JP2017132007A - Alignment stage and processing device comprising the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an alignment stage that can sufficiently correct a deviation of a work-piece without needing a rotation stopper and a processing device comprising the same.SOLUTION: An alignment stage 1 comprises: a first plate 2 having a first concave surface 2J formed partially in a cylindrical inner surface shape extending along a Y direction; a second plate 3 which has a first convex surface 3J, arranged on the first plate 2, which has a shape extending along the first concave surface 2J at the first plate 2 side and a second concave surface (3K) formed partially in a cylindrical inner surface shape extending along a X direction orthogonal to the Y direction at the opposite side of the first plate 2 side; and a third plate 4, arranged on the second plate 3, which has a second convex surface 4E having a shape extending along the second concave surface 3K at the second plate 3 side.SELECTED DRAWING: Figure 4

Description

  The present invention relates to an alignment stage for causing a workpiece to be machined by a rotary tool to follow the rotary tool, and a machining apparatus including the alignment stage.

  Conventionally, an alignment stage that corrects a deviation of a work has been proposed (see, for example, Patent Document 1).

  In the alignment stage of Patent Document 1, a base having a convex spherical surface is arranged on a aligning table having a concave spherical surface, and the base is slid with respect to the aligning table so that the base is in a predetermined direction. It is comprised so that it may maintain a perpendicular | vertical state with respect to it. Moreover, in the alignment stage of patent document 1, the rotation stopper with respect to the alignment table of a base is provided.

Japanese Patent No. 5053949

  However, in the alignment stage of Patent Document 1, the movement for correcting the deviation of the base is hindered by the rotation stop, and the deviation cannot be corrected sufficiently. In addition, the alignment stage of Patent Document 1 can only slightly correct the horizontal displacement.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an alignment stage that does not require a rotation stopper and can sufficiently correct a deviation of a workpiece, and a processing apparatus including the alignment stage.

  In order to solve the above-described problems, an alignment stage according to an embodiment of the present invention is an alignment stage for supporting a workpiece and performing self-alignment, and is a first part of an inner surface of a partial cylinder extending along a first direction. A first plate having a concave surface, a first convex surface disposed on the first plate and having a shape along the first concave surface on the first plate side, and the first plate on the side opposite to the first plate side A second plate having a second concave surface having a partially cylindrical inner surface extending along a second direction orthogonal to the direction, and a shape along the second concave surface on the second plate side, disposed on the second plate. And a third plate having a second convex surface.

  The first concave surface of the first plate and the second concave surface of the second plate are formed of a porous sintered body, from the first concave surface of the first plate to the first convex surface of the second plate. The compressed gas may be discharged toward the second plate, and the compressed gas may be discharged from the second concave surface of the second plate toward the second convex surface of the third plate.

  The first concave surface of the first plate and the first convex surface of the second plate are in contact with each other via a lubricant, and the second concave surface of the second plate and the second convex surface of the third plate. May contact each other via a lubricant.

  Biasing means for urging the second plate to return to the initial position with respect to the first plate, and urging means for urging the third plate to return to the initial position with respect to the second plate. Also good.

  A processing apparatus according to an embodiment of the present invention includes a rotary tool that is rotationally driven, a workpiece that is processed by the rotary tool, and the alignment stage that supports the workpiece and automatically aligns.

  According to the present invention, it is possible to provide an alignment stage that does not require a rotation stop and that can sufficiently correct the displacement of a workpiece, and a processing apparatus including the alignment stage.

The schematic of a processing apparatus provided with the alignment stage which concerns on this Embodiment is shown. The partial cross section side view when an alignment stage is seen from a Y direction is shown. The partial cross section side view when an alignment stage is seen from a X direction is shown. (A) shows the perspective view of the 1st-3rd plate, (b) shows the disassembled perspective view of the 1st-3rd plate. The top view of a 1st plate and a 2nd plate is shown. The figure for demonstrating the automatic alignment with respect to the rotary tool of the workpiece | work by an alignment stage is shown.

