JP2016008948A - Probe card - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a probe card that expands a region that a plate can freely use.SOLUTION: A probe card P1 includes a wiring base plate 400, a reinforcing board 800, a reinforcing plate 200a, a first bolt 910, and a second bolt 930. The first bolt 910 fixes the reinforcing board 800 and the wiring base plate 400 so that they are practically parallel to each other. The second bolt 930 is fixed to share the axis of the first bolt 910. The second bolt 930 fixes the reinforcing plate 200a to be practically parallel to the wiring base plate 400.

Description

  The present invention relates to a probe card.

  A number of plates are used for the probe card. As this plate, for example, a probe board on which a probe is mounted, a space transformer that changes the pitch interval of the probe to an extended wiring pitch, a wiring board that is provided with an electrode that receives the extended wiring pitch and outputs to the outside, And a reinforcing plate for preventing thermal deformation of the wiring board and the like.

  There are two types of fixing methods for positioning and fixing each plate. One of them is a method in which a through hole is provided in one of two adjacent plates, a screw hole is provided in the other, a bolt is inserted into the through hole of one plate, and screwed into the screw hole of the other plate. . The other is to provide a screw hole in one of the three stacked plates, provide a through hole in the remaining plate, insert a bolt into the through hole in the plate, and screw it into the screw hole in the plate. Is the method.

  One example thereof is described in Patent Document 1. In Patent Document 1, the first bolt is inserted into the support member (reinforcing plate) and the through hole of the wiring board and screwed into the screw hole of the base ring, so that the support member and the wiring board are fixed to the base ring. Yes. The second bolt is inserted into the electrical connector (interposer) and the through hole of the wiring board and is screwed into the screw hole of the support member, whereby the electrical connector and the wiring board are fixed to the support member.

WO2008 / 114464

  When a plurality of plates are positioned and fixed by the fixing method described above, a large number of screw holes and / or through holes are provided in the plate. Since this screw hole and / or through-hole occupies much area of the plate, the free area of the plate is reduced. When the plate is a wiring board, inconveniences such as a reduction in the degree of freedom in wiring design occur.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a probe card capable of expanding a freely usable region of a plate.

  In order to solve the above problems, the probe card of the present invention includes a first plate, a second plate, a third plate, a first bolt, and a second bolt. The first bolt fixes the first plate and the second plate substantially in parallel. The second bolt is fixed coaxially to the first bolt. The second bolt fixes the third plate substantially parallel to the second plate.

  In the case of such a probe card, the first bolt fixes the first plate and the second plate substantially parallel, and the second bolt fixes the third plate substantially parallel to the second plate. Yes. The second bolt is coaxially fixed to the first bolt. Accordingly, since the fixing screw holes and / or through holes provided in the first, second, and third plates are not essential, it is possible to expand the freely usable regions of the first, second, and third plates. it can.

  A screw hole can be provided in one of the tip of the first bolt or the tip of the second bolt, and a male screw can be provided on the other. The second bolt can be coaxially fixed to the first bolt by screwing the male screw portion into the screw hole.

  In the case of such a probe card, the second bolt can be coaxially fixed to the first bolt simply by screwing the male screw portion into the screw hole. Therefore, it becomes easy to fix the second bolt to the first bolt.

1 is a schematic cross-sectional view of a probe card according to an embodiment of the present invention. It is an enlarged view of 2 parts in FIG. 1 of the said probe card. It is an enlarged view of 3 parts in FIG. 1 of the probe card. It is a schematic sectional drawing which shows the 1st design modification of the said probe card. It is a schematic sectional drawing which shows the 2nd design modification of the said probe card. It is a schematic fragmentary sectional view which shows the 3rd design modification of the said probe card.

  Hereinafter, a probe card P1 according to an embodiment of the present invention will be described with reference to FIGS. The probe card P1 includes a plurality of probes 100, a first guide plate 200a, a second guide plate 200b, a reinforcing plate 300 (third plate), a wiring substrate 400 (second plate), an intermediate substrate 500, A plurality of spring probes 600, a main board 700, a reinforcing plate 800 (first plate), and a plurality of fixing mechanisms 900 are provided. Hereinafter, each component of the probe card P1 will be described in detail. The first direction D shown in FIG. 1 corresponds to the height direction of the probe card P1. In FIG. 1, only three probes 100 are shown for the sake of simplification of the drawing.

