JP2016200384A - Heat treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To downsize the whole device, and reduce power consumption.SOLUTION: A heat treatment device for performing heat treatment to an object installed inside a device body 10, includes: a coil 40 that heats a heating element 20, mounted with the object in such a manner that the heat element is disposed so as to cover the periphery of the object, with induction heating thereby to indirectly heat the object; cooling means of supplying inactive gas to a space to cool the object; and a reflection member that is disposed over the object in the space, and in which at least one slit 71 extending from a central part 70a toward a peripheral edge part 70b is formed.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a heat treatment apparatus, and more particularly to a heat treatment apparatus that performs a heat treatment such as brazing on an object placed inside an apparatus main body.

  Conventionally, as a heat treatment apparatus for performing heat treatment such as brazing on an object, for example, a first heating chamber, a second heating chamber, a first cooling chamber, and a second cooling chamber in which a metal product as an object is in a substantially vacuum state. What is comprised so that it may convey sequentially to a cooling chamber with a conveyance means is known.

  In such a heat treatment apparatus, the object is heated to the vicinity of the melting point of the brazing material by induction heating in the first heating chamber, and then transferred to the second heating chamber where the heater or the like is internal air. The object is heated to the brazing temperature by heating. In the heat treatment apparatus, the object thus heated is transported in the order of the first cooling chamber and the second cooling chamber, and the desired brazed product is manufactured by cooling in the respective chambers. (For example, refer to Patent Document 1).

JP 2009-115413 A

  However, in the above-described heat treatment apparatus, it is necessary to transport the metal product, which is an object, to a plurality of chambers that are in a substantially vacuum state, ie, the first heating chamber, the second heating chamber, the first cooling chamber, and the second cooling chamber. As a result, a plurality of chambers and a conveying means are required, which leads to an increase in the size of the entire apparatus. Further, in the second heating chamber, the object is heated by heating the internal air with a heater or the like, so it is necessary to sufficiently heat the internal air in the second heating chamber before the object is transported. In addition, the amount of power consumed during heat insulation was sufficiently large.

  In Patent Document 1, a heat treatment apparatus in which the first heating chamber and the second heating chamber are integrated is also proposed. However, even if the first heating chamber and the second heating chamber are integrated, these devices are proposed. Since the object heated in the heating chamber is transferred to the first cooling chamber and the second cooling chamber by the transfer means, there still remains a problem that leads to an increase in the size of the entire apparatus. In addition, even if the first heating chamber and the second heating chamber are integrated, heating by induction heating is performed in the first half of the integrated heating chamber, and heating is performed by the heater in the second half of the heating chamber. Still, the amount of power consumed during heat insulation was sufficiently large.

  In view of the above circumstances, an object of the present invention is to provide a heat treatment apparatus capable of downsizing the entire apparatus and reducing power consumption.

  In order to achieve the above object, a heat treatment apparatus according to the present invention is arranged in a heat treatment apparatus for performing heat treatment on an object placed inside the apparatus main body so as to cover the periphery of the object. Accordingly, the cover body that positions the object in a substantially sealed space, and the object body is disposed directly inside the apparatus main body, and the object is directly heated by induction heating, or the object is placed thereon. A heating means for indirectly heating the object by heating the heating element by induction heating; a cooling means for supplying an inert gas to the space to cool the object; and the object in the space. And a metal plate member provided with at least one slit formed in the upper region and extending from the central portion toward the edge.

  In the heat treatment apparatus according to the present invention, the metal plate member is formed in a circular shape, and the slits extend from the central portion along the radial direction and are spaced apart from each other in the circumferential direction. It is characterized by being made.

  Moreover, the present invention is characterized in that, in the heat treatment apparatus, the slit is formed such that one end is continuous with the peripheral edge of the metal plate member and the other end is separated from other slits in the central portion. To do.

  Further, the heat treatment apparatus according to the present invention is a heat treatment apparatus that performs heat treatment on an object placed inside the apparatus main body, and is disposed in a manner covering the periphery of the target chamber, thereby the target chamber. A cover body that is positioned in a substantially sealed space, and a heating means that is disposed inside the apparatus main body and that heats the object by heating a heating element on which the object is placed by induction heating, A cooling means for cooling the object by supplying an inert gas to the space, and a notch is formed in a portion of the space disposed above the object and facing the central portion of the heating element. And a reflecting member having a metal plate.

  Further, in the heat treatment apparatus according to the present invention, the reflecting member is disposed in an upper region of the object in the space, and a circular notch is formed in a portion facing the central portion of the heating element. An annular first metal plate, and a circular second metal plate disposed in an upper region of the object in the space and facing a central portion of the heating element through a notch of the first metal plate. It is characterized by that.

  In the heat treatment apparatus according to the present invention, the first metal plate and the second metal plate are each movable up and down.

  According to the present invention, the heating means is driven to heat the object, and after the heating is finished, the heating means is stopped to supply the inert gas to the space formed by the cover body. Therefore, it is possible to reduce the size of the entire apparatus without the need for a transfer means for transferring the object from the heating chamber to the cooling chamber as in the prior art. Moreover, since the object is heated by induction heating, it is not necessary to preliminarily heat the internal air with a heater or the like as in the prior art, and as a result, it is possible to reduce the amount of power consumed during heat retention. . And since the metal plate member in which the slit was formed is arranged in the upper region of the object, the temperature rise of the cover body is suppressed while suppressing heat dissipation due to thermal radiation in heating of the object. And cooling can be performed efficiently. As a result, the entire apparatus can be reduced in size and the power consumption can be reduced.

  Further, according to the present invention, the heating means is driven to heat the object, and after the heating is finished, the heating means is stopped to supply the inert gas to the space formed by the cover body. Since the object is cooled, a transfer means for transferring the object from the heating chamber to the cooling chamber is not required as in the prior art, and the entire apparatus can be miniaturized. Moreover, since the object is heated by induction heating, it is not necessary to preliminarily heat the internal air with a heater or the like as in the prior art, and as a result, it is possible to reduce the amount of power consumed during heat retention. . And since the metal plate in which the circular notch was formed in the portion facing the central portion of the heating element is disposed in the upper region of the object, the cover body is heated while heating the entire object substantially uniformly. Therefore, the heating efficiency and the cooling efficiency can be improved. As a result, the entire apparatus can be reduced in size and the power consumption can be reduced.

