JP2017215307A - Magnetic sensor device and current sensor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sensor device which adjusts the timings of a detection signal and a sensing signal for sensing an abnormality in the detection signal and outputs the signals.SOLUTION: There is provided a magnetic sensor device including: a magnetic sensor element; an amplifier for amplifying and outputting the output of the magnetic sensor element; a plurality of comparators for comparing the output of the magnetic sensor element or the output of the amplifier with a threshold value; and a plurality of delay sections for each delaying the comparison result output from corresponding one of the comparators and outputting the comparison result. Also provided is a current sensor device including: a current path for flowing a current of a measurement target through; and a magnetic sensor device arranged to correspond to the current path, the magnetic sensor device being for sensing a magnetic field generated according to the current of the measurement target.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a magnetic sensor device and a current sensor device.

Conventionally, a processing system that executes various processes based on detection signals of a sensor device such as a magnetic sensor and a current sensor receives an abnormality detection signal together with the detection signal from the sensor device, and further executes a process based on the abnormality of the detection signal. (For example, refer to Patent Documents 1 to 3). Further, a magnetic sensor using a Hall element has been known (for example, see Non-Patent Document 1).
Patent Document 1 US Patent Application Publication No. 2011/0199132 Patent Document 2 US Patent Application Publication No. 2013/0009678 Patent Document 3 US Patent Application Publication No. 2015/0185279 Non-Patent Document 1 by RS Popovic, "Hall Effect Devices", Inst of Physics Pub Inc, May 1991

  However, if there are variations in the reception timing of the detection signal and the abnormality detection signal output from the sensor device, the processing system may delay the execution of the processing based on the abnormality detection even if the abnormality is detected. For example, when an abnormality such as an overcurrent is detected, the processing system should immediately stop processing. If processing after abnormality detection is delayed in this way, the device and processing system provided in the processing system are connected. The device to be used may break down or be destroyed.

  In the first aspect of the present invention, a magnetic sensor element, an amplification unit that amplifies and outputs the output of the magnetic sensor element, and a plurality of comparison units that compare the output of the magnetic sensor element or the output of the amplification unit with a threshold value; There is provided a magnetic sensor device including a plurality of delay units that delay and output a comparison result output from a corresponding comparison unit among a plurality of comparison units.

  According to a second aspect of the present invention, a current path through which a current to be measured flows, and a magnetic sensor device according to the first aspect that is arranged corresponding to the current path and detects a magnetic field generated according to the current to be measured; A current sensor device is provided.

  It should be noted that the above summary of the invention does not enumerate all the necessary features of the present invention. In addition, a sub-combination of these feature groups can also be an invention.

The structural example of the control apparatus 10 which performs the process according to the detection signal of the sensor apparatus 100 is shown. The structural example of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. The structural example of the threshold value production | generation part 310 which concerns on this embodiment, and the comparison part 320 is shown. The 1st example of the input signal and output signal of the comparison part 320 which concerns on this embodiment is shown. The 2nd example of the input signal and output signal of the comparison part 320 which concerns on this embodiment is shown. The 1st modification of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. The 2nd modification of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. The 3rd modification of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. The structural example of the integration part 352 which concerns on this embodiment is shown. The 4th modification of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. The 5th modification of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. The 6th modification of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. The 7th modification of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. An 8th modification of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. The 9th modification of the magnetic sensor apparatus 200 which concerns on this embodiment is shown. The structural example of the package 50 which mounted the magnetic sensor apparatus 200 which concerns on this embodiment, and the current sensor apparatus 300 provided with the said package 50 is shown.

  Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all the combinations of features described in the embodiments are essential for the solving means of the invention.

  FIG. 1 shows a configuration example of a control device 10 that executes a predetermined process in accordance with a detection signal of the sensor device 100. The sensor device 100 may be a magnetic sensor that detects an input magnetic field, or may be a current sensor that detects an input current instead. The sensor device 100 outputs a detection signal corresponding to the magnitude of a magnetic field or current input from the outside.

  The control device 10 controls devices and the like connected to the control device 10 according to the detection signal output from the sensor device 100. The control target of the control device 10 may be a motor, an actuator, a moving stage, an engine, or the like as long as it is a device that is controlled according to the detection signal output from the sensor device 100. In the present embodiment, an example in which the control device 10 is connected to a motor and controls driving of the motor will be described. In this case, the sensor device 100 detects the drive current of the motor, and the control device 10 performs feedback control according to the detected drive current. That is, the control device 10, the motor, and the sensor device 100 constitute a processing system that drives the motor. The sensor device 100 includes a CPU 20 and an overcurrent processing circuit 30.

  The CPU 20 controls driving of the motor according to the detection signal output from the sensor device 100. For example, the CPU 20 is connected to the motor via an inverter circuit or the like, and drives the motor by supplying a control signal for controlling the inverter circuit. The CPU 20 may control the driving of the motor based on a predetermined algorithm or the like. The CPU 20 may drive the motor by executing vector control or PID control.

  In response to the overcurrent processing circuit 30 detecting an abnormality in the detection signal, the CPU 20 changes control to protection control of the motor and inverter circuit, or stops or interrupts control. For example, the overcurrent processing circuit 30 may send an interrupt signal for executing these to the CPU 20. Further, the CPU 20 may include the overcurrent processing circuit 30. In that case, the CPU 20 may directly receive the detection signal output from the sensor device 100 as an interrupt signal. When the current for driving the motor becomes an overcurrent exceeding the reference value, the motor may be heated, resulting in malfunction, failure, destruction, and the like. In addition, when a short circuit occurs in the drive circuit or the like, the circuit and / or the motor may malfunction, fail, or be destroyed. Therefore, the overcurrent processing circuit 30 detects an abnormality of the detection signal based on the magnitude of the amplitude value of the detection signal.

  The overcurrent processing circuit 30 may determine that the drive current of the motor is an overcurrent in response to the detection signal becoming equal to or higher than the first reference value. Further, the overcurrent processing circuit 30 may determine that a short circuit has occurred in response to the detection signal being equal to or less than the second reference value. Here, the first reference value and the second reference value may be predetermined values, or may be values specified from the outside instead. In addition, although the example in which the overcurrent processing circuit 30 detects the abnormality based on the detection signal has been described in FIG. 1, instead of this, the sensor device 100 detects the abnormality and the detected result is the overcurrent processing circuit 30. May receive.

  When an abnormality is detected in the above processing system, the overcurrent processing circuit 30 immediately executes a control interrupt to the CPU 20, and the CPU 20 adjusts the control of the motor and the inverter circuit so that the current does not flow excessively. It is desirable to make changes to the control, or to stop or interrupt the control. However, the response time of the detection signal received by the overcurrent processing circuit 30 may vary depending on the length of the signal wiring, the parasitic resistance, the parasitic capacitance, and the like. That is, even when the detection timing output from the sensor device 100 is received by the CPU 20 and the overcurrent processing circuit 30, variations occur in the reception timing, and even if the overcurrent processing circuit 30 detects an abnormality, the CPU 20 There was a case where it was not possible to immediately execute a change to protection control of a circuit, or stop or interruption of control.

  Further, as an example, when the sensor device 100 is formed as a single device, the reception timing and control timing of the CPU 20 and the overcurrent processing circuit 30 must be adjusted in the control device 10, and the design and manufacture are performed. Costs of operation tests, abnormality detection and improvement have increased. Therefore, the sensor device according to the present embodiment outputs the detection signal and the output timing of the detection signal for detecting the abnormality of the detection signal in an adjustable manner within the sensor device. Regarding such a sensor device, first, a magnetic sensor device that detects a magnetic field will be described as an example.

  FIG. 2 shows a configuration example of the magnetic sensor device 200 according to the present embodiment. The magnetic sensor device 200 outputs a magnetic field detection signal corresponding to the magnitude of the input magnetic field as a first output. Further, the magnetic sensor device 200 outputs a detection signal for notifying abnormality as the second output when the input magnetic field is out of the reference range. The magnetic sensor device 200 includes a magnetic sensor element 210, an amplification unit 110, a detection unit 120, an input / output unit 150, a setting unit 160, and a clock generation unit 170.

  The magnetic sensor element 210 outputs a detection signal corresponding to the magnitude of the magnetic field input to the magnetic sensor device 200. The magnetic sensor element 210 is formed on the surface of a substrate or the like, for example, and detects a magnetic field in a direction substantially perpendicular to the plane. An example in which the magnetic sensor element 210 according to this embodiment includes a Hall element will be described. Here, when the substrate surface is the XY plane and the direction perpendicular to the XY plane is the Z axis, the Hall element generates an electromotive force in the Y axis direction according to the magnetic field input in the Z axis direction when a current flows in the X axis direction. (Hall effect). The magnetic sensor element 210 may be formed in a cross shape on the XY plane. The magnetic sensor element 210 may be formed of a semiconductor or the like.

  The magnetic sensor element 210 has a first terminal pair including a terminal 212 and a terminal 214 and a second terminal pair including a terminal 216 and a terminal 218. As an example, the magnetic sensor element 210 includes a first terminal pair and a second terminal pair formed on the substrate surface, and detects a magnetic field that is input substantially perpendicularly to the substrate. That is, when a current flows through the first terminal pair, the magnetic sensor element 210 generates an electromotive force according to the magnetic field from the second terminal pair according to the input magnetic field. Further, when a current flows through the second terminal pair, the magnetic sensor element 210 generates an electromotive force according to the magnetic field from the first terminal pair according to the input magnetic field.

