JP2016148403A - Fluid control unit - Google Patents

Fluid control unit Download PDF

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Publication number
JP2016148403A
JP2016148403A JP2015025577A JP2015025577A JP2016148403A JP 2016148403 A JP2016148403 A JP 2016148403A JP 2015025577 A JP2015025577 A JP 2015025577A JP 2015025577 A JP2015025577 A JP 2015025577A JP 2016148403 A JP2016148403 A JP 2016148403A
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Prior art keywords
plate member
flow path
fluid
control unit
downstream
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祐大 伊藤
Yudai Ito
祐大 伊藤
秀行 樽川
Hideyuki Tarukawa
秀行 樽川
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Goyo Electronics Co Ltd
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Goyo Electronics Co Ltd
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Priority to JP2015025577A priority Critical patent/JP2016148403A/en
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Abstract

PROBLEM TO BE SOLVED: To provide a fluid control unit capable of obviating the increase in a space for a joint member, and capable of obviating time and effort for attachment work of a fluid apparatus with respect to a fluid member, by dispensing with the joint member.SOLUTION: A fluid control unit 10 includes a plate unit 20 having a flow passage 21 through which fluid flows in an inside thereof in advance, and a fluid apparatus 50 operating with respect to the fluid flowing through the flow passage 21. The fluid control unit 10 further includes an attachment hole 70 which is arranged on the plate unit 20 in a state of being communicated with the outside and the flow passage 21, and into which the fluid apparatus 50 is inserted so that the fluid apparatus 50 is attached to the plate unit 20 in such a manner that the fluid apparatus 50 is brought into contact with the flow passage 21.SELECTED DRAWING: Figure 1B

Description

この発明は、流体制御ユニットに関する。   The present invention relates to a fluid control unit.

例えば特許文献1は、流体を制御する流体制御ユニットとして、特別な機器を要することなくかつ比較的簡易な構造で気圧を制御できるエレベータかご内の圧力調整システムを開示している。   For example, Patent Document 1 discloses a pressure adjustment system in an elevator car that can control the atmospheric pressure as a fluid control unit that controls fluid without requiring a special device and with a relatively simple structure.

一般的な流体制御ユニットは、流路部材と、流路部材を流れる流体に対して動作する流体用機器とを有している。
流路部材は、フレキシブルチューブや鋼管などを有する。
流体用機器は、例えば、バルブ、レギュレータ、圧力計測部材、流量計測計、電磁弁等を有している。流体用機器は、例えば、ねじやバンドなどの固定部材によって流路部材に固定されている。流路部材に固定された流体用機器は、流体の圧力や流量を調整し、調整した流体の圧力や流量を計測し、流体の流れを切り替えるといった、流体の制御を実施する流体制御機器として機能する。
A general fluid control unit includes a flow path member and a fluid device that operates on a fluid flowing through the flow path member.
The flow path member includes a flexible tube, a steel pipe, and the like.
The fluid device has, for example, a valve, a regulator, a pressure measurement member, a flow rate meter, a solenoid valve, and the like. The fluid device is fixed to the flow path member by a fixing member such as a screw or a band, for example. The fluid device fixed to the flow path member functions as a fluid control device that controls the fluid by adjusting the fluid pressure and flow rate, measuring the adjusted fluid pressure and flow rate, and switching the fluid flow. To do.

特開2008−260606号公報JP 2008-260606 A

流路部材が分岐している場合、流路部材同士を接続する継手部材が必要となる。分岐部分の数が増加するほど、継手部材の数は増加し、継手部材のためのスペースが増大する。そして流体用機器は流路部材毎に取り付ける必要があり、取付作業の手間が増加する。   When the flow path member is branched, a joint member for connecting the flow path members to each other is required. As the number of branch portions increases, the number of joint members increases and the space for the joint members increases. And the apparatus for fluids needs to be attached for every channel member, and the labor of attachment work increases.

このため本発明は、上記事情に鑑み、継手部材を省略することによって、継手部材のためのスペースの増大を解消でき、流路部材に対する流体用機器の取付作業の手間を解消できる流体制御ユニットを提供することを目的とする。   Therefore, in view of the above circumstances, the present invention provides a fluid control unit that can eliminate the increase in space for the joint member by omitting the joint member, and can eliminate the trouble of mounting the fluid device on the flow path member. The purpose is to provide.

本発明の流体制御ユニットの一態様は、流体が流れ、形状を予め規定され、複数に分岐された流路部を、予め内部に有する板ユニットと、前記流路部を流れる前記流体に対して動作する流体用機器と、外部と前記流路部とに連通した状態で前記板ユニットに配設され、前記流体用機器が前記流路部に接するように前記流体用機器を前記板ユニットに取り付けるために前記流体用機器が挿入される取付孔部と、を具備することを特徴とする。   One aspect of the fluid control unit of the present invention is that the fluid flows, the shape is defined in advance, a plate unit having a plurality of branched flow paths in advance, and the fluid flowing through the flow paths. The fluid device is attached to the plate unit so that the fluid device is disposed in communication with the fluid device and the outside and the flow path portion, and the fluid device is in contact with the flow path portion. And a mounting hole into which the fluid device is inserted.

本発明の流体制御ユニットの一態様は、前記流体用機器は、最も上流に配置される分岐部分よりも上流と、前記分岐部分よりも下流における各前記流路部と、最も下流に配置される前記分岐部分とに配置されることを特徴とする上記に記載の流体制御ユニット。   In one aspect of the fluid control unit of the present invention, the fluid device is disposed upstream of a branch portion disposed at the most upstream, each flow path portion downstream from the branch portion, and most downstream. The fluid control unit according to the above, wherein the fluid control unit is disposed at the branch portion.

本発明の流体制御ユニットの一態様は、前記流体用機器は、最も上流に配置される分岐部分と、前記分岐部分よりも下流における各前記流路部と、最も下流に配置される前記分岐部分よりも下流とに配置されることを特徴とする上記に記載の流体制御ユニット。     In one aspect of the fluid control unit of the present invention, the fluid device includes a branch portion arranged at the most upstream, each flow path portion downstream from the branch portion, and the branch portion arranged at the most downstream side. The fluid control unit according to the above, wherein the fluid control unit is disposed further downstream.

