JP2016055905A - Volatile chemical liquid storage structure - Google Patents

Volatile chemical liquid storage structure Download PDF

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JP2016055905A
JP2016055905A JP2014184248A JP2014184248A JP2016055905A JP 2016055905 A JP2016055905 A JP 2016055905A JP 2014184248 A JP2014184248 A JP 2014184248A JP 2014184248 A JP2014184248 A JP 2014184248A JP 2016055905 A JP2016055905 A JP 2016055905A
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chemical
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chemical liquid
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JP6323758B2 (en
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光宏 相楽
Mitsuhiro Sagara
光宏 相楽
広時 別府
Koji Beppu
広時 別府
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JFE Engineering Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a volatile chemical liquid storage structure which detects leakage of volatile chemical liquid and chemical liquid vapor at an early time and can prevent effluence and diffusion to the circumference.SOLUTION: A volatile chemical liquid storage structure includes: a liquid storage tank 3 which connects a reception pipe line 5 for receiving volatile chemical liquid and a discharge pipe line 6 for discharging the chemical liquid and is installed on a floor surface for storing the chemical liquid; a housing chamber 1 which forms a closed space for housing the storage liquid tank; and a surrounding dike 2 formed so as to surround the liquid storage tank on a floor surface. Therein, a chemical liquid vapor detector 7 which is arranged in the neighborhood of the storage liquid tank 3 and detects chemical liquid vapor and a leakage notification unit 8 which notifies leakage of chemical liquid from the liquid storage tank or the pipe line on the basis of a chemical liquid vapor detection signal from the chemical liquid vapor detector.SELECTED DRAWING: Figure 1

Description

本発明は、揮発性薬液保管構造に関する。   The present invention relates to a volatile chemical storage structure.

腐食性を有したり周囲環境に悪影響を及ぼす薬液を貯蔵する薬液タンクから薬液が漏洩した場合に、環境汚染や装置の腐食を防止するために漏洩薬液の流出、拡散を防止する手段が必要である。一般に、薬液タンクの下方に受け皿(ドレンパン)を設けることや、薬液タンクの周囲に防液堤と漏洩薬液を貯めるピットを設けることにより薬液の周囲への流出を防止することが行われ、また、薬液漏洩を検知するため、受け皿内、防液堤の内側、ピット内に薬液漏洩検知器を設置している。ところが、この薬液漏洩検知器を用いる場合、漏洩した薬液が受け皿内、防液堤の内側、ピット内にある程度溜まるまで、あるいは薬液が薬液漏洩検知器に到達するまで、薬液漏洩検知器が薬液の漏洩を検知できず、早期検知ができないことがある。この問題を解決する対策として特許文献1で漏洩薬液拡散防止装置が提案されている。   In the event that chemicals leak from chemical tanks that store chemicals that are corrosive or adversely affect the surrounding environment, a means to prevent the leakage and diffusion of leaked chemicals is necessary to prevent environmental contamination and equipment corrosion. is there. In general, it is possible to prevent the chemical liquid from flowing out by providing a tray (drain pan) below the chemical liquid tank, or by providing a pit for storing a liquid barrier and a leaked chemical liquid around the chemical liquid tank. In order to detect chemical leaks, chemical leak detectors are installed in the tray, inside the breakwater, and in the pit. However, when this chemical leak detector is used, the chemical leak detector is not used until the leaked chemical has accumulated to some extent in the receptacle, inside the liquid barrier, in the pit, or until the chemical reaches the chemical leak detector. Leakage may not be detected and early detection may not be possible. As a countermeasure for solving this problem, Patent Document 1 proposes a leakage chemical solution diffusion prevention device.

