JP2016031117A - Vacuum valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vacuum valve that has a structure in which a separate flange is fixed to a valve housing with fastening bolts and that can withstand torque from a vacuum pump without increasing the number of the fastening bolts for a purpose other than fastening.SOLUTION: A vacuum valve comprises a housing 4 in which a valve plate 6 is housed and a flange 3 fastened to the housing 4 with bolts 52, and is fitted between a vacuum chamber and a vacuum pump. In a fastening surface 4C of the housing 4, a pin hole 41 is formed. In a fastening surface 3D of the flange 3, a pin hole 31 is formed at a position opposed to the pin hole 41. The vacuum valve comprises a pin 100 inserted into the pin hole 41 and the pin hole 31 opposed to each other.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a vacuum valve.

  Generally, when a vacuum pump is installed in a chamber of a vacuum processing apparatus, a vacuum valve is provided between the chamber and the vacuum pump. For this reason, the valve housing in which the valve body is housed is provided with a single flange with the valve body interposed therebetween. As the vacuum valve, a gate valve that opens and closes, a control type valve that can conduct as well as open and close, and the like are used.

  The vacuum valve described in Patent Document 1 is the control type valve described above. From the relationship of the valve configuration, the flange connected to the chamber side is separated from the valve housing, and the flange is bolted to the valve housing. It has become.

  When a rotary vacuum pump such as a turbo molecular pump is used as the vacuum pump, a large rotational torque is applied to the vacuum valve when the rotor suddenly stops due to contact with the stator. As a result, in the vacuum valve described in Patent Document 1, the bolt that fastens the flange and the valve housing may be broken by the rotational torque.

  Therefore, the bolt that fastens the main body of the vacuum valve and the flange is required to have a function of fastening the valve housing and the flange as well as strength sufficient to withstand the rotational torque. As a result, it is necessary to use more bolts than are necessary for the fastening function. When the number of bolts increases, there is a problem that the number of work steps and necessary members increase and the work cost increases.

Japanese Patent No. 4630994

  As described above, in a vacuum valve configured to fix a separate flange to the valve housing, a vacuum valve that can withstand the torque from the vacuum pump without increasing the number of fastening bolts is desired.

  A vacuum valve according to a preferred embodiment of the present invention is a vacuum valve that includes a housing in which a valve body is accommodated and a flange that is bolted to the housing, and is mounted between a vacuum chamber and a vacuum pump. A first pin hole is formed on the surface, and a second pin hole is formed on the fastening surface of the flange at a position where the first pin hole faces, and is inserted into the first pin hole and the second pin hole facing each other. Provided with a pin.

  According to the present invention, a vacuum valve having a structure in which a separate flange is fixed to a valve housing with fastening bolts, and can withstand torque from the vacuum pump without increasing the number of fastening bolts for purposes other than fastening. The resulting vacuum valve can be provided.

The perspective view of the vacuum valve in one embodiment of the present invention. The perspective view which showed a mode that the flange was removed from the housing of the vacuum valve. The schematic diagram of the cross section which showed a mode that the flange was removed from the housing of the vacuum valve. Sectional drawing which showed the location where (a) bolt was provided and the location where (b) pin was provided in the fastening structure of a valve housing and a flange.

  FIG. 1 shows a vacuum valve 1 according to an embodiment of the present invention. The vacuum valve 1 includes a valve body 2, a motor 7 that drives the valve plate 6 to swing in the θ direction, and a motor 8 that drives a seal ring (not shown) in the z direction. The valve body 2 includes a housing 4 in which a valve plate 6 and a seal ring (not shown) are housed, and a flange 3. The flange 3 is formed separately from the housing 4 and is bolted to the housing 4. The flange 3 is for fixing to the vacuum chamber of the vacuum processing apparatus. Although not shown in FIG. 1, a fastening surface (see FIG. 3) to which the vacuum pump is fixed is formed on the side opposite to the side on which the flange 3 of the housing 4 is fixed.

