JP2016524313A - 赤外線放射のため半導体光センサ - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 55
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- 238000010521 absorption reaction Methods 0.000 claims abstract description 10
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
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- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000005678 Seebeck effect Effects 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
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- H01L31/113—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
- H01L31/1136—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor the device being a metal-insulator-semiconductor field-effect transistor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
- G01J5/22—Electrical features thereof
- G01J5/24—Use of specially adapted circuits, e.g. bridge circuits
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- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14649—Infrared imagers
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- H01L31/02—Details
- H01L31/02016—Circuit arrangements of general character for the devices
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- H01L31/02—Details
- H01L31/02016—Circuit arrangements of general character for the devices
- H01L31/02019—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02027—Circuit arrangements of general character for the devices for devices characterised by at least one potential jump barrier or surface barrier for devices working in avalanche mode
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
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- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
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- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J1/46—Electric circuits using a capacitor
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- Condensed Matter Physics & Semiconductors (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
Claims (9)
- 1μmから1000μmの波長範囲にある赤外線放射を検出するための光センサであって、
半導体基板のメイン領域と、
前記半導体基板に到来する放射のための高ドープ相互作用領域と、
絶縁層の上に伝導材料を含み、前記相互作用領域に隣接した延長構造である、隣接するゲート電極と、
電荷コレクタとしての役割を果たし、本質的に高ドープ半導体ゾーンからなり且つ前記ゲート電極に隣接した延長構造である、隣り合った高ドープコレクタ領域と、を備え、
前記相互作用領域が第1の電圧VBに電気的にバイアスされ、
前記コレクタ領域は、光励起された電子が収集されるはずのケースでは前記第1の電圧VBより高く、且つ、光励起されたホールが収集されるはずのケースでは前記第1の電圧VBより低い、第2の電圧VSに電気的にバイアスされ、
到来する光子が、自由キャリア吸収を通して前記到来する光子のエネルギーを前記相互作用領域中の可動電荷キャリアに付与し、自由電荷キャリアが電子であるケースでは光励起された電子を生成し、または、前記自由電荷キャリアがホールであるケースでは光励起されたホールを生成し、
前記ゲート電極が、前記相互作用領域中の前記光励起された電荷キャリアに対する電位障壁が作られるように第3の電圧VGに電気的にバイアスされ、これにより、前記到来する光子により付与されたエネルギーは、前記光励起された電荷キャリアが前記電位障壁を乗り越えるのに十分であり、前記光励起された電荷キャリアが、後続する電子的検出のために前記コレクタ領域中に収集され得る、光センサ。 - 前記相互作用領域の領域が、前記ゲート電極と前記コレクタ領域とに少なくとも1つの側が境を接している、請求項1に記載の光センサ。
- 前記コレクタ領域は、前記相互作用領域の領域により囲まれた前記ゲート電極により囲まれている、請求項1に記載の光センサ。
- 前記コレクタ領域が長方形の構造、円形の構造または多角形の構造を有する、請求項3に記載の光センサ。
- 前記コレクタ領域に接続された増幅器または回路をさらに備え、
前記増幅器または回路が、前記第2の電圧VSを感知し、出力電圧VOUTを生成する、請求項1〜4のいずれか一項に記載の光センサ。 - 前記増幅器または回路は、前記コレクタ領域を前記第2の電圧VSにリセットするリセットスイッチを含む、請求項5に記載の光センサ。
- 前記リセットスイッチは、前記コレクタ領域を周期的にリセットする、請求項6に記載の光センサ。
- 前記増幅器または回路が、感知ノードおよびソースフォロワトランジスタを含み、前記感知ノードが、前記リセットスイッチにより前記第2の電圧VSにリセットされ、前記ソースフォロワトランジスタのゲートに接続されている、請求項5〜7のいずれか一項に記載の光センサ。
- 感知ノードが、プログラム可能な電流ソースに接続され、前記電流ソースにより、オフセット電流を前記コレクタ領域により蓄積された信号電流から引くことができ、前記信号電流の電子的な検出より前に、暗電流の実部分を前記信号電流から引くことができるため、前記プログラム可能な電流ソースが、前記光センサのダイナミックレンジの増加を提供する、請求項5〜7のいずれか一項に記載の光センサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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CH7162013 | 2013-04-04 | ||
