JP2017155797A - Seal ring and pump - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a seal ring capable of suppressing defective operation of a pump by corrosive products caused by water-soluble anion included in a carbon material forming a sliding member, and degradation of characteristic in storage of the seal ring in an assembled state, and reducing frequency of replacement of the whole seal ring, and to provide a pump.SOLUTION: A seal ring includes an annular supporting member 21 fixed to a fixing portion 13 in a state of being kept into contact with a liquid film 28, and composed of a metallic material, an annular sliding member 24 supported by the supporting member 21, slidably kept into contact with a rotating shaft 11 rotating around an axis inside of the supporting member 21, and including a carbon material, and an impurity elution suppression layer 26 disposed on a part opposed to at least the supporting member 21 of the sliding member 24 and kept into contact with the liquid film 28.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a seal ring and a pump including the seal ring.

Generally, in a pump provided with a mechanical seal, a seal ring includes a metal support member and a sliding member that comes into contact with the support member via a liquid film.
Patent Document 1 discloses a technique capable of improving the mechanical strength of a sliding member by forming a silicon carbide film on the surface of the sliding member made of a carbon material.

Examples of the impurities contained in the carbon material include water-soluble anions (for example, Cl ⁻ , F ⁻ , SO ₄ ^2−, etc.). The amount of impurities contained in the carbon material varies depending on the raw material and the manufacturing method.

Japanese Patent Application Laid-Open No. 08-14400

  By the way, the seal ring is often stored in an assembled state in a factory. In this case, a contact is formed between the sliding member and a metal support member (for example, a retainer) when exposed to a carbon material and exposed to a flowing water environment in a humid atmosphere or after a pressure test for a long time. The support member may be corroded (rusting, local corrosion, etc.) due to water-soluble anions contained in the carbon material eluted in the liquid film.

In the technique of Patent Document 1, a silicon carbide film is provided on the surface of a sliding member made of carbon, but water-soluble impurities contained in carbon constituting the sliding member pass through the silicon carbide film to form a liquid film. There is a possibility of elution.
For this reason, when the water-soluble anion contained in the carbon is eluted into the liquid film, the support member may be corroded (rusting, local corrosion, etc.).
When such corrosion of the support member occurs, there is a risk that not only the sliding member that is a consumable item but also the support member that is not a consumable item must be replaced. In other words, the entire seal ring may have to be replaced.

  In view of this, the present invention relates to the malfunction of the pump due to corrosion products caused by water-soluble anions contained in the carbon material constituting the sliding member and the characteristics of the seal ring when the seal ring is stored in the assembled state. It is an object of the present invention to provide a seal ring and a pump that can suppress the lowering and can reduce the replacement frequency of the entire seal ring.

  In order to solve the above problems, according to a seal ring according to an aspect of the present invention, an annular support member made of a metal material and fixed to a fixing portion in contact with a liquid film, and supported by the support member An annular sliding member that is slidably in contact with a rotating shaft that rotates about an axis inside the supporting member and includes a carbon material, and at least the supporting member among the sliding members And an impurity elution suppression layer that is in contact with the liquid film, and the impurity elution suppression layer suppresses elution of water-soluble anions contained in the carbon material into the liquid film. It is characterized by doing.

According to the present invention, by providing the impurity elution suppression layer at least in the portion facing the support member of the sliding member, the water-soluble anion ( For example, elution of Cl ⁻ , F ⁻ , SO ₄ ²⁻ etc.) into the liquid film can be suppressed.
As a result, corrosion of the support member due to the water-soluble anion eluted in the liquid film can be suppressed, so that the pump malfunctions due to the water-soluble anion contained in the carbon material and the seal ring characteristics are deteriorated. Can be suppressed.
In addition, since the deterioration of the seal ring characteristics can be suppressed by replacing the consumable sliding member, the frequency of replacing the entire seal ring can be reduced and the cost of the existing seal ring can be reduced. Can be easily applied.

  Moreover, the seal ring which concerns on 1 aspect of the said invention WHEREIN: The said impurity elution suppression layer is provided in the surface of the said sliding member, and may contain at least 1 sort (s) among an inorganic coating layer and a plating layer.

As described above, when the impurity elution suppressing layer includes at least one of the inorganic coating layer and the plating layer, the liquid film of the water-soluble anion contained in the carbon material is stored when the seal ring is stored in the assembled state. Elution is suppressed.
As a result, corrosion of the support member due to the water-soluble anion eluted in the liquid film can be suppressed, and therefore, when the seal ring is stored in the assembled state, it is caused by a corrosion product caused by the water-soluble anion contained in the carbon material. It is possible to suppress malfunction of the pump and deterioration of the seal ring characteristics.

