JP2017141121A - Ozone generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ozone generator cooling raw material gas more efficiently than a conventional one.SOLUTION: An ozone generator includes: a container provided with an inner wall and having an axis direction in a first direction; a pair of edge plates set in the inner part of the container in the first direction with a space; a refrigerant supply part formed in the container to supply refrigerant to a region surrounded by the pair of edge plates and the inner wall; a refrigerant discharge part formed on a position different from that of the refrigerant supply part in the first direction of the container and discharging the refrigerant from the region; a plurality of first electrodes formed in a cylindrical state and both end parts of which are fixed to the pair of edge plates and supported in the region; a second electrode disposed via a dielectric body while having a discharge gap between each of the first electrodes and the inner wall surface; and a partition plate disposed at a position nearer to the refrigerant supply part than the refrigerant discharge part with a space from the edge plates between the pair of end plates, intercepting a part of the region while making the plurality of first electrodes pass through the plurality of first electrodes in a second direction intersecting with the first direction and also dividing the region into a first region including the refrigerant supply part and a second region including the refrigerant discharge part.SELECTED DRAWING: Figure 1

Description

  Embodiments described herein relate generally to an ozone generator.

  Conventionally, ozone generation comprising a cylindrical derivative member made of a derivative, an electrode provided on the inner peripheral surface of the derivative member, and an electrode covering the derivative member with a discharge gap between the derivative member and the electrode There is a device. In this ozone generator, dielectric barrier discharge (silent discharge) is performed between the second electrode on the dielectric member side and the first electrode surrounding the dielectric member, and the gap between the first electrode and the dielectric member is performed. Ozone is generated from the passing raw material gas.

  In the case of this type of ozone generator, the temperature of the source gas rises due to the heat generated during silent discharge, and the temperature of the discharge gap rises accordingly. The ozone generation amount (ozone yield) per unit power decreases as the discharge gap temperature increases. For this reason, there is a cooling medium such as cooling water that circulates inside the ozone generator to lower the temperature of the discharge gap.

JP 2000-159508 A

  If cooling of the discharge gap in the ozone generator can be performed more efficiently, the decrease in ozone yield is reduced, which is useful.

  The ozone generator according to the embodiment includes a container, a pair of end plates, a refrigerant supply unit, a refrigerant discharge unit, a first electrode, a second electrode, and a partition plate. The container includes an inner wall and has an axial direction in a first direction. The pair of end plates are provided in the container with an interval in the first direction. The refrigerant supply unit is formed in the container and supplies the cooling medium to a region surrounded by the pair of end plates and the inner wall. The refrigerant discharge part is formed at a different position in the first direction of the container with respect to the refrigerant supply part, and discharges the cooling medium from the region. The first electrode is formed in a cylindrical shape, and both ends are fixed to a pair of end plates and supported in the region. A plurality of first electrodes are formed. The second electrode is disposed via a dielectric in a state where a discharge gap is left between the inner wall surface of each first electrode. The partition plate is disposed at a position closer to the refrigerant supply unit than the refrigerant discharge unit with a gap between the end plate between the pair of end plates. The partition plate blocks a part of the region in a state where the plurality of first electrodes are penetrated in the second direction intersecting the first direction, and includes a first region including the refrigerant supply unit and a second region including the refrigerant discharge unit. And divide into

Drawing 1 is a mimetic diagram showing an example of the ozone generator concerning an embodiment. Drawing 2 is a sectional view showing an example of the structure of the electrode part of the ozone generator concerning an embodiment. FIG. 3 is an explanatory diagram illustrating an example of a temperature distribution when the partition plate is not applied in the ozone generator according to the embodiment. FIG. 4 is a plan view illustrating an example of a partition plate of the ozone generator according to the embodiment. FIG. 5 is a perspective view showing an example when the partition plate of the ozone generator according to the embodiment is mounted. Drawing 6 is an explanatory view for explaining an example of the size of the partition plate of the ozone generator concerning an embodiment. Drawing 7 is an explanatory view for explaining an example of the arrangement position of the partition plate of the ozone generator concerning an embodiment. FIG. 8 is a front view for explaining another shape example of the partition plate of the ozone generator according to the embodiment. FIG. 9 is an explanatory view showing an example in which the partition plate shown in FIG. 8 is attached to the ozone generator. FIG. 10 is a front view for explaining the shape of a modification of the partition plate shown in FIG. FIG. 11 is an explanatory view showing an example in which the partition plate of FIG. 10 is mounted on an ozone generator.

