JP2016190257A - Lever type jig for in-furnace diffusion junction - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a side face pushing jig for in-furnace diffusion junction which dispenses with an expensive device or a complex work and can equally apply a desired load in a simple manner to a side face of a member to be joined.SOLUTION: A lever-type jig for in-furnace diffusion junction 1 comprise: a first top plate member 10, disposed above a first member to be joined 50 in a vertical direction and having a plurality of first holes to be engaged 12 where first tapers 14 are formed; a second bottom plate member 20, disposed below the first member to be joined 50 in the vertical direction and having a plurality of second holes to be engaged 22 where second tapers 24 are formed; and a plurality of first struts 30 disposed between the bottom plate member 10 and the second bottom plate member 20 and disposed in contact with a side face of the first member to be joined 50, each having a first engagement part 32 engaged with the first holes to be engaged 12 where third tapers 34 are formed, and a second engagement part 36 engaged with the second holes to be engaged 22 where fourth tapers 38 are formed.SELECTED DRAWING: Figure 3

Description

  The present invention relates to an in-furnace diffusion bonding side pressing jig for applying a load to a member to be bonded in diffusion bonding in a furnace.

  Conventionally, diffusion bonding is used when joining various materials such as steel, aluminum, and titanium. For example, joint diffusion is used in the manufacture of components having complicated shapes and hollow shapes such as turbine blades and laminated dies.

  Diffusion bonding is a bonding method that utilizes mutual diffusion of base material atoms generated at a bonding interface between materials under high temperature pressure. Bondability is affected by bonding temperature, pressure, vacuum, chemical composition of material, structure, surface roughness, and the like. In particular, the applied pressure (the magnitude of the load) affects the contact area at high temperatures, and when the applied pressure increases, the amount of creep deformation increases and the contact area expands, thereby promoting diffusion bonding.

  Diffusion bonding is generally performed in an atmospheric furnace. For example, diffusion bonding in a furnace is performed by placing a weight on a member to be bonded in which a plurality of members of different materials are stacked in the vertical direction (see, for example, Patent Document 1). By applying a load to the members to be joined, members of different materials are joined together.

JP-A-5-57458

  Here, when the member which comprises a to-be-joined member is the laminated | stacked solid member or hollow member, it is necessary to provide a load also about the side surface of this to-be-joined member. As a diffusion bonding method for applying a load also to the side surfaces of the bonding member, an HIP method (hot isostatic pressing method) can be mentioned. However, performing diffusion bonding by the HIP method requires a complicated operation using an expensive apparatus, resulting in high costs and reduced workability. Therefore, there is a need for a furnace side diffusion bonding side pushing jig that can easily apply a load to the side face of a member to be joined without requiring an expensive apparatus or complicated work.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an in-furnace diffusion bonding side pushing jig capable of easily applying a desired load evenly to the side surface of a member to be joined without requiring an expensive apparatus or complicated work. To do.

  The present invention is arranged above the first member to be joined in the vertical direction, and has a plurality of first engaged holes formed on the outer edge side of the lower surface, and a horizontal outside of each of the plurality of first engaged holes. A first upper plate member having a first taper portion formed on the side surface and inclined so as to go outward in the horizontal direction as it goes downward in the vertical direction; A plurality of second engaged holes formed on the outer edge side of the upper surface and formed on the horizontal outer surface of each of the plurality of second engaged holes, and directed upward in the vertical direction. And a second taper portion formed to be inclined so as to be directed outward in the horizontal direction, and disposed between the first upper plate member and the first lower plate member. And is disposed in direct or indirect contact with the side surface of the first member to be joined. A first engaging portion that engages with the first engaged hole; a second engaging portion that engages with the second engaged hole; and a horizontal outer surface of the first engaging portion. A third taper portion that slidably contacts the first taper portion, and a fourth taper portion that is formed on a horizontal outer surface of the second engagement portion and slidably contacts the second taper portion, respectively. And a plurality of first support columns.

  Further, the side pressing jig for in-furnace diffusion bonding may be configured such that, when a downward load in the vertical direction is applied to the first upper plate member, the first taper portion is against the third taper portion. A load for moving the first support column in the horizontal direction toward the first member to be bonded is applied, and the second taper portion has the first support column in the horizontal direction with respect to the fourth taper portion. It is preferable to apply a load to be moved to the side.

  Further, the side surface pressing jig for diffusion diffusion in a furnace further includes a first pressing member, all or a part of which is disposed between the first upper plate member and the first bonded member, When a downward load in the vertical direction is applied to the plate member, the first pressing member applies a load to the upper surface of the first bonded member, and each of the plurality of first struts is It is preferable to apply a load to the side surface of the first member to be joined.

  Further, the furnace side diffusion bonding side pressing jig includes a second lower plate member disposed further below a second member to be bonded disposed below the first lower plate member in the vertical direction, and the first A plurality of second struts arranged between the lower plate member and the second lower plate member and arranged in direct or indirect contact with the side surface of the second joined member, all or part of which A second pressing member disposed between the first lower plate member and the second member to be joined, wherein the first lower plate member includes a plurality of third members formed on the outer edge side of the lower surface. A fifth taper portion formed on the outer side surface of the engagement hole and the plurality of third engagement holes in the horizontal direction, and inclined so as to go outward in the horizontal direction as it goes downward in the vertical direction. And the second lower plate member includes a plurality of fourth engaged holes formed on the outer edge side of the upper surface, and the plurality of the plurality of engaged holes. A sixth taper portion formed on the outer surface of the four engaged holes in the horizontal direction and inclined so as to go outward in the horizontal direction as it goes upward in the vertical direction, The second support column includes a third engagement portion that engages with the third engaged hole, a fourth engagement portion that engages with the fourth engaged hole, and a horizontal direction of the third engagement portion. A seventh taper portion formed on the outer surface and slidably abutting on the fifth taper portion, and a seventh taper portion slidably abutting on the sixth taper portion formed on a horizontal outer surface of the fourth engagement portion. It is preferable to have 8 taper portions.

