JP2017220671A - Strain detection element, pressure sensor, microphone, blood pressure sensor, and touch panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a strain detection element which is highly sensitive, and a pressure sensor, a microphone, a blood pressure sensor, and a touch panel.SOLUTION: According to one embodiment, there is provided a strain detection element which is provided on a deformable membrane part. The strain detection element includes a functional layer, a first magnetic layer, a second magnetic layer, and an intermediate layer. The functional layer contains at least one of oxide and nitride. The second magnetic layer is provided between the functional layer and the first magnetic layer. The intermediate layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and contains boron.SELECTED DRAWING: Figure 1

Description

  Embodiments described herein relate generally to a strain sensing element, a pressure sensor, a microphone, a blood pressure sensor, and a touch panel.

  Examples of pressure sensors using MEMS (Micro Electro Mechanical Systems) technology include a piezoresistance change type and a capacitance type. On the other hand, a pressure sensor using a spin technique has been proposed. In a pressure sensor using a spin technique, a resistance change corresponding to strain is detected. For example, in a strain detection device used for a pressure sensor or the like, improvement in sensitivity is desired.

JP 2007-180201 A

  Embodiments of the present invention provide a highly sensitive strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel.

  According to the embodiment of the present invention, a strain sensing element provided in a deformable film part is provided. The strain sensing element includes a nonmagnetic layer, a first layer, a first magnetic layer, a second magnetic layer, and an intermediate layer. The first layer is provided between the nonmagnetic layer and the first magnetic layer, is in contact with the nonmagnetic layer, and includes at least one of an oxide and a nitride. The second magnetic layer is provided between the first layer and the first magnetic layer. The intermediate layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and contains boron. According to another embodiment of the present invention, a strain sensing element provided on a deformable film part is provided. The strain sensing element includes a nonmagnetic layer, a first layer, a first magnetic layer, a second magnetic layer, and an intermediate layer. The first layer is provided between the nonmagnetic layer and the first magnetic layer, is in contact with the nonmagnetic layer, and includes at least one element selected from the group consisting of magnesium, silicon, and aluminum. The second magnetic layer is provided between the first layer and the first magnetic layer. The intermediate layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and contains boron.

FIG. 1A and FIG. 1B are schematic views showing a strain sensing element according to the first embodiment. FIG. 2A to FIG. 2C are schematic views showing the operation of the strain sensing element according to the first embodiment. 1 is a schematic perspective view showing a strain sensing element according to a first embodiment. 4A and 4B are graphs showing the characteristics of the strain sensing element. FIG. 5A and FIG. 5B are graphs showing the characteristics of the strain sensing element. 6A and 6B are graphs showing the characteristics of the strain sensing element. Fig.7 (a)-FIG.7 (d) are the microscope images which show the characteristic of a distortion | strain detector. Fig.8 (a)-FIG.8 (d) are the microscope images which show the characteristic of a distortion | strain detector. FIG. 9A and FIG. 9B are schematic diagrams showing the characteristics of the strain sensing element. FIG. 10A and FIG. 10B are schematic diagrams showing the characteristics of the strain sensing element. FIG. 11A and FIG. 11B are graphs showing the characteristics of the strain sensing element. 12A and 12B are graphs showing the characteristics of the strain sensing element. It is a schematic diagram which shows the characteristic of a strain sensing element. It is a mimetic diagram showing a strain sensing element concerning a 1st embodiment. It is a microscope image which shows the characteristic of a strain sensing element. FIG. 16A and FIG. 16B are schematic diagrams showing characteristics of the strain sensing element. FIG. 17A to FIG. 17E are schematic cross-sectional views showing other strain sensing elements according to the first embodiment. FIG. 18A to FIG. 18C are schematic views showing another strain sensing element according to the first embodiment. It is a typical perspective view which shows another distortion sensing element which concerns on 1st Embodiment. It is a typical perspective view which shows another distortion sensing element which concerns on 1st Embodiment. It is a typical perspective view which shows another distortion sensing element which concerns on 1st Embodiment. It is a typical perspective view which shows another distortion sensing element which concerns on 1st Embodiment. It is a typical perspective view which shows another distortion sensing element which concerns on 1st Embodiment. It is a typical sectional view showing a strain sensing element concerning a 2nd embodiment. FIG. 25A and FIG. 25B are schematic perspective views showing a pressure sensor according to the third embodiment. FIG. 26A to FIG. 26C are schematic views illustrating the pressure sensor according to the first embodiment. Fig.27 (a)-FIG.27 (e) are process order typical sectional drawings which show the manufacturing direction of the pressure sensor which concerns on embodiment. FIG. 28A to FIG. 28C are schematic views showing the pressure sensor according to the embodiment. Fig.29 (a) and FIG.29 (b) are schematic diagrams which show the manufacturing method of the pressure sensor which concerns on embodiment. FIG. 30A and FIG. 30B are schematic views showing a method for manufacturing a pressure sensor according to the embodiment. Fig.31 (a) and FIG.31 (b) is a schematic diagram which shows the manufacturing method of the pressure sensor which concerns on embodiment. FIG. 32A and FIG. 32B are schematic views showing a method for manufacturing a pressure sensor according to the embodiment. FIG. 33A and FIG. 33B are schematic views showing a method for manufacturing a pressure sensor according to the embodiment. FIG. 34A and FIG. 34B are schematic views showing the method for manufacturing the pressure sensor according to the embodiment. Fig.35 (a) and FIG.35 (b) is a schematic diagram which shows the manufacturing method of the pressure sensor which concerns on embodiment. FIG. 36A and FIG. 36B are schematic views showing a method for manufacturing the pressure sensor according to the embodiment. FIG. 37A and FIG. 37B are schematic views showing a method for manufacturing a pressure sensor according to the embodiment. FIG. 38A and FIG. 38B are schematic views showing a method for manufacturing a pressure sensor according to the embodiment. FIG. 39A and FIG. 39B are schematic views showing the method for manufacturing the pressure sensor according to the embodiment. FIG. 40A and FIG. 40B are schematic views showing a method for manufacturing a pressure sensor according to the embodiment. It is a typical sectional view showing a microphone concerning a 4th embodiment. FIG. 42A and FIG. 42B are schematic views showing a blood pressure sensor according to the fifth embodiment. It is a schematic diagram which shows the touchscreen which concerns on 6th Embodiment.

Embodiments of the present invention will be described below with reference to the drawings.
The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between the parts, and the like are not necessarily the same as actual ones. Further, even when the same part is represented, the dimensions and ratios may be represented differently depending on the drawings.
In the present specification and drawings, the same elements as those described above with reference to the previous drawings are denoted by the same reference numerals, and detailed description thereof will be omitted as appropriate.

(First embodiment)
FIG. 1A and FIG. 1B are schematic views illustrating the strain sensing element according to the first embodiment.
FIG. 1A is a schematic perspective view of a strain sensing element. FIG. 1B is a schematic cross-sectional view illustrating a pressure sensor using a strain sensing element.

  As shown in FIG. 1A, the strain sensing element 50 according to this embodiment includes a functional layer 25, a first magnetic layer 10, a second magnetic layer 20, and an intermediate layer 30.

  For the functional layer 25, for example, at least one of an oxide and a nitride is used. The functional layer 25 includes, for example, magnesium (Mg), aluminum (Al), silicon (Si), titanium (Ti), vanadium (V), chromium (Cr), manganese (Mg), iron (Fe), cobalt (Co ), Nickel (Ni), copper (Cu), zinc (Zn), zirconium (Zr), niobium (Nb), molybdenum (Mo), ruthenium (Ru), rhodium (Rh), palladium (Pd), silver (Ag) ), Hafnium (Hf), tantalum (Ta), tungsten (W), tin (Sn), cadmium (Cd) and at least one selected from the group consisting of gallium (Ga), and the above At least one of the nitrides selected from the first group.

  The functional layer 25 may include, for example, at least one oxide selected from the second group consisting of magnesium, titanium, vanadium, zinc, tin, cadmium, and gallium. For example, magnesium oxide is used for the functional layer 25, for example.

  The second magnetic layer 20 is provided between the functional layer 25 and the first magnetic layer 10. The second magnetic layer 20 includes an amorphous part. The second magnetic layer 20 includes boron (B). The magnetization (direction) of the second magnetic layer 20 is variable. The magnetization of the second magnetic layer 20 changes according to the strain applied to the second magnetic layer 20. The second magnetic layer 20 has, for example, an amorphous structure. As will be described later, the second magnetic layer 20 may include an amorphous portion and a crystalline portion. That is, at least a part of the second magnetic layer 20 is amorphous.

  The intermediate layer 30 is provided between the first magnetic layer 10 and the second magnetic layer 20.

  The second magnetic layer 20 is, for example, a magnetization free layer. The first magnetic layer 10 is, for example, a reference layer. As the reference layer, a magnetization fixed layer or a magnetization free layer is used. For example, the change in magnetization of the second magnetic layer 20 is easier than the change in magnetization of the first magnetic layer 10. When stress is applied to the strain sensing element 50 and strain is provided to the strain sensing element 50, the relative angle between the magnetization of the first magnetic layer 10 and the magnetization of the second magnetic layer 10 changes.

  For example, the direction from the first magnetic layer 10 toward the second magnetic layer 20 is the Z-axis direction (stacking direction). One direction perpendicular to the Z-axis direction is taken as an X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is taken as a Y-axis direction.

  In this example, a first electrode E1 and a second electrode E2 are further provided. The first magnetic layer 10 is provided between the first electrode E1 and the second electrode E2. An intermediate layer 30 is provided between the first magnetic layer 10 and the second electrode E2. The second magnetic layer 20 is provided between the intermediate layer 30 and the second electrode E2. A functional layer 25 is provided between the second magnetic layer 20 and the second electrode E2. In this example, the second magnetic layer 20 is in contact with the functional layer 25.

  By applying a voltage between the first electrode E1 and the second electrode E2, a current can be passed through the stacked body 10s including the first magnetic layer 10, the intermediate layer 30, the second magnetic layer 20, and the functional layer 25. it can. The current is, for example, along the Z-axis direction between the first magnetic layer 10 and the second magnetic layer 20.

  As shown in FIG. 2B, the strain sensing element 50 is used for the pressure sensor 110. The pressure sensor 110 includes a film unit 70 and a strain detection element 50. The film part 70 has a flexible region. The film part 70 can be deformed. The strain sensing element 50 is fixed to the film unit 70. In the present specification, the fixed state includes a directly fixed state and a state indirectly fixed by another element. For example, the state in which the detection element 50 is fixed to the film unit 70 includes a state in which the relative position between the detection element 50 and the film unit 70 is fixed. The strain sensing element 50 is provided on a part of the film unit 70, for example.

  In the specification of the application, the state of “provided on” includes not only the state of being provided in direct contact but also the state of being provided with another element inserted therebetween.

  When the force 79 is applied to the film part 70, the film part 70 is deformed. Along with this deformation, strain occurs in the strain sensing element 50. For example, the magnetization of the second magnetic layer 20 changes according to the deformation of the film part.

  In the strain sensing element 50 according to the present embodiment, for example, when the film unit 70 is deformed by an external force, the strain sensing element 50 is strained. The strain sensing element 50 converts the change in strain into a change in electrical resistance.

  The operation in which the strain sensing element 50 functions as a strain sensor is based on the application of the “inverse magnetostriction effect” and the “magnetoresistance effect”. The “inverse magnetostriction effect” is obtained in the ferromagnetic layer used for the magnetization free layer. The “magnetoresistance effect” is manifested in a laminated film of a magnetization free layer, an intermediate layer, and a reference layer (for example, a magnetization fixed layer).

  The “inverse magnetostriction effect” is a phenomenon in which the magnetization of a ferromagnetic material changes due to the strain generated in the ferromagnetic material. That is, when an external strain is applied to the stacked body 10s of the strain sensing element 50, the magnetization direction of the magnetization free layer changes. As a result, the relative angle between the magnetization of the magnetization free layer and the magnetization of the reference layer (for example, the magnetization fixed layer) changes. At this time, a change in electrical resistance is caused by the “magnetoresistance effect (MR effect)”. The MR effect includes, for example, a GMR (Giant magnetoresistance) effect or a TMR (Tunneling magnetoresistance) effect. By flowing a current through the laminated body 10s, the MR effect is manifested by reading the change in the relative angle of the magnetization direction as a change in electrical resistance. For example, strain is generated in the stacked body 10s (strain sensing element 50), and the magnetization direction of the magnetization free layer changes due to the strain, and the magnetization direction of the magnetization free layer and the magnetization direction of the reference layer (for example, the magnetization fixed layer) And the relative angle changes. That is, the MR effect is manifested by the inverse magnetostrictive effect.

  When the ferromagnetic material used for the magnetization free layer has a positive magnetostriction constant, the angle between the direction of magnetization and the direction of tensile strain is reduced, and the angle between the direction of magnetization and the direction of compressive strain is increased. The direction of magnetization changes. When the ferromagnetic material used for the magnetization free layer has a negative magnetostriction constant, the angle between the magnetization direction and the tensile strain direction is increased, and the angle between the magnetization direction and the compression strain direction is decreased. The direction of magnetization changes.

  When the combination of materials of the stack of the magnetization free layer, the intermediate layer, and the reference layer (for example, the magnetization fixed layer) has a positive magnetoresistance effect, the electrical resistance is obtained when the relative angle between the magnetization free layer and the magnetization fixed layer is small. Decrease. When the combination of the materials of the laminated body of the magnetization free layer, the intermediate layer, and the magnetization fixed layer has a negative magnetoresistance effect, the electrical resistance increases when the relative angle between the magnetization free layer and the magnetization fixed layer is small.

  Hereinafter, the ferromagnetic materials used for the magnetization free layer and the reference layer (for example, the magnetization fixed layer) have positive magnetostriction constants, respectively, and the magnetization free layer, the intermediate layer, and the reference layer (for example, the magnetization fixed layer) An example of a change in magnetization will be described with respect to an example in which a laminated body including a positive magnetoresistive effect.

FIG. 2A to FIG. 2C are schematic views illustrating the operation of the strain sensing element according to the first embodiment.
FIG. 2A corresponds to a state when the tensile stress ts is applied to the strain sensing element 50 (tensile state STt). FIG. 2B corresponds to a state when the strain sensing element 50 has no strain (no strain state ST0). FIG. 2C corresponds to a state when the compressive stress cs is applied to the strain sensing element 50 (compressed state STc).

  In these drawings, the first magnetic layer 10, the second magnetic layer 20, and the intermediate layer 30 are drawn, and the functional layer 25 is omitted for easy understanding of the drawings. In this example, the second magnetic layer 20 is a magnetization free layer, and the first magnetic layer 10 is a magnetization fixed layer.

  As shown in FIG. 2B, in the unstrained state ST0 (for example, the initial state) without strain, the magnetization 20m of the second magnetic layer 20 and the magnetization 10m of the first magnetic layer 10 (for example, the magnetization fixed layer). And the relative angle between them is set to a predetermined value. The magnetization direction of the magnetic layer in the initial state is set by, for example, a hard bias or the shape anisotropy of the magnetic layer. In this example, the magnetization 20m of the second magnetic layer 20 (magnetization free layer) and the magnetization 10m of the first magnetic layer 10 (for example, a magnetization fixed layer) intersect each other.

  As shown in FIG. 2A, when a tensile stress ts is applied in the tensile state STt, a strain corresponding to the tensile stress ts is generated in the strain sensing element 50. At this time, the magnetization 20m of the second magnetic layer 20 (magnetization free layer) changes from the unstrained state ST0 so that the angle between the magnetization 20m and the direction of the tensile stress ts becomes small. In the example shown in FIG. 2A, when a tensile stress ts is applied, the magnetization 20m of the second magnetic layer 20 (magnetization free layer) and the first magnetic layer 10 (for example, compared to the unstrained state ST0) The relative angle between the magnetization fixed layer) and the magnetization 10 m becomes small. Thereby, the electrical resistance in the strain sensing element 50 is reduced as compared with the electrical resistance in the unstrained state ST0.

