JP2016035279A - speed controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a speed controller which controls the operation speed in a single stroke of an external cylinder in a step-by-step manner with a simple structure.SOLUTION: A speed controller 1 according to the invention includes: a first passage 16 and a second passage 18 which allow a first port 12 and a second port 14 to communicate with each other. A first check valve 28 which allows only flow from the first port 12 to the second port 14 is provided in the first passage 16. A first needle valve 32 which adjusts a flow rate is provided in the second passage 18. The second passage 18 is formed in a manner such that an opening hole 28d opened in a radial center position of the first check valve 28 is formed as part of the passage. The first needle valve 32 moves a tip part 34a of a needle shaft 34, which is fixed to a piston 30 disposed in a cylinder chamber 20 in a reciprocating manner and protrudes to the outside of the cylinder chamber 20, close to the opening hole 28d or causes the tip part 34 to enter into the opening hole 28d to change an opening area of the opening hole 28d and thereby adjust the flow rate.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a speed controller, and more particularly to a speed controller connected to an external cylinder and capable of controlling the operation speed of the cylinder in a stepwise manner.

  In an automatic equipment line for assembling mechanical devices and electronic devices, devices using cylinders are frequently used. However, if the speed of the cylinder is increased, the cycle time can be shortened, but on the other hand, there is a problem that the impact at the time of stopping increases and the cylinder life is shortened.

  Conventionally, a shock absorber (for example, oil type) is provided in the mechanism part to which the piston of the cylinder is connected so that the impact at the time of stopping the cylinder does not increase even if the cylinder speed is increased, thereby reducing the impact at the time of stopping the cylinder. The method was general.

  Alternatively, a technique relating to a pneumatic cylinder with a cushion mechanism is also disclosed (Patent Document 1), in which a cushion mechanism that alleviates an impact is provided in the cylinder itself, thereby reducing the impact at the time of stopping.

JP 2003-254303 A

  However, for example, in the case of a configuration in which a shock absorber is provided to reduce the impact when the cylinder is stopped, the shock absorber must be incorporated into the device, so that the mechanism becomes complicated and the parts cost and assembly cost increase. There was a problem.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a speed controller capable of controlling the operation speed in one stroke of an external cylinder in a stepwise manner with a simple configuration without using a shock absorber.

  As an embodiment, the above-described problem is solved by a solution as disclosed below.

  The disclosed speed controller includes a first flow path and a second flow path that allow a pressure fluid to flow through a first port and a second port provided in the main body, respectively. A first check valve that allows only a flow from the first port to the second port is provided, and a first needle valve that adjusts a flow rate of the flowing pressure fluid is provided in the second flow path. The second flow path is configured with an opening opening at a radial center position of the first check valve as a part of the flow path, and the first needle valve is a cylinder chamber provided in the main body portion. The tip of the needle shaft, which is fixed to a piston that is reciprocally disposed inside the cylinder and protrudes to the outside of the cylinder chamber, approaches or enters the opening hole to change the opening area of the opening hole. To adjust the flow rate And butterflies.

  According to the disclosed speed controller, it is possible to realize a speed controller capable of controlling the operation speed in one stroke of the external cylinder in a stepwise manner with a simple configuration. Accordingly, it is possible to increase the speed of the cylinder operation and to reduce the impact when the cylinder is stopped without using a shock absorber.

It is the schematic which shows the example of the speed controller which concerns on embodiment of this invention. It is a circuit diagram at the time of comprising the speed controller shown in FIG. 1, and an external cylinder.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1A is a plan sectional view (schematic diagram) showing an example of a speed controller 1 according to the present embodiment, and FIG. 1B is a front sectional view (schematic diagram). FIG. 2 is a circuit diagram in the case of comprising the speed controller 1 (here, two speed controllers 1A and 1B) and an external cylinder 2 shown in FIG. Note that components having the same function are denoted by the same reference symbols throughout the drawings for describing the embodiments, and the repetitive description thereof may be omitted.