  Further, the side pressing jig for in-furnace diffusion bonding, when a downward load in the vertical direction is applied to the first upper plate member, the second pressing member is placed on the upper surface of the second bonded member. A load is applied to each of the plurality of second columns, and each of the plurality of second columns supports a load that moves the second column to the second bonded member side in the horizontal direction with respect to the seventh taper. And applying a load that moves the second support column to the second bonded member side in the horizontal direction with respect to the eighth tapered portion. It is preferable to apply a load to.

  Moreover, it is preferable that the side pressing jig for in-furnace diffusion bonding is entirely or partially made of C / C composite or metal molybdenum.

  ADVANTAGE OF THE INVENTION According to this invention, an expensive apparatus and a complicated operation | work are not required, but the side pressing jig for diffusion bonding in a furnace which can provide a load to the side surface of a to-be-joined member simply can be provided. And the side pushing jig | tool of this invention can load a desired load equally on the side surface of a to-be-joined member.

It is a front view of the side pushing jig for in-furnace diffusion welding in a 1st embodiment. It is a top view of the side pushing jig for diffusion bonding in a furnace in a 1st embodiment. It is DD sectional drawing in FIG. 2, and is a figure explaining the structure of the side pressing jig for diffusion bonding in a furnace in 1st Embodiment. FIG. 4 is an enlarged view of a region K in FIG. 3. It is a figure explaining an effect | action of the side surface pressing jig for diffusion bonding in a furnace in 1st Embodiment. It is a top view of the side pushing jig for in-furnace diffusion welding in a 2nd embodiment. It is EE sectional drawing in FIG. 6, and is a figure explaining the structure of the side pushing jig | tool for diffusion bonding in a furnace in 2nd Embodiment. It is a figure explaining the effect | action of the side surface pressing jig for diffusion bonding in a furnace in 2nd Embodiment. It is a front view of the side pressing jig for diffusion bonding in a furnace of a 3rd embodiment. FIG. 10 is an enlarged view of a region L in FIG. 9. It is a figure explaining an effect | action of the side surface pressing jig for diffusion bonding in a furnace of 3rd Embodiment. It is a table | surface which shows the joining conditions in each Example. It is a table | surface which shows the heating and vacuum conditions of a furnace. It is a figure explaining the to-be-joined member used for an Example, (a) Top view of a to-be-joined member, (b) FF sectional drawing of a to-be-joined member, (c) GG cross section of a to-be-joined member FIG. 4D is a cross-sectional view corresponding to the line FF in a state where two members to be joined are stacked. It is a table | surface which shows the evaluation result of bondability.

  Hereinafter, the side pushing jig for in-furnace diffusion bonding according to the present invention will be described with reference to FIGS. First, the side pushing jig for in-furnace diffusion bonding in the first embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the in-furnace diffusion bonding side pushing jig 1 is accommodated in an internal space B of a furnace A (not shown). The furnace A is configured to be able to adjust the temperature and the degree of vacuum of the internal space B. The in-furnace diffusion bonding side pushing jig 1 is, for example, a jig that applies a load to a member to be joined in the internal space B adjusted to a vacuum high temperature. In FIG. 1, columns 30 </ b> J and 30 </ b> N, which will be described later, are not shown in order to facilitate understanding of the configuration of the in-furnace diffusion bonding side pushing jig 1.

  As shown in FIGS. 1 to 4, the side press jig 1 for in-furnace diffusion bonding is an upper plate member 10 (first upper member) disposed above the member to be bonded 50 (first member to be bonded) in the vertical direction. Plate member), lower plate member 20 (first lower plate member) disposed below in the vertical direction of member to be joined 50 (first member to be joined), and between upper plate member 10 and lower plate member 20 And a plurality of support columns 30 </ b> A to 30 </ b> N disposed in contact with a side surface 54 of the bonded member 50 via a separator described later. In the present embodiment, the in-furnace diffusion bonding side surface pressing jig 1 includes the separator 60 disposed between the lower plate member 20 and the member to be bonded 50, and the plurality of support columns 30A to 30N. And separators 65 </ b> A to 65 </ b> N disposed between the members 50.

  When the weight 40 is placed on the upper plate member 10, the side surface pressing jig 1 for diffusion bonding in the furnace is provided with a load so that the upper plate member 10 is moved downward, whereby the plurality of support columns 30A to 30A. 30N is configured to be applied with a load for moving the bonded member 50 toward the side surface 54. The side pushing jig 1 for diffusion bonding in a furnace forms the taper part in the upper board member 10 and the lower board member 20, and forms the taper part corresponding to several support | pillars 30A-30N, The upper board member 10 When the weight 40 is placed on the plurality of columns 30 </ b> A to 30 </ b> N, a load is applied to the side surface 54 of the bonded member 50. Details will be described later. Here, the side pushing jig 1 for in-furnace diffusion bonding is disposed in the internal space B adjusted to a vacuum high temperature as will be described later, so that all or part of the side pressing jig 1 is made of C / C composite or metal molybdenum. It is preferable that the whole is composed of a C / C composite or metal molybdenum.

Hereinafter, the configuration of the side pushing jig 1 for in-furnace diffusion bonding will be described in detail.
The upper plate member 10 is disposed above the bonded member 50 in the vertical direction. The upper plate member 10 is configured in a plate shape having an insertion hole 11 formed in the central portion in the horizontal direction. The upper plate member 10 is configured such that the weight 40 can be placed on the upper surface 10A.
The upper plate member 10 has a plurality of first engaged holes 12A to 12N formed on the outer edge side of the lower surface 10B.

As shown in FIGS. 3 and 4, the first engaged holes 12 </ b> A to 12 </ b> N are holes that are engaged with first engaging portions 32 </ b> A to 32 </ b> N (described later) formed at the ends of the columns 30 </ b> A to 30 </ b> N. is there.
Each of the first engaged holes 12A to 12N has first tapered portions 14A to 14N formed on the outer side surface in the horizontal direction.

Each of the first tapered portions 14A to 14N is formed on the outer side in the horizontal direction in the first engaged holes 12A to 12N. Each of the first taper portions 14A to 14N is formed to be inclined so as to go outward in the horizontal direction as it goes downward in the vertical direction.
3rd taper part 34A-34N mentioned later formed in support | pillar 30A-30N is contact | abutted to each 1st taper part 14A-14N so that a slide is possible.