  The wiring substrate 400 is an ST (space transformer) substrate made of an insulating material. The wiring board 400 has a first surface 401, a second surface 402, and a plurality of through holes 410. The first surface 401 of the wiring substrate 400 is a surface on one side of the wiring substrate 400 in the first direction D. The second surface 402 of the wiring substrate 400 is the surface on the other side in the first direction D of the wiring substrate 400 (the back side of the first surface). The through-hole 410 penetrates the wiring board 400 in the first direction D as best shown in FIGS.

  The intermediate substrate 500 is a substrate made of an insulating material as shown in FIG. 1, and is disposed on the first surface 401 of the wiring substrate 400. The intermediate substrate 500 has a plurality of through holes 510 and a plurality of accommodation holes 520. The through hole 510 penetrates the intermediate substrate 500 in the first direction D as best shown in FIGS. 2 and 3. The through holes 510 are arranged so as to communicate with the through holes 410 of the wiring board 400. The diameter of the through hole 510 is larger than the diameter of the through hole 410. As shown in FIG. 1, the accommodation hole 520 penetrates the central portion of the intermediate substrate 500 in the first direction D.

  As shown in FIG. 1, the main board 700 is a printed board and is disposed on the intermediate board 500. As shown in FIGS. 1 to 3, the main substrate 700 has a plurality of through holes 710. The through hole 710 penetrates the main substrate 700 in the first direction D as best shown in FIGS. 2 and 3. The through holes 710 are arranged so as to communicate with the through holes 510 of the intermediate substrate 500.

  Each spring probe 600 is accommodated in the accommodation hole 520 of the intermediate substrate 500 and interposed between the main substrate 700 and the wiring substrate 400 in a compressed state. As a result, the spring probe 600 electrically connects the main board 700 and the wiring board 400.

  As shown in FIG. 1, the reinforcing plate 800 is a plate-like member (for example, a plate made of stainless steel or the like) harder than the main substrate 700 and is disposed on the main substrate 700. In this way, the reinforcing plate 800 is disposed substantially parallel to the wiring board 400 at one side in the first direction D of the wiring board 400. A main substrate 700 and an intermediate substrate 500 are interposed between the reinforcing plate 800 and the wiring substrate 400.

  The reinforcing plate 800 has a plurality of screw holes 810. The screw hole 810 penetrates the reinforcing plate 800 in the first direction D as best shown in FIGS. The screw holes 810 are arranged so as to communicate with the through holes 710 of the main board 700. Each screw hole 810 has a large diameter hole 811, a small diameter hole 812, and an edge portion 813. A thread groove is formed on the inner peripheral surface of the large-diameter hole 811. The small diameter hole 812 is provided on the other side in the first direction D of the large diameter hole 811 so as to communicate with the large diameter hole 811. The diameter of the small diameter hole 812 is smaller than the diameter of the large diameter hole 811. The edge 813 is an edge on one side of the small diameter hole 812 in the first direction D.

  As shown in FIG. 1, the reinforcing plate 300 is disposed on the other side of the wiring substrate 400 in the first direction D at a distance from the wiring substrate 400 in parallel. The reinforcing plate 300 is made of ceramic. The reinforcing plate 300 has first and second surfaces, a plurality of through holes 310 and 320, and an insertion hole 330. The first surface of the reinforcing plate 300 is a surface on one side of the reinforcing plate 300 in the first direction D. The second surface of the reinforcing plate 300 is the surface on the other side in the first direction D of the reinforcing plate 300 (the back side of the first surface).

  The through-hole 310 penetrates the reinforcing plate 300 in the first direction D as best shown in FIG. The through hole 310 is arranged on the other side in the first direction D of the through hole 410 on the outside of the wiring substrate 400 in FIG. The through hole 310 has a small diameter hole and a large diameter hole. The diameter of the small diameter hole of the through hole 310 is substantially the same as the diameter of the through hole 410. The large diameter hole is provided so as to communicate with the small diameter hole. The diameter of the large diameter hole is larger than the diameter of the small diameter hole.

