JP2017032360A - Image inspection device, image inspection method and image inspection program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an image inspection device and image inspection method that can easily and correctly inspect a shape of an object.SOLUTION: In a setting mode, texture image data on a setting object and height image data thereon are acquired, and one of the texture image data and height image data is selected by an operation and the like of an image selection operation unit 461. The selected image is registered as reference image data for the selected image data to be positioned. In an inspection mode, texture image data on an inspection object and height image data are acquired. Image data corresponding to the registered reference image data are set as positioning image data. By pattern matching, positioning image is positioned to the reference image data, and thereby the texture image data and height image data about the inspection object are positioned. On the basis of the positioned image data, an inspection of the inspection object is implemented.SELECTED DRAWING: Figure 13

Description

  The present invention relates to an image inspection apparatus, an image inspection method, and an image inspection program for inspecting an inspection object using image data.

  Conventionally, there is an image measurement device capable of measuring the shape of an object based on image data obtained by imaging the object (see, for example, Patent Documents 1 and 2). In the image measuring device, for example, an object placed on a stage is imaged by an imaging device arranged above the stage. Based on the image data obtained by imaging, the shape of the object is measured.

  It is possible to inspect the object by measuring the shape of the object using the image measuring device and determining whether the measurement result is within an allowable range (tolerance).

Japanese Patent Laid-Open No. 11-132740 JP 2010-169584 A

  In the image measurement devices described in Patent Documents 1 and 2, the shape of the object is measured based on image data corresponding to a two-dimensional image. On the other hand, in recent years, a triangulation image measuring apparatus has been proposed. In a triangulation type image measuring apparatus, light is irradiated on the surface of an object placed on a stage, and the reflected light is received by a light receiving element having pixels arranged one-dimensionally or two-dimensionally. Based on the peak position of the received light amount distribution obtained by the light receiving element, the height of the surface of the object can be measured. Therefore, it is possible to inspect also the height of the object.

  When inspecting an object, the user of the image measuring device needs to specify a portion to be inspected from an image of the object obtained by imaging, for example. At this time, if the portion designated by the user is shifted from the portion to be inspected, an accurate inspection result cannot be obtained.

  When an unskilled inspection worker inspects a plurality of objects, it is difficult to accurately specify a portion to be inspected for the plurality of objects. Moreover, even if it is a skilled test | inspection operator, when the part which should be test | inspected is hard to recognize on the external appearance of a target object, exact work is difficult. Thus, inspection of an object using an image measuring device requires skill and is difficult to perform accurately.

  An object of the present invention is to provide an image inspection apparatus, an image inspection method, and an image inspection program capable of easily and accurately inspecting the shape of an object.

  (1) An image inspection apparatus according to a first invention acquires a first image data representing a stage on which a measurement object is placed and a texture image of a surface of the measurement object placed on the stage. 1 image data acquisition means, second image data acquisition means for acquiring second image data representing the height image of the surface of the measurement object placed on the stage, and settings for performing settings for inspection A control means for performing a control operation in the mode and the inspection mode for executing the inspection, and a display means, the control means in the setting mode in a state where the setting object is placed on the stage as a measurement object, First acquisition command means for giving a command to the second image data acquisition means so as to acquire second image data for measuring the dimension of the measurement target portion of the setting target object; Target for setting The first or second image data acquisition means so as to acquire the image data for alignment selected or to be selected from the first and second image data in a state where is mounted A second acquisition command means for giving a command to the first registration means, a first registration means for registering the image data acquired by the command of the second acquisition command means as reference image data for alignment in the setting mode; First measurement means for measuring a dimension having a component in the height direction of the measurement target portion of the setting object based on the second image data acquired by the command of the first acquisition command means in the mode; Receiving means for receiving at least one of a design value and a tolerance of the measurement target portion of the setting target object in the setting mode; In a state where the inspection object is placed as an object, a third command is given to the second image data acquisition means so as to acquire the second image data for measuring the dimension of the measurement target portion of the inspection object. In the inspection mode, the image data for alignment corresponding to the reference image data registered by the first registration unit is acquired in a state where the inspection object is placed on the stage in the inspection mode. A fourth acquisition command means for giving a command to the first or second image data acquisition means, and a position for registering the image data acquired by the command of the fourth acquisition command means as registration image data in the inspection mode. A third image is obtained by aligning the alignment image data and the reference image data by pattern matching in the alignment image data registration means and the inspection mode. Based on the first alignment means for aligning the second image data acquired by the instruction of the acquisition instruction means, and the second image data aligned by the first alignment means in the inspection mode. The second measuring means for measuring a dimension having a component in the height direction of the measurement target portion of the inspection target object corresponding to the measurement target portion of the setting target object, and the first measurement means in the inspection mode. A determination means for determining the quality of the inspection object based on the measured dimensions, the dimensions measured by the second measuring means, and at least one of the design value and the tolerance received by the receiving means, and an inspection mode And a first display command means for giving a command to the display means to display the determination result determined by the determination means.

  In this image inspection apparatus, control operations are performed in a setting mode for setting for inspection and an inspection mode for executing inspection. In the setting mode, the setting creator places a setting object as a measurement object on the stage. In the setting mode, the second image data for measuring the dimension of the measurement target portion is acquired in a state where the setting object is placed on the stage. Further, image data selected or to be selected for alignment among the first and second image data is acquired. Here, the first image data represents a texture image of the surface of the setting object, and the second image data represents a height image of the surface of the setting object. Image data selected for alignment is registered as reference image data for alignment. Based on the acquired second image data for dimension measurement, a dimension having a component in the height direction of the measurement target portion of the setting object is measured. At least one of the design value and tolerance of the measurement target portion of the setting object is accepted.

  In the inspection mode, the inspection operator places the inspection object on the stage as the measurement object. In the inspection mode, the second image data for measuring the dimension of the measurement target portion is acquired in a state where the inspection target is placed on the stage. In addition, image data for alignment corresponding to the registered reference image data is acquired from the first and second image data. The acquired image data for alignment is registered as alignment image data. By aligning the alignment data and the reference image data by pattern matching, the alignment of the second image data for measuring the dimension of the inspection object is performed. Based on the aligned second image data, a dimension having a component in the height direction of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target is measured. The quality of the inspection object is determined based on the dimension measured for the setting object, the dimension measured for the inspection object, and at least one of the received design value and tolerance. The determined determination result is displayed on the display means.

  According to this configuration, the second image data for measuring the dimensions of the inspection object acquired in the inspection mode is the first or second image data of the setting object acquired in the setting mode. Each is aligned with high accuracy. Therefore, the dimension of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target measured in the setting mode can be measured with high accuracy in the inspection mode. Thereby, even if it is a case where an inspection worker is not skilled, the dimension of a desired measurement object part can be measured about a plurality of inspection objects in inspection mode. As a result, the shape of the inspection object can be inspected easily and accurately.

  (2) The image inspection apparatus further includes a first operation unit operated to select either one of the first and second image data, and the first registration unit is a first operation unit. The image data selected by the above operation may be registered as reference image data.

  In this case, any one of the first and second image data can be selected as the reference image data. By appropriately selecting the reference image data according to the texture image of the surface of the inspection object and the height image of the surface, the second image data for the inspection object is set to the first or the second for the setting object, respectively. It is possible to align the second image data with high accuracy. As a result, it is possible to measure the dimensions of a desired measurement target portion for a plurality of inspection objects with high accuracy.

  (3) The image inspection apparatus further includes a second operation unit operated to designate an arbitrary feature portion from the first or second image data, and the control unit is for setting the stage in the setting mode. A command is given to the first or second image data acquisition means so as to acquire the first or second image data for designating the characteristic portion by the second operation means in a state where the object is placed. A second registration means for registering a feature portion designated by the operation of the second operation means from the image data obtained by the instruction of the fifth acquisition instruction means in the setting mode; In the inspection mode, the first or second image data is acquired so as to acquire image data corresponding to the image data acquired by the command of the fifth acquisition command means in a state where the inspection object is placed on the stage. And sixth acquisition command means for giving a command to the obtaining means. The first alignment means aligns the image data for alignment and the reference image data by pattern matching in the inspection mode, and then The image data acquired by the command of the third acquisition command unit may be aligned based on the feature portion registered by the registration unit and the image data acquired by the command of the sixth acquisition command unit. .

  In this case, in the setting mode, image data for designating the feature portion is acquired. A characteristic portion is designated by the operation of the second operation means from the acquired image data. In the inspection mode, image data corresponding to the image data for designating the characteristic portion is acquired. Based on the feature portion specified by the second operation means and the image data of the inspection subject corresponding to the image data for designating the feature portion, the second image data for the inspection subject is set as the setting subject, respectively. The first or second image data for can be aligned with high accuracy. As a result, it is possible to measure the dimensions of a desired measurement target part with a higher accuracy for a plurality of inspection objects.

  (4) The first and second image data acquisition means may be arranged so as to acquire the first and second image data from a common axis, respectively.

  In this case, the first image data portion and the second image data portion can be easily associated with each other. Therefore, it is possible to simplify the configuration for selectively using either the first image data or the second image data as image data for alignment.

  (5) The image inspection apparatus further includes third operation means operated to designate an arbitrary reference plane in the second image data acquired by the second image data acquisition means, and the control means includes The setting mode further includes third registration means for registering the reference plane designated by the operation of the third operation means, wherein the second image data acquisition means is configured such that the position of each part of the surface of the measurement object is The acquired second image data may be corrected so as to represent the distance from the reference plane in a direction orthogonal to the reference plane registered by the third registration means.

  In this case, based on the corrected second image data, the position of each part of the surface of the measurement object from the reference plane in the direction orthogonal to the reference plane can be easily recognized.

  (6) The image inspection apparatus further includes a fourth operation unit operated to designate a search range for pattern matching, and the first alignment unit is configured such that in the inspection mode, the fourth operation unit The alignment image data and the reference image data may be aligned by pattern matching within the search range designated by the operation.

  In this case, since the search range for performing pattern matching is designated, the image data for alignment can be aligned with the reference image data in a short time.

  The search range may include at least one of a search region and a search angle. In this case, since at least one of the search area and the search angle for pattern matching is designated, the alignment image data can be efficiently aligned with the reference image data in a short time.

  (7) In the setting mode, the control means provides a second display command for giving a command to the display means to display at least one of the image based on the first image data and the image based on the second image data. Means may further be included.

  In this case, when selecting any one of the first and second image data as the reference image data to be registered in the setting mode, at least one of the image based on the first image data and the image based on the second image data. One can be displayed on the display means. Therefore, the setting creator can appropriately select the reference image data to be registered while viewing the image displayed on the display unit.

  (8) The image inspection apparatus further includes a storage unit that stores in advance first specimen image data representing a texture image of the surface of the measurement object and second specimen image data representing a height image of the surface of the measurement object. And the control means includes a second alignment means for comparing the reference image data with the corresponding specimen image data among the first and second specimen image data by pattern matching in the setting mode, and a second positioning means in the setting mode. And a third display command means for giving a command to the display means so as to display the comparison result by the positioning means.

  In this case, in the setting mode, the comparison result between the registered reference image data and the sample image data corresponding to the reference image data is displayed on the display means. Therefore, the setting creator can determine whether or not the registered reference image data can be used for alignment by visually recognizing the comparison result displayed on the display means.

  (9) In the setting mode, the control means obtains the first or second image data for positioning in a state where the setting object is placed on the stage. Seventh acquisition command means for giving a command to the acquisition means, and positioning image data indicating the position and orientation of the setting object based on the image data acquired by the command of the seventh acquisition command means in the setting mode In the inspection mode, the position of the inspection object and the position and posture of the setting object indicated by the positioning image based on the positioning image data registered by the fourth registration means in the inspection mode Guidance means for performing guidance so that the postures may approach each other may be further included.

  In this case, in the setting mode, image data for positioning is acquired, and positioning image data indicating the position and orientation of the setting object is registered. The positioning image data based on the positioning image data indicates the position and orientation of the setting object. Therefore, in the inspection mode, guidance can be performed so that the position and orientation of the inspection object are close to the position and orientation of the setting object based on the positioning image data. Accordingly, it becomes easy to align the second image data for the inspection object with the first or second image data for the setting object with high accuracy. As a result, the shape of the inspection object can be inspected more easily and accurately.

  (10) In the setting mode, the control means acquires the first or second image data for positioning in a state where the setting object is placed on the stage. Seventh acquisition command means for giving a command to the acquisition means, and positioning image data indicating the position and orientation of the setting object based on the image data acquired by the command of the seventh acquisition command means in the setting mode And a first or second image for positioning in a state where the inspection object is placed on the stage before the command by the fourth acquisition command unit in the inspection mode. And an eighth acquisition command means for giving a command to the first or second image data acquisition means so as to acquire data, and positioning based on the positioning image data in the inspection mode And a fourth display command unit that displays the image and gives a command to the display unit to display the image of the inspection object based on the image data acquired by the command of the eighth acquisition command unit. .

  In this case, in the inspection mode, the image data for positioning the inspection object is acquired before the alignment image data is acquired. An image of the inspection object based on the acquired image data is displayed on the display unit together with the positioning image. The inspection worker visually recognizes the image of the inspection object and the positioning image displayed on the display means, thereby setting the position and orientation of the inspection object when placing the inspection object on the stage. It can be close to the position and posture.

  (11) In the inspection mode, the control means calculates the degree of coincidence between the positioning image data registered by the fourth registration means and the image data obtained by the instruction of the eighth acquisition instruction means. And a fifth display command means for giving a command to the display means so as to display the calculation result by the coincidence degree calculation means in the inspection mode.

  In this case, the inspection worker visually recognizes the degree of coincidence displayed on the display means, and when placing the inspection object on the stage, the inspection worker positions and the posture of the inspection object to the position and posture of the setting object. Each can be easily approached.

  (12) The fifth display command means may give a command to the display means so as to display information indicating a threshold value for a predetermined degree of coincidence.

  In this case, the inspection operator visually recognizes the threshold value for the degree of coincidence displayed on the display unit, thereby allowing the tolerance when bringing the position and posture of the inspection object closer to the position and posture of the setting object, respectively. Can be recognized.

  (13) The positioning image data registered by the fourth registration means may be different from the second image data used for measuring the dimension of the measurement target portion of the setting object.

  In this case, in the setting mode, appropriate positioning image data can be registered in order to bring the position and orientation of the inspection object closer to the position and orientation of the setting object, respectively.

