · K),
b. Disposed between the shell and the cathode;
c. Electrically insulating the shell from the cathode;
The device of claim 1. A cap,
The cap is
a. Electrical resistance,
b. Disposed on the distal end of the shell;
c. Configured to support the surface of the FPD;
The device of claim 1.   The device of claim 3, wherein the cap is vented to allow ions and X-rays to pass out of the hollow region.   The device of claim 1, wherein the shell is made of a carbon fiber composite material. The shell is
a. Electrical resistivity less than 0.05 ohm meter;
b. The device according to claim 1, having an X-ray transmission greater than 40% for X-rays with an energy of 10 keV.   The device of claim 1, wherein the maximum atomic number of all materials of the shell is 8.   The device of claim 1, wherein the shell substantially surrounds a length of the x-ray tube, and the shell has a length greater than the length of the x-ray tube.   The device of claim 1, wherein the hollow region extends beyond the distal end of the anode by a length of 3 to 10 millimeters. A sheath further;
The sheath is
a. Surround at least a portion of the shell and the anode;
b. Having an electrical resistivity greater than 100 ohm meters;
c. Configured to electrically insulate the shell from the table;
The device of claim 1.   The device of claim 1, wherein the shell surrounding the hollow region has an X-ray transmission greater than 40% with X-rays having an energy of 10 keV. An electrostatic dissipative device,
a. An x-ray tube,
i. The x-ray tube includes a cathode and an anode that are electrically insulated from each other;
ii. The cathode is configured to emit electrons toward the anode;
iii. The anode is configured to emit X-rays from the X-ray tube in response to impacting electrons from the cathode;
An X-ray tube;
b. A shell,
i. Surround at least a portion of the x-ray tube, hold the x-ray tube,
ii. Is conductive,
iii. Electrically coupled to the anode and electrically insulated from the cathode;
iv. A proximal end near the cathode and a distal end near the anode;
v. A hollow region at the distal end of the shell that extends beyond the distal end of the anode away from the cathode;
vi. Having an electrical resistivity of less than 0.05 ohm meter;
vii. Of all the materials of the shell, the maximum atomic number is 8.
An electrostatic dissipative device comprising a shell. a. The shell further comprises an actuator connector;
b. The actuator connector is disposed at the proximal end;
c. The actuator connector is configured to be coupled to an actuator for lifting a flat panel display;
d. The actuator connector is radially recessed,
e. A maximum outer diameter of the actuator connector is smaller than a maximum outer diameter of the shell;
The X-ray source according to claim 12. Further comprising an electrically insulating material;
The electrically insulating material is
a. Is electrically insulating,
b. Having a thermal conductivity greater than 0.7 W / (m · K),
c. Disposed between the shell and the cathode;
d. Electrically insulating the shell from the cathode;
The device according to claim 12.   13. The device of claim 12, wherein the device forms part of a static dissipating system, the system comprising a power source movably coupled to the x-ray tube by a cable that is at least 2 meters in length. . An electrostatic dissipative device configured to dissipate static electricity between a flat panel display (FPD) and a table during manufacture of the FPD,
a. An x-ray tube,
i. The x-ray tube includes a cathode and an anode that are electrically insulated from each other;
ii. The cathode is configured to emit electrons toward the anode;
iii. The anode is configured to emit X-rays from the X-ray tube in response to impacting electrons from the cathode;
An X-ray tube;
b. A shell,
i. Holding the X-ray tube,
ii. Is conductive,
iii. Electrically coupled to the anode and electrically insulated from the cathode;
iv. Having a connector at the proximal end configured to be coupled to an actuator to lift the FPD;
v. Having a proximal end near the cathode and a distal end near the anode;
vi. Having a connector at the proximal end configured to be coupled to an actuator to lift the FPD;
A device comprising a shell. a. The connector at the proximal end of the shell is an actuator connector;
b. The shell further comprises a cap connector at the distal end of the shell;
c. The cap connector is configured to be coupled to a cap;
d. Both the actuator connector and the cap connector are radially recessed;
e. Both the maximum outer diameter of the cap connector and the maximum outer diameter of the actuator connector are smaller than the maximum outer diameter of the shell,
The device of claim 16. Further comprising the cap;
The cap is
a. An internal connector that can be fitted with the cap connector;
b. An outer diameter not larger than the outer diameter of the shell plus 2 millimeters;
c. A support surface configured to support the FPD;
The device of claim 17, comprising:   18. The device of claim 17, wherein the shell is vented, the cap is vented, or both are vented. An electrostatic dissipative device,
a. A cathode and an anode,
i. The cathode and the anode are electrically insulated from each other;
ii. The cathode is configured to emit electrons toward the anode;
iii. The anode is configured to emit X-rays from the X-ray tube in response to impacting electrons from the cathode;
A cathode and an anode;
b. A shell,
i. Surround at least a portion of the anode and at least a portion of the cathode, and hold the anode and the cathode;
ii. Is conductive,
iii. Electrically coupled to the anode and electrically insulated from the cathode;
i. A window configured to transmit the x-rays, the window comprising:
(1) having an annular shape,
(2) having a transmittance greater than 60% for X-rays having an energy of 1.74 keV;
(3) surround at least a portion of the anode;
An electrostatic dissipative device comprising a shell.

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