JP2017161487A - Visual inspection apparatus, visual inspection method, visual inspection program, and computer-readable storage medium, and recorded instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow precise visual inspection of a stereoscopic inspection object such as micro needle using image processing.SOLUTION: An average interval between a plurality of projections in an X-axis direction is denoted by L, an average interval in a Y-axis direction by L, a maximum height of an area for visual inspection in height directions of the projections is denoted by H, and a maximum thickness of the projections is denoted by W. When a first optical axis tilt mechanism sets a first optical axis horizontal tilt angle αto be in a range satisfying -W<m*L*sinβcosα-sinα(m*L*cosβ+n*L)<W (conditional expression 1)(m, n are any integers), a first lens inclination mechanism 32 sets a first lens vertical tilt angle θ, and a first image pick-up device tilt mechanism 31 sets a first imaging tilt angle θ, respectively to be in a range in which a first optical axis vertical tilt angle θsatisfies (conditional expression 2).SELECTED DRAWING: Figure 3

Description

  The present invention relates to an appearance inspection apparatus, an appearance inspection method, an appearance inspection program, a computer-readable storage medium, and a recorded device for optically imaging and inspecting the appearance of an inspection object. The present invention relates to an apparatus and an inspection method.

  In recent years, the importance of appearance inspection at the time of manufacturing a product or before shipment is increasing from the viewpoint of increasing safety awareness and product liability. Such an inspection is performed by capturing the appearance of an inspection object with an optical camera to obtain an optical image, and confirming that there is no abnormality in the shape or adhesion of foreign matter by image processing or the like. In particular, in the fields of food, medicine, medical equipment, etc., since it is taken into the human body, strict measures against contamination by foreign substances are required, and appearance inspection is performed on the entire amount of products. Yes. In particular, in order to efficiently process a large amount of inspection objects without omission, mechanical image processing, not visual inspection, is essential. In the case of appearance inspection by image processing, for example, an optical image of an inspection object is captured, the appearance shape is extracted by image processing such as edge detection, and an abnormality determination or pattern recognition method is used. Non-defective product judgment is performed.

  In the appearance inspection using such image processing, in order to improve the accuracy of the determination, an optical image focused on the entire inspection target region of the inspection target (hereinafter referred to as “focused image” in this specification). It is important to capture the image. If image processing is performed on a blurred optical image that is not in focus, pre-processing such as edge detection will not be performed accurately, and it will be difficult to determine abnormal shapes or adhesion of foreign objects in subsequent processing. There is a risk of erroneous detection. For this reason, it is required to obtain a focused image that is uniformly focused in the region to be inspected.

  In this case, if the shape of the inspection object is planar, it is relatively easy to capture a focused image. However, in the case of a three-dimensional shape and arrangement, such imaging is difficult. As an example, a case where a microneedle array as shown in FIGS. The microneedle array is a percutaneous absorption promotion device that administers a drug by puncturing a fine needle in the epidermis layer of the skin (for example, Patent Document 1). In general, as shown in the plan view of FIG. 76A, the perspective view of FIG. 77, and the enlarged photograph of FIG. 78, a large number of microneedles (microneedles MN) are uniformly on the XY plane on the upper surface of a flat substrate SUB such as a circle. Are listed. For each of such a large number of microneedles MN, for example, whether or not the tip portion is bent, chipped or bent as shown in the enlarged perspective view of FIG. It is necessary to inspect the generation of bubbles during filling.

  However, it is extremely difficult to inspect the outer surface of every microneedle of the microneedle array. That is, if a plan view is imaged from the upper surface of the microneedle array, the state shown in FIG. 80 is obtained, and the shape of the tip portion of the microneedle cannot be sufficiently grasped. Therefore, as shown in the enlarged perspective view of FIG. 78, it is necessary to image a perspective view as viewed obliquely from above. Moreover, since each microneedle is a fine three-dimensional structure and has many blind spots, appearance inspection from a plurality of directions is also required. Therefore, when it is necessary to capture a plurality of optical images, it is necessary to shorten the tact time required to capture the optical image as much as possible so that in-line appearance inspection is possible at the time of manufacture in consideration of inspection efficiency.

  For example, in order to focus on an inspection object having a depth, a plurality of images with different focus positions are captured, and only a focus area is extracted and superimposed, a depth composite image (“focus image”, A method of generating “multi-focus image” or the like) is conceivable. However, this method requires a calculation processing time for capturing a plurality of images with different focus positions and combining them. For this reason, in general, a suitable tact time is required to obtain a depth composite image, and it is not suitable for a scene in which high speed is required such as an inspection application mounted in-line on a production line.

Japanese Patent Laying-Open No. 2015-16362

  The present invention has been made in view of such a situation. An object of the present invention is to provide an appearance inspection apparatus, an appearance inspection method, an appearance inspection program, a computer-readable storage medium, and a recorded device capable of accurately performing an appearance inspection of a three-dimensional inspection object by image processing. Is to provide.

Means for Solving the Problems and Effects of the Invention

In order to achieve the above object, according to the appearance inspection apparatus according to the first aspect of the present invention, a three-dimensional projection is crossed at the X axis and an angle β (0 <β ≦ 90 °). An appearance inspection apparatus for performing an appearance inspection by imaging an inspection object region of an inspection object arranged in a plurality of rows on an XY plane defined by an axis, for capturing an optical image of the inspection object The first imaging element, the first imaging lens arranged on the first optical axis of the first imaging element for imaging the inspection object, and the first optical axis in the row direction of the protrusions in plan view The first optical axis horizontal inclination angle α _OA1 (0 <α _OA1 <90 °) inclined with respect to the first optical axis vertical inclination angle θ _OA1 (0 <α _OA1 <90 °) and the first optical axis vertical inclination angle θ _OA1 ( 0 <θ _OA1 <90 °) and a first optical axis tilting mechanism for adjusting, put the plurality of protrusions, in the X-axis direction The average interval of the projection between L _x, the average distance in the Y-axis direction L _y, of the height direction of the projections, the maximum height of the inspection areas to be visual inspection H, of each protrusion When the maximum thickness is W, the first optical axis horizontal tilt angle α _{OA1 is set} to −W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1: m, n is an arbitrary integer)
When the range is set to satisfy the first optical axis tilt mechanism θ _OA1 with the first optical axis tilt mechanism.
(Condition 2)
The range can be set to satisfy. With the above configuration, at the time of visual inspection of an inspection object in which a plurality of protrusions are regularly arranged on the XY plane, only by adjusting the first image sensor tilt mechanism and the first lens tilt mechanism so that the parameters fall within a predetermined range, When the image is taken from the side, it is possible to avoid a situation where the projection on the back side becomes a shadow of the projection on the front side and the appearance inspection cannot be performed. In particular, the actual parameters such as the thickness, height, and spacing of the protrusions can be set without going through the process of finding the optimal installation conditions through repeated trial and error by actually arranging the image sensor and imaging lens as in the past. Accordingly, only by setting the first image sensor tilt mechanism and the first lens tilt mechanism, the installation conditions necessary for the appearance inspection can be determined, and the labor-saving adjustment work can be greatly saved.

Further, according to the visual inspection apparatus according to the second aspect, when the first optical axis tilt mechanism is set in a range where the first optical axis horizontal tilt angle α _OA1 does not satisfy the conditional expression 1, Regardless of the conditional expression 2, it can be set to an arbitrary first optical axis vertical inclination angle θ _OA1 . With the above configuration, in the appearance inspection of the inspection object in which a plurality of protrusions are regularly arranged on the XY plane, the protrusion on the back side becomes a shadow of the protrusion on the front side even when imaged from the side, and the appearance inspection is performed. When the situation where it cannot be performed does not occur, an angle for changing the observation direction obliquely upward can be arbitrarily set, and the degree of freedom of the appearance inspection can be improved.

Furthermore, according to the visual inspection apparatus according to the third aspect, when the tip of the projection is tapered, the conditional expression 2 is

  It can be. With the configuration described above, there is an advantage that the appearance inspection of the tapered portion of the tip portion can be efficiently performed on the inspection object such as the conical micro needle.

Furthermore, according to the visual inspection apparatus according to the fourth aspect,

(Condition 3)
For m and n satisfying
−W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 4)
The so that the first optical axis horizontal tilt angle alpha _OA1 satisfying, the first optical axis horizontal tilt angle alpha _OA1 with by the first optical axis tilting mechanism can be set to a fixed value.

  Furthermore, according to the visual inspection apparatus according to the fifth aspect, H can be the average height of each protrusion, and W can be the average thickness. With the above configuration, it is possible to inspect the appearance of not only a part of the projection but also the whole.

Furthermore, according to the visual inspection apparatus according to the sixth aspect, the first optical axis tilting mechanism is a first lens vertical tilt formed by a main plane including the main point of the first imaging lens and a region to be inspected. A first lens vertical tilt mechanism for adjusting the angle θ _L1 , and a first imaging vertical tilt mechanism for adjusting the first image tilt angle θ _I1 formed by the light receiving surface of the first image sensor and the inspection target region; The first object is arranged such that the inspection target area, the main plane of the first imaging lens, and the extended lines of the light receiving surface of the first imaging element intersect at one point according to the Scheinproof principle. The first lens vertical tilt angle θ _L1 is adjusted by the lens vertical tilt mechanism, and the first image tilt angle θ _I1 is adjusted by the first imaging vertical tilt mechanism to different angles, and is focused at each position in the inspection target area. An optical image can be captured by the first image sensor. With the above configuration, it is possible to acquire a focused optical image over a wide area of the inspection target area, and it is possible to avoid the situation where multiple rows of projections overlap each other and become invisible, realizing a highly reliable appearance inspection Is done.

Furthermore, according to the visual inspection apparatus according to the seventh aspect, the visual inspection apparatus for performing visual inspection by imaging the inspection target area of the inspection target formed by arranging the three-dimensional protrusions in a plurality of rows. A first imaging element that captures an optical image of the inspection object; a first imaging lens that is disposed on a first optical axis of the first imaging element that images the inspection object; The first lens vertical inclination angle θ _{L1 with} respect to the inspection target area with respect to the main plane including the principal point of the image lens, and the first imaging inclination angle θ _I1 with respect to the inspection target area with respect to the light receiving surface of the first imaging element, A first optical axis tilting mechanism that can be adjusted by tilting the imaging element and / or the first imaging lens relative to the first optical axis. An inspection object region of the object, a main plane of the first imaging lens, and the first Each extension line of the light receiving surface of the image elements, so as to intersect at one point in accordance with the principles of the Scheimpflug first lens vertical inclination angle theta _L1, it can be adjusted the first imaging tilt angle theta _I1 is varied to different angles. With the above configuration, the first image sensor can capture an optical image focused at each position in the inspection target area in accordance with the principle of Scheinproof.

Furthermore, according to the visual inspection apparatus according to the eighth aspect, the first optical axis tilting mechanism has the first lens vertical tilt angle θ _L1 of 26 ° to 60 ° and the first imaging tilt angle θ _I1 . Each can be set to 48 ° to 70 °.

Furthermore, according to the visual inspection apparatus according to the ninth aspect, the first optical axis tilting mechanism has a first lens vertical tilt with respect to the inspection target region with respect to a main plane including the main point of the first imaging lens. An angle θ _L1 and a first lens horizontal inclination angle α _L1 (0 <α _L1 <90 °) obtained by inclining the first optical axis of the first imaging lens with respect to the row direction of the protrusions in plan view. An adjustable first lens tilt mechanism, a first imaging tilt angle θ _I1 with respect to the inspection target region with respect to the light receiving surface of the first image sensor, and a projection of the first optical axis of the first image sensor in plan view A first image sensor tilt mechanism capable of adjusting a first image sensor horizontal tilt angle α _I1 (0 <α _I1 <90 °) tilted with respect to the column direction of the object.

Furthermore, according to the visual inspection apparatus according to the tenth aspect, the first optical axis tilting mechanism has a first light common to the first imaging lens and the first imaging element in a cylindrical shape. The first imaging lens is fixed in the lens barrel, and the first imaging element is supported rotatably about a rotation axis. The imaging element tilting mechanism can adjust the first imaging tilt angle θ _I1 by rotating the first imaging element in the barrel, and the first lens tilting mechanism is a mirror that tilts the barrel. With the tube tilt mechanism, the first lens vertical tilt angle θ _L1 of the first imaging lens fixed in the lens barrel can be adjusted. With the above configuration, the first imaging lens tilting mechanism is realized with the lens barrel tilting mechanism, and the first imaging lens is fixed in the lens barrel and the first imaging element side is tilted, thereby It becomes possible to adjust the first imaging lens and the first image sensor to the inclination angle according to the principle, and there is an advantage that the adjustment operation of the inclination angle can be easily performed. Furthermore, compared with the conventional configuration in which the first image sensor side is fixed and the first imaging lens side is tilted, the tilt range of the first image sensor can be greatly changed, and the tilted posture is further increased. The in-focus image can be captured.

Furthermore, according to the visual inspection apparatus according to the eleventh aspect, the illumination unit for irradiating the inspection object with illumination light, and the illumination unit with respect to the direction of the first optical axis in plan view An illumination tilt mechanism capable of adjusting the illumination horizontal tilt angle α _{LS in} which the traveling direction of the illumination light is tilted and the illumination vertical tilt angle θ _LS in the vertical plane of the illumination light of the illumination unit can be provided.

Furthermore, according to the visual inspection apparatus according to the twelfth aspect, the illumination vertical inclination angle θ _LS can be set to 30 ° or less by the illumination inclination mechanism.

Furthermore, according to the appearance inspection apparatus according to a thirteenth aspect, in the illumination tilting mechanism, the illumination horizontal tilt angle alpha _LS can be set to 0 ° to 90 °.

Furthermore, according to the visual inspection apparatus according to the fourteenth aspect, on the second optical axis of the second image pickup device that picks up an optical image of the inspection object and the second image pickup device that picks up the inspection object. The second imaging lens, the main plane including the principal point of the second imaging lens, and the light receiving surface of the second imaging element, respectively, the second lens vertical tilt angle θ _{L2 with} respect to the inspection target region, Two imaging inclination angles θ _I2 can be adjusted, and the second optical axis horizontal inclination angle α _{OA2 in} which the second optical axis of the second imaging element is inclined with respect to the column direction of the protrusions in a plan view can be adjusted A second optical axis tilting mechanism. With the above configuration, by imaging the same inspection object from different angles, it is possible to check an abnormality that cannot be determined from one side from another viewpoint, and it is possible to further improve the reliability of the appearance inspection.

Furthermore, according to the visual inspection apparatus according to the fifteenth aspect, the second image sensor can be installed at a second optical axis horizontal inclination angle α _OA2 that is different from the first optical axis horizontal inclination angle α _OA1 . With the above configuration, the second image sensor can be disposed on the opposite side of the first image sensor, and an optical image on the back side can be captured.

Furthermore, according to the visual inspection apparatus according to the sixteenth aspect, the horizontal inclination angle α _{OA1 + OA2} formed by the second image sensor and the first image sensor can be _set to 45 ° to 135 °.

  Furthermore, according to the visual inspection apparatus according to the seventeenth aspect, the optical processing is further performed on the optical image, and the image processing unit for determining whether there is an abnormality and the inspection object are conveyed on the line. And the image processing unit can be configured to perform an appearance inspection on the inspection object conveyed by the conveyance unit. With the above configuration, even for inspection objects transported on the line, the optical image focused by a single imaging process is image-processed, making it reliable even in production lines that require high-speed processing. High appearance inspection is realized.

  Furthermore, according to the visual inspection apparatus according to the eighteenth aspect, the inspection object posture guide mechanism for positioning the inspection object conveyed by the conveyance unit in a predetermined attitude is further provided, An optical image of the inspection object positioned by the object posture guide mechanism can be configured to be captured by the first image sensor. With the above configuration, since the posture such as the rotation position of the inspection object is uniquely defined by the inspection object posture guide mechanism before imaging, an optical image of the inspection object having the same posture can always be captured. This is advantageous in image processing.

  Furthermore, according to the visual inspection apparatus according to the nineteenth aspect, the image processing unit includes an edge image generation unit that generates an edge image obtained by extracting an edge from an optical image, and the image processing unit Based on the edge image generated by the edge image generation unit, it can be configured to determine normality or abnormality by comparing with a reference form registered in advance.

  Furthermore, according to the visual inspection apparatus according to the twentieth aspect, the image processing unit determines whether or not a predetermined surface treatment whose shape changes before and after the processing is normally performed on the inspection object. The image processing unit includes a difference extraction unit for extracting a difference with respect to the optical image of the inspection object captured before and after the process, and is extracted by the difference extraction unit. Based on the difference amount, it can be configured to determine whether or not the predetermined surface treatment has been performed normally.

  Furthermore, according to the visual inspection apparatus according to the twenty-first aspect, the predetermined surface treatment is a coating process for applying a coating material to an inspection object, and the difference extraction unit is configured to perform before and after the coating process. The coating amount of the covering material can be calculated based on the difference amount obtained by extracting the difference with respect to the optical image of the inspection object imaged in (1).

  Furthermore, according to the visual inspection apparatus according to the twenty-second aspect, a plurality of first optical images obtained by imaging a plurality of inspection objects, respectively, and a predetermined surface treatment is performed on the plurality of inspection objects. A correspondence relationship identifying unit that identifies a correspondence relationship with a plurality of second optical images captured after the imaging, and the difference extraction unit, according to the correspondence relationship identifying unit, and a first optical image of one inspection object The difference amount can be extracted by selecting the first optical image and the corresponding second optical image. With the above configuration, it is possible to individually extract an accurate difference amount for each inspection object, and to improve the accuracy of appearance inspection.

  Furthermore, according to the visual inspection apparatus according to the twenty-third aspect, a trigger generation unit for generating a trigger signal by detecting that the inspection object is further conveyed by the conveyance unit and has reached a predetermined position; An imaging timing control unit that is connected to the trigger generation unit and controls the timing of imaging the inspection object with the first imaging element based on the timing of receiving the trigger signal generated by the trigger generation unit; Can do. With the above configuration, an optical image can be captured based on the trigger signal generated by the trigger generation unit, and the imaging timing can be appropriately controlled for a plurality of inspection objects conveyed by the conveyance unit.

  Furthermore, according to the visual inspection apparatus according to the twenty-fourth aspect, the inspection object can be made of a material having translucency. With the above configuration, unlike a metal inspection object, it is possible to obtain an optical image suitable for image processing by adjusting illumination light even for an inspection object that is translucent and difficult to image. .

  Furthermore, according to the visual inspection apparatus according to the twenty-fifth aspect, the inspection object can be a microneedle array.

  Furthermore, according to the visual inspection apparatus according to the twenty-sixth aspect, the microneedle array can be made of a biodegradable resin.

Furthermore, according to the visual inspection apparatus according to the twenty-seventh aspect, a plurality of elongate microneedles having a conical tip are arranged on a plurality of X axes and a Y axis that intersects this with an angle β (0 <β ≦ 90 °). An appearance inspection apparatus for imaging a microneedle array arranged in a plurality of rows on a prescribed XY plane and performing an appearance inspection of an inspection target region including at least a tip portion of each microneedle. A first imaging element for imaging an optical image of the array; a first imaging lens disposed on a first optical axis of the first imaging element for imaging a microneedle array; and a principal point of the first imaging lens A first lens vertical inclination angle θ _L1 formed by a main plane including the inspection target area and an inclination mechanism for adjusting a first imaging inclination angle θ _I1 formed by the light receiving surface of the first image sensor and the inspection target area; The first imaging In order to determine whether there is an abnormality by performing image processing on the illumination unit for irradiating illumination light to the microneedle array imaged by the child and the optical image captured by the first image sensor An image processing unit and a transport unit for transporting the microneedle array onto the line, and the tilt mechanism includes an inspection target region of the microneedle array, a main plane of the first imaging lens, and the first The first lens vertical inclination angle θ _L1 and the first imaging inclination angle θ _I1 are adjusted to different angles so that the light receiving surfaces of one image sensor intersect at one point, and each of the inspection target areas is adjusted according to the Scheinproof principle. An optical image focused at a position can be picked up, and the image processing unit outputs the focused optical image obtained by picking up the microneedle array being transferred by the transfer unit inline. Inspection can be configured to perform.