FIG. 1 is a schematic diagram schematically showing a heat treatment apparatus according to Embodiment 1 of the present invention. FIG. 2 is a block diagram showing a characteristic control system of the heat treatment apparatus according to Embodiment 1 of the present invention. FIG. 3 is a plan view of the metal plate shown in FIG. FIG. 4 is a flowchart showing the contents of processing performed by the control unit constituting the heat treatment apparatus according to Embodiment 1 of the present invention. FIG. 5 is a flowchart showing the contents of the atmosphere adjustment process shown in FIG. FIG. 6 is a flowchart showing the contents of the heat treatment shown in FIG. FIG. 7 is a flowchart showing the contents of the cooling process shown in FIG. FIG. 8 is a chart showing the relationship between the distance between the object and the metal plate and the heat reduction rate of the object. FIG. 9 is a chart showing the relationship between the number of slits in the metal plate and the amount of heat generated by the object. FIG. 10 is a schematic diagram schematically showing a heat treatment apparatus according to the second embodiment of the present invention. FIG. 11 is a block diagram showing a characteristic control system of the heat treatment apparatus according to Embodiment 2 of the present invention. FIG. 12 is a perspective view showing the heating element shown in FIG. FIG. 13 is a perspective view showing the reflecting member shown in FIG. FIG. 14 is an enlarged cross-sectional view showing the positional relationship between the first metal plate and the second metal plate shown in FIG. FIG. 15 is a flowchart showing the contents of processing performed by the control unit constituting the heat treatment apparatus according to Embodiment 2 of the present invention. FIG. 16 is a flowchart showing the processing contents of the atmosphere adjustment processing shown in FIG. FIG. 17 is a flowchart showing the processing contents of the heating processing shown in FIG. FIG. 18 is a flowchart showing the contents of the cooling process shown in FIG.

  Hereinafter, preferred embodiments of a heat treatment apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

<Embodiment 1>
FIG. 1 is a schematic diagram schematically showing a heat treatment apparatus according to the first embodiment of the present invention, and FIG. 2 is a block diagram showing a characteristic control system of the heat treatment apparatus according to the first embodiment of the present invention. It is. The heat treatment apparatus exemplified here includes an apparatus main body 10, a heating element 20, a cover body 30, a coil 40, and a fan 50.

  The apparatus main body 10 includes a heat insulating plate 11, leg portions 12, and a box body 13. There are a plurality (two in the illustrated example) of heat insulating plates 11 (11a and 11b), which are each formed of ceramics or the like and are rectangular plate-like bodies. These heat insulating plates 11 are laminated in a state where they are separated from each other with a spacer 11c interposed. That is, a gap 11 d is formed between the two heat insulating plates 11.

  A plurality of (for example, four) leg portions 12 are provided, and each leg portion 12 is provided so as to extend downward from the lower surfaces of the four top portions of the lower heat insulating plate 11b.

  The box 13 has a rectangular shape with an open bottom surface. Such a box 13 is mounted on the upper surface of each edge of the upper heat insulating plate 11a by placing the lower ends of the front, rear, left side, and right side on the upper surface of the upper heat insulating plate 11a. The outer wall is covered.

The heating element 20 has a disk shape. The heating element 20 is made of a material having an electrical resistivity of the order of 10 ⁻⁵ such as graphite or graphite. Such a heating element 20 is placed on the upper surface of the central region of the upper heat insulating plate 11a. The heating element 20 is for placing an object (for example, copper, silver, etc.) 1 to be heat-treated on its upper surface.

  The cover body 30 is formed from a heat insulating material and has, for example, a hemispherical shape. Such a cover body 30 covers the periphery of the heating element 20 and the object 1 by being placed on the upper heat insulating plate 11a in such a manner that its opening is closed by the upper heat insulating plate 11a. It is arranged in a manner. As a result, the object 1 and the heating element 20 are located in a space substantially sealed by the cover body 30. The inner surface of the cover body 30 constitutes a reflection surface.

  The cover body 30 has an air supply port and an exhaust port (not shown). The air supply port communicates with the air supply line 21. The air supply line 21 is provided in such a manner that it passes through a first through hole (not shown) provided in the box 13, and space for inert gas such as nitrogen gas sealed in a cylinder (not shown). It is for supplying to. A valve 22 is provided in the middle of the air supply line 21.

  The opening degree of the valve 22 is adjusted by a command from the control unit 80 to be described later. When the valve 22 is closed, the passage of the inert gas is restricted. When the valve 22 is opened, the passage of the inert gas is performed. Is allowed.

  The exhaust port communicates with the exhaust line 23. The exhaust line 23 is provided in such a manner that it passes through a second through hole (not shown) provided in the box 13. The exhaust line 23 is for exhausting the gas flowing in from the exhaust port to the outside.

  The coil 40 is disposed below the lower heat insulating plate 11b. More detailed description is as follows. A pair of left and right support members 41 are installed between the pair of front and rear legs 12 of the legs 12 constituting the apparatus main body 10. Each of these support members 41 has an upper extension 42 extending in a manner of projecting upward. The coil 40 is wound in a spiral shape, and is disposed in a manner that is supported by the tip portions of the upper extending portions 42.

  Such a coil 40 is a heating means that heats the heating element 20 by induction heating when a voltage having a specific frequency is applied from the electrically connected power converter 43. Here, the power conversion device 43 incorporates a so-called inverter circuit, and provides the coil 40 with alternating current supplied from the commercial power supply 44 as alternating current of a specific frequency.

  The fan 50 is disposed on the lower side of the coil 40 so as to straddle the pair of left and right support members 41. The fan 50 is driven by a command from the control unit 80, and is a blowing unit that sends air to the coil 40 when driven.

  In addition to the above configuration, such a heat treatment apparatus includes an input unit 61, an oxygen concentration detection sensor 62, a temperature detection sensor 63, a metal plate (metal plate member) 70, and a control unit 80.