  Moreover, the seal ring which concerns on 1 aspect of the said invention WHEREIN: The said impurity elution suppression layer may be a cation exchange membrane provided in the surface of the said sliding member.

Thus, since the impurity elution suppression layer is a cation exchange membrane, the passage of the water-soluble anion, which is an anion, through the impurity elution suppression layer is suppressed, so that the liquid film of the water-soluble anion contained in the carbon material is obtained. Elution can be suppressed.
This makes it possible to suppress the corrosion of the support member during storage of the seal ring in an assembled state, so that the pump malfunctions due to corrosion products caused by water-soluble anions contained in the carbon material, and the seal ring The deterioration of characteristics can be suppressed.

  In the seal ring according to one aspect of the present invention, the sliding member is disposed on the sliding member main body and the surface of the sliding member main body, and the carbon material constituting the sliding member main body is used. A water-soluble anion reducing layer having a lower concentration of the water-soluble anion than a concentration of the water-soluble anion contained therein, and the impurity elution suppressing layer may be the water-soluble anion reducing layer.

Thus, when the impurity elution suppression layer is a water-soluble anion reducing layer, it is possible to reduce the amount of water-soluble anions eluted from the carbon material into the liquid film.
This makes it possible to suppress the corrosion of the support member during storage of the seal ring in an assembled state, so that the pump malfunctions due to corrosion products caused by water-soluble anions contained in the carbon material, and the seal ring The deterioration of characteristics can be suppressed.

  Moreover, the seal ring which concerns on 1 aspect of the said invention WHEREIN: It is provided in the part facing the said impurity elution suppression layer among the said support members, and may also contain the corrosion suppression layer which contacts the said liquid film.

Thus, in addition to the impurity elution suppression layer, the support member has a corrosion suppression layer provided at least in a portion facing the impurity elution suppression layer, so that the water-soluble anion contained in the carbon material is converted into the liquid film. Even when it is eluted, it is possible to suppress corrosion of the support member.
Thereby, at the time of storing the seal ring in the assembled state, it is possible to further suppress the malfunction of the pump due to the corrosion product caused by the water-soluble anion contained in the carbon material and the deterioration of the characteristics of the seal ring.
Further, the frequency of replacing the entire seal ring can be further reduced.

  In order to solve the above problems, the seal ring according to any one of claims 1 to 5 may be included.

  ADVANTAGE OF THE INVENTION According to this invention, at the time of storage of the seal ring in the assembled state, it is possible to suppress malfunction of the pump due to corrosion products caused by water-soluble anions contained in the carbon material and deterioration of the seal ring characteristics. In addition, the frequency of replacing the entire seal ring can be reduced, and it can be easily applied to existing seal rings at low cost.

  According to the present invention, at the time of storage of the seal ring, it is possible to suppress the malfunction of the pump and the deterioration of the characteristics of the seal ring due to the corrosion products caused by the water-soluble anions contained in the carbon material constituting the sliding member. The frequency of replacement of the entire seal ring can be reduced.

It is sectional drawing of the principal part of the pump which concerns on the 1st Embodiment of this invention. It is sectional drawing to which the part corresponding to the area | region B among the pumps shown in FIG. 1 was expanded. It is sectional drawing to which the part corresponding to the area | region C was expanded among the seal rings shown in FIG. It is sectional drawing of the principal part of the pump which concerns on the 1st modification of the 1st Embodiment of this invention. It is sectional drawing of the principal part of the pump which concerns on the 2nd modification of the 1st Embodiment of this invention. It is sectional drawing of the principal part of the pump which concerns on the 2nd Embodiment of this invention. It is sectional drawing of the principal part of the pump which concerns on the 3rd Embodiment of this invention. It is sectional drawing of the principal part of the pump which concerns on the 4th Embodiment of this invention.

  Embodiments to which the present invention is applied will be described below in detail with reference to the drawings. The drawings used in the following description are for explaining the configuration of the embodiment of the present invention, and the size, thickness, dimensions, etc. of each part shown in the drawings are the actual dimensional relations of the pump and the seal ring. May be different.

(First embodiment)
FIG. 1 is a cross-sectional view of a main part of a pump according to a first embodiment of the present invention. In FIG. 1, A is an axis of the rotating shaft 11 (hereinafter referred to as “axis A”), R is a fluid (hereinafter referred to as “fluid R”), and an arrow in the vicinity of the axis A indicates the direction of rotation of the rotating shaft 11. ing. Further, the Z direction shown in FIG. 1 indicates the extending direction of the rotating shaft 11 (the thrust direction of the rotating shaft 11).
FIG. 2 is an enlarged cross-sectional view of a portion corresponding to the region B in the pump shown in FIG. In FIG. 2, the same components as those in the structure shown in FIG.
FIG. 3 is an enlarged cross-sectional view of a portion corresponding to the region C in the seal ring shown in FIG. In FIG. 3, the same components as those of the structure shown in FIG.