特許文献1の漏洩薬液拡散防止装置は、薬液の受入れ配管と供給配管が接続されている薬液タンクを受け皿体上に位置させ、該受け皿体に給水配管と排水配管を接続するとともに、該排水配管に薬液漏洩検知器を設けている。かかる特許文献1の装置にあっては、受け皿体に対して給水配管を経て注水して排水配管から排水することで、受け皿体の底面は常時流水で覆われている。このような状態で薬液タンクそしてその周辺で薬液が漏洩すると、漏洩薬液が流水に混入するので、排水配管を流れる排水における電気伝導度の変化にもとづき薬液漏洩検知器がこの変化を薬液の漏洩として認識する。   The leakage chemical solution diffusion preventing device of Patent Document 1 is located on a receiving tray body with a chemical tank to which a receiving pipe and a supply pipe for receiving a chemical solution are connected, and connected to the receiving tray body with a water supply pipe and a drain pipe. Is equipped with a chemical leak detector. In such an apparatus of Patent Document 1, the bottom surface of the saucer body is always covered with running water by pouring water into the saucer body through the water supply pipe and draining from the drainage pipe. If the chemical solution leaks in and around the chemical tank in such a state, the leaked chemical solution is mixed into the running water, so the chemical leakage detector based on the change in the electrical conductivity in the drainage flowing through the drainage pipe, recognize.

特開平5-254592JP-A-5-254592

特許文献1の漏洩薬液拡散防止装置は、薬液タンクから薬液が漏洩すると受け皿体の底面の流水に混入し排水され、排水の水質変化にもとづく電気伝導度の変化が薬液漏洩検知器により検知され漏洩と認識する。しかしながら、この特許文献1の装置では、薬液が揮発性薬液であって、薬液タンクから薬液蒸気が漏洩し、あるいは、漏洩した薬液が受け皿体に到達する前にあるいは薬液が到達した直後に揮発して薬液蒸気となり、薬液蒸気が薬液タンク周囲に滞留してしまう場合には、薬液蒸気が受け皿体の底面の流水に混入しないため、漏洩を検知できない、という問題が残されている。   In the leaked chemical solution diffusion prevention device of Patent Document 1, when a chemical solution leaks from the chemical solution tank, it is mixed and drained into the running water on the bottom surface of the tray body, and a change in electrical conductivity based on a change in the drainage water quality is detected and leaked Recognize. However, in the apparatus of Patent Document 1, the chemical liquid is a volatile chemical liquid, and the chemical liquid vapor leaks from the chemical liquid tank, or volatilizes before the leaked chemical liquid reaches the tray or immediately after the chemical liquid reaches. In the case where the chemical vapor is accumulated around the chemical tank, the chemical vapor does not mix with the flowing water on the bottom surface of the tray body, so that there is a problem that leakage cannot be detected.

本発明は、かかる事情に鑑み、揮発性薬液そして薬液蒸気の漏洩を早期に検知し、周囲への流出、拡散を防止することができる揮発性薬液保管構造を提供することを課題とする。   In view of such circumstances, an object of the present invention is to provide a volatile chemical storage structure capable of detecting leakage of volatile chemicals and chemical vapors at an early stage and preventing outflow and diffusion to the surroundings.

本発明による揮発性薬液保管構造は、揮発性の薬液を受け入れる受入配管と払い出す払出配管が接続されている薬液貯留のために床面上に設置された貯液槽と、貯液槽を収容する閉空間を形成する収納室と、貯液槽を床面上で囲むように形成された周回防液堤とを有する。   The volatile chemical solution storage structure according to the present invention accommodates a liquid storage tank installed on the floor for storing a chemical solution to which a receiving pipe for receiving a volatile chemical liquid and a discharge pipe for discharging are connected, and a liquid storage tank. A storage chamber that forms a closed space, and a circulating liquid bank formed to surround the liquid storage tank on the floor surface.

かかる揮発性薬液保管構造において、本発明では、貯液槽の近傍に配置されて薬液蒸気を検知する薬液蒸気検知器と、該薬液蒸気検知器からの薬液蒸気検知信号にもとづき貯液槽又は配管からの薬液の漏洩を報知する漏洩報知器とを備えることを特徴としている。   In such a volatile chemical solution storage structure, in the present invention, a chemical vapor detector that is disposed in the vicinity of the liquid reservoir and detects the chemical vapor, and a liquid storage tank or pipe based on a chemical vapor detection signal from the chemical vapor detector And a leak notification device for notifying the leakage of the chemical solution from the device.