本発明の流体制御ユニットの一態様は、前記板ユニットは、溝部を有する板部材と、前記取付孔部を有し、前記取付孔部が前記溝部と連通するように前記板部材に載置されるカバー板部材と、を有し、前記流路部は、前記溝部が前記カバー板部材によって密閉されることによって形成されることを特徴とする上記に記載の流体制御ユニット。   In one aspect of the fluid control unit of the present invention, the plate unit includes a plate member having a groove portion and the attachment hole portion, and is placed on the plate member so that the attachment hole portion communicates with the groove portion. The fluid control unit according to the above, wherein the flow path portion is formed by sealing the groove portion with the cover plate member.

本発明の流体制御ユニットの一態様は、前記板部材は、複数配設され、第1板部材には前記カバー板部材が載置され、前記第1板部材は、第2板部材の第2溝部を密閉するように前記第2板部材に載置され、前記流路部は、前記第1板部材の第1溝部が前記カバー板部材によって密閉されることと前記第2板部材の前記第2溝部が前記第1板部材によって密閉されることとによって形成され、前記第1板部材の前記第1溝部と前記カバー板部材とによって形成される第1流路部が前記第2溝部と前記第1板部材とによって形成される第2流路部と連通するように、前記第1板部材は、前記第1流路部と前記第2流路部とに連通する第1連通孔部をさらに有することを特徴とする上記に記載の流体制御ユニット。   In one aspect of the fluid control unit of the present invention, a plurality of the plate members are arranged, the cover plate member is placed on the first plate member, and the first plate member is a second plate member. The channel portion is placed on the second plate member so as to seal the groove portion, and the flow path portion is configured such that the first groove portion of the first plate member is sealed by the cover plate member and the second plate member is closed. Two groove portions are formed by being sealed by the first plate member, and a first flow path portion formed by the first groove portion and the cover plate member of the first plate member is the second groove portion and the The first plate member has a first communication hole portion communicating with the first flow channel portion and the second flow channel portion so as to communicate with a second flow channel portion formed by the first plate member. The fluid control unit according to the above, further comprising:

本発明の流体制御ユニットの一態様は、前記第2板部材は、第3板部材の第3溝部を密閉するように前記第3板部材に載置され、前記流路部は、前記第3板部材の前記第3溝部が前記第2板部材によって密閉されることによってさらに形成され、前記第2流路部が前記第3溝部と前記第2板部材とによって形成される第3流路部と連通するように、前記第2板部材は、前記第2流路部と前記第3流路部とに連通する第2連通孔部をさらに有することを特徴とする上記に記載の流体制御ユニット。   In one aspect of the fluid control unit of the present invention, the second plate member is placed on the third plate member so as to seal the third groove portion of the third plate member, and the flow path portion is the third plate member. The third groove portion of the plate member is further formed by being sealed by the second plate member, and the second flow channel portion is formed by the third groove portion and the second plate member. The fluid control unit according to the above, wherein the second plate member further includes a second communication hole portion communicating with the second flow path portion and the third flow path portion so as to communicate with the second flow path portion. .

本発明の流体制御ユニットの一態様は、前記連通孔部の周囲に配設され、前記連通孔部の水密を確保する水密確保部材をさらに具備することを特徴とする上記に記載の流体制御ユニット。   One aspect of the fluid control unit of the present invention further includes a water tightness securing member that is disposed around the communication hole portion and secures water tightness of the communication hole portion. .

本発明の流体制御ユニットの一態様は、前記板ユニットと前記取付孔部とは、3Dプリンタによって形成されることを特徴とする上記に記載の流体制御ユニット。   In one aspect of the fluid control unit of the present invention, the plate unit and the mounting hole are formed by a 3D printer.

本発明によれば、継手部材を省略することによって、継手部材のためのスペースの増大を解消でき、流路部材に対する流体用機器の取付作業の手間を解消できる流体制御ユニットを提供することができる。   According to the present invention, by omitting the joint member, it is possible to provide a fluid control unit that can eliminate an increase in space for the joint member and can eliminate the trouble of attaching the fluid device to the flow path member. .

図1Aは、本発明の第1の実施形態に係る流体制御ユニットの斜視図である。FIG. 1A is a perspective view of a fluid control unit according to the first embodiment of the present invention. 図1Bは、図1Aに示す流体制御ユニットの分解斜視図である。FIG. 1B is an exploded perspective view of the fluid control unit shown in FIG. 1A. 図2Aは、本発明の第2の実施形態に係る流体制御ユニットの分解斜視図である。FIG. 2A is an exploded perspective view of a fluid control unit according to the second embodiment of the present invention. 図2Bは、第2の実施形態の変形例に係る流体制御ユニットの分解斜視図である。FIG. 2B is an exploded perspective view of a fluid control unit according to a modification of the second embodiment. 図3は、本発明の第3の実施形態に係る流体制御ユニットの斜視図である。FIG. 3 is a perspective view of a fluid control unit according to the third embodiment of the present invention.

以下、図面を参照して本発明の実施形態について詳細に説明する。
[第1の実施形態]
[構成]
図1Aと図1Bとを参照して、第1の実施形態について説明する。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[First Embodiment]
[Constitution]
The first embodiment will be described with reference to FIGS. 1A and 1B.