The lower plate member 20 is disposed below the bonded member 50 in the vertical direction. The lower plate member 20 is configured such that the member to be bonded 50 can be placed via the separator plate 60.
The lower plate member 20 has a plurality of second engaged holes 22A to 22N formed on the outer edge side of the upper surface 20A.

As shown in FIGS. 3 and 4, the second engaged holes 22 </ b> A to 22 </ b> N are holes that are engaged with second engaging portions 36 </ b> A to 36 </ b> N (described later) formed at the ends of the columns 30 </ b> A to 30 </ b> N. is there.
Each of the second engaged holes 22A to 22N has second tapered portions 24A to 24N formed on the outer side surface in the horizontal direction.

Each of the second taper portions 24A to 24N is formed on the outer side in the horizontal direction in the second engaged holes 22A to 22N. Each of the second taper portions 24A to 24N is formed to be inclined so as to go outward in the horizontal direction as it goes upward in the vertical direction.
Fourth taper portions 38A to 38N (described later) formed on the support columns 30A to 30N are slidably contacted with the second taper portions 24A to 24N, respectively.

  As shown in FIGS. 1 to 3, the plurality of support columns 30 </ b> A to 30 </ b> N are disposed between the upper plate member 10 and the lower plate member 20, and separator plates 65 </ b> A to 65 </ b> N are provided on the side surface 54 of the member 50 to be joined. Via the indirect air.

Each of the plurality of struts 30A to 30N includes first engaging portions 32A to 32N that engage with the first engaged holes 12A to 12N and second engaging portions that engage with the second engaged holes 22A to 22N. 36A to 36N.
Each of the first engaging portions 32A to 32N is formed on the upper end side of the support columns 30A to 30N. In addition, each of the second engagement portions 36A to 36N is formed on the lower end side of the support columns 30A to 30N.

  Each of the plurality of struts 30A to 30N is formed on the third taper portions 34A to 34N formed on the horizontal outer surface of the first engagement portions 32A to 32N and the horizontal outer surface of the second engagement portions 36A to 36N. The fourth tapered portions 38A to 38N are provided.

  Each of the third taper portions 34A to 34N is formed to slidably contact the first taper portions 14A to 14N. Each of the third tapered portions 34A to 34N is formed so as to be in surface contact with each of the first tapered portions 14A to 14N. Each of the third taper portions 34A to 34N is formed to be inclined so as to go outward in the horizontal direction as it goes downward in the vertical direction.

  Each of the fourth tapered portions 38A to 38N is formed so as to be slidably contacted with the second tapered portions 24A to 24N. The fourth taper portions 38A to 38N are formed so as to be in surface contact with the second taper portions 24A to 24N, respectively. Each of the fourth taper portions 38A to 38N is formed to be inclined so as to go outward in the horizontal direction as it goes upward in the vertical direction.

In each of the plurality of support columns 30A to 30N, the first engaging portions 32A to 32N are engaged with the first engaged holes 12A to 12N, and the second engaging portions 36A to 36N are second engaged holes 22A to 22A. By being engaged with 22N, it is held at a predetermined position between the upper plate member 10 and the lower plate member 200.
Here, each of the plurality of support columns 30 </ b> A to 30 </ b> N is not fixed to the upper plate member 10 and the lower plate member 20. Therefore, the vertical distance between the upper plate member 10 and the lower plate member 20 can be changed.

  In each of the plurality of support columns 30A to 30N, the third taper portions 34A to 34N are slidably contacted with the first taper portions 14A to 14N, and the fourth taper portions 38A to 38N are slidable to the second taper portions 24A to 24N. By being in contact with each other, it is configured to be movable in the horizontal direction in response to a change in the distance between the upper plate member 10 and the lower plate member 20. When the distance between the upper plate member 10 and the lower plate member 20 is shortened, each of the plurality of columns 30A to 30N is moved to the bonded member 50 side.

  In the present embodiment, since the weight 40 is placed on the upper plate member 10, the upper plate member 10 is moved downward, and the distance between the upper plate member 10 and the lower plate member 20 is shortened. Thereby, each of the plurality of support columns 30A to 30N is moved to the bonded member 50 side. That is, each of the plurality of support columns 30A to 30N is configured to press the side surface 54 of the bonded member 50 via the separator plates 65A to 65N. The operation of the in-furnace diffusion bonding side pushing jig 1 will be further described later.

  As shown in FIGS. 3 and 4, the bonded member 50 is configured by stacking a plurality of members 50 a to 50 e. Each of the plurality of members 50a to 50e is, for example, a concave member having an opening wider than the bottom surface. For example, in this case, the bonded member 50 is formed by laminating and arranging a plurality of members 50a to 50e so that the openings face downward. Such a member 50 to be joined needs to be diffusion-bonded at the outer edge side where the members come into contact with each other. Therefore, not only a load in the vertical direction with respect to the upper surface but also a load that presses in the horizontal direction with respect to the side surface 54 is applied. There is a need to. The to-be-joined member 50 is applied with a horizontal load that presses against the side surface 54 by the in-furnace diffusion bonding side surface pressing jig 1 of the present embodiment.

The members 50a to 50e are, for example, in a vacuum high temperature state and a state in which a horizontal load is applied to the side surface 54 by the side pressing jig 1 for diffusion bonding in a furnace. Diffusion bonded. Heating conditions and vacuum conditions can be set with reference to normal conditions. As an example of the heating condition and the vacuum condition, examples described later can be referred to.
Here, in this embodiment, although the to-be-joined member 50 is what is called a hollow article, it is not limited to this, A so-called solid article may be sufficient.

Next, the operation of the side pressing jig 1 for in-furnace diffusion bonding according to the first embodiment will be described with reference to FIG.
As shown in FIG. 5, when the weight 40 is placed on the upper surface 10 </ b> A of the upper plate member 10, a load W directed downward in the vertical direction is applied to the upper plate member 10. The load W is a load that moves the upper plate member 10 downward in the vertical direction.

