JP2016201346A - Multi-cross section observation holder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a multi-cross section observation holder capable of fixing multiple samples and thereby improving the efficiency of a process.SOLUTION: A multi-cross section observation holder relating to an embodiment of the present invention includes: a body; a sample mounting part formed in the front end of the body and capable of fixing multiple samples; and an elastic member located inside the body. The sample mounting part includes: a push rod capable of moving forward and backward by elastic force of the elastic member; an X-type lever whose front end is provided with a first sample pressing plate and a second sample pressing plate and whose rear end is connected to the push rod; and a fixed protrusion formed between the first sample pressing plate and the second sample pressing plate. When the push rod is moved backwards, a first space where the sample is mounted is formed between one surface of the fixed protrusion and the first sample pressing plate, and a second space where the sample is mounted is formed between the other surface of the fixed protrusion and the second sample pressing plate.SELECTED DRAWING: Figure 7

Description

  The present invention relates to a multi-section observation holder, and more particularly to a multi-section observation holder that has a structure capable of fixing a plurality of samples and improves process efficiency.

  Generally, a semiconductor device manufacturing process is performed by repeating a diffusion process, an oxidation process, a metal process, and the like. As a result, various types of materials, for example, metal film quality such as Al, Ti, and W, and insulating film quality such as nitride film and oxide film are stacked on the wafer.

  If there are abnormalities in some of the laminated film qualities, abnormalities may occur in the operation of the semiconductor device formed in the subsequent process. Therefore, it is possible to analyze and verify such abnormalities accurately and effectively. Technology to do is demanded.

  As semiconductor elements are further integrated, abnormalities may occur in the semiconductor elements due to minute causes, and the difficulty associated with analyzing defects occurring in the semiconductor device is further increased.

  Equipment such as a transmission electron microscope (TEM) or a scanning electron microscope (SEM) is used for analysis and verification of a film or pattern formed on a wafer.

  A transmission electron microscope is a device that irradiates a sample with an electron beam to obtain an image by the transmitted electron beam, and analyzes the crystal structure of the image by a diffraction pattern obtained through the diffracted electron beam. .

  The scanning electron microscope uses an electron gun to generate an electron flow having acceleration energy (normal to 30K front end), and forms a focal point of the electron beam using various electron lenses and a diaphragm. The electron beam thus formed is scanned on the target sample to be observed, and the magnification is adjusted. When secondary electrons, backscattered electrons, transmitted electrons, characteristic X-rays, and the like formed from the target sample are detected, the surface of the target sample can be observed and analyzed.

  The scanning electron microscope basically includes an electron column, a sample chamber, a vacuum pump, a vacuum gauge, various control units for controlling the electron column, an image processing system, and the like. The electron column includes an electron gun, lens, aperture, signal detector, etc., and the vacuum pump creates an ultra-high vacuum to remove various obstacles such as scattering, discharge, and contamination of electron beams by atmospheric gas molecules. It is the structure to do.

  Scanning electron microscope electron guns include thermionic guns, cold cathode field emission guns (CFE-Gun), and Schottky emission guns (SFE-Gun). Depending on the type of electron gun, the performance and configuration of the scanning electron microscope is large. Different. In general, a scanning electron microscope using CFE-Gun and SFE-Gun is an FE-SEM (Field Emission Scanning Electron Microscope), and using a thermal electron gun is a Normal SEM.

  The lens is large and is divided into a converging lens and an objective lens. The converging lens converges the electron beam emitted from the electron gun into the first order to form the first focal point, and controls the amount of scanning current (Probe Current) reaching the sample. The The objective lens is configured to adjust the electron beam formed by the converging lens so that the target sample is correctly focused, and controls the scanning area of the electron beam scanned on the target sample to form the magnification. Both scanning coils are configured.

  The diaphragm is composed of a fixed diaphragm and a variable diaphragm that can be used with a variable hole size. Many fixed diaphragms are located in the electron column according to the application due to the design structure of the manufacturer. The variable stop is generally referred to as an objective lens stop, and is located on the objective lens, and functions to control the current amount of the beam flowing into the objective lens, adjust the focus size, and reduce various aberrations.

  When an electron beam having an accelerating voltage for each analytical purpose is focused and reduced from the electron column and scanned on the target sample, a signal in which secondary electrons and an incident beam are back-scattered due to the inherent characteristics of the target sample ( BSE) occurs. This signal is collected and amplified by a secondary electron detector or BSE detector to give contrast and brightness according to the signal amount, and when the image is processed, the morphological image of the surface is magnified and observed on the monitor. can do. Further, by detecting (EDXS) the characteristic X-Ray of each element generated when the incident beam collides with the target sample, qualitative and quantitative analysis data can be obtained. Moreover, if a transmission electron detector (STEM) is attached according to a use, various applications, such as structural analysis of an object sample, can be performed.

  FIG. 1 is a diagram showing an Out-Lens and Semi-In-Lens type FE-SEM, and FIG. 2 is a diagram showing an In-Lens type FE-SEM to which the present invention is applicable. FE-SEM is used in various fields such as semiconductors, displays (LCD, LED, OLED, etc.), sunlight, various nanomaterials, biological, medical, electronic, mechanical, physical, chemical materials, various materials, and material research fields. It can be used in various fields. The FE-SEM shown in FIGS. 1 and 2 includes an electron gun 31, a beam monitor diaphragm 32, a first convergence lens 33, an air lock valve 34, an objective movable diaphragm 35, and a second convergence lens 36. And a deflection coil 37, an EXB 38, an objective lens 39, and a secondary electron detector 45. The In-Lens type FE-SEM of FIG. 2 further includes an objective lens coil 40 and a beam blanking 41, and includes a dark field STEM detector 42, a bright field stop 43, and a bright field STEM detector 44. It may be added. In the case of the Out-Lens and Semi-In-Lens type FE-SEM shown in FIG. 2, the specimen 11 is located under the objective lens, the working distance (WD) is long, and a large sample is observed. Although there is a merit that it can be performed, since the working distance is long, the image resolution is lowered. On the other hand, in the case of the In-Lens type FE-SEM of FIG. 3 to which the present invention is applied, the sample 11 is located inside the objective lens, and the working distance is short and only a small sample is observed. However, it is possible to obtain an ultra-high resolution image.

  On the other hand, conventionally, as shown in FIGS. 3 and 4, a method using a fixing screw 12 is used to fix a sample. That is, after providing the spacer 11a between the sample 11 and the fixing screw 12, the sample 11 can be fixed to the holder by tightening the sample 11. However, in such a conventional method, since the fixing screw 12 is very small, it is difficult to appropriately adjust the height and level of the sample 11 fixed to the holder, and the fixing screw 12 and the spacer 11a may be lost. There was a problem that the fixing screw 12 was easily worn.

