JP2017219418A - Heat flux sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To minimize the influence of flux change on the output of a heat flux sensor.SOLUTION: A first conductor part 30a is formed in a first region A1 of an insulation base material 12, and a second conductor part 30b is formed in a second region A2 of the insulation base material 12. Each of the first conductor part 30a and the second conductor part 30b includes a structure having a first thermoelectric member 14 and second thermoelectric member 16 alternately connected in series by a plurality of first conductive patterns 18 and a plurality of second conductive patterns 20. The shape of each of the first conductor part 30a and the second conductor part 30b is spiral when viewed from the thickness direction of the insulation base material 12. When a magnetic flux passing in the thickness direction of the insulation base material 12 uniformly changes in a region R1 surrounded by the first conductor part 30a and a region R2 surrounded by the second conductor part 30b, the first conductor part 30a and the second conductor part 30b are connected in series in the state that the polarities of induced electromotive forces occurring in the first conductor part 30a and the second conductor part 30b, respectively, are reverse.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a heat flux sensor.

  A conventional heat flux sensor has a structure in which first thermoelectric members and second thermoelectric members are alternately connected in series (see, for example, Patent Document 1). When the heat flow passes through the heat flux sensor and a temperature difference occurs between the connection portion on one side and the connection portion on the other side of the first and second thermoelectric members, the heat flux sensor causes the Seebeck effect. A thermoelectromotive force is generated in the first thermoelectric member and the second thermoelectric member. The heat flux sensor outputs a signal corresponding to the thermoelectromotive force.

JP 2009-192431 A

  When a heat flux under a magnetic field environment is measured using a conventional heat flux sensor, an induced electromotive force due to a change in magnetic flux may affect the output of the heat flux sensor. In particular, when the period of magnetic flux change and heat flux change is the same, the output of the heat flux sensor cannot be separated into an induced electromotive force component and a thermoelectromotive force component. For this reason, heat flux cannot be accurately measured under a magnetic field environment.

  An object of this invention is to provide the heat flux sensor which can suppress the influence of the magnetic flux change with respect to the output of a heat flux sensor small in view of the said point.

In order to achieve the above object, a heat flux sensor according to the invention described in claim 1 is:
An insulating substrate (12) having one surface (121) and the other surface (122) on the opposite side;
A plurality of first thermoelectric members (14) arranged in a plurality of first through holes (123) formed in the insulating base material and made of a thermoelectric material;
A plurality of second thermoelectric members (16) that are arranged in a plurality of second through holes (124) formed separately from the first through holes in the insulating base material and are made of a thermoelectric material different from the first thermoelectric members;
A plurality of first conductor patterns (18) arranged on one surface and connecting the first thermoelectric member and the second thermoelectric member;
A plurality of second conductor patterns (20) arranged on the other surface and connecting the first thermoelectric member and the second thermoelectric member;
The first conductor portion (30a) including a structure in which the first thermoelectric member and the second thermoelectric member are alternately connected in series by the plurality of first conductor patterns and the plurality of second conductor patterns in the first region of the insulating base. Is formed,
The second region different from the first region in the insulating base material includes a structure in which the first thermoelectric member and the second thermoelectric member are alternately connected in series by the plurality of first conductor patterns and the plurality of second conductor patterns. A second conductor portion (30b) is formed;
The shape of the first conductor portion viewed from the thickness direction of the insulating base is C-shaped, annular or spiral,
The shape of the second conductor portion viewed from the thickness direction of the insulating base is C-shaped, annular or spiral,
When the magnetic flux passing in the thickness direction of the insulating base material changes uniformly in the region (R1) surrounded by the first conductor portion and the region (R2) surrounded by the second conductor portion, the first conductor portion and The first conductor portion and the second conductor portion are connected in series with the polarity of the induced electromotive force generated in each of the second conductor portions being reversed.

  According to this, since the first conductor part and the second conductor part are connected in series with the polarity of the induced electromotive force generated in each of the first conductor part and the second conductor part being opposite, The induced electromotive forces generated in the first conductor portion and the second conductor portion can be weakened each other. Therefore, the influence of the magnetic flux change on the output of the heat flux sensor can be reduced.

The heat flux sensor in the invention according to claim 3 is:
A first insulating substrate (12a) having one surface (121a) and the other surface (122a) on the opposite side;
A second insulating substrate (12b) laminated in the thickness direction of the first insulating substrate and having one surface (121b) and the other surface (122b) on the opposite side;
A plurality of first thermoelectric members (14) arranged in a plurality of first through holes (123) formed in each of the first and second insulating base materials and made of a thermoelectric material;
A plurality of second insulating layers arranged in a plurality of second through holes (124) formed separately from the first through holes in each of the first and second insulating bases and made of a thermoelectric material different from the first thermoelectric member. A thermoelectric member (16);
A plurality of first conductor patterns (18) arranged on one surface of each of the first and second insulating bases and connecting the first thermoelectric member and the second thermoelectric member;
A plurality of second conductor patterns (20) disposed on the other surfaces of the first and second insulating bases and connecting the first thermoelectric member and the second thermoelectric member;
In the first insulating substrate, the first conductor portion (30c) including a structure in which the first thermoelectric members and the second thermoelectric members are alternately connected in series by the plurality of first conductor patterns and the plurality of second conductor patterns is formed. Has been
In the second insulating substrate, the second conductor portion (30d) including a structure in which the first thermoelectric members and the second thermoelectric members are alternately connected in series by the plurality of first conductor patterns and the plurality of second conductor patterns is formed. Has been
The shape of the first conductor portion viewed from the thickness direction of the first insulating substrate is C-shaped, annular or spiral,
The shape of the second conductor portion viewed from the thickness direction of the second insulating substrate is C-shaped, annular or spiral,
When the magnetic flux passing in the thickness direction of the first and second insulating base materials changes uniformly in the region (R3) surrounded by the first conductor portion and the region (R4) surrounded by the second conductor portion, The first conductor portion and the second conductor portion are connected in series with the polarities of the induced electromotive forces generated in the first conductor portion and the second conductor portion in opposite directions.

  According to this, since the first conductor part and the second conductor part are connected in series with the polarity of the induced electromotive force generated in each of the first conductor part and the second conductor part being opposite, The induced electromotive forces generated in the first conductor portion and the second conductor portion can be weakened each other. Therefore, the influence of the magnetic flux change on the output of the heat flux sensor can be reduced.