Furthermore, according to the visual inspection apparatus according to the twenty-eighth aspect, the average interval between the microneedles in the X-axis direction of the plurality of microneedles is L _x , the average interval in the Y-axis direction is L _y , and When the maximum height of the region to be inspected in the height direction is H, and the maximum thickness of each microneedle is W, the first optical axis horizontal inclination angle α _OA1 with the first lens inclination mechanism. There the formula _{-W <m · L x · sinβcosα} OA1 -sinα OA1 (m · L x · cosβ + n · L y) <W ( condition 1)
(M and n are arbitrary integers) when set in a range that satisfies the first lens tilt mechanism, the first lens vertical tilt angle θ _L1 is set by the first image sensor tilt mechanism. The imaging tilt angle θ _I1 is the first optical axis vertical tilt angle θ _OA1

(Condition 2)
It can be set to a range that satisfies.

Furthermore, according to the appearance inspection method according to the twenty-ninth aspect, the three-dimensional protrusion is placed on the XY plane defined by the X axis and the Y axis intersecting with this at an angle β (0 <β ≦ 90 °). An appearance inspection method for performing an appearance inspection by imaging an inspection object region of an inspection object arranged in a plurality of rows, the optical image of the inspection object being captured by the first image sensor, and the captured image A first image pickup device for picking up an optical image of the inspection object with respect to the light receiving surface of the first image pickup device, and a first inspection for the inspection target region. The first imaging element horizontal inclination angle α _I1 (0 <α _I1 <90 °) obtained by inclining the imaging inclination angle θ _I1 and the first optical axis of the first imaging element in a plan view with respect to the column direction of the protrusions. ) For adjusting the first imaging element and the first imaging for imaging the inspection object The first imaging lens disposed on the first optical axis of the element is compared with the main plane including the principal point of the first imaging lens, the first lens vertical inclination angle θ _L1 with respect to the inspection target region, and in plan view A first lens tilt mechanism for adjusting a first lens horizontal tilt angle α _L1 (0 <α _L1 <90 °) in which the first optical axis of the first imaging lens is tilted with respect to the row direction of the projections The average interval between the protrusions in the X-axis direction of the plurality of protrusions is L _x , the average interval in the Y-axis direction is L _y , and the area to be subjected to appearance inspection in the height direction of each protrusion When the maximum height of each projection is H and the maximum thickness of each protrusion is W, the first optical axis horizontal inclination angle α _OA1 is expressed by the following formula: −W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1)
(M and n are arbitrary integers)
And the first lens vertical inclination angle θ _L1 and the first imaging inclination angle θ _I1 are respectively _expressed by the following equations:

(Condition 2)
It can be set to a range that satisfies. As a result, in the appearance inspection of the inspection object in which a plurality of protrusions are regularly arranged on the XY plane, the protrusion on the back side becomes the shadow of the protrusion on the front side when imaged from the side surface (θ = 0). Thus, it becomes possible to avoid the situation where the appearance inspection cannot be performed, and to obtain the optical image on which the entire protrusion is displayed by one imaging, and to perform the appearance inspection.

Furthermore, according to the appearance inspection method according to the thirtieth aspect, the three-dimensional protrusion is placed on the XY plane defined by the X axis and the Y axis that intersects this at an angle β (0 <β ≦ 90 °). An appearance inspection method for performing an appearance inspection by imaging an inspection object region of an inspection object arranged in a plurality of rows, wherein a first imaging element that captures an optical image of the inspection object The first imaging element horizontal inclination in which the first imaging inclination angle θ _I1 with respect to the inspection target region and the first optical axis of the first imaging element in plan view are inclined with respect to the light receiving surface with respect to the column direction of the protrusions The first imaging lens arranged on the first optical axis of the first image sensor for adjusting the angle α _I1 (0 <α _I1 <90 °) with the first image sensor tilt mechanism and imaging the inspection object. With respect to the main plane including the principal point of the first imaging lens, The first lens horizontal inclination angle α _L1 (0 <α _L1 <90 °) in which the oblique angle θ _L1 and the first optical axis of the first imaging lens in the plan view are inclined with respect to the row direction of the protrusions Adjusting the average distance between the protrusions in the X-axis direction by L _x , the average distance in the Y-axis direction by L _y , and the height of each protrusion. When the maximum height of the region to be inspected in the direction is H and the maximum thickness of each protrusion is W, the first optical axis horizontal inclination angle α _OA1 is the next with the first lens tilt mechanism. When the range is set to satisfy the formula −W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1) (m and n are arbitrary integers) The first lens vertical tilt angle θ _L1 is determined by the first lens tilt mechanism, and the first image sensor tilt mechanism is used to determine the first lens vertical tilt angle θ _L1 . One imaging tilt angle θ _I1 and θ _OA1 are

(Condition 2)
It can be set to a range that satisfies. As a result, in the appearance inspection of the inspection object in which a plurality of protrusions are regularly arranged on the XY plane, the protrusion on the back side becomes the shadow of the protrusion on the front side when imaged from the side (θ _OA1 = 0). Thus, it is possible to avoid the situation where the appearance inspection cannot be performed, and to obtain the optical image on which the entire protrusion is displayed by one imaging and to perform the appearance inspection.

  Furthermore, according to the appearance inspection method according to the thirty-first aspect, the first image pickup device that picks up an optical image of the inspection object and the first image pickup device that picks up the inspection object are arranged on the first optical axis. By using an appearance inspection apparatus including the first imaging lens that is formed, and an inclination mechanism that can adjust a relative inclination angle of the first imaging element and the first imaging lens on the first optical axis, This is an appearance inspection method for performing an appearance inspection by imaging an inspection object region of an inspection object formed by arranging three-dimensional projections in a plurality of rows on an XY plane defined by an X axis and a Y axis intersecting with the X axis. Thus, the tilting mechanism has different tilt angles so that the test target region of the test target object, the main plane of the first imaging lens, and the light receiving surface of the first image sensor intersect at one point. Adjust the area of the inspection area according to the Scheinproof principle. In accordance with the principle of Scheinproof, the step of capturing the first optical image of the inspection object focused by the first imaging element, the step of performing a predetermined surface treatment on the inspection object, A step of imaging a second optical image focused on each position of the inspection target region of the inspection target after the surface treatment, and a difference extraction unit for the first optical image and the second optical image And a step of determining whether or not a predetermined surface treatment has been normally performed based on the obtained difference amount.

Furthermore, according to the appearance inspection program according to the thirty-second aspect, the three-dimensional protrusion is placed on the XY plane defined by the X axis and the Y axis intersecting with this at an angle β (0 <β ≦ 90 °). , An appearance inspection program for performing an appearance inspection by imaging an inspection object region of an inspection object arranged in a plurality of rows in the y-axis direction, and taking an optical image of the inspection object with the first image sensor A first image sensor that captures an optical image of an inspection object is received by the first image sensor. The first imaging element inclination angle θ _I1 with respect to the surface to be inspected and the first imaging element horizontal inclination angle obtained by inclining the first optical axis of the first imaging element in a plan view with respect to the column direction of the protrusions First imaging to adjust α _I1 (0 <α _I1 <90 °) An element tilting mechanism and a first imaging lens arranged on the first optical axis of the first imaging element that images the inspection object are inspected with respect to a main plane including a principal point of the first imaging lens. The first lens vertical tilt angle θ _L1 with respect to the target region and the first lens horizontal tilt angle α _L1 (0) in which the first optical axis of the first imaging lens in the plan view is tilted with respect to the column direction of the protrusions. With the first lens tilt mechanism that adjusts <α _L1 <90 °), the average interval between the protrusions in the X-axis direction of the plurality of protrusions is L _x , the average interval in the Y-axis direction is L _y , and each protrusion The first optical axis horizontal inclination angle α _OA1 is _expressed by the following equation −W <, where H is the maximum height of the region to be inspected in the height direction of the object, and W is the maximum thickness of each protrusion. m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1)
(M and n are arbitrary integers) and the first lens vertical inclination angle θ _L1 and the first imaging inclination angle θ _I1 are respectively _expressed by the following equations:

(Condition 2)
It can be set to a range that satisfies. As a result, in the appearance inspection of the inspection object in which a plurality of protrusions are regularly arranged on the XY plane, the protrusion on the back side becomes the shadow of the protrusion on the front side when imaged from the side (θ _OA1 = 0). Thus, it is possible to avoid the situation where the appearance inspection cannot be performed, and to obtain the optical image on which the entire protrusion is displayed by one imaging and to perform the appearance inspection.

Furthermore, according to the visual inspection program according to the thirty-third aspect, the three-dimensional protrusion is placed on the XY plane defined by the X axis and the Y axis intersecting with this at an angle β (0 <β ≦ 90 °). An appearance inspection program for performing an appearance inspection by imaging an inspection object area of an inspection object arranged in a plurality of rows, wherein the first imaging device that captures an optical image of the inspection object The first imaging element in which the first imaging inclination angle θ _I1 with respect to the inspection target region and the first optical axis of the first imaging element in a plan view are inclined with respect to the light receiving surface of the element with respect to the row direction of the protrusions The horizontal inclination angle α _I1 (0 <α _I1 <90 °) is adjusted by the first image sensor tilt mechanism, and the first result arranged on the first optical axis of the first image sensor that images the inspection object. The image lens is directed to the inspection target region with respect to the main plane including the main point of the first imaging lens. First lens vertical tilt angle θ _L1 and the first lens horizontal tilt angle α _L1 (0 <α) in which the first optical axis of the first imaging lens in the plan view is tilted with respect to the column direction of the protrusions. _L1 <90 °) is adjusted by the first lens tilt mechanism in a computer, and the average interval between the protrusions in the X-axis direction of the plurality of protrusions is L _x , and the average interval in the Y-axis direction is L _y In the height direction of each projection, when the maximum height of the region to be subjected to appearance inspection is H and the maximum thickness of each projection is W, the first optical axis is formed by the first lens tilt mechanism. The horizontal inclination angle α _OA1 is expressed by the following formula: −W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1)
(M and n are arbitrary integers) when set in a range that satisfies the first lens tilt mechanism, the first lens vertical tilt angle θ _L1 is set by the first image sensor tilt mechanism. The imaging tilt angle θ _I1 is the following equation for θ _OA1

(Condition 2)
It can be set to a range that satisfies. As a result, in the appearance inspection of the inspection object in which a plurality of protrusions are regularly arranged on the XY plane, the protrusion on the back side becomes the shadow of the protrusion on the front side when imaged from the side (θ _OA1 = 0). Thus, it is possible to avoid the situation where the appearance inspection cannot be performed, and to obtain the optical image on which the entire protrusion is displayed by one imaging and to perform the appearance inspection.

  Furthermore, according to the appearance inspection program according to the thirty-fourth aspect, the first image pickup device that picks up the optical image of the inspection object and the first image pickup device that picks up the inspection object are arranged on the first optical axis. By using an appearance inspection apparatus including the first imaging lens that is formed, and an inclination mechanism that can adjust a relative inclination angle of the first imaging element and the first imaging lens on the first optical axis, An appearance inspection program for performing an appearance inspection by imaging an inspection object region of an inspection object formed by arranging a three-dimensional projection in a plurality of rows on an XY plane defined by an X axis and a Y axis intersecting with the X axis Because

  The tilting mechanism adjusts the tilt angle so that the inspection target area of the inspection target object, the main plane of the first imaging lens, and the light receiving surface of the first imaging element intersect at a single point. The first optical image of the inspection object focused at each position of the inspection object area in accordance with the Scheinproof principle and a predetermined surface treatment for the inspection object In accordance with the principle of Scheimpflug, the function of capturing the second optical image focused on each position of the inspection target region of the inspection target after the surface treatment, the first optical image and A difference extraction unit extracts a difference from the second optical image, and based on the obtained difference amount, a function for determining whether or not a predetermined surface treatment has been normally performed can be realized by a computer.

  Furthermore, the 35th computer-readable recording medium or recorded device stores the above program. CD-ROM, CD-R, CD-RW, flexible disk, magnetic tape, MO, DVD-ROM, DVD-RAM, DVD-R, DVD + R, DVD-RW, DVD + RW, Blu-ray (registered) Trademark), HD DVD (AOD), and other magnetic disks, optical disks, magneto-optical disks, semiconductor memories, and other media that can store programs. The program includes a program distributed in a download manner through a network line such as the Internet, in addition to a program stored and distributed in the recording medium. Further, the recording medium includes a device capable of recording the program, for example, a general purpose or dedicated device in which the program is implemented in a state where the program can be executed in the form of software, firmware, or the like. Furthermore, each process or function included in the program may be executed by program software that can be executed by a computer, or each part of the process or function may be executed by hardware such as a predetermined gate array (FPGA, ASIC), or program software. And a partial hardware module that realizes a part of hardware elements may be mixed.

FIG. 1A is a plan view of an appearance inspection apparatus according to an embodiment of the present invention. FIG. 1B is an enlarged plan view of the microneedle array of FIG. 1A. FIG. 1C is a side view of the appearance inspection apparatus of FIG. 1A. FIG. 1D is an enlarged side view of the microneedle array of FIG. 1A. 2A is a plan view of a matrix-like microneedle array in which microneedles are arranged vertically and horizontally, and FIG. 2B is a plan view of the microneedle array in which adjacent rows are arranged in an offset manner. It is a model side view which shows the focusing range in the case of imaging a test object area | region from diagonally upward according to the principle of Scheinproof. It is a top view of a lens-barrel. FIG. 5 is a side view of the lens barrel of FIG. 4. It is a longitudinal cross-sectional view in the LIII-LIII line of the lens-barrel of FIG. It is a cross-sectional view in the LIV-LIV line of the lens barrel of FIG. It is a horizontal sectional view in the LV-LV line of the lens barrel of FIG. It is sectional drawing which shows a mode that an inclination angle is adjusted with the lens barrel of FIG. 4 according to the principle of Scheinproof. It is a block diagram which shows the external appearance inspection apparatus which concerns on Embodiment 2. FIG. It is a block diagram which shows the external appearance inspection apparatus which concerns on a modification. It is a block diagram which shows the external appearance inspection apparatus which concerns on Embodiment 2. FIG. It is a block diagram which shows an example of the image process by an image process part. It is a conceptual diagram which shows an example of template matching. It is a conceptual diagram which shows an example of graph matching. It is a schematic diagram which shows the example which performs the quality determination of a microneedle array using template matching. It is a top view which shows a mode that a microneedle is imaged from two directions. It is a schematic diagram which shows a mode that the edge image of a test target object is imaged and image processing is performed. It is a schematic side view which shows the focusing range when imaging a test object area | region from diagonally upward with a common optical microscope. It is an image figure which shows the optical image which is not focused in a test object area | region. It is an image figure which shows the edge image produced | generated from the optical image of FIG. It is an image figure which shows the optical image focused on the test | inspection area | region. It is an image figure which shows the edge image produced | generated from the optical image of FIG. It is an image figure which shows the optical image in which the overlap of the microneedle has arisen. It is an image figure which shows the edge image produced | generated from the optical image of FIG. FIG. 26A is a schematic diagram showing an edge image in a state where microneedles overlap each other, and FIG. 26B is a schematic diagram showing an edge image without overlapping. It is a top view which shows an optical image imaging device. It is a side view of the optical imaging device of FIG. It is an image figure which shows the optical image of the microneedle array imaged with the optical image imaging device of FIG. It is a schematic diagram which shows the angle | corner which the perpendicular with respect to the microneedle or the 1st image pick-up element and the 1st optical axis of a 1st imaging lens make when it sees from a rotating shaft direction. It is a schematic diagram which shows the relationship between the lens position at the time of microneedle observation, and a light source position. In FIG. 31, the angle α between the lens and the light source is 60 °, 90 °, 120 °, 150 °, 180 °, and the angle γ between the microneedle plane and the lens is 30 °, 45 °, 60 °. It is an image figure which shows the optical image which imaged the microneedle array made from PGA using the disk-shaped board | substrate when the angle (theta) _LS of 0 is set to 0 degree, 30 degrees, 45 degrees, 60 degrees, and 90 degrees. In FIG. 31, the angle α between the lens and the light source is 60 °, 90 °, 120 °, 150 °, 180 °, and the angle γ between the microneedle plane and the lens is 30 °, 45 °, 60 °. It is an image figure which shows the optical image which imaged the microneedle array made from PGA using the disk-shaped board | substrate when the angle (theta) _LS of 0 is set to 0 degree, 30 degrees, 45 degrees, 60 degrees, and 90 degrees. In FIG. 31, the angle α between the lens and the light source is 60 °, 90 °, 120 °, 150 °, 180 °, and the angle γ between the microneedle plane and the lens is 30 °, 45 °, 60 °. It is an image figure which shows the optical image which imaged the microneedle array made from PGA using the disk-shaped board | substrate when the angle (theta) _LS of 0 is set to 0 degree, 30 degrees, 45 degrees, 60 degrees, and 90 degrees. In FIG. 31, the angle α between the lens and the light source is 60 °, 90 °, 120 °, 150 °, 180 °, and the angle γ between the microneedle plane and the lens is 30 °, 45 °, 60 °. It is an image figure which shows the optical image which imaged the microneedle array made from a silicone using the rectangular-shaped board | substrate when the angle (theta) _LS of 0 was set to 0 degree, 30 degrees, 45 degrees, 60 degrees, and 90 degrees. FIG. 32 is an image view showing an optical image _{picked up} with γ = 50 ° in FIG. 31 and changing α and θ _LS . FIG. 32 is an image view showing an optical image _{picked up} with γ = 50 ° in FIG. 31 and changing α and θ _LS . It is a perspective view which shows the microneedle array which has arrange | positioned the column-shaped microneedle in the checkerboard shape. 39A is a plan view of the microneedle array of FIG. 38, and FIG. 39B is a side view. It is the side view which observed the microneedle array of FIG. 38 from the direction shown by arrow VD1. It is a perspective view which shows the state which moved the viewpoint diagonally upward from FIG. It is the side view which observed the microneedle array of FIG. 38 from the direction shown by arrow VD2. It is a perspective view which shows the state which moved the viewpoint diagonally upward from FIG. It is a perspective view of the microneedle array where the space | interval of microneedles is sparse. It is a side view of the microneedle array of FIG. It is a perspective view which shows the microneedle array which arranged cylindrical microneedle offset. 47A is a plan view of the microneedle array of FIG. 46, and FIG. 47B is a side view. It is a perspective view which shows the microneedle array which has arrange | positioned the column-shaped microneedle along the X-axis and the Y-axis. It is a side view of the microneedle array of FIG. 49 is a plan view showing the positional relationship between the reference needle A and the target needle X in the microneedle array of FIG. 48. FIG. 49 is a plan view showing the positional relationship between the reference needle A and the target needle X in the microneedle array of FIG. 48. FIG. It is the top view which showed the auxiliary line in FIG. It is the top view which showed the auxiliary line in FIG. It is the top view which showed the auxiliary line in FIG. 49 is a plan view showing auxiliary lines for the reference needle A and the target needle X in the microneedle array of FIG. 48. FIG. FIG. 50 is a side view showing auxiliary lines for the reference needle A and the target needle X in the microneedle array of FIG. 49. It is a perspective view showing a microneedle array in which conical microneedles are arranged in a grid pattern. FIG. 58 is a side view of the microneedle array of FIG. 57. It is a side view which shows the part which needs the external appearance test | inspection of a conical microneedle. 6 is a schematic diagram showing the relationship between m and n in Formula 6. It is a graph which shows the range of horizontal inclination | tilt angle (alpha) and elevation angle (theta) _OA1 which can be observed on the conditions which the microneedle of sample 1 does not overlap. It is a graph which shows the range of horizontal inclination | tilt angle (alpha) and elevation angle (theta) _OA1 which can be observed on the conditions which the microneedle of sample 4 does not overlap. It is a graph which shows the range of horizontal inclination | tilt angle (alpha) and elevation angle (theta) _OA1 which can be observed on the conditions which the microneedle of the sample 6 does not overlap. It is a graph which shows the range of horizontal inclination | tilt angle (alpha) and elevation angle (theta) _OA1 which can be observed on the conditions in which the microneedle of the sample 7 does not overlap. It is a top view which shows a test object attitude | position guide mechanism. It is a top view which shows the test subject attitude | position guide mechanism which concerns on another modification. It is a top view which shows the example which provided the inspection object attitude | position guide mechanism in the inspection object side. It is a schematic diagram which shows a mode that the area | region which apply | coated the chemical | medical solution of a microneedle is extracted. It is an image figure which shows the optical image before chemical | medical solution application | coating imaged from the side surface side of the microneedle array. FIG. 70 is an image view showing an optical image of the microneedle array of FIG. 69 after chemical solution application. 71A is an edge image of the microneedle array before the chemical solution is uniformly applied, FIG. 71B is a schematic diagram showing the edge image of the microneedle array after application, and FIG. 71C is an edge image showing the difference between FIG. 71A and FIG. It is. 72A is an edge image of the microneedle array before the chemical solution is applied non-uniformly, FIG. 72B is a schematic diagram showing the edge image of the microneedle array after application, and FIG. 72C is an edge showing the difference between FIG. 72A and FIG. It is an image. FIG. 73A is an edge image of a microneedle array before the chemical solution is applied non-uniformly, FIG. 73B is a schematic diagram showing an edge image of the microneedle array after application, and FIG. 73C is an edge showing the difference between FIG. 73A and FIG. It is an image. It is a model enlarged view which shows the front-end | tip of the microneedle array shape | molded with the chemical | medical solution. It is a perspective view which shows the microneedle array which provided the symbol. 76A is a plan view of the microneedle array, and FIG. 76B is an enlarged cross-sectional view of the microneedles. It is an external appearance perspective view of a microneedle array. It is an enlarged photograph of a microneedle array. It is an expansion perspective view which shows the state in which bending has generate | occur | produced in the front-end | tip part of the microneedle of a microneedle array. FIG. 78 is an enlarged perspective view of the microneedle array of FIG. 77.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment described below is an example for embodying the technical idea of the present invention, and the present invention is not limited to the following. Moreover, this specification does not specify the member shown by the claim as the member of embodiment. In particular, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in the embodiments are not intended to limit the scope of the present invention only to specific examples unless otherwise specifically described. Only. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing. In addition, the contents described in some examples and embodiments may be used in other examples and embodiments.

