JP2017133990A - Environment measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a contaminant from being supplied to a chamber and an increase in pressure in the chamber.SOLUTION: An environment measuring device 1 comprises: a circulation pipe 11 connected to a cell cultivation chamber 50a; a sensor 12, a pump 13 and so on that are provided at the circulation pipe 11; a connection pipe 19; and a pump housing 30. The pump housing 30 defines a pump chamber 30a containing the pump 13 and is hermetically closed against outside air. The connection pipe 19 connects the pump housing 30 and a first pipe 11x of the circulation pipe 11.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an environment measuring device for measuring the environment of a chamber containing gas.

  For the purpose of keeping the environment of a chamber (cell culture room, cell test room, cell transfer room, etc.) containing gas (clean air, sterilization gas, etc.) constant, it has one end and the other end connected to the chamber. A technique is known in which a circulation pipe is provided and a gas passing through the circulation pipe is measured by a sensor. For example, in Patent Document 1, an ozone concentration monitor including an ozone concentration meter and a circulation pump is provided for the sterilization chamber, and the gas in the sterilization chamber is circulated through the circulation pipe using the circulation pump. A technique for measuring the ozone concentration of an ozone with an ozone densitometer is shown.

  The pump is provided between a first pipe part including one end of the circulation pipe and a second pipe part including the other end of the circulation pipe, and is connected to an end of the first pipe part opposite to the one end. It has an exhaust port connected to the end opposite to the other end of the port and the second pipe portion. A gas in the chamber flows into the circulation pipe from one end by the pump, and a gas flow is generated in the circulation pipe through the sensor toward the other end and returning to the chamber through the other end.

JP 2010-234067 A

  Due to its characteristics, the pump not only sucks the gas in the circulation pipe from the intake port but also sucks the air around the pump. In the technique of Patent Document 1, air around the pump (outside air) flows into the circulation pipe, and pollutants (miscellaneous bacteria, etc.) contained in the air are supplied to the chamber. A problem that the pressure of the chamber rises due to the increase in the number of s.

  An object of the present invention is to provide an environment measurement device that can suppress the problem of supplying contaminants to a chamber and the problem of an increase in chamber pressure.

  According to the present invention, in the environment measuring apparatus for measuring the environment of the chamber containing the gas, the circulation pipe having one end and the other end connected to the chamber, the circulation pipe is provided and passes through the circulation pipe Provided between a sensor for measuring gas, a first pipe part including the one end of the circulation pipe and a second pipe part including the other end of the circulation pipe, and the one end of the first pipe part A pump having an inlet connected to an end opposite to the other end and an exhaust outlet connected to an end opposite to the other end of the second pipe, wherein the gas in the chamber is A pump for generating a gas flow that flows into the circulation pipe from one end, passes through the sensor in the circulation pipe to the other end, and returns to the chamber through the other end; and the pump is accommodated The A pump housing case that defines a pump chamber and is sealed from outside air, and a connection pipe that connects the pump housing housing and the first pipe portion or the chamber. An environmental measurement device is provided.

  According to the present invention, the air around the pump sucked by the pump becomes the air in the pump chamber. The pump housing case that defines the pump chamber is sealed with respect to the outside air, and is connected to either the first pipe portion or the chamber by a connection pipe. Therefore, the air in the pump chamber corresponds to the gas in the chamber, and the pump sucks the air, so that it is possible to suppress the problem that contaminants are supplied to the chamber. Further, since the intake air amount and the exhaust air amount to the chamber become equal, the problem of an increase in the chamber pressure is also suppressed.

The connection pipe connects the pump housing case and the first pipe part, between the one end of the first pipe part and the part to which the connection pipe is connected, and of the second pipe part. Each may be provided with an on-off valve.
According to the said structure, a pump can be protected from sterilization gas by supplying sterilization gas to a chamber in the state which closed each on-off valve at the time of sterilization of a chamber. As a result, it is possible to use a pump having low resistance to sterilization gas, and cost reduction can be realized.
Further, when the on-off valve arranged upstream of the gas flow with respect to the pump is provided between the portion of the first pipe portion where the connection pipe is connected and the end opposite to the one end, the connection pipe Since the sterilizing gas can flow into the pump chamber through the connection pipe, it is necessary to provide an opening / closing valve on the connecting pipe, and the number of the opening / closing valves can be increased. On the other hand, according to the said structure, the increase in the number of on-off valves can be suppressed.

