JP2017015609A - Flow rate measuring device and liquid processing system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a flow rate measuring device and a liquid processing system having a liquid leakage detection function.SOLUTION: A flow rate measuring device comprises: a channel forming member that forms a channel in which a liquid flows; flow rate measuring means that is provided in the channel forming member and measures the flow rate of a liquid flowing in the channel; opening/closing means that is arranged on the downstream side of the flow rate measuring means and opens/closes the channel; and liquid leakage determination means that determines leakage of a liquid in a determination section between a position in the channel at which the flow rate measuring means measures the flow rate and a position at which the opening/closing means opens/closes the channel on the basis of a result of detection performed by the flow rate measuring means when the channel is closed.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a flow rate measuring device and a fluid processing system capable of detecting liquid leakage.

  2. Description of the Related Art Conventionally, flow rate measuring devices are mounted on various devices that use fluids, for example, semiconductor manufacturing devices. Along with the advancement of devices in recent years, the flow rate measuring device used in one device is also becoming more multifunctional. For example, a composite measuring instrument having a function of measuring not only the flow rate of fluid but also temperature has been proposed (see Patent Document 1). Such multi-functionality contributes to downsizing and cost reduction of the apparatus, and also helps to reduce the wiring work in the apparatus and facilitate the manufacture of the apparatus.

Japanese Patent Laid-Open No. 11-64055

  The present invention provides a flow rate measuring device and a liquid processing system having a liquid leakage detection function.

The flow rate measuring device of the present invention includes a flow channel forming member that forms a flow channel through which a liquid flows, a flow rate measuring unit that is provided in the flow channel forming member and that measures a flow rate of the liquid that flows through the flow channel, and the flow rate measuring device. On the basis of the detection result of the flow rate measuring means when the flow path is closed, the flow rate measurement by the flow rate measuring means among the flow paths is arranged downstream of the means and opens and closes the flow path A liquid leakage determination means for determining liquid leakage in a determination section between the position and the flow path opening / closing position by the opening / closing means.
According to this aspect of the present invention, it is possible to detect liquid leakage based on the flow rate detection result after closing the flow path.

In the present invention, the determination section may be provided with a processing device that performs a predetermined process on the liquid in the flow path or using the liquid in the flow path.
According to this aspect of the present invention, the amount of liquid supplied to the processing apparatus can be managed.

Further, the present invention may further comprise notifying means for notifying the outside that a liquid leak has occurred in the determination section based on a detection result of the liquid leak determining means.
According to this aspect of the present invention, it is possible to immediately notify the person concerned of the occurrence of liquid leakage.

Moreover, in the said invention, the said liquid leak determination means detects that the liquid leak generate | occur | produced in the said determination area, when the integrated value of the flow volume which the said flow measurement means detects becomes more than a predetermined threshold value. May be a feature.
According to this aspect of the present invention, for example, by setting a predetermined threshold value, the liquid leakage determination can be performed according to the degree or level.

The present invention can be widely applied to a fluid processing system in which the above-described flow rate measuring device is installed in a predetermined piping path.
According to the present invention, in the process of performing the fluid treatment, the flow rate can be measured while determining the liquid leakage, so that the management load of the fluid treatment can be reduced.

  ADVANTAGE OF THE INVENTION According to this invention, the flow measuring device and liquid processing system which have a liquid leak detection function are realizable.

BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram which shows the liquid processing system which applied the flow measuring device which concerns on one Embodiment of this invention to piping for fluid processing. The principal part enlarged view which shows the outline of the on-off valve in the flow measuring device of FIG. The principal part enlarged view which shows the outline of the flow volume detection structure in the flow volume measuring apparatus of FIG. The flowchart figure which shows the liquid leak detection procedure in the flow measuring device of FIG. The functional block diagram which shows one structural example of the part in connection with the liquid flow detection in the flow measuring device of FIG. The schematic block diagram which shows the fluid processing system which concerns on other embodiment of this invention.

DESCRIPTION OF EMBODIMENTS Hereinafter, the present invention will be described in detail based on embodiments with reference to the drawings.
1 shows a schematic configuration diagram of a flow rate measuring device and a fluid processing system according to an embodiment of the present invention, and FIG. 2 shows a schematic configuration diagram of an on-off valve as a main part of the flow rate measuring device of FIG. FIG. 3 shows a schematic configuration diagram of the flow rate detection structure flow path.

  As shown in the figure, a fluid processing system 100 of the present embodiment includes a pair of flow path forming members 10 that form a flow path 1 through which a fluid flows, and a liquid processing apparatus 20 that is connected between the flow path forming members 10. And a flow rate measuring device 30 that measures the flow rate before and after the fluid processing device 20.

