JP2016128607A - Catalyst body unit and heat generator cvd apparatus including the unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a catalyst body unit freely detachable to a chamber of a heat generator CVD apparatus, and the heat generator CVD including the catalyst unit.SOLUTION: A catalyst unit 100 including a unit basic body 110 freely detachably fixed to a chamber of a heat generator CVD apparatus, a raw material gas supply tube 23 supported by the unit basic body 110 and inserted into the chamber, a pair of electrodes 18 supported by the unit basic body 110, and a linear-shaped catalyst body 19 connected to the electrode pair 18 and arranged along a side surface of the raw material supply tube 23, the catalyst body 19 having a return part 19a.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a catalyst unit and a heating element CVD apparatus including the catalyst unit.

  The heating element CVD apparatus is an apparatus for forming a thin film by bringing a source gas into contact with a heated catalyst body and depositing the generated chemical species on a substrate (see, for example, Patent Document 1 or 2). . The heating element CVD is sometimes called Cat-CVD or hot wire CVD. As a heating element CVD apparatus, an apparatus is known that includes a vacuum chamber that houses a plastic container, a source gas supply pipe that supplies a source gas into the plastic container, and a catalyst body supported by the source gas supply pipe. (For example, refer to Patent Document 1 or 2.)

WO2006 / 126777 Publication JP 2014-34719 A

  In the heating element CVD apparatus, in order to enable more uniform film formation, depending on the shape of the deposition object or the type of the source gas, the type, size, or arrangement of the source gas supply pipe and the catalyst body supported by the source gas supply pipe Or the catalyst body may be replaced after a predetermined number of times of film formation. Therefore, a heating element CVD apparatus capable of efficiently performing this changing operation or replacement operation is desired.

  An object of the present invention is to provide a catalyst body unit that is detachable from a chamber of a heating element CVD apparatus and a heating element CVD apparatus including the same.

  A catalyst unit according to the present invention includes a unit base that is detachably fixed to a chamber of a heating element CVD device, a source gas supply pipe that is supported by the unit base and inserted into the chamber, and a unit base. A supported electrode pair, and a linear catalyst body connected to the electrode pair and disposed along a side surface of the source gas supply pipe, the catalyst body having a return portion, To do.

  In the catalyst body unit according to the present invention, the electrode pair has an elongated shape and is disposed along a longitudinal direction of the source gas supply pipe, and a part or all of a plurality of the catalyst bodies are the It is preferable that the electrode pairs are electrically connected in parallel with a space therebetween.

  In the catalyst body unit according to the present invention, it is preferable that the resistance values of all the catalyst bodies are equal.

  In the catalyst body unit according to the present invention, the deposition object is a bottle-shaped container including a mouth portion, a neck portion, and a body portion having a diameter larger than the diameter of the neck portion, and from the mouth portion, the source gas The supply pipe and the catalyst body are inserted, and the body portion has a region where the number of the catalyst bodies existing in the cross section of the body portion is larger than the number of the catalyst bodies existing in the cross section of the neck portion. It is preferable.

  In the catalyst body unit according to the present invention, it is preferable that the unit base is detachably fixed to the top wall of the chamber, a weight is disposed on the return portion, and the catalyst body is stretched.

  In the catalyst unit according to the present invention, it is preferable that a guide is provided on the outer periphery of the source gas supply pipe, and the guide supports the weight body so as to be swingable and does not support the catalyst body.

  In the catalyst unit according to the present invention, the catalyst body has a dense portion in which the catalyst body is arranged more densely than the other portion at the return portion, and the dense portion serves as a weight to stretch the catalyst body. It is preferable that it is installed.

  In the catalyst body unit according to the present invention, the mass of the dense portion is preferably 10% or more and 40% or less with respect to the total mass of the catalyst body.

  In the catalyst body unit according to the present invention, it is preferable that the source gas supply pipe has conductivity and also serves as the electrode pair.

  In the catalyst body unit according to the present invention, it is preferable that a part or the whole of the outer periphery of the source gas supply pipe is covered with a detachable tubular insulating member.

  The heating element CVD apparatus according to the present invention includes the catalyst body unit according to the present invention.

  INDUSTRIAL APPLICABILITY The present invention can provide a catalyst unit that can be attached to and detached from the chamber of the heating element CVD apparatus and a heating element CVD apparatus including the catalyst body unit.

It is the schematic which shows an example of the catalyst body unit which concerns on 1st embodiment. It is the schematic which shows the 1st example of the deformation | transformation form of arrangement | positioning of a catalyst body. FIG. 3 is an electric circuit diagram of FIG. 2. It is the schematic which shows the 2nd example of the deformation | transformation form of arrangement | positioning of a catalyst body. It is a figure for demonstrating the number of the catalyst bodies which exist in the cross section of a container, (a) is the AA end view of FIG. 4, (b) is the BB end view of FIG. ) Is an end view taken along the line CC of FIG. It is the schematic which shows the 1st example of a weight body. It is the schematic which shows the 2nd example of a weight body. It is the schematic which shows an example of the catalyst body unit which concerns on 2nd embodiment. It is the schematic which shows an example of the heat generating body CVD apparatus which concerns on this embodiment. It is the schematic which shows the modification of a catalyst body. It is the schematic which shows the modification of a source gas supply pipe | tube. It is an enlarged view which shows the 1st example of the front-end | tip part of the source gas supply pipe | tube shown in FIG. It is an enlarged view which shows the 2nd example of the front-end | tip part of the source gas supply pipe | tube shown in FIG.

  Next, the present invention will be described in detail with reference to embodiments, but the present invention is not construed as being limited to these descriptions. As long as the effect of the present invention is exhibited, the embodiment may be variously modified.

