JP2017042758A - Die head for coating and coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a die head for coating and a coating device, lightweight as compared with metal, and reducing contamination of an impurity to a coating liquid.SOLUTION: A die head for coating of the present disclosure comprises a columnar body of extending over the second end from the first end, that is, a main body having the third end of projecting in the direction crossing the axis of this columnar body and composed of a first ceramic sintered body and a slit part positioned toward the third end from the inside over the second end side from the first end side on the inside in this main body. The slit part comprises a tip member composed of a second ceramic sintered body higher in fracture toughness than the first ceramic sintered body in a part facing to at least the third end.SELECTED DRAWING: Figure 1

Description

  The present disclosure relates to a coating die head and a coating apparatus.

  Conventionally, a member made entirely of a metal such as stainless steel is generally used as a coating die head. For example, Patent Document 1 proposes a coating die head (coating nozzle) in which a base material is made of stainless steel and a cemented carbide coating layer is provided at a nozzle tip portion facing the object to be coated.

International Publication No. 2007/049349

  Such a conventional coating die head has a problem that the substrate is made of a metal such as stainless steel and has a high specific gravity, which increases the weight of the coating die head and makes it difficult to attach and remove. It was. In addition, since the coating layer of the cemented carbide is formed by thermal spraying, voids such as microcracks and pores in the coating layer cannot be sufficiently reduced, and particles dropped from the voids during the coating operation (hereinafter referred to as the following) , Also referred to as degranulation.) Was mixed into the coating solution. When a coating liquid in which a large amount of degranulation is mixed is used, the coating film becomes a film with a low quality and a large amount of impurities.

  In view of the above problems, an object of the present disclosure is to provide a coating die head and a coating apparatus that are lighter than metals and less contaminated with a coating liquid.

  The coating die head according to the present disclosure is a columnar body extending from a first end to a second end, and a main body made of a first ceramic sintered body having a third end protruding in a direction intersecting with the axis of the columnar body. And a slit portion that extends from the first end side to the second end side and is located from the inside toward the third end inside the main body. And a slit part has the front-end | tip member which consists of a 2nd ceramic sintered compact whose fracture toughness is higher than a 1st ceramic sintered compact at the site | part which faces a 3rd end.

  Moreover, the coating apparatus of this indication is provided with the die head for coating of the said structure, and the supply mechanism of a coating liquid.

  The coating die head according to the present disclosure is relatively light and contains less impurities in the coating liquid.

An example of an embodiment of a coating die head according to the present disclosure is shown, (a) is a perspective view, (b) is a perspective view including a cross section cut along line AA ′ in (a), and (c) is a perspective view. It is an enlarged view of the B section in (b), (d) is an enlarged view of the C section in (b). The other example of embodiment of the die head for application of this indication is shown, (a) is a perspective view, (b) is a perspective view including the section cut by the DD 'line in (a), (c ) Is an enlarged view of an E portion in (b), and (d) is an enlarged view of an F portion in (b). Still another example of the embodiment of the coating die head is shown, (a) is a perspective view, (b) is a perspective view including a cross section cut along line GG ′ in (a), (c) is It is an enlarged view of the H section in (b), (d) is an enlarged view of the J section in (b).

  Hereinafter, a plurality of examples of the embodiment of the present disclosure will be described in detail with reference to FIGS. However, in all the drawings of the present specification, the same parts are denoted by the same reference symbols unless the confusion occurs, and the description thereof is omitted as appropriate.

  The coating die head shown in FIGS. 1 to 3 is a columnar body extending from the first end E1 to the second end E2, and intersects the axis of the columnar body (the direction extending from the first end E1 to the second end E2). A main body 1 made of a first ceramic sintered body having a third end E3 protruding in the direction is provided. Here, it can be paraphrased that the protruding direction of the third end E3 is directed to the object to be coated.

  The coating die head shown in FIG. 1 to FIG. 3 extends from the first end E1 side to the second end E2 side inside the main body 1 and is located from the inside toward the third end E3. A slit portion s for discharging the coating liquid toward the object is provided. Further, the slit portion s includes a tip member 2 (2a, 2b) made of a second ceramic sintered body having a fracture toughness higher than that of the first ceramic sintered body at least at a portion facing the third end E3. ing.

  In the example shown in FIGS. 1 and 2, the main body 1 has a first main body 1a and a second main body 1b, and the facing surface 42 between the first main body 1a and the second main body 1b is a slit portion. It also serves as the inner surface 12 of s. In the example shown in FIGS. 1 to 3, the coating die head includes side plates 5a and 5b on the first end E1 side and the second end E2 side, respectively. It is attached to the main body 1 (not shown).