The heat flux sensor in the invention according to claim 5 is:
An insulating substrate (12) having one surface (121) and the other surface (122) on the opposite side;
A plurality of first thermoelectric members (14) arranged in a plurality of first through holes (123) formed in the insulating base material and made of a thermoelectric material;
A plurality of second thermoelectric members (16) that are arranged in a plurality of second through holes (124) formed separately from the first through holes in the insulating base material and are made of a thermoelectric material different from the first thermoelectric members;
A plurality of first conductor patterns (18) arranged on one surface and connecting the first thermoelectric member and the second thermoelectric member;
A plurality of second conductor patterns (20) arranged on the other surface and connecting the first thermoelectric member and the second thermoelectric member;
A conductor portion (30) including a structure in which the first thermoelectric member and the second thermoelectric member are alternately connected in series by the plurality of first conductor patterns and the plurality of second conductor patterns is formed,
Furthermore, in the thickness direction of the insulating base material, it is laminated on the insulating base material via the insulating layer (22), and includes a metal wiring pattern (50) electrically connected to the conductor portion,
The shape of the conductor portion viewed from the thickness direction of the insulating base is C-shaped, annular or spiral,
The shape of the metal wiring pattern seen from the thickness direction of the insulating base is C-shaped or spiral,
When the magnetic flux passing in the thickness direction of the insulating base material changes uniformly in the region (R5) surrounded by the conductor portion and the region (R6) surrounded by the metal wiring pattern, each of the conductor portion and the metal wiring pattern The conductor part and the metal wiring pattern are connected in series in the state where the polarity of the induced electromotive force generated in the above is reversed.

  According to this, since the conductor part and the metal wiring pattern are connected in series with the polarity of the induced electromotive force generated in each of the conductor part and the metal wiring pattern being reversed, the conductor part and the metal wiring pattern Inductive electromotive force generated in each can be weakened. Therefore, the influence of the magnetic flux change on the output of the heat flux sensor can be reduced.

  In addition, the code | symbol in the bracket | parenthesis of each means described in this column and the claim is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

It is a top view of the heat flux sensor in a 1st embodiment. It is sectional drawing of the heat flux sensor in the II-II line | wire in FIG. It is a disassembled perspective view of the heat flux sensor of FIG. It is a top view of the heat flux sensor in 2nd Embodiment. It is sectional drawing of the heat flux sensor in the VV line | wire in FIG. It is a top view of the 1st conductor part in FIG. It is a disassembled perspective view of the heat flux sensor of FIG. It is a top view of the heat flux sensor in a 3rd embodiment. It is sectional drawing of the heat flux sensor in the IX-IX line in FIG. It is a top view of the conductor part in FIG. It is a disassembled perspective view of the heat flux sensor of FIG. It is a schematic diagram which shows the shape of the 1st conductor part and 2nd conductor part in other embodiment. It is a schematic diagram which shows the shape of the 1st conductor part and 2nd conductor part in other embodiment. It is a schematic diagram which shows the shape of the 1st conductor part and 2nd conductor part in other embodiment. It is a schematic diagram which shows the shape of the 1st conductor part and 2nd conductor part in other embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, parts that are the same or equivalent to each other will be described with the same reference numerals.

(First embodiment)
As shown in FIGS. 1 to 3, the heat flux sensor 10 of the present embodiment includes an insulating substrate 12, a plurality of first thermoelectric members 14, a plurality of second thermoelectric members 16, and a plurality of first conductor patterns. 18, a plurality of second conductor patterns 20, a first protection member 22, and a second protection member 24. In FIG. 1, the first protective member 22 is omitted. In FIG. 3, the first protection member 22 and the second protection member 24 are omitted.

  As shown in FIGS. 2 and 3, the insulating base material 12 is in the form of a film and has one surface 121 and the other surface 122 on the opposite side. The insulating substrate 12 is made of a flexible resin material such as a thermoplastic resin. The insulating base 12 is formed with a plurality of first through holes 123 penetrating the insulating base 12 from one surface 121 to the other surface 122. Similarly, the insulating base material 12 has through holes formed separately from the first through holes 123, and has a plurality of second through holes 124 that penetrate from the one surface 121 to the other surface 122 and penetrate the insulating base material 12. Is formed. The first through holes 123 and the second through holes 124 are alternately arranged.

  Each of the plurality of first thermoelectric members 14 is disposed in each of the plurality of first through holes 123. Each of the plurality of second thermoelectric members 16 is disposed in each of the plurality of second through holes 124. The first thermoelectric member 14 and the second thermoelectric member 16 are made of different thermoelectric materials. Examples of thermoelectric materials include metal materials and semiconductor materials.

  The plurality of first conductor patterns 18 are conductor layers arranged on one surface 121 of the insulating base material 12. The plurality of first conductor patterns 18 are made of a metal material. One first conductor pattern 18 connects the first thermoelectric member 14 and the second thermoelectric member 16 that are adjacent to each other. Therefore, the first conductor pattern 18 constitutes a connection portion between the first thermoelectric member 14 and the second thermoelectric member 16 on the one surface 121 side.

  The plurality of second conductor patterns 20 are conductor layers disposed on the other surface 122 of the insulating base 12. The plurality of second conductor patterns 20 are made of a metal material. One second conductor pattern 20 connects the first thermoelectric member 14 and the second thermoelectric member 16 that are adjacent to each other. Therefore, the second conductor pattern 20 constitutes a connection portion between the first thermoelectric member 14 and the second thermoelectric member 16 on the other surface 122 side.

  The plurality of first conductor patterns 18 and the plurality of second conductor patterns 20 are formed so that a conductor portion 30 including a structure in which the first thermoelectric members 14 and the second thermoelectric members 16 are alternately connected in series is formed. The first thermoelectric member 14 and the second thermoelectric member 16 are connected. That is, the plurality of first conductor patterns 18 and the plurality of second conductor patterns 20 form a conductor portion 30 including a structure in which the first thermoelectric members 14 and the second thermoelectric members 16 are alternately connected in series.

  As shown in FIG. 2, the first protective member 22 is laminated on the one surface 121 side of the insulating base material 12. The first protective member 22 is in the form of a film and has one surface 221 and the other surface 222 on the opposite side. The surface of the first protective member 22 on the insulating base material 12 side is one surface 221, and the opposite surface is the other surface 222. The first protective member 22 covers a conductor layer such as the first conductor pattern 18 disposed on the one surface 121 of the insulating substrate 12.

  The second protective member 24 is laminated on the other surface 122 side of the insulating base material 12. The 2nd protection member 24 is a film form, Comprising: It has the one surface 241 and the other surface 242 of the other side. The surface of the second protective member 24 on the insulating base 12 side is one surface 241, and the opposite surface is the other surface 242. The second protective member 24 covers a conductor layer such as the second conductor pattern 20 disposed on the other surface 122 of the insulating substrate 12. The first protective member 11 and the second protective member 24 are made of a flexible resin material such as a thermoplastic resin.

