JP2017185662A - Heating apparatus, and production method of resin molding - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus with which a heating object can be heated by microwave with high efficiency and occurrence of heating unevenness on the heating object is suppressed, and to provide a resin molding produced by using the apparatus.SOLUTION: A heating apparatus 1 includes: a cavity resonator 20 making microwave incident from an oscillator 10 resonate; a double cylinder member 30 having an inner cylindrical wall 31 having a heated chamber 35 in which a heating object 2 is arranged in the inside, an outer cylindrical wall 32 arranged on the outside of the inner cylindrical wall 31, and a plasma chamber 33 formed between the inner cylindrical wall 31 and the outer cylindrical wall 32, and provided such that the heated chamber 35 is positioned on a place in the cavity resonator 20 where high electric field distribution of the microwave exists; and a magnetic field generating part 40 forming a magnetic field for making electrons of plasma resulting from ionization of a gas filled in the plasma chamber 33 generate electron cyclotron resonance by the microwave in a predetermined position of the plasma chamber 33.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a heating device that heats a dielectric material such as a resin as a heating object, and a method for manufacturing a resin molded product using a resin heated by the heating device.

  Conventionally, as a technique for heating a resin used for injection molding, for example, a heating apparatus shown in Patent Document 1 has been proposed. In this heating apparatus, a microwave is incident on a waveguide having a predetermined length to form a standing wave, and a cylinder is provided at a location where the electric field of the standing wave is concentrated. A resin as a heating object is disposed inside the cylinder. The resin melted in the cylinder by dielectric heating by microwaves is injected from the cylinder into the mold cavity by the piston, and is molded into a predetermined product shape.

JP 2014-113699 A

However, the heating apparatus has the following problems.
(1) It is difficult to efficiently heat the microwave incident on the waveguide without amplifying the electromagnetic field.
(2) In the waveguide of the heating device, two or more places where the electric field concentrates are formed, and the electric field strength at other places except the place where the heating object is arranged is wasted.
(3) When the heating object is large relative to the location where the electric field concentrates in the waveguide, the portion of the heating object that is away from the location where the electric field concentrates is not sufficiently heated, and the heating object has uneven heating. May occur.

  In addition to the above technique, a processing technique using plasma includes, for example, dry etching of semiconductors. In this technique, dry etching is performed in a state where a semiconductor, which is an object to be heated, is in contact with plasma. Therefore, when impurities generated from the object to be heated are mixed into the plasma, the plasma power is absorbed by the impurities, which causes a problem that the temperature of the plasma is lowered.

  In view of the above-described points, an object of the present invention is to provide a heating device that can heat a heating object with microwaves with high efficiency and can suppress the occurrence of heating unevenness in the heating object. Moreover, this invention aims at providing the manufacturing method of the resin molded product manufactured using the resin heated with the heating apparatus.

  In order to achieve the above object, in the invention described in claim 1, the heating device includes an oscillator (10), a cavity resonator (20), a double cylindrical member (30), and a magnetic field generator (40). The oscillator oscillates microwaves. The cavity resonator resonates the microwave incident from the oscillator. The double cylinder member includes an inner cylinder wall (31) in which a heated chamber (35) in which an object to be heated is disposed is formed, an outer cylinder wall (32) provided outside the inner cylinder wall, and an inner cylinder wall (31). It has a plasma chamber (33) formed between the cylindrical wall and the outer cylindrical wall, and is provided so that the heated chamber is located in a place where the electric field distribution of the microwave in the cavity resonator is high. The magnetic field generation unit forms a magnetic field in a predetermined location of the plasma chamber for causing electron cyclotron resonance of the electrons of the plasma in which the gas filled in the plasma chamber is ionized by microwaves.

  According to this, it is possible to amplify a microwave electromagnetic field by the cavity resonator and to inductively heat the central portion of the heating object disposed in the heated chamber. Moreover, the gas in the plasma chamber becomes plasma by the microwave. Furthermore, the electrons of the plasma generate microwave and electron cyclotron resonance in the magnetic field generated by the magnetic field generation unit, and the microwave at the location where the electron cyclotron resonance is generated becomes high heat by absorbing the microwave electrode. Therefore, it is possible to heat an object to be heated by heat conduction and radiant heat from the plasma. Therefore, the heating device can efficiently heat the object to be heated by induction heating of microwaves and can suppress uneven heating of the object to be heated by heat conduction and radiant heat from the plasma.

