JP2017017177A - Method for producing water soluble polymer for polishing liquid composition - Google Patents
Method for producing water soluble polymer for polishing liquid composition Download PDFInfo
- Publication number
- JP2017017177A JP2017017177A JP2015132368A JP2015132368A JP2017017177A JP 2017017177 A JP2017017177 A JP 2017017177A JP 2015132368 A JP2015132368 A JP 2015132368A JP 2015132368 A JP2015132368 A JP 2015132368A JP 2017017177 A JP2017017177 A JP 2017017177A
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- Prior art keywords
- water
- soluble polymer
- polymer
- polymerization
- molecular weight
- Prior art date
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- 229920003169 water-soluble polymer Polymers 0.000 title claims abstract description 116
- 238000005498 polishing Methods 0.000 title claims abstract description 96
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 76
- 239000000203 mixture Substances 0.000 title claims abstract description 74
- 239000007788 liquid Substances 0.000 title claims abstract description 35
- 229920000642 polymer Polymers 0.000 claims abstract description 119
- 238000000034 method Methods 0.000 claims abstract description 66
- 238000010526 radical polymerization reaction Methods 0.000 claims abstract description 24
- -1 trithiocarbonate compound Chemical class 0.000 claims description 73
- 229910052751 metal Inorganic materials 0.000 claims description 61
- 239000002184 metal Substances 0.000 claims description 61
- 238000006116 polymerization reaction Methods 0.000 claims description 59
- 239000000178 monomer Substances 0.000 claims description 39
- AISZNMCRXZWVAT-UHFFFAOYSA-N 2-ethylsulfanylcarbothioylsulfanyl-2-methylpropanenitrile Chemical compound CCSC(=S)SC(C)(C)C#N AISZNMCRXZWVAT-UHFFFAOYSA-N 0.000 claims description 32
- 239000012987 RAFT agent Substances 0.000 claims description 32
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 25
- 229920002554 vinyl polymer Polymers 0.000 claims description 23
- 150000001875 compounds Chemical class 0.000 claims description 22
- 229910052757 nitrogen Inorganic materials 0.000 claims description 18
- 125000000217 alkyl group Chemical group 0.000 claims description 17
- 125000004432 carbon atom Chemical group C* 0.000 claims description 16
- 239000007870 radical polymerization initiator Substances 0.000 claims description 16
- 239000002243 precursor Substances 0.000 claims description 12
- 239000002904 solvent Substances 0.000 claims description 10
- 239000012989 trithiocarbonate Substances 0.000 claims description 9
- 239000012990 dithiocarbamate Substances 0.000 claims description 6
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 125000002560 nitrile group Chemical group 0.000 claims description 3
- 230000002441 reversible effect Effects 0.000 claims description 3
- 238000012711 chain transfer polymerization Methods 0.000 claims description 2
- 239000012295 chemical reaction liquid Substances 0.000 claims description 2
- 238000003776 cleavage reaction Methods 0.000 claims description 2
- 238000004581 coalescence Methods 0.000 claims description 2
- 230000000415 inactivating effect Effects 0.000 claims description 2
- 238000009826 distribution Methods 0.000 abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 239000010703 silicon Substances 0.000 abstract description 8
- 239000006185 dispersion Substances 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 description 48
- 238000005259 measurement Methods 0.000 description 39
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 33
- 238000005227 gel permeation chromatography Methods 0.000 description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 26
- 238000006243 chemical reaction Methods 0.000 description 23
- 239000006061 abrasive grain Substances 0.000 description 20
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 18
- 239000002994 raw material Substances 0.000 description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 14
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 13
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 12
- 101000720524 Gordonia sp. (strain TY-5) Acetone monooxygenase (methyl acetate-forming) Proteins 0.000 description 11
- 230000008859 change Effects 0.000 description 11
- 239000000243 solution Substances 0.000 description 11
- 238000003786 synthesis reaction Methods 0.000 description 11
- UZKWTJUDCOPSNM-UHFFFAOYSA-N 1-ethenoxybutane Chemical compound CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 10
- 239000000377 silicon dioxide Substances 0.000 description 10
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 9
- QGJOPFRUJISHPQ-UHFFFAOYSA-N Carbon disulfide Chemical compound S=C=S QGJOPFRUJISHPQ-UHFFFAOYSA-N 0.000 description 9
- 239000003513 alkali Substances 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 9
- XLPJNCYCZORXHG-UHFFFAOYSA-N 1-morpholin-4-ylprop-2-en-1-one Chemical compound C=CC(=O)N1CCOCC1 XLPJNCYCZORXHG-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 230000007547 defect Effects 0.000 description 8
- 230000005587 bubbling Effects 0.000 description 7
- 239000005871 repellent Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 239000000080 wetting agent Substances 0.000 description 7
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 238000011109 contamination Methods 0.000 description 6
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 6
- 230000002940 repellent Effects 0.000 description 6
- 238000001226 reprecipitation Methods 0.000 description 6
- 239000012991 xanthate Substances 0.000 description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- 235000011089 carbon dioxide Nutrition 0.000 description 5
- 239000008119 colloidal silica Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- ZOOODBUHSVUZEM-UHFFFAOYSA-N ethoxymethanedithioic acid Chemical compound CCOC(S)=S ZOOODBUHSVUZEM-UHFFFAOYSA-N 0.000 description 5
- 229940088644 n,n-dimethylacrylamide Drugs 0.000 description 5
- YLGYACDQVQQZSW-UHFFFAOYSA-N n,n-dimethylprop-2-enamide Chemical compound CN(C)C(=O)C=C YLGYACDQVQQZSW-UHFFFAOYSA-N 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 238000000746 purification Methods 0.000 description 5
- 238000007086 side reaction Methods 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- HIZCIEIDIFGZSS-UHFFFAOYSA-L trithiocarbonate Chemical compound [S-]C([S-])=S HIZCIEIDIFGZSS-UHFFFAOYSA-L 0.000 description 5
- 238000001291 vacuum drying Methods 0.000 description 5
- 238000005160 1H NMR spectroscopy Methods 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 4
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 4
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 230000001588 bifunctional effect Effects 0.000 description 4
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 238000007517 polishing process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- 239000000908 ammonium hydroxide Substances 0.000 description 3
- IRXKGHBJBSTHCH-UHFFFAOYSA-N benzylsulfanyl(dodecylsulfanyl)methanethione Chemical compound CCCCCCCCCCCCSC(=S)SCC1=CC=CC=C1 IRXKGHBJBSTHCH-UHFFFAOYSA-N 0.000 description 3
- 150000001728 carbonyl compounds Chemical class 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 239000012986 chain transfer agent Substances 0.000 description 3
- 238000010835 comparative analysis Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000010494 dissociation reaction Methods 0.000 description 3
- 230000005593 dissociations Effects 0.000 description 3
- WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical compound CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 description 3
- RSJPMZRDOGFQEH-UHFFFAOYSA-N dodecylsulfanyl-[[4-(dodecylsulfanylcarbothioylsulfanylmethyl)phenyl]methylsulfanyl]methanethione Chemical compound CCCCCCCCCCCCSC(=S)SCC1=CC=C(CSC(=S)SCCCCCCCCCCCC)C=C1 RSJPMZRDOGFQEH-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- XKBGEWXEAPTVCK-UHFFFAOYSA-M methyltrioctylammonium chloride Chemical compound [Cl-].CCCCCCCC[N+](C)(CCCCCCCC)CCCCCCCC XKBGEWXEAPTVCK-UHFFFAOYSA-M 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 235000019260 propionic acid Nutrition 0.000 description 3
- 125000001453 quaternary ammonium group Chemical group 0.000 description 3
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 3
- 150000003254 radicals Chemical class 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000002336 sorption--desorption measurement Methods 0.000 description 3
- 125000003396 thiol group Chemical group [H]S* 0.000 description 3
- PMBXCGGQNSVESQ-UHFFFAOYSA-N 1-Hexanethiol Chemical compound CCCCCCS PMBXCGGQNSVESQ-UHFFFAOYSA-N 0.000 description 2
- AVTLBBWTUPQRAY-UHFFFAOYSA-N 2-(2-cyanobutan-2-yldiazenyl)-2-methylbutanenitrile Chemical compound CCC(C)(C#N)N=NC(C)(CC)C#N AVTLBBWTUPQRAY-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- JHWGFJBTMHEZME-UHFFFAOYSA-N 4-prop-2-enoyloxybutyl prop-2-enoate Chemical compound C=CC(=O)OCCCCOC(=O)C=C JHWGFJBTMHEZME-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 150000003926 acrylamides Chemical class 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000010560 atom transfer radical polymerization reaction Methods 0.000 description 2
- 150000007514 bases Chemical class 0.000 description 2
- 238000010923 batch production Methods 0.000 description 2
- AGCPVOYGTAIJAP-UHFFFAOYSA-N benzyl pyrrole-1-carbodithioate Chemical compound C1=CC=CN1C(=S)SCC1=CC=CC=C1 AGCPVOYGTAIJAP-UHFFFAOYSA-N 0.000 description 2
- 238000012662 bulk polymerization Methods 0.000 description 2
- DKVNPHBNOWQYFE-UHFFFAOYSA-N carbamodithioic acid Chemical compound NC(S)=S DKVNPHBNOWQYFE-UHFFFAOYSA-N 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- DNJIEGIFACGWOD-UHFFFAOYSA-N ethanethiol Chemical compound CCS DNJIEGIFACGWOD-UHFFFAOYSA-N 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- AMXOYNBUYSYVKV-UHFFFAOYSA-M lithium bromide Chemical compound [Li+].[Br-] AMXOYNBUYSYVKV-UHFFFAOYSA-M 0.000 description 2
- 238000010550 living polymerization reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000007344 nucleophilic reaction Methods 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 230000000379 polymerizing effect Effects 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- SUVIGLJNEAMWEG-UHFFFAOYSA-N propane-1-thiol Chemical compound CCCS SUVIGLJNEAMWEG-UHFFFAOYSA-N 0.000 description 2
- KJRCEJOSASVSRA-UHFFFAOYSA-N propane-2-thiol Chemical compound CC(C)S KJRCEJOSASVSRA-UHFFFAOYSA-N 0.000 description 2
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
- CPRMKOQKXYSDML-UHFFFAOYSA-M rubidium hydroxide Chemical compound [OH-].[Rb+] CPRMKOQKXYSDML-UHFFFAOYSA-M 0.000 description 2
- 238000010898 silica gel chromatography Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- CWERGRDVMFNCDR-UHFFFAOYSA-N thioglycolic acid Chemical compound OC(=O)CS CWERGRDVMFNCDR-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- DGVVWUTYPXICAM-UHFFFAOYSA-N β‐Mercaptoethanol Chemical compound OCCS DGVVWUTYPXICAM-UHFFFAOYSA-N 0.000 description 2
- DZSVIVLGBJKQAP-UHFFFAOYSA-N 1-(2-methyl-5-propan-2-ylcyclohex-2-en-1-yl)propan-1-one Chemical compound CCC(=O)C1CC(C(C)C)CC=C1C DZSVIVLGBJKQAP-UHFFFAOYSA-N 0.000 description 1
- RGDYIHSZBVIIND-UHFFFAOYSA-N 1-(dichloromethyl)-4-methylbenzene Chemical group CC1=CC=C(C(Cl)Cl)C=C1 RGDYIHSZBVIIND-UHFFFAOYSA-N 0.000 description 1
- OZCMOJQQLBXBKI-UHFFFAOYSA-N 1-ethenoxy-2-methylpropane Chemical compound CC(C)COC=C OZCMOJQQLBXBKI-UHFFFAOYSA-N 0.000 description 1
- NSOAQRMLVFRWIT-UHFFFAOYSA-N 1-ethenoxydecane Chemical compound CCCCCCCCCCOC=C NSOAQRMLVFRWIT-UHFFFAOYSA-N 0.000 description 1
- YAOJJEJGPZRYJF-UHFFFAOYSA-N 1-ethenoxyhexane Chemical compound CCCCCCOC=C YAOJJEJGPZRYJF-UHFFFAOYSA-N 0.000 description 1
- MIMKRVLJPMYKID-UHFFFAOYSA-N 1-ethenoxynonane Chemical compound CCCCCCCCCOC=C MIMKRVLJPMYKID-UHFFFAOYSA-N 0.000 description 1
- XXCVIFJHBFNFBO-UHFFFAOYSA-N 1-ethenoxyoctane Chemical compound CCCCCCCCOC=C XXCVIFJHBFNFBO-UHFFFAOYSA-N 0.000 description 1
- OVGRCEFMXPHEBL-UHFFFAOYSA-N 1-ethenoxypropane Chemical compound CCCOC=C OVGRCEFMXPHEBL-UHFFFAOYSA-N 0.000 description 1
- JWYVGKFDLWWQJX-UHFFFAOYSA-N 1-ethenylazepan-2-one Chemical compound C=CN1CCCCCC1=O JWYVGKFDLWWQJX-UHFFFAOYSA-N 0.000 description 1
- ZPBJLEZUJMQIHC-UHFFFAOYSA-N 2-(2-bromo-2-methylpropanoyl)oxyethyl 2-bromo-2-methylpropanoate Chemical compound CC(C)(Br)C(=O)OCCOC(=O)C(C)(C)Br ZPBJLEZUJMQIHC-UHFFFAOYSA-N 0.000 description 1
- JAHNSTQSQJOJLO-UHFFFAOYSA-N 2-(3-fluorophenyl)-1h-imidazole Chemical compound FC1=CC=CC(C=2NC=CN=2)=C1 JAHNSTQSQJOJLO-UHFFFAOYSA-N 0.000 description 1
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 1
- UCJMHYXRQZYNNL-UHFFFAOYSA-N 2-Ethyl-1-hexanethiol Chemical compound CCCCC(CC)CS UCJMHYXRQZYNNL-UHFFFAOYSA-N 0.000 description 1
- PFHOSZAOXCYAGJ-UHFFFAOYSA-N 2-[(2-cyano-4-methoxy-4-methylpentan-2-yl)diazenyl]-4-methoxy-2,4-dimethylpentanenitrile Chemical compound COC(C)(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)(C)OC PFHOSZAOXCYAGJ-UHFFFAOYSA-N 0.000 description 1
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 1
- MFGOFGRYDNHJTA-UHFFFAOYSA-N 2-amino-1-(2-fluorophenyl)ethanol Chemical compound NCC(O)C1=CC=CC=C1F MFGOFGRYDNHJTA-UHFFFAOYSA-N 0.000 description 1
- PGYJSURPYAAOMM-UHFFFAOYSA-N 2-ethenoxy-2-methylpropane Chemical compound CC(C)(C)OC=C PGYJSURPYAAOMM-UHFFFAOYSA-N 0.000 description 1
- GNUGVECARVKIPH-UHFFFAOYSA-N 2-ethenoxypropane Chemical compound CC(C)OC=C GNUGVECARVKIPH-UHFFFAOYSA-N 0.000 description 1
- LYPGJGCIPQYQBW-UHFFFAOYSA-N 2-methyl-2-[[2-methyl-1-oxo-1-(prop-2-enylamino)propan-2-yl]diazenyl]-n-prop-2-enylpropanamide Chemical compound C=CCNC(=O)C(C)(C)N=NC(C)(C)C(=O)NCC=C LYPGJGCIPQYQBW-UHFFFAOYSA-N 0.000 description 1
- KSTAKRCVPORMCA-UHFFFAOYSA-N 2-methylheptane-2-thiol Chemical compound CCCCCC(C)(C)S KSTAKRCVPORMCA-UHFFFAOYSA-N 0.000 description 1
- VLZUBQRSSRDWOK-UHFFFAOYSA-N 2-methylhexane-2-thiol Chemical compound CCCCC(C)(C)S VLZUBQRSSRDWOK-UHFFFAOYSA-N 0.000 description 1
- LMDDHLWHSDZGIH-UHFFFAOYSA-N 2-methyltridecane-2-thiol Chemical compound CCCCCCCCCCCC(C)(C)S LMDDHLWHSDZGIH-UHFFFAOYSA-N 0.000 description 1
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Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polymerisation Methods In General (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
本発明は、研磨液組成物用水溶性重合体の製造方法に関し、さらに詳しくは、シリコンウェーハの仕上げ研磨等において、研磨用濡れ剤として用いられる水溶性重合体の製造方法に関する。 The present invention relates to a method for producing a water-soluble polymer for polishing composition, and more particularly to a method for producing a water-soluble polymer used as a polishing wetting agent in finish polishing of a silicon wafer.
