JP2016079006A - Storage shed - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a storage shed capable of storing a control unit in a body part of the storage shed, without enlarging a size of the body part.SOLUTION: A storage shed 1 has an inside space A defined by a body part 3 forming a substantially rectangular solid shape and storing a storage container F in the inside space, and the inside space is provided with a rack 7 extending in one direction and having a plurality of storage shelves 8 in the height direction and a crane 9 movable in one direction and transferring the storage container to the rack, and a space under a storage shelf 8A of the lowest stage of the rack is formed with a first storage part 71 for arranging at least a part of a control unit (a purge device control unit 34, a crane control unit 51, a safety control unit 53 and a stocker control unit 57) for controlling a device provided in the storage shed including the crane.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a storage.

  2. Description of the Related Art A storage is known that includes a stacker crane in which a rack is disposed in an internal space defined by a main body such as a partition, and a storage object can be transferred to the rack. In such a storage, it is necessary to store a control unit (controller) such as a stacker crane, an operation panel for controlling a port for taking in and out the stored object in the main body, and a control device in the main body. Patent Document 1 discloses a storage in which accommodation spaces for accommodating such control units are provided in the four corner spaces of the main body in a plan view.

JP 2004-91154 A

  However, since the control unit is generally one block and large in size, it may not be accommodated in the accommodation space. For this reason, it is necessary to increase the size of the main body of the storage. Therefore, for example, when the storage is viewed in plan, a part of the control unit is arranged outside the main body of the storage, such as under the floor of the clean room outside the part where the main body of the storage is arranged. Thus, the problem has been solved without increasing the size of the main body of the storage. However, it may not be easy to secure a space for accommodating or arranging the control unit outside the main body of the storage.

  Then, an object of this invention is to provide the storage which can accommodate a control unit in the main-body part of a storage, without enlarging the size of a main-body part.

  The storage of the present invention has an internal space defined by a main body portion having a substantially rectangular parallelepiped shape, and stores storage objects in the internal space, and the internal space extends in one direction. In addition, a rack having a plurality of shelves in the height direction and a crane that is movable in one direction and that transfers a storage object to the racks are provided below the lowermost shelf of the rack. In the space, a first accommodating portion for arranging at least a part of a control unit that controls an apparatus provided in the storage including the crane is formed.

  According to the storage with this configuration, the first accommodating portion is provided in a space below the lowest shelf of the rack, which is a conventional dead space. As a result, the space that was a dead space is effectively used, and at least a part of the control unit is arranged, so that the control unit can be placed in the main body of the storage without increasing the size of the main body. It can be accommodated.

  The storage of the present invention is further above the lowest shelf of the rack, and when the main body is viewed in plan, a second accommodating portion is further formed in at least one corner of the main body. A part of the control unit may be arranged in the second housing part.

  According to the storage with this configuration, it is possible to selectively dispose a part of the control unit in the second accommodating portion where the worker can easily work. Thereby, even if it is a case where a control unit is arrange | positioned to the 1st accommodating part where work is hard to carry out, work efficiency can be maintained.

  In the storage of the present invention, a control unit that is handled more frequently by the operator may be arranged in the second accommodation unit than the control unit arranged in the first accommodation unit.

  According to the storage with this configuration, the control unit that is frequently handled by the operator can be selectively arranged in the second housing part that is easy for the operator to work, so that the work efficiency of the operator can be improved.

  The storage of the present invention may further include a housing that defines a certain space that straddles the first housing portion and the second housing portion, and the control unit may be disposed inside the housing.

  According to the storage with this configuration, for example, even when the control units are selectively divided into the first storage unit and the second storage unit according to the difference in handling, Can be combined into a single housing.

  In the storage of the present invention, the storage object is a storage container in which the storage object is stored, and the rack is provided with a purge device that purges the inside of the storage container with a purge gas, and the purge gas is supplied to the purge device. The purge gas supply source to be performed may be disposed in the second storage unit.

