JP2017040535A - X-ray inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a highly reliable X-ray inspection device.SOLUTION: An inspection sorting device 100 is provided with an X-ray irradiator 23, a line sensor 24, an abnormal discharge determination part 47, and a quality determination part 45. The X-ray irradiator 23 has an X-ray tube 50 that includes an anode electrode 56 and a cathode electrode 57, and generates an X-ray, when a predetermined voltage is supplied to the anode electrode and the cathode electrode, to irradiate an article P with the X-ray. The line sensor 24 detects a transmission X-ray, which is the X-ray transmitting the article P irradiated by the X-ray irradiator 23. The abnormal discharge determination part 47 detects abnormal discharge in the X-ray irradiator 23. The quality determination part 45 determines whether the article P is defective or unable to undeterminable on the basis of the transmission X-ray detected by the line sensor 24 and the abnormal discharge detected by the abnormal discharge determination part 47. The quality determination part 45 determines that the article P under determination is undeterminable when abnormal discharge is detected.SELECTED DRAWING: Figure 14

Description

  The present invention relates to an X-ray inspection apparatus.

  Conventionally, in an X-ray inspection apparatus used for various inspections performed by irradiating an inspection target with X-rays, a predetermined voltage is supplied to the anode electrode and the cathode electrode of the X-ray generation unit to emit electrons from the cathode electrode. X-rays generated by colliding with the anode electrode are irradiated to the inspection object. Then, based on the detection result of transmitted X-rays transmitted through the inspection object, it is determined whether the inspection object is a non-defective product or a defective product. For example, in Patent Document 1 (Japanese Patent Application Laid-Open No. 2010-281654), an X-ray is irradiated on an inspection object conveyed by a conveyance conveyor, an image is generated according to the detected transmitted X-ray, and the generated image is generated. Based on this, the products are sorted into non-defective products and defective products.

  In the X-ray inspection apparatus, abnormal discharge (discharge that may hinder inspection) may occur in the X-ray generation unit. Such abnormal discharge includes abnormal discharge resulting from the passage of the service life and abnormal discharge resulting from the structure of the X-ray tube. Abnormal discharge due to the passage of the service life can be caused by deterioration of the vacuum degree in the X-ray generation part or deterioration of insulating performance such as insulating oil. The abnormal discharge due to the structure of the X-ray tube is caused by the fact that electrons emitted from the cathode electrode stay in the X-ray tube without colliding with the anode electrode.

  According to the X-ray inspection apparatus of Patent Document 1, if an abnormal discharge occurs during inspection of an inspection target (during detection of transmitted X-rays), the image generated based on the transmitted X-rays is affected and the product is non-defective. A case where the product is determined to be defective is also assumed. For this reason, it is inferior to reliability.

  Therefore, an object of the present invention is to provide an X-ray inspection apparatus having excellent reliability.

  An X-ray inspection apparatus according to a first aspect of the present invention is an X-ray inspection apparatus that inspects an inspection object conveyed by a conveyance means, and includes an X-ray irradiation unit, an X-ray detection unit, and an abnormal discharge detection unit. And a determination unit. The X-ray irradiation unit has an X-ray tube. The X-ray tube includes an anode electrode and a cathode electrode. The X-ray irradiation unit generates X-rays by supplying a predetermined voltage to the anode electrode and the cathode electrode, and irradiates the inspection target with X-rays. The X-ray detection unit detects transmitted X-rays. The transmitted X-rays are X-rays that are irradiated by the X-ray irradiation unit and transmitted through the inspection object. The abnormal discharge detection unit detects abnormal discharge in the X-ray irradiation unit. The determination unit determines whether the inspection object is a defective product or a product that cannot be determined based on the transmitted X-ray detected by the X-ray detection unit and the abnormal discharge detected by the abnormal discharge detection unit. When the abnormal discharge is detected, the determination unit determines that the inspection target being determined is a non-determinable product.

  In the X-ray inspection apparatus according to the first aspect of the present invention, based on the transmitted X-ray detected by the X-ray detection unit and the abnormal discharge detected by the abnormal discharge detection unit, the determination object is a defective product or It is determined whether the product is undecidable, and when an abnormal discharge is detected, the inspected object being determined is determined as an undecidable product. As a result, when an abnormal discharge occurs during transmission X-ray detection (that is, during inspection of the inspection object), the inspection object is determined to be an undecidable product. As a result, it is suppressed by the influence of abnormal discharge that it is determined as a defective product although it is a non-defective product. Moreover, although it is inferior goods, it determines that it determines with a non-defective product. Therefore, it is excellent in reliability.

  In addition, “abnormal discharge” here refers to abnormal discharge (due to deterioration of vacuum degree or insulation performance such as insulating oil due to the lapse of service life, inside or outside the X-ray tube. And the abnormal discharge caused by the structure of the X-ray tube (electrons emitted from the cathode electrode stay in the X-ray tube without colliding with the anode electrode). In the X-ray tube).

  The X-ray inspection apparatus according to the second aspect of the present invention is the X-ray inspection apparatus according to the first aspect, and further includes a sorting unit. The classification unit distributes the inspection object based on the determination result in the determination unit. The sorting unit moves the inspection object determined to be defective to the first collecting unit to which the defective product is sent. The sorting unit moves the inspection object determined to be an indeterminate product to the second collection unit to which the indeterminate product is sent. As a result, the inspection object is sorted according to the type of defective product and non-determinable product. As a result, due to the influence of abnormal discharge, it is suppressed that the product is classified as a defective product although it is a good product. Moreover, although it is a defective product, it is suppressed that it is classified as a non-defective product.

  An X-ray inspection apparatus according to a third aspect of the present invention is the X-ray inspection apparatus according to the first aspect or the second aspect, and further includes an image generation unit. The image generation unit generates an image based on the transmitted X-rays detected by the X-ray detection unit. The abnormal discharge detection unit detects abnormal discharge based on the image generated by the image generation unit. This makes it possible to detect abnormal discharge with high accuracy.

  That is, when an abnormal discharge occurs, the voltage and current supplied to the anode electrode and / or the cathode electrode change, so when an abnormal discharge occurs during irradiation of X-rays on the inspection object, A change occurs in X-rays generated in the X-ray irradiation unit. In relation to such a change in X-rays, the intensity of transmitted X-rays also changes suddenly, so that such changes also appear in the image generated by the image generation unit. Therefore, the abnormal discharge detection unit can detect abnormal discharge based on the image generated by the image generation unit. Moreover, since the change that appears in the image generated by the image generation unit when the abnormal discharge occurs is characteristic, it is possible to detect the abnormal discharge with high accuracy.

  An X-ray inspection apparatus according to a fourth aspect of the present invention is the X-ray inspection apparatus according to any one of the first to third aspects, wherein the abnormal discharge detector is in an electric circuit including an anode electrode or a cathode electrode. Abnormal discharge is detected by detecting changes in current or voltage. This makes it possible to detect abnormal discharge with high accuracy.

  That is, when abnormal discharge occurs, changes in voltage and current supplied to the anode electrode and / or cathode electrode occur. Therefore, the abnormal discharge detector can detect abnormal discharge by detecting a change in current or voltage in an electric circuit including the anode electrode or the cathode electrode. Further, since the change in current or voltage in the electric circuit including the anode electrode or the cathode electrode is characteristic when the abnormal discharge occurs, it is possible to detect the abnormal discharge with high accuracy.

  An X-ray inspection apparatus according to a fifth aspect of the present invention is the X-ray inspection apparatus according to any one of the first aspect to the fourth aspect, and further includes a counting unit. The totaling unit totals the number of inspection objects determined by the determination unit. The tabulation unit excludes and tabulates inspection objects that are determined to be indeterminate. As a result, it is possible to count the inspection objects that have been normally inspected with high accuracy.

  In the X-ray inspection apparatus according to the present invention, when an abnormal discharge occurs during transmission X-ray detection (that is, during inspection of an inspection object), the inspection object is determined as an undecidable product. As a result, it is suppressed by the influence of abnormal discharge that it is determined as a defective product although it is a non-defective product. Moreover, although it is inferior goods, it determines that it determines with a non-defective product. Therefore, it is excellent in reliability.

The schematic block diagram of the inspection distribution apparatus which concerns on one Embodiment of this invention. The external appearance perspective view of a X-ray inspection unit. The schematic block diagram inside a shield box. The schematic diagram which showed a mode that the distribution unit (arm) operate | moved and an article | item is sent to the inferior goods collection box or the indeterminate goods collection box. The schematic diagram which showed schematic structure of the X-ray irradiator. The schematic diagram which showed schematic structure of the abnormal discharge detection circuit. FIG. 2 is a block diagram schematically showing a schematic configuration of a controller and devices connected to the controller. FIG. 4 is a schematic diagram showing a correspondence relationship between an X-ray fluoroscopic image signal and brightness (luminance) in an X-ray image generated by an X-ray image generation unit. The schematic diagram which showed an example of the X-ray image produced | generated based on the transmission X-ray which concerns on articles | goods (good quality). The schematic diagram which showed an example of the X-ray image produced | generated based on the transmission X-ray which concerns on articles | goods (defective goods). The schematic diagram which showed an example of the X-ray image produced | generated based on the transmission X-ray which concerns on articles | goods (undecidable goods). The schematic diagram which showed another example of the X-ray image produced | generated based on the transmission X-ray which concerns on articles | goods (undecidable goods). The graph which showed the relationship between the occurrence frequency of 1st abnormal discharge, and use time. The flowchart which showed an example of the flow of a process of a controller. The schematic diagram which showed schematic structure of the abnormal discharge detection circuit which concerns on the modification H. FIG. The schematic diagram which showed schematic structure of the abnormal discharge detection circuit concerning the modification I.

  Hereinafter, an inspection distribution apparatus 100 (X-ray inspection apparatus) according to an embodiment of the present invention will be described with reference to the drawings. The following embodiments are specific examples of the present invention and do not limit the technical scope of the present invention, and can be modified as appropriate without departing from the scope of the invention.