[流体制御ユニット10]
図1Aと図1Bとに示すように、流体制御ユニット10は、流体が流れ、形状を予め規定され、複数に分岐された流路部21を予め内部に有する板ユニット20と、流路部21を流れる流体に対して動作する流体用機器50とを有している。流体制御ユニット10は、外部と流路部21とに連通した状態で板ユニット20に配設される取付孔部70をさらに有している。取付孔部70には、流体用機器50が流路部21に接するように流体用機器50が板ユニット20に取り付けられるために、流体用機器50が挿入される。
[Fluid control unit 10]
As shown in FIG. 1A and FIG. 1B, the fluid control unit 10 includes a plate unit 20 having a fluid flow, a shape that is defined in advance, and a flow path 21 that is branched into a plurality, and a flow path 21. And a fluid device 50 that operates on fluid flowing through the fluid. The fluid control unit 10 further includes a mounting hole 70 disposed in the plate unit 20 in a state where the fluid control unit 10 communicates with the outside and the flow path portion 21. The fluid device 50 is inserted into the mounting hole portion 70 so that the fluid device 50 is attached to the plate unit 20 so that the fluid device 50 contacts the flow path portion 21.

[板ユニット20・流路部21・取付孔部70]
図1Aと図1Bとに示すように、板ユニット20は、溝部31を有する板部材30と、取付孔部70を有し、取付孔部70が溝部31と連通するように板部材30に載置されるカバー板部材40とを有している。板部材30とカバー板部材40とは、例えばステンレスなどの金属材によって形成されている。板部材30とカバー板部材40とは、互いに同じ材質の部材によって形成されていることが好ましい。板部材30は例えば厚板部材であり、カバー板部材40は薄板部材である。
[Plate unit 20, channel 21 and mounting hole 70]
As shown in FIGS. 1A and 1B, the plate unit 20 has a plate member 30 having a groove portion 31 and an attachment hole portion 70, and is mounted on the plate member 30 so that the attachment hole portion 70 communicates with the groove portion 31. And a cover plate member 40 to be placed. The plate member 30 and the cover plate member 40 are formed of a metal material such as stainless steel, for example. The plate member 30 and the cover plate member 40 are preferably formed of members made of the same material. The plate member 30 is, for example, a thick plate member, and the cover plate member 40 is a thin plate member.

図1Bに示すように、溝部31は、カバー板部材40に対向する板部材30の上面から板部材30の下面に向かって窪んでいる。溝部31は、板部材30の厚み方向において板部材30を貫通していない。溝部31は、例えば切削などによって形成される。   As shown in FIG. 1B, the groove 31 is recessed from the upper surface of the plate member 30 facing the cover plate member 40 toward the lower surface of the plate member 30. The groove portion 31 does not penetrate the plate member 30 in the thickness direction of the plate member 30. The groove 31 is formed by cutting or the like, for example.

図1Aと図1Bとに示すように、流路部21は、溝部31がカバー板部材40によって密閉されることによって形成される。このため板ユニット20は、流路部材として機能する。密閉性が確保されるように、板部材30はカバー板部材40に例えばロウなどによって取り付けられている。本実施形態では、流路部21の断面形状は溝部31の断面形状によって予め規定され、流路部21全体の形状は溝部31全体の形状によって予め規定され、溝部31は予め形状を規定されている。流路部21の断面形状や流路部21全体の形状は、特に限定されない。   As shown in FIGS. 1A and 1B, the flow path portion 21 is formed by sealing the groove portion 31 with a cover plate member 40. For this reason, the plate unit 20 functions as a flow path member. The plate member 30 is attached to the cover plate member 40 by, for example, wax so as to ensure hermeticity. In the present embodiment, the cross-sectional shape of the flow channel portion 21 is defined in advance by the cross-sectional shape of the groove portion 31, the overall shape of the flow channel portion 21 is pre-defined by the shape of the entire groove portion 31, and the groove portion 31 is pre-defined in shape. Yes. The cross-sectional shape of the flow path part 21 and the shape of the entire flow path part 21 are not particularly limited.

図1Aと図1Bとに示すように、流路部21(溝部31)は上流から下流に向かって複数に分岐しており、分岐部分23が存在する。分岐部分23の数は、特に限定されない。   As shown in FIG. 1A and FIG. 1B, the flow path portion 21 (groove portion 31) is branched into a plurality from the upstream toward the downstream, and the branch portion 23 exists. The number of branch portions 23 is not particularly limited.

図1Aと図1Bとに示すように、流路部21の上流部は例えば1つ配設され、流路部21の下流部は分岐部分23によって例えば複数配設される。上流部には流路部21に連通した状態で上流側継手部材25が例えば1つ配設され、各下流部には流路部21に連通した状態で下流側継手部材27が配設されている。上流側継手部材25と下流側継手部材27とは、例えば口金部材などの筒状部材を有しており、板ユニット20の外部において板ユニット20に取り付けられている。上流側継手部材25は、流体を流路部21に供給する図示しない供給源を流路部21に連結する。上流側継手部材25は、供給源に連結している例えばチューブなどの図示しない流路部材を流路部21に連結してもよい。下流側継手部材27は、例えばチューブなどの図示しない流路部材を流路部21に連結する。この流路部材は、流体の供給先と連結している。   As shown in FIGS. 1A and 1B, for example, one upstream portion of the flow path portion 21 is disposed, and a plurality of downstream portions of the flow path portion 21 are disposed by the branch portions 23, for example. For example, one upstream joint member 25 is disposed in the upstream portion in communication with the flow passage portion 21, and a downstream joint member 27 is disposed in each downstream portion in communication with the flow passage portion 21. Yes. The upstream joint member 25 and the downstream joint member 27 have a cylindrical member such as a cap member, and are attached to the plate unit 20 outside the plate unit 20. The upstream joint member 25 connects a supply source (not shown) that supplies fluid to the flow path portion 21 to the flow path portion 21. The upstream joint member 25 may connect a flow path member (not shown) such as a tube connected to a supply source to the flow path portion 21. The downstream joint member 27 connects a flow path member (not shown) such as a tube to the flow path portion 21. This flow path member is connected to a fluid supply destination.

