JP2016099533A - Apparatus for manufacturing optical functional element and method for manufacturing optical functional element using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing an optical functional element, which can manufacture an optical functional element in a short time, and a method for manufacturing an optical functional element using the above apparatus.SOLUTION: An apparatus 20 for manufacturing an optical element is provided, which aims to manufacture an optical functional element from glass 10, the optical functional element comprising a plurality of wave plate units having different directions of optical axes, which are two-dimensionally arranged in a plurality of rows and a plurality of columns. The apparatus includes: a laser output device 21 that outputs a femtosecond laser beam 31 (hereinafter represented by a laser beam); a lens 23 that converges the laser beam 31 to irradiate the glass 10; a wave plate array 24 fixed to the surface of the glass 10 to be irradiated with a laser beam 33; and a motor-driven stage 27 to relatively move the glass 10 to the laser beam 33. The wave plate array 24 includes wave plate cells which are two-dimensionally arranged into a plurality of rows and a plurality of columns; the lens 23 reduces a cross section of the laser beam 33 into a size to be included in one wave plate cell; and the motor-driven stage 27 relatively moves the laser beam 33 to be sequentially transmitted through the plurality of wave plate cells.SELECTED DRAWING: Figure 7

Description

  The present invention relates to an optical functional element manufacturing apparatus and an optical functional element manufacturing method using the same.

  The optical functional element rotates the polarization direction of incident light or transmits only polarized light in a predetermined direction, such as a polarization imaging filter. For this reason, the optical functional element is formed by arraying wavelength plate units in a plurality of rows and columns in two dimensions in order to rotate the polarization direction of incident light. Each wave plate unit is configured such that high refractive index regions and low refractive index regions are formed alternately and in parallel, thereby exhibiting birefringence and having an optical axis in one direction.

  As a method of manufacturing an optical functional element comprising such a wave plate unit, as shown in FIG. 1 of Patent Document 1, a pulsed laser is generated from a laser output unit (excitation light generation unit 3) and a wave plate (linearly polarized light) is produced. A method of irradiating the light-transmitting material (glass material 1) by converging the pulsed laser beam that has passed through the plate 8) and passed through the wavelength plate (linear polarizing plate 8) at the condensing part (lens 6). . The translucent material (glass material 1) is placed on the relative movement part (electrical stage 7) and moves perpendicularly to the irradiation direction of the pulsed light laser.

JP 2004-310009 A

  However, in the manufacturing method described in Patent Document 1, as shown in FIGS. 5 to 11 of Patent Document 1, the parallel lines in the refractive index change region are in one direction, that is, the direction of the optical axis is in one direction. It becomes only. In order to change the direction of the optical axis for each wave plate unit, it is necessary to change the polarization direction of the linearly polarized light of the pulsed laser for each wave plate unit. In order to change the polarization direction of the linearly polarized light of the pulsed light laser for each wavelength plate unit, while moving the translucent material (glass material 1) irradiated with the pulsed light laser on the electric stage, the adjacent new wavelength plate unit When the translucent material (glass material 1) moves to the position where the film is formed, it is necessary to rotate the wave plate (linear polarizing plate 8) while blocking the pulsed laser with a shutter or the like. In other words, in order to manufacture an optical functional element having a different optical axis direction for each wave plate unit, according to the manufacturing method described in Patent Document 1, the light transmitted by the light-transmitting material (glass material 1) is transferred to the pulsed light by the shutter. It is necessary to synchronize the cutoff of the laser and the rotation of the wave plate (linear polarizing plate 8).

  For this reason, in order to manufacture an optical function element by the manufacturing method of the said patent document 1, many operations are required and there exists a problem that manufacturing time is required. In particular, when an optical functional element composed of a number of wave plate units is manufactured by the manufacturing method described in Patent Document 1, this problem becomes significant.

  Therefore, an object of the present invention is to provide an optical functional element manufacturing apparatus that can be manufactured in a short time and a manufacturing method using the same.