  (14) In the image inspection method according to the second aspect of the invention, in the setting mode, the dimension of the measurement target portion of the setting target object is measured in a state where the setting target object is placed on the stage as the measurement target object. The second image data is acquired, and the setting object is selected or selected from the first and second image data in a state where the setting object is placed on the stage in the setting mode. The step of acquiring image data for alignment, the step of registering the acquired image data for alignment as reference image data for alignment in the setting mode, and the size acquired in setting mode In the setting mode, a step of measuring a dimension having a component in the height direction of the measurement target portion of the setting object based on the second image data for measurement, The step of accepting the input of at least one of the design value and tolerance of the measurement target portion of the setting target and the inspection target in the inspection mode with the inspection target placed on the stage as the measurement target A step of acquiring second image data for measuring a dimension of a measurement target portion of the object, and a position corresponding to the registered reference image data in a state where the inspection target object is placed on the stage in the inspection mode. A step of acquiring image data for alignment, a step of registering the acquired image data for alignment in the inspection mode as image data for alignment, and a data for alignment by pattern matching in the inspection mode; By aligning with the reference image data, a second image for measuring the dimension of the inspection object is obtained. A component in the height direction of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target based on the second image data aligned in the step of performing data alignment and the inspection mode Based on the dimension measured for the setting object in the inspection mode, the dimension measured for the inspection object, and at least one of the received design value and tolerance. Determining the quality of the inspection object, and displaying the determined determination result on the display means in the inspection mode.

  According to this image inspection method, the control operation is performed in the setting mode for setting for inspection and the inspection mode for executing inspection. In the setting mode, the setting creator places a setting object as a measurement object on the stage. In the setting mode, the second image data for measuring the dimension of the measurement target portion is acquired in a state where the setting object is placed on the stage. Further, image data selected or to be selected for alignment among the first and second image data is acquired. Here, the first image data represents a texture image of the surface of the setting object, and the second image data represents a height image of the surface of the setting object. Image data selected for alignment is registered as reference image data for alignment. Based on the acquired second image data for dimension measurement, a dimension having a component in the height direction of the measurement target portion of the setting object is measured. At least one of the design value and tolerance of the measurement target portion of the setting object is accepted.

  In the inspection mode, the inspection operator places the inspection object on the stage as the measurement object. In the inspection mode, the second image data for measuring the dimension of the measurement target portion is acquired in a state where the inspection target is placed on the stage. In addition, image data for alignment corresponding to the registered reference image data is acquired from the first and second image data. The acquired image data for alignment is registered as alignment image data. By aligning the alignment data and the reference image data by pattern matching, the alignment of the second image data for measuring the dimension of the inspection object is performed. Based on the aligned second image data, a dimension having a component in the height direction of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target is measured. The quality of the inspection object is determined based on the dimension measured for the setting object, the dimension measured for the inspection object, and at least one of the received design value and tolerance. The determined determination result is displayed on the display means.

  According to this method, the second image data for measuring the dimension of the inspection object acquired in the inspection mode is the first or second image data of the setting object acquired in the setting mode. Each is aligned with high accuracy. Therefore, the dimension of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target measured in the setting mode can be measured with high accuracy in the inspection mode. Thereby, even if it is a case where an inspection worker is not skilled, the dimension of a desired measurement object part can be measured about a plurality of inspection objects in inspection mode. As a result, the shape of the inspection object can be inspected easily and accurately.

  (15) An image inspection program according to a third aspect of the present invention is an image inspection program that can be executed by a processing device, and is set in a setting mode in which a setting object is placed as a measurement object on a stage. In the process of acquiring the second image data for measuring the dimension of the measurement target portion of the target object and the setting object in the setting mode, the first and second images are placed on the stage. In the setting mode, the acquired image data for alignment is used as reference image data for alignment in the process of acquiring image data for alignment selected or to be selected from the data Based on the acquired second image data for dimension measurement in the registration process and the setting mode, the component is set in the height direction of the measurement target portion of the setting target object. Processing for measuring one dimension, and processing for measuring a dimension having a component in the height direction of the measurement target portion of the setting object based on the acquired second image data for dimension measurement in the setting mode In the setting mode, a process for receiving an input of at least one of the design value and tolerance of the measurement target portion of the setting target object, and in the inspection mode, the inspection target object is placed on the stage as the measurement target object. In the state, in the process of acquiring the second image data for measuring the dimension of the measurement target portion of the inspection target, and in the inspection mode, the registered reference image with the inspection target placed on the stage In the processing for acquiring the image data for alignment corresponding to the data and in the inspection mode, the acquired image data for alignment is used as the image data for alignment. A process of registering, and a process of aligning the second image data for measuring the dimension of the inspection object by aligning the alignment data and the reference image data by pattern matching in the inspection mode; In the inspection mode, processing for measuring a dimension having a component in the height direction of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target based on the aligned second image data In the inspection mode, the quality of the inspection object is determined based on the dimension measured for the setting object, the dimension measured for the inspection object, and at least one of the received design value and tolerance. The processing device executes processing for performing the processing for displaying the determined determination result on the display means in the inspection mode.

  According to this image inspection program, the control operation is performed in a setting mode for setting for inspection and an inspection mode for executing inspection. In the setting mode, the setting creator places a setting object as a measurement object on the stage. In the setting mode, the second image data for measuring the dimension of the measurement target portion is acquired in a state where the setting object is placed on the stage. Further, image data selected or to be selected for alignment among the first and second image data is acquired. Here, the first image data represents a texture image of the surface of the setting object, and the second image data represents a height image of the surface of the setting object. Image data selected for alignment is registered as reference image data for alignment. Based on the acquired second image data for dimension measurement, a dimension having a component in the height direction of the measurement target portion of the setting object is measured. At least one of the design value and tolerance of the measurement target portion of the setting object is accepted.

  In the inspection mode, the inspection operator places the inspection object on the stage as the measurement object. In the inspection mode, the second image data for measuring the dimension of the measurement target portion is acquired in a state where the inspection target is placed on the stage. In addition, image data for alignment corresponding to the registered reference image data is acquired from the first and second image data. The acquired image data for alignment is registered as alignment image data. By aligning the alignment data and the reference image data by pattern matching, the alignment of the second image data for measuring the dimension of the inspection object is performed. Based on the aligned second image data, a dimension having a component in the height direction of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target is measured. The quality of the inspection object is determined based on the dimension measured for the setting object, the dimension measured for the inspection object, and at least one of the received design value and tolerance. The determined determination result is displayed on the display means.

  According to this program, the second image data for measuring the dimensions of the inspection object acquired in the inspection mode is the first or second image data of the setting object acquired in the setting mode. Each is aligned with high accuracy. Therefore, the dimension of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target measured in the setting mode can be measured with high accuracy in the inspection mode. Thereby, even if it is a case where an inspection worker is not skilled, the dimension of a desired measurement object part can be measured about a plurality of inspection objects in inspection mode. As a result, the shape of the inspection object can be inspected easily and accurately.

  According to the present invention, it is possible to easily and accurately inspect the shape of an inspection object.

It is a block diagram which shows the structure of the image inspection apparatus which concerns on one embodiment of this invention. It is a schematic diagram which shows the structure of the measurement part of the image inspection apparatus of FIG. It is a figure for demonstrating the principle of a triangulation system. It is a figure which shows the example of the pattern of the measurement light radiate | emitted from a light projection part. It is an external appearance perspective view which shows an example of the measuring object mounted on a stage. It is an example of the texture image of the measuring object of FIG. It is an example of the height image of the measuring object of FIG. It is a figure which shows an example of the initial screen displayed on the display part of an image inspection apparatus. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in setting mode. It is a figure for demonstrating the usage example of the image inspection apparatus in test | inspection mode. It is a figure for demonstrating the usage example of the image inspection apparatus in test | inspection mode. It is a figure for demonstrating the usage example of the image inspection apparatus in test | inspection mode. It is a figure for demonstrating the usage example of the image inspection apparatus in test | inspection mode. It is a figure for demonstrating the usage example of the image inspection apparatus in test | inspection mode. It is a figure for demonstrating the usage example of the image inspection apparatus in test | inspection mode. It is a figure for demonstrating the usage example of the image inspection apparatus in test | inspection mode. It is a figure which shows an example in case the some measurement object part exists with respect to one setting object. It is a figure for demonstrating the usage example of a test | inspection setting coupling | bonding function. It is a figure for demonstrating the usage example of a test | inspection setting coupling | bonding function. It is a figure for demonstrating one example of a production | generation of connection texture image data and connection height image data. It is a flowchart which shows the image test | inspection process performed by CPU of PC. It is a block diagram which shows the structure of CPU. It is a flowchart which shows the control operation of CPU in setting mode. It is a flowchart which shows the control operation of CPU in setting mode. It is a flowchart which shows the control operation of CPU in setting mode. It is a flowchart which shows the control operation of CPU in setting mode. It is a flowchart which shows the control operation of CPU in setting mode. It is a flowchart which shows the control operation of CPU in test | inspection mode. It is a flowchart which shows the control operation of CPU in test | inspection mode. It is a figure which shows an example of the image | video guidance based on the image data for positioning. It is a figure which shows the example in which the jig | tool for positioning of a measuring object was provided in the stage.

(1) Configuration of Image Inspection Apparatus FIG. 1 is a block diagram showing a configuration of an image inspection apparatus according to an embodiment of the present invention. FIG. 2 is a schematic diagram illustrating a configuration of a measurement unit of the image inspection apparatus 500 of FIG. Hereinafter, an image inspection apparatus 500 according to the present embodiment will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the image inspection apparatus 500 includes a measurement unit 100, a PC (personal computer) 200, a control unit 300, and a display unit 400.

  As shown in FIG. 1, the measurement unit 100 is a microscope, for example, and includes a light projecting unit 110, a light receiving unit 120, an illumination light output unit 130, a stage device 140, and a control board 150. The light projecting unit 110, the light receiving unit 120, and the illumination light output unit 130 constitute a measuring head 100H. As shown in FIG. 2, the light projecting unit 110 includes a measurement light source 111, a pattern generation unit 112, and a plurality of lenses 113, 114, 115. The light receiving unit 120 includes a camera 121 and a plurality of lenses 122 and 123 and has a digital zoom function.

  As shown in FIG. 1, the stage apparatus 140 includes a stage 141, a stage operation unit 142, and a stage driving unit 143. A measurement object S is placed on the stage 141. As shown in FIG. 2, the stage 141 includes an XY stage 10, a Z stage 20, and a θ stage 30. The stage 141 may further include a fixing member (clamp) (not shown) that fixes the measurement object S to a surface (hereinafter referred to as a placement surface) on which the measurement object S is placed.

  As shown in FIG. 2, the light projecting unit 110 is disposed obliquely above the stage 141. The measuring unit 100 may include a plurality of light projecting units 110. In the example of FIG. 2, the measurement unit 100 includes two light projecting units 110. Hereinafter, when distinguishing the two light projecting units 110, one light projecting unit 110 is referred to as a light projecting unit 110A, and the other light projecting unit 110 is referred to as a light projecting unit 110B. The light projecting units 110 </ b> A and 110 </ b> B are arranged symmetrically across the optical axis of the light receiving unit 120.

  The measurement light source 111 of each of the light projecting units 110A and 110B is, for example, a halogen lamp that emits white light. The measurement light source 111 may be another light source such as a white LED (light emitting diode) that emits white light. Light emitted from the measurement light source 111 (hereinafter referred to as measurement light) is appropriately condensed by the lens 113 and then enters the pattern generation unit 112.

  The pattern generation unit 112 is a DMD (digital micromirror device), for example. The pattern generation unit 112 may be an LCD (Liquid Crystal Display), LCOS (Liquid Crystal on Silicon), or a mask. The measurement light incident on the pattern generation unit 112 is converted into a preset pattern and a preset intensity (brightness) and emitted. Hereinafter, the portion of the measurement light whose intensity is a predetermined value or more is called a bright portion, and the portion of the measurement light whose intensity is smaller than a predetermined value is called a dark portion.

  The measurement light emitted from the pattern generation unit 112 is converted into light having a relatively large diameter by the plurality of lenses 114 and 115 and then irradiated onto the measurement object S on the stage 141. The light receiving unit 120 is disposed above the stage 141. The measurement light reflected above the stage 141 by the measurement object S is collected and imaged by the plurality of lenses 122 and 123 of the light receiving unit 120 and then received by the camera 121.

  The camera 121 is, for example, a CCD (Charge Coupled Device) camera including an image sensor 121a and a lens. The image sensor 121a is, for example, a monochrome CCD (charge coupled device). The image sensor 121a may be a color CCD or another image sensor such as a CMOS (complementary metal oxide semiconductor) image sensor. From each pixel of the image sensor 121a, an analog electrical signal (hereinafter referred to as a light reception signal) corresponding to the amount of received light is output to the control board 150.

  On the control board 150, an A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted. The light reception signal output from the camera 121 is sampled at a constant sampling period by the A / D converter of the control board 150 and converted into a digital signal based on control by the control unit 300. Digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data.

  As shown in FIG. 1, the PC 200 includes a CPU (Central Processing Unit) 210, a ROM (Read Only Memory) 220, a RAM (Random Access Memory) 230, a storage device 240 and an operation unit 250. The operation unit 250 includes a keyboard and a pointing device. A mouse or a joystick is used as the pointing device.

  The ROM 220 stores a system program. The RAM 230 is used for processing various data. The storage device 240 is composed of a hard disk or the like. The storage device 240 stores an image inspection program. The storage device 240 is used for storing various data such as pixel data supplied from the control board 150.

  The CPU 210 generates image data based on the pixel data given from the control board 150. The CPU 210 performs various processes on the generated image data using the RAM 230 and causes the display unit 400 to display an image based on the image data. Further, the CPU 210 gives a driving pulse to the stage driving unit 143. The display unit 400 is configured by, for example, an LCD panel or an organic EL (electroluminescence) panel.

  The control unit 300 includes a control board 310 and an illumination light source 320. A CPU (not shown) is mounted on the control board 310. The CPU of the control board 310 controls the light projecting unit 110, the light receiving unit 120, and the control board 150 based on a command from the CPU 210 of the PC 200.

  The illumination light source 320 includes, for example, three LEDs that respectively emit red light, green light, and blue light. By controlling the luminance of the light emitted from each LED, light of an arbitrary color can be generated from the illumination light source 320. Light generated from the illumination light source 320 (hereinafter referred to as illumination light) is output from the illumination light output unit 130 of the measurement unit 100 through a light guide member (light guide). Note that the illumination light source 320 may be provided in the measurement unit 100 without providing the illumination light source 320 in the control unit 300. In this case, the illumination light output unit 130 is not provided in the measurement unit 100.

  The illumination light output unit 130 of FIG. 2 has an annular shape and is disposed above the stage 141 so as to surround the lens 122 of the light receiving unit 120. Thereby, illumination light is irradiated to the measuring object S from the illumination light output unit 130 so that no shadow is generated. Since the illumination light is irradiated from substantially directly above the measurement object S, the illumination light reaches the bottom of the hole even when the measurement object S has a hole. Therefore, not only the surface of the measuring object S but also the bottom of the hole can be observed with the illumination light.