図1Aと図1Bとに示すように、取付孔部70を有するカバー板部材40は、流体用機器50を流路部21に取り付ける取付板部材である。取付孔部70は、カバー板部材40の厚み方向においてカバー板部材40を貫通している。取付孔部70は、流路部21の位置に対応して配設される。言い換えると、取付孔部70は、カバー板部材40が板部材30に取り付けられた際に、流路部21と連通するようにカバー板部材40に配設される。取付孔部70は、流体用機器50と同数配設されている。   As shown in FIGS. 1A and 1B, the cover plate member 40 having the attachment hole portion 70 is an attachment plate member for attaching the fluid device 50 to the flow path portion 21. The attachment hole 70 penetrates the cover plate member 40 in the thickness direction of the cover plate member 40. The attachment hole portion 70 is disposed corresponding to the position of the flow path portion 21. In other words, the attachment hole portion 70 is disposed in the cover plate member 40 so as to communicate with the flow path portion 21 when the cover plate member 40 is attached to the plate member 30. The same number of attachment holes 70 as the fluid device 50 are provided.

[流体用機器50]
図1Aと図1Bとに示すように、流体用機器50は、流体用機器50が取付孔部70に係合することによって、板ユニット20に取り付けられる。流体用機器50は、取付孔部70に対して着脱自在であり、取付孔部70に対して挿抜可能となっている。
[Fluid device 50]
As shown in FIGS. 1A and 1B, the fluid device 50 is attached to the plate unit 20 by the fluid device 50 engaging with the attachment hole 70. The fluid device 50 is detachable from the attachment hole 70 and can be inserted into and removed from the attachment hole 70.

図1Aと図1Bとに示すような流体用機器50は、流体に対して開閉、調整、計測、切り換えといった動作を実施し、流体の制御を実施する流体制御機器として機能する。このため流体用機器50は、流路部21を開閉するバルブを有する開閉部材50aと、流体の圧力及び流量を調整するレギュレータを有する調整部材50bとを有している。流体用機器50は、流体の圧力を計測する圧力計測部材50cと、流体の流量を計測する流量計測部材50dと、流体の流れを切り替える電磁弁を有する切換部50eとをさらに有している。   A fluid device 50 as shown in FIG. 1A and FIG. 1B functions as a fluid control device that controls the fluid by performing operations such as opening / closing, adjustment, measurement, and switching with respect to the fluid. For this reason, the fluid device 50 includes an opening / closing member 50a having a valve for opening / closing the flow path portion 21, and an adjusting member 50b having a regulator for adjusting the pressure and flow rate of the fluid. The fluid device 50 further includes a pressure measuring member 50c that measures the pressure of the fluid, a flow rate measuring member 50d that measures the flow rate of the fluid, and a switching unit 50e that includes an electromagnetic valve that switches the flow of the fluid.

図1Aと図1Bとに示すように、開閉部材50aと調整部材50bと圧力計測部材50cと流量計測部材50dと切換部50eとは、この順番で、流路部21の上流(上流側継手部材25)から下流(下流側継手部材27)に向かって配置されている。開閉部材50aは、最も上流に配置される分岐部分23よりも上流に配置されている。調整部材50bと圧力計測部材50cと流量計測部材50dとは、最も上流に配置される分岐部分23よりも下流における各流路部21に配置されている。切換部50eは、最も下流に配置される分岐部分23に配置されている。   As shown in FIGS. 1A and 1B, the opening / closing member 50a, the adjusting member 50b, the pressure measuring member 50c, the flow rate measuring member 50d, and the switching unit 50e are arranged in this order in the upstream (upstream joint member). 25) toward the downstream (downstream joint member 27). The opening / closing member 50a is arranged upstream of the branch portion 23 arranged most upstream. The adjustment member 50b, the pressure measurement member 50c, and the flow rate measurement member 50d are disposed in each flow path portion 21 downstream of the branch portion 23 disposed on the most upstream side. The switching part 50e is arrange | positioned at the branch part 23 arrange | positioned most downstream.

[作用]
図1Aと図1Bとに示すように、本実施形態では、板ユニット20は、形状を予め規定され、複数に分岐された流路部21(溝部31)を予め内部に有している。このため、分岐部分23の数が増加しても、継手部材は不要となる。よって継手部材の増加によって、継手部材のためのスペースの増大は解消される。流体用機器50は、取付孔部70に挿し込まれるだけ、簡単に流路部21に取り付けられる。よって取付作業の手間は解消する。
[Action]
As shown in FIG. 1A and FIG. 1B, in this embodiment, the plate unit 20 has a predefined flow path portion 21 (groove portion 31) that is branched into a plurality of portions. For this reason, even if the number of the branch parts 23 increases, a joint member becomes unnecessary. Therefore, the increase in the space for the joint member is eliminated by the increase in the joint member. The fluid device 50 is simply attached to the flow path portion 21 by being inserted into the attachment hole portion 70. Therefore, the labor of installation work is eliminated.

[効果]
本実施形態では、板ユニット20は、形状を予め規定され、複数に分岐された流路部21(溝部31)を予め内部に有している。このため、分岐部分23の数が増加しても、継手部材は不要にできる。よって継手部材の増加によって、継手部材のためのスペースの増大を解消できる。流体用機器50を、取付孔部70に挿し込むだけ、簡単に流路部21に取り付けることができる。よって取付作業の手間を解消できる。
[effect]
In the present embodiment, the plate unit 20 has a predetermined shape in advance and has a flow path portion 21 (groove portion 31) branched into a plurality in advance. For this reason, even if the number of the branch parts 23 increases, a joint member can be made unnecessary. Therefore, the increase in the space for a joint member can be eliminated by the increase in a joint member. The fluid device 50 can be easily attached to the flow path portion 21 simply by being inserted into the attachment hole portion 70. Therefore, the trouble of installation work can be eliminated.

本実施形態では、継手部材は不要のため、継手部材を取り付ける作業スペースの確保を不要にできる。流路部21は、切削によって形成される溝部31を用いる。このため、流路部材として機能するチューブや配管などの曲げを考慮する必要がなく、流路部21自体に対して省スペース化を実施できる。   In this embodiment, since a joint member is unnecessary, it is possible to eliminate the need for securing a work space for attaching the joint member. The channel portion 21 uses a groove portion 31 formed by cutting. For this reason, it is not necessary to consider bending of a tube or piping that functions as a flow path member, and space can be saved for the flow path portion 21 itself.