  According to the storage of this configuration, the purge gas supply source that is difficult to divide due to the configuration of the apparatus is arranged in the second accommodating portion.

  In the storage of the present invention, the traveling track portion on which the crane travels is disposed at a position lower than the lowest shelf of the rack and on the front side of the shelf, and the first storage portion is disposed on the traveling track portion. You may form in the position which opposes.

  According to the storage of this configuration, the crane is not able to transfer the storage object, and is a dead space, that is, a position below the lowest shelf of the rack and the traveling track portion. The opposing space can be used effectively.

  ADVANTAGE OF THE INVENTION According to this invention, the storage which can accommodate a control unit in the main-body part of a storage can be provided, without enlarging the size of a main-body part.

It is sectional drawing seen from the side surface side when cut | disconnecting along the surface parallel to the side surface which shows the storage which concerns on embodiment. It is sectional drawing seen from the II-II line of the storage of FIG. It is sectional drawing seen from the III-III line of the storage of FIG. It is the figure which showed schematic structure of the purge apparatus of FIG.

  Hereinafter, an embodiment will be described with reference to the drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted. The dimensional ratios in the drawings do not necessarily match those described. In the following description, for the sake of convenience, the left side in FIG. 1 is referred to as the front side, and the right side is referred to as the back side.

  The storage 1 according to an embodiment will be described. The storage 1 purges the inside of a storage container F such as a FOUP (Front Opening Unified Pod) in which a storage object W such as a semiconductor wafer and a glass substrate is stored with a purge gas (for example, nitrogen gas) It has a function as a storage for storing the storage container F. The storage 1 is provided in a clean room, for example.

  As shown in FIGS. 1 and 2, the storage 1 includes a main body 3, a rack 7, a crane 9, an OHT port 21, a purge device 30, a crane control unit 51, a safety control unit 53, a stocker control unit 57, A first accommodating portion 71 and a second accommodating portion 75 are mainly provided.

  The main body 3 is a part that defines the internal space A of the storage 1 and is formed by a plurality of partitions (walls). The rack 7 is a part for storing the storage container F, and is normally provided in one or two rows (here, two rows). Each rack 7 extends in a predetermined direction X, and is arranged substantially in parallel so that two adjacent racks 7 and 7 face each other. Each rack 7 is formed with a plurality of storage shelves (shelves) 8 along the predetermined direction X and the vertical direction Z in the height direction (Z-axis direction) on which the storage containers F are placed and stored.

  The crane 9 is a mechanism for moving the storage container F in and out of the storage shelf 8 and moving between the storage shelves 8, and is disposed in an area sandwiched between the opposing racks 7 and 7. The crane 9 can move in the predetermined direction X along the rack 7 by traveling on the track (traveling track portion) 9 </ b> C disposed on the floor surface along the extending direction X of the rack 7. The track 9C is positioned below the lowermost storage shelf 8A of the racks 7 and 7 and is disposed on the front side of the storage shelf 8A. In addition, the front side of the storage shelf 8 (8A) refers to the side where the storage container F is put in and out of the storage shelf 8 (8A). The loading platform 9A of the crane 9 is provided so as to be movable up and down along the guide rail 9B, and the storage container F can be taken in and out of the plurality of storage shelves 8 provided in the vertical direction.

  The storage container F is put into and out of the storage 1 from an OHT (Overhead Hoist Transfer) port 21. The OHT port 21 is a part that delivers the storage container F between the overhead traveling vehicle 27 that travels on the track 25 laid on the ceiling and the storage 1, and has a conveyor 21 </ b> A that conveys the storage container F. .

  The purge device 30 is a device that purges the inside of the storage container F with a purge gas. As shown in FIG. 4, the purge device 30 includes a purge gas supply source 31, a supply pipe 32, a flow rate control unit 33, a purge device control unit 34, a placement unit 35, a purge nozzle 36, and an exhaust nozzle 37. And an exhaust pipe 38.