  In the measurement unit 100, data representing the pattern of the surface of the measurement target S is generated as texture image data in a state where the measurement target S is irradiated with the illumination light from the illumination light output unit 130. The surface pattern includes, for example, a pattern and a color. Hereinafter, an image based on the texture image data is referred to as a texture image. In the measurement unit 100, data representing the shape of the surface of the measurement object S is generated as height image data in a state where the measurement object S is irradiated with the measurement light from the light projecting unit 110. Hereinafter, an image based on the height image data is referred to as a height image. Further, in the measurement unit 100, composite image data indicating a composite image of the texture image and the height image may be generated. The height image is an image called a distance image.

  The display unit 400 displays a texture image and a height image. When the composite image data is generated by the measurement unit 100, a composite image based on the composite image data may be displayed on the display unit 400.

(2) Stage Configuration The measurement unit 100 defines a device-specific three-dimensional coordinate system and an origin position. The three-dimensional coordinate system of this example has an X axis, a Y axis, and a Z axis that are orthogonal to each other. In FIG. 2, the direction parallel to the X axis is indicated by the arrow X as the X direction, the direction parallel to the Y axis is indicated by the arrow Y, and the direction parallel to the Z axis is indicated by the arrow Z as the Z direction. Further, the direction of rotation about an axis parallel to the Z direction is defined as the θ direction and is indicated by an arrow θ. In the present embodiment, the Z direction is a direction parallel to the optical axis of the light receiving unit 120.

  The mounting surface of the stage 141 is included in a plane parallel to the X direction and the Y direction. The XY stage 10 has an X direction moving mechanism and a Y direction moving mechanism. The Z stage 20 has a Z direction moving mechanism. The θ stage 30 has a θ direction rotation mechanism.

  A plane located at the focal point of the light receiving unit 120 and perpendicular to the optical axis of the light receiving unit 120 is referred to as a focal plane of the light receiving unit 120. The relative positions of the light projecting units 110A and 110B, the light receiving unit 120, and the stage 141 are such that the optical axis of the light projecting unit 110A, the optical axis of the light projecting unit 110B, and the optical axis of the light receiving unit 120 are the focal planes of the light receiving unit 120. Are set to cross each other.

  A plane that is located at the focal point of the light projecting unit 110 (the point where the pattern of the measurement light is imaged) and is perpendicular to the optical axis of the light projecting unit 110 is referred to as a focal plane of the light projecting unit 110. Each of the light projecting units 110 </ b> A and 110 </ b> B is configured such that the focal plane of the light projecting unit 110 </ b> A and the focal plane of the light projecting unit 110 </ b> B intersect at a position including the focal point of the light receiving unit 120.

  The center of the rotation axis of the θ stage 30 in the θ direction coincides with the optical axis of the light receiving unit 120. Therefore, when the θ stage 30 is rotated in the θ direction, the measuring object S can be rotated within the field of view around the rotation axis without removing the measuring object S from the field of view. The XY stage 10 and the θ stage 30 are supported by the Z stage 20.

  Stepping motors are used for the X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, and the θ direction rotating mechanism of the stage 141, respectively. The X direction moving mechanism, the Y direction moving mechanism, the Z direction moving mechanism, and the θ direction rotating mechanism of the stage 141 are driven by the stage operation unit 142 or the stage driving unit 143 in FIG.

  The user manually operates the stage operation unit 142 in FIG. 1 to move the mounting surface of the stage 141 in the X direction, the Y direction, or the Z direction relative to the light receiving unit 120, or θ Can be rotated in the direction. The stage driving unit 143 moves the stage 141 relative to the light receiving unit 120 in the X direction, the Y direction, or the Z direction by supplying current to the stepping motor of the stage 141 based on the driving pulse given from the PC 200. Or can be rotated in the θ direction.

  In this embodiment, the stage 141 is an electric stage that can be driven by a stepping motor and can be manually operated. However, the present invention is not limited to this. The stage 141 may be an electric stage that can be driven only by a stepping motor, or may be a manual stage that can be operated only manually. Further, the arrangement of the XY stage 10, the Z stage 20, and the θ stage 30 is not limited to the above example. For example, in the example of FIG. 2, the XY stage 10 is disposed on the θ stage 30, but the present invention is not limited to this, and the θ stage 30 may be disposed on the XY stage 10.

(3) Shape measurement of measurement object In the measurement unit 100, the shape of the measurement object S is measured by a triangulation method. FIG. 3 is a diagram for explaining the principle of the triangulation system. As shown in FIG. 3, the angle α between the optical axis of the measurement light emitted from the light projecting unit 110 and the optical axis of the measurement light incident on the light receiving unit 120 (the optical axis of the light receiving unit 120) is set in advance. The The angle α is larger than 0 degree and smaller than 90 degrees.

  When the measuring object S is not placed on the stage 141, the measurement light emitted from the light projecting unit 110 is reflected by the point O on the placing surface of the stage 141 and enters the light receiving unit 120. On the other hand, when the measurement object S is placed on the stage 141, the measurement light emitted from the light projecting unit 110 is reflected by the point A on the surface of the measurement object S and enters the light receiving unit 120.

  When the distance in the X direction between the point O and the point A is d, the height h of the point A of the measuring object S with respect to the mounting surface of the stage 141 is given by h = d ÷ tan (α). The CPU 210 of the PC 200 in FIG. 1 measures the distance d between the point O and the point A in the X direction based on the pixel data of the measurement object S given by the control board 150. Further, the CPU 210 calculates the height h of the point A on the surface of the measuring object S based on the measured distance d. By calculating the heights of all points on the surface of the measuring object S, the three-dimensional shape of the measuring object S is measured.

  In order to irradiate measurement light to all points on the surface of the measurement object S, measurement light having various patterns is emitted from the light projecting unit 110 in FIG. FIG. 4 is a diagram illustrating an example of a pattern of measurement light emitted from the light projecting unit 110. The pattern type of the measurement light is controlled by the pattern generation unit 112 in FIG.

  The measurement light in FIG. 4A is referred to as line-shaped measurement light. The line-shaped measurement light is measurement light having a linear cross section parallel to one direction. The measurement light in FIG. 4B is called sinusoidal measurement light. The sinusoidal measurement light is measurement light having a linear cross section parallel to one direction and a pattern in which the intensity changes in a sine wave shape in another direction orthogonal to the one direction.

  The measurement light in FIG. 4C is referred to as striped measurement light. The striped measurement light is measurement light having a linear cross section that is parallel to one direction and aligned in another direction orthogonal to the one direction. The measurement light in FIG. 8D is referred to as code-shaped measurement light. Code-like measurement light is measurement light that has a linear cross section parallel to one direction and in which a bright portion and a dark portion are arranged in another direction orthogonal to the one direction.

  A method of scanning the line-shaped measurement light on the measurement object S is generally called a light cutting method. By scanning the line-shaped measurement light so that the bright part of the line-shaped measurement light is irradiated at least once over the entire irradiation range of the measurement light according to a general light cutting method, the height image data of the measuring object S is obtained. Generated.

  On the other hand, the method of irradiating the measuring object S with sinusoidal measurement light, striped measurement light or code-like measurement light is classified as a pattern projection method. Among the pattern projection methods, the method of irradiating the measuring object S with sinusoidal measuring light or the striped measuring light is classified as a phase shift method, and the method of irradiating the measuring object S with code-like measuring light is a spatial code. Classified into law.

  By scanning the sinusoidal measurement light or the striped measurement light so that the bright portion of the sinusoidal measurement light or the striped measurement light is irradiated at least once over the entire irradiation range of the measurement light according to a general phase shift method, Height image data of the measuring object S is generated. In addition, according to a general space code method, the measurement object S is sequentially irradiated with a plurality of code-like measurement lights having different patterns, whereby the height image data of the measurement object S is generated.

(4) Specific Example of Texture Image and Height Image FIG. 5 is an external perspective view showing an example of the measurement object S placed on the stage 141. The measuring object S in FIG. 5 includes a thin part s10, a thick part s20, and a cylindrical part s30. Each of the thin part s10 and the thick part s20 has a rectangular plate shape. One side of the thin part s10 and one side of the thick part s20 are joined together. In a state where the thin portion s10 and the thick portion s20 are joined, the lower surface s12 of the thin portion s10 and the lower surface s22 of the thick portion s20 are flush with each other. In the Z direction, the thickness of the thick part s20 is larger than the thickness of the thin part s10. A cylindrical part s30 is provided on the upper surface s21 of the thick part s20 so as to extend upward.

  The positions (heights) in the Z direction of the upper surface s11 of the thin portion s10, the upper surface s21 of the thick portion s20, and the upper surface s31 of the cylindrical portion s30 are compared. In this case, the upper surface s11 of the thin portion s10 is the lowest and the upper surface s31 of the cylindrical portion s30 is the highest. The upper surface s21 of the thick part s20 is higher than the upper surface s11 of the thin part s10 and lower than the upper surface s31 of the columnar part s30.

  A white letter “A” is printed on the upper surface s31 of the cylindrical portion s30. The outer surface of the measuring object S in FIG. 5 is painted in dark gray except for the white letter “A”. 6 is an example of a texture image of the measuring object S in FIG. 5, and FIG. 7 is an example of a height image of the measuring object S in FIG.

  As shown in FIG. 6, the texture image TI is an image of the measurement object S viewed in the Z direction. According to the texture image TI of FIG. 6, the character “A” printed on the upper surface s31 of the cylindrical portion s30 (FIG. 5) as a pattern on the surface of the measurement object S can be clearly identified. On the other hand, since the measurement object S in FIG. 5 is painted in dark gray except for the letter “A”, in the texture image TI, the thin portion s10, the thick portion s20, and the cylindrical portion s30 in FIG. The contour TE indicating the boundary on the image is difficult to be identified.

  On the other hand, as shown in FIG. 7, the height image HI represents the height of each part of the surface of the measuring object S with a plurality of different colors. In FIG. 7, the difference in color is represented by the difference in dot pattern. For example, the lowest part is represented in blue and the highest part is represented in red. The other part is represented by a color corresponding to the height so that the higher the color, the closer the color is to red, and the lower the color, the closer to blue.

  In the height image of FIG. 7, the pattern on the surface of the measuring object S cannot be identified. Therefore, the character “A” shown in the texture image TI in FIG. 6 cannot be identified. On the other hand, in the height image HI of FIG. 7, the surface of the measurement object S is represented by a color corresponding to the height, so that the thin portion s10, the thick portion s20, and the cylindrical portion s30 of FIG. A contour HE indicating a boundary is easily identified.

(5) Usage example of image inspection apparatus (5-1) Setting mode and inspection mode In the following description, among users of the image inspection apparatus 500, a user who manages the inspection work of the measuring object S is appropriately set and created. The user who inspects the measuring object S under the control of the setting creator is appropriately called an inspection operator. Further, the posture of the measuring object S means the rotation angle of the measuring object S on the stage 141.

  The image inspection apparatus 500 can be used in a plurality of types of modes including a setting mode for setting creators and an inspection mode for inspection workers. In the setting mode, the setting creator determines a measurement target part for one measurement object S, and measures the dimension of the measurement target part. Thereby, information for inspecting another measurement object S designed in the same manner as the measurement object S is generated as inspection setting information. The generated data file of inspection setting information is stored in the storage device 240 of FIG. 1 as an inspection setting file. The inspection setting information includes, for example, the measurement target portion of the setting object S and the design values and tolerances of the dimensions of the measurement target portion. Hereinafter, the measurement object S measured by the setting creator in the setting mode is referred to as a setting object S.

  In the inspection mode, the inspection operator can inspect another measurement object S based on the inspection setting file stored in the storage device 240 of FIG. Hereinafter, the measurement object S to be inspected by the inspection operator in the inspection mode is referred to as the inspection object S.

  When the inspection object S is inspected, the dimension of the measurement target portion is measured, and it is determined whether or not the measured dimension is within the tolerance of the design value. When the measured dimension is within the tolerance range, it is determined that the inspection object S is a non-defective product. On the other hand, when the measured dimension is not within the tolerance range, the inspection object S is determined to be defective. The determination result of the quality of the inspection object S is displayed on the display unit 400 in FIG. 1 as the inspection result. Further, the data file indicating the inspection result is stored in the storage device 240 of FIG. 1 as the inspection result file.

(5-2) Details of Setting Mode FIG. 8 is a diagram illustrating an example of an initial screen displayed on the display unit 400 of the image inspection apparatus 500. As shown in FIG. 8, on the initial screen of the image inspection apparatus 500, an inspection setting button 601, an inspection execution button 602, a statistical analysis button 603, and a setting edit button 604 are displayed.

  The setting creator operates the examination setting button 601. Thereby, the CPU 210 of FIG. 1 operates in the setting mode. 9 to 27 are diagrams for explaining an example of use of the image inspection apparatus 500 in the setting mode. The setting creator first places the setting object S on the stage 141 in FIG. 1 in a desired position and posture.

  As shown in FIG. 9, a main display field 411, an upper sub display field 412, and a side sub display field 413 are displayed on the display unit 400. The main display column 411 is assigned to a wide area from the left side of the screen of the display unit 400 to the center of the screen. The upper sub display column 412 is assigned in a band shape above the main display column 411. The side sub display column 413 is assigned in a band shape on the right side of the main display column 411.

  In the main display column 411, various information relating to the dimension measurement of the setting object S is displayed in addition to the texture image, the height image, and the composite image of the setting object S mainly placed on the stage 141. .

  In the measurement unit 100, texture images of the setting object S are continuously generated at a predetermined frame rate. In the example of FIG. 9, the latest texture image including the placement surface of the stage 141 and the image of the setting object S is displayed in real time (moving image display) in the main display field 411. The setting object S in FIG. 9 is a semiconductor package.

  In the main display column 411, a stage operation button 421 is displayed together with the texture image. The user can move the position of the mounting surface of the stage 141 in the X, Y, and Z directions by operating the stage operation button 421 using the operation unit 250 of FIG.

  The setting creator adjusts the position and orientation of the setting object S with respect to the light projecting unit 110 and the light receiving unit 120 in FIG. 1 while visually recognizing the texture image displayed in the main display field 411. The position and orientation of the setting object S are adjusted so that the dimension of the measurement target portion of the setting object S can be appropriately measured.

  In the upper sub display column 412, for example, a plurality of operation units for adjusting imaging conditions such as the magnification of the light receiving unit 120, the illumination light irradiated on the stage 141, and the brightness of the measurement light are displayed. Therefore, the setting creator adjusts the imaging condition by operating a plurality of operation units displayed in the upper sub display column 412 while visually recognizing the texture image displayed in the main display column 411. The imaging condition is adjusted so that the dimension of the measurement target portion of the setting object S can be appropriately measured.

  In the side sub display column 413, a positioning setting button 431 and a measurement button 432 are displayed. A setting creator can set a registration method of positioning image data, which will be described later, by operating a positioning setting button 431.

