JP2017219392A - Deformation detection sensor and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a deformation detection sensor that reduces a spot where a generated potential is reversed.SOLUTION: The deformation detection sensor comprises: a base substance that is an object to be deformed; a first piezoelectric film consisting of a chiral high molecule; a first electrode disposed on both main surfaces of the first piezoelectric film; a first piezoelectric substance consisting of the first piezoelectric film and the first electrode; a second piezoelectric film consisting of a chiral high molecule; a second electrode disposed on both main surfaces of the second piezoelectric film; and a second piezoelectric substance consisting of the second piezoelectric film and the second electrode. The first piezoelectric substance and the second piezoelectric substance are respectively disposed in a first area and a second area, which are different in a plan view. The potentials of the first piezoelectric substance and second piezoelectric substance that are detected with respect to the deformation of the base substance have opposite polarities to each other.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a deformation detection sensor that detects a deformation operation on an operation target.

  As a deformation detection sensor that detects a deformation operation on an operation target, for example, there is a press sensor that detects a press operation on an operation surface as shown in Patent Document 1. Patent Document 1 discloses a piezoelectric element in which electrodes are formed on both sides of a uniaxially stretched PLLA film. In a chiral polymer such as PLLA, an electric charge is generated when the stretching direction and the strain direction of the operation target form 45 ° or 135 °.

International Publication No. 2010/143528

  When a deformation operation such as pressing or twisting is performed on the operation target object, the distortion direction of the operation target object may not be uniform. That is, the operation object includes a portion that expands and contracts in a first direction (for example, a direction that is 45 ° with respect to the stretching direction) and a second direction that is different from the first direction (for example, 135 with respect to the stretching direction). And a portion that expands and contracts in the direction (°). In this case, a portion where the potential generated in the piezoelectric element is reversed occurs.

  In view of the above, an object of the present invention is to provide a deformation detection sensor that reduces the places where the generated potential is reversed.

  The deformation detection sensor includes a base material that is an object to be deformed, a first piezoelectric film made of a chiral polymer, first electrodes disposed on both main surfaces of the first piezoelectric film, the first piezoelectric film, and the A first piezoelectric body comprising a first electrode; a second piezoelectric film comprising a chiral polymer; a second electrode disposed on both principal surfaces of the second piezoelectric film; the second piezoelectric film; and the second electrode. And a second piezoelectric body. The first piezoelectric body and the second piezoelectric body are arranged in a first area and a second area, which are different areas in a plan view, respectively. In the first piezoelectric body and the second piezoelectric body, the detected potentials have opposite polarities with respect to the deformation of the base material.

As described above, the deformation detection sensor of the present invention has the first piezoelectric body and the second piezoelectric body in which the detected potentials have opposite polarities with respect to the portion that expands and contracts in the first direction and the portion that expands and contracts in the second direction. Is provided. For potential sensed is opposite polarity, for example, a first piezoelectric film and the second piezoelectric film stretching direction different pressures conductive film is disposed in the first region and the second region, respectively. Thereby, as a deformation | transformation detection sensor, the location where the generated electric potential becomes reverse decreases.

  In addition, the 1st piezoelectric film and the 2nd piezoelectric film may be arrange | positioned on the same plane, and may be laminated | stacked. When arrange | positioning on the same plane, a 1st piezoelectric film is arrange | positioned in a 1st area | region, and a 2nd piezoelectric film is arrange | positioned in a 2nd area | region. When stacked, the first electrode is disposed in the first region, and the second electrode is disposed in the second region.

  According to the present invention, the places where the generated potential is reversed can be reduced.

