JP2016025670A5 - - Google Patents
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- JP2016025670A5 JP2016025670A5 JP2014145780A JP2014145780A JP2016025670A5 JP 2016025670 A5 JP2016025670 A5 JP 2016025670A5 JP 2014145780 A JP2014145780 A JP 2014145780A JP 2014145780 A JP2014145780 A JP 2014145780A JP 2016025670 A5 JP2016025670 A5 JP 2016025670A5
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- case
- vibrating body
- rotary drive
- drive device
- type actuator
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- 230000002093 peripheral Effects 0.000 claims 5
- 239000000284 extract Substances 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Description
本発明に係る回転駆動装置は、振動型アクチュエータと、前記振動型アクチュエータが内部に設けられているケースと、前記振動型アクチュエータの回転力を前記ケースの外部に取り出す出力部材と、を有する回転駆動装置であって、前記振動型アクチュエータは、加圧接触して相対的に回転移動する振動体および被駆動体と、前記振動体と接合され、駆動電圧が印加されることによって前記振動体と前記被駆動体とを相対的に回転移動させるための振動を前記振動体に励起する電気−機械エネルギ変換素子とを有し、前記ケースは、吸気口と、負圧が供給される排気口とを有し、前記排気口は、回転軸に平行な方向において前記振動体と前記被駆動体との加圧接触部と対向する前記ケースの一方の端面に設けられており、前記ケースの内部に形成される前記吸気口から前記排気口への空気の流路の間に前記加圧接触部が位置することを特徴とする。 Rotary driving device according to the present invention, a vibration-type actuator, wherein a case vibration-type actuator is provided et al is in the inner portion, an output member to eject the rotational force of the vibration-type actuator to the outside of the case The vibration type actuator includes a vibrating body and a driven body that are relatively rotated and moved in pressure contact with each other, and is joined to the vibrating body and applied with a driving voltage. An electro-mechanical energy conversion element that excites vibration for rotating the vibrating body and the driven body relative to each other; the case is supplied with an intake port and a negative pressure; The exhaust port is provided on one end surface of the case facing the pressure contact portion between the vibrating body and the driven body in a direction parallel to the rotation axis, Inside the case The pressure contact zone between the air flow path from the intake port formed to the exhaust port, characterized in that position.
Claims (14)
前記振動型アクチュエータは、
加圧接触して相対的に回転移動する振動体および被駆動体と、
前記振動体と接合され、駆動電圧が印加されることによって前記振動体と前記被駆動体とを相対的に回転移動させるための振動を前記振動体に励起する電気−機械エネルギ変換素子とを有し、
前記ケースは、吸気口と、負圧が供給される排気口とを有し、
前記排気口は、回転軸に平行な方向において前記振動体と前記被駆動体との加圧接触部と対向する前記ケースの一方の端面に設けられており、前記ケースの内部に形成される前記吸気口から前記排気口への空気の流路の間に前記加圧接触部が位置することを特徴とする回転駆動装置。 A vibration-type actuator, wherein a case vibration-type actuator is provided et al is in the inner part, a rotary drive device and an output member to eject the rotational force of the vibration-type actuator to the outside of the case ,
The vibration type actuator is
A vibrating body and a driven body that relatively rotate and move under pressure, and
An electro-mechanical energy conversion element that is bonded to the vibrating body and excites vibrations to relatively rotate and move the vibrating body and the driven body when a driving voltage is applied to the vibrating body; And
The case has an intake port and an exhaust port to which negative pressure is supplied,
The exhaust port is provided on one end surface of the case facing the pressure contact portion between the vibrating body and the driven body in a direction parallel to the rotation axis, and is formed inside the case. The rotary driving device , wherein the pressurizing contact portion is located between air flow paths from an intake port to the exhaust port.
前記出力部材は前記ケースに対して回転自在に支持され、前記被駆動体の回転出力が前記出力部材に伝達されることを特徴とする請求項1乃至3のいずれか1項に記載の回転駆動装置。4. The rotational drive according to claim 1, wherein the output member is rotatably supported with respect to the case, and a rotational output of the driven body is transmitted to the output member. 5. apparatus.
前記エンコーダは、前記ケースの内部での空気の流路の中で、前記振動体と前記被駆動体との加圧接触部よりも上流側に設けられていることを特徴とする請求項1乃至9のいずれか1項に記載の回転駆動装置。 An encoder that detects a rotational position of the driven body;
The encoder, in the air flow path inside of the case, to claim 1, characterized in that provided upstream of the pressure contact portion between the vibrator and the driven member 10. The rotation drive device according to any one of 9 above.