  The connection between the visual inspection apparatus used in the embodiments of the present invention and computers, printers, external storage devices and other peripheral devices for operation, control, display, and other processing connected thereto is, for example, IEEE 1394, RS-232x, RS-422, RS-423, RS-485, serial connection such as USB, parallel connection, or electrical or magnetic via a network such as 10BASE-T, 100BASE-TX, 1000BASE-T, Communication is performed by optical connection. The connection is not limited to a physical connection using a wire, but may be a wireless connection using a wireless LAN such as IEEE802.1x, Bluetooth (registered trademark), other radio waves such as NFC, infrared rays, optical communication, or the like. Furthermore, a memory card, a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like can be used as a recording medium for exchanging data or storing settings. In this specification, the appearance inspection apparatus is used to include not only an appearance inspection apparatus body but also an appearance inspection system in which peripheral devices such as a computer and an external storage device are combined.

Further, in this specification, the appearance inspection apparatus is not limited to the system itself that performs the appearance inspection, and the apparatus and method that perform input / output, display, calculation, communication, and other processes related to imaging in hardware. An apparatus and method for realizing processing by software are also included in the scope of the present invention. For example, a general-purpose circuit or computer that incorporates software, programs, plug-ins, objects, libraries, applets, compilers, modules, macros that operate on specific programs, etc., and enables imaging itself or related processing The system also corresponds to the appearance inspection apparatus of the present invention. In this specification, the computer includes a workstation, a terminal, and other electronic devices in addition to a general-purpose or dedicated electronic computer. Further, in the present specification, the program is not limited to a program that is used alone, an aspect that functions as a part of a specific computer program, software, service, etc., an aspect that is called and functions when necessary, an environment such as an OS, etc. It can also be used as a mode provided as a service, a mode that operates resident in the environment, a mode that operates in the background, and other support programs.
(Embodiment 1)

  1A to 1D show an appearance inspection apparatus 100 according to an embodiment of the present invention. Here, an example is described in which an appearance inspection is performed on a three-dimensional inspection object conveyed on the production line. Specifically, the inspection object is a microneedle array MNA as shown in FIGS. 2A and 2B (details will be described later). In the microneedle array MNA, a large number of microneedles MN are arranged on the upper surface of the microneedle array MNA so as to protrude.

  The appearance inspection apparatus 100 illustrated in FIGS. 1A to 1D includes an imaging unit 1, an illumination unit 50, a control unit 60, a transport unit 6, a trigger generation unit 7, a display unit 8, and an operation unit 9. ing. The imaging unit 1 includes a first imaging unit 10. The first imaging unit 10 includes a first imaging element 11 that captures an optical image of the microneedle array MNA, and a first imaging lens 12 that is disposed on the first optical axis OA1 of the first imaging element 11. The first image sensor 11 is composed of a light receiving element and a light receiving sensor, and a CCD, a CMOS, or the like is used. The first imaging lens 12 is preferably a double-sided telecentric lens. The optical image captured by the first image sensor 11 is sent to the control unit 60 and subjected to image processing. Thereby, the appearance inspection of the inspection object is performed. The appearance inspection is used for the purpose of inspecting the entire amount of a product at the time of manufacture or before shipment, or for inspection. In particular, foods, medicines, medical devices, and the like are required to take strict measures against foreign matters. For such an inspection purpose, an optical image of the product is taken, and an abnormal shape or adhesion of foreign matter is confirmed by image processing.

  In the present invention, the appearance inspection is not limited to the case of determining whether the shape is abnormal or not, and can be applied to other inspections. For example, in the process of coating the surface, it is possible to determine whether or not an appropriate coating is performed from the optical image after coating. Alternatively, it is also possible to take an optical image before and after the process of coating the surface, estimate the coated amount from the difference, and determine whether or not an appropriate amount of application has been performed. In this case, if the film thickness is almost uniform, the coating amount is calculated from the average value of the film thickness. If the film thickness is not uniform, the cross-sectional area is calculated from the difference between before and after the coating. The application amount may be calculated from the area.

  Furthermore, based on the film thickness and cross-sectional area calculated from the difference of the optical image, not only a method for separately measuring or calculating the coating amount based on the specified diameter, height, etc., but also a direct three-dimensional shape The volume of can also be calculated. For example, the three-dimensional shape of the inspection object can be acquired by a triangulation method using structured illumination (pattern shift method such as phase shift method, spatial coding method, and multi-slit method) as illumination light. . By determining the volume, the center of gravity, the inclination, and the like of the three-dimensional image obtained in this way, the shape and volume of the inspection object can be grasped more accurately and the quality can be determined.

  As described above, the appearance inspection includes not only the quality determination of the shape of the inspection object but also the suitability determination of the surface treatment based on the difference and the estimation of the coating amount. Whether surface treatment is appropriate or not is determined by, for example, whether the drug is applied, plated, or coated uniformly, partially missing, uneven, or partially thickened. Is achieved with a desired accuracy, and other gloss levels. Process management such as calculation of the coating amount is also included in the appearance inspection in this specification. In particular, the calculation of the coating amount is a destructive inspection in which, in the conventional method, the object once applied is sampled and inspected, and the applied coating material is separated by washing or the like and then weighed. According to the above, it is possible to calculate the coating amount without destroying the entire amount of the inspection object. Since it is an appearance inspection apparatus using an optical image, it can also be called an optical inspection apparatus.

  The control unit 60 is connected to the imaging unit 1, the illumination unit 50, the trigger generation unit 7, and the display unit 8 and controls these operations. Specifically, an imaging timing control unit 61 that controls the timing at which the inspection object is imaged by the first imaging element is provided. The imaging timing control unit 61 receives the trigger signal generated by the trigger generation unit 7 and defines the imaging timing of the first imaging unit. The imaging timing control unit 61 can also define the amount of illumination light and the flash timing. In addition, when the light quantity and lighting timing of illumination light are not controlled, that is, when the illumination light with a constant light quantity is always turned on during operation, the control of the illumination unit 50 is unnecessary. Further, there is no need to connect the control unit and the illumination unit.

  Further, the control unit 60 includes an image processing unit 62. The control unit 60 receives the optical image captured by the imaging unit, and performs image processing by the image processing unit 62 to perform an appearance inspection. For example, the image processing unit 62 includes an edge image generation unit 63 and a difference extraction unit 64. As described above, the appearance inspection is performed by determining pass / fail according to a certain standard based on the edge image and the difference between the images. As such a control unit 60, a general-purpose computer, a specially designed MPU, ASIC, or the like can be used.

  The operation unit 9 is a member that is connected to the control unit 60 and receives various user operations and performs various settings for the control unit 60. For example, a user instruction is accepted to set a range for performing image processing, items to be calculated, a range determined to be non-defective for the obtained value, and the like. Such an operation unit 9 can be constituted by a keyboard, a console, a pointing device, or the like. As the pointing device, a mouse or a joystick can be used.

  The display unit 8 is a member for displaying an optical image captured by the imaging unit 3, an edge image obtained from the optical image, a difference image, and the like. The display unit 8 is configured by, for example, an LCD panel or an organic EL panel. Furthermore, by using a touch panel for the display unit, it can also be used as an operation unit.

The conveyance unit 6 is a member for conveying the inspection object on the line, and a belt conveyor, a roller conveyor, or the like can be used.
(Trigger generation unit 7)

  The trigger generation unit 7 is a member for generating a trigger signal and transmitting it to the control unit 60. The trigger generation unit 7 is connected to the control unit 60. When the trigger generation unit 7 detects that the inspection object has been transported by the transport unit 6 and has reached a predetermined position, a trigger signal is generated and sent to the control unit 60. In response to this, the control unit 60 causes the imaging unit to image the inspection object. As the trigger generation unit, for example, a photoelectric sensor, a micro switch, or the like that varies the level of a detection signal such as reflected light or a sound wave depending on the presence or absence of an object to be transported can be used.

  As described above, the trigger generation unit 7 defines the imaging timing of the imaging unit. The imaging timing may be configured such that the imaging unit images at the timing when the trigger generation unit 7 issues the trigger signal, or the imaging is performed at a timing after a predetermined time (for example, after 1 second) after the trigger signal is issued. You may comprise. These are set according to the position where the trigger generation unit is arranged, the transport distance of the inspection object, the transport speed, and the like. When preparing a plurality of imaging units, a trigger generation unit may be provided for each imaging unit, or a time difference from the common trigger generation unit to the imaging position is set according to a trigger signal. It can also be configured.

In this manner, an optical image can be captured based on the trigger signal generated by the trigger generation unit 7, and the imaging timing can be appropriately controlled for a plurality of inspection objects conveyed by the conveyance unit 6. .
(Inclination mechanism 3)

Further, an inclination mechanism 3 that can incline at least one of the main plane including the main point of the first imaging lens 12 and the light receiving surface of the first imaging element 11 is provided. The tilt mechanism 3 includes, for example, a first lens tilt mechanism 32 that tilts the first imaging lens 12 and a first image sensor tilt mechanism 31 that tilts the first image sensor 11. The first lens tilt mechanism 32 has a first lens vertical tilt angle θ _L1 with respect to the inspection target region with respect to the main plane including the main point of the first imaging lens 12 and the first lens tilting mechanism 12 in plan view. The first lens horizontal inclination angle α _{L1 in} which the optical axis OA1 is inclined with respect to the row direction of the protrusions is adjustable. In addition, the first image sensor tilt mechanism 31 has a first image tilt angle θ _I1 with respect to the inspection target region and a first optical axis OA1 of the first image sensor 11 in plan view with respect to the light receiving surface of the first image sensor 11. The first image sensor horizontal tilt angle α _I1 tilted with respect to the row direction of the protrusions can be adjusted. As the first image sensor tilt mechanism 31 and the first lens tilt mechanism 32, an existing mechanism capable of adjusting the angle, such as a pivot-type fixture, a ball joint, and a bellows, can be used as appropriate.

As shown in the schematic side view of FIG. 3, these tilting mechanisms 3 include an inspection target region MNP of the microneedle array MNA, a main plane of the first imaging lens 12, and a light receiving surface of the first imaging element 11. Adjust to intersect at one point. Accordingly, it is possible to take an optical image focused at each position of the inspection target area according to the principle of Scheinproof. In FIG. 3, the range in which focus can be achieved is shown by shading as a focusing area FA1. As a result, a focused image formed by focusing on the light receiving surface of the first image sensor 11 is obtained. The image processing unit 62 of the control unit 60 performs image processing on the focused image, and can accurately detect defects such as breakage or chipping of the microneedle array MNA. As tilt mechanism in this example, the first image pickup device 11 the angle of inclination of the first imaging lenses 12, as shown in the side view of FIG. 1C, the inclination angle of the optical axis OA1 with respect to the horizontal plane (XY plane) theta _OA1 Tilt with. At the same time, the first lens vertical inclination angle θ _L1 and the imaging inclination angle θ _{I1 with} respect to the inspection target region can be adjusted as shown in FIG. 3 as angles based on the light receiving surface and the imaging surface instead of the optical axis.

The angle θ formed by the imaging surface of the imaging lens and the Scheinproof focusing surface is preferably 5 ° to 45 °, and more preferably 15 ° to 30 °. When the angle is 45 ° or more, the shape is looked down from above the microneedle, so that it is difficult to detect the minute bending of the microneedle. For example, the first lens vertical inclination angle θ _{L1 is set} to 26 ° to 60 °, and the first imaging inclination angle θ _I1 is set to 48 ° to 70 °.
(Tube 33)

The first imaging lens 12 and the second imaging element 11 are preferably housed in a common housing. Further, a tilting mechanism can be incorporated in the housing. As an example, a lens barrel 33 that houses the second image sensor 11 and the first imaging lens 12 is shown in FIGS. In these drawings, FIG. 4 is a plan view of the lens barrel 33, FIG. 5 is a side view of the lens barrel 33, FIG. 6 is a longitudinal sectional view taken along line LIII-LIII in FIG. FIG. 8 is a horizontal sectional view taken along line LV-LV in FIG. In the lens barrel 33 formed in a hollow cylindrical shape, the first imaging lens and the first imaging element are disposed on a common first optical axis OA1. Further, as shown in FIG. 6, the first imaging lens is fixed in the lens barrel 33, and a first image sensor tilt mechanism is provided to tilt the first image sensor relative to the first optical axis OA1. Yes. The first image sensor tilt mechanism supports the first image sensor so as to be rotatable about a rotation axis orthogonal to the first optical axis OA1. As shown in the cross-sectional views of FIGS. 7 and 8, the rotation axis is fixed to the image sensor tilt knob 34 provided on the side surface of the lens barrel 33, and the first image pickup is performed by rotating the image sensor tilt knob 34. The first imaging tilt angle of the element can be adjusted, and a first imaging element tilting mechanism is realized.
(Lens barrel tilting mechanism 35)

On the other hand, in order to adjust the first lens vertical tilt angle of the first imaging lens, the function of the first lens tilt mechanism by adjusting the tilt angle of the lens barrel 33 itself as shown in the sectional view of FIG. Realized. Therefore, the lens barrel tilting mechanism 35 that supports the lens barrel 33 and can be held at a desired angle corresponds to the first lens tilting mechanism. Then, with the imaging element tilt knob 34 and the lens barrel tilt mechanism 35, the first imaging tilt angle θ _I1 and the first lens are set so that the inspection target range of the inspection target becomes the in-focus position according to the Scheinproof principle. Adjust the vertical tilt angle θ _L1 . That is, as shown in FIG. 9, on the extension line of the plane of the inspection target range, the image sensor tilt knob 34 is set so that the plane extension line of the first imaging lens and the plane extension line of the first image sensor intersect. Then, the lens barrel tilting mechanism 35 is adjusted. In other words, the intersection of the first optical axis OA1 and the light receiving surface of the first image sensor is always on the rotation axis of the first image sensor. Here, since an imaging unit including a conventional tilt mechanism has a rotation center for angle adjustment in the mount portion of the tiltable lens, it is necessary to provide a shift mechanism. In addition, since the radius of rotation becomes large, there is a problem that the first image sensor comes out of the image circle. On the other hand, according to the present embodiment, the first imaging lens is fixed in the lens barrel 33, and the rotation axis of the first image pickup device 11 is arranged on the first optical axis OA1. The problem is avoided and there is no need to provide a shift mechanism.

In addition, the tilting mechanism uses the above-described lens barrel, so that the first optical axis horizontal tilt angle α _OA1 , which is an angle formed by the optical axis of the first imaging lens and the first imaging element, and the column direction of the microneedle is shared. It is said. That is, the first lens horizontal inclination angle α _L1 that is an angle formed by the first optical axis of the first imaging lens and the row direction of the microneedles in plan view, the first optical axis of the first image sensor, and the microneedles The first image sensor horizontal tilt angle α _I1 , which is an angle formed by the column direction, is made to coincide with the first optical axis horizontal tilt angle α _OA1 . However, the tilt mechanism is not limited to this configuration, and for example, the first lens horizontal tilt angle α _L1 and the first image sensor horizontal tilt angle α _I1 may be individually adjustable. That is, as a tilting mechanism, the first lens horizontal tilt angle in which the first optical axis OA1 of the first imaging lens is tilted with respect to the main plane of the first imaging lens in a plan view with respect to the column direction of the protrusions. With respect to the first lens tilt mechanism capable of adjusting α _L1 (0 <α _L1 <90 °) and the light receiving surface of the first image sensor, the first optical axis OA1 of the first image sensor in plan view is A first image sensor tilt mechanism that can adjust the first image sensor horizontal tilt angle α _I1 (0 <α _I1 <90 °) tilted with respect to the column direction can also be provided individually. Then, with the first lens tilt mechanism and the first image sensor tilt mechanism, the first lens horizontal tilt angle α _L1 and the first image sensor horizontal tilt angle α _I1 are respectively set to the first optical axis horizontal tilt angle α _OA1 described above. Adjust so that.
(Embodiment 2)
(Second imaging unit 20)

  A plurality of imaging units may be provided. By imaging the same inspection object from different angles with a plurality of imaging units, it is possible to confirm an abnormality that cannot be discriminated from only one surface from another viewpoint, and the reliability of the appearance inspection is improved. As such an example, an image inspection apparatus according to the second embodiment is shown in FIG. In the example shown in this figure, two imaging units, a first imaging unit 10 and a second imaging unit 20, are provided as imaging units.