  As described above, the valve plate 6 is driven to swing by the motor 7. By the drive, the valve plate 6 slides between a position where the flange opening is shielded (corresponding to the opening degree 0%) and a position where all the flange openings are opened (corresponding to the opening degree 100%). The vacuum valve 1 of the present embodiment adjusts the opening θ of the valve plate 6 to adjust the flow rate of gas flowing from the flange 3 side to the opposite flange side, that is, the flow rate of gas flowing from the vacuum chamber to the vacuum pump. Can be controlled.

  2 and 3 are views showing a state in which the flange 3 is removed from the housing 4. FIG. 2 is a perspective view. FIG. 3 is a cross-sectional view schematically showing a portion where the flange 3 and the flange 3 of the housing 4 are fastened. As shown in FIG. 3, a cylindrical portion 3 </ b> A is formed on the flange 3. The flange 3 is bolted to the fastening surface 4 </ b> C of the housing 4 so that the cylindrical portion 3 </ b> A is inserted into the opening 4 </ b> A <b> 2 formed in the housing 4. Furthermore, in this embodiment, at least one (preferably a plurality of) pins 100 are provided between the flange 3 and the housing 4.

  The flange 3 is formed with a plurality of bolt holes 10 (through holes 10) for fastening bolts. Furthermore, at least one (preferably a plurality of) pin holes 31 into which the pins 100 are inserted are formed in the fastening surface 3D of the flange 3. On the other hand, screw holes 11 for fastening bolts are formed on the fastening surface 4C of the housing 4 (surfaces facing the fastening surface 3D) at positions facing the bolt holes 10 of the flange 3, respectively. Further, pin holes 41 are formed in the fastening surface 4C at positions facing the pin holes 31 of the flange 3, respectively.

  A plurality of screw holes 20 for fastening the flange of the vacuum chamber to the flange 3 are formed in the fastening surface 3 </ b> C of the flange 3. A plurality of screw holes 40 are formed in the lower fastening surface 4B of the housing 4 in the figure. The opening 4A1 formed in the fastening surface 4B has the same diameter as the opening 3B formed in the flange 3 and is concentric with the opening 3B.

  FIG. 3 shows a state in which the valve plate 6 is slid and driven to a position facing the opening 3B and the opening 4A1. In this state, the opening θ of the valve plate 6 corresponds to 0%, and the opening 3B and the opening 4A1 are shielded by the valve plate 6. However, as shown in FIG. 3, a gap is formed between the edge of the valve plate 6 and the housing 4, and the flow path of the vacuum valve 1 is not completely closed. From this state, the seal ring 60 is moved to the valve plate 6 side by the motor 8 (FIG. 2) so that the valve plate 6 is sandwiched between the seal ring 60 and the housing 4. The road is completely closed.

(Description of pin 100)
FIG. 4 is a diagram for explaining the pin 100. 4A is a cross-sectional view showing a bolt fastening portion, and FIG. 4B is a cross-sectional view of a portion where the pin 100 is provided.

  As described above, in the vacuum pump, when the rotor suddenly stops due to contact with the stator or the like, a large rotational torque is generated in the suction port flange of the vacuum pump due to the impact. The rotational torque is also transmitted to the housing 4, the flange 3, and the vacuum chamber fastened to the flange 3 of the vacuum valve 1. Therefore, when the direction of the rotational torque is the direction of the arrow Arr in the figure at the fastening portion of the flange 3 and the housing 4, the housing 4 is shifted in the direction of the arrow Arr with respect to the flange 3 fixed to the vacuum chamber. The force to be applied acts on the housing 4. In the case of a conventional vacuum valve in which the pin 100 is not provided, the housing 4 is displaced in the direction of the arrow Arr, so that the right surface of the bolt shaft 52A collides with the bolt hole 10 and a large shearing force acts on the bolt 52. . If this shear force is excessive, the bolt 52 may be broken.

