JP2016049710A - Liquid discharge head, thin layer member and image formation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent enlargement of an area in which the pinhole inspection of a thin wall part is insufficient.SOLUTION: There is provided a thin layer member 200 comprising a thin-walled part 200A, and a thick-walled part 200B. The thin-walled part 200A is formed by a first layer 201, and the thick-walled part 200B has second and third layers 202 and 203 laminated to the first layer 201. The third layer 203 has an overhanging shape part 203a. The projection region of the overhanging shape part 203a of the third layer 203 is included in the second layer 202. The whole surface of the second layer 202 at the side of the first layer 201 contacts closely to the first layer 201.SELECTED DRAWING: Figure 5

Description

  The present invention relates to a liquid discharge head, a thin layer member, and an image forming apparatus.

  As an image forming apparatus, for example, an apparatus using a liquid discharge head (droplet discharge head) for discharging droplets as an image forming unit is known. Some liquid discharge heads use thin layer members having a thin portion and a thick portion as members such as a damper member, a diaphragm member, and a filter member.

  Conventionally, when the thin layer member is formed of an electroformed film and the layer forming the thin portion is the first layer, the second layer and the third layer each having an overhang shape portion with respect to the first layer. Are sequentially stacked, and the projection region of the overhang-shaped portion of the third layer is known to be included in the second layer (Patent Document 1).

JP 2012-179813 A

  However, in the structure in which the second layer and the third layer having the overhang-shaped portion are sequentially stacked on the first layer forming the thin portion as described above, the pinhole inspection of the first layer is performed. There is a problem in that the inspection of the region of the first layer that overlaps the projection region of the overhanging portion of the second layer or the third layer becomes insufficient.

  This invention is made | formed in view of said subject, and it aims at reducing the area | region where the pinhole test | inspection of a thin part becomes inadequate.

In order to solve the above-described problem, a liquid discharge head according to the present invention includes:
A thin layer member having a thin part and a thick part,
The thin layer member is
A first layer forming the thin portion;
A second layer and a third layer that are stacked on the first layer and form a portion that becomes the thick portion; and
The third layer has an overhang shape;
The projected area of the overhanging portion of the third layer is included in the second layer,
The second layer has a configuration in which all the first layer side surfaces are in close contact with the first layer.

  According to the present invention, it is possible to reduce a region where pinhole inspection of a thin portion is insufficient.

FIG. 3 is an explanatory cross-sectional view along the nozzle arrangement direction of the liquid ejection head according to the first embodiment of the present invention. It is an expanded sectional explanatory view of a channel member portion of a direction of the head orthogonal to a nozzle arrangement direction. It is sectional explanatory drawing of the common liquid chamber short direction (direction orthogonal to a nozzle arrangement direction) with which it uses for description of a damper member. It is a disassembled perspective explanatory drawing of the damper member. It is a section explanatory view of a thin layer member. It is sectional explanatory drawing with which it uses for description of the pinhole test | inspection of a thin layer member. It is a section explanatory view of a thin layer member in a 2nd embodiment of the present invention. It is a section explanatory view of a thin layer member in a 3rd embodiment of the present invention. It is a section explanatory view of a thin layer member in a 4th embodiment of the present invention. It is a section explanatory view of a thin layer member in a 5th embodiment of the present invention. It is a section explanatory view of a thin layer member in a 6th embodiment of the present invention. It is sectional explanatory drawing of the common liquid chamber short direction of each embodiment with which it uses for description of direction of joining with respect to the frame member of a thin layer member. FIG. 6 is a cross-sectional explanatory view of the common liquid chamber in the lateral direction of Comparative Example 1 as well. It is a section explanatory view in the state where position gap occurred between a thin layer member and a frame member in each embodiment. It is a section explanatory view in the state where position gap occurred between a thin layer member and a frame member in comparative example 2. FIG. 10 is a cross-sectional explanatory diagram in a direction (liquid chamber longitudinal direction) orthogonal to a nozzle arrangement direction of a liquid ejection head according to a seventh embodiment of the present invention. It is sectional explanatory drawing of a nozzle arrangement direction (liquid chamber short direction). It is a plane explanatory view of an example of a liquid ejection device concerning the present invention.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. A liquid discharge head according to a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is an explanatory cross-sectional view along the nozzle arrangement direction of the head, and FIG.

