JP2017181274A - Inspection device and inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection device capable of improving inspection accuracy in consideration of variations among samples and measurement environments.SOLUTION: An inspection device includes: an electrical characteristics data acquisition unit for acquiring electrical characteristics data of each of a pair of electrical conduction pairs in an inspection object in which a pair of the electrical conduction pairs including a first electrical conductor and a second electrical conductor is provided on a first principal surface in plural, and a reference characteristics data calculation unit for performing statistical processing based on electrical characteristics data of each of the inspection objects with which a position provided in the first principal surface among electrical characteristics data acquired from the plurality of inspection objects corresponds to calculate reference characteristics data of each inspection area.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an inspection apparatus and an inspection method.

  As a kind of touch panel device that detects a touch position, a so-called capacitance type device is known. The sensor panel of the capacitive touch panel device includes, for example, a first transparent substrate (first electrode) and a second transparent transparent layer (second electrode) on a transparent substrate made of glass or the like. And has a structure provided. This pattern transparent conductive layer is formed by forming a film using, for example, indium tin oxide (ITO).

  As a configuration of the capacitive touch panel, M first electrodes are arranged in a straight line, N second electrodes are arranged in a direction perpendicular to the first electrodes, and the first electrode and the second electrode are arranged. So-called double-layer type touch panels that face each other with a gap in the thickness direction of the sensor panel and intersect each other vertically have become mainstream. In a double-layer type touch panel, a kind of capacitor is formed at the intersection of the first electrode and the second electrode, and the capacitance of this capacitor changes when a conductive object (for example, a human body) approaches or comes into contact with it. To do. The touch panel device can detect the position touched by the sensor panel by detecting the change in capacitance. However, it is difficult to make the double-layer type touch panel compact in the thickness direction, and there is a limit to meet demands for thinning and lightening.

  Therefore, Patent Document 1 discloses a so-called single layer type touch panel in which the first electrode and the second electrode are arranged in one layer. In a single layer type touch panel, a kind of capacitor is formed in a portion where the first electrode and the second electrode are close to each other, and the capacitance of the capacitor is caused by a conductive object (for example, a human body) approaching or contacting. Change. Thereby, the touch position can be detected.

Japanese Patent Laid-Open No. 2015-152530

  By the way, it is extremely important for the manufacturer of the touch panel device to inspect the sensor panel in order to avoid the introduction of defective products and ensure the quality of the product. Therefore, in the inspection apparatus described in Patent Document 1, the first electrode, the electrode proximity portion of the first electrode and the second electrode, and the proximity portion of the first electrode and the second electrode in the circuit passing through the second electrode Is measured, and the resistance values of the first electrode and the second electrode are measured to determine whether or not the product is a non-defective product.

However, in the inspection apparatus described in Patent Document 1, when determining whether or not a product is a non-defective product, the determination is performed using a value calculated in advance as a reference value for determination.
For this reason, when the line width increases or decreases due to manufacturing variations between products (samples), the space between the first electrode and the second electrode varies, and the capacitance value also varies. There is a problem that the accuracy cannot be improved.
In addition, when a minute change in capacitance is detected, there is a problem that the capacitance value varies depending on the measurement environment (temperature, humidity, etc.), and the inspection accuracy cannot be improved.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide an inspection apparatus capable of improving inspection accuracy in consideration of variations between samples and measurement environments.

  In order to solve the above-described problem, according to one embodiment of the present invention, among a pair of conductive pairs including a first conductor and a second conductor and a plurality of inspection objects provided on the first main surface, the pair of conductors. An electrical property data acquisition unit that acquires electrical property data for each of the pairs and an electrical property data corresponding to a position provided on the first main surface among electrical property data acquired from the plurality of inspection objects. An inspection apparatus comprising: a reference characteristic data calculation unit that performs statistical processing based on each inspection object of the target characteristic data and calculates reference characteristic data for each inspection target region.

  One embodiment of the present invention is the above-described inspection apparatus, wherein the statistical processing is a median value of the electrical characteristic data of the plurality of inspection objects.

  One embodiment of the present invention is the above-described inspection apparatus, wherein the statistical processing is an average value of the electrical characteristic data of the plurality of inspection objects.