  After the position and orientation of the setting object S are appropriately adjusted and the imaging condition is appropriately adjusted, the setting creator operates the measurement button 432. Thereby, texture image data is acquired in response to the operation of the measurement button 432. The acquired texture image data is stored in the storage device 240 of FIG. Further, the setting object S on the stage 141 is irradiated with measurement light, and height image data is acquired. The acquired height image data is stored in the storage device 240 of FIG. Furthermore, in the present embodiment, synthesized image data is acquired by synthesizing the generated texture image data and height image data. The obtained composite image data is stored in the storage device 240 of FIG.

  Here, in the present embodiment, a common optical system and the image sensor 121a are used to acquire texture image data and height image data. When obtaining the texture image data and the height image data by operating the measurement button 432, the CPU 210 associates the texture image data and the height image data for each pixel of the image sensor 121a. Thereby, the acquired texture image data and height image data are stored in the storage device 240 in a state of being associated with each pixel.

  When the texture image data, the height image data, and the composite image data are generated, as shown in FIG. 10, the setting object S based on any one of the generated texture image data, height image data, and composite image data is generated. Are displayed in the main display field 411. In this state, the side sub display column 413 displays a plurality of image selection buttons 433 for selecting the type of image to be displayed in the main display column 411.

  In the example of FIG. 10, as the plurality of image selection buttons 433, a button for selecting a texture image, a button for selecting a height image corresponding to a plan view, and a three-dimensional height corresponding to an external perspective view A button for selecting an image is shown. The setting creator can switch and display a desired image of the setting object S in the main display column 411 by selecting any of the plurality of image selection buttons 433.

  An analysis button 434 and a return button 435 are displayed below the side sub display column 413. The setting creator can return the display unit 400 to the display state of FIG. 9 by operating the return button 435. Thereby, the setting creator can re-acquire the texture image data, the height image data, and the composite image data.

  The setting creator operates the analysis button 434 in FIG. 10 to generate examination setting information. In this case, as shown in FIG. 11, the main display column 411 has a texture image, a height image, and a composite image based on the texture image data, the height image data, and the composite image data stored by the operation of the previous measurement button 432. A list of images is displayed. In the upper sub display field 412, a save button 441, a reference plane setting button 442, an alignment button 443, and a profile button 444 are displayed.

  In the setting mode, any one of the acquired texture image data and height image data can be registered as reference image data. The reference image data is used to align the texture image data and the height image data of the inspection object S acquired in the inspection mode described later. The alignment is performed by pattern matching between the reference image data registered in the setting mode and any one of the texture image data and the height image data of the inspection object S. Accordingly, it is possible to accurately inspect the dimensions of the measurement target portion in the inspection target S in the inspection mode. Details of the alignment using the reference image data will be described later.

  The setting creator operates the alignment button 443 in FIG. 11 in order to set the reference image data. In this case, as shown in FIG. 12, a texture image of the setting object S is displayed in the main display field 411, and an off button for designating that the reference image data is not registered in the side sub display field 413 451 and an ON button 452 for designating registration of reference image data are displayed. In addition to the off button 451 and the on button 452, a detailed alignment setting button 453, an alignment test button 454, an OK button 455, and a cancel button 456 are displayed in the side sub display column 413.

  When the positions and postures of the setting object S and the inspection object S placed on the stage 141 are not changed by using a jig or the like, the alignment is not necessarily performed in the inspection mode. In such a case, the setting creator operates the off button 451 and also operates the OK button 455. Thereby, the reference image data is not registered.

  On the other hand, when the setting creator operates the ON button 452 to register the reference image data, the region designation image is superimposed on the texture image displayed in the main display field 411 as shown in FIG. This area designation image is an image for designating an area on the image corresponding to the reference image data to be registered. In FIG. 13 and the subsequent drawings, the rectangular area designation image is appropriately indicated by white hatching.

  In the example of FIG. 13, an image selection operation unit 461, a rectangular region setting button 462, an all region setting button 463 and a rotation range setting operation unit 464 are displayed in the side sub display field 413. The setting creator can select either texture image data or height image data as image data used to register the reference image data by operating the image selection operation unit 461.

  When texture image data is selected, the texture image is displayed in the main display column 411 as shown in FIG. On the other hand, when the height image data is selected, the height image is displayed in the main display column 411 as shown in FIG. Accordingly, the setting creator can identify image data suitable for the reference image data by visually checking the main display field 411 while operating the image selection operation unit 461.

  The setting creator operates, for example, a rectangular area setting button 462 after selecting image data used for registration of the reference image data. In this case, the setting creator can change the position and size of the rectangular area designation image by performing a drag operation on the main display field 411. Thereby, the setting creator can set the region on the image corresponding to the reference image data to a desired position and a desired size, and register the reference image data corresponding to the set region.

  On the other hand, the setting creator operates the all area setting button 463, for example, after selecting the image data used for registration of the reference image data. Thereby, the setting creator can register the reference image data corresponding to the entire area of the selected image data.

  The image area of the reference image data registered by the above operation is set as a pattern matching search area in the alignment of the inspection mode described later. In the image inspection apparatus 500 of this example, a search angle can be set in addition to the search area as a pattern matching search condition in the alignment of the inspection mode.

  The setting creator can set to limit the search angle or not to limit the search angle by operating the rotation range setting operation unit 464 of FIGS. 13 and 14. Furthermore, the setting creator can specify the size of the search angle when limiting the search angle. In this case, the search angle is set with a designated size.

  When the selection of the image data, the setting of the search area, and the setting of the search angle are completed, the setting creator operates an OK button 455 displayed in the side sub display field 413. Thereby, the display unit 400 returns to the display state of FIG. 12 with the reference image data registered.

  In the setting mode, by registering the characteristic portion of the setting object S, after the alignment by pattern matching in the inspection mode, more detailed alignment (hereinafter, detailed position) is performed based on the registered characteristic portion. Can be performed).

  When registering the characteristic portion of the setting object S, the setting creator operates the detailed alignment setting button 453 in FIG. 12 after the registration work related to the reference image data. In this case, as shown in FIG. 15, the texture image of the setting object S is displayed in the main display field 411, and a plurality of drawing buttons 471, edge detection buttons 472, and image selection operations are displayed in the side sub display field 413. A portion 473 and a plurality of detailed alignment method buttons 474 are displayed.

  By first operating the image selection operation unit 473, the setting creator can select either texture image data or height image data as image data used for registering the feature portion.

  When texture image data is selected, the texture image is displayed in the main display column 411 as shown in FIG. On the other hand, when the height image data is selected, the height image is displayed in the main display field 411. Accordingly, the setting creator can identify image data suitable for registering the characteristic portion by visually checking the main display field 411 while operating the image selection operation unit 473.

  Subsequently, the setting creator operates a plurality of drawing buttons 471 to display points or lines as geometric figures for specifying the characteristic portion on the image of the setting object S displayed in the main display field 411. Draw. In the example of FIG. 15, two straight lines are drawn along one short side of the image of the setting object S having a substantially rectangular shape and one long side orthogonal to the short side. Here, the setting creator draws two straight lines along the edge detected on the image of the setting object S by operating the edge detection button 472 in advance before the drawing work. be able to.

  When the drawing of the geometric figure for specifying the characteristic part is completed, the setting creator operates one of the plurality of detailed alignment method buttons 474. Thereby, a method for specifying a feature portion based on the drawn geometric figure is set.

  In the example of FIG. 15, the corner of the setting object S located at the intersection of the two straight lines is specified by the two straight lines drawn on the texture image. Further, one short side of the setting object S along a straight line extending from the corner is specified. The specified corner and one short side are registered as the characteristic part of the setting object S.

  When the registration of the feature portion is completed, the setting creator operates the OK button 455 displayed in the side sub display column 413. Thereby, the display part 400 returns to the display state of FIG.

  Before the generation of the inspection setting information using the setting object S, the texture image data and the height image data of the measurement object S having the same shape as the setting object S are acquired in advance as sample image data. 1 storage device 240.

  The setting creator can determine whether or not the alignment of the inspection mode is appropriately executed based on the registered reference image data based on the sample image data. In this case, the setting creator operates the alignment test button 454 displayed in the side sub display column 413 in FIG. Thereby, as shown in FIG. 16, the texture image of the setting object S is displayed in the main display field 411. In the texture image, two straight lines that are orthogonal to each other at the center are superimposed and displayed as indicated by a white dot-and-dash line. In addition, a search area corresponding to the registered reference image data is superimposed on the texture image. In FIG. 16, the search area is indicated by white hatching.

  In addition, the surface shape of the setting object S corresponding to a straight line extending in the horizontal direction on the texture image is displayed below the texture image. Further, the surface shape of the setting object S corresponding to a straight line extending in the vertical direction on the texture image is represented on the side of the texture image. The plurality of images displayed in the main display field 411 at this time are images based on the texture image data and the height image data of the setting object S acquired before registration of the reference image data.

  As described above, in a state where a plurality of images are displayed in the main display column 411, the side image display selection unit 482, the display image selection operation unit 482, the test execution button 483, and the return button 484 are displayed in the side sub display column 413. Is displayed.

  The sample image selection operation unit 481 includes, for example, a pull-down menu, and is configured to be able to select one or a plurality of sample image data stored in advance in the storage device 240 of FIG. The setting creator operates the sample image selection operation unit 481 to select desired sample image data. Thereby, the selected sample image data is read out.

  Next, the setting creator can select an image displayed in the main display column 411 by operating the display image selection operation unit 482. For example, the setting creator can display only the image of the setting object S in the main display field 411. Further, the setting creator can display only an image based on the read sample image data in the main display column 411. Further, as shown in FIG. 17, the setting creator can superimpose and display the image of the setting object S and the image based on the sample image data on the main display field 411.

  In a state where the sample image data corresponding to the setting object S has been read, the setting creator operates the test execution button 483. Thereby, sample image data corresponding to the reference image data registered for the setting object S is registered as image data for alignment.

  That is, when the reference image data is texture image data, the sample image data of the texture image data is registered as image data for alignment. On the other hand, when the reference image data is height image data, the sample image data of the height image data is registered as image data for alignment.

  Thereafter, the alignment image data is aligned with the reference image data by pattern matching. In this state, as shown in FIG. 18, the setting creator confirms that the texture image of the setting object S and the texture image based on the sample image data overlap over a wide range on the main display field 411, for example. Can be confirmed. Thereby, it can be determined easily and in a short time that the registered reference image data is appropriate.

  Here, as shown in FIG. 19, when reference image data corresponding to a portion where no characteristic pattern exists in the texture image of the setting object S is registered, pattern matching is not appropriately performed. there is a possibility. In this case, as shown in FIG. 20, the texture image of the setting object S and the texture image based on the sample image data are displayed in a state where they do not overlap each other. Thereby, the setting creator can easily and quickly determine that the registered reference image data is not appropriate by viewing the main display field 411. Therefore, the setting creator can register new reference image data again.

  In the case where the CPU 210 in FIG. 1 can determine whether or not the alignment image data is accurately aligned with the reference image data, the determination result is displayed on the display unit 400. May be.

  As described above, after making the determination for the registered reference image data, the setting creator operates the return button 484. Thereby, the display part 400 returns to the display state of FIG.

  In the setting mode, after the texture image data and height of the setting object S are acquired, it is possible to specify an arbitrary reference plane that intersects the Z direction. In this case, the setting creator operates the reference plane setting button 442 in FIG. Thereby, as shown in FIG. 21, the texture image of the setting object S is displayed in the main display column 411. As in the example of FIG. 16, two straight lines orthogonal to each other at the center are superimposed on the texture image. Further, the surface shape of the setting object S corresponding to a straight line extending in the horizontal direction is displayed below the texture image. Furthermore, the surface shape of the setting object S corresponding to a straight line extending in the vertical direction is represented on the side of the texture image.

  The setting creator can specify a desired number of rectangular areas having a desired size at desired positions as indicated by white hatching by performing a drag operation on the main display field 411. In this case, the reference plane is calculated and registered so as to include the entire designated rectangular area or areas. Specifically, the reference plane is calculated by using the least square method, for example, based on the position in the Z direction of each part of the surface of the designated one or more rectangular areas.

  By registering the reference plane calculated in this way, the height image data acquired for the setting object S is registered on the reference plane in which the position of each part of the surface of the setting object S is registered. Correction is performed to represent the distance from the reference plane in the orthogonal direction. In this case, according to the height data after correction, the position of each part of the surface of the setting object S from the reference plane can be easily confirmed.

  For example, as shown in FIG. 21, when the reference plane is registered in a partial area of the placement surface of the stage 141 on which the setting object S is placed, the height image data is the setting object S. The position of each part of the surface is corrected so as to represent the distance from the mounting surface of the stage 141. When the registration of the reference plane is completed, the setting creator operates the OK button 455 displayed in the side sub display field 413. Thereby, the display part 400 returns to the display state of FIG.

  The setting creator measures the dimension of the measurement target portion determined in advance based on the texture image data and the height image data acquired for the setting object S. In this case, the setting creator operates the profile button 444 in FIG. Thereby, as shown in FIG. 22, the composite image and the texture image of the setting object S are displayed adjacent to each other in the main display field 411. Further, a display area for displaying the surface shape of the setting object S is formed below the synthesized image and the texture image.

  In the display state of FIG. 22, a display image switching button 419 is displayed above the texture image. The setting creator can switch the texture image displayed in the main display field 411 to the height image by operating the display image switching button 419. Also, the height image displayed in the main display field 411 can be switched to a texture image.

  In the side sub display field 413, a plurality of drawing buttons 471, an edge detection button 472, and an image selection operation unit 473 are displayed. By first operating the image selection operation unit 473, the setting creator can select either texture image data or height image data as image data used to measure the dimensions of the measurement target portion. .

  Subsequently, the setting creator operates a plurality of drawing buttons 471 to display dots or geometrical figures for specifying the measurement target portion on the image of the setting object S displayed in the main display field 411. Draw a line. Here, the setting creator can easily draw a line or a point along the edge detected on the image of the setting object S by operating the edge detection button 472 in advance before the drawing work. Can do.

  As shown in FIG. 23, the geometric figure drawn on the image of the setting object S displayed in the main display field 411 is displayed in a superimposed manner. In the example of FIG. 23, a straight line extending in the horizontal direction is superimposed and displayed on the texture image displayed in the main display field 411. Further, the surface shape of the setting object S corresponding to the straight line is displayed below the synthesized image and the texture image.

  In this state, a plurality of dimension measurement method buttons 491 are displayed in the side sub display column 413. Therefore, the setting creator operates one of the plurality of dimension measurement method buttons 491 and specifies the measurement target portion on the plurality of images displayed in the main display column 411. Thereby, the dimension of the specified measurement target part is measured. As a result, as shown in FIG. 24, an image showing the measurement target portion is displayed superimposed on the image of the setting object S, and a measurement result (measurement value) is displayed in the main display column 411.