  As shown in FIG. 1, the conductor portion 30 includes a first conductor portion 30 a formed in the first region A1 of the insulating base 12 and a second region A2 that is different from the first region A1 in the insulating base 12. The second conductor portion 30b is formed.

  Each shape of the 1st conductor part 30a and the 2nd conductor part 30b seen from the thickness direction of the insulating base material 12 is spiral. That is, when each of the first conductor portion 30a and the second conductor portion 30 is projected onto one surface 121 of the insulating base material 12 in the thickness direction of the insulating base material 12, the projected first conductor portion 30a and second conductor portion are projected. Each shape of 30b is spiral. In the present specification, the spiral shape means a shape wound more than one turn (that is, one turn). In the example of FIG. 1, each of the first conductor portion 30a and the second conductor portion 30b has a shape wound more than two rounds.

  As shown in FIG. 1, the winding direction from the outside of the first conductor portion 30a toward the center side is the right direction, and the winding direction from the outside of the second conductor portion 30b toward the center side is also the right direction. Thus, in this embodiment, when it sees from the thickness direction and the same direction of the insulation base material 12, the winding direction which goes to the center side from the outer side of the 1st conductor part 30a, and the center from the outer side of the 2nd conductor part 30b The winding direction toward the side is the same. Furthermore, in this embodiment, each shape of the 1st conductor part 30a and the 2nd conductor part 30b seen from the thickness direction of the insulating base material 12 has a point-symmetrical relationship.

  Further, the wiring portion 32 and the two terminal portions 34 and 36 are formed on the one surface 121 of the insulating base 12. The wiring portion 32 and the two terminal portions 34 and 36 are conductor layers made of the same material as the first conductor pattern 18. The wiring part 32 electrically connects the center side end part 301a of the first conductor part 30a and the center side end part 301b of the second conductor part 30b. Thereby, the conductor part 30 has a structure in which the first conductor part 30a and the second conductor part 30b are connected in series. The terminal portion 34 is formed at the outer peripheral side end of the first conductor portion 30a. The terminal portion 36 is formed at the outer peripheral side end of the second conductor portion 30b. The two terminal portions 34 and 36 are connected to the outside of the heat flux sensor 10, for example, a calculation unit (not shown). Thereby, the sensor signal from the heat flux sensor 10 is output toward the calculation unit. The calculation unit calculates the heat flux from the sensor signal.

  The heat flux sensor 10 having the above-described configuration includes, for example, the second protective member 24 in which the second conductor pattern 20 is formed on one surface 241 and the first and second thermoelectric members 14 in the first and second through holes 123 and 124. , 16 and the laminated body in which the first protective member 22 having the first conductor pattern 18 formed on one surface 221 is laminated by heating and pressing. The heat flux sensor 10 may be manufactured by other manufacturing methods.

  In the heat flux sensor 10 of this embodiment, the heat flux passes through the insulating base material 12 in the thickness direction of the insulating base material 12, and there is a temperature difference between the first conductor pattern 18 and the second conductor pattern 20. When it occurs, a thermoelectromotive force is generated in the first thermoelectric member 14 and the second thermoelectric member 16 due to the Seebeck effect. The conductor portion 30 includes the first thermoelectric member 14 and the second thermoelectric member 16 as a set, and a plurality of sets of the first thermoelectric member 14 and the second thermoelectric member 16 are connected in series. For this reason, the conductor part 30 outputs the total thermoelectromotive force which is the sum total of the thermoelectromotive force of the 1st thermoelectric member 14 of each group, and the 2nd thermoelectric member 16, for example, a voltage as a sensor signal. Therefore, the heat flux can be detected from the sensor signal output from the conductor part 30.

  Furthermore, in the heat flux sensor 10 of the present embodiment, as shown in FIG. 1, the first conductor portion 30a and the second conductor portion 30b have a spiral shape, and the first conductor portion 30a and the second conductor portion 30b. Each winding direction of 30b is the same.

  Therefore, when the magnetic flux passing through each of the region R1 surrounded by the outermost peripheral portion of the first conductor portion 30a and the region R2 surrounded by the outermost peripheral portion of the second conductor portion 30b changes uniformly, the first conductor portion An induced electromotive force is generated in each of 30a and the second conductor portion 30b. At this time, the direction (that is, polarity) of the induced electromotive force in the direction from the outside of the first conductor portion 30a toward the center side, and the direction of the induced electromotive force in the direction from the outside of the second conductor portion 30b toward the center side. (That is, polarity) is the same direction. For example, when the magnetic flux directed toward the front side in FIG. 1 increases, the induced electromotive force generated in the first conductor portion 30a is positive at the center side end portion 301a and negative at the terminal portion 34. Similarly, in the induced electromotive force generated in the second conductor portion 30b, the center side end portion 301b is positive and the terminal portion 36 is negative.

  And in this embodiment, the center side edge part 301a of the 1st conductor part 30a and the center side edge part 301b of the 2nd conductor part 30b are connected. Thereby, the first conductor portion 30a and the second conductor portion 30b are connected in series in the state where the polarities of the induced electromotive force generated in the first conductor portion 30a and the second conductor portion 30b are opposite to each other. . That is, the first conductor portion 30a and the second conductor portion 30b are reversely connected. For this reason, the induced electromotive force which generate | occur | produces in each of the 1st conductor part 30a and the 2nd conductor part 30b can be mutually weakened.

  In particular, in this embodiment, each shape of the 1st conductor part 30a and the 2nd conductor part 30b seen from the thickness direction of the insulating base material 12 has a point-symmetrical relationship. For this reason, the induced electromotive force which generate | occur | produces in each of the 1st conductor part 30a and the 2nd conductor part 30b can be negated.

  Therefore, according to this embodiment, the influence of the magnetic flux change on the output of the heat flux sensor 10 can be reduced. Therefore, by using the heat flux sensor 10 of the present embodiment, the heat flux can be accurately measured even under a magnetic field environment.

(Second Embodiment)
As shown in FIGS. 4-7, the heat flux sensor 10 of this embodiment has the structure where two sensor parts 10a and 10b were laminated | stacked.

  As shown in FIG. 5, the heat flux sensor 10 includes a first sensor unit 10a and a second sensor unit 10b. The basic structure (cross-sectional structure) of the first sensor unit 10a and the basic structure (cross-sectional structure) of the second sensor unit 10b are the same as those of the heat flux sensor 10 of the first embodiment. That is, each of the first sensor unit 10a and the second sensor unit 10b includes an insulating substrate 12, a plurality of first thermoelectric members 14, a plurality of second thermoelectric members 16, and a plurality of first conductor patterns 18. A plurality of second conductor patterns 20, a first protection member 22, and a second protection member 24 are provided. The plurality of first conductor patterns 18 and the plurality of second conductor patterns 20 form a conductor portion 30 including a structure in which the first thermoelectric members 14 and the second thermoelectric members 16 are alternately connected in series.