  The liquid discharge head includes a flow path member 101 including a pressure generating unit, and a frame member 102 that holds the flow path member 101 and forms a frame of the head.

  As shown in FIG. 2, the flow path member 101 includes a nozzle plate 1, a flow path plate 2, a vibration plate member 3, a piezoelectric element 4 as pressure generating means, and a holding substrate 5. Note that the flow path member 101 is not limited to one that is joined to the frame member 102 after the members are integrated into independent members (units).

  A plurality of nozzles 11 for discharging droplets are formed on the nozzle plate 1. Here, a plurality of nozzle rows in which a plurality of nozzles 11 are arranged (only two rows are shown in FIG. 2) are provided.

  The flow path plate 2, together with the nozzle plate 1 and the vibration plate member 3, includes an individual liquid chamber 12 that communicates with the nozzle 11, a fluid resistance portion 13 that communicates with the individual liquid chamber 12, and a liquid introduction portion (passage) 14 that communicates with the fluid resistance portion 13. Forming. The liquid introduction part 14 communicates with a common liquid chamber 20 formed by the frame member 102 via a passage (supply port) 15 and a flow path 5 a of the holding substrate 5.

  The vibration plate member 3 is a wall surface member that forms a deformable vibration region (referred to as a “vibration plate”) 30 that forms a part of the wall surface of the individual liquid chamber 12.

  The piezoelectric element 4 is provided integrally with the diaphragm 30 on the surface of the diaphragm 30 opposite to the individual liquid chamber 12, and the diaphragm 30 and the piezoelectric element 4 constitute a unimorph type piezoelectric actuator. A drive IC 41 for driving the element 4 is disposed between the two rows of piezoelectric elements.

  Note that the pressure generating means is not limited to the piezoelectric actuator, and an electrostatic actuator, a thermal actuator, or the like can also be used.

  A concave portion 51 is formed in the holding substrate 5 in a region corresponding to the diaphragm 30. This recess 51 forms a space for protecting the piezoelectric element 4.

  Here, the nozzle plate 1 has the nozzle 11 formed on the SUS plate by pressing and polishing, but is not limited thereto. For example, a nickel (Ni) metal plate manufactured by electroforming (electroforming), other metal members, resin members, a laminate member of a resin layer and a metal layer, or the like can be used. Further, a liquid repellent layer is provided on the droplet discharge side surface (surface in the discharge direction: discharge surface) of the nozzle plate 1.

  The flow path plate 2 is etched using a silicon oxide film as an etching stop layer using a substrate bonded with silicon via a silicon oxide film on a silicon substrate, and an individual liquid chamber 12, a fluid resistance portion 13, a liquid introduction Grooves and through-holes constituting the part 14 and the like are formed. The material of the flow path plate 2 is not limited to this. For example, it can be formed of glass other than silicon, inorganic materials such as ceramics, alloy materials such as SUS, and resins.

  By forming the piezoelectric element 4 on the diaphragm 30 of the diaphragm member 3, a unimorph type piezoelectric actuator is configured as described above. As described above, the diaphragm 30 is formed by the remaining silicon oxide film and silicon when the flow path is formed by etching using the silicon oxide film as an etching stop layer, but is not limited thereto. .

  Further, the diaphragm 30 is not limited to the one formed integrally with the flow path plate 2. The diaphragm member 3 can be formed of, for example, a semiconductor, a metal oxide, a metal nitride, or a metal carbide. Examples of semiconductors include polycrystalline Si, amorphous Si, and Ge. Metal oxides and metal nitrides include Si compounds, Al compounds, Zr compounds, Ti compounds, Y compounds, and Ta used in general ceramics. Examples thereof include compounds, Sn compounds, and In compounds.