  Such a magnetic sensor element 210 may output an output signal including an element-specific offset signal. In order to reduce such an offset signal, a spinning current method or the like described in Non-Patent Document 1 may be used. The spinning current method switches the direction of the current flowing through the Hall element based on the spinning current clock that repeats the first phase and the second phase, and inverts the polarity of the signal component according to the magnetic field input and the signal component due to the offset.

For example, in the first phase, with respect to the magnetic field input B in the + Z direction, the magnetic sensor element 210 energized from the terminal 212 to the terminal 214 (assumed to be in the + X direction) generates a hole from the terminal 218 (assumed to be in the + Y direction). A power signal + V _S is generated (a Hall electromotive force signal −V _S is generated from a terminal 216 on the −Y direction side), and an offset voltage + V _O in the + Y direction is output. In this case, when the magnetic sensor element 210 is energized from the terminal 218 to the terminal 216 (−Y direction) in the second phase with respect to the same magnetic field input in the + Z direction, the Hall electromotive force signal + V from the terminal 214 on the + X direction side. _S is generated (a Hall electromotive force signal −V _S is generated from the terminal 212 on the −X direction side), and an offset voltage + V _O in the + X direction is output.

Therefore, the output voltage V _h1 is obtained from the second terminal pair in the Y-axis direction of the magnetic sensor element 210 in the first phase, and the output voltage V _h2 from the first terminal pair in the X-axis direction of the magnetic sensor element 210 in the second phase. , The detection signal of the magnetic field B of the magnetic sensor element 210 is expressed by the following equation. The following formula shows an example in which a sign is given with the terminal 218 and the terminal 212 as the positive side.
(Equation 1)
V _h1 = + 2V _S + V _O
V _h2 = -2V _S + V _O

In this way, by switching the energization direction, the sign of the signal component of the Hall electromotive force signal V _S in the detection signal of the Hall element is inverted between the first phase and the second phase as shown in Equation (1). Can be made. That is, in the spinning current method, the Hall electromotive force signal V _S is modulated by a spinning current clock to form a modulation signal, and the offset voltage V _O is used as a DC signal output, so that two signals can be separated in the frequency domain. Ideally, the offset signal can be removed using a filter or the like.

  As described above, the amplifying unit 110 receives the modulated detection signal of the magnetic sensor element 210 while switching and supplying the driving current of the magnetic sensor element 210, demodulates the detection signal, and outputs it as a first output. The amplifying unit 110 includes an amplifying circuit therein, and amplifies and outputs the output of the magnetic sensor element 210. The amplification unit 110 includes a switching unit 230, a first amplification circuit 240, a demodulation unit 250, a second amplification circuit 260, and a third amplification circuit 270.

The switching unit 230 is a first clock supplied from the outside with a terminal pair for passing a drive current between the first terminal pair and the second terminal pair of the magnetic sensor element 210 and a terminal pair for sensing the output of the magnetic sensor element 210. Switch according to. For example, in the first phase of the first clock, the switching unit 230 connects the power supply potential V _DD to the terminal 212 and the reference potential _VSS to the terminal 214, and supplies the drive current to the first terminal pair. In this case, in the second phase of the first clock, the switching unit 230 connects the power source to the terminal 218 and the reference potential _VSS to the terminal 216, and supplies a drive current to the second terminal pair. Note that the reference potential _VSS is 0 V as an example.

  In addition, for example, in the first phase of the first clock, the switching unit 230 uses the terminals 216 and 218 as detection terminals, and connects the detection terminals to the first amplification circuit 240 in the subsequent stage. In this case, the switching unit 230 uses the terminal 212 and the terminal 214 as detection terminals in the second phase of the first clock, and connects the detection terminals to the first amplification circuit 240 in the subsequent stage. Note that the switching unit 230 may use the terminal 218 and the terminal 212 as detection terminals on the positive side.

The first amplifier circuit 240 amplifies the output signal of the magnetic sensor element 210 supplied from the switching unit 230. The first amplifier circuit 240 may be a differential amplifier circuit. The first amplifier circuit 240 may be a transistor differential pair that converts a voltage into a current. For example, in the first phase of the first clock, the first amplifier circuit 240 amplifies the output voltage V _h1 from the second terminal pair shown in Formula 1 and in the second phase of the first clock, The output voltage V _h2 from the terminal pair is amplified. The first amplifier circuit 240 supplies the amplified signal to the demodulator 250.

  The demodulator 250 inverts the sign of the input signal at a predetermined timing. The demodulator 250 may invert the sign of the signal at a timing synchronized with the switching timing of the switching unit 230. That is, the demodulator 250 may invert the sign of the signal according to the first clock supplied from the outside.

  The demodulator 250 receives, for example, an input signal as a differential signal using two signal lines from the first amplifier circuit 240 and outputs it as a differential signal using two signal lines. In this case, the demodulator 250 connects one of the input signal lines to one of the output signal lines and connects the other of the input signal lines to the other of the output signal lines, or connects one of the input signal lines to the output signal line. And the other of the input signal lines may be connected to one of the output signal lines.

Thus, the first phase output signal V _o1 and the second phase output signal V _o2 of the demodulation unit 250 are expressed by the following equations. In the following equation, A indicates the amplification factor of the first amplifier circuit 240.
(Equation 2)
V _o1 = + A (2V _S + V _O )
V _o2 = + A (2V _S −V _O )

The demodulator 250 inverts the input signal in synchronization with the first clock so that the Hall electromotive force signal V _S becomes a DC component and the offset voltage V _O becomes a modulation signal component. The demodulator 250 supplies an output signal as shown in the equation (2) to the second amplifier circuit 260.

  The second amplifier circuit 260 amplifies the output signal supplied from the demodulator 250. The second amplifier circuit 260 may be a differential amplifier circuit. The second amplifier circuit 260 may be a current / voltage conversion circuit. The second amplifier circuit 260 supplies the amplified signal to the third amplifier circuit 270. The second amplifier circuit 260 supplies the amplified signal to the detection unit 120.

  The third amplifier circuit 270 amplifies the output signal supplied from the second amplifier circuit 260. The third amplifier circuit 270 may be a buffer amplifier. The third amplifier circuit 270 may be a differential amplifier circuit. The third amplifier circuit 270 may output an analog signal. The third amplifier circuit 270 may supply the amplified signal to the outside as the first output of the amplification unit 110. When the output signal of the second amplifier circuit 260 can be output as the first output of the amplifier unit 110, the third amplifier circuit 270 may be omitted.

The amplifying unit 110 according to the present embodiment outputs the magnetic field detection signal of the magnetic sensor element 210 having the Hall electromotive force signal V _S of the DC component and the offset voltage V _O of the modulation signal component as the first output. . Note that the amplifying unit 110 may further include a filter or the like, and may output a magnetic field detection signal in which the offset voltage V _O is reduced. Here, the delay amount from when the amplification unit 110 receives the output of the magnetic sensor element 210 to when the first output is output is defined as a first delay amount. As an example, the first delay amount is 5 μs.

  The detection unit 120 compares the amplified signal received from the amplification unit 110 with a threshold value to detect an abnormality. The detection unit 120 outputs the detection result as a second signal. Here, the detection unit 120 can change the delay time of the second signal. The detection unit 120 includes a threshold generation unit 310, a comparison unit 320, and a delay unit 330.

  The threshold generation unit 310 generates a threshold for a signal input from the amplification unit 110 to the detection unit 120. The threshold generation unit 310 may generate a threshold according to an instruction from the outside. The threshold generation unit 310 may generate thresholds corresponding to the upper limit value and the lower limit value of the output of the magnetic sensor element 210. The threshold generation unit 310 supplies the generated reference value to the comparison unit 320.

  The comparison unit 320 compares the output of the magnetic sensor element 210 or the output of the amplification unit 110 with the threshold generated by the threshold generation unit 310. For example, the comparison unit 320 outputs, as a comparison result, whether or not the output of the amplification unit 110 exceeds the upper limit and whether or not the output is lower than the lower limit. By using such a comparison result, an output abnormality of the magnetic sensor element 210 can be detected when the output of the amplifying unit 110 exceeds the upper limit or falls below the lower limit. Further, when the output of the amplification unit 110 is in a range between the upper limit and the lower limit, it can be detected that the output of the magnetic sensor element 210 is normal. The comparison unit 320 may compare the output of the magnetic sensor element 210 with a threshold value according to a second clock having a phase different from that of the first clock. The comparison unit 320 supplies the comparison result to the delay unit 330.

  The delay unit 330 delays and outputs the comparison result output from the comparison unit 320. The delay unit 330 includes a glitch filter 332 and a variable delay circuit 334. The glitch filter 332 removes the glitch of the comparison result output from the comparison unit 320. The glitch filter 332 reduces the erroneous determination of the comparison unit 320 caused by transient noise or the like. The glitch filter 332 may be configured with a low-pass filter, a sample hold circuit, and / or a flip-flop. The glitch filter 332 may operate according to the second clock, and counts the number of glitches according to the second clock (counts the comparison result output from the comparison unit 320) to determine whether the glitch is present. , Glitches may be removed.

  The variable delay circuit 334 delays and outputs the comparison result that has passed through the glitch filter 332. The variable delay circuit 334 may delay the comparison result according to the second clock. The variable delay circuit 334 delays and outputs the comparison result with a delay amount set from the outside. The variable delay circuit 334 may be adjustable to a range in which the delay amount of the detection unit 120 is equal to or exceeds the first delay amount. As an example, when the delay amount from the input of the detection unit 120 to the variable delay circuit 334 is 1 μs, the variable delay circuit 334 varies the delay amount in the range of 0 to 5 μs. The variable delay circuit 334 may be configured by a shift register, a counter, a flip-flop, and / or a combination of a plurality of delay lines and changeover switches. By configuring the glitch filter 332 and the variable delay circuit 334 in this manner, the delay unit 330 can adjust the delay time in detail while removing unnecessary glitches.