  The insulating substrate 12 of the first sensor unit 10a is the first insulating substrate 12a. The first insulating substrate 12a has one surface 121a and the other surface 122a on the opposite side. The insulating base 12 of the second sensor unit 10b is the second insulating base 12b. The second insulating substrate 12b has one surface 121b and the other surface 122b on the opposite side. Therefore, the heat flux sensor 10 of the present embodiment includes the first insulating base 12a and the second insulating base 12b stacked in the thickness direction of the first insulating base 12a.

  Moreover, the conductor part 30 of the 1st sensor part 10a is the 1st conductor part 30c, and the conductor part 30 of the 2nd sensor part 10b is the 2nd conductor part 30d. Therefore, in the heat flux sensor 10 of the present embodiment, the first thermoelectric member 14 and the second thermoelectric member 16 are alternately arranged by the plurality of first conductor patterns 18 and the plurality of second conductor patterns 20 in the first insulating substrate 12a. A first conductor portion 30c including a structure connected in series to each other is formed. In the second insulating substrate 12b, a second conductor portion including a structure in which the first thermoelectric members 14 and the second thermoelectric members 16 are alternately connected in series by the plurality of first conductor patterns 18 and the plurality of second conductor patterns 20. 30d is formed.

  As shown in FIG. 6, the shape of the 1st conductor part 30c seen from the thickness direction of the 1st insulating base material 12a is a spiral shape. In the present embodiment, the winding direction from the outer side of the first conductor portion 30c toward the center side is the left direction. As shown in FIG. 4, the shape of the 2nd conductor part 30d seen from the thickness direction of the 2nd insulating base material 12b is a spiral shape. In the present embodiment, the winding direction from the outside to the center side of the second conductor portion 30d is the left direction. Thus, the winding direction of the first conductor part 30c and the winding direction of the second conductor part 30d when viewed from the thickness direction and the same direction of the first and second insulating bases 12a and 12b are the same. .

  Furthermore, in this embodiment, each shape and magnitude | size of the 1st conductor part 30c seen from the thickness direction of the insulating base material 12 and the 2nd conductor part 30d are the same.

  As shown in FIG. 7, the second conductor portion 30 d is arranged in the thickness direction of the first insulating substrate 12 a with respect to the first conductor portion 30 c via the insulating layer 60. The insulating layer 60 includes the first protection member 22 of the first sensor unit 10a and the second protection member 24 of the second sensor unit 10b (see FIG. 5). In the insulating layer 60, a connection member 62 that connects the first conductor portion 30c and the second conductor portion 30d is formed. The connecting member 62 is disposed inside a through hole formed in the insulating layer 60. By this connection member 62, the center side end portion 301c of the first conductor portion 30c and the center side end portion 301d of the second conductor portion 30d are electrically connected.

  Moreover, the terminal part 34 is formed in the outer peripheral side edge part of the 1st conductor part 30c. The terminal portion 34 is formed on the one surface 121a of the first insulating base material 12a. A terminal portion 36 is formed at the outer peripheral side end of the second conductor portion 30d. The terminal portion 36 is formed on the one surface 121b of the second insulating substrate 12b.

  The heat flux sensor 10 having the above-described configuration includes, for example, the first protection member 24 of the first sensor unit 10a in which the second conductor pattern 20 is formed on the one surface 241 and the first and second through holes 123 and 124. The first insulating base material 12a on which the second thermoelectric members 14 and 16 are disposed, the first protective member 22 of the first sensor unit 10a on which the first conductor pattern 18 is formed on one surface 221, and the second on one surface 241. A second insulating base member in which the first and second thermoelectric members 14 and 16 are disposed in the second protective member 24 of the second sensor unit 10b on which the conductor pattern 20 is formed, and the first and second through holes 123 and 124. It is manufactured by heating and pressing a laminated body in which 12b and the first protective member 22 of the second sensor portion 10b having the first conductor pattern 18 formed on one surface 221 are laminated. The heat flux sensor 10 may be manufactured by other manufacturing methods.

  As described above, the basic structure of the heat flux sensor 10 of the present embodiment is the same as that of the heat flux sensor 10 of the first embodiment. For this reason, the heat flux sensor 10 of this embodiment outputs the thermoelectromotive force according to a heat flux, for example, a voltage, as a sensor signal.

  Furthermore, in the heat flux sensor 10 of this embodiment, each shape of the first conductor portion 30c and the second conductor portion 30d is spiral, and each winding direction of the first conductor portion 30c and the second conductor portion 30d is The same.

  Therefore, the magnetic flux passing through each of the region R3 surrounded by the outermost peripheral portion of the first conductor portion 30c shown in FIG. 6 and the region R4 surrounded by the outermost peripheral portion of the second conductor portion 30d shown in FIG. When changing, an induced electromotive force is generated in each of the first conductor portion 30c and the second conductor portion 30d. At this time, the direction (that is, polarity) of the induced electromotive force in the direction from the outside of the first conductor portion 30c toward the center side, and the direction of the induced electromotive force in the direction from the outside of the second conductor portion 30d toward the center side. (That is, polarity) is in the same direction. For example, when the magnetic flux in the direction toward the front side in FIG. 6 increases, the induced electromotive force generated in the first conductor portion 30c is positive at the center-side end portion 301c and negative at the terminal portion 34. When the magnetic flux directed toward the front side in FIG. 4 increases, the induced electromotive force generated in the second conductor portion 30d is positive at the center side end portion 301d and negative at the terminal portion 36.

  In the present embodiment, the center side end portion 301c of the first conductor portion 30c and the center side end portion 301d of the second conductor portion 30d are connected. As a result, the first conductor portion 30c and the second conductor portion 30d are connected in series with the polarities of the induced electromotive forces generated in the first conductor portion 30c and the second conductor portion 30d in opposite directions. . That is, the first conductor portion 30c and the second conductor portion 30d are reversely connected. For this reason, the induced electromotive force generated in each of the first conductor portion 30c and the second conductor portion 30d can be weakened.

  In particular, in the present embodiment, the first conductor portion 30c and the second conductor portion 30d have the same shape and size as viewed from the thickness direction of the insulating base 12. For this reason, the induced electromotive force which generate | occur | produces in each of the 1st conductor part 30c and the 2nd conductor part 30d can be negated.

  Therefore, according to this embodiment, the influence of the magnetic flux change on the output of the heat flux sensor 10 can be reduced. Therefore, by using the heat flux sensor 10 of the present embodiment, the heat flux can be accurately measured even under a magnetic field environment.

