JP2016203262A - Laser irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser irradiation device improving work efficiency and operability so as to work a surface of an irradiated object.SOLUTION: A laser irradiation device includes a device body including a control unit, an operation unit, and at least one of a cooling unit and a laser oscillator, a holding member 100, and a cable (connecting member) 90 connecting the device body and the holding member 100. An adjusting member 120 adjusting an irradiation condition of a laser to an irradiated object is arranged on a laser irradiation side of the holding member 100 of the laser irradiation device capable of working a surface of the irradiated object by laser irradiation through the holding member 100. Thus, various objects are selected as the irradiated objects, and the surface of the various objects can be cleaned and worked with excellent working efficiency by a simple operation.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a laser irradiation apparatus capable of processing the surface of an irradiation object by laser irradiation.

  2. Description of the Related Art Conventionally, as a device for processing an irradiation object by laser irradiation, a device for welding or cutting a metal is known.

  Also, as described in Patent Documents 1 and 2, there is known an apparatus that removes dirt and foreign matter adhering to a mold surface by irradiating a mold for resin molding with a laser.

JP 2003-145548 A JP 2008-149705 A

  However, when cleaning to remove dirt and foreign matter on the surface of the object to be irradiated, or processing to partially peel off the surface coating or to partially scrape the surface, a device that welds or cuts metal by laser irradiation does not use a laser. Since the pulse width is too long as 1 ms or more, it generates heat, damages the irradiation target, and cannot be cleaned or processed.

  In addition, since the devices as described in Patent Documents 1 and 2 have a cleaning target specified on the mold surface, when trying to apply widely to irradiation objects with irregular shapes, the direction of the laser to be irradiated, It was difficult to properly adjust the irradiation conditions such as the wavelength, the operation was complicated, the work efficiency was poor, and it was not put to practical use.

  An object of the present invention is to provide a laser irradiation apparatus with improved workability and operability so that the surface of an irradiation object can be processed.

  <1> An apparatus main body including at least one of a control unit, an operation unit, a cooling unit, and a laser oscillator, a gripping member, and a connecting member that connects the apparatus main body and the gripping member. A laser irradiation apparatus capable of processing a surface of an irradiation object by laser irradiation via an adjustment member provided on the laser irradiation side of the gripping member for adjusting a laser irradiation condition for the irradiation object This is a laser irradiation apparatus.

  <2> The adjustment member is disposed on the tip side of the first rod-shaped portion that extends in a direction that goes straight from the laser irradiation side of the gripping member, and is different from the first rod-shaped portion. The laser irradiation apparatus according to <1>, wherein a second rod-like portion that can extend in a direction is formed.

  <3> The laser irradiation apparatus according to <1> or <2>, wherein the adjustment member includes a wavelength conversion element that converts a wavelength of a laser.

  <4> The laser irradiation apparatus according to any one of <1> to <3>, wherein the adjustment member includes an irradiation area adjustment element that increases or decreases an irradiation area on the surface of the irradiation object.

  <5> The laser irradiation apparatus according to any one of <1> to <4>, wherein the gripping member includes the laser oscillator.

  <6> The laser irradiation apparatus according to any one of <1> to <5>, wherein the gripping member includes a cooling unit for the gripping member.

  <7> The grip member is formed with a rod-shaped portion extending along the laser irradiation direction and a grip portion extending in a direction substantially perpendicular to the rod-shaped portion, and includes a laser irradiation on / off switching unit < The laser irradiation apparatus according to any one of 1> to <6>.

  <8> The laser irradiation device according to any one of <1> to <6>, wherein the gripping member is formed in a rod shape extending along a laser irradiation direction and includes an on / off switching unit.

  <9> The laser irradiation apparatus according to <7> or <8>, wherein a plurality of the on / off switching units are arranged.

  <10> The laser irradiation apparatus according to any one of <1> to <9>, wherein the gripping member includes an inclination detection sensor.

  <11> The laser irradiation apparatus according to any one of <1> to <10>, wherein the adjustment member includes a rotation guide unit that enables the adjustment member to be rotated and can be held in use at a predetermined position. is there.

  <12> The apparatus main body is disposed such that the center of gravity of the cooling unit is located at a position equal to or less than half of the height of the apparatus main body, and includes conveyance assisting means at a position higher than the center of gravity. The laser irradiation apparatus according to any one of 1> to <11>.