本実施形態では、流体制御ユニット10において予め1本の流路部21が形成されており、流体制御ユニット10においてチューブや配管など流路部材同士の接続を不要にできる。このため、接続部分において流体がリークすることを防止でき、流体制御ユニット10に対する品質の信頼性を向上できる。   In the present embodiment, one flow path portion 21 is formed in advance in the fluid control unit 10, and connection between flow path members such as tubes and piping can be made unnecessary in the fluid control unit 10. For this reason, it is possible to prevent the fluid from leaking at the connection portion, and to improve the reliability of the quality of the fluid control unit 10.

本実施形態では、継手部材を不要にできるため、継手部材の取付工数や継手部材の配置位置における流体のリークチェック工数を削減できる。   In the present embodiment, since the joint member can be made unnecessary, it is possible to reduce the number of man-hours for installing the joint member and the number of steps for checking the fluid leak at the position where the joint member is disposed.

本実施形態では、継手部材を不要にできるため、圧力損失を低減でき、流体の送出エネルギーを削減できる。本実施形態では、流路部21における流路を短くでき、圧力損失の低減に寄与できる。   In this embodiment, since a joint member can be dispensed with, pressure loss can be reduced and fluid delivery energy can be reduced. In the present embodiment, the flow path in the flow path section 21 can be shortened, which can contribute to a reduction in pressure loss.

本実施形態では、流体制御ユニット10において、継手部材や流路部材として機能するチューブや配管を不要にでき、流路部21を少ない部品で構成でき、所望するクリーン度を容易に維持できる。   In the present embodiment, the fluid control unit 10 can eliminate the need for tubes and pipes that function as joint members and flow path members, and the flow path portion 21 can be configured with a small number of components, and the desired cleanliness can be easily maintained.

本実施形態では、板部材30が厚板部材であるため、溝部31の深さを予め調整でき、流路部21における流路面積を事前に可変できる。カバー板部材40が薄板部材であるため、取付孔部70を容易に製作でき、流体用機器50を容易に流路部21に接せさせることができる。   In this embodiment, since the plate member 30 is a thick plate member, the depth of the groove portion 31 can be adjusted in advance, and the flow channel area in the flow channel portion 21 can be varied in advance. Since the cover plate member 40 is a thin plate member, the attachment hole portion 70 can be easily manufactured, and the fluid device 50 can be easily brought into contact with the flow path portion 21.

なお本実施形態では、流体は、上流側継手部材25から下流側継手部材27に向かって流れ、上流から下流に分配されているが、これに限定される必要はない。上流と下流とが互いに逆であってもよく、この場合、流体は、下流側継手部材27から上流側継手部材25に向かって流れ、上流から下流に向かって集結されることとなる。
この場合、切換部50eは、最も上流に配置される分岐部分23に配置される。調整部材50bと圧力計測部材50cと流量計測部材50dとは、最も上流に配置される分岐部分23よりも下流における各流路部21に配置されている。開閉部材50aは、最も下流に配置される分岐部分23よりも下流に配置されている。
このように流体用機器50は、最も上流に配置される分岐部分23と、最も上流に配置される分岐部分23よりも下流における各流路部21と、最も下流に配置される分岐部分23よりも下流とに配置されることとなる。
In this embodiment, the fluid flows from the upstream joint member 25 toward the downstream joint member 27 and is distributed from the upstream side to the downstream side. However, the present invention is not limited to this. The upstream side and the downstream side may be opposite to each other. In this case, the fluid flows from the downstream side joint member 27 toward the upstream side joint member 25 and is concentrated from the upstream side to the downstream side.
In this case, the switching part 50e is arrange | positioned at the branch part 23 arrange | positioned most upstream. The adjustment member 50b, the pressure measurement member 50c, and the flow rate measurement member 50d are disposed in each flow path portion 21 downstream of the branch portion 23 disposed on the most upstream side. The opening / closing member 50a is arranged downstream of the branch portion 23 arranged most downstream.
As described above, the fluid device 50 includes the branch portion 23 disposed at the most upstream, the flow path portions 21 downstream from the branch portion 23 disposed at the most upstream, and the branch portion 23 disposed at the most downstream. Will also be arranged downstream.

[第2の実施形態]
[構成]
図2Aを参照して、第2の実施形態について説明する。本実施形態では、第1の実施形態とは異なる点のみ記載する。本実施形態の板ユニット20及び流路部21の構成は、第1の実施形態の板ユニット20及び流路部21の構成とは異なる。
[Second Embodiment]
[Constitution]
A second embodiment will be described with reference to FIG. 2A. In the present embodiment, only points different from the first embodiment will be described. The configuration of the plate unit 20 and the flow path portion 21 of the present embodiment is different from the configuration of the plate unit 20 and the flow path portion 21 of the first embodiment.

本実施形態では、板部材30は、複数(例えば2枚)配設されている。
以下において、便宜上、第1板部材30a、第2板部材30bと称する。
第1板部材30aに配設される流路部21と分岐部分23と溝部31とを、第1流路部21aと第1分岐部分23aと第1溝部31aと称する。
第2板部材30bに配設される流路部21と分岐部分23と溝部31とを、第2流路部21bと第2分岐部分23bと第2溝部31bと称する。
In the present embodiment, a plurality of (for example, two) plate members 30 are arranged.
Hereinafter, for convenience, they are referred to as a first plate member 30a and a second plate member 30b.
The flow path part 21, the branch part 23, and the groove part 31 disposed on the first plate member 30a are referred to as a first flow path part 21a, a first branch part 23a, and a first groove part 31a.
The flow path part 21, the branch part 23, and the groove part 31 disposed on the second plate member 30b are referred to as a second flow path part 21b, a second branch part 23b, and a second groove part 31b.