In order to solve the above problems, an optical functional element manufacturing apparatus according to claim 1 of the present invention includes an optical functional element in which a plurality of wavelength plate units having different optical axis directions are two-dimensionally arranged in a plurality of rows and a plurality of columns. An optical functional element manufacturing apparatus for manufacturing from a translucent material,
A laser output unit for outputting a femtosecond laser;
A condensing unit that converges the femtosecond laser output from the laser output unit and irradiates the translucent material;
A waveplate array / polarizer array fixed to the surface of the translucent material irradiated with the femtosecond laser;
A relative movement unit that relatively moves the translucent material and the femtosecond laser applied to the translucent material;
The wave plate array / polarizer array has wave plate cells / polarizer cells arranged two-dimensionally in a plurality of rows and columns,
The condensing part is sized so that the cross section of the wavelength plate array / polarizer array of the femtosecond laser can be accommodated in one wavelength plate cell / polarizer cell by the convergence.
The relative movement unit sequentially irradiates the plurality of wave plate cells / polarizer cells with the femtosecond laser by the relative movement.

An optical functional element manufacturing apparatus according to claim 2 of the present invention is the optical functional element manufacturing apparatus according to claim 1, wherein the wave plate unit is substantially rectangular.
The relationship between the material and shape of the condensing part, the parameters of the femtosecond laser, and the material of the translucent material satisfies the following expression (1).

(P-2d · tan θ) /P≧0.5 (1)
d: Distance from the surface of the translucent material irradiated with the femtosecond laser to the position where the wave plate unit is formed θ: Convergence angle with respect to the optical axis of the femtosecond laser P: Wave plate unit having the substantially rectangular shape Further, the optical functional element manufacturing apparatus according to claim 3 of the present invention is the optical functional element manufacturing apparatus according to claim 1, wherein the wavelength plate cell in the wavelength plate array / polarizer array is used. / The polarizer cell is made of glass by laser processing or imprint technology, or is a photonic crystal wave plate.

In addition, the optical functional element manufacturing apparatus according to claim 4 of the present invention is the optical functional element manufacturing apparatus according to any one of claims 1 to 3, wherein the wavelength plate array is a wavelength of a femtosecond laser. Having a phase difference of π or π / 2 with respect to
The arrangement of the wave plate cells in the wave plate array is the same as the arrangement of the wave plate units in the optical functional element to be manufactured.

  Moreover, the manufacturing method of the optical function element which concerns on Claim 5 of this invention uses the manufacturing apparatus of the optical function element as described in any one of Claims 1 thru | or 4.

  According to the optical functional element manufacturing apparatus and the optical functional element manufacturing method using the same, the optical functional element can be manufactured in a short time.

It is a top view which shows typically the optical function element which concerns on embodiment of this invention. It is a top view which shows the high refractive index part in the refractive index change area | region of the same optical function element with a line. It is a perspective view which shows typically the wavelength plate unit which comprises the same optical function element. It is a perspective view which shows the high refractive index part in the refractive index change area | region of the wavelength plate unit which comprises the same optical function element with a line. It is a perspective view for demonstrating the principle in which a spherical refractive index change area | region is formed. It is a perspective view for demonstrating the principle in which a column-shaped refractive index change area | region is formed. It is a perspective view which shows schematically the manufacturing apparatus of the same optical function element. It is an expansion perspective view for demonstrating the state in which a column-shaped refractive index change area | region is formed with the manufacturing apparatus. It is a schematic diagram of the glass and wavelength plate array for demonstrating the state in which a column-shaped refractive index change area | region is formed with the same manufacturing apparatus, an enlarged plan view is shown in the upper part, and an expanded sectional view is shown in the lower part. It is a schematic diagram of the glass and wavelength plate array for demonstrating a parameter required for the manufacturing apparatus, and shows an expanded sectional view.

Hereinafter, an optical functional element manufacturing apparatus and a manufacturing method using the same according to embodiments of the present invention will be described with reference to the drawings.
First, an outline of the optical functional element will be described.