  In order to solve the above-described problem, according to one embodiment of the present invention, among a pair of conductive pairs including a first conductor and a second conductor and a plurality of inspection objects provided on the first main surface, the pair of conductors. Of the electrical property data obtaining step for obtaining electrical property data for each of the pairs, and the electrical property data obtained from the plurality of inspection objects, the position provided on the first main surface corresponds to the electrical property data. And a reference characteristic data calculating step of calculating a reference characteristic data for each inspection target region by performing statistical processing based on each of the inspection target objects of the physical characteristic data.

  According to the present invention, the reference characteristic data calculation unit includes each inspection object of the electric characteristic data corresponding to the position provided on the first main surface among the electric characteristic data acquired from the plurality of inspection objects. Statistical processing is performed based on each of the above, and reference characteristic data for each region to be inspected is calculated. When determining whether or not a product is a non-defective product, the inspection apparatus performs determination using reference characteristic data as a reference value for determination. According to this, it is possible to provide an inspection apparatus capable of improving inspection accuracy in consideration of variations between samples and measurement environments.

It is a top view which shows typically the electrode pattern in the sensor panel of a single layer type touchscreen apparatus. It is a conceptual diagram which shows the whole structure of an inspection apparatus. It is the figure which showed the statistical process which the reference | standard characteristic data calculation part in an inspection apparatus performs. It is the figure which showed an example of the processing flow in an inspection apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view schematically showing an electrode pattern in a sensor panel of a single layer type touch panel device.
The sensor panel 50 as an inspection object is a main component of the touch panel device, and has a first electrode (first conductor) 51 and a second electrode (second conductivity) on a transparent substrate made of glass or the like. The body) 52 is provided. The sensor panel 50 is configured as a single layer type as described below.

In the sensor panel 50 of the touch panel device shown in FIG. 1, a plurality (M = 2) of first electrodes 51 are arranged side by side in the X direction in FIG. Each of the first electrodes 51 has an elongated portion 3 elongated in a direction (Y direction in FIG. 1) perpendicular to the direction in which the first electrodes 51 are arranged. In the sensor panel 50, a plurality (N = 3) of second electrodes 52 are arranged in a matrix (M × N) in the X direction in which the first electrodes 51 are arranged and in the Y direction along the elongated portion 3. ) Are arranged side by side.
As a result, the sensor panel 50 covers almost the entire region where the touch position can be detected (hereinafter also referred to as a touch region) by either the first electrode 51 or the second electrode 52.
In the touch area, a sensor coordinate system is set based on the relationship between the first electrode 51 and the second electrode 52 arranged in a matrix. This coordinate system can be expressed by coordinates in the x and y directions. Specifically, the corresponding portion of the conductive portion 4 of the second electrode 52 in the lower left corner of the touch area in FIG. 1 is (1, 1), and the corresponding portion in the upper right corner is (M = 2, N = 3). Is set.
Note that the present invention is not limited to this example, and the number of M and N can be increased or decreased as appropriate.

Subsequently, the shapes of the first electrode 51 and the second electrode 52 will be described below.
As shown in FIG. 1, each second electrode 52 includes four conductive portions 4 arranged so as to correspond in the Y direction perpendicular to the X direction in which the first electrodes 51 are arranged. Therefore, it can be said that this sensor panel 50 has M × 4 conductive portions 4 arranged in the X direction and 4 × N conductive portions 4 in the Y direction. Each conductive part 4 is configured in a rectangular shape.

  The first electrode 51 is formed with a plurality of projecting portions 5 projecting vertically from the width direction (X direction) of the elongated portion 3 so as to separate the arranged 4 × N conductive portions 4. ing. As a result, the first electrode 51 is configured in a comb-like shape as a whole having a large number of recesses, and a layout in which the conductive portion 4 of the second electrode 52 is disposed inside each recess. It has become. Each of the second electrodes 52 includes a lead portion 6, and the lead portion 6 is arranged such that the first electrodes 51 are arranged while the four conductive portions 4 belonging to the same second electrode 52 are electrically connected to each other. It is pulled out toward the edge of the sensor panel 50 in the Y direction perpendicular to the X direction.

The 1st electrode 51 and the 2nd electrode 52 are comprised by forming a pattern transparent conductive layer by well-known methods, such as sputtering and vapor deposition, using the said ITO. However, the electrode material is not limited to using ITO, and various materials such as indium zinc oxide (IZO) can be used.
The sensor panel 50 shown in FIG. 1 is configured as described above, and a capacitor is formed in a portion where the first electrode 51 and the second electrode 52 are close to each other. And the electrostatic capacitance of this capacitor | condenser changes when a conductive object (for example, human body) approaches or contacts. Thereby, the position touched by the conductive object can be detected. In addition, since the first electrode 51 and the second electrode 52 are configured so as not to intersect each other, the two electrodes can be physically disposed in a single layer, and the touch device can be thinned and the configuration can be simplified. Can be realized.