  Subsequently, when the load W is applied to the upper plate member 10, the upper plate member 10 is moved downward in the vertical direction. Accordingly, the plurality of support columns 30A to 30N are pressed downward in the vertical direction and moved to the bonded member 50 side in the horizontal direction.

  Specifically, when a downward load W in the vertical direction is applied to the upper plate member 10, the first taper portions 14 </ b> A to 14 </ b> N level the columns 30 </ b> A to 30 </ b> N with respect to the third taper portions 34 </ b> A to 34 </ b> N. The second taper portions 24A to 24N move the columns 30A to 30N in the horizontal direction to the bonded member 50 side in the horizontal direction with respect to the fourth tapered portions 38A to 38N. A load F2 to be applied is applied.

  Here, when the plurality of columns 30 </ b> A to 30 </ b> N are already in contact with the side surface 54 of the member to be bonded 50, the plurality of columns 30 </ b> A to 30 </ b> N press the side surface 54 of the member to be bonded 50. When the plurality of support columns 30A to 30N are already in contact with the side surface 54 of the member to be bonded 50, the plurality of support columns 30A to 30N are horizontal with respect to the side surface 54 of the member to be bonded 50 via the separators 65A to 65N. The load F3 is applied.

  The in-furnace diffusion bonding side surface pressing jig 1 is formed by combining the tapered portions formed on the upper plate member 10 and the lower plate member 20 with the tapered portions formed on the support columns 30A to 30N. The downward load W in the vertical direction is converted into horizontal loads F1, F2, and F3 for the plurality of columns 30A to 30N. As a result, when the weight 40 is placed on the upper surface 10 </ b> A of the upper plate member 10, the side diffusion jig 1 for in-furnace diffusion bonding is loaded onto the side surface 54 of the member 50 to be bonded by the plurality of columns 30 </ b> A to 30 </ b> N. Is granted.

  According to this embodiment, the in-furnace diffusion bonding side pressing jig 1 can apply a load to the side surface 54 of the member to be bonded 50. Further, according to the present embodiment, the in-furnace diffusion bonding side surface pressing jig 1 can equally apply a load to the side surface 54 of the member to be bonded 50 by the plurality of support columns 30A to 30N. Thereby, the side surface pressing jig 1 for in-furnace diffusion joining can join the joining part in the to-be-joined member 50 equally.

  Further, according to the present embodiment, the in-furnace diffusion bonding side surface pressing jig 1 applies a load to the side surface 54 of the member 50 to be bonded only by applying a load by the weight 40 by a structural device. Can do. Thereby, the side pushing jig 1 for diffusion bonding in the furnace diffuses the member to be joined 50 without using a high-cost and complicated device such as a device for HIP method (hot isostatic pressure or pressure bonding method). Can be joined.

  Further, according to the present embodiment, the in-furnace diffusion bonding side surface pressing jig 1 applies a load according to the load of the weight 40 placed on the side surface 54 of the member 50 to be bonded. As a result, the in-furnace diffusion bonding side surface pressing jig 1 can apply a desired load to the side surface 54 of the member to be bonded 50 by adjusting the weight of the weight 40 placed thereon.

Subsequently, the side pushing jig 1A for diffusion bonding in a furnace in the second embodiment will be described with reference to FIGS. FIG. 6 is a plan view of a side pushing jig for in-furnace diffusion bonding in the second embodiment. FIG. 7 is a cross-sectional view taken along the line E-E in FIG. 6, illustrating the configuration of the side pushing jig for in-furnace diffusion bonding in the second embodiment. FIG. 8 is a diagram for explaining the operation of the side pushing jig for in-furnace diffusion bonding in the second embodiment.
The in-furnace diffusion bonding side pressing jig 1 </ b> A in the second embodiment is different from the in-furnace diffusion bonding side pressing jig 1 of the first embodiment in that it includes a pressing member 70. Hereinafter, the description will focus on the differences, and the description of the same configuration as in the first embodiment will be omitted.

  As shown in FIGS. 6 and 7, the in-furnace diffusion bonding side pressing jig 1 </ b> A is different from the first embodiment in that it includes a pressing member 70. Specifically, the in-furnace diffusion bonding side surface pressing jig 1 </ b> A includes a pressing member 70 (first pressing member) that is disposed between the upper plate member 10 and the member to be bonded 50, in whole or in part. In the present embodiment, the in-furnace diffusion bonding side surface pressing jig 1 </ b> A includes a separator 61 disposed between the pressing member 70 and the member to be bonded 50.

The pressing member 70 includes a central portion 71 and an outer peripheral portion 72 formed on the outer periphery of the central portion 71 and having a vertical length (thickness) shorter than that of the central portion 71.
In the present embodiment, the central portion 71 is inserted through the insertion hole 11 formed in the horizontal central portion of the upper plate member 10. The upper surface 71A of the central portion 71 is exposed to the outside and forms a flat surface integrally with the upper surface 10A of the upper plate member 10. The weight 40 is placed on the plane.

  In the present embodiment, the outer peripheral portion 72 is disposed between the upper plate member 10 and the member to be joined 50. The upper plate member 10 is placed on the outer peripheral portion 72. The outer peripheral portion 72 is given a downward load in the vertical direction from the weight 40 placed on the upper plate member 10.

  When a downward load in the vertical direction is applied to the upper plate member 10, the pressing member 70 applies a load to the upper surface 52 of the bonded member 50 via the separator plate 61. In the present embodiment, in the pressing member 70, a load is directly applied from the weight 40 to the upper surface 71 </ b> A of the central portion 71, and a load is indirectly applied to the upper surface 72 </ b> A of the outer peripheral portion 72 via the upper plate member 10. Thus, a downward load in the vertical direction is applied to the bonded member 50. In addition, the pressing member 70 is not limited to the shape of this embodiment, For example, plate shape may be sufficient.

  Also in this embodiment, similarly to the first embodiment, when the weight 40 is placed on the upper plate member 10, the upper plate member 10 is moved downward, and the upper plate member 10 and the lower plate member 20 Since the distance between them becomes shorter, each of the plurality of support columns 30A to 30N is moved to the bonded member 50 side. That is, each of the plurality of support columns 30A to 30N presses the side surface 54 of the member to be bonded 50 via the separator plates 65A to 65N. Each of the plurality of support columns 30A to 30N applies a load to the side surface 54 of the bonded member 50 via the separator plates 65A to 65N.