  Similar components are included in the following exemplary embodiments and modifications. Therefore, in the following, common constituent elements are denoted by common reference numerals, and redundant description may be omitted.

  In this embodiment, as an example, an ozone generator 10 as shown in FIG. 1 includes a container 12 and an ozone generator 14 that is accommodated in the container 12 and generates ozone from a source gas by dielectric barrier discharge (silent discharge). And. The source gas contains oxygen, for example, dry air or oxygen gas.

  The container 12 includes an inner wall and has an axial direction in the first direction O. As an example, it has a cylindrical (tubular) tube portion 12a, and end wall portions 12b and 12c provided at both ends in the axial direction (longitudinal direction) of the tube portion 12a. In the present embodiment, as an example, the end wall portion 12c is configured to be openable and closable with respect to the cylindrical portion 12a, and can be opened and closed when performing maintenance of the ozone generation unit 14 housed therein. Further, as an example, the cylinder portion 12a is provided with a gas inlet 12d into which a raw material gas that is a raw material for ozone generation flows, and a gas outlet 12e through which ozone generated in the ozone generator 14 is discharged. . Moreover, as an example, the cylinder part 12a has a refrigerant supply part 12f for supplying a cooling medium (refrigerant) for cooling the ozone generator 14 (ozone generator 10) to the inside of the container 12, and a refrigerant for discharging the cooling medium. A discharge portion 12g. The container 12 is comprised with stainless steel as an example. As the cooling medium, for example, cooling water or cooling oil can be used.

  As an example, as shown in FIGS. 1 and 2, the ozone generator 14 includes a plurality of dielectric members 16 (second electrodes) and a cylindrical first electrode 18 (metal electrode) in which the dielectric members 16 are inserted. ) And. That is, the first electrode and the second electrode are arranged with a discharge gap.

  The dielectric member 16 is formed so that one end of a cylindrical shape (tubular shape) is closed and the other end is opened. A plurality of dielectric members 16 are arranged in parallel in the container 12 with a predetermined interval therebetween. In the case of FIG. 1, only four dielectric members 16 are shown for simplification of illustration. The central axis of the dielectric member 16 is parallel to the central axis of the cylindrical portion 12a of the container 12.

  The dielectric member 16 further includes a dielectric case 20 that forms an outer surface, and an electrode coating layer 22 (second electrode) provided on the inner surface of the dielectric case 20. As an example, the dielectric case 20 includes a cylindrical tube portion 20a and a wall portion 20b that forms one end of the tube portion 20a. As a dielectric material which comprises the dielectric material case 20, glass, such as quartz glass, borosilicate glass, high silicate glass, aluminosilicate glass, ceramics, etc. are selected, for example.

  The electrode coating layer 22 (second electrode) is made of a conductive material. The electrode coating layer 22 is provided, for example, on the inner surface of the dielectric case 20 including the inner peripheral surface 20c of the cylindrical portion 20a. The electrode coating layer 22 is formed on the inner surface of the dielectric case 20 by sputtering, spraying, vapor deposition, electroless plating, electrolytic plating, coating, or the like of a conductive material. The conductive material of the electrode coating layer 22 is selected from, for example, gold, silver, copper, stainless steel, chromium, tin, zinc, nickel carbon and the like.

  The electrode coating layer 22 is electrically connected to a power source 26 (see FIG. 1) via a fuse 24. The fuse 24 cuts off the electrical connection between the power source 26 and the electrode coating layer 22 when a current exceeding a specified value flows. As an example, the fuse 24 has a cylindrical shape (bar shape), and has one end 24a and the other end 24b opposite to the one end 24a. The fuse 24 has a pair of terminals 24c and 24d. One terminal 24c is provided at one end 24a, and the other terminal 24d is provided at the other end 24b. The fuse 24 is inserted into the dielectric member 16 (dielectric case 20) and partly protrudes from the dielectric member 16. In the present embodiment, as an example, at least a part of the terminal 24 c is located inside the dielectric member 16, and at least a part of the terminal 24 d is located outside the dielectric member 16. In other embodiments, the fuse 24 may be located entirely within the dielectric member 16. The terminal 24 c is electrically connected to the electrode coating layer 22 through the conductive connection portion 28. The connecting portion 28 can be configured by one or a plurality of members. In the present embodiment, as an example, the connection portion 28 includes a metal supply electron coupled to the terminal 24c, a stainless steel wool material (cushion material) interposed between the electron supply and the electrode coating layer 22, have. On the other hand, the terminal 24 d is electrically connected to the power source 26 via the wiring 30. As an example, the terminal 24d is provided with a female screw 24e (coupling portion), and is connected to the wiring 30 by screwing with the male screw 24f (fastening member). Further, a fuse holder 32 for holding the fuse 24 is interposed between the fuse 24 and the dielectric case 20 so as to keep the distance between the fuse 24 and the dielectric case 20 at a predetermined distance. Yes. The electrode coating layer 22 is supplied with electric power (high voltage electric power) from the power source 26 and functions as a high potential side electrode. In the embodiment, the dielectric member 16 including the electrode coating layer 22 may be referred to as a second electrode. Moreover, the electrode coating layer 22 may be called a 2nd electrode.