  In the present invention, “the surface of the irradiation object can be processed” means both cleaning that removes dirt and foreign matter on the surface of the irradiation object, and processing that partially peels the surface coating or partially cuts the surface. The meaning of both the case where only one is possible and the case where only one is possible is included.

  According to the laser irradiation apparatus of the present invention, since the adjustment member for adjusting the laser irradiation condition for the irradiation object is provided on the laser irradiation side of the gripping member, workability in order to process the surface of the irradiation object, Operability can be improved.

FIG. 1 is a side view of the apparatus main body of the laser irradiation apparatus of the present invention. FIG. 2 is a plan view of the apparatus main body of the laser irradiation apparatus of the present invention. FIG. 3 is a diagram illustrating a monitor screen of the operation unit. FIG. 4 is a side view of the gripping member and the adjustment member of the laser apparatus of the present invention. FIG. 5A is an enlarged longitudinal sectional view taken along the line A-A ′ of the adjusting member in FIG. 4, and FIG. 5B is an enlarged transverse sectional view thereof. FIG. 6 is a principle explanatory view for explaining the principle of the holding member and the adjusting member of the laser apparatus of the present invention. FIG. 7 is a graph illustrating the relationship between the laser wavelength and the reflectance. 8A to 8D are diagrams showing examples of the irradiation area adjusting element. FIG. 9 is a graph for explaining the relationship between the laser irradiation diameter and the irradiation intensity (energy intensity) in the example of FIG. FIGS. 10A and 10B are action explanatory views for explaining the action of the laser irradiation on the irradiation object in the present invention. FIGS. 11A and 11B are side views of another embodiment of the gripping member and the adjusting member of the laser apparatus of the present invention. FIG. 12 is a cross-sectional view of the main part of the adjustment member when the motor device is provided as the rotation guide means.

  Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a side view of the apparatus main body of the laser irradiation apparatus of the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is a view showing a monitor screen of an operation unit. 1 and 2 show the internal structure that is actually not visible from the outside in a state where it can be seen for convenience of understanding.

  As shown in FIG. 1 and FIG. 2, the apparatus main body 10 of the laser irradiation apparatus 1 of the present invention includes a lower accommodating portion 11a whose interior is partitioned into a rectangular shape from the bottom to a height of about 2/3, and this It is comprised from the upper side accommodating part 11b formed in trapezoid shape by the side view above the lower side accommodating part 11a.

  The cooling unit 20 is disposed in the lower housing portion 11a, and the control unit 30, the operation unit 40, the transformer 50, the power supply unit 60, and the capacitor 70 are disposed in the upper housing portion 11b. Further, a conveyance auxiliary means 80 is provided on the side surface of the apparatus main body 10. In addition, since FIG. 1 has shown in the state which can visually recognize an internal structure, the conveyance assistance means 80 formed outside is shown with the virtual line.

  The cooling unit 20 is a unit for cooling and maintaining the temperature within a certain range so that a malfunctioning device does not heat up and malfunction. The cooling unit 20 is disposed so that the center of gravity is at a position equal to or less than ½ of the height of the apparatus main body 10. Thereby, since the burden by the weight of the cooling unit 20 which becomes comparatively heavy can be reduced, carrying becomes easy.

  The cooling unit 20 mainly includes a water tank 21, a radiator 22 provided behind the water tank 21, a pump 23 provided below, and a filter 24 provided on the front side. With this configuration, the water in the water tank 21 is cooled by the radiator 22, pumped by the pump 23, and filtered by the filter 24, and is circulated under the control of the control unit 30 to cool the device. ing. Note that a breaker 25 and a power lamp 26 are also provided in the lower housing portion 11a in which the cooling unit 20 is disposed.

  The control unit 30 includes a main board and is an essential element for controlling the operation of the entire apparatus. In the example of FIG. 2, two cooling fans 35 that send air from outside and cool the control unit 30 are provided at the end of the apparatus main body near the control unit 30.

  The operation unit 40 includes a touch panel and is an essential element for operating the apparatus. In the example of FIG. 1, the operation unit 40 is detachably attached along the inclination of the front end of the upper housing portion 11b.

  As shown in FIG. 3, the monitor screen 41 of the operation unit displays a basic operation key 42 including four keys for operating the apparatus on the lower side. The unit 30 is activated so that a desired operation can be performed.