  On the other hand, conventionally, as shown in FIG. 5, a method of fixing the sample 11 using the tension of the leaf spring 14 is used. That is, when the sample 11 is mounted on the holder and the latch hole 13 is moved backward, the sample 11 is fixed to the holder in such a manner that the sample 11 is fixed by the tension of the leaf spring 14 while the fixing bracket 15 is pushed backward. It is possible. However, such a conventional method has a problem that the tension of the leaf spring 14 is weakened, and there is a risk that the sample 11 is detached from the holder, image drift occurs, and it is difficult to obtain a clear image. It was. In addition, the conventional method has a structure that is difficult to fix the thin sample 11, and its utilization is restricted.

  In order to solve the problems of the prior art as described above, the present applicant has applied for a patent for a “sample holder used for cross-sectional observation of a sample” as shown in FIG. Korean Registered Patent Publication No. 10-1398455). According to a “sample holder used for cross-sectional observation of a sample” developed in the past, when the sample mounting portion is opened and a first space is formed between the sample pressing plate and the fixing rod, the first A sample can be mounted in the space, and the sample can be fixed using a sample pressing plate and a fixing rod. Such a conventional patented invention has an advantage of having a structure that can fix a sample simply and quickly. However, since it was designed to fix only one sample, it is often used for a large number of wafer inspections. There was an inconvenience that it took time and effort.

  Thus, there is a demand for the development of a sample holder that can further improve the efficiency of the process.

Republic of Korea Open Patent Gazette No. 10-2009-0022745 Korean Utility Model Publication No. 20-1999-0027792 Republic of Korea Open Patent Gazette No. 10-2008-0075682 Republic of Korea Open Patent Gazette No. 10-2009-0096167 Republic of Korea Registered Patent Gazette No. 10-1398455

  The present invention has been devised to solve the conventional problems as described above, and has a structure capable of fixing a plurality of samples, and a multi-section observation holder that improves the efficiency of the process. The purpose is to provide it to the user.

  Specifically, the present invention provides a multi-section observation holder designed so that a plurality of samples can be easily and quickly fixed by linking the body and a stand, and the cross sections of the plurality of samples can be observed simultaneously. Its purpose is to provide it to users.

  Another object of the present invention is to provide a user with a multi-section observation holder that can obtain a clear and precise magnified image by firmly fixing the sample without deforming the sample.

  On the other hand, the technical problem to be solved by the present invention is not limited to the technical problem mentioned above, and other technical problems that are not mentioned are described below from the technical field to which the present invention belongs. It will be clearly understood by those with ordinary knowledge of.

  A multi-section observation holder according to an example of the present invention for realizing the above-described problem is a body (100) and a sample formed on the front end of the body (100) and capable of fixing a plurality of samples (11). A mounting part (110), and an elastic member (130) located inside the body (100), the sample mounting part (110) is moved in the front-rear direction by the elastic force of the elastic member (130). A movable push rod (116), a first sample pressing plate (125) and a second sample pressing plate (126) are provided at the front end, and the rear end is connected to the push rod (116). An insulator (120); and a fixing rod (114) formed between the first sample pressing plate (125) and the second sample pressing plate (126), the push rod (116) Is moved rearward, a first space in which the sample (11) is mounted is formed between the first sample pressing plate (125) and one surface of the fixing rod (114), and the second Sample press plate ( 126) and the other surface of the fixing rod (114) form a second space in which the sample (11) is mounted.

  Further, after the sample (11) is mounted in the first space and the second space, when the push rod (116) moves forward, the first sample pressing plate (125) is moved. The sample (11) mounted in the first space is fixed, and the second sample pressing plate (126) is moved to fix the sample (11) mounted in the second space.

  The sample (11) is fixed in the first space and the second space so that the cross section of the sample (11) is directed to the outside. Using a scanning electron microscope, the sample (11) is fixed. Cross-sectional observation is possible.

  Further, the X-type insulator (120) is formed with a first sample-pressing plate installation portion (123) provided with the first sample-pressing plate (125) at the front end, and the lever is centered on the insulator shaft (128). A rotatable first insulator (121) and a second sample pressing plate installation part (124) provided with the second sample pressing plate (126) at the front end are formed, and the lever shaft (128) is attached A second lever (122) rotatable at the center, wherein a front end portion of the first lever (121) and a front end portion of the second lever (122) are spaced apart from each other, The rear end portion of the second insulator (121) and the rear end portion of the second insulator (122) are spaced apart from each other, and the intermediate portion of the first insulator (121) and the second insulator (122) The intermediate portion is coupled to the lever shaft (128).

  The push rod (116) is formed with a sliding groove (118) having a shape that becomes narrower from the front to the rear, and the rear end of the first insulator (121) and the second The rear end of the insulator (122) is in contact with the sliding groove (118) of the push rod (116).

  Further, due to the movement of the push rod (116), the rear end of the first lever (121) and the rear end of the second lever (122) become a sliding groove (118) of the push rod (116). ), The first lever (121) and the second lever (122) are rotated about the lever shaft (128), and the first lever (121) and the second lever (122) are rotated. The first sample pressing plate (125) and the second sample pressing plate (126) are moved by the rotation of the second lever (122).

  The X-type insulator (120) has one end connected to the rear end of the first insulator (121) and the other end connected to the rear end of the second insulator (122). (127) is further included.

  Further, when the push rod (116) moves rearward, the elastic force of the lever spring (127) causes the rear end portion of the first lever (121) and the rear end portion of the second lever (122). And the separation distance between the rear end of the first insulator (121) and the rear end of the second insulator (122) is increased, and the first insulator (121) The second lever (122) rotates in one direction around the shaft (128), and the second lever (122) rotates in the other direction around the lever shaft (128), and the front end of the first lever (121) and the The separation distance from the front end of the second insulator (122) is increased.

  A sample mounting space (112) in which the push rod (116), the X-shaped insulator (120), the first sample pressing plate (125), and the second sample pressing plate (126) are arranged. A part of the side surface is open, and when the push rod (116) moves backward, the side surface of the front end portion of the first lever (121) and the front end portion of the second lever (122) The first insulator (121) and the second insulator (122) rotate so that the side surface contacts the open part of the side surface of the sample mounting space (112).

  When the push rod (116) moves forward, the sliding groove (118) exerts a force on the rear end of the first lever (121) and the rear end of the second lever (122). The separation distance between the rear end of the first lever (121) and the rear end of the second lever (122) is reduced, and the first lever (121) is connected to the lever shaft (128). The second lever (122) is rotated in one direction around the lever shaft (128), and the front end of the first lever (121) and the second lever are rotated. The separation distance from the front end of the insulator (122) is reduced.

  The stand (200) can be fastened or separated from the body (100) .The stand (200) includes a base portion (210) that forms a lower portion of the stand (200), and the base portion (210 ) And a fastening portion (220) in which an open through hole (222) is formed, and the body (100) is fastened to the stand (200), and the through hole (222) ) When at least part of the sample mounting part (110) is inserted, the push rod (116) moves rearward, and when the body (100) is separated from the stand (200), the push The rod (116) moves forward.