  As shown in FIG. 2C, when the compressive stress cs is applied in the compression state STc, the magnetization 20m of the second magnetic layer 20 (magnetization free layer) is changed between the magnetization 20m and the direction of the compression stress cs. It changes from the unstrained state ST0 so that the angle increases. In the example shown in FIG. 2C, when compressive stress cs is applied, the magnetization 20m of the second magnetic layer 20 (magnetization free layer) and the first magnetic layer 10 (for example, compared to the unstrained state ST0) The relative angle between the magnetization 10m of the magnetization fixed layer) is increased. Thereby, the electrical resistance in the strain sensing element 50 increases.

  As described above, in the strain sensing element 50, a change in strain generated in the strain sensing element 50 is converted into a change in electrical resistance. In the above operation, the amount of change (dR / R) in electrical resistance per unit strain (dε) is referred to as a gauge factor (GF). By using a strain sensing element having a high gauge factor, a highly sensitive strain sensor can be obtained.

An example of the strain sensing element 50 will be described.
In the following, the description of “material A / material B” indicates a state in which a layer of material B is provided on a layer of material A.

FIG. 3 is a schematic perspective view illustrating the strain sensing element according to the first embodiment.
As shown in FIG. 3, the strain sensing element 51 used in this embodiment includes a first electrode E1, an underlayer 10l, a pinning layer 10p, a first magnetic layer 10, an intermediate layer 30, and a second layer. The magnetic layer 20, the functional layer 25, and the cap layer 26c are included. An underlayer 101 is provided between the first electrode E1 and the first magnetic layer 10. A pinning layer 10 p is provided between the underlayer 10 l and the first magnetic layer 10. A cap layer 26c is provided between the second magnetic layer 20 and the second electrode E2. In this example, the first magnetic layer 10 includes a first magnetization fixed layer 10a, a second magnetization fixed layer 10b, and a magnetic coupling layer 10c. The first magnetization fixed layer 10 a is provided between the second magnetization fixed layer 10 b and the intermediate layer 30. A magnetic coupling layer 10c is provided between the second magnetization fixed layer 10b and the first magnetization fixed layer 10a.

For example, Ta / Ru is used for the base layer 10l. The thickness of the Ta layer (the length in the Z-axis direction) is, for example, 3 nanometers (nm). The thickness of this Ru layer is 2 nm, for example.
For the pinning layer 10p, for example, an IrMn layer having a thickness of 7 nm is used.

For the second magnetization fixed layer 10b, for example, a Co ₇₅ Fe ₂₅ layer having a thickness of 2.5 nm is used.
For example, a Ru layer having a thickness of 0.9 nm is used for the magnetic coupling layer 10c.
For the first magnetization fixed layer 10a, for example, a Co ₄₀ Fe ₄₀ B ₂₀ layer having a thickness of 3 nm is used.
For the intermediate layer 30, for example, a 1.6 nm thick Mg—O layer is used.

For the second magnetic layer 20, for example, Co ₄₀ Fe ₄₀ B ₂₀ having a thickness of 4 nm is used.
For the functional layer 25, for example, a Mg—O layer having a thickness of 1.5 nm is used.
For example, Ta / Ru is used for the cap layer 26c. The thickness of this Ta layer is 1 nm, for example. The thickness of this Ru layer is 5 nm, for example.
For example, a metal is used for the first electrode E1 and the second electrode E2.

Hereinafter, an example of characteristics of the strain detection element according to the embodiment will be described.
The material and thickness of each layer included in the first sample S01 are as follows.
Underlayer 10l: Ta (1 nm) / Ru (2 nm)
Pinning layer 10p: Ir ₂₂ Mn ₇₈ (7 nm)
Second magnetization fixed layer 10b: Co ₇₅ Fe ₂₅ (2.5 nm)
Magnetic coupling layer 10c: Ru (0.9 nm)
First magnetization fixed layer 10a: Co ₄₀ Fe ₄₀ B ₂₀ (3 nm)
Intermediate layer 30: Mg—O (1.6 nm)
Second magnetic layer 20: Co ₄₀ Fe ₄₀ B ₂₀ (4 nm)
Functional layer 25: Mg—O (1.5 nm)
Cap layer 26c: Cu (1 nm) / Ta (20 nm) / Ru (50 nm)
On the other hand, the functional layer 25 is not provided in the second sample S02. Other configurations of the second sample S02 are the same as those of the first sample S01.

As described above, in the first sample S01, the Co ₄₀ Fe ₄₀ B ₂₀ layer having a thickness of 4 nm is used as the second magnetic layer 20. As the functional layer 25, an Mg—O layer having a thickness of 1.5 nm is used. On the other hand, the functional layer 25 is not provided in the second sample S02.

  The Mg—O layer used for the intermediate layer 30 and the functional layer 25 is formed by surface oxidation by IAO (Ion beam-assisted Oxidation) treatment after forming a 1.6 nm thick Mg layer. . The oxidation conditions at the time of producing the Mg—O layer for the functional layer 25 are weaker than, for example, the oxidation conditions at the time of producing the Mg—O layer for the intermediate layer 30. The sheet resistance of the Mg—O layer for the functional layer 25 is lower than the sheet resistance of the Mg—O layer for the intermediate layer 30. When the area resistance of the Mg—O layer for the functional layer 25 is higher than the area resistance of the Mg—O layer for the intermediate layer 30, the parasitic resistance is increased by the functional layer 25, and the MR ratio is reduced. Factor decreases. By making the area resistance of the Mg—O layer for the functional layer 25 lower than that of the Mg—O layer for the intermediate layer 30, the parasitic resistance can be reduced, a high MR ratio can be obtained, and a high gauge factor can be obtained. Is obtained.

  The laminated film is formed on the first electrode E1, and the second electrode E2 is formed on the laminated film. The laminated film (first sample S01 and second sample S02) is processed into a dot-shaped element. The element size of the laminated film (sample) is 20 μm × 20 μm. Vertical conduction characteristics between the first electrode E1 and the second electrode E2 are evaluated.

  The evaluation of the strain sensor characteristics of the sample is performed by the substrate bending method. In this method, a substrate (wafer) on which a sample is formed is cut into a rectangular shape, and a stress is applied to the wafer by a four-point bending method using a knife edge. A load cell is incorporated in a knife edge for bending the rectangular wafer. The strain applied to the sample (strain detecting element) on the wafer is determined by the load measured by the load cell.

For the calculation of the strain, the following first formula relating to the two-side support beam is used.

_{ε = -3 (L 1 -L 2} ) G / (2Wt 2 e s) ( first type)

In the above first formula, “ _es ” is the Young's modulus of the wafer. “L ₁ ” is the inter-edge length of the outer knife edge. “L ₂ ” is the inter-edge length of the inner knife edge. “W” is the width of the rectangular wafer. “T” is the thickness of the rectangular wafer. “G” is a load applied to the knife edge. The load applied to the knife edge can be continuously changed by motor control.

FIG. 4A and FIG. 4B are graphs illustrating characteristics of the strain sensing element.
FIG. 5A and FIG. 5B are graphs illustrating characteristics of the strain sensing element.
4A and 4B show the evaluation results of the strain sensor characteristics of the first sample S01. 4A, the strain ε is 0.8 × 10 ⁻³ , 0.6 × 10 ⁻³ , 0.4 × 10 ⁻³ , 0.2 × 10 ⁻³ , and 0.0 × 10. The measurement result of the magnetic field dependence of electrical resistance when it is ^-3 is shown. In FIG. 4B, the strain ε is −0.2 × 10 ⁻³ , −0.4 × 10 ⁻³ , −0.6 × 10 ⁻³ , and −0.8 × 10 ⁻³ . The measurement result of the magnetic field dependence of electrical resistance is shown.
5A and 5B show the evaluation results of the strain sensor characteristics of the second sample S02. FIG. 5A shows that the strain ε is 0.8 × 10 ⁻³ , 0.6 × 10 ⁻³ , 0.4 × 10 ⁻³ , 0.2 × 10 ⁻³ , and 0.0 × 10. The measurement result of the magnetic field dependence of electrical resistance when it is ^-3 is shown. In FIG. 5B, the strain ε is −0.2 × 10 ⁻³ , −0.4 × 10 ⁻³ , −0.6 × 10 ⁻³ , and −0.8 × 10 ⁻³ . The measurement result of the magnetic field dependence of electrical resistance is shown.

  The horizontal axis in these figures is the external magnetic field H (Oersted: Oe). The vertical axis represents the electric resistance R (ohm: Ω). The direction of the external magnetic field H at the time of measurement is a parallel direction within the layer surface of the first magnetization fixed layer 10a. The negative external magnetic field H corresponds to a magnetic field in the same direction as the magnetization direction of the first magnetization fixed layer 10a.

  The direction in which the strain ε is applied is a direction perpendicular to the magnetization direction of the first magnetic layer 10 (for example, the magnetization fixed layer) in the XY plane. In the present specification, a positive value of strain ε corresponds to tensile strain. A negative value for strain ε corresponds to compressive strain.

  As can be seen from FIGS. 4A and 4B and FIGS. 5A and 5I, in the first sample S01 and the second sample S02, the RH loop shape is determined depending on the value of the strain ε. Has changed. This indicates that the in-plane magnetic anisotropy of the second magnetic layer 20 (magnetization free layer) is changed by the inverse magnetostriction effect.

6A and 6B are graphs illustrating characteristics of the strain sensing element.
FIG. 6A corresponds to the first sample S01, and FIG. 6B corresponds to the second sample S02. These figures show changes in the electric resistance R when the external magnetic field H is fixed and the strain ε is continuously changed in the range between −0.8 × 10 ⁻³ and 0.8 × 10 ^−3. Show. In these figures, the horizontal axis represents the strain ε, and the vertical axis represents the electric resistance R. The change in strain ε is a change from −0.8 × 10 ⁻³ to 0.8 × 10 ⁻³ and a change from 0.8 × 10 ⁻³ to −0.8 × 10 ^−3. Both. These results show the strain sensor characteristics. From these figures, the gauge factor is calculated.

  The gauge factor GF is represented by GF = (dR / R) / dε.

  From FIG. 6A, the gauge factor in the first sample S01 is calculated to be 4027. From FIG. 6B, the gauge factor in the second sample S02 is calculated as 895.

Thus, in the case where the same second magnetic layer 20 (4 nm thick Co ₄₀ Fe ₄₀ B ₂₀ magnetic free layer) is used, the functional layer 25 has a 1.5 nm thick Mg—O layer. By using, the gauge factor can be greatly improved.

  On the other hand, the MR value of the first sample S01 is 149%. The MR value of the second sample S02 is 188%. The first sample S01 has a coercive force Hc of 3.2 Oe. The coercive force Hc of the second sample S02 is 27 Oe. The magnetostriction constant λ of the first sample S01 is 20 ppm. The magnetostriction constant λ of the second sample S02 is 30 ppm.

Such a difference in gauge factor depending on the presence or absence of the functional layer 25 is considered to be caused by a difference in coercive force Hc of the Co ₄₀ Fe ₄₀ B ₂₀ layer which is the second magnetic layer 20 (magnetization free layer).

  As described above, the coercive force Hc of the second sample S02 is 27 Oe, whereas the coercive force Hc of the first sample S01 is 3.2 Oe. The coercive force Hc of the first sample S01 is very small. The improvement of the gauge factor by reducing the coercive force Hc can be explained as follows.

  As described with reference to FIGS. 2A to 2C, when strain is generated in the magnetization free layer (second magnetic layer 20), the magnetization direction of the magnetization free layer changes due to the inverse magnetostriction effect. At this time, by using a magnetic material having a large magnetostriction constant λ as the magnetization free layer, the force for rotating the magnetization with respect to the strain acts greatly, so that the gauge factor can be improved. On the other hand, the gauge factor also depends on the coercivity of the magnetization free layer. The coercive force is a physical parameter that reflects the ease of magnetization rotation of the magnetization free layer. A material having a large coercive force has a strong force to keep the magnetization direction as it is. For this reason, a material having a large coercive force is unlikely to change in magnetization direction due to the inverse magnetostriction effect.

  Thus, a high gauge factor is obtained when the magnetostriction constant λ is large in the magnetization free layer. When the coercive force in the magnetization free layer is small, a high gauge factor can be obtained.

  As described above, the value of the magnetostriction constant λ in the first sample S01 is relatively close to the second sample S02 and is sufficiently large. On the other hand, the coercive force Hc in the first sample S01 is significantly smaller than the second sample S02, and is about 1/10. In the first sample S01, it is considered that the effect of reducing the coercive force Hc greatly contributes to the increase of the gauge factor.

The small coercive force Hc and the large magnetostriction constant λ obtained in the first sample S01 are Mg as the functional layer 25 on the Co ₄₀ Fe ₄₀ B ₂₀ second magnetic layer 20 (magnetization free layer). It is obtained by providing a -O layer.

The inventors of the present application have found that the crystal structure of the Co ₄₀ Fe ₄₀ B ₂₀ layer of the second magnetic layer 20 (magnetization free layer) changes depending on the presence or absence of the functional layer 25. It was found that the difference in the crystal structure of Co ₄₀ Fe ₄₀ B ₂₀ was related to the difference in coercive force Hc. Hereinafter, the difference in crystal structure will be described.

FIG. 7A to FIG. 7D are microscopic images illustrating characteristics of the strain sensing element.
FIG. 7A is a cross-sectional transmission electron microscope (cross-sectional TEM) photographic image of the strain sensing element of the first sample S01. FIG. 7A is a photograph of the laminated structure of the first sample S01.
FIGS. 7B to 7D are crystal lattice diffraction images by nano-diffraction of electron beams at points P1 to P3 in FIG. 7A, respectively.
FIG. 7A shows a region including a part of the second magnetization fixed layer 10b (Co ₅₀ Fe ₅₀ layer) to a part of the cap layer 26c (Ru layer).

  As can be seen from FIG. 7A, the first magnetization fixed layer 10a (Co—Fe—B layer) includes a crystal portion. The intermediate layer 30 (Mg—O layer) is also a crystal. On the other hand, in most of the second magnetic layer 20 (Co—Fe—B layer which is a magnetization free layer) sandwiched between the intermediate layer 30 and the functional layer 25 (Mg—O layer), a regular arrangement of atoms is present. Not observed. That is, the second magnetic layer 20 is amorphous.

  The crystal state can be confirmed from the crystal lattice diffraction image. Crystal lattice diffraction images at points P1 to P3 in FIG. 7A are shown in FIGS. 7B to 7D, respectively. The point P1 corresponds to the first magnetization fixed layer 10a. The point P2 corresponds to the intermediate layer 30. The point P3 corresponds to the second magnetic layer 20 (magnetization free layer).

As shown in FIG. 7B, a diffraction spot is observed in the diffraction image of the point P1 corresponding to the first magnetization fixed layer 10a (Co—Fe—B layer). This diffraction spot is caused by the first magnetization fixed layer 10a having a crystal structure.
As shown in FIG. 7C, a diffraction spot is observed in the diffraction image of the point P2 corresponding to the intermediate layer 30 (Mg—O layer). This diffraction spot is caused by the intermediate layer 30 having a crystal structure.
On the other hand, as shown in FIG. 7D, a clear diffraction spot is not observed in the diffraction image of the point P3 corresponding to the second magnetic layer 20 (Co—Fe—B layer of the magnetization free layer). In this diffraction image, a ring-shaped diffraction image reflecting the amorphous structure is observed. From this result, it can be seen that the second magnetic layer 20 (the Co—Fe—B layer of the magnetization free layer) of the first sample S01 includes an amorphous portion.

8A to 8D are microscopic images illustrating characteristics of the strain sensing element.
FIG. 8A is a cross-sectional transmission electron microscope (cross-sectional TEM) photographic image of the strain sensing element of the second sample S02. FIGS. 8B to 8D are crystal lattice diffraction images by nano-diffraction of electron beams at points P4 to P6 in FIG. 8A, respectively.

  As can be seen from FIG. 8A, the first magnetization fixed layer 10a (Co—Fe—B layer) includes a crystal portion, and the intermediate layer 30 (Mg—O layer) is also a crystal. The second magnetic layer 20 (Co—Fe—B layer, which is a magnetization free layer) on the intermediate layer 30 also includes a lot of crystal parts.