  The purge gas supply source 31 is a tank that stores the purge gas. The supply pipe 32 is a metal pipe connecting the purge gas supply source 31 and the purge nozzle 36, and supplies the purge gas from the purge gas supply source 31 to the purge nozzle 36. 1-3, the supply pipe 32 from the purge gas supply source 31 to the purge nozzle 36 is not shown. The flow rate control unit 33 is disposed in the middle of the pipe connecting the purge gas supply source 31 and the purge nozzle 36, and adjusts the flow rate of the purge gas flowing through the supply pipe 32.

  The purge device control unit 34 is a control unit that adjusts the flow rate control unit 33. The purge device control unit 34 includes a control unit that adjusts the flow rate control unit 33, a control power source for the flow rate control unit 33, and the like. The purge device control unit 34 and the flow rate control unit 33 are connected by electrical wiring such as a connector or a cord. Similarly, the connection between the purge device control unit 34 and the input unit 34A and the connection between the purge device control unit 34 and the display unit 34B are made by electrical wiring such as a connector or a cord.

  The placement unit 35 is a part on which the storage container F is placed. One placement unit 35 is disposed on one storage shelf 8. The purge nozzle 36 is connected to the storage container F and supplies purge gas into the storage container F. The exhaust nozzle 37 is connected to the storage container F, and discharges the purge gas inside the storage container F to the exhaust pipe 38. The exhaust pipe 38 is a metal pipe that connects the exhaust nozzle 37 and the outside of the storage 1, and discharges the purge gas inside the storage container F to the outside of the storage 1. 1-3, the exhaust pipe 3838 from the exhaust nozzle 37 to the outside of the storage 1 is not shown.

  Note that the exhaust nozzle 37 and the exhaust pipe 38 may not be provided. In this case, the purge gas is discharged from the cover portion of the storage container F to the internal space A of the storage.

  Returning to FIGS. 1 and 2, the crane control unit 51 is a part that controls the traveling operation and the transfer operation of the crane 9, and includes, for example, a servo driver, a regenerative resistance device, and the like.

  The safety control unit 53 is a control unit for controlling the safety system based on, for example, an input (signal) from a door switch and / or a light curtain provided in the storage 1. For example, a simple sequencer dedicated to a safety circuit having a function that can be used for the safety circuit.

  The stocker control unit 57 includes a control panel (including a breaker, PLC (sequencer), etc.) for controlling the operations of the crane 9, the OHT port 21, and the purge device 30, and other control devices. Of the stocker control unit 57, a breaker, a PLC (sequencer), and the like are disposed in the first housing portion, and a servo driver, a regenerative resistance device, and the like are disposed in the second housing portion.

  As shown in FIG. 2, the first storage portion 71 is formed in a space 61 below the lowermost storage shelf 8 </ b> A of the rack 7, and includes the crane 9, the OHT port 21, and the purge device 30. 1 is a portion in which at least a part of a control unit (purge device control unit 34, crane control unit 51, safety control unit 53, and stocker control unit 57) that controls the device 1 is arranged. An opening / closing door may be provided in the partition that covers the outside of the first accommodating portion 71.

  In the present embodiment, the first accommodating portion 71 is formed with three accommodating portions of the first accommodating portions 71A, 71B, 71C in order from the left side on the back side of the main body portion 3, and on the front side of the main body portion 3, Three accommodating portions of first accommodating portions 71D, 71E, 71F are formed in order from the left side. A crane control unit 51 is disposed in the first housing portion 71A and the first housing portion 71C, and a safety control unit 53 is disposed in the first housing portions 71B and 71E. Further, the purge device control unit 34 is disposed in the first housing portion 71D and the first housing portion 71F.

  As shown in FIG. 2, the second storage portions 75A, 75B, and 75C are spaces 63 above the lowermost storage shelf 8A of the rack 7, and as shown in FIG. A portion that is formed in a corner space of the main body 3 when viewed from above, and at least a part of the purge device control unit 34, the crane control unit 51, the safety control unit 53, and the stocker control unit 57 is disposed. It is. An opening / closing door may be provided in the partition that covers the outside of the second housing portion 75. In addition, illustration of the storage container F is abbreviate | omitted in FIG.