  The input means 61 is, for example, a remote controller numeric keypad, a keyboard, or a touch panel screen, and is an operation input unit for an operator using the heat treatment apparatus to input various commands.

  The oxygen concentration detection sensor 62 is disposed at a predetermined location on the inner surface of the cover body 30. The oxygen concentration detection sensor 62 detects the oxygen concentration in the space formed by the cover body 30 when the cover body 30 is provided. The oxygen concentration detected by the oxygen concentration detection sensor 62 is output to the control unit 80 as an oxygen concentration signal.

  The temperature detection sensor 63 is disposed at a predetermined location on the surface of the heating element 20. The temperature detection sensor 63 detects the temperature of the heating element 20. The temperature detected by the temperature detection sensor 63 is output to the control unit 80 as a temperature signal.

  As shown in FIG. 3, the metal plate 70 has, for example, a circular shape. The metal plate 70 is disposed in the space above the object 1 so that the central portion is directly above the central portion of the heating element 20. Although not clearly shown in the drawing, the metal plate 70 is disposed in an upper region of the object 1 by a support portion provided on the upper heat insulating plate 11 a or a support portion provided on the cover body 30.

  In such a metal plate 70, a plurality (eight in the illustrated example) of slits 71 are radially formed. More specifically, the slit 71 extends in the radial direction from the central portion 70 a of the metal plate 70, and is separated from other slits 71 adjacent to each other along the circumferential direction of the metal plate 70. It is formed to line up. One end of each of the slits 71 is continuous with the peripheral edge portion 70b of the metal plate 70, and the other end is formed apart from the other slits 71 at the central portion 70a. That is, the part between the slits 71 adjacent to each other in the metal plate 70 is connected to the other part via the central part 70a.

  The control unit 80 comprehensively controls the operation of the heat treatment apparatus, that is, the heat treatment in accordance with the programs and data stored in the memory 81, and includes an input processing unit 80a, a comparison unit 80b, a valve drive processing unit 80c, and an inverter drive processing unit. 80d and a fan drive processing unit 80e.

  Here, various information is stored in the memory 81, and reference density information and target temperature information are stored as characteristic features in the first embodiment. The reference concentration information is information including a reference concentration (for example, 100 ppm) that becomes a threshold value in the heat treatment described later. The target temperature information is information including a target temperature that is a target value in the heat treatment described later.

  The input processing unit 80a performs input processing of commands and signals from the input means 61 and various sensors. The comparison unit 80b compares the detected density input through the input processing unit 80a with the reference density read out from the memory 81, and compares the detected temperature input through the input processing unit 80a with the target temperature read out from the memory 81. To do.

  The valve drive processing unit 80c gives a command to the valve 22 to open, close, and increase / decrease the opening degree.

  The inverter drive processing unit 80d gives a command to the power conversion device 43 to drive or stop the power conversion device 43. Further, the inverter drive processing unit 80 d increases or decreases the frequency of the voltage applied to the coil 40 by giving an instruction to the power converter 43 to increase or decrease the output of the power converter 43.

  The fan drive processing unit 80e is configured to drive and stop driving the fan 50 by giving a command to the fan 50.

  In the heat treatment apparatus having the above-described configuration, a substantially sealed space is formed by disposing the cover body 30 after the object 1 is placed on the heating element 20, and an air supply line By arranging the box 13 after the 21 and the exhaust line 23 are disposed, the following heat treatment can be performed.

  FIG. 4 is a flowchart showing the processing contents executed by the control unit 80 constituting the heat treatment apparatus according to the first embodiment of the present invention.

  The control unit 80 waits for an input of a heat treatment command by the operator who is a user through the input means 61 (step S100). And when an operator inputs the heat processing instruction | command through the input means 61 and inputs the heat processing instruction | command through the input process part 80a (step S100: Yes), the control part 80 implements an atmosphere adjustment process (step S200). .

  FIG. 5 is a flowchart showing the contents of the atmosphere adjustment process shown in FIG.

  In this atmosphere adjustment process, the control unit 80 gives an open command to the valve 22 through the valve drive processing unit 80c to open the valve 22 (step S201). The control unit 80 having opened the valve 22 in this way waits for an oxygen concentration signal to be input through the input processing unit 80a (step S202), that is, waits for oxygen concentration detection by the oxygen concentration detection sensor 62.

  When the oxygen concentration signal is input through the input processing unit 80a (step S202: Yes), the control unit 80 reads the reference concentration information from the memory 81 through the comparison unit 80b, and the detected concentration included in the oxygen concentration signal is used as the reference concentration information. It is compared whether it is below the reference concentration (100 ppm) contained (step S203).

  When the detected concentration is equal to or lower than the reference concentration (step S203: Yes), the control unit 80 decreases the opening of the valve 22 by giving a command to the valve 22 to decrease the opening through the valve drive processing unit 80c. (Step S204), and then the procedure is returned to end the current atmosphere adjustment process.

  Here, although the opening degree of the valve 22 is decreased in step S204, the valve 22 is still opened even if the opening degree is decreased.

  According to such an atmosphere adjustment process, the oxygen concentration in the space substantially sealed by the cover body 30 can be adjusted to 100 ppm or less.

  On the other hand, when the detected concentration exceeds the reference concentration (step S203: No), the control unit 80 gives an instruction to increase the opening to the valve 22 through the valve drive processing unit 80c, thereby opening the valve 22. Is increased (step S205), and then the process returns to step S202. That is, the processes in step S202, step S203, and step S205 are repeated until the detected density is equal to or lower than the reference density.

  The control unit 80 that has performed the atmosphere adjustment process in this manner performs a heating process (step S300).

  FIG. 6 is a flowchart showing the contents of the heat treatment shown in FIG.

  In this heat treatment, the controller 80 gives a drive command to the power converter 43 through the inverter drive processor 80d to drive the power converter 43, and issues a drive command to the fan 50 through the fan drive processor 80e. Then, the fan 50 is driven (step S301, step S302).

  According to this, a voltage having a specific frequency (for example, about 20 kHz) is applied to the coil 40, and the heating element 20 is induction-heated by the coil 40. When the heating element 20 is heated in this way, the object 1 placed on the heating element 20 is directly applied from the heating element 20 through the internal atmosphere of the space formed by the cover body 30 or on the inner surface of the cover body 30. The object 1 will be heated by reflecting and transmitting heat. And by driving the fan 50, air can be sent to the coil 40 and it can suppress that the coil 40 becomes high temperature more than necessary.