In addition, the first tab wiring portions 7 are individually connected to the plurality of first electrodes 51. Each first tab wiring portion 7 is connected to one end of the elongated portion 3 included in the corresponding first electrode 51. The second tab wiring portions 8 are also individually connected to the plurality of second electrodes 52. Each of the second tab wiring portions 8 is connected to one end of the lead portion 6 included in the corresponding second electrode 52.
The first tab wiring portion 7 and the second tab wiring portion 8 are formed by screen printing using a conductive paste material (specifically, a silver paste). However, the present invention is not limited to this configuration. For example, a copper paste may be used instead of the silver paste, or another printing method such as inkjet printing may be used instead of the screen printing. Moreover, the pattern of the 1st tab wiring part 7 and the 2nd tab wiring part 8 can also be formed by performing selective etching after vapor-depositing various metal films.

  FIG. 2 is a conceptual diagram showing the overall configuration of the inspection apparatus. The inspection apparatus 1 shown in FIG. 2 is used to determine whether or not the sensor panel 50 is a non-defective product. The inspection device 1 includes an electrical characteristic data acquisition unit 11, a reference characteristic data calculation unit 12, and an electrical characteristic data determination unit 13.

The electrical characteristic data acquisition unit 11 measures a capacitance value Cmn and a resistance value Rmn (electrical characteristic data) corresponding to a position (hereinafter, expressed by position coordinates (m, n)) in one sensor panel 50. . The capacitance value Cmn is a value of capacitance formed between the first electrode 51 and the second electrode 52 (a pair of conductive pairs) at the position coordinates (m, n) of the sensor panel 50. The resistance value Rmn is the resistance value of the first electrode 51 and the second electrode 52 at the position coordinates (m, n) of the sensor panel 50.
Here, m is an integer represented by 1 ≦ m ≦ M, and n is an integer represented by 1 ≦ n ≦ N.
The electrical characteristic data acquisition unit 11 has a plurality of (M) first cables 37 (hereinafter, represented by first cables 37m). The first cable 37m is composed of a conductive electric wire. When the sensor panel 50 is set in the inspection apparatus 1, the first cable 37 m is connected to the first electrode 51 via the first tab wiring portion 7 (referred to as the first tab wiring portion 7 m) of the sensor panel 50. It is electrically connected to the first electrode 51 at the position coordinates (m, n) of the sensor panel 50.
The electrical characteristic data acquisition unit 11 includes a plurality of (M × N) second cables 38 (hereinafter, referred to as second cables 38 mn). The 2nd cable 38mn is comprised with the electric wire which has electroconductivity. When the sensor panel 50 is set in the inspection apparatus 1, the second cable 38mn is connected to the second electrode 52 via the second tab wiring portion 8 (referred to as the second tab wiring portion 8mn) of the sensor panel 50. It is electrically connected to the second electrode 52 at the position coordinates (m, n) of the sensor panel 50.

The electrical characteristic data acquisition unit 11 includes a signal supply unit and a current detection unit for measuring the capacitance value Cmn and the resistance value Rmn corresponding to the position coordinates (m, n) in one sensor panel 50. I have.
The signal supply unit is configured as an AC power supply that supplies an AC signal having a predetermined voltage. The signal supply unit is connected to the electrical characteristic data acquisition unit 11 and can generate an alternating current signal based on a control command from the electrical characteristic data acquisition unit 11. Moreover, the electrical characteristic data acquisition unit 11 selects an arbitrary first cable 37 out of the M first cables 37 and electrically connects the selected first cable 37 and the AC power supply. Can do.
In addition, the current detection unit is configured as an ammeter that measures the current flowing through the second cable 38. The current detection unit is connected to the electrical property data acquisition unit 11, and transmits the measured current value to the electrical property data acquisition unit 11 based on a control command from the electrical property data acquisition unit 11. The electrical characteristic data acquisition unit 11 selects an arbitrary second cable 38 from the M × N second cables 38 and electrically connects the selected second cable 38 and the ammeter. can do.
Thus, the electrical characteristic data acquisition unit 11 controls the signal unit and the current detection unit by sending control signals in a state where the sensor panel 50 is set in the inspection apparatus 1. The electrical characteristic data acquisition unit 11 calculates the position coordinates (m, n) on the sensor panel 50 by performing phase detection on the output of the ammeter of the current detection unit and calculating the AC signal in the signal unit. The capacitance value Cmn and the resistance value Rmn (electrical characteristic data) can be acquired.