  The through hole 320 penetrates the reinforcing plate 300 in the first direction D as best shown in FIG. The through hole 320 is arranged on the other side in the first direction D of the through hole 410 on the inner side of the wiring substrate 400 in FIG. The diameter of the through hole 320 is substantially the same as the diameter of the through hole 410. As shown in FIG. 1, the insertion hole 330 passes through the reinforcing plate 300 in the first direction.

  The first guide plate 200a is disposed between the wiring board 400 and the reinforcing plate 300 as shown in FIGS. The first guide plate 200a has an insulating property. The first guide plate 200a has a plurality of through holes 210a and a plurality of guide holes 220a. The through hole 210a penetrates the first guide plate 200a in the first direction D. The diameter of the through hole 210 a is substantially the same as the diameter of the through hole 410 of the wiring board 400. The through hole 210 a is disposed on the other side in the first direction D of the through hole 410 of the wiring board 400. The guide hole 220a passes through the first guide plate 200a in the first direction D as shown in FIG. The guide hole 220a is arranged according to the position of the probe 100. The diameter of the guide hole 220a is slightly larger than the outer diameter of the probe 100.

  As shown in FIG. 1, the second guide plate 200b is fixed to the first surface of the reinforcing plate 300 with a resin. The second guide plate 200b has an insulating property. The second guide plate 200b has a plurality of through holes 210b and a plurality of guide holes 220b. The through hole 210b penetrates the second guide plate 200b in the first direction D as best shown in FIG. The through hole 210 b communicates with the through hole 320 of the reinforcing plate 300. The diameter of the through hole 210 b is larger than the diameter of the through hole 320. The guide hole 220b passes through the second guide plate 200b in the first direction D as shown in FIG. The guide hole 220b is arranged according to the position of the probe 100. The guide hole 220 b communicates with the insertion hole 330 of the reinforcing plate 300. The diameter of the guide hole 220b is slightly larger than the outer diameter of the probe 100.

  The probe 100 is a needle made of a conductive material as shown in FIG. Each probe 100 has a first end on one side in the first direction D and a second end on the other side in the first direction D. The first end portion is guided by the guide hole 220 a of the first guide plate 200 a and is connected to the wiring board 400. The second end is inserted into the insertion hole 330 and is guided by the corresponding guide hole 220b.

  As shown in FIGS. 2 and 3, each fixing mechanism 900 has a first bolt 910, a fixing nut 920, and a second bolt 930. The fixing nut 920 has an upper end portion 921 and a lower end portion 922. A screw groove is formed on the outer peripheral surface of the upper end portion 921. The upper end 921 is screwed to the large diameter hole 811 of the screw hole 810 of the reinforcing plate 800. The screw grooves of the upper end portion 921 and the large diameter hole 811 are formed such that the fixing nut 920 moves relative to the other side in the first direction D with respect to the reinforcing plate 800 when screwed. The lower end 922 is a cylinder connected to the upper end 921. The outer diameter of the lower end 922 is smaller than the outer diameter of the upper end 921 and larger than the inner diameter of the small diameter hole 812 of the screw hole 810 of the reinforcing plate 800. The lower end portion 922 is in contact with the edge portion 813 of the screw hole 810 of the reinforcing plate 800. A screw hole 9221 is provided at the center of the lower end 922.

  The first bolt 910 positions and fixes the reinforcing plate 800 and the wiring board 400 substantially in parallel. The first bolt 910 is accommodated in the through hole 510 of the intermediate substrate 500, the through hole 710 of the main substrate 700, and the screw hole 810 of the reinforcing plate 800. The first bolt 910 has a fixing part 911 and a tip part 912.

  The tip 912 is fixed to the edge of the through hole 410 of the first surface 401 of the wiring board 400 with a resin. In this way, the tip 912 of the first bolt 910 is fixed to the wiring board 400. A screw hole 9121 is provided in the distal end portion 912. The screw hole 9121 communicates with the through hole 410 of the wiring board 400.

