JP2016071451A - Actuator and tactile sense presentation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an actuator which can surely vibrate a movable plate, even when a pressing force in a thickness direction is transmitted and can be compactly configured and to provide a tactile sense presentation device.SOLUTION: An actuator 20 includes a vibration film 23 which is shrunk and expanded in a predetermined plane direction by the application of a voltage, an elastic film 24, a movable plate 21 which is connected to one end side of each of the vibration film 23 and the elastic film 24, and a support frame 22 which is connected to the other end side of each of the vibration film 23 and the elastic film 24 and supports the movable plate 21 through the vibration film 23 and the elastic film 24.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an actuator that displaces a movable plate by a film that is deformed by application of a voltage, and a tactile sense presentation device that vibrates the actuator and transmits tactile feedback for a touch operation to a user.

  An actuator using a piezoelectric body is used in a flat speaker, a haptic device (tactile sense presentation device), or the like (see, for example, Patent Document 1).

  FIG. 27 is a side view of the actuator 101 according to the conventional example. The actuator 101 includes a piezoelectric film 102, a movable plate 103, and frame members 104 and 105. The frame members 104 and 105 are provided at both ends of the piezoelectric film 102 in the length direction. The movable plate 103 is bent so that the vicinity of the center in the length direction is separated from the piezoelectric film 102, and the vicinity of both ends in the length direction is connected to the piezoelectric film 102 via frame members 104 and 105. In such an actuator 101, when an alternating electric field is applied and the piezoelectric film 102 repeatedly expands and contracts in the length direction, the amount of deflection of the movable plate 103 is changed.

International Publication No. 2012/157691 Pamphlet

  When a haptic device (tactile sense presentation device) is configured using the actuator according to the conventional example, a pressing force in the thickness direction is transmitted to the movable plate in accordance with the touch operation. Then, the movable plate is pushed in by the pressing force, the movable plate is flattened, and it may be difficult to bend the movable plate. In order to prevent the movable plate from being pushed and flattened, it is conceivable to increase the rigidity of the movable plate by increasing the thickness of the movable plate, but in that case, the amount of vibration of the movable plate is reduced, It becomes difficult to give tactile feedback to the user.

  SUMMARY OF THE INVENTION An object of the present invention is to provide an actuator and a tactile sense presentation device that can reliably vibrate a movable plate even when a pressing force in the thickness direction is transmitted.

  The actuator of the present invention is connected to a plurality of films including a vibration film that expands and contracts in a predetermined plane direction by application of a voltage, a movable portion connected to one end side of each of the plurality of films, and the other end side of each of the plurality of films, And a support part that supports the movable part via a plurality of films. In this configuration, the movable plate can be vibrated by causing the vibration film to stretch or shrink.

  The plurality of films, as viewed from the thickness direction of the movable part, includes a first vibration film extending from the movable plate on the first plane direction side of the movable part and a second film extending from the movable part on the opposite side of the first plane direction. The first vibration film and the second vibration film are preferably provided symmetrically with respect to a line extending in the first plane direction. In this configuration, the movable portion can be vibrated along the first plane direction by causing the first vibration film and the second vibration film to vibrate with an appropriate phase difference.

  The plurality of films preferably include three or more of the first vibration film and the second vibration film, as viewed from the thickness direction of the movable portion. In this configuration, the movable part can be swung around the axis in the thickness direction by causing the vibration film to vibrate with an appropriate phase difference.

  The plurality of films, as viewed from the thickness direction of the movable portion, are a third vibration film extending from the movable portion on the second plane direction side, and a fourth vibration film extending from the movable portion on the opposite side of the second plane direction. The third vibration film and the fourth vibration film are preferably provided symmetrically with respect to a line extending in the second plane direction. In this configuration, by causing the vibration film to vibrate with an appropriate phase difference, the movable part is vibrated along an arbitrary plane direction, or the movable part is translated in a plane so as to draw a circular orbit. can do.

  The plurality of films, as viewed from the thickness direction of the movable portion, includes a first vibration film extending from the movable portion on the first plane direction side, and a second vibration film extending from the movable portion on the opposite side of the first plane direction. The first vibration film and the second vibration film are preferably provided asymmetrically with respect to a line extending in the first plane direction. In this configuration, the movable portion can be swung around the axis in the thickness direction by causing the first vibration film and the second vibration film to vibrate with an appropriate phase difference.

  The plurality of films further include a third vibration film extending from the movable portion on the second plane direction side, and a fourth vibration film extending from the movable portion on the opposite side of the second plane direction, and the third vibration The film and the fourth vibration film are preferably provided asymmetrically with respect to a line extending in the second plane direction. Even in this configuration, the movable part can be swung around the axis in the thickness direction by causing the vibration film to vibrate with an appropriate phase difference.

  The first vibration film extends from the end of the movable portion opposite to the first planar direction side to the first planar direction side when viewed from the thickness direction of the movable portion, and the second vibration film The film preferably extends from the end portion of the movable portion on the first plane direction side to the opposite side of the first plane direction. Further, the third vibration film extends from the end of the movable portion opposite to the second planar direction side to the second planar direction side when viewed from the thickness direction of the movable portion, and The vibrating film preferably extends from the end portion of the movable portion on the second plane direction side to the opposite side of the second plane direction. In these configurations, each vibration film can be lengthened to increase the amount of expansion / contraction of each vibration film, and the amplitude of the movable portion can be increased.

  The movable portion includes a plate-shaped movable plate and a movable frame surrounding the movable plate, and the plurality of films are between a pair of films connected between the support portion and the movable frame, and the movable frame and the movable plate. And a set of films to be connected. In this configuration, it is possible to prevent the film set connected between the support portion and the movable frame and the film set connected between the movable frame and the movable plate from interfering with each other and preventing the vibrations from being inhibited. it can.

  The plurality of films are preferably provided so as to form a pair facing the one side and the other side in the thickness direction of the movable part when viewed from the plane direction of the movable part. In this configuration, by causing the film to vibrate with an appropriate phase difference, the movable part is vibrated along the thickness direction, the movable part is vibrated so as to be inclined in the thickness direction, or the movable part is It can be translated to draw a circular orbit.

  It is preferable that the actuator further includes a shaft support portion that rotatably supports the movable portion within a plane. In this configuration, the movable part can be swung in a plane.

  In addition, the tactile sense presentation device of the present invention is configured to apply an alternating electric field to the vibration film when the actuator, a detection unit attached to the movable unit, and a detection unit that detects a touch operation are detected. And a control unit.

  The tactile sense presentation device having such a configuration can present tactile feedback to the operator along with the touch operation.

  According to the present invention, in the actuator and the tactile sense presentation device, the movable part can be vibrated reliably even when the pressing force accompanying the touch operation is transmitted, and the device size can be reduced.

It is side surface sectional drawing which shows typically the tactile sense presentation apparatus which concerns on 1st Embodiment. It is the top view which looked at the actuator concerning a 1st embodiment from the bottom side. It is side surface sectional drawing of the actuator which concerns on the 1st and 2nd modification of 1st Embodiment. It is side surface sectional drawing of the actuator which concerns on the 3rd modification of 1st Embodiment. It is the side surface sectional view and the top view seen from the bottom face side showing typically the tactile sense presentation device concerning a 2nd embodiment. It is the top view which looked at the actuator which concerns on the modification of 2nd Embodiment from the bottom face side. It is the top view which looked at the actuator concerning a 3rd embodiment from the bottom side. It is a top view which shows the 1st thru | or 3rd vibration aspect of the actuator which concerns on 3rd Embodiment. It is a top view which shows the change of the deformation | transformation state of each vibration film in the 1st vibration aspect of the actuator which concerns on 3rd Embodiment. It is a top view which shows the 4th vibration aspect of the actuator which concerns on 3rd Embodiment. It is the top view which looked at the actuator which concerns on the 1st and 2nd modification of 3rd Embodiment from the bottom face side. It is the top view which looked at the actuator which concerns on the 3rd modification of 3rd Embodiment from the bottom face side. It is the top view which looked at the actuator concerning a 4th embodiment from the bottom side. It is the top view which looked at the actuator concerning the modification of a 4th embodiment from the bottom face side. It is the top view which looked at the actuator concerning a 5th embodiment from the bottom side. It is the top view and side sectional view seen from the bottom face side of the actuator concerning the modification of a 5th embodiment. It is the top view and side sectional view seen from the bottom face side of the actuator concerning a 6th embodiment. It is a top view which shows the 1st and 2nd vibration aspect of the actuator which concerns on 6th Embodiment. It is the top view and side sectional view seen from the bottom face side of the actuator concerning a 7th embodiment. It is the top view and side sectional view seen from the bottom face side of the actuator concerning the 1st modification of a 7th embodiment. It is the top view and side sectional view seen from the bottom face side of the actuator concerning the 2nd modification of a 7th embodiment. It is the top view and side sectional view seen from the bottom face side of the actuator concerning the 3rd modification of a 7th embodiment. It is the top view and side sectional view seen from the bottom face side of the actuator concerning the 4th modification of a 7th embodiment. It is side surface sectional drawing of the actuator which concerns on 8th Embodiment. It is the top view seen from the top surface side of the actuator concerning a 9th embodiment. It is the top view seen from the top side of the actuator concerning the modification of a 9th embodiment. It is a figure explaining the conventional structure of an actuator.