  Here, for example, in the present embodiment, the liquid processing apparatus 20 is an apparatus that heats a liquid, but may be an apparatus that performs other processing. In addition, such a liquid processing apparatus 20 does not need to be provided in the flow-path formation member 10, and becomes a flow-path monitoring system in that case.

  Further, the flow path forming member 10 is constituted by, for example, a cylindrical pipe (pipe), and is connected by a connection member 11 having a flange on the upstream side of the liquid processing apparatus 20 to supply liquid into the liquid processing apparatus 20. A first pipe 10a that is connected to the downstream side of the liquid processing apparatus 20 by a connecting member 11 having a flange 11 to flow the processed liquid downstream, and receives a second liquid discharged from the liquid processing apparatus 20. And a pipe 10b.

  Furthermore, in the present embodiment, the flow rate measuring device 30 includes, for example, a flow rate detection structure 310 provided for measuring the flow rate of the liquid flowing in the flow path 1 on the upstream side of the liquid processing device 20, and the liquid processing device. An on-off valve 320 serving as a channel opening / closing unit that opens and closes the channel on the downstream side of 20 and a flow rate measurement that receives a signal 310a of the flow rate detection structure unit 310 and a signal 320a from the on-off valve 320 to perform flow rate measurement and liquid leakage determination. And an apparatus main body 330.

  Here, as shown in FIG. 1 and FIG. 3, the flow rate detection structure section 310 causes the fluid flow in the cylindrical connection pipe 311 connected to the first pipe 10 a and the flow path 1 in the connection pipe 311. A screw 312 with a magnet 312a that rotates upon receiving, a bearing 313 that rotatably holds the screw 312, and a magnetic field change that accompanies the rotation of the screw 312 from the outside of the flow path forming member 10 that is provided on the side surface of the connecting pipe 311. And a magnetic sensor 314 for detecting. The magnetic sensor 314 can detect a magnetic change that occurs as the screw 312 rotates and can calculate a flow rate from the detection result of the magnetic change. For this reason, 310 functions as a flow rate measurement sensor.

  On the other hand, the opening / closing valve 320 can rotate the cylindrical connection pipe 321 connected to the second pipe 10b, the disk-shaped disk member 322 rotating in the flow path in the connection pipe 10b, and the disk member 322. And a manual lever 324 that rotates the disk member 322. The manual lever 324 disposed outside the connection pipe 321 rotates the disk member 322 in the flow path 1 to connect the connection pipe. The flow path 1 is opened and closed from the outside of the 321.

  The manual lever 324 is fixed to the shaft portion 323 by a nut 325, and an engaging portion between the manual lever 324 and the connecting pipe 321 is rotatably provided via a seal member 326 in order to prevent liquid leakage. The portion is further closed with a sealing member 327.

  For example, in this embodiment, when the direction of the manual lever 324 is oriented substantially parallel to the liquid flow direction in the flow path 1, the disk member 322 opens the flow path 1 and the liquid flow in the flow path 1 is released. . On the other hand, when the manual lever 324 is set in a direction substantially orthogonal to the liquid flow direction of the flow path 1, the disk member 322 rotates and the liquid flow of the flow path 1 is blocked. A seal member 322 a is fixed to the outer periphery of the disk member 322, and seals between the disk member 322 and the connecting pipe 321. In this embodiment, the flow path 1 is opened and closed manually. However, for example, the disk member 322 may be automatically rotated to open and close the flow path 1.

  Here, in such an open / close valve 320, a magnet 324a is fixed to the lower end surface of the manual lever 324, and a magnetic sensor 328 is disposed on the upper end surface of the connection pipe 321 facing the magnet 324a. That is, the position where the magnet 324a and the magnetic sensor 328 face each other by rotating the manual lever 324 (that is, the fully opened position of the flow path 1) can be detected. That is, the magnetic sensor 328 serves as a means for detecting opening / closing of the opening / closing valve 320, and notifies the flow measuring device body 330 of a signal 320a indicating that the opening / closing valve 320 is closed.

  In the fluid processing system 100 of this embodiment, when the opening / closing valve 320 is opened and the fluid flows in the flow path 1, the screw 312 rotates together with the magnet 312 a, and the rotation speed information (signal) of the screw 312 is detected by the magnetic sensor 314. ) To the flow measuring device main body 330.