As shown in FIG. 8B, a diffraction spot caused by the crystal structure is confirmed in the diffraction image of the first magnetization fixed layer 10a (Co—Fe—B layer).
As shown in FIG. 8C, diffraction spots caused by the crystal structure are confirmed in the diffraction image of the intermediate layer 30 (Mg—O layer).
As shown in FIG. 8D, a diffraction spot due to the crystal structure is also confirmed in the diffraction image of the second magnetic layer 20 (Co—Fe—B layer of the magnetization free layer). From this result, it can be seen that most of the second magnetic layer 20 (the Co—Fe—B layer of the magnetization free layer) of the second sample S02 has a crystal structure.

  As can be seen from FIGS. 7A to 7D, the magnetization free layer of the first sample S01 exhibiting a high gauge factor includes an amorphous structure. On the other hand, as can be seen from FIGS. 8A to 8D, the magnetization free layer of the second sample S02 exhibiting a low gauge factor has a crystal structure.

As described above, in each of the first sample S01 and the second sample S02, the Co ₄₀ Fe ₄₀ B ₂₀ layer (4 nm) having the same composition is used for the magnetization free layer. Nevertheless, the first sample S01 and the second sample S02 have different gauge factors and have different crystal states. This is considered to reflect the presence or absence of the functional layer 25 provided on the magnetization free layer (Co ₄₀ Fe ₄₀ B ₂₀ layer (4 nm)).

The difference in crystal state of the magnetization free layer between the first sample S01 and the second sample S02 will be further described.
FIG. 9A, FIG. 9B, FIG. 10A, and FIG. 10B are schematic views illustrating the characteristics of the strain sensing element.
FIG. 9B corresponds to a part of FIG. 7A, and FIG. 10B corresponds to a part of FIG.
FIG. 9A and FIG. 10A are evaluation results of the depth profile of the element of the sample by electron energy-loss spectroscopy (EELS). FIG. 9A corresponds to the first sample S01 and shows the depth profile of the element in the line L1 shown in FIG. 7A. FIG. 10B corresponds to the second sample S02 and shows the depth profile of the element in the line L2 shown in FIG. In these figures, the horizontal axis represents the element detection intensity Int (arbitrary unit). The vertical axis represents the depth Dp (nm). The depth Dp corresponds to the distance in the Z-axis direction, for example. In these figures, depth profiles for iron, boron and oxygen are shown.

  As shown in FIG. 10A, in the second sample S02, the boron intensity Int in the cap layer 26c is the boron intensity in the second magnetic layer 20 (Co—Fe—B layer which is a magnetization free layer). Higher than Int. In the second magnetic layer 20, the boron strength Int in the portion on the cap layer 26 c side is higher than the boron strength Int in the central portion of the second magnetic layer 20. It is considered that boron is diffused from the second magnetic layer 20 to the cap layer 26c side, and the concentration of boron in the second magnetic layer 20 is lowered.

  On the other hand, as shown in FIG. 9A, in the first sample S01, a boron peak occurs in the central portion of the second magnetic layer 20 (the Co—Fe—B layer of the magnetization free layer). . And the boron content of the cap layer 26c is small. The boron concentration of the second magnetic layer 20 (the Co—Fe—B layer of the magnetization free layer) is hardly diffused to other layers and maintains the initial state at the time of film formation.

  From the above, the effect of the diffusion barrier that the functional layer 25 (Mg—O layer in this example) provided on the second magnetic layer 20 (magnetization free layer) suppresses the diffusion of boron from the second magnetic layer 20. It is thought that it has.

From the above results, it can be said that the crystallization of the Co ₄₀ Fe ₄₀ B ₂₀ layer of the second sample S02 without the functional layer 25 proceeds more than the Co ₄₀ Fe ₄₀ B ₂₀ layer of the first sample S01. That is, in the first sample S01, the Co ₄₀ Fe ₄₀ B ₂₀ layer maintains an amorphous structure. On the other hand, crystallization proceeds in the second sample S02 in which the functional layer 25 is not provided. In the second sample S02, the cause of the progress of crystallization is considered to be that boron in the magnetization free layer diffuses and the boron content in the magnetization free layer decreases.

FIG. 11A and FIG. 11B are graphs illustrating characteristics of the strain sensing element.
These drawings show the evaluation results of the X-ray diffraction of the Co ₄₀ Fe ₄₀ B ₂₀ layer. FIG. 11A and FIG. 11B correspond to the first sample S01 and the second sample S02, respectively. The horizontal axis in these figures is the rotation angle 2θ (degrees). The vertical axis represents intensity Int.

In X-ray diffraction, it is difficult to obtain a diffraction peak of only the Co ₄₀ Fe ₄₀ B ₂₀ layer in the sample. For this reason, the following model membranes are used in these samples. The sample Sr1 shown in FIG. 11A includes a first Mg—O layer (intermediate layer 30) / Co ₄₀ Fe ₄₀ B ₂₀ layer / second Mg—O (functional layer 25) / Ta (cap layer 26c). For example). This sample Sr1 has a functional layer 25 and corresponds to the first sample S01. On the other hand, the sample Sr2 shown in FIG. 11B has a laminated structure of the first Mg—O layer (intermediate layer 30) / Co ₄₀ Fe ₄₀ B ₂₀ layer / Ta (corresponding to the cap layer 26c). This sample Sr2 does not have the functional layer 25 and corresponds to the second sample S02.

For reference, FIGS. 11A and 11B show X-ray diffraction results after annealing at 320 ° C. and before annealing.
As can be seen from FIGS. 11 (a) and 11 (b), the X-ray diffraction peak is not confirmed in both the sample Sr1 and the sample Sr2 before annealing, and it can be seen that the magnetization free layer is amorphous. On the other hand, after annealing, the diffraction peak of Co50Fe50 appears stronger in the sample Sr2 than in the sample Sr1.

From this, it can be said that the crystallization in the Co ₄₀ Fe ₄₀ B ₂₀ layer of the second sample S02 without the functional layer 25 proceeds more than in the Co ₄₀ Fe ₄₀ B ₂₀ layer of the first sample S01. That is, in the first sample S01, the Co ₄₀ Fe ₄₀ B ₂₀ layer maintains an amorphous structure even after annealing. On the other hand, in the second sample S02 in which the functional layer 25 is not provided, crystallization proceeds after annealing.

12A and 12B are graphs illustrating characteristics of the strain sensing element.
These drawings show the characteristics of the first sample S01, the second sample S02, and the third sample S03. In the third sample S03, Fe ₅₀ Co ₅₀ (thickness 4 nm) containing no boron is used as the magnetization free layer. The third sample S03 has the same configuration as the second sample S02 except for the magnetization free layer.

  FIG. 12A shows the coercive force Hc (Oe). FIG. 12B shows the magnetostriction constant λ (ppm). For the first sample S01 and the second sample S02, the value of BA before annealing and the value of AA after annealing are shown.

  As shown in FIG. 8A, in the pre-annealing BA of the first sample S01 and the second sample S02, the coercive force Hc is about 3 Oe to 4 Oe. In the pre-annealing BA, good soft magnetic properties are exhibited. However, since the MR change rate is low in the pre-annealed BA, a high gauge factor cannot be obtained.

In the second sample S02, the coercive force Hc increases to 27 Oe in the AA after annealing. This value is almost the same as the value of the third sample S03 using the Co ₅₀ Fe ₅₀ layer not containing boron. The reason why the coercive force Hc of AA after annealing increases in the second sample S02 is that crystallization proceeds to AA after annealing in the second sample S02.

  On the other hand, in the first sample S01, the coercive force Hc of AA after annealing maintains the value of BA before annealing. This is because in the first sample S01, the crystallization does not proceed even after annealing and the amorphous structure is maintained.

  As shown in FIG. 8B, in the first sample S01, the magnetostriction constant λ of AA after annealing substantially maintains the value of BA before annealing.

FIG. 13 is a schematic view illustrating characteristics of the strain sensing element.
FIG. 13 schematically shows the characteristics of the first to third samples S01 to S03.
As shown in FIG. 13, the coercive force Hc of the Co ₄₀ Fe ₄₀ B ₂₀ layer containing a large amount of boron is small before annealing (first sample S01 and second sample S02). On the other hand, the Co ₅₀ Fe ₅₀ layer containing no boron has a large coercive force Hc.

In the second sample S02, boron in the Co ₄₀ Fe ₄₀ B ₂₀ layer diffuses to the cap layer 26c side during annealing and crystallization proceeds due to a decrease in the boron concentration, and the same as in the third sample S03. The magnetic force Hc increases. On the other hand, in the first sample S01, the diffusion of boron is suppressed by the functional layer 25, and the boron concentration in the Co ₄₀ Fe ₄₀ B ₂₀ layer is maintained, so that the progress of crystallization is suppressed. As a result, the post-anneal AA can maintain the coercive force Hc as small as the pre-anneal BA. As a result, in the first sample S01, a large magnetostriction constant λ of 20 ppm, a small coercive force Hc of about 3 Oe, and a high MR change rate of 149% are obtained. As a result, a high gauge factor of 4000 or more can be obtained.

  As described above, by combining the second magnetic layer 20 (magnetization free layer) containing boron and the functional layer 25 that suppresses the diffusion of boron, the AA after annealing also increases the boron content in the magnetization free layer. The amorphous structure can be maintained.

  Thus, in the present embodiment, the second magnetic layer 20 including an amorphous portion and containing boron, and the functional layer 25 of at least one of an oxide and a nitride that suppress the diffusion of boron are used. Thereby, a highly sensitive strain sensing element can be provided.

Hereinafter, an example of the strain sensing element according to the embodiment will be described.
For example, at least one of aluminum (Al), aluminum copper alloy (Al-Cu), copper (Cu), silver (Ag), and gold (Au) is used for the first electrode E1 and the second electrode E2. It is done. By using such a material having a relatively small electrical resistance as the first electrode E1 and the second electrode E2, a current can be efficiently passed through the strain sensing element 51. A nonmagnetic material can be used for the first electrode E1.

  The first electrode E1 includes, for example, an underlayer (not shown) for the first electrode E1, a cap layer (not shown) for the first electrode E1, and Al, Al− provided therebetween. And at least one layer of Cu, Cu, Ag, and Au. For example, tantalum (Ta) / copper (Cu) / tantalum (Ta) is used for the first electrode E1. By using Ta as the base layer for the first electrode E1, for example, the adhesion between the film part 70 and the first electrode E1 is improved. As the base layer for the first electrode E1, titanium (Ti), titanium nitride (TiN), or the like may be used.

  By using Ta as the cap layer of the first electrode E1, oxidation of copper (Cu) or the like under the cap layer can be prevented. As the cap layer for the first electrode E1, titanium (Ti), titanium nitride (TiN), or the like may be used.

  For the base layer 101, for example, a stacked structure including a buffer layer (not shown) and a seed layer (not shown) can be used. This buffer layer, for example, alleviates the roughness of the surface of the first electrode E1 or the film part 70, and improves the crystallinity of the layer stacked on this buffer layer. As the buffer layer, for example, at least one selected from the group consisting of tantalum (Ta), titanium (Ti), vanadium (V), tungsten (W), zirconium (Zr), hafnium (Hf), and chromium (Cr) Is used. An alloy containing at least one material selected from these materials may be used as the buffer layer.

  The thickness of the buffer layer in the underlayer 101 is preferably 1 nm or more and 10 nm or less. The thickness of the buffer layer is more preferably 1 nm or more and 5 nm or less. If the buffer layer is too thin, the buffer effect is lost. If the buffer layer is too thick, the strain sensing element 51 is excessively thick. A seed layer is formed on the buffer layer, and the seed layer may have a buffer effect. In this case, the buffer layer may be omitted. As the buffer layer, for example, a Ta layer having a thickness of 3 nm is used.

  The seed layer in the underlayer 101 controls the crystal orientation of the layer stacked on the seed layer. The seed layer controls the crystal grain size of the layer stacked on the seed layer. As the seed layer, an fcc structure (face-centered cubic structure), an hcp structure (hexagonal close-packed structure), or a bcc structure (body-centered cubic structure) Structure) metal or the like is used.

  By using ruthenium (Ru) having an hcp structure, NiFe having an fcc structure, or Cu having an fcc structure as a seed layer in the base layer 101, for example, the crystal orientation of the spin valve film on the seed layer can be changed. The fcc (111) orientation can be obtained. For the seed layer, for example, a Cu layer having a thickness of 2 nm or a Ru layer having a thickness of 2 nm is used. In order to increase the crystal orientation of the layer formed on the seed layer, the thickness of the seed layer is preferably 1 nm or more and 5 nm or less. The thickness of the seed layer is more preferably 1 nm or more and 3 nm or less. Thereby, the function as a seed layer for improving the crystal orientation is sufficiently exhibited.

  On the other hand, for example, when it is not necessary to orient the layer formed on the seed layer (for example, when an amorphous magnetization free layer is formed), the seed layer may be omitted. As the seed layer, for example, a Ru layer having a thickness of 2 nm is used.

  The pinning layer 10p, for example, imparts unidirectional anisotropy to the first magnetic layer 10 (ferromagnetic layer) formed on the pinning layer 10p, so that the magnetization 10m of the first magnetic layer 10 is 10m. To fix. For the pinning layer 10p, for example, an antiferromagnetic layer is used. For the pinning layer 10p, for example, at least one selected from the group consisting of Ir—Mn, Pt—Mn, Pd—Pt—Mn, and Ru—Rh—Mn is used. In order to impart sufficient strength of unidirectional anisotropy, the thickness of the pinning layer 10p is appropriately set.

When PtMn or PdPtMn is used as the pinning layer 10p, the thickness of the pinning layer 10p is preferably 8 nm or more and 20 nm or less. The thickness of the pinning layer 10p is more preferably 10 nm or more and 15 nm or less. When IrMn is used as the pinning layer 10p, unidirectional anisotropy can be imparted with a thinner thickness than when PtMn is used as the pinning layer 10p. In this case, the thickness of the pinning layer 10p is preferably 4 nm or more and 18 nm or less. The thickness of the pinning layer 10p is more preferably 5 nm or more and 15 nm or less. For the pinning layer 10p, for example, an Ir ₂₂ Mn ₇₈ layer having a thickness of 7 nm is used.

A hard magnetic layer may be used as the pinning layer 10p. As a hard magnetic layer, for example, CoPt (ratio of Co is, 50at.% Or more 85 at.% Or _{less), (Co x Pt 100-} x) 100-y Cr y (x is, 50at.% Or more 85 at.% Or less Yes, y may be 0 at.% Or more and 40 at.% Or less), or FePt (the ratio of Pt is 40 at.% Or more and 60 at.% Or less).

For the second magnetization fixed layer 10b, for example, a Co _x Fe _100-x alloy (x is 0 at.% Or more and 100 at.% Or less), a Ni _x Fe _100-x alloy (x is 0 at.% Or more and _{100 at} .% Or less). Or a material obtained by adding a nonmagnetic element thereto. For example, at least one selected from the group consisting of Co, Fe, and Ni is used as the second magnetization fixed layer 10b. As the second magnetization fixed layer 10b, an alloy containing at least one material selected from these materials may be used. The second magnetization pinned layer _10b, and _{(Co x Fe 100-x)} 100-y B y alloys (x is, 0 atomic.% Or more 100at is at.% Or less, y is, 0 atomic.% Or more 30 at.% Or less) It can also be used. The second magnetization pinned layer _10b, by using a _{(Co x Fe 100-x)} 100-y B y of the amorphous alloy, when the size of the strain detecting element 51 is smaller, the variations in the characteristics of strain detecting elements 51 Can be suppressed.

  The thickness of the second magnetization fixed layer 10b is preferably, for example, 1.5 nm or more and 5 nm or less. Thereby, for example, the strength of the unidirectional anisotropic magnetic field by the pinning layer 10p can be further increased. For example, the strength of the antiferromagnetic coupling magnetic field between the second magnetization fixed layer 10b and the first magnetization fixed layer 10a is increased through the magnetic coupling layer 10c formed on the second magnetization fixed layer 10b. be able to. For example, the magnetic film thickness of the second magnetization fixed layer 10b (product of the saturation magnetization Bs and the thickness t (Bs · t)) is preferably substantially equal to the magnetic film thickness of the first magnetization fixed layer 10a. .