  Hereinafter, several specific examples will be given with reference to the drawings to show a plurality of modes for carrying out the present invention. Each embodiment is an exemplification, and needless to say, partial replacement or combination of configurations shown in different embodiments is possible.

  FIG. 1 is a side sectional view of a haptic presentation device 10 according to a first embodiment of the present invention.

  The tactile sense presentation device 10 includes a control unit 11, a drive unit 12, an actuator 20, and a touch panel 30. The actuator 20 and the touch panel 30 are thin in the thickness direction, and are laminated in the thickness direction. The touch panel 30 constitutes a capacitive touch keyboard or the like, and is arranged on the top surface side in the thickness direction with respect to the actuator 20. When the touch panel 30 detects a touch operation by the user, the touch panel 30 outputs a detection signal to the control unit 11. The touch panel 30 corresponds to the touch detection unit described in the claims.

  When a detection signal is input from the touch panel 30, the control unit 11 outputs a control signal to the drive unit 12. When the control signal is input from the control unit 11, the drive unit 12 outputs the drive voltage Vc 1 to the actuator 20 at a predetermined frequency.

  The actuator 20 includes a movable plate 21, a support frame 22, a vibration film 23, and an elastic film 24.

  FIG. 2A is a plan view of the tactile sense presentation device 10 viewed from the bottom side. The movable plate 21 is a rectangular flat plate having a length direction (first plane direction) and a width direction (second plane direction) when viewed from the thickness direction, and is an acrylic resin PMMA, a metal plate, PET, polycarbonate (PC). ), PLLA, glass and other materials. A touch panel 30 is mounted on the top surface of the movable plate 21. The movable plate 21 can be displaced in the length direction.

  The support frame 22 has a rectangular frame shape surrounding the movable plate 21 with a gap as viewed in the thickness direction, and corresponds to the support portion described in the claims. The support frame 22 can be made of a material such as acrylic resin PMMA, metal plate, PET, polycarbonate (PC), PLLA, or glass. Here, as shown in FIG. 1, the support frame 22 has the same thickness as the movable plate 21 as viewed from the width direction, and is disposed at almost the same height as the movable plate 21.

  The vibration film 23 and the elastic film 24 have a rectangular shape as viewed from the thickness direction. The vibration film 23 is a film made of a material having a property of expanding and contracting in-plane when a voltage is applied, such as an organic piezoelectric film, an electrostrictive film, an electret film, a composite film in which piezoelectric particles are dispersed in a polymer, Molecular films, their composite films + exciter films, composite films with piezoelectric ceramics attached, and the like. Here, the vibration film 23 is configured by providing electrodes (not shown) on both main surfaces of the organic piezoelectric film. Examples of organic piezoelectric films include L-type polylactic acid (PLLA), which is an L-form of a chiral polymer, D-type polylactic acid (PDLA), which is a D-form of a chiral polymer, and polyvinylidene fluoride (PVDF). It can be composed of a piezoelectric material. When the vibration film 23 is composed of PLLA, the direction of about 45 ° with respect to the main stretching direction is from the film subjected to the stretching process in the main stretching direction indicated by the white arrow in FIG. By cutting the vibration film 23 so as to be in the length direction, it is possible to have a piezoelectricity (reverse piezoelectric effect) that causes the length direction to expand or contract by application of a predetermined voltage. The elastic film 24 is made of an elastic material such as rubber.

  Further, the vibration film 23 and the elastic film 24 are arranged on the bottom surface side of the movable plate 21 and the support frame 22 as viewed from the width direction as shown in FIG. The vibration film 23 has one end connected to the end portion in the length direction of the movable plate 21, extends in the length direction from the connection portion with the movable plate 21, and the other end is connected to the support frame 22. Contrary to the vibration film 23, the elastic film 24 has one end connected to the end of the movable plate 21 opposite to the length direction, and extends from the connecting portion with the movable plate 21 to the opposite side of the length direction. The other end is connected to the support frame 22.

  FIG. 2B is a plan view showing a vibration mode of the actuator 20.

  A drive voltage Vc <b> 1 is applied from the drive unit 12 to the vibration film 23 of the actuator 20. Thereby, the vibration film 23 is stretched or contracted along the length direction. As the vibration film 23 is driven, the movable plate 21 is displaced, the elastic film 24 is elastically deformed following the displacement of the movable plate 21, and contracts or stretches contrary to the vibration film 23. Become.

  Here, the vibration film 23 and the elastic film 24 are provided so as to be symmetrical with respect to a center line (indicated by a broken line in FIG. 2A) that passes through the center of the movable plate 21 and extends in the length direction. Yes. For this reason, the action line of the force that acts on the movable plate 21 from the vibration film 23 during vibration and the action line of the force that acts on the movable plate 21 from the elastic film 24 are on the same straight line. Thereby, the movable plate 21 and the touch panel 30 of the actuator 20 vibrate along the length direction.

  Therefore, vibration along the length direction of the movable plate 21 and the touch panel 30 is transmitted to the finger of the user who performs a touch operation on the touch panel 30. The user can recognize that the touch operation on the touch panel 30 has been accepted by feeling the vibration of the touch panel 30. As a result, tactile feedback is given to the user, and the operational feeling and operability of the touch panel 30 are improved.

  In the configuration of the tactile sense presentation device 10 and the actuator 20 according to the present embodiment, the movable plate is not easily crushed by the pressing force unlike the conventional configuration in which the movable plate is bent into an arcuate shape, and vibration is not easily generated. 21 can be vibrated reliably. Further, the thickness of the actuator 20 can be made extremely thin such that the thickness of the movable plate 21 or the support frame 22 and the thickness of the vibration film 23 and the elastic film 24 are added. Can be made compact.

  FIG. 3A is a side cross-sectional view of an actuator 20A according to a first modification of the first embodiment. In the actuator 20A, the movable plate 21A is disposed on the top surface side of the vibration film 23A and the elastic film 24A, and the support frame 22A is disposed on the bottom surface side of the vibration film 23A and the elastic film 24A. When the actuator 20A is configured in this way, the vibration film 23A and the elastic film 24A are not in contact with the top surface of the table or the like even if the actuator 20A is directly disposed on the top surface of the table or the like. It is possible to prevent the displacement of the table top surface due to the expansion and contraction of 24A and the displacement of the actuator 20A from occurring.

  FIG. 3B is a side cross-sectional view of the actuator 20B according to the second modification of the first embodiment. In the actuator 20B, the movable plate 21B and the support frame 22B are disposed on the bottom surface side of the vibration film 23B and the elastic film 24B, and the height of the support frame 22B is made larger than the thickness of the movable plate 21B, whereby the vibration film 23B, the elastic film 24B, and the movable plate 21B are prevented from coming into contact with a top surface such as a table. Thereby, it is possible to prevent the movable plate 21B from becoming a top surface such as a table or the displacement of the actuator 20B due to expansion and contraction of the vibration film 23B and the elastic film 24B.

  FIG. 4 is a side cross-sectional view of an actuator 20C according to a third modification of the first embodiment. In the actuator 20C, the movable plate shown in the first modified example is used as the support plate 21C, the support frame shown in the first modified example is used as the movable frame 22C, and the movable plate is further provided on the top surface side of the movable frame 22C. 25C is provided. In the actuator 20C having such a configuration, an area where the support plate 21C comes into contact with the top surface such as a table can be obtained, and the actuator 20C can be supported more stably. Moreover, the space which arrange | positions a touch panel on the top | upper surface side of 25 C of movable plates can be earned.

  Next, a tactile sense presentation device 10D according to a second embodiment of the present invention will be described. FIG. 5A is a side cross-sectional view of the tactile sense presentation device 10D. FIG. 5B is a plan view seen from the bottom surface side of the tactile sense presentation device 10D.

  The tactile sense presentation device 10D includes a control unit 11D and a touch panel 30D as configurations similar to those of the first embodiment, and includes a drive unit 12D and an actuator 20D as configurations different from those of the first embodiment. When a control signal is input from the control unit 11D, the drive unit 12D outputs a plurality of drive voltages Vc1 and Vc2 whose phases are controlled at the same frequency to the actuator 20D.