パソコン及び携帯電話等の情報通信機器、並びに、デジタルカメラ及びテレビ等のデジタル家電製品では、シリコンウェーハを基板とする半導体デバイスが広く用いられている。近年の半導体チップの高集積化、大容量化に伴い、半導体デバイスの加工精度は微細化の一途をたどっており、デバイス形成前のウェーハに対しては、その平滑性、及びキズ等の欠陥を有さないいわゆる無傷性の要求がますます厳しいものとなっている。 Semiconductor devices using a silicon wafer as a substrate are widely used in information communication devices such as personal computers and mobile phones, and digital home appliances such as digital cameras and televisions. As semiconductor chips have been highly integrated and increased in capacity in recent years, the processing accuracy of semiconductor devices has been continually miniaturized. Wafers prior to device formation have defects such as smoothness and scratches. The so-called intactness requirement that does not exist is becoming increasingly severe.
ウェーハの平滑化技術としては、ＣＭＰ（ケミカルメカニカルポリッシング：化学機械研磨）と呼ばれる研磨プロセスがよく用いられている。ＣＭＰによる平滑化処理では、微細な砥粒と塩基性化合物を含有した研磨液組成物が使用される。この研磨液組成物を研磨パッド表面に供給しながら、圧接した研磨パッドと被研磨物であるウェーハとを相対移動させて表面を研磨する。このとき、砥粒によるメカニカル研磨と、塩基性化合物によるケミカル研磨とが同時に進行することにより、広範囲にわたりウェーハ表面を高精度に平滑化することができる。
表面平滑性の高いウェーハを得るために、一般的には研磨液組成物中に水溶性高分子化合物を加える方法が採用されている。水溶性高分子化合物は、濡れ剤として機能し、砥粒やウェーハの表面に吸着することによって応力緩和効果を発揮し、砥粒や異物によるウェーハへのダメージを低下させる。また、ウェーハ表面に親水性を付与し、砥粒や異物の付着を防止する効果も期待できる。結果として、水溶性高分子化合物を加えない場合に比べてウェーハ表面の高度な平滑化を可能にする。
As a wafer smoothing technique, a polishing process called CMP (Chemical Mechanical Polishing) is often used. In the smoothing treatment by CMP, a polishing liquid composition containing fine abrasive grains and a basic compound is used. While supplying the polishing composition to the surface of the polishing pad, the surface is polished by relatively moving the pressure-contacted polishing pad and the wafer to be polished. At this time, since the mechanical polishing by the abrasive grains and the chemical polishing by the basic compound proceed simultaneously, the wafer surface can be smoothed over a wide range with high accuracy.
In order to obtain a wafer with high surface smoothness, a method of adding a water-soluble polymer compound to the polishing composition is generally employed. The water-soluble polymer compound functions as a wetting agent, exerts a stress relaxation effect by adsorbing on the surface of the abrasive grains and the wafer, and reduces damage to the wafer due to the abrasive grains and foreign substances. Moreover, the effect which gives hydrophilicity to a wafer surface and prevents adhesion of an abrasive grain or a foreign material can also be expected. As a result, the wafer surface can be highly smoothed as compared with the case where no water-soluble polymer compound is added.
このような状況の下、水溶性高分子化合物を含む研磨液組成物が提案されている。特許文献１には、水溶性高分子としてヒドロキシエチルセルロース（ＨＥＣ）を含有する研磨液組成物が開示されている。また、特許文献２には、分子量１０万以上の水溶解性の高分子化合物及び水溶解性の塩類等を含有してなる研磨液組成物が記載されている。特許文献３には、重量平均分子量１００００００以下かつ分子量分布が５．０未満である各種水溶性高分子を含有する研磨液組成物が開示されている。 Under such circumstances, a polishing liquid composition containing a water-soluble polymer compound has been proposed. Patent Document 1 discloses a polishing liquid composition containing hydroxyethyl cellulose (HEC) as a water-soluble polymer. Patent Document 2 describes a polishing liquid composition containing a water-soluble polymer compound having a molecular weight of 100,000 or more and water-soluble salts. Patent Document 3 discloses a polishing liquid composition containing various water-soluble polymers having a weight average molecular weight of 1,000,000 or less and a molecular weight distribution of less than 5.0.
しかし、特許文献１に記載されたＨＥＣは、天然物に由来するポリマーであるため、化学構造の制御が制限され、品質のばらつきが大きいという問題があった。また、ＨＥＣの原料である天然セルロース中にはセルロース由来の水不溶物が含まれており、当該水不溶物自体や、当該水不溶物が核となって凝集したシリカ粒子などが、研磨後の表面欠陥数を増大させることがあった。
また、特許文献２には各種の合成系水溶解性高分子化合物が記載されているものの、構造単位の差異に基づく効果の違いや、分子量分布に関する記載がなく、被研磨体の種類や使用条件によっては十分な研磨性能が得られない虞があった。
一方、特許文献３には、水溶性高分子の分子量分布が研摩後の表面欠陥の低減と相関がある旨が示されており、分子量分布の狭い水溶性高分子を用いることによりＬＰＤ（Ｌｉｇｈｔ Ｐｏｉｎｔ Ｄｅｆｅｃｔ）と呼ばれる表面欠陥の低減が容易となることが記載されている。しかしながら、実施例において具体的に開示された合成水溶性高分子の分子量分布は３程度のものが多く、上述した半導体デバイス精度向上等の背景から、分子量分布のさらなる狭小化への要望は高い。さらに分子量分布の狭い水溶性高分子として、エチレンオキサイドおよびプロピレンオキサイドを構造単位とするものも開示されているが、これらは一般的にはアニオン重合法により製造されるものであり、同法では適用可能なモノマーや製造操作上の制限があった。いずれにしても、分子量分布が十分狭い（重量平均分子量（Ｍｗ）／数平均分子量（Ｍｎ）で表される分散度（ＰＤＩ）が２．０以下）合成高分子の製造方法に関しては、具体的な開示がなされていない。
However, since the HEC described in Patent Document 1 is a polymer derived from a natural product, there is a problem that control of the chemical structure is limited and quality variation is large. In addition, natural cellulose, which is a raw material of HEC, contains water-insoluble matter derived from cellulose. The water-insoluble matter itself, silica particles aggregated with the water-insoluble matter as a nucleus, and the like after polishing The number of surface defects may be increased.
Further, although various synthetic water-soluble polymer compounds are described in Patent Document 2, there is no description regarding the difference in effect based on the difference in the structural unit and the molecular weight distribution. In some cases, sufficient polishing performance may not be obtained.
On the other hand, Patent Document 3 shows that the molecular weight distribution of a water-soluble polymer correlates with the reduction of surface defects after polishing. By using a water-soluble polymer having a narrow molecular weight distribution, LPD (Light Point) is used. It is described that it is easy to reduce surface defects called “Defect”. However, the molecular weight distribution of the synthetic water-soluble polymer specifically disclosed in the examples is often about 3, and the demand for further narrowing of the molecular weight distribution is high from the background of improving the accuracy of the semiconductor device described above. Furthermore, water-soluble polymers with a narrow molecular weight distribution have also been disclosed that have ethylene oxide and propylene oxide as structural units, but these are generally produced by anionic polymerization, and are not applicable in this method. There were limitations on possible monomers and manufacturing operations. In any case, the molecular weight distribution is sufficiently narrow (dispersion degree (PDI) represented by weight average molecular weight (Mw) / number average molecular weight (Mn) is 2.0 or less). Disclosure is not made.
本発明は、このような事情に鑑みてなされたものである。すなわち、シリコンウェーハ等の表面研磨に有用な合成系の研磨液組成物用水溶性重合体の製造方法であって、分子量分布が十分狭く、工業的にも広く適用可能な研磨液組成物用水溶性重合体の製造方法を提供することを課題とするものである。 The present invention has been made in view of such circumstances. That is, it is a method for producing a water-soluble polymer for a synthetic polishing composition that is useful for surface polishing of silicon wafers, etc., and has a sufficiently narrow molecular weight distribution and is widely applicable industrially. It is an object of the present invention to provide a method for producing a coalescence.
上記課題を解決するために鋭意検討した結果、本発明者らは、リビングラジカル法を利用することにより分子量分布が十分狭い研磨液組成物用水溶性重合体を簡便に製造することができることを見出し、本発明を完成するに至った。 As a result of intensive studies to solve the above problems, the present inventors have found that a water-soluble polymer for a polishing composition having a sufficiently narrow molecular weight distribution can be easily produced by utilizing the living radical method, The present invention has been completed.
本発明は以下の通りである。
〔１〕研磨液組成物用水溶性重合体の製造方法であって、
数平均分子量（Ｍｎ）が５，０００〜１，０００，０００であり、重量平均分子量（Ｍｗ）／数平均分子量（Ｍｎ）で表される分散度（ＰＤＩ）が２．０以下である重合体を、リビングラジカル重合法により製造することを特徴とする研磨液組成物用水溶性重合体の製造方法。
〔２〕上記リビングラジカル重合法が、可逆的付加−開裂連鎖移動重合法（ＲＡＦＴ法）である上記〔１〕に記載の研磨液組成物用水溶性重合体の製造方法。
〔３〕上記ＲＡＦＴ法における重合制御剤（ＲＡＦＴ剤）として、トリチオカーボネート化合物及びジチオカーバメート化合物からなる群より選ばれる１種以上の化合物を用いる上記〔２〕に記載の研磨液組成物用水溶性重合体の製造方法。
〔４〕多官能性のＲＡＦＴ剤を用いる上記〔２〕又は〔３〕に記載の研磨液組成物用水溶性重合体の製造方法。
〔５〕上記ＲＡＦＴ剤１ｍｏｌに対し、ラジカル重合開始剤を０．５ｍｏｌ以下使用する上記〔２〕〜〔４〕のいずれか一に記載の研磨液組成物用水溶性重合体の製造方法。
〔６〕リビングラジカル重合により水溶性重合体を得た後、ＲＡＦＴ剤残基の不活性化処理を行う後処理工程を備える上記〔２〕〜〔５〕のいずれか一に記載の研磨液組成物用水溶性重合体の製造方法。
〔７〕上記リビングラジカル重合法が、ニトロキシラジカル法（ＮＭＰ法）である上記〔１〕に記載の研磨液組成物用水溶性重合体の製造方法。
〔８〕上記ＮＭＰ法において、ニトロキシド化合物として以下の一般式（１）で表される化合物を用いる請求項７に記載の研磨液組成物用水溶性重合体の製造方法。
〔９〕上記一般式（１）で表されるニトロキシド化合物と、２以上のビニル基を有するビニル系単量体との反応により重合前駆体を得た後、該重合前駆体の存在下、さらにビニル系単量体の重合を行う上記〔７〕又は〔８〕に記載の研磨液組成物用水溶性重合体の製造方法。
〔１０〕上記一般式（１）で表されるニトロキシド化合物１ｍｏｌに対し、以下の一般式（２）で表されるニトロキシドラジカル０．００１〜０．２ｍｏｌを使用する上記〔８〕又は〔９〕に記載の研磨液組成物用水溶性重合体の製造方法。
〔１１〕重合終了時点の反応液において、重合溶媒／ビニル系単量体の質量比が、０〜８０/２０〜１００である上記〔１〕〜〔１０〕のいずれか一項に記載の研磨液組成物用水溶性重合体の製造方法。
〔１２〕上記水溶性重合体に対する金属の含有量が各々１００ｐｐｍ以下である上記〔１〕〜〔１１〕のいずれか一に記載の研磨液組成物用水溶性重合体の製造方法。
〔１３〕水溶性重合体が、分子内に窒素原子を有する単量体に由来する構造単位を１０〜１００ｍｏｌ％含む上記〔１〕〜〔１２〕のいずれか一に記載の研磨液組成物用水溶性重合体の製造方法。
The present invention is as follows.
[1] A method for producing a water-soluble polymer for a polishing liquid composition,
A polymer having a number average molecular weight (Mn) of 5,000 to 1,000,000 and a dispersity (PDI) represented by weight average molecular weight (Mw) / number average molecular weight (Mn) of 2.0 or less. Is manufactured by the living radical polymerization method, The manufacturing method of the water-soluble polymer for polishing liquid compositions characterized by the above-mentioned.
[2] The method for producing a water-soluble polymer for polishing composition according to [1], wherein the living radical polymerization method is a reversible addition-fragmentation chain transfer polymerization method (RAFT method).
[3] The water-solubility for a polishing composition according to [2] above, wherein at least one compound selected from the group consisting of a trithiocarbonate compound and a dithiocarbamate compound is used as a polymerization controller (RAFT agent) in the RAFT method. A method for producing a polymer.
[4] The method for producing a water-soluble polymer for polishing composition according to [2] or [3] above, wherein a polyfunctional RAFT agent is used.
[5] The method for producing a water-soluble polymer for a polishing composition according to any one of [2] to [4], wherein 0.5 mol or less of a radical polymerization initiator is used with respect to 1 mol of the RAFT agent.
[6] The polishing composition according to any one of the above [2] to [5], which comprises a post-treatment step of inactivating the RAFT agent residue after obtaining a water-soluble polymer by living radical polymerization. A method for producing a water-soluble polymer.
[7] The method for producing a water-soluble polymer for polishing composition according to [1], wherein the living radical polymerization method is a nitroxy radical method (NMP method).
[8] The method for producing a water-soluble polymer for polishing composition according to claim 7, wherein a compound represented by the following general formula (1) is used as the nitroxide compound in the NMP method.
[9] After obtaining a polymerization precursor by reacting the nitroxide compound represented by the general formula (1) with a vinyl monomer having two or more vinyl groups, and in the presence of the polymerization precursor, The method for producing a water-soluble polymer for polishing composition according to the above [7] or [8], wherein the vinyl monomer is polymerized.
[10] The above [8] or [9], wherein 0.001 to 0.2 mol of the nitroxide radical represented by the following general formula (2) is used per 1 mol of the nitroxide compound represented by the general formula (1). The manufacturing method of the water-soluble polymer for polishing liquid compositions as described in any one of.
[11] The polishing according to any one of the above [1] to [10], wherein the polymerization solvent / vinyl monomer mass ratio is 0 to 80/20 to 100 in the reaction solution at the end of the polymerization. A method for producing a water-soluble polymer for a liquid composition.
[12] The method for producing a water-soluble polymer for polishing composition according to any one of [1] to [11] above, wherein the metal content relative to the water-soluble polymer is 100 ppm or less.
[13] The water for a polishing composition according to any one of [1] to [12], wherein the water-soluble polymer contains 10 to 100 mol% of a structural unit derived from a monomer having a nitrogen atom in the molecule. A method for producing a soluble polymer.
本発明の製造方法によれば、十分に狭い分子量分布を有する研磨液組成物用水溶性重合体を簡便に得ることができる。本発明の製造方法により得られた水溶性重合体は、ウェーハ等の被研磨体表面への吸脱着、及び研磨液組成物中の砥粒の分散安定性等の観点から望ましい分子量を有する重合体からなる研磨用濡れ剤として機能する。これにより、研磨後のウェーハ表面の平滑性を高め、ＬＰＤ等の表面欠陥の抑制力をさらに向上させることが可能となる。加えて、シリカの分散性も良好であることから、凝集したシリカ砥粒による擦傷や表面荒れも少なく、無傷性に優れたウェーハ表面を得ることができる。 According to the production method of the present invention, a water-soluble polymer for polishing composition having a sufficiently narrow molecular weight distribution can be easily obtained. The water-soluble polymer obtained by the production method of the present invention is a polymer having a desirable molecular weight from the viewpoints of adsorption / desorption on the surface of an object to be polished such as a wafer and dispersion stability of abrasive grains in the polishing composition. It functions as a polishing wetting agent. As a result, the smoothness of the polished wafer surface can be improved, and the ability to suppress surface defects such as LPD can be further improved. In addition, since the dispersibility of silica is also good, there are few scratches and surface roughness due to the agglomerated silica abrasive grains, and a wafer surface with excellent scratch resistance can be obtained.
以下、本発明を詳しく説明する。尚、本明細書において、「（メタ）アクリル」とは、アクリル及びメタクリルを意味し、「（メタ）アクリレート」とは、アクリレート及びメタクリレートを意味する。また、「（メタ）アクリロイル基」とは、アクリロイル基及びメタクリロイル基を意味する。 The present invention will be described in detail below. In the present specification, “(meth) acryl” means acryl and methacryl, and “(meth) acrylate” means acrylate and methacrylate. The “(meth) acryloyl group” means an acryloyl group and a methacryloyl group.
＜水溶性重合体＞
本発明の水溶性重合体の数平均分子量（Ｍｎ）は５，０００〜１，０００，０００の範囲である。数平均分子量（Ｍｎ）の好ましい範囲は３０，０００〜８００，０００であり、より好ましい範囲は５０，０００〜６００，０００である。数平均分子量（Ｍｎ）が５，０００未満の場合はウェーハ等への濡れ性が不十分となる虞があり、１，０００，０００を超える場合は研磨砥粒の分散安定性が劣る傾向がある。
尚、本発明では、ゲルパーミエーションクロマトグラフィー（ＧＰＣ）測定によるポリメタクリル酸メチル換算値として上記数平均分子量（Ｍｎ）を得た。また、重量平均分子量（Ｍｗ）も同様の方法により得られるものである。
<Water-soluble polymer>
The number average molecular weight (Mn) of the water-soluble polymer of the present invention is in the range of 5,000 to 1,000,000. A preferable range of the number average molecular weight (Mn) is 30,000 to 800,000, and a more preferable range is 50,000 to 600,000. If the number average molecular weight (Mn) is less than 5,000, the wettability to the wafer or the like may be insufficient, and if it exceeds 1,000,000, the dispersion stability of the abrasive grains tends to be inferior. .