  The control unit 80 that has driven the power conversion device 43 and the fan 50 in this way performs temperature control processing until a predetermined time set in advance by the built-in clock elapses (steps S303 to S307).

  In this temperature control process, when the temperature signal is input through the input processing unit 80a (step S303: Yes), the control unit 80 reads the target temperature information from the memory 81 through the comparison unit 80b, and the detected temperature included in the temperature signal is detected. It is compared whether or not the temperature is equal to or higher than the target temperature included in the target temperature information (step S304).

  When the detected temperature is equal to or higher than the target temperature (step S304: Yes), the control unit 80 applies the command to the power conversion device 43 to reduce the output through the inverter drive processing unit 80d and applies it to the coil 40. On the other hand, if the detected temperature is lower than the target temperature (step S304: No), a command to increase the output is given to the power converter 43 through the inverter drive processing unit 80d. Thus, the frequency applied to the coil 40 is increased (step S306).

  The control unit 80 performs such temperature adjustment control processing until a predetermined time elapses. When the predetermined time elapses (step S307: Yes), the control unit 80 instructs the power conversion device 43 to stop driving through the inverter drive processing unit 80d. To stop driving the power converter 43 (step S308), and then return the procedure to end the current heating process.

  According to such heat treatment, the object 1 can be heat-treated by induction heating the heating element 20 so as to match the target temperature. Further, during this heat treatment, the amount of inert gas supplied is reduced as compared with the next cooling treatment, thereby preventing the temperature of the space formed by the cover body 30 from being lowered more than necessary.

  The control unit 80 that has performed the heat treatment in this manner performs a cooling process (step S400).

  FIG. 7 is a flowchart showing the contents of the cooling process shown in FIG.

  In this cooling process, the control unit 80 gives a command to increase the opening degree to the valve 22 through the valve drive processing unit 80c to increase the opening degree of the valve 22 (step S401).

  According to this, the amount of the inert gas supplied to the space can be increased, and the object 1 can be gradually cooled by the inert gas. Further, since the drive of the fan 50 is continued even when the object 1 is being cooled, the air is continuously sent to the coil 40, and the heat of the object 1 is transmitted to the coil 40 and more than necessary. Can be prevented from becoming too high.

  The controller 80 having increased the opening degree of the valve 22 in this way confirms whether or not a predetermined time set in advance has passed through a built-in clock (step S402). The predetermined time in step S402 is a time necessary and sufficient for cooling the object 1 to room temperature with an inert gas, and is determined experimentally in advance.

  When the predetermined time has elapsed (step S402: Yes), the control unit 80 gives a close command to the valve 22 through the valve drive processing unit 80c to close the valve 22 (step S403), and the fan drive processing unit. A drive stop command is given to the fan 50 through 80e to stop the drive of the fan 50 (step S404), and then the procedure is returned to end the current cooling process.

  According to such a cooling process, the object 1 can be cooled to room temperature by supplying an inert gas.

  And the control part 80 which implemented such a cooling process complete | finishes the process based on this heat processing instruction | command. Thereby, the operator can take out the desired brazing product manufactured by heat-treating the object 1 by removing the cover body 30 while detaching the box body 13 from the upper heat insulating plate 11a.

  Thus, in the heat treatment apparatus according to the first embodiment, the air supply line 21 and the air supply valve 22 constitute a cooling unit that supplies the inert gas to the space to cool the object 1. By the way, in such a heat treatment apparatus, since the metal plate 70 is disposed in the space above the object 1 in the space formed by the cover body 30 as described above, the following effects are exhibited.

  Generally, when a metal plate (different from the metal plate 70) is installed above the object 1, an eddy current flows through the object 1 and the metal plate by electromagnetic induction. The magnetic field generated by the coil 40 is canceled by the magnetic field generated by the eddy current flowing through the metal plate.

  FIG. 8 is a chart showing the relationship between the distance between the object 1 and the metal plate and the heat reduction rate of the object 1. Here, the heat generation reduction rate is calculated by the following equation (1).

Formula (1)
Heat generation reduction rate (%) = {1− (heat generation amount with metal plate / heat generation amount without metal plate)} × 100

  As shown by the curve (a) in FIG. 8, it is clear that the heat generation reduction rate of the object 1 increases as the distance between the object 1 and the metal plate decreases. The decrease is more conspicuous as the distance between the object 1 and the metal plate becomes smaller.

  Therefore, in the first embodiment, a metal plate 70 in which a plurality of slits 71 are formed is used for the metal plate. Thus, in the metal plate 70 in which the plurality of slits 71 are formed, the generation of eddy current can be reduced by the slits 71.

  FIG. 9 is a chart showing the relationship between the number of slits in the metal plate 70 and the amount of heat generated by the object 1. In FIG. 9, a straight line (B) indicates the heat generation amount of the object 1 when the metal plate 70 is not installed, and the heat generation amount is 100%. Curves (c) to (e) are the amount of heat generated by the object 1 when the metal plate 70 with the slits 71 is installed, and is the ratio when the case where the metal plate 70 is not installed is 100%. . Curve (c) shows the case where the distance between the object 1 and the metal plate 70 is 5 mm, Curve (d) shows the case where the distance between the object 1 and the metal plate 70 is 10 mm, and the curve (e) shows the object The case where the distance of the thing 1 and the metal plate 70 is 20 mm is shown. From these curves (d) to (e), it is clear that the heat generation amount of the metal plate 70 increases as the number of slits of the metal plate 70 increases. That is, it is understood that the generation of eddy current is reduced by forming the slit 71.

  By arranging the metal plate 70 above the object 1, the metal plate 70 can reflect heat radiation from the object 1. Moreover, since a plurality of slits 71 are formed in the metal plate 70, the generation of eddy currents can be reduced, and attenuation of the amount of heat generated in the heat treatment of the object 1 can be reduced.