図2Aに示すように、第1板部材30aにはカバー板部材40が載置され、第1板部材30aは、第2板部材30bの第2溝部31bを密閉するように第2板部材30bに載置される。第1板部材30aと第2板部材30bとは、例えばステンレスなどの金属材によって形成されている。第1板部材30aと第2板部材30bとは、互いに同じ材質の部材によって形成されていることが好ましい。第1板部材30aと第2板部材30bとは、厚板部材である。   As shown in FIG. 2A, a cover plate member 40 is placed on the first plate member 30a, and the first plate member 30a seals the second groove portion 31b of the second plate member 30b. Placed on. The first plate member 30a and the second plate member 30b are formed of a metal material such as stainless steel. The first plate member 30a and the second plate member 30b are preferably formed of members of the same material. The first plate member 30a and the second plate member 30b are thick plate members.

図2Aに示すように、流路部21において、第1流路部21aは第1板部材30aの第1溝部31aがカバー板部材40によって密閉されることによって形成され、第2流路部21bは第2板部材30bの第2溝部31bが第1板部材30aによって密閉されることとによって形成される。第1板部材30aの第1溝部31aとカバー板部材40とによって形成される第1流路部21aは、第2溝部31bと第1板部材30aとによって形成される第2流路部21bとは板ユニット20の厚み方向において異なる位置に配設されており、第2流路部21bとは別体である。第1流路部21aの密閉性が確保されるように、第1板部材30aはカバー板部材40に例えばロウなどによって取り付けられる。第2流路部21bの密閉性が確保されるように、第1板部材30aは第2板部材30bに例えばロウなどによって取り付けられる。   As shown in FIG. 2A, in the flow path part 21, the first flow path part 21a is formed by sealing the first groove part 31a of the first plate member 30a by the cover plate member 40, and the second flow path part 21b. Is formed by sealing the second groove 31b of the second plate member 30b with the first plate member 30a. The first flow path portion 21a formed by the first groove portion 31a of the first plate member 30a and the cover plate member 40 is the second flow path portion 21b formed by the second groove portion 31b and the first plate member 30a. Are disposed at different positions in the thickness direction of the plate unit 20, and are separate from the second flow path portion 21b. The first plate member 30a is attached to the cover plate member 40 by, for example, wax so that the first flow path portion 21a is sealed. The first plate member 30a is attached to the second plate member 30b by, for example, brazing or the like so that the hermeticity of the second flow path portion 21b is ensured.

図2Aに示すように、第1流路部21aは上流から下流に向かって複数に分岐しており、第1分岐部分23aが存在する。第2流路部21bは上流から下流に向かって複数に分岐しており、第2分岐部分23bが存在する。第1分岐部分23aの位置は、第2分岐部分23bの位置に対してずれて配設されていてもよい。   As shown in FIG. 2A, the first flow path portion 21a is branched into a plurality from the upstream to the downstream, and the first branch portion 23a exists. The second flow path portion 21b is branched into a plurality from the upstream to the downstream, and the second branch portion 23b exists. The position of the first branch portion 23a may be shifted from the position of the second branch portion 23b.

図2Aに示すように、第1流路部21aの上流部と第2流路部21bの上流部とは、互いに別体であり1つ配設されている。これら上流部には、各流路部21に連通した状態で上流側継手部材25が例えば1つ配設されている。また各上流部の位置は、板ユニット20の平面方向においてずれて配設されていてもよい。   As shown in FIG. 2A, the upstream portion of the first flow path portion 21a and the upstream portion of the second flow path portion 21b are separate from each other and are arranged one by one. For example, one upstream joint member 25 is disposed in these upstream portions in communication with each flow path portion 21. Further, the positions of the respective upstream portions may be shifted from each other in the plane direction of the plate unit 20.

図2Aに示すように、第1流路部21aの下流部と第2流路部21bの下流部とは、互いに別体であり複数配設されている。   As shown in FIG. 2A, the downstream part of the first flow path part 21a and the downstream part of the second flow path part 21b are separate from each other and are arranged in plural.

図2Aに示すように、本実施形態では、第1板部材30aの第1溝部31aとカバー板部材40とによって形成される第1流路部21aが第2溝部31bと第1板部材30aとによって形成される第2流路部21bと連通するように、第1板部材30aは、第1流路部21aと第2流路部21bとに連通する第1連通孔部32aをさらに有している。第1連通孔部32aは、第1板部材30aの厚み方向において第1板部材30aを貫通し、第1流路部21aと第2流路部21bとに連通している。第1連通孔部32aは、例えば、最も下流に配置される分岐部分23a付近における第1流路部21aと第2流路部21bの下流部とに連通する。   As shown in FIG. 2A, in the present embodiment, the first flow path portion 21a formed by the first groove portion 31a of the first plate member 30a and the cover plate member 40 is replaced by the second groove portion 31b and the first plate member 30a. The first plate member 30a further includes a first communication hole portion 32a communicating with the first flow channel portion 21a and the second flow channel portion 21b so as to communicate with the second flow channel portion 21b formed by ing. The first communication hole portion 32a penetrates the first plate member 30a in the thickness direction of the first plate member 30a and communicates with the first flow path portion 21a and the second flow path portion 21b. The first communication hole portion 32a communicates with, for example, the first flow path portion 21a and the downstream portion of the second flow path portion 21b in the vicinity of the branch portion 23a arranged on the most downstream side.

図2Aに示すように、流体制御ユニット10は、第1連通孔部32aの周囲に配設され、第1連通孔部32aの水密を確保するOリングなどの第1水密確保部材90aをさらに有している。本実施形態では、第1水密確保部材90aは、第1連通孔部32aと第2流路部21bの下流部との接続部分に配設されており、第1板部材30aと第2板部材30bとの間に配設されている。第1流路部21aの各下流部には、各流路部21に連通した状態で下流側継手部材27が配設されている。   As shown in FIG. 2A, the fluid control unit 10 further includes a first water-tightness securing member 90a such as an O-ring that is disposed around the first communication hole 32a and secures the water-tightness of the first communication hole 32a. doing. In the present embodiment, the first water tightness securing member 90a is disposed at a connection portion between the first communication hole portion 32a and the downstream portion of the second flow path portion 21b, and the first plate member 30a and the second plate member. 30b. A downstream joint member 27 is disposed in each downstream portion of the first flow path portion 21 a in a state of communicating with each flow path portion 21.

