JP2017063927A - Ultrasonic probe and ultrasonic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic probe capable of uniformly supplying a sufficient acoustic matching material between an object and the ultrasonic probe, and an ultrasonic apparatus.SOLUTION: An ultrasonic probe 2 comprises: a sensor surface 22; an ultrasonic wave device 30 having an ultrasonic region Ar1 in a Y-direction on the sensor surface 22 and executing transmission/reception processing of ultrasonic waves by the ultrasonic region Ar1; a supply opening 24 being disposed so as to be adjacent to the ultrasonic region Ar1 in an X-direction intersecting with the Y-direction on the sensor surface 22 and becoming longitudinal in the Y-direction; and a supply device being connected to the supply opening 24 and causing an acoustic matching material to be discharged from the supply opening portion 24.SELECTED DRAWING: Figure 3

Description

  The present invention relates to an ultrasonic probe and an ultrasonic apparatus.

2. Description of the Related Art Conventionally, there has been known an ultrasonic apparatus in which an ultrasonic probe is brought into contact with a living body and ultrasonic waves are transmitted from the ultrasonic probe to the living body. As such an ultrasonic device, for example, an ultrasonic measurement device that transmits an ultrasonic wave from an ultrasonic device into a living body and receives an ultrasonic wave reflected in the living body to measure an internal structure of the living body. In addition, an ultrasonic therapy device that treats an affected part by applying an ultrasonic wave transmitted from an ultrasonic device to the affected part in a living body may be used.
By the way, in order to transmit an ultrasonic wave from such an ultrasonic device to a living body, an acoustic impedance between the ultrasonic probe of the ultrasonic device and the living body is approximately between the ultrasonic probe and the living body. It is necessary to interpose an acoustic matching material (for example, gel). Usually, such an acoustic matching material is applied directly to a probe surface or a living body by a user when used in an ultrasonic apparatus. However, manual application of the acoustic matching material is troublesome and increases the burden on the user. Further, when the amount of the acoustic matching material is reduced due to drying or the like, it is necessary to manually apply the acoustic matching material again. On the other hand, in recent years, an apparatus for automatically supplying an acoustic matching material has been devised (see, for example, Patent Document 1).

  Patent Document 1 discloses an attachment for an ultrasonic probe that supplies an acoustic matching material to the tip of an ultrasonic probe main body. Specifically, the ultrasonic probe main body includes a shaft and a wave transmission / reception unit, and the wave transmission / reception unit is provided on a part of the circumferential surface along the axial direction of the shaft. And the attachment which can be attached or detached to a shaft is provided, This attachment is provided with the pipe which becomes long along the axial direction of a shaft. The distal end portion of the pipe is located in the vicinity of the transmitting / receiving portion on the distal end side of the shaft, and the acoustic matching material supplied from the proximal end side of the pipe is supplied from the distal end of the pipe to the vicinity of the transmitting / receiving portion.

JP 2006-6827 A

  By the way, in the attachment for ultrasonic probes of the said patent document 1, the transmission / reception part of an ultrasonic probe main body is wider than the supply port of the front-end | tip of a pipe, and it is in the whole between a transmission / reception part and a biological body. It becomes difficult to supply the acoustic matching material. Moreover, since the gel supplied from one place is spread over the entire transmission / reception unit, it is difficult to spread the acoustic matching material uniformly over the transmission / reception unit, and the amount of the acoustic matching material to be used increases. .

  An object of this invention is to provide the ultrasonic probe and ultrasonic device which can supply sufficient acoustic matching material uniformly between objects.

  An ultrasonic probe of an application example according to the present invention has an operation surface and an ultrasonic region along a first direction on the operation surface, and at least ultrasonic transmission and ultrasonic reception are performed by the ultrasonic region. An ultrasonic device that performs either one of the ultrasonic device and a second direction that intersects the first direction on the operation surface is disposed within a predetermined distance range from the ultrasonic region, along the first direction. A supply opening that is long and a supply device that is connected to the supply opening and discharges an acoustic matching material from the supply opening.

  In this application example, a supply opening along the first direction is provided on the side of the second direction of the ultrasonic device having the ultrasonic region along the first direction, and the supply device performs acoustics from the supply opening. Matching material is supplied on the working surface. In such a configuration, since the acoustic matching material is supplied from the supply opening along the first direction from the side of the ultrasonic region along the first direction into the ultrasonic region, for example, from one point Compared to the case where the acoustic matching material is supplied, the acoustic matching material can be spread uniformly over the entire ultrasonic region, and the amount of the acoustic matching material used can be reduced. That is, a sufficient amount of the acoustic matching material can be supplied uniformly between the ultrasonic probe and the object.

In the ultrasonic probe according to this application example, it is preferable that the supply opening includes a plurality of nozzles arranged along the first direction.
In this application example, the supply opening has a plurality of nozzles arranged in the first direction, and the acoustic matching material can be discharged and supplied from each of these nozzles. For example, when a living body is used as an object, the acoustic matching material discharged from the nozzle can be penetrated into fine irregularities such as pores of the living body. Therefore, it is possible to suppress the inconvenience that an air layer is interposed between the ultrasonic probe and the object, and it is possible to improve the accuracy of ultrasonic transmission processing and reception processing.

In the ultrasonic probe according to this application example, it is preferable that the supply opening includes a slit that is long along the first direction.
In this application example, since the supply opening is a slit along the first direction, the acoustic matching material can be supplied without a gap along the first direction. Therefore, a uniform amount of the acoustic matching material can be supplied along the first direction.

In the ultrasonic probe according to this application example, it is preferable that the supply opening is provided adjacent to the ultrasonic region with respect to the second direction.
In this application example, the supply opening is provided adjacent to the second direction of the ultrasonic region. For this reason, compared with the case where there is a gap between the ultrasonic region and the supply opening, the acoustic matching material supplied from the supply opening can reach the ultrasonic region more reliably, and the acoustic matching The amount of material can also be reduced.

In the ultrasonic probe of this application example, it is preferable that the ultrasonic region has a side along the first direction, and the supply opening is provided adjacent to the side.
The ultrasonic region may be circular or elliptical, but when the supply opening is provided adjacent to the ultrasonic region, it is necessary to curve the supply opening in accordance with the shape of the ultrasonic region. On the other hand, when the ultrasonic region has a straight side and the supply opening is provided adjacent to the side, the shape of the supply opening may be a straight shape along the side. The production efficiency can be improved.

In the ultrasonic probe according to this application example, it is preferable that the supply opening is provided at a position sandwiching the ultrasonic region with respect to the second direction.
In this application example, the acoustic matching material is supplied from these two supply openings provided at positions sandwiching the ultrasonic region. In such a configuration, the acoustic matching material can be supplied to the ultrasonic region more quickly. In addition, the acoustic matching material can be uniformly supplied to both sides along the second direction of the ultrasonic region.

In the ultrasonic probe of this application example, the supply device includes a pressure chamber connected to the supply opening and filled with the acoustic matching material, and an actuator that pressurizes the acoustic matching material in the pressure chamber. It is preferable.
In this application example, the acoustic matching material is supplied from the supply opening by applying pressure to the acoustic matching material filled in the pressure chamber by the actuator. At this time, the supply amount of the acoustic matching material from the supply opening can be finely controlled by controlling the drive amount of the actuator.

The ultrasonic probe of this application example includes an element substrate provided with a plurality of vibration elements, a part of the plurality of vibration elements is provided in the ultrasonic region, and the rest of the plurality of vibration elements is: It is preferable to constitute the actuator of the supply device.
In this application example, some of the plurality of vibration elements provided on the element substrate are used as elements for performing ultrasonic transmission processing and reception processing from the ultrasonic region, and the remaining vibration elements are actuators in the supply device. Used as In such a configuration, it is not necessary to prepare a substrate provided with a vibration element for transmitting and receiving ultrasonic waves and a substrate provided with an actuator of a supply device, and it is sufficient to provide one element substrate. Can be simplified.

The ultrasonic probe according to this application example preferably includes an elastic member surrounding the supply opening.
In this application example, the periphery of the supply opening is covered with an elastic member. For this reason, the burden on the living body when the ultrasonic probe is pressed against the living body can be reduced.