  The input / output unit 150 exchanges signals with the outside of the magnetic sensor device 200. For example, the input / output unit 150 receives a signal for setting a parameter of an internal circuit of the magnetic sensor device 200. Further, the input / output unit 150 may supply information such as parameters of the internal circuit to the outside in response to a request from the outside. Further, the input / output unit 150 may supply the operation state of the internal circuit to the outside. For example, the input / output unit 150 is connected to the external control device 10, and the control device 10 executes internal setting and / or operation control of the magnetic sensor device 200.

  The setting unit 160 sets parameters and the like of the internal circuit of the magnetic sensor device 200. The setting unit 160 may set parameters or the like of the internal circuit in accordance with an external instruction received by the input / output unit 150. The setting unit 160 includes a storage unit 162 and may store internal circuit parameters and the like. Further, the setting unit 160 may store parameters of the internal circuit according to a signal from the outside. Further, the setting unit 160 may store parameters of the internal circuit based on the data stored in the storage unit 162.

  The setting unit 160 sets the delay amount of the variable delay circuit 334 according to an instruction from the outside. The setting unit 160 may set the threshold value of the threshold value generation unit 310 in accordance with an instruction from the outside. The setting unit 160 may set the clock frequency of the clock generation unit 170 according to an instruction from the outside. In addition, the setting unit 160 may set the number of glitch filters 332 to be determined as a glitch or the time until removal according to an instruction from the outside.

  The clock generation unit 170 generates a first clock. The clock generator 170 generates a second clock signal having a cycle that is an integral multiple of the first clock and having a predetermined phase difference with respect to the timing of the first clock. That is, the second clock has a frequency that is an integer multiple of one or more of the first clock. The clock generation unit 170 may generate the frequency of the first clock and the second clock in a changeable manner. In this case, the frequency may be set by the setting unit 160. The clock generation unit 170 supplies the generated first clock to the amplification unit 110 and supplies the generated second clock to the detection unit 120.

  The magnetic sensor device 200 according to the present embodiment described above detects an abnormality in the magnetic detection component while separating the magnetic detection component and the offset component of the magnetic sensor element 210 in terms of frequency and outputting them as the first output by the spinning current method. The detection signal to be output is output as the second output. In addition, the magnetic sensor device 200 can adjust the delay amount of the second output from the outside via the input / output unit 150 in a programmable manner.

  Here, the magnetic sensor device 200 may set the delay amount of the second output smaller than the first delay amount of the first output. Thereby, the control device 10 or the like connected to the magnetic sensor device 200 receives the second output before receiving the first output, and the CPU 20 determines that the second output is a signal in which an abnormality is detected. The output of the inverter circuit can be shut off immediately. Thereby, protection of a motor, an inverter circuit, etc. can be performed easily. In this case, since the control device 10 and the like can change the delay amount of the second output of the magnetic sensor device 200, man-hours such as timing adjustment of the internal circuit of the control device 10 can be reduced, and the manufacturing cost can be reduced. be able to. Next, the comparison unit 320 of the magnetic sensor device 200 will be described.

  FIG. 3 shows a configuration example of the threshold generation unit 310 and the comparison unit 320 according to the present embodiment. In FIG. 3, the same reference numerals are given to substantially the same operations as those of the magnetic sensor device 200 according to the present embodiment shown in FIG. 2, and the description thereof is omitted.

The threshold generation unit 310 generates an upper threshold corresponding to the upper limit value of the output of the magnetic sensor element 210 and a lower threshold corresponding to the lower limit value. FIG. 3 illustrates an example in which the threshold generation unit 310 generates two thresholds using three resistors. Threshold generating part 310 has three resistors connected in series between the power supply voltage V _DD and reference potential V _SS. As an example, the resistor R1 is connected at one end to the power supply voltage V _DD, the resistor R2 having one end connected to the reference potential V _SS, the resistor R3 is connected between the resistors R1 and R2. The resistors R1 and R3 may be fixed resistors. The resistor R2 is a variable resistor, and the resistance value may be set by the setting unit 160.

  FIG. 3 shows an example in which the upper threshold is the potential between the resistors R1 and R3, and the lower threshold is the potential between the resistors R3 and R2. That is, when the setting unit 160 sets the resistance value of the resistor R3, the threshold value generation unit 310 can generate the corresponding upper threshold value and lower threshold value. Note that the threshold value generation unit 310 illustrated in FIG. 3 is an example, and is not limited to this example. For example, at least two of the resistors R1, R2, and R3 may be variable resistors. In this case, the setting unit 160 sets the resistance values of at least two variable resistors. Thereby, the setting part 160 can set an upper threshold value and a lower threshold value independently, respectively.

  The comparison unit 320 includes a first comparison circuit 322, a second comparison circuit 324, and a logic circuit 326. The first comparison circuit 322 compares the output signal from the second amplification circuit 260 with the upper threshold value. For example, the first comparison circuit 322 outputs a high potential when the output signal is larger than the upper threshold value, and outputs a low potential when the output signal is equal to or lower than the upper threshold value. That is, the first comparison circuit 322 determines whether or not the output of the magnetic sensor element 210 exceeds a set upper limit value.

  The second comparison circuit 324 compares the output signal from the second amplification circuit 260 with the lower threshold value. For example, the second comparison circuit 324 outputs a high potential when the output signal is smaller than the lower threshold value, and outputs a low potential when the output signal is equal to or higher than the lower threshold value. That is, the second comparison circuit 324 determines whether or not the output of the magnetic sensor element 210 has exceeded a set lower limit value. The first comparison circuit 322 and the second comparison circuit 324 may be comparators.

  The logic circuit 326 outputs a logical sum of the outputs of the first comparison circuit 322 and the second comparison circuit 324. That is, the logic circuit 326 outputs a high potential when the output of the magnetic sensor element 210 exceeds the upper limit value or falls below the lower limit value. The logic circuit 326 outputs a low potential when the output of the magnetic sensor element 210 is within the range between the upper limit value and the lower limit value. Next, operations of the threshold generation unit 310 and the comparison unit 320 will be described.

FIG. 4 shows a first example of an input signal and an output signal of the comparison unit 320 according to the present embodiment. The horizontal axis in FIG. 4 indicates time, and the vertical axis indicates signal voltage. 4 illustrates an example in which the reference potential V _SS is 0 V, the upper threshold voltage is greater than V _DD / 2 and less than V _DD , and the lower threshold voltage is greater than V _{SS and} less than V _DD / 2. Show. The comparator 320 outputs a high potential or low potential output signal in accordance with the input signal.

  For example, the comparison unit 320 outputs a high potential when the input signal exceeds the upper threshold voltage, and outputs a high potential when the input signal becomes less than the lower threshold voltage. The comparison unit 320 outputs a low potential when the input signal is not lower than the lower threshold voltage and not higher than the upper threshold voltage. As described above, the comparison unit 320 can detect an abnormality in the output of the magnetic sensor element 210 by comparing the input signal with the threshold value. Further, even when noise that instantaneously exceeds (or falls below) the threshold voltage is mixed in the input signal as shown in FIG. 4, the glitch filter 332 reduces the noise. An erroneous detection of an output abnormality of the sensor element 210 can be prevented.

  FIG. 5 shows a second example of the input signal and the output signal of the comparison unit 320 according to the present embodiment. The horizontal axis in FIG. 5 indicates time, and the vertical axis indicates signal voltage. FIG. 5 shows an example of an input signal and an output signal of the comparison unit 320 when the magnetic sensor device 200 executes the spinning current method. That is, the switching unit 230 uses the first clock generated by the clock generation unit 170 as a spinning current clock, and switches the terminal through which the drive current flows and the terminal that senses the output of the magnetic sensor element 210 to modulate the Hall electromotive force signal. Then, the demodulator 250 demodulates the modulated Hall electromotive force signal according to the first clock.

  When a constant magnetic field is input to the magnetic sensor element 210, the input signal of the comparison unit 320 is ideally a Hall electromotive force signal having a constant voltage. However, when the switching unit 230 executes the switching operation, spike-like transient noise may occur due to a stray capacitance component or the like that the magnetic sensor element 210 has. Also, spike-like transient noise may occur in the switching operation by the demodulator 250. Therefore, the comparison unit 320 performs the comparison operation using the second clock having different timings with respect to the rising and falling timings of the first clock.

  As a result, the comparison unit 320 can compare the input signal and the threshold value in a period in which spike noise generated at the rise and fall timings of the first clock is reduced, and perform a more accurate comparison operation. Can do. Further, the comparison unit 320 can increase the time resolution by using a second clock having a frequency twice or more that of the first clock.

  FIG. 5 shows an example in which positive spike noise occurs in the input signal at the rising timing of the first phase of the first clock, and negative spike noise occurs in the input signal at the falling timing of the second phase. The comparison unit 320 has an input signal and a threshold value according to the second clock having a frequency twice that of the first clock and having a phase difference of Δφ with respect to the rising and falling timings of the first clock. An example of comparison will be shown.

  And the comparison part 320 makes the signal output the result of having compared an input signal and a threshold value according to a 2nd clock. FIG. 5 shows an example in which the comparison unit 320 sets the output signal to a high potential in response to the input signal exceeding the upper threshold at the falling timing of the second clock. Further, an example in which the comparison unit 320 sets the output signal to a low potential in response to the input signal being equal to or lower than the upper threshold at the falling timing of the second clock.