  In the present embodiment, as shown in FIG. 2, the second housing part 75 is formed with two housing parts 75 </ b> A and 75 </ b> B in order from the lower side on the left side of the back surface side of the main body part 3. The second housing portion 75C is formed on the right side of the back surface side of the main body portion 3. In addition, the second accommodating portion 75 is formed with two accommodating portions of the second accommodating portions 75E and 75F in order from the lower side on the left side on the front side of the main body portion 3, and the second accommodating portion 75E is formed on the right side on the front side of the main body portion 3. Two accommodating portions 75G are formed.

  A control panel of the stocker control unit 57 is disposed in the second housing portion 75A and the second housing portion 75C, and other control devices of the stocker control unit 57 are disposed in the second housing portion 75B. Further, the purge device control unit 34 is disposed in the second storage portion 75E and the second storage portion 75G.

  Furthermore, in the present embodiment, an enclosure (housing) 81 that defines a space straddling the first housing portion 71A and the second housing portion 75A is further provided, and is electrically isolated from other spaces. Similarly, an enclosure 82 that defines a space straddling the first housing portion 71C and the second housing portion 75C, an enclosure 83 that defines a space straddling the first housing portion 71D and the second housing portion 75E, And an enclosure 84 that defines a space straddling the first accommodating portion 71F and the second accommodating portion 75G. Similarly, the first accommodating portion 71B and the first accommodating portion 71E further include enclosures 85 and 86 that define the respective accommodating portions, and the second accommodating portion 75B and the second accommodating portion 75F include the respective accommodating portions. Enclosures 87 and 88 are further provided.

  The 1st accommodating part 71 of the storage 1 of the said embodiment is provided in the space 61 lower than the lowermost storage shelf 8A of the rack 7, which is a conventional dead space. Thus, at least a part of the control unit (purge device control unit 34, crane control unit 51, safety control unit 53, and stocker control unit 57) is arranged by effectively using the space that was the dead space. Become. For this reason, all the control units are placed in the main body 3 of the storage 1 without increasing the size of the main body 3 compared to the case where the entire control unit is arranged in a space above the lowermost storage shelf 8A of the rack 7. The control unit can be accommodated. From another viewpoint, without placing a part of the control unit inside the main body 3 of the storage 1 in the storage 1 (in the case where the storage 1 is viewed in plan view from above, All control units can be arranged in the area where the main body 3 is located.

  In addition, according to the storage 1 of the above-described embodiment, at least one corner portion of the main body 3 is located above the lowermost storage shelf 8A of the rack 7 when the main body 3 is viewed in plan view. A second accommodating portion 75 is provided at the place. The second storage unit 75 handles the control unit (purge device control unit 34, crane control unit 51, safety control unit 53, and stocker control unit 57) disposed in the first storage unit 71 by the operator. A control unit with high frequency is arranged. For this reason, the control unit that is frequently handled by the worker can be selectively arranged in the second housing portion 75 that is easy for the worker to work, so that the working efficiency of the worker can be improved.

  It is preferable to further consider importance, ease of division (separation), difficulty in handling, and the like when selecting a control unit to be arranged in the second accommodating portion 75. For example, it is preferable to arrange a control unit and parts that are difficult to handle, difficult to divide, and have high importance in the second housing portion 75.

  For example, in the purge device 30, the purge gas supply source 31 is difficult to divide, and the supply pipe 32 connected to the purge gas supply source 31 is also a metal pipe, so that the handling is difficult. On the other hand, since the connection between the flow rate control unit 33 and the purge device control unit 34 and the connection between the purge device control unit 34 and the input unit 34A or the display unit 34B are performed by electrical wiring such as a connector or a cord, the connection is easy. Easy. Therefore, the purge gas supply source 31 that is difficult to divide and is difficult to handle, and the input unit 34A and the display unit 34B for the operator to perform operations and checks are arranged in the second storage unit 75, and the purge device control that is easy to handle The unit 34 is desirably disposed in the first housing portion 71.