In the ultrasonic probe according to this application example, it is preferable that the supply opening discharges the acoustic matching material in a direction toward the ultrasonic region.
In this application example, since the acoustic matching material is supplied from the supply opening toward the ultrasonic region, the acoustic matching material does not escape to a region other than the ultrasonic region, and the waste of the acoustic matching material can be saved.

In the ultrasonic probe according to this application example, it is preferable that the supply opening has an inclined surface inclined toward the ultrasonic region.
In this application example, the toner is supplied toward the ultrasonic region along the inclined surface of the supply opening. In such a configuration, the supply direction of the acoustic matching material can be directed to the ultrasonic region with a simple configuration.

In the ultrasonic probe of this application example, a wiper that is long in the first direction is provided on the opposite side of the ultrasonic region in the second direction from the side where the supply opening is disposed. preferable.
In this application example, the acoustic matching material supplied from the supply opening and flowing to the side opposite to the supply opening in the ultrasonic region can be removed by the wiper. Thus, for example, when performing ultrasonic measurement or ultrasonic therapy on a living body using an ultrasonic probe, the acoustic matching material that has flowed to the side opposite to the supply opening in the ultrasonic region is used. There is no discomfort to the living body.

An ultrasonic apparatus according to an application example of the invention has an operation surface, an ultrasonic region along the first direction on the operation surface, and at least one of transmission of ultrasonic waves and reception of ultrasonic waves by the ultrasonic regions. An ultrasonic device that implements one of the ultrasonic device, a second direction that intersects the first direction on the operation surface, and is disposed within a predetermined distance range from the ultrasonic region, and is elongated along the first direction. An ultrasonic probe including a supply opening and a supply device connected to the supply opening and discharging an acoustic matching material from the supply opening; and the acoustic matching supplied to the supply device of the ultrasonic probe And a tank for storing the material.
In the ultrasonic device of this application example, the acoustic matching material is supplied from the supply opening along the first direction from the side of the ultrasonic region along the first direction, as in the above application example. A sufficient amount of acoustic matching material can be uniformly supplied between the probe and the object. Further, since the acoustic matching material is sent from the tank to the supply device, the weight of the ultrasonic probe can be reduced as compared with the case where the tank is provided in the ultrasonic probe.

In the ultrasonic apparatus according to this application example, it is preferable that a control unit that controls the ultrasonic probe is provided.
In this application example, by controlling the ultrasonic probe by the control unit, it is possible to automatically perform ultrasonic transmission processing and reception processing in the ultrasonic region and supply processing of the acoustic matching material from the supply opening.

The figure which shows schematic structure of the ultrasonic device in 1st embodiment. The block diagram which shows schematic structure of the ultrasonic device in 1st embodiment. The perspective view which shows schematic structure of the ultrasonic probe in 1st embodiment. The top view which shows the outline of the surface contact | abutted with respect to the biological body of the ultrasonic probe in 1st embodiment. A sectional view showing a schematic structure of an ultrasonic probe in a first embodiment. The top view which shows schematic structure of the element substrate in 1st embodiment. Sectional drawing of the ultrasonic device corresponding to the AA line in FIG. Sectional drawing which shows schematic structure of the supply device and supply opening part in 1st embodiment. The perspective view which shows schematic structure of a part of supply device and supply opening part in 1st embodiment. Sectional drawing of the cable in 1st embodiment. The perspective view which shows schematic structure of a part of supply device and supply opening part in 2nd embodiment. Sectional drawing which shows the outline of the boundary vicinity of the ultrasonic device of the ultrasonic probe in 3rd embodiment, and a supply device. Sectional drawing which shows the outline of the boundary vicinity of the ultrasonic device and supply device of the ultrasonic probe in the modification of 3rd embodiment. The perspective view which shows schematic structure of the ultrasonic probe in 4th embodiment. The example which shows a part of supply opening part in the modification of 4th embodiment. The top view of the sensor surface in 5th embodiment. The top view of the sensor surface in 6th embodiment.

[First embodiment]
Hereinafter, a first embodiment according to the present invention will be described.
FIG. 1 is a diagram showing a schematic configuration of an ultrasonic apparatus 1 in the first embodiment. FIG. 2 is a block diagram showing a schematic configuration of the ultrasonic apparatus.
As shown in FIGS. 1 and 2, the ultrasonic apparatus 1 of the present embodiment includes an ultrasonic probe 2, a control device 5 that controls the ultrasonic probe 2, and a cartridge tank 6 in which an acoustic matching material is stored. It is equipped with. In the present embodiment, an example in which the cartridge tank 6 is provided in a part of the control device 5 is shown. However, a configuration in which the cartridge tank 6 is provided in a tank unit provided separately from the control device 5 may be used. .
In this ultrasonic apparatus 1, an ultrasonic probe 2 is brought into contact with the surface of a living body (for example, a human body), and ultrasonic waves are transmitted from the ultrasonic probe 2 into the living body. In addition, the ultrasonic wave reflected by the organ in the living body is received by the ultrasonic probe 2, and based on the received signal, for example, an internal tomographic image in the living body is obtained, or the state of the organ in the living body (for example, Blood flow, blood pressure, etc.).

[Configuration of Ultrasonic Probe 2]
FIG. 3 is a perspective view showing a schematic configuration of the ultrasonic probe 2. FIG. 4 is a plan view showing an outline of a surface (operation surface) to be brought into contact with the living body of the ultrasonic probe 2. FIG. 5 is a cross-sectional view showing a schematic configuration of the ultrasonic probe 2.
As shown in FIG. 3, the ultrasonic probe 2 includes a casing 21, an ultrasonic device 30 (see FIG. 2) provided in the casing 21, a supply device 40 (see FIG. 2), and an ultrasonic device. 30 and a wiring board 26 (see FIGS. 2 and 5) provided with a driver circuit for controlling the supply device 40 and the like.

For example, as shown in FIG. 3, the housing 21 is formed in a box shape, for example, and the one surface side becomes a sensor surface 22 (operation surface in the present invention) that makes contact with a living body. A sensor window 23 is provided on the sensor surface 22, and a part of the ultrasonic device 30 (acoustic lens 34) and a supply opening 24 to which an acoustic matching material is supplied are provided in the sensor window 23. It has been.
In addition, a cable that connects the ultrasonic probe 2 and the control device 5 to be communicable with a part of the casing 21 (for example, a side surface that intersects the sensor surface 22 or an upper surface opposite to the sensor surface 22). An insertion hole (not shown) through which 11 is inserted is provided.

  Here, the acoustic lens 34 exposed from the sensor window 23 has a cylindrical shape in which the surface shape of the cross section in the X direction (second direction of the present invention) is an arc. In the sensor window 23, the region where the acoustic lens 34 is exposed is a region where the ultrasonic device 30 is provided, and is the ultrasonic region Ar1 in the present invention.

The supply opening 24 is provided in a position adjacent to the acoustic lens 34 in the sensor window 23. That is, in the present embodiment, the supply opening 24 is disposed adjacent to the ultrasonic region Ar1 on the + X side in the sensor window 23. The supply opening 24 is elongated in the Y direction (the first direction of the present invention), and the dimension thereof is at least the dimension of the ultrasonic region Ar1 in the Y direction.
A supply device 40 is connected to the supply opening 24, and the acoustic matching material supplied from the supply device 40 is discharged from the supply opening 24 to the outside. This acoustic matching material has an acoustic impedance intermediate between the acoustic lens 34 and the living body, and for example, a gel material made of gelatin or the like can be used.
The configuration of the supply device 40 will be described later.

[Configuration of Ultrasonic Device 30]
Next, the configuration of the ultrasonic device 30 will be described in detail.
FIG. 6 is a plan view showing a schematic configuration of the element substrate 31 constituting the ultrasonic device 30.
FIG. 7 is a cross-sectional view of the ultrasonic device 30 taken along line AA in FIG.
As shown in FIG. 7, the ultrasonic device 30 includes an element substrate 31, a sealing plate 32 (back substrate), an acoustic matching layer 33, and an acoustic lens 34.