The saturation magnetization of Co ₄₀ Fe ₄₀ B _{20 in} the thin film is about 1.9 T (Tesla). For example, when a Co ₄₀ Fe ₄₀ B ₂₀ layer having a thickness of 3 nm is used as the first magnetization fixed layer 10a, the magnetic film thickness of the first magnetization fixed layer 10a is 1.9 T × 3 nm, which is 5.7 Tnm. Become. On the other hand, the saturation magnetization of Co ₇₅ Fe ₂₅ is about 2.1T. The thickness of the second magnetization fixed layer 10b that can obtain a magnetic film thickness equal to the above is 5.7 Tnm / 2.1T, which is 2.7 nm. In this case, it is preferable to use a Co ₇₅ Fe ₂₅ layer having a thickness of about 2.7 nm as the second magnetization fixed layer 10b. For example, a Co ₇₅ Fe ₂₅ layer having a thickness of 2.5 nm is used as the second magnetization fixed layer 10b.

In the strain sensing element 51, the first magnetic layer 10 uses a synthetic pin structure by the second magnetization fixed layer 10b, the magnetic coupling layer 10c, and the first magnetization fixed layer 10a. The first magnetic layer 10 may have a single pin structure composed of one magnetization fixed layer. When the single pin structure is used, for example, a Co ₄₀ Fe ₄₀ B ₂₀ layer having a thickness of 3 nm is used as the magnetization fixed layer. As the ferromagnetic layer used for the magnetization pinned layer having a single pin structure, the same material as that of the second magnetization pinned layer 10b described above may be used.

  The magnetic coupling layer 10c generates antiferromagnetic coupling between the second magnetization fixed layer 10b and the first magnetization fixed layer 10a. The magnetic coupling layer 10c forms a synthetic pin structure. For example, Ru is used as the magnetic coupling layer 10c. The thickness of the magnetic coupling layer 10c is preferably not less than 0.8 nm and not more than 1 nm, for example. Any material other than Ru may be used for the magnetic coupling layer 10c as long as the material generates sufficient antiferromagnetic coupling between the second magnetization fixed layer 10b and the first magnetization fixed layer 10a. The thickness of the magnetic coupling layer 10c can be set to a thickness of 0.8 nm to 1 nm corresponding to a second peak (2nd peak) of RKKY (Ruderman-Kittel-Kasuya-Yosida) coupling. Furthermore, the thickness of the magnetic coupling layer 10c may be set to a thickness of 0.3 nm or more and 0.6 nm or less corresponding to the first peak (1st peak) of the RKKY coupling. As the magnetic coupling layer 10c, for example, Ru having a thickness of 0.9 nm is used. Thereby, highly reliable coupling can be obtained more stably.

The magnetic layer used for the first magnetization fixed layer 10a directly contributes to the MR effect. For example, a Co—Fe—B alloy is used as the first magnetization fixed layer 10a. Specifically, the first magnetization pinning layer _{10a, (Co x Fe 100-} x) 100-y B y alloys (x is less than 0 atomic.% Or more 100 atomic.%, Y is 0 atomic.% Or more 30at .% Or less) can also be used. As a first magnetization fixing layer _10a, in the case of using the _{(Co x Fe 100-x)} 100-y B y of the amorphous alloy, for example, in a case where the size of the strain detecting element 51 is smaller, and due to the grain Variations between elements can be suppressed.

A layer (for example, a tunnel insulating layer (not shown)) formed on the first magnetization fixed layer 10a can be planarized. By planarizing the tunnel insulating layer, the defect density of the tunnel insulating layer can be reduced. As a result, a higher MR ratio can be obtained with a lower sheet resistance. For example, in the case of using the Mg-O as a material of the tunnel insulating layer, a first magnetization fixing layer _{10a, (Co x Fe 100-} x) By using the amorphous alloy _{100-y B y,} the tunnel insulating layer The (100) orientation of the Mg—O layer formed thereon can be increased. By increasing the (100) orientation of the Mg—O layer, a higher MR ratio can be obtained. The (Co _x Fe _100-x ) _100-y By alloy crystallizes using the (100) plane of the Mg—O layer as a template during annealing. Therefore, good crystal matching of the Mg-O and _{(Co x Fe 100-x)} 100-y B y alloys are obtained. By obtaining good crystal matching, a higher MR ratio can be obtained.

  As the first magnetization fixed layer 10a, for example, an Fe—Co alloy may be used in addition to the Co—Fe—B alloy.

  When the first magnetization fixed layer 10a is thicker, a larger MR change rate is obtained. In order to obtain a larger fixed magnetic field, the first magnetization fixed layer 10a is preferably thin. There is a trade-off relationship between the MR change rate and the fixed magnetic field in the thickness of the first magnetization fixed layer 10a. When a Co—Fe—B alloy is used as the first magnetization fixed layer 10a, the thickness of the first magnetization fixed layer 10a is preferably 1.5 nm or more and 5 nm or less. The thickness of the first magnetization fixed layer 10a is more preferably 2.0 nm or more and 4 nm or less.

For the first magnetization fixed layer 10a, in addition to the above-described materials, a Co ₉₀ Fe ₁₀ alloy having an fcc structure, a Co having an hcp structure, or a Co alloy having an hcp structure is used. For example, at least one selected from the group consisting of Co, Fe, and Ni is used as the first magnetization fixed layer 10a. An alloy containing at least one material selected from these materials is used as the first magnetization fixed layer 10a. As the first magnetization fixed layer 10a, an FeCo alloy material having a bcc structure, 50 at. % Co alloy containing cobalt composition of 50% or more, or 50 at. By using a material (Ni alloy) having a Ni composition of at least%, for example, a larger MR change rate can be obtained.

As the first magnetization fixed layer 10a, for example, Co ₂ MnGe, Co ₂ FeGe, Co ₂ MnSi, Co ₂ FeSi, Co ₂ MnAl, Co ₂ FeAl, Co ₂ MnGa _0.5 Ge _0.5 , and Co ₂ FeGa A Heusler magnetic alloy layer such as _0.5 Ge _0.5 can also be used. For example, as the first magnetization fixed layer 10a, for example, a Co ₄₀ Fe ₄₀ B ₂₀ layer having a thickness of 3 nm is used.

For example, the intermediate layer 30 breaks the magnetic coupling between the first magnetic layer 10 and the second magnetic layer 20. For the intermediate layer 30, for example, a metal, an insulator, or a semiconductor is used. For example, Cu, Au, or Ag is used as this metal. When a metal is used as the intermediate layer 30, the thickness of the intermediate layer 30 is, for example, about 1 nm to 7 nm. As this insulator or semiconductor, for example, magnesium oxide (Mg—O or the like), aluminum oxide (Al ₂ O ₃ or the like), titanium oxide (Ti—O or the like), zinc oxide (Zn—O or the like) Alternatively, gallium oxide (Ga—O) or the like is used. When an insulator or a semiconductor is used as the intermediate layer 30, the thickness of the intermediate layer 30 is, for example, about 0.6 nm to 2.5 nm. For example, a CCP (Current-Confined-Path) spacer layer may be used as the intermediate layer 30. When a CCP spacer layer is used as the spacer layer, for example, a structure in which a copper (Cu) metal path is formed in an insulating layer of aluminum oxide (Al ₂ O ₃ ) is used. For example, a 1.6 nm thick Mg—O layer is used as the intermediate layer 30.

A ferromagnetic material is used for the second magnetic layer 20. In the present embodiment, a high gauge factor can be realized by using an amorphous ferromagnetic material containing boron as the second magnetic layer 20. For the second magnetic layer 20, an alloy containing at least one element selected from the group consisting of Fe, Co, and Ni and boron (B) can be used. For example, the second magnetic layer 20 can be made of a Co—Fe—B alloy, a Fe—B alloy, a Fe—Co—Si—B alloy, or the like. For the second magnetic layer 20, an alloy containing at least one element selected from the group consisting of Fe, Co, and Ni and boron (B) can be used. For example, the second magnetic layer 20 can be a Co ₄₀ Fe ₄₀ B ₂₀ layer having a thickness of 4 nm.

  The second magnetic layer 20 may have a multilayer structure. For example, the second magnetic layer 20 may have a two-layer structure. When an Mg—O tunnel insulating layer is used as the intermediate layer 30, a Co—Fe—B alloy or Fe—B alloy layer is provided in a portion of the second magnetic layer 20 in contact with the intermediate layer 30. Is preferred. Thereby, a high magnetoresistance effect is obtained.

For example, the second magnetic layer 20 includes a first portion on the intermediate layer 30 side and a second portion on the functional layer 25 side. The first portion includes, for example, a portion in contact with the intermediate layer 30 in the second magnetic layer 20. A layer of Co—Fe—B alloy is used for the first portion. For the second portion, for example, an Fe—B alloy is used. That is, as the second magnetic layer 20, for example, a Co—Fe—B / Fe—B alloy is used. The thickness of this Co ₄₀ Fe ₄₀ B ₂₀ layer is, for example, 0.5 nm. The thickness of the Fe—B alloy layer used as the second magnetic layer 20 is, for example, 6 nm.

  In the present embodiment, a high gauge factor can be obtained by using a ferromagnetic material containing boron and an amorphous part as the second magnetic layer 20. Examples of materials that can be used for the second magnetic layer 20 will be described later.

  In the present embodiment, oxide or nitride can be used for the functional layer 25. As the functional layer 25, for example, an Mg—O layer having a thickness of 1.5 nm can be used. In this embodiment, by using an oxide layer or a nitride layer as the functional layer 25, for example, diffusion of boron contained in the second magnetic layer 20 is suppressed. Thereby, the amorphous structure in the second magnetic layer 20 can be maintained. As a result, a high gauge factor can be obtained. Examples of materials that can be used for the functional layer 25 will be described later.

  The cap layer 26c protects a layer provided under the cap layer 26c. For example, a plurality of metal layers are used for the cap layer 26c. For the cap layer 26c, for example, a two-layer structure (Ta / Ru) of a Ta layer and a Ru layer is used. The thickness of the Ta layer is 1 nm, for example, and the thickness of the Ru layer is 5 nm, for example. As the cap layer 26c, another metal layer may be provided instead of the Ta layer or the Ru layer. The configuration of the cap layer 26c is arbitrary. For example, a nonmagnetic material can be used for the cap layer 26c. As long as the layer provided under the cap layer 26c can be protected, other materials may be used for the cap layer 26c.

An example of the configuration and material of the second magnetic layer 20 (magnetization free layer) will be further described.
For the second magnetic layer 20, an alloy containing at least one element selected from Fe, Co, and Ni and boron (B) can be used. For the second magnetic layer 20, for example, a Co—Fe—B alloy or an Fe—B alloy can be used. The second magnetic layer 20, for _{example, (Co x Fe 100-x} ) 100-y B y alloys (x is, 0 atomic.% Or more 100at is at.% Or less, y is, 0 atomic. Greater than% 40 at. % Or less) can be used. As the second magnetic layer 20, for example, a Co ₄₀ Fe ₄₀ B ₂₀ layer having a thickness of 4 nm can be used.

  When an alloy containing at least one element selected from the group consisting of Fe, Co, and Ni and boron (B) is used for the second magnetic layer 20, as elements that promote a large magnetostriction constant λ, Ga, At least one of Al, Si, and W may be added. As the second magnetic layer 20, for example, a Fe—Ga—B alloy, a Fe—Co—Ga—B alloy, or a Fe—Co—Si—B alloy may be used.

Fe _1-y By (0 <y ≦ 0.3) or (Fe _a X _1-a ) _1-y B _y (where X is Co or Ni, 0 .8 ≦ a <1, 0 <y ≦ 0.3) is particularly preferable because it is easy to achieve both a large magnetostriction constant λ and a low coercive force. For example, an Fe ₈₀ B ₂₀ layer having a thickness of 4 nm can be used.

  As described above, the second magnetic layer 20 includes an amorphous portion. A part of the second magnetic layer 20 may be crystallized. The second magnetic layer 20 may include an amorphous portion while including a crystallized portion.

  The magnetostriction constant λ and coercive force Hc in the magnetization free layer are characteristics that can be added according to the volume ratio of the ferromagnetic material contained in the magnetization free layer. Even when there is a crystallized portion in the magnetization free layer, a small coercive force Hc can be obtained by obtaining the magnetic characteristics of the amorphous portion. For example, when the tunnel magnetoresistive effect using an insulator is used for the intermediate layer 30, it is preferable that the portion of the second magnetic layer 20 including the interface with the intermediate layer 30 is crystallized. Thereby, for example, a high MR change rate can be obtained.

  The boron concentration (for example, the composition ratio of boron) in the second magnetic layer 20 is 5 at. % (Atomic percent) or more is preferable. This makes it easier to obtain an amorphous structure. The boron concentration in the second magnetic layer 20 is 35 at. % Or less is preferable. If the boron concentration is too high, for example, the magnetostriction constant decreases. The boron concentration in the second magnetic layer 20 is, for example, 5 at. % Or more and 35 at. % Or less, preferably 10 at. % Or more and 30 at. % Or less is more preferable.

For example, the second magnetic layer 20 includes a first portion on the intermediate layer 30 side and a second portion on the functional layer 25 side. The first portion includes, for example, a portion in contact with the intermediate layer 30 in the second magnetic layer 20. A layer of Co—Fe—B alloy is used for the first portion. For the second part, for example, an Fe—Ga—B alloy is used. That is, for example, a Co—Fe—B / Fe—Ga—B alloy is used as the second magnetic layer 20. The thickness of this Co ₄₀ Fe ₄₀ B ₂₀ layer is, for example, 2 nm. The thickness of this Fe—Ga—B layer is, for example, 6 nm. Further, a Co—Fe—B / Fe—B alloy can be used. The thickness of this Co ₄₀ Fe ₄₀ B ₂₀ is, for example, 0.5 nm. This Fe-B thickness is, for example, 4 nm. As already described, for example, a Co—Fe—B / Fe—B alloy may be used as the second magnetic layer 20. In this case, the thickness of the Co ₄₀ Fe ₄₀ B ₂₀ layer is, for example, 0.5 nm. The thickness of this Fe—B layer is, for example, 4 nm. Thus, a high MR ratio can be obtained by using the Co—Fe—B alloy for the first portion on the intermediate layer 30 side.

For the first portion of the second magnetic layer 20 including the interface with the intermediate layer 30, crystallized Fe ₅₀ Co ₅₀ (thickness 0.5 nm) may be used. The first portion of the second magnetic layer 20 including the interface with the intermediate layer 30 is made of crystallized Fe ₅₀ Co ₅₀ (thickness 0.5 nm) / Co ₄₀ Fe ₄₀ B ₂₀ (thickness 2 nm). Such a two-layer structure may be used.

As the second magnetic layer 20, a laminated film of Fe ₅₀ Co ₅₀ (thickness 0.5 nm) / Co ₄₀ Fe ₄₀ B ₂₀ (thickness 4 nm) may be used. As the second magnetic layer 20, a laminated film of Fe ₅₀ Co ₅₀ (thickness 0.5 nm) / Co ₄₀ Fe ₄₀ B ₂₀ (thickness 2 nm) / Co ₃₅ Fe ₃₅ B ₃₀ (thickness 4 nm) may be used. . In this laminated film, the boron concentration increases as the distance from the intermediate layer 30 increases.

FIG. 14 is a schematic view illustrating the strain sensing element according to the first embodiment.
FIG. 14 illustrates a boron concentration distribution in the strain sensing element 50 (strain sensing element 51) according to the embodiment.

  As shown in FIG. 14, the second magnetic layer 20 includes a first portion 20p and a second portion 20q. The first portion 10p is provided between the intermediate layer 30 and the second portion 20q. For example, the first portion 20 p includes a portion in contact with the intermediate layer 30 in the second magnetic layer 20. For example, the second portion 20q includes a portion of the second magnetic layer 20 that is in contact with the functional layer 25.

