JP2016198831A - Pressure air measurement device and machine tool system using the same - Google Patents

Pressure air measurement device and machine tool system using the same Download PDF

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JP2016198831A
JP2016198831A JP2015079038A JP2015079038A JP2016198831A JP 2016198831 A JP2016198831 A JP 2016198831A JP 2015079038 A JP2015079038 A JP 2015079038A JP 2015079038 A JP2015079038 A JP 2015079038A JP 2016198831 A JP2016198831 A JP 2016198831A
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pressure air
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sensor
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spindle
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JP6554651B2 (en
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修康 亀崎
Nobuyasu Kamezaki
修康 亀崎
康之 杉山
Yasuyuki Sugiyama
康之 杉山
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Unipulse Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a pressure measurement device which can accurately measure a state of pressure air, in the pressure air measurement device which detects the clogging of a spindle flow passage which is arranged at a spindle, and blows out pressure air for cleaning an attachment/detachment part of a processing tool which is attachable and detachable to/from the spindle of a machine tool.SOLUTION: A space for accommodating electric/electronic components such as a sensor, a wiring member, a power source, and a control circuit board is formed in a pressure air measurement device, and a gas permeation member which allows a gas to enter and leave from a space in which an outside air detection side of the sensor and the outside is arranged at a box body which protects the component from a scatter of a coolant and chips.SELECTED DRAWING: Figure 2

Description

本発明は、ドリルなどを保持する部材を含む加工用工具を工作機械の主軸に装着する際に、主軸と当接する着脱部のフランジ端面部の清掃を圧力エアの吹き出しにて行う主軸側にあるエア経路の詰まりを検出する圧力エア測定装置に関するものである。   The present invention is on the main shaft side for cleaning the flange end face portion of the detachable portion that comes into contact with the main shaft by blowing out pressure air when a machining tool including a member for holding a drill or the like is mounted on the main shaft of the machine tool. The present invention relates to a pressure air measuring device that detects clogging of an air path.

一般に、マシニングセンタのような工作機械では、主軸の内周面に保持する部材を介して加工用工具を保持する機構を有すると共に、この加工用工具には着脱可能にする着脱部を設け、所望の加工をするための複数の工具が整列されたマガジンから必要な工具を自動搬送装置で選択して、主軸に装着して加工を行うことができるように構成されている。   In general, a machine tool such as a machining center has a mechanism for holding a machining tool via a member held on the inner peripheral surface of a spindle, and the machining tool is provided with an attachment / detachment portion that can be attached and detached. A required tool is selected by an automatic transfer device from a magazine in which a plurality of tools for processing are arranged, and is mounted on the main shaft for processing.

マシニングセンタではこのようなオートツールチェンジャ等の自動機器の導入が進み、機械加工の自動化が飛躍的に進展し、主軸部への加工用工具の交換頻度の増加が顕著となった。自動交換に際して主軸に当接する着脱部のフランジ端面部は、加工用工具の交換時には主軸側から吹き出す圧力エアで清掃されて、異物の付着が無く清浄化された状態にあることは非常に重要である。   With the introduction of such automatic tools such as an auto tool changer at the machining center, the automation of machining has progressed dramatically, and the frequency of exchanging machining tools to the spindle has increased significantly. It is very important that the flange end face part of the detachable part that contacts the spindle during automatic replacement is cleaned with pressure air blown from the spindle side when the machining tool is replaced, and there is no adhesion of foreign matter. is there.

もしこのような工作機械の主軸内に設けられた圧力エアの主軸流路中に詰まりが生じていたり、圧力エア供給源に障害が生じたりすると、清掃が充分に行われず主軸と加工用工具の間に異物が存在して、加工用工具の保持姿勢寸法に誤差が生じ、加工精度に影響を及ぼす恐れがある。   If there is a clogging in the pressure air spindle flow path provided in the spindle of such a machine tool, or if the pressure air supply source is obstructed, the cleaning of the spindle and the machining tool will not be performed sufficiently. There is a possibility that foreign matter may be present between them, causing an error in the holding posture dimension of the machining tool, and affecting the machining accuracy.

従来、この圧力エアの主軸流路の詰まりの検出を目的としたものとして、特許文献1が開示されている。そこでは、圧力エア供給源からエア供給流路に供給されたエアの圧力又は流量を測定して加工用工具の装着有無を判定し、さらに着脱のためのテーパシャンクがクランプされた状態において、主軸流路から吹き出される圧力エアの圧力又は流量を測定し、予め測定した良好な装着状態との値を比較して装着不良の有無を判定している。   Conventionally, Patent Document 1 is disclosed for the purpose of detecting clogging of the main flow path of this pressure air. There, the pressure or flow rate of the air supplied from the pressure air supply source to the air supply flow path is measured to determine whether or not the machining tool is mounted, and the spindle shank for detachment is clamped. The pressure or flow rate of the pressure air blown out from the flow path is measured, and the presence or absence of mounting failure is determined by comparing the value with a good mounting state measured in advance.

特許第4896580号公報Japanese Patent No. 4896580

ところが、特許文献1に開示された工作機械の主軸に設けられた圧力エアの流路の詰まりを検出するものでは、エアの圧力や流量の測定を主軸側で行っているため常に状態を監視できるという利点はあるものの、構造が複雑になり、本来の加工の目的では無い付帯装置が付くため、複雑な機構によるコストアップやメンテナンス作業の煩雑化等の課題があった。また目詰まりの有無の判定のため、判定基準値の条件出しが必要であり、エアの圧力や流量の測定のディレイタイミングなど細かな調整を必要としていた。   However, in the case of detecting clogging of the flow path of the pressure air provided on the spindle of the machine tool disclosed in Patent Document 1, the state of the pressure can be constantly monitored because the measurement of the air pressure and flow rate is performed on the spindle side. However, since the structure is complicated and an auxiliary device that is not the purpose of the original processing is attached, there are problems such as cost increase due to a complicated mechanism and complicated maintenance work. In addition, in order to determine the presence or absence of clogging, it is necessary to set a condition for the determination reference value, and fine adjustments such as a delay timing for measuring air pressure and flow rate are required.