The reference characteristic data calculation unit 12 calculates reference characteristic data based on electrical characteristic data acquired from a plurality of (P) sensor panels 50.
FIG. 3 is a diagram illustrating statistical processing performed by the reference characteristic data calculation unit in the inspection apparatus.
In FIG. 3, P sensor panels 50p are shown in the upper part, and reference characteristic data calculated by the reference characteristic data calculation unit is shown in the lower part. However, p is an integer represented by 1 ≦ p ≦ P.
The reference characteristic data calculation unit 12 statistically analyzes the electrical characteristic data at the position coordinates (X1, Y1) of the P sensor panels 50 (sensor panel 501, sensor panel 502, sensor panel 503,..., Sensor panel 50P). The reference characteristic data corresponding to the position coordinates (X1, Y1) is calculated. Similarly, the reference characteristic data calculation unit 12 statistically processes the electrical characteristic data at the position coordinates (X2, Y1) of the P sensor panels 50, and the reference characteristic data corresponding to the position coordinates (X2, Y1). Is calculated. Similarly, the reference characteristic data calculation unit 12 statistically processes the electrical characteristic data in the corresponding inspection target area such as the position coordinates (X3, Y1), and calculates reference characteristic data corresponding to each inspection target area. In this way, the reference characteristic data calculation unit 12 performs statistical processing for each of the corresponding inspection target regions for the plurality of sensor panels 50p.

Here, the electrical characteristic data acquired from the sensor panel 50p is referred to as electrical characteristic data mnp.
In the case where the inspection target region includes one of the electrical property data mn as the inspection target region, the reference property data calculation unit 12 applies the electrical property data to all the M × N × P electrical property data mnp. A predetermined statistical process for calculating the median value of each characteristic data mn (hereinafter referred to as median value Mmn1) is performed, and M × N pieces of reference characteristic data Smn1 corresponding to M × N × P pieces of electrical characteristic data mnp. Is calculated.
For example, when the capacitance value Cmn is acquired as the electrical characteristic data, the capacitance value for all the data of M × N × P capacitance values Cmnp acquired from the P sensor panels 50 is obtained. Predetermined statistical processing for calculating the median value of each Cmn (hereinafter referred to as median value CMmn1) is performed to calculate M × N pieces of reference characteristic data SCmn1 corresponding to M × N × P capacitance values Cmnp. To do.
Further, when the resistance value Rmn is acquired as the electrical characteristic data, the median value of each of the resistance values Rmn for all the data of M × N × P resistance values Rmnp acquired from the P sensor panels 50 ( Hereinafter, predetermined statistical processing for calculating the median value RMmn1 is performed, and M × N reference characteristic data SRmn1 corresponding to M × N × P resistance values Rmnp are calculated.

  Note that the reference characteristic data calculation unit 12 determines that the inspection target region is a region in which the first electrode 51 is two in the x direction and the second electrode 52 is two in the y direction, that is, the electrical property data mn In the case of a region including four of them, the median value of each of the ¼ electrical characteristic data mn (hereinafter referred to as the median value) for ¼ of the M × N × P electrical characteristic data mnp. M × N / 4 pieces of reference characteristic data Smn4 corresponding to M × N × P / 4 pieces of electrical characteristic data mnp may be calculated by performing a predetermined statistical process for calculating (Mmn4). Thus, the inspection time can be shortened by widening the inspection object region.

Further, the reference characteristic data calculation unit 12 may perform a process of calculating an average value when calculating the reference characteristic data. In the case where the inspection target region includes one of the electrical property data mn as the inspection target region, the reference property data calculation unit 12 applies the electrical property data to all the M × N × P electrical property data mnp. Predetermined statistical processing for calculating an average value of each characteristic data mn (hereinafter referred to as average value AVmn1) is performed, and M × N pieces of reference characteristic data Smn1 corresponding to M × N × P pieces of electrical characteristic data mnp Is calculated.
For example, when the capacitance value Cmn is acquired as the electrical characteristic data, the capacitance value for all the data of M × N × P capacitance values Cmnp acquired from the P sensor panels 50 is obtained. A predetermined statistical process for calculating an average value of each Cmn (hereinafter referred to as average CAVmn1) is performed, and M × N pieces of reference characteristic data SCmn1 corresponding to M × N × P capacitance values Cmnp are calculated. .
Further, when the resistance value Rmn is acquired as the electrical characteristic data, the average value of each of the resistance values Rmn for all the data of M × N × P resistance values Rmnp acquired from the P sensor panels 50 ( Hereinafter, predetermined statistical processing for calculating the average value RAVmn1 is performed, and M × N reference characteristic data SRmn1 corresponding to M × N × P resistance values Rmnp are calculated.