1 to 3, the pump 10 according to the first embodiment includes a rotating shaft 11, a fixed portion 13, and a seal ring 14.
The rotating shaft 11 includes a rotating shaft main body 18 extending in the Z direction, and a ring-shaped extending portion 19 protruding outward from the rotating shaft main body 18. The extending portion 19 has a surface 19 a that faces the support member 21 via the sliding member 24 in the Z direction.
The rotating shaft 11 configured as described above is configured to be rotatable in the direction of the arrow shown in FIG.
The fixed portion 13 is provided outside the rotary shaft 11 with a space interposed between the fixed portion 13 and the rotary shaft 11.

The seal ring 14 includes a support member 21, a position regulating member 23, a sliding member 24, and an impurity elution suppression layer 26.
The support member 21 is an annular member and is made of a metal material (for example, stainless steel). The support member 21 is fixed inside the fixing portion 13. The support member 21 is disposed outside the rotary shaft main body 18 with a gap interposed between the support member 21 and the rotary shaft main body 18.

The support member 21 includes first to third surfaces 21a to 21c and a plurality of accommodating portions 21A.
The first surface 21a is a plane that surrounds the rotary shaft body 18, and faces the sliding member 24 in the thrust direction (Z direction). The first surface 21 a is in contact with the liquid film 28. The first surface 21a is disposed in the Z direction so as to face the sliding member 24 via a gap 29-1 in which the liquid film 28 is formed. The gap 29-1 is formed between an impurity elution suppression layer 26 provided on a first surface 24Aa (described later) of the sliding member 24 and the first surface 21a.
The liquid film 28 is a film-like liquid formed when the fluid R enters the narrow gap 29-1.

The second surface 21b is a curved surface that is orthogonal to the first surface 21a. The second surface 21b is disposed so as to surround the rotating shaft main body 18. The second surface 21 b is in contact with the liquid film 28.
The second surface 21b is arranged in the direction orthogonal to the axis A so as to face a later-described second surface 24Ab of the sliding member 24 through a gap 29-2 in which the liquid film 28 is formed. Has been. The gap 29-2 is formed between the impurity elution suppression layer 26 provided on the second surface 24Ab of the sliding member 24 and the second surface 21b.

  The third surface 21c is a plane that is disposed between the second surface 21b and the fixed portion 13 and is orthogonal to the Z direction. The third surface 21 c is disposed so as to surround the rotating shaft main body 18. The third surface 21 c is in contact with the fluid R located outside the extending portion 19.

The plurality of accommodating portions 21A are provided on the support member 21 constituting the first surface 21a. The plurality of accommodating portions 21 </ b> A are arranged at predetermined intervals in the radial direction of the rotating shaft 11.
The side surface of the accommodating portion 21A is internally threaded. Thereby, the accommodating portion 21 </ b> A functions as a female screw for screwing the position regulating member 23.

The position restricting member 23 extends in a predetermined direction and is made of a metal material (including stainless steel). The position regulating member 23 has a male screw portion 23A and a protruding portion 23B. The male screw portion 23A is screwed to the housing portion 21A that has been subjected to female threading. Thereby, the position regulating member 23 is fixed to the support member 21.
The protruding portion 23B protrudes in the direction (Z direction) from the support member 21 toward the sliding member 24 in a state where the position regulating member 23 is screwed to the accommodating portion 21A. A part of the projecting portion 23 </ b> B is disposed in a later-described recess 24 </ b> C of the sliding member 24.

The sliding member 24 is an annular member, and is disposed outside the rotating shaft 11 with a gap interposed therebetween. Specifically, the sliding member 24 is disposed in a space surrounded by the outer peripheral surface of the rotary shaft main body 18, the surface 19 a of the extending portion 19, the first surface 21 a, and the second surface 21 b. Has been.
The sliding member 24 includes an annular sliding member main body 24A, an annular projecting portion 24B, and a plurality of recesses 24C.

The sliding member main body 24A has a first surface 24Aa, a second surface 24Ab, and a third surface 24Ac.
The first surface 24Aa is disposed so as to face the first surface 21a of the support member 21 with the liquid film 28 interposed therebetween in the Z direction.
The second surface 24Ab is disposed so as to face the second surface 21b of the support member 21 with the liquid film 28 interposed therebetween in a direction orthogonal to the axis A.
The third surface 24Ac is a surface disposed on the opposite side of the first surface 24Aa. The third surface 24Ac is disposed so as to face the surface 19a of the extension part 19 in a state of being separated from the extension part 19 in the Z direction.