  The speed controller 1 according to the present embodiment, for example, allows pressure fluid (for example, compressed air) to flow through an external return-acting cylinder (hereinafter simply referred to as “cylinder”) 2 constituting an automatic equipment line or the like. It is incorporated (connected) in the flow path and controls the operating speed of the cylinder 2 in stages (for example, in two stages of high speed and low speed).

  As shown in FIGS. 1 and 2, the speed controller 1 includes a plurality of flow paths through which pressure fluid flows in the main body 10 (details will be described later). A cylinder chamber 20 that holds the piston 30 so as to reciprocate is provided inside the main body 10.

  In addition, as a constituent material of the speed controller 1, a resin material (for example, POM, PBT, etc.), a metal, etc., depending on use conditions, except for a portion where a rubber material such as a valve body 28a and an O-ring 38 described later is used. A material (for example, stainless steel, brass, etc.) is appropriately used.

  Here, the cylinder chamber 20 airtightly seals the inside and outside of the cylinder chamber 20 on one end side (here, the inside of the main body portion 10 and the portion that becomes the first flow path 16 and the second flow path 18). A housing 36 is provided which holds and partitions. In addition, a cap 40 is provided on the other end side to partition the inside and the outside of the cylinder chamber 20 (here, a portion that is the outside of the main body 10) while maintaining airtightness. That is, the cylinder chamber 20 is configured such that an internal space is formed by the main body 10, the housing 36, and the cap 40.

  On the other hand, the plurality of flow paths provided in the main body 10 are more specifically, the first flow path 16 (FIG. 2) that allows the pressure fluid to flow through the first port 12 and the second port 14. A flow path exemplified by an arrow A in the inside) is provided. In addition to the first flow path 16, a second flow path 18 (flow path illustrated by arrow B in FIG. 2) that allows the first port 12 and the second port 14 to communicate with each other to allow the pressure fluid to flow. Is provided. In addition, a third flow path 22 (flow path exemplified by arrow C in FIG. 2) that allows the pressure fluid to flow through the first port 12 and the cylinder chamber 20 formed inside the main body 10 is provided. Is provided. Further, a fourth flow path 26 (flow path exemplified by arrow D in FIG. 2) is provided for communicating the pressure fluid by communicating the cylinder chamber 20 and the exhaust port 24 provided in the main body 10. .

  First, the first flow path 16 is provided with a first check valve 28 that allows only the flow from the first port 12 to the second port 14. The first check valve 28 includes a valve body 28a and a valve seat 28b, and has an effect of allowing the pressure fluid to pass only in the direction illustrated by the arrow A in FIG. That is, when the pressure fluid is allowed to flow from the first port 12 side into the first flow path 16, the valve body 28a is separated from the valve seat 28b by the pressure of the pressure fluid, and the flow path is opened. On the other hand, when the pressure fluid is allowed to flow from the second port 14 side into the first flow path 16, the valve body 28a is brought into close contact with the valve seat 28b by the pressure of the pressure fluid, and the flow path is closed. As an example, the valve body 28 a is formed using rubber, and the valve seat 28 b is formed using a resin material integrally with the main body 10.

  Here, the first check valve 28 is provided with an opening hole 28d that opens at a radial center position. In the present embodiment, there is provided a valve body presser 28c that is fitted and fixed to the protruding portion 10a that protrudes to the inside of the main body portion 10 in a state where the ring-shaped valve body 28a is fixed to the outer periphery. An opening hole 28d is formed at the radial center position of the valve body presser 28c. As an example, the valve body presser 28c is configured to be fitted and fixed to the protruding portion 10a by a snap-fit engagement structure, and can be more easily assembled (see FIGS. 1 and 2).

  Next, the second flow path 18 is configured such that an opening hole 28d that opens at the radial center position of the first check valve 28 forms a part of the flow path.

  The second flow path 18 is provided with a first needle valve 32 that adjusts the flow rate of the pressure fluid flowing therethrough. More specifically, the first needle valve 32 has a flow rate by changing the opening area of the opening hole 28d by causing the tip 34a of the needle shaft 34 to approach or enter the opening hole 28d of the first check valve 28. It is the structure which adjusts.