一方、図9及び図10に示すような、加工用工具と同様に着脱部を有して、工作機械の主軸100に取り付けて、主軸流路の詰まりを目視で検出する従来の圧力エア測定装置が公知であって使用されている。図9は従来の圧力エア測定装置と主軸の構成斜視図であって、図10は従来の圧力エア測定装置が圧力エアの測定を実施した後のものを模式的に表している。従来の圧力エア測定装置は主軸100に8系統設けられた圧力エアを吹き出す主軸流路101に合わせた位置で、ホルダ部2と繋がって筐体41に流路があり、シリンダ42とそのシリンダ内部45で摺動可能なピストン43に接続されている。主軸側の圧力エア供給源から主軸流路に供給された圧力エアは主軸100側からシリンダ内部へ到達し、摺動可能なピストン43を押し出し、その際のピストン43の動きや移動した距離で圧力エアの状態を検出することができる。   On the other hand, as shown in FIGS. 9 and 10, a conventional pressure air measuring device that has a detachable portion similar to a machining tool and is attached to a spindle 100 of a machine tool to visually detect clogging of a spindle flow path. Is known and used. FIG. 9 is a structural perspective view of a conventional pressure air measuring device and a main shaft, and FIG. 10 schematically shows a conventional pressure air measuring device after measuring pressure air. A conventional pressure air measuring device has a flow path in the housing 41 connected to the holder portion 2 at a position corresponding to the main shaft flow path 101 for blowing out pressure air provided on the main shaft 100, and the cylinder 42 and its cylinder interior. 45 is connected to a piston 43 which can slide. The pressure air supplied from the pressure air supply source on the main shaft side to the main shaft flow path reaches the inside of the cylinder from the main shaft 100 side, pushes out the slidable piston 43, and the pressure at the movement or distance moved by the piston 43 at that time The state of air can be detected.

このような機構によって主軸流路の目詰まりを検出する場合、摺動可能なピストンはメカニカル式でありそれも複数存在するため摺動抵抗によるばらつきがあること、シリンダはある程度の長さが必要であり曲がりやすいこと、一度エア噴射を受けたピストンは伸びたまま戻らないこと、流路、ピストン及びシリンダの頻繁な清掃が必要であること等、多くの難点があったため、オートツールチェンジャに組み込んで使うことができなかった。したがって測定の際には工作機械を停止させてピストンの動きと移動ストローク量の確認を人が目視で操作して確認する必要があった。   In order to detect clogging of the main shaft flow path with such a mechanism, the slidable piston is a mechanical type and there are a plurality of pistons, so there are variations due to sliding resistance, and the cylinder needs to have a certain length. There are many problems such as bending easily, pistons that have been air-injected once do not return stretched, and frequent cleaning of the flow path, pistons and cylinders. I couldn't use it. Therefore, it was necessary to stop the machine tool and confirm the movement of the piston and the amount of movement stroke by visually operating the machine tool.

そこで、本発明者らはこの圧力を測定するメカニカルな部分を電気的な出力が可能なセンサ5に置き換えた圧力測定装置(図11及び図12参照)を開発中であるが、以下のような課題が生じる場合があった。   Therefore, the present inventors are developing a pressure measuring device (see FIGS. 11 and 12) in which the mechanical part for measuring the pressure is replaced with a sensor 5 capable of electrical output. There was a case where a problem occurred.

本発明者らが開発中の圧力測定装置で用いているセンサ5はいわゆる気圧センサであって、測定対象とする空間の圧力を検出する第1の測定部5aと大気圧を検出する第2の測定部5bを有し、その差圧を検出して圧力を測定するものである。このセンサ5の第1の測定部51は筐体4aに設けられている第1の測定空間205に密着して挿入されている一方、大気圧を検出する側すなわち第2の測定部52は第2の測定空間30に面して位置している。この圧力測定装置1はクーラントや切粉が散乱している環境下で使用されるため、電子部品や電源が搭載された第2の測定空間30を密閉してこれらの環境から保護することは重要である。   The sensor 5 used in the pressure measuring device under development by the present inventors is a so-called barometric pressure sensor, and includes a first measuring unit 5a that detects the pressure of a space to be measured and a second pressure that detects atmospheric pressure. It has the measurement part 5b, detects the differential pressure | voltage, and measures a pressure. The first measurement unit 51 of the sensor 5 is inserted in close contact with the first measurement space 205 provided in the housing 4a, while the side that detects atmospheric pressure, that is, the second measurement unit 52 is the second measurement unit 52. 2 facing the measurement space 30. Since this pressure measuring device 1 is used in an environment where coolant and chips are scattered, it is important to seal the second measurement space 30 in which electronic components and a power source are mounted to protect from these environments. It is.

しかしながら測定する対象が非常に高い圧力のエアであると、第1の測定空間205からセンサ5の構造によってはセンサ5を介してエア漏れが僅かではあるが生じる場合があり、これがセンサ5の第2の測定部52が面している第2の測定空間30に徐々に蓄積されて、第2の測定空間30の内圧が上昇してしまうことがあった。さらに圧力エアの吹き出し口(主軸流路101)の数が多い主軸の場合、測定するチャンネル数が多くなってセンサ5の数が増えるとこの傾向が顕著となりやすい。   However, if the object to be measured is air at a very high pressure, there may be a slight air leak from the first measurement space 205 via the sensor 5 depending on the structure of the sensor 5. In some cases, the internal pressure of the second measurement space 30 increases due to the gradual accumulation in the second measurement space 30 facing the second measurement unit 52. Furthermore, in the case of a spindle having a large number of pressure air outlets (spindle channel 101), this tendency tends to become more prominent when the number of channels to be measured increases and the number of sensors 5 increases.

さらに電子部品や電源が搭載された第2の測定空間30が比較的大きい図11及び図12に示した圧力エア測定装置1に対して、図13及び図14に示すように圧力エア測定装置1の軸方向を短くすると、電子部品や電源が搭載された第2の測定空間30が小さくなるため、センサ5のエア漏れのばらつきも相まって第2の測定空間30の圧力上昇が起こりやすいという傾向が見られた。故にセンサ5の大気圧側の圧力が初期状態から徐々に上昇した場合には測定値がドリフトして正確な値が測定できないという課題があった。   Furthermore, the pressure air measurement device 1 shown in FIGS. 13 and 14 is different from the pressure air measurement device 1 shown in FIGS. 11 and 12 in which the second measurement space 30 on which electronic components and a power source are mounted is relatively large. If the axial direction is shortened, the second measurement space 30 in which the electronic components and the power supply are mounted becomes smaller. Therefore, the air pressure of the second measurement space 30 tends to increase easily due to variations in air leakage of the sensor 5. It was seen. Therefore, when the pressure on the atmospheric pressure side of the sensor 5 gradually increases from the initial state, there is a problem that the measured value drifts and an accurate value cannot be measured.