The protruding portion 24B is provided on the third surface 24Ac of the sliding member main body 24A, and is integrated with the sliding member main body 24A. The protruding portion 24B protrudes in the direction (Z direction) from the third surface 24Ac toward the surface 19a of the extending portion 19.
The protruding portion 24 </ b> B has a protruding surface 24 </ b> Ba that is a flat surface that comes into contact with the surface 19 a of the extending portion 19. Since the projecting portion 24 </ b> B is in contact with the extending portion 19, the fluid R is prevented from leaking inside the sliding member 24.

The concave portion 24C is provided in a portion of the sliding member main body 24A that faces the accommodating portion 21A. The plurality of recesses 24 </ b> C are arranged at predetermined intervals in the radial direction of the rotating shaft 11.
A part of the protrusion 23B is inserted into the recess 24C. The diameter of the recessed portion 24C is set to a size that allows the protruding portion 23B to be inserted and extracted. For this reason, the diameter of the concave portion 24C is configured to be slightly larger than the outer diameter of the protruding portion 23B.
The depth of the recess 24C (depth in the Z direction) is a depth at which a predetermined interval exists between the tip of the protrusion 23B and the bottom of the recess 24C in a state where the protrusion 23B is inserted into the recess 24C. ing. A fluid R is held between the tip of the protrusion 23B and the bottom of the recess 24C.

  The sliding member 24 configured as described above is supported by the support member 21 via the position restricting member 23 and is slidable with respect to the rotating shaft 11 that rotates about the axis A inside the support member 21. In contact.

  Further, the sliding member 24 is configured to include a carbon material. For this reason, for example, when the seal ring 14 is stored in a factory in an assembled state, the carbon constituting the sliding member 24 is continuously exposed to a flowing air environment in a humid atmosphere or after a pressure test. There is a possibility that water-soluble anions contained in the material may elute into the liquid film 28 or the fluid R.

  The carbon material includes not only the case where the sliding member 24 is made of only a carbon material but also the case where the sliding member 24 is made of a resin (for example, a phenolic resin or a furan resin) and a carbon material. There is a possibility that the water-soluble anion to be eluted into the liquid film 28.

The impurity elution suppression layer 26 is disposed on the first and second surfaces 24 </ b> Aa and 24 </ b> Ab facing the support member 21 among the plurality of surfaces of the sliding member 24. The impurity elution suppression layer 26 is in contact with the liquid film 28.
As the impurity elution suppressing layer 26, for example, a layer (single layer or multilayer) including at least one of an inorganic coating layer and a plating layer is used from the viewpoint of stability, affinity with carbon, and wear resistance. It is possible.

  As the inorganic coating layer, for example, a layer formed by a physical vapor deposition method such as a vacuum vapor deposition method, a sputtering method, an ion plating method, or a chemical vapor deposition method can be used.

As the inorganic coating layer, for example, a layer including at least one of a CrN layer, a TiN layer, a TiC layer, a TiCN layer, and a TiCrN layer can be used.
When an inorganic coating layer is used as the impurity elution suppression layer 26, the thickness M1 of the impurity elution suppression layer 26 can be appropriately set within a range of 0.1 to 50 μm, for example.

As the plating layer, for example, an electroless plating method or a plating layer formed by combining an electroless plating method and an electrolytic plating method can be used.
Examples of plating layers include Cr plating layer, Ni plating layer, Sn plating layer, Cd plating layer, Au plating layer, Ag plating layer, Ni-P plating layer, Cr-Ni plating layer, Ni-Sn plating layer, Ni It is possible to use a -B plating layer, a Ni-Co-P plating layer, or the like.
Moreover, since the plating layer containing Cr has high corrosion resistance, it is suitable as the impurity elution suppression layer 26.
When a plating layer is used as the impurity elution suppression layer 26, the thickness M1 of the impurity elution suppression layer 26 can be set as appropriate within a range of 1 to 500 μm, for example.

According to the seal ring 14 of the first embodiment, the impurities contacting the liquid film 28 on the first and second surfaces 24Aa and 24Ab of the sliding member 24 facing the support member 21 through the liquid film 28. By providing a layer containing at least one of an inorganic coating layer and a plating layer as the elution suppressing layer 26, the water solution contained in the carbon material constituting the sliding member 24 when the seal ring 14 is stored in an assembled state. It is possible to suppress elution of the functional anion (for example, Cl ⁻ , F ⁻ , SO ₄ ^2−, etc.) into the liquid film 28.
As a result, the corrosion of the support member 21 due to the water-soluble anions eluted in the liquid film 28 can be suppressed, so that the pump malfunctions due to the corrosion products caused by the water-soluble anions contained in the carbon material, and the seal ring 14 The deterioration of characteristics can be suppressed.