  The diaphragm member 3 may be either a single film or a multilayer film. Further, the diaphragm member 3 serving as an etching stop layer for forming the diaphragm 30 is formed on the silicon substrate by a vapor phase method such as CVD or sputtering, the silicon substrate is etched, and the flow path and the diaphragm 30 are simultaneously formed. It can also be formed.

  The piezoelectric element 4 is formed by etching the lower electrode, the piezoelectric layer, and the layer serving as the upper electrode from the diaphragm 30 side. As a material of the upper electrode and the lower electrode, for example, a refractory metal such as Ag, Au, Pt, Ir, Pd, W, or Ta is preferable.

  In addition, the interface between the upper electrode and the lower electrode and the piezoelectric layer and the interface between the lower electrode and the diaphragm 30 have high heat resistance to prevent mutual diffusion, and have chemical stability that is difficult to mutually diffuse with the electrode material. It is preferable to use a high material. For example, metal oxides, metal nitrides, metal carbides and the like can be used, and these composite compounds can also be used. Moreover, you may give the function as an electrode by using the compound which has electroconductivity.

  As the piezoelectric material for forming the piezoelectric layer, a known material can be used. As the piezoelectric material, it is preferable to use lead zirconate titanate having a high piezoelectric constant and stable temperature characteristics.

Since the thickness of the flow path plate 2 including the vibration plate 30 is thin, the holding substrate 5 is joined to the side opposite to the nozzle plate 1 of the flow path plate 2 in order to ensure rigidity. The holding substrate 5 is preferably made of a ceramic material such as glass, silicon, SiO ₂ , ZrO ₂ , or Al ₂ O _{3 in} order to increase rigidity.

  Further, it is preferable that the holding substrate 5 is formed with an independent recess 51 for each individual liquid chamber 12 in the nozzle arrangement direction, and is bonded to a position facing the partition between the individual liquid chambers 12. The flow path 5a of the holding substrate 5 forms a part of the common liquid chamber 20 when formed continuously in the nozzle arrangement direction.

  Returning to FIG. 1, the frame member 102 is bonded to the surface of the flow path member 101 opposite to the surface to which the nozzle plate 1 is bonded, and a plurality of individual liquid chambers through which a plurality of nozzles 11 for discharging droplets communicate. A common liquid chamber 20 for supplying a liquid to 12 is formed.

  Further, the frame member 102 is formed with a recess 121 that accommodates the damper member 103 and becomes the damper chamber 104. That is, the frame member 102 forms the common liquid chamber 20 and the damper chamber 104 disposed on the opposite side of the common liquid chamber 20 with the damper 131 interposed therebetween.

  The frame member 102 has a connecting pipe portion that forms at least a part of a supply pipe portion that supplies liquid from the outside to the common liquid chamber 20 at the central portion of the concave portion 121 in the longitudinal direction of the common liquid chamber (nozzle arrangement direction). 24 is provided.

  And the damper member 103 is arrange | positioned in the area | region between the wall part of the frame member 102 which comprises the connection pipe part 24, and the side wall of the recessed part 121 in the common liquid chamber longitudinal direction.

  On the other hand, the flow path conversion member 105 is joined to the opening side of the recess 121 of the frame member 102.

  In the flow path conversion member 105, a meandering flow path (snake line) 151 that leads to the atmosphere in the damper chamber 104 is formed. Further, the flow path conversion member 105 is provided with a connecting pipe portion 154 that forms a part of a supply pipe portion in which a liquid supply path is formed. It is connected.

  Next, the damper member 103 will be described with reference to FIGS. 3 is a cross-sectional explanatory view of the common liquid chamber short direction (direction orthogonal to the nozzle arrangement direction) for explaining the damper member, and FIG. 4 is an exploded perspective explanatory view of the damper member.