前記振動型アクチュエータは、
加圧接触して相対的に回転移動する振動体および被駆動体と、
前記振動体と接合され、駆動電圧が印加されることによって前記振動体と前記被駆動体とを相対的に回転移動させるための振動を前記振動体に励起する電気−機械エネルギ変換素子とを有し、
前記ケースは、吸気口と、負圧が供給される排気口とを有し、
前記ケースの内部に形成される前記吸気口から前記排気口への空気の流路の間に前記振動体と前記被駆動体との加圧接触部が位置し、
前記ケースの内周側の壁面において前記加圧接触部と対向する位置に突起部が設けられていることを特徴とする回転駆動装置。 A rotary drive device comprising: a vibration type actuator; a case in which the vibration type actuator is provided; and an output member that extracts the rotational force of the vibration type actuator to the outside of the case,
The vibration type actuator is
A vibrating body and a driven body that relatively rotate and move under pressure, and
An electro-mechanical energy conversion element that is bonded to the vibrating body and excites vibrations to relatively rotate and move the vibrating body and the driven body when a driving voltage is applied to the vibrating body; And
The case has an intake port and an exhaust port to which negative pressure is supplied,
A pressurizing contact portion between the vibrating body and the driven body is located between air flow paths from the intake port to the exhaust port formed inside the case,
Rotary drive you characterized in that collision raised portion is provided at a position facing the front Symbol pressure contact zone in the wall of the inner peripheral side of the case.
前記螺旋状の溝部は、前記被駆動体の回転方向とは逆の方向に渦流状の気流が生じるように前記突起部に形成されていることを特徴とする請求項12に記載の回転駆動装置。 The driven body is rotationally driven in a specific direction,
It said spiral groove, according to claim 12, characterized in that it is made form the prior SL projections as reverse swirl-like air flow in the direction of the results to the rotational direction of the driven body Rotation drive device.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014145780A JP6448239B2 (en) | 2014-07-16 | 2014-07-16 | Rotation drive device and articulated robot |
PCT/JP2015/067810 WO2016009785A1 (en) | 2014-07-16 | 2015-06-15 | Rotary drive device and articulated robot equipped with the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014145780A JP6448239B2 (en) | 2014-07-16 | 2014-07-16 | Rotation drive device and articulated robot |
Publications (3)
Publication Number | Publication Date |
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JP2016025670A JP2016025670A (en) | 2016-02-08 |
JP2016025670A5 true JP2016025670A5 (en) | 2017-08-24 |
JP6448239B2 JP6448239B2 (en) | 2019-01-09 |
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Family Applications (1)
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JP2014145780A Active JP6448239B2 (en) | 2014-07-16 | 2014-07-16 | Rotation drive device and articulated robot |
Country Status (2)
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JP (1) | JP6448239B2 (en) |
WO (1) | WO2016009785A1 (en) |
Families Citing this family (9)
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WO2017130925A1 (en) * | 2016-01-30 | 2017-08-03 | ライフロボティクス株式会社 | Robot arm mechanism |
DE102016004847A1 (en) | 2016-04-22 | 2017-10-26 | Dürr Systems Ag | Robotic Cooling System |
JP7056353B2 (en) * | 2018-02-28 | 2022-04-19 | セイコーエプソン株式会社 | robot |
US11117252B2 (en) * | 2018-02-28 | 2021-09-14 | Seiko Epson Corporation | Robot |
JP7151166B2 (en) * | 2018-05-18 | 2022-10-12 | セイコーエプソン株式会社 | Grasping device and robot |
CN108843714B (en) * | 2018-05-31 | 2019-06-25 | 中国地质大学(武汉) | Robot leg foot buffer shock-absorbing and self power generation integrated apparatus |
JP6885980B2 (en) * | 2019-03-28 | 2021-06-16 | 平田機工株式会社 | Drive device and transfer device |
CN110426921A (en) * | 2019-07-17 | 2019-11-08 | 深圳市华星光电半导体显示技术有限公司 | A kind of exposure machine |
CN113771097A (en) * | 2021-11-15 | 2021-12-10 | 诺伯特智能装备(山东)有限公司 | Industrial robot signal device based on intelligence is made |
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JPH03105780U (en) * | 1990-02-19 | 1991-11-01 | ||
JPH03253271A (en) * | 1990-03-01 | 1991-11-12 | Canon Inc | Oscillatory wave motor |
JPH11165223A (en) * | 1997-12-08 | 1999-06-22 | Canon Inc | Work supporting device |
JPH11216689A (en) * | 1998-02-02 | 1999-08-10 | Toyota Autom Loom Works Ltd | Conveying carriage |
JP5038029B2 (en) * | 2007-06-14 | 2012-10-03 | ヤマハ発動機株式会社 | robot |
JP5924879B2 (en) * | 2011-07-08 | 2016-05-25 | キヤノン株式会社 | Vibration type actuator |
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2014
- 2014-07-16 JP JP2014145780A patent/JP6448239B2/en active Active
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2015
- 2015-06-15 WO PCT/JP2015/067810 patent/WO2016009785A1/en active Application Filing
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