In the present invention, the above-mentioned number average molecular weight (Mn) was obtained as a polymethyl methacrylate conversion value by gel permeation chromatography (GPC) measurement. The weight average molecular weight (Mw) is also obtained by the same method.
研磨液組成物における水溶性重合体の分子量の大小は、ウェーハ等の被研磨体への吸脱着速度に影響を与える。一般に、ウェーハ等に対する吸脱着速度は、低分子量体であるほど高いと考えられる。そのため、常に研磨液組成物が供給されている研磨工程においては、低分子量の水溶性重合体ほど素早くウェーハ等に吸着して研磨を阻害し、研磨レートの低下（生産性の低下）をもたらす。一方で研磨後の洗浄工程においては、ウェーハ等の表面から素早く脱着するために、ウェーハ等の表面の親水性が低下して濡れ性が低下する。この場合、最終的にパーティクル等がむき出しのウェーハ表面等に付着することで表面欠陥の悪化に繋がる虞がある。
一方、水溶性重合体の分子量が高すぎる場合は、研磨液組成物中に含まれるシリカ等の砥粒の分散性を悪化させ、砥粒の凝集を引き起こすことがある。この場合、凝集した砥粒によるスクラッチ傷や砥粒凝集物自体の付着などに起因するウェーハ上の表面欠陥数を増大させることがある。また、上記水溶性重合体の水溶液粘度が高くなるためそのろ過性が悪化し、研磨液組成物を製造する際の生産性が低下する虞がある。
The magnitude of the molecular weight of the water-soluble polymer in the polishing liquid composition affects the adsorption / desorption rate of the wafer or other object to be polished. In general, the adsorption / desorption rate with respect to a wafer or the like is considered to be higher as the molecular weight is lower. Therefore, in a polishing process in which a polishing liquid composition is always supplied, a water-soluble polymer having a lower molecular weight is more quickly adsorbed to a wafer or the like and hinders polishing, resulting in a decrease in polishing rate (a decrease in productivity). On the other hand, in the cleaning process after polishing, the hydrophilicity of the surface of the wafer or the like is lowered and the wettability is lowered in order to quickly desorb from the surface of the wafer or the like. In this case, there is a possibility that the surface defects may be deteriorated by finally attaching particles or the like to the exposed wafer surface or the like.
On the other hand, when the molecular weight of the water-soluble polymer is too high, the dispersibility of abrasive grains such as silica contained in the polishing liquid composition may be deteriorated to cause aggregation of the abrasive grains. In this case, the number of surface defects on the wafer due to scratches caused by aggregated abrasive grains or adhesion of abrasive aggregates themselves may be increased. Moreover, since the aqueous solution viscosity of the said water-soluble polymer becomes high, the filterability will deteriorate, and there exists a possibility that productivity at the time of manufacturing polishing liquid composition may fall.
このため、水溶性重合体には用途等に応じて好適な分子量が存在し、目標とする分子量領域に対して大きく異なる低分子量体または高分子量体を含まないことが好ましい。すなわち、水溶性重合体の分子量分布は狭い方が好ましく、本発明においては、水溶性重合体の重量平均分子量（Ｍｗ）を数平均分子量（Ｍｎ）で除した値により表される分散度（ＰＤＩ）は２．０以下である。ＰＤＩは、１．８以下であることが好ましく、１．５以下であることがより好ましく、１．３以下であることがさらに好ましい。ＰＤＩの下限は通常１．０である。
ＰＤＩが２．０以下であれば、研磨工程における良好な吸着性および研磨後の被研磨体表面への濡れ性の確保、並びに、良好な砥粒分散安定性をバランス良く発揮することが可能となる。このため、ウェーハの研磨工程に用いた場合にはウェーハ全体をムラなく均一に研磨することが可能となる。また、著しく分子量の高い重合体を含まないために良好な砥粒分散性を示し、凝集した研磨砥粒によるスクラッチや表面荒れ、並びに、砥粒凝集体そのものがパーティクルとしてウェーハ表面に付着する表面汚染等が抑制される。その結果、ウェーハ表面の仕上げ研磨における、表面平滑性と無傷性のさらなる向上が期待される。
For this reason, it is preferable that the water-soluble polymer has a suitable molecular weight depending on the application and does not include a low molecular weight body or a high molecular weight body that is greatly different from the target molecular weight region. That is, the molecular weight distribution of the water-soluble polymer is preferably narrow, and in the present invention, the degree of dispersion (PDI) represented by the value obtained by dividing the weight average molecular weight (Mw) of the water-soluble polymer by the number average molecular weight (Mn). ) Is 2.0 or less. PDI is preferably 1.8 or less, more preferably 1.5 or less, and even more preferably 1.3 or less. The lower limit of PDI is usually 1.0.
If the PDI is 2.0 or less, it is possible to ensure good adsorbability in the polishing process, ensuring wettability to the surface of the object to be polished, and good abrasive dispersion stability in a balanced manner. Become. Therefore, when used in the wafer polishing process, the entire wafer can be uniformly polished without unevenness. In addition, since it does not contain a polymer with a remarkably high molecular weight, it exhibits good abrasive dispersibility, scratches and surface roughness due to agglomerated abrasive grains, and surface contamination where the abrasive agglomerates themselves adhere to the wafer surface as particles Etc. are suppressed. As a result, further improvement in surface smoothness and intactness in the final polishing of the wafer surface is expected.
本発明の水溶性重合体は、後記するリビングラジカル重合法により得られるものであればよく、その構成等について特段制限されるものではない。
本発明の水溶性重合体は、公知の各種ビニル系単量体を重合することにより得ることができる。ビニル系単量体は特に限定されるものではないが、具体的には（メタ）アクリル酸メチル、（メタ）アクリル酸エチル、（メタ）アクリル酸ブチル及び（メタ）アクリル酸２−エチルヘキシル等の（メタ）アクリル酸アルキルエステル化合物；（メタ）アクリル酸、クロトン酸、マレイン酸、イタコン酸及びフマル酸等の不飽和酸並びにこれらの塩類；無水マレイン酸等の不飽和酸無水物；２−アクリルアミド−２−メチルプロパンスルホン酸及びその塩類等のスルホン酸基含有単量体；（メタ）アクリルアミド；Ｎ−（メタ）アクリロイルモルホリン；メチル（メタ）アクリルアミド、エチル（メタ）アクリルアミド、ｎ−プロピル（メタ）アクリルアミド、イソプロピル（メタ）アクリルアミド、ｎ−ブチル（メタ）アクリルアミド及び２−エチルヘキシル（メタ）アクリルアミド等のＮ−アルキル（メタ）アクリルアミド化合物；メチルアミノプロピル（メタ）アクリルアミド、ジメチルアミノプロピル（メタ）アクリルアミド、エチルアミノプロピル（メタ）アクリルアミド及びジエチルアミノプロピル（メタ）アクリルアミド等の（ジ）アルキルアミノアルキルアミド化合物；メチルアミノエチル（メタ）アクリレート、ジメチルアミノエチル（メタ）アクリレート、エチルアミノエチル（メタ）アクリレート及びジエチルアミノエチル（メタ）アクリレート等の（ジ）アルキルアミノアルキル（メタ）アクリレート化合物；Ｎ−ビニルピロリドン、Ｎ−ビニル−ε−カプロラクタム等のＮ−ビニルラクタム化合物；スチレン、ビニルトルエン及びビニルキシレン等の芳香族ビニル化合物；メチルビニルエーテル、エチルビニルエーテル、ｎ−プロピルビニルエーテル、イソプロピルビニルエーテル、ｎ−ブチルビニルエーテル、イソブチルビニルエーテル、ｔ−ブチルビニルエーテル、ｎ−ヘキシルビニルエーテル、２−エチルヘキシルビニルエーテル、ｎ−オクチルビニルエーテル、ｎ−ノニルビニルエーテル及びｎ−デシルビニルエーテル等の炭素数１〜１０のアルキル基を有するアルキルビニルエーテル類；ギ酸ビニル、酢酸ビニル、プロピオン酸ビニル、バレリン酸ビニル、カプリン酸ビニル、ラウリン酸ビニル、ステアリン酸ビニル、安息香酸ビニル、ピパリン酸ビニル及びバーサチック酸ビニル等のビニルエステル化合物；エチレン、プロピレン、ブチレン等のα―オレフィン類等が例示され、これらの内の１種又は２種以上を用いることができる。
上記の内でも、ウェーハや研磨砥粒に対して適度な吸着性を有し、アルカリ条件下における加水分解性に優れる点から、Ｎ−（メタ）アクリロイルモルホリン、Ｎ−アルキル（メタ）アクリルアミド化合物、（ジ）アルキルアミノアルキルアミド化合物、Ｎ−ビニルラクタム化合物等の分子内に窒素原子を有する単量体が好ましく、さらにはＮ−（メタ）アクリロイルモルホリンが特に好ましい。
The water-soluble polymer of the present invention is not particularly limited as long as it is obtained by a living radical polymerization method described later.
The water-soluble polymer of the present invention can be obtained by polymerizing various known vinyl monomers. The vinyl monomer is not particularly limited, and specifically, such as methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate and 2-ethylhexyl (meth) acrylate (Meth) acrylic acid alkyl ester compounds; (meth) acrylic acid, crotonic acid, maleic acid, itaconic acid, fumaric acid and other unsaturated acids and salts thereof; maleic anhydride and other unsaturated acid anhydrides; 2-acrylamide 2-Methylpropanesulfonic acid and its sulfonic acid group-containing monomers such as salts thereof; (meth) acrylamide; N- (meth) acryloylmorpholine; methyl (meth) acrylamide, ethyl (meth) acrylamide, n-propyl (meth) ) Acrylamide, isopropyl (meth) acrylamide, n-butyl (meth) acrylamide and N-alkyl (meth) acrylamide compounds such as ethylhexyl (meth) acrylamide; methylaminopropyl (meth) acrylamide, dimethylaminopropyl (meth) acrylamide, ethylaminopropyl (meth) acrylamide and diethylaminopropyl (meth) acrylamide ( Di) alkylaminoalkylamide compounds; (di) alkylaminoalkyl (meth) acrylates such as methylaminoethyl (meth) acrylate, dimethylaminoethyl (meth) acrylate, ethylaminoethyl (meth) acrylate and diethylaminoethyl (meth) acrylate Compound; N-vinyl lactam compound such as N-vinyl pyrrolidone and N-vinyl-ε-caprolactam; Fragrance such as styrene, vinyl toluene and vinyl xylene Group vinyl compounds; methyl vinyl ether, ethyl vinyl ether, n-propyl vinyl ether, isopropyl vinyl ether, n-butyl vinyl ether, isobutyl vinyl ether, t-butyl vinyl ether, n-hexyl vinyl ether, 2-ethylhexyl vinyl ether, n-octyl vinyl ether, n-nonyl vinyl ether And alkyl vinyl ethers having an alkyl group having 1 to 10 carbon atoms such as n-decyl vinyl ether; vinyl formate, vinyl acetate, vinyl propionate, vinyl valerate, vinyl caprate, vinyl laurate, vinyl stearate, vinyl benzoate Vinyl ester compounds such as vinyl piperate and vinyl versatate; α-olefins such as ethylene, propylene and butylene; May be used alone or two or more of al.
Among them, N- (meth) acryloylmorpholine, N-alkyl (meth) acrylamide compound, having an appropriate adsorptivity to wafers and abrasive grains, and excellent hydrolyzability under alkaline conditions, Monomers having a nitrogen atom in the molecule such as (di) alkylaminoalkylamide compounds and N-vinyl lactam compounds are preferred, and N- (meth) acryloylmorpholine is particularly preferred.
本発明の水溶性重合体は、上記の分子内に窒素原子を有する単量体に由来する構造単位を水溶性重合体の全構造単位に対して１０〜１００ｍｏｌ％の範囲有することが好ましく、３０〜１００ｍｏｌ％の範囲有することがより好ましく、５０〜１００ｍｏｌ％の範囲有することがさらに好ましく、７０〜１００ｍｏｌ％の範囲有することが一層好ましい。分子内に窒素原子を有する単量体に由来する構造単位が１０〜１００ｍｏｌ％の範囲である場合、水に対する溶解性を悪化させることなく、前述したウェーハや研磨砥粒に対する吸着性を適度に付与できるため、好ましい。 The water-soluble polymer of the present invention preferably has a structural unit derived from a monomer having a nitrogen atom in the above molecule in a range of 10 to 100 mol% with respect to all the structural units of the water-soluble polymer. It is more preferable to have a range of ˜100 mol%, more preferable to have a range of 50 to 100 mol%, and still more preferable to have a range of 70 to 100 mol%. When the structural unit derived from a monomer having a nitrogen atom in the molecule is in the range of 10 to 100 mol%, the adsorbability to the wafer and abrasive grains described above is moderately imparted without deteriorating the solubility in water. This is preferable because it is possible.
本発明の水溶性重合体は、主鎖部分が炭素−炭素結合のみからなる繰り返し単位により構成されたものであることが好ましい。ここで、「主鎖部分が炭素−炭素結合のみからなる」とは、ポリエーテル、ポリエステル及びポリアミド等のように主鎖自身に炭素−酸素結合、炭素−窒素結合等を含むものを除くという意味で用いられる。従って、例えばアクリル系単量体を重合した場合に導入されるアクリロイル基由来の炭素−水素結合やペンダント基等、構成単量体の重合性官能基が有する置換基に由来する結合種類については考慮しない。また、主鎖部分に炭素−炭素不飽和結合を有する水溶性重合体も含まれる。
主鎖部分が炭素−炭素結合のみからなる繰り返し単位により構成される水溶性重合体を用いた場合は、安定性に優れた研磨液組成物を得ることができる。これに対し、主鎖部分に、炭素−酸素結合又は炭素−窒素結合を有する水溶性重合体は、アルカリ加水分解又は自動酸化等に起因する主鎖切断を生じる場合があり、研磨条件及び保存条件等によっては濡れ剤としての性能が安定的に発揮されない虞がある。
The water-soluble polymer of the present invention is preferably one in which the main chain portion is composed of a repeating unit consisting only of carbon-carbon bonds. Here, “the main chain portion is composed only of carbon-carbon bonds” means that the main chain itself does not include those containing carbon-oxygen bonds, carbon-nitrogen bonds, etc., such as polyether, polyester and polyamide. Used in Therefore, for example, the types of bonds derived from substituents possessed by the polymerizable functional groups of the constituent monomers such as carbon-hydrogen bonds and pendant groups derived from acryloyl groups introduced when acrylic monomers are polymerized are considered. do not do. Also included are water-soluble polymers having a carbon-carbon unsaturated bond in the main chain portion.
When a water-soluble polymer composed of a repeating unit whose main chain portion is composed only of carbon-carbon bonds is used, a polishing liquid composition having excellent stability can be obtained. On the other hand, a water-soluble polymer having a carbon-oxygen bond or a carbon-nitrogen bond in the main chain portion may cause main chain breakage due to alkali hydrolysis or auto-oxidation, and polishing and storage conditions. Depending on the above, the performance as a wetting agent may not be stably exhibited.
また、研磨液組成物はアルカリ化合物が配合された条件で調製され、保管及び使用されるのが一般的である。このため、研磨液組成物に含まれる水溶性重合体としては、耐アルカリ加水分解性の良好なものが好ましい。 Further, the polishing composition is generally prepared, stored and used under the condition where an alkali compound is blended. For this reason, as a water-soluble polymer contained in polishing liquid composition, a thing with favorable alkali hydrolysis resistance is preferable.
本発明における水溶性重合体は十分に小さいＰＤＩを有するため、シリカ等の砥粒やウェーハ等の被研磨体表面に対する吸着力や吸着速度の均一性が高いものである。従って、本発明の水溶性重合体は濡れ剤として有効に作用し、該水溶性重合体を含む研磨液組成物では、被研磨体表面をムラなく均一に研磨することが可能となる。また、著しく分子量の高い成分を含まないことから砥粒分散性にも優れ、砥粒凝集体に起因する被研磨体表面の傷や表面汚染等が抑制される。 Since the water-soluble polymer in the present invention has a sufficiently small PDI, it has a high uniformity of adsorption force and adsorption rate on the surface of an object to be polished such as abrasive grains such as silica and wafers. Therefore, the water-soluble polymer of the present invention effectively acts as a wetting agent, and the polishing composition containing the water-soluble polymer can uniformly polish the surface of the object to be polished. Further, since it does not contain a component having a remarkably high molecular weight, it is excellent in abrasive dispersibility, and scratches, surface contamination, etc. on the surface of the object to be polished due to abrasive aggregates are suppressed.