(1) Overview of Inspection Distribution Device 100 FIG. 1 is a schematic configuration diagram of an inspection distribution device 100 according to an embodiment of the present invention. In the present embodiment, the inspection distribution device 100 is a system that performs quality inspection of an article P (inspection object) that is food (processed food, fresh food, etc.) and distributes non-defective products and defective products. In particular, the inspection distribution apparatus 100 performs a foreign matter inspection (inspection regarding the presence or absence of foreign matters in the article P) as a quality inspection. The article P is not necessarily limited to food, and may be other items (for example, industrial products and pharmaceuticals).

  The inspection distribution device 100 is arranged in a processing line that transports the article P along the transport direction D (see the two-dot chain line arrow in FIG. 1) and performs various processes such as manufacturing, weighing, packaging, and packing of the article P. ing. The inspection distribution device 100 is connected to the upstream conveyor 90 at the end on the side where the article P is received, and is connected to the downstream conveyor 91 at the end on the side where the article P is sent out. The inspection distribution device 100 irradiates the article P conveyed at a predetermined interval by the upstream conveyor 90 with X-rays, and performs quality inspection of the article P based on the X-rays transmitted through the article P (transmitted X-rays). And determine whether or not the article P is a defective product according to the inspection result. In the present embodiment, the inspection distribution apparatus 100 performs a foreign object inspection for inspecting the presence or absence of foreign matter in the article P based on the transmitted X-rays, and the article P that is determined to have foreign matters mixed is not acceptable. Judge as good.

  The inspection distribution device 100 sends the article P determined to be not defective (that is, non-defective product) to the downstream conveyor 91. The inspection distribution device 100 sends the article P determined to be defective to the defective product collection box 95 (first collection unit) for collecting defective products and sent to the downstream conveyor 91 (good product). ) Is excluded from the processing line.

  In addition, the inspection distribution apparatus 100 determines an undecidable item collection box 96 (second collection) for collecting an undecidable item for an article P (undeterminable item) that has been judged to be undecidable. The product P (good product) sent to the downstream conveyor 91 and the product P (defective product) collected in the defective product collection box 95 are separated and collected from the processing line. The indeterminate product collected in the indeterminate product collection box 96 is supplied again to the upstream conveyor 90 via a conveyor (not shown) or a manpower so that foreign matter inspection can be performed again.

(2) Details of Inspection Distribution Device 100 The inspection distribution device 100 mainly includes an X-ray inspection unit 20 that determines whether or not a product is defective by inspecting the product P, and the inspection distribution device 100. The sorting unit 30 that sorts the non-defective product and the undecidable product individually, and the controller 40 (see FIG. 7) that controls the operations of the X-ray inspection unit 20 and the sorting unit 30 are provided.

(2-1) X-ray inspection unit 20
FIG. 2 is an external perspective view of the X-ray inspection unit 20. The X-ray inspection unit 20 mainly includes a shield box 21, a conveyor unit 22, an X-ray irradiator 23, a line sensor 24 (see FIG. 3), and an LCD display 25.

(2-1-1) Shield box 21
The shield box 21 is a casing that houses various devices constituting the X-ray inspection unit 20 (specifically, the conveyor unit 22, the X-ray irradiator 23, the line sensor 24, and the like). A controller 40 is accommodated in the shield box 21. In addition, an LCD display 25, a key insertion slot, a power switch, and the like are disposed on the upper front portion of the shield box 21.

  The shield box 21 is formed with an opening 21 a for carrying the article P in and out on the side surfaces on the upstream side and the downstream side in the transport direction D. The opening 21 a is closed by a shielding nole 26 that suppresses leakage of X-rays to the outside of the shield box 21. The shielding nolen 26 is made of rubber containing tungsten. When the article P is carried into the shield box 21 or when the article P is carried out of the shield box 21, the shielding noren 26 is pushed away by the article P conveyed by the conveyor unit 22.

(2-1-2) Conveyor unit 22 (conveying means)
The conveyor unit 22 conveys the article P received from the upstream conveyor 90 to the downstream sorting unit 30 after passing through the shield box 21. The conveyor unit 22 is disposed so as to penetrate through the openings 21 a formed on both side surfaces of the shield box 21.

  The conveyor unit 22 mainly includes an inverter type conveyor motor 22a (see FIG. 7), an encoder 22b (see FIG. 7), a conveyor roller 22c, and an endless conveyor belt 22d. The output end of the conveyor motor 22a is connected to the conveyor roller 22c, and the conveyor roller 22c is driven in conjunction with the conveyor motor 22a. By driving the conveyor roller 22c, the conveyor belt 22d rotates, and the article P on the conveyor belt 22d is conveyed toward the downstream side (the sorting unit 30 side).

  The encoder 22b is attached to the conveyor motor 22a. The encoder 22b detects the number of rotations of the conveyor motor 22a and transmits the detection result to the controller 40.

  The conveyor motor 22a is inverter-controlled by the controller 40 so that the conveying speed of the conveyor unit 22 becomes the set speed input to the LCD display 25 by the operator.

(2-1-3) X-ray irradiator 23 (X-ray irradiator)
FIG. 3 is a schematic configuration diagram inside the shield box 21. The X-ray irradiator 23 is disposed above the line sensor 24 and the conveyor unit 22. The X-ray irradiator 23 generates X-rays inside the shield box 21 and irradiates the conveyed article P with X-rays. More specifically, the X-ray irradiator 23 irradiates the fan-shaped irradiation range Y (see the hatched portion in FIG. 3) with X-rays toward the line sensor 24 disposed below the conveyor unit 22. The irradiation range Y extends perpendicular to the transport surface of the conveyor unit 22. Further, the irradiation range Y extends in a direction orthogonal to the conveyance direction D of the article P (that is, the width direction of the conveyor belt 22d).

  Details of the X-ray irradiator 23 will be described later.

(2-1-4) Line sensor 24 (X-ray detection unit)
The line sensor 24 is disposed below the conveyor belt 22d, detects X-rays (transmitted X-rays) transmitted through the article P and the conveyor belt 22d, and an X-ray fluoroscopic image signal corresponding to the detection result (see FIG. 8). Is output to the controller 40. In other words, the line sensor 24 outputs an X-ray transmission signal corresponding to the intensity of the transmission X-ray to the controller 40. The intensity of the transmitted X-ray depends on the magnitude of the transmitted X-ray dose. Note that the point where an X-ray image is generated by the controller 40 (an X-ray image generation unit 44 described later) based on the X-ray transmission signal (that is, the intensity of the transmitted X-ray) will be described later. Is determined based on an X-ray transmission signal output from the line sensor 24.

  The line sensor 24 has a number of X-ray detection elements 24a (pixel sensors) that are orthogonal to the conveyance direction D of the article P and are arranged in a straight line in the width direction of the conveyor belt 22d. In the present embodiment, the X-ray detection element 24a is a photodiode and is mounted on a substrate.

  The line sensor 24 has a scintillator 24b (see FIG. 8). The scintillator 24b is disposed on the X-ray detection element 24a. In the present embodiment, fluorescent paper is used as the scintillator 24b. The scintillator 24b converts X-rays incident from above into light, and causes the converted light to enter the lower X-ray detection element 24a.

  The X-ray detection element 24a generates electric current according to the amount of light incident from the scintillator 24b, accumulates electric charge, converts the accumulated electric charge into an electric signal, and outputs it to the controller 40 as an X-ray fluoroscopic image signal. To do.

  The line sensor 24 also functions as a sensor for detecting the timing when the article P passes through the X-ray irradiation range Y. Specifically, when the article P conveyed by the conveyor unit 22 comes to an upper position (irradiation range Y) of the line sensor 24, any one of the X-ray detection elements 24a of the line sensor 24 has a voltage equal to or lower than a predetermined threshold. X-ray transmission signal (first signal) is output. Further, when the article P finishes passing through the irradiation range Y, all the X-ray detection elements 24a of the line sensor 24 output an X-ray transmission signal (second signal) indicating a voltage exceeding a predetermined threshold. By outputting the first signal and the second signal to the controller 40, the controller 40 detects the presence or absence of the article P in the irradiation range Y.

(2-1-5) LCD display 25
The LCD display 25 is a liquid crystal display (so-called touch screen) having a touch panel (input means capable of touch input). The LCD display 25 is electrically connected to the controller 40 and transmits / receives signals to / from the controller 40.

  The LCD display 25 functions as a display unit that displays (outputs) information to the administrator and an input unit through which the administrator inputs various commands. The LCD display 25 displays information generated by the controller 40. For example, the LCD display 25 displays an X-ray image (described later) output from the controller 40, notification information (described later), and the like.

(2-2) Sorting unit 30 (sorting part)
FIG. 4 is a schematic diagram showing a state in which the sorting unit 30 (arm 31) is operated and the article P is sent to the defective product collection box 95 or the indeterminate product collection box 96. In response to a command from the controller 40, the sorting unit 30 sends defective products among the conveyed products P to the defective product collection box 95 and sends undecidable products to the undecidable product collection box 96.

  The distribution unit 30 mainly includes a plurality of (here, two) arms 31 (first arm 31a and second arm 31b) and a plurality (here, two) arm driving units 32 (see FIG. 5). 7) and a photoelectric sensor 33 for detecting the article P on the upstream side of the arm 31.

  The first arm 31 a sends the defective product conveyed by the conveyor unit 22 to the defective product collection box 95. The second arm 31 b sends the indeterminate product conveyed by the conveyor unit 22 to the indeterminate product collection box 96. The rotation axis of each arm 31 is attached to the side portion of the conveyor unit 22. An arm driving unit 32 (first arm driving unit 32 a or second arm driving unit 32 b) is connected to the rotation shaft of each arm 31, and each arm 31 moves in conjunction with the operation of the arm driving unit 32. Specifically, the first arm 31a is connected to the first arm driving unit 32a and moves in conjunction with the operation of the first arm driving unit 32a. The second arm 31b is connected to the second arm drive unit 32b and moves in conjunction with the operation of the second arm drive unit 32b.