It is an external appearance perspective view of a press detection touch panel. FIG. 2A is a cross-sectional view of a press detection touch panel. FIG. 2B is a layout diagram of the piezoelectric film. FIG. 3A is a plan view showing the relationship between pressure and strain, and FIG. 3B is a diagram showing a conventional configuration including only the first piezoelectric film 114A. It is a figure which shows a press position. It is a figure which shows the calculation result of the electric potential distribution which generate | occur | produces in the conventional panel. It is a figure which shows the calculation result of the electric potential distribution which generate | occur | produces in the panel of this embodiment. FIG. 10 is a layout diagram of a piezoelectric film according to Modification 1. It is a figure which shows the calculation result of the electric potential distribution which generate | occur | produces in arrangement | positioning of the piezoelectric film of the modification 1. FIG. 9A is a cross-sectional view of a pressure detection touch panel according to the second modification. FIG. 9B and FIG. 9C are layout diagrams of piezoelectric films. FIG. 10A is a cross-sectional view of a pressure detection touch panel according to Modification 3. FIG. 10B and FIG. 10C are layout diagrams of piezoelectric films. It is an external appearance perspective view of the conventional torsion detection sensor. It is a figure which shows the electric potential distribution which generate | occur | produces in the conventional torsion detection sensor. It is an external appearance perspective view of the torsion detection sensor of this embodiment. It is a figure which shows the electric potential distribution which generate | occur | produces in the twist detection sensor of this embodiment.

  FIG. 1 is an external perspective view of a pressure detection touch panel. 2A is a cross-sectional view taken along the line AA, and FIG. 2B is a plan view of the piezoelectric film.

  As shown in FIG. 1, the press detection touch panel 1 includes a rectangular parallelepiped casing 50 having a thin thickness and a planar panel 40 disposed in an opening on the upper surface of the casing 50. .

  The panel 40 corresponds to the base material of the present invention, and functions as a touch surface on which a user performs a touch operation using a finger or a pen. The panel 40 is made of, for example, glass, polyethylene terephthalate (PET), polycarbonate (PC), or an acrylic flat plate. When the user presses the surface of the panel 40 with a finger or a pen, the panel 40 bends in the normal direction.

  In the present embodiment, the width direction (lateral direction) of the housing 50 is the X direction, the length direction (vertical direction) is the Y direction, and the thickness direction is the Z direction. In the present embodiment, the thickness of each component is exaggerated for the sake of explanation.

  As shown in FIG. 2A, inside the housing 50, the adhesive 101, the display unit 30, the adhesive 102, the pressure sensor 11P, and the pressure sensor 11P are arranged along the Z direction in order from the opening (panel 40) side. A control circuit module 52 is arranged.

  The entire periphery of the panel 40 is fixed to the casing 50 with a double-sided tape or the like at the outer peripheral portion of the opening of the casing 50.

  The display unit 30 and the pressure sensor 11P have a flat plate shape and are arranged inside the housing 50 so as to be parallel to the opening of the housing 50 (the lower surface of the panel 40).

  The display unit 30 is attached to the lower surface of the panel 40 via the adhesive 101. A pressure sensor 11 </ b> P is attached to the lower surface of the display unit 30 via an adhesive 102.

  A circuit board (not shown) is disposed between the bottom surface of the housing 50 and the pressure sensor 11P, and the control circuit module 52 is mounted on the circuit board. The control circuit module 52 is a module that processes detection values of various sensors such as the pressure sensor 11P. For example, the control circuit module 52 controls the display unit 30 to display an image and determines the operation input content according to the touch operation received via the press sensor 11P.

  The pressure sensor 11P includes a PET film 111, a detection electrode 112, an adhesive 113, a first piezoelectric film 114A, a second piezoelectric film 114B, an adhesive 115, a ground electrode 116, and a PET film 117.

  The first main surface (upper surface side) of the PET film 111 is attached to the lower surface of the display unit 30 with the adhesive 102 interposed therebetween. A detection electrode 112 is deposited on the second main surface (lower surface side) of the PET film 111. A first piezoelectric film 114 </ b> A and a second piezoelectric film 114 </ b> B are attached to the detection electrode 112 via an adhesive 113.