In addition, since the deterioration of the characteristics of the seal ring 14 can be suppressed by replacing the sliding member that is a consumable item, the frequency of replacing the entire seal ring 14 can be reduced, and the existing seal ring can be reduced. It can be easily applied at low cost.
Moreover, the pump 10 of 1st Embodiment can acquire the effect similar to the seal ring 14 mentioned above.

  FIG. 4 is a cross-sectional view of the main part of the pump according to the first modification of the first embodiment of the present invention. 4, the same components as those shown in FIGS. 1 to 3 are denoted by the same reference numerals.

The pump 35 according to the first modification of the first embodiment has the same configuration as the pump 10 except that a seal ring 36 is provided instead of the seal ring 14 that constitutes the pump 10 of the first embodiment. It is said that.
The seal ring 36 covers not only the first and second surfaces 24Aa and 24Ab of the sliding member 24, but also the inner surface of the recess 24C and the surface of the sliding member 24 in contact with the fluid R so as to cover the impurity elution suppression layer 26. Is different from the seal ring 14 of the first embodiment.

According to the seal ring 36 of the first modification of the first embodiment, the sliding that contacts the fluid R as well as the first and second surfaces 24Aa and 24Ab of the sliding member 24 as well as the inner surface of the recess 24C. By providing the impurity elution suppression layer 26 so as to cover the surface of the member 24, when the seal ring 36 is stored in the assembled state, the pump malfunctions due to corrosion products caused by water-soluble anions contained in the carbon material. In addition, the deterioration of the characteristics of the seal ring 14 can be further suppressed, and the frequency of replacing the entire seal ring 36 can be further reduced.
Moreover, the pump 35 of the 1st modification of 1st Embodiment can acquire the effect similar to the seal ring 36 mentioned above.

  FIG. 5 is a cross-sectional view of the main part of the pump according to the second modification of the first embodiment of the present invention. In FIG. 5, the same components as those in the structure shown in FIGS.

The pump 40 according to the second modification of the first embodiment has the same configuration as the pump 10 except that a seal ring 41 is provided instead of the seal ring 14 that constitutes the pump 10 of the first embodiment. It is said that.
The seal ring 41 includes the impurity elution suppressing layer 26 so as to cover not only the first and second surfaces 24Aa and 24Ab of the sliding member 24 but also the entire surface of the sliding member 24 (including the inner surface of the recess 24C). This is different from the seal ring 14 of the first embodiment.

According to the seal ring 41 of the second modification of the first embodiment, since the entire surface of the sliding member 24 is covered with the impurity elution suppressing layer 26, the impurity elution suppressing layer 26 is used as a protective layer for the sliding member 24. Can function.
Moreover, the seal ring 41 of the 2nd modification of 1st Embodiment can acquire the effect similar to the seal ring 36 of the 1st modification of 1st Embodiment demonstrated previously.
The pump 40 of the second modification of the first embodiment can obtain the same effect as the seal ring 41 described above.

(Second Embodiment)
FIG. 6 is a cross-sectional view of the main part of the pump according to the second embodiment of the present invention. In FIG. 6, the same components as those shown in FIGS.

Referring to FIG. 6, the pump 45 according to the second embodiment is a pump except that it has an impurity elution suppression layer 48 instead of the impurity elution suppression layer 26 constituting the pump 10 of the first embodiment. 10 is the same.
That is, the seal ring 46 of the second embodiment is different from the seal ring 14 of the first embodiment in that it has an impurity elution suppression layer 48 instead of the impurity elution suppression layer 26.

As the impurity elution suppression layer 48, for example, a cation exchange membrane can be used. As the cation exchange membrane, for example, a carboxylic acid type cation exchange membrane or a sulfonic acid type cation exchange membrane can be used.
The thickness of the cation exchange membrane can be appropriately set within a range of 1 to 1000 μm, for example.

According to the seal ring 46 of the second embodiment, since the impurity elution suppression layer 48 is a cation exchange membrane, passage of the water-soluble anion, which is an anion, through the impurity elution suppression layer 48 is suppressed, and the liquid film 28. It is possible to suppress elution of water-soluble anions contained in the carbon material.
Thereby, since the corrosion of the support member 21 can be suppressed during storage of the seal ring 46 in the assembled state, the malfunction of the pump due to the corrosion product caused by the water-soluble anion contained in the carbon material, and the seal The deterioration of the characteristics of the ring 46 can be suppressed.
Further, the seal ring 46 of the second embodiment can obtain the same effects as the seal ring 14 of the first embodiment described above.
The pump 45 of the second embodiment can obtain the same effect as the seal ring 46 of the second embodiment.

