JP2017003786A - Lens module and LED light source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce loss of light volume exiting individual lenses and to densely arrange the light exit areas of a plurality of lenses.SOLUTION: A lens module comprises a plurality of lenses 31, a lens holder 32 to which the plurality of lenses 31 are attached, and a plurality of fixtures 5 engaged with and fixed to a light exit surface 31b or a light incident surface of the lens holder 32 at a plurality of separated points around each lens 31. The fixtures 5 is shared by two or more lenses 31 of the plurality of lenses 31.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a lens module in which a plurality of lenses are attached to a lens holder, and an LED light source device using the lens module.

  Conventionally, as a configuration for attaching a plurality of lenses to a lens holder, for example, as shown in Patent Document 1, there is one using a holding frame having through holes corresponding to a plurality of lenses. Specifically, a structure in which the outer periphery of each lens is pressed and fixed from the light emission side by the pressing frame, or a flange is formed on the outer periphery of each lens, and the flange is pressed by the pressing frame from the light emission side. A structure that can be fixed is considered.

  However, the structure using the above-described holding frame has a structure in which the entire circumference of each lens is pressed, and the light is blocked by the holding frame, resulting in a large light quantity loss. For example, in the case of a light source device in which high light intensity is desired, such as a light source device for exposure applications, the light use efficiency is reduced due to this light amount loss, and it becomes difficult to obtain a desired light intensity. Especially problematic.

  In addition, since the light emission areas in the plurality of lenses are exposed from the through holes of the pressing frame, the interval between the light emission areas is limited by the interval of the through holes formed in the pressing frame. It is difficult to densely arrange the light emission areas in the plurality of lenses. For example, in the case of a light source device in which a uniform light intensity distribution is desired, such as a light source device for exposure, a uniform light intensity distribution is obtained by limiting the dense arrangement of the light irradiation regions. Is particularly problematic.

JP 2010-272858 A

  Therefore, the present invention has been made to solve the above-described problems, and it is a main problem to reduce the loss of the amount of light emitted from each lens and to closely arrange the light emission areas in a plurality of lenses. It is what.

  That is, the lens module according to the present invention includes a plurality of lenses, a lens holder to which the plurality of lenses are attached, and a light emitting surface or a light incident surface at a plurality of spaced apart positions of the lens, and the lens holder A plurality of fixtures that are fixed to each other, and the fixture is shared by two or more of the plurality of lenses.

  In such a lens module, a plurality of fixtures come in contact with a plurality of locations on the light exit surface or light entrance surface of the lens and are fixed to the lens holder, so that the portion blocked by the lens fixture is reduced. Light quantity loss can be reduced. By reducing the light loss, light utilization efficiency can be improved, and a desired light intensity can be obtained. In addition, the lens is fixed with a plurality of fixtures without using a conventional holding frame, and the fixture is shared by two or more lenses, so that the light emission areas in the plurality of lenses can be arranged densely. it can. Since the light emission regions can be arranged densely, a uniform light intensity distribution can be obtained.

Preferably, the plurality of lenses are attached to the lens holder in a predetermined arrangement pattern, and the fixture is shared by two or more adjacent lenses among the plurality of lenses.
As described above, since the plurality of lenses are attached in a predetermined arrangement pattern and the fixing tool is shared by the two adjacent lenses, the assembly of the lens module can be facilitated. Moreover, a fixture can be reduced in size by sharing a fixture with two adjacent lenses.

  In particular, in order to obtain a uniform light intensity distribution by arranging a plurality of lenses in a close-packed arrangement, the arrangement pattern of the plurality of lenses is a triangular lattice pattern, and the fixture is adjacent to each other among the plurality of lenses. It is desirable that the three matching lenses are shared.

It is desirable that the plurality of fixtures are arranged at equal pitches (equal intervals) on the lens holder.
With this configuration, a plurality of lenses can be positioned at equal pitches (equal intervals).

  In order to facilitate the positioning of the lens with respect to the lens holder, it is desirable that a concave portion provided corresponding to each of the plurality of lenses is formed in the lens holder.