  The first electrode 18 (metal electrode) is provided for each dielectric member 16 (electrode coating layer 22, second electrode) and is accommodated in the container 12. As an example, the first electrode 18 has a cylindrical shape (tubular shape) with both ends open. The dielectric member 16 is inserted into the first electrode 18, and the first electrode 18 faces the outer peripheral surface 20d of the cylindrical portion 20a. A spacer 34 is interposed between the first electrode 18 and the dielectric member 16 (cylindrical portion 20a) to maintain the positional relationship between them. The first electrode 18 and the dielectric member 16 are coaxial. Is located. In addition, the space between the inner peripheral surface 18a of the first electrode 18 and the outer peripheral surface 20d of the cylindrical portion 20a of the dielectric member 16 is provided with a discharge gap 36 having a predetermined gap. That is, the first electrode 18 covers the outer peripheral surface 20d of the cylindrical portion 20a with a discharge gap 36 between the first electrode 18 and the outer peripheral surface 20d of the cylindrical portion 20a. In other words, the dielectric member 16 is disposed with a predetermined discharge gap 36 between the first inner electrode 18 and the cylindrical inner peripheral surface 18a (inner wall surface), and the second electrode is formed inside. An electrode is provided. As an example, the first electrode 18 is made of stainless steel.

  One end of each first electrode 18 is integrated by being coupled to each other by an end plate 38, and the other end of each first electrode 18 is integrated by being coupled to each other by an end plate 40. ing. The plurality of first electrodes 18 and the end plates 38 and 40 are integrated to form a metal electrode assembly 42. The metal electrode assembly 42 is grounded, and the first electrode 18 functions as a low potential side electrode.

  In the present embodiment, as an example, the metal electrode assembly 42 is provided with a coolant passage 44. As an example, the coolant passage 44 is defined by the outer peripheral surface 18b of the first electrode 18 and the opposing surfaces of the end plates 38 and 40. That is, a pair of end plates 38 and 40 provided at intervals in the first direction O (see FIG. 1) that is the axial direction of the container 12 inside the container 12, and the inner wall of the cylindrical portion 12 a of the container 12 A region surrounded by is defined as a refrigerant passage 44. As shown in FIG. 1, the refrigerant passage 44 communicates with the refrigerant supply unit 12f and the refrigerant discharge unit 12g, and a cooling medium (hereinafter, exemplified by cooling water) flowing from the refrigerant supply unit 12f And flows out from the refrigerant discharge part 12g. In the case of the present embodiment, the refrigerant discharge part 12g is formed at a position (different position) shifted by a predetermined distance in the first direction O with respect to the refrigerant supply part 12f. That is, the refrigerant supply unit 12f and the refrigerant discharge unit 12g are arranged so that the cooling water easily passes through the inside of the container 12 over a wide range. As described above, the plurality of first electrodes 18 are supported by the pair of end plates 38 and 40 so that both end portions thereof are fixed and penetrate the region (the refrigerant passage 44), and the gas ( It is configured so that heat can be exchanged between the raw material gas and the like) and the cooling water.

  In the above configuration, the source gas supplied from the gas inlet 12 d into the container 12 flows through the discharge gap 36 between the dielectric case 20 and the first electrode 18. At this time, in the ozone generator 10, an AC voltage is applied from the power source 26 via the fuse 24 and the connection portion 28 between the electrode coating layer 22 (dielectric member 16) and the first electrode 18, and the discharge gap 36. A dielectric barrier discharge is generated therein, and ozone is generated from the source gas passing through the discharge gap 36. The generated ozone-containing gas flows out from the gas outlet 12e. At this time, the cooling water supplied from the refrigerant supply unit 12 f to the refrigerant passage 44 flows out of the refrigerant discharge unit 12 g through the refrigerant passage 44. This cooling water cools the heat generated by the dielectric barrier discharge.