  The first piezoelectric film 114A and the second piezoelectric film 114B are arranged on the same plane. A ground electrode 116 is attached to the first piezoelectric film 114A and the second piezoelectric film 114B with an adhesive 115 interposed therebetween. The ground electrode 116 is deposited on the PET film 117.

  In this example, the detection electrode 112 is vapor-deposited on the PET film 111 and the ground electrode 116 is vapor-deposited on the PET film 117. However, the detection electrode 112 and the ground electrode 116 are both on the piezoelectric film. It may be formed directly on the main surface. In this case, no PET film is required.

  With such a structure, the first piezoelectric film 114 </ b> A and the second piezoelectric film 114 </ b> B of the pressure sensor 11 </ b> P are bent in the normal direction along with the deformation of the panel 40 (bending in the normal direction) to generate electric charges. The generated charge is detected by the detection electrode 112.

  The first piezoelectric film 114A and the second piezoelectric film 114B include a chiral polymer. The chiral polymer is preferably uniaxially stretched polylactic acid (PLA), more preferably L-type polylactic acid (PLLA).

  A chiral polymer has a helical structure in its main chain, and has a piezoelectric property when oriented uniaxially and molecules are oriented. Since chiral polymers generate piezoelectricity by molecular orientation treatment such as stretching, it is not necessary to perform poling treatment unlike other polymers such as PVDF or piezoelectric ceramics. In particular, polylactic acid does not have pyroelectricity, and therefore, even when a pressure sensor is disposed near the touch surface and heat from a user's finger or the like is transmitted, the amount of charge detected may change. Absent. The piezoelectric constant of uniaxially stretched PLLA belongs to a very high class among polymers. Furthermore, the piezoelectric constant of PLLA does not vary with time and is extremely stable.

  As shown in FIG. 2B, each of the first piezoelectric film 114A and the second piezoelectric film 114B has a rectangular shape in plan view. The first piezoelectric film 114A and the second piezoelectric film 114B have the same long side length (Y-direction length). The width (length in the X direction) of the first piezoelectric film 114A is longer than the width of the second piezoelectric film 114B. Two second piezoelectric films 114 </ b> B are disposed at both ends (two long sides) in the X direction in the peripheral portion of the panel 40 in plan view. The first piezoelectric film 114 </ b> A is disposed on the center side of the panel 40 in plan view. The total area of the first piezoelectric film 114 </ b> A and the second piezoelectric film 114 </ b> B is slightly smaller than the area of the main surface of the panel 40, but is substantially the same as the area of the main surface of the panel 40. However, the total area of the first piezoelectric film 114 </ b> A and the second piezoelectric film 114 </ b> B does not have to be the same as the area of the main surface of the panel 40. For example, the first piezoelectric film 114A and the second piezoelectric film 114B may only be disposed near the center in the Y direction.

  As a result, in the press sensor 11P, the first piezoelectric body including the first piezoelectric film and the first electrode (the portion of the detection electrode 112 disposed opposite to the first piezoelectric film 114A) is disposed in the first region. The second piezoelectric body composed of the second piezoelectric film and the second electrode (the portion of the detection electrode 112 disposed opposite to the second piezoelectric film 114B) is disposed in the second region.

  As shown in FIG. 2B, the first piezoelectric film 114A is arranged so that the stretching direction is approximately 45 ° when the X direction is 0 °. As shown in FIG. 2B, the second piezoelectric film 114B is arranged so that the stretching direction is approximately 135 °.

  The second piezoelectric film 114B disposed in the second region generates a potential opposite to that of the first piezoelectric film 114A. Thereby, the press detection touch panel 1 of this embodiment suppresses generation | occurrence | production of an electric charge in a reverse direction, when a touch surface is pressed.