  Further, the first portion (223) which is a part of the upper surface of the fastening portion (220) is more than the second portion of the upper surface of the fastening portion (220) except the first portion (223). The first portion (223) is one of both side portions of a portion where at least a part of the sample mounting portion (110) inserted into the through hole (222) is located.

  The present invention can provide a user with a multi-section observation holder that has a structure capable of fixing a plurality of samples and improves process efficiency.

  Specifically, the present invention provides a multi-section observation holder designed so that a plurality of samples can be easily and quickly fixed by linking the body and a stand, and the cross sections of the plurality of samples can be observed simultaneously. Can be provided to the user.

  In addition, the present invention can provide a user with a multi-section observation holder that can obtain a clear and precise enlarged image by firmly fixing the sample without deforming the sample.

  On the other hand, the effects obtained by the present invention are not limited to the effects mentioned above, and other effects that are not mentioned are those who have ordinary knowledge in the technical field to which the present invention belongs from the following description. It will be clearly understood.

The following drawings attached to the present specification are intended to illustrate a preferred embodiment of the present invention, and to further understand the technical idea of the present invention together with the detailed description of the invention. The analysis should not be limited to the matters described in the drawings.
FIG. 1 is a diagram showing Out-Lens and Semi-In-Lens type FE-SEMs. FIG. 2 is a diagram showing an In-Lens type FE-SEM. FIG. 3 is a front view showing an example of a sample holder for fixing a sample using a conventional fixing screw. FIG. 4 is a plan view showing an example of a sample holder for fixing a sample using a conventional fixing screw. FIG. 5 is a plan view showing an example of a sample holder for fixing a sample using a conventional leaf spring. FIG. 6 is a perspective view of a sample mounting portion of a sample holder used for cross-sectional observation of a sample developed conventionally. FIG. 7 is a perspective view showing a state before the body and the stunt of the multi-section observation holder applicable to the present invention are fastened. FIG. 8 is a perspective view showing a state in which the body of the multi-section observation holder applicable to the present invention and the stand are fastened. FIG. 9 is an exploded view showing the coupling relationship of the bodies of the multi-section observation holder applicable to the present invention. FIG. 10 is a side cross-sectional view with respect to the body of the multi-section observation holder applicable to the present invention. FIG. 11 is a perspective view of a sample mounting portion of a multi-section observation holder applicable to the present invention. FIG. 12 is a bottom perspective view of a push rod of a multi-section observation holder applicable to the present invention. FIG. 13 is a perspective view of an X-type insulator of a multi-section observation holder applicable to the present invention. FIG. 14 is an exploded view showing the coupling relationship of the X-type insulator of the multi-section observation holder applicable to the present invention. FIG. 15 is an exploded view showing the connection relationship of the stands of the multi-section observation holder applicable to the present invention. FIG. 16 is a side sectional view of a stand of a multi-section observation holder applicable to the present invention. FIG. 17 is an exploded view of a fastening portion of a multi-section observation holder applicable to the present invention. FIG. 18 is an exploded view of a support for a multi-section observation holder applicable to the present invention. FIG. 19 is a plan view showing a state of the sample mounting portion before the body and the stunt of the multi-section observation holder applicable to the present invention are fastened. FIG. 20 is a plan view showing a state of the sample mounting portion when the body and the stunt of the multi-section observation holder applicable to the present invention are fastened. FIG. 21 is a plan view showing a state in which a sample is mounted on a sample mounting portion of a multi-section observation holder applicable to the present invention. FIG. 22 is a plan view showing a state in which the body and the stunt of the multi-section observation holder applicable to the present invention are separated and the sample is fixed to the sample mounting portion.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. Further, the embodiment described below does not limit the contents of the present invention described in the claims, and the entire configuration described in the present embodiment is essential as a solution to the present invention. I can not say.

  In a normal semiconductor device manufacturing process, a sample holder is an essential device for fixing a sample when analyzing and inspecting a wafer using a scanning electron microscope.

  However, the conventional method of fixing a sample using a fixing screw makes it difficult to adjust the height and level of the sample, which takes time and requires the use of a small-sized fixing screw. In some cases, the fixing screw may be lost or worn out.

  In addition, the conventional method of fixing the sample using the tension of the leaf spring may induce image drift due to the weakness of the leaf spring, so that a clear image cannot be obtained, and the sample is easily detached. There is a problem that it is difficult to apply to a thin sample.

  In order to solve such problems, the present applicant has registered a patented invention of Korean Patent Registration No. 10-1398455, which is supported by the industry due to its efficient design structure. However, the applicant has designed a structure that is more efficient.

  The present invention proposes a multi-section observation holder that can easily and easily fix a plurality of samples to increase the manufacturing process of a semiconductor device.

<Configuration of multi-section observation holder>

  Below, with reference to FIG.7 and FIG.8, the whole structure of the multi-section observation holder 10 of this invention is demonstrated. FIG. 7 is a perspective view showing a state before the body and stand of the multi-section observation holder applicable to the present invention are fastened, and FIG. 8 is a view of the body and stand of the multi-section observation holder applicable to the present invention. It is a perspective view which shows the state which was fastened.

  Referring to FIGS. 7 and 8, the multi-section observation holder 10 of the present invention is large and includes a body 100 and a stand 200.

  The body 100 includes a sample mounting portion 110 that stably fixes the sample 11, and the user observes the sample 11 fixed to the sample mounting portion 110 using a scanning electron microscope. In addition, the trunk 100 includes a handle portion 140 for gripping the user, and further includes a coupling member 150 that connects the sample mounting portion 110 and the handle portion 140, and a housing 134.

  The stand 200 is detachable from the body 100. When the stand 200 is fastened to the body 100, the user can mount the sample 11 on the sample mounting portion 110 of the body 100. When the body 100 is separated from the stand 200, the sample 11 mounted on the sample mounting portion 110 of the body 100 can be firmly fixed.

  Hereinafter, a specific configuration of the multi-section observation holder 10 according to the present invention, which includes the body 100 and the stand 200, will be described.

  First, with reference to FIGS. 9-14, the structure of the fuselage | body 100 which comprises the multi-section observation holder 10 of this invention is explained in full detail. FIG. 9 is an exploded view showing the coupling relationship of the bodies of the multi-section observation holder applicable to the present invention, and FIG. 10 is a side sectional view of the body of the multi-section observation holder applicable to the present invention.

  The body 100 of the multi-section observation holder 10 of the present invention has a tubular shape that is long in the length direction, and includes a sample mounting portion 110, an elastic member 130, a handle portion 140, and a coupling member 150. However, the components shown in FIGS. 9 and 10 are not essential, and the body 100 having more or less components may be implemented. Hereinafter, the components will be described in order.

  The sample mounting part 110 can be provided at the front end of the body 100. Since the scanning electron microscope to which the present invention is applied observes the sample 11 in a greatly enlarged manner, it is very important to fix the sample 11 firmly. In order to observe the sample 11 precisely, the sample mounting unit 110 can mount the sample 11 and firmly fix the mounted sample 11. Since the front surface and the back surface of the sample 11 are fixed to the sample mounting portion 110, the cross section of the sample 11 faces upward, and the user can observe the cross section of the sample 11 using a scanning electron microscope.