As shown in FIG. 14, by lowering the first portion 20p (the side of the intermediate layer 30 parts) boron concentration C _B of the second magnetic layer 20, thereby improving the MR ratio in the first part 20p be able to. Thereby, the change of the electrical resistance R with respect to the change of the magnetization direction can be increased, and a high gauge factor can be obtained. On the other hand, by increasing the boron concentration C _B of the second portion 20q (portion away from the intermediate layer 30), the second portion 20q, it is possible to reduce the coercive force Hc, the entire second magnetic layer 20 coercive The magnetic force Hc can be reduced.

  When the tunnel magnetoresistive effect using Mg—O or the like is used for the intermediate layer, the MR change rate depends on the composition and crystal structure of the magnetic material having a thickness of about 0.5 nm in contact with the intermediate layer. That is, the MR change rate is determined only by the magnetic layer near the intermediate layer. On the other hand, when the magnetization free layer is a laminated film, the characteristics of the thickest layer are most strongly reflected in the magnetic characteristics such as magnetostriction and coercive force according to the thickness of each layer included in the laminated film. This is because the laminated body of magnetic materials included in the magnetization free layer is averaged by exchange coupling. In the embodiment, for example, a layer of magnetic material having crystallinity is provided in the vicinity of the intermediate layer. Thereby, a high MR change rate can be obtained. On the other hand, a layer of an amorphous magnetic material containing boron is provided on the second portion 20q not in contact with the intermediate layer. Thereby, a low coercive force is obtained. Thereby, a low coercive force can be obtained with a high MR change rate.

Information about the distribution of such boron concentration _{C B,} for example, obtained by SIMS analysis (secondary ion mass spectrometry). This information is obtained by the combination of the cross-section TEM and EELS. This information is obtained by EELS analysis. This information can also be obtained by three-dimensional atom probe analysis.

  The thickness of the first portion 20p (portion where the degree of crystallization is relatively high) is, for example, thinner than the thickness of the second portion 20q (portion where the degree of crystallization is relatively low and is an amorphous portion). Thereby, for example, it becomes easy to obtain a small coercive force Hc. The thickness of the first portion 20p is, for example, 1/3 or less of the thickness of the second portion 20q.

  Hereinafter, the fourth sample S04 will be described. In the fourth sample S04, the boron concentration in the first portion 20p of the second magnetic layer 20 is set lower than the boron concentration in the second portion 20q.

The material and thickness of each layer included in the fourth sample S04 are as follows.
Underlayer 10l: Ta (1 nm) / Ru (2 nm)
Pinning layer 10p: Ir ₂₂ Mn ₇₈ (7 nm)
Second magnetization fixed layer 10b: Co ₇₅ Fe ₂₅ (2.5 nm)
Magnetic coupling layer 10c: Ru (0.9 nm)
First magnetization fixed layer 10a: Co ₄₀ Fe ₄₀ B ₂₀ (3 nm)
Intermediate layer 30: Mg—O (1.6 nm)
Second magnetic layer 20: Co ₅₀ Fe ₅₀ (0.5 nm) / Co ₄₀ Fe ₄₀ B ₂₀ (8 nm)
Functional layer 25: Mg—O (1.5 nm)
Cap layer 26c: Cu (1 nm) / Ta (2 nm) / Ru (5 nm)
In the fourth sample S04, Co ₅₀ Fe ₅₀ (0.5 nm) / Co ₄₀ Fe ₄₀ B ₂₀ (8 nm) is used for the magnetization free layer, the first portion 20p having a low boron concentration, and a boron concentration of the magnetization free layer. And a high second portion 20q.

An example of the evaluation result of the fourth sample S04 will be described.
FIG. 15 is a microscope image illustrating the characteristics of the strain sensing element.
FIG. 15 is a cross-sectional transmission electron micrograph image of the strain sensing element of the fourth sample S04.
As can be seen from FIG. 15, in the second magnetic layer 20, the first portion 20p on the intermediate layer 30 side has a crystal structure. It can be seen that the second portion 20q on the functional layer 25 side has an amorphous structure.

FIG. 16A and FIG. 16B are schematic views illustrating characteristics of the strain sensing element.
FIG. 16B corresponds to a part of FIG.
FIG. 16A shows the evaluation result of the depth profile of the element of the fourth sample S04 by EELS. FIG. 16A shows the depth profile of the element in the line L3 shown in FIG.

  As can be seen from FIG. 16A, similarly to the first sample S01, by providing the functional layer 25, the magnetization free layer (second magnetic layer) boron does not diffuse into other layers and is free of magnetization. You can see that it stays in the layer. The EELS intensity of boron in the first portion 20p on the intermediate layer 30 side in the magnetization free layer is lower than the EELS intensity of boron in the second portion 20q on the functional layer 25 side.

  The MR value of the fourth sample S04 is 187%. The MR value of the fourth sample S04 is higher than the MR value of the first sample S01. In the fourth sample S04, the MR change rate is improved. This is considered due to the fact that the first portion 20p having crystallinity is provided on the side of the intermediate layer 30 (Mg—O layer). In the fourth sample S04, the gauge factor can be improved due to the high MR change rate.

  In the fourth sample S04, the magnetostriction is 20 ppm and the coercive force is 3.8 Oe. From this result, even when the first portion 20p having crystallinity is provided, a low coercive force can be realized by providing the second portion 20q having an amorphous structure. The magnetic characteristics in the second magnetic layer 20 are, for example, the sum of the magnetic characteristics of the first portion 20p and the magnetic characteristics of the second portion 20q.

  For the functional layer 25, an oxide material or a nitride material is used. In the oxide material or the nitride material, atoms are chemically bonded in each material. For this reason, the effect of suppressing the diffusion of boron is high. For example, as the functional layer 25, an Mg—O layer having a thickness of 2.0 nm can be used.

  As already described, the oxide material or nitride material used for the functional layer 25 is Mg, Al, Si, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Zr, Nb, Mo, An oxide material containing at least one element selected from the first group consisting of Ru, Rh, Pd, Ag, Hf, Ta, W, Sn, Cd and Ga, or at least one selected from the first group A nitride material containing any of these elements can be used.

  The functional layer 25 does not contribute to the magnetoresistance effect. For this reason, it is preferable that the area resistance of the functional layer 25 is low. For example, the area resistance of the functional layer 25 is preferably lower than the area resistance of the intermediate layer 30 that contributes to the magnetoresistance effect. For the functional layer 25, for example, an oxide containing at least one element selected from the group consisting of Mg, Ti, V, Zn, Sn, Cd, and Ga, or a nitride containing the element is used. The barrier height of oxides or nitrides of these elements is low. By using oxides or nitrides of these elements, the sheet resistance of the functional layer 25 can be reduced.

  It is more preferable to use an oxide for the functional layer 25. Chemical bonds in oxides are stronger than chemical bonds in nitrides. By using an oxide for the functional layer 25, for example, suppression of boron diffusion can be more effectively performed.

  In this specification, oxynitride is included in either oxide or nitride. For example, in the oxynitride, when the oxygen ratio is higher than the nitrogen ratio, the oxynitride can be included in the oxide. For example, in the oxynitride, when the ratio of nitrogen is higher than the ratio of oxygen, the oxynitride can be included in the nitride.

  When oxide or nitride is used for the functional layer 25, the thickness of the functional layer 25 is preferably 0.5 nm or more. Thereby, for example, the diffusion of boron is effectively suppressed. The thickness of the functional layer 25 is preferably 5 nm or less. Thereby, for example, the sheet resistance can be lowered. The thickness of the functional layer 25 is preferably 0.5 nm or more and 5 nm or less, and more preferably 1 nm or more and 3 nm or less. The thickness of the functional layer 25 may be 2 nm or more.

  Another metal layer or the like may be inserted between the second magnetic layer 20 and the functional layer 25. If the distance between the second magnetic layer 20 and the functional layer 25 is excessively long, for example, boron may diffuse in the region between them, and the boron concentration of the second magnetic layer 20 may decrease. For example, the distance between the second magnetic layer 20 and the functional layer 25 is preferably 10 nm or less, and more preferably 3 nm or less.

FIG. 17A to FIG. 17E are schematic views illustrating another strain sensing element according to the first embodiment.
As shown in FIG. 17A, in the strain sensing element 52a according to the present embodiment, the magnetic layer 27 is further provided. The functional layer 25 is disposed between the magnetic layer 27 and the second magnetic layer 20. The magnetization (direction) of the magnetic layer 27 can be changed. The materials and configurations described with respect to the second magnetic layer 20 can be applied to the magnetic layer 27. The magnetic layer 27 and the second magnetic layer 20 may be integrated to function as a magnetization free layer.

  If it is assumed that the magnetic layer 27 and the second magnetic layer 20 are magnetization free layers, it can be considered that the functional layer 25 is provided in the magnetization free layer. Also in this case, the functional layer 25 can suppress the diffusion of boron from the second magnetic layer 20, and a small coercive force Hc can be obtained. In the magnetic layer 27, it is considered that boron is diffused to increase the coercive force Hc, but the coercive force Hc of the entire magnetization free layer can be kept small. Thus, the functional layer 25 may be provided in the magnetization free layer. When the functional layer 25 is provided in the magnetization free layer, a laminated film including a plurality of layers may be used as the functional layer 25.

  As shown in FIGS. 17B to 17E, in the strain sensing elements 52 b to 52 e according to the present embodiment, the functional layer 25 is provided in the second magnetic layer 20. Even in this case, a high gauge factor can be obtained.

  In the strain sensing element 52 c illustrated in FIG. 17C, two functional layers 25 are provided in the second magnetic layer 20. The number of functional layers 25 may be three or more.

  In the strain sensing element 52d illustrated in FIG. 17D, one functional layer 25 is provided on the cap layer side. Furthermore, a functional layer 25 is provided in the second magnetic layer 20.

  In the strain sensing element 52e illustrated in FIG. 17E, one functional layer 25 is provided on the cap layer side. Further, a plurality of functional layers 25 are provided in the second magnetic layer 20. The number of functional layers 25 may be three or more.

  As shown in FIGS. 17A to 17E, the first portion 20p is reduced by reducing the boron concentration CB in the first portion 20p (portion on the intermediate layer 30 side) of the second magnetic layer 20. The MR change rate in can be improved. Thereby, the change of the electrical resistance R with respect to the change of the magnetization direction can be increased, and a high gauge factor can be obtained. On the other hand, by increasing the boron concentration CB in the second part 20q (part away from the intermediate layer 30), the coercive force Hc can be reduced in the second part 20q, and the coercive force of the entire second magnetic layer 20 can be reduced. Hc can be reduced. As shown in FIGS. 17C to 17E, when there are a plurality of functional layers 25, a plurality of functional layers 25 are separated from the intermediate layer relative to the first portion 20p in the second magnetic layer 20. Of the functional layers 25, the layer closer to the intermediate layer 30 than the functional layer 25 can be regarded as the second portion 20q.

  As described above, the functional layer 25 may be provided in the magnetization free layer. In this case, the diffusion of boron in the portion of the magnetization free layer located between the functional layer 25 and the intermediate layer 30 can be suppressed. Thereby, a small coercive force Hc is obtained. That is, the coercive force Hc of the entire magnetization free layer can be kept small. In the case where the functional layer 25 is provided in the magnetization free layer, a plurality of functional layers 25 may be provided.

FIG. 18A to FIG. 18C are schematic views illustrating another strain sensing element according to the first embodiment.
FIG. 18A is a schematic cross-sectional view showing a strain sensing element 52f according to the embodiment. FIG. 18B illustrates the boron concentration distribution in the strain sensing element 52f.

  As shown in FIG. 18A, the second magnetic layer 20 includes a magnetic film 21a, a magnetic film 21b, and a nonmagnetic film 21c. The nonmagnetic film 21c is disposed between the magnetic film 21a and the magnetic film 21b. The magnetic film 21a is disposed between the second magnetic film 21b and the intermediate layer 30. A nonmagnetic material is used for the nonmagnetic film 21c.

For example, Co ₄₀ Fe ₄₀ B ₂₀ is used for the magnetic film 21a. The thickness of the magnetic film 21a is, for example, not less than 1.5 nm and not more than 2.5 nm. For example, Co ₃₅ Fe ₃₅ B ₃₀ is used for the magnetic film 21b. The thickness of the magnetic film 21b is, for example, not less than 3 nm and not more than 5 nm. For example, Ru is used for the nonmagnetic film 21c. The thickness of the nonmagnetic film 21c is not less than 0.4 nm and not more than 1.2 nm.

  The magnetization of the magnetic film 21b and the magnetization of the magnetic film 21a are linked to each other. The magnetic film 21b and the magnetic film 21a operate integrally. A laminated body of the magnetic film 21a, the magnetic film 21b, and the nonmagnetic film 21c becomes a magnetization free layer. When the thickness of the nonmagnetic film 21c is, for example, about 1.2 nm or less, the magnetization of the magnetic film 21b and the magnetization of the magnetic film 21a are linked to each other.

FIG. 18C is a schematic cross-sectional view showing a strain sensing element 52g according to the embodiment.
As shown in FIG. 18C, the second magnetic layer 20 includes a magnetic film 21a, a nonmagnetic film 21c, a magnetic film 21b, a nonmagnetic film 21e, and a magnetic film 21d. These films are stacked in this order. For example, the configuration described with respect to the magnetic film 21a can be applied to the magnetic film 21d. The configuration described with respect to the nonmagnetic film 21c can be applied to the nonmagnetic film 21e. As described above, a plurality of nonmagnetic films may be provided in the second magnetic layer 20. The number of nonmagnetic films in the second magnetic layer 20 may be three or more.

  In the embodiment, the intermediate layer 30 may have a laminated structure. For example, the intermediate layer 30 may include a first nonmagnetic film and a second nonmagnetic film. The second nonmagnetic film is provided between the first nonmagnetic film and the second magnetic layer 20. For example, an Mg—O film is provided on the first nonmagnetic film. As the second nonmagnetic film, a film having a higher Mg concentration than the first nonmagnetic film is used.

FIG. 19 is a schematic perspective view illustrating another strain sensing element according to the first embodiment.
As illustrated in FIG. 19, in the strain sensing element 53 according to the present embodiment, the insulating layer 35 is provided. For example, an insulating layer 35 (insulating portion) is provided between the first electrode E1 and the second electrode E2. The insulating layer 35 surrounds the stacked body 10s between the first electrode E1 and the second electrode E2. An insulating layer 35 is provided to face the side wall of the stacked body 10s.

For the insulating layer 35, for example, aluminum oxide (for example, Al ₂ O ₃ ), silicon oxide (for example, SiO ₂ ), or the like can be used. The insulating layer 35 can suppress a leakage current around the stacked body 10s.

FIG. 20 is a schematic perspective view illustrating another strain sensing element according to the first embodiment.
As illustrated in FIG. 20, the strain sensing element 54 according to the present embodiment is further provided with a hard bias layer 36. A hard bias layer 36 (hard bias portion) is provided between the first electrode E1 and the second electrode E2. For example, the insulating layer 35 is disposed between the hard bias layer 36 and the stacked body 10s. In this example, the insulating layer 35 extends between the hard bias layer 36 and the first electrode E1.

  Due to the magnetization of the hard bias layer 36, at least one of the magnetization 10m of the first magnetic layer 10 and the magnetization 20m of the second magnetic layer 20 is set in a desired direction. The hard bias layer 36 can set at least one of the magnetization 10m and the magnetization 20m in a desired direction in a state where no force is applied to the strain sensing element.

For the hard bias layer 36, for example, a hard ferromagnetic material having a relatively high magnetic anisotropy such as CoPt, CoCrPt, or FePt is used. As the hard bias layer 36, a structure in which a layer of a soft magnetic material such as FeCo or Fe and an antiferromagnetic layer are stacked can be used. In this case, the magnetization follows a predetermined direction by exchange coupling. The thickness of the hard bias layer 36 (for example, the length along the direction from the first electrode E1 to the second electrode E2) is, for example, not less than 5 nm and not more than 50 nm.
The hard bias layer 36 and the insulating layer 35 can be applied to any of the strain sensing elements described above and below.