Therefore, in the present embodiment, the pin 100 is provided in order to reduce the shearing force acting on the bolt 52 or to prevent the bolt 52 from colliding with the bolt hole 10. Further, the gap dimension Db between the bolt 52 and the bolt hole 10, the gap dimension Dp1 between the pin 100 and the pin hole 41, and the gap dimension Dp2 between the pin 100 and the pin hole 31 satisfy the following expression (1). Was set as follows. The gap dimension in the present embodiment is a dimension defined by (gap dimension) = [(hole diameter) − (shaft diameter)] / 2. When the pin 100 is press-fitted into the pin hole 41 of the housing 4, the gap dimension Dp1 is assumed to be Dp1 = 0.
Db ≧ (Dp1 + Dp2) (1)

  Thus, by providing the pin 100 and causing the pin 100 to bear a part of the rotational torque, the influence of the rotational torque on the bolt 52 can be reduced. As a result, it is possible to prevent the bolt 52 from being broken when a large rotational torque caused by the vacuum pump described above acts on the fastening portion between the flange 3 and the housing 4. Further, by setting the gap size so as to satisfy the expression (1), the pin 100 collides with the pin hole 31 of the flange 3 at the same time or before colliding with the bolt hole 10 of the bolt 52 (bolt shaft 52A). Will do. Therefore, the deformation of the bolt 52 due to the shearing force can be further suppressed. Furthermore, since the anti-rotation torque performance is improved by providing the pin 100, the number of the bolts 52 can be reduced as compared with the prior art while preventing the bolt from breaking.

Preferably, the pin 100 functions as a positioning pin in addition to the rotation-resistant torque performance or separately from the rotation-resistant torque performance. Preferably, regarding the gap dimensions Dp1 and Dp2 of the pin holes 31, 41, two kinds of gap dimensions Dp1A, Dp1B and Dp2A, Dp2B that satisfy the following expressions (2) and (3) are set, and the gap dimensions Dp1B and Dp2B are set. The pin 100 inserted in the pin holes 31 and 41 is used as a positioning pin. The pin hole 41 having the gap dimension Dp1A is opposed to the pin hole 31 having the gap dimension Dp2A, and the pin hole 41 having the gap dimension Dp1B is opposed to the pin hole 31 having the gap dimension Dp2B.
Dp1A> Dp1B (2)
Dp2A> Dp2B (3)
Of course, the present invention is not limited to the above, and the pin inserted into the pin hole may have a positioning function even when the pin holes 31 and 41 have only one kind of gap size.

  For example, it is preferable to use at least two of the pins 100 as pins having a positioning function. That is, at least two pin holes 41 having a gap dimension Dp1B and two pin holes 31 having a gap dimension Dp2B are provided, and the pin 100 having a positioning function is inserted into these pin holes. By using the pin 100 as a positioning pin, the opening 3B formed in the flange 3 and the opening 4A1 formed in the housing 4 can be accurately concentric. As a result, the deviation between the actual valve conductance and the designed valve conductance can be reduced.

  In the method using the settings of the formulas (2) and (3), two types of dimensions are prepared for the gap dimensions of the pin holes 31 and 41, and the pin 100 having the smaller gap is used as the positioning pin. As another method, the pin hole 31, 41 may have one type of gap size, two types of pins 100 having different diameter sizes are prepared, and the pin 100 having the larger diameter size may be used as a positioning pin. .

The vacuum valve of the present embodiment has the following configuration, thereby producing the following operational effects.
(1) The vacuum valve 1 is a vacuum valve that includes a housing 4 in which the valve plate 6 is accommodated and a flange 3 that is fastened to the housing 4 with bolts 52 and is mounted between a vacuum chamber and a vacuum pump. . A pin hole 41 is formed in the fastening surface 4 </ b> C of the housing 4. A pin hole 31 is formed in the fastening surface 3D of the flange 3 at a position where the pin hole 41 faces. The vacuum valve 1 includes a pin hole 41 and a pin 100 inserted into the pin hole 31 facing each other.
In this manner, the pin 100 is inserted into the pin hole 41 formed in the fastening surface 4C and the pin hole 31 formed in the fastening surface 3D, so that the rotation resistance of the fastening portion between the flange 3 and the housing 4 is secured. Torque performance can be improved. In particular, there is a technical significance of the present invention in reducing rotational torque transmitted from a device connected to the outside of the vacuum valve in the vacuum valve.