  After the dimensions of one or a plurality of measurement target portions are measured as described above, the setting creator operates the OK button 455 displayed in the side sub display field 413. Thereby, as shown in FIG. 25, a plurality of images about the setting object S are displayed in the main display column 411, and a list of measurement results is displayed below these images. At this time, a plurality of input fields 492 for inputting the design value, the upper limit value, and the lower limit value of the dimension for each measurement target portion are displayed. In this example, the range between the upper limit value and the lower limit value corresponds to the tolerance.

  The setting creator inputs the design value, the upper limit value, and the lower limit value of each measurement target portion while confirming the measurement result. Thereby, when the measurement result is within a range (tolerance) between the input upper limit value and lower limit value, it can be determined that the dimension of the measurement target portion corresponding to the measurement result is appropriate. . On the other hand, when the measurement result is not within the range (tolerance) between the input upper limit value and lower limit value, it can be determined that the dimension of the measurement target portion corresponding to the measurement result is not appropriate.

  Thereafter, the setting creator operates the save button 441 in the upper sub display field 412 in FIG. Thereby, the data file of the inspection setting information including various information for measuring the dimension of the measurement target portion of the setting object S is stored in the storage device 240 of FIG. 1 as the inspection setting file. Thereby, the work of generating inspection setting information is completed.

  The inspection setting information mainly includes imaging conditions, movement amount of the XY stage 10 (the mounting surface of the stage 141), reference image data, image processing setting conditions, a method for specifying a characteristic portion, reference surface registration conditions, Includes measurement target part specification method, dimensional measurement method, dimensional design value, dimensional upper limit value, dimensional lower limit value, texture image data, height image data, composite image data, and positioning image data described later. .

  25, a process information button 493 and a save option button 494 are displayed in the side sub display field 413. The setting creator operates the process information button 493 to input information such as “lot number”, “product name”, and “delivery destination” of the inspection object S in the inspection mode described later as inspection setting information. Can do. Further, the setting creator can input various information such as conditions for storing measurement results in an inspection mode described later by operating a save option button 494.

  In the setting mode, positioning image data is registered as inspection setting information. By registering the positioning image data, the position and orientation of the inspection object S can be easily and accurately set to the position and orientation of the setting object S in the setting mode when inspecting the inspection object S in the inspection mode described later. It becomes possible to match.

  As described above, the setting creator can set the registration method of the positioning image data by operating the positioning setting button 431 displayed in the side sub-display field 413 of FIG. In the following description, an image based on the positioning image data is referred to as a positioning image.

  For example, the setting creator sets the registration method of the positioning image data so that the texture image data of the setting object S acquired by operating the measurement button 432 in FIG. 9 is registered as the positioning image data. Can do. In this case, for example, the texture image of the setting object S shown in FIG. 9 is the positioning image.

  The setting creator can also set the registration method of positioning image data so that a plurality of positioning image data are registered. When registration of a plurality of positioning image data is started, as shown in FIG. 26, the texture image of the setting object S is displayed in the main display column 411 and the registration button 415 in the side sub-display column 413. And a completion button 417 is displayed.

  The setting creator operates the registration button 415 in a state where the setting object S is in a desired position and posture. Thereby, the obtained texture image data is registered as one positioning image data. Subsequently, after the setting creator re-adjusts the position and orientation of the setting object S by changing the imaging condition or moving the XY stage 10 (the mounting surface of the stage 141). The registration button 415 is operated. Thereby, the newly acquired texture image data is registered as the next positioning image data. By repeating such registration work, a plurality of positioning image data are registered.

  At this time, the positioning image based on the registered positioning image data is sequentially reduced and displayed in the side sub-display field 413 as shown in FIGS. Therefore, the setting creator can easily recognize the plurality of registered positioning image data.

  Here, when one or a plurality of positioning image data is registered, the image capturing conditions for acquiring each positioning image data are associated with the positioning image data and stored in FIG. Stored in device 240. Further, when a plurality of positioning image data are registered, the amount of movement in the X, Y, and Z directions of the XY stage 10 that is moved by the setting creator at the time of registration is determined by the plurality of positioning image data. Is stored in the storage device 240 in a state associated with.

  For example, in the state where the light receiving unit 120 is set to a low magnification, as shown in FIG. 26, texture image data indicating the entire setting object S is acquired, and the acquired texture image data is the first positioning. Registered as image data. At this time, the imaging condition including the magnification of the light receiving unit 120 at the time of registration is stored in the storage device 240 in a state associated with the first positioning image data.

  Next, the setting creator moves the XY stage 10 (the mounting surface of the stage 141) in the X direction and the Y direction so that one corner of the setting object S is displayed in the center of the texture image. Move. Thereafter, the setting creator changes the magnification of the light receiving unit 120 from a low magnification to a high magnification. Thereby, as shown in FIG. 27, texture image data indicating an image in which one corner of the setting object S is enlarged is acquired. In this state, the acquired texture image data is registered as second positioning image data. At this time, the imaging condition including the magnification of the light receiving unit 120 at the time of registration is stored in the storage device 240 in a state associated with the second positioning image data. Further, the movement amount of the XY stage 10 from the acquisition of the first positioning image data to the acquisition of the second positioning image data is stored in a state in which the movement amount is associated with the positioning image data. Stored in device 240.

  When the desired number of positioning image data is registered, the setting creator operates the completion button 417. Thereby, the display part 400 returns to the display state of FIG.

(5-3) Details of Inspection Mode When the inspection operator operates the inspection execution button 602 in FIG. 8, the CPU 210 in FIG. 1 operates in the inspection mode. In the inspection mode, the inspection operator inspects the inspection object S based on the inspection setting information generated by the setting creator.

  FIG. 28 to FIG. 34 are diagrams for explaining an example of use of the image inspection apparatus 500 in the inspection mode. When the examination execution button 602 in FIG. 8 is operated, as shown in FIG. 28, a main display column 411, an upper sub display column 412 and a side sub display column 413 are displayed on the display unit 400.

  In the example of FIG. 28, a texture image indicating the placement surface of the stage 141 is displayed in the main display field 411. In the upper sub display field 412, for example, a plurality of pull-down menus for adjusting a plurality of types of imaging conditions are displayed.

  In the side sub display column 413, an inspection setting file selection unit 511 and a measurement button 513 are displayed. The inspection setting file selection unit 511 includes a pull-down menu, for example, and is configured to be able to select any one of one or a plurality of inspection setting files stored in advance in the storage device 240 of FIG. 1 in the setting mode.

  The inspection operator operates the inspection setting file selection unit 511 to select a desired inspection setting file. Thereby, the inspection setting information of the selected inspection setting file is read out. In this example, it is assumed that the inspection setting information generated by the procedure shown in FIGS. 9 to 25 is read in the setting mode.

  When there is only one positioning image data included in the inspection setting information, as shown in FIG. 29, the positioning image based on the positioning image data is mainly displayed in a semi-transparent state so as to overlap the texture image displayed in real time. It is displayed in the display column 411. At this time, the imaging condition associated with the positioning image data is read out. Thereby, the imaging conditions such as the magnification of the light receiving unit 120 are adjusted to the imaging conditions corresponding to the read positioning image data.

  In this state, the inspection operator places the inspection object S on the stage 141. When the inspection object S enters the imaging region of the light receiving unit 120, as shown in FIG. 30, the main display column 411 contains the positioning image of the setting object S and the latest texture image of the inspection object S. Displayed at the same time.

  As shown in FIG. 31, the inspection operator visually recognizes the main display field 411 so that the setting object S portion in the positioning image and the inspection object S portion in the texture image are in almost all areas. The position and posture of the inspection object S are adjusted so as to overlap each other. Thereby, the position and orientation of the inspection object S coincide with or approach the position and orientation of the setting object S when the positioning image is generated in the setting mode.

  When the positioning image is displayed in the main display field 411, the degree of matching between the positioning image data and the latest texture image data is calculated as the matching degree in the CPU 210 of FIG. The degree of coincidence increases as the overlapping area of the portion of the setting object S in the positioning image and the portion of the inspection object S in the texture image increases, and decreases as the overlapping area decreases.

  In the present embodiment, a predetermined threshold is set for the degree of coincidence. The threshold value is determined in consideration of the error range of the position and orientation of the inspection object S that is allowed in order to obtain a certain level of inspection accuracy.

  As shown in FIGS. 29 to 31, a coincidence indicator 512 is displayed in the side sub display column 413. In the coincidence indicator 512, the calculated coincidence is represented by a bar graph, and the threshold value is represented by a predetermined scale. Thereby, the inspection worker visually recognizes the positioning image of the setting object S and the texture image of the inspection object S, and based on the coincidence degree displayed by the coincidence degree indicator 512, the inspection object S on the stage 141. Can be adjusted easily and accurately.

  The inspection operator operates the measurement button 513 when the adjustment of the position and orientation of the inspection object S is completed. Thereby, based on the read inspection setting information, the measurement target portion of the inspection object S is measured, and the inspection object S is inspected.

  Specifically, texture image data and height image data for measuring the dimensions of the measurement target portion of the inspection object S on the stage 141 are first acquired. At this time, the acquired texture image data and height image data are stored in the storage device 240 in a state of being associated with each pixel. Thereafter, image data corresponding to the reference image data read out as the inspection setting information is registered as alignment image data. For example, when the reference image data is texture image data, the texture image data of the inspection object S is registered as alignment image data. When the reference image data is height image data, the height image data of the inspection object S is registered as alignment image data. Thereafter, the texture image data and the height image data of the inspection object S are aligned by aligning the alignment image data with the reference image data by pattern matching.

  Next, when the inspection setting information includes information on the characteristic part for detailed alignment, the part of the image data of the inspection object S corresponding to the registered characteristic part is detected. Further, the texture image data and the height image data of the inspection object S are aligned in more detail so that the detected part matches the characteristic part of the registered image data of the setting object S.

  Subsequently, when the reference plane information is included in the inspection setting information, the height image data of one or more areas corresponding to one or more rectangular areas designated for registering the reference plane is extracted. Is done. A reference plane is calculated and registered based on the extracted height image data. Thereafter, the height image data acquired for the inspection object S is corrected so that the position of each part of the surface of the inspection object S represents a distance from the reference surface in a direction orthogonal to the registered reference surface. The In this case, according to the corrected height data, the position of each part of the surface of the inspection object S from the reference plane can be easily confirmed.

  When the alignment of the texture image data and the height image data for the inspection target S is completed, the dimension of the measurement target portion of the inspection target S is measured according to the measurement procedure executed in the setting mode.

  When the measurement is completed, it is determined whether or not the measurement result for each measurement target portion is within a range (tolerance) between the upper limit value and the lower limit value set in the setting mode. As a result, when the measurement results for all the measurement target portions are within the range between the set upper limit value and lower limit value, the inspection object S is determined to be non-defective. On the other hand, when the measurement result of at least one measurement target part among the one or more measurement target parts is not within the range (tolerance) between the set upper limit value and lower limit value, the inspection object S is It is determined that the product is defective.

  In some cases, measurement results may not be obtained for some or all of the measurement target portions due to the influence of an erroneous operation of the image inspection apparatus 500, an erroneous setting of the image inspection apparatus 500, or disturbance. In this case, the CPU 210 in FIG. 1 may determine that the inspection of the inspection object S has failed.

  When the above-described series of processing is completed, as shown in FIG. 32, for example, a list of texture images, height images, and inspection results of the inspection object S is displayed on the display unit 400. In addition, a data file including texture image data, height image data, composite image data, dimensions of each measurement target portion and inspection results is stored in the storage device 240 as an inspection result file. Thereafter, the inspection operator operates the close button 514 in FIG. Thereby, the display part 400 returns to the display state of FIG.

  In the list of inspection results, “OK” may be displayed as the inspection result when it is determined that the inspection object S is a non-defective product. Further, “NG” may be displayed as an inspection result when it is determined that the inspection object S is a defective product. When it is determined that the inspection of the inspection object S has failed, “Fail” may be displayed as the inspection result. Furthermore, in the list of inspection results, a determination result indicating whether or not the measurement result is within the range between the upper limit value and the lower limit value may be displayed for each inspection target portion.

  Here, a case where a plurality of registered image data registered as shown in FIGS. 26 and 27 is included in the inspection setting information read in the inspection mode will be described. In this case, when the inspection setting information is read, as shown in FIG. 33, the positioning image based on the first registered positioning image data is displayed in the main display column 411 in a semi-transparent state. Further, a next button 515 is displayed in the side sub display column 413.

  In the example of FIG. 33, the entire positioning image of the setting object S acquired at a low magnification is displayed as the first positioning image. At this time, the imaging condition such as the magnification of the light receiving unit 120 is adjusted to the imaging condition corresponding to the first positioning image data.

  The inspection operator places the inspection object S on the stage 141, visually recognizes the positioning image of the setting object S and the texture image of the inspection object S, and based on the degree of coincidence displayed by the coincidence indicator. The position and posture of the inspection object S are adjusted.

  Thereafter, the inspection operator operates the next button 515. As a result, as shown in FIG. 34, the positioning image based on the second registered positioning image data is displayed in the main display column 411 in a translucent state. When the next positioning data (third and subsequent positioning image data) does not exist, the next button 515 in FIG. 33 is not displayed in the side sub display column 413.

  In the example of FIG. 34, a positioning image indicating one corner of the setting object S acquired at a high magnification is displayed as the second positioning image. At this time, the imaging conditions such as the magnification of the light receiving unit 120 are adjusted to the imaging conditions corresponding to the second positioning image data. Further, the XY stage 10 is moved by the stored movement amount so as to correspond to the first and second positioning image data. Thereby, in the main display column 411, the latest texture image showing one corner of the inspection object S is displayed in real time.

  In this case, since the inspection object S is positioned almost accurately based on the first positioning image, when the second positioning image is displayed, the stage 141 is finely adjusted to make the inspection object S more accurate. Positioning can be performed in a short time.

  After the inspection result file is stored in the storage device 240 of FIG. 1 in the inspection mode, the setting creator performs statistical analysis of the inspection results executed in the past by operating the statistical analysis button 603 of FIG. Can do. In the statistical analysis, for example, as an analysis result of the inspection object S that has been inspected in the past, the inspection setting information, the number of inspection objects S that have been inspected, the sum of the inspection positions, and the inspection are effectively performed. The number of measurement target portions and the number of inspection objects S determined to be good can be displayed on the display unit 400.

  Further, the setting creator can print out desired information from a desired inspection result file using the printing apparatus by operating the statistical analysis button 603 in FIG. At this time, if the inspection result file contains information such as “lot number”, “product name”, and “delivery destination” of the inspection object S, a report of the inspection result should be prepared easily and in a short time. Can do.