  An alignment stage 1 according to an embodiment of the present invention will be described with reference to the drawings.

  The alignment stage 1 is used in a processing apparatus 10 that processes a workpiece 14 with a rotary tool 12, and detects a horizontal position shift and a vertical tilt angle shift of the center axis A of the work 14 with respect to a rotation axis C of the rotary tool 12. It is a centering mechanism to absorb.

  FIG. 1 shows a schematic diagram of a processing apparatus 10 including an alignment stage 1 according to the present embodiment. The processing apparatus 10 is an apparatus for performing, for example, roller burnishing.

<Whole structure of the processing apparatus 10>
As shown in FIG. 1, the processing apparatus 10 includes a motor 11, a rotary tool 12, an alignment stage 1, and a fixture 13. The rotary tool 12 is driven to rotate in a predetermined direction R by the motor 11. The rotary tool 12 is, for example, roller burnishing, and is provided so as to be movable in the vertical direction. The fixture 13 is, for example, a lever chuck, is provided on the third upper surface 4A of the third plate 4 of the alignment stage 1, and fixes the workpiece 14 to be processed. In the present embodiment, the work 14 is a cylindrical bush and has an inner peripheral surface 14a.

<Alignment stage 1>
Next, the configuration of the alignment stage 1 will be described with reference to FIGS. In addition, the left-right direction in the alignment stage 1 shown in FIG. The Y direction corresponds to the first direction, and the X direction corresponds to the second direction.

  FIG. 2 is a partial cross-sectional side view of the alignment stage 1 when viewed from the Y direction. FIG. 3 shows a partial cross-sectional side view of the alignment stage 1 when viewed from the X direction. 4A shows a perspective view of the first to third plates 2 to 4, and FIG. 4B shows an exploded perspective view of the first to third plates 2 to 4. FIG. 5 shows a plan view of the first plate 2 and the second plate 3.

  As shown in FIGS. 2 and 3, the alignment stage 1 includes a first plate 2, a second plate 3, a third plate 4, a plurality of support posts 5, and a plurality of tension springs 6. The first plate 2, the second plate 3, and the third plate 4 are stacked from the bottom in this order.

<First plate 2>
As shown in FIGS. 2-4, the 1st plate 2 is installed on the installation stand which is not shown in figure, and is provided with 2 A of 1st plate bases, and the 1st sintered part 2B.

  The first plate base 2A is made of stainless steel or the like and has a substantially flat plate shape. A first recess 2d is formed in the first plate base 2A. The first recess 2d is formed to open to the first upper surface 2C of the first plate base 2A and the first to first side surfaces 2E and 2E perpendicular to the Y direction. Insertion holes 2g are formed at two locations on the first and second side surfaces 2F and 2F orthogonal to the X direction in the first plate base 2A. Each insertion hole 2g is formed at an end portion in the Y direction on each first-second side surface 2F. A first air supply hole 2h extending along the X direction is formed on one first-second side surface 2F. An air supply tube of an air supply pump (not shown) is connected to the first air supply hole 2h. Two air supply grooves 2i are formed in the first recess 2d of the first plate base 2A. As shown in FIG. 5, the two air supply grooves 2i have rectangular annular shapes with different sizes, and communicate with the first air supply hole 2h.

  As shown in FIGS. 2 to 4, the first sintered portion 2 </ b> B is provided in the first recess 2 d of the first plate base 2 </ b> A. The 1st sintered part 2B is comprised by the porous sintered compact, and the 1st concave surface 2J of the partial cylindrical inner surface shape extended along a Y direction is formed in the 2nd plate 3 side. The first concave surface 2J has a predetermined radius of curvature. The first sintered portion 2B forms a porous sintered plate by high-temperature sintering metal powder or alloy powder such as copper powder, stainless steel powder, aluminum powder or the like in which a solid lubricant such as graphite is dispersed. Then, the sintered plate material is laminated on the first recess 2d of the first plate base 2A, heated and compressed, diffused, and cut to have a predetermined radius of curvature. Compressed air supplied from an air supply pump (not shown) is supplied to the first sintered portion 2B via the first air supply hole 2h and the air supply groove 2i, and from the first concave surface 2J of the first sintered portion 2B, It is discharged uniformly toward the second plate 3.

