JP2017173140A - Holding tool and stage device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology of suppressing the accident in which a string-shaped member is damaged by contact with a holding tool, regarding the holding tool for holding the string-shaped member connected to a stationary portion and a movable portion of a stage device.SOLUTION: The stage device includes: a holding tool 40 of a tube 30 connected to a compression gas supply source and a slider 22. The tube 30 includes: a restriction portion 32 restricted by the holding tool 40; a non-restriction portion 34 deformable with movement of the slider 22; and a boundary 36 between the restriction portion 32 and the non-restriction portion 34. The holding tool 40 includes a first resin portion 46 and second resin portion 50 facing the boundary 36.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a holder and a stage device.

  A stage apparatus in which a movable part moves along a guide is known. Conventionally, there has been proposed a stage device in which a tube is connected to a movable part, and the movable part is linearly guided in a non-contact manner along a guide by a gas supplied from the tube (see, for example, Patent Document 1).

JP 2013-187432 A

  In a stage apparatus as described in Patent Document 1, a tube is usually held by a holder fixed to a movable part or a predetermined stationary part. When the movable portion repeatedly moves, the tube is repeatedly deformed accordingly, and the tube and the corner portion of the holding portion are repeatedly contacted. This repeated contact can damage the tube. If it is damaged, maintenance is required and productivity is reduced.

  Such a problem is not limited to the case where the tube for supplying gas to the movable part is held by the holder, but other tubes, cables, and other string members connected to the movable part are held by the holder. It can also happen.

  The present invention has been made in view of such a situation, and an object of the present invention is to hold a string-like member connected to a stationary part and a movable part of a stage device, and to form a string by contacting the holder. An object of the present invention is to provide a technique for preventing the member from being damaged.

  In order to solve the above-described problems, a holder according to an aspect of the present invention is a string-like member holder connected to a stationary part and a movable part of a stage device, and the holder is a stationary part or a movable part. The string-like member is provided on one of the two, a restraint portion restrained by the holder, a non-restraint portion that extends from the restraint portion to the other of the stationary portion or the movable portion and can be deformed as the movable portion moves, And a boundary portion between the portion and the non-restraining portion. A resin portion facing at least a part of the boundary portion is provided.

  Note that any combination of the above-described constituent elements, and those obtained by replacing the constituent elements and expressions of the present invention with each other among methods, apparatuses, systems, etc. are also effective as an aspect of the present invention.

  ADVANTAGE OF THE INVENTION According to this invention, in the holder holding the string-like member connected with a stationary part and the movable part of a stage apparatus, the technique which suppresses that a string-like member is damaged by contact with a holder can be provided.

1A and 1B are diagrams showing a stage apparatus according to an embodiment. FIGS. 2A and 2B are views showing the holder of FIG. It is a figure which shows the stage apparatus which concerns on a modification. It is a figure which shows the stage apparatus which concerns on a modification.

  Hereinafter, the same or equivalent components, members, and processes shown in the drawings are denoted by the same reference numerals, and repeated descriptions are appropriately omitted. In addition, the dimensions of the members in each drawing are appropriately enlarged or reduced for easy understanding. Also, in the drawings, some of the members that are not important for describing the embodiment are omitted.

  1A and 1B are diagrams showing a stage apparatus 100 according to an embodiment. FIG. 1A is a top view of the stage apparatus 100. FIG. 1B is a side view of the stage apparatus 100. In FIG. 1B, the display of the tube 30 is omitted. The stage apparatus 100 is called a uniaxial stage and positions an object. For convenience of explanation, as shown in the figure, an xyz orthogonal coordinate system is defined in which the longitudinal direction of the guide 20 is the x-axis direction, the vertical direction is the z-axis direction, and the direction orthogonal to both is the y-axis direction.

  The stage apparatus 100 includes a surface plate 10, two support members 12, a guide 20, a slider 22, a tube 30, a first holder 40 a and a second holder 40 b (hereinafter collectively referred to as “holder”. 40 ”) and a compressed gas supply source 70.