  In the present embodiment, the needle shaft 34 is fixed to a piston 30 disposed in the cylinder chamber 20 so as to be reciprocally movable, and can be reciprocated in the axial direction together with the piston 30. As an example, the needle shaft 34 and the piston 30 are integrally formed, but a structure formed separately may be used.

  Further, the needle shaft 34 has a configuration in which a distal end portion 34 a is protruded outside the cylinder chamber 20 through the housing 36 on one end side of the cylinder chamber 20. The housing 36 through which the needle shaft 34 is inserted is provided with a rubber O-ring 38 at the sliding position, and the needle shaft 34 can move in the axial direction while maintaining airtightness with respect to the housing 36. ing.

  As described above, in addition to the function as a check valve, the first check valve 28 according to the present embodiment uses the opening hole 28d of the valve body presser 28c in combination with the distal end portion 34a of the needle shaft 34, so that the needle valve Can also function. This makes it possible to simplify the structure and reduce the number of parts compared to a configuration in which a check valve and a needle valve are separately provided, and as a result, reduce assembly costs and parts costs. It becomes possible.

  Further, the piston 30 and the needle 30 are arranged in a direction in which the volume in the cylinder chamber 20 is reduced and in a direction in which the tip end 34a of the needle shaft 34 approaches or enters the opening hole 28d (or both in the opposite direction). A moving member for moving the shaft 34 is provided.

  As the moving member, an urging member (for example, a mechanism for moving by the urging force of the urging member) or a motor (for example, a stepping motor driven by a control unit, a rack and pinion, a ball screw, or the like) is used. A configuration using a moving mechanism is employed.

  As an example, in this embodiment, an urging member is used as the moving member. More specifically, the biasing member is a first biasing member (for example, a coil spring) disposed in the cylinder chamber 20 so that one end thereof is in contact with the piston 30 and the other end is in contact with the cap 40. , Other spring members) 42 are provided. The first urging member 42 moves the piston 30 and the needle shaft 34 in a direction in which the volume in the cylinder chamber 20 is reduced and in a direction in which the distal end portion 34a of the needle shaft 34 approaches or enters the opening hole 28d. Generate a biasing force that As a modification of the first urging member, a configuration may be adopted in which the pressure of the compressed fluid (compressed air or the like) is applied to the other end 30b side of the piston 30 to generate the same urging force as described above. (Not shown).

  Further, when the piston 30 and the needle shaft 34 are moved in the above-mentioned direction by the moving member, the piston 30 is arranged so that the tip end portion 34a of the needle shaft 34 does not approach or enter beyond the predetermined position with respect to the opening hole 28d. An adjustment member is provided that defines the stop position (that is, the stop position of the distal end portion 34a of the needle shaft 34) and can adjust the stop position.

  In the present embodiment, a first biasing member 42 is provided as a moving member (biasing member), and an adjustable stopper 44 is provided as an adjusting member.

  The adjustable stopper 44 is fixed to the opposite side of the piston 30 to the side on which the needle shaft 34 is fixed, and is attached to a stroke rod 44a provided through the cap 40 and a screw portion 44b provided at the end of the stroke rod 44a. And an adjusted adjusting screw 44c. According to this, when the piston 30 is moved in the direction of decreasing the volume in the cylinder chamber 20, the end of the adjustment screw 44 c (the end on the side facing the cap 40) comes into contact with the cap 40, thereby The movement of 30 is stopped. That is, the stop position of the piston 30 (and the needle shaft 34) is defined. Further, since the distance L between the cap 40 and the end of the adjustment screw 44c can be adjusted by rotating the adjustment screw 44c, the stop position of the piston 30 (and the needle shaft 34) is adjusted. Is possible. In addition, the code | symbol 44d in a figure is a nut for fixing the adjustment screw 44c so that the adjustment screw 44c may not rotate unintentionally.

  When a motor (for example, a stepping motor) is used as the moving member, the stop position of the piston 30 (and the needle shaft 34) is adjusted by the control of the motor by the control unit, so that the control unit and the motor are adjusted. Configure the member.