(Configuration of element substrate 31)
As shown in FIG. 7, the element substrate 31 includes a substrate body 311, a vibration film 312 provided on the sealing plate 32 side of the substrate body 311, and a piezoelectric element 313 laminated on the vibration film 312. ing. Here, in the following description, the surface of the element substrate 31 facing the sealing plate 32 is referred to as a back surface 31A, and the surface opposite to the back surface 31A is referred to as an operation surface 31B. Further, in a plan view of the element substrate 31 viewed from the substrate thickness direction, the central region of the element substrate 31 overlaps the ultrasonic region Ar1, and a plurality of ultrasonic transducers 35 are arranged in a matrix in the ultrasonic region Ar1. Has been placed.

The substrate body 311 is a semiconductor substrate such as Si. Openings 311A corresponding to the respective ultrasonic transducers 35 are provided in the ultrasonic region Ar1 in the substrate body 311. Each opening 311A is closed by a vibration film 312 provided on the back surface 31A side of the substrate body 311.
The vibration film 312 is made of, for example, SiO ₂ , a laminated body of SiO ₂ and ZrO ₂ , and is provided so as to cover the entire back surface 31 A side of the substrate body 311. The thickness dimension of the vibration film 312 is sufficiently small with respect to the substrate body 311. When the substrate body 311 is made of Si and the vibration film 312 is made of SiO ₂ , for example, the vibration film 312 having a desired thickness dimension can be easily formed by oxidizing the back surface 31A side of the substrate body 311. It becomes possible. In this case, the opening 311A can be easily formed by etching the substrate body 311 using the SiO ₂ vibration film 312 as an etching stopper.

Further, as shown in FIG. 7, a piezoelectric element 313 that is a laminate of a lower electrode 314, a piezoelectric film 315, and an upper electrode 316 is provided on the vibration film 312 that closes each opening 311 </ b> A. Here, one ultrasonic transducer 35 is configured by the vibration film 312 and the piezoelectric element 313 that close the opening 311A.
In such an ultrasonic transducer 35, a rectangular wave voltage having a predetermined frequency is applied between the lower electrode 314 and the upper electrode 316, thereby vibrating the vibration film 312 in the opening region of the opening 311 </ b> A to generate ultrasonic waves. Can be sent out. In addition, when the vibration film 312 is vibrated by the ultrasonic waves reflected from the object, a potential difference is generated above and below the piezoelectric film 315. Therefore, by detecting the potential difference generated between the lower electrode 314 and the upper electrode 316, it is possible to detect the received ultrasonic waves.

Further, in the present embodiment, as shown in FIG. 6, the ultrasonic transducer 35 as described above is disposed in a predetermined ultrasonic region Ar1 of the element substrate 31 in the X direction (second direction; slice direction), and The ultrasonic transducer array 36 is configured by arranging a plurality of elements along the Y direction (first direction; scan direction) that intersects the X direction (orthogonal in the present embodiment).
Here, the lower electrode 314 is formed in a linear shape along the X direction. That is, the lower electrode 314 is provided across the plurality of ultrasonic transducers 35 arranged along the X direction, and the lower electrode main body 314A positioned between the piezoelectric film 315 and the vibration film 312 is adjacent to the lower electrode adjacent to the lower electrode body 314A. A lower electrode line 314B connecting the electrode body 314A and a lower terminal electrode line 314C drawn to the terminal region Ar2 outside the ultrasonic region Ar1 are configured. Therefore, in the ultrasonic transducers 35 arranged in the X direction, the lower electrode 314 has the same potential.
The lower terminal electrode line 314C extends to the terminal region Ar2 outside the ultrasonic region Ar1, and forms the first electrode pad 314P in the terminal region Ar2. The first electrode pad 314P is connected to a terminal portion provided on the wiring board.

On the other hand, as shown in FIG. 6, the upper electrode 316 includes element electrode portions 316A provided across a plurality of ultrasonic transducers 35 arranged in the Y direction, and end portions of element electrode portions 316A parallel to each other. A common electrode portion 316B. The element electrode portion 316A includes an upper electrode body 316C laminated on the piezoelectric film 315, an upper electrode line 316D connecting the adjacent upper electrode bodies 316C, and ultrasonic transducers 35 disposed at both ends in the Y direction. And an upper terminal electrode 316E extending outward along the Y direction.
The common electrode portion 316B is provided at each of the + Y side end and the −Y side end of the ultrasonic region Ar1. The common electrode portion 316B on the + Y side is an upper terminal electrode 316E extending to the + Y side from the ultrasonic transducer 35 provided at the + Y side end portion of the plurality of ultrasonic transducers 35 provided along the Y direction. Connect each other. The common electrode portion 316B at the −Y side end connects the upper terminal electrodes 316E extending to the −Y side. Therefore, in each ultrasonic transducer 35 in the ultrasonic region Ar1, the upper electrode 316 has the same potential. Further, the pair of common electrode portions 316B are provided along the X direction, and end portions thereof are drawn from the ultrasonic region Ar1 to the terminal region Ar2. And common electrode part 316B comprises the 2nd electrode pad 316P connected to the terminal part of a wiring board in terminal field Ar2.

  In the ultrasonic transducer array 36 as described above, one ultrasonic transducer group 35A is configured by the ultrasonic transducers 35 arranged in the X direction connected by the lower electrode 314, and the ultrasonic transducer group 35A is A plurality of one-dimensional array structures are arranged along the Y direction.

(Configuration of sealing plate 32)
The sealing plate 32 has a planar shape when viewed from the thickness direction, for example, the same shape as the element substrate 31 and is configured by a semiconductor substrate such as Si or an insulator substrate. In addition, since the material and thickness of the sealing plate 32 affect the frequency characteristics of the ultrasonic transducer 35, it is preferable to set the sealing plate 32 based on the center frequency of the ultrasonic wave transmitted and received by the ultrasonic transducer 35.

  In the sealing plate 32, a plurality of concave grooves 321 corresponding to the opening 311 </ b> A of the element substrate 31 are formed in the array facing region facing the ultrasonic region Ar <b> 1 of the element substrate 31. As a result, in the region of the vibration film 312 that is vibrated by the ultrasonic transducer 35 (in the opening 311A), a gap 321A having a predetermined size is provided between the element substrate 31 and the vibration film 312. Vibration is not disturbed. In addition, it is possible to suppress inconvenience (crosstalk) in which a back wave from one ultrasonic transducer 35 is incident on another adjacent ultrasonic transducer 35.

  Further, when the vibration film 312 vibrates, ultrasonic waves are emitted as a back wave to the sealing plate 32 side (the back surface 31A side) as well as the opening 311A side (the working surface 31B side). The back wave is reflected by the sealing plate 32 and is emitted again to the vibrating membrane 312 through the gap 321A. At this time, if the phase of the reflected back wave and the ultrasonic wave emitted from the vibration film 312 to the working surface 31B side shifts, the ultrasonic wave attenuates. Therefore, in the present embodiment, the groove depth of each concave groove 321 is set so that the acoustic distance in the gap 321A is an odd multiple of one quarter (λ / 4) of the wavelength λ of the ultrasonic wave. ing. In other words, the thickness dimension of each part of the element substrate 31 and the sealing plate 32 is set in consideration of the wavelength λ of the ultrasonic wave emitted from the ultrasonic transducer 35.

  Further, the sealing plate 32 has an opening (not shown) corresponding to each electrode pad 314P, 316P provided in the terminal region Ar2 at a position facing the terminal region Ar2 of the element substrate 31. It is good. In this case, by providing a through electrode (TSV; Through-Sillicon Via) that penetrates the sealing plate 32 in the thickness direction in the opening, the electrode pads 314P and 316P are connected to the wiring substrate 26 via the through electrode. Connected to the terminal. Moreover, it is good also as a structure etc. which insert FPC (Flexible printed circuits), a cable wire, a wire, etc. in an opening part, and connect each electrode pad 314P and 316P and a wiring board.