In the second embodiment, as an example, the cation exchange membrane as the impurity elution suppression layer 48 is provided only on the first and second surfaces 24Aa and 24Ab of the surface of the sliding member 24. As described above, the impurity elution suppression layer 48 may be provided also on the surface of the sliding member 24 in contact with the fluid R like the impurity elution suppression layer 26 shown in FIG.
In this case, the same effect as that of the seal ring 36 of the first modification of the first embodiment can be obtained.

  Further, as in the impurity elution suppression layer 26 shown in FIG. 5, the impurity elution suppression layer 48 may be provided so as to cover the entire surface of the sliding member 24 (including the inner surface of the recess 24 </ b> C). In this case, the same effect as that of the seal ring 41 of the second modification of the first embodiment can be obtained.

(Third embodiment)
FIG. 7 is a cross-sectional view of a main part of a pump according to the third embodiment of the present invention. In FIG. 7, the same components as those shown in FIGS.

Referring to FIG. 7, the pump 50 according to the third embodiment has a sliding member 53 instead of the sliding member 24 and the impurity elution suppressing layer 26 constituting the pump 10 of the first embodiment. Other than that, the configuration is the same as that of the pump 10.
That is, the seal ring 51 of the third embodiment is different from the seal ring 14 of the first embodiment in that it has a sliding member 53 instead of the sliding member 24 and the impurity elution suppressing layer 26.

The entire sliding member 53 includes a carbon material, and includes a first surface 53a, a second surface 53b, a sliding member main body 54, and a water-soluble anion reducing layer 55. .
The water-soluble anion reducing layer 55 is disposed so as to cover the first and second surfaces 54 a and 54 b which are the surfaces of the sliding member main body 54. The water-soluble anion reducing layer 55 is a layer in which the concentration of the water-soluble anion is lower than the concentration of the water-soluble anion contained in the carbon material constituting the sliding member main body 54.

The water-soluble anion reducing layer 55 has a first surface 55a and a second surface 55b. The first surface 55 a constitutes the first surface 53 a of the sliding member 53. The second surface 55 b constitutes the second surface 53 b of the sliding member 53. The first and second surfaces 55 a and 55 b are in contact with the liquid surface 28.
The first surface 55 a faces the first surface 21 a of the support member 21 with the liquid level 28 interposed therebetween. The second surface 55b faces the second surface 21b of the support member via the liquid level 28.

The water-soluble anion-reducing layer 55 includes, for example, a carbon material, and the sliding member 53 before assembly is immersed in pure water at a high temperature (for example, a predetermined temperature in the range of 100 to 360 ° C.) to thereby slide the sliding member 53. It is possible to form the first and second surfaces 53a and 53b, which are the surfaces of the first and second surfaces.
In this case, a batch type processing apparatus (for example, autoclave) may be used, or a circulation type processing apparatus (for example, autoclave) is used to supplement the water-soluble anion with a cation exchange resin. May be.

By this cooking process, the water-soluble anion contained in the carbon material on the first and second surfaces 53a, 53b side of the sliding member 53 that becomes the water-soluble anion reducing layer 55 is dissolved in pure water, thereby sliding. The concentration of the water-soluble anion is lower than the concentration of the water-soluble anion contained in the carbon material constituting the member main body 54.
When the concentration of the water-soluble anion contained in the carbon material (water-soluble anion reducing layer 55) before the cooking process is 0.01% or more, the concentration of the water-soluble anion reducing layer 55 after the cooking process is, for example, 0.01. % Or less.
Moreover, the thickness of the water-soluble anion reducing layer 55 can be appropriately set, for example, at 1000 to 5000 μm or more. The water-soluble anion reducing layer 55 functions as the impurity elution suppressing layer 56.

  In addition, in the above-mentioned cooking process, when the material for the sliding member 53 includes a resin (for example, a phenolic resin or a furan resin) that enhances strength and airtightness in addition to the carbon material, the resin It is advisable to adjust the heating temperature of the pure water so that it is not higher than the heat resistant temperature.