  As described above, even when an input signal having spike-like noise is input at the timing of the first clock, the detection unit 120 can detect the magnetic sensor element 210 by using the second clock having a phase different from that of the first clock. It is possible to prevent erroneous detection of output abnormality. Therefore, the magnetic sensor device 200 can accurately detect the output abnormality of the magnetic sensor element 210 while executing the spinning current method to frequency-separate the DC noise component of the magnetic sensor element 210 from the signal component. And since the magnetic sensor apparatus 200 delays the comparison result of the comparison part 320 which is a detection result programmably, the output of the magnetic sensor element 210 which isolate | separated the noise, and the output timing of an exact detection result from the outside Can be output in accordance with the instruction.

  Although the magnetic sensor device 200 according to the present embodiment has been described as an example having one set of the comparison unit 320 and the delay unit 330, the present invention is not limited to this. The magnetic sensor device 200 may include a plurality of comparison units 320 and delay units 330. In this case, the magnetic sensor device 200 includes a plurality of comparison units 320 that compare the output of the magnetic sensor element 210 or the output of the amplification unit 110 with a threshold value, and a comparison result output by the corresponding comparison unit 320 among the plurality of comparison units 320. And a plurality of delay units 330 that respectively output the signals after delaying. Next, an example of such a magnetic sensor device 200 will be described.

  FIG. 6 shows a first modification of the magnetic sensor device 200 according to the present embodiment. In the magnetic sensor device 200 of the first modified example, the same reference numerals are given to substantially the same operations as those of the magnetic sensor device 200 according to the present embodiment shown in FIG. The magnetic sensor device 200 according to the first modification includes a plurality of sets of comparison units 320 and delay units 330.

  Here, each of the plurality of delay units 330 includes a variable delay circuit 334. The setting unit 160 sets each delay amount of the variable delay circuit 334 according to an instruction from the outside. The plurality of delay units 330 may further include a plurality of glitch filters 332 that respectively remove the glitches of the comparison results output from the corresponding comparison units 320 among the plurality of comparison units 320. In this case, each of the variable delay circuits 334 delays and outputs the comparison result that has passed through the corresponding glitch filter 332 among the plurality of glitch filters 332.

  Further, each of the plurality of comparison units 320 compares the output of the magnetic sensor element 210 or the output of the amplification unit 110 with a threshold according to the second clock. In addition, each of the plurality of delay units 330 delays the comparison result output from the corresponding comparison unit 320 according to the second clock. That is, the magnetic sensor device 200 of the first modification includes a plurality of detection units 120. FIG. 6 shows an example in which the magnetic sensor device 200 includes a detection unit 120 that outputs a second output and a detection unit 130 that outputs a third output.

  The setting unit 160 may be able to set different values for the threshold value set in the threshold value generation unit 310 of the detection unit 120 and the threshold value set in the threshold value generation unit 310 of the detection unit 130. For example, among the plurality of comparison units 320 and delay units 330, the first set of comparison units 320 compares the output of the magnetic sensor element 210 or the output of the amplification unit 110 with a first threshold value. In addition, among the plurality of comparison units 320 and delay units 330, the second set of comparison units 320 compares the output of the magnetic sensor element 210 or the output of the amplification unit 110 with a second threshold different from the first threshold. To do. In FIG. 6, detection unit 120 is an example of a first set of comparison unit 320 and delay unit 330, and detection unit 130 is an example of a second set of comparison unit 320 and delay unit 330. is there.

  Then, the setting unit 160 sets a first threshold value in the comparison unit 320 of the detection unit 120 and sets a second threshold value in the comparison unit 320 of the detection unit 130. Here, the first threshold value may have a first upper threshold value and a first lower threshold value indicating a predetermined first output range of the magnetic sensor element 210, and the second threshold value is determined in advance of the magnetic sensor element 210. The second output range, and may have a second upper threshold value that is smaller than the first upper threshold value and a second lower threshold value that is larger than the first lower threshold value.

  Thereby, the control device 10 or the like connected to the magnetic sensor device 200 according to the first modification can use the second output of the detection unit 120 and the third output of the detection unit 130 for different purposes. As an example, the control device 10 sets the threshold value of the detection unit 120 to about the rated output voltage of the first output or about the rated output range of the first output, and in response to the second output becoming a high potential, The CPU 20 cuts off the output of the inverter circuit. For example, when the rated output voltage of the first output is 4.5 V on the high voltage side and 0.5 V on the low voltage side, the threshold of the detection unit 120 is 4.4 V on the high voltage side and 0. 0 on the low voltage side. It may be 6V.

  For example, when the control device 10 includes a feedback circuit that controls the magnitude of the magnetic field input to the magnetic sensor element 210, the threshold range of the detection unit 130 is set to be narrower than the threshold range of the detection unit 120. You can do it. That is, the upper threshold voltage of the detection unit 130 is made smaller than the upper threshold voltage of the detection unit 120. Further, the lower threshold voltage of the detection unit 130 is made larger than the lower threshold voltage of the detection unit 120. In this case, the control device 10 may operate the feedback circuit so that the output of the magnetic sensor element 210 is in a normal operating range in response to the third output becoming a high potential. As a result, the control device 10 uses the third output to control the input magnetic field in accordance with the output of the magnetic sensor element 210, while using the second output, the output signal indicating that the magnetic sensor element 210 has a serious abnormality. The operation can be stopped when the range is reached.

  Here, the setting unit 160 may be able to set the delay time of the detection unit 120 and the delay time of the detection unit 130 to different values. That is, the first set of delay units 330 may have a different delay amount than the second set of delay units 330. In this case, the first set of delay units 330 may have a smaller delay amount than the second set of delay units 330. Alternatively, the first set of delay units 330 may have a larger delay amount than the second set of delay units 330.

  As an example, the control device 10 sets the delay time of the delay unit 330 of the detection unit 120 to be shorter than the delay time of the delay unit 330 of the detection unit 130. Thereby, the control apparatus 10 can receive earlier than the 3rd output whether the output of the magnetic sensor element 210 became the range which shows serious abnormality from 2nd output, and can stop operation | movement immediately. . As an example, the control device 10 sets the delay time of the detection unit 120 to be longer than the delay time of the detection unit 130. As a result, the control device 10 starts protection control by the second output even when the output of the magnetic sensor element 210 changes rapidly and the detection unit 120 and the comparison unit 320 of the detection unit 130 simultaneously output a high potential. Before this, it is possible to secure time for executing the protection control by the third output. That is, fine control of the control device 10 can be realized by setting the delay times of the detection unit 120 and the detection unit 130 to different values in this way.

  FIG. 7 shows a second modification of the magnetic sensor device 200 according to the present embodiment. In the magnetic sensor device 200 of the second modification, the same reference numerals are given to the substantially same operations as those of the magnetic sensor device 200 according to the present embodiment shown in FIG. The magnetic sensor device 200 of the second modified example further includes an integration unit 350 and an integration notification unit 360. FIG. 7 shows an example in which the detection unit 120 includes an integration unit 350 and an integration notification unit 360.

  The integration unit 350 integrates the comparison result output from the comparison unit 320 or the delayed comparison result output from the delay unit 330. FIG. 7 shows an example in which the integration unit 350 integrates the delayed comparison results output from the delay unit 330. The integration unit 350 may increase the count number according to the comparison result of the high potential of the comparison unit 320 and may decrease the count number according to the comparison result of the low potential. Instead, the integration unit 350 includes a first counter that increases the count number according to the comparison result of the high potential of the comparison unit 320 and a second counter that increases the count number according to the comparison result of the low potential. You may have.

  Here, the setting unit 160 may set the reference range of the integrating unit 350 in accordance with an instruction from the outside. For example, the setting unit 160 sets the upper and lower potential count values of the integrating unit 350.

  The integration notification unit 360 notifies the outside that the integration result of the integration unit 350 is out of the reference range. For example, the integration notification unit 360 outputs a high potential notification signal to the outside in response to the comparison unit 320 outputting the comparison result of the high potential exceeding the specified count number. Further, the integration notifying unit 360 outputs a low potential notification signal to the outside in response to the comparison unit 320 outputting the comparison result of the low potential exceeding the designated count number. Thereby, the magnetic sensor device 200 of the second modified example can supply a notification signal to the outside, for example, when the state in which the output of the magnetic sensor element 210 indicates abnormality is continued.

  The magnetic sensor device 200 of the second modified example may also include a plurality of comparison units 320 and delay units 330 as described with reference to FIG. In this case, the magnetic sensor device 200 displays the comparison result output by the corresponding comparison unit 320 among the plurality of comparison units 320 or the delayed comparison result output by the corresponding delay unit 330 among the plurality of delay units 330. One or a plurality of integrating units 350 for integrating are provided. In addition, the magnetic sensor device 200 includes one or more integration notification units 360 that correspond to one or more integration units and notify the outside that the integration result of the corresponding integration unit 350 is out of the reference range. In other words, the magnetic sensor device 200 may include a plurality of detection units 120, and at least one detection unit 120 among the plurality of detection units 120 may include an integration unit 350 and an integration notification unit 360.

  FIG. 8 shows a third modification of the magnetic sensor device 200 according to the present embodiment. In the magnetic sensor device 200 of the third modification, the same reference numerals are given to the substantially same operations as those of the magnetic sensor device 200 according to this embodiment shown in FIG. The magnetic sensor device 200 of the third modification includes an AD conversion unit 272 instead of the third amplifier circuit 270. The magnetic sensor device 200 further includes an integration unit 352 and an integration notification unit 362. FIG. 8 illustrates an example in which the amplification unit 110 includes an AD conversion unit 272 and the detection unit 120 includes an integration unit 352 and an integration notification unit 362.

  The AD converter 272 converts the output signal supplied from the second amplifier circuit 260 into a digital signal. In other words, the amplification unit 110 of the third modification amplifies the output of the magnetic sensor element 210, converts it into a digital signal, and outputs it as a first output. Note that the AD conversion unit 272 may output the converted digital signal from the input / output unit 150.