(Heating element CVD device)
FIG. 9 is a schematic view showing an example of a heating element CVD apparatus according to this embodiment. First, a heating element CVD apparatus will be described with reference to FIG.

  The heating element CVD apparatus 1 includes a chamber 6 that accommodates the deposition object 7, an exhaust pump (not shown) that evacuates the chamber 6, a source gas supply pipe 23, an electrode pair 18, and a catalyst body 19. Have.

  The chamber 6 has a top wall 2, a bottom wall 3 facing the top wall 2, and a side wall 4 connecting the top wall 2 and the bottom wall 3. Inside the chamber 6, a thin film forming space 12 is provided which serves as a reaction chamber for accommodating the deposition object 7 and forming a thin film on the surface of the deposition object 7. The chamber 6 includes, for example, a lower chamber 13 and an upper chamber 15 that is detachably attached to the upper portion of the lower chamber 13 so that the inside of the lower chamber 13 can be sealed via an O-ring 14. The deposition object 7 is carried in and out by being moved up and down by a vertical drive mechanism that does not. An exhaust pipe 21 is attached to the top wall 2 via a vacuum valve 8, and the air in the thin film formation space 12 is exhausted by an exhaust pump (not shown). Although FIG. 1 shows a configuration in which the chamber 6 is arranged such that the top wall 2 is upward and the bottom wall 3 is downward, the arrangement is not limited to this. For example, the top wall 2 is downward and the bottom wall 3 is upward. You may arrange | position so that it may become.

  The deposition object 7 is, for example, a container, a cylindrical object such as a cylinder, a film, or a sheet. The deposition object 7 is preferably a bottle-shaped container as shown in FIG. The bottle-shaped container is, for example, a plastic bottle.

  The source gas supply pipe 23 includes a source gas channel 17 and a source gas outlet 11 that communicates with the source gas channel 17 and is disposed in the thin film formation space 12. The source gas outlet 11 is, for example, a bottom side gas outlet 11x that jets source gas toward the bottom wall 3 or a side gas outlet 11y that jets source gas toward the side wall 4 of the thin film formation space 12. is there. In the heating element CVD apparatus 1 according to the present embodiment, it is preferable to have at least the bottom side gas outlet 11x as the source gas outlet 11. More preferably, as shown in FIG. 9, the raw material gas ejection port 11 has both a bottom surface side gas ejection port 11 x and a side surface side gas ejection port 11 y.

  One end of the source gas supply pipe 23 is connected to the gas supply port 16. The gas supply port 16 is shown in FIG. 9 as an example provided on the top wall 2, but the present invention is not limited to this and may be provided on the bottom wall 3 or the side wall 4 (not shown). The source gas is supplied from the cylinders 24 a and 24 b to the gas supply port 16 through the gas flow rate regulators 25 a and 25 b and the valves 26 a to 26 c, and is ejected from the source gas outlet 11 through the source gas channel 17. The source gas is appropriately selected depending on the type of the target thin film, and is not particularly limited in the present invention. For example, when the thin film is a SiCO-based thin film, the source gas is, for example, an organic silane-based compound such as vinylsilane, disilabutane, disilylacetylene, or 2-aminoethylsilane. Moreover, you may mix carrier gas with source gas as needed. The carrier gas is an inert gas such as argon, helium or nitrogen. Although FIG. 9 shows an example in which there are two cylinders 24a and 24b as an example, the present invention is not limited to this.

  The length of the source gas supply pipe 23 is a matter that is appropriately designed according to the dimensions of the chamber 6, the position of the deposition object 7 and the type of the deposition object 7, and is not particularly limited in the present invention. For example, when the deposition object 7 is a bottle-shaped container, the length of the source gas supply pipe 23 is designed so that the tip of the source gas supply pipe 23 does not hit the bottom of the bottle-shaped container. At this time, the length of the source gas supply pipe 23 is such that the distance L1 from the tip of the source gas supply pipe 23 to the bottom of the bottle-shaped container is 5 to 30 mm in that the uniformity of the film thickness is improved. Preferably there is.

  The electrode pair 18 is a set of two electrodes 18 a and 18 b and is disposed in the thin film formation space 12. The electrode pair 18 preferably has an elongated shape such as an electrode rod (shown in FIG. 9) or a lead wire (not shown). A heater power source 22 is electrically connected to the electrode pair 18. The material of the electrode pair 18 is not particularly limited, and is, for example, a metal such as stainless steel or graphite.

  The catalyst body 19 is a linear member and is disposed in the thin film formation space 12. Here, the term “linear” refers to a shape having an elongated outer shape. The catalyst body 19 is sometimes called a heating element. The material of the catalyst body 19 is not particularly limited, but C, W, Ta, Ti, Hf, V, Cr, Mo, Mn, Tc, Re, Fe, Ru, Os, Co, Rh, Ir, Ni, Pd and It is preferable to include one or two or more selected from the group of Pt. Among these, the catalyst body 19 is preferably metal tantalum or tantalum carbide.

  One end of the catalyst body 19 is connected to one electrode 18 a of the electrode pair 18. The other end of the catalyst body 19 is connected to the other electrode 18 b of the electrode pair 18. The catalyst body 19 generates heat when electricity is supplied to the catalyst body 19 by the heater power supply 22. The catalyst body 19 may be provided with a portion (not shown) processed into, for example, a coil spring shape, a wavy line shape, or a zigzag line shape in order to increase the chance of contact with the source gas.

  The heating element CVD apparatus 1 according to this embodiment includes a catalyst unit. Examples of the catalyst body unit include the catalyst body unit 100 according to the first embodiment shown in FIG. 1 or the catalyst body unit 200 according to the second embodiment shown in FIG. FIG. 9 shows an example in which the catalyst body unit 100 according to the first embodiment is mounted, but instead of the catalyst body unit 100 according to the first embodiment, the catalyst body unit 200 according to the second embodiment is mounted. Also good. In the catalyst unit 100 according to the first embodiment, the source gas supply pipe 23 and the electrode pair 18 are separate bodies. On the other hand, in the catalyst body unit 200 according to the second embodiment, the source gas supply pipe 23 also serves as the electrode pair 18. First, the catalyst body unit 100 according to the first embodiment will be described.