The second imaging unit 20 includes a second imaging element 21 and a second imaging lens 22 disposed on the first optical axis OA2 of the second imaging element 21. A second optical axis tilt mechanism 4 that adjusts the installation angle of the second imaging element 21 and the second imaging lens 22 is provided. The second optical axis tilting mechanism 4 has a second lens vertical tilt angle θ _{L2 with} respect to the inspection target region and a second plane with respect to the main plane including the main point of the second imaging lens 22 and the light receiving surface of the second imaging element 21, respectively. The imaging inclination angle θ _I2 can be adjusted, and the second optical axis horizontal inclination angle α _{OA2 obtained} by inclining the second optical axis OA2 of the second imaging element 21 with respect to the column direction of the protrusions in a plan view can be adjusted. It is said. For this reason, the second optical axis tilting mechanism 4 includes the second imaging tilt angle θ _{I2 of} the second image sensor 21, the second image sensor horizontal tilt angle α _I2 (in the example of FIG. 10, the second optical axis horizontal tilt angle α _OA2 and Are equal to each other, and the second lens vertical tilt angle θ _L2 and the second lens horizontal tilt angle α _{L2 of} the second imaging lens 22 (second light in the example of FIG. 10). A second lens tilt mechanism 42 for adjusting the horizontal axis tilt angle _αOA2 ). The second image sensor tilt mechanism 41 and the second lens tilt mechanism 42 can use the same members as the first image sensor tilt mechanism 31 and the first lens tilt mechanism 32 described above. Similarly, using the second optical axis tilt mechanism 4 as described above, similarly to the first optical axis tilt mechanism configured by the first image sensor tilt mechanism 31 and the first lens tilt mechanism 32 shown in FIG. The second optical axis vertical tilt angle θ _OA2 (0 <θ _OA2 <90 °), which is the angle formed by the second optical axis OA2 in the side view with the plane of the inspection target region, or the second optical axis OA2, not the second connection It is possible to adjust the second lens vertical inclination angle θ _L2 and the second imaging inclination angle θ _I2 that are angles formed by the imaging surface of the image lens 22 and the imaging surface of the second imaging element 21 with the plane of the inspection target region. Thus, since the second lens tilt mechanism 42 is the same as the first image sensor tilt mechanism 31, detailed description including illustration is omitted, and a first optical axis horizontal tilt angle α _OA1 , which will be described below, The description of the axis vertical tilt angle θ _OA1 , the first lens vertical tilt angle θ _L1 , the first imaging tilt angle θ _I1, etc., including the formulas, is all the second optical axis horizontal tilt angle α _OA2 , the second optical axis vertical tilt angle It can be applied to θ _OA2 , the second lens vertical tilt angle θ _L2 , and the second imaging tilt angle θ _I2 . Similarly, with respect to the third imaging unit 30 described later, the third optical axis horizontal inclination angle α _OA3, which is an angle formed by the line conveyance direction and the third optical axis OA3, is the same as the first imaging unit 10 and the like. Since these members and arrangements can be adopted, detailed description will be omitted.

In particular, in an imaging lens using the Scheinproof principle, it is desirable to install a plurality of imaging lenses while changing the horizontal inclination angle α _OAx with respect to the transport direction. This is because, when the deformation of the microneedle is present in the optical axis direction of the image sensor (for example, a foreign object protruding in the optical axis direction), the appearance inspection is difficult. Therefore, it is preferable to perform observation using at least two imaging lenses having different angles. The horizontal inclination angle α _OAx is desirably set to an angle that does not overlap with the microneedles located on the back surface when the microneedles are observed. This is because the appearance inspection of the overlapped portion is hindered when it overlaps the back microneedle. Details of the conditions under which the microneedles do not overlap will be described later.

The horizontal inclination angle α _{OA1 + OA2} (= α _OA1 + α _OA2 ) formed by the first optical axis OA1 of the first imaging lens 12 and the second optical axis OA2 of the second imaging lens 22 is 45 ° to 135 °. Desirably, particularly 90 ° is desirable. In particular, in an application for inspecting the inclination angle of the projection, it is possible to determine whether it is inclined in any direction by observing from two directions substantially orthogonal to each other.

Further, the second imaging unit 20 may be provided at a position symmetrical with respect to the traveling direction of the inspection object in plan view. In this case, the second optical axis tilting mechanism 4 sets the second optical axis horizontal tilt angle α _OA2 of the second imaging unit 20 to the first optical axis horizontal tilt angle α _OA1 of the imaging unit with respect to the column direction of the protrusions. The absolute values are made equal and the signs of the positive and negative signs are reversed so as to be the target (α _OA2 = −α _OA1 ). By disposing the second image sensor 21 on the side opposite to the first image sensor 11 in this way, an optical image of a surface that cannot be captured by the first image sensor 11 can be acquired, and a more reliable appearance inspection is realized. Also, with this method, the second optical axis horizontal inclination angle α _OA2 can be easily set with respect to the first optical axis horizontal inclination angle α _OA1 set in consideration of the overlapping of protrusions described later. .

Note that the number of imaging units is not limited to two, and may be three or more. By increasing the number of image pickup units, it is possible to perform an appearance inspection from various aspects and reduce inspection errors. In particular, by arranging an additional imaging unit on the back side with the inspection object interposed therebetween, it is possible to perform an appearance inspection on the back side that cannot be observed from the front side. For example, the 3rd imaging part 30 is arrange | positioned with respect to the 1st imaging part on the back side of a test object like the modification shown in FIG. Further, an angle formed by the third optical axis OA3 of the third imaging unit 30 in the plan view and the line conveyance direction is set as a third optical axis horizontal inclination angle α _OA3 , and an appropriate α is applied by applying α such as Equation 3 described later. The angle range can be specified. In particular, it is possible to check not only the inclination angle of the protrusions but also the surface condition, for example, whether the drug is uniformly applied or whether there is a part that is not partially applied.

  In this example, the imaging position of the third imaging unit 30 is arranged upstream of the first imaging unit 10 in the line conveyance direction, but the third imaging unit 30 is arranged downstream of the imaging position of the first imaging unit. An imaging unit may be arranged. Moreover, you may provide the illumination part mentioned later for every imaging part.

On the other hand, by processing many optical images, it is necessary to increase the processing speed. In particular, there is a limit in relation to the processing speed required when performing inline processing on the transport line. Therefore, the number of imaging units is determined according to the required accuracy and processing capability of the image inspection.
(Lighting unit 50)

  The illumination unit 50 is a member for irradiating illumination light to the microneedle array MNA. The illumination unit 50 can use a semiconductor light emitting element such as an LED, a halogen lamp, a fluorescent lamp, an incandescent lamp, or the like as a light source. In particular, a semiconductor light-emitting element is preferable because of its excellent switching response, low power consumption and long life. The illumination light is appropriately selected according to the color, translucency, and the like of the inspection object in addition to white light. Further, the type of illumination is appropriately selected according to the material of the inspection object such as epi-illumination or transmission illumination, for example, when it has translucency such as resin, or reflective material such as metal. Telecentric illumination that emits telecentric light as illumination light can also be used. Furthermore, you may incorporate an illumination part in a lens-barrel.

When the inspection object is made of a material that is regularly reflected such as metal, it is easy to capture a relatively clear optical image. On the other hand, when the object to be inspected is a material that diffusely reflects, such as a translucent resin, halation is likely to occur, making it difficult to capture a clear optical image. In particular, a resin microneedle array, combined with its three-dimensional shape, is not easy to focus on and take a clear optical image with little halation. Therefore, the illumination unit 50 is installed so that an appropriate optical image with less halation and blackout can be obtained by adjusting the angle and amount of illumination light.
(Lighting tilt mechanism 55)

In addition, the appearance inspection apparatus 100 includes an illumination tilt mechanism 55 that adjusts the angle of the illumination light LS of the illumination unit 50. As shown in FIGS. 1A and 1B, the illumination tilt mechanism 55 includes an illumination horizontal tilt angle α _{LS in} which the traveling direction of the illumination light of the illumination unit 50 is tilted with respect to the direction of the first optical axis OA1 in plan view, As shown in FIG. 1C, the illumination vertical inclination angle θ _LS in the vertical plane of the illumination light of the illumination unit 50 can be adjusted. The illumination vertical tilt angle θ _LS is set to, for example, 30 ° or less by the illumination tilt mechanism 55. Further, the illumination horizontal inclination angle α _LS is set to 0 ° to 90 °.

  The first optical axis tilt mechanism, the second optical axis tilt mechanism, and the illumination tilt mechanism described above are members for adjusting the tilt angle of the imaging unit and the illumination unit when the appearance inspection apparatus is installed. It is possible to use a jig, an adhesive, or the like that adjusts and fixes the angle. Alternatively, the controller 60 may be configured to automatically adjust the angle (details will be described later).

  In the example of FIG. 1A, the illumination of the first imaging unit 10 and the second imaging unit 20 is shared by one illumination unit 50. However, the present invention does not limit the number of illumination units to one, and a plurality of illumination units can be provided. For example, dedicated illumination units may be provided for the first imaging unit and the second imaging unit, respectively. For example, in the modification shown in FIG. 11, the first illumination unit 51, the second illumination unit 52, and the third illumination unit 53 are respectively used for the first imaging unit, the second imaging unit, and the third imaging unit. Each is installed. In addition to the configuration in which only one illumination unit is provided for each imaging unit, a plurality of illumination units may be provided for one imaging unit. For example, when illuminating light is irradiated from both sides of the inspection object, illumination units can be provided on the left and right sides of the imaging unit.

  Note that the timing at which the first imaging unit 10 and the second imaging unit 20 perform imaging may be simultaneous, or may be performed at individual timings. In particular, as shown in FIG. 12, in the configuration in which the first illumination unit 51 and the second illumination unit 52 are individually provided as illumination units for the first imaging unit 10 and the second imaging unit 20, imaging is performed at different timings. By doing so, the influence of the other illumination light can be reduced. That is, when the first imaging unit 10 captures an image, the first illumination unit 51 is turned on while the second illumination unit 52 is turned off or the amount of light is reduced. While the illumination unit 52 is turned on, the first imaging illumination unit 51 is turned off or the amount of light is reduced. Thereby, with respect to each illumination part installed so that illumination light may be input to the inspection object from different angles, the other illumination light is cut so that only the necessary illumination light is irradiated to obtain an intended optical image. It becomes possible. Such illumination light control can be performed by the illumination light control unit 67.

  Such imaging timing control is performed by the control unit 60 connected to the imaging unit. The control unit 60 controls the imaging timing of each imaging unit in accordance with a trigger signal from the trigger generation unit 7 that detects that the inspection object conveyed on the conveyance unit 6 has been conveyed to a predetermined position as described above. A timing control unit 61 is provided. Moreover, the trigger production | generation part 7 is arrange | positioned along the conveyance part 6 so that the position of a test target object may be detected.

In this way, the optical images of the same inspection object captured by the first imaging unit 10 and the second imaging unit 20 are respectively sent to the control unit 60 and subjected to image processing.
(Control unit 60)

The control unit 60 includes an image processing unit 62 that performs image processing on the optical image captured by the imaging unit. The image processing unit 62 determines the presence / absence of an abnormality in the inspection object through image processing. For example, the image processing unit 62 performs edge extraction on the optical image, and determines whether the image is normal or abnormal after comparison with a reference form registered in advance. Alternatively, a pattern registered in advance is extracted from the object to be inspected, and a reference item (for example, the height, thickness, and tip angle of the protrusion) set for the pattern is inspected. May be.
(Pattern recognition)

  An example of image processing by the image processing unit 62 will be described based on the block diagram of FIG. The image processing unit 62 shown in this figure receives the optical image captured by the imaging unit, outputs the result of pattern recognition, and sends it to the inspection result output unit 65. The image processing unit 62 includes a preprocessing unit 62a, a feature amount extraction unit 62b, a feature compression unit 62c, and a classifier 62d.

  The optical image captured by the imaging unit is first preprocessed by the preprocessing unit 62a. In the pre-processing unit 62a, noise removal, image size normalization, and the like are performed.

  Next, feature quantity extraction is performed by the feature quantity extraction unit 62b. Here, a feature amount necessary for identification is calculated. The calculated feature quantity is vectorized and treated as a feature vector. As the feature vector, for example, a color histogram, edge detection, directional feature, wavelet coefficient, or the like is used for an optical image.

  The obtained feature vector is compressed by the feature compression unit 62c so as to obtain a high-dimensional to low-dimensional feature vector. Further, the compressed feature vector is classified into a predetermined class in the classifier 62d. Class information can also be output. At this time, the classifier 62d may be learned in order to improve the classification performance of the classifier 62d. For example, a classifier 62d that performs appropriate classification by learning is constructed by using a feature vector group with correct class information prepared for learning.

Note that, in this specification, an example is described in which an optical image obtained by a CCD or the like that is an optical imaging device is used as an image to be subjected to image processing. For example, the image processing can be performed on a height image in which height information is replaced with a luminance value.
(Feature extraction)

  A feature point is a basic element as a feature in an optical image. The feature point is a point where brightness and chromaticity can be distinguished from surrounding pixels and the position can be accurately determined. By extracting the feature points in the optical image, it becomes easy to associate a plurality of images, so that it can be used for various image processing.

Hereinafter, a method for extracting feature points will be described. In order to accurately determine the position in the optical image, the feature amount extraction unit 62b selects, as the feature point, a portion having a large change in luminance or color, for example, a portion that looks like a corner in the image.
(Classification of image matching methods)

  The target pattern is searched by collating the features extracted from the optical image. As such a collation method, template matching or graph matching can be used.

In the template matching, as shown in FIG. 14, a portion similar to the image T (size M _T × N _T ) is detected in the input image I (size M _I × N _I ). Specifically, the similarity S (or dissimilarity D) of the overlapping regions is calculated while shifting T on I.

  On the other hand, in graph matching, as shown in FIG. 15, a graph having a feature obtained from an image as a vertex and a relationship between features as sides is created, and matching between the graphs is performed by matching the graphs.

  Here, an example of performing an appearance inspection for pass / fail determination by analyzing an optical image of a microneedle array using template matching and comparing it with a non-defective shape will be described with reference to FIG. As shown in this figure, the central axis CAX of each microneedle is calculated by image processing. Then, it is determined whether or not the obtained center axis CAX is a straight line. For example, as shown at the right end of FIG. 16, when the center axis CAX is bent, it is determined as defective. Further, with respect to the central axis CAX of each microneedle, an inclination angle with respect to the substrate SUB is detected to determine whether or not it is within a predetermined range. Further, it is determined whether or not the central axis CAX passes through the apex of the microneedle. Alternatively, a non-defective microneedle may be registered as a reference image in advance, and the degree of similarity may be determined by comparing the captured microneedle with the reference image.

  Such determination processing is preferably performed by combining a plurality. Further, the selection is made according to the processing speed and the line conveyance speed so that the processing can be performed within the time allowed for the image processing.

  In this example, an example is described in which an inspection process is performed by capturing an image of an inspection target conveyed on a production line with an imaging unit during movement. The image processing unit 62 performs inline processing on the inspection object conveyed on the line. Thus, by performing image processing on an optical image focused by one imaging, a highly reliable appearance inspection can be realized even in a production line or the like that requires high-speed processing. However, depending on the speed of the inspection process or the like, the inspection target may be temporarily stopped at the time of imaging to perform imaging and inspection processing. Or it is good also as a structure which performs image processing offline with respect to the imaged image.

In the above example, the first imaging unit 10 and the illumination unit 50 are installed around the transport line, and the work of adjusting the posture and angle of the first imaging unit tilting mechanism 31 and the first lens tilting mechanism 32 is performed manually. The example performed by work was explained. However, an electric drive mechanism is provided in the first image sensor tilt mechanism or the first lens tilt mechanism, and a mechanism for automatically tilting to the input angle is provided, or the tilt angle is set by a control signal from the control unit. You may comprise so that it can control. In this case, the first image sensor tilt mechanism or the first lens tilt mechanism is electrically connected to the control unit, and the first image tilt of the first image sensor tilt mechanism or the first lens tilt mechanism is controlled by a control signal from the control unit. The angle θ _I1 and the first lens vertical tilt angle θ _L1 can be controlled. The user inputs information such as the first imaging tilt angle θ _I1 and the first lens vertical tilt angle θ _L1 to the control unit, and in response to this input, the control unit sets the first image sensor tilt mechanism and the first lens. A control signal for adjusting the angle values of the first imaging tilt angle θ _I1 and the first lens vertical tilt angle θ _L1 is sent to the tilt mechanism, and these are adjusted to the intended angles. Further, such control by the user can be performed from a dedicated console connected to the control unit, or from a computer connected to the control unit. Alternatively, the control unit itself may be configured by a computer. In this case, a visual inspection program installed in the computer is operated to input and control a necessary angle location.
(Microneedle array)

  Here, a case where an appearance inspection of a microneedle array is performed as an inspection object will be described. The microneedle array is a percutaneous absorption enhancing device that administers a drug by puncturing a microneedle (microneedle) in the epidermis layer of the skin. Microneedle arrays have the advantages of minimally invasiveness, less pain and fear, and less risk of needle stick accidents. Moreover, it is epidermal administration, and efficient immunity acquisition is realized by utilizing skin immunity. Furthermore, since the stratum corneum is punctured, an advantage of allowing transdermal administration of a drug that has been difficult to percutaneously absorb is obtained.

  An example of the microneedle array MNA is shown in the perspective view of FIG. In this example, a large number of microneedles MN are uniformly arranged on the XY plane on the upper surface of a circular flat substrate SUB. As the shape of the substrate SUB, a rectangular shape, a polygonal shape, or the like can be used in addition to a circular shape. As the arrangement pattern of the microneedles MN, a matrix-like or grid-like microneedle array MNAG in which the microneedles are arranged vertically and horizontally as shown in FIG. 2A, or an offset between adjacent rows as shown in FIG. 2B. The arranged microneedle array MNAO can be mentioned.

Each microneedle is a microneedle having a height of 50 to 800 μm, for example, and several tens to several hundreds of such microneedles are regularly arranged on a substrate per 1 cm ² . Examples of the material constituting the microneedle include resin and metal. In the case of resin, a material having a certain degree of translucency may be used. Preferably, a biodegradable resin is used. As the biodegradable resin, known biodegradable resins such as polylactic acid resin (PLA) and polyglycolic acid resin (PGA) are used.