本実施形態では、取付孔部70は、第1流路部21aの位置に対応して配設される。   In the present embodiment, the attachment hole portion 70 is disposed corresponding to the position of the first flow path portion 21a.

本実施形態では、第2流路部21bは、第1連通孔部32aを介して第1流路部21aと一体となる。   In the present embodiment, the second flow path portion 21b is integrated with the first flow path portion 21a via the first communication hole portion 32a.

[効果]
本実施形態では、第1流路部21aと第2流路部21bとが配設されていても、第1の実施形態と同様の効果を得ることができる。また板部材30が複数配設されていても、第1水密確保部材90によって、板部材30同士における水密を確実に確保できる。
[effect]
In the present embodiment, even if the first flow path portion 21a and the second flow path portion 21b are provided, the same effect as in the first embodiment can be obtained. Even if a plurality of plate members 30 are provided, the first water-tightness securing member 90 can reliably secure the water-tightness between the plate members 30.

なお本実施形態では、流体は、上流側継手部材25から下流側継手部材27に向かって流れ、上流から下流に分配されているが、これに限定される必要はない。上流と下流とが互いに逆であってもよく、この場合、流体は、下流側継手部材27から上流側継手部材25に向かって流れ、上流から下流に向かって集結されることとなる。   In this embodiment, the fluid flows from the upstream joint member 25 toward the downstream joint member 27 and is distributed from the upstream side to the downstream side. However, the present invention is not limited to this. The upstream side and the downstream side may be opposite to each other. In this case, the fluid flows from the downstream side joint member 27 toward the upstream side joint member 25 and is concentrated from the upstream side to the downstream side.

[変形例]
本実施形態では、板部材30は2枚配設されているが、これに限定される必要はない。図2Bに示すように、板部材30は3枚配設されていてもよく、各板部材30に流路部21が形成されていればよい。
以下において、便宜上、第1板部材30a、第2板部材30bと称する。
第1板部材30aに配設される流路部21と分岐部分23と溝部31とを、第1流路部21aと第1分岐部分23aと第1溝部31aと称する。
第2板部材30bに配設される流路部21と分岐部分23と溝部31とを、第2流路部21bと第2分岐部分23bと第2溝部31bと称する。
第3板部材30cに配設される流路部21と分岐部分23と溝部31とを、第3流路部21cと第3分岐部分23cと第3溝部31cと称する。
[Modification]
In the present embodiment, two plate members 30 are provided, but it is not necessary to be limited to this. As shown in FIG. 2B, three plate members 30 may be disposed, and it is only necessary that the flow path portion 21 is formed in each plate member 30.
Hereinafter, for convenience, they are referred to as a first plate member 30a and a second plate member 30b.
The flow path part 21, the branch part 23, and the groove part 31 disposed on the first plate member 30a are referred to as a first flow path part 21a, a first branch part 23a, and a first groove part 31a.
The flow path part 21, the branch part 23, and the groove part 31 disposed on the second plate member 30b are referred to as a second flow path part 21b, a second branch part 23b, and a second groove part 31b.
The flow path part 21, the branch part 23, and the groove part 31 disposed in the third plate member 30c are referred to as a third flow path part 21c, a third branch part 23c, and a third groove part 31c.

図2Bに示すように、第2板部材30bは、第3板部材30cの第3溝部31cを密閉するように第3板部材30cに載置される。第3流路部21cは、第3板部材30cの第3溝部31cが第2板部材30bによって密閉されることによって形成される。第2流路部21bが第3溝部31cと第2板部材30bとによって形成される第3流路部21cと連通するように、第2板部材30bは、第2流路部21bと第3流路部21cとに連通する第2連通孔部32bをさらに有する。第1水密確保部材90aと同様に、第2水密確保部材90bは、第2連通孔部32b周辺に配設される。   As shown in FIG. 2B, the second plate member 30b is placed on the third plate member 30c so as to seal the third groove 31c of the third plate member 30c. The third flow path portion 21c is formed by sealing the third groove portion 31c of the third plate member 30c with the second plate member 30b. The second plate member 30b is connected to the second flow channel portion 21b and the third flow channel so that the second flow channel portion 21b communicates with the third flow channel portion 21c formed by the third groove portion 31c and the second plate member 30b. It further has the 2nd communicating hole part 32b connected to the flow-path part 21c. Similar to the first water-tightness securing member 90a, the second water-tightness securing member 90b is disposed around the second communication hole portion 32b.

[第3の実施形態]
[構成]
図3を参照して、第3の実施形態について説明する。本実施形態では、第1の実施形態とは異なる点のみ記載する。本実施形態の板ユニット20は、第1の実施形態の板ユニット20の構成とは異なる。
[Third Embodiment]
[Constitution]
A third embodiment will be described with reference to FIG. In the present embodiment, only points different from the first embodiment will be described. The plate unit 20 of the present embodiment is different from the configuration of the plate unit 20 of the first embodiment.

板ユニット20は、非金属材料、例えば樹脂材によって形成される。この場合、板ユニット20と取付孔部70とは、流路部21と分岐部分23とが形成されるように、例えば3Dプリンタなどで形成されていてもよい。   The plate unit 20 is formed of a non-metallic material such as a resin material. In this case, the plate unit 20 and the mounting hole portion 70 may be formed by, for example, a 3D printer so that the flow path portion 21 and the branch portion 23 are formed.

[効果]
本実施形態では、カバー板部材40を板部材30にロウなどによって取り付ける必要がなく、流路部21が予め形成されるため流路部21における漏れを防止でき、簡単に流体制御ユニット10を製造できる。
[effect]
In the present embodiment, it is not necessary to attach the cover plate member 40 to the plate member 30 by soldering or the like, and since the flow channel portion 21 is formed in advance, leakage in the flow channel portion 21 can be prevented, and the fluid control unit 10 is easily manufactured. it can.

