JP2017207319A5

JP2017207319A5 -

Info

Publication number: JP2017207319A5
Application number: JP2016098495A
Authority: JP
Filing date: 2016-05-17
Publication date: 2018-08-23
Anticipated expiration: 2036-05-17

Description

上記目的を達成するため、請求項１、２に記載の発明では、位置センサは、表面（１１）及び裏面（１２）を有する支持基板（１０）と、表面に直交する方向に磁束を発生させると共に、表面に固定された磁束発生部（２０）と、を備えている。 In order to achieve the above object, in the first and second aspects of the present invention, the position sensor generates a magnetic flux in a direction perpendicular to the front surface and the support substrate (10) having the front surface (11) and the back surface (12). And a magnetic flux generator (20) fixed to the surface.

さらに、位置センサは、検出信号を入力し、磁気素子の感度の変化に基づいて検出信号を補正する補正部（４０、５０）を備えている。
そして、請求項１に記載の発明では、補正部は、検出対象の移動にかかわらず検出対象とのギャップを検出し、ギャップの大きさに対応したギャップ信号を出力するギャップ検出用の磁気素子（４０）を有している。また、補正部は、ギャップ信号を入力し、ギャップ信号の初期値と検出対象の移動に伴うギャップ値との比をギャップ補正係数として求め、ギャップ補正係数を用いて検出信号の感度を補正する信号処理部（５０）を有している。
請求項２に記載の発明では、磁気素子は、検出対象の移動方向に沿って裏面に複数設けられている。また、補正部は、複数の磁気素子のうち検出対象に対向する磁気素子の出力を検出対象とのギャップの大きさに対応したギャップ信号として取得し、ギャップ信号の初期値と検出対象の移動に伴うギャップ値との比をギャップ補正係数として求め、ギャップ補正係数を用いて検出信号の感度を補正する。 Furthermore, the position sensor includes a correction unit (40, 50) that inputs a detection signal and corrects the detection signal based on a change in sensitivity of the magnetic element.
In the first aspect of the invention, the correction unit detects a gap with the detection target regardless of the movement of the detection target, and outputs a gap signal corresponding to the size of the gap. 40). Further, the correction unit receives the gap signal, obtains a ratio between the initial value of the gap signal and the gap value associated with the movement of the detection target as a gap correction coefficient, and corrects the sensitivity of the detection signal using the gap correction coefficient. It has a processing unit (50).
In the invention according to claim 2, a plurality of magnetic elements are provided on the back surface along the moving direction of the detection target. In addition, the correction unit acquires the output of the magnetic element facing the detection target among the plurality of magnetic elements as a gap signal corresponding to the size of the gap with the detection target, and uses the initial value of the gap signal and the movement of the detection target. A ratio with the accompanying gap value is obtained as a gap correction coefficient, and the sensitivity of the detection signal is corrected using the gap correction coefficient.

Claims

A support substrate (10) having a front surface (11) and a back surface (12);
A magnetic flux is generated in a direction perpendicular to the surface, and a magnetic flux generator (20) fixed to the surface;
The tip (110) in the surface direction of the back surface of the detection target (100) that is provided in the magnetic flux transmission range of the back surface, is located away from the back surface and is made of a magnetic material, Magnetic elements (31 to 35) that output detection signals corresponding to the strength of the magnetic flux that changes according to the amount of movement of the space (200) corresponding to the transmission range from the reference position in the plane direction;
A correction unit (40, 50) that inputs the detection signal and corrects the detection signal based on a change in sensitivity of the magnetic element;
Equipped with a,
The correction unit is
A gap detecting magnetic element (40) for detecting a gap with the detection object regardless of movement of the detection object and outputting a gap signal corresponding to the size of the gap;
Signal processing for inputting the gap signal, obtaining a ratio between an initial value of the gap signal and a gap value associated with movement of the detection target as a gap correction coefficient, and correcting the sensitivity of the detection signal using the gap correction coefficient Part (50);
Having a position sensor.

A support substrate (10) having a front surface (11) and a back surface (12);
A magnetic flux is generated in a direction perpendicular to the surface, and a magnetic flux generator (20) fixed to the surface;
The tip (110) in the surface direction of the back surface of the detection target (100) that is provided in the magnetic flux transmission range of the back surface, is located away from the back surface and is made of a magnetic material, Magnetic elements (31 to 35) that output detection signals corresponding to the strength of the magnetic flux that changes according to the amount of movement of the space (200) corresponding to the transmission range from the reference position in the plane direction;
A correction unit (40, 50) that inputs the detection signal and corrects the detection signal based on a change in sensitivity of the magnetic element;
Equipped with a,
A plurality of the magnetic elements are provided on the back surface along the moving direction of the detection target,
The correction unit obtains an output of a magnetic element facing the detection target among the plurality of magnetic elements as a gap signal corresponding to a gap size with the detection target, and an initial value of the gap signal and the detection A position sensor that obtains a ratio with a gap value associated with movement of an object as a gap correction coefficient, and corrects the sensitivity of the detection signal using the gap correction coefficient .

The correction unit targets a slope of a straight line connecting the minimum value and the maximum value of the output values of the divided section in which the range of the output value of the detection signal assumed by the movement of the detection target is divided into a plurality of sections. An inclination correction coefficient that corrects the output inclination, and an offset correction coefficient that matches a start point and an end point of an output value corrected by the inclination correction coefficient in the divided section with the target output, and the detection 3. The sensitivity of the detection signal is corrected by correcting the output value of the detection signal corresponding to the amount of movement of the target with the inclination correction coefficient and correcting the output value with the offset correction coefficient. The position sensor described in 1.

A plurality of the magnetic elements are provided on the back surface along the moving direction of the detection target,
The correction unit sets one of the saturation values of the plurality of magnetic elements acquired in advance for the detection target as a reference value and calculates a ratio between the saturation value of the plurality of magnetic elements and the reference value. 2. A saturation correction coefficient calculated for each of the plurality of magnetic elements, the detection signal is input from each of the plurality of magnetic elements, and the sensitivity of the detection signal is corrected using the saturation correction coefficient. 3. The position sensor according to 3 .