(Catalyst body unit according to the first embodiment)
FIG. 1 is a schematic diagram illustrating an example of a catalyst body unit according to the first embodiment. The catalyst body unit 100 according to the first embodiment is detachably fixed to a chamber 6 (shown in FIG. 9) of the heating element CVD apparatus 1, and is supported by the unit base 110, and is inserted into the chamber. A source gas supply pipe 23, an electrode pair 18 supported by the unit base 110, and a linear catalyst body 19 connected to the electrode pair 18 and disposed along the side surface of the source gas supply pipe 23. The catalyst body 19 has a return portion 19a.

  The unit base 110 is not particularly limited as long as it has an outer shape that can be fixed to the wall of the chamber 6 (the top wall 2 in FIG. 9). In FIG. 1, as an example, the unit base 110 has a configuration including a fitting portion 111 and a diameter-expanded portion 112 having a diameter larger than that of the fitting portion 111. As shown in FIG. 9, the fitting portion 111 is a portion that is fitted into the opening 5 (shown in FIG. 9). In order to make the fitting between the fitting portion 111 and the opening 5 stronger, a seal component (not shown) such as an O-ring may be disposed on the outer periphery of the fitting portion 111. The enlarged diameter portion 112 is a portion that engages with the wall surface around the opening 5 as shown in FIG. 9. As a modification, although not shown, for example, a stopper is provided on the wall of the chamber 6 (the top surface wall 2 in FIG. 9) and the unit base 110 is fixed by the stopper, or the unit base 110 is attached to the wall of the chamber 6 ( In FIG. 9, the top wall 2) may be screwed. Although the opening 5 is shown in FIG. 9 as being provided on the top wall 2, the present invention is not limited to this and may be provided on the bottom wall 3 or the side wall 4. The unit base 110 has a through hole 113 communicating with the gas supply port 16. The material of the location where the electrode pair 18 is fixed in the unit base 110 is a highly heat-resistant insulator, such as ceramics, polyimide, PTFE, or PEEK. The material of the unit base 110 at other locations is not particularly limited, and is, for example, a metal such as stainless steel or ceramics.

  The source gas supply pipe 23 is supported by the unit base 110 by being inserted or screwed into the through hole 113, for example. The source gas supply pipe 23 may be supported on the unit base 110 by welding. In order to make the fitting between the source gas supply pipe 23 and the through hole 113 stronger, a seal part (not shown) such as an O-ring is provided on the portion of the outer periphery of the source gas supply pipe 23 inserted into the through hole 113. You may arrange.

  In the catalyst unit 100 according to the first embodiment, the material of the source gas supply pipe 23 may be a conductive material or an insulating material, but is more preferably an insulating material. The insulating material is, for example, a ceramic tube formed of a material mainly composed of a ceramic such as aluminum nitride, silicon carbide, silicon nitride, or aluminum oxide, or a ceramic such as aluminum nitride, silicon carbide, silicon nitride, or aluminum oxide. A metal tube whose surface is coated with a material as a main component is preferable. The catalyst body 19 can be energized stably, has durability, and can efficiently exhaust heat generated by the catalyst body 19 by heat conduction.

  The electrode pair 18 is supported by the unit base 110 by being inserted into a surface 114 to be inserted into the chamber 6 (shown in FIG. 9) of the unit base 110, for example. The electrode pair 18 and the unit base 110 are insulated. Each of the electrodes 18a and 18b constituting the electrode pair 18 is electrically connected to the terminal 27 via, for example, an electric wire 28. The terminal 27 is electrically connected to the heater power source 22 (shown in FIG. 9). The electrodes 18a and 18b are preferably arranged at a distance from each other in order to prevent conduction. The electrode pair 18 is preferably coated on the surface with a material mainly composed of ceramic such as aluminum nitride, silicon carbide, silicon nitride, or aluminum oxide.

  The length of the electrode pair 18 is a length by which the tip of the electrode pair 18 is inserted into the bottle-shaped container 900 from the mouth 901 of the bottle-shaped container 900 when the deposition target is the bottle-shaped container 900. It is preferable. By inserting the tip of the electrode pair 18 into the bottle-shaped container, the entire catalyst body 19 can be arranged in the bottle-shaped container. As a result, the heat load on the mouth portion 901 of the bottle-shaped container 900 can be reduced and deformation of the mouth portion 901 can be prevented. Moreover, although each electrode 18a, 18b which comprises the electrode pair 18 showed the form set as the mutually same length in FIG. 1, this invention is not limited to this, You may make it mutually different length. Here, the length of the electrode pair 18 refers to a length protruding from the unit base 110. That is, the length from the surface 114.

  The catalyst body 19 is connected to the electrode pair 18 and is disposed along the side surface of the source gas supply pipe 23. The catalyst body 19 is preferably arranged without being in contact with the side surface of the source gas supply pipe 23. FIG. 9 shows a form in which the catalyst body 19 is arranged in parallel with the outer peripheral surface of the side wall of the source gas supply pipe 23, but the present invention is not limited to this, for example, the catalyst body 19 is connected to the source gas supply pipe 23. You may arrange | position helically on the outer peripheral surface of a side wall. The catalyst body 19 may be supported by a support member (not shown) made of an insulating material such as an insulating ceramic provided on the outer periphery of the source gas supply pipe 23.