  The monitor screen 41 displays various conditions for the apparatus and the laser. In the example of FIG. 3, among these, the voltage of the apparatus, the energy of the laser to be irradiated, the frequency thereof, and the on / off of the laser (displayed as “guide light” on the monitor screen 41) are numerical values and on / off display. The portion is a condition setting operation key 43. That is, by touching these, numerical values can be switched for voltage, energy, and frequency, and switching of the laser on / off can be performed. Furthermore, the numerical values of the voltage and energy are changed in conjunction with the control unit 30, and if the voltage condition setting key 43 is operated, the energy value changes so as to become a corresponding numerical value. If the energy condition setting key 43 is operated, the voltage value changes in the same manner. It should be noted that the display of the language can be changed, for example, display switching between English and Japanese.

  The transformer 50 is provided between the control unit 30 and the operation unit 40, and is an up transformer that performs voltage boosting. The power supply unit 60 is provided next to the transformer unit 50, that is, in the back in FIG. 2, and includes a power supply 61 that supplies power stably, a relay 62, and a surge killer 63 that absorbs surge. Yes. The capacitor 70 is provided behind the control unit 30 in FIG. The control unit 30 controls these electric devices so as to maintain the power stability of the apparatus.

  In the example of FIG. 1, the conveyance assisting unit 80 is a recess formed on a side surface on which a finger can be hung, and is provided at a position higher than the center of gravity of the cooling unit 20. Thereby, the apparatus main body 10 can be carried, reducing the burden by the weight of the cooling unit 20. Further, the conveyance assisting means 80 may be formed by forming a convex portion at the same position as in the example of FIG. 1 and placing it with a finger on it, or putting it on a shoulder with a belt attached. In addition, about 2 to 6 carriers may be provided at the bottom to further facilitate the movement.

  The weight of the apparatus main body 10 is less than 40 kg, preferably 30 kg or less, more preferably 20 kg or less from the viewpoint of easy carrying.

  In the example of FIG. 2, the apparatus main body 10 has the cooling unit 20 disposed in the lower housing portion 11a and the other main elements disposed in the upper housing portion 11b. However, the lower housing portion 11a is empty. Still other elements may be arranged in the portion.

  As shown in FIG. 1, a cable 90 as a connecting member for connecting a gripping member (shown in FIG. 3) is attached to the back surface of the apparatus main body 10 described above. The cable 90 is formed of a bellows-like flexible member and can be bent and extended freely. The cable 90 transmits power from the apparatus main body 10 to the gripping member.

  Further, a foot switch 95 as an on / off switching means for laser irradiation is attached via a cord 96 below. Thereby, on / off switching of laser irradiation can be performed quickly.

  Subsequently, the gripping member and the adjustment member will be described. 4 is a side view of the gripping member and the adjusting member of the laser apparatus of the present invention, FIG. 5A is an enlarged longitudinal sectional view taken along line AA ′ of the adjusting member in FIG. 4, and FIG. FIG. 6 is a diagram for explaining the principle, and FIG. 7 is a graph for explaining the relationship between the laser wavelength and the reflectance. 8A to 8D are diagrams showing examples of the irradiation area adjusting element, and FIG. 9 is a graph for explaining the relationship between the laser irradiation diameter and the irradiation intensity (energy intensity) in the example of FIG. FIGS. 10A and 10B are action explanatory views for explaining the action of the laser irradiation on the irradiation object in the present invention. In FIGS. 8A to 8D, for convenience of explanation, the diameter of the laser incident on the irradiation area adjusting member is not matched in each example.

  As shown in FIG. 4, the gripping member 100 is a member formed in a substantially T shape by a rod-like portion 101 and a grip portion 102. Specifically, the rod-like portion 101 extends along the laser irradiation direction, that is, the horizontal direction in the drawing. The grip portion 102 extends substantially vertically downward from the position on the laser irradiation side, that is, the tip end side, slightly from the middle of the rod-like portion 101, while having a slight inclination. At the time of work, the object to be irradiated is irradiated with a laser passing through the rod-shaped portion 101 while holding the grip member 100 by the grip portion 102.