  Since the heat radiation is reflected in this manner, the heat radiation due to the heat radiation can be reduced while suppressing the temperature rise of the cover body 30, and the heating efficiency in the heat treatment can be improved. Even in the case of performing the temperature control process in the heat treatment, the heat radiation due to the heat radiation can be suppressed by the metal plate 70. Moreover, when performing a cooling process after a heat processing, a cooling process can be efficiently performed by suppressing the temperature rise of the cover body 30 by this heat processing.

  As described above, according to the heat treatment apparatus according to the first embodiment of the present invention, when a heat treatment command is given, an inert gas is supplied to the space formed by the cover body 30 to thereby create an atmosphere in the space. After adjusting the voltage, a voltage having a specific frequency is applied to the coil 40 to heat the heating element 20 by induction heating to indirectly heat the object 1. After the heating process is finished, the voltage is applied to the coil 40. Since the object 1 is cooled by increasing the supply amount of the inert gas to the space, a transfer means for transferring the object from the heating chamber to the cooling chamber as in the prior art is required. Therefore, the entire apparatus can be reduced in size. Moreover, since the heating element 20 is heated indirectly by induction heating, the object 1 is indirectly heated, so that it is not necessary to preliminarily heat the internal air with a heater or the like as in the prior art, and as a result the temperature is kept. Power consumption at the time can be reduced. And since the metal plate 70 in which the several slit 71 was formed is arrange | positioned in the upper area of the target object 1, while suppressing the thermal radiation by the thermal radiation of the target object 1 by heat processing, Since temperature rise is suppressed, heat treatment and cooling treatment can be performed efficiently. Therefore, it is possible to reduce the size of the entire apparatus and reduce the power consumption.

  According to the heat treatment apparatus, when the heat treatment and the cooling treatment of the object 1 are performed, the fan 50 is driven to send air to the coil 40, so that the coil 40 becomes hotter than necessary. Can be suppressed.

  According to the heat treatment apparatus, since the cover body 30 is formed of a heat insulating material, the rate at which heat in the space formed by disposing the cover body 30 is released to the outside through the cover body 30 is calculated. Can be reduced.

<Embodiment 2>
FIG. 10 is a schematic diagram schematically showing a heat treatment apparatus according to the second embodiment of the present invention, and FIG. 11 is a block diagram showing a characteristic control system of the heat treatment apparatus according to the second embodiment of the present invention. It is. The heat treatment apparatus exemplified here includes an apparatus main body 110, a heating element 120, a cover body 130, a coil 140, and a fan 150.

  The apparatus main body 110 includes a heat insulating plate 111, leg portions 112, and a box body 113. There are a plurality (two in the illustrated example) of heat insulating plates 111 (111a and 111b), which are each formed of ceramics or the like and are rectangular plate-like bodies. These heat insulating plates 111 are stacked in a state where they are separated from each other with a spacer 111c interposed. That is, a gap 111d is formed between the two heat insulating plates 111.

  A plurality of (for example, four) leg portions 112 are provided, and each of the leg portions 112 is provided so as to extend downward from the lower surfaces of the four top portions of the lower heat insulating plate 111b.

  The box body 113 has a rectangular shape with an open bottom surface. Such a box body 113 is mounted on the upper surface of each edge of the upper heat insulating plate 111a by placing the lower ends of the front surface, rear surface, left side surface, and right side surface above the upper heat insulating plate 111a. The outer wall is covered.

The heating element 120 has an annular shape as shown in FIG. That is, the heating element 120 has a disk-shaped hollow portion 121 formed at the center. The heating element 120 is made of a material having an electrical resistivity of the order of 10 ⁻⁵ such as graphite or graphite. Such a heating element 120 is placed on the upper surface of the central region of the upper heat insulating plate 111a. The heating element 120 is configured to place an object (for example, copper or silver) 2 to be heat-treated radially on its upper surface. That is, the heating element 120 places the object 2 radially along its radial direction.

  The cover body 130 is formed of a heat insulating material and has, for example, a hemispherical shape. Such a cover body 130 covers the periphery of the heating element 120 and the object 2 by being placed on the upper heat insulating plate 111a in such a manner that its own opening is closed by the upper heat insulating plate 111a. It is arranged in a manner. As a result, the object 2 and the heating element 120 are located in a space substantially sealed by the cover body 130. The inner surface of the cover body 130 constitutes a reflection surface.

  The cover body 130 has an air supply port and an exhaust port (not shown). The air supply port communicates with the air supply line 121. The air supply line 121 is provided in such a manner that it passes through a first through hole (not shown) provided in the box body 113, and an inert gas such as nitrogen gas sealed in a cylinder (not shown) is used as a space. It is for supplying to. A valve 122 is provided in the middle of the air supply line 121.

  The opening of the valve 122 is adjusted by a command from the control unit 180, which will be described later. When the valve 122 is closed, the passage of the inert gas is restricted. When the valve 122 is opened, the passage of the inert gas is performed. Is allowed.

  The exhaust port communicates with the exhaust line 123. The exhaust line 123 is provided in such a manner that it passes through a second through hole (not shown) provided in the box body 113. The exhaust line 123 is for exhausting the gas flowing in from the exhaust port to the outside.

  The coil 140 is disposed below the lower heat insulating plate 111b. More detailed description is as follows. A pair of left and right support members 141 are installed between the pair of front and rear legs 112 of the legs 112 constituting the apparatus main body 110. Each of the support members 141 has an upper extension 142 that extends in a manner of projecting upward. The coil 140 is wound in a spiral shape, and is disposed in a manner that is supported by the tip portions of the upper extension portions 142.

  Such a coil 140 is a heating unit that heats the heating element 120 by induction heating when a voltage having a specific frequency is applied from the electrically connected power converter 143. Here, the power conversion device 143 includes a so-called inverter circuit, and supplies the coil 140 with alternating current supplied from the commercial power supply 144 as alternating current of a specific frequency.

  The fan 150 is disposed on the lower side of the coil 140 so as to straddle the pair of left and right support members 141. The fan 150 is driven by a command from the control unit 180, and is a blowing unit that sends air to the coil 140 when driven.

  Such a heat treatment apparatus includes an input unit 161, an oxygen concentration detection sensor 162, a temperature detection sensor 163, a reflection member 170, and a control unit 180 in addition to the above configuration.