A filter for capturing particles may be provided between the one end of the first pipe portion and a portion where the connection pipe is connected, and at least one of the second pipe portions.
According to the above configuration, when the gas flows backward when the environmental measuring device is turned off by the filter provided between the one end of the first pipe portion and the portion where the connection pipe is connected, the particles in the pump chamber Can be prevented from flowing into the chamber through the connection pipe and the first pipe section, and particles inside the pump from flowing into the chamber through the first pipe section from the intake port. Further, the filter provided in the second pipe part can prevent particles in the circulation pipe from flowing into the chamber.

The connection pipe may connect the pump housing and the chamber, and an open / close valve may be provided in each of the first pipe section, the second pipe section, and the connection pipe.
According to the said structure, a pump can be protected from sterilization gas by supplying sterilization gas in a chamber in the state which closed each on-off valve at the time of sterilization of a chamber. As a result, it is possible to use a pump having low resistance to sterilization gas, and cost reduction can be realized.

A filter for capturing particles may be provided in at least one of the connection pipe and the second pipe portion.
According to the above configuration, the filter provided in the connection pipe prevents particles in the pump chamber from flowing into the chamber through the connection pipe when the gas flows backward when the environmental measurement device is turned off. Can do. Further, the filter provided in the second pipe part can prevent particles in the circulation pipe from flowing into the chamber.

The sensor is provided between the opening / closing valve and the end opposite to the one end of the first pipe, and to the end of the second pipe opposite to the opening / closing valve and the other end. May be provided at any of the intervals.
According to the above configuration, at the time of sterilization of the chamber, by supplying sterilization gas into the chamber with each on-off valve being closed, not only the pump but also the sensor can be protected from the sterilization gas. As a result, it becomes possible to use a sensor having low resistance to sterilization gas, and it is possible to realize cost reduction.

The sensor is a particle sensor for measuring particles in the gas passing through the circulation pipe, and may be provided in the first pipe section.
According to the above configuration, since the sensor is located upstream of the gas flow with respect to the pump, the particles inside the pump are prevented from flowing into the circulation pipe and the detection accuracy of the sensor being deteriorated by the particles. be able to.

  According to the present invention, the air around the pump sucked by the pump becomes the air in the pump chamber. The pump housing case that defines the pump chamber is sealed with respect to the outside air, and is connected to either the first pipe portion or the chamber by a connection pipe. Therefore, the air in the pump chamber corresponds to the gas in the chamber, and the pump sucks the air, so that it is possible to suppress the problem that contaminants are supplied to the chamber. Further, since the intake air amount and the exhaust air amount to the chamber become equal, the problem of an increase in the chamber pressure is also suppressed.

It is a schematic block diagram which shows the environment measuring apparatus which concerns on 1st Embodiment of this invention. It is a schematic block diagram which shows the environment measuring apparatus which concerns on 2nd Embodiment of this invention.

  First, a first embodiment of the present invention will be described with reference to FIG.

  The environment measuring device 1 according to the first embodiment of the present invention is for measuring the environment of a cell culture chamber 50a included in the cell culture device 50, and includes one end 11a connected to the cell culture chamber 50a and the like. A circulation pipe 11 having an end 11b, a sensor 12, a pump 13, a flow meter 14, a UV lamp 15, an on-off valve 16 and a filter 17 provided in the circulation pipe 11, a connection pipe 19, a pump housing 30, Controller (not shown).

  The cell culture chamber 50a contains clean air (gas). The cell culture chamber 50a is filled with a sterilization gas by being supplied with a sterilization gas such as hydrogen peroxide gas during sterilization. That is, the cell culture chamber 50a normally stores clean air and stores sterilization gas such as hydrogen peroxide gas during sterilization.

  Further, the cell culture chamber 50a is maintained at a constant temperature and a pressure higher than the atmospheric pressure under the control of a controller (not shown) of the cell culture device 50.

  The circulation pipe 11 is divided into a first pipe part 11x including one end 11a and a second pipe part 11y including the other end 11b.

  In the present embodiment, the connection pipe 19 connects the pump housing 30 and the first pipe part 11x.

  The sensor 12 is a particle sensor for measuring particles in the gas passing through the circulation pipe 11, and is provided in the first pipe portion 11x. In detail, the sensor 12 is connected between the on-off valve 16 in the first tube portion 11x and the end portion 11c opposite to the one end 11a (more specifically, the connection tube 19 in the first tube portion 11x is connected. (Between the portion 11e and the pump housing 30).