  As a result, in the flow rate measuring device main body 330, if the signal of the magnetic sensor 314 is received from the opening / closing valve 320 and it is determined that the opening / closing valve 320 (disk 322) has changed from the open state to the closed state, Liquid leakage is detected by processing the signal 310a received from the magnetic sensor 314 of the unit 310, and an alarm signal 330a is output to a predetermined destination.

  Here, FIG. 5 shows a functional block diagram of the main body of the flow rate measuring device that performs liquid leak detection in the flow rate measuring device of the present embodiment. As shown in FIG. 5, when the sensor output signal 310 a is input from the magnetic sensor 314 to the pulse cycle measuring unit 3301, the flow rate measuring device main body 330 causes the pulse cycle measuring unit 3301 to flow through the flow path 1. Measure the flow rate. For example, when there is no liquid leakage, the CPU 3302 displays the flow value through the display 3304. In the present embodiment, the display 3304 is provided for display, but a mechanism for notifying the flow rate value to a predetermined destination may be used.

  Here, the CPU 3302 determines whether or not liquid leakage has occurred. For example, after a sensor output signal (closed signal) 320a indicating that the open / close valve 320 is closed from the magnetic sensor 328 is input to the CPU 3302, the flow rate measured by the pulse period measuring unit 3301 exceeds a threshold value within a predetermined period. If it is determined that there is a liquid leak, it is determined that a liquid leak has occurred.

  That is, the CPU 3302 displays the flow rate value on the display unit 3304 without determining whether the liquid leaks until receiving the sensor output signal (closed signal) 320a from the magnetic sensor 328, and receives the sensor output signal (closed signal) 320a. Start leak detection. If the flow rate exceeds the threshold value as a result of the liquid leakage detection, an abnormal signal 330a is output. At this time, the display unit 3304 may display the flow rate after the start of the liquid leak detection, or may display that it is abnormal after determining the abnormality. As described above, the CPU 3302 determines the liquid leak and outputs the alarm signal 330a when the threshold value is exceeded. Therefore, the CPU 3302 also has a role as a notifying unit that performs an alarm as well as the liquid leak detecting unit.

  As will be described later, the liquid leakage detection threshold value may be set by the user, may be a single threshold value, or may be set to a plurality of different threshold values, and a different alarm signal 330a may be output for each threshold value. Good. Further, the threshold value for detecting the liquid leakage is stored in advance in the nonvolatile memory 3303 shown in FIG. 5. When the CPU 3302 receives the sensor output signal (closed signal) 320a, the threshold value (the sensor output signal 320a is received from the nonvolatile memory 3303). If it is updated by the user before reception, the latest threshold value) is read out and liquid leakage is detected.

  As described above, the control unit 3302 of the flow rate measuring device main body 330 functions as a liquid leakage detection means in a section (determination section) between the flow detection structure section 310 and the on-off valve 320. That is, in the flow rate measuring device main body 330 of the present embodiment, the flow rate is measured regardless of the state of the on-off valve 320. However, when the on-off valve 320 is in the closed state, liquid leakage detection is also performed. To emit. Note that the form of the alarm can be, for example, an electric signal, sound, light, mechanical vibration, or a combination thereof.

Here, with reference to FIG.4 and FIG.5, one Example of the determination step in a liquid leak detection is described concretely.
First, in step S 401, when an initial setting is made by the user, the initial setting is stored in the nonvolatile memory 3303. If the initial setting is not made by the user, the device is set according to the setting information stored in the nonvolatile memory 3303. Next, in step S402, flow rate measurement is performed. Then, it is confirmed whether or not the opening / closing valve 320 is closed during the flow rate measurement started in step S402 (step S403). Specifically, it is checked whether or not a sensor output signal (closed signal) 320 a indicating that the opening / closing valve 320 is closed is input to the CPU 3302 from the magnetic sensor 328 associated with the opening / closing valve 320. If NO in step S403 (when the opening / closing valve 320 is in the open state), the measured flow rate is displayed on the display 3304, and the process returns to step S402 again. On the other hand, if YES in step S403 (when the on-off valve 320 is in the closed state), it is determined whether the measured flow rate exceeds the threshold (step S405). When the flow rate measured in step S405 does not exceed the threshold value (in the case of NO), the flow rate is displayed on the display 3304, and the flow rate measurement returns to step S402 again. On the other hand, when it is determined that the flow rate measured in step S405 exceeds the threshold value (in the case of YES), alarm output is performed by a preset method (step S406). Thereby, it becomes possible to confirm a liquid leak at an early stage. As the threshold value for determining that the liquid has leaked, the value preset by the user in step S401 is used. In that case, a plurality of threshold values are provided so that the degree of liquid leakage can be detected in a plurality of ranks. Also good.