  The temperature distribution in the ozone generation unit 14 can be generally simulated at the design stage depending on the number and shape of the first electrodes 18 (dielectric members 16) and the positions of the refrigerant supply unit 12f and the refrigerant discharge unit 12g. FIG. 3 shows an example of a temperature distribution when ozone is generated by the metal electrode assembly 42 (ozone generating unit 14) in which the refrigerant supply unit 12f and the refrigerant discharge unit 12g are arranged diagonally with respect to the container 12. Indicates. A plurality of first plates are formed in a region (refrigerant passage 44) surrounded by a pair of end plates 38 and 40 provided at intervals in the first direction O (see FIG. 1) inside the container 12 and the inner wall of the container 12. The electrode 18 is disposed with the axial direction facing the first direction O. Therefore, the cross section of the metal electrode assembly 42 is such that the cross sections (circular openings) of the first electrodes 18 are densely arranged. In the case of such a structure, the cooling water supplied from the refrigerant supply unit 12f easily passes, for example, between the peripheral surface of the assembly of the first electrodes 18 and the inner peripheral surface of the container 12 (outer peripheral region). As another passage route, although the cooling water spreads in the peripheral portion of the refrigerant supply unit 12f, it may escape from there to the outer peripheral region and move to the refrigerant discharge unit 12g. Thus, when the passage route of the cooling water is biased, for example, a temperature distribution as shown in FIG. 3 may occur. In the case of the metal electrode assembly 42 having the structure as shown in FIG. 3, as an example, the region A has a 32 ° C. temperature zone, the region B has a 34 ° C. temperature zone, the region C has a 38 ° C. temperature zone, and the region D has a 42 ° C. temperature zone. It has become. In the case of this example, it is observed that the cooling water supplied from the refrigerant supply unit 12f is likely to flow in a path passing through the outer peripheral area and a path directed diagonally upward to the right in the figure. As a result, high temperature regions C and D are formed directly above the refrigerant supply unit 12f. That is, the temperature of the raw material gas tends to increase in the vicinity, the ozone yield decreases, and the efficiency of the ozone generation unit 14 as a whole also decreases.

  Therefore, in the present embodiment, as shown in FIG. 1, a partition plate 46 that adjusts (leads) the flow path of the coolant supplied from the coolant supply unit 12 f to a route suitable for cooling is provided inside the coolant passage 44. Provided. FIG. 4 is a plan view of the partition plate 46. The partition plate 46 can be formed of, for example, a metal plate such as stainless steel, a resin plate, or the like. The partition plate 46 is a substantially trapezoidal shape that covers about half of the diameter direction of the container 12 in the internal space of the cylindrical container 12, and is a fixed hole formed in a substantially central portion of the lower base (short side). 46a and fixing holes 46a formed at both ends of the upper base (long side) are firmly fixed to a partition plate support 48 formed on the inner wall surface 12h of the container 12 by a fastening member such as a bolt. The partition plate support 48 is formed at, for example, three locations corresponding to the fixing holes 46a, and is fixed to the inner wall surface 12h by joining means such as welding so that the fixed partition plate 46 does not move. The partition plate 46 has a plurality of insertion holes 50 through which the plurality of first electrodes 18 constituting the metal electrode assembly 42 are inserted. The diameter of the insertion hole 50 is desirably equal to or slightly larger than the diameter of the first electrode 18. For example, the diameter d1 of the insertion hole 50 is preferably in the range of 1.05d0 to 1.2d0 when the outer diameter of the first electrode 18 is the outer diameter d0. By setting such a diameter d1, it is possible to easily insert each of the plurality of first electrodes 18 densely arranged into the insertion hole 50, thereby improving the assembly efficiency and the ease of replacement during maintenance. be able to.