  As described above, a chiral polymer such as PLLA generates a maximum charge when the stretching direction and the strain direction of the operation target form 45 °. However, as shown in FIG. 3A, when the user presses the panel 40, the strain direction of the panel 40 is a direction along the X direction (first direction) and a direction along the Y direction (second). Direction), both exist. As shown in FIG. 3B, if there is no second piezoelectric film 114B and only the first piezoelectric film 114A is disposed on the entire surface, a portion that expands and contracts in the first direction and a portion that expands and contracts in the second direction And the generated potential is reversed. Therefore, the output as the press sensor 11P may be reduced or reversed.

  FIG. 5A is a diagram showing a potential distribution generated when a pressing force is applied to the center of panel 40 (position B3 shown in FIG. 4) in the configuration shown in FIG. 3B. FIG. 5B is a diagram showing a potential distribution generated when a pressing force is applied to the center of the right long side of the panel 40 (position A3 shown in FIG. 4). FIG. 5C is a diagram showing a potential distribution generated when a pressing force is applied to the center of the lower short side of the panel 40 (position B1 shown in FIG. 4). FIG. It is a figure which shows the voltage value at the time of pressing the position of each 15 points (1A, 1B, 1C, 2A, 2B, 2C, 3A, 3B, 3C, 4A, 4B, 4C, 5A, 5B, and 5C) shown .

  The entire circumference of the panel 40 is fixed to the housing 50 as described above. Therefore, in the configuration shown in FIG. 3B, distortion in the first direction is dominant when the center position of the panel 40 is pressed and in the entire panel 40. When the long side of the panel 40 is pressed, distortion in the second direction along the Y direction is dominant on the long side, and there are many places where a negative potential is generated. When the center of the lower short side of the panel 40 is pressed, there are many places where distortion in the first direction is dominant, and a very high output is shown. Therefore, as shown in FIG. 5D, the output as the pressure sensor 11P varies greatly depending on the pressing position.

  On the other hand, FIG. 6A is a diagram showing a potential distribution generated when a pressing force is applied to the center (position B3 shown in FIG. 4) of the panel 40 according to the present embodiment. FIG. 6B is a diagram showing a potential distribution generated when a pressing force is applied to the center of the right long side (position A3 shown in FIG. 4) of the panel 40 according to the present embodiment. FIG. 6C is a diagram showing a potential distribution generated when a pressing force is applied to the center (position B1 shown in FIG. 4) of the lower short side of the panel 40 according to the present embodiment. FIG. 6D shows the positions of the 15 points (1A, 1B, 1C, 2A, 2B, 2C, 3A, 3B, 3C, 4A, 4B, 4C, 5A, 5B, and 5C) shown in FIG. It is a figure which shows the voltage value at the time of pressing.

  As shown in FIGS. 6 (A) and 6 (B), the press sensor 11P of the present embodiment has a long side because the second piezoelectric film 114B having a stretching direction of 135 ° is disposed on the long side. A positive potential is generated with respect to distortion in the second direction along the Y direction, which is dominant on the side. As shown in FIG. 6C, when the center of the lower short side of the panel 40 is pressed, distortion in the first direction is dominant, and a negative potential is generated in the second piezoelectric film 114B.

  Therefore, as shown in FIG. 6D, the output as the press sensor 11P has less variation due to the pressed position.

  Next, FIG. 7 is a diagram illustrating an arrangement mode of the piezoelectric film according to the first modification. In the first modification, the first piezoelectric film 114A and the second piezoelectric film 114B have the same short side length (length in the X direction). The height (the length in the Y direction) of the first piezoelectric film 114A is longer than the height of the second piezoelectric film 114B. Two second piezoelectric films 114 </ b> B are disposed at both ends (two short sides) in the Y direction in the peripheral portion of the panel 40 in plan view. The first piezoelectric film 114 </ b> A is disposed on the center side of the panel 40 in plan view. The total area of the first piezoelectric film 114 </ b> A and the second piezoelectric film 114 </ b> B is slightly smaller than the area of the main surface of the panel 40, but is substantially the same as the area of the main surface of the panel 40. However, the total area of the first piezoelectric film 114 </ b> A and the second piezoelectric film 114 </ b> B does not have to be the same as the area of the main surface of the panel 40. For example, the first piezoelectric film 114A and the second piezoelectric film 114B may only be disposed near the center in the X direction. Note that the pressure detection touch panel according to Modification 1 does not include the display unit 30.