  The input unit 161 is, for example, a remote controller numeric keypad, a keyboard, or a touch panel screen, and is an operation input unit for an operator using the heat treatment apparatus to input various commands.

  The oxygen concentration detection sensor 162 is disposed at a predetermined position on the inner surface of the cover body 130. The oxygen concentration detection sensor 162 detects the oxygen concentration in the space formed by the cover body 130 when the cover body 130 is provided. The oxygen concentration detected by the oxygen concentration detection sensor 162 is output to the control unit 180 as an oxygen concentration signal.

  The temperature detection sensor 163 is disposed at a predetermined location on the surface of the heating element 120. The temperature detection sensor 163 detects the temperature of the heating element 120. The temperature detected by the temperature detection sensor 163 is output to the control unit 180 as a temperature signal.

  As shown in FIG. 13, the reflecting member 170 includes a first metal plate 171 and a second metal plate 172. The first metal plate 171 is made of, for example, a nonmagnetic metal such as SUS304, and is arranged in the space above the object 2 so that the central portion is directly above the central portion of the heating element 120. Yes.

  The first metal plate 171 has an annular shape in which a circular notch 171a is formed in a portion facing the central portion including the hollow portion 121 of the heating element 120, and the thickness is about 1 mm. is there.

  Plural (two in the illustrated example) first rods 173 are erected on the upper surface of the first metal plate 171. These first rods 173 pass through through holes (not shown) formed in the cover body 130 and are exposed to the outside of the cover body 130. The first metal plate 171 is movable along the vertical direction when the first rod 173 is operated.

  The second metal plate 172 is made of, for example, a nonmagnetic metal such as SUS304, and is arranged in the space above the object 2 so that the central portion is directly above the central portion of the heating element 120. Yes.

  The second metal plate 172 faces the central portion of the heating element 120 through the notch 171a of the first metal plate 171 and has a circular shape. That is, the second metal plate 172 is disposed above the first metal plate 171 and has a thickness of about 1 mm.

  A plurality of (two in the illustrated example) second rods 174 are erected on the upper surface of the second metal plate 172. These second rods 174 pass through through holes (not shown) formed in the cover body 130 and are exposed to the outside of the cover body 130. The second metal plate 172 is movable along the vertical direction when the second rod 174 is operated.

  The first metal plate 171 and the second metal plate 172 will be described in detail. In the first metal plate 171, as shown in FIG. 14, a radius R 2 that is a half of the radius R 1 of the heating element 120 is set to a radius centered on the central part directly above the central part of the heating element 120. A circular notch 171a is formed to form an annular shape. The second metal plate 172 has a circular shape centered on the central portion of the heating element 120 and the central portion thereof directly above the central portion of the first metal plate 171 and having a radius of length R2. ing. As described above, since the second metal plate 172 is disposed above the first metal plate 171, the separation distance between the object 2 placed on the heating element 120 and the first metal plate 171. The distance L2 between the object 2 and the second metal plate 172 is larger than L1.

  The control unit 180 comprehensively controls the operation of the heat treatment apparatus, that is, the heat treatment in accordance with programs and data stored in the memory 181, and includes an input processing unit 180a, a comparison unit 180b, a valve drive processing unit 180c, and an inverter drive processing unit. 180d and a fan drive processing unit 180e.

  Here, various information is stored in the memory 181, and reference density information and target temperature information are stored as characteristic features in the second embodiment. The reference concentration information is information including a reference concentration (for example, 100 ppm) that becomes a threshold value in the heat treatment described later. The target temperature information is information including a target temperature (for example, about 800 ° C.) that becomes a target value in the heat treatment described later.

  The input processing unit 180a inputs and processes commands and signals from the input unit 161 and various sensors. The comparison unit 180b compares the detected density input through the input processing unit 180a with the reference density read out from the memory 181 and compares the detected temperature input through the input processing unit 180a with the target temperature read out from the memory 181. To do.

  The valve drive processing unit 180c gives a command to the valve 122 to open, close, and increase / decrease the opening degree.

  The inverter drive processing unit 180d gives a command to the power converter 143 to drive or stop the power converter 143. Moreover, the inverter drive processing unit 180d increases or decreases the frequency of the voltage applied to the coil 140 by increasing or decreasing the output of the power conversion device 143 by giving a command to the power conversion device 143.

  The fan drive processing unit 180e is configured to drive and stop driving the fan 150 by giving a command to the fan 150.

  In the heat treatment apparatus having the above configuration, a substantially sealed space is formed by disposing the cover body 130 after the object 2 is placed on the heating element 120, and the air supply line By disposing the box 113 after the 121 and the exhaust line 123 are disposed, the following heat treatment can be performed.

  FIG. 15 is a flowchart showing the processing contents executed by the control unit 180 constituting the heat treatment apparatus according to the second embodiment of the present invention.

  The control unit 180 is waiting for an input of a heat treatment command by the operator as a user through the input unit 161 (step S500). When the operator inputs the heat treatment command through the input unit 161 and inputs the heat treatment command through the input processing unit 180a (step S500: Yes), the control unit 180 performs an atmosphere adjustment process (step S600). .

  FIG. 16 is a flowchart showing the processing contents of the atmosphere adjustment processing shown in FIG.

  In this atmosphere adjustment process, the control unit 180 gives an open command to the valve 122 through the valve drive processing unit 180c to open the valve 122 (step S601). The control unit 180 that has opened the valve 122 in this way waits for an oxygen concentration signal to be input through the input processing unit 180a (step S602), that is, waits for oxygen concentration detection by the oxygen concentration detection sensor 162.

  When the oxygen concentration signal is input through the input processing unit 180a (step S602: Yes), the control unit 180 reads the reference concentration information from the memory 181 through the comparison unit 180b, and the detected concentration included in the oxygen concentration signal becomes the reference concentration information. It is compared whether it is below the reference concentration (100 ppm) contained (step S603).

  When the detected concentration is equal to or lower than the reference concentration (step S603: Yes), the control unit 180 decreases the opening degree of the valve 122 by giving a command to the valve 122 to reduce the opening degree through the valve drive processing unit 180c. (Step S604), and then the procedure is returned to end the current atmosphere adjustment process.