  The damper member 103 includes the thin layer member 200 according to the present invention and a holding member 140 that holds the thin layer member 200.

  The thin layer member 200 is formed by a thin-walled portion 200 </ b> A, which will be described later, and a reversibly deformable damper 131 that forms a wall surface opposite to the individual liquid chamber side of the common liquid chamber 20. The holding member 140 is formed with an opening 141 (which becomes a part of the above-described damper chamber 104) that allows deformation of a portion of the damper 131 formed by the thin layer member 200.

  In addition, at the bottom of the recess 121 of the frame member 102 on the common liquid chamber side, an opening 122 where the damper 131 of the damper member 103 faces and a support 123 that forms the periphery of the opening 122 and supports the damper member 103 are provided. It has been.

  The damper member 103 is joined to the wall surface on the damper chamber 104 side of the support portion 123 of the frame member 102 at a position where the damper 131 faces the opening 122.

  Next, the thin layer member 200 will be described with reference to FIG. FIG. 5 is a cross-sectional explanatory view of the thin layer member.

  The thin layer member 200 is laminated on the first layer 201 that forms a thin part 200A that can be deformably deformed, and a part that becomes the thick part 200B together with the first layer 201. A second layer 202 and a third layer 203 are provided. As shown in FIG. 5, the thick portion 200B means a portion that is relatively thicker than the thin portion 200A, and does not mean that the thickness is constant.

  Here, the first layer 201, the second layer 202, and the third layer 203 are formed of an electroformed film.

  The third layer 203 has an overhang shape portion 203a. The “overhang shape portion” means a portion protruding like an eaves. Here, the overhang shape portion 203 a is a portion that protrudes toward the thin portion 200 </ b> A rather than the portion connected to the second layer 202.

  The projection region of the overhanging portion 203a of the third layer 203 is included in the second layer 202 and does not directly face the thin portion 200A.

  That is, the tip end portion of the third layer 203 in the surface direction (the direction along the surface) of the overhang shape portion 203a is located at the thick portion 200B than the boundary in the surface direction between the thin portion 200A and the thick portion 200B. doing.

  The second layer 202 has a flat plate shape, and all the surfaces on the first layer 201 side are provided in close contact with the first layer 201.

  In the second layer 202, a wall surface 202 a that defines a boundary in the surface direction between the thin portion 200 </ b> A and the thick portion 200 </ b> B is formed in a tapered shape with respect to the first layer 201. The inclination of the wall surface 202 a of the second layer 202 is a direction away from the overhanging portion 203 a of the third layer 203 as it is away from the interface with the first layer 201.

  That is, the second layer 202 has an overhang-shaped portion 202b that protrudes toward the thin portion 200A from the boundary in the plane direction between the thin portion 200A and the thick portion 200B.

  Since it comprised in this way, as shown in FIG. 6, when performing the pinhole test | inspection of the 1st layer 201 of the thin layer member 200, an inspection light is irradiated from the 3rd layer 203 side, and an inspection light is irradiated side And the inspection light is detected by a photodetector arranged through the first layer 201.

  Thereby, when the pinhole exists in the thin part 200A, since the inspection light leaks to the light detection side through the pinhole, the presence or absence of the pinhole can be detected.

  When this pinhole inspection is performed, since the overhang shape portion 203a of the third layer 203 is not projected onto the thin portion 200A, there is no area that cannot be inspected by the overhang shape portion 203a.

  At this time, the region where the inspection light is restricted by the inclination of the wall surface 202a of the second layer 202 is extremely small, and the region that cannot be inspected can be reduced.

  As described above, the third layer has a projection region of the overhang-shaped portion, the portion facing the thin portion is located in the second layer, and the second layer has the first layer side surface all the first layer side. By setting it as the structure closely_contact | adhered to the layer, the area | region where the pinhole test | inspection of a thin part becomes inadequate can be reduced.

  Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 7 is a cross-sectional explanatory view of a thin layer member in the same embodiment.

  In the thin layer member 200 of the present embodiment, a wall surface 202a that defines a boundary in the surface direction between the thin portion 200A and the thick portion 200B of the second layer 202 is formed in a shape perpendicular to the first layer 201. ing.

  With this configuration, the overhang shape of the second layer 202 is eliminated, and the area of the thin portion 200A where the inspection light is blocked is smaller than in the first embodiment.

  Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 8 is a cross-sectional explanatory view of the thin layer member in the same embodiment.

  In the thin layer member 200 of the present embodiment, a wall surface 202a that defines a boundary in the surface direction between the thin portion 200A and the thick portion 200B of the second layer 202 is formed in a tapered shape with respect to the first layer 201. ing. The inclination of the wall surface 202a of the second layer 202 is closer to the overhanging portion 203a of the third layer 203 as the distance from the interface with the first layer 201 increases.

  With this configuration, the overhang shape of the second layer 202 is eliminated as in the second embodiment, and the area of the thin portion 200A where the inspection light is blocked is smaller than in the first embodiment.

  Next, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 9 is a cross-sectional explanatory view of a thin layer member in the same embodiment.

  The thin layer member 200 of the present embodiment is formed of a plurality of layers 203A and 203B in which the third layer 203 is sequentially laminated from the second layer 202 side. Each of the layers 203A and 203B has an overhang shape portion 203a, the projection region of the overhang shape portion 203a of the layer 203A is included in the second layer 202, and the projection region of the overhang shape portion 203a of the layer 203B. Are included in layer 203A.

  By comprising in this way, the rigidity of the thick part 200B can be improved more.

  Next, a fifth embodiment of the present invention will be described with reference to FIG. FIG. 10 is a cross-sectional explanatory view of a thin layer member in the same embodiment.

  In the thin layer member 200 of this embodiment, the second layer 202 is formed of a plurality of layers 202A and 202A.

  By comprising in this way, the rigidity of the thick part 200B can be improved more.

  Next, a sixth embodiment of the present invention will be described with reference to FIG. FIG. 11 is a cross-sectional explanatory view of a thin layer member in the same embodiment.

  In the thin layer member 200 of the present embodiment, the fourth layer 204 that forms a portion that becomes the thick portion 200B is provided on the surface of the first layer 201 opposite to the surface on which the second layer 202 is laminated. Are stacked.

  The fourth layer 204 has an overhang shape portion 204a, and the projection region of the overhang shape portion 204a of the fourth layer 204 is included in the second layer 202 and does not directly face the thin portion 200A.

  By comprising in this way, the rigidity of the thick part 200B can be improved more.

  Next, the direction of joining of the thin layer member 200 to the frame member 102 will be described with reference to FIGS. FIG. 12 is a cross-sectional explanatory view in the short direction of the common liquid chamber of the embodiment provided for the same description, and FIG. 13 is a cross-sectional explanatory view in the short direction of the common liquid chamber of Comparative Example 1.

  In each of the above-described embodiments, as shown in FIG. 12, the damper member 103 is held on the surface opposite to the second layer 202 and the third layer 203 of the first layer 201 of the thin layer member 200. The member 140 is joined, and the third layer 203 of the thin layer member 200 is joined to the frame member 102 with the adhesive 500.

  At this time, since the thin portion 200A side of the third layer 203 is stepped backward from the wall surface 202a of the second layer 202, the surplus portion of the adhesive 500 is absorbed by the step portion, and the damper 131 It does not flow out to the (thin wall portion 200A) portion.

  As a result, the damper 131 can be stably displaced.

  On the other hand, in the first comparative example, as shown in FIG. 13, the damper member 103 is configured by joining the holding member 140 to the third layer 203 of the thin layer member 200, and the first member of the thin layer member 200. The layer 201 is bonded to the frame member 102 with an adhesive 500.