  Note that the setting creator can specify a desired inspection setting file from one or a plurality of inspection setting files stored in the storage device 240 by operating the setting edit button 604 in FIG. Further, the inspection setting information of the designated inspection setting file can be edited, and the edited inspection setting file can be stored in the storage device 240 again. For example, the setting creator can select a desired inspection setting file and change the positioning image data to other positioning image data in the inspection setting information of the inspection setting file.

(5-4) Examination setting combining function The setting creator operates the setting edit button 604 in FIG. 8 to combine a plurality of examination setting files in addition to editing the examination setting file, thereby creating a new examination setting file. Can also be generated. This function is called an inspection setting combination function.

  The inspection setting combination function will be described together with a specific use example. FIG. 35 is a diagram illustrating an example of the case where there are a plurality of measurement target portions for one setting target S. FIG. In the example of FIG. 35, the first measurement target part tp1, the second measurement target part tp2, the third measurement target part tp3, and the fourth measurement target part are located in the vicinity of the four corners of the setting target S that is a semiconductor package. Each tp4 exists.

  Here, when the magnification of the light receiving unit 120 is set to a high magnification in order to perform inspection with higher accuracy for the first to fourth measurement target portions tp1 to tp4, the entire setting target S is removed from the light receiving unit 120. It cannot fit within the imaging range. Therefore, the setting creator generates individual examination setting information for each of the first to fourth measurement target portions tp1 to tp4. In this case, a plurality of portions each including the first to fourth measurement target portions tp1 to tp4 are imaged by the high-magnification light receiving unit 120. In FIG. 35, the imaging range by the high-magnification light receiving unit 120 is indicated by a one-dot chain line for each measurement target portion.

  When individual inspection setting information is generated for each of the first to fourth measurement target portions tp1 to tp4, four inspection setting files respectively corresponding to the first to fourth measurement target portions tp1 to tp4 are stored in the storage device 240. Is remembered. In the following description, the file name of the inspection setting file corresponding to the first measurement target part tp1 is referred to as the first measurement target part file, and the file name of the inspection setting file corresponding to the second measurement target part tp2 is the first. 2 is called a measurement target partial file. The file name of the inspection setting file corresponding to the third measurement target part tp3 is referred to as a third measurement target part file, and the file name of the inspection setting file corresponding to the fourth measurement target part tp4 is the fourth measurement. This is called the target partial file.

  When the first to fourth measurement target partial files are stored in the storage device 240, the setting creator combines the first to fourth measurement target partial files using the inspection setting combining function to perform a new inspection. A configuration file can be generated.

  36 and 37 are diagrams for explaining an example of use of the examination setting combination function. When using the examination setting combination function, the setting creator first operates the setting edit button 604 in FIG. As a result, as shown in FIG. 36, a join button 521 is displayed together with a file button and a help button in the upper sub display field 412 of the display unit 400.

  Further, the setting creator operates the combination button 521 in FIG. As a result, as shown in FIG. 37, a plurality of input fields 522 for inputting the file names of a plurality of examination setting files to be combined are displayed at the center of the main display field 411. Therefore, the setting creator inputs the file names of a plurality of examination setting files to be combined in each input field 522. In this example, in each of the four input fields 522, “first measurement target partial file”, “second measurement target partial file”, “third measurement target partial file”, and “fourth measurement target partial file” are displayed. Is entered.

  The setting creator operates the add button 523 when he / she wants to add more combination targets. Thereby, a new input field 522 can be displayed on the main display field 411.

  After inputting the desired file name, the setting creator operates the save button 524. Thereby, the inspection setting information of the plurality of input inspection setting files is combined, and a new inspection setting file is generated as a combined inspection setting file. The generated combination inspection setting file is stored in the storage device 240. In this example, the first to fourth measurement target partial files are combined.

  Note that the measurement manager operates the process information button 525 displayed in the main display field 411 before operating the save button 524, so that the “lot number”, “ Information such as “product name” and “delivery destination” can be entered.

  When the inspection operator selects the combined inspection setting file in the inspection mode, a plurality of pieces of inspection setting information for inspecting the first to fourth measurement target portions are read at a time. Thereafter, the dimensions of the first to fourth measurement target parts are sequentially inspected based on a plurality of pieces of inspection setting information of the first to fourth measurement target part files.

(5-5) Texture Image Data and Height Image Data Linking Function In the setting mode, the texture image data and height image data of the setting object S can be acquired while moving the XY stage 10. . Even in the inspection mode, the texture image data and the height image data of the inspection object S can be acquired while moving the XY stage 10.

  In this case, the texture image data and height image data generated before the movement of the XY stage 10 and the texture image data and height image data generated after the movement of the XY stage 10 can be linked. . Thereby, connected texture image data in which a plurality of texture image data is connected in each mode is generated. Also, connected height image data in which a plurality of height image data is connected is generated.

  According to the above function, the setting creator can obtain the connected texture image data and the connected height image data corresponding to a range larger than the imaging range of the light receiving unit 120. Accordingly, the setting creator can create one piece of inspection setting information corresponding to a plurality of measurement target portions scattered over a wider range than the imaging range of the light receiving unit 120.

  FIG. 38 is a diagram for describing an example of generation of connected texture image data and connected height image data. 38A to 38C are plan views of the mounting surface of the stage 141 as viewed from above. In each plan view, the imaging range of the light receiving unit 120 is indicated by a dotted line. On the placement surface of the stage 141, a strip-shaped measurement object S is placed so as to extend in the X direction.

  As shown in FIG. 38A, the length of the measuring object S in this example does not fall within the imaging range of the light receiving unit 120. Therefore, in order to image the entire measurement object S, it is necessary to image each part of the measurement object S a plurality of times while moving the XY stage 10 in the X direction.

  In this case, as shown in FIG. 38B, the setting creator first moves the XY stage 10 so that one end of the measurement object S is imaged, and the one end of the measurement object S is imaged. The position of the XY stage 10 can be registered.

  Next, as shown in FIG. 38C, the setting creator moves the XY stage 10 so that the other end of the measurement object S is imaged, and the other end of the measurement object S is moved. The position of the XY stage 10 when imaged can be registered.

  As a result, the movement amount is calculated from the plurality of positions of the registered XY stage 10, and the texture image data between the plurality of positions of the registered XY stage 10 is calculated based on the movement amount. The number of times that the height image data should be acquired (the number of acquisition times) is calculated.

  The number of acquisitions is calculated so that part of the texture image data and height image data acquired at adjacent positions overlap each other. The overlapping portion becomes a margin when connecting adjacent texture image data and height image data. By acquiring the texture image data and the height image data so as to include the overlapping portion, it is possible to connect the adjacent texture image data and the height image data with high accuracy using pattern matching.

  As described above, after the movement range of the XY stage 10 and the number of acquisitions of texture image data and height image data are determined, the measurement object S is imaged a plurality of times while the XY stage 10 is moved. The By connecting a plurality of texture image data and height image data acquired by a plurality of imaging operations, connected texture image data and connected height image data are generated.

  Here, the connected texture image data and the connected height image data include a plurality of texture image data and a plurality of connected height image data over a wide range, respectively. For this reason, the amount of data is larger than that of normal texture image data and height image data.

  Therefore, in the image inspection apparatus 500 of this example, when the connected texture image data and the connected height image data are generated in the setting mode, a selection operation unit for selecting the size of the data amount to be stored from a plurality of candidates Is displayed on the display unit 400. Thereby, the setting creator can select a size of a desired data amount. In this case, pixel data of the connected texture image data and the connected height image data generated so that the data amount is within the selected size is thinned out (binning process), and the thinned connected texture image data and the connected height are obtained. The image data is stored in the storage device 240.

(6) Image inspection processing (6-1) CPU configuration By using the height image data measured by the measurement unit 100, the dimensions of the inspection target portion set in advance for each of the plurality of measurement objects S are measured. can do. Thereby, it becomes possible to inspect a plurality of measuring objects S. On the other hand, in the measurement of height image data, the inspection target portion often includes a portion where accurate measurement is impossible or difficult. The portion where accurate measurement is impossible or difficult is, for example, a portion where a shadow occurs or a portion where multiple reflection of light occurs.

  Therefore, it is necessary to appropriately adjust the measurement conditions including the position and orientation of the measurement object S so that the inspection object part can be measured. However, it is difficult for an unskilled setting creator to appropriately adjust the measurement conditions of the measurement object S. Further, when inspecting a plurality of measurement objects S, it is not easy to eliminate variations in actual inspection object portions of the plurality of measurement objects S.

  Therefore, as described above, the image inspection apparatus 500 is provided with the setting mode and the inspection mode. FIG. 39 is a flowchart showing an image inspection process executed by the CPU 210 of the PC 200. As shown in FIG. 39, in the image inspection process, after the control operation of the CPU 210 in the setting mode is performed (step S100), the control operation of the CPU 210 in the inspection mode is performed (step S200).

  FIG. 40 is a block diagram showing the configuration of the CPU 210. As shown in FIG. As shown in FIG. 40, the CPU 210 includes a registration unit 210A, an acquisition command unit 210B, a display command unit 210C, a measurement unit 210D, a reception unit 210E, a coincidence degree calculation unit 210F, an alignment unit 210G, and a determination unit 210H. When the CPU 210 executes the image inspection program stored in the storage device 240 of FIG. 1, the registration unit 210A, the acquisition command unit 210B, the display command unit 210C, the measurement unit 210D, the reception unit 210E, the coincidence degree calculation unit 210F, the position The functions of the matching unit 210G and the determination unit 210H are realized.

  The registration unit 210A registers various data or information acquired through the measurement unit 100 or the control unit 300 in the storage device 240, thereby registering the data or information. The acquisition command unit 210B gives a command to the measurement unit 100 and the control unit 300 so as to acquire the texture image data or height image data of the measurement object S. The display command unit 210C gives a command to the display unit 400 to display an image or the like based on the texture image data, the height image data, or other image data.

  The measurement unit 210D measures the dimension of the measurement target portion of the measurement target S based on the texture image data or height image data of the measurement target S. The accepting unit 210E accepts input of design values and tolerances of the measurement target portion of the measurement object S. The coincidence calculation unit 210F calculates the coincidence between the registered positioning image data and the acquired texture image data.

  The alignment unit 210G aligns the texture image data and the height image data by aligning the alignment image data with the reference image data by pattern matching. The determination unit 210H determines the quality of the measurement object S based on the dimension measured for the measurement object S and the accepted design value and tolerance.

  Hereinafter, the control operation of the CPU 210 in the setting mode and the inspection mode will be described with reference to FIG. 40 and a flowchart described later.

(6-2) CPU Control Operation in Setting Mode FIGS. 41 to 45 are flowcharts showing the control operation of the CPU 210 in the setting mode. First, the setting creator places the setting object S on the stage 141 and sets appropriate measurement conditions. The measurement conditions include the above imaging conditions. The CPU 210 registers measurement conditions based on the operation of the operation unit 250 by the setting creator (step S101).

  Next, the CPU 210 gives texture image data of the setting object S by giving a command to the measurement unit 100 and the control unit 300 in a state where the setting object S is placed on the stage 141 (step S100). S102). CPU210 gives the instruction | indication to the display part 400, and displays the texture image of the target object S for a setting on the display part 400 based on the acquired texture image data (step S103).

  Subsequently, the CPU 210 determines whether or not to register the acquired texture image data as positioning image data (step S104). In the above specific example, the setting creator registers the texture image data as positioning image data by operating the operation unit 250 when registration of a plurality of positioning image data is set. Whether or not can be instructed to the CPU 210.

  When it is instructed to register the texture image data as positioning image data, the CPU 210 registers the texture image data as positioning image data (step S105). On the other hand, when it is not instructed to register the texture image data as positioning image data, the CPU 210 returns to the process of step S102. Until the positioning image data is registered, the processes of steps S102 to S104 are repeated.

  After step S105, the CPU 210 determines whether or not to add positioning image data (step S106). The setting creator can instruct the CPU 210 whether or not to add positioning image data by operating the operation unit 250. When it is instructed to add the positioning image data, the CPU 210 returns to the process of step S102. The processes in steps S102 to S106 are repeated until all the positioning image data is added.

  In the above specific example, when it is set to register only one piece of positioning image data, the processing from step S104 to step S106 described later is omitted, and acquired in the processing of step S107 described later. Texture image data is registered as positioning image data.

  After all the positioning image data is added, the CPU 210 gives a command to the measurement unit 100 and the control unit 300 in response to the operation of the operation unit 250 by the setting creator, whereby the texture image of the setting object S is obtained. Data and height image data are sequentially acquired (step S107). CPU210 gives the instruction | indication to the display part 400, and displays the texture image and height image of the setting object S on the display part 400 based on the acquired texture image data and height image data (step S108).

  Next, the CPU 210 determines whether or not the acquired texture image data is selected as the reference image data (step S109). By operating the operation unit 250, the setting creator can instruct the CPU 210 to select texture image data as reference image data or height image data as reference image data. In the above specific example, the setting creator operates the image selection operation unit 461 in FIGS. 13 and 14 using the operation unit 250 to select image data.

  Here, a texture image and a height image are displayed on the display unit 400. Therefore, the setting creator can determine which of the texture image data and the height image data should be selected as the reference image data while visually recognizing the texture image and the height image.

  When it is instructed to select the texture image data as the reference image data, the CPU 210 selects the texture image data as the reference image data (step S110). On the other hand, when it is not instructed to select the texture image data as the reference image data and the height image data is instructed to be selected as the reference image data, the CPU 210 selects the height image data as the reference image data. (Step S111).

  Next, the CPU 210 determines whether or not a rectangular area is designated as a search area in the selected reference image data (step S112). By operating the operation unit 250, the setting creator can instruct the CPU 210 to designate a rectangular area as a search area or an entire area as a search area. Further, when specifying a rectangular area, the setting creator can specify the position and size of the rectangular area by operating the operation unit 250.

  When instructed to designate a rectangular area as the search area, the CPU 210 registers the designated rectangular area as the search area (step S113). On the other hand, if it is not instructed to specify a rectangular area as a search area but an instruction to specify all areas, the CPU 210 registers all areas as search areas (step S114).

  Subsequently, the CPU 210 determines whether or not a search angle is designated in the selected reference image data (step S115). The setting creator can operate the operation unit 250 to instruct the CPU 210 to specify the search angle or not limit the search angle. When specifying the search angle, the setting creator can specify the size of the search angle by operating the operation unit 250.

  When instructed to specify the search angle, the CPU 210 registers the specified angle as the search angle (step S116). On the other hand, if no instruction is given to specify the search angle and no instruction is given to limit the search angle, the CPU 210 registers the search angle without limitation (step S117).

  Thereafter, the CPU 210 determines whether or not to register the reference image data with the contents set in steps S109 to S117 (step S118). The setting creator can instruct the CPU 210 whether or not to register the reference image data by operating the operation unit 250. When instructed to register reference image data, the CPU 210 registers reference image data (step S119). On the other hand, if it is not instructed to register the reference image data, the CPU 210 proceeds to the process of step S122.