本発明は、上記の欠点を補って、センサの大気圧側部が配置された空間の内圧変化による圧力エアの測定値のドリフトを防止した圧力エア測定装置を得ることが目的である。   An object of the present invention is to provide a pressure air measuring device that compensates for the above-described drawbacks and prevents a drift in measured values of pressure air due to a change in internal pressure in a space in which the atmospheric pressure side portion of the sensor is arranged.

本発明に係る圧力エア測定装置は、
加工用工具が着脱可能な工作機械の主軸に設けられた主軸流路から吹き出される圧力エアの状態を測定する主軸に着脱可能な圧力エア測定装置であって、
第1の測定部及び第2の測定部を有して圧力エアの圧力及び流量の少なくとも1つを測定するセンサと、
センサが配置されると共に主軸の吹き出し流路に繋がってセンサの第1の測定部が面する第1の測定空間とセンサの第2の測定部が面する第2の測定空間とを形成する筐体と、
第2の測定空間と外部との気体の出入りを自在にするように筐体に設けられた気体透過性部材と、で構成されている。
The pressure air measuring device according to the present invention is
A pressure air measuring device that can be attached to and detached from a spindle for measuring a state of pressure air blown from a spindle passage provided on a spindle of a machine tool to which a machining tool can be attached and detached,
A sensor having a first measurement unit and a second measurement unit for measuring at least one of pressure and flow rate of pressure air;
A housing in which a sensor is arranged and is connected to a blow-off channel of the main shaft to form a first measurement space facing the first measurement unit of the sensor and a second measurement space facing the second measurement unit of the sensor. Body,
And a gas permeable member provided in the housing so as to freely allow gas to enter and exit from the second measurement space and the outside.

第2の測定空間が略大気圧であって、センサが第1の測定部に加わる圧力と第2の測定部に加わる圧力との差によりこれを圧力エアの圧力値として出力することが好ましい。   It is preferable that the second measurement space is substantially atmospheric pressure, and the sensor outputs the pressure value of the pressure air based on the difference between the pressure applied to the first measurement unit and the pressure applied to the second measurement unit.

第2の測定空間に、センサと電気的に接続される電気電子部品及び配線部材及び電源の少なくとも1つが配置されることが好ましい。 It is preferable that at least one of an electric / electronic component, a wiring member, and a power source that are electrically connected to the sensor is arranged in the second measurement space.

本発明に係る工作機械システムは、主軸に着脱可能な加工用工具を主軸に着脱する際、加工用工具の着脱部へ圧力エアを吹き出すための第1の流路を主軸に設けた工作機械と、主軸に装着される上記圧力エア測定装置とで構成されている。   A machine tool system according to the present invention includes a machine tool provided with a first flow path in a main shaft for blowing pressure air to an attaching / detaching portion of the processing tool when a processing tool detachable from the main shaft is attached to or detached from the main shaft. The pressure air measuring device is mounted on the main shaft.

この構成により、圧力エア測定装置のセンサの一部、配線部材、電源、制御回路基板などの電気電子部品をクーラント及び切粉の飛散から保護する筐体に、センサの一部である大気圧測定側が面する空間と外部との気体の出入りを可能にする気体透過性部材を設けることで、センサの大気圧測定側が配置されている空間の圧力変化による測定値のドリフトを防止した圧力エア測定装置を実現できる。   With this configuration, the atmospheric pressure measurement that is part of the sensor is applied to the casing that protects part of the sensor of the pressure air measurement device, electrical components such as wiring members, power supply, and control circuit board from the scattering of coolant and chips. Pressure air measurement device that prevents drift of measured values due to pressure changes in the space where the atmospheric pressure measurement side of the sensor is arranged by providing a gas permeable member that allows gas to enter and exit from the space facing the outside and the outside Can be realized.

本発明の第1の実施形態を示した圧力エア測定装置と工作機械の主軸を示した外観斜視図FIG. 1 is an external perspective view showing a main part of a pressure air measuring device and a machine tool showing a first embodiment of the present invention. 本発明の第1の実施形態を示す圧力エア測定装置の断面図Sectional drawing of the pressure air measuring apparatus which shows the 1st Embodiment of this invention 本発明の第1の実施形態を示す圧力エア測定装置のセンサ付近拡大詳細断面図FIG. 2 is an enlarged detailed cross-sectional view of the vicinity of the sensor of the pressure air measuring device showing the first embodiment of the present invention 本発明の第2の実施形態を示す圧力エア測定装置の外観斜視図External appearance perspective view of the pressure air measuring device which shows the 2nd Embodiment of this invention 本発明の第2の実施形態を示す圧力エア測定装置の断面図Sectional drawing of the pressure air measuring apparatus which shows the 2nd Embodiment of this invention 本発明の第3の実施形態を示す圧力エア測定装置の外観斜視図External perspective view of a pressure air measuring device showing a third embodiment of the present invention 本発明の第3の実施形態を示す圧力エア測定装置の断面図Sectional drawing of the pressure air measuring device which shows the 3rd Embodiment of this invention 本発明の実施形態を示す工作機械システムの斜視構成図1 is a perspective configuration diagram of a machine tool system showing an embodiment of the present invention. 従来の圧力測定装置と主軸の構成斜視図Configuration perspective view of conventional pressure measuring device and spindle 従来の圧力測定装置と主軸の構成斜視図Configuration perspective view of conventional pressure measuring device and spindle 本発明の第3の実施形態の基となった圧力測定装置の構成斜視図Configuration perspective view of a pressure measuring device which is the basis of the third embodiment of the present invention 本発明の第3の実施形態の基となった圧力測定装置の断面図Sectional drawing of the pressure measuring device used as the basis of the 3rd Embodiment of this invention 本発明の第1及び第2の実施形態の基となった圧力測定装置の構成斜視図Configuration perspective view of a pressure measuring device on which the first and second embodiments of the present invention are based 本発明の第1及び第2の実施形態の基となった圧力測定装置の断面図Sectional drawing of the pressure measuring device which became the basis of the 1st and 2nd embodiment of this invention