Here, the code | symbol 3 shown in FIG.1 (b), FIG.2 (b), and FIG.3 (b) is a storage part for supplying the coating liquid supplied from the outside to the slit part s. In the example shown in FIG. 1B and FIG. 2B, the reservoir 3 is formed by a combination of a recess formed in the first main body 1a and the second main body 1b. In addition, the storage part 3 may be formed by the combination of the recessed part formed in the 2nd main-body part 1b, and the 1st main-body part 1a, and was formed in each of the 1st main-body part 1a and the 2nd main-body part 1b. The reservoir 3 may be formed by a combination of recesses.

The tip member 2 constituting the slit portion s has a constant length in the direction from the third end E3 (L ′) of the main body 1 to the storage portion 3 (L) from the first end E1 to the second end E2. May be. When satisfying such a configuration, since the variation in the supply amount of the coating liquid is small, the variation in the coating film thickness can be suppressed.

  The interval between the slit portions s is, for example, 40 μm or more and 600 μm or less, and the length of the slit portion s (the length from the first end E1 to the second end E2) is, for example, 0.1 m or more and 3 m or less. The width of the part s (the length from the third end E3 (L ′) to the storage part 3 (L)) is, for example, not less than 5 mm and not more than 100 mm.

The fourth end E4 side opposite to the third end E3 is closed between the first main body 1a and the second main body 1b, and between the opposing surfaces 42 of the first main body 1a and the second main body 1b. The member 6 is positioned so that the coating liquid does not flow out from the fourth end E4 side. If the third end E3 that discharges the coating liquid is the leading end, the fourth end E4 can be called the trailing end. In the following, the third end E3 is the leading end, and the fourth end E4 is the trailing end. May be described. In the example shown in FIG. 1B and FIG. 2B, in the first main body 1a, 12 of the slit portion s located on the front end side and the rear end side with respect to the storage portion 3 and the facing surface 42 are Located on the same plane.

  Further, in the second main body 1b, the inner surface 12 of the slit portion s located on the front end side, the inner surface of the storage portion 3 located on the rear end side, and the facing surface 42 located on the rear end side are the same plane. That is, the closing member 6 also functions as a spacer for forming the slit portion s, and the thickness of the closing member 6 and the interval between the slit portions s are substantially the same. The closing member 6 in this embodiment is connected from the storage part 3 to the rear end, and is in contact with the entire opposing surface 42 of the first main body 1a and the second main body 1b. If the coating liquid does not flow out, the closing member 6 does not necessarily have to be in contact with the entire opposing surfaces 42 of the first main body 1a and the second main body 1b, and there is a space between the opposing surfaces 42. It may be arranged.

  The part (tip face 11) facing the third end E3 of the slit part s in the coating die head is a part close to the object to be coated, and is a part where cracks and chips are likely to occur due to contact. In particular, the corner portion 30 which is a portion from the front end surface 11 to the inner surface 12 of the slit portion s is likely to be cracked or chipped due to a collision with an object to be coated. Moreover, when the slurry which is a coating liquid contains the powder with comparatively high hardness, it can be said that the front end surface 11 containing the corner | angular part 30 is a site | part which is easy to wear. In the case of this embodiment, since the tip members 2a and 2b are made of the second ceramic sintered body having higher fracture toughness than the first ceramic sintered body constituting the main body 1, the coating die head is, for example, coated Even when it comes into contact with an object, damage caused by this contact is suppressed. In order to reduce the wear powder generated by the coating liquid during the coating operation, it is preferable that the inner surface 12 of the slit portion s is formed on the surfaces of the tip members 2a and 2b.

Fracture toughness is shown as a fracture toughness value K _IC measured by the IF method specified in JIS R 1607-2010. The fracture toughness value K _IC of the main body 1 made of the first ceramic sintered body is preferably in the range of 3 MPa · m ^0.5 or more and less than 4 MPa · m ^0.5 . The second ceramic fracture toughness value of the tip member 2 made of a sintered body _{K IC} is 4 MPa ^{· m 0.5} or more 8 MPa ^{· m 0.5} or less is preferably in the range of.

  The first main body 1a and the second main body 1b are made of a first ceramic sintered body made of an aluminum oxide sintered body or a silicon carbide sintered body, and the tip member 2 is a zirconium oxide sintered body, Preferably, the second ceramic sintered body is made of either a silicon nitride sintered body or a sialon sintered body.