  The surface plate 10 is a rectangular plate-like member in plan view. The board surface 10a which is the upper surface of the surface plate 10 is formed flat. Two support members 12 are provided on the board surface 10a apart from each other in the x-axis direction.

  The guide 20 is a quadrangular columnar member. Both ends of the guide 20 are supported by support members 12 provided on the surface plate 10.

  The slider 22 is a cylindrical body having a square cross section, and the guide 20 is inserted therethrough. The slider 22 is configured to be movable in the x-axis direction along the guide 20. In the present embodiment, the slider 22 constitutes an air slide together with the guide 20 and the tube 30, and moves along the guide 20 in a non-contact state with the guide 20 when the compressed gas is supplied from the tube 30.

  The first holding tool 40 a is fixed to the side surface 22 a of the slider 22. The second holder 40b is fixed to the surface 10a of the surface plate 10. The structure of the holder 40 will be described later with reference to FIG.

  The tube 30 is formed of a resin or the like, and is soft and flexible. The tube 30 is arranged to have an arcuate curved portion 30a that is curved in the x-axis direction, one end side is held by the first holding tool 40a and connected to the slider 22, and the other end side is held by the second holding tool 40b. And connected to the compressed gas supply source 70. The tube 30 supplies the compressed gas from the compressed gas supply source 70 to the slider 22.

  2A and 2B show the first holder 40a. FIG. 2A shows a view of the first holder 40a viewed from the x-axis direction, and FIG. 2B is a cross-sectional view taken along line AA of FIG. In addition, although the structure of the 1st holder 40a is demonstrated as a representative, the same description is applied also about the 2nd holder 40b.

  The first holder 40 a includes a first member 42 and a second member 44. The first member 42 is fixed to the side surface 22 a of the slider 22. The first member 42 includes a plate-shaped first resin portion 46 formed of a resin (for example, a fluororesin) and a plate-shaped first metal portion 48 formed of a metal. The first resin portion 46 and the first metal portion 48 are adjacent to each other in the x-axis direction and are fixed to each other by bolts or adhesion.

  The second member 44 is fixed to the first member 42 with a bolt or the like while sandwiching the tube 30 with the first member 42. The second member 44 includes a plate-like second resin portion 50 formed of a resin (for example, a fluororesin) and a plate-like second metal portion 52 formed of a metal. The second resin part 50 and the second metal part 52 are fixed to each other by bolts or adhesion in a state where their main surfaces face each other in the y-axis direction. The second resin part 50 faces the first member 42 (that is, the first resin part 46 and the first metal part 48).

  Four grooves 42 a that are recessed in the y-axis direction are formed on the surface of the first member 42 that faces the second member 44. The four grooves 42a have an arc shape in cross section and extend in the x-axis direction. Similarly, four grooves 44 a that are recessed in the y-axis direction are formed on the surface of the second member 44 that faces the first member 42. The groove 44a has a circular arc cross section and extends in the x-axis direction. The groove 42a and the groove 44a face each other in the y-axis direction, and the tube 30 is accommodated between them.

  The first holder 40 a holds one end side of the tube 30 by being sandwiched between the first member 42 and the second member 44. Thereafter, the portion of the tube 30 that is sandwiched and restrained by the first member 42 and the second member 44 of the holder 40 extends toward the restraining portion 32 and the other holder 40, and is not restrained by the holder 40. The portion of the tube 30 that can be deformed with the movement of the slider 22 is referred to as a non-constraint portion 34, and the portion of the tube 30 between the restraint portion 32 and the non-constraint portion 34 is referred to as a boundary portion 36. When the first holder 40 a holds the tube 30, the first resin portion 46 of the first member 42 and the second resin portion 50 of the second member 44 face the boundary portion 36.