  FIG. 5 is a perspective view illustrating a fixing position of the partition plate 46 in a state where the first electrode 18 constituting the metal electrode assembly 42 is inserted into the insertion hole 50 of the partition plate 46. As shown in FIG. 1, the partition plate 46 is disposed between the pair of end plates 38 and 40 at a position closer to the refrigerant supply unit 12 f than the refrigerant discharge unit 12 g with a space from the end plates 38 and 40. Yes. In addition, the partition plate 46 blocks a part of the refrigerant passage 44 in a state where the plurality of first electrodes 18 are penetrated in the second direction intersecting the first direction O (see FIG. 1), and the refrigerant supply unit 12f. It divides into the 1st area | region M containing and the 2nd area | region N containing the refrigerant | coolant discharge part 12g (refer FIG. 1). The second direction includes not only a direction orthogonal to the first direction O but also a direction inclined with respect to the first direction O. Further, in the case of FIG. 5, in order to facilitate understanding of the position of the partition plate 46 and the existence of the insertion hole 50, a part of the first electrode 18 and the end plate 38 constituting the metal electrode assembly 42, Illustration of the wall surface 12h and the like is omitted. As shown in FIG. 5, the insertion hole 50 of the partition plate 46 is disposed in a state of passing through the first electrode 18, thereby blocking a part of the refrigerant passage 44 formed in the metal electrode assembly 42, The moving direction of the cooling water passing through the passage 44 can be adjusted (guided). For example, the cooling water flowing in from the refrigerant supply unit 12f easily flows along the metal electrode assembly 42 and the inner wall surface 12h of the container 12 as described above, but a part of the flow is blocked by the partition plate 46, It becomes easy to flow upward along the surface of the partition plate 46 on the refrigerant supply unit 12f side. Similarly, a part of the cooling water once flowing into the metal electrode assembly 42 is blocked around the refrigerant supply unit 12f and easily flows upward along the surface of the partition plate 46 on the refrigerant supply unit 12f side. . That is, more cooling water can be led toward the high temperature region (region D, 42 ° C. temperature zone) in FIG. As a result, the region D, which is a high temperature region in FIG. 3, and the peripheral region C, region B, and the like can be effectively cooled as compared with the case where the partition plate 46 is not present. That is, the source gas can be efficiently cooled, and the ozone yield in the ozone generator 14 can be improved.

  FIG. 6 is an explanatory diagram for explaining an example of the size of the partition plate 46. As described above, it is desirable that the partition plate 46 covers about a half of the diameter D0 of the container 12 in the internal space of the cylindrical container 12. For example, in a direction orthogonal to the first direction O, it is desirable to dispose half or less of the region (the internal space of the container 12, the refrigerant passage 44). More specifically, when the diameter of the container 12 is D0, the insertion hole on the upper end side of the partition plate 46 from the center line G on the cross section of the container 12 (center side of the container 12 far from the inner wall surface 12h of the container 12). It is desirable to form the partition plate 46 so that the distance L1 to the center of 50 is equal to, for example, 0.2D0.

  FIG. 7 is an explanatory diagram for explaining an example of an arrangement position of the partition plate 46 in the first direction O. FIG. The partition plate 46 is disposed at a position closer to the refrigerant supply unit 12f than the refrigerant discharge unit 12g. Specifically, when the distance between the refrigerant supply unit 12f and the refrigerant discharge unit 12g in the first direction O is L2, the distance L3 between the partition plate 46 fixed to the partition plate support 48 and the refrigerant supply unit 12f. Is preferably in the range of 0.25L2 to 0.3L2.

  The cooling supplied from the refrigerant supply unit 12f is determined by determining the shielding height of the partition plate 46 fixed to the partition plate support 48 via the fixing hole 46a on the side close to the refrigerant supply unit 12f of the container 12 as described above. Water can be efficiently guided upward in FIG. 6 (high temperature region D). In addition, by defining the distance between the partition plate 46 and the refrigerant supply unit 12f in the first direction O, it is possible to guide sufficiently low-temperature cooling water to the high-temperature region D immediately after supply. As a result, the source gas in the high temperature region of the ozone generator 14 can be efficiently cooled.

  As shown in FIG. 6, since a gap S is formed in the partition plate 46, the refrigerant passage 44 that exists between the inner wall surface 12 h of the container 12 and the first electrode 18 (metal electrode assembly 42). Is not completely occluded. The cooling water whose direction of flow has been changed by the partition plate 46 can efficiently supply a sufficient amount of cooling water to a region (second region) on the back side of the partition plate 46 as viewed from the refrigerant supply unit 12f. .