＜水溶性重合体の製造方法＞
上記の通り、本発明の水溶性重合体はリビングラジカル重合法により製造される。リビングラジカル重合法によればＰＤＩの小さな重合体を容易に得ることが可能であり、適用可能な単量体の範囲も広くすることができる。
本発明に用いるリビングラジカル重合は、バッチプロセス、セミバッチプロセス、乾式連続重合プロセス、連続攪拌槽型プロセス（ＣＳＴＲ）等のいずれのプロセスを採用してもよい。また、重合形式は、溶剤を用いないバルク重合、溶剤系の溶液重合、水系の乳化重合、ミニエマルション重合又は懸濁重合等の各種態様に適用することができる。
リビングラジカル重合法の種類についても特段の制限はなく、原子移動ラジカル重合法（ＡＴＲＰ法）、可逆的付加−開裂連鎖移動重合法（ＲＡＦＴ法）、ニトロキシラジカル法（ＮＭＰ法）、有機テルル化合物を用いる重合法（ＴＥＲＰ法）、有機アンチモン化合物を用いる重合法（ＳＢＲＰ法）、有機ビスマス化合物を用いる重合法（ＢＩＲＰ法）及びヨウ素移動重合法等の各種重合方法を採用することができる。これらの内でも、金属又は半金属化合物の混入によるウェーハ汚染の虞がない点から、ＲＡＦＴ法及びＮＭＰ法が好ましい。
<Method for producing water-soluble polymer>
As described above, the water-soluble polymer of the present invention is produced by a living radical polymerization method. According to the living radical polymerization method, a polymer having a small PDI can be easily obtained, and the range of applicable monomers can be widened.
The living radical polymerization used in the present invention may employ any process such as a batch process, a semi-batch process, a dry continuous polymerization process, and a continuous stirred tank process (CSTR). The polymerization method can be applied to various modes such as bulk polymerization without using a solvent, solvent-based solution polymerization, aqueous emulsion polymerization, miniemulsion polymerization or suspension polymerization.
There are no particular restrictions on the type of living radical polymerization method, and atom transfer radical polymerization method (ATRP method), reversible addition-cleavage chain transfer polymerization method (RAFT method), nitroxy radical method (NMP method), organic tellurium compounds Various polymerization methods such as polymerization method using TERP (TERP method), polymerization method using organic antimony compound (SBRP method), polymerization method using organic bismuth compound (BIRP method), and iodine transfer polymerization method can be employed. Among these, the RAFT method and the NMP method are preferable because there is no possibility of wafer contamination due to the mixing of metal or metalloid compound.
例えば、シリコンウェーハ等の表面研磨においてウェーハ表面が金属により汚染された場合には、該金属とシリコン又はシリコン酸化膜との化学反応により、ウェーハ上に隆起、陥没、ピット形成、樹枝状異物形成などの平坦性異常を生じる結果、トランジスタの配線パターンを阻害する虞がある。また、トランジスタのシリコン酸化膜（絶縁膜）の絶縁耐性を劣化させてトランジスタの電気的な破壊を誘発したり、シリコン酸化膜中の余分な電荷単体となってトランジスタの動作不良を起こす場合がある。
このため、研磨液組成物用水溶性重合体への金属混入を防止することが好ましい。尚、本発明において上記水溶性重合体への混入を防止する金属とは、アルカリ金属、アルカリ土類金属、遷移金属及びその他の金属等の金属のみならず、Ｔｅ等の半金属も含まれるものとする。上記アルカリ金属としては、Ｎａ、Ｋ等が挙げられる。上記アルカリ土類金属としては、Ｃａ等が挙げられる。上記遷移金属としては、Ｎｉ、Ｃｕ、Ｆｅ、Ｃｒ、Ｚｎ、Ｔｉ、Ｗ、Ｃｏ等が挙げられる。上記その他の金属としては、Ａｌ等が挙げられる。本発明では、水溶性重合体に対する上記の各金属（半金属を含む）の含有量を１００ｐｐｍ以下とすることが好ましい。
For example, when the wafer surface is contaminated with metal in surface polishing of a silicon wafer or the like, the chemical reaction between the metal and silicon or silicon oxide film causes ridges, depressions, pit formation, dendritic foreign matter formation, etc. on the wafer. As a result, the wiring pattern of the transistor may be hindered. In addition, the insulation resistance of the silicon oxide film (insulating film) of the transistor may be deteriorated to induce electrical breakdown of the transistor, or excessive charge in the silicon oxide film alone may cause the transistor to malfunction. .
For this reason, it is preferable to prevent metal contamination in the water-soluble polymer for polishing composition. In the present invention, the metal that prevents mixing into the water-soluble polymer includes not only metals such as alkali metals, alkaline earth metals, transition metals and other metals, but also semimetals such as Te. And Examples of the alkali metal include Na and K. Examples of the alkaline earth metal include Ca. Examples of the transition metal include Ni, Cu, Fe, Cr, Zn, Ti, W, and Co. Examples of the other metals include Al. In the present invention, it is preferable that the content of each metal (including metalloid) in the water-soluble polymer is 100 ppm or less.
ＲＡＦＴ法では、特定の重合制御剤（ＲＡＦＴ剤）及び一般的なフリーラジカル重合開始剤の存在下、可逆的な連鎖移動反応を介して制御された重合が進行し、一般的にはポリマーの分子量は単量体とＲＡＦＴ剤の仕込み比により調整することが可能である。
上記ＲＡＦＴ剤としては、ジチオエステル化合物、ザンテート化合物、トリチオカーボネート化合物及びジチオカーバメート化合物等、公知の各種ＲＡＦＴ剤を使用することができる。これらの内でも、ＰＤＩがより小さい重合体を得ることができる点で、トリチオカーボネート化合物及びジチオカーバメート化合物が好ましい。
In the RAFT method, controlled polymerization proceeds through a reversible chain transfer reaction in the presence of a specific polymerization control agent (RAFT agent) and a general free radical polymerization initiator, and generally the molecular weight of the polymer. Can be adjusted by the charging ratio of the monomer and the RAFT agent.
As the RAFT agent, various known RAFT agents such as a dithioester compound, a xanthate compound, a trithiocarbonate compound, and a dithiocarbamate compound can be used. Among these, a trithiocarbonate compound and a dithiocarbamate compound are preferable in that a polymer having a smaller PDI can be obtained.
上記ＲＡＦＴ剤には通常チオカルボニルチオ基（Ｓ＝Ｃ−Ｓ）が存在し、これが活性点として作用する。本発明では、用いるＲＡＦＴ剤が有する活性点の数は特に限定されないが、より分子量分布の狭い重合体を得ることができる点から、１分子中に２以上の活性点を有する多官能性のＲＡＦＴ剤を用いることが好ましい。ここで、二官能性のＲＡＦＴ剤を用いた場合には、リビング重合により直鎖状の重合体を得ることができ、三官能以上のＲＡＦＴ剤を用いた場合には、スター構造等の分岐状の重合体を得ることができる。 The RAFT agent usually has a thiocarbonylthio group (S═C—S), which acts as an active site. In the present invention, the number of active sites of the RAFT agent to be used is not particularly limited. However, a polyfunctional RAFT having two or more active sites in one molecule can be obtained because a polymer having a narrower molecular weight distribution can be obtained. It is preferable to use an agent. Here, when a bifunctional RAFT agent is used, a linear polymer can be obtained by living polymerization, and when a trifunctional or higher functional RAFT agent is used, a branched structure such as a star structure is obtained. The following polymer can be obtained.
ＲＡＦＴ剤の使用割合は、用いる単量体及びＲＡＦＴ剤の種類等により適宜調整されるものであるが、水溶性重合体全体を構成する全単量体の合計重量に基づいて、０．０１〜５．０質量％の割合で使用することが好ましく、０．０５〜３．０質量％の割合がより好ましく、０．１〜２．０質量％の割合がさらに好ましい。 The use ratio of the RAFT agent is appropriately adjusted depending on the type of monomer used and the type of RAFT agent, etc., but based on the total weight of all monomers constituting the entire water-soluble polymer, 0.01 to It is preferable to use it in the ratio of 5.0 mass%, the ratio of 0.05-3.0 mass% is more preferable, and the ratio of 0.1-2.0 mass% is further more preferable.
ＲＡＦＴ法による重合の際に用いる重合開始剤としては、アゾ化合物、有機過酸化物及び過硫酸塩等の公知のラジカル重合開始剤を使用することができるが、安全上取り扱い易く、ラジカル重合時の副反応が起こりにくい点からアゾ化合物が好ましい。
上記アゾ化合物の具体例としては、２，２’−アゾビスイソブチロニトリル、２，２’−アゾビス（２，４−ジメチルバレロニトリル）、２，２’−アゾビス（４−メトキシ−２，４−ジメチルバレロニトリル）、ジメチル−２，２’−アゾビス（２−メチルプロピオネート）、２，２’−アゾビス（２−メチルブチロニトリル）、１，１’−アゾビス（シクロヘキサン−１−カルボニトリル）、２，２’−アゾビス［Ｎ−（２−プロペニル）−２−メチルプロピオンアミド］、２，２’−アゾビス（Ｎ−ブチル−２−メチルプロピオンアミド）等が挙げられる。
上記ラジカル重合開始剤は１種類のみ使用しても又は２種以上を併用してもよい。
As the polymerization initiator used in the polymerization by the RAFT method, known radical polymerization initiators such as azo compounds, organic peroxides and persulfates can be used. An azo compound is preferred because side reactions are unlikely to occur.
Specific examples of the azo compound include 2,2′-azobisisobutyronitrile, 2,2′-azobis (2,4-dimethylvaleronitrile), 2,2′-azobis (4-methoxy-2, 4-dimethylvaleronitrile), dimethyl-2,2′-azobis (2-methylpropionate), 2,2′-azobis (2-methylbutyronitrile), 1,1′-azobis (cyclohexane-1- Carbonitrile), 2,2′-azobis [N- (2-propenyl) -2-methylpropionamide], 2,2′-azobis (N-butyl-2-methylpropionamide), and the like.
The radical polymerization initiator may be used alone or in combination of two or more.
ラジカル重合開始剤の使用割合は特に制限されないが、水溶性重合体全体を構成する全単量体の合計重量に基づいて、０．０１〜１．０質量％の割合で使用することが好ましく、０．０１〜０．３質量％の割合がより好ましく、０．０１〜０．１質量％の割合がさらに好ましい。
また、ＰＤＩがより小さい重合体を得る点から、上記ＲＡＦＴ剤１ｍｏｌに対する上記ラジカル重合開始剤の使用量を０．５ｍｏｌ以下とすることが好ましく、０．２ｍｏｌ以下とするのがより好ましい。また、重合反応を安定的に行う観点から、ＲＡＦＴ剤１ｍｏｌに対するラジカル重合開始剤の使用量の下限は、０．０１ｍｏｌである。よって、ＲＡＦＴ剤１ｍｏｌに対するラジカル重合開始剤の使用量は、０．０１〜０．５ｍｏｌの範囲が好ましく、０．０５〜０．２ｍｏｌの範囲がより好ましい。
The use ratio of the radical polymerization initiator is not particularly limited, but it is preferably used at a ratio of 0.01 to 1.0% by mass based on the total weight of all monomers constituting the entire water-soluble polymer, A ratio of 0.01 to 0.3% by mass is more preferable, and a ratio of 0.01 to 0.1% by mass is more preferable.
Moreover, it is preferable that the usage-amount of the said radical polymerization initiator with respect to 1 mol of said RAFT agents shall be 0.5 mol or less from the point which obtains a polymer with smaller PDI, and it is more preferable to set it as 0.2 mol or less. From the viewpoint of stably performing the polymerization reaction, the lower limit of the amount of the radical polymerization initiator used relative to 1 mol of the RAFT agent is 0.01 mol. Therefore, the amount of radical polymerization initiator used per 1 mol of RAFT agent is preferably in the range of 0.01 to 0.5 mol, and more preferably in the range of 0.05 to 0.2 mol.
通常、ＲＡＦＴ法により重合体を得た場合には、ＲＡＦＴ剤に由来する残基を末端に有する重合体が含まれる。本発明では、得られた水溶性重合体の安定性の観点から、ＲＡＦＴ法によるリビングラジカル重合により水溶性重合体を得た後、該重合体末端に導入されたＲＡＦＴ残基を不活性化処理する後処理工程を備えることが好ましい。
ＲＡＦＴ残基は加熱条件下、求核反応により容易に分解することが知られており、チオール基に変換することが出来る。チオール基はα、β−不飽和カルボニル化合物、カルボニル化合物、イソシアネート、エポキシ化合物と容易に反応するため、これらの化合物との反応によりＲＡＦＴ残基を不活性化処理することが可能である。操作の簡便性の観点から、ＲＡＦＴ残基の分解にはアミン化合物を用いた求核反応が好ましい。また、生成したチオール基との反応については、反応性の観点からα、β−不飽和カルボニル化合物との反応が好ましい。
Usually, when a polymer is obtained by the RAFT method, a polymer having a residue derived from the RAFT agent at the terminal is included. In the present invention, from the viewpoint of the stability of the obtained water-soluble polymer, after obtaining a water-soluble polymer by living radical polymerization by the RAFT method, the RAFT residue introduced at the polymer terminal is inactivated. It is preferable to provide a post-processing step.
RAFT residues are known to be easily decomposed by nucleophilic reaction under heating conditions, and can be converted into thiol groups. Since thiol groups easily react with α, β-unsaturated carbonyl compounds, carbonyl compounds, isocyanates, and epoxy compounds, it is possible to inactivate RAFT residues by reaction with these compounds. From the viewpoint of ease of operation, nucleophilic reaction using an amine compound is preferred for the degradation of the RAFT residue. Moreover, about reaction with the produced | generated thiol group, reaction with an (alpha) and (beta) -unsaturated carbonyl compound is preferable from a reactive viewpoint.
ＲＡＦＴ法による重合反応の際の反応温度は、好ましくは４０〜１００℃であり、より好ましくは４５〜９０℃であり、さらに好ましくは５０〜８０℃である。反応温度が４０℃未満であると、反応速度が著しく遅くなる場合がある。一方、反応温度が１００℃より高いと使用できる開始剤や溶剤が制限される他、ラジカル連鎖移動等の副反応が起きやすくなるため重合体のＰＤＩが増大する虞がある。 The reaction temperature in the polymerization reaction by the RAFT method is preferably 40 to 100 ° C, more preferably 45 to 90 ° C, and further preferably 50 to 80 ° C. If the reaction temperature is less than 40 ° C, the reaction rate may be remarkably slow. On the other hand, when the reaction temperature is higher than 100 ° C., the initiator and solvent that can be used are limited, and side reactions such as radical chain transfer are liable to occur, which may increase the PDI of the polymer.
ＮＭＰ法では、ニトロキシドを有する特定のアルコキシアミン化合物等をリビングラジカル重合開始剤として用い、これに由来するニトロキシドラジカルを介して重合が進行する。本発明では、用いるニトロキシドラジカルの種類に特に制限はないが、アクリレート及びアクリルアミドを含むアクリルアミド誘導体等の単量体を重合する際の重合制御性の観点から、ニトロキシド化合物として一般式（１）で表される化合物を用いることが好ましい。
ＮＭＰ法によれば、全く副反応が起こらないと仮定した場合には、上記リビングラジカル重合開始剤と用いるビニル系単量体とのモル比がそのまま得られる重合体の重合度となる。本発明では、リビングラジカル重合開始剤１モルに対して該ビニル系単量体６０〜６，０００モルを反応させることが好ましく、より好ましくは１５０〜５，０００モルであり、特に好ましくは３００〜４，０００モルである。 According to the NMP method, when it is assumed that no side reaction occurs at all, the molar ratio between the living radical polymerization initiator and the vinyl monomer used is the degree of polymerization of the obtained polymer. In the present invention, it is preferable to react 60 to 6,000 mol of the vinyl monomer with respect to 1 mol of the living radical polymerization initiator, more preferably 150 to 5,000 mol, and particularly preferably 300 to 5,000 mol. 4,000 moles.