  The fixing portion 911 is a male screw portion provided at the rear end portion of the first bolt 910. The fixing portion 911 is screwed into the screw hole 9221 of the fixing nut 920. Thus, the rear end portion of the first bolt 910 is fixed to the reinforcing plate 800. The screw grooves of the fixing portion 911 and the screw hole 9221 are formed such that the first bolt 910 moves relatively to one side in the first direction D with respect to the reinforcing plate 800 when screwed. When the fixing nut 920 is screwed into the screw hole 810 of the reinforcing plate 800 and moves relative to the other side in the first direction D with respect to the reinforcing plate 800, the fixing portion 911 is screwed into the screw hole 9221 of the fixing nut 920. The first bolt 910 is moved relatively to one side in the first direction D with respect to the reinforcing plate 800. In this manner, the tightening amount of the fixing portion 911 of the first bolt 910 with respect to the screw hole 9221 of the fixing nut 920 can be adjusted. By adjusting (changing) the tightening amount, the tightening force with respect to the main substrate 700 (plate) and the intermediate substrate 500 (plate) sandwiched between the reinforcing plate 800 and the wiring substrate 400 can be varied. .

  The second bolt 930 is fixed coaxially to the first bolt 910, and the reinforcing plate 300 is positioned and fixed substantially parallel to the wiring board 400. The second bolts 930 of the fixing mechanism 900 on the outside of FIG. 1 in the fixing mechanism 900 are accommodated in the through holes 310 of the reinforcing plate 300, the through holes 410 of the wiring substrate 400, and the through holes 510 of the intermediate substrate 500. The second bolt 930 of the fixing mechanism 900 shown in the figure includes a through hole 210b of the second guide plate 200b, a through hole 320 of the reinforcing plate 300, a through hole 210a of the first guide plate 200a, a through hole 410 of the wiring board 400, and the middle. The substrate 500 is accommodated in the through hole 510.

  The second bolt 930 has a male screw portion 931 and a fixing portion 932. The male screw portion 931 is provided at the tip of the second bolt 930. The outer diameter of the male screw portion 931 is smaller than the inner diameter of the through hole 410 of the wiring board 400. The fixing portion 932 is a disk-shaped head provided at the rear end portion of the second bolt 930. The outer diameter of the fixing portion 932 is larger than the outer diameter of the portion other than the fixing portion 932 of the second bolt 930 and larger than the diameters of the small diameter hole of the through hole 310 and the through hole 320 of the reinforcing plate 300.

  The male screw portion 931 of the second bolt 930 of the outer fixing mechanism 900 is inserted into the through hole 310 of the reinforcing plate 300 and the through hole 410 of the wiring board 400 as shown in FIG. Are screwed into the screw holes 9121 of the front end portion 912 of the. As shown in FIG. 3, the male screw portion 931 of the second bolt 930 of the inner fixing mechanism 900 includes a through hole 210b of the second guide plate 200b, a through hole 320 of the reinforcing plate 300, and the first guide plate 200a. Are inserted into the through hole 210a of the wiring board 400 and the through hole 410 of the wiring board 400, and are screwed into the screw holes 9121 of the tip 912 of the first bolt 910. In this way, the second bolt 930 is fixed coaxially to the first bolt 910.

  As shown in FIG. 2, the fixing portion 932 of the second bolt 930 of the outer fixing mechanism 900 is inserted into the large-diameter hole of the through-hole 310 of the reinforcing plate 300, and the bottom surface of the large-diameter hole (that is, the reinforcing plate). 300) from the other side in the first direction D. As shown in FIG. 3, the fixing portion 932 of the second bolt 930 of the inner fixing mechanism 900 is inserted into the through hole 210 b of the second guide plate 200 b and is inserted into the reinforcing plate 300 on the other side in the first direction D. Abut. The first guide plate 200 a is sandwiched between the reinforcing plate 300 that is in contact with the fixing portion 932 and the wiring board 400.

  The screw grooves of the male screw portion 931 and the screw hole 9121 are formed so that the second bolt 930 moves relatively to one side in the first direction D with respect to the reinforcing plate 300 when screwed. When the male screw portion 931 of the second bolt 930 is screwed into the screw hole 9121 of the tip portion 912 of the first bolt 910, the second bolt 930 is relative to one side in the first direction D with respect to the reinforcing plate 300. The fixing portion 932 of the second bolt 930 comes into contact with the reinforcing plate 300 from the other side in the first direction D. The tightening amount of the male screw portion 931 of the second bolt 930 with respect to the screw hole 9121 of the first bolt 910 can be adjusted. By adjusting (changing) the tightening amount, the tightening force with respect to the first guide plate 200a (plate) sandwiched between the wiring board 400 and the reinforcing plate 300 can be varied.