このような構成の本発明の揮発性薬液保管構造によれば、貯液槽あるいは配管から薬液が漏洩したときには、薬液が周回防液堤内に滴下するので、漏洩薬液の流出そして拡散を防止できるのはもとより、薬液が漏洩して滴下直後に揮発するとその薬液蒸気を薬液蒸気検知器が検知し、即時に、漏洩報知器が漏洩を報知する。薬液が滴下する途中あるいは漏洩時に揮発して薬液蒸気となった場合にも、上記薬液蒸気検知器がこれを検知し、これにもとづき漏洩報知器が報知する。   According to the volatile chemical solution storage structure of the present invention having such a configuration, when the chemical solution leaks from the liquid storage tank or the pipe, the chemical solution is dripped into the circulating liquid barrier, so that the leakage and diffusion of the leaked chemical solution can be prevented. Needless to say, if the chemical liquid leaks and volatilizes immediately after the dropping, the chemical vapor detector detects the chemical vapor, and the leak alarm immediately notifies the leakage. Even when the chemical solution is dripped or when it is volatilized at the time of leakage, the chemical solution vapor detector detects this, and the leak notification device notifies based on this.

本発明において、薬液蒸気検知器は、水平方向で周回防液堤の範囲に位置して設けられていることが好ましい。この範囲が漏洩薬液が滴下する可能性が高いからである。   In this invention, it is preferable that the chemical | medical solution vapor | steam detector is located in the range of the circumference | surroundings liquid breakwater in the horizontal direction. This is because there is a high possibility that the leaked chemical solution will drop in this range.

本発明において、薬液蒸気の比重が空気よりも大きい場合には、上記薬液蒸気検知器は、高さ方向で周回防液堤の周壁よりも低い位置に設けられていることが有効である。また薬液蒸気の比重が空気よりも小さい場合には、薬液蒸気検知器は、高さ方向で貯液槽よりも上方に位置して設けられていることが有効である。   In the present invention, when the specific gravity of the chemical vapor is larger than that of air, it is effective that the chemical vapor detector is provided at a position lower in the height direction than the peripheral wall of the circulating liquid barrier. When the specific gravity of the chemical vapor is smaller than that of air, it is effective that the chemical vapor detector is provided above the liquid storage tank in the height direction.

本発明は、以上のように、閉空間をなす収納室に貯液槽を収め、該貯液槽を床面上で囲むように形成された周回防液堤を設けると共に、貯留槽の近傍に配置されて薬液蒸気を検知する薬液蒸気検知器と、該薬液蒸気検知器からの薬液蒸気検知信号にもとづき貯液槽及び配管からの薬液の漏洩を報知する漏洩報知器とを有しているようにしたので、貯液槽あるいは配管から揮発性薬液が漏洩した場合、漏洩薬液が揮発して薬液蒸気を発生し、この薬液蒸気の漏洩を薬液蒸気検知器により検知し、又は薬液蒸気が漏洩する場合にも薬液蒸気検知器により検知し、漏洩発生を漏洩報知器で報知することができ、漏洩に対する対処を適切に行えるようになる。   The present invention, as described above, accommodates a liquid storage tank in a storage chamber that forms a closed space, provides a circumferential liquid breakwater formed so as to surround the liquid storage tank on the floor surface, and in the vicinity of the storage tank. It is arranged to have a chemical vapor detector arranged to detect chemical vapor and a leak alarm to notify leakage of chemical from the liquid storage tank and piping based on the chemical vapor detection signal from the chemical vapor detector Therefore, when volatile chemical liquid leaks from the storage tank or piping, the leaked chemical liquid volatilizes and generates chemical vapor, and this chemical vapor leak is detected by the chemical vapor detector, or the chemical vapor leaks. Even in such a case, the chemical vapor detector can detect the leakage, and the occurrence of leakage can be notified by the leakage notification device, so that the countermeasure against the leakage can be appropriately performed.

さらには、本発明では、従来のような受け皿体上を流水で覆う必要がないので、流水を用いない分、設備が簡単となり、また常時流している流水のためのコストを削減できる。これに加え、流水と共に流水の排水位置で薬液から大気に蒸発放散される薬液蒸気によって環境に有害となることもない。   Furthermore, in the present invention, since it is not necessary to cover the receiving tray body with flowing water as in the prior art, the facility is simplified by the amount of not using flowing water, and the cost for flowing flowing water can be reduced. In addition, there is no harm to the environment by chemical vapor evaporated from the chemical to the atmosphere at the drainage position of the flowing water together with the flowing water.