  This optical functional element is composed of a wave plate unit that is two-dimensionally arranged in a large number of rows and a large number of columns. In the present embodiment, as shown in FIG. 1, as shown in FIG. It is assumed that they are arranged in One wave plate unit 3 has a rectangular shape and is configured such that its optical axis 4 is in one direction. Of the many (6 in FIG. 1, 6 in 6 rows and 6 columns) wave plate units 3, the directions of the optical axes 4 of the four wave plate units 3 adjacent in rows and columns are all Be different and regular. As an example, as shown in FIG. 1, the optical axes 4 of the four wave plate units 3 adjacent in rows and columns form 45 ° with respect to each other. The reason why the direction of the optical axis 4 is made regular is to know the polarization direction of the incident light input to the optical functional element 1. Specifically, when incident light is input to the optical functional element 1, the polarization direction of the input incident light is determined by the relationship between the polarization direction of the input incident light and the direction of the optical axis 4 of the wave plate unit 3. Change. Here, a case where the optical functional element 1 is provided with a polarizer (an optical element that transmits only a certain polarization direction), that is, a case where incident light is input to the polarization imaging filter will be described. Incident light transmitted through the optical functional element 1 is converted into light having various polarization directions according to the direction of the optical axis 4. Of the converted incident light, only light having a specific polarization direction passes through the polarizer. For this reason, the incident light transmitted through the polarization imaging filter has different light intensity depending on the polarization direction. From this difference in light intensity, the polarization direction of the incident light input to the optical functional element 1 becomes clear.

FIG. 1 is a diagram schematically showing the optical axis 4 of the optical functional element 1 with double arrows. The actual optical axis 4 is a refractive index change formed on glass (an example of a light-transmitting material). It is determined by the action of the region (consisting of a high refractive index portion and a low refractive index portion). As will be described later, the refractive index changing region is irradiated with a femtosecond laser (pulse light laser having a pulse width of 10 ⁻¹² seconds to 10 ⁻¹⁵ seconds) on the glass, so that the focal point of the femtosecond laser is focused. It is formed. When the high refractive index portion is represented by a line, a parallel line is seen in each wave plate unit 3 as shown in FIG. That is, this parallel line is the high refractive index portion 11 whose refractive index is increased due to excess oxygen. On the other hand, the part other than the parallel lines is the low refractive index portion 12 whose refractive index is lowered due to oxygen defects. The refractive index changing region composed of the high refractive index portion 11 and the low refractive index portion 12 can be said to be a periodic structure because the high refractive index portions 11 and the low refractive index portions 12 appear alternately. This periodic structure provides a function as a wave plate. As is clear from a comparison between FIG. 1 and FIG. 2, the direction of the optical axis 4 is a direction parallel to the parallel line of the high refractive index portion 11.

Next, paying attention to the four wavelength plate units 3 adjacent in rows and columns, which is one unit in which the direction of the optical axis 4 is regularized, a description will be given based on FIG. 3 and FIG.
FIG. 3 is a perspective view schematically showing four wave plate units 3 adjacent in rows and columns, and FIG. 4 is a perspective view actually showing the four wave plate units 3 in FIG. As shown in FIG. 4, the wave plate unit 3 has a plurality of columnar refractive index changing regions (hereinafter simply referred to as columnar regions 5) formed in parallel (that is, in a bowl shape) on the same plane. . As shown in FIGS. 5 and 6, each cylindrical region 5 is formed by linearly connecting spherical refractive index changing regions 5 </ b> S. As shown in FIG. 5, the spherical refractive index changing region 5S is irradiated with a focused femtosecond laser 34 having a certain polarization and being focused on glass (which is an example of a translucent material). It is formed at the condensing position of the second laser 34. Therefore, as shown in FIG. 6, each cylindrical region 5 is moved to the collection of the femtosecond laser 34 by relatively moving the femtosecond laser 34 and the glass 10 irradiated with the femtosecond laser 34. It is formed in the locus of the light position.

  Hereinafter, the manufacturing apparatus of the optical functional element 1 using the principle that the cylindrical region 5 is formed will be described with reference to FIGS. 7 and 8. In the following, a simple femtosecond laser is denoted by reference numeral 31, a converged femtosecond laser is denoted by reference numeral 33, and a converged femtosecond laser having a constant polarization is denoted by reference numeral 34.

  As shown in FIG. 7, the manufacturing apparatus 20 for the optical functional element 1 includes a laser output device (which is an example of a laser output unit) 21 that outputs a femtosecond laser 31, and a femto output from the laser output device 21. A mirror 22 that reflects the second laser 31 toward the glass (which is an example of a translucent material) 10, and a lens (which is an example of a condensing unit) 23 that converges the femtosecond laser 31 reflected by the mirror 22; The wave plate array 24 fixed to the surface of the glass 10 to which the femtosecond laser 33 is irradiated, and the glass 10 to which the wave plate array 24 is fixed are placed, and the femtosecond lasers 33 and 34 are mounted. And an electric stage (which is an example of a relative movement unit) 27 that can move the glass 10.