  These ceramic sintered bodies have a specific gravity smaller than, for example, stainless steel, and the coating die head using these ceramic sintered bodies is relatively light and easy to handle by an operator.

  The first ceramic sintered body made of the aluminum oxide sintered body or the silicon carbide sintered body is relatively inexpensive and lightweight, but has high mechanical strength. Therefore, the coating die head including the main body 1 made of an aluminum oxide sintered body or a silicon carbide sintered body has a relatively high mechanical strength and is relatively lightweight, and can be manufactured at a relatively low cost. .

  The second ceramic sintered body made of any one of the zirconium oxide sintered body, the silicon nitride sintered body, and the sialon sintered body is relatively inexpensive and has many other ceramic sintered bodies having wear resistance. Higher than Therefore, when the coating liquid contains a metal powder having a relatively high hardness, it is possible to suppress wear due to contact with the coating liquid during the coating operation.

When the first main body 1a and the second main body 1b are made of an aluminum oxide sintered body, the tip member 2 is, for example, a zirconium oxide sintered body, a silicon nitride sintered body, or a sialon sintered body. , Silicon carbide sintered body, silicon carbonitride sintered body, titanium carbide sintered body, titanium nitride sintered body or titanium carbonitride sintered body, or aluminum oxide and titanium carbide, titanium nitride and oxidation A composite sintered body made of at least one of zirconium may be used.

  Moreover, when the 1st main-body part 1a and the 2nd main-body part 1b consist of a silicon carbide sintered body, the front-end | tip member 2 is a silicon nitride sintered body, a sialon sintered body, silicon carbonitride, for example. Sintered body, titanium carbide sintered body, titanium nitride sintered body or titanium carbonitride sintered body, or composite sintered body comprising aluminum oxide and at least one of titanium carbide, titanium nitride and zirconium oxide, etc. May be used.

  Here, the composite sintered body is, for example, a ceramic sintered body in which aluminum oxide is 60% by mass to 70% by mass and at least one of titanium carbide, titanium nitride, and zirconium oxide is 30% by mass to 40% by mass. It is a ligation.

  In the first ceramic sintered body, for example, an aluminum oxide sintered body means that aluminum oxide occupies 80% by mass or more of 100% by mass of the components constituting the first ceramic sintered body. Say.

  Further, in the second ceramic sintered body, for example, a zirconium oxide-based sintered body means that zirconium oxide occupies 80% by mass or more out of 100% by mass of components constituting the second ceramic sintered body. Say.

The content of each component constituting the first ceramic sintered body and the second ceramic sintered body is determined using an X-ray diffractometer (XRD), and then the component is identified, and then an X-ray fluorescence analyzer (XRF) The content of the element may be determined using and converted to the identified component. For example, in XRD, when the aluminum oxide is identified, after obtaining the content of Al by XRF, in terms of _Al 2 _{O 3,} the content of _Al 2 _{O 3} obtained by this conversion is 80 wt% If it is above, a target object is an aluminum oxide sintered body.

  The tip member 2 is made of a zirconium oxide-based sintered body, and it is preferable that the ratio of tetragonal crystals in the crystal structure constituting the zirconium oxide is 80% or more.

  When satisfying such a configuration, even if stress is repeatedly applied to the tip member 2, stress-induced transformation is unlikely to occur, and therefore mechanical strength is unlikely to decrease.

  The tetragonal ratio was determined by irradiating zirconium oxide sintered body with CuKα ray using XRD, measuring the diffraction angle 2θ in the range of 20-80 °, and then using the Rietveld method from the obtained X-ray diffraction pattern. It is calculated by using.

  The tip member 2 is made of a zirconium oxide sintered body, contains yttrium oxide as a stabilizer, further contains silicon and titanium, and the contents of silicon and titanium converted into oxides are each 0.1% by mass. It is preferable that:

  When satisfying such a configuration, even if the tip member 2 is repeatedly exposed to a high-temperature coating solution, the volume occupied by the grain boundary phase containing silicon and titanium oxides is small, so that the oxidation is performed in the grain boundary phase. Yttrium is difficult to dissolve, and durability at high temperatures is improved.

  The second ceramic sintered body constituting the tip member 2 is preferably made of a zirconium oxide-based sintered body and has an average crystal grain size of 1 μm or less (excluding 0 μm).

  When satisfying such a configuration, the gaps between the crystal particles are reduced, the viscosity variation caused by the penetration of the coating liquid into the gaps can be suppressed, and stable coating can be performed.