  The invention according to claim 8 is an invention of a method for producing a resin molded product. This manufacturing method includes a heating step (S10, S15) and an injection molding step (S30). In the heating step, the resin as the heating object is heated by the heating device. In the injection molding process, the heated resin is injected into a mold cavity and molded into a predetermined product shape.

  According to this, in the heating step, it is possible to heat the resin as the heating object in a uniform heating state in which heating unevenness is suppressed and in a short time. Therefore, this manufacturing method can shorten the time required for injection molding of the resin molded product.

  In addition, the code | symbol in the bracket | parenthesis of each said means shows an example of a corresponding relationship with the specific means as described in embodiment mentioned later.

It is a figure which shows the cross-sectional structure of the heating apparatus concerning 1st Embodiment of this invention. It is sectional drawing of the II-II line | wire of FIG. It is a characteristic view of magnetic flux density distribution in the plasma chamber which a double cylinder member has. It is a flowchart of the manufacturing method of the resin molded product in 1st Embodiment. It is a figure which shows the cross-sectional structure of the heating apparatus concerning 2nd Embodiment of this invention. It is a flowchart of the manufacturing method of the resin molded product in 2nd Embodiment. It is a figure which shows the cross-sectional structure of the heating apparatus concerning 3rd Embodiment of this invention. It is a figure which shows the cross-sectional structure of the heating apparatus concerning 4th Embodiment of this invention. It is sectional drawing of the IX-IX line of FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, parts that are the same or equivalent to each other will be described with the same reference numerals.

(First embodiment)
A first embodiment of the present invention will be described with reference to the drawings. The heating device 1 of this embodiment heats a dielectric such as a resin as the heating object 2.

  As shown in FIGS. 1 and 2, the heating apparatus 1 includes an oscillator 10, a cavity resonator 20, a double cylinder member 30, a magnetic field generator 40, and the like.

  The oscillator 10 is, for example, a magnetron, a solid state oscillator, a gyrotron, or the like, and oscillates a microwave of 2.45 GHz band, for example.

  The microwave generated by the oscillator 10 enters the cavity resonator 20 from the microwave incident portion 21 via the waveguide 11.

  The cavity resonator 20 has an inner wall formed in a cylindrical shape. The microwave incident part 21 is provided at a predetermined position in the radial direction of the cylindrical cavity resonator 20. The microwaves that are incident on the cavity resonator 20 from the microwave incident portion 21 are repeatedly reflected in the cavity resonator 20, and those having the same wavelength resonate.

  The cavity resonator 20 of this embodiment forms a confinement TE mode. Therefore, the cavity resonator 20 can apply the superposition of electromagnetic fields to obtain an electric field power larger than the input electric field power at the central portion in the cavity resonator 20. In FIG. 1, a broken line A indicates a portion where the electric field distribution in the cavity resonator 20 is large.

Specifically, the cavity resonator 20 of the present embodiment forms a confined TE ₁₁₁ mode. Thereby, the cavity resonator 20 is determined to a predetermined size with respect to the wavelength of the microwave.

  The inside of the waveguide 11 and the cavity resonator 20 is preferably filled with an insulating gas such as SF6. Accordingly, it is possible to prevent dielectric breakdown from occurring inside the waveguide 11 and the cavity resonator 20 when an electromagnetic wave having high electrolytic strength is incident to ionize a gas in the plasma chamber 33 described later.

  Note that the cavity resonator 20 is preferably formed of a low-permeability conductor such as copper, stainless steel, or aluminum in order to pass a magnetic field formed by the magnetic field generation unit 40 described later.