According to the seal ring 51 of the third embodiment, since the impurity elution suppressing layer 56 is the water-soluble anion reducing layer 55, the water-soluble anion reducing layer 55 constituting the surface of the sliding member 53 is changed to the liquid film 28. It becomes possible to reduce the amount of the water-soluble anion to elute.
As a result, since the corrosion of the support member 21 can be suppressed during storage of the seal ring 51 in the assembled state, the malfunction of the pump due to the corrosion products caused by the water-soluble anions contained in the carbon material can be reduced. The deterioration of the characteristics of the ring 51 can be suppressed.
Further, the seal ring 51 of the third embodiment can obtain the same effect as the seal ring 14 of the first embodiment described above.
The pump 50 of the third embodiment can obtain the same effects as the seal ring 51 of the third embodiment.

In the third embodiment, the case where the water-soluble anion reducing layer 55 is provided only on the first and second surfaces 53a and 53b of the surface of the sliding member 53 has been described as an example. 4, the water-soluble anion reducing layer 55 may also be provided on the surface of the sliding member 53 that is in contact with the fluid R.
In this case, the same effect as that of the seal ring 36 of the first modification of the first embodiment can be obtained.

  Further, like the impurity elution suppression layer 26 shown in FIG. 5, the water-soluble anion reducing layer 55 may be provided so as to cover the entire surface of the sliding member 53 (including the inner surface of the recess 24 </ b> C). In this case, the same effect as that of the seal ring 41 of the second modification of the first embodiment can be obtained.

(Fourth embodiment)
FIG. 8 is a cross-sectional view of a main part of a pump according to the fourth embodiment of the present invention. In FIG. 8, the same components as those in the structure shown in FIGS.

Referring to FIG. 8, the pump 55 according to the fourth embodiment has the same configuration as that of the pump 10 except that the component of the pump 10 of the first embodiment further includes a corrosion suppression layer 58. ing.
That is, the seal ring 56 (one of the components of the pump 55) of the fourth embodiment is different from the seal ring 14 of the first embodiment in that it has a corrosion inhibiting layer 58.

The corrosion suppression layer 58 is provided so as to cover the first and second surfaces 21 a and 21 b facing the sliding member 24 among the plurality of surfaces of the support member 21. The corrosion suppression layer 58 is in contact with the liquid film 28. The corrosion suppression layer 58 faces the impurity elution suppression layer 26 with the liquid film 28 interposed therebetween.
As the corrosion suppression layer 58, for example, an inert coating layer (for example, a layer containing at least one of a plating layer, an inorganic coating layer, and a thermal spray layer) can be used.

  Examples of plating layers include Cr plating layer, Ni plating layer, Sn plating layer, Cd plating layer, Au plating layer, Ag plating layer, Ni-P plating layer, Cr-Ni plating layer, Ni-Sn plating layer, Ni It is possible to use a -B plating layer, a Ni-Co-P plating layer, or the like. Since the plating layer containing Cr has high corrosion resistance, it is suitable as the corrosion suppression layer 58.

  The inorganic coating layer can be formed by a technique such as a DLC coating method, for example. As the inorganic coating layer, for example, a layer including at least one of a CrN layer, a TiN layer, a TiC layer, a TiCN layer, and a TiCrN layer can be used.

The sprayed layer is a layer formed by a spraying method (for example, a gas spraying method, a plasma spraying method, an arc spraying method, a flame spraying method, etc.).
Examples of the sprayed layer include at least one of an alumina layer, a chromium oxide layer, an aluminum bronze layer, a titania layer, a zirconia layer, an yttria layer, a chromium carbide layer, a tungsten carbide layer, a nickel chromium layer, and a cobalt layer. Layers can be used.

When the material of the support member 21 is stainless steel, a non-moving body layer may be used as the corrosion inhibiting layer 58 instead of the inorganic coating layer.
In this case, for example, the corrosion suppression layer 58 is formed on the surface of the support member 21 using a treatment with a chemical solution, an electrolytic treatment, or the like.
For example, nitric acid or phosphate is preferably used as the chemical solution. Thus, the concentration of Cr contained in the passive layer can be increased by forming the passive layer using nitric acid, phosphate, or the like.

  Further, a high corrosion resistance layer may be used instead of the inorganic coating layer. In this case, the high corrosion resistance layer has higher corrosion resistance than the metal material constituting the support member main body 21. Surface treatment methods for forming a highly corrosion-resistant layer include, for example, low-temperature carburizing treatment for diffusing carbon from the surface, low-temperature nitriding treatment for diffusing nitrogen from the surface, chromizing treatment for diffusing chromium on the surface, and diffusing aluminum from the surface. It is possible to use a calorizing treatment, a method of forming a film in high-temperature deaerated water or water vapor, a method of forming a film in a furnace controlled to have a low oxygen potential, and the like.