以下、本発明による実施形態について、図面を基に詳細な説明を行う。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図1は本発明の第1の実施形態を示す圧力エア測定装置と工作機械の主軸の略位置関係を示した外観斜視図である。図2は圧力エア測定装置1を中央で切断した断面図である。図3は図2のA部の拡大詳細断面図である。図1〜図3を参照して本発明の圧力エア測定装置1の第1の実施形態を説明する。   FIG. 1 is an external perspective view showing an approximate positional relationship between a pressure air measuring device and a main spindle of a machine tool showing a first embodiment of the present invention. FIG. 2 is a cross-sectional view of the pressure air measuring device 1 cut at the center. FIG. 3 is an enlarged detailed cross-sectional view of part A of FIG. A first embodiment of a pressure air measuring device 1 of the present invention will be described with reference to FIGS.

ホルダ部2はテーパシャンク2aとフランジ2bによって構成されており、圧力エア測定装置1は加工用工具が有している着脱部同様のホルダ部2を介して、工作機械の主軸100に着脱可能である。   The holder part 2 is composed of a taper shank 2a and a flange 2b, and the pressure air measuring device 1 can be attached to and detached from the spindle 100 of the machine tool via the holder part 2 similar to the attaching / detaching part of the machining tool. is there.

テーパシャンク2aは、従来の図9及び図10に示した圧力測定装置と同様に主軸100の内部に引き込まれ、主軸100にテーパシャンク2aのテーパー面とフランジ端2cのフランジ端面2dの2面拘束で拘束される。本実施形態ではJIS B 6065−1,2規格による2面拘束形モジュラテーパホルダを用いているが、他の2面拘束形ホルダでも実施は可能である。   The taper shank 2a is drawn into the main shaft 100 as in the conventional pressure measuring device shown in FIGS. 9 and 10, and the main shaft 100 is constrained by two surfaces, the taper surface of the taper shank 2a and the flange end surface 2d of the flange end 2c. It is restrained by. In this embodiment, a two-surface constrained modular taper holder according to JIS B 6065-1 and 2 standards is used, but other two-surface constrained holders can also be implemented.

フランジ2bは、主軸100の装着面102に接するフランジ端2cを有すると共に、テーパシャンク2aと繋がっている。このホルダ部2は、マシニングセンタの所望の加工内容に応じて選択、交換するオートツールチェンジャにて工具マガジンに保管されている加工用工具にあるものと同様なものであって、本発明の圧力エア測定装置1でもこれを有している。   The flange 2b has a flange end 2c in contact with the mounting surface 102 of the main shaft 100 and is connected to the tapered shank 2a. This holder portion 2 is the same as that in the processing tool stored in the tool magazine in the auto tool changer selected and replaced according to the desired processing content of the machining center, and the pressure air of the present invention. The measuring apparatus 1 also has this.

フランジ2bの主軸100に当接する箇所はフランジ端2cであって、主軸100に面するところには弾性部材2eが設けられ、主軸100に接する面はフランジ端面2dである。本実施形態における弾性部材2eは、2つの円弧状のニトリルゴムの平板を使用している。この弾性部材2eは、ネジ10によって固定されてフランジ端2cを構成していると共に、主軸100の主軸流路101に対応した第2の流路202の一部が設けられている。なお弾性部材2eは、全部若しくは一部が上記のゴムのような弾性を有したものであれば良く、金属板にアウトサート成形若しくは金属板をインサート成形したような構成も可能である。またその形状は圧力エアの流路数等によって適宜変形が可能である。   The portion of the flange 2b that contacts the main shaft 100 is the flange end 2c, and an elastic member 2e is provided at the surface facing the main shaft 100, and the surface in contact with the main shaft 100 is the flange end surface 2d. The elastic member 2e in the present embodiment uses two arc-shaped nitrile rubber flat plates. The elastic member 2e is fixed by a screw 10 to form a flange end 2c, and a part of the second flow path 202 corresponding to the main shaft flow path 101 of the main shaft 100 is provided. The elastic member 2e only needs to have all or part of elasticity such as the rubber described above, and a configuration in which outsert molding or insert molding of a metal plate is also possible. Further, the shape can be appropriately modified depending on the number of flow paths of the pressure air.

筐体4aは、ホルダ部2と後述の接続部材13を介して繋がって、8系統のエア流路を有すると共に、圧力エアを検出する部材等が収納されている。筐体4aは例えばカップ状の形状であって、材質はクーラント等による腐食を防止するためアルミ合金A6061を用いている。図2では8系統の流路のうち2つの流路断面のみが示されているが、8系統の流路は全て同一形状で、カップ状の筐体4aの中心軸を中心として放射状に形成されている。   The housing 4a is connected to the holder portion 2 via a connecting member 13 described later, has eight air flow paths, and houses members for detecting pressure air and the like. The housing 4a has, for example, a cup shape and is made of an aluminum alloy A6061 to prevent corrosion due to coolant or the like. In FIG. 2, only two channel cross sections are shown among the eight channels, but all the eight channels have the same shape and are formed radially around the central axis of the cup-shaped housing 4a. ing.

フランジ端面2dを起点として、8系統の主軸流路101それぞれに対応して、第2の流路202が軸方向へ設けられている。第2の流路202は直線状であって連通して設けられている。   Starting from the flange end surface 2d, a second flow path 202 is provided in the axial direction corresponding to each of the eight main shaft flow paths 101. The second flow path 202 is linear and is provided in communication.

ホルダ部2と筐体4aは、中間にある接続部材13を介してボルトで固定され、接続部の気密がなされている。接続部材13はゴムなどの弾性体からなる円盤状の板であって、ホルダ部2の第2の流路202と筐体4aの第3の流路203を接続する穴が設けられていて、弾性体がパッキンの役割を成して気密が保たれている。なお本実施形態では、弾性部材2eを含んでいるフランジ2b及び接続部材13を連通した一連の流路を第2の流路202としている。一方、第3の流路203は直線状であって方向を変えて軸方向に対して斜め方向へ向かう流路形状となっている。   The holder part 2 and the housing 4a are fixed with bolts via an intermediate connection member 13, and the connection part is hermetically sealed. The connection member 13 is a disk-shaped plate made of an elastic body such as rubber, and is provided with a hole for connecting the second flow path 202 of the holder portion 2 and the third flow path 203 of the housing 4a. The elastic body plays the role of packing and is kept airtight. In the present embodiment, a series of flow paths in which the flange 2b including the elastic member 2e and the connection member 13 are communicated with each other are used as the second flow path 202. On the other hand, the third flow path 203 is linear and has a flow path shape that changes direction and goes obliquely with respect to the axial direction.