  As a specific embodiment of the fixture, it is conceivable that the fixture has a head that sandwiches the lens with the lens holder. In this case, in order to prevent the lens from being damaged and to fix the lens without play, it is desirable that a cushion member is provided between the head and the lens.

It is desirable that the fixing tool is a screw that is screwed into a female screw hole formed in the lens holder.
With this configuration, it is possible to further reduce the size of the fixture, and it is possible to spread a plurality of lenses in close contact with each other or close to each other. At this time, a screw as a fixing tool is screwed into a female screw hole formed in a region between lenses which are in close contact with each other or close to each other. Further, by using the screw, the lens can be easily detached and the lens position can be easily adjusted.

In addition, an LED light source device according to the present invention includes the above-described lens module and a plurality of LEDs provided corresponding to the plurality of lenses attached to the lens unit.
According to such an LED light source device, the effect obtained by the lens module can improve light utilization efficiency and obtain a desired light intensity, and can obtain a uniform light intensity distribution.

  According to the present invention configured as described above, the loss of the amount of light emitted from each lens can be reduced, and the light emission areas of the plurality of lenses can be densely arranged.

The perspective view which shows the LED light source device which concerns on this embodiment. The top view of the LED light source device of the embodiment. The expanded sectional view of the LED light source device of the embodiment. The partial expanded sectional view of the LED light source device of the embodiment. The top view which shows the lens holder of the embodiment. The figure which shows the arrangement | positioning aspect of the lens of the same embodiment, and a fixing tool. The figure for showing an example of the attachment method of the lens of the embodiment. The top view of the lens module of modification embodiment. The top view of the lens module of modification embodiment. The schematic diagram which shows the modification of a fixing tool.

  Below, one Embodiment of the LED light source device which concerns on this invention is described with reference to drawings.

  The LED light source device 100 according to the present embodiment is used as a light source device for an exposure machine, for example. An exposure machine (mask aligner) refers to an apparatus for transferring and printing a fine pattern on a workpiece using ultraviolet rays, and is mainly used for manufacturing semiconductor elements such as transistors and ICs.

  Specifically, as shown in FIGS. 1 to 3, the LED light source device 100 is a surface light emitting device having a light emitting portion on one surface having a substantially rectangular shape in plan view, for example, and is arranged on the printed wiring board 21. A plurality of LEDs 2, a lens module 3 having a plurality of lenses 31 corresponding to each of the plurality of LEDs 2, and a casing 4 having a substantially rectangular parallelepiped shape that accommodates the plurality of LEDs 2 and the lens module 3 are provided. In addition, the radiation fin 4F for radiating the heat | fever of LED2 is provided in the back surface (opposite side to a light emission part) of a casing.

  The plurality of LEDs 2 are mounted in a predetermined arrangement pattern on a printed wiring board 21 having a substantially rectangular shape in plan view, and specifically, mounted in a triangular lattice shape. That is, the light emitting portions of the three LEDs 2 adjacent to each other are mounted so as to be positioned at the apex of the equilateral triangle. Each LED 2 is mounted such that its optical axis is perpendicular to the surface of the printed wiring board 21. The LED 2 of the present embodiment is a surface-mount type ultraviolet LED in which an LED chip is mounted in a cavity formed of ceramic or resin.

  The lens module 3 includes a plurality of lenses 31 and a lens holder 32 to which the plurality of lenses 31 are attached.

  The plurality of lenses 31 have the same shape. As shown in FIG. 4, each lens 31 has a rotating body shape, and one surface in the direction of the rotation axis is a planar light incident surface 31 a, and the other surface in the direction of the rotation axis is convex. It becomes the curved light emission surface 31b.

  The lens holder 32 is a flat plate-shaped member having a rectangular shape in plan view, and is disposed in front of the light emitting side of the plurality of LEDs 2 in the casing 4. Specifically, the lens holder 32 has a plurality of through holes 32h formed corresponding to the plurality of LEDs 2, and is configured so that light from the LEDs 2 can be emitted to the outside through the through holes 32h. Has been. That is, as shown in FIG. 5, in the lens holder 32, the plurality of through holes 32h are formed in a predetermined arrangement pattern (triangular lattice shape in the present embodiment).