  The actuator 20D includes a movable plate 21D, a support frame 22D, and a vibration film 23D as a configuration similar to that of the first embodiment. As a configuration different from that of the first embodiment, the actuator 20D vibrates instead of the elastic film 24 described above. A film 24D is provided. Similar to the vibration film 23D, the vibration film 24D has a rectangular shape when viewed from the thickness direction, and has a property of expanding and contracting in the length direction when a voltage is applied. In contrast to the vibration film 23D, the vibration film 24D has one end connected to the end of the movable plate 21D opposite to the length direction, and extends from the connection portion with the movable plate 21D to the opposite side in the length direction. The other end is connected to the support frame 22D. The vibration film 23D corresponds to a “first vibration film” recited in the claims, and the vibration film 24D corresponds to a “second vibration film” recited in the claims.

  The drive voltages Vc1 and Vc2 applied from the drive unit 12D to the vibration films 23D and 24D of the actuator 20D are set in the drive unit 12D so that the phase difference between them is 180 °. That is, the drive voltage Vc1 applied to the vibration film 23D and the drive voltage Vc2 applied to the vibration film 24D are in opposite phases. Therefore, each of the vibration films 23D and 24D is stretched or contracted in the opposite phase along the length direction. Accordingly, the movable plate 21D and the touch panel 30D vibrate along the length direction as the vibration films 23D and 24D are driven.

  In the actuator 20D configured as described above, the movable plate 21D is displaced by the resultant force of the forces acting from the two vibration films 23D and 24D, and is movable by omitting the elastic film provided in the first embodiment. Since the elastic force does not act on the plate 21D, the force for vibrating the movable plate 21D and the amount of displacement of the movable plate 21D are larger than those in the first embodiment.

In addition, although the example which sets a phase difference to the vibration of vibration film 23D, 24D by the phase control of the drive voltage in the drive part 12D was shown here, a phase difference is set to the vibration of vibration film 23D, 24D by the other method. It may be generated. For example, in the case where the vibration films 23D and 24D are made of a piezoelectric material, it is possible to cause a phase difference in the vibrations generated in the two vibration films by turning the electrodes of the vibration film connecting the reference potential upside down. . In addition, a phase difference can be generated in the vibrations of the two vibration films by changing the directions of the main stretching directions (polarization directions) of the piezoelectric materials constituting the two vibration films. Furthermore, the direction of the main stretching direction of the piezoelectric materials constituting the two vibration films is the same, and the two vibration films are made into an L-form and a D-form of chiral molecules, respectively. FIG. 6A is a plan view seen from the bottom surface side of the actuator 20E according to the modification of the second embodiment. In the actuator 20E, the vibration film 23E and the vibration film 24E are made of PLLA, subjected to a stretching process in the main stretching direction indicated by a white arrow in FIG. 6A, and is approximately 0 ° with respect to the main stretching direction. By cutting the vibration films 23E and 24E so that the direction becomes the length direction, the application of a predetermined voltage causes the film to extend and contract in the direction intersecting the length direction and the width direction.

  FIG. 6B is a plan view showing a vibration mode of the actuator 20E.

  The vibration films 23 </ b> E and 24 </ b> E are expanded or contracted in a direction of approximately 45 ° with respect to the length direction by application of a drive voltage, and are opposite to a direction of approximately 45 ° in a direction of approximately −45 ° with respect to the length direction. Shrinkage or elongation occurs.

  For this reason, in this actuator 20E, the drive voltages applied to the vibration films 23E and 24E are in opposite phases, so that the vibration film 23E and the vibration film 24E are line-targeted with a center line extending in the width direction as a boundary. It can be transformed into a parallelogram shape. As a result, the end portions of the vibration films 23E and 24E on the side connected to the vibration plate 21E are displaced in the same direction along the width direction, and the movable plate 21E of the actuator 20E is moved to the vibration films 23E and 24E. As it is driven, it vibrates along the width direction.

  In the actuator 20E configured in this way, the width direction of the movable plate 21E not provided with the vibration film is not the length direction of the movable plate 21E provided with the vibration films 23E and 24E, but the vibration of the movable plate 21E. Direction. Therefore, it is not necessary to provide a vibration film in the vibration direction of the movable plate 21E, and the size of the actuator 20E in the vibration direction of the movable plate 21E can be suppressed.

  Next, an actuator 20F according to a third embodiment of the present invention will be described. FIG. 7 is a plan view seen from the bottom side of the actuator 20F.

  The actuator 20F includes a movable plate 21F, a support frame 22F, and vibration films 23F and 24F as a configuration similar to that of the second embodiment, and includes vibration films 25F and 26F as a configuration different from that of the second embodiment. Yes.

  Each of the vibration film 25F and the vibration film 26F has a rectangular shape as viewed from the thickness direction, and has a property of causing expansion or contraction in the width direction when a predetermined voltage is applied. The vibration film 25F has one end connected to the end portion in the width direction of the movable plate 21F, extends in the width direction from the connection portion with the movable plate 21F, and the other end is connected to the support frame 22F. Contrary to the vibration film 25F, the vibration film 26F has one end connected to the end of the movable plate 21F on the opposite side in the width direction, and extends from the connecting portion with the movable plate 21F to the opposite side in the width direction. Are coupled to the support frame 22F. Therefore, the vibration film 25F corresponds to a “third vibration film” recited in the claims, and the vibration film 26F corresponds to a “fourth vibration film” recited in the claims.

  FIG. 8A is a plan view showing a first vibration mode of the actuator 20F.

  In this first vibration mode, for example, without applying a drive voltage to the vibration films 23F and 24F (with the drive voltage amplitude set to zero) with respect to the actuator 20F, the vibration films 25F and 26F have phases opposite to each other. By applying the drive voltage, the vibration films 25F and 26F are caused to expand or contract in opposite phases.

  The vibration film 25F and the vibration film 26F are provided so as to be symmetrical with respect to a center line (indicated by a broken line in FIG. 7) that extends in the width direction through the center of the movable plate 21F. The action line of the force acting on the movable plate 21F from the vibration film 25F by the vibration and the action line of the force acting on the movable plate 21F from the vibration film 26F by the vibration of the vibration film 26F are on the same straight line. Thereby, the movable plate 21F vibrates along the width direction as the vibration films 25F and 26F are driven. In addition, without applying a drive voltage to the vibration films 25F and 26F (with the amplitude of the drive voltage being zero), the drive voltages applied to the vibration films 23F and 24F are in opposite phases, so that the vibration films 23F and 24F are respectively It is also possible to cause the movable plate 21F to vibrate along the length direction by causing expansion or contraction in the opposite phase.

  Further, when the first vibration mode is generated, the amplitude of the drive voltage of the vibration films 23F and 24F facing the length direction is not substantially zero, but the width of the vibration films 23F and 24F A driving voltage having a driving frequency twice as high as that of the vibration films 25F and 26F facing in the direction is applied, the vibration films 23F and 24F facing in the length direction are vibrated in the same phase, and the vibration film 25F facing in the width direction , 26F may be vibrated in the opposite phase. FIG. 9 is a diagram illustrating a change over time in the deformation state of the vibration films 23F and 24F in this case.

  When a driving voltage having a driving frequency twice that of the vibrating films 25F and 26F is applied to the vibrating films 23F and 24F, the movable plate 21F vibrates in the width direction by driving the vibrating films 25F and 26F. During the period, the vibration films 23F and 24F vibrate by two periods in the length direction. Therefore, when the vibration film 25F contracts and the vibration film 25F extends (see FIG. 9A), and when the vibration film 25F extends and the vibration film 25F contracts (see FIG. 9C), the vibration film 23F. 24F is stretched and the vibration films 25F and 26F are returned to their original dimensions (see FIGS. 9B and 9D), the vibration films 23F and 24F can be contracted. In this way, when the movable plate 21F is displaced in the width direction with a large displacement amount, the vibration films 23F and 24F positioned in the length direction with respect to the movable plate 21F extend, so that the width direction of the movable plate 21F is increased. It is possible to prevent (suppress) the vibration from being inhibited by the vibration films 23F and 24F. In addition, the vibration in the width direction of the movable plate 21F can be vibrated by the vibration in the length direction of the vibration films 23F and 24F, whereby the force that vibrates the movable plate 21F and the displacement amount of the movable plate 21F. Can be larger.

  Next, the 2nd vibration aspect of the actuator 20F is demonstrated based on FIG. 8 (B). FIG. 8B is a plan view showing a second vibration mode of the actuator 20F.