  In order to obtain the average crystal grain size of the second ceramic sintered body, first, polishing is performed until the fracture surface of the second ceramic sintered body becomes a mirror surface and thermal etching is performed. A surface obtained by thermal etching is taken as a measurement surface, and an image is obtained by photographing at a magnification of 5000 to 10,000 times using a scanning electron microscope. Centering on an arbitrary point in the image, 6 straight lines each having a length of 8 μm, for example, are drawn at 30 ° intervals, and the number of crystals existing on these 6 straight lines is the sum of these straight lines. It can be obtained by dividing by the length.

  The tip member 2 preferably has an exposed surface exposed on at least a part of the inner surface 12 of the slit portion s, and the arithmetic average roughness Ra on the exposed surface is preferably 0.5 μm or less. Here, the exposed surface of the tip member 2 is a part of the inner surface 12 of the slit portion s. When the arithmetic average roughness Ra of the exposed surface of the tip member 2 is 0.5 μm or less, the exposed surface has few irregularities and pores that are likely to cause degranulation. It is difficult to occur, and impurities in the coating liquid, and thus defects in the coating work can be more reliably suppressed. In the inner surface 12 of the slit portion s, it is preferable that the area ratio of the exposed surface of the tip member 2 is high.

  In particular, the arithmetic average roughness Ra on the exposed surface of the tip member 2 is preferably 0.4 μm or less. Arithmetic mean roughness Ra is a stylus type surface roughness meter according to JIS B 0601-2013 (ISO 4287: 1997, Amd. 1: 2009), with a measurement length of 5 mm and a cut-off value. It is an average value of values obtained by measuring five locations at 0.8 mm, a stylus tip radius of 2 μm, and a stylus scanning speed of 0.5 mm / second.

  Further, it is preferable that a bonding layer (not shown) whose main component is a resin is located between the main body 1 and the tip member 2. That is, the tip members 2a and 2b are preferably joined to the first main body portion 1a and the second main body portion 1b via a bonding layer mainly composed of a resin. When satisfying such a configuration, the first main body 1a, the second main body 1b, and the tip members 2a, 2b are filled with a bonding layer agent mainly composed of a resin and bonded. It can suppress that a space | gap (gap) arises between the part 1a, the 2nd main-body part 1b, and the front-end | tip members 2a and 2b. This suppresses the entry of the coating liquid that occurs when there is a gap (gap) between the first main body portion 1a, the second main body portion 1b, and the tip members 2a, 2b, and coating such as thickness variation Film defects can be suppressed. As the adhesive mainly composed of a resin, for example, an epoxy organic adhesive can be used.

  Here, the main component in a joining layer means the component which occupies 80 mass% or more among the components which comprise a joining layer, and can identify and quantify by a gas chromatography mass spectrometry.

  Further, the tip members 2a and 2b may be fastened to the main body 1 by fastening members. Examples of the fastening by the fastening member include fastening by a bolt. When fastened with bolts or the like, the long-term reliability of the fastened state between the tip members 2a, 2b and the first main body 1a and the second main body 1b can be further improved, and the coating is continuously applied over a relatively large number of times. The process can be repeated. In particular, it is preferable that the joining using the joining layer by the adhesive and the fastening by the fastening member are used in combination.

As described above, in the embodiment shown in FIGS. 1 and 2, the main body 1 includes a pair of the first main body portion 1 a and the second main body portion 1 b, and according to such a configuration, the coating operation is performed. After the repetition, the first main body 1a and the second main body 1b are periodically disassembled, and maintenance such as polishing the respective facing surfaces to increase the flatness can be performed relatively easily. Reliability can be further increased.

  Further, in this case, as shown in FIG. 2, in the inside of the main body 1, the third end E <b> 3 faces from the third end E <b> 4 to the fourth end E <b> 4 that is a terminal end along the opposing surface of the first main body portion 1 a and the second main body portion 1 b. It is preferable that the rear end member 4 (4a, 4b) is further provided at the site to be operated. The rear end members 4a and 4b constitute at least a part of the rear end (fourth end E4) surface 41 and at least a part of the facing surface 42. The main components of the rear end members 4a and 4b are preferably made of the same ceramic sintered body as the ceramic sintered bodies of the front end members 2a and 2b.