  As shown in FIGS. 3 and 4, the lens holder 32 is configured such that the lens 31 is attached to each of the openings on the light emission side of the plurality of through holes 32 h. That is, in the lens holder 32, the plurality of lenses 31 are attached in a predetermined arrangement pattern (triangular lattice shape in the present embodiment) like the plurality of LEDs 2 (see FIG. 2 and the like).

  In the present embodiment, as shown in FIGS. 4 and 5, an accommodation recess 321 for accommodating a part of the lens 31 is formed in each of the openings on the light emission side of the plurality of through holes 32 h. The housing recess 321 has a plan view shape substantially the same as the plan view shape of the lens 31, has a diameter larger than the diameter of the through hole 32h, and is formed concentrically with the through hole 32h in plan view. Has been. The housing recess 321 is configured such that the light exit surface 31 b of the lens 31 is positioned outside the lens holder 32 in a state where the lens 31 is housed.

  The plurality of lenses 31 are fixed to the lens holder 32 by the plurality of fixtures 5.

  Specifically, as shown in FIGS. 2, 3, and 6, the plurality of fixtures 5 are engaged with the light emitting surface 31 b from the light emitting side at a plurality of positions spaced apart from each other, and the lens holder 32 is fixed. In the present embodiment, three fixing tools 5 are configured to engage with each lens 31. Specifically, the three fixtures 5 are arranged at equal intervals in the circumferential direction around each lens 31, and engage at three positions that are equally spaced in the circumferential direction at the peripheral edge portion of the light emitting surface 31 b of the lens 31. .

  Each fixing tool 5 is the same and is a screw that is screwed into a female screw hole 32 </ b> M formed in the lens holder 32. Then, by screwing the screw 5 into the female screw hole 32M, the lens 31 is sandwiched and fixed between the head 51 of the screw 5 and the lens holder 32.

  In the present embodiment, the cushion member 6 is provided between the head 51 of the screw 5 and the lens 31 in order to fix the lens 31 without play while preventing the lens 31 from being damaged or damaged. This cushion member 6 is a resin washer, for example, and has a diameter substantially the same as the head 51 of the screw 5 in this embodiment. With this configuration, by screwing the screw 5 into the female screw hole 32M, the resin washer 6 comes into contact with the peripheral edge portion of the light exit surface 31b of the lens 31, and the lens 31 is fixed.

  The fixture 5 is configured to be shared by two or more adjacent lenses 31 among the plurality of lenses 31. In the present embodiment, there are a fixture 5 shared by three adjacent lenses 31 and a fixture 5 shared by two adjacent lenses 31.

  As shown in FIG. 6, the fixture 5 shared by the three lenses 31 adjacent to each other includes the three lenses 31 adjacent to each other in the plurality of lenses 31 arranged in the triangular lattice shape (closest arrangement), that is, It is shared by the three lenses 31 located at triangular lattice points (vertices of regular triangles). At this time, the female screw hole 32M of the lens holder 32 is formed at a position equidistant from the lenses 31 in the region between the three adjacent lenses 31. That is, the fixture 5 shared by the three adjacent lenses 31 is screwed into the female screw hole 32M formed in the region between the three adjacent lenses 31.

  Further, as shown in FIG. 2, the fixture 5 shared by the two adjacent lenses 31 is shared by the two adjacent lenses 31 in the plurality of lenses 31 located in the outer peripheral portion. At this time, the female screw hole 32M of the lens holder 32 is formed at an equal distance from the two adjacent lenses 31.

  In the present embodiment, like the plurality of lenses 31, the plurality of fixtures 5 that fix the plurality of lenses 31 arranged in a triangular lattice shape (closest arrangement) are also arranged in a triangular lattice shape. As shown in FIG. 7, the plurality of lenses 31 arranged in a triangular lattice shape is composed of a plurality of lens rows 31 </ b> L including a plurality of lenses 31. Further, the plurality of fixtures 5 arranged in a triangular lattice shape are also composed of a plurality of fixture rows 5 </ b> L including the plurality of fixtures 5.