Next, with reference to FIG. 8, the operation of the side pushing jig 1A for diffusion diffusion in a furnace according to the second embodiment will be described.
As shown in FIG. 8, when the weight 40 is placed on the upper surface 10 </ b> A of the upper plate member 10, a load W directed downward in the vertical direction is applied to the upper plate member 10.

  Subsequently, the load W from the weight 40 is directly applied to the pressing member 70 to the central portion 71 and indirectly applied to the outer peripheral portion 72 via the upper plate member 10. Accordingly, the pressing member 70 applies a load F <b> 11 that is directed downward in the vertical direction to the bonded member 50.

Subsequently, the upper plate member 10 is moved downward in the vertical direction by the load W. Accordingly, the plurality of support columns 30A to 30N are pressed downward in the vertical direction and moved to the bonded member 50 side in the horizontal direction. Details are as described in the first embodiment.
Accordingly, the plurality of support columns 30 </ b> A to 30 </ b> N press the side surface 54 of the member to be bonded 50. Specifically, the plurality of support columns 30A to 30N apply a horizontal load F12 to the side surface 54 of the bonded member 50 via the separator plates 65A to 65N.

  As described above, in the furnace side diffusion bonding side pressing jig 1 </ b> A, when the weight 40 is placed on the upper surface 10 </ b> A of the upper plate member 10, the load in the direction perpendicular to the upper surface 52 of the member 50 to be bonded is pressed by the pressing member 70. While providing F11, the load F12 is provided with respect to the side surface 54 of the to-be-joined member 50 by several support | pillars 30A-30N.

According to the present embodiment, in addition to the effects of the first embodiment, the following effects are further achieved.
The in-furnace diffusion bonding side surface pressing jig 1 </ b> A according to the present embodiment can apply a load to the upper surface 52 of the member to be bonded 50 and also apply a load to the side surface 54. Thereby, 1 A of side pressing jigs for diffusion bonding in a furnace can carry out the diffusion joining of the joining part in the to-be-joined member 50 more suitably.

  Next, the side pushing jig 100 for in-furnace diffusion bonding according to the third embodiment will be described with reference to FIGS. FIG. 9 is a front view of the side pressing jig for in-furnace diffusion bonding according to the third embodiment. FIG. 10 is an enlarged view of a region L in FIG. FIG. 11 is a diagram for explaining the operation of the side pressing jig for in-furnace diffusion bonding according to the third embodiment. Here, in FIG. 9, the support columns 30J and 30N and the support columns 140J and 140N are not shown in order to facilitate understanding of the configuration of the side diffusion jig 100 for in-furnace diffusion bonding.

  In-furnace diffusion-bonding side pressing jig 100 in the third embodiment has a two-stage structure for diffusion-bonding two members to be bonded in the furnace. Different from 1A. Hereinafter, the differences will be mainly described, and description of the same configurations as those in the first embodiment or the second embodiment will be omitted. Hereinafter, the side pressing jig 100 for in-furnace diffusion bonding in the present embodiment will be described.

  As shown in FIG. 9, the side pressing jig 100 for in-furnace diffusion bonding according to the present embodiment is configured to include a first part 100A and a second part 100B. 100 A of 1st parts are the structures similar to 1 A of side pressing jigs for diffusion bonding in a furnace of 2nd Embodiment. The second part 100B is a part added to the lower side in the vertical direction of the side pressing jig 1A for in-furnace diffusion bonding of the second embodiment. The basic configuration of the second part 100B is the same as that of the first part 100A and is the same as that of the side pushing jig 1A for diffusion bonding in a furnace of the second embodiment.

In the present embodiment, the in-furnace diffusion bonding side surface pressing jig 100 is characterized by a two-stage structure of a first part 100A and a second part 100B. Thereby, the side pressing jig 100 for in-furnace diffusion bonding is configured to be capable of diffusion bonding two (plural) members to be bonded.
In addition, in the in-furnace diffusion bonding side surface pressing jig 100 of this embodiment, a lower plate member 120 (first lower plate member) described later includes a lower plate member in the first portion 100A and an upper plate in the second portion 100B. It is comprised so that it may serve as a member.
Hereinafter, the second portion 100B, which is a portion added to the side pressing jig for in-furnace diffusion bonding of the second embodiment, will be mainly described.

  As shown in FIG. 9, the second part 100B is disposed on the lower side in the vertical direction of the first part 100A. The second portion 100B includes a lower plate member 120 (first lower plate member) and a lower plate member 130 (second portion) disposed further below the joined member 150 disposed below the lower plate member 120 in the vertical direction. A plurality of support columns 140A to 140N disposed between the lower plate member 120, the lower plate member 120, and the lower plate member 130 and in contact with the side surface 154 of the bonded member 150 (second bonded member). (Second strut) and a pressing member 170 (second pressing member), all or part of which is disposed between the lower plate member 120 and the member to be bonded 150.

As described above, the lower plate member 120 (first lower plate member) is configured to serve as the lower plate member in the first portion 100A and the upper plate member in the second portion 100B.
As shown in FIG. 10, the lower plate member 120 has a plurality of second engaged holes 122A to 122N formed on the outer edge side of the upper surface 120A. The second engaged holes 122A to 122N are holes that are engaged with the second engaging portions 36A to 36N formed at the ends of the columns 30A to 30N.
Further, the lower plate member 120 has a plurality of third engaged holes 126A to 126N formed on the outer edge side of the lower surface 120B. The third engaged holes 126A to 126N are holes that are engaged with the third engaging portions 142A to 142N formed at the ends of the columns 140A to 140N.
Each of the third engaged holes 126A to 126N has fifth tapered portions 128A to 128N formed on the outer side in the horizontal direction.

The 5th taper part 128A-128N is formed in the horizontal direction outer surface in 3rd to-be-engaged hole 126A-126N. Each of the fifth taper portions 128A to 128N is formed to be inclined so as to go outward in the horizontal direction as it goes downward in the vertical direction.
Seventh taper portions 144A to 144N (described later) formed on the support columns 140A to 140N are slidably contacted with the fifth taper portions 128A to 128N, respectively.