(Configuration of acoustic matching layer 33 and acoustic lens 34)
As shown in FIG. 7, the acoustic matching layer 33 is provided on the working surface 31 </ b> B side of the element substrate 31. Specifically, the acoustic matching layer 33 is filled in the opening 311A of the element substrate 31 and is formed with a predetermined thickness dimension from the working surface 31B side of the substrate body 311.
The acoustic lens 34 is provided on the acoustic matching layer 33 and is exposed to the outside from the sensor window 23 of the housing 21 as shown in FIGS. As described above, the acoustic lens 34 has a cylindrical shape with the Y direction as an axis, in which the cross-sectional surface shape in the X direction is an arc.
The acoustic matching layer 33 and the acoustic lens 34 propagate the ultrasonic wave transmitted from the ultrasonic transducer 35 to the living body to be measured, and efficiently reflect the ultrasonic wave reflected in the living body. To propagate. For this reason, the acoustic matching layer 33 and the acoustic lens 34 are set to an acoustic impedance intermediate between the acoustic impedance of the ultrasonic transducer 35 of the element substrate 31 and the acoustic impedance of the living body. Examples of such a material having acoustic impedance include silicone.

[Configuration of Supply Device 40]
FIG. 8 is a cross-sectional view showing a schematic configuration of the supply device 40 and the supply opening 24. FIG. 9 is a perspective view showing a schematic configuration of the supply device 40 and the supply opening 24.
The supply opening 24 is provided adjacent to the + X side of the ultrasonic region Ar1, as shown in FIGS. Further, as shown in FIG. 9, the supply opening 24 includes a plurality of nozzles 317 arranged in the Y direction. In the present embodiment, these nozzles 317 are provided on the element substrate 31. That is, in the present embodiment, the element substrate 31 constitutes a part of the ultrasonic device 30 and also constitutes a part of the supply opening 24.

  As shown in FIG. 8, the supply device 40 is connected to the supply opening 24 (nozzle 317), and the acoustic matching material supplied from the supply tube 112 is supplied to the reservoir 40A, the manifold 40B, the pressure chamber 40C, and the nozzle communication. The ink is discharged from the supply opening 24 (nozzle 317) through the hole 326.

The reservoir 40 </ b> A is configured by a through-hole portion 411 formed in the case head 41. The case head 41 is made of, for example, a thermoplastic resin and is joined to the inside of the housing 21.
A supply connection portion 42 is provided at one end of the through-hole portion 411 provided in the case head 41, and the supply tube 112 is connected thereto. The supply tube 112 is a tube into which the acoustic matching material is introduced from the cartridge tank 6. The supply connection portion 42 is provided with a connection hole 421 that allows the supply tube 112 and the through-hole portion 411 to communicate with each other. The connection hole 421 may be provided with, for example, an electromagnetic valve that can be opened and closed by a signal from the wiring board 26. In this case, the acoustic matching material is supplied from the supply tube 112 into the through hole 411 (inside the reservoir 40A) when the electromagnetic valve is released, and the supply of the acoustic matching material is stopped when the electromagnetic valve is closed. Note that the inside of the reservoir 40A (inside the through-hole portion 411) has a larger volume and lower flow path resistance than a manifold 40B and a pressure chamber 40C described later.

The manifold 40B is connected to the reservoir 40A, and supplies the acoustic matching material from the reservoir 40A to each pressure chamber 40C in a branched manner.
In the present embodiment, the manifold 40 </ b> B is configured by a part of the sealing plate 32 configuring the ultrasonic device 30 and the compliance portion 43. Specifically, the + X side end of the sealing plate 32 is joined to the case head 41, and a first hole 322 continuous with the through-hole 411 is formed. The first hole 322 is a through hole that penetrates the sealing plate 32 in the thickness direction.
Further, on the −X side of the first hole portion 322 of the sealing plate 32, a communication portion 323 that is opposed to the compliance portion 43 via a gap having a predetermined dimension is provided. The communication portion 323 is formed by processing the surface of the sealing plate 32 opposite to the case head 41 into a concave shape so that the thickness dimension is reduced by, for example, etching or blasting. The communication portion 323 is provided from the first hole portion 322 to a position overlapping the + X side end portion of the pressure chamber 40 </ b> C in a plan view when the sealing plate 32 is viewed from the thickness direction, and the −X side of the communication portion 323. A wall 324 is provided at the end.

An introduction hole 325 corresponding to each nozzle 317 is provided on the −X side of the communication portion 323 of the sealing plate 32. In the present embodiment, the pressure chambers 40C are individually provided corresponding to the respective nozzles 317, and the introduction holes 325 are provided for the respective pressure chambers 40C. These introduction holes 325 are holes that penetrate the communication part 323 in the thickness direction.
For example, a film-like compliance portion 43 is fixed to the surface of the sealing plate 32 opposite to the case head 41 by a fixing member 431 and covers the first hole portion 322 and the communication portion 323. 8 shows an example in which the compliance portion 43 is fixed by the fixing member 431. However, for example, bonding by an adhesive or the like may be used, and the manifold 40B may be sealed by another member. Also good.

The pressure chamber 40 </ b> C is configured by an actuator substrate 44 that is stacked on the case head 41 side of the sealing plate 32. That is, in this embodiment, the case head 41 is provided with a storage recess 412 that forms a space for storing the actuator substrate 44 and the reinforcing substrate 45 between the case plate 41 and the storage recess 412. In addition, the actuator substrate 44 is disposed.
The actuator substrate 44 includes a substrate body 441 and a vibration film 442. The substrate body 441 is, for example, a semiconductor substrate such as Si, and the substrate body 441 is provided with openings 441A for forming the pressure chambers 40C for the respective nozzles 317 (each introduction hole 325). That is, each opening 441A is isolated by the partition wall 441B as shown in FIG. Each opening 441 </ b> A is closed by a vibration film 442 provided on the surface of the substrate body 441 opposite to the sealing plate 32. Thereby, the cavity surrounded by the partition wall 441B and the vibration film 442 is configured as the pressure chamber 40C.
The vibration film 442 is made of, for example, SiO ₂ , a laminated body of SiO ₂ and ZrO ₂ , and is provided so as to cover the entire surface of the substrate body 441 opposite to the sealing plate 32. The thickness dimension of the vibration film 442 is sufficiently small with respect to the substrate body 441. When the substrate main body 441 is made of Si and the vibration film 442 is made of SiO ₂ , for example, the surface of the substrate main body 441 opposite to the sealing plate 32 is subjected to an oxidation treatment, so that the vibration film 442 having a desired thickness dimension is obtained. Can be easily formed. In this case, the opening 441A can be easily formed by etching the substrate body 441 using the SiO ₂ vibration film 442 as an etching stopper.
Further, a reinforcing substrate 45 is joined to the back surface (case head 41 side) of the actuator substrate 44 to reinforce the actuator substrate 44.

  The sealing plate 32 is provided with nozzle communication holes 326 penetrating the sealing plate 32 in the thickness direction corresponding to the nozzles 317. These nozzle communication holes 326 communicate the nozzle 317 with the pressure chamber 40C corresponding to the nozzle 317, and send the acoustic matching material from the pressure chamber 40C to the nozzle 317.

And the piezoelectric element 443 is provided in the surface on the opposite side to the sealing plate 32 of the vibration film 442 with respect to each pressure chamber 40C, respectively. The piezoelectric element 443 has the same configuration as that of the piezoelectric element 313 constituting the ultrasonic transducer 35 and is configured by a laminated body of a lower electrode 444, a piezoelectric film 445, and an upper electrode 446. Here, the pressurizing actuator 40D that applies pressure to the acoustic matching material in the pressure chamber 40C is configured by the vibration film 442 and the piezoelectric element 443 that block the opening 441A. The lower electrode 444 and the upper electrode 446 are connected to the wiring board 26 through a through hole 413 provided in the case head 41.
In such a pressure actuator 40D, a rectangular wave voltage of a predetermined frequency is applied between the lower electrode 444 and the upper electrode 446, so that the vibration film 442 in the opening region of the opening 441A is vibrated, and the pressure chamber Pressurize the acoustic matching material in 40C. In addition, since the reservoir 40A and the manifold 40B are formed with a flow path in the direction toward the pressure chamber 40C, the acoustic matching material pressurized in the pressure chamber 40C is pushed out to the nozzle communication hole 326 and is superposed from the nozzle 317. Supplied to the sensor surface 22 side of the acoustic probe 2.