  FIG. 8A is a diagram showing a potential distribution generated when a pressing force is applied to the center of panel 40 (position B3 shown in FIG. 4) in the first modification. FIG. 8B is a diagram showing a potential distribution generated when a pressing force is applied to the center of the right long side (position A3 shown in FIG. 4) of the panel 40 according to the present embodiment. FIG. 8C is a diagram showing a potential distribution generated when a pressing force is applied to the center of the lower short side of the panel 40 according to the present embodiment (position B1 shown in FIG. 4). FIG. 8D shows the positions of the 15 points (1A, 1B, 1C, 2A, 2B, 2C, 3A, 3B, 3C, 4A, 4B, 4C, 5A, 5B, and 5C) shown in FIG. It is a figure which shows the voltage value at the time of pressing.

  As described above, when the center of the panel 40 is pressed, distortion in the X direction is dominant as a whole, so that the potential becomes negative near the short side where the second piezoelectric film 114B is disposed. In addition, the absolute value of the negative potential increases. On the other hand, when the vicinity of the long side and the vicinity of the short side of the panel 40 are pressed, the distortion in the X direction is not as advantageous as when the center is pressed. Accordingly, in the vicinity of the short side where the second piezoelectric film 114B is disposed, the potential is negative, but the absolute value is relatively small. That is, when the center of the panel 40 is pressed, the output as the press sensor 11P is greatly reduced, and when the vicinity of the short side and the vicinity of the long side is pressed, the output as the press sensor 11P does not decrease as much as the center. Therefore, as shown in FIG. 8D, the output as the press sensor 11P has less variation due to the pressed position.

  The arrangement mode of the piezoelectric film shown in FIG. 2 is effective when the potential distribution as shown in FIG. 5 is shown. That is, when the distance from the touch surface to the piezoelectric film is long, the arrangement mode of the piezoelectric film shown in FIG. 2 is useful. On the other hand, when there is no display part and the distance from the touch surface to the piezoelectric film is short, the arrangement mode of the piezoelectric film shown in FIG. 7 is useful. When the output is large at the ends (B1 and B5) in the long side direction as shown in FIG. 5D, the arrangement mode of the piezoelectric film shown in FIG. 2 is useful. When the output is large near the center (for example, B3), the arrangement mode of the piezoelectric film shown in FIG. 7 is useful.

Next, FIG. 9A is a cross-sectional view of a pressure detection touch panel according to Modification 2 . FIG. 9B and FIG. 9C are plan views showing the arrangement state of the piezoelectric film.

The pressure detection touch panel 1A of Modification 2 has an adhesive 118, a PET film 119, a detection electrode 120, an adhesive 121, a second piezoelectric film 114B, an adhesive 122, a ground electrode 123, in order on the lower surface side of the PET film 117. And a PET film 124 is disposed.

In the press detection touch panel 1 </ b> A, a first piezoelectric film 114 </ b> A is disposed between the detection electrode 112 and the ground electrode 116. That is, in Modification 2 , the first piezoelectric film 114A and the second piezoelectric film 114B are laminated. The first piezoelectric film 114 </ b> A and the second piezoelectric film 114 </ b> B have the same area and are slightly smaller than the area of the main surface of the panel 40, but are substantially the same as the area of the main surface of the panel 40. However, the areas of the first piezoelectric film 114A and the second piezoelectric film 114B do not have to be the same as the area of the main surface of the panel 40. For example, the first piezoelectric film 114A and the second piezoelectric film 114B may only be disposed near the center in the Y direction. In addition, the first piezoelectric film 114A may be disposed only at a position facing the areas of the detection electrode 112 and the ground electrode 116, and the second piezoelectric film 114B may have an area of the detection electrode 120 and the ground electrode 123. It may be arranged only at a position opposite to. That is, in a plan view, the first piezoelectric film 114A may be disposed near the center in the X direction, and the second piezoelectric film 114B may be disposed near the end in the X direction.