  In order to describe a specific configuration for the sample mounting portion 110, first, FIGS. 11 to 13 will be described. 11 is a perspective view of a sample mounting portion of a multi-section observation holder applicable to the present invention, and FIG. 12 is a bottom perspective view of a push rod of the multi-section observation holder applicable to the present invention. FIG. 14 is a perspective view of an X-type insulator of a multi-section observation holder applicable to the present invention, and FIG. 14 is an exploded view showing a coupling relationship of the X-type insulator of the multi-section observation holder applicable to the present invention.

  The sample mounting part 110 includes a fixing rod 114, a movable push rod 116, a rotatable X-type insulator 120, sample pressing plates 125 and 126 for fixing the surface of the sample 11, and an insulator spring 127. The configuration is located in the sample mounting space 112. When the sample mounting part 110 is opened, a first space is provided between one surface of the first sample pressing plate 125 and the fixing rod 114, and the second sample pressing plate 126 and the other surface of the fixing rod 114 are When the second space is provided between the two, the sample 11 can be mounted in the first space and the second space. As described above, the plurality of samples 11 mounted in the first space and the second space are fixed by the sample pressing plates 125 and 126 and the fixing rod 114.

  The fixing rod 114 is formed at an intermediate portion of the sample mounting space portion 112 and is positioned between the first sample pressing plate 125 and the second sample pressing plate 126. As shown in FIG. 11, the fixing rod 114 protrudes in a square shape. The sample mounting part 110 is opened, a first space is formed between the first sample pressing plate 125 and one surface of the fixing rod 114, and the second sample pressing plate 126 and the other surface of the fixing rod 114 are separated. When the second space is formed therebetween, the sample 11 can be mounted in each of the first space and the second space. The first sample pressing plate 125 can fix the surface of the sample 11 mounted in the first space, and the second sample pressing plate 126 can fix the surface of the sample 11 mounted in the second space. Can be fixed.

  The push rod 116 is connected to the elastic member 130 by a connecting member 132, and the push rod 116 can be moved by an external force. The push rod 116 is moved forward or backward by the elastic force of the elastic member 132.

  As shown in the bottom perspective view of the push rod 116 in FIG. 12, the lower portion of the push rod 116 is provided with a 'V'-shaped sliding groove 118 that decreases in width from the front to the rear. Yes. The sliding groove 118 is in contact with the rear end of the first insulator 121 and the rear end of the second insulator 122, and the rear end of the first insulator 121 and the rear end of the second insulator 122 are 'V'-shaped. It is moved along the sliding groove 118.

  A step 117 protrudes from the top of the push rod 116. The step 117 is formed at a height at which the step 117 can be brought into contact with the locking protrusion 225 of the locking member 224 blocking a part of the through groove 222.

  The X-type insulator 120 and the sample pressing plates 125 and 126 can have shapes as shown in FIGS. However, the configurations of the X-type insulator 120 and the sample pressing plates 125 and 126 applied to the present invention are not limited to the above-described shapes, and can be modified into various shapes.

  The X-type insulator 120 includes a first insulator 121 and a second insulator 122. A first sample pressing plate installation section 123 is provided at the front end of the first insulator 121, and a second sample pressing plate installation section 124 is provided at the front end of the second insulator 122.

  A groove is formed in the sample pressing plates 125 and 126. The groove formed in the first sample pressing plate 125 meshes with the first sample pressing plate setting portion 123, and a coupling device such as a screw is inserted, so that the first insulator 121 and the first sample pressing plate are inserted. 125 can be combined. Similarly, the groove formed in the second sample pressing plate 126 meshes with the second sample pressing plate setting portion 124, and a coupling device such as a screw is inserted, so that the second insulator 122 and the second sample pressing plate 126 are inserted. The sample pressing plate 126 can be coupled. Thus, since the first insulator 121 and the second insulator 122 are coupled to the first sample pressing plate 125 and the second sample pressing plate 126, respectively, the first insulator 121 and the second insulator 122 are connected. As 122 rotates, the first sample pressing plate 125 and the second sample pressing plate 126 provided at the front end thereof are moved.

  The intermediate portion of the first insulator 121 and the intermediate portion of the second insulator 122 are coupled to the insulator shaft 128, and the first insulator 121 can rotate around the insulator shaft 128, and the second insulator 122. Is rotatable about the lever shaft 128. Since the first insulator 121 and the second insulator 122 rotate in directions opposite to each other, the X-type insulator 120 operates like a kite.

  As shown in FIG. 13, the front end portion of the first insulator 121 and the front end portion of the second insulator 122 are spaced apart from each other at a predetermined interval, and the rear end portion of the first insulator 121 and the second insulator Is separated from the rear end portion of the insulator 122 by a predetermined interval. The first insulator 121 and the second insulator 122 rotate around the insulator shaft 128, whereby the separation distance between the end portion of the first insulator 121 and the end portion of the second insulator 122 changes.

  An insulator spring 127 that provides an elastic force is provided at the rear end of the X-type insulator 120. One end of the lever spring 127 is connected to the rear end portion 121 of the first lever, and the other end of the lever spring 127 is connected to the rear end portion of the second lever 122.

  Referring to FIGS. 9 and 10 again, a groove is provided at the end of the funnel-shaped sample mounting portion 110. A pointed portion 119 made of a natural sapphire material is bonded to the groove at the end of the sample mounting portion 110, and an instantaneous adhesive is used for bonding the pointed end 119.

  In addition, the scanning electron microscope to which the present invention is applied also has a funnel-shaped space, and the end of the sample mounting portion 110 can be inserted, and the tip of the funnel-shaped space of the scanning electron microscope is also provided. , Made of sapphire material. When the end portion of the sample mounting portion 110 is inserted into the scanning electron microscope, the sapphire point 119 and the sapphire portion of the scanning electron microscope are fitted to each other. Therefore, the sample mounting portion 110 is firmly fixed without sliding from the scanning electron microscope, and the sample 11 can be observed precisely.

  On the other hand, the elastic member 130 has an elastic force like a spring and is located in the housing 134 of the body 100. The front end of the elastic member 130 is connected to the push rod 116, and the rear end of the elastic member is connected to a coupling member fitting portion 150 a formed at the front end of the coupling member 150.

  As shown in FIGS. 9 and 10, a connecting member 132 is interposed between the front end of the elastic member 130 and the push rod 116. The front end of the connecting member 132 is connected to the push rod 116, and the rear end of the connecting means 122 is connected directly or indirectly to the elastic member 130.

  Thus, since the push rod 116 is mutually connected with the elastic member 130, when an external force is applied to the push rod 116, the push rod 116 can move back and forth. That is, when an external force is applied to a part of the push rod 116, the elastic member 130 is compressed, so that the push rod 116 can move rearward. When the external force applied to the push rod 116 is removed, the push rod 116 moves to the original position again due to the elasticity of the elastic member 130.