  Next, the third flow path 22 is provided with a second check valve 46 that allows only the flow from the first port 12 toward the inside of the cylinder chamber 20. The second check valve 46 includes an O-ring 46c, which is fixed to the valve body 46a, the valve seat 46b, and the valve seat 46b, and maintains airtightness between the valve body 46a and the valve seat 46b. Here, it is configured to include a second urging member (for example, a coil spring) 46d that urges the O-ring 46c to be in close contact with the O-ring 46c), and the pressure fluid only in the direction illustrated by the arrow C in FIG. The action to pass through. That is, when the pressure fluid is caused to flow from the first port 12 side into the third flow path 22, the valve body 46a is opposed to the urging force of the second urging member 46d by the pressure of the pressure fluid. A flow path is opened away from. On the other hand, when the pressurized fluid is caused to flow from the cylinder chamber 20 into the third flow path 22, the valve body 46a is moved to the valve seat 46b (here, the O-ring 46c) by the urging force of the second urging member 46d. The channel closes and closes. As an example, the valve body 46a is formed using a resin material, the valve seat 46b is formed using a resin material integrally with the main body 10, and the O-ring 46c is formed using a rubber material. The O-ring 46c may be configured to be fixed to the valve body 46a.

  Next, the fourth flow path 26 is a side where the second urging member 46d is provided with respect to the valve body 46a in the valve box 46e which is a space part in which the valve body 46a of the second check valve 46 reciprocates. This region is configured to form a part of the flow path. The fourth flow path 26 is provided with a second needle valve 48 that adjusts the flow rate of the pressure fluid flowing therethrough.

  That is, as shown in FIG. 2, the fourth flow path 26 communicates from the inside of the cylinder chamber 20 to the exhaust port 24 via the second needle valve 48 and the valve box 46 e, It is a flow path leading to.

  More specifically, the second needle valve 48 adjusts the flow rate by changing the opening area of the orifice 48c by causing the tip 48b of the needle shaft 48a to approach or enter an orifice 48c having a predetermined opening. It is configured to do. Here, a threaded portion 48d provided at the rear end portion of the needle shaft 48a is rotatably engaged with the main body portion 10, and the needle shaft 48a is moved in the axial direction by rotating the adjustment knob 48e. Therefore, the position of the tip 48b of the needle shaft 48a with respect to the orifice 48c, that is, the opening area of the orifice 48c can be adjusted. The position and shape of the orifice 48c provided in the middle of the fourth channel 26 are appropriately set and are not particularly limited.

  Next, the operation of the speed controller 1 having the above configuration will be described with reference to the circuit diagram of FIG. As a typical example, in a configuration including two speed controllers 1 (1A, 1B) for driving an external cylinder (here, a reciprocating cylinder) 2, a piston 2b in the cylinder 2 is connected to A case of moving in the arrow X1 direction will be described.

  A pressure fluid (compressed air as an example) is supplied from an external pressure fluid supply source 3 and supplied to the first port 12 of the speed controller 1 (1A) through the flow path 60, the electromagnetic valve 4, and the flow path 62. The operation of the electromagnetic valve 4 will be described later.

  First, the operation of the speed controller 1 (1A) at this time will be described.

  The pressure fluid supplied to the first port 12 of the speed controller 1 (1A) flows through the first flow path 16 to the second port 14 via the first check valve 28 as indicated by an arrow A. Furthermore, it is supplied into the cylinder chamber of the cylinder 2 (here, the cylinder chamber 2a1 on the one end 2b1 side with respect to the piston 2b) through the flow path 64. As a result, the pressure of the pressurized fluid supplied into the cylinder chamber 2a1 acts on the one end 2b1 side of the piston 2b, so that the piston 2b is driven in the X1 direction.

  Along with the above action, the pressure fluid supplied to the first port 12 of the speed controller 1 (1A) passes through the third flow path 22 through the second check valve 46 as shown by the arrow C, and the cylinder of the main body 10. It flows into the chamber 20. As a result, the pressure of the pressurized fluid supplied into the cylinder chamber 20 acts on the one end 30a side of the piston 30, so that the piston 30 is driven in the Y1 direction against the urging force of the first urging member 42. At the same time, the pressure fluid is stored in the cylinder chamber 20.