  In the second vibration mode, a drive voltage having the same phase is applied to the adjacent vibration film 23F and the vibration film 25F with respect to the actuator 20F, and is applied to the adjacent vibration films 24F and 26F while facing each other. The phase of the driving voltage to be applied is advanced by 180 ° from the phase of the driving voltage applied to the vibration films 23F and 25F. That is, the drive voltages are reversed in phase between the vibration films 23F and 25F and the vibration films 24F and 26F. As a result, the vibration films 23F and 25F and the vibration films 24F and 26F are stretched or contracted in opposite phases. Then, the movable plate 21F is a right lowering connecting the corner portion between the two sides to which the vibration films 23F and 25F are connected and the corner portion between the two sides to which the vibration films 24F and 26F are connected. It will vibrate along the diagonal direction.

  In addition, you may make it apply the drive voltage which becomes mutually opposite phase with respect to vibration film 23F, 26F and vibration film 24F, 25F. In this case, the movable plate 21D is connected between the corner portion between the two sides to which the vibration films 23F and 26F are connected and the corner portion between the two sides to which the vibration films 24F and 25F are connected. It can be vibrated along the diagonal direction that goes up to the right.

  FIG. 8C is a plan view showing a third vibration mode of the actuator 20F.

  In the third vibration mode, the drive voltage applied to the vibration film 25F is advanced by 90 ° with respect to the actuator 20F from the phase of the drive signal applied to the vibration film 23F. Is advanced 180 ° from the phase of the drive signal applied to the vibration film 23F, and the phase of the drive voltage applied to the vibration film 26F is advanced 270 ° from the phase of the drive signal applied to the vibration film 23F. That is, the drive signals applied to the vibration films 23F, 24F, 25F, and 26F have a phase difference of 90 ° in the clockwise order in FIG. Thereby, the expansion and contraction generated in the vibration films 23F, 24F, 25F, and 26F can be shifted clockwise. As a result, the movable plate 21F of the actuator 20F can be translated so as to draw a counterclockwise circular orbit in FIG. 8C.

  Conversely, the drive signal applied to the vibration films 23F, 24F, 25F, and 26F has a phase difference of 90 ° in the counterclockwise order in FIG. In (C), it can also be translated so as to draw a clockwise orbit.

  FIG. 10 is a plan view showing a fourth vibration mode of the actuator 20F.

  In the fourth vibration mode, drive voltages having mutually opposite phases are applied to the actuators 20F to the vibration films 23F and 24F facing in the length direction, and also to the vibration films 25F and 26F facing to the width direction. The drive voltage is applied. The frequency of the drive voltage applied to the vibration films 25F and 26F facing in the width direction is set to twice the frequency of the drive voltage applied to the vibration films 23F and 24F facing in the length direction. If it does in this way, in actuator 20F, as shown in order in Drawing 10 (A), Drawing 10 (B), Drawing 10 (C), and Drawing 10 (D), vibration and displacement will arise in each part. That is, during the 0.5 period in which the movable plate 21F vibrates in the width direction by driving the vibration films 23F and 24F, the vibration films 25F and 26F vibrate by one cycle in the length direction, and the vibration plate 21F has a length. It is displaced so as to move in parallel with an 8-shaped trajectory. Thus, by adjusting the phase and frequency of the drive voltage applied to each vibration film, the diaphragm 21F can be displaced so as to draw a complicated trajectory.

  Note that the drive voltages of the two frequencies described above may be set to a frequency relationship that is an integer multiple greater than two. In this case, the diaphragm 21F can be translated so as to draw a trajectory such as a triple ring or a quad ring. Further, the driving voltages of the two frequencies may be set to frequency relationships that are not integer multiples but are different from each other. Further, the phase and amplitude of the drive voltage may be appropriately changed between the facing vibration films or between the adjacent vibration films. In this way, the diaphragm 21F can be displaced along a more complicated track. As described above, in the configuration of the actuator 20F according to the present embodiment, the movable plate 21F is set to an arbitrary plane in the plane by appropriately setting the vibration phase difference, frequency difference, amplitude difference, and the like of each vibration film. The trajectory can be translated in two dimensions (with two degrees of freedom).

  FIG. 11A is a plan view seen from the bottom surface side of the actuator 20G according to the first modification of the third embodiment. In the actuator 20G, each of the vibration films 23G, 24G, 25G, and 26G is made of PLLA, and is stretched in the main stretching direction indicated by a white arrow in FIG. Each of the vibration films 23G, 24G, 25G, and 26G is cut in the length direction and the width direction by applying a predetermined voltage by cutting so that the direction of about 0 ° is the length direction with respect to the main stretching direction. On the other hand, expansion and contraction occur in the intersecting direction.

  In the actuator 20G configured as described above, similarly to the actuator 20F described above, the phase, frequency, amplitude, and the like of the drive voltage applied to the vibration films 23G, 24G, 25G, and 26G can be set appropriately. The plate 21G can be translated two-dimensionally (with two degrees of freedom) along an arbitrary trajectory in the plane.

  FIG. 11B is a plan view of the actuator 20H according to the second modification of the third embodiment viewed from the bottom surface side. In the actuator 20H, each of the vibration films 23H, 24H, 25H, and 26H is made of PLLA, and is subjected to a stretching process in the main stretching direction indicated by a white arrow in FIG. The vibration films 23H and 24H are cut out so that the direction of about 0 ° is the length direction with respect to the main stretching direction. On the other hand, the vibration films 25H and 26H are cut out so that the direction of about 45 ° is the length direction with respect to the main stretching direction.

  In the actuator 20H configured as described above, the phase, frequency, amplitude, and the like of the drive voltage applied to the vibration films 23H, 24H, 25H, and 26H are appropriately set, so that the first actuator 20F described above is used. The movable plate 21H can be displaced by a trajectory similar to that of the vibration mode, that is, a linear trajectory in the width direction. Then, the vibration in the width direction of the movable plate 21H by the vibration films 25H and 26H is vibrated by the deformation (vibration) of the parallelogram of the vibration films 23H and 24H, and the force for vibrating the movable plate 21H and the displacement of the movable plate 21H. The amount can be increased.

  FIG. 12 is a plan view seen from the bottom surface side of an actuator 20J according to a third modification of the third embodiment. In the actuator 20J, vibration films 23J, 24J, 25J, and 26J are provided so as to extend from the corner portions of the movable plate 21J along the diagonal line of the movable plate 21J. Also in the actuator 20J having such a configuration, the movable plate 21J can be two-dimensionally arranged in an arbitrary trajectory in a plane by appropriately setting the phase difference, frequency difference, amplitude difference, etc. of vibration of each vibration film ( Can be translated (with 2 degrees of freedom).

  Next, an actuator 20K according to a fourth embodiment of the present invention will be described. FIG. 13A is a plan view seen from the bottom surface side of the actuator 20K.

  The actuator 20K includes a movable plate 21K and a support frame 22K as configurations similar to those of the second embodiment, and includes vibration films 23K and 24K as configurations different from those of the second embodiment.

  Each of the vibration film 23K and the vibration film 24K has a rectangular shape as viewed from the thickness direction, and has a property of causing expansion or contraction in the length direction when a predetermined voltage is applied. The vibration film 23K has one end connected to the end portion in the length direction of the movable plate 21K, extends in the length direction from the connection portion with the movable plate 21K, and the other end is connected to the support frame 22K. Contrary to the vibration film 23K, the vibration film 24K has one end connected to the end of the movable plate 21K on the opposite side in the length direction, and extends from the connecting portion with the movable plate 21K to the opposite side in the length direction. The other end is connected to the support frame 22K. Therefore, the vibration film 23K corresponds to a “first vibration film” recited in the claims, and the vibration film 24K corresponds to a “second vibration film” recited in the claims.

  The vibration film 23K is provided closer to one side in the width direction than a center line extending in the length direction (indicated by a broken line in FIG. 13A), and the vibration film 24K is disposed in the length direction. It is provided closer to the other side in the width direction than the extending center line. That is, the vibration film 23K and the vibration film 24K are provided so as to be asymmetric with respect to a center line extending in the length direction.

  FIG. 13B is a plan view showing a vibration mode of the actuator 20K.

  In this vibration mode, a driving voltage having the same phase is applied to the vibration films 23K and 24K with respect to the actuator 20K. As a result, the vibration films 23K and 24K are stretched or contracted in the same phase. The force acting on the movable plate 21K from the vibration film 23K due to such vibration and the force acting on the movable plate 21K from the vibration film 24K are asymmetrical with respect to the center line in which the vibration films 23K and 24K extend in the length direction. Therefore, each action line is shifted in the width direction. For this reason, a so-called couple acts on the movable plate 21K with the vibration of the vibration films 23K and 24K, and the movable plate 21K vibrates so as to rotate (swing) around the axis in the thickness direction. Become.

  As described above, in the configuration of the actuator 20K according to the present embodiment, the movable plate 21 can be rotated in the plane by appropriately setting the phase difference of vibration of each vibration film.