  Here, although the opening degree of the valve 122 is decreased in step S604, the valve 122 is still opened even if the opening degree is decreased.

  According to such an atmosphere adjustment process, the oxygen concentration in the space substantially sealed by the cover body 130 can be adjusted to 100 ppm or less.

  On the other hand, when the detected concentration exceeds the reference concentration (step S603: No), the control unit 180 gives an instruction to increase the opening degree to the valve 122 through the valve drive processing unit 180c, thereby opening the valve 122. Is increased (step S605), and then the process returns to step S602. That is, the processes of step S602, step S603, and step S605 are repeated until the detected density is equal to or lower than the reference density.

  The control unit 180 that has performed the atmosphere adjustment process in this manner performs a heating process (step S700). FIG. 17 is a flowchart showing the processing contents of the heating processing shown in FIG.

  In this heat treatment, the control unit 180 gives a drive command to the power conversion device 143 through the inverter drive processing unit 180d to drive the power conversion device 143, and issues a drive command to the fan 150 through the fan drive processing unit 180e. Then, the fan 150 is driven (step S701, step S702).

  According to this, a voltage having a specific frequency (for example, about 20 kHz) is applied to the coil 140, and the heating element 120 is induction-heated by the coil 140. When the heating element 120 is heated in this manner, the object 2 placed on the heating element 120 is directly applied from the heating element 120 through the internal atmosphere of the space formed by the cover body 130 or on the inner surface of the cover body 130. The object 2 will be heated by reflecting and transferring heat. And by driving the fan 150, air can be sent out to the coil 140 and it can suppress that the coil 140 becomes high temperature more than necessary.

  The control unit 180 that has driven the power conversion device 143 and the fan 150 in this way performs temperature control processing until a predetermined time set in advance by the built-in clock elapses (steps S703 to S707).

  In this temperature control process, when the temperature signal is input through the input processing unit 180a (step S703: Yes), the control unit 180 reads the target temperature information from the memory 181 through the comparison unit 180b, and the detected temperature included in the temperature signal is detected. It is compared whether or not the temperature is equal to or higher than the target temperature included in the target temperature information (step S704).

  When the detected temperature is equal to or higher than the target temperature (step S704: Yes), the control unit 180 applies the command to the power conversion device 143 to reduce the output through the inverter drive processing unit 180d and applies it to the coil 140. On the other hand, when the detected temperature is lower than the target temperature (step S704: No), a command to increase the output is given to the power converter 143 through the inverter drive processing unit 180d. Thus, the frequency applied to the coil 140 is increased (step S706).

  The controller 180 performs such a temperature control process until a predetermined time elapses. When the predetermined time elapses (step S707: Yes), the controller 180 instructs the power converter 143 to stop driving through the inverter drive processor 180d. To stop driving the power conversion device 143 (step S708), and then return the procedure to end the current heating process.

  According to such heat treatment, the object 2 can be heat-treated by induction heating the heating element 120 so as to match the target temperature. Further, during this heat treatment, the amount of inert gas supplied is reduced compared to the next cooling treatment, thereby preventing the temperature of the space formed by the cover body 130 from being lowered more than necessary.

  The control unit 180 that has performed the heat treatment in this manner performs a cooling process (step S800). FIG. 18 is a flowchart showing the contents of the cooling process shown in FIG.

  In this cooling process, the control unit 180 gives a command to increase the opening degree to the valve 122 through the valve drive processing unit 180c to increase the opening degree of the valve 122 (step S801).

  According to this, the amount of the inert gas supplied to the space can be increased, and the object 2 can be gradually cooled by the inert gas. Further, since the fan 150 is continuously driven even when the object 2 is being cooled, the air is continuously sent to the coil 140, and the heat of the object 2 is transmitted to the coil 140 and is more than necessary. Can be prevented from becoming too high.

  The control unit 180 that has increased the opening degree of the valve 122 in this manner checks whether or not a predetermined time set in advance has passed through a built-in clock (step S802). The predetermined time in step S802 is a time necessary and sufficient for cooling the object 2 to room temperature with an inert gas, and is determined and set experimentally in advance.

  When the predetermined time has elapsed (step S802: Yes), the control unit 180 gives a close command to the valve 122 through the valve drive processing unit 180c to close the valve 122 (step S803), and the fan drive processing unit. A drive stop command is given to the fan 150 through 180e to stop the drive of the fan 150 (step S804), and then the procedure is returned to end the current cooling process.

  According to such a cooling process, the object 2 can be cooled to room temperature by supplying an inert gas.

  And the control part 180 which implemented such a cooling process complete | finishes the process based on this heat processing instruction | command. Thereby, the operator can take out the desired brazing product manufactured by heat-treating the object 2 by removing the cover body 130 while detaching the box body 113 from the upper heat insulating plate 111a.

  As described above, in the heat treatment apparatus according to the second embodiment, the air supply line 121 and the air supply valve 122 constitute a cooling unit that cools the object 2 by supplying an inert gas to the space.

  By the way, in such a heat treatment apparatus, since the first metal plate 171 and the second metal plate 172 are disposed as the reflecting member 170 as described above, the following effects are exhibited.

  When the heating element 120 is heated by induction heating, the outer peripheral portion of the heating element 120 has a larger amount of heat radiation than the central portion, so that the temperature of the outer peripheral portion decreases and the central portion is lower than the outer peripheral portion. The temperature rises. Therefore, in the object 2 placed on the heating element 120, the center of the heating element 120 is more than the portion near the outer periphery of the heating element 120 (hereinafter, also referred to as the vicinity of the outer periphery) 2 a (see FIGS. 12 and 14). The temperature of the portion close to the portion (hereinafter also referred to as the central vicinity) 2b (see FIGS. 12 and 14) is higher.

  On the other hand, since the reflecting member 170 reflects the radiant heat from the heating element 120 to the heating element 120, a portion of the heating element 120 that is relatively closer than a portion that is relatively far from the reflecting member 170. Becomes hotter. Therefore, in the object 2 placed on the heating element 120, the temperature is higher in a portion that is relatively closer than a portion that is relatively far from the reflecting member 170.