  Each arm 31 moves between a position (position indicated by a one-dot chain line in FIG. 4) along the conveyance direction D of the article P and a distribution position (position indicated by a solid line in FIG. 4) that obstructs the article P obliquely (position indicated by a solid line in FIG. 4). (See the dashed line arrow in FIG. 4). The first arm 31a moves in such a manner at the timing when the defective product has been conveyed, thereby dropping the defective product from the conveyor unit 22 and moving it to the defective product collection box 95 disposed near the side of the conveyor unit 22. And send. Further, the second arm 31b moves in such a manner at the timing when the indeterminate product has been conveyed, thereby dropping the indeterminate product from the conveyor unit 22 and being arranged in the vicinity of the side of the conveyor unit 22. The product is sent to the product collection box 96.

  The first arm drive unit 32 a and the second arm drive unit 32 b each include an actuator such as an air cylinder or a motor, and the drive is controlled by the controller 40.

  The photoelectric sensor 33 includes a projector 33a that emits light and a light receiver 33b that receives the emitted light. The photoelectric sensor 33 is electrically connected to the controller 40. The operation of the projector 33a is controlled by the controller 40. The light receiver 33b outputs a predetermined signal (light reception signal) to the controller 40 when receiving light emitted from the projector 33a, and stops outputting the light reception signal to the controller 40 when not receiving light. Thereby, the controller 40 detects the timing at which the article P passes through the sorting unit 30.

(2-3) Controller 40
The controller 40 is a computer mainly composed of a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), an HDD (Hard Disk Drive), and the like. The controller 40 controls the operation of each device included in the X-ray inspection unit 20. Further, the controller 40 performs an inspection (foreign matter inspection) as to whether or not the article P is a defective product based on the detection result of the X-ray transmission amount of the line sensor 24.

  Further, the controller 40 drives the sorting unit 30 to remove or collect the article P determined to be defective or undecidable as a result of the foreign substance inspection from the processing line, and then the defective article collection box 95 or the undecidable article. It collects in the collection box 96.

  Further, the controller 40 determines whether or not maintenance such as replacement of the X-ray tube 50 or the tank 53 is necessary, and notifies the administrator of the maintenance according to the determination result.

  Details of the controller 40 will be described later.

(3) Details of X-ray Irradiator 23 FIG. 5 is a schematic diagram showing a schematic configuration of the X-ray irradiator 23. The X-ray irradiator 23 includes an X-ray tube 50, a high voltage power supply 51, a filament power supply 52, a tank 53, and an abnormal discharge detection circuit 54.

  The X-ray tube 50 includes an X-ray tube main body 55 made of stainless steel and ceramics, and an anode electrode 56 (X-ray target) and a cathode electrode 57 (filament) disposed inside the X-ray tube main body 55. Yes. An X-ray irradiation window 58 that transmits X-rays is formed in the X-ray tube main body 55.

  The high voltage power source 51 is connected to a power source (not shown) (for example, a commercial AC power source or a DC power source), and boosts the input voltage by an inverter or the like (not shown) to generate a high voltage DC voltage. The high-voltage power supply 51 has a positive output terminal connected to the anode electrode 56 and a negative output terminal connected to the cathode electrode 57 to supply a predetermined voltage to each of the anode electrode 56 and the cathode electrode 57. Thus, a potential difference is generated between the anode electrode 56 and the cathode electrode 57. In the present embodiment, the high voltage power supply 51 generates a potential difference of 100 kV between the anode electrode 56 and the cathode electrode 57. Note that the potential difference generated between the anode electrode 56 and the cathode electrode 57 by the high-voltage power supply 51 is not necessarily limited to 100 kV, and can be appropriately changed according to the design specifications and the use environment.

  The filament power supply 52 supplies a heating current to the cathode electrode 57. A state where a predetermined potential difference is generated between the anode electrode 56 and the cathode electrode 57 as described above (that is, a state where a predetermined voltage is supplied from the high-voltage power supply 51 to the anode electrode 56 and the cathode electrode 57). When the heating current is supplied from the filament power source 52 to the cathode electrode 57, the cathode electrode 57 is heated in the X-ray tube 50, and thermionic electrons are emitted from the cathode electrode 57 and emitted from the cathode electrode 57. The thermoelectrons collide with the anode electrode 56 (see the broken line arrow in FIG. 5). As a result, X-rays are emitted to the outside of the X-ray tube 50 through the X-ray irradiation window 58 (see a one-dot chain line arrow X in FIG. 5). In order to properly irradiate X-rays toward the X-ray irradiation window 58, the anode electrode 56 is arranged so that the incident angle of the thermoelectrons emitted from the cathode electrode 57 is an appropriate angle.

  The tank 53 accommodates an X-ray tube 50, a high voltage power supply 51, and a filament power supply 52. Further, in the tank 53, a first electric circuit 59 that is an electric circuit that connects the high-voltage power supply 51 and the anode electrode 56 (that is, an electric circuit including the anode electrode 56), and the high-voltage power supply 51 and the cathode electrode 57 are connected. A second electric circuit 60 that is an electric circuit (that is, an electric circuit including the cathode electrode 57) is disposed.

  An insulating oil 61 is enclosed in the tank 53. The insulating oil 61 has electrical insulating properties, and has a potential difference in the space in the tank 53 (for example, between the first electric circuit 59 and the second electric circuit 60 or the first electric circuit. 59 or between the second electric circuit 60 and the tank 53 or the X-ray tube main body 55). The insulating oil 61 plays a role of cooling the X-ray tube 50 that generates high heat when generating X-rays. In the tank 53, a solid insulator (not shown) such as epoxy or silicone may be enclosed instead of or together with the insulating oil 61.

  The abnormal discharge detection circuit 54 is a circuit for detecting abnormal discharge generated in the X-ray tube 50 (X-ray tube main body 55) or outside the X-ray tube 50 and in the tank 53.

  Here, “abnormal discharge” refers to a discharge that may be an obstacle to inspection in the inspection distribution apparatus 100. Such abnormal discharge includes abnormal discharge due to the structure of the X-ray tube 50 and abnormal discharge due to the passage of the service life of the X-ray tube 50 or the insulating oil 61 or the like.

  The abnormal discharge due to the structure of the X-ray tube 50 is caused by the fact that electrons emitted from the cathode electrode 57 stay in the X-ray tube 50 without colliding with the anode electrode 56, and the like. The relationship with the passage of useful life is small. More specifically, the gas generated inside the X-ray tube 50 is ionized by electrons emitted from the cathode electrode 57 and the like, and the discharge caused between the anode electrode 56 and the cathode electrode 57 and the X that maintains insulation are maintained. A discharge caused in the X-ray tube 50 due to the temporary accumulation and saturation of electrons emitted from the cathode electrode 57 on the X-ray tube wall corresponds to an abnormal discharge caused by the structure of the X-ray tube 50. To do.

  Abnormal discharge due to the passage of the service life is caused by deterioration of the degree of vacuum or insulation performance of the insulating oil 61 and the like, inside the X-ray tube 50 or outside the X-ray tube 50 and inside the tank 53. Can occur.

  In the following description, for convenience of explanation, the abnormal discharge in the X-ray tube 50 is referred to as “first abnormal discharge”, and the abnormal discharge in the tank 53 outside the X-ray tube 50 is referred to as “second abnormal discharge”. This is called “abnormal discharge”.

  FIG. 6 is a schematic diagram showing a schematic configuration of the abnormal discharge detection circuit 54. The abnormal discharge detection circuit 54 is connected to the first electric circuit 59, the second electric circuit 60, and the controller 40, respectively. The abnormal discharge detection circuit 54 includes a first detection unit 62 that outputs a pulse in response to a change in voltage value (sudden drop) in the first electric circuit 59, and a change in voltage value (sudden drop) in the second electric circuit 60. A second detection unit 63 that outputs a pulse, an XOR circuit 64, and an AND circuit 65 are included.

  Each of the first detection unit 62 and the second detection unit 63 includes a voltage detection circuit 541, a differentiation circuit 542, a comparator 543, and a pulse generator 544 that are connected in series. The voltage detection circuit 541 is connected to the first electric circuit 59 or the second electric circuit 60 on the input side. The voltage detection circuit 541 is connected to the differentiation circuit 542 on the output side. The output side of the differentiation circuit 542 is connected to the negative side input terminal of the comparator 543. The comparator 543 is connected to a reference power source (not shown) at the positive input end, and is supplied with a reference voltage. The comparator 543 is connected to the pulse generator 544 at the output end. The pulse generator 544 is connected to the XOR circuit 64 and the AND circuit 65 on the output side.

  In the first detection unit 62 and the second detection unit 63, the voltage detection circuit 541 is a voltage value (voltage value) supplied to a connected circuit (that is, the first electric circuit 59 or the second electric circuit 60). Is detected. The differentiation circuit 542 and the comparator 543 detect a change (abrupt drop) in the voltage value supplied to the first electric circuit 59 or the second electric circuit 60 based on the detection result of the voltage detection circuit 541. The pulse generator 544 outputs a pulse when the voltage value supplied to the first electric circuit 59 or the second electric circuit 60 changes (sudden drop) based on the output of the comparator 543.

  The XOR circuit 64 and the AND circuit 65 are connected to the controller 40 on the output side. The XOR circuit 64 receives a pulse from only one of the first detection unit 62 and the second detection unit 63 (that is, a change in voltage value (sudden drop) in one of the first electric circuit 59 and the second electric circuit 60). A signal (XOR signal) is output to the controller 40. When the AND circuit 65 receives pulses from both the first detection unit 62 and the second detection unit 63 (that is, the voltage value changes (sudden drop) in both the first electric circuit 59 and the second electric circuit 60). When it occurs, a signal (AND signal) is output to the controller 40.