  Therefore, there is a disadvantage that the surplus portion of the adhesive 500 flows out to the damper 131 and the function of the damper 131 is lowered.

  Next, FIG. 14 and FIG. 14 show the difference in action and effect when the layer to be joined to the frame member is a layer having an overhang shape portion having a cross-sectional mushroom shape and a layer having no overhang shape portion having a cross-section mushroom shape. Explanation will be made with reference to FIG. FIG. 14 is a cross-sectional explanatory view showing a state in which a positional deviation has occurred between the thin layer member and the frame member in the embodiment, and FIG. 15 is a state in which a positional deviation has occurred between the thin layer member and the frame member in Comparative Example 2. FIG.

  First, as in Comparative Example 2 shown in FIG. 15, when a thick portion is formed by laminating a plurality of layers not having an overhang shape portion having a cross-sectional mushroom shape, the thickness of one layer is reduced. In order to obtain the same thickness as the form, it is necessary to increase the number of layers. In the example of FIG. 15, four layers 211 to 214 are stacked.

  Therefore, the width of the layer 214 to be bonded to the frame member 102 is reduced (the area is reduced), and the bonding position accuracy must be improved as shown in FIG. As shown in FIG. 15 (b), when the frame member 102 and the layer 214 are displaced in the surface direction, poor bonding easily occurs.

  On the other hand, in each of the above embodiments, the third layer 203 which is a layer to be joined to the frame member 102 has an overhang shape portion 203a having a mushroom cross section.

  Therefore, the width of the third layer 203 that is a layer to be bonded to the frame member 102 is increased (the area is increased), and a margin can be provided at the bonding position as shown in FIG. As a result, as shown in FIG. 14B, the bonding strength can be ensured even if a positional deviation in the plane direction occurs between the frame member 102 and the third layer 203.

  Next, a liquid ejection head according to a seventh embodiment of the invention will be described with reference to FIGS. FIG. 16 is a cross-sectional explanatory diagram in a direction (liquid chamber longitudinal direction) orthogonal to the nozzle arrangement direction of the head, and FIG. 17 is a cross-sectional explanatory diagram in the same nozzle arrangement direction (liquid chamber short direction).

  In addition, the same code | symbol is attached | subjected to each part corresponding to 1st Embodiment, and description is simplified.

  In this liquid discharge head, a nozzle plate 1, a flow path plate (liquid chamber substrate) 2, and a vibration plate member 3 as a thin layer member in the present invention are laminated and joined. And the piezoelectric actuator 111 which displaces the diaphragm member 3 and the frame member 102 as a common liquid chamber member are provided.

  Then, from the common liquid chamber 20 of the frame member 102, through the filter part (filter member) 9 that filters the foreign matter in the liquid that is a thin layer member in the present invention formed integrally with the diaphragm member 3, the liquid introduction part 8, The liquid is supplied to the plurality of individual liquid chambers 6 through the liquid supply path 7.

  The diaphragm member 3 is an electric machine as drive means (actuator means, pressure generating means) that deforms the diaphragm (vibration region) 30 of the diaphragm member 3 on the opposite side of the diaphragm member 3 from the individual liquid chamber 6. A piezoelectric actuator 111 including a conversion element is disposed.

  This piezoelectric actuator 111 has a plurality of stacked piezoelectric members 112 bonded to a base member 113 with an adhesive, and the piezoelectric member 112 is grooved by half-cut dicing so that a required number of piezoelectric members 112 is provided. The piezoelectric pillars 112A and 112B are formed in a comb shape at a predetermined interval.

  The piezoelectric columns 112A and 112B of the piezoelectric member 112 are the same, but a piezoelectric column that is driven by giving a driving waveform is a driving piezoelectric column (driving column) 112A, and a piezoelectric column that is used as a simple column without giving a driving waveform. It is distinguished as a non-driving piezoelectric column (non-driving column) 112B.