  According to the holder 40 according to the embodiment described above, the boundary portion 36 of the tube 30 is sandwiched between the first resin portion 46 of the first member 42 and the second resin portion 50 of the second member 44. Here, when the slider 22 repeatedly moves, the unconstrained portion 34 is repeatedly deformed along with this, and the boundary portion 36 is joined to the corner portion 42b of the first member 42 or the second member along with the repeated deformation of the unconstrained portion 34. It contacts the corners 44b of 44 repeatedly. On the other hand, in the present embodiment, the corner portion 42b of the first member 42 and the corner portion 44b of the second member 44 are formed of resin (that is, a material that is softer than metal), and thus the boundary portion 36 has a corner. It can suppress that the boundary part 36 is damaged by contacting with the parts 42b and 44b repeatedly.

  Further, according to the holder 40 according to the embodiment, the first metal portion 48 of the first member 42 also faces the restraining portion 32 of the tube 30. That is, in the holder 40, not only the resin portion but also the metal portion faces the restraining portion 32. Thereby, sufficient frictional force can be obtained between the tube 30 and the holder 40, and the tube 30 can be firmly held.

  The stage device including the holder according to the embodiment has been described above. This embodiment is an exemplification, and it will be understood by those skilled in the art that various modifications can be made to combinations of the respective constituent elements and processing processes, and such modifications are also within the scope of the present invention. is there. A modification is shown below.

(Modification 1)
FIG. 3 is a diagram illustrating a stage apparatus according to a modification. Due to the space of the stage device, the distance in the Y-axis direction between the first holder 40a and the second holder 40b may be relatively short. In this case, the radius of curvature of the arcuate curved portion 30a of the tube 30 (that is, the unconstrained portion 34) is relatively small. When the radius of curvature of the arcuate curved portion 30a is reduced, the non-restraining portion 34 is moved away from the side where the arcuate curved portion 30a is disposed with respect to the holder 40 due to the repulsive force (elastic force) of the tube 30. Try to transform. Specifically, when the slider 22 moves to the left side in FIG. 3, the second holding tool 40b side of the unconstrained part 34 is connected to the arcuate curved part 30a with respect to the second holding tool 40b as shown by a two-dot chain line. Tries to deform to the other side. In addition, when the slider 22 moves to the right in FIG. 3, the first holding tool 40a side of the unconstrained portion 34 is opposite to the arcuate curved portion 30a with respect to the first holding tool 40a as indicated by a two-dot chain line. Try to transform into.

  On the other hand, in the present modification, the stage device includes two plates 56. The two plates 56 serve as walls and restrict the tube 30 from being deformed with respect to the holder 40 to the side opposite to the arcuate curved portion 30a. The plate 56 is, for example, a portion of the unconstrained portion 34 on the boundary portion 36 side when the restraining portion 32, the boundary portion 36, and the portion of the unconstrained portion 34 on the boundary portion 36 side are substantially straight. It may be provided so as to come into contact with. The plate 56 may be formed of a resin such as a fluororesin, for example.

  According to this modification, it can suppress that the tube 30 contacts the corner | angular part of the holder 40, and can suppress that the tube 30 is damaged.

(Modification 2)
FIG. 4 is a diagram showing a stage apparatus according to another modification. In this modification, the stage device includes two rotation support portions that support the holder 40 so as to be rotatable about the z axis. The 1st rotation support part 60 is fixed to the side surface 22a of the slider 22, and supports the 1st holder 40a so that rotation around az axis is possible. The 2nd rotation support part 62 is fixed to the board surface 10a, and supports the 2nd holder 40b so that rotation around az axis is possible. The two rotation support portions include, for example, bearings and elastic hinges.