<Second plate 3>
The second plate 3 is disposed on the first plate 2 and includes a second plate base 3A and a second sintered portion 3B.

  The second plate base 3A is made of stainless steel or the like and has a substantially flat plate shape. A second recess 3d is formed on the second upper surface 3C of the second plate base 3A. The second recess 3d is formed so as to open to the second upper surface 3C of the second plate base 3A and the 2-1 side surfaces 3E and 3E orthogonal to the X direction. Insertion holes 3g are formed in two locations on the 2-1 side surfaces 3E, 3E and the 2-2 side surfaces 3F, 3F orthogonal to the Y direction in the second plate base 3A. Each insertion hole 3g is formed at an end portion in the X direction or the Y direction on each of the 2-1 side surface 3E and the 2-2 side surface 3F. Each insertion hole 3g formed in the 2-1 side surface 3E of the second plate base 3A is positioned above each insertion hole 2g formed in the 1-2 side surface 2F of the first plate 2. A second air supply hole 3h extending along the Y direction is formed on one of the 2-2 side surfaces 3F. An air supply tube of an air supply pump (not shown) is connected to the second air supply hole 3h. Two air supply grooves 3i are formed in the second recess 3d of the second plate base 3A. As shown in FIG. 5, the two air supply grooves 3i have rectangular annular shapes with different sizes, and communicate with the second air supply hole 3h. In FIG. 5, reference numbers in parentheses correspond to reference numbers of components of the second plate 3.

  On the first plate 2 side of the second plate base portion 3A, a first convex surface 3J having a partial cylindrical surface extending along the Y direction is formed. The radius of curvature of the first convex surface 3J is substantially equal to the radius of curvature of the first concave surface 2J of the first plate 2. Therefore, the first convex surface 3J and the first concave surface 2J are aligned with each other. The second plate 3 is installed with respect to the first plate 2 so that the first convex surface 3J of the second plate 3 is aligned with the first concave surface 2J of the first plate 2. Therefore, the second plate 3 can swing with respect to the first plate 2 about the central axis extending along the Y direction of the first convex surface 3J having a partial cylindrical surface and can move along the Y direction. Therefore, the second plate 3 is movable with two degrees of freedom (Y direction, θy direction) with respect to the first plate 2.

  The second sintered portion 3B is provided in the second recess 3d of the second plate base 3A. The second sintered portion 3B is formed of a porous sintered body, and a second concave surface 3K having a partially cylindrical inner surface extending along the X direction is formed on the third plate 4 side. The second concave surface 3K has a predetermined radius of curvature. The second sintered portion 3B is formed in the same manner as the first sintered portion 2B of the first plate 2. Compressed air supplied from an air supply pump (not shown) is supplied to the second sintered portion 3B via the second air supply hole 3h and the air supply groove 3i, and from the second concave surface 3K of the second sintered portion 3B, It is discharged uniformly toward the third plate 4.

<Third plate 4>
The 3rd plate 4 is arrange | positioned on the 2nd plate 3, is comprised with stainless steel etc., and has comprised the substantially flat plate shape. A plurality of attachment holes 4b for screwing bolts for attaching the fixture 13 to the third plate 4 are formed in the third upper surface 4A of the third plate 4. Insertion holes 4d are formed at two locations on each of the 3-1 side surfaces 4C and 4C perpendicular to the Y direction in the third plate 4. Each insertion hole 4d is formed at an end portion in the X direction on each of the 3-1 side surfaces 4C and 4C. Further, each insertion hole 4d is located above each insertion hole 3g formed in the second-second side surface 3F of the second plate 3.