[Configuration of wiring board]
The wiring board 26 is provided with a driver circuit and the like for driving the ultrasonic device 30 and the supply device 40. Specifically, as shown in FIG. 2, the wiring board 26 includes a selection circuit 261, a transmission circuit 262, a reception circuit 263, a supply circuit 264, and the like. The wiring board 26 is electrically connected to the control device 5 via a coaxial cable 111 (see FIG. 10) in the cable 11.
The selection circuit 261 switches between a transmission connection for connecting the ultrasonic device 30 and the transmission circuit 262 and a reception connection for connecting the ultrasonic device 30 and the reception circuit 263 based on the control of the control device 5.
When the transmission circuit 262 is switched to the transmission connection under the control of the control device 5, the transmission circuit 262 outputs a transmission signal for causing the ultrasonic device 30 to transmit an ultrasonic wave via the selection circuit 261.
When the reception circuit 263 is switched to the reception connection under the control of the control device 5, the reception circuit 263 outputs the reception signal input from the ultrasonic device 30 via the selection circuit 261 to the control device 5. The reception circuit 263 includes, for example, a low noise amplification circuit, a voltage control attenuator, a programmable gain amplifier, a low-pass filter, an A / D converter, and the like. The reception circuit 263 converts the received signal into a digital signal, removes noise components, and the like. After performing each signal processing such as amplification to the signal level, the received signal after processing is output to the control device 5.

The supply circuit 264 controls the pressure actuator 40D by receiving the operation signal when the operation means 27 such as an operation button provided in the ultrasonic probe 2 is operated, and supplies the supply opening 24 ( The acoustic matching material is supplied (discharged) from the nozzle 317).
Here, as the operation unit 27, a discharge amount control knob or a button for selecting the discharge amount may be provided. In this case, when an operation signal for changing the discharge amount is input from the operation unit 27, the supply circuit 264 increases or decreases the drive voltage applied to the pressure actuator 40D according to the operation signal. Thereby, the discharge amount control of the acoustic matching material can be performed, and the highly accurate discharge control of the acoustic matching material can be performed.
The supply circuit 264 may be configured to control the pressure actuator 40D under the control of the control device 5.

The ultrasonic probe 2 is connected to the control device 5 by a cable 11. FIG. 10 is a schematic view showing a cross-sectional shape of the cable 11 of the present embodiment.
The cable 11 of this embodiment includes a sheath 110, a coaxial cable 111 provided in the sheath 110, and a supply tube 112.
The sheath 110 is a tube-shaped member made of, for example, silicone resin, vinyl chloride, polyethylene, or the like, and the coaxial cable 111 and the supply tube 112 are inserted through the inside thereof.
The coaxial cable 111 is a signal line that electrically connects the wiring board 26 and the control device 5, and includes, for example, a transmission signal line and a reception signal line for each ultrasonic transducer group 35A. Further, when the supply device 40 is controlled by the control device 5, a signal line for controlling the supply device 40 is also included.
As described above, the supply tube 112 is connected to the supply connection portion 42 of the supply device 40, and supplies the acoustic matching material from the cartridge tank 6 to the supply device 40.

  Usually, a plurality of coaxial cables connecting the ultrasonic probe 2 and the control device 5 are collected and covered with a silicone resin or the like. On the other hand, in this embodiment, since the coaxial cable 111 and the supply tube 112 are passed through the sheath 110, when the coating is performed later, the supply tube 112 is tightened, thereby reducing the supply efficiency of the acoustic matching material. There is. Therefore, in this embodiment, the cable 11 is formed by inserting the coaxial cable 111 and the supply tube 112 through the annular tube-shaped sheath 110. For this reason, a slight gap is provided between the coaxial cables 111 and between the coaxial cable 111 and the supply tube 112 as compared with the case where the cable is covered.

[Configuration of Control Device 5]
The control device 5 corresponds to a control unit in the present invention, and includes, for example, an operation unit 51, a display unit 52, a storage unit 53, and a calculation unit 54 as shown in FIG. .
The operation unit 51 is a UI (user interface) for a user to operate the ultrasonic apparatus 1, and can be configured by, for example, a touch panel provided on the display unit 52, operation buttons, a keyboard, a mouse, and the like.
The display unit 52 is configured by a liquid crystal display, for example, and displays an image.
The storage unit 53 stores various programs and various data for controlling the ultrasonic apparatus 1.
The calculation unit 54 is configured by a calculation circuit such as a CPU (Central Processing Unit) and a storage circuit such as a memory. Then, the calculation unit 54 reads and executes various programs stored in the storage unit 53 to control transmission signal generation and output processing for the transmission circuit 262, and for the reception signal to the reception circuit 263. Controls frequency setting and gain setting.
In addition, the control device 5 can also control the discharge of the acoustic matching material. In this case, the calculation unit 54 gives a command signal for instructing the drive control in the pressure actuator 40D to the supply circuit 264 of the ultrasonic probe 2. Output to the ultrasonic probe 2.

  Further, as described above, the controller 5 is provided with the cartridge tank 6 in which the acoustic matching material is stored, and is connected to the supply tube 112 included in the cable 11. The cartridge tank 6 is detachable from the control device 5 and can be appropriately replaced when the stored acoustic matching material is exhausted (when it is reduced).

[Operation Method of Ultrasonic Device 1]
In the ultrasonic apparatus 1 as described above, when the ultrasonic probe 2 is brought into contact with the living body, the user operates the operation means 27 provided on the ultrasonic probe 2. As a result, an operation signal is input from the operation means 27 to the wiring board 26, and the supply circuit 264 outputs a drive signal (AC signal) to the pressure actuator 40 </ b> D of the supply device 40. Thereby, the pressure actuator 40D is driven to vibrate, the acoustic matching material is pressurized in the pressure chamber 40C, and discharged from the supply opening 24 (nozzle 317).
As a result, the acoustic matching material is supplied to the ultrasonic region Ar1 from the supply opening 24 that is long in the Y direction. Here, the supply opening 24 is provided at a position adjacent to the ultrasonic region Ar1 with respect to the X direction, and has a size equal to or larger than the size of the ultrasonic region Ar1 with respect to the Y direction. For this reason, a uniform amount of the acoustic matching material is supplied between the sensor surface 22 and the living body from the + X side supply opening 24 of the ultrasonic region Ar1 along the Y direction.
In this state, the ultrasonic probe 2 is moved to the + X side. Thereby, as described above, the acoustic matching material uniformly ejected along the Y direction is spread and applied onto the acoustic lens 34 (ultrasonic region Ar1).
In addition, a cylindrical acoustic lens 34 is arranged in the ultrasonic region Ar1 with the Y direction as an axis and the cross-sectional surface shape with respect to the X direction being an arc. For this reason, the acoustic matching material rides along the arcuate curved surface of the acoustic lens, and a uniform amount of the acoustic matching material can reach between the living body and the acoustic lens 34.

As described above, after applying the acoustic matching material between the living body and the ultrasonic probe 2, an ultrasonic measurement process is performed based on the control from the control device 5. In this ultrasonic measurement process, an ultrasonic wave is transmitted from the ultrasonic probe 2 to the living body, and an ultrasonic wave reflected by the living body is received by the ultrasonic probe 2, thereby acquiring an internal tomographic image in the living body. To do.
In such an ultrasonic measurement process, the acoustic matching material applied between the living body and the ultrasonic probe 2 may be lost due to drying or the like. In this case, since an air layer easily enters between the ultrasonic probe 2 and the living body, it is necessary to replenish the acoustic matching material. On the other hand, in this embodiment, when the user operates the operation means 27, the acoustic matching material can be supplemented to the ultrasonic region Ar1 as described above.

[Operational effects of the first embodiment]
In the ultrasonic apparatus 1 of the present embodiment, the supply opening 24 is provided along the Y direction adjacent to the X direction of the ultrasonic region Ar1 on the sensor surface 22 of the ultrasonic probe 2 and supplied from the supply device 40. An acoustic matching material is supplied.
In such a configuration, the acoustic matching material can be supplied uniformly from the supply opening 24 along the Y direction, and a uniform amount of the acoustic matching material can be applied to the ultrasonic region Ar1. The amount of matching material used can also be reduced. Moreover, since the acoustic matching material can be applied automatically as compared with the case where the acoustic matching material is manually applied to the living body or the ultrasonic region Ar1, the user's work can be reduced.