FIG. 21 is a schematic perspective view illustrating another strain sensing element according to the first embodiment.
As shown in FIG. 21, another strain sensing element 55a according to the present embodiment includes a first electrode E1 (for example, a lower electrode), a base layer 101, a functional layer 25, and a second magnetic material arranged in order. Layer 20 (magnetization free layer), intermediate layer 30, second magnetization fixed layer 10b, magnetic coupling layer 10c, first magnetization fixed layer 10a, pinning layer 10p, cap layer 26c, and second electrode E2 (For example, an upper electrode). The strain sensing element 55a is a top spin valve type.

For example, Ta / Cu is used for the base layer 10l. The thickness of this Ta layer is 3 nm, for example. The thickness of this Ru layer is 5 nm, for example.
For the functional layer 25, for example, Mg—O is used. The thickness of this Mg—O layer is, for example, 1.5 nm.
For the second magnetic layer 20, for example, Co ₄₀ Fe ₄₀ B ₂₀ is used.
The thickness of this Co ₄₀ Fe ₄₀ B ₂₀ layer is, for example, 4 nm.
For the intermediate layer 30, for example, a 1.6 nm thick Mg—O layer is used.
For example, Co ₄₀ Fe ₄₀ B ₂₀ / Fe ₅₀ Co ₅₀ is used for the first magnetization fixed layer 10a. The thickness of this Co ₄₀ Fe ₄₀ B ₂₀ layer is, for example, 2 nm. The thickness of this Fe ₅₀ Co ₅₀ layer is, for example, 1 nm.
For example, a Ru layer having a thickness of 0.9 nm is used for the magnetic coupling layer 10c.
For the second magnetization fixed layer 10b, for example, a Co ₇₅ Fe ₂₅ layer having a thickness of 2.5 nm is used.
For the pinning layer 10p, for example, an IrMn layer having a thickness of 7 nm is used.
Ta / Ru is used for the cap layer 26c. The thickness of this Ta layer is 1 nm, for example. The thickness of this Ru layer is 5 nm, for example.

  For each of the layers included in the strain sensing element 55a, for example, the materials described for the strain sensing element 51 can be used.

FIG. 22 is a schematic perspective view illustrating another strain sensing element according to the first embodiment.
As shown in FIG. 22, another strain sensing element 55b according to this embodiment includes a first electrode E1 (for example, a lower electrode), an underlayer 10l, a pinning layer 10p, and a first magnetic layer, which are arranged in order. 10, an intermediate layer 30, a second magnetic layer 20, a functional layer 25, a cap layer 26c, and a second electrode E2 (for example, an upper electrode). A single pin structure using a single magnetization fixed layer is applied to the strain sensing element 55b.

For example, Ta / Ru is used for the base layer 10l. The thickness of this Ta layer is 3 nm, for example. The thickness of this Ru layer is 2 nm, for example.
For the pinning layer 10p, for example, an IrMn layer having a thickness of 7 nm is used.

For the first magnetic layer 10, for example, a Co ₄₀ Fe ₄₀ B ₂₀ layer having a thickness of 3 nm is used.
For the intermediate layer 30, for example, a 1.6 nm thick Mg—O layer is used.
For the second magnetic layer 20, for example, Co ₄₀ Fe ₄₀ B ₂₀ is used. The thickness of this Co ₄₀ Fe ₄₀ B ₂₀ layer is, for example, 4 nm.
For the functional layer 25, for example, a Mg—O layer having a thickness of 1.5 nm is used.
For example, Ta / Ru is used for the cap layer 26c. The thickness of this Ta layer is 1 nm, for example. The thickness of this Ru layer is 5 nm, for example.
For each of the layers included in the strain sensing element 55b, for example, the materials described with respect to the strain sensing element 51 can be used.

FIG. 23 is a schematic perspective view illustrating another strain sensing element according to the first embodiment.
As shown in FIG. 23, another strain sensing element 55b according to this embodiment includes a first electrode E1 (for example, a lower electrode), a base layer 101, and another functional layer 25a (second Functional layer), first magnetic layer 10, intermediate layer 30, second magnetic layer 20, functional layer 25 (first functional layer), cap layer 26c, and second electrode E2 (for example, upper electrode) ,including. In this example, the first magnetic layer 10 is a magnetization free layer, and the second magnetic layer 20 is also a magnetization free layer.

For example, Ta / Ru is used for the base layer 10l. The thickness of this Ta layer is 3 nm, for example. The thickness of this Ru layer is 45 nm, for example.
For the functional layer 25a, for example, a Mg—O layer having a thickness of 1.5 nm is used.
For the first magnetic layer 10, for example, a Co ₄₀ Fe ₄₀ B ₂₀ layer having a thickness of 4 nm is used.
For the intermediate layer 30, for example, a 1.6 nm thick Mg—O layer is used.
For the second magnetic layer 20, for example, Co ₄₀ Fe ₄₀ B ₂₀ is used. The thickness of this Co ₄₀ Fe ₄₀ B ₂₀ layer is, for example, 4 nm.
For the functional layer 25, for example, a Mg—O layer having a thickness of 1.5 nm is used.
For example, Ta / Ru is used for the cap layer 26c. The thickness of this Ta layer is 1 nm, for example. The thickness of this Ru layer is 5 nm, for example.

  For each of the layers included in the strain sensing element 55c, for example, the materials described for the strain sensing element 51 can be used. The materials and configurations described for the second magnetic layer 20 in the strain sensing element 51 can be applied to the first magnetic layer 10 in the strain sensing element 55c. The materials and configurations described for the functional layer 25 in the strain sensing element 51 can be applied to the functional layer 25a in the strain sensing element 55c.

  In this example, the first magnetic layer 10 may be regarded as the second magnetic layer 20 and the functional layer 25 may be regarded as the functional layer 25a.

  In the case where two magnetization free layers are provided as in the strain sensing element 55c, the relative angle between the magnetizations of the two magnetization free layers changes according to the strain ε. Thereby, it can function as a strain sensor. In this case, the magnetostriction value of the second magnetization free layer and the magnetostriction value of the first magnetization free layer can be designed to be different from each other. As a result, the relative angles in the magnetizations of the two magnetization free layers change according to the strain ε.

(Second Embodiment)
FIG. 24 is a schematic cross-sectional view illustrating a strain sensing element according to the second embodiment.
As shown in FIG. 24, the strain sensing element 56 according to this embodiment also includes a functional layer 25x, the first magnetic layer 10, the second magnetic layer 20, and the intermediate layer 30. Since the arrangement of these layers is the same as the arrangement described with respect to the first embodiment, the description thereof is omitted.

  In the present embodiment, the material used for the functional layer 25x is different from the material used for the functional layer 25 described in regard to the first embodiment. The rest is the same as in the first embodiment. Hereinafter, an example of the functional layer 25x will be described.

  In the strain sensing element 56, for example, at least one selected from the group consisting of magnesium (Mg), silicon (Si), and aluminum (Al) is used for the functional layer 25x. A material containing these light elements is used for the functional layer 25x. These light elements combine with boron to form a compound. For example, at least one of an Mg—B compound, an Al—B compound, and an Si—B compound is formed in a portion including the interface with the second magnetic layer 20 in the functional layer 25x. These compounds suppress the diffusion of boron.

  In this embodiment, by providing the functional layer 25x, diffusion of boron contained in the second magnetic layer 20 can be suppressed, and the amorphous structure of the second magnetic layer 20 can be maintained. As a result, a high gauge factor can be obtained.

  Also in the strain sensing element 56 according to the present embodiment, the first magnetic layer 10 can include the second magnetization fixed layer 10b, the magnetic coupling layer 10c, and the first magnetization fixed layer 10a described with reference to FIG.

Hereinafter, examples of characteristics of the strain sensing element according to the present embodiment will be described.
The configuration of the fifth sample is as follows.
Underlayer 10l: Ta (1 nm) / Ru (2 nm)
Pinning layer 10p: Ir ₂₂ Mn ₇₈ (7 nm)
Second magnetization fixed layer 10b: Co ₇₅ Fe ₂₅ (2.5 nm)
Magnetic coupling layer 10c: Ru (0.9 nm)
First magnetization fixed layer 10a: Co ₄₀ Fe ₄₀ B ₂₀ (3 nm)
Intermediate layer 30: Mg—O (1.6 nm)
Second magnetic layer 20: Co ₄₀ Fe ₄₀ B ₂₀ (4 nm)
Functional layer 25x: Mg (1.6nm)
Cap layer 26c: Cu (1 nm) / Ta (20 nm) / Ru (50 nm)
That is, in the fifth sample, an Mg layer having a thickness of 1.6 nm is used as the functional layer 25x.

  On the other hand, in the sixth sample, a Si layer having a thickness of 0.8 nm is used as the functional layer 25x.

  In the seventh sample, the functional layer 25x is not provided. In the seventh sample, the second magnetic layer 20 is in contact with the cap layer 26c. The seventh sample is the same as the second sample S02.

The characteristics of these samples were evaluated in the same manner as described for the first embodiment. The result is as follows.
In the fifth sample, MR is 126%, coercive force Hc is 2.3 Oe, magnetostriction constant λ is 21 ppm, and gauge factor is 2861.
In the sixth sample, the MR is 104%, the coercive force Hc is 3.8 Oe, the magnetostriction constant λ is 19 ppm, and the gauge factor is 2091.
In the seventh sample, MR is 190%, coercive force Hc is 27 Oe, magnetostriction constant λ is 30 ppm, and gauge factor is 895.
Thus, a high gauge factor is obtained by using the functional layer 25x.

  By providing the functional layer 25x on the second magnetic layer 20 containing boron, diffusion of boron from the second magnetic layer 20 can be suppressed. As a result, a small coercive force Hc and a large magnetostriction constant λ are obtained. Thereby, a high gauge factor is obtained.

Hereinafter, an example of characteristics of another strain sensing element according to the present embodiment will be described.
The configuration of the eighth sample is as follows.
Underlayer 10l: Ta (1 nm) / Ru (2 nm)
Pinning layer 10p: Ir ₂₂ Mn ₇₈ (7 nm)
Second magnetization fixed layer 10b: Co ₇₅ Fe ₂₅ (2.5 nm)
Magnetic coupling layer 10c: Ru (0.9 nm)
First magnetization fixed layer 10a: Co ₄₀ Fe ₄₀ B ₂₀ (3 nm)
Intermediate layer 30: Mg—O (2 nm)
Second magnetic layer 20: described later Cap layer 26c: Ta (20 nm) / Ru (50 nm)
In the eighth sample, the laminated film of the second magnetic layer 20 serving as the magnetization free layer and the functional layer 25x has the following configuration. Three layers of a combination of Co ₄₀ Fe ₄₀ B ₂₀ (4 nm) / {(Co ₄₀ Fe ₄₀ B ₂₀ (1 nm) / Si (0.25 nm)} / Co ₄₀ Fe ₄₀ B ₂₀ (1 nm) are used as a laminated film. For example, a Co ₄₀ Fe ₄₀ B ₂₀ (4 nm) layer in the stacked film is regarded as the second magnetic layer 20. At least three Si (0.25 nm) layers in the stacked film Either is considered a functional layer 25x.

In the ninth sample, the laminated film of the second magnetic layer 20 serving as the magnetization free layer and the functional layer 25x has the following configuration. Three layers of a combination of Co ₄₀ Fe ₄₀ B ₂₀ (4 nm) / {(Co ₄₀ Fe ₄₀ B ₂₀ (1 nm) / Al (0.25 nm)} / Co ₄₀ Fe ₄₀ B ₂₀ (1 nm) are used as a laminated film. For example, a Co ₄₀ Fe ₄₀ B ₂₀ (4 nm) layer in the above laminated film is regarded as the second magnetic layer 20. At least of three Al (0.25 nm) layers in the above laminated film. Any one of them is regarded as the functional layer 25x The configuration of the ninth sample except for the second magnetic layer 20 and the functional layer 25x is the same as that of the eighth sample.

In the tenth sample, Co ₄₀ Fe ₄₀ B ₂₀ (4 nm) is used for the second magnetic layer 20 serving as the magnetization free layer. The functional layer 25x is not provided. In the tenth sample, the configuration excluding the second magnetic layer 20 and the functional layer 25x is the same as that of the eighth sample. That is, the tenth sample is the same as the second sample S02 described above.

The characteristics of these samples were evaluated in the same manner as described for the first embodiment. The result is as follows.
In the eighth sample, the MR is 176%, the coercive force Hc is 4.8 Oe, the magnetostriction constant λ is 22 ppm, and the gauge factor is 2849.
In the ninth sample, the MR is 169%, the coercive force Hc is 7.1 Oe, the magnetostriction constant λ is 20 ppm, and the gauge factor is 2195.
In the tenth sample (seventh sample), the MR is 190%, the coercive force Hc is 27 Oe, the magnetostriction constant λ is 30 ppm, and the gauge factor is 895.
Thus, a high gauge factor is obtained by using the functional layer 25x.

  Thus, by inserting a layer of a material containing at least one light element selected from the group consisting of Mg, Al, and Si into the magnetization free layer containing boron, diffusion of boron from the magnetization free layer is achieved. Can be suppressed. As a result, a small coercive force Hc and a large magnetostriction constant λ are obtained. Thereby, a high gauge factor is obtained.

  In the present embodiment, when a material including at least one selected from the group consisting of Mg, Al, and Si is used as the functional layer 25x, the thickness of the functional layer 25x is preferably 0.5 nm or more, for example. Thereby, for example, the diffusion of boron is effectively suppressed. The thickness of the functional layer 25x is preferably 5 nm or less. Thereby, for example, excessive Mg, Al, or Si can be prevented from diffusing into the second magnetic layer 20. The thickness of the functional layer 25x is preferably 0.5 nm or more and 5 nm or less, and more preferably 1 nm or more and 3 nm or less. The thickness of the functional layer 25x may be 2 nm or more.

  Another metal layer or the like may be inserted between the functional layer 25 x and the second magnetic layer 20. If the distance between the functional layer 25x and the second magnetic layer 20 is excessively long, boron may diffuse in the region between them, and the boron concentration in the second magnetic layer 20 may decrease. For example, the distance between the functional layer 25x and the second magnetic layer 20 is preferably 10 nm or less, and more preferably 3 nm or less.

  As described above, the functional layer 25x may be provided in the magnetization free layer. In this case, the diffusion of boron in the portion of the magnetization free layer located between the functional layer 25x and the intermediate layer 30 can be suppressed. Thereby, a small coercive force Hc is obtained. That is, the coercive force Hc of the entire magnetization free layer can be kept small. In the case where the functional layer 25x is provided in the magnetization free layer, a plurality of functional layers 25x may be provided.

(Third embodiment)
The present embodiment relates to a pressure sensor. In the pressure sensor, at least one of the first embodiment and the second embodiment, and a deformation detection element thereof are used. Hereinafter, a case where the strain sensing element 50 is used as the strain sensing element will be described.

FIG. 25A and FIG. 25B are schematic perspective views illustrating the pressure sensor according to the third embodiment.
FIG. 25A is a schematic perspective view. FIG. 25B is a cross-sectional view taken along line A1-A2 of FIG.
As illustrated in FIG. 25A and FIG. 25B, the pressure sensor 110 according to the present embodiment includes the film unit 70 and the strain detection element 50.

  The film part 70 is supported by the support part 70s, for example. The support part 70s is, for example, a substrate. The film unit 70 has, for example, a flexible region. The film unit 70 is, for example, a diaphragm. The film part 70 may be integrated with the support part 70s or may be a separate body. The film part 70 may be made of the same material as that of the support part 70s, or may be made of a material different from that of the support part 70s. A portion of the substrate that becomes the support portion 70s may be removed, and the thin portion of the substrate may be the film portion 70.

  The thickness of the film part 70 is thinner than the thickness of the support part 70s. In the case where the same material is used for the film part 70 and the support part 70s and these are integrated, the thin part becomes the film part 70 and the thick part becomes the support part 70s.

  The support part 70s may have a through hole 70h that penetrates the support part 70s in the thickness direction, and the film part 70 may be provided so as to cover the through hole 70h. At this time, for example, the film of the material to be the film part 70 may also extend on a portion other than the through hole 70h of the support part 70s. At this time, the portion of the material film that becomes the film portion 70 that overlaps the through hole 70 h becomes the film portion 70.