  The cooling water supplied from the refrigerant supply unit 12f and guided to the upper side of the first region M on the refrigerant supply unit 12f side by the partition plate 46 passes through the upper region of the partition plate 46 and is a dielectric barrier discharge (silent discharge). Is discharged toward the refrigerant discharge portion 12g while absorbing the heat generated by. In addition, the coolant supplied from the refrigerant supply unit 12f and passing through the gap S on the side of the partition plate 46 and flowing into the second region N on the refrigerant discharge unit 12g side causes dielectric barrier discharge ( The heat generated by the silent discharge is absorbed toward the refrigerant discharge part 12g while absorbing heat. Note that the cooling water also flows into the second region N from a gap formed between the outer surface of the first electrode 18 and the insertion hole 50. As a result, the cooling water efficiently flows into the portion of the first electrode 18 in the second region N on the back surface side of the partition plate 46, and the cooling of each first electrode 18 is more effective than the case where the partition plate 46 does not exist. Can be done automatically.

  Thus, by arranging the partition plate 46 at an appropriate position based on the temperature distribution of the metal electrode assembly 42 (container 12), the ozone generator 14 (raw material gas) can be efficiently cooled, and the ozone concentration can be reduced. The rate can be improved.

  FIG. 8 and FIG. 9 are explanatory views for explaining examples of the partition plate 52 having another shape applied to the ozone generator 10. Similarly to the partition plate 46 described above, the partition plate 52 can be formed of a metal plate such as stainless steel, a resin plate, or the like. The partition plate 52 is formed in a substantially T shape. That is, the center side of the inner region (refrigerant passage 44) of the container 12 is formed with a first width, and a portion far from the center side is formed with a second width that is narrower than the first width. Specifically, in the case of the example shown in FIG. 8, for example, only one row of the first electrodes 18 arranged in a direction parallel to the diameter D0 of the container 12 can be inserted into the two arm-shaped portions 52a of the partition plate 52. An insertion hole 50 is formed so that

  In addition, a trunk portion 52 b is connected to the central portion of the partition plate 52. The width L4 of the trunk portion 52b in the direction parallel to the arm-like portion 52a can be set to 0.2D0, for example, when the diameter of the cylindrical container 12 is D0. The partition plate 52 is preferably an internal space of the cylindrical container 12 and covers about half of the diameter D0 of the container 12. For example, it is desirable to dispose a portion that is less than half of the region (the internal space of the container 12, the refrigerant passage 44) in a direction orthogonal to the first direction O. More specifically, when the diameter of the container 12 is D0, the insertion hole on the upper end side of the partition plate 52 (center side of the container 12 far from the inner wall surface 12h of the container 12) from the center line G on the cross section of the container 12 It is desirable that the partition plate 52 be formed so that the distance L1 to the center of 50 is equal to, for example, 0.2D0.

  Thus, by making the shape of the partition plate 52 into a substantially T shape, it becomes easy to guide the cooling water supplied from the refrigerant supply unit 12f to the high temperature region D shown in FIG. 3 by the trunk portion 52b. In addition, since a large gap S can be secured on the left and right of the body portion 52b, more cooling water is supplied to the second region N (see FIG. 1) on the back side of the partition plate 52 than in the case of the partition plate 46. be able to. As a result, cooling in the second region N can be performed more efficiently. As a result, the high temperature region of the ozone generator 14 can be cooled more efficiently. Further, the substantially T-shaped partition plate 52 can contribute to a reduction in material cost and a reduction in processing cost of the insertion hole 50.

  Note that fixing holes 52c are formed at both ends of the arm-shaped portion 52a. A fixing hole 52c is also formed at the end of the body portion 52b. As shown in FIG. 9, each fixing hole 52 c is fixed to the partition plate support 48 formed on the inner wall surface 12 h of the container 12 in the same manner as the partition plate 46. In the example of FIG. 8, the case where the width of the arm-shaped portion 52a is set to a width that allows the insertion holes 50 to be formed in a single row is shown. However, the width of the arm-shaped portion 52a, that is, the number of arrangement of the insertion holes 50 is, for example, It can be appropriately changed according to the temperature distribution of the ozone generator 10 in which the plate 52 is disposed, and the cooling water guiding pattern can also be changed. Also in this case, efficient cooling water can be guided, and the same effect as described above can be obtained.

  FIGS. 10 and 11 are explanatory diagrams for explaining examples of the partition plate 54 having another shape applied to the ozone generator 10. The partition plate 54 is a modification of the partition plate 52 described above. Similar to the partition plate 52, the partition plate 54 can be formed of a metal plate such as stainless steel, a resin plate, or the like. The partition plate 54 is also formed in a substantially T shape. That is, the center side of the inner region (refrigerant passage 44) of the container 12 is formed with a first width, and a portion far from the center side is formed with a second width that is narrower than the first width. In the case of the example shown in FIG. 10, the arm-shaped portion 54a of the partition plate 54 is extended in a direction parallel to the diameter D0 of the cylindrical container 12, and the plurality of first electrodes 18 can be inserted through only one row, for example. A long hole portion 56 is formed as described above.