  Further, in addition to the above action, when the piston 30 is driven in the Y1 direction, the needle shaft 34 also moves in the Y1 direction, so that the opening degree of the first needle valve 32 is relatively large (no throttling action occurs). State). Therefore, the pressure fluid from the first port 12 toward the second port 14 can flow using the two flow paths of the first flow path and the second flow path as much as possible.

  Next, the operation of the speed controller 1 (1B) at this time will be described.

  When the piston 2b is driven in the X1 direction by the above action, the pressure fluid delivered from the cylinder 2 is supplied to the second port 14 of the speed controller 1 (1B) via the flow path 66. Here, by adjusting the flow rate (that is, the flow rate) of the pressure fluid that flows into the second port 14 from the flow path 66 and is sent from the first port 12 to the flow path 68 by the speed controller 1 (1B), It becomes possible to adjust (control) the operating speed (axial movement speed) of the piston 2b of the cylinder 2. That is, when the flow speed of the pressure fluid passing through the speed controller 1 (1B) (more specifically, in the second flow path 18) is high (that is, the flow rate per unit time is large), the piston of the cylinder 2 The operation speed (axial movement speed) of 2b becomes high. On the other hand, when the flow rate of the pressure fluid is low (that is, the flow rate per unit time is small), the operation speed (axial movement speed) of the piston 2b of the cylinder 2 is low.

  The pressure fluid supplied to the second port 14 of the speed controller 1 (1B) flows through the second flow path 18 to the first port 12 via the first needle valve 32 as indicated by an arrow B. The pressure fluid sent from the first port 12 is sent to the atmosphere via the flow path 68 and the electromagnetic valve 4.

  Here, as a normal setting, when the piston 2b of the cylinder 2 starts moving in the X1 direction, pressure fluid is stored in the cylinder chamber 20 of the speed controller 1 (1B), and the piston 30 moves in the Y1 direction. It is set so as to move to a predetermined position. (The action to be stored is the same as that of the speed controller 1 (1A) described above.)

  Accordingly, when the piston 2b of the cylinder 2 starts to move in the X1 direction, that is, when the pressure fluid sent from the cylinder 2 starts to pass through the second flow path 18, the piston 30 moves in a predetermined direction in the Y1 direction. Since the needle shaft 34 has moved to the position and the needle shaft 34 has also moved in the Y1 direction, the first needle valve 32 is in a state in which the opening degree is relatively large (a state in which no throttling action occurs). At this time, the flow rate of the pressure fluid passing through the first needle valve 32, that is, the second flow path 18, is relatively high (that is, the flow rate per unit time is large). That is, the operating speed (axial movement speed) of the piston 2b of the cylinder 2 becomes high.

  Along with the above action, the pressure fluid stored in the cylinder chamber 20 of the speed controller 1 (1B) passes through the fourth flow path 26 from the cylinder chamber 20 as shown by the arrow D to the second needle valve 48. Then, the air flows through the valve box 46e to the exhaust port 24 and is exhausted (sent out) to the outside of the main body 10. At this time, a decrease in the pressure fluid stored in the cylinder chamber 20, that is, a decrease in pressure acting on the one end 30 a side of the piston 30, causes the first biasing to act on the other end 30 b side of the piston 30. The biasing force of the member 42 is increased, and the piston 30 starts moving in the Y2 direction by the biasing force.

  Here, the piston 30 and the needle shaft fixed to the piston 30 are adjusted by adjusting the flow rate (that is, the flow rate per unit time) of the pressure fluid flowing from the cylinder chamber 20 to the exhaust port 24 by the second needle valve 48. It is possible to adjust (control) the operation speed (axial movement speed) of Y in the Y2 direction. That is, when the flow rate of the pressure fluid passing through the fourth flow path 26 (more specifically, the second needle valve 48) is high (that is, the flow rate per unit time is large), the piston 30 and the needle shaft 34 The operation speed (axial movement speed) becomes higher. On the other hand, when the flow rate of the pressure fluid is low (that is, the flow rate per unit time is small), the operating speed (axial moving speed) of the piston 30 and the needle shaft 34 is low.