  On the other hand, the handle portion 140 is provided at the rear end of the body 100, which is the opposite side of the sample mounting portion 110. The handle part 140 is made of a rubber or plastic material so that the user can easily grip the body 100, and the surface of the handle part 140 has an uneven shape for easy gripping.

  The handle part 140 may include a fixed groove 142 having a shape drawn into the handle part 140, and the fixed groove 142 may be coupled to the fixed protrusion 233 of the support base 230 as described later.

  On the other hand, the coupling member 150 connects the handle portion 140 of the body 100 and the housing 134 and is formed in a tubular shape. Such a coupling member 150 has an appropriate length and thickness according to the standard of a scanning electron microscope to which the present invention is applied.

  At one end of the coupling member 150, a coupling member fitting portion 150a is provided. The coupling member fitting portion 150a can be connected to a housing 134 that surrounds the elastic member 130, and is detachably provided. The coupling member fitting portion 150a serves to block air so that the chamber of the scanning electron microscope can maintain a vacuum state. In addition, an O-ring 154 may be further provided at a connection end between the coupling member 150 and the housing 134, and the O-ring 154 blocks external air so that the scanning electron microscope chamber can maintain a vacuum state. To play a role.

  A position pin 152 projects from the coupling member 150 to the outside. The position pin 152 serves as a guide for correctly mounting the sample 11 when the body 100 of the multi-section observation holder 10 of the present invention is mounted on the scanning electron microscope. That is, the position pin 152 moves along the guide rail provided in the scanning electron microscope, so that the sample 11 can be mounted at an accurate position in the chamber of the scanning electron microscope.

  The housing 134 of the multi-section observation holder 10 of the present invention is made of a phosphor-bronze copper series material. When using a scanning electron microscope, a material that does not become magnetized is used in order to prevent a phenomenon that the focus is not adjusted due to magnetism. The elastic member 130 in the housing 134 is also made of a phosphor bronze material. Parts in the fuselage 100 can be made of a brass material. The coupling member 150 can be made of an aluminum material.

  Next, with reference to FIGS. 15-18, the structure of the stand 200 which comprises the multi-section observation holder 10 of this invention is explained in full detail. FIG. 15 is an exploded view showing the connection relationship of the stands of the multi-section observation holder applicable to the present invention, and FIG. 16 is a side sectional view of the stand of the multi-section observation holder applicable to the present invention.

  Referring to FIGS. 15 and 16, the stand 200 of the multi-section observation holder 10 of the present invention has a rectangular parallelepiped shape that is long in the length direction, and includes a base part 210, a fastening part 220, a support base 230, and a stationary base 240. Including. However, the components shown in FIGS. 15 and 16 are not essential, and the stand 200 having more or less components can be realized. Hereafter, the said component is demonstrated in order.

  The base part 210 is configured to form the lower part of the stand 200 and support the stand 200, and can be formed in a rectangular parallelepiped shape as shown in FIGS. The upper surface and the lower surface of the base unit 210 are formed flat so that stable work can be performed on the ground, and the upper surface of the base unit 210 has a stand 200 such as a fastening unit 220, a support table 230, and a stationary table 240. Main components are provided.

  The base part 210 is formed with grooves 210a, 210b, 210c, 210d coupled to the fastening part 220, and grooves 210e, 210f, 210g, 210h coupled to the support base 230. The grooves 210a, 210b, 210c, 210d coupled to the fastening part 220 are designed to be disposed corresponding to the grooves provided for coupling at the lower end of the fastening part 220. Further, the grooves 210e, 210f, 210g, and 210h coupled to the support base 230 are designed to be disposed corresponding to the grooves provided for coupling at the lower end of the support base 230. A base part 210 can be provided on the fastening part 220 and the support base 230 by inserting a coupling device such as a screw into the grooves 210a to 210h.

  On the other hand, the fastening part 220 protrudes from the upper surface of the front end part of the base part 210. Specifically, when the body 100 and the stand 200 are fastened, the fastening part 220 is provided in a portion where the sample mounting part 110 of the body 100 is located.

  In order to describe a specific configuration relating to the fastening portion 220, first, FIG. 17 will be described. FIG. 17 is an exploded view of a fastening portion of a multi-section observation holder applicable to the present invention.

  The fastening portion 220 is provided with a through groove 222, and at least a part of the sample mounting portion 110 can be inserted. The through groove 222 provided in the fastening portion 220 is designed to have a size suitable for insertion of the sample mounting portion 110. When at least a part of the sample mounting part 110 is inserted into the through groove 222 of the fastening part 220, the first space and the second space are formed while the sample mounting part 110 is opened. The user can mount a plurality of samples 11 in the first space and the second space using tweezers or the like.

  As shown in FIG. 17, the first portion 223 that is a part of the upper surface of the fastening portion 220 protrudes higher than the second portion of the upper surface of the fastening portion 220 except for the first portion 223. To be formed. Here, the first portion 223 is one of both side portions of a portion where at least a part of the sample mounting portion 110 inserted into the through groove 222 is located. Thereby, a part of the sample mounting part 110 inserted into the through groove 222 is advanced using the side wall of the first part 223 as a guideline. In addition, the sample 11 can be easily mounted by rotating the sample mounting portion 110 inserted into the through groove 222 toward the second portion formed low, and the mounted sample 11 can be easily leveled. Can be adjusted.

  The fastening part 220 includes a first fastening part fitting groove 220a and a second fastening part fitting groove 220b. The first fastening portion fitting groove 220a and the second fastening portion fitting groove 220b are provided to couple the fastening portion 220 to a locking member 224 described later.

  The locking member 224 is provided with a locking protrusion 225 that closes at least a part of the through groove 222 formed in the fastening portion 220. When the sample mounting part 110 is inserted into the through groove 222, the locking protrusion 225 of the locking member 224 comes into contact with the step 117 formed on the push rod 116. When the locking projection 225 and the step 117 come into contact with each other, the push rod 116 is prevented from advancing, and the push rod 116 compresses the elastic member 130 and moves backward. The first lever 121 and the second lever 122 are rotated while the push rod 116 is moved rearward, whereby the sample pressing plates 125 and 126 are moved. A first space is formed between the first sample pressing plate 125 and one surface of the fixing rod 114, and a second space is formed between the second sample pressing plate 126 and the other surface of the fixing rod 114. Then, the user can mount the plurality of samples 11 in the first space and the second space using tweezers or the like.

  Further, the locking member 224 has a first locking member fitting groove 224a and a second locking member fitting groove 224b. The first locking member fitting groove 224a and the second locking member fitting groove 224b are respectively a first fastening part fitting groove 220a and a second fastening part fitting groove formed in the fastening part 220. The fastening part 220 and the locking member 224 can be joined by fitting with 220b and inserting a coupling device such as the fastening part screws 221a, 221b.