  For example, the controller of the environment measuring apparatus 1 outputs the value measured by the sensor 12 to output means (display, speaker, etc.). The operator confirms the value output to the output means, and operates the controller of the cell culture device 50 so that the particles in the cell culture chamber 50a are removed as necessary.

  The pump 13 is a vacuum pump (for example, a diaphragm type vacuum pump, an oscillating piston type vacuum pump, a dry pump, etc.), and is driven by the control of the controller of the environment measuring apparatus 1, and the gas in the cell culture chamber 50a is at one end 11a. Then, the gas flows into the circulation pipe 11, passes through the sensor 12 in the circulation pipe 11, travels toward the other end 11 b, and returns to the cell culture chamber 50 a through the other end 11 b. The pump 13 is provided between the first pipe part 11x and the second pipe part 11y, and is connected to an end part 11c opposite to the one end 11a in the first pipe part 11x and the second pipe part. 11y has an exhaust port 13b connected to an end 11d opposite to the other end 11b.

  The flow meter 14 measures the flow rate of the gas passing through the circulation pipe 11. For example, the controller of the environment measuring apparatus 1 uses an amount of gas suitable for the sensor 12 in the portion of the circulation pipe 11 corresponding to the error of the pump 13 or the measurement location of the sensor 12 based on the value measured by the flow meter 14. It is determined whether or not is flowing, and the like is output to the output means.

  The UV lamp 15 irradiates the gas passing through the circulation pipe 11 with ultraviolet rays. The gas in the circulation tube 11 is sterilized by the ultraviolet rays irradiated by the UV lamp 15, and then returned from the other end 11b to the cell culture chamber 50a.

  The on-off valve 16 includes a first tube portion 11x between one end 11a and a portion 11e to which the connection tube 19 is connected, and a second tube portion 11y (specifically, between the other end 11b and the UV lamp 15). Of each. Each on-off valve 16 selectively takes an open position for allowing the gas flow in the circulation pipe 11 and a closed position for prohibiting the gas flow in the circulation pipe 11 under the control of the controller of the environment measuring apparatus 1. obtain. For example, each on-off valve 16 is maintained in the closed position while sterilization gas is supplied to the cell culture chamber 50a when the cell culture chamber 50a is sterilized.

  The filter 17 is for capturing particles, and is between the one end 11a of the first pipe part 11x and the part 11e to which the connection pipe 19 is connected (specifically, between the on-off valve 16 and the part 11e). And the second pipe portion 11y (specifically, between the on-off valve 16 and the UV lamp 15).

  The pump housing case 30 defines a pump chamber 30a in which the pump 13 is housed, and is sealed against the outside air. The pump housing 30 is provided with a through-hole through which the vicinity of the end 11c of the first pipe 11x is inserted, a through-hole through which the vicinity of the end 11d of the second pipe 11y is inserted, and a power cord for the pump 13. A through hole for drawing out the pump chamber 30a, a through hole for inserting a pressure gauge for measuring the pressure in the pump chamber 30a, and the like are formed. The pump housing 30 is sealed against the outside air so that the pump chamber 30a does not communicate with the outside air (the air outside the pump chamber 30a excluding the air inside the connection pipe 19) through these through holes.

  As described above, according to the present embodiment, the air around the pump sucked by the pump 13 becomes the air in the pump chamber 30a. The pump housing 30 that defines the pump chamber 30 a is hermetically sealed with respect to the outside air, and is connected to the first pipe portion 11 x by the connection pipe 19. Therefore, since the air in the pump chamber 30a corresponds to the gas in the cell culture chamber 50a and the pump 13 sucks the air, the problem of supplying contaminants to the cell culture chamber 50a can be suppressed. it can. Further, since the intake air amount and the exhaust air amount with respect to the cell culture chamber 50a become equal, the problem of an increase in the pressure of the cell culture chamber 50a is also suppressed.

The connection pipe 19 connects the pump housing 30 and the first pipe part 11x, and between the one end 11a of the first pipe part 11x and the part 11e to which the connection pipe 19 is connected, and the second pipe part 11y. Each of these is provided with an on-off valve 16.
According to the above configuration, when the cell culture chamber 50a is sterilized, the pump 13 can be protected from the sterilization gas by supplying the sterilization gas to the cell culture chamber 50a with each on-off valve 16 closed. As a result, it becomes possible to use the pump 13 having low resistance to sterilization gas, and it is possible to realize cost reduction.
In addition, the on-off valve 16 disposed upstream of the gas flow with respect to the pump 13 is connected between a portion 11e of the first pipe portion 11x to which the connecting pipe 19 is connected and an end portion 11c opposite to the one end 11a. Since the sterilizing gas can flow into the pump chamber 30a through the connection pipe 19, it is necessary to provide the opening / closing valves 16 in the connection pipe 19, and the number of the opening / closing valves 16 can be increased. On the other hand, according to the said structure, the increase in the number of the on-off valves 16 can be suppressed.