  The detection electrode 112 corresponds to the first electrode, and detects the electric charge of the first piezoelectric film 114A. The detection electrode 120 corresponds to the second electrode, and detects the charge of the second piezoelectric film 114B.

  The detection electrode 112, the ground electrode 116, the detection electrode 120, and the ground electrode 123 all have a rectangular shape in plan view, and have the same long side length (Y-direction length). The width of the detection electrode 112 and the ground electrode 116 (the length in the X direction) is longer than the width of the detection electrode 120 and the ground electrode 123. The two detection electrodes 120 and the ground electrode 123 are arranged on both ends (two long sides) in the X direction in the peripheral portion of the panel 40 in plan view. The detection electrode 112 and the ground electrode 116 are disposed on the center side of the panel 40 in plan view.

Also in this case, the first piezoelectric body including the first piezoelectric film and the first electrode (detection electrode 112) is disposed in the first region, and the second piezoelectric film and the second electrode (detection electrode 120) are included. The piezoelectric body is arranged in the second region. Accordingly, in the configuration of the modification example 2 , as well as the example shown in FIGS. 6A to 6D, variation due to the pressed position is reduced.

  The areas of the ground electrode 116 and the ground electrode 123 do not have to be the same area as the detection electrode 112 and the detection electrode 120, respectively. The areas of the ground electrode 116 and the ground electrode 123 may be formed to be approximately the same as the area of the main surface of the panel 40, for example.

  Further, the ground electrode may be a single layer as in the press detection touch panel according to the third modification shown in FIGS. 10 (A), 10 (B), and 10 (C). In the example of the modification example 3, the ground electrode 116 is formed to have substantially the same area as the area of the main surface of the panel 40. Compared with the aspect of the modification 2, the ground electrode 123 is omitted. Also in this case, the first piezoelectric body including the first piezoelectric film and the first electrode is disposed in the first region, and the second piezoelectric body including the second piezoelectric film and the second electrode is disposed in the second region. Become. However, the stretching direction of the first piezoelectric film and the stretching direction of the second piezoelectric film are the same as seen from the top surface direction. In this case, the ground electrode is shared by the first electrode and the second electrode. The detection electrode 112 is disposed on the upper surface side, and the detection electrode 120 is disposed on the lower surface side. Therefore, the polarity of the detected potential is reversed between the detection electrode 112 and the detection electrode 120. Therefore, also in such an aspect, the dispersion | variation by a press position falls.

  In FIG. 1 to FIG. 10, the pressure sensor 11 </ b> P is shown as an example of the deformation detection sensor. However, the deformation detection sensor may be a torsion detection sensor as described below.

  FIG. 11 is an external perspective view of a conventional torsion detection sensor 1C. FIG. 12 is a diagram showing a potential distribution generated in the conventional torsion detection sensor 1C. FIG. 13 is an external perspective view of the torsion detection sensor 1D of the present embodiment. FIG. 14 is a diagram showing a potential distribution generated in the torsion detection sensor 1D of the present embodiment.

  As shown in FIG. 11, the conventional torsion detection sensor includes a panel 400 that is an object to be deformed, and a first piezoelectric film 11 </ b> A attached to the main surface of the panel 400. The illustration and description of other configurations such as electrodes are omitted. The panel 400 has a rectangular shape in plan view, and has a thin plate shape. The first piezoelectric film 11 </ b> A is attached to the central portion of the main surface of the panel 400 and is not provided near the short side of the panel 400. The extending direction of the first piezoelectric film 11 </ b> A is along the long axis direction of the panel 400.