  In addition, a trunk portion 54 b is connected to the central portion of the partition plate 54. A plurality of elongated holes 56 are also formed in the body portion 54b so that the plurality of first electrodes 18 can be inserted, for example, one by one. The width L4 of the body portion 54b in the direction parallel to the arm-like portion 54a can be equal to, for example, 0.2D0 when the diameter of the cylindrical container 12 is D0. Moreover, it is desirable that the partition plate 54 covers about half of the diameter D0 of the container 12 in the internal space of the cylindrical container 12. For example, it is desirable to dispose a portion that is less than half of the region (the internal space of the container 12, the refrigerant passage 44) in a direction orthogonal to the first direction O. More specifically, when the diameter of the container 12 is D0, a long hole on the upper end side of the partition plate 54 from the center line G on the cross section of the container 12 (center side of the container 12 far from the inner wall surface 12h of the container 12). It is desirable that the partition plate 54 be formed so that the distance L1 to the center in the short direction of the portion 56 is equal to, for example, 0.2D0.

  Thus, by making the shape of the partition plate 54 into a substantially T shape, it becomes easy to guide the cooling water supplied from the refrigerant supply unit 12f to the high temperature region D shown in FIG. 3 by the trunk portion 54b. Further, since a large gap S can be secured on the left and right sides of the trunk portion 54b, more cooling water is supplied to the second region N (see FIG. 1) on the back side of the partition plate 54 than in the case of the partition plate 46. be able to. As a result, the cooling in the second region N can be performed more efficiently. As a result, the high temperature region of the ozone generator 14 can be cooled more efficiently. Moreover, it can contribute to reduction of material cost by setting it as the substantially T-shaped partition plate 54. FIG. Further, by inserting the first electrode 18 with the long hole portion 56 instead of the insertion hole 50, the processing of the long hole portion 56 can be easily performed at a lower cost than the processing of the insertion hole 50. As a result, it can contribute to cost reduction. Further, since the plurality of first electrodes 18 can be collectively inserted into the long hole portion 56, the ease of assembly can be improved. Further, by adopting the long hole portion 56, the gap between the first electrode 18 and the outer peripheral surface becomes larger than when the insertion hole 50 is adopted. As a result, the cooling water easily flows from the first region M to the second region N through the gap between the long hole portion 56 and the first electrode 18. As a result, it becomes possible to perform the introduction of the cooling water to the high-temperature region D by the trunk portion 54b and the supply of the cooling water to the second region N in a well-balanced manner, which contributes to the improvement of the ozone yield of the ozone generation unit 14. it can.

  Note that fixing holes 54c are formed at both ends of the arm-shaped portion 54a. A fixing hole 54c is also formed at the end of the body portion 54b. As shown in FIG. 11, each fixing hole 54 c is fixed to the partition plate support 48 formed on the inner wall surface 12 h of the container 12 in the same manner as the partition plate 52. In the example of FIG. 10, the width of the arm-shaped portion 54a is shown as a width that allows only one long hole portion 56 to be formed. However, the width of the arm-shaped portion 54a, that is, the number of the long hole portions 56 arranged is For example, it can change suitably according to the temperature distribution of the ozone generator 10 which arrange | positions the partition plate 54, and you may change the guidance pattern of cooling water. Also in this case, efficient cooling water can be guided, and the same effect as described above can be obtained.

  As mentioned above, although embodiment and the modification of this invention were illustrated, the said embodiment and modification are an example to the last, Comprising: It is not intending limiting the range of invention. These embodiments and modifications can be implemented in various other forms, and various omissions, replacements, combinations, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof. In addition, the configurations of the respective embodiments and modifications can be partially exchanged.

  In the above-described embodiment, an example in which the refrigerant supply unit 12f and the refrigerant discharge unit 12g are arranged at diagonal positions of the container 12 has been described. However, the refrigerant supply unit 12f and the refrigerant discharge unit 12g are displaced in the first direction O. For example, the refrigerant supply part 12f and the refrigerant discharge part 12g may be provided at a position other than the diagonal position of the cylindrical part 12a of the container 12.

