JP2017129383A - Three-dimensional distance sensor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional sensor device with which it is possible to extend a detectable distance without changing the distance between image sensors.SOLUTION: The three-dimensional sensor device comprises: a first image sensor 11 in which a plurality of first pixels 11a on which light is incident from the outside are placed side by side in a prescribed direction; a second image sensor 12 in which a plurality of second pixels 12a on which light is incident from the outside are placed side by side in a prescribed direction and arranged leaving a space from the first image sensor 11 in a prescribed direction; a correlation detection circuit 13 for detecting the correlation of captured images of the first and second image sensor 11, 12; and first optical path change means for bending or reflecting a light entering at a first position of the first image sensor 11 from the outside, and causing it to enter at a first shift position spaced by a distance to the first position in a prescribed direction.SELECTED DRAWING: Figure 4

Description

The present invention relates to a stereoscopic vision type three-dimensional distance sensor device.

The three-dimensional distance sensor is expected to be used in various applications such as automobile collision avoidance systems, robot vision, game machines or electronic devices. Three-dimensional distance sensors that have been put into practical use include TOF (Time Of Flight) range sensors, millimeter wave radars, and stereo vision camera systems.
The TOF method employed in the TOF range sensor detects the distance based on the time from when the laser light is irradiated until the reflected light is detected. In addition, the pattern irradiation (triangulation) method employed in indoor game machines irradiates a specific pattern of light and measures the distance from the deviation of the reflection pattern.

However, such a method that requires irradiation of modulated light or pattern light is not suitable for wide-range distance detection because the amount of reflected light of the irradiated light attenuates in inverse proportion to the square of the distance. In principle, it is difficult to remove various factors of deterioration in detection accuracy such as differences in the reflectance of light and objects. Therefore, the TOF method and the pattern irradiation method are limited to applications in a small indoor space where irradiation light is easy to detect.

In-vehicle radar, which is intended for outdoor use, is an active distance measuring system that measures the distance by delaying the reflected signal by irradiating a highly directional radio wave (millimeter wave) or laser beam. As a sensor, it has been put to practical use for preventing a frontal collision of an automobile.
However, the active ranging method has a problem that it is influenced by the weather, such as a narrow viewing angle, a low resolution, and a large reflection noise due to raindrops.

In this regard, the stereo vision method adopted in the stereo vision camera system is a passive distance measurement method that does not require illumination light, etc., so it has excellent environmental resistance, and can detect three-dimensional distances outdoors and over a wide range. . Stereo vision camera systems have been put to practical use as in-vehicle three-dimensional distance sensors.
However, a stereo camera system requires two cameras (image sensors) and an extremely high-speed dedicated LSI that handles a large amount of correlation calculation processing necessary for parallax detection between two images acquired by the two cameras. , Manufacturing costs are high.

Furthermore, when long distance detection of about several hundred meters is performed, it is necessary to provide a distance of at least about 30 cm between the two cameras, and the increase in the size of the entire apparatus is a reason for hindering the spread of applications other than in-vehicle applications. Yes.
The inventors of the present invention have come up with an extremely compact unique circuit configuration for performing stereo image correlation detection processing at high speed, and two image sensors and their correlation detection processing circuits are combined into one LSI chip ( It is possible to integrate it in a large-scale integrated circuit chip) (see Patent Document 1). A single-chip stereo vision type three-dimensional distance sensor LSI has been developed, and real-time (100 fps or more) three-dimensional distance measurement has succeeded (see Non-Patent Documents 1 and 2). This three-dimensional distance measurement solves the problems of cost reduction and power consumption of the device.

JP2015-129669A

M.M. Kawano, N .; Kawaguchi, T .; Yoshida and Y. Arima, “Three-Dimensional Biological Range Sensor LSI with Enhanced Correlation Signal”, Japan Journal of Applied Physics, Vol. 49, no. 4D, pp. 04DE05-1 to 6, April 20, 2010 N. Kawaguchi, M .; Kawano and Y.K. Arima, “Three-Dimensional Biological Rangular Sensor Large Scale Integration with a 410 μs / Frame Output Time High-Jump Ahead of Japan”. 49, no. 4D, pp. 04DE06-1-4, April 20, 2010 M.M. Kawano and Y.K. Arima, “Binocular range-sensor LSI with developed distance detection detection by coordinated pixel placement,” IEICE Electronics Express, Vol. 11, no. 19, pp. 20140747-1 to 11, October 11, 2014

However, in the stereo vision type three-dimensional distance sensor, there is a problem that it is difficult to improve the distance detection accuracy while maintaining the chip size because the distance detection accuracy depends on the number of pixels of the image sensor.
As a solution to this problem, Non-Patent Document 3 discloses a method of increasing the distance detection accuracy by a factor of 4 without changing the chip size. To realize a highly versatile 3D distance sensor LSI, It is necessary to realize long-distance detection using a chip three-dimensional distance sensor LSI.