  The probe card P1 as described above has the following technical features. First, the freely usable areas of the reinforcing plate 300, the first guide plate 200a, the second guide plate 200b, the wiring board 400, the intermediate board 500, the main board 700, and the reinforcing board 800 can be enlarged. This is because, by adopting the above-described fixing mechanism 900, the reinforcing plate 300, the first guide plate 200a, the second guide plate 200b, the wiring board 400, the intermediate board 500, and the main board 700 have holes for the fixing mechanism 900. This is because only the through holes are provided, and the reinforcing plate 800 is only provided with the screw holes 810 as the holes for the fixing mechanism 900. Therefore, the number of through holes and / or screw holes that occupy the reinforcing plate 300, the first guide plate 200a, the second guide plate 200b, the wiring board 400, the intermediate board 500, the main board 700, and the reinforcing board 800 is reduced. And the area that can be freely used can be expanded. In particular, the wiring board 400 and the main board 700 can improve the degree of freedom of wiring by using a freely usable area as a wiring area.

  Second, it is possible to adjust the tightening force on the plate between the reinforcing plate 800 and the wiring board 400 only by adjusting the tightening amount of the fixing nut 920 of the fixing portion 911 of the first bolt 910 to the screw hole 9221. . On the other hand, the tightening force on the plate between the wiring board 400 and the reinforcing plate 300 is adjusted only by adjusting the tightening amount of the male screw portion 931 of the second bolt 930 to the screw hole 9121 of the first bolt 910. Can do. In this way, the clamping force on the plate between the reinforcing plate 800 and the wiring board 400 and the clamping force on the plate between the wiring board 400 and the reinforcing plate 300 can be individually adjusted.

  Third, the parts of the probe card P1 can be easily replaced. Since the fixing portion 911 of the first bolt 910 is removed from the screw hole 9221 of the fixing nut 920 simply by removing the fixing nut 920 from the screw hole 810 of the reinforcing plate 800, the reinforcing plate 800, the main board 700 and / or the intermediate board 500 are removed. Can be easily replaced. Further, the reinforcing plate 300, the first guide plate 200a, and / or the probe 100 can be replaced simply by removing the second bolt 930 from the screw hole 9121 of the first bolt 910.

  Fourth, the tightening torque generated when the fixing nut 920 is screwed into the screw hole 810 of the reinforcing plate 800 and the fixing portion 911 of the first bolt 910 is screwed into the screw hole 9221 of the fixing nut 920 is second. Transmission to the reinforcing plate 300 or the reinforcing plate 300 and the first guide plate 200a via the bolt 930 can be prevented. The tightening torque generated when the male screw portion 931 of the second bolt 930 is screwed into the screw hole 9121 of the first bolt 910 is transmitted to the reinforcing plate 800, the main board 700, and the intermediate board 500 via the first bolt 910. Can be prevented. This is because the front end portion 912 of the first bolt 910 is fixed to the second surface 402 of the wiring board 400.

  The probe card described above is not limited to the above-described embodiment, and can be arbitrarily changed in design within the scope of the claims. Details will be described below.

  The second plate of the present invention is not limited to the wiring board 400, and can be another plate such as a main board. The through hole of the second plate of the present invention can be omitted. If omitted, the tip of the second bolt may be screwed to the screw hole of the first bolt outside the second plate. The second plate may be sandwiched directly or indirectly between the first plate and the third plate. This can also be applied to design variations described later.

  The first plate of the present invention can be arbitrarily changed in design as long as it is arranged on one side of the second plate of the above-described embodiment or design modification. The third plate of the present invention can be arbitrarily changed in design as long as it is arranged on the other side of the second plate of the above-described embodiment or design modification.

