JP2017112231A5 - - Google Patents
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- JP2017112231A5 JP2017112231A5 JP2015245647A JP2015245647A JP2017112231A5 JP 2017112231 A5 JP2017112231 A5 JP 2017112231A5 JP 2015245647 A JP2015245647 A JP 2015245647A JP 2015245647 A JP2015245647 A JP 2015245647A JP 2017112231 A5 JP2017112231 A5 JP 2017112231A5
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- JP
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015245647A JP6700771B2 (en) | 2015-12-16 | 2015-12-16 | Imprint apparatus and article manufacturing method |
| KR1020187019253A KR102081527B1 (en) | 2015-12-16 | 2016-11-25 | Imprint apparatus and article manufacturing method |
| PCT/JP2016/084972 WO2017104382A1 (en) | 2015-12-16 | 2016-11-25 | Imprint apparatus, and method of manufacturing article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015245647A JP6700771B2 (en) | 2015-12-16 | 2015-12-16 | Imprint apparatus and article manufacturing method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017112231A JP2017112231A (en) | 2017-06-22 |
| JP2017112231A5 true JP2017112231A5 (en) | 2019-01-24 |
| JP6700771B2 JP6700771B2 (en) | 2020-05-27 |
Family
ID=59056275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015245647A Active JP6700771B2 (en) | 2015-12-16 | 2015-12-16 | Imprint apparatus and article manufacturing method |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6700771B2 (en) |
| KR (1) | KR102081527B1 (en) |
| WO (1) | WO2017104382A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108539052B (en) * | 2018-03-30 | 2019-07-09 | 华中科技大学 | A kind of device, system and method encapsulating Flexible Displays film |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7641840B2 (en) * | 2002-11-13 | 2010-01-05 | Molecular Imprints, Inc. | Method for expelling gas positioned between a substrate and a mold |
| US7316554B2 (en) * | 2005-09-21 | 2008-01-08 | Molecular Imprints, Inc. | System to control an atmosphere between a body and a substrate |
| US20110140304A1 (en) * | 2009-12-10 | 2011-06-16 | Molecular Imprints, Inc. | Imprint lithography template |
| JP5647029B2 (en) * | 2011-02-18 | 2014-12-24 | キヤノン株式会社 | Imprint apparatus and article manufacturing method |
| JP6064466B2 (en) * | 2012-09-11 | 2017-01-25 | 大日本印刷株式会社 | Imprint method and imprint apparatus for implementing the method |
| WO2014054749A1 (en) * | 2012-10-04 | 2014-04-10 | 大日本印刷株式会社 | Imprinting method and imprinting apparatus |
| JP6230041B2 (en) * | 2013-04-18 | 2017-11-15 | キヤノン株式会社 | Imprint apparatus and article manufacturing method using the same |
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2015
- 2015-12-16 JP JP2015245647A patent/JP6700771B2/en active Active
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2016
- 2016-11-25 KR KR1020187019253A patent/KR102081527B1/en active IP Right Grant
- 2016-11-25 WO PCT/JP2016/084972 patent/WO2017104382A1/en active Application Filing