  The catalyst body 19 has a return portion 19a. The catalyst body 19 is disposed from one electrode 18a of the electrode pair 18 along the side surface of the source gas supply pipe 23, turns at a predetermined location, and returns toward the other electrode 18b. A portion where the catalyst body 19 is turned at a predetermined position is a return portion 19a. When the catalyst body 19 has the return portion 19a, the general shape of the catalyst body 19 is, for example, a U shape (shown in FIG. 1), a V shape (not shown), or a J shape (not shown). As shown in FIG. 9, the return portion 19 a is formed, for example, closer to the bottom wall 3 than the bottom gas outlet 11 x of the source gas supply pipe 23. The location where the return portion 19a is formed is not limited to this, and the return portion 19a may be formed closer to the top wall 2 than the bottom gas outlet 11x of the source gas supply pipe 23.

  When the deposition object 7 is a bottle-shaped container, the diameter L2 (shown in FIG. 9) including the catalyst body 19 and the source gas supply pipe 23 takes into account a positional deviation when inserted from the mouth 901 of the bottle-shaped container. Is set as appropriate.

  Although the number of the catalyst bodies 19 is one as an example in FIG. 1, the present invention is not limited to this and may be two or more. When there are two or more catalyst bodies 19, two or more catalyst bodies 19 may be connected to the same electrode pair 18, or one electrode pair 18 may be used per one catalyst body 19. Specifically, the use of one set of electrode pairs 18 per catalyst body 19 means that, for example, when there are three catalyst bodies 19, three electrode pairs 18 are used. When the deposition object 7 is a bottle-shaped container, it is more preferable to connect two or more catalyst bodies 19 to the same electrode pair 18 in consideration of ease of insertion from the mouth portion 901.

  FIG. 2 is a schematic view showing a first example of a variation of the arrangement of the catalyst bodies. In the catalyst body unit according to the present embodiment, the electrode pair 18 has an elongated shape and is disposed along the longitudinal direction of the source gas supply pipe 23, and a plurality of catalyst bodies 19 (191, 192, 193). ) Are preferably electrically connected in parallel to the electrode pair 18 with a gap therebetween.

  The electrode pair 18 having an elongated shape is, for example, an electrode rod or a lead wire. FIG. 2 conceptually shows the electrode pair 18. FIG. 3 is an electric circuit diagram of FIG. Electrically connected in parallel means that the electrode pair 18 and the catalyst body 19 form a parallel circuit, as shown in FIG. Although the number of the catalyst bodies 19 is three as an example in FIGS. 2 and 3, the present invention is not limited to this. Further, being connected with a gap means that the connecting portions 20 of the catalyst body 19 with respect to the electrode pair 18 are arranged apart from each other as shown in FIG. At this time, as shown in FIG. 2, the connecting portions 20 are arranged at intervals in the same electrodes 18 a and 18 b and are arranged in a plurality of stages along the longitudinal direction of the source gas supply pipe 23. It is preferable that the return portion 19a of the catalyst body 191 is located at the center portion between the electrodes of the connection portion 20 of the catalyst body 192 directly below. It is possible to prevent the catalyst body 191 from coming into contact with the connecting portion 20 of the catalyst body 192 directly below, and to form a film more uniformly in the container axial direction. Among the plurality of catalyst bodies 19 (191, 192, 193), there may be a catalyst body that is electrically connected in parallel to the electrode pair 18 without a gap. That the catalyst bodies are electrically connected in parallel to the electrode pair 18 without spacing is that there are three or more catalyst bodies and two or more catalyst bodies are connected to the same connecting portion 20. Say.

  In the catalyst unit according to this embodiment, it is preferable that the resistance values R1, R2, and R3 of all the catalyst bodies 19 (191, 192, and 193) are equal. In order to form a film more uniformly on the deposition surface of the deposition object (for example, the inner wall surface of the bottle-shaped container in FIG. 9), the resistance values R1, R2, and R3 of the catalyst bodies 191, 192, and 193 are mutually set. It is preferable to make the heat generation temperatures of the catalyst bodies 191, 192, 193 uniform. You may consider the error which may arise at the time of manufacture of the catalyst body 19 (191,192,193), or attachment.

  With a single catalyst body, the length of the catalyst body may have to be increased depending on the shape of the deposition object. For example, when the deposition target is a tall bottle having a height of 250 mm or more, and the number of the catalyst bodies 19 is one as shown in FIG. 1, the length of the catalyst body 19 is, for example, 400 mm or more. The longer the catalyst body 19 is, the easier it is to discharge. Further, as the length of the catalyst body 19 increases, the amount of elongation due to thermal expansion and volume expansion increases, so that the catalyst body 19 is easily deformed. Therefore, in the first example of the modification of the arrangement of the catalyst bodies shown in FIG. 2, since the length of each catalyst body 191, 192, 193 can be shortened, the discharge can be suppressed. it can. Further, deformation of the catalyst body 19 can be prevented.

  FIG. 4 is a schematic view showing a second example of a variation of the arrangement of the catalyst bodies. FIG. 4 conceptually shows the electrode pair 18. In the catalyst body unit according to the present embodiment, the deposition target is a bottle-shaped container 900 including a mouth portion 901, a neck portion 902, and a body portion 904 having a diameter larger than the diameter of the neck portion 902, and the mouth portion 901. Thus, the raw material gas supply pipe 23 and the catalyst body 19 are inserted, and the body portion 904 has a number of catalyst bodies 19 (192x and 192y, 193x and 193y) present in the cross section of the body portion 904, the cross section of the neck portion 902. It is preferable to have a region larger than the number of catalyst bodies 19 (191) present in the.

  The bottle-shaped container 900 may have a shoulder portion 903 whose diameter is increased toward the trunk portion 904 between the neck portion 902 and the trunk portion 904.