In this regard, in the single-chip three-dimensional distance sensor LSI using the stereo vision method, in order to detect a position far from the image sensor, it is necessary to lengthen the interval between the two image sensors.
On the other hand, considering the size of a single-chip LSI, in order to integrate two image sensors in a single-chip LSI, the upper limit of the distance between image sensors is about 10 mm. When the distance between the image sensors is 10 mm, for example, when the pixel pitch of the image sensor is 6 μm, the number of pixels in the direction in which the two image sensors are arranged (X direction) is 640, and the angle of view is 90 degrees, FIG. As described above, the distance from the image sensor capable of accurate distance detection is about 2 m at the longest. Even if the angle of view is 45 degrees, the distance is about 4 m.
Therefore, the usage application of the single-chip three-dimensional distance sensor LSI is limited.
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a stereo vision type three-dimensional distance sensor device capable of increasing the detectable distance without changing the distance between image sensors. To do.

The three-dimensional distance sensor device according to the present invention that meets the above-described object includes a first image sensor in which a plurality of first pixels that receive light from the outside are arranged in a predetermined direction, and a plurality of second that receives light from the outside. A second image sensor in which pixels are arranged in the predetermined direction and spaced from the first image sensor in the predetermined direction is detected, and a correlation between images captured by the first and second image sensors is detected. And a correlation detection circuit that refracts or reflects light incident on the first position of the first image sensor from the outside and enters the first shift position having a distance in the predetermined direction to the first position. First optical path changing means.

In the three-dimensional distance sensor device according to the present invention, it is preferable that the first and second image sensors and the correlation detection circuit are integrated in one integrated circuit chip.

In the three-dimensional distance sensor device according to the present invention, the first optical path changing unit includes a first light transmitting plate that refracts the light and a first angle that changes an angle of the first light transmitting plate with respect to the first image sensor. It is preferable to have an adjustment mechanism.

In the three-dimensional distance sensor device according to the present invention, it is preferable that the first light-transmitting plate is made of acrylic resin, polycarbonate, or glass.

In the three-dimensional distance sensor device according to the present invention, it is preferable that the thickness of the first light transmission plate is 50 to 1000 μm.

In the three-dimensional distance sensor device according to the present invention, it is preferable that the first angle adjusting mechanism can change the angle of the first light transmitting plate in a range of more than 0 degree and not more than 10 degrees.

In the three-dimensional distance sensor device according to the present invention, it is preferable that the first angle adjustment mechanism has an actuator.

In the three-dimensional distance sensor device according to the present invention, the light incident on the second position of the second image sensor from the outside is changed in the traveling direction, and the second distance to the second position is the predetermined direction. It is preferable to further include a second optical path changing unit that makes the light incident at the 2 shift position.

In the three-dimensional distance sensor device according to the present invention, the second optical path changing means includes a second light transmissive plate that refracts the light and a second angle that changes an angle of the second light transmissive plate with respect to the second image sensor. It is preferable to have an adjustment mechanism.

In the three-dimensional distance sensor device according to the present invention, the first shift position having a distance in the predetermined direction to the first position by changing the traveling direction of the light incident on the first position of the first image sensor from the outside. Since the first optical path changing means for making the light incident is provided, the detectable distance can be increased without changing the distance between the image sensors.