  The fastening part 220 has a third fastening part fitting groove 220c, a fourth fastening part fitting groove 220d, a fifth fastening part fitting groove 220e, and a sixth fastening part fitting groove on its lower surface. 220f. The third fastening portion fitting grooves to the sixth fastening portion fitting grooves 220c to 220f are fitted to the grooves 210a, 210b, 210c, and 210d formed at one end of the base portion 210, and are coupled devices such as screws. Can be inserted to couple the fastening part 220 to the base part 210.

  On the other hand, referring to FIGS. 15 and 16 again, the support base 230 protrudes from the upper surface of the rear end of the base portion 210. Specifically, when the body 100 and the stand 200 are fastened, the support base 230 can be provided at a portion where the handle portion 140 of the body 100 is located. Since the handle portion 140 of the body 100 is installed on the support base 230, the support base 230 is provided on the opposite side of the fastening portion 220. The distance between the support 230 and the fastening part 220 formed on the upper surface of the base part 210 can be designed according to the length of the body 100. Further, when the body 100 and the stand 200 are fastened, the body 100 must be placed horizontally. Therefore, the height of the support base 230 and the fastening portion 220 is designed so that the body 100 is horizontal.

  In order to describe a specific configuration for the support base 230, first, FIG. 18 will be described. FIG. 18 is an exploded view of a support for a multi-section observation holder applicable to the present invention.

  As shown in FIG. 18, the support base 230 on which the handle part 140 of the body 100 is installed is formed by combining a support base receiving part 231 and a support base upper part 232.

  The support base receiving portion 231 is provided with a lever groove 231a, and the lever groove 231а is fitted with a rotation groove 232a provided in the upper portion of the support base 232 to thereby support the support base receiving portion 231 and the support base. The upper portion 232 can be coupled. The support base receiving portion 231 is provided with a spring groove 231b. A first support base spring 236 connected to the support base upper portion 232 is coupled to the spring groove 231b.

  The support base upper part 232 is provided with a rotation groove 232a. The rotation groove 232a is fitted to the lever groove 231a of the support base receiving part 231, and includes a support base screw 230a and a second support base spring 230b. By inserting such a coupling device, the support base receiving portion 231 and the support base upper part 232 can be combined. The support base upper part 232 is coupled to be rotatable at a fixed angle around the support base screw 230a.

  A fixing protrusion 233 having a shape protruding outward is provided on the upper surface of the support base upper portion 232. The fixing protrusion 233 is fitted into the fixing groove 142 of the handle portion 140 so that the body 100 can be firmly fastened to the stand 200. Therefore, the fixing protrusion 233 can be formed in a shape corresponding to the fixing groove 142 having a shape drawn into the inside. The shape of the fixing protrusion 233 does not have to be the same as the shape of the fixing groove 142, and a shape that allows the fixing protrusion 233 to have a structure that can be coupled to the fixing groove 142 is sufficient. By coupling the fixing protrusion 233 and the fixing groove 142, there is an effect that the body 100 and the stand 200 can be easily and simply fastened.

  The support base upper part 232 is provided with a lever 234 to which a first support base spring 236 is connected. The lever 234 protrudes outside the support base upper part 232, and the user can press the lever by hand. When the user presses the lever 234, the support base upper part 232 descends while rotating downward around the support base screw 230a, which causes the handle 140 installed on the support base 230 to move downward. Separate from. After the handle portion 140 is separated from the support base 230, when the user releases the force pressing the lever 234, the support base upper part 232 returns to the original position by the elastic force of the first support base spring 236. That is, when the user releases the force of pressing the lever 234, the support base upper part 232 returns to the original position while rotating upward about the support base screw 230a. In this way, by pressing the lever 234 provided on the support base upper part 232 and separating the handle part 140 from the support base 230, the body 100 and the stand 200 can be separated more easily and simply.

  The support base receiving portion 231 includes a first support base receiving fitting groove 231e, a second support base receiving fitting groove 231f, and a third support base receiving fitting groove 231g at a lower portion thereof. And a fourth support base receiving fitting groove 231h. The first support base receiving / fitting groove 231e to the fourth support base receiving / fitting groove 231h are fitted to grooves 210e, 210f, 210g, and 210h formed on the upper surface of the base portion 210, and are screwed. By inserting such a coupling device, the support base 230 and the base part 210 can be coupled.

  On the other hand, referring to FIGS. 15 and 16 again, the stationary table 240 is configured to support the body 100 when the body 100 is fastened to the stand 200, and protrudes from the upper surface of the base portion 210. A plurality of stationary tables 240 may be provided, and are preferably provided between the fastening portion 220 and the support table 230. 15 and 16, the stand 200 includes the two mounting tables 240, but the number of the mounting tables 240 applicable to the multi-section observation holder 10 of the present invention is not particularly limited. Since at least a part of the body 100 is placed on the gantry 240, the body 100 can be designed with an appropriate height so that the body 100 can be placed horizontally together with the fastening portion 220 and the support base 230.

  In addition, a semicircular groove is provided on the upper surface of the mounting table 240, and a part of the body 100 can be installed in the semicircular groove. Therefore, the body 100 fastened to the stand 200 is not easily separated and can be fastened stably. The semicircular groove provided on the gantry 240 may be formed corresponding to the size of the body 100. Since the body 100 is generally formed so that the handle portion 140 is thicker than the portion of the sample mounting portion 110, the size of the groove provided in the mounting table 240 may vary depending on the portion where the mounting table 240 is located. is there. When the body 100 and the stand 200 are fastened, the height of the through groove 222 formed in the fastening part 220 and the height of the support base 230 and the mounting base 240 must be designed so that the body 100 can be kept horizontal. I must.

<Operation of multi-section observation holder>

  In order to mount the sample 11 on the multi-section observation holder 10 of the present invention, the body 100 and the stand 200 must be fastened. In order to fix the mounted sample 11, the body 100 is removed from the stand 200. Must be separated. Below, with reference to FIGS. 19-22, the specific operation | movement of the multi-section observation holder 10 of this invention is demonstrated. 19 to 22, the step 17 of the push rod 11 is not shown for convenience of explanation.

  First, FIG. 19 is a plan view showing a state of the sample mounting portion before the body of the multi-section observation holder applicable to the present invention and the stand are fastened. In order to fasten the torso 100 and the stand 200, a part of the torso 100 is placed on the stand 240 of the stand 200. Since a semicircular groove is provided on the upper surface of the mounting table 240, a part of the body 100 formed of a circular tube can be installed in the semicircular groove. As described above, when a part of the trunk 100 is placed on the cradle 240, the sample mounting portion 110 of the trunk 100 is placed at a position where the through groove 222 of the fastening portion 220 is formed.