  The rod-like portion 101 includes a laser oscillator (not shown in FIG. 4) that is an essential element for laser irradiation. As described above, since the laser oscillator is provided in the gripping member 100, the only member existing up to the irradiation object is the adjustment member, so that the laser passing distance can be shortened compared with the case where the apparatus main body 10 is provided. It is possible to suppress loss and variation due to a general change in direction.

  An inclination detection sensor 103 that detects the inclination of the member is attached above the base end side of the rod-like portion 101. The tilt detection sensor 103 does not irradiate a laser unless it is installed substantially vertically. That is, the inclination detection sensor 103 can change the mounting position. Specifically, in the example of FIG. 4, since the rod-shaped portion 101 is oriented in the horizontal direction, the rod-shaped portion 101 is attached above the base end side of the rod-shaped portion 101, but when the rod-shaped portion 101 is directed in the vertical direction, It is attached to the back surface of the part 101 (corresponding to the top in this state). As a result, it is possible to prevent in advance that a human being accidentally irradiated with a laser and damaging the eyes or the like. Note that, for example, when irradiating an irradiation object with an irregular shape, the rod-shaped portion 101 may be tilted in an oblique direction. Therefore, from the viewpoint of work efficiency, the tilt detection sensor 103 is turned off and operated. It does not have to be.

  A range of about 60% of the total length from the tip end side of the bottom of the rod-like portion 101 is formed thicker, and this portion is a cooling means 104 in which cooling water is stored. As described above, since the gripping member 100 includes the cooling unit 104, it is possible to prevent the hand from becoming hot during work, and work efficiency can be increased.

  There is no restriction | limiting in particular if the grip part 102 is a magnitude | size which a person can operate with a hand, For example, it is 1-8 cm in diameter, and 3-25 cm in circumference length. The gripping member 100 may be used for work by supporting the grip portion 102 on a work table or apparatus.

  The grip portion 102 is provided with a push button switch 105 as a laser irradiation on / off switching means on the side where the finger is positioned when the grip portion 102 is gripped. Thereby, on / off switching of laser irradiation can be performed quickly.

  The push button switch 105 is interlocked with the above-described foot switch 95 (see FIGS. 1 and 2), and the laser is not irradiated unless both the foot switch 95 and the push button switch 105 are turned on. Maintained in a state of. Accordingly, it is possible to prevent a situation in which the laser irradiation is turned on by accidentally touching the push button switch 105 or dropping or hitting the gripping member 100 to cause the laser to hit the human eye and cause damage. As the laser irradiation on / off switching means, two foot switches may be provided and the push button switch 105 may not be provided. Further, the push button switch 105 may be provided separately from the grip member 100 (the push button switch 105 may be provided on the grip member 100). In this case, only two push button switches are provided. Alternatively, one foot switch and one foot switch may be provided. Furthermore, a total of three or more foot switch or push button switches provided independently may be provided. When many switches are provided, the number of places where laser irradiation can be switched on / off increases, so that switching can be performed more quickly.

  As can be seen from the description so far, the gripping member 100 is an essential element of the laser irradiation apparatus 1 of the present invention, among the control unit 30, the operation unit 40, the cooling unit 20, and the laser oscillator. That is, a laser oscillator is provided. Further, like the cooling unit 104 and the operation switch 105, elements that can be a part of the cooling unit 20 and the operation unit 40 included in the apparatus main body are also provided.

  An adjustment member 120 for adjusting the laser irradiation condition for the irradiation target is detachably attached to the tip of the gripping member 100 in the illustrated example. The adjustment member 120 may be fixed to the grip member 100 and provided integrally.

  The adjustment member 120 is a long pipe portion (first rod-like portion) 121 formed in a relatively long pipe shape, and is formed in a pipe shape shorter than the long pipe portion 121 and is disposed on the distal end side of the long pipe portion 121. Mainly comprising a short pipe portion (second rod-like portion) 122 and an intervening portion 123 interposed therebetween.

  The long pipe portion 121 extends straight from the distal end of the gripping member 100 in the horizontal direction, and is formed to be approximately half thick from the proximal end side and approximately half from the distal end side. A wavelength conversion element for converting the wavelength of the laser and an irradiation area adjusting element for increasing / decreasing the irradiation area on the surface of the irradiation object are provided inside the thickened part on the base end side in order from the base end side. .