本発明の一実施形態を示す概要構成図である。It is a schematic block diagram which shows one Embodiment of this invention.

以下、添付図面にもとづき、本発明の一実施形態を説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

本実施形態における揮発性薬液保管構造は、図1に見られるごとく、閉空間を形成する収納室1の床面に周回防液堤2が設けられ、この周回防液堤2の上に貯液槽3が設置されている。   As shown in FIG. 1, the volatile chemical solution storage structure in the present embodiment is provided with a circumferential liquid breakwater 2 on the floor surface of the storage chamber 1 that forms a closed space, and a liquid storage on the circumferential liquid breakwater 2. A tank 3 is installed.

上記周回防液堤2は、貯液槽3を支持する底部2Aと、該底部2Aの周縁から立ち上がる周壁2Bとを有し、該周壁2Bは、上方から見たときに、上記貯液槽3を取り囲むように周回して形成されている。該周回防液堤2は、薬液に対する耐漏洩性、耐腐食性が要求される。   The circumferential liquid breakwater 2 has a bottom 2A that supports the liquid storage tank 3 and a peripheral wall 2B that rises from the periphery of the bottom 2A, and the peripheral wall 2B, when viewed from above, has the liquid storage tank 3 Is formed so as to surround. The circuit breakwater 2 is required to have leakage resistance and corrosion resistance against chemical solutions.

揮発性薬液を貯留する貯液槽3は、支持脚4により支持され該支持脚4が上記周回防液堤2の底部2Aに固定されている。本実施形態では、周回防液堤2は底部2Aを有しているが、これは必須ではなく、単に周壁2Bのみを有していてもよく、その場合、収納室1の床面は上記底部2Aと同等の薬液に対する耐漏洩性、耐腐食性が要求される。   The liquid storage tank 3 for storing the volatile chemical liquid is supported by a support leg 4, and the support leg 4 is fixed to the bottom 2 </ b> A of the circulating liquid barrier 2. In the present embodiment, the revolving breakwater 2 has the bottom 2A, but this is not essential, and may have only the peripheral wall 2B. In that case, the floor surface of the storage chamber 1 is the bottom. Leakage resistance and corrosion resistance against chemical solutions equivalent to 2A are required.

上記貯液槽3には、収納室1の壁部を貫通する受入配管5と払出配管6が接続されている。受入配管5には流入側弁5Aそして払出配管6には流出側弁6Aの開閉弁が設けられている。   The liquid storage tank 3 is connected to a receiving pipe 5 and a discharge pipe 6 that penetrate the wall of the storage chamber 1. The receiving pipe 5 is provided with an on-off valve 5A, and the discharge pipe 6 is provided with an on-off valve for an outflow side valve 6A.

上記周回防液堤2の周壁2Bの範囲内には、薬液蒸気検知器7が配設されている。該薬液蒸気検知器7は、薬液蒸気に反応する周知のガスセンサでよく、例えば、静電容量方式あるいは電極間電気抵抗方式等が採用可能である。上記薬液蒸気検知器7は、薬液の種類によって設定高さ位置を定める。すなわち、上記薬液蒸気検知器7は、薬液蒸気の比重が空気よりも大きい場合には、周回防液堤2の周壁2Bの高さよりも低い位置に設置し、薬液蒸気の比重が空気よりも小さい場合には、上記貯液槽3よりも上方で該貯液槽3の近傍位置(図1にて破線で示される位置)に設置する。また、薬液蒸気検知器7は、周回防液堤2の周壁2Bよりも低い位置と貯液槽3よりも上方の位置の両方に配置しておいて、いずれかによって検知して薬液の種類が変わっても対応できるようにしておいてもよい。また、いずれの場合においても、薬液蒸気は周辺に拡散することも考慮して、薬液蒸気検知器7は周回防液堤2の周壁2Bの範囲外に配置されていても効果はある。   A chemical vapor detector 7 is disposed in the range of the peripheral wall 2 </ b> B of the circulating breakwater 2. The chemical vapor detector 7 may be a known gas sensor that reacts with chemical vapor. For example, a capacitance method or an interelectrode electrical resistance method may be employed. The chemical vapor detector 7 determines the set height position according to the type of chemical. That is, when the specific gravity of the chemical vapor is larger than that of air, the chemical vapor detector 7 is installed at a position lower than the height of the peripheral wall 2B of the circulating liquid barrier 2 and the specific gravity of the chemical vapor is smaller than that of air. In this case, it is installed above the liquid storage tank 3 at a position near the liquid storage tank 3 (a position indicated by a broken line in FIG. 1). Further, the chemical vapor detector 7 is arranged at both a position lower than the peripheral wall 2B of the circulating breakwater 2 and a position above the liquid storage tank 3, and the type of the chemical liquid is detected by either one. You may be able to cope with changes. In any case, the chemical vapor detector 7 is effective even if the chemical vapor detector 7 is arranged outside the range of the peripheral wall 2 </ b> B of the circulating liquid barrier 2 in consideration that the chemical vapor diffuses to the periphery.