上記一般式（１）で表されるニトロキシド化合物は、７０〜８０℃程度の加熱により一次解離し、ビニル系単量体と付加反応を起こす。この際、２以上のビニル基を有するビニル系単量体にニトロキシド化合物を付加することにより多官能性の重合前駆体を得ることが可能である。次いで、上記重合前駆体を加熱下で二次解離することにより、ビニル系単量体をリビング重合することができる。重合前駆体を二次解離する際の加熱条件は、一次解離よりも高い温度で行うことが一般的であり、具体的には１００〜１２０℃程度の温度条件下で行うことができる。
この場合、重合前駆体は分子内に２以上の活性点を有するため、より分子量分布の狭い重合体を得ることができる。尚、重合前駆体が二官能のビニル系単量体及びニトロキシド化合物から得られたものである場合には、リビング重合により直鎖状の重合体を得ることができ、三官能以上のビニル系単量体に由来する重合前駆体の場合には、スター構造等の分岐状の重合体を得ることができる。また、上記２以上のビニル基を有するビニル系単量体が有する当該ビニル基は、重合前駆体を高い収率で得ることができる点からアクリロイル基であることが好ましい。
The nitroxide compound represented by the general formula (1) is primarily dissociated by heating at about 70 to 80 ° C., and causes an addition reaction with the vinyl monomer. In this case, it is possible to obtain a polyfunctional polymerization precursor by adding a nitroxide compound to a vinyl monomer having two or more vinyl groups. Next, the vinyl monomer can be living polymerized by secondary dissociation of the polymerization precursor under heating. The heating conditions for secondary dissociation of the polymerization precursor are generally performed at a temperature higher than that of the primary dissociation, and specifically can be performed under a temperature condition of about 100 to 120 ° C.
In this case, since the polymerization precursor has two or more active sites in the molecule, a polymer having a narrower molecular weight distribution can be obtained. In addition, when the polymerization precursor is obtained from a bifunctional vinyl monomer and a nitroxide compound, a linear polymer can be obtained by living polymerization, and a trifunctional or higher functional vinyl monomer can be obtained. In the case of a polymerization precursor derived from a monomer, a branched polymer such as a star structure can be obtained. The vinyl group of the vinyl monomer having two or more vinyl groups is preferably an acryloyl group from the viewpoint that a polymerization precursor can be obtained in high yield.
本発明の水溶性重合体をＮＭＰ法により製造する場合、上記一般式（１）で表されるニトロキシド化合物１ｍｏｌに対し、一般式（２）で表されるニトロキシドラジカルを０．００１〜０．２ｍｏｌの範囲で添加して重合を行ってもよい。
上記一般式（２）で表されるニトロキシドラジカルを０．００１ｍｏｌ以上添加することにより、ニトロキシドラジカルの濃度が定常状態に達する時間が短縮される。これにより、重合をより高度に制御することが可能となり、よりＰＤＩが小さい重合体を得ることができる。一方、上記ニトロキシドラジカルの添加量が多すぎると重合が進行しない場合がある。上記ニトロキシド化合物１ｍｏｌに対する上記ニトロキシドラジカルのより好ましい添加量は０．０１〜０．５ｍｏｌの範囲であり、さらに好ましい添加量は０．０５〜０．２ｍｏｌの範囲である。 By adding 0.001 mol or more of the nitroxide radical represented by the general formula (2), the time for the concentration of the nitroxide radical to reach a steady state is shortened. As a result, the polymerization can be controlled to a higher degree, and a polymer having a smaller PDI can be obtained. On the other hand, if the amount of the nitroxide radical added is too large, the polymerization may not proceed. A more preferable addition amount of the nitroxide radical to 1 mol of the nitroxide compound is in the range of 0.01 to 0.5 mol, and a more preferable addition amount is in the range of 0.05 to 0.2 mol.
ＮＭＰ法におけるリビングラジカル重合開始剤と、用いるビニル系単量体との反応温度は、好ましくは５０〜１４０℃であり、より好ましくは６０〜１３０℃であり、さらに好ましくは７０〜１２０℃であり、特に好ましくは８０〜１２０℃である。反応温度が５０℃未満であると、反応速度が著しく遅くなる場合がある。一方、反応温度が１４０℃より高いとラジカル連鎖移動等の副反応が起きやすくなるため重合体のＰＤＩが増大する虞がある。 The reaction temperature of the living radical polymerization initiator in the NMP method and the vinyl monomer used is preferably 50 to 140 ° C, more preferably 60 to 130 ° C, and even more preferably 70 to 120 ° C. Especially preferably, it is 80-120 degreeC. If the reaction temperature is less than 50 ° C, the reaction rate may be remarkably slow. On the other hand, if the reaction temperature is higher than 140 ° C., side reactions such as radical chain transfer are likely to occur, so that the PDI of the polymer may increase.
本発明では、水溶性重合体の重合は、その重合方法によらず、必要に応じて連鎖移動剤の存在下で実施しても良い。
連鎖移動剤は公知のものを使用することができ、具体的には、エタンチオール、１−プロパンチオール、２−プロパンチオール、１−ブタンチオール、２−ブタンチオール、１−ヘキサンチオール、２−ヘキサンチオール、２−メチルヘプタン−２−チオール、２−ブチルブタン−１−チオール、１，１−ジメチル−１−ペンタンチオール、１−オクタンチオール、２−オクタンチオール、１−デカンチオール、３−デカンチオール、１−ウンデカンチオール、１−ドデカンチオール、２−ドデカンチオール、１−トリデカンチオール、１−テトラデカンチオール、３−メチル−３−ウンデカンチオール、５−エチル−５−デカンチオール、ｔｅｒｔ−テトラデカンチオール、１−ヘキサデカンチオール、１−ヘプタデカンチオール及び１−オクタデカンチオール等の炭素数２〜２０のアルキル基を有するアルキルチオール化合物の他、メルカプト酢酸、メルカプトプロピオン酸、２−メルカプトエタノール等が挙げられ、これらの内の１種又は２種以上を用いることができる。
In the present invention, the water-soluble polymer may be polymerized in the presence of a chain transfer agent, if necessary, regardless of the polymerization method.
As the chain transfer agent, known ones can be used. Specifically, ethanethiol, 1-propanethiol, 2-propanethiol, 1-butanethiol, 2-butanethiol, 1-hexanethiol, 2-hexane Thiol, 2-methylheptane-2-thiol, 2-butylbutane-1-thiol, 1,1-dimethyl-1-pentanethiol, 1-octanethiol, 2-octanethiol, 1-decanethiol, 3-decanethiol, 1-undecanethiol, 1-dodecanethiol, 2-dodecanethiol, 1-tridecanethiol, 1-tetradecanethiol, 3-methyl-3-undecanethiol, 5-ethyl-5-decanethiol, tert-tetradecanethiol, 1 -Hexadecanethiol, 1-heptadecanethiol and 1- In addition to alkylthiol compounds having an alkyl group of 2 to 20 carbon atoms such as kutadecanethiol, mercaptoacetic acid, mercaptopropionic acid, 2-mercaptoethanol, etc. may be mentioned, and one or more of these may be used Can do.
連鎖移動剤の中でも、ウェーハへの吸着性が良好となる点から炭素数２〜２０のアルキル基を有するアルキルチオール化合物が好ましく、炭素数４〜２０のアルキル基を有するものがより好ましく、炭素数６〜２０のアルキル基を有するものがさらに好ましい。
連鎖移動剤を用いる際、その好ましい使用量は、全単量体の量に対して０．１〜１０質量％であり、さらに好ましくは０．５〜５質量％である。
Among chain transfer agents, an alkylthiol compound having an alkyl group having 2 to 20 carbon atoms is preferable from the viewpoint of good adsorption to a wafer, more preferably an alkyl group having 4 to 20 carbon atoms, and more preferably Those having 6 to 20 alkyl groups are more preferred.
When using a chain transfer agent, the preferable usage-amount is 0.1-10 mass% with respect to the quantity of all the monomers, More preferably, it is 0.5-5 mass%.
リビングラジカル重合では、重合時のモノマー濃度が低い場合には特に重合後期における副反応の割合が高まり、得られる重合体のＰＤＩが増大する虞がある。この観点から、リビングラジカル重合終了時点における反応液の全量に対し、該重合に使用したビニル系単量体の総量の割合が２０質量％以上であることが好ましい。また、上記の通り、本発明の製造方法はバルク重合にも適用してもよく、重合時のモノマー濃度の上限は１００質量％である。よって、本発明では、リビングラジカル重合終了時点において、使用した重合溶媒及びビニル単量体の質量比が、０〜８０/２０〜１００であることが好ましい。当該質量比は、より好ましくは１０〜８０／２０〜９０であり、さらに好ましくは３０〜６０／４０〜７０である。 In living radical polymerization, when the monomer concentration at the time of polymerization is low, there is a risk that the rate of side reactions increases particularly in the latter stage of polymerization and the PDI of the resulting polymer increases. From this viewpoint, it is preferable that the ratio of the total amount of vinyl monomers used in the polymerization is 20% by mass or more with respect to the total amount of the reaction liquid at the end of the living radical polymerization. As described above, the production method of the present invention may also be applied to bulk polymerization, and the upper limit of the monomer concentration during polymerization is 100% by mass. Therefore, in this invention, it is preferable that the mass ratio of the used polymerization solvent and a vinyl monomer is 0-80 / 20-100 at the time of completion | finish of living radical polymerization. The said mass ratio becomes like this. More preferably, it is 10-80 / 20-90, More preferably, it is 30-60 / 40-70.
本発明では、リビングラジカル重合において公知の重合溶媒を用いることができる。具体的には、ベンゼン、トルエン、キシレン及びアニソール等の芳香族化合物；酢酸メチル、酢酸エチル、酢酸プロピル及び酢酸ブチル等のエステル化合物；アセトン及びメチルエチルケトン等のケトン化合物；ジメチルホルムアミド、アセトニトリル、ジメチルスルホキシド、アルコール、水等が挙げられる。また、重合溶媒を使用せず、塊状重合等の態様で行ってもよい。 In the present invention, a known polymerization solvent can be used in the living radical polymerization. Specifically, aromatic compounds such as benzene, toluene, xylene and anisole; ester compounds such as methyl acetate, ethyl acetate, propyl acetate and butyl acetate; ketone compounds such as acetone and methyl ethyl ketone; dimethylformamide, acetonitrile, dimethyl sulfoxide, Examples include alcohol and water. Moreover, you may carry out by aspects, such as block polymerization, without using a polymerization solvent.
＜研磨液組成物＞
本発明の研磨液組成物は、上記水溶性重合体、水、砥粒及びアルカリ化合物を含んでなるものである。研磨液組成物中の水溶性重合体の割合は、特に限定されるものではないが、研磨液組成物がＣＭＰにおける扱い上、又ウェーハ表面に吸着するにあたり適度な粘度とすることが好ましい。研磨液組成物の具体的な粘度は、０．１〜１０ｍＰａ・ｓの範囲であることが好ましく、０．３〜８ｍＰａ・ｓの範囲であることがより好ましく、０．５〜５ｍＰａ・ｓの範囲であることがさらに好ましい。
また、上記水溶性重合体は、研磨液組成物全体の０．００１〜１０質量％の範囲となるよう用いることが好ましく、０．００５〜５質量％の範囲であることがより好ましい。
<Polishing liquid composition>
The polishing composition of the present invention comprises the water-soluble polymer, water, abrasive grains, and an alkali compound. The ratio of the water-soluble polymer in the polishing composition is not particularly limited, but it is preferable that the polishing composition has an appropriate viscosity for handling in CMP and adsorbing to the wafer surface. The specific viscosity of the polishing composition is preferably in the range of 0.1 to 10 mPa · s, more preferably in the range of 0.3 to 8 mPa · s, and 0.5 to 5 mPa · s. More preferably, it is in the range.
Moreover, it is preferable to use the said water-soluble polymer so that it may become the range of 0.001-10 mass% of the whole polishing liquid composition, and it is more preferable that it is the range of 0.005-5 mass%.
砥粒としてはコロイダルシリカ等を用いることができる。砥粒としてコロイダルシリカを用いる場合、研磨液組成物におけるその含有量は、０．１〜５０質量％であることが好ましく、１〜３０質量％であることがより好ましく、３〜２０質量％であることがさらに好ましい。コロイダルシリカの使用量が０．１質量％以上であればメカニカル研磨の研磨速度が良好なものとなる。また、５０質量％以下であれば、砥粒の分散性が保持され、ウェーハ表面の平滑性が良好なものとすることができる。 Colloidal silica or the like can be used as the abrasive. When colloidal silica is used as the abrasive grains, the content in the polishing composition is preferably 0.1 to 50% by mass, more preferably 1 to 30% by mass, and 3 to 20% by mass. More preferably it is. If the usage-amount of colloidal silica is 0.1 mass% or more, the polishing rate of mechanical polishing will become favorable. Moreover, if it is 50 mass% or less, the dispersibility of an abrasive grain is hold | maintained and the smoothness of a wafer surface can be made favorable.
コリダルシリカの平均粒子径は、必要とする研磨速度と研磨後のウェーハ表面の平滑性から適宜選択されるが、一般的には、２〜５００ｎｍの範囲であり、５〜３００ｎｍの範囲が好ましく、５〜２００ｎｍの範囲がより好ましい。 The average particle size of the corridal silica is appropriately selected from the required polishing rate and the smoothness of the wafer surface after polishing, but is generally in the range of 2 to 500 nm, preferably in the range of 5 to 300 nm. A range of ˜200 nm is more preferable.
アルカリ化合物としては、水溶性のアルカリ化合物であれば特に制限はなく、アルカリ金属水酸化物、アミン類又はアンモニア若しくは４級水酸化アンモニウム塩等を使用することができる。アルカリ金属水酸化物としては、水酸化カリウム、水酸化ナトリウム、水酸化ルビジウム及び水酸化セシウム等が挙げられる。アミン類としては、トリエチルアミン、モノエタノールアミン、ジエタノールアミン、トリエタノールアミン、ジイソプロパノールアミン、エチレンジアミン、ヘキサメチレンジアミン、ジエチレントリアミン、トリエチルペンタミン及びテトラエチルペンタミン等が挙げられる。４級水酸化アンモニウム塩としては、水酸化テトラメチルアンモニウム、水酸化テトラエチルアンモニウム及び水酸化テトラブチルアンモニウム等が挙げられる。これらの内では、半導体基板に対する汚染が少ないという点からアンモニア又は４級水酸化アンモニウム塩が好ましい。
本発明の研磨液組成物は、前記アルカリ化合物を添加することにより、そのｐＨが８〜１３となるように調整されるのが好ましい。ｐＨの範囲は８．５〜１２に調整するのがより好ましい。
The alkali compound is not particularly limited as long as it is a water-soluble alkali compound, and alkali metal hydroxides, amines, ammonia, quaternary ammonium hydroxide salts, and the like can be used. Examples of the alkali metal hydroxide include potassium hydroxide, sodium hydroxide, rubidium hydroxide and cesium hydroxide. Examples of amines include triethylamine, monoethanolamine, diethanolamine, triethanolamine, diisopropanolamine, ethylenediamine, hexamethylenediamine, diethylenetriamine, triethylpentamine, and tetraethylpentamine. Examples of the quaternary ammonium hydroxide salt include tetramethylammonium hydroxide, tetraethylammonium hydroxide, and tetrabutylammonium hydroxide. Among these, ammonia or a quaternary ammonium hydroxide salt is preferable from the viewpoint of less contamination of the semiconductor substrate.
The polishing composition of the present invention is preferably adjusted to have a pH of 8 to 13 by adding the alkali compound. More preferably, the pH range is adjusted to 8.5-12.
研磨液組成物には、上記以外にも、必要に応じて有機溶剤、各種キレート剤、界面活性剤、有機酸化合物、無機酸化合物及び防腐剤等を更に含有することができる。 In addition to the above, the polishing composition may further contain an organic solvent, various chelating agents, a surfactant, an organic acid compound, an inorganic acid compound, a preservative, and the like as necessary.
以下、実施例に基づいて本発明を具体的に説明する。尚、本発明は、これらの実施例により限定されるものではない。尚、以下において「部」及び「％」は、特に断らない限り質量部及び質量％を意味する。
製造例で得られた水溶性重合体の分析方法並びに、実施例及び比較例における半導体用濡れ剤又は研磨液組成物の評価方法について以下に記載する。
Hereinafter, the present invention will be specifically described based on examples. In addition, this invention is not limited by these Examples. In the following, “parts” and “%” mean mass parts and mass% unless otherwise specified.
It describes below about the analysis method of the water-soluble polymer obtained by the manufacture example, and the evaluation method of the wetting agent for semiconductors or polishing liquid composition in an Example and a comparative example.
＜分子量測定＞
各製造例で得られた重合体について、以下に記載の条件にてゲルパーミエーションクロマトグラフィー（ＧＰＣ）測定を行い、ポリメタクリル酸メチル換算による数平均分子量（Ｍｎ）及び重量平均分子量（Ｍｗ）を得た。また、得られた値から分散度（ＰＤＩ＝Ｍｗ／Ｍｎ）を算出した。
○測定条件
カラム：東ソー製ＴＳＫｇｅｌ ＳｕｐｅｒＨＭ−Ｍ×３本
溶媒：Ｎ，Ｎ−ジメチルホルムアミド（１０ｍＭ ＬｉＢｒ含有）
温度：４０℃
検出器：ＲＩ
流速：３００μＬ／ｍｉｎ
<Molecular weight measurement>
About the polymer obtained by each manufacture example, the gel permeation chromatography (GPC) measurement is performed on the conditions as described below, and the number average molecular weight (Mn) and weight average molecular weight (Mw) in terms of polymethyl methacrylate are calculated. Obtained. Further, the dispersity (PDI = Mw / Mn) was calculated from the obtained value.