It is explanatory drawing of the three-dimensional distance sensor apparatus which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the relationship between the parallax of a pixel, and a detectable distance. It is explanatory drawing of a 1st optical path change means. It is explanatory drawing which shows the state which inclined the light transmission board of the three-dimensional distance sensor apparatus which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the path | route of the light which passes a translucent board. It is explanatory drawing which shows the path | route of the light which passes a translucent board. It is explanatory drawing which shows the state which inclined the light transmission board of the three-dimensional distance sensor apparatus which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the detectable distance when the incident position of light is displaced. It is explanatory drawing of the three-dimensional distance sensor apparatus which concerns on the 2nd Embodiment of this invention. It is explanatory drawing of the three-dimensional distance sensor apparatus which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the state which inclined the translucent board of the same three-dimensional distance sensor apparatus. It is explanatory drawing which shows the state which inclined the translucent board of the same three-dimensional distance sensor apparatus. It is explanatory drawing of the three-dimensional distance sensor apparatus which concerns on the 4th Embodiment of this invention. It is a graph which shows the relationship between the displacement of the incident position of light, and a detectable distance. It is a graph which shows the relationship of the inclination of a translucent board with respect to the displacement of the incident position of light, and the movement of the X direction one side. It is a graph which shows the relationship between the number of parallax pixels in a prior art example, and a detectable distance.

Next, embodiments of the present invention will be described with reference to the accompanying drawings for understanding of the present invention.
As shown in FIGS. 1 to 3, in the three-dimensional distance sensor device 10 according to the first embodiment of the present invention, a plurality of pixels 11a (first pixels) from which light is incident from the outside are in the X direction (predetermined direction). ) And the plurality of pixels 12a (second pixels) on which light is incident from the outside are arranged in the X direction and spaced from the image sensor 11 in the X direction. A correlation detection circuit 13 that detects the correlation between the image sensor 12 (second image sensor) and the images captured by the image sensors 11 and 12 is provided. Details will be described below.

As shown in FIG. 1, the image sensors 11 and 12 are connected to a correlation detection circuit 13 via signal wirings 14 and 15, respectively. The electrical signals output from the plurality of pixels 11a are sent to the correlation detection circuit 13 via the signal wiring 14, and the electrical signals output from the plurality of pixels 12a are transmitted via the signal wiring 15 to the correlation detection circuit 13. Sent to. In the present embodiment, the image sensor 12 is arranged on the positive side in the X direction of the image sensor 11.

As shown in FIGS. 1 and 2, the image sensor 11 includes rows of n (plural) pixels 11 a arranged in the X direction arranged in the Y direction perpendicular to the X direction. , Rows of n (plural) pixels 12a arranged in the X direction are arranged in the Y direction. 2, the numbers 1, 2, 3,..., K−1, k, k + 1,... N−2, n−1, and n written on the pixels 11a and 12a are in the X direction. This indicates the number of pixels 11a and 12a arranged from one side (negative side).

The correlation detection circuit 13 determines which pixel 11a, 12a of the image sensor 11, 12 the specific object is imaged based on the electric signal from the plurality of pixels 11a and the electric signal from the plurality of pixels 12a. The distance from the three-dimensional distance sensor device 10 to the object imaged by the image sensors 11 and 12 is calculated. That is, in the three-dimensional distance sensor device 10, the distance to the object is detected by a stereo viewing method.

A lens 17 and a lens 18 separated from the lens 17 in the X direction are disposed in front of the image sensors 11 and 12 (on the side on which light is incident in a direction orthogonal to the X direction and the Y direction). The lenses 17 and 18 both form an image. Light that travels from the outside to the image sensor 11 enters the image sensor 11 after passing through the lens 17 and travels from the outside to the image sensor 12. Enters the image sensor 12 after passing through the lens 18.
In the present embodiment, the lenses 17 and 18 are each formed of a single light transmitting body, but it is not necessary, and each may be formed of a plurality of light transmitting bodies.

As shown in FIG. 1, a light transmissive plate 19 (first light transmissive plate) capable of refracting light is disposed between the image sensor 11 and the lens 17, and light between the image sensor 12 and the lens 18. A translucent plate 20 (second translucent plate) that can be refracted is disposed. The translucent plates 19 and 20 are respectively sized to cover the image sensors 11 and 12, have a thickness of 50 to 1000 μm, and have translucency. The translucent plates 19 and 20 can be formed of a material having a refractive index different from that of air, and can be formed of, for example, acrylic resin, polycarbonate, or glass. In FIG. 2, the description of the translucent plates 19 and 20 is omitted.

As shown in FIG. 3, the translucent plate 19 (same for translucent plate 20) has both end portions in the X direction coupled to a support member 21 and an actuator 22 so as to be tiltable. The actuator 22 has a motor 23, and by driving the motor 23, the connector portion 24 connected to the light transmissive plate 19 advances and retreats to change the angle of the light transmissive plate 19 with respect to the image sensor 11.
In the present embodiment, the first and second angle adjustment mechanisms are mainly configured by the support member 21 and the actuator 22, and mainly by the first angle adjustment mechanism and the translucent plate 19, and the second angle adjustment mechanism and the translucent plate 20. The first and second optical path changing means are respectively configured.