  The abnormal discharge detection circuit 54 configured in this manner has a function of detecting a change (a sudden drop) in the voltage value in the first electric circuit 59 and / or the second electric circuit 60 and outputting a signal. Have Note that the configuration of the abnormal discharge detection circuit 54 is not necessarily limited to the mode illustrated in FIG. 6, and each circuit element can be added, deleted, and changed as long as such a function is achieved. Further, the voltage detection circuit 541, the differentiation circuit 542, the comparator 543, the pulse generator 544, the XOR circuit 64, and the AND circuit 65 are shown in a simplified manner in FIG. What is necessary is just to comprise by selecting and combining an appropriate electrical component.

(4) Details of Controller 40 FIG. 7 is a block diagram schematically showing a schematic configuration of the controller 40 and devices connected to the controller 40. The controller 40 mainly includes a conveyor motor 22a, an encoder 22b, an X-ray irradiator 23, a line sensor 24, an LCD display 25, a first arm driving unit 32a, a second arm driving unit 32b, and a projector 33a. Are electrically connected to the light receiver 33b. The controller 40 mainly includes a storage unit 41, an input / output control unit 42, an X-ray irradiation control unit 43, an X-ray image generation unit 44, a quality determination unit 45, a distribution control unit 46, and an abnormal discharge determination. A unit 47, a notification control unit 48, and an inspected article totaling unit 49.

(4-1) Storage unit 41
The storage unit 41 includes a ROM, a RAM, an HDD, a flash memory, and the like, and has a volatile storage area and a nonvolatile storage area. The storage unit 41 mainly includes a program storage area 411 having a predetermined storage capacity, an X-ray fluoroscopic image signal storage area 412, an X-ray image storage area 413, a notification information storage area 414, and a first abnormal discharge information storage. An area 415, an aggregate information storage area 416, an article detection flag 417, a defective product determination flag 418, an indeterminate product determination flag 419, a light reception signal flag 420, an XOR signal flag 421, an AND signal flag 422, A maintenance notification flag 423.

  The program storage area 411 is an area for storing a control program that defines processing of each unit (42 to 49) of the controller 40. The X-ray fluoroscopic image signal storage area 412 is an area for storing an X-ray fluoroscopic image signal output from the line sensor 24. The X-ray image storage area 413 is an area for storing an X-ray image (described later) generated by the X-ray image generation unit 44. The notification information storage area 414 is an area for storing notification information (described later) generated by the notification control unit 48. The first abnormal discharge information storage area 415 is an area for storing detection times of the first abnormal discharge for a predetermined number of times.

  The total information storage area 416 is an area for storing the total number of articles P for which the foreign substance inspection has been normally completed. Note that the initial value of the total number of articles P stored in the total information storage area 416 (that is, the total number of articles P stored in the total information storage area 416 at the start of activation of the inspection distribution device 100) is 0. It is. Note that the information regarding the total number of articles P stored in the total information storage area 416 is used in a process in a process downstream of the inspection distribution device 100 or a process of inventory management.

  The article detection flag 417 is a flag for determining whether or not the article P has been transported into the shield box 21. The defective product determination flag 418 is a flag for determining whether or not the article P that passes through the X-ray inspection unit 20 and is sent to the sorting unit 30 is a defective product. The non-determinable product determination flag 419 is a flag for determining whether or not the article P that passes through the X-ray inspection unit 20 and is sent to the sorting unit 30 is an undeterminable product. The light reception signal flag 420 is a flag for determining that the article P that has passed through the X-ray inspection unit 20 has reached the sorting unit 30. The XOR signal flag 421 is a flag for determining that the XOR signal is output from the XOR circuit 64 (abnormal discharge detection circuit 54). The AND signal flag 422 is a flag for determining that an AND signal is output from the AND circuit 65 (abnormal discharge detection circuit 54). The maintenance notification flag 423 is a flag for determining the timing for notifying the administrator of notification information that prompts maintenance such as replacement of the X-ray tube 50 or the tank 53.

(4-2) Input / output control unit 42
The input / output control unit 42 performs control related to input / output of various signals. For example, the input / output control unit 42 receives the first signal output from the line sensor 24 and sets the article detection flag 417. The input / output control unit 42 receives the second signal output from the line sensor 24 and clears the article detection flag 417. The input / output control unit 42 receives the X-ray fluoroscopic image signal output from the line sensor 24 and stores it in the X-ray fluoroscopic image signal storage area 412. Further, the input / output control unit 42 receives the light reception signal output from the photoelectric sensor 33 and sets the light reception signal flag 420. Further, the input / output control unit 42 clears the light reception signal flag 420 when the light reception signal output from the photoelectric sensor 33 disappears.

  Further, when a new X-ray image is stored in the X-ray image storage area 413, the input / output control unit 42 outputs this to the LCD display 25. Further, when new notification information is stored in the notification information storage area 414, the input / output control unit 42 outputs the new notification information to the LCD display 25.

(4-3) X-ray irradiation control unit 43
The X-ray irradiation control unit 43 executes control related to the operation of the X-ray irradiator 23. The X-ray irradiation control unit 43 sets the X-ray when the article detection flag 417 is set (that is, when the article P is conveyed within the shield box 21 and reaches the position above the line sensor 24 (irradiation range Y)). A predetermined voltage is supplied to the anode electrode 56 and the cathode electrode 57 by the high voltage power source 51 in the irradiator 23 and a heating current is supplied to the cathode electrode 57 by the filament power source 52, thereby generating X-rays and irradiating the article P.

(4-4) X-ray image generation unit 44 (image generation unit)
The X-ray image generation unit 44 performs processing for generating an X-ray image based on the latest X-ray fluoroscopic image signal stored in the X-ray fluoroscopic image signal storage area 412. The X-ray image generation unit 44 generates an X-ray image as a transmission image based on the transmission X-ray dose specified by the X-ray fluoroscopic image signal. More specifically, the X-ray image generation unit 44 generates X-ray images by connecting data in fine time intervals related to the intensity of X-rays obtained from the X-ray detection elements 24a in time series in a matrix form.

  In the X-ray image generated by the X-ray image generation unit 44, a portion with a large amount of transmitted X-ray detected by the X-ray detection element 24a is displayed brightly (lightly and with high brightness), and a portion with a small amount of transmitted X-ray is dark (dark) (Luminance is low).

  FIG. 8 is a schematic diagram showing a correspondence relationship between the X-ray fluoroscopic image signal and the brightness (luminance) in the X-ray image generated by the X-ray image generation unit 44. In the X-ray image generated by the X-ray image generation unit 44, the lower the transmitted X-ray intensity, the lower the luminance (darker), and the higher the transmitted X-ray intensity, the higher (brighter) luminance. For this reason, in the X-ray image generated when the foreign matter is mixed in the article P, the intensity of the transmitted X-ray is reduced as shown in FIG. As a result, the luminance is reduced as compared with a portion where no foreign matter is mixed. In FIG. 8, the luminance of the X-ray image where the foreign matter is mixed is lower than the predetermined reference value SV.

  The X-ray image generation unit 44 stores the generated X-ray image in the X-ray image storage area 413. Thus, the generated X-ray image is output to the LCD display 25 by the input / output control unit 42 and displayed on the LCD display 25.

  FIG. 9 is a schematic diagram illustrating an example of an X-ray image generated based on transmitted X-rays related to the article P (good product). As shown in FIG. 9, when the article P is a non-defective product (when no foreign matter is mixed in the article P), it corresponds to the X-ray transmission (transmission X-ray dose) related to the structure and material of the article P. An X-ray image is generated.

  FIG. 10 is a schematic diagram illustrating an example of an X-ray image generated based on transmitted X-rays related to the article P (defective product). As shown in FIG. 10, when the article P is a defective product (when a foreign object is mixed in the article P), an image with a low (dark) luminance is generated in a portion where the foreign object is mixed ( (See portion A in FIG. 10).

  FIG. 11 is a schematic diagram illustrating an example of an X-ray image generated based on transmitted X-rays related to the article P (undeterminable product). FIG. 12 is a schematic diagram illustrating another example of an X-ray image generated based on transmitted X-rays related to the article P (undeterminable product). When abnormal discharge occurs during the inspection of foreign matter on the article P (that is, while the article P is irradiated with X-rays), the X-rays irradiated on the article P It is affected by the abnormal discharge. For this reason, abnormal discharge noise due to abnormal discharge occurs in the X-ray image generated in such a case. For example, as shown in FIG. 11, a portion where the luminance is uniformly reduced along the vertical direction (direction in which the irradiation range Y or the line sensor 24 extends) is generated as abnormal discharge noise in the X-ray image (B portion in FIG. 11). See). Further, for example, as shown in FIG. 12, a portion where the luminance is uniformly increased along the vertical direction (direction in which the irradiation range Y or the line sensor 24 extends) is generated as abnormal discharge noise in the X-ray image (in FIG. 12). (See part C).

(4-5) Quality determination unit 45 (determination unit)
Based on the latest X-ray image stored in the X-ray image storage area 413, the quality determination unit 45 determines whether the article P is a defective product or a non-determinable product. Do. When a new X-ray image is stored in the X-ray image storage area 413, the quality determination unit 45 acquires the new X-ray image and determines whether or not there is a portion whose luminance is lower than the reference value SV (defective product determination). )I do. If there is a portion below the reference value SV in the X-ray image, the quality determination unit 45 determines that the article P corresponding to the X-ray image is a defective product with foreign matter mixed therein, and sets the defective product determination flag 418. .