  As shown in FIG. 19, before the body 100 is fastened to the stand 200, the push rod 116 is moved forward. The rear end of the first insulator 121 and the rear end of the second insulator 122 are located at the center portion of the sliding groove 118, and the sample pressing plates 125 and 126 and the fixed rod 114 provided at the front ends of the insulators 121 and 122. Since the side surfaces are almost in contact with each other, the sample 11 cannot be mounted. In order to separate the sample pressing plates 125 and 126 on both sides, the body 100 is pushed forward, and a part of the sample mounting portion 110 is inserted into the through groove 222.

  Next, FIG. 20 is a plan view showing a state of the sample mounting portion when the body of the multi-section observation holder applicable to the present invention and the stand are fastened. The body 100 and the stand 200 can be fastened by inserting the sample mounting part 110 of the body 100 into the through groove 222 formed in the fastening part 220. When a part of the sample mounting part 110 is inserted into the through groove 222, the step 117 protruding outward from the push rod 116 is a locking protrusion 225 of the locking member 224 that closes a part of the through groove 222. Will abut. Since the push rod 116 is connected to the elastic member 130 by the connecting member 132, when an external force is applied to the push rod 116, the push rod 116 can move. Therefore, as the sample mounting part 110 moves forward, the push rod 116 compresses the elastic member 130 and moves backward.

  As shown in FIG. 20, when the sample mounting portion 110 is sufficiently inserted into the through groove 222, the push rod 116 further moves rearward. When the push rod 116 moves later, the elastic force of the lever spring 127 acts on the rear end portion of the first lever 121 and the rear end portion of the second lever 122, and the first lever 121 has the sample mounting space portion 112. The second lever 122 rotates in one direction around the lever shaft 128 in the sample mounting space 112.

  A part of the side surface of the sample mounting space 112 has an open shape, and the first insulator 121 and the second insulator 122 rotate to rotate, and the side surface of the front end portion of the first insulator 121 and the second insulator 122. The side surface of the front end portion of the sample is in contact with the open portion of the side surface of the sample mounting space portion 112. As described above, the part of the side surface of the sample mounting space portion 112 is opened in order to secure a sufficient space for mounting the plurality of samples 11 in the sample mounting portion 110 occupying a limited area. .

  When the first insulator 121 rotates in one direction and the second insulator 122 rotates in the other direction, the separation distance between the end portion of the first insulator 121 and the end portion of the second insulator 122 is increased. growing. That is, the isolation distance between the front end of the first insulator 121 and the front end of the second insulator 122 is increased, and the isolation distance between the rear end of the first insulator 121 and the rear end of the second insulator 122 is increased. Becomes larger. As a result, the first sample pressing plate 125 and the second sample pressing plate 126 move to the side surfaces, and the sample 11 is mounted between the first sample pressing plate 125 and one surface of the fixing rod 114. A sufficient first space is provided, and a second space sufficient for mounting the sample 11 is provided between the second sample pressing plate 126 and the other surface of the fixing rod 114.

  After the first space and the second space are formed, the handle 140 is placed on the support base 230 of the stand 200. The handle portion 140 is provided with a fixed groove 142 having a shape drawn into the inside, and a fixed protrusion 233 having a shape protruding to the outside is provided on the upper surface of the support base 230. The fixed protrusions 233 have shapes corresponding to each other. When the fixing groove 142 and the fixing protrusion 233 are coupled, the handle portion 140 and the support base 230 are firmly coupled, so that the fastening of the body 100 and the stand 200 is more rigid.

  Next, FIG. 21 is a plan view showing a state in which a sample is mounted on a sample mounting portion of a multi-section observation holder applicable to the present invention. When the body 100 and the stand 200 are fastened, the user can mount the sample 11 in the first space and the second space using tweezers or the like. Since the cross section of the sample 11 mounted in the first space and the second space faces upward, the user can observe the cross section of the sample 11 using a scanning electron microscope.

  When the sample 11 is cut in order to observe the cross section of the sample 11, the cut surface of the sample 11 is frequently cut unevenly. Thereby, the sample 11 may be mounted in the first space and the second space while being inclined. In order to correctly observe the sample 11, the sample 11 must be mounted in the first space and the second space so as to be horizontal. For this reason, the user rotates the body 100 by about 80 °. Then, the level of the sample 11 can be adjusted. Since the second portion of the upper surface of the fastening portion 220 protrudes lower than the first portion 223, the body 100 is rotated so that the upper surface of the sample mounting portion 110 faces the second portion. Is desirable.

  Next, FIG. 22 is a plan view showing a state in which the body and the stand of the multi-section observation holder applicable to the present invention are separated and the sample is fixed to the sample mounting portion. When the body 100 is separated from the stand 200, the user takes the handle 140 and presses the lever 234 that protrudes outside the support base upper part 232. When the user presses the lever 234, the support base upper part 232 is lowered while rotating downward due to the force applied to the lever 234. The lowered support base 232 enables the handle 140 installed on the support base 230 to be easily separated from the support base 230. When the handle portion 140 is separated from the support base 230 by pressing the lever 234, the user can take the handle portion 140 and slowly move the body 100 backward to separate the body 100 from the stand 200. The process of separating the body 100 from the stand 200 is performed while the body 100 is rotated.

  When the sample mounting portion 110 is extracted from the through groove 222, the external force applied to the step 117 of the push rod 116 is removed while the step 117 of the push rod 116 and the locking protrusion 225 of the locking member 224 are separated. The push rod 116 moves forward again by the elasticity of the elastic member 130. As the push rod 116 moves forward, the sliding groove 118 applies a force to the rear end of the first lever 121 and the rear end of the second lever 122. Due to the force applied in this way, the first insulator 121 rotates in the other direction around the insulator shaft 128 in the sample mounting space 112, and the second insulator 122 rotates in the sample mounting space 112. It rotates in one direction around the axis 128. While the first insulator 121 and the second insulator 122 rotate, the first sample pressing plate 125 and the second sample pressing plate 126 connected to the end portions thereof also move, and the sample pressing plates 125 and 126 move together. Will fix the sample 11. Therefore, the sample 11 mounted in the first space is fixed by one surface of the sample pressing plate 125 and the fixing rod 114, and the sample 11 mounted in the second space is fixed to the second sample pressing plate 126 and the fixing rod. It is fixed by the other surface of 114. The user can apply the fixed sample 11 to the scanning electron microscope and obtain a precise enlarged image of the cross section of the sample 11.

  On the other hand, the present invention can also be embodied as a computer-readable code on a computer-readable recording medium. Computer-readable recording media include all types of recording devices that store data that can be read by a computer system. Examples of computer-readable recording media include ROM, RAM, CD-ROM, magnetic tape, floppy (registered trademark) disk, optical data storage device, etc., and a form of carrier wave (for example, transmission through the Internet) It is also embodied in. The computer-readable recording medium is distributed to computer systems connected via a network, and codes that can be read by the computer in a distributed manner are stored and executed. A functional program, code, and code segment for implementing the present invention can be easily inferred by a programmer in the technical field to which the present invention belongs.

  Further, the apparatus and method described above are not limited to the configurations and methods of the embodiments described above, and the embodiments may be modified in various ways. All or some of the embodiments may be selectively combined.