  A double cylinder member 30 is provided inside the cavity resonator 20. The double cylinder member 30 is formed between a cylindrical inner cylinder wall 31, a cylindrical outer cylinder wall 32 provided outside the inner cylinder wall 31, and the inner cylinder wall 31 and the outer cylinder wall 32. A plasma chamber 33 is provided. The double cylinder member 30 of the present embodiment is provided so that the center axis O1 of the double cylinder member 30 and the center axis O2 of the cavity resonator 20 substantially coincide.

  The inner cylinder wall 31 and the outer cylinder wall 32 of the double cylinder member 30 are made of quartz or sapphire whose dielectric loss is smaller than a predetermined value. Therefore, the microwave passes through the inner cylinder wall 31 and the outer cylinder wall 32 with almost no attenuation of electric power.

  A heated chamber 35 in which the object to be heated 2 is disposed is formed inside the inner cylindrical wall 31 in the radial direction. The double cylinder member 30 is installed in the cavity resonator 20 so that the central portion of the heated chamber 35 is located at a place where the electric field distribution of the microwave is high. Note that the place where the microwave electric field distribution is high in the cavity resonator 20 forming the confined TE mode is the central portion in the cavity resonator 20. Thereby, especially the center part of the heating target object 2 arrange | positioned in the to-be-heated chamber 35 is induction-heated by a microwave.

A gas supply source 37 is connected to the plasma chamber 33 through a flexible pipe 36 and the like. The gas supply source 37 supplies ionizable gas to the plasma chamber 33. Specifically, the gas supplied from the gas supply source 37 is oxygen (O ₂ ) or xenon (Xe) having a low first ionization energy. A discharge pump 39 is connected to the plasma chamber 33 through a flexible pipe 38 and the like. The discharge pump 39 can set the pressure in the plasma chamber 33 to a low pressure of about several Pa. As a result, the gas in the plasma chamber 33 is easily ionized into plasma. Therefore, the gas in the plasma chamber 33 becomes plasma due to impact ionization of electrons and gas molecules accelerated by an electric field generated by microwaves.

  The exhaust pump 39 can also exhaust gas from the plasma chamber 33.

  A magnetic field generator 40 is provided outside the cavity resonator 20. The magnetic field generation unit 40 includes a first electromagnetic coil 41, a second electromagnetic coil 42, and a control unit 43. The first electromagnetic coil 41 is provided on one side of the double cylinder member 30 in the axial direction, and the second electromagnetic coil 42 is provided on the other side of the double cylinder member 30 in the axial direction. The first electromagnetic coil 41 and the second electromagnetic coil 42 are provided so that the central axes substantially coincide.

  The control unit 43 can adjust the value of current flowing through the first electromagnetic coil 41 and the second electromagnetic coil 42 to increase the magnetic flux density at an arbitrary position of the double cylinder member 30.

  FIG. 3A shows a schematic diagram of the plasma chamber 33, and FIG. 3B shows an example of a magnetic flux density distribution with respect to the position of the plasma chamber 33. The vertical axis in FIG. 3B indicates the position of the plasma chamber 33 in the axial direction. The horizontal axis in FIG. 3B indicates the magnetic flux density in the plasma chamber 33.

  In FIG. 3B, the magnetic field generator 40 has a high magnetic flux density between the position B and the position C of the plasma chamber 33 and a high magnetic flux density between the position D and the position E. . As described above, the magnetic field generator 40 can increase the magnetic flux density at a location away from the central portion of the heated chamber 35 of the double cylindrical member 30 in one and the other in the axial direction.

  A permanent magnet (not shown) may be provided together with the first electromagnetic coil 41 and the second electromagnetic coil 42 to serve as a base for the magnetic flux density.

  Here, when a magnetic field is formed in the plasma, electrons in the plasma perform a cyclotron motion (rotational motion) at a frequency corresponding to the magnetic field strength. At this time, when the frequency of the plasma electrons and the frequency of the microwaves are synchronized, the electrons resonate and absorb the energy of the electromagnetic waves to rotate at high speed. As a result, electrons collide with gas molecules and high density plasma is generated. This phenomenon is called Electron Cyclotron Resonance (ECR). For example, when the frequency of the microwave is 2.45 GHz, electron cyclotron resonance occurs when the magnetic field strength is 0.0875 Tesla.