  On the second plate 3 side of the third plate 4, a partially convex second convex surface 4 </ b> E extending along the X direction is formed. The radius of curvature of the second convex surface 4 </ b> E is configured to be approximately equal to the radius of curvature of the second concave surface 3 </ b> K of the second plate 3. Therefore, the second convex surface 4E and the second concave surface 3K are aligned with each other. The third plate 4 is installed with respect to the second plate 3 so that the second convex surface 4E of the third plate 4 is aligned with the second concave surface 3K of the second plate 3. Therefore, the third plate 4 can swing with respect to the second plate 3 about the central axis extending along the X direction of the second convex surface 4E having a partial cylindrical surface and can move along the X direction. Therefore, the third plate 4 can move with respect to the second plate 3 with two degrees of freedom (X direction, θx direction). As a result, the first to third plates 2 to 4 provide the alignment stage 1 having four degrees of freedom (X direction, Y direction, θx direction, and θy direction).

  Each support post 5 is inserted into each insertion hole 2g, 3g, 4d and fixed to the first to third plates 2-4. Respective tension springs 6 corresponding to urging means are attached to a pair of support posts 5 arranged along the Z direction. Specifically, in the first plate 2 and the second plate 3, a plurality of support posts provided on the first-second side surfaces 2F and 2F of the first plate 2 and the second-first side surfaces 3E and 3E of the second plate 3. A plurality of tension springs 6 are attached to 5. Thus, since the first plate 2 and the second plate 3 are connected to each other by the plurality of tension springs 6, even if the second plate 3 is displaced with respect to the first plate 1, the plurality of tension springs 6. Due to the urging force, the second plate 3 returns to the initial position. The initial position of the second plate 3 is that the 2-1 side surface 3E, 3E of the second plate 3 is relative to the 1-2 side surface 2F, 2F of the first plate 2, and the second plate 3 The 2-2 side surfaces 3F and 3F are positions with respect to the first plate 2 of the second plate 3 that are flush with the first to second side surfaces 2E and 2E of the first plate 2.

  Further, in the second plate 3 and the third plate 4, a plurality of support posts 5 provided on the 2-2 side surfaces 3F and 3F of the second plate 3 and the 3-1 side surfaces 4C and 4C of the third plate 4 are provided. A plurality of tension springs 6 are mounted. Thereby, even if the 3rd plate 4 displaces with respect to the 2nd plate 3, the 3rd plate 4 returns to an initial position with the urging | biasing force of several tension springs 6. FIG. The initial position of the third plate 4 refers to the third side surface 4C, 4C of the third plate 4 with respect to the second side surface 3F, 3F of the second plate 3, and the X position of the third plate 4. The third and second side surfaces 4F and 4F perpendicular to the direction are the positions of the third plate 4 with respect to the second plate 3 that are flush with the second and second side surfaces 3E and 3E of the second plate 3.

  Next, the operation of the alignment stage 1 when the workpiece 14 is machined by the machining apparatus 10 will be described with reference to FIG.

  FIG. 6 is a view for explaining automatic alignment of the work 14 with respect to the rotary tool 12 by the alignment stage 1 in the present embodiment.

  In FIG. 6A, since the right angle between the installation base (not shown) on which the alignment stage 1 is installed and the rotation axis C of the rotary tool 12 is not precise, the central axis A of the inner peripheral surface 14a of the work 14 is With respect to the twelve rotation axes C, the XY plane is shifted and the angle is also shifted. Since the compressed air is uniformly discharged from the first concave surface 2J of the first plate 2 toward the first convex surface 3J of the second plate 3, the first concave surface 2J of the first plate 2 and the second plate 3 An air layer 7 is formed between the first convex surface 3J. Therefore, the first concave surface 2J of the first plate 2 and the first convex surface 3J of the second plate 3 are in a non-contact state. Similarly, an air layer 8 is also formed between the second concave surface 3K of the second plate 3 and the second convex surface 4E of the third plate 4. Therefore, the second concave surface 3K of the second plate 3 and the second convex surface 4E of the third plate 4 are in a non-contact state.