As shown in FIG. 7, the wavelength plate array 24 is covered with a mask 26 so that the focused femtosecond laser 33 is not directly irradiated onto the glass 10. The wave plate array 24 is fixed to the glass 10 so that the wave plate array 24 and the glass 10 are in close contact with each other, for example, as shown in FIG. The wave plate array 24 is formed by arranging wave plate cells 25 in a two-dimensional manner in a large number of rows and a large number of columns. The wave plate cell 25 has a function of converting input polarized light. That is, the wave plate cell 25 converts, for example, circularly polarized light into linearly polarized light, or converts linearly polarized light into linearly polarized light with a different angle. By applying this function, the wave plate cell 25 variously converts the polarization of the femtosecond laser 33 irradiated on the wave plate array 24 according to the optical axis 25a. For example, the wave plate cell 25 converts the polarization direction of the linearly polarized light of the femtosecond laser 33 into different angles, or converts the circularly polarized light of the femtosecond laser 33 into linearly polarized light with various polarization directions.
(1) When the femtosecond laser 33 irradiated to the wave plate array 24 is linearly polarized light, the wave plate array 24 having the function of a λ / 2 wave plate that gives a phase difference π to the wavelength of the femtosecond laser 33 is used. To do. Further, these wave plate cells 25 are arranged in an array corresponding to the optical functional element to be manufactured, that is, four adjacent in rows and columns, and the optical axis 25a directions are all different and regularly arranged.
(2) When the femtosecond laser 33 irradiated to the wave plate array 24 is circularly polarized, the wave plate array 24 having a function of a λ / 4 wave plate that gives a phase difference π / 2 to the wavelength of the femtosecond laser 33. Is used. These wave plate cells 25 are arranged in an array corresponding to the optical functional element 1 to be manufactured, that is, four adjacent in rows and columns, and the optical axis 25a directions are different and regularly arranged.

  As shown in FIGS. 8 and 9, the lens 23 converges the femtosecond laser 33 to such a size that the cross section of the femtosecond laser 33 in the wave plate array 24 can be accommodated in one wave plate cell 25. It is. This is because when the converged femtosecond laser 33 passes through the plurality of wave plate cells 25, an appropriate refractive index change region is not formed in the glass 10 as indicated by reference numeral N in FIG. The femtosecond laser 34 transmitted through only one wave plate cell 25 has a constant polarization, thereby forming a spherical refractive index changing region 5S at a predetermined depth d of the glass 10. Note that the periodic structure of the refractive index change region depends on the polarization of the femtosecond laser 34.

  As shown in FIG. 7, the electric stage 27 moves the placed glass 10 to move the femtosecond lasers 33 and 34 and the glass 10 irradiated with the femtosecond lasers 33 and 34. Relative movement. The relative movement direction includes at least the optical axis direction (also referred to as Z-axis direction) of the femtosecond lasers 33 and 34 and the direction perpendicular to the optical axis direction (also referred to as X-axis direction or Y-axis direction). By the relative movement, a spherical refractive index changing region 5S is continuously formed on the glass 10, and a cylindrical region 5 as shown in FIGS. 8 and 9 is formed. By the relative movement in the direction perpendicular to the optical axis direction (X-axis direction or Y-axis direction), femtosecond lasers are sequentially irradiated to the adjacent wave plate cells.

  Here, when the optical functional element 1 to be manufactured is a polarization imaging filter of a CCD, as shown in FIG. 10, the length of one side of the CCD pixel is P, the predetermined depth is d, and the femtosecond laser 34 When the convergence angle with respect to the optical axis is θ, the material and shape of the lens 23, the parameters of the femtosecond laser 31 and the material of the glass 10 (for example, a cover glass of a CCD) are determined so as to satisfy the following expression (1). Is done.

(P-2d · tan θ) /P≧0.5 (1)
By determining in this way, the length ratio of one side of the refractive index changing region in the wavelength plate unit 3 corresponding to the pixel becomes 0.5 or more, so the refractive index in the wavelength plate unit 3 corresponding to the pixel. The area ratio of the change region is 0.25 or more. If the area ratio of the refractive index change region in the wave plate unit 3 corresponding to the pixel is 0.25 or more, the manufactured optical functional element 1 operates effectively as a polarization imaging filter of a CCD.