  For example, as in the probe card P2 shown in FIG. 4, the third plate 200 ′ can be a guide plate provided with a guide hole 220 ′ for guiding the probe 100. Also in this case, the tip of the second bolt 930 is inserted into the through hole 210 ′ of the third plate 200 ′ and the through hole 410 of the wiring board 400, and screwed into the screw hole of the first bolt 910. The fixing portion 932 of the second bolt 930 contacts the third plate 200 '. The through hole 210 ′ has the same configuration as the through hole 310. The reinforcing plate 300 can also be a guide plate provided with a guide hole for guiding the probe 100. This guide plate can also be integrated with the second guide plate 200b.

  Further, like the probe card P3 shown in FIG. 5, the third plate 200 ″ can be a probe substrate on which the probe 100 ′ is provided. Also in this case, the tip of the second bolt 930 is inserted into the through hole 210 ″ of the third plate 200 ″ and the through hole 410 of the wiring board 400, and screwed into the screw hole of the first bolt 910. The fixing part 932 of the second bolt 930 contacts the third plate 200 ″. The through hole 210 ″ has the same configuration as the through hole 310.

  Furthermore, the third plate can be the second guide plate 200b. In this case, the fixing portion 932 of the second bolt 930 contacts the second guide plate 200b.

  One or a plurality of fourth plates may be interposed between the first and second plates. One or a plurality of spacers may be interposed between the first and second plates. One or a plurality of spacers may be interposed between the first and fourth plates, between the second and fourth plates, and / or between a plurality of fourth plates. In this case, a plate and / or a spacer may be sandwiched between the first and second plates. For example, between the reinforcing plate 800 and the main board 700, between the main board 700 and the intermediate board 500, between the intermediate board 500 and the wiring board 400, and / or between the main board 700 and the wiring board 400, and A spacer may be interposed.

  One or a plurality of fifth plates may be interposed between the second and third plates. One or a plurality of spacers may be interposed between the second and third plates. One or a plurality of spacers may be interposed between the second and fifth plates, between the third and fifth plates, and / or between a plurality of fifth plates. In this case, a plate and / or a spacer may be sandwiched between the second and third plates. For example, there are plates and / or spacers between the reinforcing plate 300 and the wiring board 400, between the first guide plate 200a and the wiring board 400, and / or between the first guide plate 200a and the reinforcing plate 300. It may be interposed.

  The first plate may be provided on the first surface of the second plate so as to be positioned on one side of the second plate of the embodiment or the design modification. The third plate may be provided on the first surface of the second plate so as to be positioned on the other side of the second plate of the embodiment or the design modification.

  The first bolt of the present invention can be arbitrarily changed in design as long as the first plate can be fixed substantially parallel to the second plate. A male screw portion may be provided at the tip of the first bolt. In this case, the male screw portion at the tip portion of the first bolt is screwed into the screw hole provided at the tip portion of the second bolt. Also, it is possible to adopt a configuration in which a fitting hole is provided in one of the tip of the first bolt and the tip of the second bolt, and a fitting part that fits into the fitting hole is provided in the other. It is.

  The tip of the first bolt of the present invention can be configured to be fixed to the second plate. For example, the tip of the first bolt may be fitted into the fitting hole of the second plate, or may be screwed into the screw hole of the second plate. The tip of the first bolt of the present invention may simply be in contact. In this case, the state in which the tip of the first bolt is in contact with the first surface of the first plate is maintained by fixing the tip of the second bolt to the barrel on the tip of the first bolt. And good. Moreover, the 1st volt | bolt of this invention can also be set as the structure inserted in the through-hole of a 1st plate.

  The fixing part of the 1st volt | bolt of this invention should just be fixed to the said 1st plate. The fixing portion of the first bolt may be fitted into the fitting hole of the first plate, or may be screwed into the screw hole of the first plate. Moreover, it is good also as a structure which the fixing | fixed part of a 1st volt | bolt contacts the said 1st plate from the one side of a 1st direction like the fixing | fixed part 932 of the 2nd volt | bolt 930 of the said Example.

  The fixing nut of the present invention is omitted when the first bolt is directly fixed to the second plate. The fixing nut of the present invention can be arbitrarily changed in design as long as a screw groove is provided on the outer peripheral surface of the fixing nut and a screw hole is provided in the center of the fixing nut.