  When the reference image data is registered, the CPU 210 determines whether or not a characteristic portion of the acquired texture image data or height image data is designated (step S120). The setting creator can specify any characteristic portion of the acquired texture image data or height image data to the CPU 210 by operating the operation unit 250. When the feature portion of the acquired texture image data or height image data is designated, the CPU 210 registers the feature portion of the designated image data (step S121). On the other hand, when the characteristic part of the reference image data is not designated, the CPU 210 proceeds to the process of step S122.

  Next, the CPU 210 determines whether or not the reference plane of the height image data of the setting object S has been designated (step S122). The setting creator can designate the reference plane of the height image data of the setting object S to the CPU 210 by operating the operation unit 250. When the reference plane is specified, the CPU 210 registers the specified reference plane of the height image data of the setting object S (step S123). On the other hand, when the reference plane is not designated, the CPU 210 proceeds to the process of step S125.

  When the reference plane is registered, the CPU 210 corrects the height image data of the setting object S based on the registered reference plane (step S124). Specifically, the CPU 210 corrects the acquired height image data so that the position of each part of the surface of the setting object S represents the distance from the registered reference surface in the height direction.

  Next, the CPU 210 determines whether or not the measurement target portion of the setting target S has been designated (step S125). The setting creator can designate the measurement target portion of the setting object S to the CPU 210 by operating the operation unit 250. When the measurement target part is designated, the CPU 210 registers the measurement target part of the designated setting object S (step S126). On the other hand, when the measurement target portion is not designated, the CPU 210 proceeds to the process of step S130. When the measurement target portion is registered, the CPU 210 measures the dimension of the registered measurement target portion based on the acquired texture image data or height image data (step S127).

  Subsequently, the CPU 210 determines whether or not the design value and tolerance of the measurement target portion of the setting object S have been input (step S128). Note that one of the design value and the tolerance may be omitted. The setting creator can input the design value and tolerance of the measurement target portion of the setting object S to the CPU 210 by operating the operation unit 250. When the design value and the tolerance are input, the CPU 210 registers the design value and the tolerance of the measurement target portion of the input setting object S (step S129). On the other hand, when the design value and the tolerance are not input, the CPU 210 proceeds to the process of step S130.

  Thereafter, the CPU 210 determines whether or not the end of the setting mode has been instructed (step S130). The setting creator can instruct the CPU 210 to end the setting mode by operating the operation unit 250. In the above specific example, the setting creator is instructed to end the setting mode by operating the save button 441 in FIG. At this time, in response to the instruction to end the setting mode, the CPU 210 stores, in the storage device 240, a data file of inspection setting information including information registered by the processes in steps S101 to S129 as an inspection setting file.

  When the end of the setting mode is not instructed, the CPU 210 returns to the process of step S109. Thereby, the process of steps S109 to S130 is repeated until the end of the setting mode is instructed. On the other hand, when the end of the setting mode is instructed, the CPU 210 ends the setting mode.

(6-3) CPU Control Operation in Inspection Mode FIGS. 46 and 47 are flowcharts showing the control operation of the CPU 210 in the inspection mode. 46 and 47 are executed based on the inspection setting information of the designated inspection setting file when the inspection operator designates an arbitrary inspection setting file.

  First, the CPU 210 gives a command to the display unit 400 to display a positioning image on the display unit 400 based on one positioning image data among one or more registered positioning image data (step S201). ). The inspection operator places the inspection object S on the stage 141.

  The CPU 210 obtains the texture image data of the inspection object S by giving a command to the measurement unit 100 and the control unit 300 to acquire the texture image data in a state where the inspection object S is placed on the stage 141. (Step S202). CPU210 gives the instruction | indication to the display part 400, and displays the texture image of the test target S on the display part 400 based on the acquired texture image data (step S203).

  Here, the display unit 400 displays the positioning image and the texture image of the inspection object S. Therefore, the inspection operator can adjust the position and posture of the inspection object S placed on the stage 141 while visually recognizing the positioning image and the texture image of the inspection object S. Thereby, the inspection operator can bring the position and posture of the inspection object S closer to the position and posture of the setting object S, respectively.

  Further, the CPU 210 calculates the degree of coincidence between the positioning image data and the texture image data of the inspection object S (step S204). CPU210 gives the instruction | indication to the display part 400, and displays the threshold value about the calculated coincidence degree and a coincidence degree on the display part 400 (step S205). In the above specific example, the coincidence degree and the threshold value are displayed by the coincidence degree indicator 512 of FIGS. The inspection worker visually recognizes the degree of coincidence displayed on the display unit 400, and thereby sets the position and orientation of the inspection target S when placing the inspection target S on the stage 141 and the position of the setting target S and Each can be easily approached. In addition, the inspection operator visually recognizes the threshold value for the degree of coincidence displayed on the display unit 400, thereby bringing the position and posture of the inspection target S closer to the position and posture of the setting target S, respectively. Tolerance can be recognized.

  Subsequently, the CPU 210 determines whether display of another positioning image is instructed (step S206). The inspection operator can instruct the CPU 210 whether or not to display another positioning image by operating the operation unit 250. When display of another positioning image is instructed, the CPU 210 returns to the process of step S201.

  When display of other positioning images is not instructed, the CPU 210 determines whether or not positioning images based on all registered positioning image data are displayed on the display unit 400 (step S207). When all the positioning images are not displayed, the CPU 210 returns to the process of step S200. On the other hand, when all the positioning images are displayed, the CPU 210 determines whether acquisition of image data of the inspection object S has been instructed (step S208). The setting creator can instruct the CPU 210 to acquire the image data of the inspection object S by operating the operation unit 250. If acquisition of image data of the inspection target S has not been instructed, the CPU 210 returns to the process of step S201.

  According to the above flow, when a plurality of positioning images are registered, the processes of steps S201 to S207 are repeated until all the positioning images are displayed. Thereby, the inspection worker can adjust the position and posture of the inspection object S step by step using a plurality of positioning images.

  When the acquisition of the image data of the inspection object S is instructed, the CPU 210 sequentially acquires the texture image data and the height image data of the inspection object S by giving instructions to the measurement unit 100 and the control unit 300 (step S100). S209). Next, the CPU 210 registers image data corresponding to the registered reference image data among the acquired texture image data and height image data of the inspection object S as registration image data (step S210).

  Subsequently, the CPU 210 aligns the texture image data and the height image data of the inspection object S based on the set alignment image data (step S211). Specifically, the CPU 210 aligns the texture image data and the height image data of the inspection object S by aligning the alignment data with the reference image data by pattern matching. When a search area or search angle is set, pattern matching is performed within the set search area or search angle.

  Thereafter, the CPU 210 aligns the texture image data and the height image data of the inspection object S in detail based on the characteristic part of the registered image data (step S212). If the characteristic portion of the reference image is not registered in the setting mode, the process of step S211 is omitted. Next, the CPU 210 corrects the height image data of the inspection object S based on the registered reference plane (step S213). If the reference plane is not registered in the setting mode, the process of step S213 is omitted.

  Subsequently, the CPU 210 measures the dimension of the measurement target portion of the inspection target S corresponding to the measurement target portion of the registered setting target S (step S214). Thereafter, the CPU 210 determines pass / fail of the inspection object S based on the dimension measured for the setting object S, the dimension measured for the inspection object S, and the received design value and tolerance (step S215). In the setting mode, when one of the design value and the tolerance is omitted, the CPU 210 measures the dimension measured for the setting object S, the dimension measured for the inspection object S, and the accepted design value and tolerance. The quality of the inspection object S is determined based on the other of them. CPU210 displays the determination result on the display part 400 by giving a command to the display part 400 (step S216). As a result, the CPU 210 ends the inspection mode. At the end of the inspection mode, the CPU 210 stores the data file such as the determination result in the storage device 240 as an inspection result file.

(7) Effects In the image inspection apparatus 500 according to the present embodiment, texture image data and height image data of the setting object S are acquired in the setting mode. One of the acquired texture image data and height image data is selected and registered as reference image data for alignment by the setting creator. Thereafter, the dimension of the measurement target portion of the setting object S is measured. Input of the design value and tolerance of the measurement target portion of the setting object S is accepted.

  In the inspection mode, texture image data and height image data of the inspection object S are acquired. Of the acquired texture image data and height image data, image data corresponding to the registered reference image data is set as image data for alignment. By aligning the alignment data with the reference image data by pattern matching, the alignment of the texture image data and the height image data for the inspection object S is performed.

  Based on the aligned texture image data and height image data, the dimension of the measurement target portion of the inspection target S corresponding to the measurement target portion of the setting target S is measured. The quality of the inspection object S is determined based on the dimension measured for the setting object S, the dimension measured for the inspection object S, and the accepted design value and tolerance. The determined determination result is displayed on the display unit 400.

  As described above, the texture image data and the height image data for the inspection object S acquired in the inspection mode are higher than the texture image data and the height image data for the setting object S acquired in the setting mode. Each is aligned with accuracy. Therefore, the dimension of the measurement target portion of the inspection target S corresponding to the measurement target portion of the setting target S measured in the setting mode can be measured with high accuracy in the inspection mode. Thereby, even if it is a case where an inspection worker is not skilled, the dimension of a desired measurement object part can be measured about a plurality of inspection objects S in inspection mode. As a result, the shape of the inspection object S can be inspected easily and accurately.

(8) Other Embodiments (8-1) In the above embodiment, after the texture image data and height image data of the setting object S are acquired in the setting mode, the image used for registration of the reference image data. Data is selected, but the present invention is not limited to this. The selection of the image data used for registration of the reference image data may be performed before the texture image data and the height image data are acquired. In this case, in the image inspection apparatus 500, only the image data selected when registering the reference image data may be acquired as the reference image data.

  (8-2) In the above embodiment, texture image data and height image data are acquired by operating the measurement buttons 432 and 513, and based on the acquired texture image data and height image data, reference image data, The registration image data and the positioning image data are registered, the image data used to register the feature portion is selected, and the measurement target portion of the measurement object S is measured. However, the present invention is not limited to this.

  Registration processing of reference image data, registration processing of registration image data, registration processing of positioning image data, selection processing of image data used for registering a feature portion, and measurement processing of a measurement target portion of the measurement object S Every time, image data necessary for each process may be acquired.

  For example, when it is already known to register texture image data as reference image data in advance, only the texture image data of the measuring object S may be acquired during the reference image data registration process. Further, when measuring only a dimension having a component in the height direction of the measuring object S, even if only the height image data of the measuring object S is acquired during the measurement processing of the measuring object portion of the measuring object S. Good.

  (8-3) In the above embodiment, the texture image data and the height image data are acquired in order to measure the measurement target portion of the measurement object S, but the present invention is not limited to this. For example, when measuring only a dimension having a component in the height direction of the measurement object S, only height image data may be acquired as image data for measuring the dimension of the measurement target portion.

  (8-4) In the above embodiment, the texture image data and the height image data are generated using the common light receiving unit 120, but the present invention is not limited to this. The texture image data and the height image data may be generated using separate light receiving units. In this case, the image inspection apparatus 500 is provided with a storage unit that stores the texture image data generated by one light receiving unit and the image data generated by the other light receiving unit in association with each other. The storage unit may be provided in one light receiving unit, or may be provided in the other light receiving unit. Alternatively, the storage unit may be realized by the storage device 240 of the PC 200.

  (8-5) In the above embodiment, one of the texture image data and the height image data of the setting object S acquired in the setting mode is selected as reference image data by the setting creator. Is not limited to this. The selection of the image data used as the reference image data may be executed by the CPU 210 according to a predetermined condition instead of being performed based on the operation of the image selection operation unit 461 by the setting creator.

  As a predetermined condition, for example, the use of image data with a large edge detection amount among the acquired texture image data and height image data as reference image data is stored in the storage device 240. The CPU 210 selects image data suitable for alignment according to the conditions stored in the storage device 240. In this case, an unskilled setting creator is prevented from erroneously selecting image data that is not suitable for alignment.

  (8-6) In the above embodiment, the texture image data of the setting object S is used as the positioning image data, but the present invention is not limited to this. The positioning image data may be different from the texture image data used for measuring the dimension of the measurement target portion of the setting object S. For example, the height image data of the setting object S may be used as the positioning image data. Further, texture image data or height image data obtained by imaging an object different from the setting object S may be used as the positioning image data.

  (8-7) In the inspection mode of the above embodiment, a positioning image for causing the inspection operator to adjust the position and orientation of the inspection object S is displayed on the display unit 400 based on the positioning image data. However, the present invention is not limited to this. In the inspection mode, the positioning image may not be displayed on the display unit 400 based on the positioning image data.

  For example, in the inspection mode, the stage 141 may be moved by the stage driving unit 143 based on the positioning image data. In this case, based on the positioning image data and the texture image data of the inspection object S placed on the stage 141, the position and orientation of the inspection object S are close to the position and orientation of the setting object S, respectively. The stage 141 is automatically moved. Therefore, the inspection operator does not need to adjust the position and posture of the inspection object S.

  Alternatively, in the inspection mode, voice guidance or video guidance for causing the inspection operator to adjust the position and posture of the inspection object S may be performed based on the positioning image data. FIG. 48 is a diagram illustrating an example of video guidance based on positioning image data. The pattern generation unit 112 of the light projecting unit 110 can project an image on the stage 141 as a projector using the measurement light. Therefore, as shown in FIG. 48, in the inspection mode, the planar video Sx of the measurement object S may be projected onto the stage 141 based on the positioning image data. The inspection operator can adjust the position and orientation of the inspection object S by placing the measurement object S on the stage 141 so as to overlap the planar image Sx.

  Alternatively, a jig may be provided on the stage 141. FIG. 49 is a diagram showing an example in which a jig for positioning the measuring object S is provided on the stage 141. As shown in FIG. 49, the jig 144 is fixed to the approximate center of the stage 141. The measuring object S can be inserted into the jig 144. In the design mode, the measurement manager inserts the setting object S into the jig 144 with the position and orientation of the setting object S adjusted. In the inspection mode, the inspection operator can adjust the position and orientation of the inspection object S by inserting the inspection object S into the jig 144. In this case, the positioning image data may not be registered in the setting mode.

  (8-8) In the above embodiment, the positioning image is displayed on the main display column 411 in a semi-transparent state in the inspection mode, but the present invention is not limited to this. The positioning image may be displayed in an area different from the display area of the texture image displayed in the main display field 411. For example, the positioning image may be displayed in the side sub display field 413. Even in this case, the inspection operator can adjust the position and orientation of the inspection object S while visually recognizing the positioning image.