In the present embodiment, the arrangement of the translucent plate 19 parallel to the image sensor 11 shown in FIG. 1 is set as a reference arrangement (0 degree), and the actuator 22 sets the angle of the translucent plate 19 to the image sensor 11 to 0 degree. Can be changed within a range of more than 10 degrees and less. In this respect, the relationship between the translucent plate 20 and the image sensor 12 is the same, and the angle of the translucent plate 20 with respect to the image sensor 12 can be changed in the range of more than 0 degrees and less than 10 degrees.

As shown in FIG. 1, the translucent plate 19 and the translucent plate 20 are parallel to the image sensor 11 (the image sensor 12 with respect to the translucent plate 20). The light L1 traveling in a direction perpendicular to the image sensor 11 passes straight without being refracted by the light transmitting plate 19 and enters the image sensor 11.
On the other hand, when the translucent plate 19 is not parallel to the image sensor 11 as shown in FIG. 4, the light L1 traveling in the direction perpendicular to the image sensor 11 is transmitted through the translucent plate 19 as shown in FIG. , The light is refracted when passing through the transparent plate 19 and the traveling path is displaced in the X direction.

ΔX displacement amount of traveling path of the light L1, T the thickness of the transparent plate 19, the inclination angle of the transparent plate 19 for the image sensor 11 theta, when the relative refractive index of air and the transparent plate 19, n _12, The following formula 1 is established.

From Equation 1, when the tilt angle of the light transmitting plate 19 with respect to the image sensor 11 is in the range of 0 ° to 10 °, the displacement amount of the traveling path of the light L1 increases as the tilt of the light transmitting plate 19 with respect to the image sensor 11 increases. It can be said that it will grow. Therefore, the first optical path changing means has entered the first position (predetermined position) of the image sensor 11 through the light transmissive plate 19 from the outside by changing the angle of the light transmissive plate 19 with respect to the image sensor 11. The light can be refracted and incident on a first shift position (a position different from the predetermined position) that is a distance in the X direction to the first position.

Note that the absolute refractive index of air is n ₁ , the absolute refractive index of the translucent plate 19 is n ₂ , the relative refractive index of air and the translucent plate 19 is n ₁₂ , the incident angle is i, the refractive angle is r, and the light wave in the air Where V ₁ is the speed of the light wave and v ₂ is the speed of the light wave in the translucent plate 19, the following equation 2 holds.

FIG. 6 shows a path of the light L2 that collects light. When the light transmitting plate 19 is not present, the light collecting point of the light L2 positioned at the point O is displaced to the point P by providing the light transmitting plate 19 as shown in FIG. Assuming that the amount of displacement in the X direction of the light collecting point is ΔX and the amount of displacement in the front-rear direction is ΔZ, the following Expression 3 is established. ΔX and ΔZ are the thickness of the light transmitting plate 19 and the light transmitting plate 19 relative to the image sensor 11. It can be approximated by the inclination angle.

Therefore, in the range where the tilt angle of the light transmission plate 19 with respect to the image sensor 11 is more than 0 degree and less than 10 degrees, the displacement amount in the X direction of the traveling path of the light L2 is the tilt angle of the light transmission plate 19 with respect to the image sensor 11. Is proportional to Note that the amount of deviation ΔS of the optical axis of the light L2 due to the presence or absence of the light transmissive plate 19 increases as the incident angle of the light L2 with respect to the light transmissive plate 19 increases. It is.

The relationship between the light incident on the first angle adjustment mechanism, the image sensor 11, and the image sensor 11 is the same as the relationship between the light incident on the second angle adjustment mechanism, the image sensor 12, and the image sensor 12, and the second angle. The adjustment mechanism refracts the light that has passed through the translucent plate 20 from the outside and is incident on the second position (predetermined position) of the image sensor 12, and a second shift having a distance in the X direction to the second position. The incident light can be incident on a position (a position different from the predetermined position). The tilting direction of the translucent plate 19 and the tilting direction of the translucent plate 20 are opposite to each other as shown in FIG.