  In the present embodiment, the supply opening 24 has a plurality of nozzles 317 arranged in the Y direction. For this reason, it is possible to apply a uniform amount of acoustic matching along the Y direction by discharging an appropriate amount of acoustic matching material from each nozzle 317. Further, from these nozzles 317, for example, the acoustic matching material can be infiltrated into fine irregularities such as pores of a living body, and the intervention of the air layer can be suppressed.

In the present embodiment, the supply opening 24 is provided at a position adjacent to the + X side in the X direction of the ultrasonic region Ar1.
For this reason, compared with the case where the clearance gap between the supply opening part 24 and ultrasonic field Ar1 is large, the acoustic matching material from the supply opening part 24 can be more reliably spread to ultrasonic field Ar1, and acoustic The amount of matching material can also be reduced.

  In the present embodiment, a rectangular ultrasonic transducer array 36 is formed in the ultrasonic region Ar1 by arranging a plurality of ultrasonic transducers 35 along the X direction and the Y direction in an array. The supply opening 24 is provided at a position adjacent to the X direction. That is, the ultrasonic region Ar1 has a rectangular shape, and the supply opening 24 is provided adjacent to one side thereof. In such a configuration, it is not necessary to bend the supply opening 24, and the configuration can be simplified.

  In the present embodiment, the supply device 40 includes a pressure chamber 40C that is connected to the supply opening 24 and is filled with an acoustic matching material, and a pressure actuator 40D that pressurizes the acoustic matching material in the pressure chamber 40C. . For this reason, by applying pressure to the acoustic matching material filled in the pressure chamber 40C by the pressure actuator 40D, the acoustic matching material can be supplied from the supply opening 24 (each nozzle 317), and the pressure actuator 40D is driven. By controlling the amount, the supply amount of the acoustic matching material discharged from the supply opening 24 can be controlled with high accuracy. For example, the operation means 27 is provided with a discharge amount control knob and a button for selecting the discharge amount. Then, when an operation signal for changing the discharge amount is input from the operation unit 27, the supply circuit 264 increases or decreases the drive voltage applied to the pressure actuator 40D according to the operation signal. Thereby, the discharge amount control of the acoustic matching material can be performed.

  In the present embodiment, the controller 5 is provided with a cartridge tank 6 that stores the acoustic matching material. For this reason, for example, compared with the case where the cartridge tank 6 is provided in the ultrasonic probe 2, the weight of the ultrasonic probe 2 can be reduced. The cartridge tank 6 is detachably attached to the control device 5. Therefore, when the amount of the acoustic matching material stored in the cartridge tank 6 decreases or disappears, the acoustic matching material can be easily replenished by simply changing the spare cartridge tank 6.

[Second Embodiment]
Next, a second embodiment according to the present invention will be described.
In the first embodiment, the supply opening 24 includes a plurality of nozzles 317, and acoustic matching is performed from each nozzle 317 by the pressure chamber 40 </ b> C and the pressurizing actuator 40 </ b> D provided corresponding to each of these nozzles 317. The configuration in which the material is discharged is illustrated. On the other hand, in 2nd embodiment, the supply opening part 24 differs from said 1st embodiment by the point comprised by one slit extended in a Y direction. In the following description, the same reference numerals are given to the configurations already described, and the description thereof is omitted or simplified.

FIG. 11 is a perspective view showing a schematic configuration of a supply device and a supply opening in the second embodiment.
In the present embodiment, as illustrated in FIG. 11, the supply opening 24 includes a slit 318 that is long in the Y direction. A plurality of slits 318 may be provided along the Y direction, or a single slit 318 may be provided.
Further, as shown in FIG. 11, the supply device 40 is provided with one pressure chamber 40C for the slit 318, and a plurality of pressure actuators 40D arranged in the Y direction are provided for the pressure chamber 40C.
The configurations of the reservoir 40A and the manifold 40B are the same as in the first embodiment.

  In the present embodiment configured as described above, the supply opening 24 has the slit 318 along the Y direction, so that a uniform amount of the acoustic matching material can be supplied along the slit 318. .

[Third embodiment]
Next, a third embodiment according to the present invention will be described.
In the first embodiment, as shown in FIG. 8, the ultrasonic device 30 transmits and receives ultrasonic waves by driving the piezoelectric elements 313 provided on the element substrate 31. The piezoelectric element 443 provided on the actuator substrate 44 is driven to control the discharge of the acoustic matching material. On the other hand, in the third embodiment, ultrasonic waves are transmitted and received by a part of a piezoelectric element (vibration element) provided on one substrate (element substrate), and an acoustic matching material by another part. This is different from the first embodiment in that the discharge control is performed.

FIG. 12 is a cross-sectional view schematically showing the vicinity of the boundary between the ultrasonic device 30 and the supply device 40 of the ultrasonic probe 2 in the third embodiment.
In the example shown in FIG. 12, in the element substrate 31, among the openings 311A arranged along the X direction, the opening 311A arranged at the + X end functions as the pressure chamber 40C. In the element substrate 31, among the piezoelectric elements 313 (vibration elements) arranged along the X direction, the piezoelectric element 313 arranged at the + X end portion functions as the pressure actuator 40 </ b> D together with the vibration film 312. The piezoelectric element 313 constitutes an ultrasonic transducer 35 together with the vibration film 312.

In the present embodiment, the nozzle substrate 46 is provided from a position facing the opening 311 </ b> A constituting the pressure chamber 40 </ b> C to a position covering the through hole 411 of the case head 41. The nozzle substrate 46 is provided with a recess 461 at a position facing the pressure chamber 40C, and a nozzle 462 penetrating the nozzle substrate 46 in the thickness direction is provided on the bottom surface of the recess 461. Although not shown in FIG. 12, a plurality of the nozzles 462 are provided along the Y direction, like the nozzles 317 in the first embodiment. That is, the same number of nozzles 462 as the number of ultrasonic transducer groups 35A arranged in parallel along the Y direction are provided.
In addition, the nozzle substrate 46 is provided with a recess 463 at a position facing the through hole 411 of the case head 41, and from the recess 463 toward the respective recesses 461 (pressure chamber 40C) arranged in the Y direction. A communication recess 464 that communicates with each other is provided. That is, the through-hole portion 411 of the case head 41 becomes the reservoir 40A, as in the first embodiment, and the communication recess 464 from the recess 463 of the nozzle substrate 46 branches the acoustic matching material from the reservoir 40A into each pressure chamber 40C. It functions as a manifold 40B.
In addition, a through-hole may be formed in the nozzle substrate 46 at a position facing, for example, the through-hole portion 411, and the compliance portion 43 may be disposed as in the first embodiment.

  In the present embodiment, a part of the plurality of piezoelectric elements 313 arranged on the element substrate 31 functions as the pressure actuator 40D, and the rest functions as the ultrasonic transducer 35. In such a configuration, the configuration can be simplified as compared with the configuration using the element substrate 31 and the actuator substrate 44 as in the first embodiment. That is, it is not necessary to prepare the actuator substrate 44 separately, and the configuration of the reinforcing substrate 45 is not necessary. In addition, since the ultrasonic probe 2 can be configured with a smaller number of substrates, the ultrasonic probe 2 can be thinned.

[Modification of Third Embodiment]
In the third embodiment, the example in which the nozzle 462 is formed in the concave portion 461 of the nozzle substrate 46 is shown, but the present invention is not limited to this.
FIG. 13 is a schematic view showing a modification of the third embodiment. In the example shown in FIG. 13, an inclined surface 465 that is inclined toward the acoustic lens 34 is formed on the bottom surface of the recess 461. For example, the inclined surface 465 is formed at the same inclination angle as the tangent plane in the curved surface of the end portion of the acoustic lens 34.
In such a configuration, in the pressure chamber 40C, the acoustic matching material pushed out by the pressure actuator 40D is pushed out toward the acoustic lens 34 along the inclined surface 465. For this reason, the acoustic matching material does not flow to the side away from the acoustic lens 34 (+ X side), and wasteful consumption of the acoustic matching material can be suppressed.