○ Measurement conditions Column: TSKgel SuperHM-M x 3 manufactured by Tosoh Solvent: N, N-dimethylformamide (containing 10 mM LiBr)
Temperature: 40 ° C
Detector: RI
Flow rate: 300 μL / min
＜含有金属分の定量＞
各製造例で得られた水溶性重合体約１００〜２００ｍｇをポリテトラフルオロエチレン（ＴＰＦＥ）製加圧容器に精密に秤量し、超高純度硫酸および超高純度硝酸を加えてマイクロウェーブ分解を行い、分解物を５０ｍｌに定容した。上記の溶液について、ＩＣＰ質量分析器（Ａｇｉｌｅｎｔ７５００ｃｓ、Ａｇｉｌｅｎｔ社製）を使用し、同時に実施したブランク試験値を減算し、水溶性重合体に対する各金属（半金属を含む）の含有量を決定した。
<Quantification of metal content>
About 100 to 200 mg of the water-soluble polymer obtained in each production example is precisely weighed in a pressure vessel made of polytetrafluoroethylene (TPFE), and ultra high purity sulfuric acid and ultra high purity nitric acid are added to perform microwave decomposition. The decomposition product was made up to a volume of 50 ml. About said solution, the ICP mass spectrometer (Agilent7500cs, product made from Agilent) was used, the blank test value implemented simultaneously was subtracted, and content of each metal (including a semimetal) with respect to a water-soluble polymer was determined.
≪ＲＡＦＴ剤の合成≫
合成例１
（ｎ−ドデシルスルファニルチオカルボニルスルファニルメチルベンゼンの合成）
ナス型フラスコに蒸留水（２０８ｍｌ）、水酸化カリウム（１１．６ｇ、２０８ｍｍｏｌ）を加えて水酸化カリウム水溶液を調製し、メチルトリ−ｎ−オクチルアンモニウムクロリド（ａｌｉｑｕａｔ３３６）（３．０ｇ、７．６ｍｍｏｌ）、１−ドデカンチオール（４２．２ｇ、５０ｍｌ、２０８ｍｍｏｌ）を加えて氷浴に浸漬した。ここへ、二硫化炭素（１５．８ｇ、２０８ｍｍｏｌ）を滴下し、氷浴に浸漬したまま２０分攪拌した。さらに、塩化ベンジル（２４．０ｇ、１９０ｍｍｏｌ）を加えて室温で２時間攪拌した後、反応溶液を分液ロートに移し、クロロホルム（１５０ｍｌ）を加えて、食塩水（１５０ｍｌ）で２回洗浄し、無水硫酸ナトリウムで乾燥させた。ろ紙でろ過した後、エバポレーターで溶媒を留去し、シリカゲルカラムクロマトグラフィー（ヘキサン）により精製することにより、以下の式（３）で表されるｎ−ドデシルスルファニルチオカルボニルスルファニルメチルベンゼン（以下、「ＬＢＴＴＣ」ともいう）を収率５２％で得た。1Ｈ−ＮＭＲ測定より７．２ｐｐｍ、４．６ｐｐｍ、３．４ｐｐｍに目的物のピークを確認した。
≪Synthesis of RAFT agent≫
Synthesis example 1
(Synthesis of n-dodecylsulfanylthiocarbonylsulfanylmethylbenzene)
Distilled water (208 ml) and potassium hydroxide (11.6 g, 208 mmol) were added to an eggplant-shaped flask to prepare an aqueous potassium hydroxide solution, and methyltri-n-octylammonium chloride (aliquat 336) (3.0 g, 7.6 mmol) was prepared. 1-dodecanethiol (42.2 g, 50 ml, 208 mmol) was added and immersed in an ice bath. Carbon disulfide (15.8 g, 208 mmol) was added dropwise thereto, and the mixture was stirred for 20 minutes while immersed in an ice bath. Further, after adding benzyl chloride (24.0 g, 190 mmol) and stirring at room temperature for 2 hours, the reaction solution was transferred to a separatory funnel, chloroform (150 ml) was added, and the mixture was washed twice with brine (150 ml). Dry over anhydrous sodium sulfate. After filtering with filter paper, the solvent was distilled off with an evaporator and purified by silica gel column chromatography (hexane), whereby n-dodecylsulfanylthiocarbonylsulfanylmethylbenzene represented by the following formula (3) (hereinafter, “ LBTTC ") was obtained with a yield of 52%. From the 1 H-NMR measurement, the peak of the target product was confirmed at 7.2 ppm, 4.6 ppm, and 3.4 ppm.
合成例２
（１，４−ビス（ｎ−ドデシルスルファニルチオカルボニルスルファニルメチル）ベンゼンの合成）
ナス型フラスコに１−ドデカンチオール（４２．２ｇ）、２０％ＫＯＨ水溶液（６３．８ｇ）、トリオクチルメチルアンモニウムクロリド（１．５ｇ）を加えて氷浴で冷却し、二硫化炭素（１５．９ｇ）、テトラヒドロフラン（以下「ＴＨＦ」ともいう）（３８ｍｌ）を加え２０分攪拌した。α、α−ジクロロ−ｐ−キシレン（１６．６ｇ）のＴＨＦ溶液（１７０ｍｌ）を３０分かけて滴下した。室温で１時間反応させた後、クロロホルムから抽出し、純水で洗浄、無水硫酸ナトリウムで乾燥、ロータリーエバポレータで濃縮した。得られた粗生成物をカラムクロマトグラフィーで精製した後、酢酸エチルから再結晶することにより、以下の式（４）で表される１，４−ビス（ｎ−ドデシルスルファニルチオカルボニルスルファニルメチル）ベンゼン（以下「ＤＬＢＴＴＣ」ともいう）を収率８０％で得た。1Ｈ−ＮＭＲ測定より７．２ｐｐｍ、４．６ｐｐｍ、３．４ｐｐｍに目的物のピークを確認した。
Synthesis example 2
(Synthesis of 1,4-bis (n-dodecylsulfanylthiocarbonylsulfanylmethyl) benzene)
Add 1-dodecanethiol (42.2 g), 20% aqueous KOH solution (63.8 g) and trioctylmethylammonium chloride (1.5 g) to an eggplant-shaped flask and cool in an ice bath to obtain carbon disulfide (15.9 g). ) And tetrahydrofuran (hereinafter also referred to as “THF”) (38 ml) were added and stirred for 20 minutes. A THF solution (170 ml) of α, α-dichloro-p-xylene (16.6 g) was added dropwise over 30 minutes. After reacting at room temperature for 1 hour, the mixture was extracted from chloroform, washed with pure water, dried over anhydrous sodium sulfate, and concentrated on a rotary evaporator. The obtained crude product is purified by column chromatography and then recrystallized from ethyl acetate, whereby 1,4-bis (n-dodecylsulfanylthiocarbonylsulfanylmethyl) benzene represented by the following formula (4) is obtained. (Hereinafter also referred to as “DLBTTC”) was obtained in a yield of 80%. From the 1 H-NMR measurement, the peak of the target product was confirmed at 7.2 ppm, 4.6 ppm, and 3.4 ppm.
合成例３
（Ｓ−（１−（メトキシカルボニル）エチル）キサントゲン酸Ｏ−エチルの合成）
ナス型フラスコにエタノール（４０ｍｌ）、水酸化カリウム（５．６ｇ、０．１ｍｏｌ）を加えて溶液とした後、二硫化炭素（２０ｍｌ）を滴下し、室温下１０時間攪拌した。ロータリーエバポレータで濃縮した後、残渣に２−クロロプロピオン酸メチルの２０％エタノール溶液（３０ｍｌ）を加え、６０℃で５時間反応させた。反応溶液を分液ロートに移し、ジエチルエーテル（４０ｍｌ）を加えて、食無水硫酸ナトリウムで乾燥させた。シリカゲルカラムクロマトグラフィーにより精製することにより、以下の式（５）で表されるＳ−（１−（メトキシカルボニル）エチル）キサントゲン酸Ｏ−エチル（以下「ＭＡＥＸ」ともいう）を収率６４％で得た。1Ｈ−ＮＭＲ測定より３．７ｐｐｍ、３．５ｐｐｍ、１．６ｐｐｍ、１．１ｐｐｍに目的物のピークを確認した。
Synthesis example 3
(Synthesis of S- (1- (methoxycarbonyl) ethyl) xanthate O-ethyl)
Ethanol (40 ml) and potassium hydroxide (5.6 g, 0.1 mol) were added to an eggplant type flask to make a solution, carbon disulfide (20 ml) was added dropwise, and the mixture was stirred at room temperature for 10 hours. After concentration with a rotary evaporator, 20% ethanol solution (30 ml) of methyl 2-chloropropionate was added to the residue and reacted at 60 ° C. for 5 hours. The reaction solution was transferred to a separatory funnel, diethyl ether (40 ml) was added, and the mixture was dried over anhydrous sodium sulfate. By purifying by silica gel column chromatography, S- (1- (methoxycarbonyl) ethyl) xanthate (hereinafter also referred to as “MAEX”) represented by the following formula (5) was obtained at a yield of 64%. Obtained. From the 1 H-NMR measurement, the peak of the target product was confirmed at 3.7 ppm, 3.5 ppm, 1.6 ppm, and 1.1 ppm.
上記以外にも、市販のＲＡＦＴ剤として、以下の式（６）で表されるベンジル１Ｈ−ピロール−１−カルボジチオエート（以下、「ＢＰＤＴＣ」ともいう）及び式（７）で表されるＳ，Ｓ−ジベンジルトリチオカーボネート（以下、「ＤＢＴＴＣ」ともいう）を準備した。 In addition to the above, as a commercially available RAFT agent, benzyl 1H-pyrrole-1-carbodithioate (hereinafter also referred to as “BPDTC”) represented by the following formula (6) and S represented by the formula (7): , S-dibenzyltrithiocarbonate (hereinafter also referred to as “DBTTC”) was prepared.
≪水溶性重合体の製造≫
実施例１（重合体Ａの製造）
攪拌機、温度計、窒素導入管を備えた１Ｌフラスコに合成例１で得られたＲＡＦＴ剤（ＬＢＴＴＣ）（２４．１ｇ）、２，２´−アゾビス２−メチルブチロニトリル（以下「ＡＢＮ−Ｅ」ともいう）（２．５ｇ）、アクリロイルモルホリン（以下「ＡＣＭＯ」ともいう）（６００ｇ）およびアニソール（４００ｇ）を仕込み、窒素バブリングで十分脱気し、６０℃の恒温槽で重合を開始した。３時間後、ドライアイス／メタノール浴で冷却し反応を停止した。この時点でのＡＣＭＯの重合率をＧＣ測定から決定したところ、約８３％であった。上記重合溶液を、メタノールから再沈殿精製、真空乾燥することで重合体Ａを得た。得られた重合体Ａの分子量はＧＰＣ（ゲルパーミエーションクロマトグラフィー）測定より、Ｍｎ８５００、Ｍｗ１０６００であり、ＰＤＩは１．２５であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
≪Production of water-soluble polymer≫
Example 1 (Production of polymer A)
RAFT agent (LBTTC) (24.1 g) obtained in Synthesis Example 1 and 2,2′-azobis-2-methylbutyronitrile (hereinafter referred to as “ABN-E”) were added to a 1 L flask equipped with a stirrer, a thermometer, and a nitrogen introduction tube. (Also referred to as “)” (2.5 g), acryloylmorpholine (hereinafter also referred to as “ACMO”) (600 g) and anisole (400 g) were charged, sufficiently deaerated by nitrogen bubbling, and polymerization was started in a constant temperature bath at 60 ° C. After 3 hours, the reaction was stopped by cooling in a dry ice / methanol bath. The rate of polymerization of ACMO at this point was determined from GC measurement, and was about 83%. The polymer A was obtained by reprecipitation purification from methanol and vacuum drying. The molecular weight of the obtained polymer A was Mn8500 and Mw10600 from the GPC (gel permeation chromatography) measurement, and PDI was 1.25. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例２（重合体Ｂの製造）
仕込み原料を表１に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｂを得た。重合体Ｂの分子量はＧＰＣ測定より、Ｍｎ４９６００、Ｍｗ６２５００であり、ＰＤＩは１．２６であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 2 (Production of polymer B)
A polymer B was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 1. From the GPC measurement, the molecular weight of the polymer B was Mn49600, Mw62500, and PDI was 1.26. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例３（重合体Ｃの製造）
仕込み原料を表１に示す通りに以外は実施例１と同様の操作を行い、重合体Ｃを得た。重合体Ｃの分子量はＧＰＣ測定より、Ｍｎ２９３０００、Ｍｗ３５１０００であり、ＰＤＩは１．２０であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 3 (Production of polymer C)
A polymer C was obtained in the same manner as in Example 1 except that the charged raw materials were as shown in Table 1. From the GPC measurement, the molecular weight of the polymer C was Mn293000 and Mw351000, and PDI was 1.20. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例４（重合体Ｄの製造）
仕込み原料を表１に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｄを得た。重合体Ｄの分子量はＧＰＣ測定より、Ｍｎ６２２０００、Ｍｗ７９６０００であり、ＰＤＩは１．２８であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 4 (Production of polymer D)
A polymer D was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 1. From the GPC measurement, the molecular weight of the polymer D was Mn622000, Mw796000, and PDI was 1.28. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例５（重合体Ｅの製造）
仕込み原料を表１に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｅを得た。重合体Ｅの分子量はＧＰＣ測定より、Ｍｎ２８２０００、Ｍｗ３５２０００であり、ＰＤＩは１．２５であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 5 (Production of polymer E)
A polymer E was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 1. From the GPC measurement, the molecular weight of the polymer E was Mn282000, Mw352000, and PDI was 1.25. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例６（重合体Ｆの製造）
仕込み原料を表１に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｆを得た。重合体Ｆの分子量はＧＰＣ測定より、Ｍｎ２８８０００、Ｍｗ３６２０００であり、ＰＤＩは１．２６であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 6 (Production of polymer F)
A polymer F was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 1. From the GPC measurement, the molecular weight of the polymer F was Mn288000, Mw362000, and PDI was 1.26. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例７（重合体Ｇの製造）
仕込み原料を表１に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｇを得た。重合体Ｇの分子量はＧＰＣ測定より、Ｍｎ２７４０００、Ｍｗ３４８０００であり、ＰＤＩは１．２７であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 7 (Production of polymer G)
A polymer G was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 1. From the GPC measurement, the molecular weight of the polymer G was Mn274000 and Mw348000, and PDI was 1.27. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例８（重合体Ｈの製造）
仕込み原料を表１に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｈを得た。得られた重合体Ｈの分子量はＧＰＣ測定より、Ｍｎ１４２０００、Ｍｗ１７８０００であり、ＰＤＩは１．２５であった。
Example 8 (Production of polymer H)
A polymer H was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 1. From the GPC measurement, the molecular weight of the obtained polymer H was Mn 142000, Mw 178000, and PDI was 1.25.