  The drive column 12 </ b> A is joined to the island-shaped convex portion 3 a formed on the diaphragm 30 of the diaphragm member 3. Further, the non-driving column 12B is joined to the convex portion 3b of the diaphragm member 3.

  Here, the diaphragm member 3 is formed by the thin layer member 200 described above, and the convex portions 3a and the convex portions 3b are both thick portions of the thin layer member 200 and form the vibration region 30 that is a thin portion. The second layer 203 and the third layer 203 are stacked over the first layer 201.

  In the filter unit 9, a plurality of filter holes 91 are formed in the first layer 201. The thick portion forming the peripheral portion of the filter portion 9 is formed by the second layer 203 and the third layer 203 stacked on the first layer 201.

  In addition, although the diaphragm member (also serving as a filter member) of the present embodiment has been described with the configuration of the thin layer member of the first embodiment, the configurations of the second to sixth embodiments can also be adopted.

  Next, an example of an image forming apparatus according to the present invention will be described with reference to FIG. FIG. 18 is an explanatory plan view of the image forming apparatus.

  This image forming apparatus is a serial type image forming apparatus, and a carriage 403 is movably held by a main guide member 401 horizontally mounted on left and right side plates (not shown) and a sub guide member (not shown). The main scanning motor 405 reciprocates in the main scanning direction (carriage movement direction) via a timing belt 408 spanned between the driving pulley 406 and the driven pulley 407.

  The carriage 403 is equipped with a recording head 404 including a liquid discharge head and a liquid tank according to the present invention. The recording head 404 includes, for example, four nozzle rows 404n that eject ink droplets of each color of yellow (Y), cyan (C), magenta (M), and black (K). The recording head 404 is mounted with a nozzle row 404n composed of a plurality of nozzles arranged in the sub-scanning direction orthogonal to the main scanning direction and the droplet discharge direction facing downward.

  On the other hand, in order to transport the paper 410, a transport belt 412 that is a transport means for electrostatically attracting the paper and transporting the paper at a position facing the recording head 404 is provided. The transport belt 412 is an endless belt and is stretched between the transport roller 413 and the tension roller 414.

  The transport belt 412 rotates in the sub-scanning direction when the transport roller 413 is rotationally driven by the sub-scanning motor 416 via the timing belt 417 and the timing pulley 418. The conveyor belt 412 is charged (charged) by a charging roller (not shown) while rotating around.

  Further, a maintenance / recovery mechanism 420 that performs maintenance / recovery of the recording head 404 is disposed on the side of the conveyance belt 412 on one side of the carriage 403 in the main scanning direction.

  The maintenance / recovery mechanism 420 includes, for example, a cap member 421 for capping the nozzle surface (surface on which the nozzle is formed) of the recording head 404, a wiper member 422 for wiping the nozzle surface, and the like.

  In addition, an encoder scale 423 having a predetermined pattern is stretched between both side plates along the main scanning direction of the carriage 403, and the encoder sensor 424 including a transmissive photosensor that reads the pattern of the encoder scale 423 is mounted on the carriage 403. Is provided. These encoder scale 423 and encoder sensor 424 constitute a linear encoder (main scanning encoder) that detects the movement of the carriage 403.

  In addition, a code wheel 425 is attached to the shaft of the conveying roller 413, and an encoder sensor 426 including a transmission type photo sensor for detecting a pattern formed on the code wheel 425 is provided. These code wheel 425 and encoder sensor 426 constitute a rotary encoder (sub-scanning encoder) that detects the movement amount and movement position of the conveyor belt 412.

  In this image forming apparatus configured as described above, the sheet 410 is fed from the sheet feeding tray (not shown) onto the charged conveying belt 412 and sucked, and the sheet 410 is moved in the sub-scanning direction by the circumferential movement of the conveying belt 412. Be transported.