Such a microneedle array is required to have a quality close to that of an injection. That is, it is not allowed to include microneedles that are broken during the manufacturing process, microneedles with foreign matters, and the like, and it is required to inspect all appearances. For example, the appearance of the microneedle is imaged to obtain an optical image, the optical image is subjected to appearance inspection by image processing or the like, and each microneedle is inspected for any abnormality. Examples of abnormalities include microneedle breakage, chipping, bending, poor molding of the tip due to insufficient filling of the resin, generation of bubbles in the resin, and the like.
(Appearance inspection of microneedle array)
(Items to be inspected)

Next, the appearance inspection of the microneedle array will be described. As an item of the appearance inspection, for example, Inspecting the linearity of the central axis of the microneedle, such as whether each microneedle is provided on the substrate in a vertical posture or whether the axis is bent or inclined in the middle, and the inclination angle;
2. Foreign matter inspection for foreign matter adhering to the surface of the microneedle;
3. Check that the chemical solution is correctly applied to the microneedle array, the amount of application and the inspection of the application area, and the like. These will be described sequentially.
(1. Inclination inspection)

First, when examining the inclination angle and linearity of the central axis of the microneedle, the microneedle array is imaged from two or more directions. For example, as shown in the plan view of FIG. 17, if the same microneedle is inspected from two directions of the first optical axis OA1 and the second optical axis OA2 that intersect at a horizontal inclination angle α _{OA1 + OA2} , the inclination angle is It can be detected. The horizontal inclination angle α _{OA1 + OA2} is preferably 90 °. Further, for example, as shown in FIG. 16, the central axis CAX of the microneedle MN is obtained by image processing, the inclination angle α _CAX formed by the central axis CAX and the substrate SUB is obtained, and whether or not it is within a predetermined threshold value is processed. The determination is made by the unit 62 and the result is output to the inspection result output unit 65. It is also possible to determine the inspection items such as the linearity of the central axis CAX of the microneedle MN and whether the central axis CAX passes through the apex of the microneedle MN. In the tilt inspection, it is not always necessary to generate an edge image to be described later, and it can also be determined by performing image processing on the optical image.
(2. Foreign object inspection)

Next, foreign matter inspection will be considered. In the manufacturing process of the microneedle array, foreign matter, for example, resin molding waste forming a myloneedle may adhere to the surface of the microneedle. In order to detect and remove such foreign matter at the manufacturing stage, the surface of each microneedle is inspected by visual inspection. In this foreign matter inspection, it is necessary to take an optical image of the entire microneedle, or at least a region to be inserted. Here, since the microneedles are provided in an upright posture perpendicularly from the planar shape of the substrate, in the appearance inspection obtained by imaging the microneedle array from directly above, the appearance inspection of the tip portion of the microneedle is almost impossible as shown in FIG. This is possible, and it is necessary to inspect from an angle applied from the side of the microneedle to the upper side. Moreover, since it is a fine three-dimensional structure and has many blind spots, inspection from a plurality of directions is required. Furthermore, since it is manufactured aseptically, it is not allowed for the operator's hand to intervene. For this reason, an in-line appearance inspection is required when manufacturing the microneedle array.
(Edge image)

  Here, a state in which an edge image of a microneedle array that is an inspection target is captured and image processing is performed will be described with reference to FIG. First, the imaging unit 1 images the microneedle array to obtain an optical image OPI. Next, an edge image EDI is generated by the image processing unit 62 from the obtained optical image OPI. Here, the outline (edge) of the microneedle array is extracted from the optical image OPI. Furthermore, the measurement region can be automatically set by connecting discrete edges as necessary. For the contour extraction, for example, a dynamic contour method, watershed, edge tracing, or the like can be used.

  In the appearance inspection of the microneedle array, it is necessary to inspect a fine structure in a wide range. When the microneedle array is observed obliquely from above with a general optical microscope, the focused range FA2 that is in focus is a shaded area as shown in FIG. 19, and the microneedle array MNA includes a microscopic area included in the inspection target area. Only a part of the needle MN can be focused. For example, when an optical image OPI ′ as shown in FIG. 20 is imaged, even if edge extraction processing is performed on this optical image OPI ′, an edge image EDI ′ as shown in FIG. As a result, the edge of the microneedle can only be partially obtained, so that a complete appearance inspection cannot be performed. In order to avoid this, in order to inspect one microneedle array, a plurality of optical images are picked up by changing the focus position, and a focused portion is extracted from the plurality of picked up optical images. Therefore, it is necessary to perform image analysis on the synthesized image, and a long time is required for processing. For this reason, inspecting the microneedle array by this method makes in-line processing difficult due to the processing speed.

  Therefore, as shown in FIG. 22, it is required to acquire the optical image OPI focused on the inspection target region by one imaging. Thus, by performing edge extraction on this optical image OPI, an edge image EDI including the profile of each microneedle as shown in FIG. 23 can be obtained.

  Further, depending on the direction of observing the microneedle array in which a plurality of microneedles are arranged, the microneedles may overlap each other, and some or all of the backside microneedles may be hidden behind the microneedles on the front side. There is also a problem that the appearance inspection of the part that has become obstructed. For example, as shown in FIG. 24, when an optical image OPI ″ of the microneedle array is captured at an observation angle or field of view where the microneedles overlap each other as shown in FIG. Is partially unobtainable. For this reason, it is necessary to set the relative positional relationship between the imaging unit and the microneedle array in order to adjust the field of view and the observation angle so that the outline of each microneedle is displayed when the optical image is captured. . That is, it is necessary to obtain an edge image EDI having no overlap as shown in FIG. 26A instead of an edge image EDI "in which the microneedles overlap each other as shown in FIG. 26B.

  Therefore, in the present embodiment, when the optical image of the microneedle array is captured, the above two problems can be solved simultaneously by appropriately adjusting the angle of the imaging unit using the tilting unit.

First, in order to focus each microneedle when taking an optical image of the microneedle array obliquely from above, in accordance with the Scheimpflug principle as shown in the side view of FIG. The first lens vertical tilt angle θ _L1 , the first lens vertical tilt angle θ _L1 , and the first lens vertical tilt angle θ _L1 with the tilt mechanism so that the extension line of the main plane LNP of the first imaging lens 12 and the light receiving surface ISP of the first image sensor 11 intersect at one point. Adjust the imaging tilt angle θ _I1 . Thereby, the focus area FA1 (area shown by hatching in FIG. 3) is made to coincide with the inspection target area in accordance with the Scheinproof principle, and an optical image focused at each position of the microneedle can be taken.

Furthermore, the problem that the microneedles overlap each other is dealt with by adjusting the angle in the horizontal plane according to the arrangement of the microneedles (details will be described later).
(Optical imaging device)

Hereinafter, each of the inclination angle range in the vertical plane and the inclination angle range in the horizontal plane will be described. The present inventors have found that the appearance inspection of the microneedle array can be accurately performed by adjusting the tilt angle of the image pickup unit to an appropriate angle range using the optical image pickup device 200 shown in FIGS. 27 and 28. confirmed. In this optical image pickup device 200, the first imaging lens 12 is fixed, and the microneedle array MNA fixed on the rotary stage STG and the first image pickup device 11 are tilted, so that their relative angles are increased. Is adjusted. Here, the main plane LNP of the first imaging lens 12 is fixed, and the inclination angle (first lens vertical inclination angle θ _L1 ) of the inspection target area MNP of the microneedle array MNA is a work corresponding to the first lens inclination mechanism 32. It is adjusted on the stage. The first imaging tilt angle θ _I1 of the light receiving surface ISP of the first image sensor 11 is adjusted by an image sensor stage corresponding to the first image sensor tilt mechanism 31. Further, as the first imaging lens 12, a double-sided telecentric lens was used. Each of the work stage and the image sensor stage includes an XY stage XYS that can move on the XY plane and a θ stage THS that can adjust the rotation angle. In the example of FIG. 28, the θ stage THS is connected to the XY stage XYS, and the rotary stage STG is further upright on the θ stage THS.
(Vertical angle range)

Using this optical image pickup device 200, the inspection object region MNP of the inspection object, the main plane LNP of the first imaging lens 12, and the light receiving surface ISP of the first image pickup element 11 are crossed at one point. By adjusting the first lens vertical inclination angle θ _L1 and the imaging inclination angle θ _I1 to different angles by the one-lens inclination mechanism 32 and the first imaging element inclination mechanism 31, each of the inspection target areas MNP is adjusted in accordance with the Scheinproof principle. An optical image focused at a position can be taken. An optical image of the microneedle array MNA thus obtained is shown in FIG. Here, an image of a PGA microneedle array made of a translucent resin and provided with microneedles in a matrix on a disk-shaped substrate was taken. As shown in this figure, the state of the microneedles could be confirmed on the entire surface of the microneedle array MNA by adjusting the first imaging inclination angle _θI1 with the image sensor stage.
(Horizontal angle range)

  Next, in consideration of the overlapping of the arranged microneedles, an angular range in which the entire surface of the microneedles can be satisfactorily observed, specifically, between the microneedle array and the first imaging lens, and between the first imaging lens and the first imaging. The range of angles between elements will be described. Here, using the optical image pickup device 200 described above, observation was performed while changing the angle between the microneedle array MNA and the first imaging lens 12 and the first imaging lens 12 and the first imaging element 11.

First, the angle between the microneedle array MNA and the first imaging lens 12 is set, the angle between the first imaging lens 12 and the first imaging element 11 is adjusted, and the angle when the entire surface is in focus. Was recorded. Here, as shown in FIG. 30, the angle formed between the perpendicular to the microneedle or the image sensor when viewed from the rotation axis direction and the first optical axis OA1 of the imaging lens is the microneedle-imaging lens angle. An image lens-imaging element angle was used. The results are shown in Table 1. In addition, the microneedle-lens angle θ _THS in Table 1 is an angle θ _THS set by the optical imaging device as shown in FIG. 30, and is actually set by the angle inspection device 100 shown in FIG. That is, the angle θ formed with the Scheimpflug focusing surface is θ = 90 ° − (microneedle-lens angle θ _THS used in the optical imaging device 200).

As shown in Table 1, when the microneedle-imaging lens angle is between 30 ° and 64 °, the imaging lens-photographing element angles of 20 °, 33 °, 40 °, and 42 ° can be observed well. Obtained. In other words, it was confirmed that a focused optical image can be taken by adjusting the angle of the imaging element to 48 ° to 70 ° in the range of the elevation angle θ of the imaging lens in the range of 26 ° to 60 °.
(Angle of the illumination unit 50)

Furthermore, the angle of the illumination unit 50 is also examined. Here, as shown in FIG. 31, the relationship between the lens position and the light source position during microneedle observation was examined. In FIG. 31, the illumination-optical axis horizontal inclination angle α ′ formed by the first optical axis OA1 and the illumination light LS in plan view is set to 60 °, 90 °, 120 °, 150 °, 180 °, while the microneedle in the vertical view. The angle γ formed by the perpendicular to the plane and the first optical axis OA1 (the first optical axis vertical inclination angle θ _{OA1 in} FIG. 1C has a relationship of θ _OA1 = 90 ° −γ) is 30 °, 45 °, 60 °. Furthermore, when the angle θ _LS formed by the microneedle plane and the illumination light LS is set to 0 °, 30 °, 45 °, 60 °, and 90 °, optical images obtained by imaging the microneedle array MNA of FIG. 32, 33, and 34. In the legend shown in the upper left of the optical image shown in each figure, α indicates α ′, and γ indicates θ _LS . FIG. 32 shows a state where γ = 60 ° is fixed in FIG. 31 and α ′ and θ _LS are changed. FIG. 33 is a state where γ = 45 ° is fixed and α ′ and θ _LS are changed. FIG. 34 shows a state in which γ = 30 ° is fixed and α ′ and θ _LS are changed. Further, FIG. 35 shows an optical image obtained by imaging a microneedle array MNA ′ made of silicon, which is made of metal and has a rectangular substrate shape, as another microneedle array. FIG. 35 shows a state in which γ = 45 ° is fixed and α ′ and θ _LS are changed.

As shown in FIGS. 32 to 34 above, in the case of the microneedle array made of a light-transmitting material, it was found that the smaller the θ _LS is, the more the microneedle portion is illuminated and the appearance inspection becomes easier. . Specifically, θ _LS ≦ 30 ° is preferable.

When θ _LS > 30 °, the greater the θ _LS , the less the contrast between the microneedle and the substrate becomes clear. It was found that the smaller γ is, the less affected by the light source direction α ′.

On the other hand, as shown in FIG. 35, in the case of the microneedle array MNA ′ made of a material that does not transmit light such as metal, the inspection becomes easier as the θ _LS is larger. Conversely, it was found that when θ _LS is small, the microneedle is shaded, which makes inspection difficult. In this case, the light source direction α ′ is preferably 0 <α ′ ≦ 90 °. Further, it was found that forward light is preferable, and irradiation from the front is not desirable. Further, when α ′ = 180 ° and γ + θ _LS = 90 °, the reflection angle from the microneedle substrate surface and the lens installation angle are equal, and it has been found that the appearance inspection becomes difficult.

It was confirmed whether the same tendency as above could be obtained even under conditions satisfying the Scheinproof principle. Here, the microneedle angle was set to 50 ° and the sensor angle was set to 33 °. In addition, the angle α ′ between the lens and the light source and the angle θ _LS between the microneedle plane and the light source were changed for observation. The results are shown in FIGS. Here, FIG. 31 shows a state in which γ = 50 ° and α ′ and θ _LS are changed. As shown in these figures, it has been found that the same results can be obtained even when installed under conditions that satisfy the Scheinproof principle. That is, when θ _LS ≦ 30 °, the appearance inspection becomes easy, and when θ _LS > 30 °, it is confirmed that the contrast becomes less clear as θ _LS increases.
(Design of the lens installation position that does not fall behind the front microneedle)

Next, when observing a microneedle array in which a large number of microneedles are arranged on the XY plane of the substrate from various directions and angles, the front side microneedles and the backside microneedles do not overlap. ,consider.
(Cylindrical microneedle)

  First, assuming that the microneedles are cylindrical, a microneedle array MNAG in which cylindrical microneedles are arranged in a grid pattern as shown in FIGS. 38, 39A, and 39B will be examined. First, in the perspective view of FIG. 38, as shown by the arrow VD1, when observing from the same direction as the column of the array on the lateral side, it overlaps with the microneedles on the back as shown in FIG. The appearance inspection of the microneedle cannot be performed. In this case, as shown in FIG. 41, it is possible to observe all the microneedles without overlapping by changing the observation position so that the observation is performed from obliquely above instead of directly from the side.

  Next, in the perspective view of FIG. 38, when observing from the diagonal direction of the array on the right side as shown by the arrow VD2, it overlaps with the microneedles on the back as shown in FIG. The microneedle cannot be visually inspected. In this case as well, the microneedle can be observed without being overlapped by changing the observation position so as to be observed from obliquely upward as shown in FIG.

Depending on conditions such as the pitch between the microneedles of the microneedle array, the number of microneedles, and the thickness, all the needles may be observed from the side. For example, as shown in the perspective view of FIG. 44, in the case of a microneedle array in which the intervals between the microneedles are sparse, by adjusting the angle of the observation position, as shown in FIG. It is possible to observe from the side. In this case, it is also possible to observe from an oblique angle at an arbitrary angle.
(Observation conditions)

  From the above, it can be seen that the observation conditions under which the microneedle array can be observed without overlapping the microneedles arranged in a grid pattern are the following observation conditions 1 and 2.

  Observation condition 1: When observing an arbitrary microneedle of a microneedle array from the side, if it overlaps with another microneedle, it can be observed without overlapping with another microneedle by observing obliquely from above.

  Observation condition 2: When observing an arbitrary microneedle of the microneedle array from the side, if it can be observed without overlapping with other microneedles, it can be observed obliquely above or from the side at an arbitrary elevation angle.

  Here, a mathematical formula satisfying the observation condition 1 is derived. There are various examples of the arrangement pattern of microneedles in the microneedle array. Considering the convenience during manufacturing and the certainty during use, it is more regular than arranging microneedles at random positions. It is desirable to arrange in a pattern having. In general, as shown in FIG. 38 and FIG. 39A described above, the microneedles are arranged in a grid pattern, that is, in a quadrangular apex (hereinafter referred to as “grid grid arrangement”). As shown in FIGS. 47A and 47B, when the columnar microneedles are arranged in close packing so as to be offset in the row direction, in other words, the microneedles are arranged at honeycomb-like coordinates, and the microneedles are placed at the apexes of the triangle Are arranged (hereinafter referred to as “offset arrangement”) microneedle array MNAO.

First, in the case of a microneedle array MNAG arranged in a grid pattern, as shown in the plan view of FIG. 39A, with respect to the microneedle array MNAG in which M microneedles are arranged in the lateral direction and N microneedles in the depth direction as viewed from the observation direction. The height of the microneedle is H, the thickness of the microneedle is W, the pitch of the microneedle array is L, the angle between the microneedle array and the first optical axis OA1 of the imaging lens is α _OA1-MN , As shown in 39B, the angle formed by the microneedle substrate surface and the first optical axis OA1 of the imaging lens is θ _OA1 . Here, the first lens horizontal inclination angle α _L1 formed by the microneedle array and the first optical axis OA1 of the first imaging lens 12, and the first optical axis OA1 formed by the microneedle array and the first imaging element 11 are formed. The image sensor horizontal inclination angle α _I1 can be regarded as equivalent in plan view. Therefore, hereinafter, only the angle formed by the first optical axis OA1 of the imaging lens and the microneedle array will be considered.

In the case of the microneedle array MNAO having an offset arrangement, as shown in the plan view of FIG. 47A and the side view of FIG. 47B, the height of the microneedle is H, the thickness of the microneedle is W, the pitch is L, The number of columns is M, the number of microneedles is N, the angle between the microneedle column and the first optical axis OA1 of the imaging lens is the optical axis _-MN horizontal inclination angle α _OA1-MN (FIG. 47A), the microneedle An angle formed by the substrate surface of the lens and the first optical axis OA1 of the imaging lens is θ _OA1 (FIG. 47B).
(Coordinate axis angle β)

  Consider generalizing the above two cases. As shown in the plan view of FIG. 48, in the microneedle array MNA in which two or more microneedles are installed at the patterned positions, the positions of all the microneedles can be indicated by coordinates. Set the Y axis. Further, an angle formed by the intersection of the X axis and the Y axis is a coordinate axis angle β (where 0 ° <β ≦ 90 °).

Here, when β = 90 °, a microneedle array MNAG having a grid arrangement in which microneedles are arranged at intersections of orthogonal XY coordinates (FIG. 39A). When β = 60 °, the microneedle array MNAO is offset (FIG. 47).
(Y-OA1 horizontal tilt angle α _Y-OA1 )

The first optical axis OA1 of the imaging lens is set in the positive direction of the Y axis from the origin, and the angle formed by the Y axis and the first optical axis OA1 of the imaging lens is Y-OA1 horizontal inclination angle α _Y-OA1. And Further, as shown in FIG. 49, an angle formed by the XY plane (microneedle substrate surface) of the microneedle array MNA and the first optical axis OA1 of the imaging lens is an elevation angle θ _OA1 (where 0 ° ≦ θ _OA1 ≦ 90). °). These Figure 48, Figure 49, of the microneedle height H, W the thickness of the microneedles, the spacing (pitch) L _x between the X-axis direction of the microneedle, the pitch between the Y-axis direction of the microneedle Let _Ly .
(Reference needle A)

  Here, a reference microneedle (reference needle) A and microneedles (target needles) X at (m, n) positions in the (X, Y) direction from the reference needle A are considered.

First, a reference needle A is set as a reference microneedle. The reference needle A is positioned at the intersection of the X axis and the Y axis, that is, the origin, and expressed as A (X, Y) = A (0, 0) using the XY coordinates. With the position of the reference needle A as a reference position, the target needle X in the mth row × nth column from the reference needle A can be represented by X (m, n).
(Target needle X)

Here, the positional relationship between the reference needle A and an arbitrary target needle X is considered from the plan views of FIGS. The range of the angle α _Y-OA1 where the reference needle A and the target needle X overlap when the microneedle is observed from the side is expressed by the following equation.