CH00716/13 | 2013-04-04 | ||
PCT/JP2014/060042 WO2014163205A1 (en) | 2013-04-04 | 2014-03-31 | Semiconductor photosensor for infrared radiation |
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JP2016524313A true JP2016524313A (ja) | 2016-08-12 |
JP6178429B2 JP6178429B2 (ja) | 2017-08-09 |
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US (1) | US10032951B2 (ja) |
JP (1) | JP6178429B2 (ja) |
CH (1) | CH709726B1 (ja) |
DE (1) | DE112014001833T5 (ja) |
WO (1) | WO2014163205A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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FR3020906B1 (fr) * | 2014-05-07 | 2018-11-02 | Ulis | Dispositif haute dynamique pour l'integration d'un courant electrique |
US20160247956A1 (en) * | 2015-02-20 | 2016-08-25 | Dee-Son Pan | Transistor Barrier-Controlled Internal Photoemission Detector |
US9871067B2 (en) * | 2015-11-17 | 2018-01-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Infrared image sensor component |
US10497818B2 (en) * | 2016-07-29 | 2019-12-03 | Canon Kabushiki Kaisha | Photodetection device and photodetection system |
CN109860310A (zh) * | 2019-01-28 | 2019-06-07 | 三明学院 | 一种电压信号光电探测器 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH02248077A (ja) * | 1989-03-22 | 1990-10-03 | Nec Corp | 配列型赤外線検知器 |
JPH0388367A (ja) * | 1989-08-31 | 1991-04-12 | Toshiba Corp | 固体撮像装置 |
JP2001504274A (ja) * | 1996-11-14 | 2001-03-27 | イギリス国 | 赤外線検出器 |
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US6480641B1 (en) * | 1997-12-19 | 2002-11-12 | Intel Corporation | Method and apparatus for optically modulating light through the back side of an integrated circuit die along the side walls of junctions |
US6493030B1 (en) | 1998-04-08 | 2002-12-10 | Pictos Technologies, Inc. | Low-noise active pixel sensor for imaging arrays with global reset |
US7446805B2 (en) * | 2003-01-08 | 2008-11-04 | Cypress Semiconductor Corporation | CMOS active pixel with hard and soft reset |
US7214269B2 (en) * | 2004-10-15 | 2007-05-08 | Hitachi Cable, Ltd. | Si-doped GaAs single crystal substrate |
EP2160012B1 (en) | 2008-09-01 | 2013-11-27 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | Single photon imaging device |
US8299472B2 (en) * | 2009-12-08 | 2012-10-30 | Young-June Yu | Active pixel sensor with nanowire structured photodetectors |
US8138822B1 (en) * | 2009-01-06 | 2012-03-20 | Marvell International Ltd. | Circuits and methods for calibrating switching current sources |
-
2014
- 2014-03-31 DE DE112014001833.3T patent/DE112014001833T5/de not_active Ceased
- 2014-03-31 US US14/432,886 patent/US10032951B2/en active Active
- 2014-03-31 CH CH01428/15A patent/CH709726B1/de unknown
- 2014-03-31 JP JP2015548534A patent/JP6178429B2/ja active Active
- 2014-03-31 WO PCT/JP2014/060042 patent/WO2014163205A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02248077A (ja) * | 1989-03-22 | 1990-10-03 | Nec Corp | 配列型赤外線検知器 |
JPH0388367A (ja) * | 1989-08-31 | 1991-04-12 | Toshiba Corp | 固体撮像装置 |
JP2001504274A (ja) * | 1996-11-14 | 2001-03-27 | イギリス国 | 赤外線検出器 |
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US20150280047A1 (en) | 2015-10-01 |
WO2014163205A1 (en) | 2014-10-09 |
DE112014001833T5 (de) | 2015-12-17 |
US10032951B2 (en) | 2018-07-24 |
JP6178429B2 (ja) | 2017-08-09 |
CH709726B1 (de) | 2018-05-15 |
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