The lower plate member 130 (second lower plate member) has a plurality of fourth engaged holes 132A to 132N formed on the outer edge side of the upper surface 130A. The fourth engaged holes 132A to 132N are holes that are engaged with the fourth engaging portions 146A to 146N formed at the ends of the columns 140A to 140N.
Each of the fourth engaged holes 132A to 132N has sixth tapered portions 134A to 134N formed on the outer surface in the horizontal direction.

The sixth tapered portions 134A to 134N are formed on the horizontal outer surfaces of the fourth engaged holes 132A to 132N. Each of the sixth taper portions 134A to 134N is formed to be inclined so as to go outward in the horizontal direction as it goes upward in the vertical direction.
8th taper part 148A-148N mentioned later formed in support | pillar 140A-140N is contact | abutted to each of 6th taper part 134A-134N so that a slide is possible.

  As shown in FIG. 10, the plurality of struts 140A to 140N are disposed between the lower plate member 120 and the lower plate member 130, and indirectly to the side surface 154 of the bonded member 150 via the separator plates 165A to 165N. In contact with each other.

Each of the plurality of struts 140A to 140N includes third engaging portions 142A to 142N that engage with the third engaged holes 126A to 126N and fourth engaging portions that engage with the fourth engaged holes 132A to 132N. 146A to 146N.
Each of the third engaging portions 142A to 142N is formed on the upper end side of the support columns 140A to 140N. Further, the fourth engaged holes 132A to 132N are formed on the lower ends of the support columns 140A to 140N.

  Each of the plurality of support columns 140A to 140N is formed on the horizontal outer surface of the seventh taper portions 144A to 144N formed on the horizontal outer surface of the third engagement portions 142A to 142N and the fourth engagement portions 146A to 146N. The eighth tapered portions 148A to 148N are provided.

  Each of the seventh tapered portions 144A to 144N is formed to slidably contact the fifth tapered portions 128A to 128N. Each of the seventh tapered portions 144A to 144N is formed so as to be in surface contact with each of the fifth tapered portions 128A to 128N. Each of the seventh tapered portions 144A to 144N is formed to be inclined so as to go outward in the horizontal direction as it goes downward in the vertical direction.

  Each of the eighth tapered portions 148A to 148N is formed to slidably contact the sixth tapered portions 134A to 134N. Each of the eighth tapered portions 148A to 148N is formed so as to be in surface contact with each of the sixth tapered portions 134A to 134N. Each of the eighth taper portions 148A to 148N is formed to be inclined so as to go outward in the horizontal direction as it goes upward in the vertical direction.

  In each of the plurality of struts 140A to 140N (second struts), the third engaging portions 142A to 142N are engaged with the third engaged holes 126A to 126N, and the fourth engaging portions 146A to 146N are the fourth covered portions. By being engaged with the engagement holes 132 </ b> A to 132 </ b> N, it is held at a predetermined position between the lower plate member 120 and the lower plate member 130.

Each of the plurality of support columns 140A to 140N presses the side surface 154 of the member to be bonded 150 via the separator plates 65A to 65N when the load from the weight 40 and the first portion 100A is applied to the lower plate member 120. When the loads from the weight 40 and the first part 100A are applied to the lower plate member 120, the plurality of columns 140A to 140N respectively apply a load F34 to the side surface 154 of the member to be bonded 150 via the separator plates 165A to 165N. (See FIG. 11).
For the operation and the like in each of the plurality of columns 140A to 140N, the description of the plurality of columns in the first embodiment and the second embodiment can be referred to.

  As shown in FIGS. 9 and 10, all or part of the pressing member 170 (second pressing member) is disposed between the lower plate member 120 and the lower plate member 130. When the load F from the weight 40 and the first part 100 </ b> A is applied to the lower plate member 120, the pressing member 170 applies a vertical load F <b> 31 to the upper surface 152 of the bonded member 150 via the separator plate 161. (See FIG. 11).

  When the weight 40 is placed on the upper surface 10 </ b> A of the upper plate member 10, the side surface pressing jig 100 for in-furnace diffusion bonding gives a vertical load F <b> 21 to the upper surface 52 of the member to be bonded 50 by the pressing member 70. At the same time, the load F24 is applied to the side surface 54 of the bonded member 50 by the plurality of support columns 30A to 30N. Furthermore, in the furnace side diffusion bonding side pressing jig 100, when the weight 40 is placed on the upper surface 10 </ b> A of the upper plate member 10, the load in the direction perpendicular to the upper surface 152 of the member to be bonded 150 is pressed by the pressing member 170. While providing F31, the load F34 is provided with respect to the side surface 154 of the to-be-joined member 150 by several support | pillars 140A-140N.

Next, the operation of the side pushing jig 100 for in-furnace diffusion bonding according to the third embodiment will be described with reference to FIG.
As shown in FIG. 11, when the weight 40 is placed on the upper surface 10 </ b> A of the upper plate member 10, a load W directed downward in the vertical direction is applied to the upper plate member 10. The load W is a load that moves the upper plate member 10 downward in the vertical direction.

  Subsequently, when the load W is applied to the upper plate member 10, the upper plate member 10 is moved downward in the vertical direction. Accordingly, the plurality of support columns 30A to 30N are pressed downward in the vertical direction and moved to the bonded member 50 side in the horizontal direction.

  Specifically, when a downward load W in the vertical direction is applied to the upper plate member 10, the first taper portions 14 </ b> A to 14 </ b> N level the columns 30 </ b> A to 30 </ b> N with respect to the third taper portions 34 </ b> A to 34 </ b> N. The second taper portions 24A to 24N move the support columns 30A to 30N in the horizontal direction to the bonded member 50 side in the horizontal direction with respect to the fourth tapered portions 38A to 38N. A load F23 is applied.

  Here, when the plurality of columns 30 </ b> A to 30 </ b> N are already in contact with the side surface 54 of the member to be bonded 50, the plurality of columns 30 </ b> A to 30 </ b> N press the side surface 54 of the member to be bonded 50. When the plurality of support columns 30A to 30N are already in contact with the side surface 54 of the member to be bonded 50, the plurality of support columns 30A to 30N are horizontal with respect to the side surface 54 of the member to be bonded 50 via the separators 65A to 65N. The load F24 is applied.