Hereinafter, a method for manufacturing the optical functional element 1 using the manufacturing apparatus 20 will be described.
First, the wavelength plate array 24 whose periphery is covered with the mask 26 is brought into close contact with the glass 10 used as the optical functional element 1 and fixed with a jig or the like. Then, as shown in FIG. 7, the glass 10 is placed on the electric stage 27.

  Next, the femtosecond laser 31 is output from the laser output device 21. The femtosecond laser 31 is reflected by the mirror 22, converged by the lens 23, and applied to the wave plate array 24. As shown in FIGS. 8 and 9, the femtosecond laser 33 irradiated to the wave plate array 24 has a size in which the cross section of the wave plate array 24 is accommodated in one wave plate cell 25. Each plate cell 25 is irradiated.

The femtosecond laser 33 irradiated to the wave plate cell 25 can obtain linearly polarized light having a specific polarization direction according to the optical axis 25 a of the wave plate cell 25. In particular,
(1) When the femtosecond laser 33 irradiated to the wave plate array 24 is linearly polarized light, the wave plate array 24 having the function of a λ / 2 wave plate that gives a phase difference π to the wavelength of the femtosecond laser 33 is used. Then, the linearly polarized light is converted into linearly polarized light having a specific polarization direction according to the direction of the optical axis 25a.
(2) When the femtosecond laser 33 irradiated to the wave plate array 24 is circularly polarized, the wave plate array 24 having a function of a λ / 4 wave plate that gives a phase difference π / 2 to the wavelength of the femtosecond laser 33. Is used, the circularly polarized light is converted into linearly polarized light having a specific polarization direction in accordance with the direction of the optical axis 25a.

  As a result, the femtosecond laser 34 transmitted through the wave plate cell 25, that is, the femtosecond laser 34 having a specific polarization direction forms a spherical refractive index change region 5S at a predetermined depth d of the glass 10. The spherical refractive index change region 5S has a periodic structure whose orientation is perpendicular to the specific polarization direction. Next, by moving the glass 10 by the electric stage 27, the spherical refractive index change region 5S is continuously formed, and the cylindrical region 5 is formed.

  As the glass 10 moves, femtosecond lasers 34 are sequentially irradiated to the adjacent wave plate cells 25 as shown in FIGS. Here, the polarization of the femtosecond laser 34 transmitted through the wave plate cell 25 depends on the wave plate cell 25. For this reason, when the femtosecond laser 33 is irradiated to the adjacent wave plate cell 25 (that is, the wave plate cell 25 having a different optical axis 25a direction), the polarization of the femtosecond laser 33 is different. The orientation of the structure will also be different. When the femtosecond laser 33 is irradiated to the two adjacent wave plate cells 25, the femtosecond laser 33 has a plurality of polarizations, so that an appropriate refractive index is obtained as indicated by reference numeral N in FIG. A change area (cylindrical area 5) is not formed.

  As described above, according to the manufacturing apparatus 20 of the optical functional element 1 and the manufacturing method using the same, it is only necessary to move the glass 10 irradiated with the femtosecond laser 33 by the electric stage 27. As a result, the optical functional element 1 can be manufactured in a short time.

  In addition, since the area ratio of the refractive index change region in the wave plate unit 3 corresponding to the CCD pixel is 0.25 or more, the optical functional element 1 that operates effectively as a polarization imaging filter for the CCD can be manufactured in a short time. Can do.

  In the above embodiment, the optical axes 4 of the four wavelength plate units 3 adjacent in rows and columns have been described as being 45 ° to each other, but are not limited to 45 ° and are not limited to regular directions. If it is.

  In the above embodiment, the electric stage 27 has been described as an example of the relative moving unit. However, the object to be moved may be the femtosecond laser 33 instead of the wavelength plate array 24 and the glass 10.

Furthermore, although glass 10 was demonstrated as an example of a translucent member in the said embodiment, it is not limited to this, What is necessary is just a member which permeate | transmits light.
In addition, in the above-described embodiment, the lens 23 has been described as an example of the condensing unit. However, the lens 23 is not limited thereto, and any lens that converges the femtosecond laser 31 may be used.

  In the above embodiment, the movement by the electric stage 27 has been described as the X-axis direction or the Y-axis direction. However, the X-axis direction and / or the Y-axis direction may be combined with the Z-axis direction.