  In the present embodiment, the first conductor portion 30c and the second conductor portion 30d are connected in series with the polarities of the thermoelectromotive forces generated in the first conductor portion 30c and the second conductor portion 30d in the same direction. It is connected. For this reason, according to the heat flux sensor 10 of this embodiment, compared with the case where the heat flux sensor 10 is configured by only one of the first sensor unit 10a and the second sensor unit 10b, the connected first thermoelectric sensor. The series number of the member 14 and the 2nd thermoelectric member 16 increases. Thereby, since a thermoelectromotive force increases, the measurement accuracy of a heat flux can be improved.

(Third embodiment)
As shown in FIGS. 8 to 11, the heat flux sensor 10 of this embodiment includes a conductor portion 30 and a metal wiring pattern 50.

  As shown in FIG. 9, the basic structure (cross-sectional structure) of the heat flux sensor 10 of this embodiment is the same as that of the heat flux sensor 10 of the first embodiment. That is, the heat flux sensor 10 includes an insulating substrate 12, a plurality of first thermoelectric members 14, a plurality of second thermoelectric members 16, a plurality of first conductor patterns 18, and a plurality of second conductor patterns 20. A first protective member 22 and a second protective member 24 are provided. The plurality of first conductor patterns 18 and the plurality of second conductor patterns 20 form a conductor portion 30 including a structure in which the first thermoelectric members 14 and the second thermoelectric members 16 are alternately connected in series.

  As shown in FIG. 10, the shape of the conductor part 30 seen from the thickness direction of the insulating base material 12 is spiral. In the present embodiment, the winding direction from the outside of the conductor portion 30 toward the center side is the left direction.

  As shown in FIG. 9, the metal wiring pattern 50 is disposed on the other surface 222 of the first protective member 22. A third protective member 52 is laminated on the other surface 222 side of the first protective member 22. The third protective member 52 covers the metal wiring pattern 50. The 3rd protection member 52 is film shape, Comprising: It has the one surface 521 and the other surface 522 on the opposite side. The surface of the third protective member 52 on the insulating base material 12 side is one surface 521, and the opposite surface is the other surface 522. The third protective member 52 is made of a flexible resin material such as a thermoplastic resin.

  As shown in FIG. 8, the metal wiring pattern 50 is spiral on the other surface 222 of the first protective member 22. Therefore, the shape of the metal wiring pattern 50 viewed from the thickness direction of the insulating base 12 is spiral. In the present embodiment, the winding direction from the outside of the metal wiring pattern 50 toward the center side is the left direction. Thus, the winding direction of the conductor part 30 and the winding direction of the metal wiring pattern 50 when viewed from the thickness direction and the same direction of the insulating base 12 are the same.

  Furthermore, in this embodiment, each shape of the conductor part 30 and the metal wiring pattern 50 seen from the thickness direction of the insulating base material 12 is the same. The same shape means that the number of turns and the length of the spiral shape are the same.

  As shown in FIG. 11, the metal wiring pattern 50 is laminated in the thickness direction of the insulating base 12 with respect to the insulating base 12 on which the conductor portion 30 is formed via the first protective member 22. Yes. In the present embodiment, the first protective member 22 constitutes an insulating layer. The metal wiring pattern 50 is disposed so as to overlap the conductor portion 30 in the thickness direction of the insulating base 12 over the entire range from the center side end portion to the outer peripheral side end portion.

  As shown in FIG. 11, a connection member 54 that connects the conductor portion 30 and the metal wiring pattern 50 is formed on the first protection member 22. The connection member 54 is disposed inside a through hole formed in the first protection member 22. The connecting member 54 electrically connects the center side end portion 301 of the conductor portion 30 and the center side end portion 501 of the metal wiring pattern 50.

  In addition, a terminal portion 34 is formed at the outer peripheral side end of the conductor portion 30. The terminal portion 34 is formed on the one surface 121 of the insulating base material 12. A terminal portion 36 is formed at the outer peripheral end of the metal wiring pattern 50. The terminal portion 36 is formed on the other surface 222 of the first protective member 22.

  The heat flux sensor 10 having the above-described configuration includes, for example, the second protective member 24 in which the second conductor pattern 20 is formed on one surface 241 and the first and second thermoelectric members 14 in the first and second through holes 123 and 124. , 16 are laminated, the first protective member 22 having the first conductor pattern 18 formed on one surface 221, and the third protective member 52 having the metal wiring pattern 50 formed on one surface 521. The laminated body is manufactured by heating and pressing. The heat flux sensor 10 may be manufactured by other manufacturing methods.

  As described above, the basic structure of the heat flux sensor 10 of the present embodiment is the same as that of the heat flux sensor 10 of the first embodiment. For this reason, the heat flux sensor 10 of this embodiment outputs the thermoelectromotive force according to a heat flux, for example, a voltage, as a sensor signal.

  Furthermore, in the heat flux sensor 10 of this embodiment, each shape of the conductor part 30 and the metal wiring pattern 50 is spiral, and each winding direction of the conductor part 30 and the metal wiring pattern 50 is the same.

  Therefore, the magnetic flux passing through each of the region R5 surrounded by the outermost peripheral portion of the conductor portion 30 shown in FIG. 10 and the region R6 surrounded by the outermost peripheral portion of the metal wiring pattern 50 shown in FIG. Then, an induced electromotive force is generated in each of the conductor part 30 and the metal wiring pattern 50. At this time, the direction (that is, polarity) of the induced electromotive force in the direction from the outside of the conductor portion 30 toward the center side, and the direction of the induced electromotive force in the direction from the outside of the metal wiring pattern 50 toward the center side (that is, Polarity) is the same direction. For example, when the magnetic flux directed toward the front side of FIG. 10 increases, the induced electromotive force generated in the conductor portion 30 is positive at the center side end portion 301 and negative at the terminal portion 34. When the magnetic flux in the direction toward the front side in FIG. 8 increases, the induced electromotive force generated in the metal wiring pattern 50 is positive at the center end 501 and negative at the terminal portion 36.

  In the present embodiment, the center side end portion 301 of the conductor portion 30 and the center side end portion 501 of the metal wiring pattern 50 are connected. Thereby, the conductor part 30 and the metal wiring pattern 50 are connected in series in a state where the polarities of the induced electromotive forces generated in the conductor part 30 and the metal wiring pattern 50 are opposite to each other. That is, the conductor part 30 and the metal wiring pattern 50 are reversely connected. For this reason, the induced electromotive force generated in each of the conductor part 30 and the metal wiring pattern 50 can be weakened.