  In the state of the rotary tool 12 and the workpiece 14 shown in FIG. 6A, the rotary tool 12 that is rotationally driven is lowered and the rotary tool 12 is inserted into the inner peripheral surface 14 a of the workpiece 14. The pressing force of the rotary tool 12 against the work 14 is transmitted to the alignment stage 1 via the fixture 13. Thereby, the alignment stage 1 operates so that the center axis A of the inner peripheral surface 14 a of the work 14 is not displaced from the rotation axis C of the rotary tool 12.

  For example, as shown in FIG. 6B, in order to eliminate the deviation of the XY plane of the central axis A of the inner peripheral surface 14a of the work 14 with respect to the rotation axis C of the rotary tool 12, the second plate 3 is The first plate 2 is displaced (moved) along the Y direction, and the third plate 4 is displaced (moved) along the X direction on the second plate 3. Further, the second plate 3 is formed on the first concave surface 2J of the first plate 2 in order to eliminate the deviation of the vertical inclination angle of the central axis A of the inner peripheral surface 14a of the work 14 with respect to the rotation axis C of the rotary tool 12. The third plate 4 is displaced (swinged) along with the displacement of the second plate 3.

  In this way, the workpiece 14 can be traced along the rotary tool 12, and the center axis A of the workpiece 14 can be positioned on the same axis as the rotation axis C of the rotary tool 12.

  When the roller burnishing process of the inner peripheral surface 14a of the work 14 by the rotary tool 12 is completed and the rotary tool 12 is separated from the work 14, the second plate 3 and the third plate 4 are Return to their initial position.

<Effect>
As described above, the alignment stage 1 of the present embodiment is disposed on the first plate 2 having the first concave surface 2J having a partially cylindrical inner surface extending along the Y direction and on the first plate 2 side. A second convex surface 3J having a shape along the first concave surface 2J and a second concave surface 3K having a partially cylindrical inner surface extending along the X direction orthogonal to the Y direction on the opposite side of the first plate 2 side. The plate 3 and the 3rd plate 4 which is arrange | positioned on the 2nd plate 3 and has the 2nd convex surface 4E which has a shape along the 2nd concave surface 3K in the 2nd plate 3 side are provided.

  According to such a configuration, the second plate 3 can swing with respect to the first plate 2 about the central axis extending along the Y direction of the first cylindrical convex surface 3J and move along the Y direction. The third plate 4 is swingable with respect to the second plate 3 about the central axis extending along the X direction of the second convex surface 4E having a partial cylindrical surface, and is movable along the X direction. is there. As a result, the first to third plates 2 to 4 can provide the alignment stage 1 having four degrees of freedom (X direction, Y direction, θx direction, θy direction), and correct the deviation of the workpiece 14 from the rotary tool 12. can do. In particular, the alignment stage 1 according to the present embodiment can correct the positional deviation even when the horizontal positional deviation of the central axis A of the workpiece 14 is relatively large. Further, since the rotation stop is not required, the movement of the alignment stage 1 for correcting the shift of the work 14 is not hindered, and the shift of the work 14 can be sufficiently corrected.

  The first concave surface 2J of the first plate 2 and the second concave surface 3K of the second plate 3 are formed of a porous sintered body, and the first convex surface of the second plate 3 is formed from the first concave surface 2J of the first plate 2. The compressed air can be discharged toward 3J, and the compressed air can be discharged from the second concave surface 3K of the second plate 3 toward the second convex surface 4E of the third plate 4. According to this configuration, the first concave surface 2J of the first plate 2 and the first convex surface 3J of the second plate 3, and the second concave surface 3K of the second plate 3 and the second convex surface 4E of the third plate 4 are used. The non-contact state between the workpiece 14 and the workpiece 14 can be corrected with a very small force.