  The lens module 3 is assembled in order from the outermost (for example, leftmost) lens row 31L. Specifically, among the three fixtures 5 that fix the lenses 31 constituting the outermost lens row 31L, the two fixtures 5 (outermost fixture group 5L) located on the outer side (left side) are tightened. . By tightening the two fixing tools 5 located on the outer side, the lenses 31 constituting the outermost lens array 31L are opposite to the two fixing tools 5 on the inner peripheral surface of the housing recess 321 (right side). It is positioned in close contact with.

  Next, among the three fixtures 5 that fix the lenses 31 constituting the outermost lens row 31L, the remaining one fixture 5 (second fixture row 5L) located inside (right side) is tightened. . By tightening the remaining one fixture (second fixture row 5L), the outermost lens row 31L is fixed. Further, by tightening the second fixture row 5L, the second lens row 31L is fixed in close contact with the side (right side) opposite to the second fixture row 5L on the inner peripheral surface of the housing recess 321. Is done. In this manner, the lens 31 is positioned and fixed by tightening the fixture row 5L in turn for each LED row 31L.

  In the LED light source device 100 of the present embodiment, as shown in FIGS. 3 and 4, the lens module 3 has a plurality of second lenses 33 and a second lens holder 34 to which the second lenses 33 are attached. Yes.

  The second lens 33 is a condensing lens that condenses the light from the LED 2. In the present embodiment, the light collected by the second lens 33 is derived as parallel light by the lens 31.

  The second lens holder 34 has a plurality of through holes 34h corresponding to the plurality of LEDs 2, and the second lens 34 is attached to the through holes 34h. Specifically, a flange portion 341 that engages with the second lens 33 is formed in the opening on the light incident side of the through hole 34h, and the second lens 33 engages with the flange portion 341 and the through hole 34h. The second lens 33 is provided. Then, the lens holder 32 is attached to the light emission side surface of the second lens holder 34, and the second lens 33 is fixed to the second lens holder 34. Specifically, a flange 322 for pressing the light exit surface side of the second lens 33 is formed at the light incident side opening of the through hole 32 h of the lens holder 32. Note that an O-ring 35 is provided between the flange 322 and the second lens 33.

<Effect of this embodiment>
According to the LED light source device 100 of the present embodiment configured as described above, the plurality of fixtures 5 engage with the plurality of locations of the lens 31 and are fixed to the lens holder 32. The portion to be reduced can be reduced, and the light amount loss can be reduced. By reducing the light loss, light utilization efficiency can be improved, and a desired light intensity can be obtained.
When a non-light emitting part such as a pad electrode is provided on the upper surface of the LED chip of the LED 2, the light loss is reduced by arranging the non-light emitting part around the optical axis of the LED 2 so as to face the fixture 5. This can be further reduced.

  In addition, the lens 31 is fixed by the plurality of fixing tools 5 without using the conventional holding frame, and the fixing tool 5 is shared by the two or more lenses 31. Can be arranged. A uniform light intensity distribution can be obtained by densely arranging the light emission regions. In particular, since the arrangement pattern of the plurality of lenses 31 is a triangular lattice pattern, the plurality of lenses 31 can be arranged in a close-packed manner to obtain a uniform luminous intensity distribution.

  Since the fixing tool 5 is shared by the three lenses 31 adjacent to each other in the plurality of lenses 31 arranged in a triangular lattice shape, the assembly of the lens module 3 can be facilitated. Here, since the housing recess 321 is formed in the lens holder 32, the assembly can be further facilitated. Further, the fixture 5 is attached to a region between the three adjacent lenses 31 and is shared by the three adjacent lenses 31 forming the region, so that the fixture 5 can be reduced in size. it can.

  Furthermore, since the fixture 5 is a screw, the fixture 5 can be easily reduced in size, and a plurality of lenses 31 can be spread closely in close proximity to each other. Further, by using the screw 5, the lens 31 can be easily detached and the position of the lens 31 can be easily adjusted.

<Other embodiments>
The present invention is not limited to the above embodiment.