  The integration unit 352 integrates the amplified output of the magnetic sensor element 210 in response to the comparison result output from the comparison unit 320 or the delayed comparison result output from the delay unit 330 being a predetermined logical value. To do. FIG. 8 illustrates an example in which the integration unit 352 integrates the delayed comparison result output from the delay unit 330. The integration unit 352 integrates the output from the AD conversion unit 272 in response to the comparison result of the comparison unit 320 being a high potential. The integration unit 352 integrates the output signal of the AD conversion unit 272, thereby calculating the total amount of current flowing through a motor or the like that generates a magnetic field incident on the magnetic sensor element 210, and the amount of power input to the motor or the like. Can be calculated. Further, the integration unit 352 may integrate the output signal of the AD conversion unit 272 into the square, and in this case also, the amount of power input to the motor can be calculated.

  Here, the setting unit 160 may set the reference range of the integrating unit 352 in accordance with an instruction from the outside. For example, the setting unit 160 sets the total amount of current of the integration unit 352 and / or the upper limit value of the output power.

  The integration notification unit 362 notifies the outside that the integration result of the integration unit 352 is out of the reference range. For example, the integration notification unit 362 outputs a high-potential notification signal to the outside in response to the AD conversion unit 272 having output more than the specified total amount of current. In addition, the integration notification unit 360 outputs a low-potential notification signal to the outside in response to the AD converter 272 outputting a first output less than the specified total amount of current. Thereby, the magnetic sensor device 200 of the third modified example can supply a notification signal to the outside when, for example, a state in which the output of the magnetic sensor element 210 indicates abnormality is continued.

  Note that the timing at which the AD conversion unit 272 outputs the first output and the timing at which the comparison unit 320 or the delay unit 330 outputs the comparison result are often different. For example, when the update rate at which the AD converter 272 outputs the first output is 12.5 μs and the update rate of the delay unit 330 is 2 μs, the output of the AD converter 272 to be integrated during 10.5 μs is The amount of integration will be insufficient.

Therefore, when the integration unit 352 starts integration, the integration unit 352 converts the output value V _AD (t ₀ ) at the time t _{0 when} the output of the AD conversion unit 272 is first updated after the comparison result becomes a high potential into the AD conversion. A value obtained by multiplying the difference between the update rates of the unit 272 and the delay unit 330 may be added to the integral value. Next, the integration unit 352 will be described.

  FIG. 9 shows a configuration example of the integrating unit 352 according to the present embodiment. Integration unit 352 includes a count unit 410, a multiplication unit 420, a calculation unit 430, and a comparison unit 440. The count unit 410 receives the comparison result of the delayed comparison unit 320 supplied from the delay unit 330. For example, the count unit 410 starts counting after the comparison result of the comparison unit 320 becomes a high potential, and measures an elapsed time after the comparison result becomes a high potential.

The multiplication unit 420 acquires the output V _AD (t) of the AD conversion unit 272 after the time t ₀ when the output of the AD conversion unit 272 is updated after the comparison result becomes a high potential (t = t ₀ , _{t 1, t 2, ...)} . The multiplying unit 420 sets the output value V _AD (t ₀ ) at the time t _{0 when} the output of the AD conversion unit 272 is updated to the time when the output of the AD conversion unit 272 is updated after the comparison result becomes a high potential. The time t _cnt counted by the counting unit 410 is multiplied. The multiplication result t _cnt · V _AD (t ₀ ) of the multiplication unit 420 substantially matches the output of the AD conversion unit 272 to be integrated while the AD conversion unit 272 updates the first output.

The calculation unit 430 integrates a value obtained by multiplying the output V _AD (t _k ) of the AD conversion unit 272 after time t ₀ by the sampling interval Δt of the AD conversion unit 272, and the multiplication result of the multiplication unit 420 is added to the integration result. t _cnt · V _AD (t ₀ ) is added. The calculation result S of the calculation unit 430 is expressed by the following equation. The integration unit 352 sets the calculation result S as an integration result.
(Equation 3)
S = t _cnt · V _AD (t ₀ ) + ΣV _AD (t _k ) · Δt

  The comparison unit 440 compares the calculation result S with the upper limit value received from the setting unit 160. Thereby, the comparison part 440 can compare the calculation result S which added the output of the AD conversion part 272 which should be integrated | accumulated, and an upper limit, and can perform more exact comparison.

  The magnetic sensor device 200 of the third modified example may also include a plurality of comparison units 320 and delay units 330 as described with reference to FIG. In this case, the magnetic sensor device 200 has a comparison result output from the corresponding comparison unit 320 among the plurality of comparison units 320 or a delayed comparison result output from the corresponding delay unit 330 among the plurality of delay units 330. One or a plurality of integrating units 352 for integrating the amplified output of the magnetic sensor element 210 according to the predetermined logic value. Further, the magnetic sensor device 200 includes one or a plurality of integration notification units 362 that correspond to one or a plurality of integration units 352 and notify the outside that the integration result of the corresponding integration unit 352 is out of the reference range. . That is, the magnetic sensor device 200 may include a plurality of detection units 120, and at least one of the detection units 120 may include an integration unit 352 and an integration notification unit 362.

  FIG. 10 shows a fourth modification of the magnetic sensor device 200 according to the present embodiment. In the magnetic sensor device 200 of the fourth modification, the same reference numerals are given to the substantially same operations as those of the magnetic sensor device 200 according to the present embodiment shown in FIGS. 2 and 8, and the description thereof is omitted. The magnetic sensor device 200 of the fourth modification includes a first failure determination unit 370 to determine its own failure. The magnetic sensor device 200 includes an AD converter 272 instead of the third amplifier circuit 270. FIG. 10 illustrates an example in which the amplification unit 110 includes the AD conversion unit 272 and the detection unit 120 includes the first failure determination unit 370.

  The first failure determination unit 370 determines a failure based on whether the digital signal is not a value corresponding to the logical value of the comparison result output from the comparison unit 320 or the delayed comparison result output from the delay unit 330. FIG. 10 illustrates an example in which the first failure determination unit 370 acquires the delayed comparison result output from the delay unit 330 and determines whether or not the first failure determination unit 370 corresponds to the digital signal from the AD conversion unit 272.

  Here, the setting unit 160 may supply the first failure determination unit 370 with a digital value of a threshold corresponding to the threshold set in the threshold generation unit 310. The first failure determination unit 370 compares the digital value of the threshold value with the output of the AD conversion unit 272. And the 1st failure determination part 370 determines with the magnetic sensor apparatus 200 having failed, when the said comparison result of self and the comparison result of the comparison part 320 do not respond | correspond. When the first failure determination unit 370 determines a failure, the first failure determination unit 370 may notify the determination result to the outside.

  When the output timing of the AD conversion unit 272 and the output timing of the comparison result of the comparison unit 320 or the delay unit 330 are different, the first failure determination unit 370 waits until a time equal to or greater than the time corresponding to the timing difference elapses. Failure determination may be continued. The first failure determination unit 370 may determine that the magnetic sensor device 200 has failed when the comparison result of the self does not correspond to the comparison result of the comparison unit 320 during the continued time. . As described above, the magnetic sensor device 200 of the fourth modified example can determine a failure inside the device.

  The magnetic sensor device 200 of the fourth modified example may also include a plurality of comparison units 320 and delay units 330 as described with reference to FIG. In this case, in the magnetic sensor device 200, the digital signal output from the amplification unit 110 is compared with the comparison result output from the corresponding comparison unit 320 among the plurality of comparison units 320 or the corresponding delay unit among the plurality of delay units 330. One or a plurality of first failure determination units 370 for determining a failure in response to the fact that the value is not a value corresponding to the logical value of the delayed comparison result output by 330. That is, the magnetic sensor device 200 may include a plurality of detection units 120, and at least one detection unit 120 among the plurality of detection units 120 may include the first failure determination unit 370.

  FIG. 11 shows a fifth modification of the magnetic sensor device 200 according to this embodiment. In the magnetic sensor device 200 of the fifth modified example, the same reference numerals are given to the substantially same operations as those of the magnetic sensor device 200 according to the present embodiment shown in FIGS. 2 and 6, and the description thereof is omitted. The magnetic sensor device 200 of the fifth modified example includes a plurality of detection units and a second failure determination unit 380 to determine its own failure. The magnetic sensor device 200 includes an AD converter 272 instead of the third amplifier circuit 270. FIG. 11 shows an example in which the magnetic sensor device 200 includes a detection unit 120 that outputs a second output and a detection unit 130 that outputs a third output, and the amplification unit 110 includes an AD conversion unit 272.

  The second failure determination unit 380 includes a comparison result output from the comparison unit 320 in the first set of the comparison unit 320 and the delay unit 330 or a delayed comparison result output from the delay unit 330, and the comparison unit 320 and the delay unit 330. A failure is determined according to a comparison result output from the comparison unit 320 in the second set or a delayed comparison result output from the delay unit 330. FIG. 11 illustrates an example in which the second failure determination unit 380 compares the delayed comparison result output from the delay unit 330 of the detection unit 120 and the delayed comparison result output from the delay unit 330 of the detection unit 130. Show.

  Here, as an example, it is assumed that the upper threshold voltage of the detection unit 120 is smaller than the upper threshold voltage of the detection unit 130. Further, it is assumed that the lower threshold voltage of the detection unit 120 is larger than the lower threshold voltage of the detection unit 130. In addition, the delay amount of the detection unit 120 is less than the delay amount of the detection unit 130. In this case, the third output of the detection unit 130 cannot be higher in time than the second output of the detection unit 120. In addition, the second output of the detection unit 120 cannot become a low potential in time before the third output of the detection unit 130.