  Moreover, according to the storage 1 of the above embodiment, the storage unit 1 further includes the enclosures 81 to 84 that define a certain space across the first storage unit 71 and the second storage unit 75, and includes a control unit (purge device control unit 34). The crane control unit 51, the safety control unit 53, and the stocker control unit 57) are disposed inside the enclosures 81-84. Thereby, even if it is a case where a control unit is arranged separately in the 1st accommodating part 71 and the 2nd accommodating part 75 according to the difference in handling, highly related control units are put in one enclosure 81-84. Can be summarized. Further, each highly related system (crane control system, shared port system, etc.) can be stored in an enclosure of an insulating member to be electrically isolated.

  As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said embodiment. Various modifications can be made without departing from the spirit of the invention.

  In the storage 1 of the above embodiment, the example in which the storage object is the storage container F has been described, but the present invention is not limited to this. For example, it may be a storage for storing an object to be stored such as a general luggage or a box, that is, a storage without the purge device 30.

  Although the storage 1 of the above-described embodiment has been described with reference to the example of being arranged on the floor surface 91 of the clean room, the present invention is not limited to this. For example, the present invention can be applied even when a work floor 91A such as a grating plate is disposed at a position higher than the floor surface 91 of the clean room. In this case, by providing the second storage portion 75 at a position higher than the lowermost storage shelf 8A and higher than the work floor 91A, the work efficiency when the control unit is arranged in the second storage portion 75 is increased. be able to.

  DESCRIPTION OF SYMBOLS 1 ... Storage container, 3 ... Main-body part, 7 ... Rack, 8 ... Storage shelf, 8A ... Bottom storage shelf, 9 ... Crane, 9C ... Track (traveling track part), 27 ... Overhead traveling vehicle, 30 ... Purge device 31 ... Purge gas supply source, 32 ... Supply pipe, 33 ... Flow control unit, 34 ... Purge device control unit, 34A ... Input unit, 34B ... Display unit, 35 ... Placing unit, 36 ... Purge nozzle, 37 ... Exhaust nozzle, 38 ... Exhaust pipe, 51 ... Crane control unit, 53 ... Safety control unit, 57 ... Stocker control unit, 71 (71A, 71B, 71C, 71D, 71E, 71F) ... First housing part, 75 (75A, 75B, 75C) , 75E, 75F, 75G) ... second housing portion, 81-88 ... enclosure (housing), A ... internal space, F ... container (storage object).

Claims (6)

It has an internal space defined by a main body part having a substantially rectangular parallelepiped shape, and is a storage for storing an object to be stored in the internal space,
In the internal space,
A rack extending in one direction and having a plurality of shelves in the height direction;
A crane that is movable in the one direction, and that transfers the article to be stored in the rack;
Is provided,
A space below the lowest shelf of the rack is formed with a first storage portion for arranging at least a part of a control unit that controls the device provided in the storage including the crane. Warehouse. A second accommodating portion is further formed in at least one corner portion of the main body when the main body is viewed in plan, above the lowest shelf of the rack.
The storage according to claim 1, wherein a part of the control unit is disposed in the second housing portion.   The storage according to claim 2, wherein the second storage unit includes the control unit that is handled more frequently by an operator than the control unit disposed in the first storage unit. A housing that defines a fixed space straddling the first housing portion and the second housing portion;
The storage unit according to claim 2 or 3, wherein the control unit is disposed inside the housing. The article to be stored is a storage container in which the article to be stored is stored,
The rack includes a purge device that purges the inside of the storage container with a purge gas,
The storage according to any one of claims 2 to 4, wherein a purge gas supply source that supplies the purge gas to the purge device is disposed in the second storage unit. A traveling track portion on which the crane travels is disposed at a position lower than the lowest shelf of the rack and on the front side of the shelf,
The storage according to any one of claims 1 to 5, wherein the first housing part is formed at a position facing the traveling track part.