  In addition, prior to executing the defective product determination, the quality determination unit 45 determines whether or not abnormal discharge noise exists in the X-ray image (determined product determination). The abnormal discharge noise is a portion where the luminance is uniformly smaller than the reference value SV along the vertical direction (the irradiation range Y or the direction in which the line sensor 24 extends) in the X-ray image or the second reference value SV2 (less than the reference value SV). As a portion that is greater than a predetermined value (a large predetermined brightness) and whose size is equal to or larger than a predetermined value (a value that is appropriately set according to the size of the irradiation range Y or the length in the longitudinal direction of the line sensor) It is a defined part. When there is abnormal discharge noise, the quality determination unit 45 cannot normally determine whether the article P corresponding to the X-ray image is a defective product. A determination flag 419 is set. Note that the reference value SV and the second reference value SV2 are appropriately set according to the design specifications, the usage environment, and the like to be inspected.

  As described above, the quality determination unit 45 determines whether the article P is a defective product and whether it is a non-determinable product based on the X-ray image generated by the X-ray image generation unit 44. I do. In other words, the quality determination unit 45 determines whether the article P is a defective product or a product that cannot be determined based on the transmitted X-rays detected by the line sensor 24 and the abnormal discharge detected by the abnormal discharge determination unit 47.

  When the predetermined time has elapsed since the quality determination unit 45 raised the defective product determination flag 418 or the non-determinable product determination flag 419 (more specifically, the quality determination unit 45 is transported next to the article P determined to be a defective product or a non-determinable product). Before the determination regarding the coming article P is started, the flag (defective product determination flag 418 or indeterminate product determination flag 419) that is set is cleared.

(4-6) Distribution control unit 46
The distribution control unit 46 executes control related to the operation of the arm drive unit 32 in the distribution unit 30.

  When the light receiving signal flag 420 is set in a state where the defective product determination flag 418 is set (that is, when the article P determined to be defective is conveyed to the distribution unit 30), the distribution control unit 46 ) At the timing according to the conveyance speed (specifically, the timing when the article P determined to be defective reaches the operating range of the first arm 31a) is driven by the first arm driving unit 32a. A voltage is supplied to drive the first arm 31a. As a result, the article P determined to be defective is sent to the defective product collection box 95 and excluded from the processing line.

  Further, the sorting control unit 46 conveys the article P determined to be an undecidable product to the sorting unit 30 when the light receiving signal flag 420 is set in a state where the undecidable item determination flag 419 is set. The second arm at a timing according to the conveyance speed (specifically, a timing at which the article P determined to be an undeterminable product reaches the operating range of the second arm 31b). A drive voltage is supplied to the drive unit 32b to drive the second arm 31b. As a result, the article P determined to be an indeterminate product is sent to the indeterminate product collection box 96 and collected from the processing line.

(4-7) Abnormal discharge determination unit 47 (abnormal discharge detection unit)
The abnormal discharge determination unit 47 performs a process of detecting whether or not an abnormal discharge has occurred in the X-ray irradiator 23. More specifically, when the abnormal discharge occurs, the abnormal discharge determination unit 47 performs the first abnormal discharge (abnormal discharge in the X-ray tube 50) and the second abnormal discharge (outside the X-ray tube 50). It is determined which one of the abnormal discharges in the tank 53 has occurred (that is, the first abnormal discharge and the second abnormal discharge are individually detected), and the generated abnormal discharge is detected based on the determination result. It is specified which of the abnormal discharge caused by the structure and the abnormal discharge caused by the passage of the service life.

  Specifically, the abnormal discharge determination unit 47 detects that an abnormal discharge has occurred when the XOR signal flag 421 or the AND signal flag 422 is set. More specifically, the abnormal discharge determination unit 47 determines that the XOR signal flag 421 is set (that is, a change in voltage value (sudden drop) is detected in one of the first electric circuit 59 and the second electric circuit 60. It is determined that the second abnormal discharge has occurred. That is, the abnormal discharge determination unit 47 detects the second abnormal discharge based on a change in voltage value in one of the first electric circuit 59 and the second electric circuit 60. In addition, the abnormal discharge determination unit 47 determines that the AND signal flag 422 is set (that is, when a voltage value change (sudden drop) is detected in both the first electric circuit 59 and the second electric circuit 60). 1 It is determined that an abnormal discharge has occurred. That is, the abnormal discharge determination unit 47 detects the first abnormal discharge based on the voltage value change in both the first electric circuit 59 and the second electric circuit 60.

  Then, when the abnormal discharge determination unit 47 determines that the second abnormal discharge has occurred (that is, when the XOR signal flag 421 is set), the abnormal discharge that has occurred immediately occurs due to the passage of the service life. Therefore, the maintenance notification flag 423 is set to output notification information (information for prompting maintenance such as replacement of the X-ray tube 50 and the tank 53) to the administrator.

  On the other hand, when the abnormal discharge determination unit 47 determines that the first abnormal discharge has occurred (that is, when the AND signal flag 422 is set), the time when the determination is made in the first abnormal discharge information storage area 415 ( That is, information regarding the first abnormal discharge detection time) is stored. At this time, the abnormal discharge determination unit 47 acquires information related to the detection time of the first abnormal discharge before stored in the first abnormal discharge information storage area 415. Then, based on the acquired information regarding the detection time, whether or not the occurrence frequency of the first abnormal discharge is abnormal (specifically, whether or not the number of occurrences of the first abnormal discharge in the predetermined period P1 is equal to or greater than the first threshold value ΔTh1). )).

  In the determination, when the number of occurrences of the first abnormal discharge in the predetermined period P1 is equal to or greater than the first threshold ΔTh1, that is, when the occurrence frequency of the first abnormal discharge is abnormal, the abnormal discharge determination unit 47 It is determined that the first abnormal discharge that has occurred is an abnormal discharge resulting from the passage of the service life, and the maintenance notification flag 423 is set to output notification information to the administrator. When the number of occurrences of the first abnormal discharge is not equal to or greater than the first threshold value ΔTh1 (that is, when the occurrence frequency of the first abnormal discharge is not abnormal), the abnormal discharge determination unit 47 determines that the generated first abnormal discharge is X It is determined that the discharge is abnormal due to the structure of the tube 50, and the maintenance notification flag 423 is not raised.

  Note that the predetermined period P1 and the first threshold value ΔTh1 indicate whether or not the occurrence frequency of the first abnormal discharge is large enough to estimate the life of the X-ray tube 50 according to the design specifications and the use environment, that is, An appropriate value is set for determining whether or not the first abnormal discharge is generated as an abnormal discharge due to the passage of the service life. In the present embodiment, the predetermined period P1 is set to 168 hours (one week), and the first threshold value ΔTh1 is set to 3 (times). The abnormal discharge determination unit 47 is configured to be able to acquire the time in real time.

  Here, the above processing by the abnormal discharge determination unit 47 is based on the following principle.

  That is, when an abnormal discharge occurs, a voltage value change (sudden drop) occurs in a circuit (particularly, the first electric circuit 59 and / or the second electric circuit 60) in the X-ray irradiator 23. At this time, when the first abnormal discharge occurs, a voltage value change (sudden drop) occurs in both the first electric circuit 59 and the second electric circuit 60. In addition, when the second abnormal discharge occurs, a voltage value change (sudden drop) occurs only in one of the first electric circuit 59 and the second electric circuit 60.

  Since the abnormal discharge due to the structure of the X-ray tube 50 is mainly generated in the X-ray tube 50, it can be generated as a first abnormal discharge in principle. On the other hand, the abnormal discharge caused by the passage of the service life occurs in the tank 53 outside the X-ray tube 50 and outside the X-ray tube 50, and therefore either the first abnormal discharge or the second abnormal discharge. Can occur as

  From this, when the second abnormal discharge occurs, it can be immediately determined that the abnormal discharge resulting from the passage of the service life has occurred. Therefore, when the XOR signal flag 421 is set, the abnormal discharge determination unit 47 immediately determines that the generated abnormal discharge is an abnormal discharge due to the passage of the service life, and sets the maintenance notification flag 423.

  In addition, when the first abnormal discharge occurs, it is necessary to determine which of the abnormal discharge due to the structure of the X-ray tube 50 and the abnormal discharge due to the passage of the service life. In this regard, as shown in FIG. 13, the frequency of occurrence of the first abnormal discharge (that is, the frequency of occurrence of abnormal discharge in the X-ray tube 50) is determined by the service life of the X-ray tube 50 or the tank 53 (replacement). It increases as it approaches time. Therefore, based on the frequency of occurrence of the first abnormal discharge, it is possible to determine whether or not the generated first abnormal discharge is an abnormal discharge due to the passage of the service life, and whether or not maintenance is necessary is determined. It becomes possible to do.

  From this, when the first abnormal discharge occurs over a predetermined frequency (that is, when the frequency of occurrence of the first abnormal discharge is abnormal), it is determined that the abnormal discharge due to the passage of the service life has occurred. Is possible. Therefore, when the AND signal flag 422 is set, the abnormal discharge determination unit 47 determines whether or not the number of occurrences of the first abnormal discharge in the predetermined period P1 is equal to or greater than the first threshold value ΔTh1. When the number of occurrences of discharge is equal to or greater than the first threshold value ΔTh1, it is determined that the first abnormal discharge that has occurred is an abnormal discharge resulting from the passage of the service life, and the maintenance notification flag 423 is set. On the other hand, the abnormal discharge determination unit 47 determines that the first abnormal discharge generated when the number of occurrences of the first abnormal discharge is less than the first threshold ΔTh1 is an abnormal discharge due to the structure of the X-ray tube 50. Therefore, the maintenance notification flag 423 is not raised.

  The abnormal discharge determination unit 47 confirms that the XOR signal flag 421 or the AND signal flag 422 is set, and then clears the XOR signal flag 421 or the AND signal flag 422 in the set state.

(4-8) Notification control unit 48
When the maintenance notification flag 423 is set, the notification control unit 48 generates notification information (text information for prompting the administrator to perform maintenance such as replacement of the X-ray tube 50 and the tank 53 and image information such as warning marks). And stored in the notification information storage area 414. Thus, the generated notification information is output to the LCD display 25 by the input / output control unit 42 and displayed on the LCD display 25.