実施例９（重合体Ｉの製造）
製造例８で得られた重合体Ｈ（１７０ｇ）、ＡＢＮ−Ｅ（０．１ｇ）、Ｎ，Ｎ−ジメチルアクリルアミド（以下、「ＤＭＡＡｍ」ともいう）（２００ｇ）およびアニソール（６３０ｇ）を用いた以外は製造例１と同様の操作を行い、ポリアクリロイルモルホリンとポリＮ、Ｎ−ジメチルアクリルアミドのブロックポリマーである重合体Ｉを得た。重合体Ｉの分子量はＧＰＣ測定より、Ｍｎ２８９０００、Ｍｗ３４６０００であり、ＰＤＩは１．２０であった。１Ｈ−ＮＭＲ測定からアクリロイルモルホリンとＮ、Ｎ−ジメチルアクリルアミドの組成比を決定したところ、アクリロイルモルホリン／Ｎ、Ｎ−ジメチルアクリルアミド＝５３／４７ｗｔ％であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 9 (Production of polymer I)
Except for using the polymer H (170 g), ABN-E (0.1 g), N, N-dimethylacrylamide (hereinafter also referred to as “DMAAm”) (200 g) and anisole (630 g) obtained in Production Example 8. The same operation as in Production Example 1 was performed to obtain a polymer I which is a block polymer of polyacryloylmorpholine and poly N, N-dimethylacrylamide. From the GPC measurement, the molecular weight of the polymer I was Mn 289000, Mw 346000, and PDI was 1.20. When the composition ratio of acryloylmorpholine and N, N-dimethylacrylamide was determined from 1H-NMR measurement, it was acryloylmorpholine / N, N-dimethylacrylamide = 53/47 wt%. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１０（重合体Ｊの製造）
仕込み原料を表１に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｊを得た。重合体Ｊの分子量はＧＰＣ測定より、Ｍｎ２７８０００、Ｍｗ３５６０００であり、ＰＤＩは１．２８であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 10 (Production of polymer J)
A polymer J was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 1. From the GPC measurement, the molecular weight of the polymer J was Mn278000, Mw356000, and PDI was 1.28. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１１（重合体Ｋの製造）
仕込み原料を表１に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｋを得た。重合体Ｋの分子量はＧＰＣ測定より、Ｍｎ２８００００、Ｍｗ３６３０００であり、ＰＤＩは１．３０であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 11 (Production of polymer K)
A polymer K was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 1. From the GPC measurement, the molecular weight of the polymer K was Mn 280000, Mw 363000, and PDI was 1.30. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１２（重合体Ｌの製造）
仕込み原料を表２に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｌを得た。重合体Ｌの分子量はＧＰＣ測定より、Ｍｎ３１５０００、Ｍｗ３５６０００であり、ＰＤＩは１．１３であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 12 (Production of polymer L)
A polymer L was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 2. From the GPC measurement, the molecular weight of the polymer L was Mn315000 and Mw356000, and PDI was 1.13. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１３（重合体Ｍの製造）
仕込み原料を表２に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｍを得た。重合体Ｍの分子量はＧＰＣ測定より、Ｍｎ２２２０００、Ｍｗ３４９０００であり、ＰＤＩは１．５７であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 13 (Production of polymer M)
A polymer M was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 2. From the GPC measurement, the molecular weight of the polymer M was Mn222000, Mw349000, and PDI was 1.57. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１４（重合体Ｎの製造）
仕込み原料を表２に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｎを得た。重合体Ｎの分子量はＧＰＣ測定より、Ｍｎ１９２０００、Ｍｗ３５００００であり、ＰＤＩは１．８２であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 14 (Production of polymer N)
A polymer N was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 2. From the GPC measurement, the molecular weight of the polymer N was Mn 192000, Mw 350,000, and PDI was 1.82. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１５（重合体Ｏ２の製造）
ＬＢＴＴＣの使用量を０．７ｇ、２，２´−アゾビス２−メチルブチロニトリルの使用量を０．１ｇに変更した以外は実施例１と同様の操作を行い、重合体Ｏ−１を得た。重合体Ｏ−１の分子量はＧＰＣ測定より、Ｍｎ２８７０００、Ｍｗ３６７０００であり、ＰＤＩは１．２８であった。
次いで、攪拌機、温度計、窒素導入管を備えた１Ｌフラスコに、上記で得られた重合体Ｏ−１（６００ｇ）、アニソール（４００ｇ）を仕込み、窒素バブリングで十分脱気した後、ｎ−プロピルアミン（０．１ｇ）をシリンジで添加した。室温で３０分アミン分解を行った後、ＡＣＭＯ（０．７ｇ）をシリンジで添加し、室温で一晩撹拌することによりマイケル付加反応を行った。上記反応溶液を、メタノールから再沈殿精製、真空乾燥することで重合体Ｏ−２を得た。得られた重合体Ｏ−２の分子量はＧＰＣ測定より、Ｍｎ２８８０００、Ｍｗ３６８０００であり、ＰＤＩは１．２８であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 15 (Production of polymer O2)
The same procedure as in Example 1 was conducted, except that the amount of LBTTC used was changed to 0.7 g and the amount of 2,2′-azobis-2-methylbutyronitrile was changed to 0.1 g, to obtain a polymer O-1. It was. From the GPC measurement, the molecular weight of the polymer O-1 was Mn287000, Mw367000, and PDI was 1.28.
Subsequently, the polymer O-1 (600 g) and anisole (400 g) obtained above were charged into a 1 L flask equipped with a stirrer, a thermometer, and a nitrogen introduction tube, and after sufficiently deaerated by nitrogen bubbling, n-propyl Amine (0.1 g) was added via syringe. After amine degradation at room temperature for 30 minutes, ACMO (0.7 g) was added with a syringe, and Michael addition reaction was performed by stirring overnight at room temperature. The reaction solution was purified by reprecipitation from methanol and vacuum dried to obtain a polymer O-2. From the GPC measurement, the molecular weight of the obtained polymer O-2 was Mn288000, Mw368000, and PDI was 1.28. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１６（重合体Ｐの製造）
攪拌機、温度計、窒素導入管を備えた１Ｌフラスコに２−メチル−２−[Ｎ−ｔｅｒｔ−ブチル−Ｎ−（１−ジエチルホスフォノ−２，２−ジメチルプロピル）−Ｎ−オキシル]プロピオン酸（０．７ｇ）、ＡＣＭＯ（６００ｇ）およびアニソール（４００ｇ）を仕込み、窒素バブリングで十分脱気し、１１５℃の恒温槽で重合を開始した。７時間後、ドライアイス／メタノール浴で冷却し反応を停止した。この時点でのアクリロイルモルホリンの重合率をＧＣ測定から決定したところ、約８９％であった。上記重合溶液を、メタノールから再沈殿精製、真空乾燥することで重合体Ｐを得た。得られた重合体Ｐの分子量はＧＰＣ測定より、Ｍｎ２３８０００、Ｍｗ３７１０００であり、ＰＤＩは１．５６であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 16 (Production of polymer P)
2-Methyl-2- [N-tert-butyl-N- (1-diethylphosphono-2,2-dimethylpropyl) -N-oxyl] propionic acid was added to a 1 L flask equipped with a stirrer, thermometer and nitrogen introduction tube. (0.7 g), ACMO (600 g) and anisole (400 g) were charged, sufficiently deaerated by nitrogen bubbling, and polymerization was started in a constant temperature bath at 115 ° C. After 7 hours, the reaction was stopped by cooling in a dry ice / methanol bath. The polymerization rate of acryloylmorpholine at this time was determined from GC measurement, and was about 89%. The polymer P was obtained by reprecipitation purification from methanol and vacuum drying. From the GPC measurement, the molecular weight of the obtained polymer P was Mn 238000, Mw 371000, and PDI was 1.56. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１７（重合体Ｑの製造）
攪拌機、温度計、窒素導入管を備えた１Ｌフラスコに２−メチル−２−[Ｎ−ｔｅｒｔ−ブチル−Ｎ−（１−ジエチルホスフォノ−２，２−ジメチルプロピル）−Ｎ−オキシル]プロピオン酸（０．７ｇ）、アニソール（５０ｇ）および１，４−ブタンジオールジアクリレート（０．２ｇ）を仕込み、窒素バブリングで十分脱気し、７０℃の恒温槽で反応を開始した。１時間後、予め窒素バブリングで十分脱気しておいたＡＣＭＯ（６００ｇ）およびアニソール（３５０ｇ）を添加し、１１５℃の恒温槽で重合を開始した。７時間後、ドライアイス／メタノール浴で冷却し反応を停止した。この時点でのＡＣＭＯの重合率をＧＣ測定から決定したところ、約８３％であった。上記重合溶液を、メタノールから再沈殿精製、真空乾燥することで重合体Ｑを得た。得られた重合体Ｑの分子量はＧＰＣ測定より、Ｍｎ２５２０００、Ｍｗ３３９０００であり、ＰＤＩは１．３５であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 17 (Production of polymer Q)
2-Methyl-2- [N-tert-butyl-N- (1-diethylphosphono-2,2-dimethylpropyl) -N-oxyl] propionic acid was added to a 1 L flask equipped with a stirrer, thermometer and nitrogen introduction tube. (0.7 g), anisole (50 g) and 1,4-butanediol diacrylate (0.2 g) were charged, sufficiently degassed by nitrogen bubbling, and the reaction was started in a constant temperature bath at 70 ° C. After 1 hour, ACMO (600 g) and anisole (350 g) which had been sufficiently deaerated by nitrogen bubbling in advance were added, and polymerization was started in a constant temperature bath at 115 ° C. After 7 hours, the reaction was stopped by cooling in a dry ice / methanol bath. The rate of polymerization of ACMO at this point was determined from GC measurement, and was about 83%. The polymer Q was obtained by reprecipitation purification from methanol and vacuum drying. From the GPC measurement, the molecular weight of the obtained polymer Q was Mn252000, Mw339000, and PDI was 1.35. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１８（重合体Ｒの製造）
Ｎ−ｔｅｒｔ−ブチル−１−ジエチルホスフォノ−２，２−ジメチルプロピル ニトロキシドを表２に示す通り仕込んで使用した以外は実施例１６と同様の操作を行い、重合体Ｒ得た。重合体Ｒの分子量はＧＰＣ測定より、Ｍｎ２５９０００、Ｍｗ３４６０００であり、ＰＤＩは１．３４であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 18 (Production of polymer R)
A polymer R was obtained in the same manner as in Example 16, except that N-tert-butyl-1-diethylphosphono-2,2-dimethylpropyl nitroxide was used as shown in Table 2. From the GPC measurement, the molecular weight of the polymer R was Mn 259000, Mw 346000, and PDI was 1.34. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１９（重合体Ｓの製造）
Ｎ−ｔｅｒｔ−ブチル−１−ジエチルホスフォノ−２，２−ジメチルプロピル ニトロキシドを表２に示す通り仕込んで使用した以外は実施例１６と同様の操作を行い、重合体Ｓを得た。重合体Ｓの分子量はＧＰＣ測定より、Ｍｎ２６８０００、Ｍｗ３３５０００であり、ＰＤＩは１．２５であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 19 (Production of polymer S)
A polymer S was obtained in the same manner as in Example 16 except that N-tert-butyl-1-diethylphosphono-2,2-dimethylpropyl nitroxide was used as shown in Table 2. From the GPC measurement, the molecular weight of the polymer S was Mn 268000, Mw 335000, and PDI was 1.25. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例２０（重合体Ｔの製造）
攪拌機、温度計、窒素導入管を備えた１Ｌフラスコに臭化銅（Ｉ）（０．２ｇ）、ペンタメチルジエチレントリアミン（０．７ｇ）、ＡＣＭＯ（６００ｇ）およびアニソール（４００ｇ）を仕込み、窒素バブリングで十分脱気した。エチレンビス（２−ブロモイソブチラート）（０．３ｇ）を添加した後、７０℃の恒温槽で重合を開始した。４時間後、ドライアイス／メタノール浴で冷却し反応を停止した。この時点でのＡＣＭＯの重合率をＧＣ測定から決定したところ、約７１％であった。上記重合溶液を、メタノールから再沈殿精製、真空乾燥することで重合体Ｔを得た。得られた重合体Ｔの分子量はＧＰＣ測定より、Ｍｎ２８２０００、Ｍｗ３６２０００であり、ＰＤＩは１．２８であった。ＩＣＰ質量分析器によって含有金属分を測定したところ、銅が１０００ｐｐｍ以上検出された。銅以外の金属分は何れも１００ｐｐｍ以下であった。
Example 20 (Production of polymer T)
Into a 1 L flask equipped with a stirrer, thermometer, and nitrogen introduction tube was charged copper bromide (I) (0.2 g), pentamethyldiethylenetriamine (0.7 g), ACMO (600 g) and anisole (400 g), and nitrogen bubbling was performed. I was deaerated well. After addition of ethylene bis (2-bromoisobutyrate) (0.3 g), polymerization was started in a constant temperature bath at 70 ° C. After 4 hours, the reaction was stopped by cooling in a dry ice / methanol bath. The rate of polymerization of ACMO at this point was determined from GC measurement and was about 71%. The polymer T was obtained by reprecipitation purification from methanol and vacuum drying. From the GPC measurement, the molecular weight of the obtained polymer T was Mn282000, Mw362000, and PDI was 1.28. When the contained metal content was measured by an ICP mass spectrometer, 1000 ppm or more of copper was detected. All metals other than copper were 100 ppm or less.
実施例２１（重合体Ｕの製造）
仕込み原料を表２に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｕを得た。重合体Ｕの分子量はＧＰＣ測定より、Ｍｎ２３５０００、Ｍｗ３６８０００であり、ＰＤＩは１．５７であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 21 (Production of polymer U)
A polymer U was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 2. From the GPC measurement, the molecular weight of the polymer U was Mn 235000 and Mw 368000, and PDI was 1.57. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例２２（重合体Ｖの製造）
仕込み原料を表２に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｖを得た。重合体Ｖの分子量はＧＰＣ測定より、Ｍｎ１７８０００、Ｍｗ３４４０００であり、ＰＤＩは１．９３であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Example 22 (Production of polymer V)
A polymer V was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 2. From the GPC measurement, the molecular weight of the polymer V was Mn178000, Mw344000, and PDI was 1.93. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
比較例１（重合体Ｗの製造）
仕込み原料を表３に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｗを得た。重合体Ｗの分子量はＧＰＣ測定より、Ｍｎ４０００、Ｍｗ５４００であり、ＰＤＩは１．３５であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Comparative Example 1 (Production of polymer W)
A polymer W was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 3. From the GPC measurement, the molecular weight of the polymer W was Mn4000 and Mw5400, and PDI was 1.35. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
比較例２（重合体Ｘの製造）
攪拌機、温度計、窒素導入管を備えた１Ｌフラスコに２，２´−アゾビス２−メチルブチロニトリル（６．３ｇ）、ＡＣＭＯ（３００ｇ）およびアニソール（７００ｇ）を仕込み、窒素バブリングで十分脱気し、６０℃の恒温槽で重合を開始した。３時間後、ドライアイス／メタノール浴で冷却し反応を停止した。この時点でのＡＣＭＯの重合率をＧＣ測定から決定したところ、約９３％であった。上記重合溶液を、メタノールから再沈殿精製、真空乾燥することで重合体Ｘを得た。得られた重合体Ｘの分子量はＧＰＣ測定より、Ｍｎ２６４０００、Ｍｗ７５３０００であり、ＰＤＩは２．８５であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Comparative Example 2 (Production of Polymer X)
A 1 L flask equipped with a stirrer, thermometer and nitrogen inlet tube was charged with 2,2′-azobis-2-methylbutyronitrile (6.3 g), ACMO (300 g) and anisole (700 g), and sufficiently deaerated by nitrogen bubbling. Then, polymerization was started in a constant temperature bath at 60 ° C. After 3 hours, the reaction was stopped by cooling in a dry ice / methanol bath. The rate of polymerization of ACMO at this point was determined from GC measurement, and was about 93%. The polymer solution was obtained by reprecipitation purification from methanol and vacuum drying to obtain a polymer X. The molecular weight of the obtained polymer X was Mn264000 and Mw753000 from the GPC measurement, and PDI was 2.85. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
比較例３（重合体Ｙの製造）
仕込み原料を表３に示す通りに変更した以外は実施例１と同様の操作を行い、重合体Ｙを得た。重合体Ｙの分子量はＧＰＣ測定より、Ｍｎ１３２０００、Ｍｗ３２５０００であり、ＰＤＩは２．４６であった。ＩＣＰ質量分析器によって含有金属分を測定したところ何れの金属分も１００ｐｐｍ以下であった。
Comparative Example 3 (Production of polymer Y)
A polymer Y was obtained in the same manner as in Example 1 except that the charged raw materials were changed as shown in Table 3. From the GPC measurement, the molecular weight of the polymer Y was Mn132000, Mw325000, and PDI was 2.46. When the contained metal content was measured by an ICP mass spectrometer, all the metal content was 100 ppm or less.
実施例１〜２２及び比較例１〜３で得られた各重合体の内容及び物性値について表１〜表３に示す。
表１〜表３に示された化合物の詳細は以下の通り。
ＡＣＭＯ：アクリロイルモルホリン
ＤＭＡＡｍ：Ｎ，Ｎ−ジメチルアクリルアミド
ＮＶＰ：Ｎ−ビニルピロリドン
ＢＤＤＡ：１，４−ブタンジオールジアクリレート
ＬＢＴＴＣ：ｎ−ドデシルスルファニルチオカルボニルスルファニルメチルベンゼン（合成例１で得られたＲＡＦＴ剤：トリチオカーボネート）
ＢＰＤＴＣ：ベンジル１Ｈ−ピロール−１−カルボジチオエート（Ａｌｄｒｉｃｈ社製ＲＡＦＴ剤：ジチオカーバメート）
ＤＬＢＴＴＣ：１，４−ビス（ｎ−ドデシルスルファニルチオカルボニルスルファニルメチル）ベンゼン（合成例２で得られたＲＡＦＴ剤：トリチオカーボネート）
ＤＢＴＴＣ：Ｓ，Ｓ−ジベンジルトリチオカーボネート（Ａｌｄｒｉｃｈ社製ＲＡＦＴ剤：トリチオカーボネート）
ＭＡＥＸ：Ｓ−（１−（メトキシカルボニル）エチル）キサントゲン酸Ｏ−エチル（合成例３で得られたＲＡＦＴ剤：ザンテート）
ＳＧ１−ＭＡＡ：２−メチル−２−[Ｎ−ｔｅｒｔ−ブチル−Ｎ−（１−ジエチルホスフォノ−２，２−ジメチルプロピル）−Ｎ−オキシル]プロピオン酸（Ａｒｋｅｍａ社製ニトロキシド化合物）
ＳＧ１：Ｎ−ｔｅｒｔ−ブチル−１−ジエチルホスフォノ−２，２−ジメチルプロピル ニトロキシド（Ａｒｋｅｍａ社製ニトロキシドラジカル）
ＡＢＮ−Ｅ：２，２’−アゾビス（２−メチルブチロニトリル）
Details of the compounds shown in Tables 1 to 3 are as follows.