  The second bolt of the present invention can be arbitrarily modified as long as it is fixed coaxially to the first bolt and the third plate can be fixed substantially parallel to the second plate. It is. The tip of the second bolt of the present invention may be fixed to the second plate. For example, the tip of the second bolt may be fitted into the fitting hole of the second plate, or may be screwed into the screw hole of the second plate. The tip of the second bolt of the present invention may simply be in contact. In these cases, the tip of the second bolt may be fixed to the tip of the first bolt inserted into the fitting hole, screw hole or through hole of the second plate.

  The fixing part of the 2nd volt | bolt of this invention should just be fixed to the said 3rd plate. The fixing portion of the second bolt may be fitted into the fitting hole of the third plate, or may be screwed into the screw hole of the third plate. In addition, the fixing portion of the second bolt is screwed into the screw hole of the fixing nut screwed to the screw hole of the third plate, like the fixing portion 911 of the first bolt 910 of the above embodiment. Also good.

  Moreover, the probe card of this invention can be set as the structure further provided with plates other than the above-mentioned 1st-5th plate, and volt | bolts other than an above-described 1st, 2nd volt | bolt. The bolt may be configured to be coaxially fixed to a bolt on the upper side of the bolt. The bolt also has a tip portion and a fixing portion similar to the tip portion and the fixing portion of the first and second bolts described above. An example of this is shown in FIG. The fixing portion 932 of the second bolt 930 ′ is in contact with the third plate 200 ″ ″. The through hole 210 ″ ″ has the same configuration as the through hole 310. The fixing portion 932 is provided with a screw hole 933 ′. The distal end portion 941 of the third bolt 940 is provided with a male screw portion that is inserted into a through hole 1010 of the sixth plate 1000 and a through hole 1110 of the seventh plate 1100, which will be described later, and screwed into the screw hole 933 ′. Yes. The fixing portion 942 of the third bolt 940 is provided at the rear end portion of the third bolt 940. The fixing portion 942 has the same configuration as the fixing portion 932 of the second bolt 930. The fixing portion 942 is in contact with the sixth plate 1000. In this way, the third bolt 940 fixes the sixth plate 1000 substantially parallel to the third plate 200 ″ ″. A seventh plate 1100 is interposed between the third plate 200 ″ ″ and the sixth plate 1000. A spacer can be interposed between the plates.

  The coaxial fixing of the second bolt to the first bolt in the present invention includes that the second bolt is coaxially fixed to the second bolt via a connecting member. One end of the connecting member in the length direction can be configured similarly to the tip of the second bolt and fixed to the tip of the first bolt. The other end of the connecting member in the length direction can be configured similarly to the tip of the first bolt and can be fixed to the tip of the second bolt. Also in this case, it is preferable that one or a plurality of plates arranged between the first and third plates fixed to the fixing portions of the first and second bolts are sandwiched therebetween. It is possible to interpose a spacer between these plates.

  Note that the materials, shapes, dimensions, number, arrangement, etc. constituting each component of the probe card in the above embodiment are examples, and the design can be arbitrarily changed as long as the same function can be realized. Is possible. The above-described embodiments and design modification examples can be combined with each other as long as they do not contradict each other. The present invention can also be used to fix a plurality of plates other than the probe card.

P1... Probe card 100... Probe 200a ... First guide plate 200b ... Second guide plate 300 ... ... Reinforcement plate (third plate)
400... Wiring board (second plate)
410 ... Through hole 500 ... Intermediate substrate 510 ... Through hole 600 ... Spring probe 700 ... Main substrate 710 ... Through hole 800 ... Reinforcing plate (first plate) )
810... Screw hole 900... Fixing mechanism 910... First bolt 911 .. Fixing portion 912... Tip portion 9121.・ Lower end portion 9221 ・ Screw hole 930... Second bolt 931... Tip portion 932.

Claims (2)

A first plate;
A second plate;
A third plate;
A first bolt for fixing the first plate and the second plate substantially in parallel;
A probe card, comprising: a second bolt that is fixed coaxially to the first bolt and that fixes the third plate substantially parallel to the second plate. The probe card according to claim 1,
A screw hole is provided on one of the tip of the first bolt or the tip of the second bolt, and a male screw is provided on the other;
The probe card, wherein the second bolt is coaxially fixed to the first bolt by screwing the male screw into the screw hole.

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