The sample (11) is fixed to the first space and the second space so that the cross section of the sample (11) faces the outside of the first space and the second space, and a scanning electron microscope Can be used for cross-sectional observation of the fixed sample (11).

Wherein the push rod (116) toward the front to the rear, and is formed sliding groove (118) having a shape becomes narrower width, the rear end portion and said second of said first lever (121) the rear end of the lever (122) of the contact with the sliding groove (118) of said push rod (116).

Further, the by the movement of the push rod (116), and the rear end portion of the first rear portion and the second lever of the lever (121) (122), the slide groove of the push rod (116) While moving along (118), the first lever (121) and the second lever (122) are rotated about the lever shaft (128), and the first lever (121) and By the rotation of the second insulator (122), the first sample pressing plate (125) and the second sample pressing plate (126) move.

Further, when the push rod (116) moves rearward, the elastic force of the lever spring (127) causes the rear end portion of the first lever (121) and the rear end portion of the second lever (122). The separation distance between the rear end portion of the first lever (121) and the rear end portion of the second lever (122) is increased, and the first lever (121) is The second lever (122) rotates in one direction around the lever shaft (128), and the second lever (122) rotates in the other direction around the lever shaft (128). The front end of the first lever (121) separation distance between the front end of the a part second lever (122) is increased.

When the push rod (116) moves forward, the sliding groove (118) exerts a force on the rear end of the first lever (121) and the rear end of the second lever (122). Then, the separation distance between the rear end portion of the first insulator (121) and the rear end portion of the second insulator (122) is reduced, and the first insulator (121) centered axis (128) is rotated in the other direction, the second lever (122) is rotated in one direction around the lever axis (128), a front end portion of the first lever (121) separation distance between the front end of the second lever (122) and is reduced.

Claims (12)

The torso (100),
A sample mounting portion (110) formed at the front end of the body (100) and capable of fixing a plurality of samples (11);
An elastic member (130) located inside the body (100),
The sample mounting part (110)
A push rod (116) movable in the front-rear direction by the elastic force of the elastic member (130);
A first sample pressing plate (125) and a second sample pressing plate (126) are provided at the front end, and the rear end is an X-type insulator (120) connected to the push rod (116);
A fixing rod (114) formed between the first sample pressing plate (125) and the second sample pressing plate (126),
When the push rod (116) moves rearward, a first space in which the sample (11) is mounted is provided between the first sample pressing plate (125) and one surface of the fixing rod (114). A second space in which the sample (11) is mounted is formed between the second sample pressing plate (126) and the other surface of the fixing rod (114). Multi-section observation holder. After the sample (11) is mounted in the first space and the second space, the push rod (116) moves forward,
The first sample pressing plate (125) is moved to fix the sample (11) mounted in the first space;
The multi-section observation holder according to claim 1, wherein the second sample pressing plate (126) is moved to fix the sample (11) mounted in the second space. The sample (11) is fixed to the first space and the second space so that a cross section of the sample (11) is directed to the outside,
The multi-section observation holder according to claim 2, wherein a section of the fixed sample (11) can be observed using a scanning electron microscope. The X-type insulator (120)
A first sample pressing plate installation portion (123) provided with the first sample pressing plate (125) at the front end, and a first lever (121) rotatable about a lever shaft (128);
A second sample pressing plate installation part (124) provided with the second sample pressing plate (126) is formed at the front end, and a second lever (122) rotatable about the lever shaft (128); Including,
The front end portion of the first insulator (121) and the front end portion of the second insulator (122) are separated from each other, and the rear end portion of the first insulator (121) and the second insulator (122) are separated. ) Is separated from the rear end,
The multi-section according to claim 2, wherein an intermediate portion of the first insulator (121) and an intermediate portion of the second insulator (122) are coupled to the insulator shaft (128). Observation holder. The push rod (116) is formed with a sliding groove (118) having a shape that becomes narrower from the front to the rear.
The rear end of the first lever (121) and the rear end of the second lever (122) are in contact with a sliding groove (118) of the push rod (116). Multi-section observation holder. Due to the movement of the push rod (116), the rear end of the first lever (121) and the rear end of the second lever (122) are formed in the sliding groove (118) of the push rod (116). The first lever (121) and the second lever (122) are rotated about the lever shaft (128) while moving along the
The first sample pressing plate (125) and the second sample pressing plate (126) are moved by the rotation of the first lever (121) and the second lever (122). The multi-section observation holder according to claim 5. The X-type insulator (120)
And a lever spring (127) having one end connected to the rear end of the first lever (121) and the other end connected to the rear end of the second lever (122). The multi-section observation holder according to claim 6, wherein When the push rod (116) moves backward,
The elastic force of the lever spring (127) acts on the rear end portion of the first lever (121) and the rear end portion of the second lever (122), so that the first lever (121) The separation distance between the rear end and the rear end of the second insulator (122) is increased,
The first lever (121) rotates in one direction around the lever shaft (128), the second lever (122) rotates in the other direction around the lever shaft (128), The multi-section observation holder according to claim 7, wherein a separation distance between a front end of the first insulator (121) and a front end of the second insulator (122) is increased. A sample mounting space (112) in which the push rod (116), the X-shaped insulator (120), the first sample pressing plate (125), and the second sample pressing plate (126) are arranged. A part of the side is open,
When the push rod (116) moves rearward, the side surface of the front end portion of the first insulator (121) and the side surface of the front end portion of the second insulator (122) become the sample mounting space portion (112 The multi-section observation holder according to claim 8, wherein the first insulator (121) and the second insulator (122) are rotated so as to be in contact with the open portion of the side surface of the first and second insulators. When the push rod (116) moves forward,
The sliding groove (118) acts on the rear end of the first insulator (121) and the rear end of the second insulator (122), and the rear end of the first insulator (121). And the separation distance between the rear end of the second insulator (122) is reduced,
The first lever (121) is rotated in the other direction around the lever shaft (128), and the second lever (122) is rotated in one direction around the lever shaft (128). The multi-section observation holder according to claim 7, wherein a separation distance between a front end of the first insulator (121) and a front end of the second insulator (122) is reduced. A stand (200) that can be fastened or separated from the body (100);
The stand (200)
A base portion (210) forming a lower portion of the stand (200), and
A fastening portion (220) provided on the upper surface of the base portion (210) and having an open through hole (222) formed therein,
When the body (100) is fastened to the stand (200) and at least a part of the sample mounting part (110) is inserted into the through hole (222), the push rod (116) moves backward. And
The multi-section observation holder according to claim 1, wherein when the body (100) is separated from the stand (200), the push rod (116) moves forward. The first portion (223), which is a part of the upper surface of the fastening portion (220), is higher than the second portion of the upper surface of the fastening portion (220) except for the first portion (223). Protruding,
The first portion (223) is one of both side portions of a portion where at least a part of the sample mounting portion (110) inserted into the through hole (222) is located. The multi-section observation holder according to 11.

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