  Furthermore, in this embodiment, each shape of the conductor part 30 and the metal wiring pattern 50 seen from the thickness direction of the insulating base material 12 is the same. For this reason, the induced electromotive force which generate | occur | produces in each of the conductor part 30 and the metal wiring pattern 50 can be made smaller.

  Therefore, according to this embodiment, the influence of the magnetic flux change on the output of the heat flux sensor 10 can be reduced. Therefore, by using the heat flux sensor 10 of the present embodiment, the heat flux can be accurately measured even under a magnetic field environment.

(Other embodiments)
(1) In 1st Embodiment, although each shape of the 1st conductor part 30a and the 2nd conductor part 30b became a point-symmetrical relationship, it is not limited to this.

  As shown in FIG. 12, if the winding direction of the first conductor part 30a and the winding direction of the second conductor part 30b are the same when viewed from the thickness direction and the same direction of the insulating base 12, the first conductor Each shape of the part 30a and the second conductor part 30b may not be point-symmetric. Even in this case, the center side end portion 301a of the first conductor portion 30a may be connected to the center side end portion 301b of the second conductor portion 30b. Thereby, the first conductor portion 30a and the second conductor portion 30b are connected in series in the state where the polarities of the induced electromotive force generated in the first conductor portion 30a and the second conductor portion 30b are opposite to each other. It becomes composition.

  In addition, in FIG. 12, the shape of the 1st conductor part 30a and the 2nd conductor part 30b when the 1st conductor part 30a and the 2nd conductor part 30b are projected on the same plane in the thickness direction of an insulation base material is shown typically. Show. Although FIG. 12 is not a cross-sectional view, the first conductor portion 30a and the second conductor portion 30b are hatched for easy viewing. The same applies to FIGS. 13 and 15 described later.

  In the first embodiment, the winding direction of the first conductor portion 30a and the winding direction of the second conductor portion 30b are the same. However, as shown in FIG. The winding direction of the two conductor portions 30b may be different. In this case, the center side end portion 301a of the first conductor portion 30a and the outer peripheral side end portion 302b of the second conductor portion 30b are electrically connected. Thereby, the first conductor portion 30a and the second conductor portion 30b are connected in series in the state where the polarities of the induced electromotive force generated in the first conductor portion 30a and the second conductor portion 30b are opposite to each other. It becomes composition.

  However, from the viewpoint of easy connection between the first conductor portion 30a and the second conductor portion 30b, the winding direction of the first conductor portion 30a and the winding direction of the second conductor portion 30b are preferably the same. In this case, as shown in FIGS. 1 and 12, the center side end 301a of the first conductor portion 30a and the center side end 301b of the second conductor portion 30b may be connected, and the connection distance between the two is shortened. Because it can.

  Moreover, in 1st Embodiment, although each shape of the 1st conductor part 30a and the 2nd conductor part 30b seen from the thickness direction of the insulating base material 12 was spiral shape, it is not limited to this.

  As shown in FIG. 14, each shape of the first conductor portion 30a and the second conductor portion 30b may be a closed ring shape. As for the 1st conductor part 30a, the terminal part 34 and the wiring part 32 overlap and are arrange | positioned in the thickness direction of the insulating base material 12. As shown in FIG. For this reason, the shape of the 1st conductor part 30a seen from the thickness direction of the insulating base material 12 becomes a closed annular shape. Similarly, in the second conductor portion 30 b, the terminal portion 36 and the wiring portion 32 are disposed so as to overlap in the thickness direction of the insulating base material 12. For this reason, the shape of the 1st conductor part 30b seen from the thickness direction of the insulating base material 12 becomes a closed annular shape.

  As shown in FIG. 15, each of the first conductor portion 30 a and the second conductor portion 30 b may have a C shape having an open portion. The conductor portion having a C shape means a shape in which an interval L1 between conductor portions in an open portion is smaller than a maximum value L2 of an interval between conductor portions in a portion surrounding a certain region.

  Moreover, each shape of the 1st conductor part 30a and the 2nd conductor part 30b does not need to correspond in any one of spiral shape, cyclic | annular form, and C-shape. That is, the first conductor portion 30a may be spiral, annular, or C-shaped. The second conductor portion 30b may be spiral, annular, or C-shaped.

  (2) In the second embodiment, the shapes and sizes of the first conductor portion 30c and the second conductor portion 30d viewed from the thickness direction of the insulating base material 12 are the same, but may be different. . For example, the shape of the first conductor portion 30c may be the shape of the first conductor portion 30a shown in FIG. 12, and the shape of the second conductor portion 30d may be the shape of the second conductor portion 30b shown in FIG.

  In the second embodiment, the winding direction of the first conductor portion 30c and the winding direction of the second conductor portion 30d are the same, but may be different. Even in this case, the first conductor part 30c and the second conductor part 30d are connected in series with the polarities of the induced electromotive forces generated in the first conductor part 30c and the second conductor part 30d in opposite directions. It only has to be connected. For example, the shape of the first conductor portion 30c may be the shape of the first conductor portion 30a shown in FIG. 13, and the shape of the second conductor portion 30d may be the shape of the second conductor portion 30b shown in FIG.

  However, from the viewpoint of easy connection between the first conductor portion 30c and the second conductor portion 30d, the winding direction of the first conductor portion 30c and the winding direction of the second conductor portion 30d are preferably the same. In this case, as shown in FIG. 7, the center side end portion 301c of the first conductor portion 30c and the center side end portion 301d of the second conductor portion 30d may be connected, and the connection distance between them can be shortened. is there.

  Moreover, in 2nd Embodiment, although each shape of the 1st conductor part 30c and the 2nd conductor part 30d seen from the thickness direction of the insulating base material 12 was spiral shape, it is not limited to this.

  Each shape of the first conductor portion 30c and the second conductor portion 30d may be a closed ring shape. For example, the shape of the first conductor portion 30c may be the shape of the first conductor portion 30a shown in FIG. 14, and the shape of the second conductor portion 30d may be the shape of the second conductor portion 30b shown in FIG.

  In addition, each shape of the first conductor portion 30c and the second conductor portion 30d may be a C shape having an open portion. For example, the shape of the first conductor portion 30c may be the shape of the first conductor portion 30a shown in FIG. 15, and the shape of the second conductor portion 30d may be the shape of the second conductor portion 30b shown in FIG. Moreover, each shape of the 1st conductor part 30c and the 2nd conductor part 30d does not need to correspond by any one of spiral shape, cyclic | annular form, and C shape. That is, the first conductor portion 30c may be spiral, annular, or C-shaped. The second conductor portion 30d may be spiral, annular, or C-shaped.