  Moreover, in the said embodiment, although the manufacturing apparatus 20 of the said optical function element 1 was equipped, the waveplate array 24 which arranged the waveplate cell 25 in many rows and many rows in two dimensions was demonstrated, Polarizer A polarizer array in which cells are two-dimensionally arranged in many rows and many columns may be used. In this case, the optical axis 25a of the wave plate cell 25 becomes the transmission axis of the polarizer cell. Of course, the polarizer cells are arranged in an array corresponding to the optical functional element 1 to be manufactured, that is, four adjacent in rows and columns, and are regularly arranged with different transmission axis directions. Thereby, when the femtosecond laser 33 irradiated to the polarizer array is circularly polarized light, only linearly polarized light having a polarization direction parallel to the transmission axis direction of the polarizer cell is transmitted, and linearly polarized light having a specific polarization direction is obtained. .

  In the above embodiment, the wave plate array 24 is fixed to the glass 10 as described above, for example, as shown in FIG. 8, so that the wave plate array 24 and the glass 10 are in close contact with each other. However, the present invention is not limited to this. That is, there may be a gap between the wave plate array 24 (polarizer array) and the glass 10.

  In the above embodiment, the wavelength plate array 24 has not been described in detail, but the arrangement of the wave plate cells 25 in the wave plate array 24 is the same as the arrangement of the wave plate units 3 in the optical functional element 1 to be manufactured. Are the same. Thereby, the larger optical function element 1 can be manufactured.

  Further, although the wave plate array 24 has not been described in detail in the above embodiment, the wave plate cell 25 in the wave plate array 24 is made of glass by laser processing or imprint technology, or photo It is a nick crystal wave plate. As a result, an extremely small wave plate cell 25 is manufactured, so that the wave plate cell 25 in the wave plate array 24 becomes finer, and the optical functional element 1 composed of more wave plate units 3 can be manufactured. .

DESCRIPTION OF SYMBOLS 1 Optical function element 3 Wave plate unit 4 Optical axis 5 Cylindrical area | region 5S Spherical refractive index change area | region 10 Glass 11 High refractive index part 12 Low refractive index part 21 Laser output device 22 Mirror 23 Lens 24 Wave plate array 25 Wave plate cell 26 Mask 27 Electric stage 31 Femtosecond laser 33 Converged femtosecond laser

Claims (5)

An optical functional element manufacturing apparatus for manufacturing an optical functional element in which a plurality of wave plate units having different optical axis directions are arranged in a plurality of rows and columns in two dimensions, from a light-transmitting material,
A laser output unit for outputting a femtosecond laser;
A condensing unit that converges the femtosecond laser output from the laser output unit and irradiates the translucent material;
A waveplate array / polarizer array fixed to the surface of the translucent material irradiated with the femtosecond laser;
A relative movement unit that relatively moves the translucent material and the femtosecond laser applied to the translucent material;
The wave plate array / polarizer array has wave plate cells / polarizer cells arranged two-dimensionally in a plurality of rows and columns,
The condensing part is sized so that the cross section of the wavelength plate array / polarizer array of the femtosecond laser can be accommodated in one wavelength plate cell / polarizer cell by the convergence.
The apparatus for manufacturing an optical functional element, wherein the relative movement unit sequentially irradiates the plurality of wave plate cells / polarizer cells with the femtosecond laser by the relative movement. The wave plate unit is substantially rectangular,
The optical functional element manufacturing apparatus, wherein the relationship between the material and shape of the condensing part, the parameters of the femtosecond laser, and the material of the translucent material satisfies the following expression (1): .
(P-2d · tan θ) /P≧0.5 (1)
d: Distance from the surface of the translucent material irradiated with the femtosecond laser to the position where the wave plate unit is formed θ: Convergence angle with respect to the optical axis of the femtosecond laser P: Wave plate unit having the substantially rectangular shape Length of one side in   3. The wave plate cell / polarizer cell in the wave plate array / polarizer array is made of glass by laser processing or imprint technology, or a photonic crystal wave plate. The manufacturing apparatus of the optical function element of description. The waveplate array has a phase difference of π or π / 2 with respect to the wavelength of the femtosecond laser;
The arrangement of the wave plate cells in the wave plate array is the same as the arrangement of the wave plate units in the optical function element to be manufactured. manufacturing device. An optical functional element manufacturing method using the optical functional element manufacturing apparatus according to claim 1.

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