  Therefore, the second failure determination unit 380 indicates that the third output of the detection unit 130 is higher in time than the second output of the detection unit 120 and / or the detection unit 120 It is determined that the magnetic sensor device 200 has failed in response to the second output becoming a low potential temporally before the third output of the detection unit 130. When determining the failure, the second failure determination unit 380 may notify the determination result to the outside.

  In addition, the setting unit 160 may supply the second failure determination unit 380 with digital values of thresholds corresponding to the threshold values set in the detection unit 120 and the threshold generation unit 310 of the detection unit 130, respectively. The second failure determination unit 380 compares the digital value of the threshold value with the output of the AD conversion unit 272. And the 2nd failure determination part 380 determines with the magnetic sensor apparatus 200 having failed, when the said comparison result of self and the comparison result of the comparison part 320 of the detection part 120 and the detection part 130 do not respond | correspond. When determining the failure, the second failure determination unit 380 may notify the determination result to the outside.

  When the output timing of the AD conversion unit 272 is different from the output timing of the comparison result of the comparison unit 320 or the delay unit 330 of the detection unit 120 and the detection unit 130, as described with reference to FIG. 10, the second failure determination unit 380 May continue to determine the failure until a time equal to or greater than the time corresponding to the timing difference has elapsed. As described above, the magnetic sensor device 200 of the fifth modified example can determine a failure inside the device.

  In the magnetic sensor device 200 according to the present embodiment described above, the example in which the delay unit 330 delays and outputs the comparison result output by the comparison unit 320 has been described. In addition, the magnetic sensor device 200 may delay a signal input to the comparison unit 320. Next, an example of such a magnetic sensor device 200 will be described.

  FIG. 12 shows a sixth modification of the magnetic sensor device 200 according to this embodiment. In the magnetic sensor device 200 of the sixth modified example, the same reference numerals are given to the substantially same operations as those of the magnetic sensor device 200 according to this embodiment shown in FIG. The magnetic sensor device 200 of the sixth modified example shows an example further including a delay circuit 510.

  The delay circuit 510 delays the output of the magnetic sensor element 210. The delay circuit 510 may be a delay circuit having a fixed delay amount. Alternatively, the delay circuit 510 may be a delay circuit having a variable delay amount. The delay circuit 510 may include a buffer amplifier and / or a delay line.

  The delay circuit 510 may include a filter that reduces noise. In this case, the filter may form a low-pass filter and be used for removing ripples and the like. The delay circuit 510 may include an antialiasing filter, a bandpass filter, and / or a notch filter. Note that the delay circuit 510 may include a resistor having a fixed resistance value and / or a variable resistor that can change the resistance value. The delay circuit 510 may include a capacitor having a fixed capacitance and / or a variable capacitor capable of changing the capacitance.

  In FIG. 12, the delay circuit 510 shows an example provided in the amplification unit 110. FIG. 12 shows an example in which the delay circuit 510 is provided between the second amplifier circuit 260 and the third amplifier circuit 270. Then, among the plurality of comparison units 320 and delay units 330, the first set of comparison units 320 compares the input of the delay circuit 510 with the first threshold value. In addition, among the plurality of comparison units 320 and delay units 330, the second set of comparison units 320 compares the output of the delay circuit 510 with the second threshold value.

  That is, in FIG. 12, the comparison unit 320 of the detection unit 120 compares the output of the second amplifier circuit 260 with the first threshold value, and the comparison unit 320 of the detection unit 130 compares the output of the delay circuit 510 with the second threshold value. An example is shown. As a result, the detection unit 130 receives the amplified signal from the amplification unit 110 with a delay of the delay time of the delay circuit 510 from the time when the detection unit 120 receives the amplified signal from the amplification unit 110.

  Thereby, the magnetic sensor device 200 of the sixth modified example can adjust the timing of the comparison operation with the threshold values in the detection unit 120 and the detection unit 130. In addition, the magnetic sensor device 200 can delay a signal and reduce noise by providing a filter or the like in the delay circuit 510. Therefore, since the magnetic sensor device 200 uses the output of the second amplifier circuit 260 for the control to be processed at high speed, the comparison operation of the comparison unit 320 can be executed at high speed. In addition, since the magnetic sensor device 200 uses a signal whose noise has been reduced through the delay circuit 510 with respect to the control to be processed with a delay, the comparison operation of the comparison unit 320 can be executed with high accuracy.

  For example, the magnetic sensor device 200 causes the comparison unit 320 of the detection unit 120 to execute an operation of determining a range of an output signal indicating a serious abnormality such as an overcurrent at high speed according to the magnetic field of the current to be measured. As a result, the magnetic sensor device 200 can detect a serious abnormality at a higher speed and prevent destruction, deterioration, and the like. Further, when feedback control is performed so that the output of the magnetic sensor element 210 falls within the normal operating range, the magnetic sensor device 200 uses a signal whose noise has been reduced through the delay circuit 510 and uses a more accurate comparison operation. Can do.

  In addition, the magnetic sensor device 200 according to the sixth modification adjusts the output timing of the second output output from the detection unit 120 and the third output output from the detection unit 130 using the delay time of the delay circuit 510. be able to. Therefore, the magnetic sensor device 200 of the sixth modified example has the second output and the third output in a time range larger than the difference in delay time that can be set by the delay unit 330 of the detection unit 120 and the delay unit 330 of the detection unit 130. Output timing can be adjusted. In addition, since the magnetic sensor device 200 according to the sixth modification includes the delay circuit 510 in the amplification unit 110, the first output with reduced noise can be output from the amplification unit 110.

  FIG. 13 shows a seventh modification of the magnetic sensor device 200 according to this embodiment. In the magnetic sensor device 200 of the seventh modification, the same reference numerals are given to the substantially same operations as those of the magnetic sensor device 200 according to this embodiment shown in FIG. The magnetic sensor device 200 according to the seventh modification shows an example in which the delay circuit 510 is provided in the detection unit 130.

  FIG. 13 illustrates an example in which the delay circuit 510 is provided between the second amplifier circuit 260 and the comparison unit 320 of the detection unit 130. Even in this case, the first set of comparison units 320 among the sets of the plurality of comparison units 320 and the delay units 330 compares the input of the delay circuit 510 with the first threshold value, and compares the second set. The unit 320 compares the output of the delay circuit 510 with the second threshold value.

  Therefore, similarly to the magnetic sensor device 200 of the sixth modification, the magnetic sensor device 200 of the seventh modification can adjust the timing of the comparison operation with the threshold values in the detection unit 120 and the detection unit 130. In addition, since the magnetic sensor device 200 according to the seventh modification includes the delay circuit 510 in the detection unit 130, the first output from the amplification unit 110 can be output without causing a delay. Further, the magnetic sensor device 200 can accurately execute the comparison operation of the second set of comparison units 320 by including a filter or the like in the delay circuit 510.

  FIG. 14 shows an eighth modification of the magnetic sensor device 200 according to this embodiment. In the magnetic sensor device 200 of the eighth modification, the same reference numerals are given to the substantially same operations as those of the magnetic sensor device 200 according to the present embodiment shown in FIGS. 11 and 12, and the description thereof is omitted. The magnetic sensor device 200 of the eighth modified example shows an example including a delay circuit 510 and a second failure determination unit 380.

  As described with reference to FIG. 12, the delay circuit 510 adjusts the timing of the comparison operation with the threshold values in the detection unit 120 and the detection unit 130. The delay circuit 510 may be provided in the amplification unit 110 as in the example illustrated in FIG. 14, or may be provided in the detection unit 130 instead. When the delay circuit 510 is provided in the detection unit 130, the delay circuit 510 may be provided before the comparison unit 320.

  As described with reference to FIG. 11, the second failure determination unit 380 determines a failure according to a result of comparing the second output of the detection unit 120 and the third output of the detection unit 130. The second failure determination unit 380 can easily determine the failure of the magnetic sensor device 200 by detecting the timing at which the high potential or the low potential of the second output and the third output is output.

  FIG. 15 shows a ninth modification of the magnetic sensor device 200 according to this embodiment. In the magnetic sensor device 200 of the ninth modified example, the same reference numerals are given to substantially the same operations as those of the magnetic sensor device 200 according to the present embodiment shown in FIGS. 11 and 12, and the description thereof is omitted. The magnetic sensor device 200 of the ninth modified example shows an example including a delay circuit 510 and a second failure determination unit 380.

  Further, the magnetic sensor device 200 of the ninth modification includes an AD conversion unit 272 instead of the third amplifier circuit 270. The AD conversion unit 272 converts the output of the delay circuit 510 into a digital signal and outputs it.

  As described with reference to FIG. 12, the delay circuit 510 adjusts the timing of the comparison operation with the threshold values in the detection unit 120 and the detection unit 130. The delay circuit 510 may be provided in the amplification unit 110 as in the example illustrated in FIG. 14, or may be provided in the detection unit 130 instead. When the delay circuit 510 is provided in the detection unit 130, the delay circuit 510 may be provided before the comparison unit 320.

  As described with reference to FIG. 11, the second failure determination unit 380 determines a failure according to a result of comparing the second output of the detection unit 120 and the third output of the detection unit 130. The second failure determination unit 380 can easily determine the failure of the magnetic sensor device 200 by detecting the timing at which the high potential or the low potential of the second output and the third output is output.