  The film part 70 has an outer edge 70r. In the case where the same material is used for the film part 70 and the support part 70s and they are integrated, the outer edge of the thin part becomes the outer edge 70r of the film part 70. When the support portion 70s has a through hole 70h penetrating the support portion 70s in the thickness direction, and the film portion 70 is provided so as to cover the through hole 70h, a film of a material to be the film portion 70 Among these, the outer edge of the portion overlapping with the through hole 70 h becomes the outer edge 70 r of the film part 70.

  The support part 70s may support the outer edge 70r of the film part 70 continuously, or may support a part of the outer edge 70r of the film part 70.

  The strain sensing element 50 is provided on the film unit 70. For example, the strain sensing element 50 is provided on a part of the film unit 70. In this example, a plurality of strain sensing elements 50 are provided on the film unit 70. The number of strain sensing elements provided on the film part may be one.

  As illustrated in FIG. 25B, in the strain sensing element 50, for example, the first magnetic layer 10 is disposed between the functional layer 25 and the film unit 70. The first magnetic layer 10 is disposed between the second magnetic layer 20 and the film part 70.

  In this example, a first wiring 61 and a second wiring 62 are provided. The first wiring 61 is connected to the strain sensing element 50. The second wiring 62 is connected to the strain sensing element 50. For example, an interlayer insulating film is provided between the first wiring 61 and the second wiring 62, and the first wiring 61 and the second wiring 62 are electrically insulated. A voltage is applied between the first wiring 61 and the second wiring 62, and this voltage is applied to the strain sensing element 50 via the first wiring 61 and the second wiring 62. When pressure is applied to the pressure sensor 110, the film part 70 is deformed. In the strain sensing element 50, the electric resistance R changes with the deformation of the film unit 70. By detecting the change in the electrical resistance R through the first wiring 61 and the second wiring 62, the pressure can be detected.

  For example, a plate-like substrate can be used for the support portion 70s. For example, a cavity 71h (through hole 70h) is provided inside the substrate.

  For example, a semiconductor material such as silicon, a conductive material such as metal, or an insulating material can be used for the support portion 70s. The support portion 70s may include, for example, silicon oxide or silicon nitride. The inside of the hollow portion 71h is in a reduced pressure state (vacuum state), for example. The hollow portion 71h may be filled with a gas such as air or a liquid. The inside of the hollow portion 71h is designed so that the film portion 70 can be bent. The inside of the hollow portion 71h may be connected to the outside atmosphere.

  A film part 70 is provided on the cavity part 71h. For the film part 70, for example, a part of the substrate that becomes the support part 70s is processed thinly, and the part is used. The thickness (length in the Z-axis direction) of the film part 70 is thinner than the thickness (length in the Z-axis direction) of the substrate.

  When pressure is applied to the film part 70, the film part is deformed. This pressure corresponds to the pressure that the pressure sensor 110 should detect. The applied pressure includes pressure by sound waves or ultrasonic waves. In the case where pressure due to sound waves or ultrasonic waves is detected, the pressure sensor 110 functions as a microphone.

  For example, an insulating material is used for the film unit 70. The film unit 70 includes, for example, at least one of silicon oxide, silicon nitride, and silicon oxynitride. For the film part 70, for example, a semiconductor material such as silicon may be used. For example, a metal material may be used for the film unit 70.

  The thickness of the film part 70 is, for example, not less than 0.1 micrometer (μm) and not more than 3 μm. This thickness is preferably 0.2 μm or more and 1.5 μm or less. For the film part 70, for example, a stacked body of a silicon oxide film having a thickness of 0.2 μm and a silicon film having a thickness of 0.4 μm may be used.

  A plurality of strain sensing elements 50 may be disposed on the film part 70. A plurality of strain sensing elements 50 can obtain the same change in electrical resistance with respect to pressure. As will be described later, the SN ratio can be increased by connecting a plurality of strain sensing elements 50 in series and parallel.

  The size of the strain sensing element 50 may be extremely small. The area of the strain sensing element 50 can be made sufficiently smaller than the area of the film part 70 deformed by pressure. For example, the area of the strain sensing element 50 can be set to 1/5 or less of the area of the film part 70.

  For example, when the diameter of the film part 70 is about 60 μm, the dimension of the strain sensing element 50 can be 12 μm or less. For example, when the diameter of the film part 70 is about 600 μm, the dimension of the strain sensing element 50 can be set to 120 μm or less. Considering the processing accuracy of the strain sensing element 50, it is not necessary to make the dimension of the strain sensing element 50 too small. Therefore, the dimension of the strain sensing element 50 can be set to, for example, 0.05 μm or more and 30 μm or less.

  In this example, the planar shape of the film part 70 is a circle. The planar shape of the film unit 70 may be, for example, an ellipse (for example, a flat circle), a square, a rectangle, a polygon, or a regular polygon.

FIG. 26A to FIG. 26C are schematic views illustrating the pressure sensor according to the embodiment. These drawings show examples of connection states of a plurality of sensing elements.
As shown in FIG. 26A, in the pressure sensor 116a according to the embodiment, the plurality of detection elements 50 are electrically connected in series. When the number of sensing elements 50 connected in series is N, the obtained electrical signal is N times that when the number of sensing elements 50 is one. On the other hand, thermal noise and Schottky noise become N1 / 2 times. That is, the SN ratio (signal-noise ratio: SNR) is N1 / 2 times. By increasing the number N of sensing elements 50 connected in series, the SN ratio can be improved without increasing the size of the film part 70.

The plurality of strain sensing elements 50 provided on the film unit 70 can be connected in series. When the number of strain sensing elements to which a plurality of strain sensing elements 50 are connected in series is N, the obtained electrical signal is N times that when the number of strain sensing elements 50 is one. On the other hand, thermal noise and Schottky noise are N ^1/2 times. That is, the SN ratio (signal-noise ratio: SNR) is N ^1/2 times. By increasing the number N of strain sensing elements 50 connected in series, the SN ratio can be improved without increasing the size of the film part 70.

  The bias voltage applied to one strain sensing element is, for example, 50 millivolts (mV) or more and 150 mV or less. When N strain sensing elements 50 are connected in series, the bias voltage is 50 mV × N or more and 150 mV × N or less. For example, when the number N of strain sensing elements connected in series is 25, the bias voltage is 1 V or more and 3.75 V or less.

  When the value of the bias voltage is 1 V or more, the design of an electric circuit for processing an electric signal obtained from the strain sensing element becomes easy, which is practically preferable.

  When the bias voltage (inter-terminal voltage) exceeds 10 V, it is not desirable in an electric circuit that processes an electric signal obtained from the strain sensing element. In the embodiment, the number N of strain sensing elements connected in series and the bias voltage are set so as to be in an appropriate voltage range.

  For example, the voltage when a plurality of strain sensing elements are electrically connected in series is preferably 1 V or more and 10 V or less. For example, the voltage applied between the terminals of a plurality of strain sensing elements 50 electrically connected in series (between one terminal and the other terminal) is 1 V or more and 10 V or less. .

  In order to generate this voltage, when the bias voltage applied to one strain sensing element is 50 mV, the number N of strain sensing elements 50 connected in series is preferably 20 or more and 200 or less. When the bias voltage applied to one strain sensing element is 150 mV, the number N of strain sensing elements connected in series is preferably 7 or more and 66 or less.

  As shown in FIG. 26B, in the pressure sensor 116b according to the embodiment, a plurality of detection elements 50 are electrically connected in parallel. In the embodiment, at least some of the plurality of strain sensing elements 50 may be electrically connected in parallel.

  As shown in FIG. 26C, in the pressure sensor 116c according to the embodiment, a plurality of strain sensing elements may be connected such that the plurality of strain sensing elements 50 form a Wheatstone bridge circuit. Thereby, for example, temperature compensation of detection characteristics can be performed.

  Hereinafter, an example of the manufacturing method of the pressure sensor according to the embodiment will be described. The following is an example of a method for manufacturing a pressure sensor.

FIG. 27A to FIG. 27E are schematic cross-sectional views in order of the processes, illustrating the manufacturing direction of the pressure sensor according to the embodiment.
As shown in FIG. 27A, a thin film 70f is formed on a substrate 71 (for example, a Si substrate). The board | substrate 71 becomes the support part 70s. The thin film 70 f becomes the film part 70.
For example, on a Si substrate, it is formed by sputtering a thin film 70f of _SiO x / Si. As the thin film 70f, a SiO _x single layer, a SiN single layer, or a metal layer such as Al may be used. Further, as the thin film 70f, a flexible plastic material such as polyimide or paraxylylene-based polymer may be used. An SOI (Silicon On Insulator) substrate may be used as the substrate 71 and the thin film 70f. In SOI, for example, a laminated film of SiO ₂ / Si is formed on a Si substrate by bonding the substrates.

  As shown in FIG. 27B, the second wiring 62 is formed. In this step, a conductive film to be the second wiring 62 is formed, and the conductive film is processed by photolithography and etching. When the periphery of the second wiring 62 is embedded with an insulating film, a lift-off process may be applied. In the lift-off process, for example, after the pattern of the second wiring 62 is etched, before the resist is peeled off, an insulating film is formed on the entire surface, and then the resist is removed.

  As shown in FIG. 27C, the strain sensing element 50 is formed. In this step, a laminated film to be the strain sensing element 50 is formed, and the laminated film is processed by photolithography and etching. When embedding the sidewall of the laminate 10s of the strain sensing element 50 with the insulating layer 35, a lift-off process may be applied. In the lift-off process, for example, after processing the stacked body 10 s and before removing the resist, the insulating layer 35 is formed on the entire surface, and then the resist is removed.

  As shown in FIG. 27D, the first wiring 61 is formed. In this step, a conductive film to be the first wiring 61 is formed, and the conductive film is processed by photolithography and etching. When the periphery of the first wiring 61 is embedded with an insulating film, a lift-off process may be applied. In the lift-off process, after the first wiring 61 is processed and before the resist is peeled off, an insulating film is formed on the entire surface, and then the resist is removed.

As shown in FIG. 27E, etching is performed from the back surface of the substrate 71 to form a cavity 71h. Thereby, the film | membrane part 70 and the support part 70s are formed. For example, when a SiO _x / Si laminated film is used as the thin film 70 f to be the film portion 70, the substrate 71 is deeply drilled from the back surface (lower surface) to the front surface (upper surface) of the thin film 70 f. Thereby, the cavity part 71h is formed. In forming the cavity 71h, for example, a double-sided aligner exposure apparatus can be used. Thus, the hole pattern of the resist can be patterned on the back surface according to the position of the strain detection element 50 on the front surface.

In etching the Si substrate, for example, a Bosch process using RIE can be used. In the Bosch process, for example, an etching process using SF ₆ gas and a deposition process using C ₄ F ₈ gas are repeated. Thereby, etching is selectively performed in the depth direction (Z-axis direction) of the substrate 71 while suppressing the etching of the sidewall of the substrate 71. For example, a SiO _x layer is used as an etching end point. That is, the etching is terminated using an SiO _x layer having a different etching selectivity than Si. The SiO _x layer functioning as an etching stopper layer may be used as a part of the film part 70. The SiO _x layer may be removed after the etching, for example, by treatment with anhydrous hydrogen fluoride and alcohol.

  Thus, the pressure sensor 110 according to the embodiment is formed. Other pressure sensors according to the embodiment can be manufactured by the same method.

  FIG. 28A to FIG. 28C are schematic views illustrating the pressure sensor according to the embodiment. FIG. 28A is a schematic perspective view, and FIG. 28B and FIG. 28C are block diagrams illustrating the pressure sensor 440.

  As shown in FIGS. 28A and 28B, the pressure sensor 440 includes a base 471, a detection unit 450, a semiconductor circuit unit 430, an antenna 415, an electric wiring 416, a transmission circuit 417, and a reception circuit 417r. Is provided.

The antenna 415 is electrically connected to the semiconductor circuit portion 430 through the electric wiring 416.
The transmission circuit 417 wirelessly transmits data based on the electrical signal flowing through the detection unit 450. At least part of the transmission circuit 417 can be provided in the semiconductor circuit portion 430.

  The receiving circuit 417r receives a control signal from the electronic device 418d. At least a part of the reception circuit 417r can be provided in the semiconductor circuit portion 430. If the receiving circuit 417r is provided, for example, the operation of the pressure sensor 440 can be controlled by operating the electronic device 418d.

  As shown in FIG. 28B, the transmission circuit 417 can include, for example, an AD converter 417a connected to the detection unit 450 and a Manchester encoding unit 417b. A switching unit 417c can be provided to switch between transmission and reception. In this case, a timing controller 417d is provided, and switching in the switching unit 417c can be controlled by the timing controller 417d. Furthermore, a data correction unit 417e, a synchronization unit 417f, a determination unit 417g, and a voltage controlled oscillator 417h (VCO; Voltage Controlled Oscillator) can be provided.

As shown in FIG. 28C, the electronic device 418d used in combination with the pressure sensor 440 is provided with a receiving unit 418. As the electronic device 418d, for example, an electronic device such as a portable terminal can be exemplified.
In this case, the pressure sensor 440 including the transmission circuit 417 and the electronic device 418d including the reception unit 418 can be used in combination.

  The electronic device 418d includes a Manchester encoding unit 417b, a switching unit 417c, a timing controller 417d, a data correction unit 417e, a synchronization unit 417f, a determination unit 417g, a voltage control oscillator 417h, a storage unit 418a, a central processing unit 418b (CPU; Central). Processing Unit) can be provided.

In this example, the pressure sensor 440 further includes a fixing portion 467. The fixing part 467 fixes the film part 464 (70d) to the base part 471. The fixing part 467 can be made thicker than the film part 464 so that it is difficult to bend even when an external pressure is applied.
For example, the fixing portions 467 can be provided at equal intervals around the periphery of the film portion 464.
The fixing portion 467 may be provided so as to continuously surround the entire periphery of the film portion 464 (70d).
The fixing portion 467 can be formed from the same material as that of the base portion 471, for example. In this case, the fixing portion 467 can be formed from, for example, silicon.
For example, the fixing portion 467 can be formed of the same material as the material of the film portion 464 (70d).

The example of the manufacturing method of the pressure sensor which concerns on embodiment is demonstrated.
29 (a), 29 (b), 30 (a), 30 (b), 31 (a), 31 (b), 32 (a), 32 (b), and 33. (A), 33 (b), 34 (a), 34 (b), 35 (a), 35 (b), 36 (a), 36 (b), 37 (a) ), FIG. 37 (b), FIG. 38 (a), FIG. 38 (b), FIG. 39 (a), FIG. 39 (b), FIG. 40 (a) and FIG. It is a schematic diagram which illustrates the manufacturing method of a sensor.

  FIGS. 29A to 40A are schematic plan views, and FIGS. 29B to 40B are schematic cross-sectional views.

  As shown in FIGS. 29A and 29B, a semiconductor layer 512 </ b> M is formed on the surface portion of the semiconductor substrate 531. Subsequently, an element isolation insulating layer 512I is formed on the upper surface of the semiconductor layer 512M. Subsequently, a gate 512G is formed over the semiconductor layer 512M via an insulating layer (not shown). Subsequently, the source 512S and the drain 512D are formed on both sides of the gate 512G, whereby the transistor 532 is formed. Subsequently, an interlayer insulating film 514a is formed thereon, and further an interlayer insulating film 514b is formed.

  Subsequently, a trench and a hole are formed in part of the interlayer insulating films 514a and 514b in a region to be a non-cavity. Subsequently, a conductive material is embedded in the holes to form connection pillars 514c to 514e. In this case, for example, the connection pillar 514c is electrically connected to the source 512S of one transistor 532, and the connection pillar 514d is electrically connected to the drain 512D. For example, the connection pillar 514e is electrically connected to the source 512S of another transistor 532. Subsequently, a conductive material is embedded in the trench to form wiring portions 514f and 514g. The wiring portion 514f is electrically connected to the connection pillar 514c and the connection pillar 514d. The wiring portion 514g is electrically connected to the connection pillar 514e. Subsequently, an interlayer insulating film 514h is formed over the interlayer insulating film 514b.