  A region H between the two-dotted lines F and G in FIG. 3A corresponds to a portion where the magnetic flux density is large between the position B and the position C shown in FIG. Yes. In FIG. 3A, the region K between the two-dotted lines I and J corresponds to the portion where the magnetic flux density is large between the position D and the position E shown in FIG. Yes.

  In the present embodiment, in FIG. 3A, both the electrons in the plasma in the region H and the electrons in the plasma in the region K cause electron cyclotron resonance. The plasma that has generated electron cyclotron resonance becomes hot. Therefore, the heating object 2 is heated by heat conduction and radiant heat via the inner cylindrical wall 31 from the plasma that has become high temperature particularly in the regions H and K.

  In FIG. 1, plasma regions H and K that cause electron cyclotron resonance are indicated by broken lines H and K, respectively.

  In the present embodiment, the heating object 2 disposed in the heated chamber 35 is a cylindrical resin tablet, and is used for example as a mold resin material of a semiconductor package. As shown in FIG. 1, the heating object 2 is transported by a transport jig 50. The conveyance jig 50 includes a first conveyance jig 51 provided on one side in the axial direction of the resin tablet and a second conveyance jig 52 provided on the other side in the axial direction. . The first conveyance jig 51 and the second conveyance jig 52 move in the direction of the arrow N in FIG. 1, thereby causing the object 2 to be heated from the openings 301 and 302 provided in the axial direction of the double cylinder member 30. Can be inserted into, placed in, and discharged from the heated chamber 35.

Next, the manufacturing method of the resin molded product manufactured using the resin heated by the heating device 1 described above will be described with reference to the flowchart of FIG. 4. The manufacturing method of the resin molded product includes the preheating step S10 and the melting step. S20, injection molding process S30, etc. are included.

  First, in preheating process S10, the resin as the heating object 2 is preheated by the heating device 1 described above. In the preliminary heating step S <b> 10, the tablet-like resin is inserted into the heated chamber 35 by the conveying jig 50.

  Subsequently, a microwave is incident on the cavity resonator 20 from the oscillator 10. At the same time, the current value flowing through the first electromagnetic coil 41 and the second electromagnetic coil 42 of the magnetic field generation unit 40 is adjusted, and in a place away from the central portion of the heated chamber 35 of the double cylinder member 30 in the axial direction, A magnetic field is generated for the electrons of the plasma to generate electron cyclotron resonance.

  The central portion of the resin inserted into the heated chamber 35 is induction heated by the microwave amplified by the cavity resonator 20.

  In addition, the gas in the plasma chamber 33 is ionized by the microwave, and becomes plasma. The electrons of the plasma generate microwave and electron cyclotron resonance in the magnetic field generated by the magnetic field generator 40. For this reason, in the plasma chamber 33, the plasma at a location away from the central portion of the heated chamber 35 in the axial direction becomes hot. Therefore, the resin inserted into the heated chamber 35 is heated by conduction and radiant heat from the plasma via the inner cylindrical wall 31, thereby suppressing heating unevenness. When a predetermined time elapses from the start of the preheating step S10 and the resin is heated to a predetermined temperature, the conveying jig 50 conveys the resin from the heated chamber 35 to an injection unit or the like provided in an injection molding apparatus (not shown). .

  The preheating step S10 corresponds to an example of a “heating step” described in the claims.

  Next, in the melting step S20, the resin conveyed to an injection unit (not shown) is heated and melted. As a heating method at this time, various methods such as a band heater or a microwave can be employed.

  Subsequently, in the injection molding step S30, the heat-melted resin is injected into a mold cavity provided in an injection molding apparatus (not shown). Thereafter, the resin is formed into a predetermined product shape by holding, cooling, and solidifying in the mold, and after the mold is opened, the resin is taken out from the cavity.