なお本実施形態では、流体は、上流側継手部材25から下流側継手部材27に向かって流れ、上流から下流に分配されているが、これに限定される必要はない。上流と下流とが互いに逆であってもよく、この場合、流体は、下流側継手部材27から上流側継手部材25に向かって流れ、上流から下流に向かって集結されることとなる。   In this embodiment, the fluid flows from the upstream joint member 25 toward the downstream joint member 27 and is distributed from the upstream side to the downstream side. However, the present invention is not limited to this. The upstream side and the downstream side may be opposite to each other. In this case, the fluid flows from the downstream side joint member 27 toward the upstream side joint member 25 and is concentrated from the upstream side to the downstream side.

この発明は、上記実施形態そのままに限定されるものではなく、実施段階ではその要旨を逸脱しない範囲で構成要素を変形して具体化できる。また、上記実施形態に開示されている複数の構成要素の適宜な組み合せにより種々の発明を形成できる。例えば、実施形態に示される全構成要素から幾つかの構成要素を削除してもよい。さらに、異なる実施形態に亘る構成要素を適宜組み合せてもよい。   The present invention is not limited to the above-described embodiments as they are, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.

10…流体制御ユニット、20…板ユニット、21…流路部、30…板部材、31…溝部、40…カバー板部材、50…流体用機器、70…取付孔部。   DESCRIPTION OF SYMBOLS 10 ... Fluid control unit, 20 ... Plate unit, 21 ... Channel part, 30 ... Plate member, 31 ... Groove part, 40 ... Cover plate member, 50 ... Equipment for fluid, 70 ... Mounting hole part.

Claims (5)

流体が流れ、形状を予め規定され、複数に分岐された流路部を、予め内部に有する板ユニットと、
前記流路部を流れる前記流体に対して動作する流体用機器と、
外部と前記流路部とに連通した状態で前記板ユニットに配設され、前記流体用機器が前記流路部に接するように前記流体用機器を前記板ユニットに取り付けるために前記流体用機器が挿入される取付孔部と、
を具備することを特徴とする流体制御ユニット。
A plate unit having a fluid flow, a shape having a predetermined shape, and a flow path portion branched into a plurality in advance;
A fluid device that operates with respect to the fluid flowing through the flow path section;
The fluid device is disposed in the plate unit in communication with the outside and the flow path portion, and the fluid device is attached to the plate unit so that the fluid device is in contact with the flow path portion. A mounting hole to be inserted;
A fluid control unit comprising:
前記流体用機器は、最も上流に配置される分岐部分よりも上流と、前記分岐部分よりも下流における各前記流路部と、最も下流に配置される前記分岐部分とに配置されることを特徴とする請求項1に記載の流体制御ユニット。   The fluidic device is arranged upstream of a branch portion arranged at the most upstream, each flow path portion downstream from the branch portion, and the branch portion arranged at the most downstream side. The fluid control unit according to claim 1. 前記流体用機器は、最も上流に配置される分岐部分と、前記分岐部分よりも下流における各前記流路部と、最も下流に配置される前記分岐部分よりも下流とに配置されることを特徴とする請求項1に記載の流体制御ユニット。   The fluid device is arranged at the most upstream branch part, the flow path parts downstream from the branch part, and the downstream part from the most downstream branch part. The fluid control unit according to claim 1. 前記板ユニットは、
溝部を有する板部材と、
前記取付孔部を有し、前記取付孔部が前記溝部と連通するように前記板部材に載置されるカバー板部材と、
を有し、
前記流路部は、前記溝部が前記カバー板部材によって密閉されることによって形成されることを特徴とする請求項2または請求項3に記載の流体制御ユニット。
The plate unit is
A plate member having a groove,
A cover plate member mounted on the plate member so as to have the mounting hole portion and the mounting hole portion communicated with the groove portion;
Have
4. The fluid control unit according to claim 2, wherein the flow path portion is formed by sealing the groove portion with the cover plate member.
前記板部材は、複数配設され、
第1板部材には前記カバー板部材が載置され、前記第1板部材は、第2板部材の第2溝部を密閉するように前記第2板部材に載置され、
前記流路部は、前記第1板部材の第1溝部が前記カバー板部材によって密閉されることと前記第2板部材の前記第2溝部が前記第1板部材によって密閉されることとによって形成され、
前記第1板部材の前記第1溝部と前記カバー板部材とによって形成される第1流路部が前記第2溝部と前記第1板部材とによって形成される第2流路部と連通するように、前記第1板部材は、前記第1流路部と前記第2流路部とに連通する第1連通孔部をさらに有することを特徴とする請求項4に記載の流体制御ユニット。
A plurality of the plate members are disposed,
The cover plate member is placed on the first plate member, and the first plate member is placed on the second plate member so as to seal the second groove portion of the second plate member,
The flow path portion is formed by sealing the first groove portion of the first plate member by the cover plate member and sealing the second groove portion of the second plate member by the first plate member. And
A first flow path portion formed by the first groove portion of the first plate member and the cover plate member communicates with a second flow path portion formed by the second groove portion and the first plate member. The fluid control unit according to claim 4, wherein the first plate member further includes a first communication hole portion communicating with the first flow path portion and the second flow path portion.
JP2015025577A 2015-02-12 2015-02-12 Fluid control unit Pending JP2016148403A (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008082358A (en) * 2006-09-26 2008-04-10 Ckd Corp Fluid apparatus module, and fluid apparatus module connection structure
JP2010261558A (en) * 2009-05-11 2010-11-18 Smc Corp Manifold made of amorphous resin
JP5037510B2 (en) * 2006-08-23 2012-09-26 株式会社堀場エステック Integrated gas panel device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5037510B2 (en) * 2006-08-23 2012-09-26 株式会社堀場エステック Integrated gas panel device
JP2008082358A (en) * 2006-09-26 2008-04-10 Ckd Corp Fluid apparatus module, and fluid apparatus module connection structure
JP2010261558A (en) * 2009-05-11 2010-11-18 Smc Corp Manifold made of amorphous resin

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