  The first plate 2 and the second plate 3 are connected to each other by a plurality of tension springs 6, and the second plate 3 and the third plate 4 are connected to each other by a plurality of tension springs 6. According to this configuration, the second plate 3 can be prevented from being separated from the first plate 2 and the third plate 4 from the second plate 3 by the biasing force of the plurality of tension springs 6, and the first The position of the second plate 3 relative to the first plate 2 and the position of the third plate 4 relative to the second plate 3 can be returned to the initial positions.

  In addition, this invention is not limited to said embodiment, Many deformation | transformation are possible within the range of the summary.

  For example, the first plate 2 and the second plate 3 are entirely made of stainless steel or the like without providing the first plate 2 with the first sintered portion 2B and the second plate 3 with the second sintered portion 3B. The first concave surface 2J and the second concave surface 3K are formed, and the first concave surface 2J of the first plate 2 and the first convex surface 3J of the second plate 3 are brought into contact with each other via a lubricant, and the second plate 2 The second concave surface 3K and the second convex surface 4E of the third plate 4 may be configured to contact each other via a lubricant.

  The first plate 2 and the second plate 3 are not provided with the first sintered portion 2B and the second plate 3 without the second sintered portion 3B, and the entire first plate 2 and the second plate 3 are made of stainless steel or the like. 2J and the second concave surface 3K may be formed, and a plurality of air discharge holes may be formed in each of the first concave surface 2J and the second concave surface 3K. Then, compressed air is discharged from the plurality of air discharge holes toward the first convex surface 3J of the second plate 3 and the second convex surface 4E of the third plate 4, and the first concave surface 2J of the first plate 2 and the second convex surface 2J. An air layer may be formed between the first convex surface 3J of the plate 3 and between the second concave surface 3K of the second plate 3 and the second convex surface 4E of the third plate 4.

  As the biasing means for biasing the second plate 3 and the third plate 4 back to the initial positions, the tension spring 6 is used. However, for example, rubber or a magnet may be used. Further, the gas supplied from an air supply pump (not shown) is not limited to air but may be an inert gas such as nitrogen.

1: alignment stage, 2: first plate, 2J: first concave surface, 3: second plate, 3J: first convex surface, 4: third plate, 4E: second convex surface, 6: tension spring, 10: processing device 12: Rotary tool 14: Workpiece

Claims (5)

An alignment stage for self-aligning to support the workpiece,
A first plate having a first cylindrical concave surface extending along the first direction;
A first convex surface disposed on the first plate and having a shape along the first concave surface on the first plate side; and a second direction orthogonal to the first direction on the opposite side of the first plate side. A second plate having a second concave surface with a partially cylindrical inner surface extending along;
An alignment stage comprising: a third plate disposed on the second plate and having a second convex surface having a shape along the second concave surface on the second plate side. The first concave surface of the first plate and the second concave surface of the second plate are formed of a porous sintered body,
The compressed gas can be released from the first concave surface of the first plate toward the first convex surface of the second plate,
2. The alignment stage according to claim 1, wherein compressed gas can be discharged from the second concave surface of the second plate toward the second convex surface of the third plate. The first concave surface of the first plate and the first convex surface of the second plate are in contact with each other via a lubricant,
The alignment stage according to claim 1, wherein the second concave surface of the second plate and the second convex surface of the third plate are in contact with each other via a lubricant. Biasing means for biasing the second plate back to the initial position relative to the first plate;
The alignment stage (1) according to any one of claims 1 to 3, further comprising: an urging unit that urges the third plate to return to an initial position with respect to the second plate. A rotary tool that is driven to rotate;
A workpiece machined by the rotary tool;
A processing apparatus comprising: the alignment stage according to claim 1, wherein the alignment is performed while supporting the workpiece.

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