The heating device 1 of this embodiment described above has the following effects.
(1) In the present embodiment, the heating device 1 amplifies a microwave electromagnetic field by the cavity resonator 20 and induction heats the central portion of the heating object 2 disposed in the heated chamber 35 with high efficiency. At the same time, the heating device 1 heats the plasma in the region H and the region K of the plasma chamber 33 by electron cyclotron resonance, and heats the heating object 2 from the plasma by heat conduction and radiant heat via the inner cylindrical wall 31. . Therefore, the heating device 1 can efficiently heat the object to be heated 2 and suppress uneven heating of the object to be heated 2 by heat conduction and radiant heat from the plasma, thereby realizing uniform overheating.

In addition, since the heating object 2 and the plasma chamber 33 are partitioned by the inner cylindrical wall 31 in the heating apparatus 1, foreign matter generated from the heating object 2 is prevented from entering the plasma chamber 33. . Therefore, a decrease in plasma temperature can be suppressed.
(2) The magnetic field generator 40 of the present embodiment includes a first electromagnetic coil 41 and a second electromagnetic coil 42 provided on one and the other of the double cylinder member 30 in the axial direction, respectively.

According to this, by adjusting the current supplied to the first electromagnetic coil 41 and the second electromagnetic coil 42, the location where the plasma electrons in the plasma chamber 33 cause electron cyclotron resonance can be changed to the axis of the double cylinder member 30. It can be set at any position in the direction.
(3) The control unit 43 of the present embodiment has the first electromagnetic coil 41 so that the magnetic flux density is increased at locations away from the central portion of the heated chamber 35 of the double cylinder member 30 in one and the other in the axial direction. And the electric current supplied to the 2nd electromagnetic coil 42 is adjusted.

According to this, it is possible to generate electron cyclotron resonance at a location in the heating object 2 that is away from the central portion of the heated chamber 35 in the axial direction.
(4) In the present embodiment, the cavity resonator 20 forms a TE mode in which the electric field distribution of the microwave is high at the central portion in the cavity resonator 20. The double cylinder member 30 is provided so that the central portion of the heated chamber 35 is located at the central portion in the cavity resonator 20. Further, the place where the electrons of the plasma in the plasma chamber 33 cause electron cyclotron resonance is a portion away from the central portion of the heated chamber 35 of the double cylinder member 30 in the axial direction.

According to this, the heating device 1 can suppress heating unevenness of the heating object 2.
(5) The inner cylinder wall 31 and the outer cylinder wall 32 of the double cylinder member 30 of this embodiment are formed from quartz or sapphire whose dielectric loss is smaller than a predetermined value.

According to this, the inner cylinder wall 31 and the outer cylinder wall 32 can pass the microwave in a state where the attenuation of the electric power of the microwave is extremely small.
(6) In this embodiment, the gas supply source 37 supplies ionizable gas to the plasma chamber 33 of the double cylinder member 30. The discharge pump 39 discharges ionizable gas from the plasma chamber 33 of the double cylinder member 30.

According to this, the heating device 1 can switch between a state where the plasma chamber 33 is filled with gas and a state where the gas is not filled. Therefore, the heating device 1 can eliminate heat conduction and radiant heat due to plasma in a state where the gas is not filled. By carrying out like this, the heating apparatus 1 can also perform the heating which enlarges the heating amount inside the heating target object 2, and makes the outside heating amount small.
(7) The heating apparatus 1 according to the present embodiment includes a conveyance jig 50 that can insert and discharge resin as the heating object 2 into the heated chamber 35.

  According to this, the heating apparatus 1 can perform preheating of the resin material for injection molding.

The manufacturing method of the resin molded product of this embodiment has the following effects.
(8) In this manufacturing method, the resin as the heating object 2 is preheated in a uniform state in which heating unevenness is suppressed in the preheating step S10. Therefore, it is possible to heat and melt the resin in a short time in the melting step S20. Therefore, this manufacturing method can shorten the time required for injection molding of the resin molded product.

(Second Embodiment)
A second embodiment of the present invention will be described. The heating device 1 of the second embodiment is obtained by changing the configuration of the transport jig 50 with respect to the first embodiment, and the other configurations are the same as those of the first embodiment. Only the different parts will be described.