第1の測定空間205は第3の流路203と交差及び分岐して筐体4aの軸中心方向へ向かって設けたものであり、センサ5の第1の測定部5aがそれぞれ第1の測定空間205内に配置されていて、センサ5によって出力される信号を基に後述の制御回路基板9にて圧力エアの圧力値や流量値を演算して求めている。   The first measurement space 205 intersects with and branches from the third flow path 203 and is provided toward the axial center direction of the housing 4a, and the first measurement unit 5a of the sensor 5 respectively performs the first measurement. Based on a signal that is disposed in the space 205 and is output from the sensor 5, the control circuit board 9 described later calculates the pressure value and flow rate value of the pressure air.

第4の流路204は第3の流路203と繋がって、第3の流路203の延長線方向にさらに伸びて、直線状で外部へ開口して設けられている。よって第3の流路203と第4の流路204は直線状で直列の配置となっている。   The fourth flow path 204 is connected to the third flow path 203, further extends in the direction of the extension of the third flow path 203, and is provided to open to the outside in a straight line shape. Therefore, the third flow path 203 and the fourth flow path 204 are linearly arranged in series.

筐体4bは円盤状の形状を成して、筐体4aに対向して圧力エア測定装置1の内部の部材を覆うように設けられ、筐体4aと筐体4bとの組合せによって第2の測定空間30を構成する。圧力エア測定装置1はマシニングセンタなどの工作機械で使用されるため、クーラント及び切粉などが飛散する環境であって、これらから電気回路等を保護することが必要である。そのため、筐体4aと筐体4bの間にOリング8を挟みネジ止めすることで第2の測定空間30を密閉している。   The housing 4b has a disc shape and is provided to face the housing 4a so as to cover the members inside the pressure air measuring device 1, and a second combination of the housing 4a and the housing 4b is used. A measurement space 30 is formed. Since the pressure air measuring device 1 is used in a machine tool such as a machining center, it is an environment in which coolant and chips are scattered, and it is necessary to protect an electric circuit and the like from these environments. Therefore, the second measurement space 30 is sealed by sandwiching the O-ring 8 between the housing 4a and the housing 4b and screwing.

センサ5は、第1の測定部5aと第2の測定部5bを有していて、センサ5の第1の測定部5aは筐体4aに設けられた第1の測定空間205内に不図示のシール材と共に密着挿入され配置されている。センサ5の第1の測定部51は円柱状であって第1の測定空間205の壁面に対して密着挿入されて、この第1の測定空間205内の圧力を測定する。一方でセンサ5の第2の測定部5bは第2の測定空間30側にあって第2の測定空間30の圧力を測定する。したがって、センサ5は第1の測定空間205側に第1の測定部51があって、第2の測定空間30側に第2の測定部52があって、センサ5を挟んで第1の測定空間205と第2の測定空間30は対向隔離した状態となっている。   The sensor 5 includes a first measurement unit 5a and a second measurement unit 5b, and the first measurement unit 5a of the sensor 5 is not shown in a first measurement space 205 provided in the housing 4a. The seal material is closely inserted and arranged. The first measurement unit 51 of the sensor 5 has a columnar shape and is inserted in close contact with the wall surface of the first measurement space 205 to measure the pressure in the first measurement space 205. On the other hand, the second measurement unit 5 b of the sensor 5 is on the second measurement space 30 side and measures the pressure in the second measurement space 30. Therefore, the sensor 5 has the first measurement unit 51 on the first measurement space 205 side and the second measurement unit 52 on the second measurement space 30 side, and the first measurement is performed with the sensor 5 interposed therebetween. The space 205 and the second measurement space 30 are separated from each other.

実際の測定に際しては、センサ5の第2の測定部52は大気圧に面している必要があり、センサ5の第1の測定部51で測定する圧力と大気圧の差圧により、第1の測定空間205内の圧力を測定することができる。本実施形態では、メトロダインマイクロシステム社製のアナログ気圧センサを用いている。そして筐体4aには8系統のエア流路があるため、それぞれの経路に対してセンサ5が計8個設けられている。   In actual measurement, the second measurement unit 52 of the sensor 5 needs to face the atmospheric pressure, and the first measurement unit 51 of the sensor 5 has a first pressure due to a differential pressure between the pressure measured by the first measurement unit 51 and the atmospheric pressure. The pressure in the measurement space 205 can be measured. In this embodiment, an analog atmospheric pressure sensor manufactured by Metrodyne Microsystem is used. Since the housing 4a has eight air flow paths, a total of eight sensors 5 are provided for each path.

配線部材6は8個のセンサ5の入出力配線を行う基板であって、個々に筐体4aに固定されている。センサ5がこの基板上に実装されていて、センサ5の駆動用電源と圧力検出の出力電圧の電気配線がなされており、コネクタ及び不図示の電線ケーブルによって後述の制御回路基板9と接続されている。また配線部材6は、リジッドなベース材上に貼られたフレキシブル配線板であっても良く、制御回路基板9との接続配線部がこのフレキシブル配線板の延長部で構成されていても良い。   The wiring member 6 is a substrate for performing input / output wiring of the eight sensors 5, and is individually fixed to the housing 4a. The sensor 5 is mounted on this board, and the electric power wiring for driving the sensor 5 and the output voltage of the pressure detection are made. The sensor 5 is connected to a control circuit board 9 to be described later by a connector and a wire cable (not shown). Yes. Moreover, the wiring member 6 may be a flexible wiring board affixed on a rigid base material, and the connection wiring part with the control circuit board 9 may be constituted by an extension part of this flexible wiring board.