  In FIG. 4, a plurality of catalyst bodies 19 (191, 192x, 192y, 193x, 194y) are electrically connected in parallel to the electrode pair 18 at intervals. The resistance values of the catalyst bodies 191, 192x, 192y, 193x, 193y are preferably equal.

  In FIG. 4, one catalyst body 191 is disposed on the neck 902. Since the catalyst body 191 has the return portion 19a, the number of catalyst bodies existing in the cross section of the container is two per catalyst body. Then, as shown in FIG. 5A, the number of catalyst bodies 191 present in the cross section (for example, the AA cross section) of the neck portion 902 is two.

  Two catalyst bodies 192x and 192y are arranged at the boundary between the shoulder portion 903 and the body portion 904. Then, in the region where the two catalyst bodies 192x and 192y are arranged, the number of the catalyst bodies 192x and 192y existing in the cross section (for example, the BB section) of the body portion 904 is shown in FIG. As such, there are four. Further, in FIG. 4, two catalyst bodies 193x and 193y are arranged in the body portion 904 on the bottom side of the container with respect to the portion where the two catalyst bodies 192x and 192y are further arranged. Then, in the region where the two catalyst bodies 193x and 193y are arranged, the number of the catalyst bodies 193x and 193y existing in the transverse section (for example, the CC section) of the trunk portion 904 is shown in FIG. As such, there are four. Thus, in FIG. 4, the body portion 904 is the number of catalyst bodies 19 (192x and 192y or 193x and 193y) present in the cross section of the body portion 904 in the cross section of the neck portion 902. There are two more regions in the container axial direction than the number. The present invention is not limited to the number of the areas as long as the area is at least one. In FIG. 4, for the sake of convenience, the connecting portions 20 (202x, 202y) of the two catalyst bodies 192x, 192y with respect to the electrode pair 18 are shown as being shifted up and down, but the connecting portions 20 (202x, 202y) are mutually connected. Are preferably arranged at the same height. The same applies to the connecting portions 20 (203x, 203y) of the two catalyst bodies 193x, 193y to the electrode pair 18.

  In the second example of the modification of the arrangement of the catalyst bodies shown in FIG. 4, for example, the following effects can be obtained. In the second example of the modified embodiment, in a portion having a small diameter such as the neck portion 902, the catalyst body 19 is disposed relatively small, and the heat generation amount is relatively small. On the other hand, in a portion having a large diameter such as the body portion 904, a relatively large amount of the catalyst body 19 is arranged to relatively increase the amount of heat generated. In this way, the calorific value distribution can be matched to the shape of the container. As a result, thermal deformation can be suppressed at the neck 902, and film formation can be performed more uniformly at the neck 902 and the body 904 by a single film formation process.

  FIG. 4 shows a form in which a plurality of catalyst bodies 19 (191, 192x, 192y, 193x, 194y) are electrically connected in parallel to a pair of electrode pairs 18 with an interval between them. It is not limited to. For example, using a short electrode pair (not shown) disposed on the neck 902 and a long electrode pair (not shown) having a length reaching the body 904, the catalyst body is respectively applied to the short electrode pair and the long electrode pair. It is good also as a form to connect. In this embodiment, the number of catalyst bodies connected to the long electrode pair reaching the body portion 904 is made larger than the number of catalyst bodies connected to the short electrode pair disposed on the neck portion 902. At this time, it is preferable that the short electrode pair and the catalyst body connected thereto and the long electrode pair and the catalyst body connected thereto form one parallel circuit. Alternatively, the short electrode pair and the long electrode pair are connected to separate heater power supplies, and the calorific value of the catalyst body connected to the short electrode pair is comparable to the calorific value of the catalyst body connected to the long electrode pair. Thus, it is good also as a form which carries out separate voltage control with each heater power supply.

  FIG. 6 is a schematic diagram illustrating a first example of a weight body. In the catalyst body unit according to the present embodiment, the unit base is detachably fixed to the top wall 2 (illustrated in FIG. 9) of the chamber, the weight body 31 is disposed on the return portion 19a, and the catalyst body 19 is stretched. It is preferable. Tension is always applied to the catalyst body 19 by the weight body 31. As a result, it is possible to prevent the catalyst body 19 from being bent by heat and deforming in a direction different from the longitudinal direction of the source gas supply pipe 23. In particular, it is possible to prevent the catalyst body 19 from being deformed in a direction different from the longitudinal direction of the source gas supply pipe 23 due to volume expansion, thermal expansion, or heat shrinkage of the catalyst body 19. Even if the catalyst body 19 is used repeatedly, the shape of the catalyst body 19 can be maintained.

  The shape of the weight body 31 is not particularly limited, and may be a spherical shape, a cubic shape, or a rod shape in addition to the coil shape shown in FIG. The rod shape is an elongated shape, and includes a cylindrical shape, a columnar shape, or a weight shape. Further, the cone 31 may be provided with an attachment portion such as a hook that is hooked on the return portion 19a. In addition, when providing a some attachment part in the cone 31, the distance between attachment parts is narrowed (for example, within 10 mm). The material of the weight 31 is not particularly limited, but C, W, Ta, Ti, Hf, V, Cr, Mo, Mn, Tc, Re, Fe, Ru, Os, Co, Rh, Ir, Ni, Pd and It is preferable to include one or two or more selected from the group of Pt. When it is not desired to change the apparent resistance value of the catalyst body 19 due to the current flowing through the weight body 31, the surface of the weight body 31 may be subjected to an insulation treatment such as ceramic coating. The material of the weight 31 may be glass such as quartz glass, or ceramics such as alumina, zirconia, or mullite. Moreover, the combination of a metal and glass or ceramics may be sufficient. The combination of metal and glass is, for example, a kite. The combination of metal and ceramic is, for example, a ceramic particle dispersion strengthened metal. Of these, the material of the weight body 31 is more preferably W (tungsten) or WC (tungsten carbide) in that the specific gravity is large.