  As shown in FIG. 5, in the second embodiment, the conveying jig 50 includes a pipe 53 provided on one side in the axial direction of the heated chamber 35 of the double cylinder member 30, and the axial direction of the heated chamber 35. And a piston 54 provided on the other side. The pipe 53 is fixed to the inner cylinder wall 31. The piston 54 can reciprocate inside the inner cylinder wall 31.

  The manufacturing method of the resin molded product using the heating apparatus 1 of 2nd Embodiment is demonstrated with reference to the flowchart of FIG.

  The method for manufacturing a resin molded product includes a heating and melting step S15, an injection molding step S30, and the like.

  First, in the heating and melting step S15, the resin as the heating object 2 is heated by the heating device 1 described above. When a predetermined time elapses from the start of the heating and melting step S15 and the resin is sufficiently heated and melted, the piston 54 is moved to reduce the volume of the heated chamber 35. As a result, the molten resin passes through the pipe 53 and is injected into the cavity of the mold provided in the injection molding apparatus. That is, the heating device 1 of the second embodiment functions as an injection unit of an injection molding device.

  The heating and melting step S15 of the second embodiment corresponds to an example of a “heating step” described in the claims.

  Since the next injection molding step S30 is the same as the injection molding step S30 of the first embodiment described above, description thereof is omitted.

  According to the manufacturing method of the resin molded product of the second embodiment described above, when the resin heated and melted in the heating and melting step S15 includes a filler such as glass fiber, the rigidity is high without destroying the filler. It is possible to form a resin molded product.

(Third embodiment)
A third embodiment of the present invention will be described with reference to FIG. 3rd Embodiment changes the structure of the double cylinder member 30 with respect to 1st and 2nd embodiment. In FIG. 7, the conveyance jig 50 is not shown.

  In the third embodiment, the double cylinder member 30 is longer in the axial direction than the cavity resonator 20. Even in such a configuration, the heating device 1 of the third embodiment can achieve the same operational effects as the heating device 1 of the first and second embodiments.

(Fourth embodiment)
A fourth embodiment of the present invention will be described with reference to FIGS. 4th Embodiment changes the structure of the double cylinder member 30, the 1st electromagnetic coil 41, and the 2nd electromagnetic coil 42 with respect to 1st-3rd embodiment.

  In the fourth embodiment, the double cylinder member 30 is provided so that the center axis O1 of the double cylinder member 30 and the center axis O2 of the cavity resonator 20 intersect. Specifically, the central axis O <b> 1 of the double cylinder member 30 is provided in the radial direction of the cavity resonator 20. Even in this state, the double cylinder member 30 is installed in the cavity resonator 20 so that the central portion of the heated chamber 35 is located at a place where the electric field distribution of the microwave is high. In the cavity resonator 20 forming the TE mode, the place where the electric field distribution is high is the central portion in the cavity resonator 20. Therefore, the center part of the heating object 2 arranged in the heated chamber 35 is induction-heated by the microwave.

  Outside the cavity resonator 20, the first electromagnetic coil 41 is provided on one side of the double cylinder member 30 in the axial direction, and the second electromagnetic coil 42 is provided on the other side of the double cylinder member 30 in the axial direction. The first electromagnetic coil 41 and the second electromagnetic coil 42 are provided so that the central axes substantially coincide. Therefore, it is possible to increase the magnetic flux density at an arbitrary position of the double cylinder member 30 by adjusting the value of the current flowing through the first electromagnetic coil 41 and the second electromagnetic coil 42. Specifically, the magnetic field generation unit 40 can increase the magnetic flux density at locations away from the central portion of the heated chamber 35 of the double cylinder member 30 in one and the other in the axial direction of the double cylinder member 30. It is.

  The heating device 1 of the fourth embodiment can also exhibit the same effects as the heating device 1 of the first to third embodiments.