電源7は、不図示の電線ケーブル若しくは導電性の金属板など電気的に接続する手段により、センサ5及び制御回路基板9へ電力を供給している。本実施形態では充電可能な2次電池であって、ニッケル水素電池を用いている。電源7の種類は、センサ5及び制御回路基板9の消費電力や圧力エア測定装置1に要求される連続使用時間を考慮して適宜選択されるものである。   The power source 7 supplies power to the sensor 5 and the control circuit board 9 by means of electrical connection such as an unillustrated electric cable or conductive metal plate. In the present embodiment, a rechargeable secondary battery is used, which is a nickel metal hydride battery. The type of the power source 7 is appropriately selected in consideration of the power consumption of the sensor 5 and the control circuit board 9 and the continuous use time required for the pressure air measuring device 1.

制御回路基板9は、センサ5へ駆動のための電力を供給すると共に、センサ5にて得られた電圧出力を受けて圧力エアの圧力値とこれを基に流量値を演算し、これを基に圧力エアの状態の測定値情報を生成して、この信号をA/D変換して、無線にて外部へ送信する。無線にて送信された信号は、専用の受信機、受信機を有するパーソナルコンピュータ、受信機を有する工作機械、若しくは工作機械に繋がって受信機を有するパーソナルコンピュータなどで受信及び復調されて、測定値がデータにて保管される。したがってこのような構成であれば予め測定値にしきい値を設けておき、しきい値以下であった場合、警告音を発したり、工作機械を停止させたりすることが可能である。さらに電源7の電圧やインピーダンスを所定の時間間隔でサンプリングして電源7の残量を監視し、電源7の残量が所定の値以下になった際に、残量不足の警告信号を無線にて送信して、充電を促す機能も有している。   The control circuit board 9 supplies electric power for driving to the sensor 5, receives the voltage output obtained by the sensor 5, calculates the pressure value of the pressure air and the flow rate value based on the pressure value, Then, the measurement value information of the pressure air state is generated, this signal is A / D converted, and transmitted to the outside by radio. A signal transmitted wirelessly is received and demodulated by a dedicated receiver, a personal computer having a receiver, a machine tool having a receiver, or a personal computer having a receiver connected to a machine tool, and a measured value. Is stored in the data. Therefore, with such a configuration, it is possible to set a threshold value for the measured value in advance, and to make a warning sound or stop the machine tool if the measured value is below the threshold value. Furthermore, the voltage and impedance of the power supply 7 are sampled at a predetermined time interval to monitor the remaining amount of the power supply 7, and when the remaining amount of the power supply 7 falls below a predetermined value, a warning signal indicating insufficient remaining power is wirelessly transmitted. It also has a function for prompting charging.

気体透過性部材20は、筐体4bに取り付けられていて、センサ5、配線部材6、電源7、制御回路基板9が格納された第2の測定空間30と外部との空気の出入りを自在にする膜を有した部材である。この膜は通気性があり水や埃を通さない構造のメンブレンフィルタであって、例えば4フッ化エチレン樹脂の多孔質材でできている。したがって第2の測定空間30を略大気圧に保つことが可能となり、第2の測定空間30の圧力上昇を防止して測定値のドリフトを防止した圧力エア測定装置が実現できる。なお少なくとも第2の測定空間30にセンサ5の第2の測定部52が面していれば良いので、配線部材6、電源7、制御回路基板9などは別の空間に配置しても良いが、これらを第2の測定空間30に配置することでクーラント及び切粉の飛散から保護すると共に組立て配線も容易にすることができる。   The gas permeable member 20 is attached to the housing 4b, and allows air to freely enter and exit the second measurement space 30 in which the sensor 5, the wiring member 6, the power source 7, and the control circuit board 9 are stored. This is a member having a film to be used. This membrane is a membrane filter having a structure that is air permeable and impervious to water and dust, and is made of, for example, a porous material of tetrafluoroethylene resin. Therefore, the second measurement space 30 can be maintained at a substantially atmospheric pressure, and a pressure air measurement device that prevents a rise in pressure in the second measurement space 30 and prevents a measurement value from drifting can be realized. Since the second measuring section 52 of the sensor 5 only needs to face at least the second measuring space 30, the wiring member 6, the power source 7, the control circuit board 9 and the like may be arranged in another space. By arranging these in the second measurement space 30, it is possible to protect the coolant and chips from being scattered and to facilitate assembly wiring.

図4は本発明の第2の実施形態を示す圧力エア測定装置の外観斜視図である。図5は本発明の第2の実施形態を示す圧力エア測定装置1を中央で切断した断面図である。本発明の第2の実施形態の基本的な構成は第1の実施形態と同じであるため、相違点のみ記述する。   FIG. 4 is an external perspective view of a pressure air measuring device showing a second embodiment of the present invention. FIG. 5 is a cross-sectional view of a pressure air measuring device 1 showing a second embodiment of the present invention cut at the center. Since the basic configuration of the second embodiment of the present invention is the same as that of the first embodiment, only the differences will be described.

本発明の第1の実施形態においては、気体透過性部材20は筐体4bに取り付けられていたが、本発明の第2の実施形態では筐体4aの外周部に取り付けられている。筐体4aも第2の測定空間30を形成しているため、気体透過性部材20は筐体4aに取り付けることも可能である。   In the first embodiment of the present invention, the gas permeable member 20 is attached to the housing 4b. However, in the second embodiment of the present invention, the gas permeable member 20 is attached to the outer periphery of the housing 4a. Since the housing 4a also forms the second measurement space 30, the gas permeable member 20 can be attached to the housing 4a.

図6は本発明の第3の実施形態を示す圧力エア測定装置の外観斜視図である。図7は本発明の第3の実施形態を示す圧力エア測定装置1を中央で切断した断面図である。本発明の第3の実施形態の基本的な構成は第1及び第2の実施形態と同じであるため、相違点のみ記述する。   FIG. 6 is an external perspective view of a pressure air measuring device showing a third embodiment of the present invention. FIG. 7 is a cross-sectional view of a pressure air measuring device 1 showing a third embodiment of the present invention cut at the center. Since the basic configuration of the third embodiment of the present invention is the same as that of the first and second embodiments, only the differences will be described.

第3の実施形態は第1及び第2の実施形態と比較して、筐体4a及び筐体4bの直径が小さいものであって、その反面軸方向長は長くなり、圧力エア測定装置1に対して要求する機能や使用対象の工作機械の仕様によって適宜選択されるものである。   Compared with the first and second embodiments, the third embodiment has a smaller diameter of the housing 4a and the housing 4b, and its axial length is longer, and the pressure air measuring device 1 The function is appropriately selected according to the function required and the specification of the machine tool to be used.