  That is, the notification control unit 48 causes the LCD display 25 to output notification information according to the determination result by the abnormal discharge determination unit 47 (that is, the detection result of the first abnormal discharge or the second abnormal discharge). In other words, the notification control unit 48 causes the LCD display 25 to immediately output notification information when the second abnormal discharge is detected by the abnormal discharge determination unit 47. In addition, when the first abnormal discharge is detected by the abnormal discharge determination unit 47, the notification control unit 48 displays on the LCD display 25 when the number of occurrences of the first abnormal discharge within the predetermined period P1 is less than the first threshold value ΔTh1. The notification information is not output, and the notification information is output to the LCD display 25 when the threshold value ΔTh1 or more.

  The notification control unit 48 clears the maintenance notification flag 423 after storing the generated notification information in the notification information storage area 414.

(4-9) Inspected article totaling section 49 (totaling section)
The inspected article totaling unit 49 totals the number of articles P for which the foreign object inspection has been normally completed (that is, the articles P for which defective product determination by the quality determination unit 45 has been completed). More specifically, the inspected article totaling unit 49 performs aggregation by excluding the number of articles P for which the foreign object inspection has not been normally completed (that is, the articles P determined to be undecidable items).

  Specifically, the inspected article totaling unit 49 adds 1 to the total number of inspected articles P stored in the total information storage area 416 every time the light reception signal flag 420 is set. Thus, every time the article P is conveyed to the distribution unit 30 (that is, every time the article P is sent out from the X-ray inspection unit 20), the total number of articles P stored in the total information storage area 416 1 is added.

  In addition, the inspected article totaling unit 49 is stored in the total information storage area 416 every time the defective product determination flag 418 is set so as to perform the totaling by excluding the number of articles P determined to be indeterminate. Subtract 1 from the total number of inspected articles P. As a result, every time the article P is determined to be an undecidable article in the indeterminate article judgment by the quality judgment unit 45, 1 is subtracted from the total number of articles P stored in the aggregate information storage area 416. As a result, in the total number of articles P stored in the total information storage area 416, the articles P for which the foreign object inspection has not been normally completed (that is, the articles P for which the quality determination unit 45 has not finished the defective product determination). Numbers are excluded.

(5) Process Flow of Controller 40 FIG. 14 is a flowchart showing an example of the process flow of the controller 40. When the power is turned on, the controller 40 executes processing in the following flow. Note that the following processing flow is merely an example, and the order of each process, the rearrangement of each process in parallel, or the change such as addition or deletion of processes is appropriately determined according to the design specifications and usage environment. Is possible.

  In step S <b> 101, the controller 40 determines whether or not the article P is transported into the shield box 21 and is in an upper position (irradiation range Y) of the line sensor 24. When the determination is NO (that is, when the article P is not located above the line sensor 24 (irradiation range Y)), the process proceeds to step S104. On the other hand, when the determination is YES (that is, when the article P is located above the line sensor 24 (irradiation range Y)), the process proceeds to step S102.

  In step S102, the controller 40 supplies a predetermined voltage to the anode electrode 56 and the cathode electrode 57 by the high-voltage power supply 51 in the X-ray irradiator 23 and supplies a heating current to the cathode electrode 57 by the filament power supply 52, A line is generated and the article P is irradiated. Thereafter, the process proceeds to step S103.

  In step S103, the controller 40 generates an X-ray image based on the X-ray fluoroscopic image signal output from the line sensor 24, and displays the generated X-ray image on the LCD display 25. Thereafter, the process proceeds to step S104.

  In step S <b> 104, the controller 40 determines whether or not abnormal discharge has occurred in the X-ray irradiator 23. When the determination is NO (that is, when no abnormal discharge occurs in the X-ray irradiator 23), the process returns to step S101. On the other hand, when the determination is YES (that is, when abnormal discharge occurs in the X-ray irradiator 23), the process proceeds to step S105.

  In step S <b> 105, the controller 40 determines whether or not there is an abnormal discharge during the foreign object inspection (that is, while the article P is being irradiated with X-rays). When the determination is NO (that is, when there is no abnormal discharge during the foreign substance inspection), the process proceeds to step S108. On the other hand, if the determination is YES (that is, abnormal discharge during foreign object inspection), the process proceeds to step S106.

  In step S <b> 106, the controller 40 performs non-determinable product determination based on the generated X-ray image and determines whether or not the article P is an undeterminable product (that is, whether or not the X-ray image includes abnormal discharge noise). ). When the determination is NO (that is, when the article P is not a non-determinable product), the process proceeds to step S108. On the other hand, when the determination is YES (that is, when the article P is a non-determinable product), the process proceeds to step S107. By executing such processing in the controller 40, the article P is not necessarily designated as an undeterminable product even when abnormal discharge occurs during the foreign object inspection. That is, even if abnormal discharge occurs during the foreign substance inspection, if the X-ray image is normal (that is, if there is no influence of abnormal discharge in the X-ray image), the defective product follows the normal flow. A determination is made. As a result, it is suppressed that the article P is unnecessarily determined as a non-determinable product, and is excellent in reliability.

  In step S107, the controller 40 drives the second arm drive unit 32b at a predetermined timing (that is, a timing at which the article P determined to be an undeterminable product has reached the operating range of the second arm 31b). By supplying the voltage and driving the second arm 31 b, the article P determined to be an indeterminate product is moved to the indeterminate product collection box 96. Then, it progresses to step S110.

  In step S108, the controller 40 performs defective product determination based on the generated X-ray image, and determines whether or not the article P is defective (that is, whether or not the article P contains foreign matter). . When the determination is NO (that is, when the article P is not defective), the process proceeds to step S110. On the other hand, when the determination is YES (that is, when the article P is defective), the process proceeds to step S109.

  In step S109, the controller 40 applies a drive voltage to the first arm drive unit 32a at a predetermined timing (that is, a timing at which the article P determined to be defective has reached the operating range of the first arm 31a). And the first arm 31a is driven to move the article P determined to be defective to the defective product collection box 95. Then, it progresses to step S110.

  In step S110, the controller 40 determines whether or not the abnormal discharge generated in the X-ray irradiator 23 is the second abnormal discharge (abnormal discharge in the tank 53 outside the X-ray tube 50). When the determination is NO (that is, when the abnormal discharge generated in the X-ray irradiator 23 is not the second abnormal discharge but the first abnormal discharge), the process proceeds to step S111. On the other hand, when the determination is YES (that is, when the abnormal discharge generated in the X-ray irradiator 23 is the second abnormal discharge), the process proceeds to step S112.

  In step S111, the controller 40 determines whether or not the occurrence frequency of the first abnormal discharge is large enough to estimate the elapsed life of the X-ray tube 50, that is, the number of occurrences of the first abnormal discharge in the predetermined period P1. It is determined whether or not the first threshold value ΔTh1 or more. When the determination is NO (that is, when the number of occurrences of the first abnormal discharge in the predetermined period P1 is less than the first threshold value ΔTh1), the controller 40 indicates that the generated abnormal discharge is abnormal due to the structure of the X-ray tube 50. It is determined that the discharge is performed, and the process returns to step S101. When the determination is YES (that is, when the number of occurrences of the first abnormal discharge in the predetermined period P1 is equal to or greater than the first threshold value ΔTh1), the controller 40 is the abnormal discharge resulting from the passage of the service life. The process proceeds to step S112.

  In step S <b> 112, the controller 40 generates notification information and displays it on the LCD display 25 in order to urge the administrator to perform maintenance such as replacement of the X-ray tube 50 and the tank 53. Then, it returns to step S101.

(6) Features (6-1)
In an X-ray inspection apparatus used for various inspections performed by irradiating an inspection target with X-rays, abnormal discharge (discharge that may be an obstacle to inspection) may occur in the X-ray generation unit. In a conventional X-ray inspection apparatus, if an abnormal discharge occurs during inspection of an inspection target (during detection of transmitted X-rays), the X-ray image generated based on the transmitted X-rays is affected, and even if it is a non-defective product Since it is assumed that the product is defective, the reliability is poor.

  In this regard, in the inspection distribution device 100 according to the present embodiment, the quality determination unit 45 of the controller 40 is based on the transmitted X-ray detected by the X-ray detection unit and the abnormal discharge detected by the abnormal discharge determination unit 47. It is configured to determine whether the article P is a defective product or a product that cannot be determined, and to determine that the product P that is being inspected for foreign matter is a product that cannot be determined when abnormal discharge is detected. As a result, when an abnormal discharge occurs during foreign object inspection (that is, during detection of transmitted X-rays), an undecidable product determination is performed, and the article P is determined to be an undecidable product according to the determination result. It has become. As a result, it is suppressed by the influence of abnormal discharge that it is determined as a defective product although it is a non-defective product with respect to the product P to be inspected. Further, even though the article P is a defective product, it is not determined to be a defective product (that is, determined to be a non-defective product), and is sent to the downstream side of the processing line. Therefore, it is excellent in reliability.

(6-2)
In the inspection distribution apparatus 100, the distribution unit 30 moves the article P determined to be defective in the determination by the quality determination unit 45 to the defective product collection box 95, and moves the article P determined to be undeterminable. The product is moved to the indeterminate product collection box 96. As a result, the articles P are sorted according to the types of defective products and undecidable products. As a result, due to the influence of abnormal discharge, the product P to be inspected is suppressed from being classified as a defective product although it is a good product. Moreover, although it is inferior goods regarding the goods P, it is suppressed that it is classified as a good article.

(6-3)
In the inspection distribution apparatus 100, the abnormal discharge determination unit 47 of the controller 40 detects abnormal discharge by detecting a change in voltage value in an electric circuit including the anode electrode 56 or the cathode electrode 57. Thereby, it is possible to detect abnormal discharge with high accuracy.