  Subsequently, when a load from the weight 40 and the first portion 100A is applied to the upper surface 10A of the lower plate member 120, the lower plate member 120 is moved downward in the vertical direction. As a result, the plurality of support columns 140A to 140N are pressed downward in the vertical direction in the same manner as described above, and moved to the bonded member 150 side in the horizontal direction.

  Specifically, when a downward load F31 in the vertical direction is applied to the lower plate member 120, the fifth taper portions 128A to 128N level the columns 140A to 140N with respect to the seventh taper portions 144A to 144N. The sixth taper portions 134A to 134N move the columns 140A to 140N in the horizontal direction to the member to be bonded 150 side in the horizontal direction with respect to the eighth taper portions 148A to 148N. A load F33 is applied.

  Here, when the plurality of columns 140 </ b> A to 140 </ b> N are already in contact with the side surface 154 of the member to be bonded 150, the plurality of columns 140 </ b> A to 140 </ b> N press the side surface 154 of the member to be bonded 150. When the plurality of support columns 140A to 140N are already in contact with the side surface 154 of the member to be bonded 150, the plurality of support columns 140A to 140N are horizontal with respect to the side surface 154 of the member to be bonded 150 via the separators 165A to 165N. The load F34 is applied.

  As described above, when the weight 40 is placed on the upper surface 10 </ b> A of the upper plate member 10, the side surface pressing jig 100 for in-furnace diffusion bonding is perpendicular to the upper surface 52 of the member to be bonded 50 by the pressing member 70. While giving the load F21, the load F24 is given with respect to the side surface 54 of the to-be-joined member 50 by several support | pillars 30A-30N. Furthermore, in the furnace side diffusion bonding side pressing jig 100, when the weight 40 is placed on the upper surface 10 </ b> A of the upper plate member 10, the load in the direction perpendicular to the upper surface 152 of the member to be bonded 150 is pressed by the pressing member 170. While providing F31, the load F34 is provided with respect to the side surface 154 of the to-be-joined member 150 by several support | pillars 140A-140N.

  According to the in-furnace diffusion bonding side surface pressing jig 100 of the present embodiment, it is possible to apply a load from the top surface to a plurality of members to be bonded and also apply a load from the side surface. As a result, the side diffusion jig for in-furnace diffusion bonding of the present embodiment can perform diffusion diffusion in the furnace more efficiently than in the second embodiment.

  In addition, according to the present embodiment, the in-furnace diffusion bonding side surface pressing jig includes the first part 100 </ b> A that applies a load to the upper surface 52 and the side surface 54 of the member to be bonded 50, and the upper surface 152 and the side surface of the member to be bonded 150. And a second portion 100B for applying a load to 154. Further, in the in-furnace diffusion bonding side surface pressing jig of this embodiment, a lower plate member 120 (first lower plate member) described later includes a lower plate member in the first portion 100A and an upper plate member in the second portion 100B. It is configured to serve as both. Thereby, the side pushing jig for in-furnace diffusion bonding of this embodiment is comprised so that the burden of a cost side can be reduced.

  Examples of the present invention will be described below. Reference is made to FIGS. 12 to 15 as appropriate. FIG. 12 is a table showing joining conditions in each example. FIG. 13 is a table showing furnace heating and vacuum conditions. FIG. 14 is a diagram for explaining a member to be joined used in the example, (a) a plan view of the member to be joined, (b) a cross-sectional view taken along line FF of the member to be joined, and (c) a member to be joined. It is a figure explaining the member to comprise. FIG. 15 is a table showing the evaluation results of bondability.

First, diffusion bonding tests were performed on Examples 1 to 3. The conditions are as shown in FIGS. The outline of the conditions is as follows.
<Test equipment> Horizontal vacuum furnace <Use jig> Example 1: Side press jig for diffusion bonding in furnace of the first embodiment
Example 2: Side pressing jig for in-furnace diffusion bonding of the second embodiment
Example 3: Side pressing jig for in-furnace diffusion bonding of the third embodiment <Vacuum conditions and heating conditions> As shown in Table 2 (see FIG. 13). This will be described in detail later.
<Junction temperature> (1) 900 ° C
(2) 1000 ° C
(3) 1100 ° C
(4) Four patterns at 1200 ° C. <Weight weight> 10 kgf
<Members to be joined> Material: SUS430, shape: see FIG.

The vacuum conditions and heating conditions are as shown in Table 4 and the graph of FIG. 13 and are as follows.
First, the temperature in the furnace is raised to 400 ° C. as preheating. The degree of vacuum at the time of preheating is 1.0 × 10 ⁻² Pa. The time and temperature rise are as shown in the graph of FIG.
Subsequently, the temperature in the furnace is raised to the joining temperature (1) (2) (3) (4). The degree of vacuum during the heating is 1.0 × 10 ⁻⁴ to 1.0 × 10 ⁻² Pa. The temperature rise / heat retention time and temperature rise are as shown in the graph of FIG.
Subsequently, after maintaining the temperature in the furnace for a predetermined time (2 hours in the present test), when the diffusion temperature is (1) and (2), the temperature is lowered to 900 ° C., and then the diffusion temperature is (3) and In the case of (4), after the temperature is lowered to 1000 ° C., Ar gas is blown to cool the inside of the furnace. The temperature drop time and temperature drop are as shown in the graph of FIG.

The member to be joined 800 is as shown in FIG. 14D, and is configured by combining a box-shaped part 800a and a box-shaped part 800b. The two box-shaped parts 800a and 800b have the same shape, and are concave parts whose one surface is open as shown in FIGS. In each of the box-shaped parts 800a and 800b, the inner surface on the bottom surface is 60 mm long × 100 mm wide, and the inner surface on the top surface is 58 mm long × 98 mm wide. The height is 10 mm.
The member to be joined 800 is formed by stacking the box-shaped part 800a and the box-shaped part 800b so that the openings face the same side. The box-shaped part 800a and the box-shaped part 800b are arranged with their side surfaces in contact with each other. The abutting region 810 is formed in an annular shape continuously in the circumferential direction. This abutting region 810 is a region where diffusion bonding is performed.