ホルダ部2の第2の流路202と筐体4aの第3の流路203はOリング11を介して繋がっていて、筐体4aの第3の流路203から直角に折れ曲がって第1の測定空間205がある。最終的には圧力エアは第4の流路204によって外部へ放出される。   The second flow path 202 of the holder portion 2 and the third flow path 203 of the housing 4a are connected via the O-ring 11, and the first flow path is bent at a right angle from the third flow path 203 of the housing 4a. There is a measurement space 205. Finally, the pressure air is discharged to the outside through the fourth flow path 204.

筐体4aと筐体4cは、双方設けられたネジによってOリング8を介して締め付けられて第2の測定空間30を形成し、センサ5、配線部材6、電源7、制御回路基板9等がこの第2の測定空間30内に収められている。センサ5は円環状の配線部材6に直接実装されていて、配線部材6は不図示のコネクタ若しくは電線ケーブルにて制御回路基板9と接続されている。よってセンサ5の第2の測定部52は第2の測定空間30にあって、筐体4cに取り付けられた気体透過性部材20によって気体の出入りは可能であって大気圧が保たれ、液体であるクーラント及び切粉の飛散からは保護される。   The housing 4a and the housing 4c are tightened via the O-ring 8 by screws provided on both sides to form the second measurement space 30, and the sensor 5, the wiring member 6, the power source 7, the control circuit board 9 and the like are provided. It is stored in the second measurement space 30. The sensor 5 is directly mounted on an annular wiring member 6, and the wiring member 6 is connected to the control circuit board 9 by a connector or an electric cable (not shown). Therefore, the second measurement unit 52 of the sensor 5 is in the second measurement space 30, and gas can enter and exit by the gas permeable member 20 attached to the housing 4c, and the atmospheric pressure is maintained. Protects against splashing of certain coolants and chips.

図8は、本発明の圧力エア測定装置を用いた工作機械システムの実施形態の斜視構成図である。圧力エア測定装置1は、工作機械500内のマガジンに装着され、圧力エアの測定を行いたいタイミングでオートツールチェンジャによってマガジンから取り出されて主軸100に装着され、主軸100から吹き出される清掃用の圧力エアの測定値情報を無線によって送信している。パーソナルコンピュータ503は、圧力エアの測定値情報を受信する受信手段を有すると共に、受信した圧力エアの測定値情報から、工作機械を停止させるか否かを判断する判断手段と、この判断手段によって工作機械500の制御部502へ停止を指令する指令手段を有している。   FIG. 8 is a perspective configuration diagram of an embodiment of a machine tool system using the pressure air measuring device of the present invention. The pressure air measuring device 1 is mounted on a magazine in the machine tool 500, and is used for cleaning that is taken out of the magazine by an auto tool changer and mounted on the spindle 100 at a timing when pressure air is desired to be measured and blown out from the spindle 100. Pressure value measurement value information is transmitted wirelessly. The personal computer 503 has receiving means for receiving pressure air measurement value information, a judgment means for judging whether or not to stop the machine tool from the received pressure air measurement value information, and a machine tool by this judgment means. Command means for instructing the control unit 502 of the machine 500 to stop.

またパーソナルコンピュータ503は電源7の残量情報も同様に受信して、工作機械を停止させるか否かを判断する判断手段と、この判断手段によって工作機械500の制御部502へ停止を指令する指令手段を有している。さらに警告をパーソナルコンピュータ503の画面に表示し、さらに警告音を発することもできる。工作機械500の制御部502は、パーソナルコンピュータ503から工作機械の停止指令を受け取って実行すると共に、操作画面501や警告音にて警告も発することができる。   Similarly, the personal computer 503 also receives the remaining amount information of the power supply 7 and determines whether or not to stop the machine tool, and a command for instructing the control unit 502 of the machine tool 500 to stop using this determination means. Have means. Further, a warning can be displayed on the screen of the personal computer 503, and a warning sound can be emitted. The control unit 502 of the machine tool 500 can receive and execute a machine tool stop command from the personal computer 503, and can also issue a warning with the operation screen 501 or a warning sound.

さらにこの実施形態の変形として、パーソナルコンピュータ503の役割を成すものが制御部502に組み込まれていても良い。したがって工作機械500の制御部502は直接、圧力エア測定装置1から主軸100の圧力エアの測定値情報及び電源7の残量情報を受けて工作機械500の停止判断を行い、この判断によって停止指令を発して実行すると共に、操作画面501や警告音にて警告も発することができる。   Further, as a modification of the present embodiment, what functions as the personal computer 503 may be incorporated in the control unit 502. Accordingly, the control unit 502 of the machine tool 500 directly receives the measurement value information of the pressure air of the main spindle 100 and the remaining amount information of the power source 7 from the pressure air measuring device 1 and determines the stop of the machine tool 500. Can be issued, and a warning can be issued by the operation screen 501 or a warning sound.

本発明によれば、センサ、配線部材、電源、制御回路基板などの電気電子部品を液体であるクーラント及び切粉の飛散から保護する空間を形成しつつ、この空間と外部との気体のみの出入りを自在にする気体透過性部材を設けることで、この空間の圧力変動を防止して、精度の高い圧力エア測定装置を実現することができる。   According to the present invention, while forming a space that protects electrical and electronic components such as sensors, wiring members, power supplies, and control circuit boards from splashing liquid coolant and swarf, only gas in and out of this space and the outside can be formed. By providing a gas permeable member that can freely adjust the pressure, it is possible to prevent pressure fluctuations in this space and realize a highly accurate pressure air measuring device.

さらにまた本発明による工作機械システムは、圧力エアの測定値のドリフトが低減できることから、精度の高い圧力エアの測定が可能であって、正常な状態にもかかわらず誤測定結果が生じたことによる確認時間の低減を実現できる。   Furthermore, since the machine tool system according to the present invention can reduce the drift of the measurement value of the pressure air, it is possible to measure the pressure air with high accuracy, and the erroneous measurement result is generated despite the normal state. Reduction of confirmation time can be realized.