  The interposition part 123 is formed so as to be bendable with a flexible material. By bending the interposition part 123, the direction of the short pipe part 122 can be freely changed. In addition, the interposition part 123 includes a reflecting mirror (not shown in FIG. 4), and a laser irradiation direction (a dotted line in FIG. 4) along the direction in which the short pipe part 122 is bent by the reflecting mirror. Can be changed). The reflecting mirror may be a prism or an optical fiber. That is, there is no particular limitation as long as the laser irradiation direction can be changed along the direction of the short pipe portion 122.

  As shown in FIGS. 5A and 5B, the long pipe portion 121 and the interposition portion 123 have a pair of concave portions 121 a on the distal end side of the long pipe portion 121 and a convex portion on the long pipe portion 121 side of the interposition portion 123. 123a is formed, and both are engaged. Further, the end of the long pipe portion 121 is crimped so that the long pipe portion 121 does not come out of the interposition portion 123.

  As the rotation guide means, the adjustment member 120 can be rotated at the engagement portion between the concave portion 121a of the long pipe portion 121 and the convex portion 123a of the interposition portion 123, and can be held in use at a predetermined position. A manual mechanism 124 is provided.

  The manual mechanism 124 includes a groove 125 and a hole 126 formed in the long pipe portion 121, a spring accommodating hole 127 formed on the interposition portion 123 side, and a spring 128 and a ball 129 that act between the two. Yes.

  The grooves 125 are formed along the circumferential direction of the long pipe portion 121, and holes 126 are formed in the grooves 125 at predetermined intervals. The spring accommodating hole 127 is formed so as to penetrate through the interposition part 123, and the spring 128 is accommodated therein, and urges the ball 129 toward the long pipe part 121. That is, when the intervening portion 123 and the short pipe portion (not shown in FIG. 5) connected to the intervening portion 123 are manually turned, the ball 129 rolls on the groove 125 against the urging force of the spring 128, and the intervening portion 123 and Allow the short pipe to rotate. When the ball 129 reaches the hole 126, the ball 129 fits in the hole 126 and prevents the interposition part 123 and the short pipe part from rotating, and holds it at that position. Thereby, the manual mechanism 124 can rotate the interposition part 123 and the short pipe part in the left-right direction with respect to the long pipe part 121, and can hold | maintain it in a use state in a predetermined position. The concave portion 121a of the long pipe portion 121 and the convex portion 123a of the interposition portion 123 may be reversed, and the long pipe portion 121 may be rotated in the left-right direction with respect to the interposition portion 123 and the short pipe portion. In addition, the spring 128 may be replaced with one that is generally known as an urging member such as rubber.

  Next, the principle of laser irradiation by the gripping member 100 and the adjustment member 120 will be described. As shown in FIG. 6, the laser oscillator 106 in the gripping member 100 includes a total reflection mirror 107, a Q switch 108, a YAG rod 109, and a partial transmission mirror 110 in order from the base end side. Is provided with a lamp 111. That is, the laser to be oscillated is a YAG laser, which is an extremely short pulse of about 10 ns. By continuously irradiating the irradiation object with such an ultrashort pulse laser, heat generation can be minimized, and the surface of the irradiation object can be cleaned without damaging the irradiation object. In addition, as the partial transmission mirror 110, a Gaussian mirror is used in which the laser intensity distribution can be a Gaussian distribution (normal distribution) from the viewpoint of easy adjustment of the laser intensity by the irradiation area adjusting element. However, there is no particular limitation as long as partial transmission is possible, and other mirrors may be used.

  During laser oscillation, if the YAG rod 109 is excited by the lamp 111 while the partial transmission mirror 110 is tilted by the Q switch 108, the laser does not oscillate, but the excited molecules accumulate and a large inversion distribution is obtained. In this state, when the partial transmission mirror 110 is returned to the original position by the Q switch 108, the laser is rapidly oscillated, and the accumulated excitation energy is released at once. Therefore, high energy can be released by adjusting the timing of moving the Q switch 108. Cleaning requires a high peak of about 10 MW, and high energy of about 100 mJ is required to obtain this high peak with a pulse width of about 10 ns. This high energy is obtained by oscillating the laser according to the principle described above.

  Although the YAG laser is oscillated in the example of FIG. 6, for example, a laser having an extremely short pulse, such as a YVO4 laser or a YLF laser, having a wavelength similar to the wavelength of the YAG laser (1064 nm) is oscillated. It may be.