  According to this modification, when the tube 30 (that is, the unconstrained portion 34) is deformed with the movement of the slider 22, the first holding tool 40a and the second holding tool 40b are respectively z according to the repulsive force of the tube 30. Rotate around the axis. In particular, the first holder 40a rotates around the z axis so that the ends of the restraining portion 32, the boundary portion 36, and the non-restraining portion 34 on the boundary portion 36 side are substantially aligned. Similarly, in particular, the second holding tool 40b rotates around the z-axis so that the ends of the restraining portion 32, the boundary portion 36, and the non-restraining portion 34 on the boundary portion 36 side are substantially in a straight line. Thereby, it can suppress that the edge part by the side of the boundary part 36 of the non-restraining part 34 curves, and can suppress that an edge part fatigues. Moreover, it can suppress that the boundary part 36 contacts the corner | angular part 42b of the 1st member 42, or the corner | angular part 44b of the 2nd member 44, and can suppress that the boundary part 36 is damaged. That is, according to this modification, it can suppress that the tube 30 is damaged.

(Modification 3)
In the embodiment, the case where the holder 40 holds the tube 30 for supplying air to the slider 22 has been described. However, the present invention is not limited to this, and the holder 40 is added to the tube 30 or instead of the tube 30. A cable connected to the stationary part and the slider 22 and other string-like members may be held.

(Modification 4)
In the embodiment, the first member 42 of the holder 40 has been described with respect to the case where the first resin portion 46 and the first metal portion face the tube 30. However, the present invention is not limited to this, and similarly to the second member 44, Only the resin portion may be configured to face the tube 30. The second member 44 has been described with respect to the case where only the second resin portion 50 faces the tube 30. However, the second member 44 is not limited to this, and the resin portion and the metal portion face the tube 30 similarly to the first member 42. It may be configured as follows. Moreover, although the case where both the resin parts of the 1st member 42 and the 2nd member 44 face the boundary part 36 of the tube 30 was demonstrated, it is not restricted to this, either the 1st member 42 or the 2nd member 44 The resin portion and the other metal portion may face the boundary portion 36.

  Any combination of the above-described embodiments and modifications is also useful as an embodiment of the present invention. The new embodiment generated by the combination has the effects of the combined embodiment and the modified examples. In addition, it should be understood by those skilled in the art that the functions to be fulfilled by the constituent elements described in the claims are realized by the individual constituent elements shown in the embodiments and the modified examples or by their linkage. . For example, the stationary part and the movable part described in the claims may be realized by the compressed gas supply source 70 and the slider 22 described in the embodiment, respectively. Further, for example, the reverse warpage suppressing mechanism described in the claims may be realized by the plate 56, the first rotation support portion 60, and the second rotation support portion 62 described in the modification.

  20 Guide, 22 Slider, 30 Tube, 32 Restraint, 34 Non-restraint, 36 Boundary, 40 Holder, 40a First Holder, 40b Second Holder, 42 First Member, 42b Corner, 44 Second Member, 44b corner portion, 46 first resin portion, 48 first metal portion, 50 second resin portion, 52 second metal portion, 56 plate, 60 first rotation support portion, 62 second rotation support portion, 70 Compressed gas supply source, 100 stage device.

Claims (4)

A string-like member holder connected to the stationary part and the movable part of the stage device,
The holder is provided on one of the stationary part or the movable part,
The string-like member includes a restraint portion restrained by the holder, a non-restraint portion that extends toward the other of the stationary portion or the movable portion, and is deformable as the movable portion moves, and the restraint portion And a boundary portion with the non-restraining portion,
A holder comprising a resin portion facing at least a part of the boundary portion. A first member having a first resin portion facing the boundary portion;
A second member having a second resin portion facing the boundary portion,
The holder according to claim 1, wherein the string-like member is held by being sandwiched between the first member and the second member. The movable part;
A stage apparatus comprising: the holder according to claim 1. The string-like member is disposed so as to have an arcuate curve in the non-restraining portion,
The stage apparatus according to claim 3, further comprising a reverse warpage suppressing mechanism that suppresses deformation of the string-like member toward a side opposite to a side on which the arcuate curve is disposed with respect to the holder.

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