  FIG. 14 is a plan view of the actuator 20L according to a modification of the fourth embodiment viewed from the bottom surface side.

  The actuator 20L includes a movable plate 21L, a support frame 22L, and vibration films 23L and 24L as a configuration similar to that of the fourth embodiment, and includes vibration films 25L and 26L as a configuration different from that of the fourth embodiment. Yes.

  Each of the vibration film 25L and the vibration film 26L has a rectangular shape as viewed from the thickness direction, and has a property of causing expansion or contraction in the width direction when a predetermined voltage is applied. The vibration film 25L has one end connected to the end portion in the width direction of the movable plate 21L, extends in the width direction from the connection portion with the movable plate 21L, and the other end is connected to the support frame 22L. Contrary to the vibration film 25L, the vibration film 26L has one end connected to the end of the movable plate 21L on the opposite side in the width direction, and extends from the connecting portion with the movable plate 21L to the opposite side in the width direction. Are coupled to the support frame 22L. Therefore, the vibration film 25L corresponds to a “third vibration film” recited in the claims, and the vibration film 26L corresponds to a “fourth vibration film” recited in the claims.

  The vibration film 25L is provided closer to one side than the center line (indicated by a broken line in FIG. 14) extending in the width direction of the movable plate 21L, and the vibration film 26L is disposed in the width direction of the movable plate 21L. It is provided close to the other side of the extending center line. That is, the vibration film 25L and the vibration film 26L are provided so as to be asymmetrical with respect to a center line extending in the width direction through the center of the movable plate 21L.

  In the actuator 20L, the drive voltages applied to the vibration films 25L and 26L have the same phase, so that the vibration films 25L and 26L are expanded or contracted in the same phase. Since the force acting on the movable plate 21L from the vibration film 25L and the force acting on the movable plate 21L from the vibration film 26L also act as couples on the movable plate 21L due to such vibration, the movable plate 21L is also an axis in the thickness direction. It will vibrate so as to rotate (swing) around.

  Then, the vibration film so that the direction in which the movable plate 21L rotates due to the couple acting from the vibration films 25L and 26L and the direction in which the movable plate 21L rotates due to the couple acting from the vibration films 23L and 24L coincide. By setting the vibration phases of 23L, 24L, 25L, and 26L, the moment for rotating the movable plate 21L can be increased. This makes it possible to vibrate the movable plate 21L more reliably when a strong pressing force acts from the thickness direction.

  Next, an actuator 20M according to a fifth embodiment of the present invention will be described. FIG. 15 is a plan view seen from the bottom side of the actuator 20M.

  The actuator 20M includes a movable plate 21M, a support frame 22M, and vibration films 23M and 24M as a configuration similar to that of the fourth embodiment, and includes vibration films 25M and 26M as a configuration different from that of the fourth embodiment. Yes.

  Each of the vibration film 25M and the vibration film 26M has a rectangular shape as viewed from the thickness direction, and has a property of causing expansion or contraction in the length direction when a predetermined voltage is applied. The vibration film 25M has one end coupled to the end portion in the length direction of the movable plate 21M, extends in the length direction from the connection portion with the movable plate 21M, and the other end coupled to the support frame 22M. Contrary to the vibration film 25M, the vibration film 26M has one end coupled to the end of the movable plate 21M on the opposite side in the length direction, and extends from the connection portion with the movable plate 21M to the opposite side in the length direction. The other end is connected to the support frame 22M. Therefore, the vibration film 25M corresponds to the “first vibration film” described in the claims together with the vibration film 23M, and the vibration film 26M includes the “second vibration” described in the claims together with the vibration film 24M. It corresponds to “Film”.

  The vibration films 23M and 26M are provided closer to one side than a center line (indicated by a broken line in FIG. 15A) extending in the length direction of the movable plate 21M, and the vibration films 24M and 25M. Is provided closer to the other side than the center line extending in the length direction of the movable plate 21M. In this way, the vibration films 23M and 25M and the vibration films 24M and 26M are provided so as to be symmetrical with respect to a center line extending in the length direction through the center of the movable plate 21M.

  FIG. 15B is a plan view showing a first vibration mode of the actuator 20M.

  In the first vibration mode, the drive voltage applied to the vibration films 23M and 25M is in phase with the actuator 20M, and the drive voltage applied to the vibration films 24M and 26M is in the opposite phase. As a result, the vibration films 23M and 25M and the vibration films 24M and 26M are stretched or shrunk in opposite phases. The action line of the force acting on the movable plate 21M from the vibration films 23M and 25M and the action line of the force acting on the movable plate 21M from the vibration films 24M and 26M are collinear with each other, and the movable plate 21M Will vibrate along the length direction.

  FIG. 15C is a plan view showing a second vibration mode of the actuator 20M.

  In the second vibration mode, the drive voltage applied to the vibration films 23M and 24M is set to the same phase and the drive voltage applied to the vibration films 25M and 26M is set to the opposite phase to the actuator 20M. As a result, the vibration films 23M and 24M and the vibration films 25M and 26M are stretched or shrunk in opposite phases. The force acting on the movable plate 21M from the vibration films 23M, 24M, 25M, and 26M by such vibration becomes a so-called couple for the movable plate 21M, and the movable plate 21M rotates (oscillates) around the axis in the thickness direction. Will vibrate.

  As described above, in the configuration of the actuator 20M according to the present embodiment, the movable plate 21M is vibrated along the length direction by appropriately setting the phase difference of vibration of each vibration film, or the movable plate 21M can be swung around an axis in the thickness direction.

  FIG. 16 is a plan view of the actuator 20N according to the modification of the fifth embodiment viewed from the bottom surface side.

  The actuator 20N includes a movable plate 21N, a support frame 22N, and vibration films 23N, 24N, 25N, and 26N as a configuration similar to that of the fifth embodiment, and a vibration film 27N and a configuration different from those of the fifth embodiment. 28N, 29N, and 30N.

  Each of the vibration films 27N, 28N, 29N, and 30N has a rectangular shape as viewed from the thickness direction, and has a property of causing expansion or contraction in the width direction when a predetermined voltage is applied. The vibration films 27N and 29N have one end coupled to the end portion in the width direction of the movable plate 21N, extend in the width direction from the connection portion with the movable plate 21N, and the other end coupled to the support frame 22N. Contrary to the vibration films 27N and 29N, the vibration films 28N and 30N are connected at one end to the opposite end of the movable plate 21N in the width direction and extend from the connecting portion to the movable plate 21N to the opposite side in the width direction. The other end is connected to the support frame 22N. Accordingly, the vibration films 27N and 29N correspond to the “third vibration film” recited in the claims, and the vibration films 28N and 30N correspond to the “fourth vibration film” recited in the claims. Yes.

  The vibration films 27N and 30N are provided closer to one side than the center line extending in the width direction of the movable plate 21N, and the vibration films 28N and 29N are longer than the center line extending in the width direction of the movable plate 21N. It is provided close to the other side. That is, the vibration films 27N and 30N and the vibration films 28N and 29N are provided so as to be symmetrical with respect to a center line that extends in the width direction through the center of the movable plate 21N.

  Even in this actuator 20N, by appropriately setting the phase difference, frequency difference, amplitude difference, etc. of the vibration of each piezoelectric film, the movable plate 21N includes three degrees of freedom including translation and rotation in an arbitrary orbit in a plane. Can be displaced in degrees.

  For example, the vibration films 23N, 24N, 25N, and 26N are not driven, the vibration films 27N and 29N are driven in the same phase, and the vibration films 28N and 30N are driven in the opposite phase, thereby moving the movable plate 21N to the width. It can be displaced along the direction. Conversely, the vibration films 27N, 28N, 29N, and 30N are not driven, the vibration films 23N and 25N are driven in the same phase, and the vibration films 24N and 26N are driven in the opposite phase, thereby moving the movable plate. 21N can be displaced along the length direction. The vibration mode of such an actuator 20N is the same as the vibration mode of the actuator 20F previously shown in FIG. 8A. However, in this actuator 20N, the vibration films adjacent on each side are separated from each other. Therefore, the vibration of the movable plate 21N can be prevented (suppressed) by the vibration film that is not driven.

  Also, for example, the vibration films 23N, 24N, 29N, and 30N are not driven, the vibration films 26N and 27N are driven in the same phase, and the vibration films 25N and 28N are driven in opposite phases to each other, thereby moving the movable plate 21N. Can be displaced along a diagonal line rising to the right. Conversely, the vibration films 25N, 26N, 27N, and 28N are not driven, the vibration films 23N and 29N are driven in the same phase, and the vibration films 24N and 30N are driven in the opposite phase, thereby moving the movable plate. 21N can be displaced along the diagonal line descending to the right.