As shown in FIGS. 30A and 30B, an interlayer insulating film 514i made of silicon oxide (SiO ₂ ) is formed on the interlayer insulating film 514h by using, for example, a CVD (Chemical Vapor Deposition) method. Form. Subsequently, a hole is formed in a predetermined position of the interlayer insulating film 514i, a conductive material (for example, a metal material) is embedded, and the upper surface is planarized using a CMP (Chemical Mechanical Polishing) method. Thereby, the connection pillar 514j connected to the wiring part 514f and the connection pillar 514k connected to the wiring part 514g are formed.

  As shown in FIGS. 31A and 31B, a recess is formed in a region to be the cavity 570 of the interlayer insulating film 514i, and a sacrificial layer 514l is embedded in the recess. The sacrificial layer 514l can be formed using, for example, a material that can be formed at a low temperature. A material that can be formed at a low temperature is, for example, silicon germanium (SiGe).

As shown in FIGS. 32A and 32B, an insulating film 561bf to be a film portion 564 (70d) is formed on the interlayer insulating film 514i and the sacrificial layer 514l. The insulating film 561bf can be formed using, for example, silicon oxide (SiO ₂ ). A plurality of holes are provided in the insulating film 561bf, and a conductive material (for example, a metal material) is embedded in the plurality of holes to form connection pillars 561fa and connection pillars 562fa. The connection pillar 561fa is electrically connected to the connection pillar 514k, and the connection pillar 562fa is electrically connected to the connection pillar 514j.

  As shown in FIGS. 33A and 33B, a conductive layer 561f to be the wiring 557 is formed over the insulating film 561bf, the connection pillar 561fa, and the connection pillar 562fa.

  As shown in FIGS. 34A and 34B, a laminated film 550f is formed on the conductive layer 561f.

As shown in FIGS. 35A and 35B, the laminated film 550f is processed into a predetermined shape, and an insulating film 565f to be the insulating layer 565 is formed thereon. The insulating film 565f can be formed using, for example, silicon oxide (SiO ₂ ) or the like.

  As shown in FIGS. 36A and 36B, a part of the insulating film 565f is removed, and the conductive layer 561f is processed into a predetermined shape. Thereby, the wiring 557 is formed. At this time, part of the conductive layer 561f becomes a connection pillar 562fb electrically connected to the connection pillar 562fa. Further, an insulating film 566f to be the insulating layer 566 is formed thereon.

  As shown in FIGS. 37A and 37B, an opening 566p is formed in the insulating film 566f. As a result, the connection pillar 562fb is exposed.

As shown in FIGS. 38A and 38B, a conductive layer 562f to be the wiring 558 is formed on the upper surface. A part of the conductive layer 562f is electrically connected to the connection pillar 562fb.
As shown in FIGS. 39A and 39B, the conductive layer 562f is processed into a predetermined shape. Thereby, the wiring 558 is formed. The wiring 558 is electrically connected to the connection pillar 562fb.

  As shown in FIGS. 40A and 40B, an opening 566o having a predetermined shape is formed in the insulating film 566f. The insulating film 561bf is processed through the opening 566o, and the sacrificial layer 514l is removed through the opening 566o. Thereby, the cavity 570 is formed. The removal of the sacrificial layer 514l can be performed using, for example, a wet etching method.

In the case where the fixing portion 567 is ring-shaped, for example, the space between the edge of the non-cavity portion above the cavity portion 570 and the film portion 564 is filled with an insulating film.
A pressure sensor is formed as described above.

(Fourth embodiment)
The present embodiment relates to a microphone using the pressure sensor of the above embodiment.
FIG. 41 is a schematic cross-sectional view illustrating a microphone according to the fourth embodiment.
The microphone 320 according to the present embodiment includes a printed circuit board 321, a cover 323, and a pressure sensor 310. The printed board 321 includes a circuit such as an amplifier. The cover 323 is provided with an acoustic hole 325. The sound 329 enters the cover 323 through the acoustic hole 325.

  As the pressure sensor 310, any of the pressure sensors described in the embodiment and modifications thereof are used.

The microphone 320 is sensitive to sound pressure. By using the highly sensitive pressure sensor 310, the highly sensitive microphone 320 can be obtained. For example, the pressure sensor 310 is mounted on the printed board 321 and an electric signal line is provided. A cover 323 is provided on the printed circuit board 321 so as to cover the pressure sensor 310.
According to this embodiment, a highly sensitive microphone can be provided.

(Fifth embodiment)
The present embodiment relates to a blood pressure sensor using the pressure sensor of the above embodiment.
FIG. 42A and FIG. 42B are schematic views illustrating a blood pressure sensor according to the fifth embodiment.
FIG. 42A is a schematic plan view illustrating the skin over a human arterial blood vessel. FIG. 42B is a cross-sectional view taken along line H1-H2 in FIG.

  In the present embodiment, the pressure sensor 310 is applied as the blood pressure sensor 330. For the pressure sensor 310, any of the pressure sensors described in connection with the embodiments and modifications thereof are used.

Thereby, highly sensitive pressure detection is possible with a small size pressure sensor. By pressing the pressure sensor 310 against the skin 333 on the arterial blood vessel 331, the blood pressure sensor 330 can continuously measure blood pressure.
According to this embodiment, a highly sensitive blood pressure sensor can be provided.

(Sixth embodiment)
The present embodiment relates to a touch panel using the pressure sensor of the above embodiment.
FIG. 44 is a schematic view illustrating the touch panel according to the sixth embodiment.
In the present embodiment, the pressure sensor 310 is used as the touch panel 340. For the pressure sensor 310, any of the pressure sensors described in connection with the embodiments and modifications thereof are used. In the touch panel 340, the pressure sensor 310 is mounted on at least one of the inside of the display and the outside of the display.

  For example, the touch panel 340 includes a plurality of first wirings 346, a plurality of second wirings 347, a plurality of pressure sensors 310, and a control unit 341.

  In this example, the plurality of first wirings 346 are arranged along the Y-axis direction. Each of the plurality of first wirings 346 extends along the X-axis direction. The plurality of second wirings 347 are arranged along the X-axis direction. Each of the plurality of second wirings 347 extends along the Y-axis direction.

  Each of the plurality of pressure sensors 310 is provided at each intersection of the plurality of first wires 346 and the plurality of second wires 347. One of the pressure sensors 310 is one of the detection elements 310e for detection. Here, the intersection includes a position where the first wiring 346 and the second wiring 347 intersect and a region around the position.

  One end 310a of each of the plurality of pressure sensors 310 is connected to each of the plurality of first wirings 346. The other ends 310b of the plurality of pressure sensors 310 are connected to the plurality of second wirings 347, respectively.

The control unit 341 is connected to the plurality of first wirings 346 and the plurality of second wirings 347.
For example, the control unit 341 includes a first wiring circuit 346d connected to the plurality of first wirings 346, a second wiring circuit 347d connected to the plurality of second wirings 347, and a first wiring circuit 346d. And a control circuit 345 connected to the second wiring circuit 347d.

  The pressure sensor 310 is small and can perform highly sensitive pressure sensing. Therefore, a high-definition touch panel can be realized.

  The pressure sensor according to the embodiment can be applied to various pressure sensor devices such as a pressure sensor or a tire pressure sensor in addition to the above-described application.

  According to the embodiment, a highly sensitive strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel can be provided.

  The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, regarding a specific configuration of each element such as a sensing element, a pressure sensor, a microphone, a blood pressure sensor, and a film part included in the touch panel, a strain sensing element, a first magnetic layer, a second magnetic layer, and an intermediate layer, those skilled in the art Is appropriately included in the scope of the present invention as long as the present invention can be carried out in the same manner and the same effects can be obtained by appropriately selecting from the known ranges.

  Moreover, what combined any two or more elements of each specific example in the technically possible range is also included in the scope of the present invention as long as the gist of the present invention is included.

  In addition, based on the sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel described above as embodiments of the present invention, all sensing elements, pressure sensor, microphone, blood pressure that can be implemented by a person skilled in the art with appropriate design changes. A sensor and a touch panel also belong to the scope of the present invention as long as they include the gist of the present invention.

  In addition, in the category of the idea of the present invention, those skilled in the art can conceive of various changes and modifications, and it is understood that these changes and modifications also belong to the scope of the present invention. .

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 10 ... 1st magnetic layer, 10a ... 1st magnetization fixed layer, 10b ... 2nd magnetization fixed layer, 10c ... Magnetic coupling layer, 10l ... Underlayer, 10m ... Magnetization, 10p ... Pinning layer, 10s ... Laminated body, 20 ... 2nd magnetic layer, 20m ... magnetization, 20p ... first part, 20q ... second part, 21a, 21b, 21d ... magnetic film, 21c, 21e ... nonmagnetic film, 25, 25a, 25x ... functional layer, 26c ... cap Layer 27, magnetic layer, 30 intermediate layer, 35 insulating layer, 36 hard bias layer, 50, 51, 52a to 52g, 53, 54, 55a to 55c, 56 strain detector, 61 first wiring 62 ... second wiring, 70 ... film portion, 70f ... thin film, 70h ... through hole, 70r ... outer edge, 70s ... support portion, 70u ... upper surface, 71 ... substrate, 71h ... hollow portion, 79 ... force, ε ... strain Λ: magnetostriction constant, 110, 116a to 116c, 310, ... pressure sensor, 310a ... one end, 310b ... the other end, 310e ... sensing element, 320 ... microphone, 321 ... printed circuit board, 323 ... cover, 325 ... acoustic hole, 329 ... sound, 330 ... Blood pressure sensor, 331 ... arterial blood vessel, 333 ... skin, 340 ... touch panel, 341 ... control unit, 345 ... control circuit, 346 ... first wiring, 346d ... first wiring circuit, 347 ... second wiring, 347d ... second Wiring circuit, 415 ... antenna, 416 ... electrical wiring, 417 ... transmission circuit, 417a ... converter, 417b ... Manchester encoding unit, 417c ... switching unit, 417d ... timing controller, 417e ... data correction unit, 417f ... synchronizing unit, 417g ... Determination unit, 417h ... Voltage controlled oscillation , 417r: receiving circuit, 418 ... receiving unit, 418a ... storage unit, 418b ... central processing unit, 418d ... electronic device, 430 ... semiconductor circuit unit, 440 ... pressure sensor, 450 ... detection unit, 464 ... membrane unit, 467 ... Fixed portion, 471 ... Base, 512D ... Drain, 512G ... Gate, 512I ... Element isolation insulating layer, 512M ... Semiconductor layer, 512S ... Source, 514a ... Interlayer insulating film, 514b ... Interlayer insulating film, 514c to 514e ... Connection pillar, 514f: Wiring part, 514g ... Wiring part, 514h ... Interlayer insulating film, 514i ... Interlayer insulating film, 514j ... Connection pillar, 514k ... Connection pillar, 514l ... Sacrificial layer, 531 ... Semiconductor substrate, 532 ... Transistor, 550 ... Detection part 550f ... laminated film, 557 ... wiring, 558 ... wiring, 561bf ... insulating film 561f ... conductive layer, 561fa ... connection pillar, 562f ... conductive layer, 562fa ... connection pillar, 562fb ... connection pillar, 564 ... film part, 565 ... insulating layer, 565f ... insulating film, 566 ... insulating layer, 566f ... insulating film, 566O ... opening, 566P ... opening, 567 ... fixing portion, 570 ... cavity, after AA ... annealing, AB ... before annealing, C B _... boron concentration, Dp ... depth, E1 ... first electrode, E2 ... first 2 electrodes, H ... external magnetic field, Int ... strength, L1, L2 ... line, P1-P6 ... point, R ... electric resistance, S01-S04 ... first to fourth samples, Sr1, Sr2 ... sample, ST0 ... no strain State, STc ... Compression state, STt ... Tension state, cs ... Compression stress, ts ... Tension stress, 2θ ... Rotation angle

FIG. 21 is a schematic perspective view illustrating another strain sensing element according to the first embodiment.
As shown in FIG. 21, another strain sensing element 55a according to the present embodiment includes a first electrode E1 (for example, a lower electrode), a base layer 101, a functional layer 25, and a second magnetic material arranged in order. layer 20 (magnetization free layer), an intermediate layer 30, a first magnetization fixing layer 10 a, and the magnetic coupling layer 10c, and a second magnetization fixing layer 10 b, and the pinning layer 10p, and a cap layer 26c, a second Electrode E2 (for example, an upper electrode). The strain sensing element 55a is a top spin valve type.

(Sixth embodiment)
The present embodiment relates to a touch panel using the pressure sensor of the above embodiment.
4 3 is a schematic view illustrating a touch panel according to the sixth embodiment.
In the present embodiment, the pressure sensor 310 is used as the touch panel 340. For the pressure sensor 310, any of the pressure sensors described in connection with the embodiments and modifications thereof are used. In the touch panel 340, the pressure sensor 310 is mounted on at least one of the inside of the display and the outside of the display.

Claims (20)

A strain sensing element provided in the deformable film part,
A non-magnetic layer;
A first magnetic layer;
A first layer provided between the nonmagnetic layer and the first magnetic layer, in contact with the nonmagnetic layer, and comprising at least one of an oxide and a nitride;
A second magnetic layer provided between the first layer and the first magnetic layer;
An intermediate layer provided between the first magnetic layer and the second magnetic layer;
With
A strain sensing element in which at least a part of the second magnetic layer is amorphous and contains boron.   The first layer is made of magnesium, aluminum, silicon, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, silver, hafnium, tantalum, tungsten, The strain sensing element according to claim 1, comprising at least one of an oxide selected from the group consisting of tin, cadmium, and gallium, and at least one nitride selected from the group.   2. The strain sensing element according to claim 1, wherein the first layer includes at least one oxide selected from the group consisting of magnesium, titanium, vanadium, zinc, tin, cadmium, and gallium.   The strain sensing element according to claim 1, wherein the first layer contains magnesium oxide. A strain sensing element provided in the deformable film part,
A non-magnetic layer;
A first magnetic layer;
A first layer provided between the nonmagnetic layer and the first magnetic layer, in contact with the nonmagnetic layer, and comprising at least one element selected from the group consisting of magnesium, silicon, and aluminum;
A second magnetic layer provided between the first layer and the first magnetic layer;
An intermediate layer provided between the first magnetic layer and the second magnetic layer;
With
A strain sensing element in which at least a part of the second magnetic layer is amorphous and contains boron.   The strain sensing element according to claim 1, wherein the first layer has a thickness of 1 nanometer or more.   The strain sensing element according to claim 1, wherein the concentration of boron contained in the second magnetic layer is 5 atomic percent or more and 35 atomic percent or less. The second magnetic layer includes a first portion and a second portion,
The first portion is provided between the second portion and the intermediate layer;
The strain sensing element according to claim 1, wherein a concentration of boron in the first portion is lower than a concentration of boron in the second portion. The second magnetic layer includes a first portion and a second portion,
The first portion is provided between the second portion and the intermediate layer;
The strain sensing element according to claim 1, wherein the first portion has crystallinity. The strain sensing element according to claim 1, wherein the magnetostriction constant of the second magnetic layer is 1 × 10 ⁻⁵ or more.   The strain sensing element according to claim 1, wherein the coercive force of the second magnetic layer is 5 Oersted or less.   The strain sensing element according to claim 1, wherein the area resistance of the first layer is lower than the area resistance of the intermediate layer. The membrane part;
The strain sensing element according to any one of claims 1 to 12,
With pressure sensor.   The pressure sensor according to claim 13, wherein a plurality of the strain sensing elements are provided.   The pressure sensor according to claim 13, wherein at least two of the plurality of strain sensing elements are electrically connected in series.   The pressure sensor according to claim 15, wherein a voltage of 1 V or more and 10 V or less is applied between terminals of the electrically connected strain sensing elements.   The pressure sensor according to claim 15 or 16, wherein the number of the strain detection elements electrically connected in series is 6 or more and 200 or less.   A microphone comprising the pressure sensor according to any one of claims 13 to 17.   A blood pressure sensor comprising the pressure sensor according to any one of claims 13 to 17.   A touch panel comprising the pressure sensor according to claim 13.