  With such a configuration, for example, when the inner surface 12 of the slit portion s of the main body 1 is polished by the above-described maintenance or the like, the wear resistance of the front end members 2a and 2b and the rear end members 4a and 4b which are located on the same plane. Therefore, it is easy to suppress uneven wear or the like in this polishing. That is, in the polishing at the time of maintenance, the inner surface 12 with less waviness and good flatness can be obtained without setting special polishing conditions, so that the coating liquid can be applied in a state where the variation in supply amount is suppressed. Can be supplied to the work.

  For the same reason, the slit portion is also formed on the rear end (fourth end E4) side of the slit portion s of one of the main body portions 1 (the first main body portion 1a or the second main body portion 1b) having a recess serving as the storage portion 3. It is preferable that an intermediate member made of a ceramic sintered body constituting a part of the inner surface 12 of s is attached.

In addition, in the case where the main body 1 is formed of one ceramic sintered body, as in the embodiment shown in FIG. 3, such as when used for an application that requires less maintenance such as polishing of the inner surface 12 of the slit portion s. There may be.

  Such a coating die head has various coatings represented by, for example, a heat-sensitive film, a conductive film, a low-reflection conductive film, a UV-preventing film, an electromagnetic wave-preventing film, a protective film, or a magnetic film on the surface of an object to be coated. It can be used for a coating apparatus for forming a film. In the coating apparatus using the coating die head of each of the embodiments described above, the maintenance of the coating die head is relatively easy and the coating die head is not easily damaged such as cracking or chipping. There are also few impurities.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to the above-mentioned embodiment. It goes without saying that various improvements and modifications may be made to the present invention without departing from the gist of the present invention.

DESCRIPTION OF SYMBOLS 1 Main body 1a 1st main-body part 1b 2nd main-body part E1 1st end E2 2nd end E3 3rd end E4 4th end 2 (2a, 2b) Tip member 3 Storage part (recessed part)
4 (4a, 4b) Rear end members 5a, 5b Side plate 6 Closing member 12 Inner surface 30 of slit portion Corner portion 42 Opposing surface s Slit portion

Claims (13)

A main body made of a first ceramic sintered body, which is a columnar body extending from the first end to the second end, and has a third end protruding in a direction intersecting the axis of the columnar body;
The inside of the main body includes a slit portion that extends from the first end side to the second end side and is located from the inside toward the third end,
The slit head has a tip member made of a second ceramic sintered body having a fracture toughness higher than that of the first ceramic sintered body at least at a portion facing the third end. The first ceramic sintered body is made of an aluminum oxide sintered body or a silicon carbide sintered body,
2. The coating die head according to claim 1, wherein the second ceramic sintered body is made of any one of a zirconium oxide sintered body, a silicon nitride sintered body, and a sialon sintered body.   The second ceramic sintered body is made of the zirconium oxide sintered body, and a tetragonal crystal ratio of 80% or more of the zirconium oxide crystals contained in the zirconium oxide sintered body. Or the die head for coating of Claim 2.   The second ceramic sintered body is made of the zirconium oxide sintered body, contains yttrium oxide as a stabilizer, further contains silicon and titanium, and the silicon and titanium are converted into oxides. The die head for coating according to any one of claims 1 to 3, wherein the content is 0.1% by mass or less.   5. The coating according to claim 1, wherein the second ceramic sintered body is made of the zirconium oxide sintered body and has an average crystal grain size of 1 μm or less (excluding 0 μm). Industrial die head.   6. The tip member according to claim 1, wherein the tip member has an exposed surface exposed on at least a part of an inner surface of the slit portion, and an arithmetic average roughness (Ra) on the exposed surface is 0.5 μm or less. The die head for coating according to crab.   The coating die head according to any one of claims 1 to 6, wherein a bonding layer mainly composed of a resin material is located between the main body and the tip member.   The coating die head according to any one of claims 1 to 7, wherein the tip member is fastened to the main body by a fastening member. The main body has a first main body portion and a second main body portion,
The coating die head according to any one of claims 1 to 8, wherein a facing surface between the first main body portion and the second main body portion also serves as an inner surface of the slit portion. Inside the main body, from the third end, a rear end member is provided at a portion facing the fourth end, which is a terminal end along the opposing surface of the first main body portion and the second main body portion,
The coating die head according to claim 9, wherein the rear end member is made of the second ceramic sintered body.   The said main body is a die head for coating in any one of Claims 1 thru | or 10 provided with the storage part connected with the said slit part.   12. The coating die head according to claim 1, wherein a length in a direction from the third end to the storage portion is constant from the first end to the second end. . A coating die head according to any one of claims 1 to 12,
A coating apparatus comprising a coating liquid supply mechanism.

Images