  Further, for example, if the vibration films 23N and 25N, the vibration films 27N and 29N, the vibration films 24N and 26N, and the vibration films 28N and 30N are sequentially driven with a phase difference of 90 °, the movable plate 21N is rotated counterclockwise. Can be translated. Conversely, if the vibration films 28N and 30N, the vibration films 24N and 26N, the vibration films 27N and 29N, and the vibration films 23N and 25N are sequentially driven with a phase difference of 90 °, the movable plate 21N is rotated clockwise. Can be translated.

  Further, for example, the movable plate 21N is connected in a loop by setting the drive frequency of the vibration films 23N, 24N, 25N, and 26N and the drive frequency of the vibration films 27N, 28N, 29N, and 30N to be an integral multiple. Can be translated.

  Further, for example, the movable films 21N, 27N, 24N, and 28N are driven in the same phase with each other, and the movable films 21N, 29N, 26N, and 30N are driven in the opposite phase so that the movable plate 21N is swung. Can be displaced.

  Next, an actuator 20P according to a sixth embodiment of the present invention will be described. FIG. 17A is a plan view seen from the bottom side of the actuator 20P. FIG. 17B is a side sectional view of the actuator 20P viewed from the width direction. FIG. 17C is a side cross-sectional view as seen from the length direction of the actuator 20P.

  The actuator 20P includes a movable plate 21P and a support frame 22P as configurations similar to those of the second embodiment, and includes vibration films 23P, 24P, 25P and guide portions 26P as configurations different from those of the second embodiment. .

  As shown in FIG. 17C, the guide portion 26P is attached to the support frame 22P, and protrudes in a rib shape from the bottom surface side of the portion extending in the length direction of the support frame 22P to the inside of the support frame 22P. . The guide portion 26P is in contact with the bottom surface of the movable plate 21P and prevents the movable plate 21P from being drawn downward by the vibration films 23P, 24P, and 25P.

  Each of the vibration films 23P, 24P, and 25P has a rectangular shape as viewed from the thickness direction, and has a property of causing expansion or contraction in the length direction when a predetermined voltage is applied. The vibration film 24P and the vibration film 25P are connected at one end to the end portion in the length direction of the movable plate 21P, extend from the connection portion with the movable plate 21P to the opposite side in the length direction, and have the other end at the support frame. 22P. The vibration film 23P has one end connected to the end of the movable plate 21P opposite to the length direction opposite to the vibration film 24P and the vibration film 25P, and extends in the length direction from the connection portion with the movable plate 21P. The other end is connected to the support frame 22P. The vibration films 23P, 24P, and 25P are provided symmetrically about a center line (indicated by a broken line in FIG. 17A) extending in the length direction of the movable plate 21P. Therefore, the vibration film 23P corresponds to the “first vibration film” recited in the claims, and the vibration film 24P and the vibration film 25P correspond to the “second vibration film” recited in the claims. It corresponds.

  The vibration films 23P, 24P, and 25P are respectively formed on the support frame 22P and the movable plate 21P near both sides in the length direction so as to face the movable plate 21P over almost the entire length of the movable plate 21P. Are connected. If it does in this way, the full length of the length direction of vibration film 23P, 24P, 25P can be lengthened, and the deformation amount at the time of driving vibration film 23P, 24P, 25P can be enlarged.

  FIG. 18A is a plan view showing a first vibration mode of the actuator 20P.

  In this first vibration mode, the drive voltage applied to the vibration films 24P and 25P is in phase with the actuator 20P, and the drive voltage applied to the vibration film 23P is in the opposite phase. As a result, the vibration films 24P and 25P and the vibration film 23P are stretched or shrunk in opposite phases. The action line of the force acting on the movable plate 21P from the vibration films 24P and 25P and the action line of the force acting on the movable plate 21P from the vibration film 23P by the vibration are on the same straight line. It will vibrate along the length direction.

  FIG. 18B is a plan view showing a second vibration mode of the actuator 20P.

  In the second vibration mode, the drive voltage applied to the vibration films 24P and 25P is set to the opposite phase to the actuator 20P without applying the drive voltage to the vibration film 23P. As a result, the vibration film 24P and the vibration film 25P are stretched or shrunk in opposite phases. The action line of the force acting on the movable plate 21P from the vibration film 24P or the vibration film 25P and the action line of the force acting on the movable plate 21P from the vibration film 23P by the vibration become a so-called couple force for the movable plate 21P. The movable plate 21P vibrates so as to rotate (swing) about the axis in the thickness direction with the connection position of the vibration film 23P as a fulcrum.

  Next, an actuator 20Q according to a seventh embodiment of the present invention will be described. In the seventh embodiment, a case where the above-described support frame is used as a movable frame and a fixed plate and a fixed frame are provided separately from the movable frame will be described.

  FIG. 19A is a plan view seen from the bottom side of the actuator 20Q. FIG. 19B is a side sectional view of the actuator 20Q viewed from the width direction. FIG. 19C is a side sectional view of the actuator 20Q viewed from the length direction.

  The actuator 20Q includes a movable plate 21Q, a support frame 22Q, and vibration films 23Q and 24Q as the same configuration as in the second embodiment, and the vibration films 25Q and 26Q and the fixed plate 27Q as a configuration different from the second embodiment. I have. In the present embodiment, the support frame 22Q is movable, and the fixed plate 27Q corresponds to a “support portion” described in the claims.

  The fixed plate 27Q is a rectangular flat plate having a length direction and a width direction when viewed from the thickness direction, and is provided so as to face the bottom surface side of the movable plate 21Q with a space therebetween. Placed in. By providing the fixed plate 27Q so as to face the movable plate 21Q, the actuator 20Q can suppress the size viewed from the thickness direction even if the fixed plate 27Q is provided separately from the support frame 22Q.

  Each of the vibration film 25Q and the vibration film 26Q has a rectangular shape when viewed from the thickness direction, and has a property such that expansion or contraction occurs in the width direction when a predetermined voltage is applied. The vibration film 25Q has one end connected to the end portion in the width direction of the fixed plate 27Q, extends in the width direction from the connection portion with the fixed plate 27Q, and the other end connected to the support frame 22Q. Contrary to the vibration film 25Q, the vibration film 26Q has one end connected to the opposite end of the fixing plate 27Q in the width direction, and extends from the connecting portion with the fixing plate 27Q to the opposite side in the width direction. Are coupled to the support frame 22Q. Therefore, the vibration film 25Q corresponds to a “third vibration film” recited in the claims, and the vibration film 26Q corresponds to a “fourth vibration film” recited in the claims.

  In this configuration, the vibration films 25Q and 26Q that are expanded or contracted in the width direction are connected between the fixed plate 27Q and the support frame 22Q, and the vibration films 23Q and 24Q that are expanded or contracted in the length direction are connected to the movable plate 21Q. Since it is connected to the support frame 22Q, it is possible to prevent interference between the vibration in the width direction by the vibration films 25Q and 26Q and the vibration in the length direction by the vibration films 23Q and 24Q. Therefore, the vibration amplitude in the length direction and the vibration amplitude in the width direction of the movable plate 21Q can be increased.

  FIG. 20A is a plan view seen from the bottom surface side of the actuator 20R according to the first modification of the seventh embodiment. FIG. 20B is a side sectional view of the actuator 20R viewed from the width direction. FIG. 20C is a side sectional view of the actuator 20R viewed from the length direction.

  The actuator 20R includes a movable plate 21R, a support frame 22R, and vibration films 23R and 24R as the same configuration as in the seventh embodiment, and the vibration films 25R and 26R and the fixed frame 27R as a configuration different from the seventh embodiment. I have. In the present embodiment, a fixed frame 27R having a rectangular frame shape is provided as a support portion.

  The fixed frame 27R has a rectangular frame shape when the actuator 20R is viewed from the thickness direction, and surrounds the support frame 22R with a gap therebetween. Each of the vibration film 25R and the vibration film 26R has a rectangular shape as viewed from the thickness direction, and has a property such that expansion or contraction occurs in the width direction when a predetermined voltage is applied. The vibration film 25R has one end connected to the end portion in the width direction of the support frame 22R, extends in the width direction from the connection portion with the support frame 22R, and the other end is connected to the fixed frame 27R. Contrary to the vibration film 25R, the vibration film 26R has one end connected to the end of the support frame 22R on the opposite side in the width direction, and extends from the connection portion with the support frame 22R to the opposite side in the width direction. Are connected to the fixed frame 27R. Therefore, the vibration film 25R corresponds to a “third vibration film” recited in the claims, and the vibration film 26R corresponds to a “fourth vibration film” recited in the claims.

  Even in this configuration, the vibration in the width direction by the vibration films 25R and 26R and the vibration in the length direction by the vibration films 23R and 24R are prevented from interfering with each other. The vibration amplitude can be increased. And the thickness of the actuator 20R can be made thinner than in the seventh embodiment.