(Other embodiments)
The present invention is not limited to the embodiment described above, and can be appropriately changed within the scope described in the claims. Further, the above embodiments are not irrelevant to each other, and can be combined as appropriate unless the combination is clearly impossible. In each of the above-described embodiments, it is needless to say that elements constituting the embodiment are not necessarily essential unless explicitly stated as essential and clearly considered essential in principle. Yes. Further, in each of the above embodiments, when numerical values such as the number, numerical value, quantity, range, etc. of the constituent elements of the embodiment are mentioned, it is clearly limited to a specific number when clearly indicated as essential and in principle. The number is not limited to the specific number except for the case. Further, in each of the above embodiments, when referring to the shape, positional relationship, etc. of the component, etc., the shape, unless otherwise specified and in principle limited to a specific shape, positional relationship, etc. It is not limited to the positional relationship or the like.

  (1) For example, in each said embodiment, what heated a cylindrical resin tablet as the heating target 2 was demonstrated. On the other hand, in other embodiments, the heating device 1 may heat various dielectrics such as liquid as well as resin pellets having various shapes as the heating object 2.

  (2) Moreover, in each said embodiment, the heating apparatus 1 demonstrated as what uses the heating target object 2 for the material of resin injection molding. On the other hand, in other embodiment, the heating apparatus 1 may use the heated heating object 2 for various uses.

DESCRIPTION OF SYMBOLS 1 Heating apparatus 2 Object to be heated 10 Oscillator 20 Cavity resonator 35 Heated chamber 30 Double cylinder member 31 Inner cylinder wall 32 Outer cylinder wall 33 Plasma chamber 40 Magnetic field generation part

Claims (9)

An oscillator (10) for oscillating microwaves;
A cavity resonator (20) for resonating microwaves incident from the oscillator;
An inner cylindrical wall (31) in which a heated chamber (35) in which a heating object (2) is arranged is formed, an outer cylindrical wall (32) provided outside the inner cylindrical wall, and the inner cylindrical wall Having a plasma chamber (33) formed between the outer cylinder wall and the outer cylinder wall, wherein the heated chamber is located in a place where the microwave electric field distribution in the cavity resonator is high A member (30);
A heating apparatus comprising: a magnetic field generator (40) that forms a magnetic field in a predetermined place of the plasma chamber for generating electron cyclotron resonance by microwaves in plasma electrons ionized from the gas filled in the plasma chamber. The magnetic field generator
A first electromagnetic coil (41) provided on one of the axial directions of the double cylinder member;
A second electromagnetic coil (42) provided on the other axial side of the double cylinder member;
The heating device according to claim 1, further comprising: a control unit (43) that adjusts a current supplied to the first electromagnetic coil and the second electromagnetic coil.   The control unit supplies the first electromagnetic coil and the second electromagnetic coil so that the magnetic flux density is increased at a position away from the central portion of the heated chamber of the double cylinder member in one and the other in the axial direction. The heating device according to claim 2, wherein a current to be adjusted is adjusted. The cavity resonator forms a TE mode in which a microwave electric field distribution is increased in a central portion of the cavity resonator,
The double cylinder member is provided such that a central portion of the heated chamber is located at a central portion in the cavity resonator,
The place where the electrons of the plasma in the plasma chamber cause electron cyclotron resonance is a portion of the double cylinder member that is separated from the central portion of the heated chamber in the axial direction. Heating device.   The heating device according to any one of claims 1 to 4, wherein the inner cylinder wall and the outer cylinder wall of the double cylinder member are formed of quartz or sapphire having a dielectric loss smaller than a predetermined value. A gas supply source (37) for supplying ionizable gas to the plasma chamber of the double cylinder member;
The heating apparatus according to any one of claims 1 to 5, further comprising a discharge pump (39) for discharging ionizable gas from the plasma chamber of the double cylinder member.   The transport jig (50) which can insert and discharge | emit resin as the said heating object into the said to-be-heated chamber from the opening part provided in the axial direction of the said double cylinder member is further provided. The heating apparatus as described in any one of these. A heating step (S10, S15) of heating the resin as the heating object by the heating device according to claim 1,
An injection molding step (S30) for injecting the heat-melted resin into a mold cavity and molding the resin into a predetermined product shape. The heating step is a preheating step (S10) for preheating the resin.
The method for producing a resin molded product according to claim 9, further comprising a melting step (S20) for melting the resin after the preliminary heating step.

Images