Here, the line of sight of each pixel 11a and the line of sight of each pixel 12a when the light transmissive plates 19 and 20 are arranged in a reference arrangement (that is, the light transmissive plates 19 and 20 are parallel to the image sensors 11 and 12, respectively) As shown in FIG. 2, a solid line extending from the center in the X direction of each pixel 11a to the front through the lens 17 and a solid line extending to the front through the lens 18 from the center in the X direction of each pixel 12a. Can be represented.
The intersection of the line of sight of the pixel 11a and the line of sight of the pixel 12a (hereinafter also simply referred to as “intersection”) is a point where the distance from the lenses 17 and 18 (that is, the three-dimensional distance sensor device 10) can be detected. The objects existing before and after are considered to be located at the intersection closest to the object, and the distance from the lenses 17 and 18 is obtained.

When a plurality of intersections having the same position in the front-rear direction are connected by a line (hereinafter also referred to as “intersection connection”), the distance between each intersection connection becomes wider as the distance from the lenses 17 and 18 (that is, the image sensors 11 and 12) increases. Become. For example, the parallax between the pixels 11a and 12a is 4 pixels, 3 pixels, and 2 pixels, and the intersection connection lines D1, D2, and D3 have a wider interval between the intersection connection lines D3 and D2 than the interval between the intersection connection lines D2 and D1. Therefore, it can be seen that the distance detection accuracy by the three-dimensional distance sensor device 10 decreases as the distance from the image sensors 11 and 12 increases.

Next, the state in which the translucent plate 19 is tilted with respect to the image sensor 11 will be examined. The light transmission plate 19 is tilted with respect to the image sensor 11, and as shown in FIG. 8, the incident position of the light incident on each pixel 11a is set to 3 minutes of the X direction length of the pixel 11a on the X direction negative side. When the first and second thirds are moved, the line of sight of the pixel 11a is indicated by a two-dot chain line. Therefore, two intersection connection lines appear between the intersection connection lines when the translucent plate 19 is arranged in parallel with the image sensor 11. For example, intersection connection lines D2a and D2b appear between the intersection connection lines D2 and D3.
For this reason, when the angle with respect to the image sensor 11 of the translucent plate 19 can be adjusted in several steps, it turns out that the detection accuracy of distance improves compared with the case where an angle cannot be adjusted.

In this embodiment, the image sensors 11 and 12, the correlation detection circuit 13, and the signal wirings 14 and 15 are integrated in one large-scale integrated circuit chip (an example of an integrated circuit chip) 16. However, the present invention is not limited to this. Not. For example, a three-dimensional distance sensor device 30 according to the second embodiment of the present invention shown in FIG. 9 includes a large-scale integrated circuit chip 31 in which the image sensor 11 is integrated, and a large-scale integrated circuit chip 32 in which the image sensor 12 is integrated. And a large-scale integrated circuit chip 33 having a correlation detection circuit function are provided separately, and the large-scale integrated circuit chips 31 and 32 are connected to the large-scale integrated circuit chip 33 via signal wirings 34 and 35, respectively. Yes.

In the first and second embodiments, the translucent plates 19 and 20 are arranged between the lens 17 and the image sensor 11 and between the lens 18 and the image sensor 12, but this is not limitative. Not. The three-dimensional distance sensor device 40 according to the third embodiment of the present invention shown in FIGS. 10, 11 and 12 and the three-dimensional distance sensor device 50 according to the fourth embodiment of the present invention shown in FIG. The lenses 17 and 18 are disposed between the light transmitting plate 19 and the image sensor 11 and between the light transmitting plate 20 and the image sensor 12, respectively. The three-dimensional distance sensor device 40 has the same configuration as the three-dimensional distance sensor device 10 except for the arrangement of the light-transmitting plates 19 and 20 and the lenses 17 and 18, and the three-dimensional distance sensor device 50 is the three-dimensional distance sensor device 30. It is the same composition as.

Next, an experiment (simulation) performed for confirming the function and effect of the present invention will be described.
First, by changing the incident position of light on the first image sensor in the X direction, a change occurring in the detectable distance was obtained by simulation. In this simulation, the distance between the first and second image sensors is 10 mm, the angle of view of each of the first and second image sensors is 90 degrees, and the pixel X of the first and second image sensors is X. The arrangement pitch in the direction is 6 μm, a sample in which 640 pixels are arranged in the X direction in the first and second image sensors is adopted, and the incident position of the light incident on the first image sensor is determined in the X direction. The distance was detected in the range of 0.0 to 4.0 μm, and the detectable distance was determined.
The result of the simulation is shown in FIG. As shown in FIG. 14, when the incident position of the light to the first image sensor can be displaced, the number of detectable distances is increased and the distance is detected as compared with the case where the incident position of the light to the first image sensor is fixed. It was confirmed that the accuracy was improved.