The evaluation of diffusion bonding will be described. Diffusion bonding was evaluated by visually evaluating the oxidation state of the bonded portion. Specifically, the diffusion bonding property was evaluated as follows.
About each to-be-joined member diffusion-bonded by the side pushing jig for in-furnace diffusion bonding, after performing the heating test for 24 hours at 800 degreeC in air | atmosphere, each heated to-be-joined member was cut | disconnected and the oxidation state of a cut surface Was confirmed visually.
If the member to be joined is diffusion-bonded, the inside of the member to be joined is not oxidized because the vacuum is maintained, and the cut surface maintains a metallic luster. On the other hand, when the member to be bonded is not diffusion bonded, the bonded portion of the bonded member is oxidized, and the metallic luster is lost at the bonded portion.
Therefore, in the evaluation of diffusion bonding, the one where it was confirmed that the original metallic luster was maintained on the cut surface of the member to be joined was marked with ◯, and the original metallic luster was lost on the cut surface. Those confirmed to be present were marked with x.

The results are as shown in Table 3 of FIG.
When the temperatures were 1100 ° C. and 1200 ° C., all of Examples 1 to 3 were evaluated as “good”, and it was confirmed that the side surface of the box-type component can be suitably diffusion bonded by the side pressing jig for diffusion bonding in the furnace of the present invention. It was done.

  From the above results, according to the side pushing jig for diffusion bonding in the furnace in the embodiment, a load can be applied to the side surface of the member to be joined, so that diffusion bonding such as so-called hollow products can be suitably performed. I understood.

1, 1A, 100 Side press jig for diffusion bonding in furnace 10 Upper plate members 12A to 12N First engaged holes 14A to 14N First tapered portion 20 Lower plate members 22A to 22N Second engaged holes 24A to 24N 2nd taper part 30A-30N Post 32A-32N 1st engaging part 34A-32N 3rd taper part 36A-36N 2nd engaging part 38A-38N 4th taper part 40 Weight 50 Joined member 52 Upper surface 54 Side 70 Press Member A Furnace B Internal space

Claims (6)

It is arranged above the first member to be joined in the vertical direction,
A plurality of first engaged holes formed on the outer edge side of the lower surface;
A first tapered portion formed on a horizontal outer side surface of each of the plurality of first engaged holes, and inclined so as to go outward in the horizontal direction as it goes downward in the vertical direction. A first upper plate member;
The first member to be joined is disposed below in the vertical direction,
A plurality of second engaged holes formed on the outer edge side of the upper surface;
A second taper portion formed on the outer surface in the horizontal direction of each of the plurality of second engaged holes, and inclined so as to go outward in the horizontal direction as it goes upward in the vertical direction. A first lower plate member;
It is arranged between the first upper plate member and the first lower plate member and arranged in direct or indirect contact with the side surface of the first joined member,
A first engaging portion that engages with the first engaged hole;
A second engagement portion that engages with the second engaged hole;
A third tapered portion formed on a horizontal outer surface of the first engaging portion and slidably contacting the first tapered portion;
Side press for diffusion bonding in a furnace comprising a plurality of first support columns each having a fourth taper portion that is formed on a horizontal outer side surface of the second engagement portion and slidably contacts the second taper portion. jig. When a downward load in the vertical direction is applied to the first upper plate member,
The first taper portion applies a load for moving the first support column in the horizontal direction toward the first member to be bonded to the third taper portion,
2. The side pressurization for in-furnace diffusion bonding according to claim 1, wherein the second taper portion applies a load for moving the first support column toward the first member to be bonded in the horizontal direction with respect to the fourth taper portion. Ingredients. A first pressing member, all or part of which is disposed between the first upper plate member and the first joined member,
When a downward load in the vertical direction is applied to the first upper plate member,
The first pressing member applies a load to the upper surface of the first bonded member,
The side pushing jig for in-furnace diffusion bonding according to claim 1 or 2, wherein each of the plurality of first support columns applies a load to a side surface of the first member to be bonded. A second lower plate member disposed further below a second joined member disposed below the first lower plate member in the vertical direction;
A plurality of second struts disposed between the first lower plate member and the second lower plate member and disposed in direct or indirect contact with the side surface of the second joined member;
A second pressing member, all or part of which is disposed between the first lower plate member and the second joined member, and
The first lower plate member is
A plurality of third engaged holes formed on the outer edge side of the lower surface;
A fifth taper portion formed on the outer surface in the horizontal direction of the plurality of third engaged holes, and inclined so as to go outward in the horizontal direction as it goes downward in the vertical direction. And
The second lower plate member is
A plurality of fourth engaged holes formed on the outer edge side of the upper surface;
A sixth taper portion formed on a horizontal outer surface of the plurality of fourth engaged holes, and formed so as to be inclined outward in the horizontal direction toward the upper side in the vertical direction. ,
The plurality of second struts are
A third engagement portion that engages with the third engaged hole;
A fourth engagement portion that engages with the fourth engaged hole;
A seventh tapered portion that is formed on a horizontal outer surface of the third engaging portion and slidably contacts the fifth tapered portion;
The side pushing jig for diffusion bonding in a furnace according to claim 3, further comprising an eighth taper portion formed on a horizontal outer surface of the fourth engagement portion and slidably contacting the sixth taper portion. . When a downward load in the vertical direction is applied to the first upper plate member,
The second pressing member applies a load to the upper surface of the second bonded member,
Each of the plurality of second struts applies a load that causes the fifth tapered portion to move the second strut to the second joined member side in the horizontal direction with respect to the seventh tapered portion. The portion applies a load to the side surface of the second member to be bonded by applying a load that moves the second support column toward the second member to be bonded in the horizontal direction with respect to the eighth tapered portion. The side pressing jig for diffusion bonding in a furnace according to claim 4. The side pressing jig for in-furnace diffusion bonding according to any one of claims 1 to 5, wherein all or part thereof is made of a C / C composite or metal molybdenum.

Images