Filters 17 for capturing particles are provided between the one end 11a of the first tube portion 11x and the portion 11e to which the connection tube 19 is connected, and in each of the second tube portions 11y.
According to the above configuration, when the gas flows backward by the filter 17 provided between the one end 11a of the first pipe portion 11x and the portion 11e to which the connection pipe 19 is connected, when the environment measuring device 1 is turned off. In addition, particles in the pump chamber 30a flow into the cell culture chamber 50a via the connection pipe 19 and the first pipe portion 11x, and particles inside the pump 13 pass from the intake port 13a via the first pipe portion 11x. Both can be prevented from flowing into the cell culture chamber 50a. Furthermore, the filter 17 provided in the second pipe portion 11y can prevent particles in the circulation pipe 11 from flowing into the cell culture chamber 50a.

The sensor 12 is provided between the opening / closing valve 16 and the end 11c opposite to the one end 11a in the first pipe portion 11x.
According to the above configuration, when the cell culture chamber 50a is sterilized, the sterilization gas is supplied into the cell culture chamber 50a with each on-off valve 16 closed, so that not only the pump 13 but also the sensor 12 can be sterilized gas. Can be protected from. As a result, it is possible to use the sensor 12 having low resistance to sterilization gas, and it is possible to realize cost reduction.

The sensor 12 is a particle sensor for measuring particles in the gas passing through the circulation pipe 11, and is provided in the first pipe portion 11x.
According to the above configuration, since the sensor 12 is positioned upstream of the gas flow with respect to the pump 13, particles in the pump 13 flow into the circulation pipe 11, and the detection accuracy of the sensor 12 is increased by the particles. It can be prevented from deteriorating.

  Next, a second embodiment of the present invention will be described with reference to FIG.

  The environment measurement apparatus 100 according to the second embodiment of the present invention has the same configuration as the environment measurement apparatus 1 according to the first embodiment, except for the arrangement mode of the connecting pipe 19 and the arrangement mode of the on-off valve 16 and the filter 17. Have. Hereinafter, description of the same configuration as that of the first embodiment will be omitted.

  In the present embodiment, the connection pipe 19 connects the pump housing 30 and the cell culture chamber 50a.

  The on-off valve 16 includes a first tube portion 11x (specifically, between one end 11a and the sensor 12), a second tube portion 11y (specifically, between the other end 11b and the UV lamp 15), and a connecting tube 19. Of each.

  The filter 17 is connected to each of the connecting pipe 19 (specifically, between the on-off valve 16 and the pump housing 30) and the second pipe part 11y (specifically, between the on-off valve 16 and the UV lamp 15). Is provided.

  As described above, according to this embodiment, the same effect as that of the first embodiment can be obtained. That is, the air around the pump sucked by the pump 13 becomes the air in the pump chamber 30a. The pump housing 30 that defines the pump chamber 30a is hermetically sealed against the outside air, and is connected to the cell culture chamber 50a by the connecting pipe 19. Therefore, since the air in the pump chamber 30a corresponds to the gas in the cell culture chamber 50a and the pump 13 sucks the air, the problem of supplying contaminants to the cell culture chamber 50a can be suppressed. it can. Further, since the intake air amount and the exhaust air amount with respect to the cell culture chamber 50a become equal, the problem of an increase in the pressure of the cell culture chamber 50a is also suppressed.

In the present embodiment, the connection pipe 19 connects the pump housing 30 and the cell culture chamber 50a, and the opening / closing valve 16 is provided in each of the first pipe section 11x, the second pipe section 11y, and the connection pipe 19. Is provided.
According to the above configuration, when the cell culture chamber 50a is sterilized, the pump 13 can be protected from the sterilization gas by supplying the sterilization gas into the cell culture chamber 50a with each on-off valve 16 closed. As a result, it becomes possible to use the pump 13 having low resistance to sterilization gas, and it is possible to realize cost reduction.