  When the median value or the average value is adopted, the reference characteristic data calculation unit 12 deletes the predetermined number from the electrical characteristic data representing the maximum value and calculates the predetermined number from the electrical characteristic data representing the minimum value. A configuration may be adopted in which the step of calculating the median value or the average value of the deleted electrical characteristic data as the reference characteristic data is taken or not. Even if the configuration is such that the above steps are not performed when the median value is employed, the electrical characteristics of the reference property data calculated by the reference property data calculation unit 12 are compared to the configuration in which the above steps are performed when the average value is employed. The degree of influence on the characteristic data determination unit 13 can be made relatively small.

The electrical characteristic data determination unit 13 determines that the acquired electrical characteristic data is correct when the acquired electrical characteristic data is within a predetermined threshold range from the reference characteristic data, and acquires the acquired electrical characteristic. When the data is outside the predetermined threshold range from the reference characteristic data, it is determined that the acquired electrical characteristic data is not correct.
For example, when acquiring the capacitance value Cmn as the electrical property data, the electrical property data determination unit 13 determines that all of the M × N capacitance values Cmn acquired from the sensor panel 50p are in the center. When the value is within a predetermined threshold range from the value CMmn1, it is determined that the sensor panel 50p is a non-defective product. Further, the electrical characteristic data determination unit 13 can obtain the capacitance value Cmnp of the position coordinates (m, n) in the non-defective sensor panel 50p. On the other hand, when at least one of the M × N capacitance values Cmnp acquired from the sensor panel 50p is outside the predetermined threshold range from the median value CMmn1, the electrical characteristic data determination unit 13 50p is determined to be a defective product. Further, the electrical characteristic data determination unit 13 can obtain the position coordinates (m, n) that are defective.
Further, when the resistance value Rmn is acquired as the electrical characteristic data, the electrical characteristic data determination unit 13 determines that all of the M × N resistance values Rmnp acquired from the sensor panel 50p are predetermined from the median value RMmn1. The sensor panel 50p is determined to be a non-defective product when it is within the threshold value range. Moreover, the electrical characteristic data determination unit 13 can obtain the resistance value Rmnp of the position coordinates (m, n) in the non-defective sensor panel 50p. On the other hand, when at least one of the M × N resistance values Rmnp acquired from the sensor panel 50p is outside the predetermined threshold range from the median value RMmn1, the electrical characteristic data determination unit 13 It is determined that the product is defective. Further, the electrical characteristic data determination unit 13 can obtain the position coordinates (m, n) that are defective.

FIG. 4 is a diagram illustrating an example of a processing flow in the inspection apparatus.
The processing flow shown in FIG. 4 is a diagram illustrating processing when the inspection apparatus 1 inspects P sensor panels 50. In the initial state, the value of Q shown in step ST2 of FIG. 4 is Q = 0.
The inspection apparatus 1 acquires electrical characteristic data from the sensor panel 50p (step ST1).
Specifically, the electrical property data acquisition unit 11 in the inspection apparatus 1 acquires electrical property data from the p-th sensor panel 50p. Further, the electrical characteristic data acquisition unit 11 sets Q = Q + 1 when the acquisition of the electrical characteristic data from the sensor panel 50p is completed.
The inspection apparatus 1 determines whether or not Q is equal to P (step ST2). When Q is equal to P (step ST2-Yes), the inspection apparatus 1 has acquired electrical characteristic data from the P sensor panels 50p, and thus proceeds to step ST3. On the other hand, when Q is not equal to P (step ST2-No), the process returns to step ST1. The electrical characteristic data acquisition unit 11 in the inspection apparatus 1 acquires electrical characteristic data from the (p + 1) th sensor panel 50p.