[Fourth embodiment]
Next, a fourth embodiment according to the present invention will be described.
In the first and second embodiments, an example in which the supply opening 24 (the nozzle 317 and the slit 318) is exposed to the sensor surface 22 has been described. In contrast, the fourth embodiment differs from the above embodiment in that an elastic member is disposed around the supply opening 24.

FIG. 14 is a perspective view showing a schematic configuration of the ultrasonic probe 2 in the fourth embodiment.
In the present embodiment, as shown in FIG. 14, an elastic member 25 surrounding the supply opening 24 is provided on the sensor surface 22.
That is, in this example, the elastic member 25 configured in a cylindrical shape protruding from the sensor surface 22 is disposed at a position where the nozzle 317 (or the slit 318) is provided. In the elastic member 25, the nozzle 317 (or the slit 318) is arranged. ) To the projecting tip of the elastic member, a supply opening 24 is formed.

The elastic member 25 is made of, for example, a silicone resin and serves as a cushion when the ultrasonic probe 2 is brought into contact with the living body, and can reduce damage to the living body.
In addition, the projecting dimension of the elastic member 25 is not particularly limited. For example, the projecting dimension of the acoustic lens 34 is preferably the same or substantially the same. In such a configuration, when the ultrasonic probe 2 is brought into contact with the living body, the elastic member 25 and the distal end portion of the acoustic lens 34 first come into contact with the living body. In this state, the acoustic matching material can be reliably adhered to the living body by discharging the acoustic matching material from the supply opening 24 provided at the tip of the elastic member 25. Thereby, for example, the acoustic matching material can be infiltrated into unevenness (pores, wrinkles, etc.) in the living body, and the decrease in the ultrasonic transmission rate due to the interposition of the air layer can be suppressed.

[Modification of Fourth Embodiment]
In the fourth embodiment, the example in which the supply opening 24 is arranged at the protruding tip of the elastic member 25 is shown, but the present invention is not limited to this.
FIG. 15 is a diagram illustrating an example of a supply opening according to a modification of the fourth embodiment.
For example, as shown in FIG. 15, a supply opening 24 having an inclined surface 241 that is inclined toward the protruding tip side as the inside of the elastic member 25 approaches the acoustic lens 34 from the nozzle 317 (or the slit 318) is provided. May be.
In such a supply opening 24, the acoustic matching material can be discharged toward the acoustic lens 34 along the inclined surface 241. Therefore, as in the modification of the third embodiment, the acoustic matching material does not flow to the side away from the acoustic lens 34 (+ X side), and the consumption of the acoustic matching material can be reduced. Further, the elastic member 25 functions as a wiper, and the acoustic matching material flowing to the side away from the acoustic lens 34 can be blocked by the elastic member 25. Therefore, the outflow of the acoustic matching material to the + X side can be more reliably suppressed.

[Fifth embodiment]
Next, a fifth embodiment according to the present invention will be described.
In the first embodiment, the example in which the supply opening 24 is provided on the + X side of the ultrasonic region Ar1 and the acoustic matching material is discharged from the supply device 40 has been described. On the other hand, the fifth embodiment is different from the above embodiment in that the supply opening 24 is provided with the ultrasonic region Ar1 interposed therebetween.

FIG. 16 is a plan view of a sensor surface in the fifth embodiment.
As shown in FIG. 16, in the present embodiment, supply openings 24 are provided at positions sandwiching the ultrasonic region Ar <b> 1 with respect to the X direction, that is, both on the + X side and the −X side.
Each supply opening 24 is provided with the same supply device 40 as in the first to third embodiments, and it is possible to individually discharge the acoustic matching material.

In such an ultrasonic probe 2, the acoustic matching material can be supplied to the ultrasonic region Ar1 more rapidly.
Further, since the acoustic lens 34 in the ultrasonic region Ar1 has a cylindrical shape, when the acoustic matching material is ejected from the supply opening 24 on the + X side of the ultrasonic region Ar1 and the ultrasonic probe 2 is moved to the + X side. The acoustic matching material is blocked by the protruding portion of the acoustic lens 34, and the acoustic matching material is unlikely to spread on the −X side of the acoustic lens 34. On the other hand, in this embodiment, the acoustic lens is further ejected from the supply opening 24 on the −X side of the ultrasonic region Ar1 and the ultrasonic probe 2 is moved to the −X side, so that an acoustic lens is obtained. The acoustic matching material can be sufficiently expanded also on the −X side of 34.

[Sixth embodiment]
Next, a sixth embodiment according to the present invention will be described.
In the fifth embodiment, the example in which the supply opening 24 and the supply device 40 are provided also on the −X side of the ultrasonic region Ar1 has been described. In contrast, the sixth embodiment is different from the fifth embodiment in that a wiper is provided on the −X side of the ultrasonic region Ar1.

FIG. 17 is a plan view of a sensor surface in the sixth embodiment.
As shown in FIG. 17, in the present embodiment, for example, a rubber wiper 28 is provided on the −X side of the ultrasonic region Ar1 with respect to the X direction.
The wiper 28 is configured to be long in the Y direction, and has a dimension larger than the dimension of the ultrasonic region Ar1 (acoustic lens 34) in the Y direction, for example.

In such a configuration, the acoustic matching material that has flowed out to the −X side from the acoustic lens 34 can be blocked by the wiper 28, and the living body (the person to be measured) does not feel uncomfortable and performs a comfortable ultrasonic measurement process. Can be implemented. Moreover, the consumption of an acoustic matching material can be suppressed by damping the acoustic matching material with the wiper 28.
Furthermore, as described above, when the acoustic matching material is ejected from the supply opening 24 on the + X side of the ultrasonic region Ar1 and the ultrasonic probe 2 is moved to the + X side, the acoustic matching material is caused by the protruding portion of the acoustic lens 34. The acoustic matching material is hardly spread on the −X side of the acoustic lens 34. In contrast, the wiper 28 collects the acoustic matching material spread on the −X side of the acoustic lens 34 and moves the ultrasonic probe 2 to the −X side. A wide range of acoustic matching materials.

[Other variations]
Note that the present invention is not limited to the above-described embodiments, and the present invention includes configurations obtained by modifying, improving, and appropriately combining the embodiments as long as the object of the present invention can be achieved. Is.

  In the above-described embodiment, in the ultrasonic transducer array 36, the ultrasonic transducer group 35A is configured by the plural ultrasonic transducers 35 arranged in the X direction, and the ultrasonic transducer group 35A is arranged in the Y direction. Although the structure is illustrated, it is not limited to this. For example, the lower electrode 314 of each ultrasonic transducer 35 may be individually drawn out and a signal may be input individually. In this case, the ultrasonic transducer array 36 can be driven as a two-dimensional array. Become.

In the above embodiment, the element substrate 31 is provided with the opening 311A. However, for example, the element substrate 31 is not provided with the opening 311A, and the ultrasonic transducer 35 vibrates the element substrate 31 itself. May be transmitted, and reception of ultrasonic waves may be detected by vibration of the element substrate 31.
Further, although the configuration in which the vibration film 312 is provided on the back surface 31A side of the opening 311A is illustrated, for example, the vibration film 312 is provided on the operation surface 31B side of the opening 311A, and the ultrasonic transducer 35 is provided on the vibration film 312. It is good also as a structure in which the piezoelectric element 313 which comprises is provided.

In each of the above embodiments, the piezoelectric element 313 (443) that is a vibration element is configured by a laminated body in which the lower electrode 314 (444), the piezoelectric film 315 (445), and the upper electrode 316 (446) are laminated in the thickness direction. However, the present invention is not limited to this. For example, a configuration may be employed in which a pair of electrodes are arranged to face each other on one surface side orthogonal to the thickness direction of the piezoelectric film 315 (445). Further, the electrodes may be arranged so that the piezoelectric film is sandwiched between side surfaces along the thickness direction of the piezoelectric film.
Further, the vibration element may have a configuration in which electrodes are provided in the form of thin films facing each other and arranged to face each other, and an AC voltage is applied between these electrodes to vibrate the thin film.