上記薬液蒸気検知器7は、収納室1外に設けられた漏洩報知器8に接続されており、薬液蒸気検知器7が薬液蒸気を検知したときには、これを漏洩報知器8が報知する。   The chemical vapor detector 7 is connected to a leak alarm 8 provided outside the storage chamber 1, and when the chemical vapor detector 7 detects the chemical vapor, the leak alarm 8 notifies this.

本実施形態において、周回防液堤2の底部2Aに、あるいは底部を有しない場合には床面に、図1にて二点鎖線で示されるように、その一部を深くするピット2A−1を形成して、漏洩薬液を周回防液堤2内に留めることのできる容量を拡大して、漏洩薬液が周壁2Bを越流しないようにすることもできる。   In this embodiment, a pit 2A-1 that deepens a part of the bottom 2A of the revolving breakwater 2 or, if there is no bottom, on the floor as shown by a two-dot chain line in FIG. The capacity of the leaked chemical solution to be retained in the circulating liquid barrier 2 can be increased so that the leaked chemical solution does not overflow the peripheral wall 2B.

このように構成される本実施形態の揮発性薬液保管構造において、漏洩薬液の検知の原理を以下に説明する。   In the volatile chemical solution storage structure of the present embodiment configured as described above, the principle of detection of a leaked chemical solution will be described below.

揮発性の薬液は、受入配管5を経て貯液槽3に貯留され、払出配管6を経て排出される。その際、薬液が貯液槽3あるいは配管から漏洩すると、薬液は周回防液堤2の周壁2Bの範囲内に滴下し、時間の経過に伴い、底部2A上に溜まる。しかし、薬液は上記底部2A上に溜まる前の、滴下直後に、揮発して薬液蒸気となり、すぐに、薬液蒸気検知器7により検出される。また、薬液が底部2Aまで滴下する直前あるいは直後に蒸気になり、あるいは漏洩時にすでに蒸気となっていても、上記薬液蒸気検知器7により、薬液蒸気は検知される。   Volatile chemical liquid is stored in the liquid storage tank 3 through the receiving pipe 5 and discharged through the discharge pipe 6. At this time, when the chemical liquid leaks from the liquid storage tank 3 or the pipe, the chemical liquid drops in the range of the peripheral wall 2B of the circumferential liquid barrier 2 and accumulates on the bottom 2A as time passes. However, the chemical liquid volatilizes and becomes chemical vapor immediately after dropping before it accumulates on the bottom portion 2A, and is immediately detected by the chemical vapor detector 7. Further, even if the chemical solution is vaporized immediately before or after dropping to the bottom 2A, or is already vaporized at the time of leakage, the chemical vapor detector 7 detects the chemical vapor.

薬液蒸気の比重が空気よりも大きい場合には、下方に位置する薬液蒸気検知器により、また空気よりも小さい場合には、上方に位置する薬液蒸気検知器により薬液蒸気が検知される。薬液蒸気検知器7により薬液蒸気が検知されると、貯液槽あるいは配管で薬液に漏洩があったと認識され、これを漏洩報知器8による報知によって知ることができる。かかる場合、流入側弁5Aそして流出側弁6Aの少なくともいずれか一方を閉として、操業を停止する。この流入側弁5Aそして流出側弁6Aは、薬液蒸気検知器7の検知信号にもとづき、漏洩報知器8の作動とともにあるいはそれに代えて、自動的に開閉制御されることとしてもよい。   When the specific gravity of the chemical liquid vapor is larger than that of air, the chemical liquid vapor is detected by the chemical liquid vapor detector located below, and when smaller than the air, the chemical liquid vapor is detected by the chemical liquid vapor detector located above. When the chemical vapor is detected by the chemical vapor detector 7, it is recognized that the chemical liquid has leaked in the liquid storage tank or the pipe, and this can be known by notification by the leak alarm 8. In such a case, the operation is stopped by closing at least one of the inflow side valve 5A and the outflow side valve 6A. The inflow side valve 5 </ b> A and the outflow side valve 6 </ b> A may be automatically controlled to open and close together with or in place of the operation of the leak notification device 8 based on the detection signal of the chemical vapor detector 7.