(Α _{A in} FIG. 50) <(overlapping angle α _Y-OA1 ) <(α _{B in} FIG. 51)

  Here, in FIG. 50, when an axis on the XY plane orthogonal to the Y axis, X ′, is set, the coordinate position of the center of the target needle X can be expressed by the following equation.

(X ′, Y) = (m · L _x · sin β, m · L _x · cos β + n · L _y )

  The first optical axis OA1 of the imaging lens is displayed as a tangent line in contact with the outside of the reference needle A and the target needle X in FIGS. Here, a perpendicular line is drawn with respect to the tangent line from the center of the reference needle A and the target needle X as shown in FIG. A perpendicular line is drawn from the center of the target needle X to the Y axis, and a perpendicular line is drawn from the point where the perpendicular line from the target needle X intersects the tangent line to the Y axis. In this state, the center of the reference needle A is A, the center of the target needle X is X, the intersection of the first optical axis OA1 and the Y axis of the imaging lens is B, and the first optical axis OA1 and the point A of the imaging lens. Is the intersection of the perpendicular from the first optical axis OA1 of the imaging lens and the point X, E is the intersection of the perpendicular from the Y axis and the point D, and the intersection of the perpendicular from the Y axis and the point X F, G represents the intersection of the straight line FX and the first optical axis OA1 of the imaging lens, and H represents the intersection of the straight line GX and the perpendicular from the point D.

  At this time, ΔABC, ΔGBF, ΔDBE, ΔGXD, ΔDXH are similar, and the following equation is established.

∠ABC = ∠GBF = ∠DBE = ∠GXD = ∠DXH = α _A

  The center position of the target needle X can be displayed by the following equation.

(X ′, Y) = (m · L _x · sin β, m · L _x · cos β + n · L _y )

  Here, in ΔDBE, the length of the side BE can be expressed by the following equation.

  BE = AB + AF + EF = AB + AF + DH

  Here, since ΔABC and ΔDXH are similar, the following equation is established.

sin α _A = AC / AB = DH / DX
AB = AC / sin α _A
DH = DX · sinα _A

  Further, since AF is equal to the Y value of the target needle X, the following equation is established.

AF = m · L _x · cos β + n · L _y

Furthermore, from AC = DX = W / 2 (half of the microneedle thickness W), the length of the side BE can be expressed by the following equation.

Further, the length of the side DE can be expressed by the following equation.

From the above, the following equation is established.

Here, from sin ² α _A + cos ² α _A = 1, the following equation 1 is established.

sin α _A (m · L _x · cos β + n · L _y ) + W> m · L _x · sin β · cos α _A

W> m · L _x · sin β · cos α _A −sin α _A (m · L _x · cos β + n · L _y ) Equation 1

  If the case of FIG. 51 is considered similarly, the center position of the target needle X can be expressed by the following equation.

(X ′, Y) = (m · L _x · sin β, m · L _x · cos β + n · L _y )

  53, the center of the reference needle A is A, the center of the target needle X is X, the intersection of the first optical axis OA1 and the Y axis of the imaging lens is B, and the first optical axis of the imaging lens. The intersection of the perpendicular from OA1 and point A is C, the intersection of the first optical axis OA1 of the imaging lens and the perpendicular from point X is D, the intersection of the perpendicular from Y axis and point D is E, and the Y axis and point X Let F be the intersection of perpendicular lines from H and H be the intersection of perpendicular lines from the straight line DE and the point X. At this time, ΔABC, ΔDBE, and ΔXDH are similar, and the following equation is established.

∠ABC = ∠DBE = ∠XDH = α _B

  The center position of the target needle X can be expressed by the following equation.

(X ′, Y) = (m · L _x · sin β, m · L _x · cos β + n · L _y )

  From this, in ΔDBE, the length of the side BE can be expressed by the following equation.

  BE = AF-AB-EF = AF-AB-HX

ΔABC and ΔXDH are similar, and the following equation is established from sin α _B = AC / AB = XH / XD.

AB = AC / sin α _B , HX = DX · sin α _B ,

Further, since AF is equal to the Y value of the target needle X, the following equation is established.
AF = m · L _x · cos β + n · L _y

Furthermore, from AC = DX = W / 2 (half of the microneedle thickness W), the length of the side BE can be expressed by the following equation.

Further, the length of the side DE can be expressed by the following equation.

From the above, the following equation is established.

Here, from sin ² α _B + cos ² α _B = 1, the following equation 2 is established.

sin α _B (m · L _x · cos β + n · L _y ) −m · L _x · sin β cos α _B <W Expression 2

  From the expressions 1 and 2, the condition when the reference needle A as a reference overlaps with an arbitrary target needle X when observed from the side can be expressed by the following expression 3.

−W <m · L _x · sin βcos α _Y-OA1 −sin α _Y-OA1 (m · L _x · cos β + n · L _y ) <W Equation 3
(M and n are arbitrary integers)

  Here, the content represented by Equation 3 will be considered. As shown in the plane coordinate diagram of FIG. 54, let auxiliary lines B and C pass through the centers of the reference needle A and the target needle X and parallel to the first optical axis OA1 of the imaging lens. Also, let D be the intersection of the perpendicular from the point X to the Y axis and the Y axis. Further, a perpendicular line is drawn from the point D to the first optical axis OA1 of the imaging lens, an intersection point of the auxiliary line B and the perpendicular line is E, and an intersection point of the auxiliary line C and the perpendicular line is F. At this time, ΔADE and ΔDXF are similar, and the following equation is established.

∠DAE = ∠XDF = α _C

  Further, the coordinate position of the center of the target needle X can be expressed by the following equation as shown in FIG.

(X ′, Y) = (m · L _x · sin β, m · L _x · cos β + n · L _y )

  From this, the following equation is established.

AD = m · L _x · cos β + n · L _y , DX = m · L _x · sin β

Further, in ΔADE, the following equation 4 is established from sin α _C = DE / AD.

DE = AD · sin α _C = (m · L _x · cos β + n · L _y ) · sin α _C Equation 4

Similarly, in ΔDXF, the following expression 5 is established from cos α _C = DF / DX.
DF = DX · cos α _C = m · L _x · sin β · cos α _C Formula 5

From Equation 3, Equation 4, and Equation 5, Equation 3 is expressed as -W <DE-DF <W. That is, when the distance between the reference needle A serving as a reference and the center of any target needle X and parallel to the first optical axis OA1 of the imaging lens is shorter than the thickness W of the microneedle, the reference needle A Is overlapped with an arbitrary target needle X as shown in Equation 3.
(Range of elevation angle θ _OA1 where reference needle A and target needle X do not overlap)

Next, the range of the elevation angle θ _{OA1 that} can be observed so that the reference needle A and the target needle X do not overlap in the case of Expression 3 is examined. The center position of the target needle X can be expressed by the following equation.

(X ′, Y) = (m · L _x · sin β, m · L _x · cos β + n · L _y )

Therefore, the following equation is established for AX in FIG.

At this time, the range of the elevation angle θ _{OA1 that} can be observed without the apex of the reference needle A shown in the side view of FIG. 56 overlapping the bottom of the target needle X can be expressed by the following equation (6).

  ... Formula 6

From the above, in order to observe the microneedle array without overlapping each other, it is required that parameters such as α _Y-OA1 and β satisfy the following conditional expression 1.

−W <m · L _x · sin βcos α _Y-OA1 −sin α _Y-OA1 (m · L _x · cos β + n · L _y ) <W
... Condition 1
(0 <α _Y-OA1 <90 °, 0 <β ≦ 90 °; m and n are arbitrary integers)

Further, the elevation angle when observing at an angle α _Y-OA1 that satisfies the above-described conditional expression 1 is required to satisfy the following conditional expression 2.

  ... Condition 2

When the observed horizontal angle α _Y-OA1 does not satisfy the conditional expression 1, an arbitrary elevation angle θ _OA1 that satisfies 0 ≦ θ _OA1 <90 ° can be selected.
(In the case of microneedle array MNAG arranged in a grid pattern)

Next, Conditional Expression 1 when the microneedles are arranged in a grid pattern as shown in FIG. In the case of a microneedle array MNAG arranged in a grid pattern, β = 90 °, and α _OA1−MN = α _Y−OA1. Therefore, conditional expression 1 is expressed by the following expression.

−W <m · L _x · cos α _Y-OA1 −n · L _y · sin α _{Y-OA 1} <W

At this time, the conditional expression 2 is expressed by the following expression.

  (For microneedle array MNAO with offset arrangement)

  Also, consider conditional expression 1 when the microneedles are offset as shown in FIG. First, in the case of the microneedle array MNAO having an offset arrangement, β = 60 °, so sin 60 ° = (√3) / 2 and cos 60 ° = 1/2. Therefore, the conditional expression 1 can be expressed by the following expression.

−W <√3 / 2 (m · L _x · cos α _OA1-MN ) −sin α _OA1-MN (1/2 · m · L _x + n · L _y ) <W

Conditional expression 2 is expressed by the following expression.

  (In the case of conical microneedle CMN)

In the above example, the case where the microneedle is cylindrical has been described. However, the present invention is not limited to a cylindrical shape having a uniform thickness, and can also be applied to a microneedle whose thickness changes. For example, when the thickness of the tip portion is small enough to be ignored like a conical microneedle CMN as shown in FIG. 57, the tip thickness of the microneedle serving as a reference in the conditional expression 2 can be ignored. it can. As a result, as shown in FIG. 58, the elevation angle θ _OA1 can be expressed by the following equation.

  (When observing a part of the microneedle)

Further, the present invention is not limited to the configuration in which the entire appearance of the microneedles in the height direction is inspected, and can be applied to an aspect in which only a part thereof is inspected. For example, as shown in FIG. 59, in the case where it is sufficient to observe not only the entire microneedle but only a region having a predetermined length from the tip, W = the maximum thickness of the portion to be observed, H = the height of the portion to be observed, The observation condition 1 ′ can be calculated as follows.
(Method for calculating first optical axis horizontal inclination angle α _OA1 observable after determination of first optical axis vertical inclination angle θ _OA1 )

Next, _let us consider calculating the range of α when θ _OA1 is determined. here,

Than,

It becomes. From all variables ≧ 0

It becomes. Here, from sin ² β + cos ² β = 1, the following equation can be obtained.

  ... Formula 6

Equation 6 can be considered as an equation of an ellipse whose axis is inclined as shown in FIG. When the elevation angle θ _OA1 is determined in this way, appearance inspection can be performed without overlapping the microneedles by selecting m and n that satisfy Expression 6 (shaded portions in FIG. 60). Observation condition 1 ′ is expressed by the following equation.

_{-W <m · L x · sinβcosα} -sinα (m · L x · cosβ + n · L y) <W ··· observation condition 1 '

Here, since L _x , L _y , W, sin β, and cos β are constants, when m and n satisfying Expression 6, if α satisfies the observation condition 1 ′, appearance inspection without overlapping the microneedles I understand that I can do it.

As described above, the present invention is not limited to an example in which the height of the microneedle is H and the thickness of the microneedle is W, and the appearance of the microneedle is imaged and the appearance is inspected. It can also be applied to applications. For example, as shown in FIG. 59, when the microneedle is long and is configured to insert only the tip, it may be sufficient to inspect only the tip. In this case, in the height direction of the projections such as microneedles, the maximum height of the region to be subjected to the appearance inspection is H, and the maximum thickness of each projection is W. As a result, a partial visual inspection can be performed, and by reducing the scope of the visual inspection, it is possible to reduce the load and increase the processing speed.
(Α range of microneedle array)
(Sample 1)

As an example of a microneedle array, a microneedle having H = 600 μm, W = 100 μm, L _x = L _y = 800 μm, β = 90 °, θ _OA1 = 45 °, 10 rows × 12 columns is considered as sample 1. First, tan θ _OA1 = tan 45 ° = 1 and cos β = cos 90 ° = 0.

Here, a numerical value is substituted into Equation 6 to obtain the following equation.

  ... Formula 7

Here, since Expression 7 is established by an integer other than (m, n) = (0, 0), it can be observed at an arbitrary angle α.
(Sample 2)

Next, as another microneedle array, H = 600 μm, W = 100 μm, L _x = L _y = 400 μm, β = 90 °, θ _OA1 = 45 °, 10 rows × 12 columns of microneedles are considered as sample 2. To do.

By substituting the above numerical values into Equation 6, the following equation is obtained.

  ... Formula 8

Since m and n in Expression 7 can take an integer other than (m, n) = (0,0), (1,0), (0,1), (1,1), from the observation condition 1 ′ The following equation is established.
−100 <m · 400 · cos α−n · 400 · sin α <100
−1/4 <m · cos α−n · sin α <1/4
(M, n) = (1, 0): −1/4 <cos α <1/4 (Equation 9)
(M, n) = (0, 1): −1/4 <sin α <1/4.
(M, n) = (1, 1): −1/4 <cos α−sin α <1/4 Expression 11

Α satisfying Equation 9, Equation 10, and Equation 11 is
From Equation 9, 75.52 ° <α <90 °
From Equation 10, 0 <α <14.47 °
From Equation 11, 34.8 ° <α <55.2 °

From the above,
0 <α <14.47 °,
34.8 ° <α <55.2 °,
It was confirmed that appearance inspection was possible at any α other than 75.52 ° <α <90 °.
(Sample 3)

Further, as another microneedle array, H = 600 μm, W = 100 μm, L _x = L _y = 800 μm, β = 90 °, θ _OA1 = 15 °, 10 rows × 12 columns of microneedles are considered as sample 3. . In this case, assuming that tan θ _OA1 = tan 15 ° = 0.268, substituting numerical values into Equation 6, the following equation is obtained.

  ... Formula 12

  Equation 12 shows that (m, n) = (0,0), (0,1), (0,2), (1,0), (1,1), (1,2), (2,0 ), An integer other than (2, 1).

From observation condition 1 '
−100 <m · 800 · cos α−n · 800 · sin α <100
−1/8 <m · cos α−n · sin α <1/8
(M, n) = (0, 1): −1/8 <sin? α <1/8 Equation 13
(M, n) = (0, 2): −1/8 <2 sin? α <1/8 Equation 14
(M, n) = (1, 0): −1/8 <cos? α <1/8 Equation 15
(M, n) = (1, 1): −1/8 <cos α−sin α <1/8 Equation 16
(M, n) = (1, 2): −1/8 <cos α−2 sin α <1/8 Equation 17
(M, n) = (2, 0): −1/8 <2 cos α <1/8 Equation 18
(M, n) = (2, 1): −1/8 <2 cos α−sin α <1/8 Equation 19
From Equation 13, 0 ° <α <7.18 °
From Equation 14, 0 ° <α <3.58 °
From Equation 15, 82.8 ° <α <90 °
From Equation 16, 39.1 ° <α <50.9 °
From Equation 17, 23.4 ° <α <29.8 °
From Equation 18, 86.4 ° <α <90 °
From Equation 19, 60.2 ° <α <66.7 °

Therefore,
0 ° <α <7.18 °,
23.4 ° <α <29.8 °,
39.1 ° <α <50.9 °,
60.2 ° <α <66.7 °,
It was confirmed that appearance inspection was possible at any α other than 82.8 ° <α <90 °.
(Sample 4)

Further, as another microneedle array, H = 600 μm, W = 100 μm, L _x = L _y = 800 μm, β = 60 °, θ _OA1 = 45 °, 10 rows × 12 columns of microneedles are considered as sample 4. First, since tan θ _OA1 = tan 45 ° = 1 and cos β = cos 60 ° = 1/2, the following equation is obtained.

  ... Formula 20

Since Expression 20 is established with an integer other than (m, n) = (0, 0), an appearance inspection can be performed at an arbitrary angle α.
(Sample 5)

As another microneedle array, a microneedle according to sample 5 of H = 600 μm, W = 100 μm, L _x = L _y = 800 μm, β = 60 °, θ _OA1 = 15 °, 10 rows × 12 columns will be examined. . First, since tan θ _OA1 = tan 15 ° = 0.268 and cos β = cos 60 ° = 0.5, the following equation is established.

  ... Formula 21

Equation 21 is expressed as (m, n) = (0,0), (0,1), (0,2), (1,0), (1,1), (1,2), (2,0 ), An integer other than (2, 1). Here, the following equation is established from the observation condition 1 ′.

(M, n) = (0, 1): −1/4 <sin α <1/4...
(M, n) = (0, 2): −1/8 <sin α <1/8 (Equation 23)
(M, n) = (1, 0): −1/4 <√3 cos α-2 sin α <1/4 Expression 24
(M, n) = (1, 1): −1/4 <√3 cos α-3 sin α <1/4 Expression 25
(M, n) = (1,2):-1/4 <√3 cos α-5 sin α <1/4 Equation 26
(M, n) = (2, 0): −1/8 <√3 cos α-2 sin α <1/8 Equation 27
(M, n) = (2, 1): −1/4 <2√3 cos α-5 sin α <1/4 Equation 28
From Equation 22, 0 ° <α <14.48 °
From Equation 23, 0 ° <α <7.18 °
From Equation 24, 35.47 ° <α <46.31 °
From Equation 25, 25.86 ° <α <34.14 °
From Equation 26, 16.4 ° <α <21.82 °
From Equation 27, 38.18 ° <α <43.6 °
From Equation 28, 32.36 ° <α <37.07 °

Therefore, the appearance can be inspected at any α other than 0 ° <α <14.48 °, 16.4 ° <α <21.82 °, and 25.86 ° <α <46.31 °.
(Range of observable α and θ _OA1 )

Next, the ranges of the horizontal inclination angle α and the elevation angle θ _{OA1 that} can be observed for each of the samples 1 and 4 and the new samples 6 and 7 described above are shown in the graphs of FIGS. 61 shows a microneedle array having a height H = 600 μm, a width W = 100 μm, a pitch L _x = L _y = 800 μm, and β = 90 ° as the microneedle shown in Sample 1. FIG. Microneedle array with height H = 600 μm, width W = 100 μm, pitch L _x = L _y = 800 μm, β = 60 °, FIG. 63 shows sample 6 as height H = 1000 μm, width W = 100 μm, pitch L _{x = L y = 800μm, β} = 90 ° of the microneedle array, FIG. 64, as the sample 7, the height H = 1000 .mu.m, a width W = 100 [mu] m, the pitch _{L x = L y = 800μm,} β = 60 ° micro The observable range of the needle array is shown filled in. As shown in these drawings, it is understood that the appearance inspection of the microneedle can be performed by adjusting the horizontal inclination angle α and the elevation angle θ _OA1 .
(Inspection object posture guide mechanism)

  In the above example, an example in which the tilt angle in plan view of the imaging unit is adjusted assuming that the microneedle array is transported in a posture in which the row direction of the microneedle array coincides with the transport direction. However, the present invention is not limited to this configuration, and the posture of the microneedle array to be conveyed is adjusted prior to imaging, so that the imaging unit and the microneedle are set in a positional relationship in which the above-described angular range is relatively set. You can also For example, as shown in the plan view of FIG. 65, as a guide mechanism for correcting or aligning the posture of the inspection object in a mechanically constant posture, a pin PIN is set on a conveyor CNV that conveys the microneedle array MNA, For example, a guide plate GID that guides the camera to the posture may be arranged so that it is mechanically rotated so as to be in a predetermined posture when transported to the imaging position.

  Alternatively, as another inspection object posture guide mechanism, as shown in FIG. 66, by arranging the conveyors CNV1 and CNV2 having different conveyance speeds, the conveyed microneedle array MNA is rotated, and finally the predetermined posture is obtained. It can also be configured. In this example, the conveyance speed of the conveyor CNV1 is set to be higher than that of the conveyor CNV2, and the outlet side of the conveyor CNV1 is narrowed. By gradually rotating, the microneedle array MNA is directed to the posture in which the longitudinal direction of the microneedle array MNA is guided to the narrowed outlet side.