  That is, when abnormal discharge occurs, the voltage value supplied to the anode electrode 56 and / or the cathode electrode 57 changes. Based on this principle, the abnormal discharge determination unit 47 detects abnormal discharge by detecting a change in voltage value in an electric circuit including the anode electrode 56 or the cathode electrode 57. In addition, since the change in the voltage value in the electric circuit including the anode electrode 56 or the cathode electrode 57 is characteristic when the abnormal discharge occurs, the abnormal discharge determination unit 47 detects the abnormal discharge with high accuracy.

(6-4)
In the inspection distribution device 100, the inspected article totaling unit 49 totals the number of articles P determined by the quality determining unit 45 while excluding the number of articles P determined to be indeterminate. That is, the collection of articles P for which foreign substance inspection has been normally completed is performed with high accuracy.

(7) Modified Examples The inspection distribution device 100 of the above embodiment can be modified as appropriate as shown in the following modified examples. Each modification may be applied in combination with another modification as long as no contradiction occurs.

(7-1) Modification A
In the above embodiment, the abnormal discharge determination unit 47 of the controller 40 detects the abnormal discharge by detecting a change in the voltage value in the electric circuit including the anode electrode 56 or the cathode electrode 57. However, the method by which the abnormal discharge determination unit 47 detects abnormal discharge is not necessarily limited to this. For example, the abnormal discharge determination unit 47 may be configured to detect abnormal discharge based on the X-ray image generated by the X-ray image generation unit 44.

  That is, as described above, when an abnormal discharge occurs during the foreign matter inspection of the article P (that is, while the article P is irradiated with X-rays), The X-rays irradiated in this way are affected by abnormal discharge and abnormal discharge noise occurs in the X-ray image. For example, in the X-ray image, as the abnormal discharge noise, there is a portion where the luminance is uniformly reduced along the vertical direction (the direction in which the irradiation range Y or the line sensor 24 extends) (see the portion B in FIG. 11). In addition, for example, as abnormal discharge noise in the X-ray image, a portion where the luminance is uniformly increased along the vertical direction (direction in which the irradiation range Y or the line sensor 24 extends) is generated (see a portion C in FIG. 12).

  Based on this principle, the abnormal discharge determination unit 47 may be configured to determine whether or not there is abnormal discharge noise in the X-ray image, and to determine that abnormal discharge has occurred when abnormal discharge noise exists. Good. Even if the abnormal discharge determination unit 47 is configured to detect abnormal discharge by such a method, the same effects as those of the above-described embodiment can be obtained.

(7-2) Modification B
In the above-described embodiment, the inspected article totaling unit 49 excludes the number of articles P determined to be undecidable items, and the article P for which the foreign object inspection has been normally completed (that is, defective product determination by the quality determination unit 45 is completed). A predetermined process has been performed to count the number of articles P) that are being processed. Specifically, the inspected article totaling unit 49 adds 1 to the total number of inspected articles P stored in the total information storage area 416 each time the light reception signal flag 420 is set, while the defective article determination flag. Every time 418 is set, a process of subtracting 1 from the total number of inspected articles P stored in the total information storage area 416 is performed.

  However, the inspected article totaling unit 49 may perform totalization by executing another process different from the above process. That is, as long as the function of the inspected article totaling unit 49 is realized that excludes the number of articles P determined to be indeterminate and counts the number of articles P that have been successfully inspected for foreign matter, Can be changed as appropriate.

(7-3) Modification C
In the above embodiment, the article P determined to be defective is sent to the defective product collection box 95 (first collection unit), and the article P determined to be undeterminable is the undeterminable product collection box 96 (second collection unit). ). However, the present invention is not limited to this, and instead of the defective product collection box 95, a defective product conveyer that conveys defective products is arranged, and defective products are removed from the processing line by sending defective products to the defective product conveyer. You may comprise. In place of the indeterminate product collection box 96, an indeterminate product transport conveyor for transporting the indeterminate product is arranged, and the indeterminate product is sent to the indeterminate product transport conveyor to recover the indeterminate product from the processing line. You may comprise.

(7-4) Modification D
In the above-described embodiment, the sorting unit 30 excludes the article P determined to be defective by the first arm 31a from the processing line and removes the article P determined to be indeterminate by the second arm 31b from the processing line. It was recovered. However, the means for excluding the article P determined as a defective product by the sorting unit 30 and / or the means for collecting the article P determined as an indeterminate product from the processing line is not particularly limited. What is necessary is just to select suitably according to P. For example, in place of the first arm 31a and / or the second arm 31b, an air injection mechanism is arranged, and air is injected from the air injection mechanism with respect to the article P determined to be defective or undecidable, You may comprise so that inferior goods or a product which cannot be judged is excluded or collected from a processing line. Further, instead of disposing the first arm 31a and / or the second arm 31b, an opening configured to be openable and closable is formed in the conveyor belt 22d, and the article P determined to be a defective product or an undecidable product is involved. The opening is switched from the closed state to the open state at the timing of passing over the opening, and the defective product or the indeterminate product is sent to the defective product collection box 95 or the indeterminate product collection box 96 through the opening. Also good.

(7-5) Modification E
In the above embodiment, the controller 40 is disposed in the shield box 21. However, the controller 40 is not necessarily arranged in the shield box 21 and may be arranged in another unit or may be arranged independently.

  In the above embodiment, any / all of the respective parts (41, 42, 43, 44, 45, 46, 47, 48, and 49) included in the controller 40 are not necessarily in the same position (in the same substrate or casing). It is not necessary to be arranged at a remote location, and it may be arranged at a remote location where communication is possible via a communication network.

  In addition, any one of the storage areas (411, 412, 413, 414, 415, and 416) and the flags (416, 417, 418, 419, 420, 421, 422, and 423) included in the storage unit 41 / All of them are not necessarily arranged at the same position (in the same substrate or casing), and may be arranged at remote locations where communication is possible via a communication network.

  Moreover, in the said embodiment, each part (42, 43, 44, 45, 46, 47, 48, and 49) contained in the controller 40 is the memory | storage part 41 (program storage area 411) in order to implement | achieve each function. It is configured on the assumption that the process is executed in accordance with a control program stored in the computer. However, the processing related to any of the units (42, 43, 44, 45, 46, 47, 48, and 49) included in the controller 40 is not realized by software, but is realized by hardware. May be configured.

(7-6) Modification F
In the above embodiment, the inspection distribution device 100 includes the notification control unit 48 and the inspected article totaling unit 49 in the controller 40. However, the notification control unit 48 and / or the inspected article totaling unit 49 can be omitted as appropriate. In this case, the total information storage area 416 and / or the maintenance notification flag 423 in the storage unit 41 can be omitted as appropriate.

(7-7) Modification G
In the embodiment described above, the inspection distribution device 100 performs the foreign object inspection of the article P, and determines whether or not the article P is a defective product according to the presence or absence of foreign matter. However, the inspection performed by the inspection distribution device 100 is not necessarily limited to the foreign matter inspection of the article P, and the inspection distribution device 100 may perform other inspections. For example, the inspection distribution apparatus 100 inspects whether the weight, shape, number, etc. of the article P is normal using a known method based on the generated X-ray image, and the inspection result is not normal. May be determined to be defective.

(7-8) Modification H
In the above embodiment, the XOR circuit 64 is arranged in the abnormal discharge detection circuit 54. However, the abnormal discharge detection circuit 54 may be configured as an abnormal discharge detection circuit 54 ′ shown in FIG. 15, for example. In the abnormal discharge detection circuit 54 ′, an OR circuit 66 is arranged instead of the XOR circuit 64 of the abnormal discharge detection circuit 54.

  In the abnormal discharge detection circuit 54 ′, the OR circuit 66 receives a pulse from either the first detection unit 62 or the second detection unit 63 (that is, the first electric circuit 59 and the second electric circuit 60). A signal (OR signal) is output to the controller 40 when a voltage value change (abrupt drop) occurs in one or both.

  Even when such an abnormal discharge detection circuit 54 'is employed, it is possible to detect abnormal discharge, and the same effects as in the above embodiment can be obtained.

  Moreover, when abnormal discharge resulting from the passage of the service life has occurred by changing the processing of the controller 40 as follows, notification information is immediately displayed. Further, when the first abnormal discharge occurs, the notification information is displayed only when necessary (that is, when it is specified as an abnormal discharge due to the lapse of the service life).

  In other words, in order for the XOR signal flag 421 to function as an “OR signal flag” in the storage unit 41, the OR signal flag (XOR signal flag 421) is set when the input / output control unit 42 receives an OR signal. . In addition, when the second abnormal discharge occurs, the abnormal discharge determination unit 47 generates an OR signal flag as the voltage value changes (sudden drop) occurs in only one of the first electric circuit 59 and the second electric circuit 60. When the AND signal flag 422 is not set, it is determined that the second abnormal discharge (abnormal discharge resulting from the passage of the service life) has occurred, and the maintenance notification flag 423 is set. On the other hand, what is necessary is just to comprise similarly to the said embodiment about the process of the abnormal discharge determination part 47 when the AND signal flag 422 is set (namely, when 1st abnormal discharge arises).

(7-9) Modification I
In the above embodiment, the abnormal discharge determination unit 47 of the controller 40 detects the second abnormal discharge based on the change in the voltage value in one of the first electric circuit 59 and the second electric circuit 60, and the first electric circuit 59 and the first electric circuit 59 The first abnormal discharge was detected based on the voltage value change in both of the two electric circuits 60. However, the present invention is not limited to this, and the abnormal discharge determination unit 47 of the controller 40 detects the second abnormal discharge based on a change in the current value in one of the first electric circuit 59 and the second electric circuit 60, and the first electric circuit The first abnormal discharge may be detected based on a change in current value in both 59 and the second electric circuit 60.

  In such a case, the abnormal discharge detection circuit 54 may be configured as an abnormal discharge detection circuit 54a shown in FIG. 16, for example. The abnormal discharge detection circuit 54a is a first that outputs a pulse in response to a change (abrupt increase) in the current value in the first electric circuit 59, instead of the first detection unit 62 and the second detection unit 63 of the abnormal discharge detection circuit 54. It has a detection unit 62a and a second detection unit 63a that outputs a pulse in response to a change (rapid increase) in the current value in the second electric circuit 60. Each of the first detection unit 62a and the second detection unit 63a includes a current detection circuit 545, a comparator 543a, and a pulse generator 544a that are sequentially connected in series.