  The wavelength conversion element 130 of the adjustment member 120 includes a 1064 nm lens 131 and a 532 nm conversion element 132 from the gripping member 100 side. The 532 nm conversion element 132 is not particularly limited as long as it is a material usually used as a wavelength conversion element such as a lens.

  This wavelength conversion element 130 converts a part of the YAG laser having a wavelength of 1064 nm oscillated from the YAG rod 108 into a green laser (SHG) having a wavelength of 532 nm. As a result, the laser irradiated on the irradiation object can be a mixed beam having a wavelength of 1064 nm and a wavelength of 532 nm, which is half that wavelength, and dirt and foreign matter on the surface of the irradiation object can be removed with a small amount of energy. Become. This is because, as shown in FIG. 7, the object to be irradiated is more easily absorbed at the wavelength of 532 nm of the green laser than at the wavelength of 1064 nm of the YAG laser, except for some metals such as silver. Also, since YAG laser is infrared, it is difficult to remove dirt and foreign matter when the surface of the irradiation object is red. However, by using a mixed beam with the green laser, dirt and foreign matter on the red surface can be removed. Becomes easier. Note that the 532 nm conversion element 132 may oscillate lasers of these colors using an element that converts the wavelength of the yellow laser or yellow green laser (545 to 585 nm).

  As shown in FIGS. 8A to 8D, the irradiation area adjusting element may adjust the size of the laser diameter while maintaining the light amount, or may reduce the laser diameter by reducing the light amount. .

  Specifically, in the irradiation area adjusting element 133a shown in FIG. 8A, a concave lens 134 is disposed on the proximal end side and a convex lens 135 is disposed on the distal end side, and the diameter of the laser irradiated from the gripping member is expanded by the concave lens 134. The irradiation direction is aligned in parallel by the convex lens 135. The laser diameter can be further expanded by moving the position of the convex lens 135 further to the tip side (see the lower arrow in the figure). As a result, the laser diameter can be increased while maintaining the amount of light, so that it is possible to increase the laser irradiation area onto the irradiation object and to adjust the irradiation energy per unit to be small.

  In the irradiation area adjusting element 133b shown in FIG. 8B, a convex lens 135 is disposed on the proximal end side and a concave lens 134 is disposed on the distal end side, and after the width of the laser irradiated from the gripping member is reduced by the convex lens 135, The concave lens 134 aligns the irradiation direction in parallel. The laser diameter can be further narrowed by moving the position of the concave lens 134 further to the tip side (see the lower arrow in the figure). As a result, the laser diameter can be reduced while maintaining the amount of light, so that the laser irradiation area onto the irradiation object can be reduced and the irradiation energy per unit can be adjusted to be large.

  In the irradiation area adjusting element 133c shown in FIG. 8C, only the laser beam that has passed between the pair of apertures 136 is irradiated by cutting the optical end of the laser beam irradiated from the gripping member 100 with the pair of apertures 136. The object is irradiated. As a result, the laser diameter can be reduced while reducing the amount of light, so that it is possible to maintain the irradiation energy per unit while reducing the area of laser irradiation on the irradiation object.

  In the irradiation area adjusting element 133d shown in FIG. 8D, a concave lens 134 is disposed on the proximal end side and a pair of apertures 136 are disposed on the distal end side, and the optical end is widened by the concave lens 134 and then cut by the aperture 136. It is like that. As a result, as shown in FIG. 9, the intensity distribution of the laser can be changed from a Gaussian distribution represented by an imaginary line to a flat distribution represented by a solid line, and a so-called flat top beam (FTB) having a flat peak is irradiated. It becomes possible to irradiate the surface of the object.

  The laser irradiated from the gripping member 100 has many spikes with high peaks. This can be adjusted as evenly as possible by alignment, but it is difficult to flatten spike-like peaks. When the object to be irradiated is a mold, when the surface is to be cleaned, traces of laser irradiation may remain on the surface due to the variation in intensity distribution due to the spike-like peak. However, by adjusting to the flat top beam, no trace is left on the mold surface.

  Thus, since the laser irradiation apparatus 1 of the present invention is provided with the irradiation area adjusting element in the adjustment member 100, the laser irradiation area and the irradiation intensity can be appropriately changed according to the purpose, and can be applied to a wide range of irradiation objects. Applicable. Note that the concave lens 134 and the convex lens 135 in the irradiation area adjusting element may be replaced with ones that are normally known as being capable of changing the laser diameter, such as a wavelength conversion element.