  FIG. 21A is a plan view of the actuator 20S according to the second modification of the seventh embodiment viewed from the top surface side.

  The actuator 20S includes a movable plate 21S, a support frame 22S, vibration films 23S, 24S, 25S, vibration films 26S, 27S, 28S, and a fixed plate 29S. The actuator 20S has a support frame 22S disposed near the center in the thickness direction. FIG. 21B is a plan cross-sectional view of the top surface side in a state where the actuator 20S is divided by the center plane in the thickness direction. FIG. 21C is a plan cross-sectional view of the bottom surface side in a state where the actuator 20S is divided by the center plane in the thickness direction.

  The movable plate 21S and the vibration films 23S, 24S, 25S are provided on the top surface side with respect to the support frame 22S, and are configured in the same manner as in FIG. 17, and the vibration films 23S, 24S, 25S have a length. It is connected to the support frame 22S and the movable plate 21S in the vicinity of both sides in the direction. Further, the fixed plate 29S and the vibration films 26S, 27S, and 28S are provided on the bottom side of the support frame 22S, and the length direction and the width direction of the configuration described in FIG. The vibration films 26S, 27S, and 28S are connected to the support frame 22S and the fixed plate 29S in the vicinity of both sides in the width direction.

  In this manner, the vibration films 23S, 24S, 25S and the vibration films 26S, 27S, 28S are handed over to both sides in the length direction and the width direction, so that the vibration films 23S, 24S, 25S and the vibration films 26S, 27S, 28S are delivered. Can be made long and large in deformation. Even when the vibration films 23S, 24S, 25S and the vibration films 26S, 27S, 28S are provided symmetrically about the center line extending in the length direction or the width direction as in this modification, the support frame 22S is movable. It is preferable that the vibration in the length direction and the vibration in the width direction are generated independently.

  FIG. 22A is a plan view of the actuator 20T according to the third modification of the seventh embodiment viewed from the top surface side.

  The actuator 20T includes a movable plate 21T, a support frame 22T, vibration films 23T and 24T, vibration films 25T and 26T, and a fixed plate 27T. The actuator 20T has a support frame 22T disposed near the center in the thickness direction. FIG. 22B is a plan cross-sectional view of the top surface in a state where the actuator 20T is divided by the center plane in the thickness direction. FIG. 22C is a cross-sectional plan view of the bottom surface side of the actuator 20T divided in the thickness direction center plane.

  The movable plate 21T and the vibration films 23T and 24T are provided on the top surface side of the support frame 22T, and the vibration films 23T and 24T are delivered to both sides in the length direction with the same configuration as in FIG. The support frame 22T and the movable plate 21T are connected. Further, the fixed plate 27T and the vibration films 25T and 26T are provided on the bottom side of the support frame 22T, and have a configuration in which the length direction and the width direction of the configuration described in FIG. The vibration films 25T and 26T are handed over to both sides in the width direction and connected to the support frame 22T and the fixing plate 27T.

  When the vibration films 23T and 24T and the vibration films 25T and 26T are provided in an asymmetric shape with a center line extending in the length direction or the width direction as a boundary as in this modification, the support frame 22T is configured to be movable. The relative rotational displacement between the fixed plate 27T and the support frame 22T and the relative rotational displacement between the support frame 22T and the movable plate 21T are combined to obtain an absolute rotational displacement amount. Becomes larger. FIG. 23A is a plan view seen from the top surface side of an actuator 20U according to a fourth modification of the seventh embodiment.

  The actuator 20U includes a movable plate 21U, a support frame 22U, vibration films 23U, 24U, 25U, vibration films 26U, 27U, 28U, and a fixed plate 29U. The actuator 20U is provided with a support frame 22U near the center in the thickness direction. FIG. 23B is a plan cross-sectional view of the top surface side in a state where the actuator 20U is divided by the center plane in the thickness direction. FIG. 23C is a plan cross-sectional view of the bottom surface side of the actuator 20U divided in the center plane in the thickness direction.

  The movable plate 21U and the vibration films 23U, 24U, and 25U are provided on the top surface side of the support frame 22U, and the vibration films 23U, 24U, and 25U are arranged in the length direction with the same configuration as that of FIG. It is handed over to both sides and connected to the support frame 22U and the movable plate 21U. The fixed plate 29U and the vibration films 26U, 27U, and 28U are provided on the bottom side of the support frame 22U, and the vibration films 26U, 27U, and 28U have a length that is symmetrical to that of FIG. It is handed over to both sides in the direction and connected to the support frame 22U and the fixed plate 29U.

  Also in this modification, the movable plate 21U can be reciprocated in the length direction, or the movable plate 21U can be swung as in the configuration of FIG. In this configuration, the support frame 22U is configured to be movable so that the relative displacement between the fixed plate 29U and the support frame 22U and the relative displacement between the support frame 22U and the movable plate 21U are achieved. Combined with the displacement, the absolute displacement amount can be increased.

  Next, an actuator 20V according to an eighth embodiment of the present invention will be described. In the present embodiment, a case where a plurality of vibration films are arranged in the thickness direction of the actuator 20V to generate vibration in the thickness direction will be described.

  FIG. 24 is a side sectional view of the actuator 20V viewed from the width direction. The shape of the actuator 20V viewed from the top side may be any of those shown in the first to fifth embodiments.

  The actuator 20V includes a movable plate 21V, a support frame 22V, vibration films 23V and 24V, and vibration films 25V and 26V. The vibration films 23V and 24V are “first vibration films” recited in the claims, and extend in the length direction of the actuator 20V. The vibration films 25 </ b> V and 26 </ b> V are “second vibration films” recited in the claims, and extend on the opposite side in the length direction. The vibration film 23V has one end connected to the top surface of the movable plate 21V, the other end extending in the length direction while being inclined toward the top surface in the thickness direction, and the other end connected to the support frame 22V. The vibration film 24V has one end connected to the bottom surface of the movable plate 21V, the other end extending in the length direction while being inclined toward the bottom surface in the thickness direction, and the other end connected to the support frame 22V. The vibration film 25V has one end connected to the top surface of the movable plate 21V, the other end extending to the opposite side in the length direction while being inclined toward the top surface in the thickness direction, and the other end connected to the support frame 22V. Yes. The vibration film 26V has one end connected to the bottom surface of the movable plate 21V, the other end extending to the opposite side in the length direction while being inclined toward the bottom surface in the thickness direction, and the other end connected to the support frame 22V.

  In this actuator 20V, the drive voltages of the vibration films 23V and 25V disposed on the top surface side of the movable plate 21V and the vibration films 24V and 26V disposed on the bottom surface side of the movable plate 21V are reversed to move the actuator 20V. The plate 21V can be vibrated so as to translate in the thickness direction.

  Further, the drive voltage is reversed between the vibration films 23V and 24V disposed on one side of the length direction of the movable plate 21V and the vibration films 25V and 26V disposed on the other side of the length direction of the movable plate 21V. By setting the phase, the movable plate 21V can be vibrated so as to translate in the length direction.

  Further, the movable plate 21V is driven in such a manner that the driving voltage is in an opposite phase between the vibration films arranged adjacent to each other in the length direction or the thickness direction when viewed from the width direction, thereby moving the movable plate 21V in the width direction. It can be swung around.

  Further, when the movable plate 21V is viewed from the width direction and the drive voltages of the vibration films 23V, 24V, 25V, and 26V are caused to have a phase difference of 90 ° in order in the clockwise direction, the movable plate 21V is caused to rotate counterclockwise. Can be translated to draw. On the other hand, if the phase difference of the driving voltages of the vibration films 23V, 24V, 25V, and 26V is generated by 90 ° in the counterclockwise direction, the movable plate 21V can be translated in a clockwise circular orbit. it can.

  The vibration films 23V and 25V may be connected to the movable plate 21V on the bottom surface of the movable plate 21V. Also in the actuator 20V, each vibration film may be connected to the movable plate 21V and the support frame 22V in the vicinity of both sides in the length direction so that the total length of each vibration film is increased. In this case, the top surface of the movable plate 21V may be hidden by the vibration film, and the touch operation of the movable plate 21V may be difficult. Therefore, another plate material exposed on the top surface side of the movable plate 21V may be used. It is preferable to connect to the movable plate 21V. For example, when the movable plate 21V is formed in a rectangular cylindrical shape that opens in the length direction, the top surface side of the movable plate 21V can be exposed.

  Next, an actuator 20W according to a ninth embodiment of the present invention will be described.