  Moreover, although the case where the external shape of the microneedle array was a rectangular shape was described in the above example, the posture can be adjusted with the same configuration for a microneedle array whose external shape is circular. Alternatively, a guide mechanism for adjusting the posture of the inspection object can be provided on the inspection object side. For example, a positioning guide surface may be provided on a part of the outer shape of the microneedle array. For example, in the example shown in the plan view of FIG. 67, a linear guide surface GSF (orientation flat surface) is provided on a part of the circular substrate SUB of the microneedle array MNAR, and a predetermined posture is used by using this surface. It becomes possible to position to.

As described above, in the appearance inspection of the inspection object in which a plurality of protrusions are regularly arranged on the XY plane, only the first image sensor tilt mechanism and the first lens tilt mechanism are adjusted so that the parameters fall within a predetermined range. Thus, it is possible to avoid a situation in which when the image is taken from the side, the projection on the back side becomes a shadow of the projection on the front side and the appearance inspection cannot be performed. In particular, the actual parameters such as the thickness, height, and spacing of the protrusions can be set without going through the process of finding the optimal installation conditions through repeated trial and error by actually arranging the image sensor and imaging lens as in the past. Accordingly, only by setting the first image sensor tilt mechanism and the first lens tilt mechanism 32, the installation conditions necessary for the appearance inspection can be determined, and the labor-saving adjustment work can be greatly saved. In addition to this, the first lens vertical inclination angle θ _L1 and the first imaging inclination angle θ _I1 are adjusted to different angles, respectively, and optical images focused at respective positions in the inspection target area are imaged in accordance with the Scheinproof principle. It becomes possible to do. As a result, it is possible to perform image inspection on the obtained focused optical image, improve its accuracy, and further improve the reliability of the appearance inspection.

When an optical image of a focused microneedle array can be taken as described above, the edge image generated from the optical image becomes finer and the accuracy of the appearance inspection is improved. . Furthermore, by forming an image that does not overlap between microneedles or has little overlap so as not to hinder the appearance inspection, the appearance inspection can be performed on each of the plurality of microneedles.
(3. Drug application amount inspection)

  Further, the appearance inspection is not limited to the quality determination as to whether the shape is abnormal as described above, but other inspections may be included instead of or in addition to this. For example, when a surface is coated by applying a chemical solution to each microneedle with respect to the microneedle array, it can be determined from the optical image of the microneedle array after coating whether or not an appropriate coating is being performed.

  As an example, FIGS. 69 to 73C show appearance inspections performed on a microneedle array coated with a chemical solution as shown in the perspective view of FIG. Here, before and after the operation of applying the chemical liquid LDP to each microneedle MN, an optical image is taken, and the amount of the coated chemical liquid LDP is calculated from the difference between the two to apply an appropriate amount. Judgment is made whether or not. Here, for the purpose of explanation, the application state of the chemical solution is inspected based on the optical image OPI (FIG. 69) before the chemical solution application and the optical image OPI (FIG. 70) after the chemical solution imaged from the side surface side of the microneedle array. An example will be described.

  The schematic diagrams of FIGS. 71A to 71C show a case where the chemical liquid LDP can be handled as being applied with a substantially uniform film thickness. In this case, the coating amount can be calculated from the average value of the film thickness.

  On the other hand, the example shown in FIGS. 72A to 72C and FIGS. 73A to 73C shows a case where the film thickness of the chemical liquid LDP is not uniform. In this case, the cross-sectional area may be calculated from the difference between before and after application of the chemical liquid LDP, and the application amount may be calculated from the cross-sectional area.

  In addition, when the amount of the chemical LDP applied is determined for each microneedle and at least one microneedle is determined to be defective, the microneedle array is determined to be defective, The determination can also be made by the total amount of coating in the entire needle array or the average value of the coating amount of each microneedle. In particular, it can be said that the microneedle array only needs to be able to introduce a predetermined amount of drug solution into the body of the observer, and it is not necessary to manage the application amount for each microneedle. Therefore, it is preferable to perform non-defective product determination by determining whether or not the coating amount in the entire microneedle array has reached a predetermined reference value. This method can improve the yield.

  Furthermore, it is not always necessary to make a determination based on the application amount or volume of the chemical liquid LDP, and it can also be determined by a cross-sectional area obtained from the difference. In particular, when most of the microneedles MN are substantially uniform cones or cylinders, or a combination thereof, and the film thickness of the applied chemical solution LDP can be handled as substantially uniform, the application amount of the chemical solution LDP with the cross-sectional area is substituted. It is also possible to make it. In addition, in such difference determination, as another appearance inspection item, it is inspected whether the appearance shape of each microneedle is uniform, and if not uniform, the application amount of LDP is substituted with the sectional area of the difference. If this is not possible, the microneedle array may be treated as defective all the time, or a correction process may be added to calculate the volume, not the cross-sectional area, only for such non-uniform microneedles.

  In addition, when the color of the drug solution and the microneedle are different, the area of each microneedle where the drug solution is applied and the area where the drug solution is not applied are distinguished by image processing, and the drug solution is correctly applied from the area of the application region. It can also be determined. As an example of processing in this case, a colored region is extracted based on the color information of the chemical, the extracted colored region is regarded as a chemical application range, and the chemical application amount is estimated based on the area of the region To do. Also, from the shape of the colored area, for example, if the colored area has a chip or a hole, it can be determined that the drug has not been applied to this area, and a good product is determined whether the drug has been applied accurately. Inspection is possible.

Further, it is not always necessary to completely cover the tip of each microneedle as the application region to which the chemical solution is to be applied. For example, as shown in FIGS. 73A to 73C, the microneedle MN is allowed to be exposed even when the tip portion is exposed. In other words, it is important that the applied chemical solution elutes from the inserted microneedle into the viewer's body, and the area to which the chemical solution is applied is not limited as long as this purpose is achieved. As shown in FIG. 71B and FIG. 72B, when the drug solution LDP is applied to the tip of the microneedle MN, the sharpness of the tip of the microneedle MN is weakened, and the skin may be broken when inserted into the patient's skin. It may be difficult. From this viewpoint, as shown in FIGS. 73A to 73C, it can be said that it is preferable to apply the chemical liquid LDP while leaving the tip of the microneedle MN.
(Microneedle formed with drug)

  Alternatively, the microneedle itself may be formed by curing the chemical solution, and the microneedle itself inserted into the viewer may be eluted to introduce the chemical solution into the body. An example of such a microneedle array is shown in the schematic enlarged view of FIG. In the microneedle array MN ′ including the chemical solution, it is only necessary to inspect the appearance of the hardened microneedles, and it is not necessary to take an optical image twice before and after application of the chemical solution. On the other hand, since the microneedles are formed with a drug, the amount of the required chemical solution is increased and the manufacturing cost is increased. Also, depending on the chemical solution, it may be difficult to mold, or the strength after molding may be insufficient, so that it is difficult to insert the skin of the viewer.

In addition, when each shape of the microneedle array can be regarded as uniform, an ideal (or a standard as a good product) microneedle array can be obtained without extracting a difference from each optical image before coating. Data can be prepared and replaced with the difference. In this case, it is not necessary to take the correspondence between the optical image before coating and the optical image after coating. (Alternatively, there is a view that it is necessary to take a correspondence only for the abnormal microneedle array, but the abnormal microneedle array should be excluded from the subsequent steps including the application of the drug. This can also avoid this problem.)
(Correspondence Relationship Identification Unit 66)

On the other hand, in order to calculate the application amount more accurately, it is necessary to take a correspondence relationship between each microneedle array in an optical image captured before and after application. That is, it is necessary to accurately grasp which of the plurality of microneedle arrays included in the optical image after application corresponds to each of the microneedle arrays included in the optical image after application. Therefore, the control unit 60 includes a correspondence relationship specifying unit 66 for specifying the correspondence relationship. Specifically, as the correspondence specifying unit 66, the first optical image obtained by imaging the microneedle array before application of the drug and the second optical image obtained by imaging the microneedle array after application are associated with 1: 1. This mechanism is provided.
(Identification of microneedle array)
(Identification information)

  As an example, a unique identification number is assigned to the microneedle array, and this identification number is read at the time of imaging, whereby the microneedle array captured as an optical image is specified. In this case, in order to record identification information unique to the microneedle array, for example, as shown in FIG. 75, a symbol SMB such as a barcode or a two-dimensional code is printed or stamped on the microneedle array. The symbol SMB is read by dedicated optical reading means, and this identification information is associated with the picked-up optical image. Preferably, by recording identification information in the image data of the optical image, it is possible to easily identify which microneedle array the optical image is taken from, the first optical image, the second optical image, Is also easy to associate. As the symbol SMB for recording such identification information, a symbol suitable for miniaturization such as a micro QR code (product name) can be preferably used. Further, in the example of FIG. 75, the symbol SMB is recorded on the side surface of the substrate SUB. However, the recording position is not limited to this and may be the upper surface of the substrate. In these examples, the optical reading means, a decoder connected thereto or a decoder incorporated therein corresponds to the correspondence specifying unit 66.

  Further, the symbol may be read by taking an optical image. That is, when an optical image is captured, the symbol can also be decoded by performing image processing on the captured optical image by setting the posture in which the symbol can be read in advance. With this method, it is possible to save the trouble of separately providing an optical reading means for optically reading symbols or performing scanning by the optical reading means. In this case, a decoding unit that decodes an optical image by image processing corresponds to the correspondence specifying unit 66.

  Further, the identification information is not limited to optical reading, and other wireless reading methods, for example, a wireless tag such as an IC tag or RFID can be embedded in the microneedle array, and the identification information can be given to each microneedle array. In particular, when the microneedle array is small in size, there are problems such as providing a space for marking the symbols or reducing the reading accuracy due to the symbols becoming small, and these can be solved by using a wireless tag. In this case, the wireless tag reader corresponds to the correspondence relationship specifying unit 66.

In this way, by reading the identification information given to the microneedle array by the correspondence specifying unit 66, the correspondence between the first optical image and the second optical image obtained by imaging the microneedle array before and after the application of the medicine is obtained. You can get it.
(Alignment)

  In extracting the difference amount, as a pre-processing, alignment is performed so that the microneedles are matched. Here, when the optical image which imaged the microneedle has image | photographed the microneedle with the same visual field, ie, the same angle, such position alignment becomes unnecessary. On the other hand, when microneedles are imaged at different angles, alignment is performed so that the contours (profiles) of the microneedles are matched. For example, an edge image indicating the profile of each microneedle is cut out from the first optical image, and scanning is performed so as to match the profile of the corresponding microneedle cut out from the second optical image by pattern search with rotation. It should be noted that, when performing such alignment, it is desirable that the cross-sections from which the profiles are acquired match as a premise. However, even if the cross sections of the profiles are different, it is possible to overlap the profiles by assuming that the cylindrical or conical microneedles are uniform. As a result, it is possible to extract the profile of the medicine applied to the microneedle from the difference amount. Thus, the correspondence relationship specifying unit 66 specifies not only the specification of the microneedle array but also the correspondence relationship of the microneedles on the microneedle array from which the correspondence relationship is obtained. The correspondence relationship between the microneedles is handled by the image processing unit 62 in the above example. In other words, the correspondence relationship specifying unit 66 may be configured by using different members for the member that specifies the correspondence relationship of the microneedle array and the member that specifies the correspondence relationship of the microneedle. Or you may comprise so that the specification of a microneedle array and the specification of a microneedle may be performed by one corresponding relationship specific | specification part. For example, the correspondence specifying unit is provided with a function for specifying the correspondence by image processing, or the posture of the microneedle array is uniquely determined by using a mechanical guide, for example, using a mechanical guide. In a configuration where microneedle arrays are aligned and imaged, the coordinate position of the microneedle array is fixed, so that the positional relationship can be easily specified (or the positional relationship need not be specified).

  In this way, it is possible to calculate an accurate difference amount for each microneedle by the correspondence specifying unit 66. As a result, it is possible to make a pass / fail judgment not only from a non-defective product / defective product based on a simple appearance inspection, but also from the viewpoint of accuracy of the amount of drug applied. Furthermore, it is possible to realize process management for calculating the amount of chemical solution applied to non-defective products. Especially for the inspection of the applied amount of the drug, conventionally, it was only possible to measure the amount after removing the drug applied to the microneedles by the sampling inspection, and the entire amount could not be inspected as a destructive inspection. According to the above method, the destructive inspection becomes unnecessary, and the entire amount inspection can be realized.

  The visual inspection apparatus, visual inspection method, visual inspection program, computer-readable storage medium, and recorded device according to the present invention are suitable for visual inspection of inspection objects having a plurality of protrusions on the surface, such as a microneedle array. Available to:

DESCRIPTION OF SYMBOLS 100 ... Appearance inspection apparatus 200 ... Optical imaging device 1 ... Imaging part 3 ... Inclination mechanism 4 ... Second optical axis inclination mechanism 6 ... Conveyance part 7 ... Trigger generation part 8 ... Display part 9 ... Operation part 10 ... First imaging part DESCRIPTION OF SYMBOLS 11 ... 1st image pick-up element 12 ... 1st image formation lens 20 ... 2nd image pick-up part 21 ... 2nd image pick-up element 22 ... 2nd image pick-up lens 30 ... 3rd image pick-up part 31 ... 1st image pick-up element inclination mechanism 32 ... 1st Lens tilt mechanism 33 ... Tube 34 ... Image sensor tilt knob 35 ... Tube tilt mechanism 41 ... Second image sensor tilt mechanism 42 ... Second lens tilt mechanism 50 ... Illumination unit 51 ... First illumination unit 52 ... Second illumination unit 53 ... 3rd illumination part 55 ... Illumination inclination mechanism 60 ... Control part 61 ... Imaging timing control part 62 ... Image processing part; 62a ... Pre-processing part; 62b ... Feature-value extraction part; 62c ... Feature compression part; 62d ... Classifier 63 ... Edge image generation unit 64 ... Difference extraction unit 65 ... Inspection result Output unit 66 ... Corresponding relationship specifying unit 67 ... Illumination light control unit MNA, MNA '... Microneedle array MNAG ... Cross-needle arrangement microneedle array MNAO ... Offset arrangement microneedle array MNAR ... Circular outer shape of microneedle array MN ... Microneedle MN '... Microneedle array LDP including chemical solution ... Chemical solution CMN ... Conical microneedle SUB ... Substrate MNP ... Inspection area FA1, FA2 ... Focusing area LNP ... Main plane ISP of imaging lens ... Imaging element Light receiving surface STG ... rotary stage XYS ... XY stage THS ... θ stage CNV, CNV1, CNV2 ... transport conveyor PIN ... pin GID ... guide plate GSF ... guide surface OA ... optical axis OA1 ... first optical axis; OA2 ... second optical axis; OA3 ... third optical axis alpha _I1 ... first imaging element horizontal tilt ; Alpha _L1 ... first lens horizontal tilt angle alpha _I2 ... second imaging element horizontal tilt angle; alpha _L2 ... second lens horizontal tilt angle alpha _OA1 ... first optical axis horizontal tilt angle alpha _OA2 ... second optical axis horizontal tilt angle α _OA3 … Third optical axis horizontal tilt angle α _{OA1 + OA2} … Horizontal tilt angle formed by the first and second optical axes α ′… Illumination-optical axis horizontal tilt angle α _OA1-MN … Optical axis _-MN horizontal tilt Angle α _Y-OA1 … Y-OA1 Horizontal tilt angle θ _OA1 … First optical axis vertical tilt angle θ _OA2 … Second optical axis vertical tilt angle θ _L1 … First lens vertical tilt angle θ _L2 … Second lens vertical tilt angle θ _I1 ... first imaging inclination angle θ _I2 ... second imaging inclination angle OFS ... orientation flat surface SMB ... symbol CAX ... central axis α _CAX ... inclination angle LS between the central axis and the substrate ... illumination light; α _LS ... illumination horizontal Inclination angle: θ _LS ... Illumination vertical inclination angles OPI, OPI ', OPI "... Optical image EDI, EDI', EDI" ... Edge image

Claims (35)