  The user performs an operation of grasping both short sides of the panel 400 and twisting the panel 400. When an external force that causes twisting is applied to the panel 400, two corners on the first diagonal line of the panel 400 expand and contract along the direction of the diagonal line, and 2 on the second diagonal line. One corner is compressed along the diagonal direction.

  Therefore, as shown in FIG. 12, a positive potential is generated near the two corners on the first diagonal, and a negative potential is generated near the two corners on the second diagonal.

  On the other hand, in the torsion detection sensor 1D of the present embodiment shown in FIG. 13, the second piezoelectric film 11B is provided in the vicinity of two corners on the second diagonal line. The extending direction of the second piezoelectric film 11B is along the minor axis direction of the panel 400 and is orthogonal to the extending direction of the first piezoelectric film 11A.

  Therefore, as shown in FIG. 14, a positive potential is also generated near two corners on the second diagonal line. Therefore, also in this case, the first piezoelectric body composed of the first piezoelectric film and the first electrode is disposed in the first region, and the second piezoelectric body composed of the second piezoelectric film and the second electrode is disposed in the second region. It becomes an aspect.

  In the present embodiment, the first piezoelectric film and the second piezoelectric film are the same type of piezoelectric film (PLLA), and are arranged in the first region and the second region, respectively, with the stretching directions being opposite. Indicated. However, if the first and second piezoelectric films are piezoelectric films (PLLA and PDLA) in which the generated potentials have opposite polarities, they are arranged in the first region and the second region, respectively, in the same stretching direction. Embodiments are also possible.

DESCRIPTION OF SYMBOLS 1,1A ... Press detection touch panel 1C, 1D ... Torsion detection sensor 11A, 114A ... 1st piezoelectric film 11B, 114B ... 2nd piezoelectric film 11P ... Press sensor 30 ... Display part 40, 400 ... Panel 50 ... Case 52 ... Control Circuit module 90A ... first region 90B ... second region 101, 102, 113, 115, 118, 121, 122 ... adhesive 111, 117, 119, 124 ... PET film 112, 123 ... detection electrode 116, 120 ... ground electrode

Claims (7)

A base material that is an object to be deformed;
A first piezoelectric film made of a chiral polymer;
A first electrode disposed on both main surfaces of the first piezoelectric film;
A first piezoelectric body comprising the first piezoelectric film and the first electrode;
A second piezoelectric film made of a chiral polymer;
A second electrode disposed on both main surfaces of the second piezoelectric film;
A second piezoelectric body comprising the second piezoelectric film and the second electrode;
With
The first piezoelectric body and the second piezoelectric body are respectively disposed in a first area and a second area, which are different areas in plan view,
In the first piezoelectric body and the second piezoelectric body, the detected potentials have opposite polarities with respect to the deformation of the base material,
Deformation detection sensor. The first piezoelectric film is stretched in a first direction;
The second piezoelectric film is stretched in a second direction;
The deformation detection sensor according to claim 1. The first piezoelectric film and the second piezoelectric film are arranged on the same plane,
The first piezoelectric film is disposed in the first region,
The second piezoelectric film is disposed in the second region,
The deformation detection sensor according to claim 1 or 2. The first piezoelectric film and the second piezoelectric film are laminated,
The first electrode is disposed in the first region;
The second electrode is disposed in the second region,
The deformation detection sensor according to claim 1 or 2. The deformation detection sensor according to claim 4,
The first piezoelectric film is disposed at a position facing the first electrode,
The second piezoelectric film is disposed at a position facing the second electrode.
Deformation detection sensor. In the deformation detection sensor according to any one of claims 1 to 5,
The base material has a peripheral edge fixed,
The second region is disposed at the peripheral edge,
Deformation detection sensor.   The electronic device provided with the deformation | transformation detection sensor in any one of Claims 1 thru | or 6.

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