  In step S406, a magnetic sensor installed upstream of the open / close valve 302 with the open / close valve installed in the flow path closed (or a flow sensor that directly detects the flow rate by screw rotation may be used). When the signal generated by 314 indicates a flow rate above a certain level, it is determined that a device failure has occurred on the downstream side of the magnetic sensor 314 and the fluid is leaking, and the alarm signal 330a indicates which section An alarm may be issued including information on whether or not a degree of liquid leakage has occurred. As a result, on the upstream side of the flow path section where the liquid leak occurred, switch to another flow path section where there is no liquid leak, or urgently check the liquid leak section by rushing to the site. Response can be implemented.

  In the present invention, the integrated flow rate (cumulative flow rate value) calculated using a signal generated by a magnetic sensor installed upstream of the valve in a state where the open / close valve installed in the flow path is closed is predetermined. If the value is equal to or greater than the value, it may be determined that a failure of the apparatus has occurred on the downstream side of the flow sensor and the fluid is leaking, and an alarm is issued. For example, if the flow rate of the fluid detected by the signal is greater than a preset threshold value with the disk member closing the flow path, the flow rate measuring device body determines that the fluid is leaking from the flow path. An alarm signal is issued to the outside.

  As described above, according to the fluid treatment system of the present embodiment, liquid leakage can be detected with a simple configuration while performing flow rate measurement, and if there is an abnormality, it can be immediately notified to the outside (for example, an administrator). Therefore, the subsequent response can be performed immediately. Further, since the liquid leak detection is performed by combining the flow rate detection and the open / close detection of the on-off valve, a large-scale configuration is not required, and the liquid leak detection can be realized at a low cost together with the flow rate measurement.

<Other embodiments>
As mentioned above, although this invention was demonstrated based on one Embodiment, this invention is not limited to one Embodiment mentioned above.
For example, in the above-described embodiment, leakage detection is performed based on the information on the liquid flow in the flow path. However, the present invention is not limited to this, and for example, FIG. 6 (a) and FIG. ), A liquid leakage detection device 40 that detects liquid leaking from the flow path may be combined. For example, as shown in FIGS. 6A and 6B, a structure in which two detection conductors 41 and 42 are laid along the pipe of the flow path may be applied.

  In this configuration, when fluid leakage occurs, for example, at a connection portion of the pipe, the leaked fluid reduces the electrical resistance between the fluid leakage detection conductors 41 and 42 connected by the connecting member 43. By detecting this change in electrical resistance with the detection device 40, it is possible to detect fluid leakage from the flow path. In such a structure, an electrode made of a corrosion-resistant material can be used to prevent corrosion of the detection electrode. A more accurate leak detection can be realized by combining the mechanism that detects the leakage of liquid using the flow rate and the structure that detects the actual leak.

  In addition, when liquid processing is involved in the flow path when performing leakage detection with the flow measurement device according to the present invention, it is necessary to arrange a flow sensor upstream of the fluid flow and a valve downstream of the flow. is there. Conversely, if the flow path is closed on the upstream side, the fluid remains inside, and the flow rate may change when the fluid in the flow path is moved by the processing apparatus, which is not desirable.

DESCRIPTION OF SYMBOLS 10 Flow path formation member 20 Liquid processing apparatus 30 Flow measurement apparatus 100 Liquid processing system 310 Flow detection structure 320 Opening-closing valve

Claims (5)

A flow path forming member that forms a flow path through which the liquid flows;
A flow rate measuring means connected to the flow path forming member for measuring the flow rate of the liquid flowing in the flow path;
Opening / closing means arranged on the downstream side of the flow rate measuring means for opening and closing the flow path,
Based on the detection result of the flow rate measurement means when the flow path is closed, the liquid in the determination section between the flow rate measurement position by the flow rate measurement means and the flow path opening / closing position by the opening / closing means in the flow path A flow rate measuring device comprising: a liquid leakage determining means for determining leakage.   The flow rate measuring device according to claim 1, wherein the determination section is provided with a processing device that performs a predetermined process on the liquid in the flow path or using the liquid in the flow path. .   The flow rate measuring device according to claim 1, further comprising a notification unit that notifies the outside that a liquid leak has occurred in the determination section based on a detection result of the liquid leakage determination unit. .   2. The liquid leak determination unit detects that a liquid leak has occurred in the determination section when an integrated value of a flow rate detected by the flow rate measurement unit exceeds a predetermined threshold value. 4. The flow rate measuring device according to any one of items 1 to 3.   A fluid processing system, wherein the flow rate measuring device according to any one of claims 1 to 4 is installed in a predetermined piping path.

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