  Thereafter, when the piston 30 moves to a predetermined position in the Y2 direction, the tip end portion 34a of the needle shaft 34 fixed to the piston 30 enters a state where it approaches or enters the predetermined position with respect to the opening hole 28d. At this time, an adjusting action as the first needle valve 32, that is, a throttle action of the passing flow rate occurs. More specifically, since the first needle valve 32 has a relatively small opening (a state in which a throttling action occurs), the flow velocity of the pressure fluid passing through the first needle valve 32, that is, the second flow path 18. Becomes relatively slow (that is, the flow rate per unit time is small). That is, the operating speed (axial movement speed) of the piston 2b of the cylinder 2 is low (switched from high speed to low speed). In this manner, the operating speed of the cylinder 2 can be adjusted (controlled) in stages (here, in two stages of high speed and low speed). The predetermined position (stop position) in the Y2 direction of the piston 30 is defined and adjusted by the adjustable stopper 44 as described above.

  As described above, the flow rate (flow rate) of the pressure fluid passing through the fourth flow path 26 can be adjusted by adjusting the opening area of the second needle valve 48, that is, the flow rate (flow rate) of the passing pressure fluid. It becomes possible. Thereby, it becomes possible to adjust the operation speed (axial movement speed) of the main body 10 in the Y2 direction of the piston 30. Therefore, it is possible to adjust the timing at which the first flow rate of the first needle valve 32 starts to be reduced. That is, it is possible to adjust the timing at which the operation speed (axial movement speed) of the piston 2b of the cylinder 2 is switched from the high speed movement to the low speed movement to be advanced or delayed.

  On the other hand, by adjusting the predetermined position (stop position) in the Y2 direction of the piston 30 by the adjustable stopper 44, the opening area of the first needle valve 32, that is, the flow velocity (flow rate) of the passing pressure fluid can be adjusted. Become. That is, it becomes possible to adjust the flow velocity (flow rate) of the pressure fluid passing through the second flow path 18. Accordingly, it is possible to adjust the moving speed on the low speed side after the operating speed (axial moving speed) of the piston 2b of the cylinder 2 is switched from the high speed movement to the low speed movement. That is, since the speed immediately before stopping the piston 2b can be adjusted to be reduced to a desired speed, it is possible to mitigate the impact at the time of stopping.

  Next, the case where the piston 2b of the cylinder 2 is moved in the arrow X2 direction opposite to the arrow X1 direction in FIG. 2 will be briefly described.

  In order to move the piston 2b in the direction of the arrow X2, the solenoid valve 4 is operated to switch the circuit and supply the pressure fluid to the speed controller 1 (1B) opposite to the above example. More specifically, pressurized fluid (for example, compressed air) is supplied from the external pressurized fluid supply source 3 to the first port 12 of the speed controller 1 (1B) via the flow path 60, the electromagnetic valve 4, and the flow path 68. What is necessary is just to supply.

  The pressure fluid supplied to the first port 12 of the speed controller 1 (1b) flows through the first flow path 16 and then flows through the first check valve 28 to the second port 14. Furthermore, it is supplied into the cylinder chamber of the cylinder 2 (here, the cylinder chamber 2a2 on the other end 2b2 side with respect to the piston 2b) through the flow path 66. As a result, the pressure of the pressure fluid supplied into the cylinder chamber 2a2 acts on the other end 2b2 side of the piston 2b, so that the piston 2b is driven in the X2 direction.

  The detailed operation and effects are the same as those when the pressure fluid is supplied to the speed controller 1 (1A), and thus the repeated description is omitted.

  Thus, when the pressure fluid is supplied from the external pressure fluid supply source 3 to the first port 12 of the speed controller 1 (1A) by switching the circuit of the solenoid valve 4, the piston 2b of the cylinder 2 is moved in the direction of the arrow X1. When the pressure fluid is supplied from the external pressure fluid supply source 3 to the first port 12 of the speed controller 1 (1B), the piston 2b of the cylinder 2 can be moved in the arrow X2 direction. Therefore, the reciprocating cylinder 2 can be driven to reciprocate.