Imaging an inspection target region of an inspection target in which three-dimensional projections are arranged in a plurality of rows on an XY plane defined by the X axis and the Y axis intersecting with this at an angle β (0 <β ≦ 90 °) An appearance inspection apparatus for performing an appearance inspection,
A first imaging device for imaging an optical image of an inspection object;
A first imaging lens disposed on the first optical axis of the first image sensor that images the inspection object;
The first optical axis horizontal inclination angle α _OA1 (0 <α _OA1 <90 °) that is inclined with respect to the row direction of the projections in plan view, and the plane of the inspection target region in side view. A first optical axis tilt mechanism for adjusting a first optical axis vertical tilt angle θ _OA1 (0 <θ _OA1 <90 °) tilted with respect to the first optical axis;
With
Of the plurality of protrusions, the average interval between the protrusions in the X-axis direction is L _x , the average interval in the Y-axis direction is L _y , and the height direction of each protrusion is the inspection target region to be subjected to visual inspection. When the maximum height is H and the maximum thickness of each protrusion is W, the first optical axis horizontal tilt angle α _{OA1 is set} to −W <m · L _x · sin βcos α _OA1 −sin α by the first optical axis tilt mechanism. _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1: m, n is an arbitrary integer)
When the range is set to satisfy the first optical axis tilt mechanism θ _OA1 with the first optical axis tilt mechanism.
(Condition 2)
Appearance inspection device set to a range that satisfies The appearance inspection apparatus according to claim 1,
When the first optical axis horizontal tilt angle α _OA1 is set in a range not satisfying the conditional expression 1, the first optical axis tilting mechanism is not _limited to the conditional expression 2, and is arbitrary first optical axis vertical inclination Appearance inspection device that can be set to angle θ _OA1 . The appearance inspection apparatus according to claim 1,
When the tip of the protrusion is tapered, the conditional expression 2
Appearance inspection device. It is an external appearance inspection apparatus as described in any one of Claims 1-3,
(Condition 3)
For m and n satisfying
−W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 4)
_So that the first optical axis horizontal tilt angle α _OA1 that satisfies
An appearance inspection apparatus in which the first optical axis horizontal inclination angle α _OA1 is set to a fixed value by the first optical axis inclination mechanism. It is an external appearance inspection apparatus as described in any one of Claims 1-4,
An appearance inspection apparatus in which H is the average height of each protrusion and W is the average thickness. It is an external appearance inspection apparatus as described in any one of Claims 1-5,
The first optical axis tilt mechanism is
A first lens vertical tilt mechanism for adjusting a first lens vertical tilt angle θ _L1 formed by a main plane including the main point of the first imaging lens and a region to be inspected;
A first imaging vertical tilt mechanism for adjusting a first imaging tilt angle θ _I1 formed by the light receiving surface of the first image sensor and the inspection target region;
With
In the first lens vertical tilt mechanism, the inspection target area, the main plane of the first imaging lens, and the extended lines of the light receiving surface of the first imaging element intersect at one point according to the Scheinproof principle. The first lens vertical inclination angle θ _L1 is adjusted to a different angle by the first imaging vertical inclination mechanism, and the first imaging inclination angle θ _I1 is adjusted to a different angle. An appearance inspection apparatus capable of imaging with the first image sensor. An appearance inspection device for performing an appearance inspection by imaging a region to be inspected of an inspection object formed by arranging three-dimensional projections in a plurality of rows,
A first imaging device for imaging an optical image of an inspection object;
A first imaging lens disposed on the first optical axis of the first image sensor that images the inspection object;
For the main plane including the principal point of the first imaging lens,
First lens vertical tilt angle θ _{L1 with} respect to the inspection target area,
For the light receiving surface of the first image sensor,
First imaging tilt angle θ _{I1 with} respect to the inspection target area,
A first optical axis tilt mechanism that can be adjusted by tilting the first imaging element and / or the first imaging lens relative to the first optical axis;
With
In the first optical axis tilting mechanism, the inspection target region of the inspection target, the main plane of the first imaging lens, and each extension line of the light receiving surface of the first imaging element are in one point according to the Scheinproof principle. An appearance inspection apparatus in which the first lens vertical inclination angle θ _L1 and the first imaging inclination angle θ _I1 can be adjusted to different angles so as to intersect each other. It is an external appearance inspection apparatus as described in any one of Claims 1-7,
The first optical axis tilt mechanism is
The first lens vertical inclination angle θ _{L1 is set} to 26 ° to 60 °,
The first imaging inclination angle θ _I1 is 48 ° to 70 °,
Appearance inspection device that is individually set. It is an external appearance inspection apparatus as described in any one of Claims 1-8,
The first optical axis tilt mechanism is
For the main plane including the principal point of the first imaging lens,
The first lens vertical tilt angle θ _L1 with respect to the inspection target area,
A first lens horizontal tilt angle α _L1 (0 <α _L1 <90 °) in which the first optical axis of the first imaging lens is tilted with respect to the row direction of the protrusions in a plan view can be adjusted. A lens tilt mechanism;
For the light receiving surface of the first image sensor,
First imaging tilt angle θ _I1 with respect to the inspection target area,
The first image sensor horizontal inclination angle α _I1 (0 <α _L1 <90 °) in which the first optical axis of the first image sensor is tilted with respect to the row direction of the protrusions in a plan view is adjustable. An image sensor tilt mechanism;
An appearance inspection apparatus comprising: The appearance inspection device according to claim 6 or 9,
The first optical axis tilt mechanism includes a barrel in which the first imaging lens and the first imaging element are arranged on a common first optical axis inside a cylindrical shape,
In the lens barrel, the first imaging lens is fixed, and the first imaging element is supported so as to be rotatable about a rotation axis,
The first image sensor tilt mechanism is capable of adjusting the first image tilt angle θ _I1 by rotating the first image sensor in the lens barrel.
The first lens tilting mechanism is a lens barrel tilting mechanism for tilting the lens barrel, and the first lens vertical tilt angle θ _L1 of the first imaging lens fixed in the lens barrel can be adjusted. Inspection device. The appearance inspection apparatus according to any one of claims 1 to 10, further comprising:
An illumination unit for illuminating the inspection object with illumination light;
The illumination horizontal inclination angle α _{LS in} which the traveling direction of the illumination light of the illumination unit is inclined with respect to the direction of the first optical axis in plan view, and the illumination vertical inclination angle θ in the vertical plane of the illumination light of the illumination unit Appearance inspection device with illumination tilt mechanism that can adjust _LS . The appearance inspection apparatus according to claim 11,
An appearance inspection apparatus in which the illumination vertical inclination angle θ _LS is set to 30 ° or less by the illumination inclination mechanism. The appearance inspection apparatus according to claim 11 or 12,
An appearance inspection apparatus in which the illumination horizontal inclination angle α _LS is set to 0 ° to 90 ° by the illumination inclination mechanism. The appearance inspection apparatus according to any one of claims 1 to 13, further comprising:
A second imaging device for imaging an optical image of the inspection object;
A second imaging lens disposed on the second optical axis of the second image sensor for imaging the inspection object;
Each of the main plane including the main point of the second imaging lens and the light receiving surface of the second image sensor,
The second lens vertical tilt angle θ _L2 and the second imaging tilt angle θ _I2 with respect to the inspection target area can be adjusted,
And the second optical axis tilt mechanism capable of adjusting the second optical axis horizontal tilt angle α _{OA2 in} which the second optical axis of the second image sensor in the plan view is tilted with respect to the column direction of the protrusions;
An appearance inspection apparatus comprising: The appearance inspection apparatus according to claim 14,
The visual inspection apparatus in which the second image sensor is installed at a second optical axis horizontal inclination angle α _OA2 that is different from the first optical axis horizontal inclination angle α _OA1 . The appearance inspection apparatus according to claim 14 or 15,
An appearance inspection apparatus in which a horizontal inclination angle α _{OA1 + OA2} formed by the second image sensor and the first image sensor is _set to 45 ° to 135 °. The visual inspection apparatus according to claim 1, further comprising:
An image processing unit for performing image processing on an optical image and determining the presence or absence of an abnormality,
A transport unit for transporting the inspection object onto the line,
The image processing unit is an appearance inspection apparatus configured to perform an appearance inspection on an inspection object conveyed by the conveyance unit. The appearance inspection apparatus according to claim 17, further comprising:
An inspection object posture guide mechanism for positioning the inspection object conveyed by the conveyance unit in a predetermined posture;
An appearance inspection apparatus configured to capture an optical image of an inspection object positioned by the inspection object posture guide mechanism with the first imaging element. The appearance inspection apparatus according to claim 17 or 18,
The image processing unit includes an edge image generation unit that generates an edge image obtained by extracting an edge from an optical image;
The appearance inspection apparatus configured to determine whether the image processing unit is normal or abnormal by comparing with a reference form registered in advance based on the edge image generated by the edge image generation unit. It is an external appearance inspection apparatus as described in any one of Claims 17-19,
The image processing unit is configured to determine whether or not a predetermined surface treatment in which the shape of the inspection target changes before and after the processing has been normally performed,
The image processing unit includes a difference extraction unit for extracting a difference with respect to the optical image of the inspection object captured before and after the processing,
An appearance inspection apparatus configured to determine whether or not a predetermined surface treatment has been normally performed based on a difference amount extracted by the difference extraction unit. The appearance inspection apparatus according to claim 20,
The predetermined surface treatment is a coating treatment for applying a coating material to an inspection object,
The difference extraction unit is configured to calculate the coating amount of the covering material based on the difference amount obtained by extracting the difference with respect to the optical image of the inspection object captured before and after the covering process. Appearance inspection device. The appearance inspection apparatus according to claim 20, further comprising:
A correspondence relationship between a plurality of first optical images obtained by imaging a plurality of inspection objects and a plurality of second optical images obtained after performing a predetermined surface treatment on the plurality of inspection objects is specified. It has a correspondence identification part,
The difference extracting unit is configured to extract a difference amount by selecting a first optical image of one inspection object and a second optical image corresponding to the first optical image according to the correspondence relationship specifying unit. Appearance inspection device. The appearance inspection apparatus according to any one of claims 17 to 22, further comprising:
A trigger generation unit for generating a trigger signal by detecting that the inspection object has been conveyed by the conveyance unit and has reached a predetermined position;
An external appearance comprising an imaging timing control unit that is connected to the trigger generation unit and controls the timing at which the first imaging element images the inspection object based on the timing at which the trigger signal generated by the trigger generation unit is received. Inspection device. It is an external appearance inspection apparatus as described in any one of Claims 1-23,
An appearance inspection apparatus in which an inspection object is made of a translucent material. It is an external appearance inspection apparatus as described in any one of Claims 1-24,
An appearance inspection apparatus in which the inspection object is a microneedle array. An appearance inspection apparatus according to claim 25,
An appearance inspection apparatus in which the microneedle array is made of a biodegradable resin. A plurality of microneedles arranged in a plurality of rows on an XY plane defined by a plurality of X-axis and a Y-axis intersecting at an angle β (0 <β ≦ 90 °) with a conical tip. An appearance inspection apparatus for imaging an array and performing an appearance inspection of an inspection target region including at least a tip portion of each microneedle,
A first imaging device for capturing an optical image of the microneedle array;
A first imaging lens disposed on the first optical axis of the first image sensor that images the microneedle array;
The first lens vertical inclination angle θ _L1 formed by the main plane including the principal point of the first imaging lens and the inspection target area, and the first imaging inclination angle θ formed by the light receiving surface of the first image sensor and the inspection target area _I1
A tilting mechanism for adjusting
An illumination unit for irradiating illumination light to the microneedle array imaged by the first image sensor;
An image processing unit for performing image processing on the optical image captured by the first image sensor and determining the presence or absence of abnormality;
A transport unit for transporting the microneedle array on the line,
The tilt mechanism is configured such that the inspection target region of the microneedle array, the main plane of the first imaging lens, and the light receiving surface of the first image sensor intersect at one point, the first lens vertical tilt angle θ _L1 The first imaging tilt angle θ _I1 is adjusted to a different angle, and an optical image focused at each position in the inspection target area can be captured according to the principle of Scheinproof,
The image processing unit is configured to perform an in-line visual inspection on the focused optical image obtained by imaging the microneedle array being conveyed by the conveyance unit. The appearance inspection apparatus according to claim 27,
Of the plurality of microneedles, the average interval between microneedles in the X-axis direction is L _x , the average interval in the Y-axis direction is L _y , and the maximum height of the region to be subjected to appearance inspection in the height direction of each microneedle When the thickness is H and the maximum thickness of each microneedle is W,
With the first lens tilt mechanism, the first optical axis horizontal tilt angle α _OA1 is given by the following formula: −W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional formula 1 )
(M and n are arbitrary integers)
Set to a range that satisfies
The first lens vertical tilt angle θ _L1 with the first lens tilt mechanism,
With the first imaging element tilt mechanism, the first imaging tilt angle θ _I1 and the first optical axis vertical tilt angle θ _OA1 are respectively
(Condition 2)
Appearance inspection device set to a range that satisfies Imaging an inspection target region of an inspection target in which three-dimensional projections are arranged in a plurality of rows on an XY plane defined by the X axis and the Y axis intersecting with this at an angle β (0 <β ≦ 90 °) An appearance inspection method for performing an appearance inspection,
Capturing an optical image of the inspection object with the first image sensor;
A step of performing an appearance inspection by image processing on the captured optical image;
Including
A first image sensor that captures an optical image of an inspection object,
With respect to the light receiving surface of the first imaging element, the first imaging inclination angle θ _I1 with respect to the inspection target region,
First imaging for adjusting a first imaging element horizontal inclination angle α _I1 (0 <α _I1 <90 °) in which the first optical axis of the first imaging element is inclined with respect to the row direction of the protrusions in plan view. An element tilting mechanism;
A first imaging lens disposed on a first optical axis of the first image sensor for imaging an inspection object;
With respect to the main plane including the main point of the first imaging lens, the first lens vertical inclination angle θ _L1 with respect to the inspection target region,
A first lens that adjusts a first lens horizontal inclination angle α _L1 (0 <α _L1 <90 °) in which the first optical axis of the first imaging lens is inclined with respect to the row direction of the protrusions in plan view. With the tilt mechanism,
Of the plurality of protrusions, the average distance between protrusions in the X-axis direction is L _x , the average distance in the Y-axis direction is L _y , and the maximum height of the area to be subjected to appearance inspection in the height direction of each protrusion When the thickness is H and the maximum thickness of each protrusion is W,
The first optical axis horizontal inclination angle α _OA1 is expressed by the following equation: −W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1)
(M and n are arbitrary integers)
They met, and said first lens perpendicular inclination angle theta _L1, the first imaging tilt angle theta _I1, the first light axis vertical skew angle theta _OA1 the following equations
(Condition 2)
Appearance inspection method set in a range that satisfies the above. Imaging an inspection target region of an inspection target in which three-dimensional projections are arranged in a plurality of rows on an XY plane defined by the X axis and the Y axis intersecting with this at an angle β (0 <β ≦ 90 °) An appearance inspection method for performing an appearance inspection,
A first image sensor that captures an optical image of an inspection object,
With respect to the light receiving surface of the first imaging element, the first imaging inclination angle θ _I1 with respect to the inspection target region,
The first image sensor horizontal inclination angle α _I1 (0 <α _I1 <90 °) obtained by inclining the first optical axis of the first image sensor with respect to the row direction of the protrusions in plan view is tilted with the first image sensor. While adjusting with the mechanism,
A first imaging lens disposed on a first optical axis of the first image sensor for imaging an inspection object;
With respect to the main plane including the main point of the first imaging lens, the first lens vertical inclination angle θ _L1 with respect to the inspection target region,
The first lens tilt mechanism is a first lens horizontal tilt angle α _L1 (0 <α _L1 <90 °) obtained by tilting the first optical axis of the first imaging lens with respect to the row direction of the protrusions in plan view. Adjusting in step,
Including
Of the plurality of protrusions, the average distance between protrusions in the X-axis direction is L _x , the average distance in the Y-axis direction is L _y , and the maximum height of the area to be subjected to appearance inspection in the height direction of each protrusion When the thickness is H and the maximum thickness of each protrusion is W,
The first optical axis horizontal inclination angle α _OA1 is expressed by the following equation: −W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1)
(M and n are arbitrary integers)
When set to a range that satisfies
The first lens vertical tilt angle θ _L1 with the first lens tilt mechanism,
With the first imaging element tilt mechanism, the first imaging tilt angle θ _I1 and the first optical axis vertical tilt angle θ _OA1 are respectively
(Condition 2)
Appearance inspection method set in a range that satisfies the above. A first imaging device for imaging an optical image of an inspection object;
A first imaging lens disposed on the first optical axis of the first image sensor that images the inspection object;
An inclination mechanism capable of adjusting a relative inclination angle of the first imaging element and the first imaging lens on the first optical axis;
Using the visual inspection apparatus, the three-dimensional projection is imaged on the inspection target region of the inspection target formed by arranging in a plurality of rows on the XY plane defined by the X axis and the Y axis intersecting therewith. An appearance inspection method for performing an appearance inspection,
The tilting mechanism adjusts the tilt angle so that the inspection target area of the inspection target object, the main plane of the first imaging lens, and the light receiving surface of the first imaging element intersect at a single point. Imaging the first optical image of the inspection object focused at each position of the inspection object area according to the principle of Scheinproof with the first imaging element;
Performing a predetermined surface treatment on the inspection object;
Similarly, in accordance with the principle of Scheinproof, the step of capturing a second optical image focused on each position of the inspection target area of the inspection target after the surface treatment;
A step of extracting a difference from the difference extraction unit with respect to the first optical image and the second optical image, and determining whether or not a predetermined surface treatment has been normally performed based on the obtained difference amount. Inspection method. An object to be inspected in which three-dimensional protrusions are arranged in a plurality of rows in the y-axis direction on the XY plane defined by the X-axis and the Y-axis that intersects this with an angle β (0 <β ≦ 90 °). An appearance inspection program for performing an appearance inspection by imaging a region to be inspected,
A function of capturing an optical image of an inspection object with the first image sensor;
A function of performing an appearance inspection by image processing on the captured optical image;
Is realized on a computer,
A first image sensor that captures an optical image of an inspection object,
With respect to the light receiving surface of the first imaging element, the first imaging inclination angle θ _I1 with respect to the inspection target region,
First imaging for adjusting a first imaging element horizontal inclination angle α _I1 (0 <α _I1 <90 °) in which the first optical axis of the first imaging element is inclined with respect to the row direction of the protrusions in plan view. An element tilting mechanism;
A first imaging lens disposed on a first optical axis of the first image sensor for imaging an inspection object;
With respect to the main plane including the main point of the first imaging lens, the first lens vertical inclination angle θ _L1 with respect to the inspection target region,
A first lens that adjusts a first lens horizontal inclination angle α _L1 (0 <α _L1 <90 °) in which the first optical axis of the first imaging lens is inclined with respect to the row direction of the protrusions in plan view. With the tilt mechanism,
Of the plurality of protrusions, the average distance between protrusions in the X-axis direction is L _x , the average distance in the Y-axis direction is L _y , and the maximum height of the area to be subjected to appearance inspection in the height direction of each protrusion When the thickness is H and the maximum thickness of each protrusion is W,
The first optical axis horizontal inclination angle α _OA1 is expressed by the following equation: −W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1)
(M and n are arbitrary integers)
They met, and said first lens perpendicular inclination angle theta _L1, the first imaging tilt angle theta _I1, the first light axis vertical skew angle theta _OA1 the following equations
(Condition 2)
Appearance inspection program set to a range that satisfies Imaging an inspection target region of an inspection target in which three-dimensional projections are arranged in a plurality of rows on an XY plane defined by the X axis and the Y axis intersecting with this at an angle β (0 <β ≦ 90 °) A visual inspection program for performing visual inspection,
A first image sensor that captures an optical image of an inspection object,
With respect to the light receiving surface of the first imaging element, the first imaging inclination angle θ _I1 with respect to the inspection target region,
The first image sensor horizontal inclination angle α _I1 (0 <α _I1 <90 °) obtained by inclining the first optical axis of the first image sensor with respect to the row direction of the protrusions in plan view is tilted with the first image sensor. While adjusting with the mechanism,
A first imaging lens disposed on a first optical axis of the first image sensor for imaging an inspection object;
With respect to the main plane including the main point of the first imaging lens, the first lens vertical inclination angle θ _L1 with respect to the inspection target region,
The first lens tilt mechanism is a first lens horizontal tilt angle α _L1 (0 <α _L1 <90 °) obtained by tilting the first optical axis of the first imaging lens with respect to the row direction of the protrusions in plan view. Make the computer adjust the function with
Of the plurality of protrusions, the average distance between protrusions in the X-axis direction is L _x , the average distance in the Y-axis direction is L _y , and the maximum height of the area to be subjected to appearance inspection in the height direction of each protrusion When the thickness is H and the maximum thickness of each protrusion is W,
The first optical axis horizontal inclination angle α _OA1 is expressed by the following equation: −W <m · L _x · sin βcos α _OA1 −sin α _OA1 (m · L _x · cos β + n · L _y ) <W (conditional expression 1)
(M and n are arbitrary integers)
Set to a range that satisfies
The first lens vertical tilt angle θ _L1 with the first lens tilt mechanism,
With the first imaging element tilt mechanism, the first imaging tilt angle θ _I1 and the first optical axis vertical tilt angle θ _OA1 are respectively
(Condition 2)
Appearance inspection program set to a range that satisfies A first imaging device for imaging an optical image of an inspection object;
A first imaging lens disposed on the first optical axis of the first image sensor that images the inspection object;
An inclination mechanism capable of adjusting a relative inclination angle of the first imaging element and the first imaging lens on the first optical axis;
Using the visual inspection apparatus, the three-dimensional projection is imaged on the inspection target region of the inspection target formed by arranging in a plurality of rows on the XY plane defined by the X axis and the Y axis intersecting therewith. An appearance inspection program for performing an appearance inspection,
The tilting mechanism adjusts the tilt angle so that the inspection target area of the inspection target object, the main plane of the first imaging lens, and the light receiving surface of the first imaging element intersect at a single point. A first optical image of the inspection object focused at each position of the inspection object area according to the principle of Scheinproof,
A function of performing a predetermined surface treatment on the inspection object;
Similarly, according to the principle of Scheinproof, the function of imaging the second optical image focused on each position of the inspection target area of the inspection target after the surface treatment,
The computer has a function of extracting a difference from the first optical image and the second optical image by a difference extraction unit and determining whether or not a predetermined surface treatment has been normally performed based on the obtained difference amount. Visual inspection program to be realized.   A computer-readable recording medium or a recorded device on which the program according to any one of claims 32 to 34 is recorded.