1 収納室
2 周回防液堤
3 貯液槽
5 受入配管
6 払出配管
7 薬液蒸気検知器
8 漏洩報知器
DESCRIPTION OF SYMBOLS 1 Storage room 2 Circulation breakwater 3 Storage tank 5 Receiving piping 6 Discharge piping 7 Chemical vapor detector 8 Leakage alarm

Claims (4)

揮発性の薬液を受け入れる受入配管と払い出す払出配管が接続されている薬液貯留のために床面上に設置された貯液槽と、貯液槽を収容する閉空間を形成する収納室と、貯液槽を床面上で囲むように形成された周回防液堤とを有する揮発性薬液保管構造において、
貯液槽の近傍に配置されて薬液蒸気を検知する薬液蒸気検知器と、
該薬液蒸気検知器からの薬液蒸気検知信号にもとづき貯液槽又は配管からの薬液の漏洩を報知する漏洩報知器と、
を備えることを特徴とする揮発性薬液保管構造。
A storage tank installed on the floor for storing a chemical solution to which a receiving pipe for receiving volatile chemical liquid and a discharge pipe for discharging are connected; a storage chamber forming a closed space for storing the liquid storage tank; In a volatile chemical storage structure having a surrounding dike formed so as to surround the liquid storage tank on the floor surface,
A chemical vapor detector disposed near the liquid storage tank for detecting chemical vapor, and
A leak notification device for notifying the leakage of the chemical solution from the liquid storage tank or the pipe based on the chemical vapor detection signal from the chemical solution vapor detector;
A volatile chemical storage structure characterized by comprising:
薬液蒸気検知器は、水平方向で周回防液堤の範囲に位置して設けられていることとする請求項1に記載の揮発性薬液保管構造。   The volatile chemical storage structure according to claim 1, wherein the chemical vapor detector is provided in a horizontal direction so as to be located within a range of the circulating liquid barrier. 薬液蒸気検知器は、高さ方向で周回防液堤の周壁よりも低い位置に設けられていることとする請求項1又は請求項2に記載の揮発性薬液保管構造。   The volatile chemical storage structure according to claim 1 or 2, wherein the chemical vapor detector is provided at a position lower in the height direction than the peripheral wall of the circulating breakwater. 薬液蒸気検知器は、高さ方向で貯液槽よりも上方に位置して設けられていることとする請求項1又は請求項2に記載の揮発性薬液保管構造。   The volatile chemical storage structure according to claim 1 or 2, wherein the chemical vapor detector is provided above the liquid storage tank in the height direction.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019102544A1 (en) * 2017-11-22 2019-05-31 住友電気工業株式会社 Redox flow battery

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JPS4935286B1 (en) * 1970-05-01 1974-09-20
JPS57103755U (en) * 1980-12-17 1982-06-25
JPH0342543U (en) * 1989-09-05 1991-04-22
JPH10156265A (en) * 1996-11-27 1998-06-16 Dainippon Screen Mfg Co Ltd Substrate treatment apparatus

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JPS4935286B1 (en) * 1970-05-01 1974-09-20
JPS57103755U (en) * 1980-12-17 1982-06-25
JPH0342543U (en) * 1989-09-05 1991-04-22
JPH10156265A (en) * 1996-11-27 1998-06-16 Dainippon Screen Mfg Co Ltd Substrate treatment apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019102544A1 (en) * 2017-11-22 2019-05-31 住友電気工業株式会社 Redox flow battery
JPWO2019102544A1 (en) * 2017-11-22 2020-10-01 住友電気工業株式会社 Redox flow battery

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