  As a result, in the object 2, in the vicinity of the outer periphery 2 a and the vicinity of the center 2 b, the separation distance L 1 between the outer periphery vicinity 2 a and the reflecting member 170 (first metal plate 171) is more reflective than the center vicinity 2 b Since it is shorter than the separation distance L2 from the member 170 (second metal plate 172), the temperature difference between them can be reduced. Thereby, the whole target object 2 can be heated substantially uniformly, and a heating efficiency can be improved.

  Further, since the reflecting member 170 is disposed in the upper region of the object 2, the reflecting member 170 can reflect the heat radiation from the object 2, so that the temperature of the cover body 130 is increased during the heat treatment. By suppressing this, the cooling efficiency can be improved.

  As described above, according to the heat treatment apparatus according to the second embodiment of the present invention, when a heat treatment command is given, an inert gas is supplied to the space formed by the cover body 130 and the atmosphere of the space After adjusting the voltage, a voltage of a specific frequency is applied to the coil 140 to heat the heating element 120 by induction heating to indirectly heat the object 2, and the application of the voltage to the coil 140 is stopped after the heating is finished. Since the object 2 is cooled by increasing the supply amount of the inert gas to the space, there is no need for a conveying means for conveying the object from the heating chamber to the cooling chamber as in the prior art. The whole can be reduced in size. In addition, since the heating element 120 is heated indirectly by induction heating, the object 2 is indirectly heated, so that it is not necessary to preliminarily heat the internal air with a heater or the like as in the prior art, and as a result, the temperature is kept. Power consumption at the time can be reduced. An upper region of the object 2 passes through an annular first metal plate 171 in which a circular notch 171a is formed in a portion facing the central portion of the heating element 120, and a notch 171a of the first metal plate 171. Since the circular second metal plate 172 facing the central portion of the heating element 120 is disposed, the temperature of the cover body 130 is suppressed while heating the entire object 2 substantially uniformly. Efficiency and cooling efficiency can be improved. Therefore, it is possible to reduce the size of the entire apparatus and reduce the power consumption.

  According to the heat treatment apparatus, when the heating process and the cooling process of the target object 2 are performed, the fan 150 is driven to send air to the coil 140, so that the coil 140 becomes hotter than necessary. Can be suppressed.

  According to the heat treatment apparatus, since the cover body 130 is formed of a heat insulating material, the rate at which heat in the space formed by disposing the cover body 130 is released to the outside through the cover body 130 is calculated. Can be reduced.

  According to the heat treatment apparatus, since the reflecting member 170 is disposed in the upper region of the object 2, the first metal plate 171 constituting the reflecting member 170 is allowed to flow when the inert gas is supplied in the cooling process. The function can be demonstrated.

  The preferred embodiment 1 and embodiment 2 of the present invention have been described above, but the present invention is not limited to this, and various modifications can be made.

  In Embodiment 1 described above, the metal plate member has a circular shape. However, in the present invention, the metal plate member may have, for example, a rectangular shape. Moreover, the slit formed in a metal plate member may be single, and should just extend toward the edge part from the center part.

  In the first embodiment described above, the heating element 20 is heated by induction heating with the coil 40 to indirectly heat the object, but this may be the case when, for example, copper is silver brazed as the heat treatment object. This is particularly effective when the material is difficult to be induction-heated. In the present invention, if the object is a material that is easily heated by induction heating, such as iron, the object may be directly heated by induction heating without using a heating element.

  In Embodiment 2 described above, the reflecting member 170 includes the first metal plate 171 and the second metal plate 172. However, in the present invention, the reflecting member is disposed in the upper region of the object, In addition, the metal plate may have only a notch formed in a portion facing the central portion of the heating element.

  Moreover, in this invention, it is good also as a thing from which a mutual reflectance differs by changing the surface finish of the two metal plates which comprise a reflection member.

DESCRIPTION OF SYMBOLS 1 Target object 10 Apparatus main body 11 Heat insulation board 20 Heat generating body 21 Supply line 22 Valve 23 Exhaust line 30 Cover body 40 Coil 43 Power converter 50 Fan 62 Oxygen concentration detection sensor 63 Temperature detection sensor 70 Metal plate 70a Central part 70b Peripheral part 71 Slit 80 Control unit 81 Memory

Claims (6)

In a heat treatment apparatus for performing heat treatment on an object placed inside the apparatus main body,
A cover body for positioning the object in a substantially sealed space by being arranged in a manner covering the periphery of the object;
Heating that is disposed inside the apparatus main body and directly heats the object by induction heating, or indirectly heats the object by heating a heating element on which the object is placed by induction heating. Means,
Cooling means for cooling the object by supplying an inert gas to the space;
A heat treatment apparatus comprising: a metal plate member disposed in an upper area of the object in the space and having at least one slit formed extending from a central portion toward an edge.   2. The metal plate member according to claim 1, wherein the metal plate member has a circular shape, and the slits are formed so as to extend in a radial direction from the central portion and to be spaced apart from each other in the circumferential direction. The heat treatment apparatus according to 1.   3. The heat treatment apparatus according to claim 2, wherein one end of the slit is continuous with the peripheral edge of the metal plate member, and the other end is formed apart from other slits in the central portion. In a heat treatment apparatus for performing heat treatment on an object placed inside the apparatus main body,
A cover body for positioning the target chamber in a substantially sealed space by being arranged in a manner covering the periphery of the target chamber;
A heating means that is disposed inside the apparatus main body and heats the object by heating a heating element on which the object is placed by induction heating;
Cooling means for supplying an inert gas to the space to cool the object;
A heat treatment apparatus comprising: a reflective member having a metal plate disposed in a region above the object in the space and having a notch formed in a portion facing a central portion of the heating element. The reflective member is
An annular first metal plate disposed in an upper region of the object in the space and having a circular notch formed in a portion facing the central portion of the heating element;
5. A circular second metal plate disposed in an upper area of the object in the space and opposed to a central portion of the heating element through a notch of the first metal plate. The heat processing apparatus as described in.   The heat treatment apparatus according to claim 5, wherein the first metal plate and the second metal plate are respectively movable up and down.

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