  Further, in the above-described embodiment, the example in which the partition plates 46, 52, 54 are arranged so as to extend in a direction orthogonal to the first direction O has been shown. In another embodiment, the partition plates 46, 52, and 54 may be inclined. For example, a posture inclined from the refrigerant supply unit 12f toward the refrigerant discharge unit 12g may be employed. In this case, the cooling water supplied from the refrigerant supply unit 12f can be guided above the refrigerant supply unit 12f and can easily flow toward the refrigerant discharge unit 12g. As a result, it is difficult for the cooling water whose temperature has risen due to heat exchange in the refrigerant passage 44 to stay, and the cooling efficiency can be improved.

  In addition, the temperature distribution in the ozone generator 10 due to heat generation during dielectric barrier discharge (silent discharge) depends on the arrangement and number of dielectric members 16 (first electrodes 18), the refrigerant supply unit 12f, and the refrigerant discharge unit 12g. The position of the high temperature region also changes depending on the formation position and the separation interval, the amount of cooling water supplied, the flow rate, and the like. Therefore, at the design stage of the ozone generator 10, a simulation (see FIG. 3) of the temperature distribution of the ozone generator 10 that does not include the partition plates 46, 52, 54 is performed, the high temperature region is specified, and the partition plates 46, 52. , 54 is determined, and cooling water can be efficiently guided to a high temperature region.

  In addition, the temperature distribution inside the container 12 may change depending on the operation status of the ozone generator 10 (for example, the continuous operation time or the external environment of the operation place). In such a case, the partition plate support 48 may be movable in the axial direction (first direction O) inside the container 12 so that the installation positions of the partition plates 46, 52, and 54 inside the container 12 may be moved. In this case, a plurality of temperature sensors may be arranged inside the metal electrode assembly 42 so that the partition plate support 48 can be moved according to the temperature distribution. Further, the temperature of a representative position inside the container 12 is measured, and the current temperature of the ozone generator 10 is compared with the temperature at that position and the reference temperature distribution pattern of the ozone generator 10 prepared in advance by a test. The temperature distribution may be estimated, and the arrangement positions of the partition plates 46, 52, and 54 may be determined according to the result. The partition plate support 48 may be fixed to a slider that can be moved by, for example, a ball screw. The ball screw may be rotated by various driving means, for example, motor driving or manually, and the slider may be moved. In this way, by changing the arrangement position of the partition plates 46, 52, and 54 according to the operating state of the ozone generator 10, the ozone generator 10 (raw material gas) can be cooled more efficiently, and the ozone concentration can be reduced. It can contribute to the improvement of the rate.

  DESCRIPTION OF SYMBOLS 10 ... Ozone generator, 12 ... Container, 12f ... Refrigerant supply part, 12g ... Refrigerant discharge part, 12h ... Inner wall surface, 14 ... Ozone generation part, 16 ... Dielectric member, 18 ... First electrode, 36 ... Discharge gap, 38, 40 ... end plate, 42 ... metal electrode assembly, 44 ... refrigerant passage, 46, 52, 54 ... partition plate, 50 ... insertion hole, 56 ... slot.

Claims (4)

A container having an inner wall and having an axial direction in a first direction;
A pair of end plates provided at an interval in the first direction inside the container;
A coolant supply unit that supplies a cooling medium to a region formed in the container and surrounded by the pair of end plates and the inner wall;
A refrigerant discharge unit that is formed at a different position in the first direction of the container with respect to the refrigerant supply unit, and discharges the cooling medium from the region;
A plurality of first electrodes formed in a cylindrical shape and having both ends fixed to the pair of end plates and supported in the region;
A second electrode disposed via a dielectric with a discharge gap between the inner wall of each of the first electrodes;
Between the pair of end plates, the end plates are spaced from each other and disposed closer to the refrigerant supply unit than the refrigerant discharge unit, and the plurality of first electrodes are penetrated in a second direction intersecting the first direction. A partition plate that blocks a part of the region in a closed state and divides into a first region including the refrigerant supply unit and a second region including the refrigerant discharge unit,
An ozone generator.   2. The ozone generator according to claim 1, wherein the partition plate blocks a portion that is less than half of the region in a direction orthogonal to the first direction.   The ozone generation according to claim 1 or 2, wherein the partition plate is formed with a first width at a center side of the region and a second width narrower than the first width at a portion far from the center side. apparatus.   The ozone generator according to any one of claims 1 to 3, wherein the partition plate has a long hole portion through which a plurality of the first electrodes are inserted.

Images