  (3) In 3rd Embodiment, although each shape of the conductor part 30 and the metal wiring pattern 50 seen from the thickness direction of the insulating base material 12 was the same, you may differ. For example, the shape of the conductor portion 30 may be the shape of the first conductor portion 30a shown in FIG. 12, and the shape of the metal wiring pattern 50 may be the shape of the second conductor portion 30b shown in FIG.

  Moreover, in 3rd Embodiment, although the winding direction of the conductor part 30 and the winding direction of the metal wiring pattern 50 were the same, you may differ. Even in this case, it is only necessary that the conductor 30 and the metal wiring pattern 50 are connected in series in the state where the polarities of the induced electromotive force generated in the conductor 30 and the metal wiring pattern 50 are opposite to each other. . For example, the shape of the conductor portion 30 may be the shape of the first conductor portion 30a shown in FIG. 13, and the shape of the metal wiring pattern 50 may be the shape of the second conductor portion 30b shown in FIG.

  However, from the viewpoint of easy connection between the conductor part 30 and the metal wiring pattern 50, the winding direction of the conductor part 30 and the winding direction of the metal wiring pattern 50 are preferably the same. In this case, as shown in FIG. 11, it is only necessary to connect the center side end portion 301 of the conductor portion 30 and the center side end portion 501 of the metal wiring pattern 50, and the connection distance between them can be shortened.

  Moreover, in 3rd Embodiment, although each shape of the conductor part 30 and the metal wiring pattern 50 seen from the thickness direction of the insulating base material 12 was spiral shape, it is not limited to this.

  The shape of the conductor part 30 may be a closed ring shape. For example, the shape of the conductor portion 30 may be the shape of the first conductor portion 30a shown in FIG. In addition, the shape of each of the conductor portion 30 and the metal wiring pattern 50 may be a C shape having an open portion. For example, the shape of the conductor portion 30 may be the shape of the first conductor portion 30a shown in FIG. 15, and the shape of the metal wiring pattern 50 may be the shape of the second conductor portion 30b shown in FIG. Further, the shapes of the conductor portion 30 and the metal wiring pattern 50 do not have to match. That is, the shape of the conductor part 30 may be any of a spiral shape, an annular shape, and a C shape. The shape of the metal wiring pattern 50 may be either a spiral shape or a C shape.

  (4) The present invention is not limited to the above-described embodiment, and can be appropriately changed within the scope described in the claims, and includes various modifications and modifications within the equivalent range. Further, the above embodiments are not irrelevant to each other, and can be combined as appropriate unless the combination is clearly impossible. In each of the above-described embodiments, it is needless to say that elements constituting the embodiment are not necessarily essential unless explicitly stated as essential and clearly considered essential in principle. Yes. Further, in each of the above embodiments, when numerical values such as the number, numerical value, quantity, range, etc. of the constituent elements of the embodiment are mentioned, it is clearly limited to a specific number when clearly indicated as essential and in principle. The number is not limited to the specific number except for the case. In each of the above embodiments, when referring to the material, shape, positional relationship, etc. of the constituent elements, etc., unless otherwise specified, or in principle limited to a specific material, shape, positional relationship, etc. The material, shape, positional relationship, etc. are not limited.

(Summary)
According to the first aspect shown in a part or all of each of the above embodiments, the heat flux sensor has the first conductor portion (30a) formed in the first region of the insulating base, and the insulating base The second conductor portion (30b) is formed in a second region different from the first region. The shape of the first conductor portion is C-shaped, annular or spiral. The shape of the second conductor portion is C-shaped, annular or spiral. When the magnetic flux passing in the thickness direction of the insulating base material changes uniformly, the first conductor portion is in a state where the polarities of the induced electromotive forces generated in the first conductor portion and the second conductor portion are opposite to each other. And the second conductor portion are connected in series.

  Moreover, according to the 2nd viewpoint, each shape of a 1st conductor part and a 2nd conductor part is a spiral shape. The winding direction from the outside of the first conductor portion toward the center side and the winding direction from the outside of the second conductor portion toward the center side are the same. The center side end (301a) of the first conductor part and the center side end (301b) of the second conductor part are electrically connected. In the first aspect, it is preferable to adopt the specific configuration of the second aspect. According to this, the connection distance of a 1st conductor part and a 2nd conductor part can be shortened.

  According to the third aspect, the heat flux sensor includes a first insulating base (12a) and a second insulating base (12b) stacked in the thickness direction of the first insulating base. The first conductor portion (30c) is formed on the first insulating base material, and the second conductor portion (30d) is formed on the second insulating base material. The shape of the first conductor portion is C-shaped, annular or spiral. The shape of the second conductor portion is C-shaped, annular or spiral. When the magnetic flux passing in the thickness direction of the first and second insulating bases changes uniformly, the polarity of the induced electromotive force generated in each of the first conductor portion and the second conductor portion is reversed. The first conductor part and the second conductor part are connected in series.

  Moreover, according to the 4th viewpoint, each shape of a 1st conductor part and a 2nd conductor part is spiral. The winding direction from the outside of the first conductor portion toward the center side and the winding direction from the outside of the second conductor portion toward the center side are the same. The center side end (301c) of the first conductor part and the center side end (301d) of the second conductor part are electrically connected. In the third aspect, it is preferable to employ the specific configuration of the fourth aspect. According to this, the connection distance of a 1st conductor part and a 2nd conductor part can be shortened.

  According to the fifth aspect, the heat flux sensor is a metal that is laminated on the insulating base material via the insulating layer (22) in the thickness direction of the insulating base material and is electrically connected to the conductor portion. A wiring pattern (50) is provided. The shape of the conductor part is C-shaped, annular or spiral. The shape of the metal wiring pattern is C-shaped or spiral. When the magnetic flux passing in the thickness direction of the insulating base material changes uniformly, the conductor portion and the metal wiring pattern are in a state where the polarity of the induced electromotive force generated in each of the conductor portion and the metal wiring pattern is reversed. Are connected in series.

  Moreover, according to the 6th viewpoint, each shape of a conductor part and a metal wiring pattern is a spiral shape. The winding direction from the outside of the conductor portion toward the center side and the winding direction from the outside of the metal wiring pattern toward the center side are the same. The center side end (301) of the conductor part and the center side end (501) of the metal wiring pattern are electrically connected. In the fifth aspect, it is preferable to employ the specific configuration of the sixth aspect. According to this, the connection distance of a conductor part and a metal wiring pattern can be shortened.