According to the seal ring 56 of the fourth embodiment, the first and second surfaces of the support member 21 in addition to the impurity elution suppression layer 26 covering the first and second surfaces 24Aa and 24Ab of the sliding member 24. Even if the water-soluble anion contained in the carbon material constituting the sliding member 24 is eluted into the liquid film 28 by having the corrosion-inhibiting layer 58 covering the 21a and 21b, the first and first of the support member 21 It becomes possible to suppress corrosion of the two surfaces 21a and 21b.
Thereby, at the time of storage of the seal ring 56 in the assembled state, it is possible to further suppress the malfunction of the pump and the deterioration of the characteristics of the seal ring 56 due to the corrosion products caused by the water-soluble anions contained in the carbon material.
In addition, since the impurity elution suppression layer 26 and the corrosion suppression layer 58 are provided, the frequency of replacing the entire seal ring 56 can be further reduced.

  In the fourth embodiment, the case where the impurity elution suppressing layer 26 is provided only on the first and second surfaces 24Aa and 24Ab of the sliding member 24 is illustrated as an example. However, FIG. Alternatively, the impurity elution suppressing layer 26 shown in FIG.

Further, in the fourth embodiment, the case where the impurity elution suppression layer 26 is provided has been described as an example. However, instead of the impurity elution suppression layer 26, a cation exchange membrane serving as the impurity elution suppression layer 48 is provided. Alternatively, a water-soluble anion reducing layer 55 may be provided.
Even when these are provided, the same effect as the seal ring 56 of the fourth embodiment can be obtained.

In the fourth embodiment, the case where the corrosion suppression layer 58 is provided only on the first and second surfaces 21a and 21b of the support member 21 has been described as an example. However, the third embodiment is in contact with the fluid R. The surface 21c may also be provided with a corrosion inhibiting layer 58.
Further, the corrosion suppression layer 58 may be provided so as to cover the entire surface of the support member 21.

  In the fourth embodiment, the corrosion inhibiting layer 58 may be configured by combining at least two of the inorganic coating layer 59, the passive layer, and the high corrosion resistance layer.

  The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to such specific embodiments, and various modifications can be made within the scope of the gist of the present invention described in the claims. Deformation / change is possible.

  DESCRIPTION OF SYMBOLS 10, 35, 40, 45, 50, 55 ... Pump, 11 ... Rotating shaft, 13 ... Fixed part, 14, 36, 41, 46, 51, 56 ... Seal ring, 18 ... Rotating shaft main body, 19 ... Extension part , 19a ... surface, 21 ... support member, 21a, 24Aa, 53a, 54a, 55a ... first surface, 21b, 24Ab, 53b, 54b, 55b ... second surface, 21c, 24Ac ... third surface, 21A ... accommodating part, 23 ... position regulating member, 23A ... male thread part, 23B, 24B ... projecting part, 24,53 ... sliding member, 24A, 54 ... sliding member body, 24Ba ... projecting surface, 24C ... recessed part, 26 , 48, 56 ... Impurity elution suppression layer, 28 ... Liquid film, 29-1, 29-2 ... Gap, 55 ... Water-soluble anion reducing layer, 58 ... Corrosion suppression layer, 59 ... Inorganic coating layer, A ... Axis, M1 ... thickness, R ... fluid

Claims (6)

An annular support member made of a metal material is fixed to the fixing portion in contact with the liquid film,
An annular sliding member that is supported by the support member, slidably contacts a rotating shaft that rotates about an axis inside the support member, and includes a carbon material;
Of the sliding member, provided at least in a portion facing the support member, an impurity elution suppression layer that contacts the liquid film,
With
The impurity elution suppression layer suppresses the elution of water-soluble anions contained in the carbon material into the liquid film.   The seal ring according to claim 1, wherein the impurity elution suppression layer is provided on a surface of the sliding member and includes at least one of an inorganic coating layer and a plating layer.   The seal ring according to claim 1, wherein the impurity elution suppressing layer is a cation exchange membrane provided on a surface of the sliding member. The sliding member is disposed on the surface of the sliding member main body and the sliding member main body, and the water-soluble anion is more concentrated than the concentration of the water-soluble anion contained in the carbon material constituting the sliding member main body. A water-soluble anion-reducing layer having a low concentration of
Including
The seal ring according to claim 1, wherein the impurity elution suppressing layer is the water-soluble anion reducing layer.   The said support member is provided in the part facing the said impurity elution suppression layer at least, The corrosion suppression layer which contacts the said liquid film is included, The any one of Claims 1 thru | or 4 characterized by the above-mentioned. The seal ring described.   A pump comprising the seal ring according to any one of claims 1 to 5.

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