ACMO: acryloylmorpholine DMAAm: N, N-dimethylacrylamide NVP: N-vinylpyrrolidone BDDA: 1,4-butanediol diacrylate LBTTC: n-dodecylsulfanylthiocarbonylsulfanylmethylbenzene (RAFT agent obtained in Synthesis Example 1: Trithiocarbonate)
BPDTC: benzyl 1H-pyrrole-1-carbodithioate (Alftrich RAFT agent: dithiocarbamate)
DLBTTTC: 1,4-bis (n-dodecylsulfanylthiocarbonylsulfanylmethyl) benzene (RAFT agent obtained in Synthesis Example 2: trithiocarbonate)
DBTTC: S, S-dibenzyltrithiocarbonate (RAFT agent manufactured by Aldrich: trithiocarbonate)
MAEX: S- (1- (methoxycarbonyl) ethyl) O-ethyl xanthate (RAFT agent obtained in Synthesis Example 3: xanthate)
SG1-MAA: 2-methyl-2- [N-tert-butyl-N- (1-diethylphosphono-2,2-dimethylpropyl) -N-oxyl] propionic acid (nitroxide compound manufactured by Arkema)
SG1: N-tert-butyl-1-diethylphosphono-2,2-dimethylpropyl nitroxide (nitroxide radical made by Arkema)
ABN-E: 2,2′-azobis (2-methylbutyronitrile)
評価例１
実施例１で得られた重合体Ａを用いて、研磨用濡れ剤及び研磨液組成物としての以下の評価を行った。得られた結果を表５に示す。
Evaluation Example 1
Using the polymer A obtained in Example 1, the following evaluation was performed as a polishing wetting agent and a polishing liquid composition. The results obtained are shown in Table 5.
＜シリカ分散性＞
９ｃｃのスクリュー瓶にコロイダルシリカ（１次粒子径：３０〜５０ｎｍ）５．０ｇに樹脂固形分２０％の水溶性重合体水溶液を０．５ｇ加えて、良く混合した。一晩静置後のシリカの粒子径（Ａ）を動的光散乱法（ＥＬＳＺ−１０００、大塚電子製）により測定し、水溶性重合体を加えていないコロイダルシリカの粒子径（Ｂ）からの変化率を下式に従って算出し、以下の基準より判定した。
変化率（％）＝｛（Ａ−Ｂ）／Ｂ｝×１００
◎：変化率が３％未満
○：変化率が３％以上５％未満
△：変化率が５％以上１０％未満
×：変化率が１０％以上
<Silica dispersibility>
In a 9 cc screw bottle, 0.5 g of a water-soluble polymer aqueous solution having a resin solid content of 20% was added to 5.0 g of colloidal silica (primary particle size: 30 to 50 nm) and mixed well. The particle size (A) of the silica after standing overnight was measured by a dynamic light scattering method (ELSZ-1000, manufactured by Otsuka Electronics Co., Ltd.), and from the particle size (B) of colloidal silica not added with a water-soluble polymer. The rate of change was calculated according to the following formula and judged according to the following criteria.
Rate of change (%) = {(A−B) / B} × 100
◎: Change rate is less than 3% ○: Change rate is 3% or more and less than 5% △: Change rate is 5% or more and less than 10% ×: Change rate is 10% or more
＜濡れ性＞
ガラスカッターで３×６ｃｍに切出したウェーハの重量を測定後、３％フッ酸水溶液に２０秒間浸漬してウェーハ表面の酸化膜を除去し、その後純水で１０秒間洗浄した。この工程をウェーハの表面が完全撥水になるまで繰り返した後、０．１８％の水溶性重合体溶液中に５分間浸漬した。浸漬後、ピンセットを用いて、ウェーハの表面が液面に対して垂直になるように引き上げ、１０秒経過時点におけるウェーハ端部からの撥水距離を目視で確認し、以下の基準により判定した。
◎：撥水距離 ３ｍｍ未満
○：撥水距離 ３ｍｍ以上５ｍｍ未満
△：撥水距離 ５ｍｍ以上７ｍｍ未満
▲：撥水距離 ７ｍｍ以上１０ｍｍ未満
×：撥水距離 １０ｍｍ以上
<Wettability>
After measuring the weight of the wafer cut to 3 × 6 cm with a glass cutter, it was immersed in a 3% hydrofluoric acid aqueous solution for 20 seconds to remove the oxide film on the wafer surface, and then washed with pure water for 10 seconds. This process was repeated until the wafer surface was completely water repellent, and then immersed in a 0.18% water-soluble polymer solution for 5 minutes. After immersion, the surface of the wafer was pulled up using a tweezers so as to be perpendicular to the liquid level, and the water-repellent distance from the end of the wafer at the time when 10 seconds had passed was visually confirmed, and judged according to the following criteria.
◎: Water repellent distance less than 3 mm ○: Water repellent distance 3 mm to less than 5 mm △: Water repellent distance 5 mm to less than 7 mm ▲: Water repellent distance 7 mm to less than 10 mm ×: Water repellent distance 10 mm or more
＜耐アルカリ性＞
１００ｃｃのスクリュー瓶に、水溶性重合体０．５ｇ、ｐＨ１０の緩衝溶液４９．５ｇを加えて溶解した。マグネチックスターラーを用いて、水溶液を２５℃下１週間攪拌した。攪拌前後の重合体の分子量（Ｍｗ）を、ＧＰＣで測定し、攪拌前の分子量Ａと攪拌後の分子量Ｂの比から、下式に従って変化率を算出し、以下の基準より判定した。
変化率（％）＝｛（Ａ−Ｂ）／Ａ｝×１００
◎：変化率が１％未満
○：変化率が１％以上５％未満
×：変化率が５％以上
<Alkali resistance>
In a 100 cc screw bottle, 0.5 g of a water-soluble polymer and 49.5 g of a pH 10 buffer solution were added and dissolved. The aqueous solution was stirred at 25 ° C. for 1 week using a magnetic stirrer. The molecular weight (Mw) of the polymer before and after stirring was measured by GPC, and the rate of change was calculated according to the following formula from the ratio of the molecular weight A before stirring and the molecular weight B after stirring, and judged according to the following criteria.
Rate of change (%) = {(A−B) / A} × 100
◎: Change rate is less than 1% ○: Change rate is 1% or more and less than 5% ×: Change rate is 5% or more
評価例２〜２１及び比較評価例１〜３
水溶性重合体を表４に記載の通り変更した以外は評価例１と同様の操作により各種評価を行った。得られた結果を表４に示す。
Evaluation Examples 2 to 21 and Comparative Evaluation Examples 1 to 3
Various evaluations were performed by the same operations as in Evaluation Example 1 except that the water-soluble polymer was changed as shown in Table 4. Table 4 shows the obtained results.
実施例１〜２２は、本発明の製造方法により研磨液組成物用水溶性重合体を得たものである。水溶性重合体のＰＤＩは１．１３〜１．９３と十分小さい値であり、これらを用いた評価例では、ウェーハへの濡れ性及び砥粒であるシリカ分散性ともに良好な性能を示した。
実施例１〜１５、２１及び２２はＲＡＦＴ法により研磨液用水溶性重合体を製造した例である。ＲＡＦＴ剤とラジカル重合開始剤の比率が同じ条件下において、ＲＡＦＴ剤の種類に着目すると、ザンテートを用いた実施例２１に比較して、トリチオカーボネート又はジチオカーバメートを用いた実施例１〜１２及び１５では、より小さなＰＤＩ値の水溶性重合体が得られている。同様に、ザンテートを用いた実施例２２に比較して、トリチオカーボネートを用いた実施例１３における水溶性重合体のＰＤＩは、小さな値となっている。
中でも、二官能性のＲＡＦＴ剤を用いた実施例１２では、得られた水溶性重合体（重合体Ｋ）のＰＤＩは１．１３と極めて小さく、より制御された重合が行われたことが分かる。
また、実施例３、１３及び１４の比較から、ＲＡＦＴ剤１ｍｏｌに対するラジカル重合開始剤の使用量が高い実施例１４（重合体Ｎ）に比較して、該ラジカル重合開始剤の使用量が０．５ｍｏｌ以下である実施例３及び１３の水溶性重合体（重合体Ｃ及びＭ）のＰＤＩ値はより小さいものであった。
実施例１５は、重合制御剤の不活性化処理を行ったものであるが、水溶性重合体の安定性（耐アルカリ性）が大きく向上する評価結果が得られた（評価例１４）。
In Examples 1 to 22, water-soluble polymers for polishing liquid compositions were obtained by the production method of the present invention. The PDI of the water-soluble polymer is 1.13 to 1.93, which is a sufficiently small value. In the evaluation examples using these, good performance was shown in both wettability to the wafer and silica dispersibility as abrasive grains.
Examples 1 to 15, 21 and 22 are examples in which a water-soluble polymer for polishing liquid was produced by the RAFT method. Focusing on the type of RAFT agent under the same ratio of RAFT agent and radical polymerization initiator, compared with Example 21 using xanthate, Examples 1 to 12 using trithiocarbonate or dithiocarbamate and In No. 15, a water-soluble polymer having a smaller PDI value is obtained. Similarly, compared with Example 22 using xanthate, the PDI of the water-soluble polymer in Example 13 using trithiocarbonate is a small value.
In particular, in Example 12 using the bifunctional RAFT agent, the PDI of the obtained water-soluble polymer (Polymer K) was as extremely small as 1.13, indicating that more controlled polymerization was performed. .
Further, from the comparison of Examples 3, 13, and 14, the amount of the radical polymerization initiator used was 0. 0 compared to Example 14 (Polymer N) in which the amount of the radical polymerization initiator used relative to 1 mol of the RAFT agent was high. The PDI values of the water-soluble polymers of Examples 3 and 13 (Polymers C and M) that were 5 mol or less were smaller.
In Example 15, the polymerization controller was inactivated, and an evaluation result that greatly improved the stability (alkali resistance) of the water-soluble polymer was obtained (Evaluation Example 14).
実施例１６〜１９はＮＭＰ法により研磨液用水溶性重合体を製造した例である。二官能性の重合前駆体を合成後に重合を行った実施例１７（重合体Ｑ）では、実施例１６（重合体Ｐ）に比較してよりＰＤＩの小さい水溶性重合体が得られた。また、ニトロキシドラジカルを併用した実施例１８及び１９においてもＰＤＩの低減が認められた（重合体Ｒ及び重合体Ｓ）。 Examples 16 to 19 are examples in which a water-soluble polymer for polishing liquid was produced by the NMP method. In Example 17 (Polymer Q), which was polymerized after synthesizing the bifunctional polymerization precursor, a water-soluble polymer having a smaller PDI was obtained compared to Example 16 (Polymer P). In Examples 18 and 19 in which nitroxide radicals were used in combination, PDI was also reduced (Polymer R and Polymer S).
これに対し、フリーラジカル重合法による比較例２では、得られた水溶性重合体のＰＤＩは２．８５と高い値であった。比較例２及び３で得られた水溶性重合体Ｘ（ＰＤＩ：２．８５）及び水溶性重合体Ｙ（ＰＤＩ：２．４６）は、シリカ分散性及びウェーハへの濡れ性においてバランス化されたものではなかった（比較評価例２及び３）。また、比較例１で得られた水溶性重合体（重合体Ｗ）はＭｎが低く、濡れ性に極めて劣るものであった（比較評価例１）。 In contrast, in Comparative Example 2 by the free radical polymerization method, the PDI of the obtained water-soluble polymer was a high value of 2.85. The water-soluble polymer X (PDI: 2.85) and the water-soluble polymer Y (PDI: 2.46) obtained in Comparative Examples 2 and 3 were balanced in silica dispersibility and wafer wettability. It was not a thing (Comparative Evaluation Examples 2 and 3). Further, the water-soluble polymer (polymer W) obtained in Comparative Example 1 had a low Mn and extremely poor wettability (Comparative Evaluation Example 1).
本発明の製造方法によれば、シリコンウェーハ等の表面研磨に有用な合成系の研磨液組成物用水溶性重合体であって、十分に小さいＰＤＩを有する水溶性重合体を簡便に製造することができる。
本発明の製造方法により得られた水溶性重合体は、シリカ等の砥粒やウェーハ等の被研磨体表面に対する吸着力や吸着速度の均一性が高いものである。従って、上記水溶性重合体を含む研磨液組成物では、被研磨体表面をムラなく均一に研磨することが可能となる。また、著しく分子量の高い成分を含まないことから砥粒分散性にも優れ、砥粒凝集体に起因する被研磨体表面の傷や表面汚染等が抑制される。
本発明の製造方法による水溶性重合体を含む研磨液組成物は各種の被研磨体に対して良好な研磨性能を発揮するため、半導体材料としてのシリコンウェーハの仕上げ研磨液組成物として特に有用である。
According to the production method of the present invention, it is possible to easily produce a water-soluble polymer having a sufficiently small PDI, which is a synthetic water-soluble polymer useful for polishing a surface of a silicon wafer or the like. it can.
The water-soluble polymer obtained by the production method of the present invention has high uniformity of adsorption force and adsorption rate on the surface of an object to be polished such as abrasive grains such as silica and wafers. Therefore, the polishing composition containing the water-soluble polymer can uniformly polish the surface of the object to be polished without unevenness. Further, since it does not contain a component having a remarkably high molecular weight, it is excellent in abrasive dispersibility, and scratches, surface contamination, etc. on the surface of the object to be polished due to abrasive aggregates are suppressed.
Since the polishing liquid composition containing the water-soluble polymer by the production method of the present invention exhibits good polishing performance for various objects to be polished, it is particularly useful as a final polishing liquid composition for a silicon wafer as a semiconductor material. is there.
Claims (13)
数平均分子量（Ｍｎ）が５，０００〜１，０００，０００であり、重量平均分子量（Ｍｗ）／数平均分子量（Ｍｎ）で表される分散度（ＰＤＩ）が２．０以下である重合体を、リビングラジカル重合法により製造することを特徴とする研磨液組成物用水溶性重合体の製造方法。 A method for producing a water-soluble polymer for polishing composition,
A polymer having a number average molecular weight (Mn) of 5,000 to 1,000,000 and a dispersity (PDI) represented by weight average molecular weight (Mw) / number average molecular weight (Mn) of 2.0 or less. Is manufactured by the living radical polymerization method, The manufacturing method of the water-soluble polymer for polishing liquid compositions characterized by the above-mentioned.
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| JP2018206956A (en) * | 2017-06-05 | 2018-12-27 | Ａｔシリカ株式会社 | Polishing composition |
| JPWO2018180479A1 (en) * | 2017-03-31 | 2020-05-14 | 株式会社フジミインコーポレーテッド | Polishing composition |
| WO2020153024A1 (en) * | 2019-01-24 | 2020-07-30 | 東亞合成株式会社 | Method for producing terminally-functionalized polymer, method for producing curable resin, and method for producing cured product |
| JPWO2021131198A1 (en) * | 2019-12-27 | 2021-07-01 |
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| JPWO2018180479A1 (en) * | 2017-03-31 | 2020-05-14 | 株式会社フジミインコーポレーテッド | Polishing composition |
| JP7275025B2 (en) | 2017-03-31 | 2023-05-17 | 株式会社フジミインコーポレーテッド | Polishing composition |
| JP2018206956A (en) * | 2017-06-05 | 2018-12-27 | Ａｔシリカ株式会社 | Polishing composition |
| WO2020153024A1 (en) * | 2019-01-24 | 2020-07-30 | 東亞合成株式会社 | Method for producing terminally-functionalized polymer, method for producing curable resin, and method for producing cured product |
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| JP7435477B2 (en) | 2019-01-24 | 2024-02-21 | 東亞合成株式会社 | Method for producing terminally functionalized polymer, method for producing curable resin composition, and method for producing cured product |
| JPWO2021131198A1 (en) * | 2019-12-27 | 2021-07-01 |
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