本発明の活用例として、マシニングセンタなどの工作機械の保全ツールとしての適用が可能である。   As an application example of the present invention, it can be applied as a maintenance tool of a machine tool such as a machining center.

1 圧力エア測定装置
2 ホルダ部
2a テーパシャンク
2b フランジ
2c フランジ端
2d フランジ端面
2e 弾性部材
4a、4b 筐体
5 センサ
5a 第1の測定部(センサ)
5b 第2の測定部(センサ)
6 配線部材
7 電源
8 Oリング
9 制御回路基板
13 接続部材
20 気体透過性部材
30 第2の測定空間(密閉空間)
41 筐体
42 シリンダ
43 ピストン
100 主軸
101 主軸流路
102 装着面
202 第2の流路
203 第3の流路
204 第4の流路
205 第1の測定空間
500 工作機械
501 操作画面
502 制御部
503 パーソナルコンピュータ
504 工作機械システム





DESCRIPTION OF SYMBOLS 1 Pressure air measuring device 2 Holder part 2a Tapered shank 2b Flange 2c Flange end 2d Flange end surface 2e Elastic member 4a, 4b Case 5 Sensor 5a 1st measurement part (sensor)
5b Second measurement unit (sensor)
6 Wiring member 7 Power supply 8 O-ring 9 Control circuit board 13 Connection member 20 Gas permeable member 30 Second measurement space (sealed space)
41 Housing 42 Cylinder 43 Piston 100 Main shaft 101 Main shaft flow path 102 Mounting surface 202 Second flow path 203 Third flow path 204 Fourth flow path 205 First measurement space 500 Machine tool 501 Operation screen 502 Control section 503 Personal computer 504 Machine tool system





Claims (4)

加工用工具が着脱可能な工作機械の主軸に設けられた主軸流路から吹き出される圧力エアの状態を測定する前記主軸に着脱可能な圧力エア測定装置であって、
第1の測定部及び第2の測定部を有して前記圧力エアの圧力及び流量の少なくとも1つを測定するセンサと、
前記センサが配置されると共に前記主軸の前記吹き出し流路に繋がって前記センサの前記第1の測定部が面する第1の測定空間と前記センサの前記第2の測定部が面する第2の測定空間とを形成する筐体と、
前記第2の測定空間と外部との気体の出入りを自在にするように前記筐体に設けられた気体透過性部材と、
を有することを特徴とする圧力エア測定装置。
A pressure air measuring device detachably attached to the spindle for measuring a state of pressure air blown from a spindle flow path provided on a spindle of a machine tool to which a machining tool can be attached and detached,
A sensor having a first measurement unit and a second measurement unit to measure at least one of the pressure and the flow rate of the pressure air;
The sensor is disposed and connected to the blowing channel of the main shaft, the first measurement space facing the first measurement unit of the sensor and the second measurement unit facing the second measurement unit of the sensor A housing forming a measurement space;
A gas permeable member provided in the casing so as to freely allow gas to enter and exit from the second measurement space and the outside;
A pressure air measuring device comprising:
前記第2の測定空間が略大気圧であって、前記センサが前記第1の測定部に加わる圧力と前記第2の測定部に加わる圧力との差によりこれを前記圧力エアの圧力値として出力することを特徴とする請求項1に記載の圧力エア測定装置。   The second measurement space is substantially atmospheric pressure, and the sensor outputs a pressure value of the pressure air based on a difference between a pressure applied to the first measurement unit and a pressure applied to the second measurement unit. The pressure air measuring device according to claim 1, wherein: 前記第2の測定空間に、前記センサと電気的に接続される電気電子部品及び配線部材及び電源の少なくとも1つが配置されることを特徴とする請求項1から2のいずれかに記載の圧力エア測定装置。   3. The pressure air according to claim 1, wherein at least one of an electric / electronic component, a wiring member, and a power source that are electrically connected to the sensor is disposed in the second measurement space. 4. measuring device. 主軸に着脱可能な加工用工具を前記主軸に着脱する際、前記加工用工具の着脱部へ圧力エアを吹き出すための主軸流路を前記主軸に設けた工作機械と、
前記主軸に装着される請求項1から3のいずれかに記載の圧力エア測定装置と、
を有することを特徴とする工作機械システム。


A machine tool provided with a spindle flow path in the spindle for blowing pressure air to the attachment / detachment part of the machining tool when attaching / detaching the machining tool detachable to the spindle;
The pressure air measurement device according to any one of claims 1 to 3, wherein the pressure air measurement device is attached to the main shaft;
A machine tool system comprising:


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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108548286A (en) * 2018-03-29 2018-09-18 蚌埠市金洋机床有限责任公司 A kind of numerically-controlled machine tool indoor air cleaning system
CN108592323A (en) * 2018-03-29 2018-09-28 蚌埠市金洋机床有限责任公司 A kind of air purification method based on work of numerical control machine state
CN112509938A (en) * 2019-09-13 2021-03-16 铠侠股份有限公司 Substrate bonding device
CN117773650A (en) * 2024-02-27 2024-03-29 泉州立亿德智能科技有限公司 Detection sensor positive pressure protection mechanism for numerical control machine tool

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000028460A (en) * 1998-07-15 2000-01-28 Matsushita Electric Works Ltd Pressure sensor and manufacture thereof
JP2007203431A (en) * 2006-02-03 2007-08-16 Nippei Toyama Corp Air pressure measuring device of spindle unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000028460A (en) * 1998-07-15 2000-01-28 Matsushita Electric Works Ltd Pressure sensor and manufacture thereof
JP2007203431A (en) * 2006-02-03 2007-08-16 Nippei Toyama Corp Air pressure measuring device of spindle unit

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108548286A (en) * 2018-03-29 2018-09-18 蚌埠市金洋机床有限责任公司 A kind of numerically-controlled machine tool indoor air cleaning system
CN108592323A (en) * 2018-03-29 2018-09-28 蚌埠市金洋机床有限责任公司 A kind of air purification method based on work of numerical control machine state
CN112509938A (en) * 2019-09-13 2021-03-16 铠侠股份有限公司 Substrate bonding device
CN112509938B (en) * 2019-09-13 2024-02-20 铠侠股份有限公司 Substrate attaching device
CN117773650A (en) * 2024-02-27 2024-03-29 泉州立亿德智能科技有限公司 Detection sensor positive pressure protection mechanism for numerical control machine tool

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