  The weight body 31 may be locked to the return portion 19a or may be fixed to the return portion 19a. More preferably, the weight body 31 is locked to the return portion 19a. The form in which the weight body 31 is locked to the return portion 19a is, for example, a form in which the coiled weight body 31 is hooked on the return portion 19 as shown in FIG. In this embodiment, a plurality of contacts between the weight body 31 and the catalyst body 19 can be provided, and the stress applied to the catalyst body 19 can be dispersed. Further, as another example of the form in which the weight 31 is locked to the return portion 19a, although not shown, a spherical, cubic, or rod-shaped weight is provided with a through hole, and the catalyst body 19 is placed in the through hole. It may be a form that passes through. The form in which the weight body 31 is fixed to the return part 19a is, for example, a form in which the weight body is welded to the return part 19a (not shown) or a form in which the weight body is bonded to the return part 19a (not shown). .

  FIG. 7 is a schematic view showing a second example of the weight body. In the catalyst body unit according to the present embodiment, a guide 40 is provided on the outer periphery of the source gas supply pipe 23, and the guide 40 preferably supports the weight body 32 so as to be swingable and does not support the catalyst body 19. . By providing the guide 40, the movement of the catalyst body 19 due to the vibration of the apparatus main body can be suppressed.

  The guide 40 has, for example, a plate shape having a pipe fixing part 41 for fixing to the outer periphery of the source gas supply pipe 23 and a support part 42 for swingably supporting the weight body 32 as shown in FIG. It is a member. The tube fixing portion 41 is, for example, a through hole (shown in FIG. 7) or a notch (not shown) provided in the plate-like member. The support part 42 is, for example, a through hole (shown in FIG. 7) or a notch (not shown) provided in the plate-like member. Here, the guide 40 supports the weight body 32 so as to be swingable. The guide 40 supports the weight body 32 in a state where the horizontal movement range is restricted while the weight body 32 is movable in the vertical direction. Say. In FIG. 7, as an example of a form in which the guide 40 supports the weight body 32 in a swingable manner, for example, a rod-shaped member is used as the weight body 32, and a through hole 32 a is provided at one end of the weight body 32. A configuration is shown in which the catalyst body 19 is passed through 32 a and the other end of the weight body 32 is passed through the support portion 42 of the guide 40. In FIG. 7, the guide 40 has a diameter of the support portion 42 larger than the diameter of the weight body 32 so that the weight body 32 can move in the vertical direction within the support portion 42. It has a structure that does not come off, and restricts the horizontal movement range of the weight body 32. Since the guide 40 supports the weight body 32 so as to be able to swing, a tension can always be applied to the catalyst body 19. When the return portion 19a and the weight body 32 are disposed in the vicinity of the spout 11 of the source gas supply pipe 23, the return portion 19a and the weight body 32 are exposed in the direction other than the gravitational direction (for example, the horizontal direction) by the ejection of the source gas. Force acts. Under such circumstances, the guide 40 restricts the horizontal movement range of the weight body 32, so that the weight body 32 can more reliably apply a load to the catalyst body 19 in the gravitational direction.

  It is preferable that the guide 40 does not support the catalyst body 19. When the catalyst body 19 is supported by the guide 40, the guide body (not shown) is normally provided in the guide 40, and the catalyst body 19 is passed through the guide hole. At this time, as the film forming operation is repeated, the inner side of the guide hole of the guide 40 is also formed, and the guide hole is closed. If it does so, there exists a possibility that the catalyst body 19 may be caught in a guide hole at the time of thermal expansion, and it may be disconnected. Therefore, the life of the catalyst body 19 can be further extended by the guide 40 not supporting the catalyst body 19. Even if the catalyst body 19 is not supported by the guide 40, the catalyst body 19 is stretched by the weight body 32, so that the state of being arranged along the side surface of the source gas supply pipe 23 can be maintained.

  Although the material of the guide 40 is not specifically limited, For example, it is preferable that it is insulating materials, such as glass or ceramics.

  As a modification of FIG. 7, although not illustrated, a linear member such as a wire is used as the guide 40, and a part of the linear member is wound around the outer periphery of the source gas supply pipe 23 and fixed. A ring may be formed at the part and supported by the ring through the weight body 32 so as to be swingable.

  FIG. 10 is a schematic view showing a modification of the catalyst body. In the catalyst body unit according to the present embodiment, the catalyst body 19 has a dense portion 50 in which the catalyst body 19 is arranged more densely than the other portions in the return portion 19a, and the dense portion 50 serves as a weight to form the catalyst body. It is preferable that 19 is stretched. The dense portion 50 is, for example, a portion obtained by processing the catalyst wire 19 into a coil spring shape as shown in FIG. 10, a portion obtained by processing the catalyst wire 19 into a wavy line shape (not shown), or a portion processed into a zigzag line shape (not shown). ). In the dense part 50, it arrange | positions so that the catalyst bodies 19 may not contact. By providing the dense portion 50 in the return portion 19a instead of the weight body 32, the catalyst body 19 is stretched in the vertical direction by its own weight. As a result, the same effect as when the weight body 32 is provided can be obtained. Furthermore, by providing the dense portion 50, the contact area of the catalyst wire 19 with respect to the gas ejected from the bottom side gas ejection port 11x is increased, and the film quality (for example, gas barrier property) of the formed thin film can be further improved. .

  When the dense portion 50 is a portion obtained by processing the catalyst body 19 into a coil spring shape, the number of turns of the coil is preferably 0.2 times / mm or more and 2 times / mm or less, and 0.3 times / mm. More preferably, it is 1 time / mm or less. The coil winding diameter is preferably 1 mm or more and 5 mm or less, and more preferably 3 mm or more and 5 mm or less.