DESCRIPTION OF SYMBOLS 10 Heat flux sensor 12 Insulation base material 14 1st thermoelectric member 16 2nd thermoelectric member 18 1st conductor pattern 20 2nd conductor pattern 30 Conductor part 30a, 30c 1st conductor part 30b, 30d 2nd conductor part 50 Metal wiring pattern

Claims (6)

A heat flux sensor for detecting heat flux,
An insulating substrate (12) having one surface (121) and the other surface (122) on the opposite side;
A plurality of first thermoelectric members (14) arranged in a plurality of first through holes (123) formed in the insulating base material and made of a thermoelectric material;
A plurality of second thermoelectric members (16) that are arranged in a plurality of second through holes (124) formed separately from the first through holes in the insulating base material and are made of a thermoelectric material different from the first thermoelectric member. )When,
A plurality of first conductor patterns (18) disposed on the one surface and connecting the first thermoelectric member and the second thermoelectric member;
A plurality of second conductor patterns (20) arranged on the other surface and connecting the first thermoelectric member and the second thermoelectric member;
The first region of the insulating base includes a structure in which the first thermoelectric member and the second thermoelectric member are alternately connected in series by the plurality of first conductor patterns and the plurality of second conductor patterns. A conductor portion (30a) is formed;
The first thermoelectric member and the second thermoelectric member are alternately arranged in series in the second region of the insulating base material different from the first region by the plurality of first conductor patterns and the plurality of second conductor patterns. A second conductor portion (30b) including a connected structure is formed;
The shape of the first conductor portion viewed from the thickness direction of the insulating base is C-shaped, annular or spiral,
The shape of the second conductor portion viewed from the thickness direction of the insulating base is C-shaped, annular or spiral,
When the magnetic flux passing in the thickness direction of the insulating base material changes uniformly in the region (R1) surrounded by the first conductor portion and the region (R2) surrounded by the second conductor portion, the first conductor portion A heat flux sensor in which the first conductor portion and the second conductor portion are connected in series in a state where the polarities of the induced electromotive force generated in each of the one conductor portion and the second conductor portion are opposite to each other. Each shape of the first conductor portion and the second conductor portion viewed from the thickness direction of the insulating base material is spiral.
The winding direction from the outside of the first conductor portion toward the center side and the winding direction from the outside of the second conductor portion toward the center side when viewed from the thickness direction and the same direction of the insulating base are the same. ,
The heat flux sensor according to claim 1, wherein a center side end (301a) of the first conductor part and a center side end (301b) of the second conductor part are electrically connected. A heat flux sensor for detecting heat flux,
A first insulating substrate (12a) having one surface (121a) and the other surface (122a) on the opposite side;
A second insulating substrate (12b) laminated in the thickness direction of the first insulating substrate and having one surface (121b) and the other surface (122b) on the opposite side;
A plurality of first thermoelectric members (14) arranged in a plurality of first through holes (123) formed in each of the first and second insulating base materials and made of a thermoelectric material;
A plurality of first and second insulating bases, which are arranged in a plurality of second through holes (124) formed separately from the first through holes, and are made of a thermoelectric material different from the first thermoelectric member. A second thermoelectric member (16) of
A plurality of first conductor patterns (18) disposed on the one surface of each of the first and second insulating bases and connecting the first thermoelectric member and the second thermoelectric member;
A plurality of second conductor patterns (20) arranged on the other surfaces of the first and second insulating bases and connecting the first thermoelectric member and the second thermoelectric member;
In the first insulating base material, the first conductor portion includes a structure in which the first thermoelectric member and the second thermoelectric member are alternately connected in series by the plurality of first conductor patterns and the plurality of second conductor patterns. (30c) is formed,
In the second insulating base material, a second conductor portion including a structure in which the first thermoelectric members and the second thermoelectric members are alternately connected in series by the plurality of first conductor patterns and the plurality of second conductor patterns. (30d) is formed,
The shape of the first conductor portion viewed from the thickness direction of the first insulating substrate is C-shaped, annular or spiral,
The shape of the second conductor portion viewed from the thickness direction of the second insulating substrate is C-shaped, annular or spiral,
In the region (R3) surrounded by the first conductor portion and the region (R4) surrounded by the second conductor portion, the magnetic flux passing in the thickness direction of the first and second insulating bases changes uniformly. The first conductor portion and the second conductor portion are connected in series with the polarity of the induced electromotive force generated in each of the first conductor portion and the second conductor portion being opposite to each other. Heat flux sensor. Each shape of the first conductor portion and the second conductor portion viewed from the thickness direction of the first and second insulating bases is spiral,
The winding direction from the outer side of the first conductor part toward the center side and the winding direction from the outer side of the second conductor part toward the center side when viewed from the thickness direction and the same direction of the first and second insulating bases. Is the same as
The heat flux sensor according to claim 3, wherein a center side end (301c) of the first conductor part and a center side end (301d) of the second conductor part are electrically connected. A heat flux sensor for detecting heat flux,
An insulating substrate (12) having one surface (121) and the other surface (122) on the opposite side;
A plurality of first thermoelectric members (14) arranged in a plurality of first through holes (123) formed in the insulating base material and made of a thermoelectric material;
A plurality of second thermoelectric members (16) that are arranged in a plurality of second through holes (124) formed separately from the first through holes in the insulating base material and are made of a thermoelectric material different from the first thermoelectric member. )When,
A plurality of first conductor patterns (18) disposed on the one surface and connecting the first thermoelectric member and the second thermoelectric member;
A plurality of second conductor patterns (20) arranged on the other surface and connecting the first thermoelectric member and the second thermoelectric member;
A conductor portion (30) including a structure in which the first thermoelectric member and the second thermoelectric member are alternately connected in series by the plurality of first conductor patterns and the plurality of second conductor patterns is formed,
Furthermore, in the thickness direction of the insulating substrate, comprising a metal wiring pattern (50) laminated on the insulating substrate via an insulating layer (22) and electrically connected to the conductor portion,
The shape of the conductor portion viewed from the thickness direction of the insulating base is C-shaped, annular or spiral,
The shape of the metal wiring pattern viewed from the thickness direction of the insulating base is C-shaped or spiral,
When the magnetic flux passing in the thickness direction of the insulating substrate uniformly changes in the region (R5) surrounded by the conductor portion and the region (R6) surrounded by the metal wiring pattern, the conductor portion and the A heat flux sensor in which the conductor portion and the metal wiring pattern are connected in series in a state where the polarity of the induced electromotive force generated in each of the metal wiring patterns is opposite. Each shape of the conductor part and the metal wiring pattern seen from the thickness direction of the insulating base material is spiral,
The winding direction from the outside of the conductor part toward the center side when viewed from the same direction as the thickness direction of the insulating base and the winding direction from the outside of the metal wiring pattern toward the center side are the same,
The heat flux sensor according to claim 5, wherein a center side end (301) of the conductor part and a center side end (501) of the metal wiring pattern are electrically connected.

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