  The setting unit 160 may supply the second failure determination unit 380 with digital values corresponding to the first threshold value and the second threshold value set in the threshold value generation unit 310 of the detection unit 120 and the detection unit 130, respectively. The second failure determination unit 380 compares the digital value of the threshold value with the output of the AD conversion unit 272. And the 2nd failure determination part 380 determines with the magnetic sensor apparatus 200 having failed, when the said comparison result of self and the comparison result of the comparison part 320 of the detection part 120 and the detection part 130 do not respond | correspond. When determining the failure, the second failure determination unit 380 may notify the determination result to the outside.

  When the output timing of the AD conversion unit 272 is different from the output timing of the comparison result of the comparison unit 320 or the delay unit 330 of the detection unit 120 and the detection unit 130, as described with reference to FIG. 10, the second failure determination unit 380 May continue to determine the failure until a time equal to or greater than the time corresponding to the timing difference has elapsed. As described above, the magnetic sensor device 200 of the ninth modified example can determine a failure inside the device.

  In the magnetic sensor device 200 according to the embodiment described above, the comparison unit 320 has been described as an example of comparing the output of the amplification unit 110 with the threshold value. Here, the comparison unit 320 only needs to be able to detect an output abnormality of the magnetic sensor element 210, and may compare any output of each unit in the amplification unit 110 with a threshold value. The comparison unit 320 may compare the output of the magnetic sensor element 210 with a threshold value.

  FIG. 16 shows a configuration example of a package 50 in which the magnetic sensor device 200 according to this embodiment is mounted and a current sensor device 300 including the package 50. The control device 10 connected to the current sensor device 300 of the present embodiment is substantially the same as the operation of the control device 10 connected to the sensor device 100 according to the present embodiment shown in FIG. Description is omitted.

The package 50 has the magnetic sensor device 200 mounted therein. The package 50 includes a first output terminal 52 that outputs an output signal of the amplification unit and a second output terminal 54 that outputs an output signal of the delay unit 330. Further, the package 50 may have a plurality of second output terminals 54 corresponding to the plurality of detection units 120 when the magnetic sensor device 200 including the plurality of detection units 120 is mounted. That is, the package 50 has one or a plurality of second output terminals 54. The one or more second output terminals 54 output an output signal of the corresponding delay unit 330 among the plurality of delay units 330. The package 50 may have an input / output terminal 56 corresponding to the input / output unit 150. Also, the package 50 includes a power supply and a power supply terminal voltage is connected to V _DD, may have a reference potential terminal connected to the reference potential V _SS further.

  Thereby, the control device 10 supplies a signal instructing setting of the packaged magnetic sensor device 200, and receives a first output, a second output, and the like output from the magnetic sensor device 200 in response to the instruction. it can. Further, the magnetic sensor device 200 can be easily mounted on an external device or the like as a magnetic sensor that is reduced in size and weight by being mounted on the package 50.

  Further, the package 50 may be connected to a current path through which a current to be measured flows. FIG. 16 shows an example in which the package 50 is connected between the current path 40 and the current path 42. That is, the magnetic sensor device 200 is arranged corresponding to the current path 40 and the current path 42 and detects a magnetic field generated according to the current to be measured. As a result, the current path 40, the current path 42, and the magnetic sensor device 200 can constitute a current sensor device 300.

  Therefore, when the control device 10 drives a motor or the like, the current sensor device 300 can detect fluctuations in the drive current by providing the current sensor device 300 in the current path for supplying the drive current to the motor. In addition, the current sensor device 300 can notify the control device 10 that the drive current has become excessive or excessive. The control device 10 can stably control the motor drive based on the detection result of the fluctuation of the drive current, the excessive current, and the excessive current.

  In the above description of the embodiment, the glitch filter 332 and the variable delay circuit 334 have been described separately. However, the variable delay circuit 334 may have the function of the glitch filter 332. Also in this case, according to an instruction from the outside, the number of determinations until the glitch removed by the variable delay circuit 334 or the time until removal may be set.

  In the above description of the embodiment, it has been described that the comparison unit 320, the glitch filter 332, and the variable delay circuit 334 operate according to the second clock, but instead, the glitch filter 332 and the variable delay circuit are operated. A third clock different from the second clock may be supplied to 334 for operation. The third clock may be a clock having a phase different from that of the second clock. Alternatively or additionally, the third clock may have a frequency that is an integer multiple of two or more of the second clock. Thereby, the delay of the delay unit 330 can be adjusted in more detail.

  For example, when the second clock is 1 MHz and the third clock is 10 MHz, the determination by the comparison unit is performed at 1 μs intervals, and the delay by the delay unit 330 can be adjusted with a resolution of 100 ns. Further, the comparison unit 320 may always operate regardless of the second clock, and the delay unit 330 may operate with the second clock. In this case, the comparison unit 320 always performs the comparison operation. In this case, the comparison unit 320 outputs the determination result with spike-like noise, but the spike-like noise can be reduced by the glitch filter 332 removing the noise time. In this case, the second clock may not have a phase different from that of the first clock.

  Further, in the sixth to ninth modifications (FIGS. 12, 13, 14, and 15) of the above embodiment, an example in which the delay circuit 510 is provided in the amplification unit 110 or the detection unit 130 will be described. However, the present invention is not limited thereto, and the delay circuit 510 may be provided in front of the comparison unit 320 of the detection unit 120 and the detection unit 130, respectively. Thereby, the magnetic sensor device 200 can execute the comparison operation of the first and second sets of comparison units 320 with high accuracy by including a filter or the like in the delay circuit 510.

  When the delay circuit 510 is provided in front of the detection unit 120 and the comparison unit 320 of the detection unit 130, the delay unit 330 may not be provided. Even in this case, fine control of the control device 10 can be realized by setting the delay amounts of the delay circuits to different values, for example.

  In the second to fifth, eighth, and ninth modified examples (FIGS. 7, 8, 10, 11, 14, and 15) of the above embodiment, the magnetic sensor device 200 is notified. A signal may be output from the input / output unit 150 to the outside. Further, the magnetic sensor device 200 may supply the output value of the notification signal to the outside outside the rated output range of the first output. For example, in the second modified example, when the rated output voltage is 4.5V or 0.5V, it may be supplied to the outside at 4.9V, 0.1V or the like. In the third to fifth and ninth modifications, a digital value other than the digital value in the rated output range may be supplied to the outside. Thereby, the magnetic sensor device 200 can superimpose the notification signal on other signals in communication with the outside, and can transmit the notification signal without increasing the number of signal lines.

  Further, as described in the second to fifth, eighth, and ninth modifications (FIGS. 7, 8, 10, 11, 14, and 15) of the above embodiment, the magnetic sensor The diagnosis of the abnormal state of the output of the element 210 and the failure diagnosis of the device are useful for applications with severe safety requirements such as in-vehicle. In particular, it is useful for the construction of a system that complies with a functional safety standard such as ISO 26262, and as described in the embodiment, it is possible to provide a magnetic sensor device 200 suitable for an on-vehicle use or the like.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