  In the catalyst body unit according to this embodiment, the mass of the dense portion 50 is preferably 10% or more and 40% or less with respect to the total mass of the catalyst body 19. More preferably, it is 20% or more and 30% or less.

  6 and 7, the return portion 19 a is disposed below the lower end of the source gas supply pipe 23, and the weights 31 and 32 are disposed below the lower end of the source gas supply pipe 23. However, the present invention is not limited to this. For example, the weights 31 and 32 may be arranged on the return portion arranged on the side surface of the source gas supply pipe 23 like the return portion 19a of the catalyst bodies 191, 192, 192x, and 192y shown in FIG. Good.

(Catalyst body unit according to the second embodiment)
FIG. 8 is a schematic view showing an example of a catalyst body unit according to the second embodiment. In the catalyst unit 200 according to the second embodiment, it is preferable that the source gas supply pipe 202 (202a, 202b) has conductivity and also serves as an electrode pair. The catalyst body unit 200 according to the second embodiment has the same basic structure as the catalyst body unit 100 according to the first embodiment, except that the source gas supply pipe 202 (202a, 202b) also serves as an electrode pair. . Here, different structures will be mainly described, and description of common structures may be omitted.

  The source gas supply pipe 202 (202a, 202b) has a source gas flow path 203 and a source gas outlet 204 that communicates with the source gas flow path 203, and a set of two thin film formation spaces 12 (shown in FIG. 9). ). The two source gas supply pipes 202a and 202b are each electrically connected to the terminal 205 via, for example, an electric wire 206. The terminal 205 is electrically connected to the heater power source 22 (shown in FIG. 9). The two source gas supply pipes 202a and 202b are preferably arranged with a space therebetween to prevent conduction. Although FIG. 8 shows a mode in which one set of source gas supply pipes 202 (202a, 202b) is provided, two or more sets may be provided.

  In the catalyst unit 200 according to the second embodiment, the material of the source gas supply pipe 202 may be a conductive material, such as a metal such as stainless steel or graphite. The term “conductivity” refers to having an electrical conductivity that can serve as an electrode pair. The material of the source gas supply pipe 202 is selected so as to be equal to or lower than the discharge limit voltage. In addition, the source gas supply pipe 202 may be subjected to an insulation treatment such as ceramic coating on the surface other than the connection portion 20 with the catalyst body 19.

  The catalyst body 19 is connected to the outer periphery of the source gas supply pipe 202 (202a, 202b), for example. More preferably, the catalyst body 19 is disposed between two source gas supply pipes. As described above, in the catalyst body unit 200 according to the second embodiment, the degree of freedom in arrangement increases, for example, the catalyst body 19 can be disposed between the two source gas supply pipes 202 (202a, 202b). In particular, the catalyst body 19 can be arranged in the center between the two source gas supply pipes 202 (202a, 202b), so that the distance between the catalyst body 19 and the deposition surface of the deposition object can be equal. . By disposing the catalyst body 19 between the two source gas supply pipes, it is possible to prevent thermal deformation of the deposition object even when the deposition object has a portion with a narrow body diameter. Moreover, since the exclusive cross-sectional area of the catalyst body 19 and the source gas supply pipe 202 at the mouth of the bottle-shaped container 900 can be further reduced, the exhaust efficiency (evacuation efficiency) of the air in the bottle-shaped container 900 is improved. Can be made. As a result, the adhesion and film quality of the thin film can be improved.

  FIG. 8 shows a form in which a plurality of catalyst bodies 19 are arranged at intervals along the longitudinal direction of the source gas supply pipe 202. The electric circuit diagram of this embodiment is the same as the circuit diagram shown in FIG. The arrangement of the catalyst body 19 is not limited to the form shown in FIG. 8. For example, the form in which only one catalyst body 19 is arranged, or the number of catalyst bodies 19 arranged in the neck portion and the trunk portion as shown in FIG. 4. It is good also as a form which changes. Further, as shown in FIG. 6 or FIG. 7, weight bodies 31 and 32 may be provided.

  As described above, since the catalyst body unit 100 according to the first embodiment and the catalyst body unit 200 according to the second embodiment are both the source gas supply pipes 23 and 202 and the catalyst body 19 are unitized, The replacement work of the gas supply pipes 23 and 202 and the catalyst body 19 is easy.

  FIG. 11 is a schematic view showing a modification of the source gas supply pipe. In the catalyst body units 100 and 200 according to the first embodiment and the second embodiment, a part or the whole of the outer periphery of the source gas supply pipes 23 and 202 is covered with a detachable tubular insulating member 60. preferable. Where there is a risk of thin film dust adhering to the outer periphery of the source gas supply pipes 23 and 202, the thin film dust can be removed simply by replacing the insulating member 60. Further, when the source gas supply pipes 23 and 202 are made of metal, the insulating member 60 can ensure insulation.

  The insulating member 60 is, for example, an insulator, and the material thereof is not particularly limited, but is, for example, porcelain, glass, or synthetic resin.

  A method of attaching the insulating member 60 to the source gas supply pipes 23 and 202 is not particularly limited. For example, as shown in FIG. 12, a groove is provided on the outer periphery of the source gas supply pipes 23 and 202, and a snap ring is provided in the groove. 23a is inserted and the insulating member is engaged with the snap ring 23a, or as shown in FIG. 13, the lower ends of the source gas supply pipes 23 and 202 are crimped to form the flange 23b, and the insulating member is locked to the flange 23b. It is also possible to use a method.

  The insulating member 60 may be divided into a plurality of tubes as shown in FIG. 11, or may be a single tube (not shown). In particular, as shown in FIG. 9, when the source gas supply pipe 23 has the side gas outlet 11y, the insulating member 60 is more preferably divided into a plurality of pipes. Grooves (not shown) are provided in the outer periphery of the source gas supply pipe 23 above the side gas outlets 11y, snap rings (not shown) are fitted into the grooves, and the insulating members 60 are respectively locked to the snap rings. By doing so, the insulating member 60 can be disposed avoiding the side gas outlet 11y.