  As described above, according to the disclosed speed controller, it is possible to adjust (control) the operation speed (movement speed) in one stroke of the external cylinder 2 in a stepwise manner (two steps). That is, the operating time can be shortened by moving the piston 2b of the cylinder 2 at a high speed for a while after the piston 2b starts to move, and at a desired timing before the piston 2b stops. By switching the moving speed from high speed to low speed, it is possible to reduce the impact when the piston 2b of the cylinder 2 is stopped without using a shock absorber. Furthermore, it is possible to adjust both the timing at which the moving speed of the piston 2b is switched from high speed to low speed and the speed on the low speed side.

  Furthermore, the first check valve and the first needle valve are realized by a simple structure using common parts, and it is possible to achieve cost reduction in both the parts cost and the manufacturing cost.

  Needless to say, the present invention is not limited to the embodiment described above, and various modifications can be made without departing from the present invention.

1, 1A, 1B Speed controller 2 Cylinder 3 Pressure fluid supply source 4 Solenoid valve 10 Body 12 First port 14 Second port 16 First flow path 18 Second flow path 20 Cylinder chamber 22 Third flow path 24 Exhaust port 26 Fourth flow path 28 First check valve 30 Piston 32 First needle valve 34 Needle shaft 42 First urging member (moving member)
44 Adjustable stopper (adjustment member)
46 Second check valve 48 Second needle valve 60, 62, 64, 66, 68 Flow path

The disclosed speed controller includes a first flow path and a second flow path that allow a pressure fluid to flow through a first port and a second port provided in the main body, respectively. A first check valve that allows only a flow from the first port to the second port is provided, and a first needle valve that adjusts a flow rate of the flowing pressure fluid is provided in the second flow path. The second flow path is configured with an opening opening at a radial center position of the first check valve as a part of the flow path, and the first needle valve is a cylinder chamber provided in the main body portion. The tip of the needle shaft, which is fixed to a piston that is reciprocally disposed inside the cylinder and protrudes to the outside of the cylinder chamber, approaches or enters the opening hole to change the opening area of the opening hole. There line adjustment of the flow rate by the A third flow path that allows the pressure fluid to flow through the one port and the cylinder chamber is further provided, and the third flow path allows only a flow from the first port toward the cylinder chamber. 2 check valve is provided .

Claims (5)

A first flow path and a second flow path, each of which communicates a first port and a second port provided in the main body portion and allows a pressure fluid to flow;
The first flow path is provided with a first check valve that allows only a flow from the first port to the second port,
The second flow path is provided with a first needle valve for adjusting the flow rate of the pressure fluid flowing therethrough,
The second flow path is configured with an opening hole that opens at a radial center position of the first check valve as a part of the flow path,
The first needle valve is fixed to a piston disposed in a reciprocating manner in a cylinder chamber provided in the main body portion, and a tip end of a needle shaft that protrudes outside the cylinder chamber is adjacent to the opening hole. A speed controller that adjusts a flow rate by changing the opening area of the opening hole. The moving member which moves the said piston in the direction which decreases the volume in the said cylinder chamber, and the direction which makes the front-end | tip part of the said needle shaft approach or approach the said opening hole is provided. speed controller. When the piston is moved by the moving member, the stop position of the piston is defined and adjusted so that the tip of the needle shaft does not approach or enter beyond the predetermined position with respect to the opening hole. The speed controller according to claim 2, further comprising an adjustment member capable of adjusting the speed. A third flow path that allows the pressure fluid to flow through the first port and the cylinder chamber;
The second check valve that allows only the flow from the first port to the cylinder chamber is provided in the third flow path. Speed controller. A fourth flow path that allows the pressure fluid to flow through the cylinder chamber and an exhaust port provided in the main body;
The speed controller according to any one of claims 1 to 4, wherein a second needle valve that adjusts a flow rate of the pressure fluid flowing therethrough is provided in the fourth flow path.

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