The order of execution of each process such as operations, procedures, steps, and stages in the apparatus, system, program, and method shown in the claims, the description, and the drawings is particularly “before” or “prior to”. It should be noted that the output can be realized in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the description, and the drawings, even if it is described using “first”, “next”, etc. for convenience, it means that it is essential to carry out in this order. It is not a thing. According to the present application, the following configurations are also disclosed.
(Item 1)
A magnetic sensor element;
An amplifying unit for amplifying and outputting the output of the magnetic sensor element;
A comparator that compares the output of the magnetic sensor element or the output of the amplifier with a threshold;
A delay unit that delays and outputs the comparison result output by the comparison unit;
A magnetic sensor device comprising:
(Item 2)
The delay unit includes a variable delay circuit,
A setting unit configured to set a delay amount of the variable delay circuit according to an instruction from the outside;
Item 2. The magnetic sensor device according to Item 1.
(Item 3)
The delay unit further includes a glitch filter that removes a glitch of the comparison result output from the comparison unit,
The variable delay circuit delays and outputs the comparison result that has passed through the glitch filter.
Item 3. The magnetic sensor device according to Item 2.
(Item 4)
The magnetic sensor element is a Hall element having a first terminal pair and a second terminal pair,
The amplifying unit includes a switching unit that switches a terminal pair for passing a driving current between the first terminal pair and the second terminal pair and a terminal pair for sensing the output of the magnetic sensor element according to a first clock.
Item 4. The magnetic sensor device according to any one of Items 1 to 3.
(Item 5)
A clock generation unit that generates a second clock signal having a period that is an integral multiple of the first clock and having a predetermined phase difference with respect to the timing of the first clock;
Item 5. The magnetic sensor device according to Item 4.
(Item 6)
6. The magnetic sensor device according to item 5, wherein the comparison unit compares the output of the magnetic sensor element or the output of the amplification unit with the threshold value according to the second clock.
(Item 7)
The magnetic sensor device according to item 5 or 6, wherein the delay unit delays the comparison result according to the second clock.
(Item 8)
An integration unit for integrating the comparison result output by the comparison unit or the delayed comparison result output by the delay unit;
An integration notification unit that notifies the outside that the integration result of the integration unit is out of the reference range;
The magnetic sensor device according to any one of items 1 to 7, further comprising:
(Item 9)
An integration unit that integrates the amplified output of the magnetic sensor element in response to the comparison result output from the comparison unit or the delayed comparison result output from the delay unit being a predetermined logical value;
An integration notification unit for notifying the outside that the integration result of the integration unit is outside the reference range;
The magnetic sensor device according to any one of items 1 to 7, further comprising:
(Item 10)
The amplifying unit amplifies the output of the magnetic sensor element, converts it into a digital signal, and outputs it,
A first failure determination unit that determines a failure in response to the digital signal not being a value corresponding to a comparison result output from the comparison unit or a logical value of a delayed comparison result output from the delay unit;
Item 10. The magnetic sensor device according to any one of Items 1 to 9.
(Item 11)
The magnetic sensor device according to any one of items 1 to 10, comprising a plurality of sets of the comparison unit and the delay unit.
(Item 12)
Of the plurality of sets of the comparison unit and the delay unit, the comparison unit of the first set compares the output of the magnetic sensor element with a first threshold value,
Of the plurality of sets of the comparison unit and the delay unit, the comparison unit of the second set compares the output of the magnetic sensor element with a second threshold value different from the first threshold value.
Item 12. The magnetic sensor device according to Item 11.
(Item 13)
The first threshold value has a first upper threshold value and a first lower threshold value indicating a predetermined first output range of the magnetic sensor element,
The second threshold indicates a predetermined second output range of the magnetic sensor element, and has a second upper threshold smaller than the first upper threshold and two lower thresholds larger than the first lower threshold. ,
Item 13. The magnetic sensor device according to Item 12.
(Item 14)
14. The magnetic sensor device according to item 12 or 13, wherein the delay unit of the first set has a delay amount different from that of the delay unit of the second set.
(Item 15)
15. The magnetic sensor device according to item 14, wherein the delay unit of the first group has a smaller delay amount than the delay unit of the second group.
(Item 16)
A delay circuit for delaying the output of the magnetic sensor element;
The comparison unit of the second set compares the output of the delay circuit and the second threshold;
Item 16. The magnetic sensor device according to any one of Items 12 to 15.
(Item 17)
Item 17. The magnetic sensor device according to Item 16, wherein the delay circuit includes a filter that reduces noise.
(Item 18)
The comparison result output from the comparison unit in the first set of the comparison unit and the delay unit or the delayed comparison result output from the delay unit, and the second set of the comparison unit and the delay unit in the second set A second failure determination unit that determines a failure according to a comparison result output from the comparison unit or a delayed comparison result output from the delay unit;
Item 18. The magnetic sensor device according to any one of Items 12 to 17.
(Item 19)
The magnetic sensor device according to any one of items 1 to 18, wherein the magnetic sensor device is mounted on a package having a first output terminal that outputs an output signal of the amplification unit and a second output terminal that outputs an output signal of the delay unit. The magnetic sensor device described.
(Item 20)
A magnetic sensor element;
An amplifying unit for amplifying and outputting the output of the magnetic sensor element;
A comparator for comparing the output of the magnetic sensor element with a threshold;
An integration unit for integrating the amplified output of the magnetic sensor element in response to the comparison result output by the comparison unit being a predetermined logical value;
An integration notification unit for notifying the outside that the integration result of the integration unit is outside the reference range;
A magnetic sensor device comprising:
(Item 21)
A current path through which the current to be measured flows,
The magnetic sensor device according to any one of items 1 to 20, wherein the magnetic sensor device is disposed corresponding to the current path and detects a magnetic field generated according to a current to be measured.
A current sensor device comprising:

DESCRIPTION OF SYMBOLS 10 Control apparatus, 20 CPU, 30 Overcurrent processing circuit, 40 Current path, 42 Current path, 50 Package, 52 1st output terminal, 54 2nd output terminal, 56 Input / output terminal, 100 Sensor apparatus, 110 Amplification part, 120 Detection unit, 130 detection unit, 150 input / output unit, 160 setting unit, 162 storage unit, 170 clock generation unit, 200 magnetic sensor device, 210 magnetic sensor element, 212 terminal, 214 terminal, 216 terminal, 218 terminal, 230 switching unit , 240 First amplifier circuit, 250 Demodulator, 260 Second amplifier circuit, 270 Third amplifier circuit, 272 AD converter, 300 Current sensor device, 310 Threshold generator, 320 Comparator, 322 First comparator, 324 2 comparison circuit, 326 logic circuit, 330 delay unit, 332 glitch filter, 334 Variable delay circuit, 350 integration unit, 352 integration unit, 360 integration notification unit, 362 integration notification unit, 370 first failure determination unit, 380 second failure determination unit, 410 count unit, 420 multiplication unit, 430 calculation unit, 440 comparison Part, 510 delay circuit

Claims (20)

A magnetic sensor element;
An amplifying unit for amplifying and outputting the output of the magnetic sensor element;
A plurality of comparison units for comparing the output of the magnetic sensor element or the output of the amplification unit with a threshold;
A plurality of delay units for delaying and outputting the comparison results output by the corresponding comparison units among the plurality of comparison units;
A magnetic sensor device comprising: Each of the plurality of delay units includes a variable delay circuit;
The magnetic sensor device according to claim 1, further comprising a setting unit that sets each of the delay amounts of the variable delay circuit in accordance with an instruction from the outside. The plurality of delay units further include a plurality of glitch filters that respectively remove glitches of the comparison results output from the corresponding comparison units among the plurality of comparison units,
The magnetic sensor device according to claim 2, wherein each of the variable delay circuits delays and outputs the comparison result that has passed through a corresponding glitch filter among the plurality of glitch filters. The magnetic sensor element is a Hall element having a first terminal pair and a second terminal pair,
The amplifying unit includes a switching unit that switches a terminal pair for passing a driving current between the first terminal pair and the second terminal pair and a terminal pair for sensing the output of the magnetic sensor element according to a first clock. Item 4. The magnetic sensor device according to any one of Items 1 to 3. 5. The magnetism according to claim 4, further comprising a clock generation unit that generates a second clock signal having a cycle that is an integral multiple of the first clock and having a predetermined phase difference with respect to the timing of the first clock. Sensor device.   6. The magnetic sensor device according to claim 5, wherein each of the plurality of comparison units compares the output of the magnetic sensor element or the output of the amplification unit with the threshold in accordance with the second clock.   7. The magnetic sensor device according to claim 5, wherein each of the plurality of delay units delays the comparison result output from the corresponding comparison unit according to the second clock. A comparison result output by a corresponding comparison unit among the plurality of comparison units, or one or a plurality of integration units for integrating the delayed comparison results output by a corresponding delay unit among the plurality of delay units;
One or a plurality of integration notification units that correspond to the one or more integration units and notify the outside that the integration result of the corresponding integration unit is out of the reference range;
The magnetic sensor device according to any one of claims 1 to 7, further comprising: The comparison result output by the corresponding comparison unit among the plurality of comparison units or the delayed comparison result output by the corresponding delay unit among the plurality of delay units is a predetermined logical value. In response, one or more integrators for integrating the amplified output of the magnetic sensor element;
One or a plurality of integration notification units corresponding to the one or more integration units, and notifying the outside that the integration result of the corresponding integration unit is out of the reference range;
The magnetic sensor device according to any one of claims 1 to 7, further comprising: The amplifying unit amplifies the output of the magnetic sensor element, converts it into a digital signal, and outputs it,
The digital signal is a value corresponding to a comparison result output from a corresponding comparison unit among the plurality of comparison units or a logical value of a delayed comparison result output from a corresponding delay unit among the plurality of delay units. The magnetic sensor device according to any one of claims 1 to 9, further comprising one or a plurality of first failure determination units that determine whether or not a failure occurs. Of the pair of corresponding comparison units and delay units in the plurality of comparison units and the plurality of delay units, the first set of comparison units outputs the output of the magnetic sensor element or the output of the amplification unit to the first. Compared to the threshold,
The second comparison unit of the pair of corresponding comparison units and delay units compares the output of the magnetic sensor element or the output of the amplification unit with a second threshold value different from the first threshold value. Item 11. The magnetic sensor device according to any one of Items 1 to 10. The first threshold value has a first upper threshold value and a first lower threshold value indicating a predetermined first output range of the magnetic sensor element,
The second threshold indicates a predetermined second output range of the magnetic sensor element, and has a second upper threshold smaller than the first upper threshold and two lower thresholds larger than the first lower threshold. The magnetic sensor device according to claim 11.   The magnetic sensor device according to claim 11 or 12, wherein the delay unit of the first group has a delay amount different from that of the delay unit of the second group.   The magnetic sensor device according to claim 13, wherein the delay unit of the first group has a smaller delay amount than the delay unit of the second group. The amplification unit further includes a delay circuit that delays the output of the magnetic sensor element,
The magnetic sensor device according to claim 11, wherein the comparison unit of the second set compares an output of the delay circuit and the second threshold value.   The magnetic sensor device according to claim 15, wherein the delay circuit includes a filter that reduces noise. The comparison result output from the comparison unit in the first set or the delayed comparison result output from the delay unit, and the comparison result output from the comparison unit in the second set or the delay output from the delay unit The magnetic sensor device according to any one of claims 11 to 16, further comprising a second failure determination unit that determines a failure according to a result of comparing the compared results.   The magnetic sensor device includes a first output terminal that outputs an output signal of the amplification unit, and one or a plurality of second output terminals that output an output signal of a corresponding delay unit among the plurality of delay units. The magnetic sensor device according to claim 1, which is mounted. A magnetic sensor element;
An amplifying unit for amplifying and outputting the output of the magnetic sensor element;
A plurality of comparison units for comparing the output of the magnetic sensor element or the output of the amplification unit with a threshold;
One or a plurality of integrating units that integrate the amplified output of the magnetic sensor element in response to a comparison result output from a corresponding comparing unit among the plurality of comparing units being a predetermined logical value;
One or more integration notification units for notifying the outside that the integration result of the corresponding integration unit out of the reference range among the one or more integration units,
A magnetic sensor device comprising: A current path through which the current to be measured flows,
The magnetic sensor device according to any one of claims 1 to 19, wherein the magnetic sensor device is arranged corresponding to the current path and detects a magnetic field generated according to a current to be measured.
A current sensor device comprising:

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