  For example, in the above-described embodiment, the arrangement pattern of the lenses 31 is a triangular lattice shape, but may be a square lattice shape (matrix shape) such as a square lattice as shown in FIG. When the four fixtures 5 are configured to engage with each lens 31, the fixture 5 is shared by two lenses adjacent to each other or four lenses adjacent to each other.

  Moreover, in the said embodiment, although it has set as the arrangement | positioning which has a some lens row | line | column, the some lens 31 is good also as a one-row arrangement | positioning. At this time, for example, as shown in FIG. 9, a plurality of fixtures 5 are provided on one side along the lens array, and a contact surface 7 that contacts the plurality of lenses 31 is provided on the other side. It is conceivable that the fixture 5 is tightened in a state of being in contact with the contact surface 7. At this time, the fixture 5 is shared by the two lenses 31 adjacent to each other.

  In addition to the screw, the fixture 5 has an insertion portion that is inserted into a fixing hole formed in the lens holder, and a head portion that is formed at one end of the insertion portion, and is returned to the insertion portion. May be formed. In addition, it may be configured so that it cannot be removed from the fixing hole by this return.

  In addition, as shown in FIG. 10, the fixture 5 includes a pressing body 8 that extends over a plurality of lenses 31 and contacts a part of the outer edge of each lens 31 in the circumferential direction. May be configured to be shared by a plurality of lenses 31 by fixing to the lens holder 32.

  In addition, each lens of the embodiment has only one lens portion corresponding to one LED, but may have a plurality of lens portions corresponding to a plurality of LEDs 2. For example, a lens unit in which a plurality of (for example, two or three) lenses of the above-described embodiment are integrally formed may be used. Even in this case, similarly to the above-described embodiment, the fixture is configured to be shared by two or more lens units.

  The lens shape is not limited to the above embodiment, and may be, for example, a cylindrical lens. In this case, the cylindrical lens may be provided corresponding to one LED or may be provided corresponding to a plurality of LEDs.

  In addition, the lens holder of the embodiment may have a flat lens mounting surface without having a housing recess. Moreover, you may have positioning parts, such as a protrusion which contact | abuts to a lens side peripheral surface, in order to position a lens, without having an accommodation recessed part.

  In the above embodiment, the light source device for the exposure machine has been described. However, the present invention can also be applied to a light source device for inspection such as surface inspection of a workpiece. In addition, the light incident surface 31 a side may be fixed by the fixing tool 5 instead of the light emission surface 31 b side of the lens 31. Specifically, the lens 31 is attached to each of the light incident side openings of the plurality of through holes 32h of the lens holder 32 so as to face the opening side.

  In addition, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

100 ... LED light source device 2 ... LED
DESCRIPTION OF SYMBOLS 3 ... Lens module 31 ... Lens 32 ... Lens holder 321 ... Recess 32M ... Female screw hole 5 ... Fixing tool 51 ... Head 6 ... Cushion member

Claims (8)

Multiple lenses,
A lens holder to which the plurality of lenses are attached;
A plurality of fixtures that are engaged with a light exit surface or a light incident surface at a plurality of positions spaced apart from each other and fixed to the lens holder;
A lens module in which the fixture is shared by two or more of the plurality of lenses. The plurality of lenses are attached to the lens holder in a predetermined arrangement pattern,
The lens module according to claim 1, wherein the fixture is shared by two or more adjacent lenses among the plurality of lenses. The arrangement pattern of the plurality of lenses is a triangular lattice shape,
The lens module according to claim 2, wherein the fixture is shared by three adjacent lenses among the plurality of lenses.   The lens module according to any one of claims 1 to 3, wherein the plurality of fixtures are arranged at an equal pitch on the lens holder.   The lens module according to any one of claims 1 to 4, wherein a concave portion provided corresponding to each of the plurality of lenses is formed in the lens holder. The fixture has a head for sandwiching the lens with the lens holder;
The lens module according to claim 1, wherein a cushion member is provided between the head and the lens.   The lens module according to claim 1, wherein the fixing tool is a screw that is screwed into a female screw hole formed in the lens holder. The lens module according to any one of claims 1 to 7,
An LED light source device comprising a plurality of LEDs provided corresponding to each of a plurality of lenses attached to the lens unit.