  FIG. 25 is a plan view of the actuator 20W viewed from the top side. The actuator 20W includes a movable plate 21W, a support frame 22W, vibration films 23W and 24W, and a shaft support portion 25W. The movable plate 21W is connected to the support frame 22W via a shaft support portion 25W, and the shaft support portion 25W supports the movable plate 21W so as to be rotatable in a plane. The shaft support 25W is connected to the movable plate 21W at a substantially center in the length direction and one end in the width direction. The vibration films 23W and 24W are connected to the movable plate 21W near the ends on both sides in the length direction and to the other end in the width direction, and extend from there to one side in the width direction and fixed to the support frame 22W. ing. The vibration films 23W and 24W cause a moment to act on the shaft support portion 25W by their deformation. Even in such a configuration, the movable plate 21W can be rotated about the shaft support portion 25W by vibrating the vibration films 23W and 24W at an appropriate phase. The movable plate 21W can be vibrated with a stronger force by connecting the vibration films 23W and 24W to a position away from the shaft support 25W and moving the movable plate 21W. Further, by connecting the shaft support portion 25W to the end of the movable plate 21W, a vibration with a larger displacement can be obtained at a position away from the shaft support portion 25W in the movable plate 21W.

  In such a configuration, when it is desired to vibrate the movable plate 21W with a larger displacement, the movable plates 21W may be moved by connecting the vibration films 23W and 24W to positions closer to the shaft support portion 25W. .

  FIG. 26 is a plan view of the actuator 20X according to a modification of the ninth embodiment viewed from the top surface side. The actuator 20X includes a movable plate 21X, a support frame 22X, a vibration film 23X, and a shaft support portion 25X. The movable plate 21X is connected to the support frame 22X via a shaft support portion 25X, and the shaft support portion 25X supports the movable plate 21X so as to be rotatable in a plane. The shaft support 25X is connected to one end in the length direction and one end in the width direction with respect to the movable plate 21X. The vibration film 23X is connected to the movable plate 21X in the vicinity of the other side of the connecting position with the end on one side in the length direction and the shaft support portion 22X in the width direction, and extends from there to the other side in the length direction. The frame is fixed to the support frame 22X. By comprising in this way, the length of the vibration film 23X can be earned to the maximum and the deformation amount which arises in the vibration film 23X can be enlarged.

  In the movable plate 21X, the distance from the fulcrum position to which the shaft support 25X is coupled to the farthest position can be gained, and the amount of vibration displacement at the farthest position from the fulcrum position can be increased. Further, by setting the coupling position of the vibration film 23X in the vicinity of the fulcrum position in the movable plate 21X, it is possible to amplify a small vibration of the vibration film 23X and increase the displacement amount of the movable plate 21X. Since the vibration film 23X extends in a direction orthogonal to a straight line connecting the connection position of the vibration film 23X and the connection position of the shaft support portion 25X in the movable plate 21X, the vibration film 23X acts on the movable plate 21X by driving the vibration film 23X. Can be efficiently converted into torque in the shaft support 25X, and the movable plate 21X can be vibrated with a strong force.

  In such a configuration, when it is desired to vibrate the movable plate 21X with a stronger force, the movable film 21X may be moved by connecting the vibration film 23X to a position further away from the shaft support portion 25. . As described above, the present invention can be implemented, but the present invention can be implemented even with the other configurations described above as long as the configurations fall within the scope of the claims.

  For example, the actuator of the present invention can be used when a keyboard, a communication terminal, and a display including a touch panel are configured as a tactile presentation device, and also for other devices that are not tactile presentation devices. In that case, the actuator of the present invention is based on an output signal from a sensor other than the touch panel (for example, an optical sensor, a sound sensor, a temperature sensor, a speed sensor, an acceleration sensor, an angle sensor, an angular velocity sensor, an angular acceleration sensor, a pressure sensor, etc.). Thus, the movable part may be driven. For example, the actuator of the present invention may be attached to a display screen of a mobile terminal or the like and configured to vibrate according to an image, video, audio, or the like displayed on the display screen. Further, the actuator of the present invention may be attached to a housing of a mobile terminal or the like so as to vibrate when an incoming call or alarm is notified. In addition, the actuator of the present invention may be attached to a display unit, an image sensor, or the like so as to vibrate when the deposit is shaken off.

  Further, the support portion of the present invention is not limited to the frame shape, and may have any shape as long as it can be arranged with a gap with respect to the movable portion. It may be a letter shape or a flat plate shape. Moreover, although a support part may be provided as an exclusive member of an actuator, members, such as a housing | casing and a frame which comprise a tactile sense presentation apparatus etc., can also be utilized as a support part. Further, in order to suppress the movement of the support portion when installing the support portion on the installation surface, a rubber-like member that increases the frictional resistance with the installation surface, an adhesive member that adheres to the installation surface, A sucker-like member that adsorbs to the installation surface, a magnet member that adheres magnetically to the installation surface made of metal, or the like may be provided. Moreover, unevenness | corrugation may be provided in the surface facing the installation surface in a support part, and frictional resistance with an installation surface may be enlarged.

  In addition, the movable part of the present invention is not limited to a flat plate shape, and may be any shape as long as it is configured to be supported by a support part via a vibration film. It may be a letter shape. Moreover, although a movable part may also be provided as an exclusive member of an actuator, members, such as a glass plate which covers the display part of a tablet terminal or a smart phone terminal, can also be utilized. When the tactile sense presentation device is configured as a touch-type keyboard, a plurality of keys may be arranged on the movable part, and one key is arranged on the movable part and a movable part is provided for each key. You may do it. In that case, a plurality of movable parts may be coupled to a single support part, and the plurality of movable parts may be connected by a vibration film.

DESCRIPTION OF SYMBOLS 10 ... Tactile presentation apparatus 11 ... Control part 12 ... Drive part 20 ... Actuator 21 ... Movable plate 22 ... Support frame 23, 24, 25, 26 ... Vibration film 30 ... Touch panel

Claims (11)

A plurality of films including a vibration film that expands and contracts in a predetermined plane direction by application of a voltage;
A movable part connected to one end of each of the plurality of films;
A support part connected to the other end of each of the plurality of films, and supporting the movable part via the plurality of films;
An actuator comprising: The plurality of films are viewed from the thickness direction of the movable part,
A first vibration film extending from the movable portion on the first planar direction side of the movable portion;
A second vibration film extending from the movable part on the opposite side of the first plane direction,
The first vibration film and the second vibration film are provided symmetrically with respect to a line extending in the first plane direction,
The actuator according to claim 1. The plurality of films include three or more of the first vibration film and the second vibration film, as viewed from the thickness direction of the movable part.
The actuator according to claim 2. The plurality of films are viewed from the thickness direction of the movable part,
A third vibration film extending from the movable portion on the second plane direction side of the movable plate orthogonal to the first plane direction;
A fourth vibration film extending from the movable part on the opposite side of the second planar direction,
The third vibration film and the fourth vibration film are provided symmetrically with respect to a line extending in the second plane direction.
The actuator according to claim 2 or 3. The plurality of films are viewed from the thickness direction of the movable part,
A first vibration film extending from the movable portion on the first planar direction side of the movable portion;
A second vibration film extending from the movable part on the opposite side of the first plane direction,
The first vibration film and the second vibration film are provided asymmetrically with respect to a line extending in the first plane direction.
The actuator according to claim 1. The plurality of films are viewed from the thickness direction of the movable part,
A third vibration film extending from the movable part on the second planar direction side of the movable part orthogonal to the first planar direction;
A fourth vibration film extending from the movable part on the opposite side of the second planar direction,
The third vibration film and the fourth vibration film are provided asymmetrically with respect to a line extending in the second plane direction.
The actuator according to claim 5. The first vibration film extends from the end portion of the movable portion opposite to the end portion on the first plane direction side to the first plane direction side when viewed from the thickness direction of the movable portion,
The second vibration film extends from an end of the movable portion on the first plane direction side to the opposite side of the first plane direction when viewed from the thickness direction of the movable portion.
The actuator according to any one of claims 2 to 6. The third vibration film extends from the end of the movable part opposite to the end of the second plane direction to the second plane direction side when viewed from the thickness direction of the movable part,
The fourth vibration film extends from the end portion on the second plane direction side in the movable portion to the opposite side of the second plane direction.
The actuator according to claim 4 or 6. The movable portion includes a plate-shaped movable plate, and a movable frame surrounding the movable plate as viewed from the thickness direction of the movable plate,
The plurality of films include a set of films connected between the support portion and the movable frame, and a set of films connected between the movable frame and the movable plate.
The actuator according to any one of claims 1 to 8. The plurality of films are provided so as to form a pair facing each of one side and the other side in the thickness direction of the movable part when viewed from the plane direction of the movable part. The actuator according to any one of the above.
The actuator according to any one of claims 1 to 10,
A touch detection unit mounted on the movable unit for detecting a touch operation;
And a control unit that applies a driving voltage to the vibration film when the touch detection unit detects a touch operation.

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