The inspection device 1 performs predetermined statistical processing on the acquired electrical characteristic data to calculate reference characteristic data (step ST3). As the predetermined statistical process, the reference characteristic data is calculated by a process of calculating a median value or an average value.
The inspection apparatus 1 determines whether the electrical characteristic data acquired from each of the P sensor panels 50 is within or outside a predetermined threshold range from the reference characteristic data, and determines whether the sensor panel 50p is a non-defective product. It is determined whether or not (step ST4). Even if it is determined that the sensor panel 50p is not a good product, the position coordinates (m, n) that are defective of the sensor panel 50p can be obtained, so that the location where the wiring on the sensor panel 50p is shorted or disconnected is detected. be able to.

  As described above, the inspection apparatus 1 of the present invention includes a sensor panel in which a plurality of pairs of conductive pairs including the first electrode (first conductor) and the second electrode (second conductor) are provided on the first main surface. 50 (inspection object), electrical characteristic data acquisition unit 11 that acquires electrical characteristic data for each of the pair of conductive pairs, and among the electrical characteristic data acquired from the plurality of inspection objects, A reference characteristic data calculation unit 12 that performs statistical processing based on each inspection target object of the electrical characteristic data corresponding to the position provided on the first main surface, and calculates reference characteristic data for each inspection target region; .

  According to the present invention, the reference characteristic data calculation unit 12 has each inspection target of the electrical characteristic data corresponding to the position provided on the first main surface among the electrical characteristic data acquired from the plurality of inspection objects. Statistical processing is performed based on each of the objects, and reference characteristic data for each region to be inspected is calculated. When determining whether or not a product is a non-defective product, the inspection apparatus 1 performs determination using reference characteristic data as a reference value for determination. According to this, it is possible to provide an inspection apparatus capable of improving inspection accuracy in consideration of variations between samples and measurement environments.

As mentioned above, although preferable embodiment of this invention was described, this invention is not limited to these embodiment and its modification. Additions, omissions, substitutions, and other modifications can be made without departing from the spirit of the present invention.
For example, an inspection program for realizing the function of the inspection apparatus 1 is recorded on a computer-readable recording medium, and the program recorded on the recording medium is read into a computer system and executed. The reference characteristic data calculation step performed by the reference characteristic data calculation unit 12 and the electrical characteristic data determination step performed by the electrical characteristic data determination unit 13 may be performed. Here, the “computer system” includes an OS and hardware such as peripheral devices.
Further, the “computer system” includes a homepage providing environment (or display environment) if a WWW system is used.
The “computer-readable recording medium” refers to a storage device such as a flexible medium, a magneto-optical disk, a portable medium such as a ROM and a CD-ROM, and a hard disk incorporated in a computer system. Further, the “computer-readable recording medium” refers to a volatile memory (RAM) in a computer system that becomes a server or a client when a program is transmitted via a network such as the Internet or a communication line such as a telephone line. In addition, those holding programs for a certain period of time are also included. The program may be a program for realizing a part of the functions described above, and may be a program capable of realizing the functions described above in combination with a program already recorded in a computer system.

DESCRIPTION OF SYMBOLS 1 ... Inspection apparatus 11 ... Electrical characteristic data acquisition part 12 ... Reference | standard characteristic data calculation part 13 ... Electrical characteristic data determination part 50 ... Sensor panel 51 ... 1st electrode 52 ... 2nd electrode

Claims (4)

Electrical characteristics for obtaining electrical characteristic data for each of the pair of conductive pairs among the inspection objects in which a plurality of pairs of conductive pairs including the first conductor and the second conductor are provided on the first main surface. A data acquisition unit;
Among the electrical property data acquired from the plurality of inspection objects, statistical processing is performed based on each inspection object of the electrical property data corresponding to the position provided on the first main surface, and inspection is performed. A reference characteristic data calculation unit for calculating reference characteristic data for each target area;
An inspection apparatus comprising:   The inspection apparatus according to claim 1, wherein the statistical processing is a median value of the electrical characteristic data of the plurality of inspection objects.   The inspection apparatus according to claim 1, wherein the statistical processing is an average value of the electrical characteristic data of a plurality of the inspection objects. Electrical characteristics for obtaining electrical characteristic data for each of the pair of conductive pairs among the inspection objects in which a plurality of pairs of conductive pairs including the first conductor and the second conductor are provided on the first main surface. Data acquisition process;
Among the electrical property data acquired from the plurality of inspection objects, statistical processing is performed based on each inspection object of the electrical property data corresponding to the position provided on the first main surface, and inspection is performed. A reference characteristic data calculation step for calculating reference characteristic data for each target area;
An inspection method comprising:

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