  Next, a method for forming a thin film using the heating element CVD apparatus 1 will be described by taking as an example a method for forming a thin film on the inner surface of the bottle-shaped container as the deposition object 7.

  First, the catalyst body unit 100 according to the first embodiment or the catalyst body unit (not shown) according to the second embodiment is fixed to the opening 5 provided in, for example, the top wall 2 of the chamber 6. Next, the upper chamber 15 of the chamber 6 is raised and the bottle-shaped container is accommodated in the lower chamber 13. Thereafter, the upper chamber 15 is lowered, the source gas supply pipe 23 and the catalyst body 19 are inserted into the bottle-shaped container from the mouth 901 of the bottle-shaped container, and the chamber 6 is sealed. Next, the vent (not shown) is closed, the exhaust pump (not shown) is operated, and the vacuum valve 8 is opened to exhaust the air in the thin film formation space 12. Next, the catalyst body 19 is heated by energization. Thereafter, the raw material gas is jetted into the thin film formation space 12 from the raw material gas outlet 11 of the raw material gas supply pipe 23 in a state where the flow rate is controlled by the gas flow rate regulators 25a and 25b. When the source gas comes into contact with the catalyst body 19, chemical species 34 are generated. When the chemical species 34 reaches the inner wall of the bottle-shaped container, a thin film is deposited. When the thin film reaches a predetermined thickness, the supply of the source gas is stopped, the thin film formation space 12 is exhausted, and a leak gas (not shown) is introduced to bring the thin film formation space 12 to atmospheric pressure. Thereafter, the upper chamber 15 is raised and the bottle-shaped container is taken out.

DESCRIPTION OF SYMBOLS 1 Heat generating body CVD apparatus 2 Top wall 3 Bottom wall 4 Side wall 5 Opening 6 Chamber 7 Deposited material 8 Vacuum valve 11 Source gas outlet 11x Bottom side gas outlet 11y Side gas outlet 12 Thin film formation space 13 Lower chamber 14 O-ring 15 Upper chamber 16 Gas supply port 17 Raw material gas flow path 18 Electrode pair 18a, 18b Electrodes 19, 191, 192, 192x, 192y, 193, 193x, 193y Catalyst 19a Return portion 20, 202x, 202y, 203x, 203y Connection part 21 Exhaust pipe 22 Heater power supply 23 Raw material gas supply pipes 24a and 24b Gas cylinders 25a and 25b Gas flow rate regulators 26a to 26c Valve 27 Terminal 28 Electric wire 31, 32 Weight body 32a Through hole 34 Chemical species 40 Guide 41 Pipe fixing part 42 Supporting part 50 Dense part 60 Insulating member 100 Catalyst unit 110 Unit base 111 Fitting portion 112 Expanded portion 113 Through hole 113a Hole opening 114 Surface 200 Catalyst body unit 202 (202a, 202b) Raw material gas supply pipe 203 Raw material gas flow path 204 Raw material gas outlet 205 Terminal 206 Electric wire 900 Bottle-shaped container 901 Mouth part 902 Neck part 903 Shoulder part 904 Body part L1 Distance from the tip of the raw material gas supply pipe to the bottom of the bottle-shaped container L2 Diameters R1, R2, R3 including the catalyst body and the raw material gas supply pipe

Claims (11)

A unit base that is detachably fixed to the chamber of the heating element CVD device;
A source gas supply pipe supported by the unit base and inserted into the chamber;
An electrode pair supported by the unit substrate;
A linear catalyst body connected to the electrode pair and disposed along a side surface of the source gas supply pipe,
The catalyst body unit having a return portion. The electrode pair has an elongated shape, and is disposed along the longitudinal direction of the source gas supply pipe,
2. The catalyst body unit according to claim 1, wherein some or all of the plurality of the catalyst bodies are electrically connected in parallel to the electrode pairs with a space therebetween.   3. The catalyst body unit according to claim 2, wherein all of the catalyst bodies have equal resistance values. The deposited object is a bottle-shaped container including a mouth portion, a neck portion, and a trunk portion having a diameter larger than the diameter of the neck portion,
The raw material gas supply pipe and the catalyst body are inserted from the mouth,
The said trunk | drum has the area | region where the number of the said catalyst bodies which exists in the cross section of this trunk | drum is larger than the number of the said catalyst bodies which exist in the cross section of the said neck part, The 1-3 characterized by the above-mentioned. The catalyst body unit according to any one of the above. The unit base is detachably fixed to the top wall of the chamber,
The catalyst body unit according to any one of claims 1 to 4, wherein a weight body is disposed on the return portion, and the catalyst body is stretched. A guide is provided on the outer periphery of the source gas supply pipe,
6. The catalyst body unit according to claim 5, wherein the guide supports the weight body in a swingable manner and does not support the catalyst body.   The catalyst body has a dense portion in which the catalyst body is arranged more densely than the other portion in the return portion, and the catalyst body is stretched with the dense portion serving as a weight. The catalyst body unit according to any one of claims 1 to 4.   8. The catalyst body unit according to claim 7, wherein a mass of the dense portion is 10% or more and 40% or less with respect to a total mass of the catalyst body.   The catalyst body unit according to any one of claims 1 to 8, wherein the source gas supply pipe has conductivity and also serves as the electrode pair.   The catalyst body unit according to any one of claims 1 to 9, wherein a part or the whole of the outer periphery of the source gas supply pipe is covered with a detachable tubular insulating member.   A heating element CVD apparatus comprising the catalyst body unit according to any one of claims 1 to 10.

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