  (8-9) In the above embodiment, inspection setting information is generated in the same image inspection apparatus 500 in the setting mode, and the inspection object S is inspected based on the inspection setting information in the inspection mode. The invention is not limited to this. For example, inspection setting information generated in the setting mode in one image inspection apparatus 500 may be stored in the storage device 240 of another image inspection apparatus 500. In this case, in the inspection mode of another image inspection apparatus 500, the inspection object S may be inspected using inspection setting information created by one image inspection apparatus 500.

  (8-10) In the above embodiment, the measurement head 100H is fixed and the stage 141 moves relative to the measurement head 100H. However, the present invention is not limited to this. For example, the stage 141 may be fixed, and the measurement head 100H may be configured to move with respect to the stage 141.

  (8-11) In the above embodiment, the image inspection apparatus 500 generates height image data based on the triangulation method, but the present invention is not limited to this. The image inspection apparatus 500 may generate height image data based on other methods.

  For example, the image inspection apparatus 500 generates image data while changing the distance between the measurement object S and the light receiving unit 120, and synthesizes the image data of a portion focused on the measurement object S to obtain a height image. Data may be generated. In this case, the measurement head 100H may be configured by a single focus type optical system, may be configured by a confocal type optical system, or may be configured by an optical interference type optical system.

(9) Correspondence between each constituent element of claim and each part of the embodiment Hereinafter, an example of correspondence between each constituent element of the claim and each constituent element of the embodiment will be described. It is not limited to examples.

  In the above embodiment, the measurement object S, the setting object S, and the inspection object S are examples of the measurement object, the stage 141 is an example of the stage, the light receiving unit 120, the illumination light output unit 130, The control board 310 and the illumination light source 320 are examples of first image data acquisition means. The light projecting unit 110, the light receiving unit 120, and the control board 310 are examples of the second image data acquisition unit, the CPU 210 is an example of the control unit and the processing device, the display unit 400 is an example of the display unit, and the display unit 400 and the operation unit 250 are examples of the first to fourth operation units, the display unit 400 is an example of the guidance unit, the storage device 240 is an example of the storage unit, and the image inspection apparatus 500 is the image inspection apparatus. It is an example.

  The acquisition command unit 210B is an example of first to eighth acquisition command units, the registration unit 210A is an example of first to fourth registration units and registration image data registration units, and the measurement unit 210D is It is an example of the 1st and 2nd measurement means, and the reception part 210E is an example of a reception means. The display command unit 210C is an example of first to fifth display command units, the alignment unit 210G is an example of first and second alignment units, the determination unit 210H is an example of determination unit, and matches The degree calculation unit 210F is an example of a coincidence degree calculation unit.

  As each constituent element in the claims, various other constituent elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used for inspection of dimensions of various objects.

DESCRIPTION OF SYMBOLS 10 XY stage 20 Z stage 30 (theta) stage 100 Measurement part 100H Measurement head 110,110A, 110B Light projection part 111 Measurement light source 112 Pattern generation part 113,114,115,122,123 Lens 120 Light reception part 121 Camera 121a Image sensor DESCRIPTION OF SYMBOLS 130 Illumination light output part 140 Stage apparatus 141 Stage 142 Stage operation part 143 Stage drive part 144 Jig 150,310 Control board 200 PC
210 CPU
210A Registration unit 210B Acquisition command unit 210C Display command unit 210D Measurement unit 210E Acceptance unit 210F Matching degree calculation unit 210G Positioning unit 210H Judgment unit 220 ROM
230 RAM
240 Storage Device 250 Operation Unit 300 Control Unit 320 Illumination Light Source 400 Display Unit 411 Main Display Field 412 Upper Sub Display Field 413 Side Sub Display Field 415 Registration Button 417 Complete Button 419 Display Image Switch Button 421 Stage Operation Button 431 Positioning Setting Button 432 , 513 Measurement button 433 Image selection button 434 Analysis button 435, 484 Back button 441, 524 Save button 442 Reference plane setting button 443 Alignment button 444 Profile button 451 Off button 452 On button 453 Detailed alignment setting button 454 Test button 455 OK Button 456 Cancel button 461,473 Image selection operation part 462 Rectangular area setting button 463 All area setting button 464 Rotation range setting operation part 471 Drawing button 472 Edge detection button 474 Detailed alignment method button 481 Specimen image selection operation unit 482 Display image selection operation unit 483 Test execution button 491 Dimension measurement method button 492, 522 Input field 493, 525 Process information button 494 Save option button 500 Image inspection device 511 Inspection setting file selection part 512 Consistency indicator 514 Close button 515 Next button 521 Join button 523 Add button 601 Inspection setting button 602 Inspection execution button 603 Statistical analysis button 604 Setting edit button HE, TE Contour HI Height image S Inspection object Object, Setting object, Measurement object Sx Plane image TI Texture image s10 Thin part s11, s21, s31 Upper surface s12, s22 Lower surface s20 Thick part s30 Cylindrical part tp1 First meter Measurement target part tp2 Second measurement target part tp3 Third measurement target part tp4 Fourth measurement target part

Claims (15)

A stage on which the measurement object is placed;
First image data acquisition means for acquiring first image data representing a texture image of the surface of the measurement object placed on the stage;
Second image data acquisition means for acquiring second image data representing a height image of the surface of the measurement object placed on the stage;
Control means for performing control operations in a setting mode for performing settings for inspection and an inspection mode for performing inspection;
Display means,
The control means includes
In the setting mode, the second image data for measuring the dimension of the measurement target portion of the setting target object is acquired in a state where the setting target object is placed on the stage as the measurement target object. First acquisition command means for giving a command to the second image data acquisition means;
In the setting mode, image data for alignment that is selected or will be selected from the first and second image data is acquired in a state where the setting object is placed on the stage. Second acquisition command means for giving a command to the first or second image data acquisition means,
In the setting mode, first registration means for registering image data acquired by the command of the second acquisition command means as reference image data for alignment;
In the setting mode, a first dimension for measuring a dimension having a component in the height direction of the measurement target portion of the setting target object based on the second image data acquired by the command of the first acquisition command means. Measuring means of
In the setting mode, receiving means for receiving an input of at least one value among a design value and a tolerance of the measurement target portion of the setting object;
In the inspection mode, the second image data for measuring the dimension of the measurement target portion of the inspection object is obtained in a state where the inspection object is placed on the stage as the measurement object. Third acquisition command means for giving a command to the second image data acquisition means;
In the inspection mode, the image data for alignment corresponding to the reference image data registered by the first registration means is acquired in a state where the inspection object is placed on the stage. Fourth acquisition command means for giving a command to the first or second image data acquisition means;
In the inspection mode, registration image data registration means for registering the image data acquired by the command of the fourth acquisition command means as registration image data;
In the inspection mode, alignment of the second image data acquired by the command of the third acquisition command means is performed by aligning the image data for alignment and the reference image data by pattern matching. First alignment means;
In the inspection mode, based on the second image data aligned by the first alignment means, the height direction of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target A second measuring means for measuring a dimension having a component in
In the inspection mode, at least one of the dimension measured by the first measuring unit, the dimension measured by the second measuring unit, and the design value and tolerance received by the receiving unit. Determining means for determining the quality of the inspection object based on;
An image inspection apparatus comprising: a first display command unit that gives a command to the display unit to display a determination result determined by the determination unit in the inspection mode. A first operation means operated to select any one of the first and second image data;
The image inspection apparatus according to claim 1, wherein the first registration unit registers image data selected by the operation of the first operation unit as the reference image data. A second operation means operated to designate an arbitrary characteristic portion from the first or second image data;
The control means includes
In the setting mode, the first or second image data is acquired for designating a characteristic portion by the second operation means in a state where the setting object is placed on the stage. Fifth acquisition command means for giving a command to the first or second image data acquisition means;
In the setting mode, a second registration unit that registers the feature portion designated by the operation of the second operation unit from the image data acquired by the command of the fifth acquisition command unit;
In the inspection mode, in a state where the inspection object is placed on the stage, the first or second image data corresponding to the image data acquired by the command of the fifth acquisition command unit is acquired. And sixth acquisition command means for giving a command to the image data acquisition means of
In the inspection mode, the first alignment unit aligns the image data for alignment and the reference image data by pattern matching, and then the feature portion registered by the second registration unit The image inspection apparatus according to claim 1, wherein the image data acquired by the command of the third acquisition command unit is aligned based on the image data acquired by the command of the sixth acquisition command unit. The said 1st and said 2nd image data acquisition means is arrange | positioned so that the 1st and 2nd image data may each be acquired from on a common axis | shaft, respectively. Image inspection device. In the second image data acquired by the second image data acquisition means, further comprising third operating means operated to designate an arbitrary reference plane,
The control means further includes third registration means for registering the reference plane designated by the operation of the third operation means in the setting mode,
The second image data acquisition unit represents a distance from the reference plane in a direction orthogonal to the reference plane registered by the third registration unit, with the position of each part of the surface of the measurement object being set. The image inspection apparatus according to claim 1, wherein the acquired second image data is corrected. A fourth operation means operated to specify a search range for pattern matching;
In the inspection mode, the first alignment unit aligns the alignment image data and the reference image data by pattern matching within the search range specified by the operation of the fourth operation unit. The image inspection apparatus according to claim 1, wherein the image inspection apparatus is performed. The control means gives a command to the display means to display at least one of the image based on the first image data and the image based on the second image data in the setting mode. The image inspection apparatus according to claim 1, further comprising a display command unit. Storage means for preliminarily storing first specimen image data representing a texture image of the surface of the measurement object and second specimen image data representing a height image of the surface of the measurement object;
The control means includes
In the setting mode, a second alignment unit that compares reference image data with corresponding sample image data among the first and second sample image data by pattern matching;
The display mode according to any one of claims 1 to 7, further comprising third display command means for giving a command to the display means so as to display a comparison result by the second alignment means in the setting mode. Image inspection equipment. The control means includes
In the setting mode, the first or second image data acquisition unit is configured to acquire the first or second image data for positioning in a state where the setting object is placed on the stage. A seventh acquisition command means for giving a command;
Fourth registration means for registering positioning image data indicating the position and orientation of the setting object based on the image data acquired by the command of the seventh acquisition command means in the setting mode;
In the inspection mode, the position and orientation of the inspection object are brought close to the position and orientation of the setting object indicated by the positioning image based on the positioning image data registered by the fourth registration unit. The image inspection apparatus according to claim 1, further comprising guidance means for performing guidance. The control means includes
In the setting mode, the first or second image data acquisition unit is configured to acquire the first or second image data for positioning in a state where the setting object is placed on the stage. A seventh acquisition command means for giving a command;
Fourth registration means for registering positioning image data indicating the position and orientation of the setting object based on the image data acquired by the command of the seventh acquisition command means in the setting mode;
In the inspection mode, before the instruction by the fourth acquisition instruction means, the first or second image data for positioning is acquired in a state where the inspection object is placed on the stage. And an eighth acquisition command means for giving a command to the first or second image data acquisition means,
In the inspection mode, the display unit displays a positioning image based on the positioning image and displays an image of the inspection object based on image data acquired by a command of the eighth acquisition command unit. The image inspection apparatus according to claim 1, further comprising: a fourth display command unit that gives a command to the camera. The control means includes
In the inspection mode, a degree of coincidence calculating unit that calculates the degree of coincidence between the positioning image data registered by the fourth registration unit and the image data acquired by the command of the eighth acquisition command unit;
The image inspection apparatus according to claim 10, further comprising: a fifth display command unit that gives a command to the display unit so as to display a calculation result by the matching degree calculation unit in the inspection mode. The image inspection apparatus according to claim 11, wherein the fifth display command unit gives a command to the display unit to display information indicating a threshold value for a predetermined degree of coincidence. The positioning image data registered by the fourth registration means is different from the second image data used for measuring the dimension of the measurement target portion of the setting object. The image inspection apparatus according to claim 1. In the setting mode, obtaining a second image data for measuring the dimension of the measurement target portion of the setting object in a state where the setting object is placed on the stage as the measurement object;
In the setting mode, image data for alignment that is selected or will be selected from the first and second image data is acquired in a state where the setting object is placed on the stage. And steps to
Registering the acquired image data for alignment as reference image data for alignment in the setting mode;
In the setting mode, based on the acquired second image data for dimension measurement, measuring a dimension having a component in the height direction of the measurement target portion of the setting object;
In the setting mode, receiving an input of at least one of a design value and a tolerance of the measurement target portion of the setting object;
In the inspection mode, in a state where the inspection object is placed as the measurement object on the stage, obtaining second image data for measuring the dimension of the measurement target portion of the inspection object;
In the inspection mode, with the inspection object placed on the stage, obtaining image data for alignment corresponding to registered reference image data;
In the inspection mode, registering the acquired image data for alignment as alignment image data;
In the inspection mode, aligning the alignment data and the reference image data by pattern matching, thereby aligning the second image data for dimension measurement of the inspection object;
In the inspection mode, based on the aligned second image data, a dimension having a component in the height direction of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target is measured. Steps,
In the inspection mode, based on the dimension measured for the setting object, the dimension measured for the inspection object, and at least one of the received design value and tolerance, the inspection object A step of judging pass / fail;
And a step of displaying the determined determination result on a display means in the inspection mode. An image inspection program executable by a processing device,
In the setting mode, in a state where the setting object is placed on the stage as the measurement object, a process of acquiring second image data for measuring the dimension of the measurement target part of the setting object;
In the setting mode, image data for alignment that is selected or will be selected from the first and second image data is acquired in a state where the setting object is placed on the stage. Processing to
In the setting mode, processing for registering the acquired image data for alignment as reference image data for alignment;
In the setting mode, based on the acquired second image data for dimension measurement, a process of measuring a dimension having a component in the height direction of the measurement target portion of the setting object;
In the setting mode, based on the acquired second image data for dimension measurement, a process of measuring a dimension having a component in the height direction of the measurement target portion of the setting target object;
In the setting mode, a process of receiving an input of at least one of a design value and a tolerance of the measurement target portion of the setting object;
In the inspection mode, in a state where the inspection object is placed on the stage as the measurement object, a process of acquiring second image data for measuring the dimension of the measurement target portion of the inspection object;
In the inspection mode, in a state where the inspection object is placed on the stage, processing for acquiring image data for alignment corresponding to registered reference image data;
In the inspection mode, processing for registering the acquired image data for alignment as alignment image data;
In the inspection mode, by aligning the alignment data and the reference image data by pattern matching, a process of aligning the second image data for dimension measurement of the inspection object;
In the inspection mode, based on the aligned second image data, a dimension having a component in the height direction of the measurement target portion of the inspection target corresponding to the measurement target portion of the setting target is measured. Processing,
In the inspection mode, based on the dimension measured for the setting object, the dimension measured for the inspection object, and at least one of the received design value and tolerance, the inspection object A process for determining pass / fail;
In the inspection mode, processing for displaying the determined determination result on the display means,
An image inspection program to be executed by the processing apparatus.

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