  The action of the laser irradiation on the surface of the irradiation object according to the present invention will be described. As shown in FIG. 10A, the laser beam L is applied to the dirt D attached to the surface of the irradiation object T. Thus, as shown in FIG. 10B, the dirt D is explosively scattered in a molecular shape and is removed from the surface of the irradiation target T. In addition, based on this action, it is also possible to perform processing without welding or cutting of the irradiation object, such as coating the surface of the irradiation object and partially peeling it off or partially cutting the surface itself. it can. Specific applications include, for example, measurement probes, test pins, molds, cleaning of cultural assets such as gold foil and wood, metal rust, dirt, scoring, surface treatment, and removal and removal of epoxy resins. Is mentioned.

  That is, the laser irradiation apparatus 1 of the present invention may be capable of both cleaning and processing the surface of the irradiation object, or only one of them.

  As described above, in the laser irradiation apparatus 1 of the present invention, the adjustment member 120 that can change the irradiation direction is provided on the gripping member 100 that irradiates the irradiation object with the laser. The surface can be cleaned and processed even when the object is in an irregular shape such as a product or the object to be irradiated in a narrow space such as a human or animal tooth. Moreover, even if it is a high temperature irradiation target object, it is not necessary to direct the whole member to a high temperature range, and cleaning and a process are attained.

  Therefore, the laser irradiation apparatus 1 of the present invention can clean and process the surface of various objects as irradiation objects with a simple operation and with high work efficiency.

  As mentioned above, although embodiment of this invention was described in detail, the laser irradiation apparatus of this invention is not limited to the said embodiment. For example, in the embodiment described above, the laser oscillator 106 is provided on the gripping member 100, but the present invention is not limited thereto, and the laser oscillator 106 may be provided on the apparatus main body 10. Further, the connecting member between the apparatus main body 10 and the gripping member 100 may be constituted by an optical fiber.

  Furthermore, in the said embodiment, although the holding member 100 has comprised T shape by side view, it is not restricted to this, The holding member of another form may be sufficient. FIGS. 11A and 11B are side views of another embodiment of the gripping member and the adjusting member of the laser apparatus of the present invention.

  As shown in FIG. 11A, the gripping member 200 is a rod-like member extending along the laser irradiation direction. When this gripping member 200 is used, as an adjustment member attached to the tip, an adjustment member 220a having a trapezoidal cap shape and an adjustment member having a shape in which a part of the rectangle shown in FIG. 220b can be replaced according to the purpose. That is, if the adjustment member 220a is used, the laser can be made to go straight, and if the adjustment member 220b is used, the laser can be reflected at an inclination and the irradiation direction can be changed at a substantially right angle.

  By adopting such a rod-shaped gripping member 200, the grip portion 102 of the T-shaped gripping member 100 shown in FIG. 4 is not provided, and thus the gripping member can be made compact. If the gripping member is made compact, the adjustment member can also be made compact. Thereby, it becomes possible to facilitate the operation particularly when cleaning and processing a small irradiation object such as a ring.

  Note that the gripping member 200 may have the adjustment member 120 attached to the tip, similarly to the gripping member 100 shown in FIG. Needless to say, the adjustment members 220 a and 220 b include a wavelength conversion element and an irradiation area adjustment element, and have the same function as the adjustment member 120. Further, as described in the description of the gripping member 100, the push button switch 105 may be provided separately from the gripping member 200 in conjunction with the foot switch 95.

  Furthermore, in the above-described embodiment, the manual mechanism 124 is provided as the rotation guide means of the adjustment member 120. However, the present invention is not limited to this, and another form of rotation guide means may be provided. FIG. 12 is a cross-sectional view of the main part of the adjustment member when the motor device is provided as the rotation guide means.

  As shown in FIG. 12, the motor device 224 is provided at the tip of the long pipe portion 121. In this motor device 224, a gear 227 attached to the tip of a shaft 226 extending from the motor main body 225 is placed at an engagement position with the long pipe portion 121 of the interposition portion 123, and the driving force of the motor main body 225 is transmitted to the gear 227. Thus, the interposition part 123 and the short pipe part (not shown in FIG. 12) are rotated. Further, by stopping the operation of the motor device 224, the interposition part 123 and the short pipe part are held at the stopped position. Here, in the example of FIG. 12, the motor device 224 is accommodated in the case 228 for protection. In FIG. 12, reference numeral 140 denotes a reflecting mirror.