In the present embodiment, a filter 17 for capturing particles is provided in each of the connection pipe 19 and the second pipe portion 11y.
According to the above configuration, when gas flows backward by the filter 17 provided in the connection pipe 19 when the environment measurement apparatus 1 is powered off, the particles in the pump chamber 30 a are transferred to the cell culture chamber via the connection pipe 19. Inflow to 50a can be prevented. Furthermore, the filter 17 provided in the second pipe portion 11y can prevent particles in the circulation pipe 11 from flowing into the cell culture chamber 50a.

  The preferred embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments. For example, various design changes can be made as long as they are described in the claims as follows. It is a thing.

-The chamber according to the present invention is not limited to a cell culture chamber, but is an arbitrary space for storing gas (cell test chamber, cell transfer chamber, substrate (semiconductor wafer, liquid crystal display panel, etc.) manufacturing chamber, substrate transfer chamber, etc.) It may be.
-Gas accommodated in the chamber according to the present invention is not limited to clean air or hydrogen peroxide gas, and may be any kind of gas (ethylene oxide gas, nitrogen gas, argon gas, etc.) A gas may be mixed.
-The sensor which concerns on this invention is not limited to the particle sensor for measuring the particle in gas, Arbitrary sensors for measuring gas (The concentration sensor for measuring the density | concentration of ozone in nitrogen, nitrogen, An odor sensor for measuring gas odor, a temperature sensor for measuring gas temperature, a humidity sensor for measuring gas humidity, and the like.
The sensor according to the present invention may be integrated with the pump according to the present invention. The sensor according to the present invention may be disposed in the pump chamber both in the case of being integrated with the pump according to the present invention and in the case of being separate from the pump according to the present invention.
-The sensor which concerns on this invention may be provided between the opening-closing valve in a 2nd pipe part, and the edge part on the opposite side to an other end.
The filter according to the present invention may be provided either upstream or downstream of the gas flow with respect to the on-off valve.
-The filter according to the present invention is configured such that when the connection pipe connects the pump housing and the first pipe part, between the end of the first pipe part and the part where the connection pipe is connected, and What is necessary is just to be provided in at least one of 2 pipe parts. That is, one of the two filters 17 of the first embodiment (FIG. 1) may be omitted.
-The filter which concerns on this invention should just be provided in at least one of a connection pipe and a 2nd pipe part, when a connection pipe has connected the pump accommodating housing | casing and the chamber. That is, one of the two filters 17 of the second embodiment (FIG. 2) may be omitted.
In the environmental measurement device according to the present invention, the flow meter and the UV lamp are not essential requirements and may be omitted.

DESCRIPTION OF SYMBOLS 1; 100 Environmental measurement apparatus 11 Circulation pipe 11a One end 11b Other end 11x 1st pipe part 11y 2nd pipe part 12 Sensor 13 Pump 13a Intake port 13b Exhaust port 16 On-off valve 17 Filter 19 Connection pipe 30 Pump accommodation housing 30a Pump chamber 50 Cell culture equipment 50a Cell culture chamber

Claims (5)

In an environment measuring device for measuring the environment of a chamber containing gas,
A circulation tube having one end and the other end connected to the chamber;
A sensor provided in the circulation pipe for measuring gas passing through the circulation pipe;
Provided between a first pipe part including the one end of the circulation pipe and a second pipe part including the other end of the circulation pipe, and connected to an end of the first pipe part opposite to the one end A pump having an exhaust port connected to an end of the second pipe portion opposite to the other end of the second pipe portion, and the gas in the chamber flows into the circulation pipe from the one end, A pump for generating a flow of gas through the sensor to the other end in the circulation pipe and back to the chamber through the other end;
A pump housing housing that defines a pump chamber in which the pump is housed and is sealed from outside air;
An environment measurement apparatus comprising: a connection pipe that connects the pump housing case and any one of the first pipe section and the chamber. The connecting pipe connects the pump housing and the first pipe section;
2. The on-off valve is provided between the one end of the first pipe part and a part to which the connection pipe is connected, and in each of the second pipe parts. Environmental measurement equipment. The connecting pipe connects the pump housing and the chamber;
The environment measuring device according to claim 1, wherein an opening / closing valve is provided in each of the first pipe part, the second pipe part, and the connection pipe.   The sensor is provided between the opening / closing valve and the end opposite to the one end of the first pipe, and to the end of the second pipe opposite to the opening / closing valve and the other end. The environment measuring device according to claim 2, wherein the environment measuring device is provided between the two.   5. The sensor according to claim 1, wherein the sensor is a particle sensor for measuring particles in the gas passing through the circulation pipe, and is provided in the first pipe portion. Environmental measuring device.

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