  Therefore, by driving the recording head 404 according to the image signal while moving the carriage 403 in the main scanning direction, ink droplets are ejected onto the stopped sheet 410 to record one line. Then, after the sheet 410 is conveyed by a predetermined amount, the next line is recorded. Upon receiving a recording end signal or a signal that the trailing edge of the sheet 410 has reached the recording area, the recording operation is terminated and the sheet 410 is discharged to a discharge tray (not shown).

  As described above, since the image forming apparatus includes the liquid discharge head according to the present invention, a high-quality image can be stably formed.

  In the present application, the paper is not limited to paper but includes what is called a recording medium, a recording medium, a recording paper, a recording paper, and the like. In addition, image formation, recording, printing, printing, and printing are all synonymous.

  In addition, the “image” is not limited to a planar image, and includes an image given to a three-dimensionally formed image and an image formed by three-dimensionally modeling a solid itself.

  The liquid ejecting apparatus includes an image forming apparatus, and includes both a serial type image forming apparatus and a line type image forming apparatus unless otherwise specified.

DESCRIPTION OF SYMBOLS 1 Nozzle plate 2 Channel plate 3 Vibration plate member 4 Piezoelectric element 5 Holding substrate 11 Nozzle 12 Individual liquid chamber 20 Common liquid chamber 101 Channel member 102 Frame member 103 Damper member 200 Thin layer member 200A Thin part 200B Thick part 201 First 1 layer 202 2nd layer 203 3rd layer 404 Recording head

Claims (11)

A thin layer member having a thin part and a thick part,
The thin layer member is
A first layer forming the thin portion;
A second layer and a third layer that are stacked on the first layer and form a portion that becomes the thick portion; and
The third layer has an overhang shape;
The projected area of the overhanging portion of the third layer is included in the second layer,
2. The liquid ejection head according to claim 1, wherein the second layer has all the first layer-side surface in close contact with the first layer. The wall surface defining the boundary in the surface direction between the thin portion and the thick portion in the second layer is tapered or perpendicular to the first layer. The liquid discharge head described in 1. 3. The liquid ejection head according to claim 1, wherein at least one of the second layer and the third layer includes a plurality of layers. 4. The liquid ejection head according to claim 3, wherein the second layer or the third layer including the plurality of layers has a smaller area as the layer is separated from the first layer. 5. The fourth layer forming the portion to be the thick portion is laminated on the surface of the first layer opposite to the surface on which the second layer is laminated. The liquid discharge head according to any one of 1 to 4. The fourth layer has an overhang shape;
The liquid ejection head according to claim 5, wherein the projection region of the overhanging portion of the fourth layer is included in the second layer. A common liquid chamber for supplying liquid to a plurality of individual liquid chambers through which a plurality of nozzles for discharging droplets communicate;
A deformable damper member that forms a part of the wall surface of the common liquid chamber,
The liquid ejection head according to claim 1, wherein the damper member is formed of the thin layer member, and the thin portion forms the deformable damper. A plurality of individual liquid chambers that communicate with a plurality of nozzles for discharging droplets;
A diaphragm member that forms a deformable region to be a part of the wall surface of the individual liquid chamber,
The liquid ejection head according to claim 1, wherein the diaphragm member is formed of the thin layer member, and the thin portion defines the deformable region. A filter member for filtering foreign matter in the liquid is provided.
The liquid discharge head according to claim 1, wherein the filter member is formed of the thin layer member, and a filter hole is formed in the thin portion. A first layer forming a deformable thin portion;
A second layer and a third layer, which are stacked on the first layer and form a thick portion;
The third layer has an overhang shape;
The projection region of the overhang-shaped portion of the third layer has at least a portion facing the thin-walled portion located in the second layer,
The second layer is a thin layer member, wherein the first layer side surface is in close contact with the first layer.   An image forming apparatus comprising the liquid discharge head according to claim 1.

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