  In the example of FIG. 12, the gear 227 is used for rotation, but this gear may be replaced with a normally known friction member such as a friction belt. The motor device 224 may be provided on the grip member.

DESCRIPTION OF SYMBOLS 1 Laser irradiation apparatus 10 Apparatus main body 11a Lower side accommodating part 11b Upper side accommodating part 20 Cooling unit 21 Water tank 22 Radiator 23 Pump 24 Filter 25 Breaker 26 Power lamp 30 Control part 35 Cooling fan 40 Operation part 41 Monitor screen 42 Basic operation key 43 Condition setting operation key 50 Transformer 60 Power supply unit 61 Power supply 62 Relay 63 Surge suppressor 70 Capacitor 80 Transport assisting means 90 Cable 95 Foot switch 96 Cord 100 Gripping member 101 Bar-shaped part 102 Gripping part 103 Tilt detection sensor 104 Cooling means 105 Push button Switch 106 Laser oscillator 107 Total reflection mirror 108 Q switch 109 YAG rod 110 Partial transmission mirror 111 Lamp 120 Adjustment member 121 Long pipe portion (first rod-shaped portion)
121a Concave portion 122 Short pipe portion (second rod-like portion)
123 Intervening portion 123a Convex portion 124 Manual mechanism 125 Groove 126 Hole 127 Spring accommodating hole 128 Spring 129 Ball 130 Wavelength conversion element 131 1064nm lens 132 532nm conversion element 133a-d Irradiation area adjustment element 134 Concave lens 135 Convex lens 136 Aperture 140 Reflecting mirror 200 Grasping Member 220a, b Adjustment member 224 Motor device 225 Motor body 226 Shaft 227 Gear 228 Case D Dirt L Laser T Irradiation object

Claims (7)

A laser irradiation device that removes dirt and foreign matter adhering to the surface of an irradiation object,
It has a laser oscillator inside and has a gripping member that irradiates the irradiation target with a laser.
The laser irradiation apparatus, wherein the gripping member includes an adjustment member capable of irradiating a mixed beam by converting the wavelength of the laser oscillated from the laser oscillator. The wavelength of the beam oscillated from the laser oscillator is in the 1064 nm band,
The laser irradiation apparatus according to claim 1, wherein the wavelength of the beam converted by the wavelength conversion element is any of a 532 nm band and a 545 nm to 585 nm band. A laser irradiation device that removes dirt and foreign matter adhering to the surface of an irradiation object,
It has a laser oscillator inside and has a gripping member that irradiates the irradiation target with a laser.
The gripping member includes an adjustment member including an irradiation area adjustment element that changes the irradiation area and irradiation intensity of the laser,
The laser irradiation apparatus, wherein the irradiation area adjusting element is capable of changing a laser irradiation intensity from a Gaussian distribution to a flat distribution.   The laser irradiation apparatus according to claim 3, wherein the irradiation area adjusting element includes a concave lens that widens a light end of the laser, and an aperture that cuts a part of the widened light end. The adjustment member is disposed on the tip side of the first rod-shaped portion extending in a direction that goes straight from the laser irradiation side of the gripping member, and extends in a direction different from the first rod-shaped portion. A second rod-shaped portion to be obtained, and an interposition portion interposed between the first rod-shaped portion and the second rod-shaped portion,
The interposition part is formed to be bendable with a flexible material,
5. The laser irradiation apparatus according to claim 1, wherein the laser irradiation direction can be changed along the direction of the second rod-shaped portion by bending the interposition portion. 6. A manual mechanism as a rotation guide means is provided at an engagement portion between the first rod-shaped portion and the interposition portion,
The said manual mechanism makes it possible to hold | maintain the said interposed part and the said 2nd rod-shaped part with respect to the said 1st rod-shaped part, and can be used in a predetermined position. Laser irradiation device. The gripping member is a rod-like member extending along the laser irradiation direction,
The adjustment member is provided to be replaceable at the tip of the rod-shaped gripping member in the laser irradiation direction,
The laser irradiation apparatus according to any one of claims 1 to 4, wherein the laser irradiation direction can be changed by replacing the adjusting member with a different shape.