(2) Bolt holes 10 for the bolts 52 are formed in the flange 3. A screw hole 11 for fastening with the bolt 52 is formed in the housing 4. The gap dimension Db between the bolt hole 10 and the bolt 52, the gap dimension Dp1 between the pin 100 and the pin hole 41, and the gap dimension Dp2 between the pin 100 and the pin hole 31 are “Db ≧ (Dp1 + Dp2) "is satisfied.
Thereby, the shearing force acting on the bolt 52 can be reduced, or the bolt 52 can be prevented from colliding with the bolt hole 10.

(3) The pin hole 41 includes a pin hole 41A having a first hole diameter, and at least two pin holes 41B having a second hole diameter smaller than the first hole diameter, and faces the pin hole 41B. The diameter of the pin hole 31B is set smaller than the diameter of the pin hole 31A facing the pin hole 41A. By doing in this way, said Formula (2) and (3) are satisfy | filled.
Accordingly, the pin 100 inserted into the pin hole 41B and the pin hole 31B can play a role as a positioning pin. As a result, the opening 3B formed in the flange 3 and the opening 4A1 formed in the housing 4 can be accurately concentric. As a result, the deviation between the actual valve conductance and the designed valve conductance can be reduced.

(4) The pin 100 has a function of reducing rotational torque transmitted from an externally connected device (for example, a vacuum pump in the present embodiment) and a function of positioning the flange 3 with respect to the housing 4. You can also
As a result, the rotational torque resistance of the fastening portion between the flange 3 and the housing 4 can be improved, and the opening 3B formed in the flange 3 and the opening 4A1 formed in the housing 4 are accurately concentric. be able to. As a result of accurately setting the opening 3B and the opening 4A1 to be concentric, the deviation between the actual valve conductance and the designed valve conductance can be reduced.

  The present invention is not limited to the contents shown above. Other embodiments conceivable within the scope of the technical idea of the present invention are also included in the scope of the present invention.

1: Vacuum valve 2: Valve body 3: Flange 3A: Tube portion 3B: Opening 3C: Fastening surface 3D: Fastening surface 4: Housing 4A1: Opening 4A2: Opening 4B: Fastening surface 4C: Fastening surface 6: Valve plate 7: Motor 8: Motor 10: Bolt hole 11: Screw hole 20: Screw hole 31: Pin hole 31A: Pin hole 31B: Pin hole 40: Screw hole 41: Pin hole 41A: Pin hole 41B: Pin hole 52: Bolt 52A: Bolt shaft 60: Seal ring 100: Pin Arr: Arrow Db: Gap size Dp1: Gap size Dp1A: Gap size Dp1B: Gap size Dp2: Gap size Dp2A: Gap size Dp2B: Gap size

Claims (4)

A vacuum valve provided between a vacuum chamber and a vacuum pump, comprising a housing in which a valve body is accommodated, and a flange bolted to the housing;
A first pin hole is formed in the fastening surface of the housing,
On the fastening surface of the flange, a second pin hole is formed at a position where the first pin hole faces,
A vacuum valve comprising pins inserted into the first pin hole and the second pin hole facing each other. The vacuum valve according to claim 1,
Bolt holes for bolt fastening are formed in the flange,
The housing is formed with screw holes for fastening bolts,
A gap dimension Db between the bolt hole and a bolt penetrating the bolt hole, a gap dimension Dp1 between the pin and the first pin hole, and a gap dimension Dp2 between the pin and the second pin hole are expressed by the formula “Db ≧ A vacuum valve satisfying (Dp1 + Dp2) ". The vacuum valve according to claim 2,
The first pin hole includes a pin hole having a first hole diameter, and at least two pin holes having a second hole diameter smaller than the first hole diameter,
The diameter of the second pin hole facing the first pin hole having the second hole diameter is set smaller than the diameter of the second pin hole facing the first pin hole having the first hole diameter. There is a vacuum valve. The vacuum valve according to claim 1 or 2,
The pin has a function of reducing rotational torque transmitted from an externally connected device and a function of positioning the flange with respect to the housing.

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