  The current detection circuit 545 is connected to the first electric circuit 59 or the second electric circuit 60 on the input side. The current detection circuit 545 is connected to the positive side input terminal of the comparator 543a on the output side. The comparator 543a is connected to a reference power source (not shown) at the negative input end, and is supplied with a reference current. The comparator 543a is connected to the pulse generator 544a at the output end. The pulse generator 544a is connected to the XOR circuit 64 and the AND circuit 65 on the output side.

  In the first detection unit 62a and the second detection unit 63a, the current detection circuit 545 detects the value of the current (current value) supplied to the first electric circuit 59 or the second electric circuit 60. The comparator 543a detects a change (rapid increase) in the current value supplied to the first electric circuit 59 or the second electric circuit 60 based on the detection result of the current detection circuit 545. The pulse generator 544a outputs a pulse when a change (rapid increase) in the current value supplied to the first electric circuit 59 or the second electric circuit 60 occurs based on the output of the comparator 543a.

  Other points of the abnormal discharge detection circuit 54a are substantially the same as those of the abnormal discharge detection circuit 54.

  In this way, the abnormal discharge detection circuit 54a is configured to detect and output a signal when a change (rapid increase) in the current value occurs in the first electric circuit 59 and / or the second electric circuit 60. As a result, the same effects as those of the above embodiment can be obtained.

  Further, when abnormal discharge occurs in the X-ray irradiator 23, a change in current value (rapid increase) in a circuit (particularly, the first electric circuit 59 and / or the second electric circuit 60) in the X-ray irradiator 23. Occurs. At this time, when the first abnormal discharge occurs, the current value changes (rapid increase) in both the first electric circuit 59 and the second electric circuit 60. On the other hand, when the second abnormal discharge occurs, only one of the first electric circuit 59 and the second electric circuit 60 causes a change (rapid increase) in the current value.

  Therefore, when the second abnormal discharge occurs, the XOR signal flag 421 is set as the current value changes (rapidly increases) in only one of the first electric circuit 59 and the second electric circuit 60. Immediately, the notification information is displayed. In addition, when the first abnormal discharge occurs, the AND signal flag 422 is set along with a change (rapid increase) in the current value in both the first electric circuit 59 and the second electric circuit 60, and for a predetermined period. The notification information is displayed only when necessary based on whether or not the number of occurrences of the first abnormal discharge in P1 is equal to or greater than the first threshold value ΔTh1.

(7-10) Modification J
In the above embodiment, when the abnormal discharge determination unit 47 determines that the first abnormal discharge has occurred (that is, when the AND signal flag 422 is set), the abnormal discharge determination unit 47 stores the first abnormal discharge information storage area 415. The occurrence frequency of the first abnormal discharge (whether the number of occurrences of the first abnormal discharge in the predetermined period P1 is equal to or greater than the first threshold value ΔTh1) is determined based on the detection time of the one abnormal discharge.

  However, the abnormal discharge determination unit 47 may be configured to determine whether to perform notification by determining the occurrence frequency of the first abnormal discharge by another method.

  For example, the abnormal discharge determination unit 47 is configured to be able to measure at least a time corresponding to the predetermined period P1, and includes a register capable of holding information related to the number of first abnormal discharge detections. The occurrence frequency of the first abnormal discharge may be determined. In such a case, when the abnormal discharge determination unit 47 determines that the first abnormal discharge has occurred (that is, when the first abnormal discharge is detected), time measurement is started and information indicating the detection of the first abnormal discharge is written in the register. What is necessary is just to be comprised.

  If the abnormal discharge determination unit 47 does not detect a further first abnormal discharge until the predetermined period P1 elapses after the time measurement is started, the number of occurrences of the first abnormal discharge in the predetermined period P1 is the first. It may be determined that it is not equal to or greater than one threshold value ΔTh1, and the time measurement is stopped and the information held in the register is deleted.

  On the other hand, when the abnormal discharge determination unit 47 detects a further first abnormal discharge until the predetermined period P1 elapses after the time measurement is started, information indicating the detection of the further first abnormal discharge is stored in the register. It may be configured to write. Then, when the abnormal discharge determination unit 47 starts the time measurement and the information held by the register before the predetermined period P1 elapses, the number of detection times of the first abnormal discharge becomes equal to or greater than the first threshold value ΔTh1. It is determined that the number of occurrences of the first abnormal discharge in the predetermined period P1 is equal to or greater than the first threshold value ΔTh1 (that is, the abnormal discharge is caused by the passage of the service life of the first abnormal discharge), and the maintenance notification flag 423 is set. What is necessary is just to be comprised so that it may stand.

(7-11) Modification K
In the above embodiment, the predetermined period P1 is set to 168 hours (one week), and the first threshold value ΔTh1 is set to 3 (times). However, the predetermined period P1 and the first threshold value ΔTh1 can be appropriately changed according to the design specifications and the use environment. For example, the predetermined period P1 may be set to 50 hours or 200 hours. Further, for example, the first threshold value ΔTh1 may be set to 2 (times) or may be set to 10 (times).

(7-12) Modification L
In the embodiment described above, the LCD display 25 functions as an “information output unit” for notification information. However, other elements instead of the LCD display 25 may function as an “information output unit” that outputs notification information. For example, an LED lamp as an “information output unit” is arranged at a position that can be visually recognized by the administrator, and the LED lamp is turned on or blinked to perform maintenance such as replacement of the X-ray tube 50 or the tank 53 for the administrator. Notification information for prompting may be output. Alternatively, a speaker as an “information output unit” may be arranged at a position that can be recognized by the administrator, and warning information may be output to output the notification information to the administrator.

  The present invention is applicable to an X-ray inspection apparatus.

20: X-ray inspection unit 21: Shield box 21a: Opening 22: Conveyor unit (conveying means)
23: X-ray irradiator (X-ray irradiator)
24: Line sensor (X-ray detection unit)
24a: X-ray detection element 24b: scintillator 25: LCD display 26: shielding noren 30: sorting unit (sorting unit)
31: Arm 31a: First arm 31b: Second arm 32: Arm drive unit 32a: First arm drive unit 32b: Second arm drive unit 33: Photoelectric sensor 33a: Projector 33b: Light receiver 40: Controller 41: Storage unit 42: Input / output control unit 43: X-ray irradiation control unit 44: X-ray image generation unit (image generation unit)
45: Quality determination unit (determination unit)
46: Distribution control unit 47: Abnormal discharge determination unit (abnormal discharge detection unit)
48: Notification control unit 49: Inspected article totaling unit (totaling unit)
50: X-ray tube 51: High-voltage power supply 52: Filament power supply 53: Tanks 54, 54 ', 54a: Abnormal discharge detection circuit 55: X-ray tube main body 56: Anode electrode 57: Cathode electrode 58: X-ray irradiation window 59 : First electric circuit 60: second electric circuit 61: insulating oils 62 and 62a: first detection units 63 and 63a: second detection unit 64: XOR circuit 65: AND circuit 66: OR circuit 90: upstream conveyor 91: Downstream conveyor 95: defective product collection box (first collection unit)
96: Undeterminable product collection box (second collection unit)
100: Inspection distribution device (X-ray inspection device)
411: Program storage area 412: X-ray fluoroscopic image signal storage area 413: X-ray image storage area 414: Notification information storage area 415: First abnormal discharge information storage area 416: Total information storage area 417: Article detection flag 418: Not detected Non-defective product determination flag 419: Non-determinable product determination flag 420: Light reception signal flag 421: XOR signal flag 422: AND signal flag 423: Maintenance notification flag 541: Voltage detection circuit 542: Differentiation circuits 543, 543a: Comparators 544, 544a: Pulse Generator 545: Current detection circuit D: Conveying direction P: Article (inspection object)

JP 2010-281654 A

Claims (5)

An X-ray inspection apparatus for inspecting an inspection object conveyed by a conveyance means,
An X-ray tube including an anode electrode and a cathode electrode is provided, X-rays are generated by supplying a predetermined voltage to the anode electrode and the cathode electrode, and the X-rays are applied to the inspection object. An X-ray irradiation unit to irradiate;
An X-ray detection unit that detects transmitted X-rays that are the X-rays irradiated by the X-ray irradiation unit and transmitted through the inspection object;
An abnormal discharge detector for detecting abnormal discharge in the X-ray irradiation unit;
A determination unit that determines whether the inspection object is a defective product or a product that cannot be determined based on the transmitted X-ray detected by the X-ray detection unit and the abnormal discharge detected by the abnormal discharge detection unit;
With
When the abnormal discharge is detected, the determination unit determines that the inspection target under determination is a non-determinable product,
X-ray inspection equipment. A sorting unit that sorts the inspection object based on a determination result in the determination unit;
The sorting section is
The inspection object determined to be the defective product is moved to a first collection unit to which the defective product is sent,
Moving the inspection object determined to be an indeterminate product to a second collection unit to which the indeterminate product is sent,
The X-ray inspection apparatus according to claim 1. An image generation unit that generates an image based on the transmitted X-rays detected by the X-ray detection unit;
The abnormal discharge detector detects the abnormal discharge based on the image generated by the image generator;
The X-ray inspection apparatus according to claim 1 or 2. The abnormal discharge detection unit detects the abnormal discharge by detecting a change in current or voltage in an electric circuit including the anode electrode or the cathode electrode;
The X-ray inspection apparatus according to any one of claims 1 to 3. A totaling unit that counts the number of the inspection objects determined by the determination unit;
The totaling unit excludes and totalizes the inspection object determined as the indeterminate product,
The X-ray inspection apparatus according to any one of claims 1 to 4.