Next, an acrylic plate having a thickness of 300 μm and a length in the X direction of 4 mm is employed as a light-transmitting plate, and light incident on the first image sensor when the acrylic plate is tilted with respect to the first image sensor. The displacement in the X direction of the incident position was determined. The result is shown in FIG. From FIG. 15, in order to displace the incident position of light by 4 μm in the X direction, the angle of the translucent plate may be changed by approximately 2.35 degrees. It has been confirmed that it is only necessary to move 165 μm.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and all changes in conditions and the like that do not depart from the gist are within the scope of the present invention.
For example, it is not necessary to provide two optical path changing means, and only one optical path changing means may be provided.
Further, instead of the translucent plate, a triangular prism or a mirror member that reflects light may be employed to change the light path from the outside toward the image sensor. When the mirror member is employed, the first optical path changing unit reflects the light incident on the first position of the first image sensor from the outside and enters the first shift position. The two-light path changing means reflects the light that has been incident on the second position of the second image sensor from the outside to be incident on the second shift position.

Then, instead of changing the angle of the translucent plate (the same applies to the mirror member), the translucent plate placed outside the field of view of the image sensor is placed inside the field of view of the image sensor, so that It is also possible to change the route.
Furthermore, when employ | adopting a translucent board, the translucent board may be formed with raw materials other than an acrylic resin, a polycarbonate, or glass.

10: three-dimensional distance sensor device, 11: image sensor, 11a: pixel, 12: image sensor, 12a: pixel, 13: correlation detection circuit, 14, 15: signal wiring, 16: large scale integrated circuit chip, 17, 18 : Lens, 19, 20: Translucent plate, 21: Support member, 22: Actuator, 23: Motor, 24: Connector part, 30: Three-dimensional distance sensor device, 31, 32, 33: Large scale integrated circuit chip, 34 , 35: signal wiring, 40, 50: three-dimensional distance sensor device, L1, L2: light

Claims (9)

A first image sensor in which a plurality of first pixels into which light is incident from the outside are arranged in a predetermined direction;
A plurality of second pixels to which light is incident from the outside are arranged in the predetermined direction, and a second image sensor arranged at an interval from the first image sensor in the predetermined direction;
A correlation detection circuit for detecting a correlation between the captured images of the first and second image sensors;
First light path changing means that refracts or reflects light incident on the first position of the first image sensor from the outside and enters the first shift position having a distance in the predetermined direction to the first position. A three-dimensional distance sensor device comprising: 3. The three-dimensional distance sensor device according to claim 1, wherein the first and second image sensors and the correlation detection circuit are integrated on one integrated circuit chip. 3. The three-dimensional distance sensor device according to claim 1, wherein the first optical path changing unit changes a first light transmitting plate that refracts the light and an angle of the first light transmitting plate with respect to the first image sensor. A three-dimensional distance sensor device having a first angle adjustment mechanism. 4. The three-dimensional distance sensor device according to claim 3, wherein the first light-transmitting plate is formed of acrylic resin, polycarbonate, or glass. 5. 5. The three-dimensional distance sensor device according to claim 3, wherein a thickness of the first light-transmitting plate is 50 to 1000 μm. 6. The three-dimensional distance sensor device according to claim 3, wherein the first angle adjustment mechanism can change the angle of the first light-transmitting plate within a range of more than 0 degrees and less than 10 degrees. A three-dimensional distance sensor device. The three-dimensional distance sensor device according to any one of claims 3 to 6, wherein the first angle adjusting mechanism includes an actuator. The three-dimensional distance sensor device according to any one of claims 1 to 7, wherein light incident on the second position of the second image sensor from the outside is refracted or reflected to form the second position. The three-dimensional distance sensor device further comprises second optical path changing means for making the light incident on a second shift position having a distance in the predetermined direction. 9. The three-dimensional distance sensor device according to claim 8, wherein the second optical path changing unit is a second light transmissive plate that refracts the light, and a second angle that changes an angle of the second light transmissive plate with respect to the second image sensor. A three-dimensional distance sensor device having an angle adjustment mechanism.

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