  In each of the above-described embodiments, the ultrasonic device 1 transmits ultrasonic waves to the living body from the ultrasonic region Ar1 and receives ultrasonic waves reflected in the living body to measure the internal structure in the living body. Although the measurement apparatus is illustrated, it is not limited to this. For example, the present invention can also be applied to an ultrasonic treatment device that performs treatment or improvement of an affected part by performing only transmission processing of ultrasonic waves from the ultrasonic region Ar1 and applying ultrasonic waves to a predetermined affected part in a living body. In addition, the present invention can also be applied to an ultrasonic receiver that measures ultrasonic waves from a living body.

In each of the above embodiments, an example is shown in which the supply opening 24 that is long in the Y direction is provided at a position adjacent to the X direction with respect to the cylindrical acoustic lens 34 whose cross-sectional surface shape is an arc with respect to the X direction. However, it is not limited to this. For example, a supply opening that is long in the X direction may be provided at a position adjacent to the acoustic lens 34 in the Y direction. In this case, the X direction is the first direction of the present invention, and the Y direction is the second direction of the present invention.
Further, the circumference (four directions) of the acoustic lens 34 (ultrasonic region Ar1) may be surrounded by the supply opening 24.

In each said embodiment, although the supply opening part 24 showed the example provided adjacent to ultrasonic field Ar1, although it is not limited to this. For example, a configuration may be employed in which a gap is provided between the ultrasonic region Ar1 and the supply opening 24, and the supply opening 24 may be provided within a predetermined distance from the ultrasonic region Ar1.
Further, although an example in which the ultrasonic region Ar1 and the supply opening 24 are provided in the sensor window 23 provided for the sensor surface 22 is shown, the present invention is not limited to this. For example, only the ultrasonic region Ar <b> 1 may be provided in the sensor window 23, the acoustic lens 34 may be exposed to the sensor surface 22, and the supply opening 24 may be provided separately from the sensor window 23.

In each of the above-described embodiments, the ultrasonic region Ar1 is configured by the ultrasonic transducers 35 arranged in an array along the X direction and the Y direction and is a rectangular region. However, the embodiment is not limited thereto.
For example, a plurality of ultrasonic transducers 35 may be arranged in a circular area. In this case, the supply opening may be provided along one arc (semicircle) of the circular ultrasonic region.

In the first embodiment, an example in which the supply opening 24 includes a plurality of nozzles 317 is shown. In the second embodiment, an example in which the supply opening 24 includes a slit 318 is shown. The nozzle may include a nozzle and a slit.
Moreover, it is good also as a structure which provides a nozzle in the supply opening part adjacent along the X direction of ultrasonic field Ar1, and provides a slit in the supply opening part adjacent along the Y direction.

  Although the acoustic matching material of the pressure chamber 40C is pushed out by the pressure actuator 40D and supplied from the supply opening 24 as the supply device 40 in the above embodiment, the present invention is not limited to this. For example, the pressure of the acoustic matching material supplied from the cartridge tank 6 may be increased by a pump or the like and discharged from the supply opening 24.

  In addition, the specific structure for carrying out the present invention may be configured by appropriately combining the above-described embodiments and modifications within the scope that can achieve the object of the present invention, and may be appropriately changed to other structures and the like. May be.

  DESCRIPTION OF SYMBOLS 1 ... Ultrasonic device, 2 ... Ultrasonic probe, 5 ... Control apparatus (control part), 6 ... Cartridge tank, 11 ... Cable, 21 ... Housing, 22 ... Sensor surface (operation surface), 23 ... Sensor window, 24 DESCRIPTION OF SYMBOLS Supply opening part, 25 ... Elastic member, 26 ... Wiring board, 27 ... Operation means, 28 ... Wiper, 30 ... Ultrasonic device, 31 ... Element board, 33 ... Acoustic matching layer, 34 ... Acoustic lens, 35 ... Ultrasonic Transducer, 35A ... ultrasonic transducer group, 36 ... ultrasonic transducer array, 40 ... supply device, 40A ... reservoir, 40B ... manifold, 40C ... pressure chamber, 40D ... pressure actuator, 44 ... actuator substrate, 45 ... Reinforcing substrate, 46 ... nozzle substrate, 110 ... sheath, 111 ... coaxial cable, 112 ... supply tube, 241 ... inclined surface, 64 ... Supply circuit, 311 ... Substrate main body, 311A ... Opening, 312 ... Vibration film, 313 ... Piezoelectric element, 314 ... Lower electrode, 315 ... Piezoelectric film, 316 ... Upper electrode, 317 ... Nozzle, 318 ... Slit, 326 ... nozzle communication hole, 441 ... substrate body, 441A ... opening, 441B ... partition wall, 442 ... vibration film, 443 ... piezoelectric element, 444 ... lower electrode, 445 ... piezoelectric film, 446 ... upper electrode, 462 ... nozzle, 465 ... Inclined surface, Ar1 ... ultrasonic region, Ar2 ... terminal region.

Claims (14)

Operation surface,
An ultrasonic device having an ultrasonic region along the first direction on the operation surface, and performing at least one of transmission of ultrasonic waves and reception of ultrasonic waves by the ultrasonic region;
A supply opening that is disposed within a predetermined distance range from the ultrasonic region with respect to a second direction that intersects the first direction on the operation surface, and is elongated along the first direction;
A supply device connected to the supply opening for discharging acoustic matching material from the supply opening;
An ultrasonic probe comprising: The ultrasonic probe according to claim 1,
The ultrasonic probe according to claim 1, wherein the supply opening includes a plurality of nozzles arranged along the first direction. The ultrasonic probe according to claim 1,
The ultrasonic probe according to claim 1, wherein the supply opening includes a slit that is long along the first direction. The ultrasonic probe according to any one of claims 1 to 3,
The ultrasound probe, wherein the supply opening is provided adjacent to the ultrasound region with respect to the second direction. The ultrasonic probe according to claim 4,
The ultrasonic region has sides along the first direction;
The ultrasonic probe according to claim 1, wherein the supply opening is provided adjacent to the side. The ultrasonic probe according to any one of claims 1 to 5,
The ultrasonic probe according to claim 2, wherein the supply opening is provided at a position sandwiching the ultrasonic region with respect to the second direction. The ultrasonic probe according to any one of claims 1 to 6,
The ultrasonic probe comprising: a pressure chamber connected to the supply opening and filled with the acoustic matching material; and an actuator that pressurizes the acoustic matching material in the pressure chamber. The ultrasonic probe according to claim 7,
Comprising an element substrate provided with a plurality of vibration elements;
A part of the plurality of vibration elements is provided in the ultrasonic region, and the rest of the plurality of vibration elements constitutes the actuator of the supply device. The ultrasonic probe according to any one of claims 1 to 8,
An ultrasonic probe comprising an elastic member surrounding the supply opening. The ultrasonic probe according to any one of claims 1 to 9,
The ultrasonic wave probe, wherein the supply opening discharges the acoustic matching material in a direction toward the ultrasonic region. The ultrasonic probe according to claim 10, wherein
The ultrasonic probe according to claim 1, wherein the supply opening has an inclined surface inclined toward the ultrasonic region. The ultrasonic probe according to any one of claims 1 to 11,
An ultrasonic probe characterized in that a wiper having a length in the first direction is provided on the opposite side of the ultrasonic region to the side where the supply opening is disposed in the second direction. An ultrasonic device having an ultrasonic area along a first direction in the operation plane and the operation plane, and performing at least one of transmission of ultrasonic waves and reception of ultrasonic waves by the ultrasonic area; A supply opening that is disposed within a predetermined distance range from the ultrasonic region with respect to a second direction that intersects the first direction and that is long along the first direction, and is connected to the supply opening An ultrasonic probe including a supply device for discharging acoustic matching material from the supply opening;
A tank in which the acoustic matching material supplied to the supply device of the ultrasonic probe is stored;
An ultrasonic device comprising: The ultrasonic apparatus according to claim 13.
An ultrasonic apparatus comprising a control unit for controlling the ultrasonic probe.

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